TWI545611B - 多射束曝光裝置以及用於決定其內的兩射束之間的距離之方法與感測器 - Google Patents
多射束曝光裝置以及用於決定其內的兩射束之間的距離之方法與感測器 Download PDFInfo
- Publication number
- TWI545611B TWI545611B TW100141405A TW100141405A TWI545611B TW I545611 B TWI545611 B TW I545611B TW 100141405 A TW100141405 A TW 100141405A TW 100141405 A TW100141405 A TW 100141405A TW I545611 B TWI545611 B TW I545611B
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Links
- 238000000034 method Methods 0.000 title claims description 42
- 230000004888 barrier function Effects 0.000 claims description 110
- 230000000903 blocking effect Effects 0.000 claims description 70
- 239000002245 particle Substances 0.000 claims description 41
- 239000013598 vector Substances 0.000 claims description 27
- 230000007704 transition Effects 0.000 claims description 15
- 238000005520 cutting process Methods 0.000 claims description 7
- 230000004044 response Effects 0.000 claims description 7
- 238000005259 measurement Methods 0.000 description 32
- 238000010894 electron beam technology Methods 0.000 description 18
- 238000001459 lithography Methods 0.000 description 15
- 238000000926 separation method Methods 0.000 description 14
- 229910019655 synthetic inorganic crystalline material Inorganic materials 0.000 description 12
- 238000013461 design Methods 0.000 description 11
- 239000011248 coating agent Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 238000006073 displacement reaction Methods 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000000609 electron-beam lithography Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 206010070834 Sensitisation Diseases 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- JNDMLEXHDPKVFC-UHFFFAOYSA-N aluminum;oxygen(2-);yttrium(3+) Chemical compound [O-2].[O-2].[O-2].[Al+3].[Y+3] JNDMLEXHDPKVFC-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
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- 230000000295 complement effect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000002039 particle-beam lithography Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000008313 sensitization Effects 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 229910019901 yttrium aluminum garnet Inorganic materials 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
- H01J37/3045—Object or beam position registration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical, image processing or photographic arrangements associated with the tube
- H01J37/224—Luminescent screens or photographic plates for imaging; Apparatus specially adapted therefor, e. g. cameras, TV-cameras, photographic equipment or exposure control; Optical subsystems specially adapted therefor, e. g. microscopes for observing image on luminescent screen
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
- H01J37/3177—Multi-beam, e.g. fly's eye, comb probe
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2446—Position sensitive detectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/245—Detection characterised by the variable being measured
- H01J2237/24571—Measurements of non-electric or non-magnetic variables
- H01J2237/24578—Spatial variables, e.g. position, distance
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/304—Controlling tubes
- H01J2237/30433—System calibration
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- Nanotechnology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- Mathematical Physics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Electron Beam Exposure (AREA)
- Electron Sources, Ion Sources (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US41339610P | 2010-11-13 | 2010-11-13 | |
| US41445910P | 2010-11-17 | 2010-11-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201230132A TW201230132A (en) | 2012-07-16 |
| TWI545611B true TWI545611B (zh) | 2016-08-11 |
Family
ID=44993550
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW100141405A TWI545611B (zh) | 2010-11-13 | 2011-11-14 | 多射束曝光裝置以及用於決定其內的兩射束之間的距離之方法與感測器 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US9030675B2 (enExample) |
| EP (2) | EP3640968B1 (enExample) |
| JP (1) | JP5882348B2 (enExample) |
| RU (1) | RU2576018C2 (enExample) |
| TW (1) | TWI545611B (enExample) |
| WO (1) | WO2012062931A1 (enExample) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010134026A2 (en) * | 2009-05-20 | 2010-11-25 | Mapper Lithography Ip B.V. | Dual pass scanning |
| JP6239595B2 (ja) | 2012-05-14 | 2017-11-29 | マッパー・リソグラフィー・アイピー・ビー．ブイ． | マルチ小ビーム露光装置において小ビーム位置を測定するための方法及び２つの小ビーム間の距離を測定するための方法 |
| JP6238176B2 (ja) * | 2013-03-06 | 2017-11-29 | ハイキュー プロプライエタリー リミテッド | ナノ体を形成するための装置 |
| US10008364B2 (en) * | 2015-02-27 | 2018-06-26 | Kla-Tencor Corporation | Alignment of multi-beam patterning tool |
| US9484188B2 (en) | 2015-03-11 | 2016-11-01 | Mapper Lithography Ip B.V. | Individual beam pattern placement verification in multiple beam lithography |
| US10418324B2 (en) | 2016-10-27 | 2019-09-17 | Asml Netherlands B.V. | Fabricating unique chips using a charged particle multi-beamlet lithography system |
| EP3559752A4 (en) * | 2016-12-23 | 2020-08-19 | ASML Netherlands B.V. | PRODUCTION OF UNIQUE CHIPS WITH A LITHOGRAPHY SYSTEM WITH MULTIPLE CARRIER PART JETS |
| US11740356B2 (en) * | 2020-06-05 | 2023-08-29 | Honeywell International Inc. | Dual-optical displacement sensor alignment using knife edges |
| EP4199031A1 (en) * | 2021-12-17 | 2023-06-21 | ASML Netherlands B.V. | Charged-particle optical apparatus and projection method |
| IL313105A (en) * | 2021-12-17 | 2024-07-01 | Asml Netherlands Bv | Optical device with charged particles and projection method |
| US12380596B2 (en) * | 2021-12-23 | 2025-08-05 | Fei Company | Method and system for determining beam position |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3173769D1 (en) | 1980-10-09 | 1986-03-27 | Dainippon Printing Co Ltd | Photomask blank and photomask |
| JPS62260335A (ja) * | 1986-05-06 | 1987-11-12 | Hitachi Ltd | パタ−ン検査方法および装置 |
| US5136169A (en) * | 1991-04-05 | 1992-08-04 | Massachusetts Institute Of Technology | Energy beam locating |
| KR970062820A (ko) | 1996-02-28 | 1997-09-12 | 고노 시게오 | 투영노광장치 |
| US5892230A (en) * | 1997-05-29 | 1999-04-06 | Massachusetts Institute Of Technology | Scintillating fiducial patterns |
| US6791094B1 (en) | 1999-06-24 | 2004-09-14 | Varian Semiconductor Equipment Associates, Inc. | Method and apparatus for determining beam parallelism and direction |
| WO2001048560A1 (en) | 1999-12-28 | 2001-07-05 | Toshiba Tec Kabushiki Kaisha | Image forming device and fixing device |
| CN1936703B (zh) | 2002-06-18 | 2011-12-07 | Hoya株式会社 | 灰调掩模及其制造方法 |
| JP4150547B2 (ja) * | 2002-08-02 | 2008-09-17 | 株式会社日立ハイテクノロジーズ | マルチビーム計測方法及びマルチビーム装置 |
| CN100524026C (zh) | 2002-10-25 | 2009-08-05 | 迈普尔平版印刷Ip有限公司 | 光刻系统 |
| US6919570B2 (en) | 2002-12-19 | 2005-07-19 | Advanced Electron Beams, Inc. | Electron beam sensor |
| JP4184782B2 (ja) * | 2002-12-20 | 2008-11-19 | 株式会社日立製作所 | マルチ電子ビーム装置およびそれに用いられるマルチ電子ビーム電流の計測・表示方法 |
| JP3962778B2 (ja) * | 2004-06-02 | 2007-08-22 | 株式会社日立ハイテクノロジーズ | 電子ビーム検出器、並びにそれを用いた電子ビーム描画方法及び電子ビーム描画装置 |
| JP2007042803A (ja) | 2005-08-02 | 2007-02-15 | Honda Motor Co Ltd | イオン注入マスクおよびその製造方法、並びにイオン注入マスクを用いた炭化珪素半導体装置およびその製造方法 |
| EP1943662B1 (en) * | 2005-09-15 | 2016-11-23 | Mapper Lithography IP B.V. | Lithography system, sensor and measuring method |
| US7868300B2 (en) | 2005-09-15 | 2011-01-11 | Mapper Lithography Ip B.V. | Lithography system, sensor and measuring method |
| US7521685B2 (en) * | 2006-01-18 | 2009-04-21 | General Electric Company | Structured scintillator and systems employing structured scintillators |
| JP5301312B2 (ja) | 2008-03-21 | 2013-09-25 | 株式会社ニューフレアテクノロジー | 荷電粒子ビーム描画装置の較正用基板及び描画方法 |
| NL1037820C2 (en) | 2010-03-22 | 2011-09-23 | Mapper Lithography Ip Bv | Lithography system, sensor, sensor surface element and method of manufacture. |
-
2011
- 2011-11-14 RU RU2013126794/07A patent/RU2576018C2/ru active
- 2011-11-14 WO PCT/EP2011/070032 patent/WO2012062931A1/en not_active Ceased
- 2011-11-14 EP EP19214475.6A patent/EP3640968B1/en active Active
- 2011-11-14 TW TW100141405A patent/TWI545611B/zh active
- 2011-11-14 JP JP2013538225A patent/JP5882348B2/ja active Active
- 2011-11-14 US US13/295,159 patent/US9030675B2/en active Active
- 2011-11-14 EP EP11784636.0A patent/EP2638562B1/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| EP2638562A1 (en) | 2013-09-18 |
| RU2013126794A (ru) | 2014-12-20 |
| EP3640968A1 (en) | 2020-04-22 |
| EP2638562B1 (en) | 2020-04-01 |
| WO2012062931A1 (en) | 2012-05-18 |
| RU2576018C2 (ru) | 2016-02-27 |
| US20120293810A1 (en) | 2012-11-22 |
| US9030675B2 (en) | 2015-05-12 |
| EP3640968B1 (en) | 2024-06-12 |
| JP5882348B2 (ja) | 2016-03-09 |
| TW201230132A (en) | 2012-07-16 |
| JP2014501037A (ja) | 2014-01-16 |
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