TWI534062B - A rotary vibrator and a vibration type conveying device using the rotary vibrator - Google Patents

Description

Rotary vibrator and vibrating conveyor using the same

The present invention relates to a rotary vibrator and a vibrating conveyor using the same.

Usually, in a vibrating conveyor such as a bowl feeder provided with a spiral conveying path, a rotary vibrator is used in order to reciprocate the bowl-shaped conveying body in a direction in which it rotates around the axis. As the rotary vibrator, for example, a rotary vibrator provided with a longitudinal excitation structure, which has a support body and vibrations connected to the support body via an excitation unit, is known as disclosed in Patent Document 1 below. The body (upper vibration disk) is provided with a plurality of excitation portions around the axis as the excitation unit, and the excitation unit is configured to erect the piezoelectric actuator provided on the support body obliquely upward The posture is mounted, and an amplification spring is connected to the upper end of the piezoelectric actuator, and the amplification spring is coupled to the vibrating body.

Using the plurality of excitation portions, the vibrating body is inclined in a direction of rotation about the axis and toward a horizontal plane relatively perpendicular to the axis. Since the vibration is performed, the conveyed object can be transported upward from the center of the center of the transport body (transport bowl) provided on the vibrating body along the spiral transport path formed on the inner peripheral surface.

In the above-described rotary vibrator provided with the longitudinal excitation structure, the excitation portion formed by connecting the piezoelectric actuator and the amplification spring in series between the support and the vibrating body is mounted so as to stand up obliquely upward, Since the height of the excitation structure is increased, it is difficult to miniaturize the structure in the height direction of the device. Further, since the vibrating body connected to the upper end of the amplifying spring of the excitation unit is easily vibrated in an unstable manner in the vertical direction, there is a problem in that when the conveying speed is high, the conveying object jumps up and down or the conveying posture changes. It is unstable.

Therefore, a rotary vibrator provided with a lateral excitation structure as shown in the following Patent Documents 2 to 4 has been developed in which a piezoelectric actuator and a widening spring are connected in series at a plurality of positions around the axis. The excitation unit is disposed to extend in the radial direction between the support and the vibrating body. In the rotary vibrator, the structure can be miniaturized in the height direction of the device, and the vibrating body can be vibrated along an arc centered on the axis, thereby improving the driving efficiency, and also having the advantage that : Since the unstable vibration in the vertical direction can be reduced, it is possible to suppress the vehicle from jumping and stabilize the conveyance posture.

[Previous Technical Literature]

[Patent Literature]

Patent Document 1: Japanese Gazette, Special Kaikai No. 4-189214

Patent Document 2: Japanese Gazette, Special Open 2007-161454

Patent Document 3: Japanese Gazette, License No. 4280291

Patent Document 4: Japanese Gazette, Charter No. 4532591

However, in the above-described rotary vibrator provided with the lateral excitation structure, there is a problem in that the inner end portion of the plurality of excitation portions disposed around the axis must be fixed to the central portion of the support body, and The outer end portion of the vibrating portion is connected to the outer peripheral portion of the vibrating body. Therefore, in order to prevent the inner end portions of the plurality of vibrating portions from interfering with each other, the inner end portion of the vibrating portion cannot be disposed close to the axis located at the center of the supporting body. In addition, the length in the radial direction of the excitation unit is limited by the relationship with the resonance frequency of the rotary vibrator, and the length in the radial direction of the excitation unit also affects the amplitude of the vibrating body, so that it is not easy. The structural length of the excitation portion is shortened, resulting in an increase in the outer diameter of the rotary vibrator.

Further, since the length of the rotary vibrator is limited in the radial direction, the lateral excitation structure cannot sufficiently ensure the length of each excitation portion as compared with the longitudinal excitation structure, and therefore, in order to obtain a desired spring constant, The thickness of the piezoelectric actuator must be reduced. However, when the thickness of the piezoelectric actuator is reduced, there is a problem that it is difficult to secure the supporting rigidity of the vibrating body and the conveying body and the risk of damage of the piezoelectric body is increased.

Further, in order to stably vibrate the vibrating body and the transport body and ensure a sufficient amplitude, it is necessary to make the mass of the support body somewhat larger than the mass of the vibrating body or the transport body, but when the inner circumference of the plurality of vibrating portions is to be When the side portions are disposed at positions close to the axis, the inner peripheral side portions of the plurality of excitation portions are close to each other, and the inner peripheral portion of the plurality of excitation portions must be concave in order to avoid the inner peripheral side portions of the plurality of excitation portions. The central portion of the support is removed in a shape or a through shape. Therefore, in order to sufficiently secure the weight of the support, it is necessary to increase the height or radius of the support.

Accordingly, the present invention has been made to solve the above problems, and an object thereof is to provide a rotary vibrator and a vibrating transport apparatus using the same, which can easily realize excitation performance suitable for transport.

Further, another object of the present invention is to provide a structure that can ensure the above-described vibration performance without increasing the size of the device by improving the excitation structure.

Further, a further object of the present invention is to improve the structure of the excitation structure and to prevent the durability from being lowered by improving the excitation structure.

In view of the above, the rotary vibrator (10) of the present invention includes a support body (11) and a vibrating body disposed above the support body (11). (12) and an excitation structure (13) connected between the support body (11) and the vibrating body (12), the vibrating body (12) rotating in a direction around a predetermined axis (12x) Vibrating, the rotating vibrator (10) is characterized in that the excitation structure (13) has a plurality of excitation portions (13A, 13B, 13C) disposed around the axis (12x); The portion (13A, 13B, 13C) is provided with a plate-shaped first elastic region (13a) which is connected to the support body (11) and extends toward the inner peripheral side, and is oriented in a direction of rotation about the axis (12x) Flexural deformation; a plate-shaped second elastic region (13b) connected to the vibrating body (12) and extending toward the inner peripheral side, and being flexibly deformed in a direction of rotation about the axis (12x); (13c) for connecting an inner end portion of the first elastic region (13a) and an inner end portion of the second elastic region (13b); and a piezoelectric body (13p) that makes the first At least one of the elastic region (13a) and the second elastic region (13b) flexurally vibrates in a direction of rotation about the axis (12x); the connection region (13c) is not a free end capable of freely vibrating; a connecting portion of the first elastic region (13a) with the support body (11) and the second portion when viewed in a direction of rotation about the axis (12x) The connection portion between the elastic region (13b) and the vibrating body (12) vibrates in an opposite phase.

In the present invention, it is preferable that the second elastic region (13b) includes an inner peripheral side elastic substrate portion (14b) connected to the connection region (13c), and an inner peripheral side elastic substrate portion (14b) With the vibrating body (12) The outer peripheral side elastic spring (15).

In this case, it is preferable that the first elastic region (13a), the connection region (13c), and the inner peripheral side elastic substrate portion (14b) are formed of an integral elastic substrate. At this time, it is preferable that the piezoelectric body is laminated in a range from the first elastic region (13a) or the second elastic region (13b) to the connection region (13c).

In the present invention, it is preferable that the first elastic region (13a) and the second elastic region (13b) are arranged in the direction along the axis (12x). In this case, it is preferable that the first elastic region (13a), the connection region (13c), and the inner peripheral side elastic substrate portion (14b) are formed of an integral elastic substrate. At this time, it is preferable that the piezoelectric body is laminated in a range from the first elastic region (13a) or the second elastic region (13b) to the connection region (13c).

In the present invention, preferably, the first elastic region (13a) and the second elastic region (13b) have a plate surface that faces obliquely upward with respect to a plane perpendicular to the axis (12x), the excitation The structure (13) vibrates the vibrating body (12) in a direction parallel to the normal to the plate surface in a direction of rotation about the axis (12x).

In the present invention, it is preferable that the excitation structure (13) is constituted by three excitation portions (13A, 13B, 13C) which are disposed at intervals of 120 degrees around the axis (12x).

In the present invention, it is preferable that the support body (11) has a plurality of excitation portion housing grooves (11A, 11B, 11C) and boss portions (11P, 11Q, 11R), wherein the plurality of excitation portions are The accommodating grooves (11A, 11B, 11C) are for accommodating the respective excitation portions (13A, 13B, 13C) of the excitation structure (13) and extending in a radial direction, the boss portions (11P, 11Q, 11R) The plurality of excitation unit accommodation grooves (11A, 11B, 11C) are formed to protrude upward; the vibrating body (12) is provided with a plurality of followers (12c), and the plurality of the followers The portion (12c) protrudes downward and is disposed in the excitation unit housing grooves (11A, 11B, 11C); the first elastic region (13a) of the excitation portion (13A, 13B, 13C) The end portion is connected to the inner side surface (11d) of the boss portion (11P, 11Q, 11R) facing the excitation portion housing groove (11A, 11B, 11C), and the second elastic region (13b) is external The end portion is connected to the outer side surface (12d) of the driven portion (12c) disposed in the excitation unit housing groove (11A, 11B, 11C).

In the present invention, it is preferable that the outer peripheral side elastic spring (15) has a shape that can expand and contract in a radial direction around the axis (12x) and has a shape that is curved in the radial direction. In this case, it is preferable that the outer peripheral side elastic spring (15) is configured to be more easily deformed and deformed than the inner peripheral side elastic substrate portion (14b). For example, the outer peripheral side elastic spring (15) is preferably configured to have a thickness smaller than that of the inner peripheral side elastic substrate portion (14b) or a width smaller than the inner peripheral side elastic substrate portion (14b). On the outer peripheral side elastic spring (15) In the case where the width is smaller than the inner peripheral side elastic substrate portion (14b), the bent portion of the outer peripheral side elastic spring (15) is preferably configured to have a width smaller than both end portions (15a, 15b).

In the present invention, it is preferable that the outer peripheral side elastic springs (15) are connected and fixed to the side of the outer end portion of the inner peripheral side elastic substrate portion (14b) in a state of being overlapped from one side, and are bent toward the other side. And extending toward the outer peripheral side in the radial direction of the inner peripheral side elastic substrate portion (14b).

Further, the vibrating conveying device (20) of the present invention is characterized by comprising the above-described respective rotating vibrators (10) and a conveying body (21), wherein the conveying body (21) is fixed to the vibrating body (12) It is formed integrally with the vibrating body (12) and has a conveying path (21b) for conveying the conveying object.

According to the present invention, it is possible to obtain an excellent effect that the excitation performance suitable for transportation can be easily realized without causing an increase in the size of the device structure.

10‧‧‧Rotary vibrator

11‧‧‧Support

11A, 11B, 11C‧‧‧ excitation chamber storage slot

11P, 11Q, 11R‧‧‧ bosses

11c‧‧‧Installation Department

11d‧‧‧Support side mounting surface

12‧‧‧ vibrating body

12a‧‧‧Conveyor mounting surface

12b‧‧‧ Main Body

12c‧‧‧Responsible Department

12d‧‧‧Vibration side mounting surface

12x‧‧‧ axis

13‧‧‧Exciting structure

13A, 13B, 13C‧‧‧ excitation department

13a‧‧‧First elastic zone

13b‧‧‧Second elastic zone

13c‧‧‧Connected area

13p‧‧‧piezoelectric body

14‧‧‧Flexible substrate

14a‧‧‧Support side elastic substrate

14b‧‧‧ Inner peripheral side elastic substrate

14c‧‧‧Connecting side elastic substrate

14s‧‧‧slit

15‧‧‧External side elastic spring

15'‧‧‧Augmented springs

16‧‧‧Anti-vibration parts

17‧‧‧Abutment

Θ‧‧‧vibration angle

20‧‧‧Vibrating conveyor

21‧‧‧Conveyor

Bottom of 21a‧‧

21b‧‧‧Transportation

Fig. 1 is a top view and a front view showing a rotary vibrator according to an embodiment of the present invention.

Fig. 2 is a top view and a front view showing a state in which the vibrating body of the present embodiment is removed from the vibrating body (upper vibrating plate).

Fig. 3 is a view of the excitation unit of the present embodiment as seen from the outer circumferential side of the rotation direction and the radial direction of the axis.

Fig. 4 is a perspective view of the excitation unit of the embodiment.

(a) to (c) of Fig. 5 are top views showing states of the vibration of the excitation unit of the present embodiment, respectively.

Fig. 6 is an explanatory view schematically showing the positional relationship of the excitation structure of the present embodiment.

Fig. 7 is a schematic side view showing another example of the excitation unit of the embodiment.

Fig. 8 is a schematic top view showing a further example of the excitation unit of the embodiment.

Fig. 9 is a schematic top view showing an excitation unit of a different example of the embodiment.

Fig. 10 is a schematic partial cross-sectional view showing the structure of a vibrating conveyor using the rotary vibrator of the embodiment.

Hereinafter, the rotational vibration of the embodiment of the present invention will be described with reference to the drawings. The vibrating conveyor provided with the rotary vibrator will be described in detail. First, the overall configuration of the rotary vibrator 10 of the present embodiment will be described with reference to Figs. 1 to 4 .

As shown in Fig. 1, in the rotary vibrator 10, a support body (support base) 11 is attached to a disk-shaped base 17 by an anti-vibration member 16, wherein the outer periphery of the support body (support base) 11 The structure is formed in a cylindrical shape, and the vibration-proof member 16 has a flat annular shape and is made of a rubber or other rubber material. Above the support body 11, a vibrating body 12 is formed via the excitation structure 13, and the vibrating body 12 is configured as a disk-shaped upper vibrating plate and has an axis 12x. On the upper surface of the vibrating body 12, a substantially flat conveying body mounting surface 12a is provided in an annular shape.

As shown in Fig. 2, the support body 11 has excitation unit accommodation grooves 11A, 11B, and 11C extending in the radial direction from the axis 12x. Further, between the excitation unit accommodation grooves 11A, 11B, and 11C, land portions 11P, 11Q, and 11R that protrude upward and have a flat upper surface are provided. Further, a recessed portion 11S is formed at a position of a central portion of the upper surface of the boss portion 11P, and a terminal plate 11T is housed in the recessed portion 11S, and a wiring connector is mounted on the terminal plate 11T for driving the excitation structure 13.

In addition, in FIG. 2, the wiring between the excitation structure 13 and the terminal block 11T, the wiring between the terminal block 11T and the external control device (controller), and the following piezoelectricity included in the excitation structure 13 are omitted. Body 13p.

The excitation structure 13 has excitation units 13A, 13B, and 13C that are housed in the excitation unit accommodation grooves 11A, 11B, and 11C, respectively. The excitation units 13A, 13B, and 13C are integrally formed in a U shape or an outline. The two end portions are disposed at the upper and lower positions on the outer peripheral side, and one of the end portions (the end portion disposed in the lower side in the illustrated example) is attached to the boss portions 11P, 11Q, and 11R. On the side surface, the side faces are directed toward the inside of the excitation unit accommodation grooves 11A, 11B, and 11C and are respectively adjacent to the one end portion on the same side of the rotation direction of the axis 12x.

Specifically, the excitation unit 13A is disposed in the excitation unit accommodation groove 11A, and one end portion thereof is connected and fixed to the outer circumferential side surface portion of the boss portion 11Q, and the excitation portion 13B is disposed in the excitation portion accommodation groove 11B. The one end portion is connected and fixed to the outer peripheral side surface portion of the boss portion 11R, and the excitation portion 13C is disposed in the excitation portion accommodation groove 11C, and one end portion thereof is connected and fixed to the outer peripheral side surface of the boss portion 11P. Ministry.

As shown in FIGS. 3 and 4, the excitation portions 13A, 13B, and 13C are provided with a first elastic region 13a whose outer end portion is connected to the support body 11, and a second elastic portion 13b whose outer end portion is connected to the vibrating body. 12, and a connection region 13c, which connects the first elastic region 13a and the second elastic region 13b on the inner peripheral side. Here, the first elastic region 13a and the second elastic region 13b are each formed in a plate shape, and are disposed to be adjacent in a direction parallel to the axis 12x (upward and downward directions in the drawing).

The first elastic region 13a is constituted by the support side elastic substrate portion 14a. Further, in the present embodiment, the second elastic region 13b has an inner peripheral side elastic substrate portion 14b constituting a part of the elastic substrate 14, and an outer peripheral side elastic spring 15, wherein the outer peripheral side elastic spring 15 is connected to the inner peripheral side elastic The outer end portion of the substrate portion 14b is interposed between the vibrating body 12. Further, the connection region 13c is constituted by the connection side elastic substrate portion 14c.

In the present embodiment, the support-side elastic substrate portion 14a, the connection-side elastic substrate portion 14c, and the inner peripheral-side elastic substrate portion 14b are formed of an integral elastic substrate 14. In the elastic substrate 14, a piezoelectric body 13p is laminated on the front and back surfaces of the connection-side elastic substrate portion 14c and the inner peripheral-side elastic substrate portion 14b, and the surface of the piezoelectric body 13p is transmitted through a wiring (not shown). An alternating voltage is applied between the back surface and the back surface to flexure the elastic substrate 14 to generate vibration. The outer peripheral side elastic spring 15 has an elastic property that is more easily deflected and deformed than the elastic substrate 14. Therefore, the outer peripheral side elastic spring 15 has a function as an amplitude increasing spring that increases the amplitude of the vibrating body 12 when vibrating.

The elastic substrate 14 is integrally formed in a U shape or " In the plate-shaped body, the support-side elastic substrate portion 14a and the inner peripheral-side elastic substrate portion 14b each extend in parallel with the radial direction around the axis 12x. The support-side elastic substrate portion 14a and the inner peripheral side elastic substrate A slit 14s is formed between the portions 14b. The slit 14s extends to the central portion in the radial direction of the piezoelectric body 13p, thereby separating the support-side elastic substrate portion 14a from the inner peripheral-side elastic substrate portion 14b.

The connection-side elastic substrate portion 14c is located closer to the inner peripheral side than the front end portion of the slit 14s, and integrally connects the support-side elastic substrate portion 14a and the inner peripheral-side elastic substrate portion 14b. The outer end portion of the first elastic region 13a, that is, the outer side elastic substrate portion 14a, extends further toward the radially outer peripheral side than the outer peripheral portion of the inner peripheral side elastic substrate portion 14b, and extends to the lower side in parallel with the outer peripheral side elastic spring 15. In the position, the position is substantially aligned with the outer end portion of the outer peripheral side elastic spring 15 when viewed in the radial direction, or slightly protruded from the outer end portion of the outer peripheral side elastic spring 15 toward the outer peripheral side.

The outer peripheral side elastic spring 15 is formed of an elastic plate having a thickness smaller than that of the elastic substrate 14, and includes an inner end portion 15a that is overlapped and fixed to an outer end portion of the inner peripheral side elastic substrate portion 14b, and an outer end portion 15b that is connected to the following vibration. The body 12 and the curved portion 15c are provided between the inner end portion 15a and the outer end portion 15b. Each of the two end portions 15a and 15b is formed in a flat plate shape parallel to the radial direction. However, the curved portion 15c has a shape from the side of the inner peripheral side elastic substrate portion 14b as shown in FIG. 5(b). The central portion of the elastic substrate 14 in the thickness direction is curved, and is bent toward the outer peripheral side in the radial direction within the thickness range of the support-side elastic substrate portion 14a, and is integrally bent in an S shape. Thereby, the outer end portion 15b is disposed in a thickness range of the support-side elastic substrate portion 14a adjacent to the outer end portion 15b in a direction parallel to the axis 12x, and is formed in a flat plate shape parallel to the radial direction.

In the excitation portions 13A, 13B, 13C, the second elastic region 13b The outer end portion, that is, the outer end portion 15b of the outer peripheral side elastic spring 15 is restricted by the vibrating body 12 in a state of being connected to the following driven portion 12c provided on the outer peripheral portion of the vibrating body 12, thereby being rounded around the axis 12x. Vibration is performed in an arc shape. However, in a state where the outer end portion of the outer peripheral side elastic spring 15 is detached from the vibrating body 12, the outer peripheral side elastic spring 15 is connected via the first elastic region 13a, the connection region 13c, and the inner peripheral side elastic substrate portion 14b. Thereby, the outer end portion 15b of the outer peripheral side elastic spring 15 vibrates along the vibration trajectory corresponding to the mounting position of the support body 11 of the first elastic region 13a and the vibration form of the excitation portion, wherein the first elastic region 13a The outer end portion is connected to the following mounting portion 11c of the support body 11.

At this time, strictly speaking, the outer end portion 15b of the outer peripheral side elastic spring 15 does not vibrate in an arc shape around the axis 12x. In this case, the curved portion 15c is elongated or contracted in the radial direction around the axis 12x, and functions to absorb the deviation of the two types of vibration trajectories, which are based on the excitation portion. The 13A, 13B, and 13C mounting positions and vibration modes determine the vibration trajectory when the outer end portion 15b is in an unrestricted state, and the actual vibration trajectory when the outer end portion 15b is in a restricted state connected to the vibrating body 12.

In this case, the thickness of the outer peripheral side elastic spring 15 is made smaller than the inner peripheral side elastic substrate portion 14b as described above, and the width of the curved portion 15c (the width in the vertical direction in the illustrated example) is smaller than two as shown in the example. The end portions 15a and 15b (having a narrow width structure) can effectively increase the flexibility in the radial direction of the curved portion 15c. In the illustrated example, by forming the two edges in the width direction of the curved portion 15c (the upper and lower edges in the illustrated example) into a concave curved shape, it is possible to ensure that the spring as a whole can be smoothly deformed, and that the outer peripheral side elastic spring can be improved. 15 follow-up in the above radial direction.

As shown in FIG. 2, in the excitation portion housing grooves 11A, 11B, and 11C of the support body 11, a support side mounting surface 11d is formed on each of the mounting portions 11c which are a part of the boss portions 11P, 11Q, and 11R, wherein The mounting portion 11c is disposed on one side of the rotation direction about the axis 12x (one side in the top view in the counterclockwise direction), and the support side mounting surface 11d faces the other side opposite to the aforementioned side (top view) Move one side in a clockwise direction). The outer end portion of the first elastic region 13a (that is, the support-side elastic substrate portion 14a) is fixed to the support-side mounting surface 11d in a state of being overlapped by a bolt or the like.

On the other hand, the vibrating body 12 includes a main body portion 12b and a plurality of driven portions 12c, wherein the main body portion 12b has a disk shape and is provided with the above-described transport body mounting surface 12a, and the plurality of driven portions 12c are from the main body portion 12b. The outer peripheral portion protrudes downward along the axis 12x. The plurality of follower portions 12c are provided corresponding to the excitation portion accommodation grooves 11A, 11B, and 11C of the support body 11 around the axis 12x, and are housed in upper portions of the corresponding excitation portion accommodation grooves 11A, 11B, and 11C, respectively. A vibration side mounting surface 12d is formed on the driven portion 12c, and the vibration side mounting surface 12d faces one side in the rotation direction around the axis 12x (in the top view) Move one side counterclockwise). The outer end portion of the second elastic region 13b (that is, the outer peripheral side elastic spring 15) is fixed to the vibration side mounting surface 12d in a state of being overlapped by a bolt or the like.

In the present embodiment, in order to constitute the vibrating conveyor described below, as shown in FIG. 2, the vibrating body 12 of the vibrating vibrator 10 vibrates in the direction of rotation about the axis 12x, but the vibration of the vibrating vibrator 10 The body 12 does not vibrate along a plane perpendicular to the axis 12x (the horizontal plane shown), but is inclined toward the vibration angle θ in the range of 1 to 10 degrees, preferably 3 to 7 degrees with respect to the plane. Vs vibrates. The vibration direction Vs is determined in accordance with the surface direction of the plate-like elastic regions 13a and 13b of the excitation portions 13A, 13B, and 13C, and the attachment angle between the outer end portion of the second elastic region 13b and the vibration-side mounting surface 12d.

In the present embodiment, the elastic substrate 14 constituting the excitation units 13A, 13B, and 13C is a parallel flat plate, and the outer peripheral side elastic spring 15 is bent in the thickness direction of the elastic substrate 14, but it is not twisted. The excitation portions 13A, 13B, and 13C are regarded as a plate-like structure having a fixed surface direction. Further, the support side mounting surface 11d to which the outer end portion of the first elastic region 13a is attached is a surface parallel to the direction Q, and has a plane direction inclined to an angle perpendicular to the horizontal plane of the axis 12x and the angle of the vibration angle θ, That is, the surface direction that coincides with the vibration direction Vs, wherein the direction Q refers to the angle of the perpendicular to the perpendicular to the axis 12x that is inclined at the same angle as the vibration angle θ. to. Thereby, the excitation units 13A, 13B, and 13C are attached to the support body 11 in a posture having a direction facing the vibration direction Vs.

At this time, the plate-shaped first elastic region 13a and the second elastic region 13b of each of the excitation portions are provided in such a manner that the width direction thereof is parallel to the above-described direction Q. Further, in the illustrated example, the vibration side mounting surface 12d formed on the driven portion 12c of the vibrating body 12 is also an inclined surface parallel to the above-described direction Q. Further, in the illustrated example, the excitation unit accommodation grooves 11A, 11B, and 11C are formed in a shape that is dug downward from the upper surface of the boss portions 11P, 11Q, and 11R in the above-described direction Q, and the boss portion 11P The main portions of the side faces facing the grooves in the 11Q and 11R are configured to have the same vibration angle 0 as the support side mounting surface 11d.

In the illustrated example, the piezoelectric body 13p shown in Figs. 3 and 4 is bonded and fixed to the front surface and the back surface of the elastic substrate 14, respectively, thereby constituting a piezoelectric actuator having a bimorph structure. However, a piezoelectric actuator having a unimorph structure only by laminating the piezoelectric body 13p on only one surface of the elastic substrate 14 may be employed. By polarizing the piezoelectric body 13p in the thickness direction and applying a voltage between the front surface and the back surface of the piezoelectric body 13p, the elastic substrate 14 can be flexibly deformed.

In the present embodiment, by supplying an alternating voltage to the piezoelectric body 13p, the inner peripheral side elastic region 14b is alternately deformed in the opposite direction to the radial direction, thereby causing the second elastic region 13b. overall The vibration is performed toward the above-described vibration direction Vs along the rotation direction about the axis 12x.

(b) of FIG. 5 is a top view showing a reference posture (an attitude at the time of no vibration) of one excitation portion of the excitation structure 13. In addition, this top view shows the state when the excitation part is seen from the diagonally upward direction in the direction Q shown in FIG.

The outer end portion of the support-side elastic substrate portion 14a constituting the first elastic region 13a is connected and fixed to the mounting portion 11c of the support body 11 in a state of being in close contact with the support-side mounting surface 11d, and constitutes the outer peripheral side of the second elastic region 13b. The outer end portion of the elastic spring 15 is connected and fixed to the driven portion 12c of the vibrating body 12 in a state of being in close contact with the above-described vibration side mounting surface 12d. Here, the mounting direction when the support side elastic substrate portion 14a is mounted on the mounting portion 11c and the mounting direction when the outer peripheral side elastic spring 15 is attached to the driven portion 12c are both along the rotation direction around the axis 12x. And it is a direction perpendicular to the above-mentioned direction Q which is inclined with respect to the axis 12x at the same angle as the vibration angle θ. However, when viewed from the above-described rotational direction, the attachment orientation when the support-side elastic substrate portion 14a is attached to the attachment portion 11c is opposite to the attachment orientation when the outer circumferential-side elastic spring 15 is attached to the driven portion 12c.

Here, the outer peripheral side elastic springs 15 are connected and fixed to the side surface of the outer end portion of the inner peripheral side elastic substrate portion 14b so as to overlap from one side, and are bent toward the other side to be elastic toward the inner peripheral side. The substrate portion 14b extends in the radial direction outer peripheral side. That is, the inner end portion of the outer peripheral side elastic spring 15 The 15a is fixed to the side surface of the outer end portion of the inner peripheral side elastic substrate portion 14b in a state of being overlapped with each other, and the curved portion 15c is bent toward the center side in the thickness direction of the inner peripheral side elastic substrate portion 14b. Therefore, the outer end portion 15b is disposed. Within the thickness range of the elastic substrate 14.

Thereby, the direction of the exciting force applied to the support body 11 (the mounting portion 11c) by the excitation portions 13A, 13B, and 13C and the direction of the exciting force applied to the vibrating body 12 (the driven portion 12c) can be made. It is close to the tangential direction perpendicular to the central axis surface 13x of the elastic substrate 14 (the virtual surface formed by extending the center position in the thickness direction of the elastic substrate 14 along the radial direction around the axis 12x), thereby effectively enabling The vibrating body 12 vibrates in an arc shape around the axis 12x, and can suppress generation of an unnecessary vibration mode other than the original vibration mode including the vibration direction Vs, and can transport the conveyed object in a stable state.

Fig. 5 (a) and (c) schematically show the state in which the excitation portion is located at the maximum amplitude position (phase angle = 90 degrees) on one side of the vibration, and the maximum amplitude position on the other side (phase angle = 270 degrees). ) A view of the state of the time. Here, the figure is illustrated in a state in which the amplitude is much larger than the actual amplitude.

In the vibration state of any of (a) and (c) of FIG. 5, the vibration direction 13v1 of the first elastic region 13a (the support side elastic substrate portion 14a) and the vibration of the second elastic region 13b (the outer peripheral side elastic spring 15) The direction 13v2 is in the opposite direction. That is, the outer end portion of the first elastic region 13a1 and the second elastic region The outer end portions of the domains 13b are each vibrated in a direction perpendicular to the direction Q in the direction of rotation about the axis 12x, but the outer end portions and the second elastic regions of the first elastic regions 13a are viewed from the direction. The outer end portion of 13b vibrates in the opposite phase.

In the excitation unit of the present embodiment, the inner peripheral side elastic substrate portion 14b is flexibly deformed by the laminated piezoelectric body 13p, whereby the outer peripheral side elastic spring 15 is vibrated in a direction perpendicular to the direction Q, and The connection-side elastic substrate portion 14c is deformed by the deflection of the inner peripheral side elastic substrate portion 14b, and the support-side elastic substrate portion 14a is oriented in a direction perpendicular to the direction Q and opposite to the outer peripheral-side elastic spring 15 vibration. Further, when the direction of the deflection is changed to the opposite direction, each of the above portions vibrates in a direction opposite to the direction, but the outer end portion of the first elastic region 13a and the outer end portion of the second elastic region 13b The direction of vibration is always in the opposite direction.

At this time, the flexural deformation of the piezoelectric body 13p directly vibrates the second elastic region 13b. However, the first elastic region 13a is also vibrated by the connection region 13c. At this time, as shown in the example, the piezoelectric body 13p is laminated in a range from the second elastic region 13b to the connection region 13c. That is, the piezoelectric body 13p is formed not only in the second elastic region 13b but also in the connection region 13c, and also in the connection region 13c. Thereby, the piezoelectric body 13p not only deflects the second elastic region 13b The deformation and the connection region 13c are also flexibly deformed, so that the vibration can be transmitted to the first elastic region 13a via the connection region 13c, so that the outer end portion of the first elastic region 13a and the second elastic region 13b can be increased. The relative exciting force generated between the outer ends.

Further, the above case is also the same when the piezoelectric body 13p is laminated in the range from the first elastic region 13a to the connection region 13c. However, in order to sufficiently ensure the amplitude of the vibrating body 12 and to reliably control the amplitude based on the voltage value applied to the piezoelectric body 13p, it is preferable to dispose the piezoelectric body 13p on the side of the vibrating body 12 as shown in the example. In the second elastic region 13b, it is particularly preferable to provide the piezoelectric body 13p within the range from the second elastic region 13b to the connection region 13c.

In the present embodiment, in each of the excitation portions, the outer end portions of the first elastic region 13a and the second elastic region 13b extending in parallel from the inner circumferential side toward the outer circumferential side around the axis 12x are respectively connected to each other. The support body 11 and the vibrating body 12 are connected to the connecting portion 13c of the inner end portion of the first elastic region 13a and the inner end portion of the second elastic region 13b, and constitute a free end which can be freely vibrated without limitation. Therefore, it is not necessary to provide a connection position to the support body 11 and the vibrating body 12 on the inner peripheral side of the excitation structure 13, so that the connection structure can be simplified and the assembly work can be facilitated.

In addition, since it is not necessary to connect the connection region 13c disposed on the inner peripheral side to the support body 11 and the vibrating body 12, the excitation junction can be avoided. The mounting structure of the structure 13 causes the plurality of excitation portions 13A, 13B, and 13C to interfere with each other, so that the connection region 13c can be disposed at a position close to the axis 12x, whereby the size of the rotary vibrator in the radial direction can be reduced.

In particular, in the present embodiment, the first elastic region 13a and the second elastic region 13b are arranged in the direction along the axis 12x, so that the exciting force can be applied to the supporting body 11 and the vibrating body 12 The common central axis surface 13x extending from the inner peripheral side toward the outer peripheral side in the radial direction centering on the axis 12x is formed as shown in FIG. 5(b). Thereby, the size of the excitation portions 13A, 13B, and 13C in the support body 11 in the top view can be reduced, and the size of the rotary vibrator 10 can be reduced.

For example, in the present embodiment, since the groove width of the excitation unit accommodation grooves 11A, 11B, and 11C provided in the support body 11 can be reduced, the quality of the support body 11 can be increased without increasing the volume of the support body 11. Thus, it is possible to achieve miniaturization of the device while ensuring excitation performance.

Further, as described above, it is not necessary to connect the connection region 13c to the support body 11 or the vibrating body 12, so that the connection region 13c is easily brought close to the axis 12x, whereby the outer end portion of the first elastic region 13a and the second elastic region 13b can be made outside. Since the end portion vibrates in an arc shape close to the axis 12x, the vibration efficiency of the rotary vibrator 10 can be improved, and the vibration form can be made more precise and stabilized. Thereby, it is possible to suppress the conveyance of the vehicle, the conveyance posture disorder, and the like, so that the conveyance efficiency or the conveyance speed can be improved. degree.

In the present embodiment, as shown in FIG. 6, since it is U-shaped or " The outer end portion of the first elastic region 13a of the excitation portions 13A, 13B, and 13C is connected to the support body 11, and the outer end portion of the second elastic region 13b is coupled to the vibrating body 12, and therefore, is supported. Between the body 11 and the vibrating body 12, each of the elastic regions 13a and 13b extends in parallel from the outer peripheral side toward the inner peripheral side, and is connected by a connecting region 13c, wherein the connecting region 13c is free from other components and can be freely The free end of the vibration. Thereby, the excitation portions 13A, 13B, and 13C are substantially configured as elastic springs having a length close to twice the radius of the rotary vibrator 10, so that the connection between the support body 11 and the vibrating body 12 can be increased. Therefore, in the present embodiment, even in the case where the outer diameter is designed to be the same as that of the previous rotary vibrator, the length of the elastic spring between the support body 11 and the vibrating body 12 can be increased. When the resonance frequency of the device 10 is the same, the cross-sectional area of the excitation unit can be increased to obtain the excitation unit spring constant corresponding to the resonance frequency. Thereby, for example, the thickness of the elastic substrate 14 can be increased, so that the piezoelectricity can be improved. Body 13p Durability.

Further, since the tapping can be performed directly on the elastic substrate 14, there is an advantage in that the gasket interposed between the elastic substrate 14 and the supporting portion 11 or the mounting portion of the vibrating body 12 can be omitted. Further, although the connection distance between the support 11 and the vibrating body 12 is long, the cross-sectional area of the excitation unit can be increased as described above. The rigidity of the following transport body 21 for supporting the vibrating body 12 and the vibrating body 12 can be easily ensured.

Fig. 7 is a schematic side view showing the structure of an excitation unit different from the above embodiment. Here, the upper and lower directions in the figure are inclined with respect to the axis 12x in the above-described direction Q of the angle of the vibration angle θ. This example differs from the above-described embodiment in that the first elastic region 13a and the second elastic region 13b, both of which are formed in a plate shape, are separately provided, and are connected by a connecting fitting such as a washer and a bolt. The member separately constitutes a connection region 13c in which the first elastic region 13a and the second elastic region 13b are connected on the inner peripheral side.

In the illustrated example, the first elastic region 13a and the second elastic region 13b are respectively formed of elastic substrates, and the inner end portions of the elastic substrates are connected to each other by a connecting member constituting the connection region 13c. Further, the piezoelectric body 13p is laminated on the inner peripheral side portion of the first elastic region 13a, and the elastic substrate constituting the first elastic region 13a is flexibly deformed so that the outer end portion and the second elastic portion of the first elastic region 13a are elasticized. The outer end portion of the region 13b vibrates in a phase opposite to the direction of rotation Rx (the direction perpendicular to the plane of the drawing) in the above-described direction Q.

Further, in the illustrated example, the second elastic region 13b is formed of an integral elastic substrate, and an augmented spring portion 15' having the same function as the outer peripheral side elastic spring 15 is formed on the outer peripheral side portion thereof. The spring portion 15' is integrally formed with the inner peripheral side portion of the second elastic region 13b. The amplifying spring portion 15' is preferably configured to have a width smaller than an inner circumferential side portion of the second elastic region 13b or an inner circumferential side portion having a thickness smaller than that of the second elastic region 13b, although not shown.

In the example shown in Fig. 7, the piezoelectric body 13p is laminated on the first elastic region 13a. However, as shown by a chain double-dashed line in the figure, the piezoelectric body 13p may be laminated in the same manner as in the above embodiment. On the second elastic region 13b. Further, the piezoelectric body 13p may be laminated in both the first elastic region 13a and the second elastic region 13b in the two elastic regions. However, in this case, it is necessary to control the driving state of the piezoelectric body 13p of the first elastic region 13a and the piezoelectric body 13p of the second elastic region 13b so that the outer end portion of the first elastic region 13a and the second elastic region are controlled. The outer end of 13b vibrates in opposite phase. In general, it is preferable that the piezoelectric body 13p of the first elastic region 13a and the piezoelectric body 13p of the second elastic region 13b are configured to be driven in opposite phases.

Fig. 8 is a schematic top plan view showing the structure of the excitation unit different from the above embodiment. The figure shows the planar shape as viewed in the above-described direction Q which is inclined at an angle with respect to the axis 12x at the same angle as the vibration angle θ. In this example, unlike the above-described embodiment or the example shown in FIG. 7, the first elastic region 13a and the second elastic region 13b which are respectively configured in a plate shape are disposed adjacent to the thickness direction, that is, perpendicular to the above-described direction Q. In the direction. In addition, the connection region 13c is formed at the inner end of the first elastic region 13a and the second elasticity The inner ends of the regions 13b extend in the thickness direction.

In this example, the second elastic region 13b is flexibly deformed by the driving of the piezoelectric body 13p, so that the outer end portion thereof vibrates in the rotation direction Rx around the above-described direction Q. Further, the above-described flexural deformation is transmitted to the first elastic region 13a via the connection region 13c, so that the outer end portion of the first elastic region 13a also vibrates in the rotation direction Rx around the above-described direction Q. However, in this example, when viewed from the above direction Rx, the outer end portion of the first elastic region 13a and the outer end portion of the second elastic region 13b are also vibrated in a phase opposite to each other.

As described above, the first elastic region 13a and the second elastic region 13b are disposed adjacent to each other in the thickness direction, and it is necessary to increase the groove width of the excitation portion accommodation grooves 11A, 11B, and 11C to some extent, but The upper and lower dimensions of the excitation unit can be reduced, so that the height of the device can be reduced. Further, since the mounting portion 11c and the driven portion 12c that are connected to the two outer end portions of the excitation portion can be disposed at substantially the same height position, even if the support side mounting surface 11d and the vibration side mounting surface 12d surround the axis 12x The angular position is separated to some extent, and it is possible to prevent the vibration portion from generating an unnecessary vibration mode such as a torsional vibration.

Further, in this example, as in the example shown in Fig. 7, the piezoelectric body 13p may be disposed in the first elastic region 13a, or the piezoelectric body 13p may be disposed in the first elastic region 13a and the second elastic region 13b. In the two elastic regions. In addition, in this example, the second elastic region 13b is from the inner circumference The side to the outer peripheral side has a fixed thickness of the elastic substrate. However, the outer peripheral side portion of the second elastic region 13b may be formed as an integral amplifying spring portion 15' as shown in FIG. 7, or may be as in the above embodiment. The outer peripheral side elastic portion 15 provided separately constitutes the outer peripheral side portion of the second elastic region 13b.

Fig. 9 is a schematic top plan view showing the structure of another excitation unit different from the above embodiment. In this example, similarly to the example shown in FIG. 8, the first elastic region 13a and the second elastic region 13b each having a plate shape are disposed adjacent to the thickness direction, that is, the direction perpendicular to the direction Q. However, in the example shown in FIG. 9, the first elastic region 13a and the second elastic region 13b are respectively configured as different plate-like bodies, and are connected by the connection region 13c, wherein the connection region 13c and The first elastic region 13a and the second elastic region 13b are further separated and separately formed. The connection region 13c is constituted by a connecting member such as a spacer-like connection fitting, and the inner end portion of the first elastic region 13a and the inner end portion of the second elastic region 13b are connected by a bolt, a nut or the like.

As described above, the various configurations shown in Figs. 7 to 9 are related to the configuration of the internal structure of the second elastic region 13b (whether or not integrated), and the configuration of the connection form of the connection region 13c (whether or not with the first elastic region 13a and The second elastic region 13b is integrated, and has a configuration with respect to the piezoelectric body 13p (whether it is disposed in the first elastic region 13a or in the second elastic region) In the domain 13b or in the two elastic regions 13a and the second elastic regions 13b, the structural elements that can be used individually can be easily realized by combining the above various configurations.

In the present embodiment, the vibrating transport device 20 can be configured by fixing the bowl-shaped transport body 21 shown in FIG. 10 to the vibrating body 12 having the above-described rotary vibrator 10 by the bolts 22 or the like. In addition, in FIG. 10, illustration of the internal structure of the excitation structure 13 and the support body 11 is abbreviate|omitted. In this case, when the conveyed object such as an electronic device is housed in the inner bottom portion 21a of the transport body 21, the transport body 21 is vibrated by the rotary vibrator 10, and the transported object is transported upward along the spiral transport path 21b. The conveyance form of the conveyed object is determined in accordance with the vibration frequency, the amplitude, and the vibration direction of the vibrating body 12 of the rotary vibrator 10.

As described above, the vibrating body 12 of the rotary vibrator 10 reciprocates in the vibration direction Vs having the vibration angle θ. Therefore, the direction of the conveyed object obliquely upward toward the vibration direction Vs is transmitted through the friction with the conveying surface of the conveying path 21b. mobile. In this case, as long as the vibration form of the vibrating body 12 is in a form in which other vibration modes other than the original vibration mode in the vibration direction Vs are suppressed, the conveyed object does not jump on the conveyance path 21b, or The posture is changed so that it can move neatly on the conveying path 21b.

Further, the rotary vibrator and the vibrating transport device of the present invention are not limited to the above-described illustrated examples, and of course, the present invention may be omitted. Various changes are added to the scope of the purpose.

For example, in the rotary vibrator 10 of the above-described embodiment, the vibrating body 12 is vibrated about the axis 12x in an oblique direction having a vibration angle θ with respect to a horizontal plane perpendicular to the axis 12x, but the rotary vibrator 10 is used as the vibration. In the case of the other type of excitation device other than the use of the conveyance device, the vibration angle θ may be set to 0 degree.

Further, in the rotary vibrator 10 of the above-described embodiment, the outer peripheral side elastic springs 15 are integrally connected to the excitation side portions 13A, 13B, and 13C, and have the support side elastic substrate portion 14a and the connection side elastic substrate portion 14c. The inner peripheral side elastic substrate portion 14b is on the elastic substrate 14, but the present invention is not limited to this embodiment, and may be configured to have a first elastic region 13a, a second elastic region 13b, and a connection region 13c, for example, The first elastic region 13a and the connection region 13c may be constituted by an elastic substrate in which the piezoelectric body 13p is laminated and integrated, and the second elastic region 13b as a whole may be configured as an amplification spring. Further, in the vibrating transport device 20 of the above-described embodiment, the transport body 21 is attached and fixed to the vibrating body 12 of the rotary vibrator 10, but the transport body 21 may be integrally formed with the vibrating body 12.

10‧‧‧Rotary vibrator

11‧‧‧Support

11A, 11B, 11C‧‧‧ excitation chamber storage slot

12‧‧‧ vibrating body

12a‧‧‧Conveyor mounting surface

12b‧‧‧ Main Body

12c‧‧‧Responsible Department

12x‧‧‧ axis

13‧‧‧Exciting structure

13C‧‧‧Exciting Department

16‧‧‧Anti-vibration parts

17‧‧‧Abutment

Claims (8)

A rotary vibrator (10) comprising: a support body (11), a vibrating body (12) disposed above the support body (11), and a support body (11) and the vibrating body (12) An excitation structure (13) between the vibration body (12) vibrating in a direction of rotation about a predetermined axis (12x), the rotary vibrator being characterized in that the excitation structure (13) has a plurality of excitation portions (13A, 13B, 13C) disposed around the axis (12x); the excitation portions (13A, 13B, 13C) are provided with a plate-shaped first elastic region (13a), which is The support body (11) is connected and extends toward the inner peripheral side, and is flexibly deformed in a direction of rotation about the axis (12x); a plate-shaped second elastic region (13b), which is opposite to the vibrating body (12) Connecting and extending toward the inner peripheral side, and flexing and deforming in a direction of rotation about the axis (12x); a connecting region (13c) for connecting the inner end portion of the first elastic region (13a) An inner end portion of the second elastic region (13b); and a piezoelectric body (13p) that faces at least one of the first elastic region (13a) and the second elastic region (13b) Flexural oscillations of the rotational direction about the axis (12X); The second elastic region (13b) includes an inner peripheral side elastic substrate portion (14b) connected to the connection region (13c), and an outer peripheral side elastic spring (15) connected to the inner peripheral side elastic substrate The portion (14b) and the vibrating body (12); the first elastic region (13a), the connecting region (13c), and the inner peripheral side elastic substrate portion (14b) are integrally formed The elastic substrate is configured; the connection region (13c) constitutes a free end that is free to vibrate without restriction; when viewed along a direction of rotation about the axis (12x), the first elastic region (13a) The connection portion of the support (11) and the connection portion between the second elastic region (13b) and the vibrating body (12) vibrate in opposite phases. The rotary vibrator of claim 1, wherein the first elastic region (13a) and the second elastic region (13b) are arranged along the axis (12x) (Q) on. A rotary vibrator according to claim 2, wherein the piezoelectric body (13p) is laminated from the first elastic region (13a) or the second elastic region (13b) to Within the range of the connection area (13c). A rotary vibrator (10) comprising: a support body (11), a vibrating body (12) disposed above the support body (11), and a support body (11) and the vibrating body (12) An excitation structure (13) between the vibration body (12) vibrating in a direction of rotation about a predetermined axis (12x), the rotary vibrator being characterized in that the excitation structure (13) has a plurality of excitation portions (13A, 13B, 13C) disposed around the axis (12x); the excitation portions (13A, 13B, 13C) are provided with a plate-shaped first elastic region (13a), which is The support body (11) is connected and extends toward the inner peripheral side, and is flexibly deformed in a direction of rotation about the axis (12x); a plate-shaped second elastic region (13b), which is opposite to the vibrating body (12) Connecting and extending toward the inner peripheral side, and flexing and deforming in a direction of rotation about the axis (12x); a connecting region (13c) for connecting the inner end portion of the first elastic region (13a) An inner end portion of the second elastic region (13b); and a piezoelectric body (13p) that faces at least one of the first elastic region (13a) and the second elastic region (13b) Around the axis (12X) of flexurally oscillating rotation direction; the second elastic region (13b) comprising: An inner peripheral side elastic substrate portion (14b) connected to the connection region (13c), and an outer peripheral side elastic spring (15) connected to the inner peripheral side elastic substrate portion (14b) and the vibrating body (12) Between; the first elastic region (13a) and the second elastic region (13b) are arranged in a direction (Q) along the axis (12x); the connection region (13c) is not a free end capable of freely vibrating; a connecting portion of the first elastic region (13a) with the support body (11) and the second portion when viewed in a direction of rotation about the axis (12x) The connection portion between the elastic region (13b) and the vibrating body (12) vibrates in an opposite phase. A rotary vibrator according to claim 4, wherein the piezoelectric body (13p) is laminated from the first elastic region (13a) or the second elastic region (13b) to Within the range of the connection area (13c). The rotary vibrator according to any one of claims 1 to 3, wherein the first elastic region (13a) and the second elastic region (13b) have a relative perpendicular to the axis (12x) ) the plane facing the obliquely upper surface, The excitation structure (13) vibrates the vibrating body (12) in a direction parallel to the normal to the plate surface in a direction of rotation about the axis (12x). The rotary vibrator according to any one of claims 1 to 3, wherein the support body (11) has a plurality of excitation portion accommodation grooves (11A, 11B, 11C) and a boss portion (11P) 11Q, 11R), wherein the plurality of excitation unit housing grooves (11A, 11B, 11C) are for accommodating the respective excitation portions (13A, 13B, 13C) of the excitation structure (13) and along the radius In the direction extending, the boss portions (11P, 11Q, 11R) are formed between the plurality of excitation portion housing grooves (11A, 11B, 11C) and protrude upward; the vibrating body (12) is provided a plurality of follower portions (12c), a plurality of the follower portions (12c) projecting downward and disposed in the excitation unit accommodation grooves (11A, 11B, 11C); and the excitation unit (13A, 13B, 13C) The outer end portion of the first elastic region (13a) is connected to the inner side of the boss portion (11P, 11Q, 11R) facing the excitation portion receiving groove (11A, 11B, 11C) (11d), the outer end portion of the second elastic region (13b) is connected to the outer side surface (12d) of the driven portion (12c) disposed in the excitation portion housing groove (11A, 11B, 11C) )on. A vibrating conveying device characterized by comprising: A rotary vibrator (10) according to any one of claims 1 to 3, and a transport body (21) fixed to the vibrating body (12) or to the vibrating body (12) It is constructed in one piece and has a conveying path (21b) for conveying the conveyed material.