TWI529068B - Method for producing substrate formed with copper thin layer, method for manufacturing printed circuit board and printed circuit board manufactured thereby - Google Patents

Method for producing substrate formed with copper thin layer, method for manufacturing printed circuit board and printed circuit board manufactured thereby Download PDF

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TWI529068B
TWI529068B TW103102611A TW103102611A TWI529068B TW I529068 B TWI529068 B TW I529068B TW 103102611 A TW103102611 A TW 103102611A TW 103102611 A TW103102611 A TW 103102611A TW I529068 B TWI529068 B TW I529068B
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Taiwan
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layer
copper
carrier
thin layer
printed circuit
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TW103102611A
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Chinese (zh)
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TW201438918A (en
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全星郁
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Ymt股份有限公司
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/389Improvement of the adhesion between the insulating substrate and the metal by the use of a coupling agent, e.g. silane
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/09Use of materials for the conductive, e.g. metallic pattern
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0011Working of insulating substrates or insulating layers
    • H05K3/0044Mechanical working of the substrate, e.g. drilling or punching
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/108Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by semi-additive methods; masks therefor

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Laminated Bodies (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)

Description

具有銅薄層構成之基材的生產方法,印刷電路板之製造方法以 及經由上述方法製造之印刷電路板 a production method of a substrate having a thin copper layer, and a method of manufacturing a printed circuit board And a printed circuit board manufactured by the above method

本發明係關於一種具有銅薄層構成之基材的生產方法以及印刷電路板之製造方法。更具體地,本發明係關於一種具有銅薄層構成之基材的生產方法,其適合用於具有細微圖案電路之印刷電路板的製造,以及一種印刷電路板之製造方法。 The present invention relates to a method for producing a substrate having a thin copper layer and a method for producing a printed circuit board. More particularly, the present invention relates to a production method of a substrate having a thin copper layer, which is suitable for use in the manufacture of a printed circuit board having a fine pattern circuit, and a method of manufacturing a printed circuit board.

一印刷電路板(PCB)係指其固定與電連結多個電子元件以建構一電路。一般而言,該印刷電路板包含一絕緣基板、位於該絕緣基板上的一導電圖案以及複數個貫穿孔,元件透過該等貫穿孔固定與相互電連結。 A printed circuit board (PCB) refers to a plurality of electronic components that are fixedly and electrically connected to construct a circuit. Generally, the printed circuit board includes an insulating substrate, a conductive pattern on the insulating substrate, and a plurality of through holes through which the components are fixedly and electrically connected to each other.

印刷電路板可被分類為剛性印刷電路板(rigid PCB)、軟性印刷電路板(FPCB)以及剛性-軟性印刷電路板(R-F PCB)。在剛性印刷電路板中,一銅箔係附著至一芯材,該芯材係藉由使用合適的材料(例如:玻璃纖維)強化一環氧樹脂獲得。在軟性印刷電路板中,一銅箔係附著至一聚醯亞胺。該剛性-軟性印刷電路板係剛性印刷電路板與軟性印刷電路板之組合,以具備二種印刷電路板之優點。這些印刷電路板之應用係根據它們的特性而決定。隨著近期朝向輕量、薄型以及小尺寸之電子裝置的趨勢,占用小空間的印刷電路板之需求已隨之增 加。印刷電路板之微型化需要電路圖案的層疊或減少電路配線間的間距。 Printed circuit boards can be classified into rigid printed circuits (rigid PCBs), flexible printed circuit boards (FPCBs), and rigid-flexible printed circuit boards (R-F PCBs). In a rigid printed circuit board, a copper foil is attached to a core material obtained by reinforcing an epoxy resin using a suitable material (for example, glass fiber). In a flexible printed circuit board, a copper foil is attached to a polyimine. The rigid-flexible printed circuit board is a combination of a rigid printed circuit board and a flexible printed circuit board to provide the advantages of two types of printed circuit boards. The application of these printed circuit boards is determined by their characteristics. With the recent trend towards lightweight, thin and small-sized electronic devices, the demand for printed circuit boards that occupy small spaces has increased plus. Miniaturization of printed circuit boards requires lamination of circuit patterns or reduction of spacing between circuit wirings.

根據於一印刷電路板中形成電路圖案之一傳統方法,係使用一 乾膜以於一銅箔上形成一遮罩圖案,以及該銅箔係被蝕刻以形成一電路。此一方法在控制電路配線間的間距至60微米或更小的方面上有其限制。為試圖克服形成細微電路圖案所遭遇之限制,新的技術,例如:半加成法(semi-additive process,SAP),近期已被引進。該半加成法係與傳統蝕刻法相反之一概念。根據該半加成法,電路形成區域以外之一區域係被適合的遮罩材料(例如:乾膜)遮蔽,隨後直接於欲形成電路之區域鍍敷,以形成一導電圖案。 According to a conventional method of forming a circuit pattern in a printed circuit board, a The dry film forms a mask pattern on a copper foil, and the copper foil is etched to form an electrical circuit. This method has limitations in controlling the pitch between wirings of the circuit to 60 μm or less. In an attempt to overcome the limitations encountered in forming fine circuit patterns, new technologies, such as the semi-additive process (SAP), have recently been introduced. This semi-additive method is one of the opposite concepts to the conventional etching method. According to the semi-additive method, a region other than the circuit formation region is shielded by a suitable mask material (for example, a dry film), and then directly plated in a region where the circuit is to be formed to form a conductive pattern.

即使應用該半加成法,為了細微圖案之形成,仍需要一薄銅箔 之使用。該銅箔係一基層,其作為用於直接鍍敷之一電極。然而,該薄銅箔僅能從少數供應商中獲取,因為難以生產。由於薄銅箔之高昂價格,印刷電路板製造商購買低廉的厚銅箔,並在使用前蝕刻它們至所欲之厚度。然而,額外的蝕刻牽涉生產成本上的額外增加以及導致環境污染問題。 Even if the semi-additive method is applied, a thin copper foil is required for the formation of a fine pattern. Use. The copper foil is a base layer which serves as one of the electrodes for direct plating. However, this thin copper foil can only be obtained from a few suppliers because it is difficult to produce. Due to the high price of thin copper foil, printed circuit board manufacturers purchase inexpensive thick copper foil and etch them to the desired thickness before use. However, additional etching involves an additional increase in production costs and causes environmental pollution problems.

許多用於印刷電路板之銅箔的生產程序已被廣泛習知。舉例來 說,韓國專利公開第2012-0084441號揭露用於覆銅層疊板之生產的銅箔,以及包含該銅箔之覆銅層疊板。然而,當一銅箔被層疊於一載體上時,在該載體鋁以及該銅之間發生擴散。此一擴散使得該載體鋁層難以剝離,且因此該銅箔難以獲得一均勻的表面。此外,韓國專利登記第728764號介紹關於藉由濺鍍法沉積銅粒子之技術。此一技術在生產程序的簡化上、生產效率的改進上以及基材的薄型化上有所貢獻。然而,此一專利文獻並未揭露一薄銅箔之生產。 Many production procedures for copper foil for printed circuit boards have been widely known. For example A copper foil for the production of a copper clad laminate, and a copper clad laminate including the copper foil are disclosed in Korean Patent Publication No. 2012-0084441. However, when a copper foil is laminated on a carrier, diffusion occurs between the carrier aluminum and the copper. This diffusion makes the carrier aluminum layer difficult to peel off, and thus it is difficult for the copper foil to obtain a uniform surface. Further, Korean Patent Registration No. 728764 describes a technique for depositing copper particles by sputtering. This technology contributes to the simplification of the production process, the improvement of production efficiency, and the thinning of the substrate. However, this patent document does not disclose the production of a thin copper foil.

藉由本發明之一具體實施例所達成之第一目的係提供一種具有 銅薄層構成之基材的生產方法,其可避免一載體與該銅薄層之間的介面上的擴散,便於該載體與該銅薄層之間的分離。 The first object achieved by a specific embodiment of the present invention provides a A method for producing a substrate composed of a thin layer of copper which avoids diffusion on a interface between a carrier and the thin layer of copper, facilitating separation between the carrier and the thin layer of copper.

藉由本發明之一具體實施例所達成之第二目的係提供一種印刷 電路板之製造方法,其使用該具有銅薄層構成之基材的生產方法。 A second object achieved by an embodiment of the present invention provides a printing A method of manufacturing a circuit board using the production method of the substrate having a thin copper layer.

藉由本發明之一具體實施例所達成之第三目的係提供一種印刷 電路板,其係藉由該製造方法所製造。 A third object achieved by an embodiment of the present invention provides a printing A circuit board manufactured by the manufacturing method.

藉由本發明之一具體實施例所達成之第四目的係提供一種具有 銅薄層構成之基材,其係藉由該生產方法所生產。 A fourth object achieved by an embodiment of the present invention provides a A substrate composed of a thin layer of copper produced by the production method.

根據本發明之一具體實施例,該第一目的係藉由一種具有銅薄 層構成之基材的生產方法之提供所達成,該方法包含:提供一載體;於該載體之表面上形成一分離誘導層;於該分離誘導層上形成一銅薄層;以及結合一核芯至該銅薄層。 According to an embodiment of the invention, the first object is by a thin copper Providing a method for producing a substrate composed of a layer, the method comprising: providing a carrier; forming a separation inducing layer on a surface of the carrier; forming a thin layer of copper on the separation inducing layer; and combining a core To the thin layer of copper.

根據本發明之一示例性具體實施例,該載體可由鋁構成,以及 該分離誘導層可藉由於該載體表面上形成一多孔層,並於具有該多孔層構成之載體的表面上塗佈一密封劑形成。 According to an exemplary embodiment of the present invention, the carrier may be composed of aluminum, and The separation inducing layer can be formed by forming a porous layer on the surface of the support and coating a sealant on the surface of the support having the porous layer.

根據本發明之一進一步示例性具體實施例,該多孔層可使用一 溶劑於該載體表面上形成,該溶劑包含至少一化合物選自由鹼性化合物、鐵化合物以及碳酸化合物所組成之群組。 According to a further exemplary embodiment of the invention, the porous layer may use one A solvent is formed on the surface of the support, the solvent comprising at least one compound selected from the group consisting of a basic compound, an iron compound, and a carbonic acid compound.

根據本發明之另一進一步示例性具體實施例,該多孔層可藉由 無電蝕刻於該載體表面上形成。 According to another further exemplary embodiment of the present invention, the porous layer can be Electroless etching is formed on the surface of the carrier.

根據本發明之另一進一步示例性具體實施例,該載體表面上形 成之多孔層可使用鋁形成。 According to another further exemplary embodiment of the invention, the surface of the carrier is shaped The porous layer can be formed using aluminum.

根據本發明之另一進一步示例性具體實施例,該塗佈至具有多 孔層構成之載體的表面的密封劑可包含至少一材料選自由金屬-聚合物複合物、鈷-鉻、氮化硼、二硫化鉬以及聚四氟乙烯所組成之群組。 According to another further exemplary embodiment of the invention, the coating has a plurality of The sealant on the surface of the carrier formed by the aperture layer may comprise at least one material selected from the group consisting of metal-polymer composites, cobalt-chromium, boron nitride, molybdenum disulfide, and polytetrafluoroethylene.

根據本發明之一具體實施例,該第二目的係藉由一種印刷電路 板之製造方法的提供所達成,該方法包含:提供藉由該生產方法生產之具有銅薄層構成之基材;從該基材中分離該載體以及該分離誘導層;於該銅薄層上形成用於圖案形成之一遮罩並藉由電鍍於該銅薄層上形成一銅圖案;移除該用於圖案形成之遮罩;以及移除該銅薄層以留下一圖案化銅電路。 According to an embodiment of the present invention, the second object is by a printed circuit Provided by the method of manufacturing a board comprising: providing a substrate having a thin layer of copper produced by the production method; separating the carrier and the separation inducing layer from the substrate; and forming the separation layer on the copper layer Forming a mask for patterning and forming a copper pattern by plating on the copper thin layer; removing the mask for patterning; and removing the copper thin layer to leave a patterned copper circuit .

根據本發明之一具體實施例,該第三目的係藉由一種經由該製 造方法製造之印刷電路板之提供所達成。 According to an embodiment of the present invention, the third object is by a system The manufacture of printed circuit boards manufactured by the method is achieved.

根據本發明之一具體實施例,該第四目的係藉由一種基材的提 供所達成,該基材包含:一載體,其係由鋁製成;一分離誘導層,其係形成於該載體表面之上;一銅薄層,其係形成於該分離誘導層之上;以及一核芯,其係結合至該銅薄層,其中該分離誘導層係由一多孔鋁層及一密封層所組成,該密封層係形成於該多孔鋁層之上。 According to an embodiment of the invention, the fourth object is achieved by a substrate The substrate comprises: a carrier made of aluminum; a separation inducing layer formed on the surface of the carrier; a thin layer of copper formed on the separation inducing layer; And a core bonded to the copper thin layer, wherein the separation inducing layer is composed of a porous aluminum layer and a sealing layer formed on the porous aluminum layer.

根據本發明之具體實施例之生產方法以及製造方法具有下述有 益的效果。 The production method and the manufacturing method according to the specific embodiment of the present invention have the following Benefits.

第一,在藉由熱壓附著該核芯至該銅箔的過程中,載體層與銅 薄層之間之分離誘導層的存在,防止載體層與銅薄層之間的擴散。因此,該載體可被輕易地從該銅薄層分離,並可維持該分離之銅薄層一貫的厚度以及表面粗糙度。 First, in the process of attaching the core to the copper foil by hot pressing, the carrier layer and copper The separation between the thin layers induces the presence of a layer to prevent diffusion between the carrier layer and the copper thin layer. Therefore, the carrier can be easily separated from the copper thin layer and the thickness and surface roughness of the separated copper thin layer can be maintained.

第二,該分離誘導層之形成,其包含形成該多孔層於鋁構成之 載體的表面上,且該多孔層係使用鋁形成,並非氧化鋁。因此,該載體可使用單一蝕刻溶液,藉由化學蝕刻移除。 Second, the formation of the separation inducing layer comprises forming the porous layer in aluminum On the surface of the carrier, and the porous layer is formed using aluminum, not alumina. Thus, the support can be removed by chemical etching using a single etching solution.

第三,在根據本發明之具體實施例生產之基材中,該銅薄層可 被形成並使其具有足夠小的一厚度。因此,當應用一半加成法時,該要被蝕刻的底層銅薄層係薄的,故有益於一細微電路圖案的形成。 Third, in the substrate produced according to the specific embodiment of the present invention, the copper thin layer can be It is formed and made to have a thickness small enough. Therefore, when a half-additive method is applied, the thin layer of the underlying copper to be etched is thin, which is advantageous for the formation of a fine circuit pattern.

100‧‧‧印刷電路板 100‧‧‧Printed circuit board

110‧‧‧核芯 110‧‧‧core

120‧‧‧黏附層 120‧‧‧Adhesive layer

130‧‧‧銅薄層 130‧‧‧thin copper layer

200‧‧‧基材 200‧‧‧Substrate

210‧‧‧核芯 210‧‧‧core

220‧‧‧黏附層 220‧‧‧Adhesive layer

230‧‧‧銅薄層 230‧‧‧ copper thin layer

240‧‧‧載體 240‧‧‧ Carrier

241‧‧‧多孔層 241‧‧‧Porous layer

242‧‧‧密封層 242‧‧‧ Sealing layer

S1‧‧‧步驟一 S1‧‧‧Step one

S2‧‧‧步驟二 S2‧‧‧Step 2

S3‧‧‧步驟三 S3‧‧‧Step three

S4‧‧‧步驟四 S4‧‧‧Step four

S5‧‧‧步驟五 S5‧‧‧Step five

S6‧‧‧步驟六 S6‧‧‧Step six

S7‧‧‧步驟七 S7‧‧‧Step seven

S8‧‧‧步驟八 S8‧‧‧Step eight

S9‧‧‧步驟九 S9‧‧‧Step nine

S10‧‧‧步驟十 S10‧‧‧Step ten

S11‧‧‧步驟十一 S11‧‧‧Step XI

第1圖係顯示一般印刷電路板結構的剖視圖。 Figure 1 is a cross-sectional view showing the structure of a general printed circuit board.

第2圖係顯示根據本發明之一具體實施例生產之具有銅薄層構成之基板結構的剖視圖。 Figure 2 is a cross-sectional view showing a substrate structure having a thin layer of copper produced in accordance with an embodiment of the present invention.

第3圖係說明先前技術之多層印刷電路板之製造方法的流程圖。 Figure 3 is a flow chart showing a method of manufacturing a prior art multilayer printed circuit board.

第4圖係說明根據本發明之一具體實施例之印刷電路板之製造方法的流程圖。 Figure 4 is a flow chart illustrating a method of fabricating a printed circuit board in accordance with an embodiment of the present invention.

藉由下列具體實施例的敘述並結合其所附之圖式,本發明上述或其他之具體實施例與優點將變得顯而易知且更易於理解。 The above and other specific embodiments and advantages of the present invention will become more apparent and appreciated from the <RTIgt;

本發明之一具體實施例提供一種具有銅薄層構成之基材的生產方法,該方法包含:提供一載體;於該載體之表面上形成一分離誘導層;於該分離誘導層上形成一銅薄層;以及結合一核芯至該銅薄層。 A specific embodiment of the present invention provides a method for producing a substrate having a thin layer of copper, the method comprising: providing a carrier; forming a separation inducing layer on a surface of the carrier; forming a copper on the separation inducing layer a thin layer; and a core to the copper thin layer.

本發明之具體實施例在此將參照所附之圖式被更為詳細的描述。這些具體實施例係被提供,使得這些揭露將對於技術領域具有通常知識者充分地傳達本發明之範疇。據此,本發明可以許多不同的形式實施,且不應詮釋為僅限於在此所闡述的示例性具體實施例。為表示清晰,圖示中元件之尺寸如寬度、長度及厚度可能被誇大。應當理解的是,當一元件被描述位於另一元件“上”時,它可以直接位於另一元件上,或者一或多個中間元件亦可存在於二者之間。再者,在一方法包含一或更多個次序步驟的情況下,一或多個步驟可介於該次序步驟之間。若需要,該步驟可不受限於此一次序,並可以其他順序實施。 Specific embodiments of the invention are described herein in more detail with reference to the appended drawings. These specific embodiments are provided so that these disclosures will fully convey the scope of the invention to those skilled in the art. The invention may be embodied in many different forms and should not be construed as being limited to the exemplary embodiments disclosed herein. For clarity, the dimensions of the elements such as width, length and thickness may be exaggerated. It will be understood that when an element is referred to as "on" another element, it can be s 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 Furthermore, where a method includes one or more sequential steps, one or more steps can be between the sequential steps. This step may not be limited to this order, if desired, and may be performed in other orders.

第1圖係顯示一般印刷電路板結構的剖視圖。參照第1圖,該印刷電路板100包含一核芯110、一黏附層120以及一銅薄層 130。該核芯110可由一剛性或軟性材料製造。由剛性材料構成之核芯110係用於製造一剛性印刷電路板,以及由軟性材料構成之核芯110係用於製造一軟性印刷電路板。舉例來說,該剛性材料可為金屬、玻璃或環氧樹脂與玻璃纖維之組合物,以及該軟性材料可為一聚醯亞胺樹脂。該黏附層之作用為結合核芯與銅薄層,且該銅薄層可被圖案化以建構一電路。 Figure 1 is a cross-sectional view showing the structure of a general printed circuit board. Referring to FIG. 1, the printed circuit board 100 includes a core 110, an adhesion layer 120, and a thin copper layer. 130. The core 110 can be fabricated from a rigid or soft material. The core 110 made of a rigid material is used to manufacture a rigid printed circuit board, and the core 110 made of a soft material is used to manufacture a flexible printed circuit board. For example, the rigid material can be a metal, glass or a combination of epoxy and glass fibers, and the soft material can be a polyimide resin. The adhesion layer functions to bond the core and the copper layer, and the copper layer can be patterned to construct an electrical circuit.

有許多使用銅薄層於印刷電路板中建構電路的方法。根據本發 明之具體實施例,一銅薄層可被形成並使其具有足夠小且均勻的一厚度,因此利於藉由半加成法形成一細微圖案電路。 There are many ways to construct a circuit in a printed circuit board using a thin layer of copper. According to this issue In a specific embodiment, a thin layer of copper can be formed and have a thickness that is sufficiently small and uniform, thereby facilitating the formation of a fine pattern circuit by semi-additive.

第2圖係顯示根據本發明之一具體實施例生產之具有銅 薄層構成之基板結構的剖視圖。參照第2圖,該基材200包含一核芯210、一黏附層220、一銅薄層230、一密封層242、一多孔層241以及一載體240。 該核芯210係一印刷電路板之一基底且可由剛性材料或軟性材料所製造。舉例來說,該剛性材料可為金屬、玻璃或一環氧樹脂/玻璃纖維組合物,以及該軟性材料可為聚醯亞胺樹脂。該核芯210可為用於印刷電路板之一結構,例如:金屬、玻璃或環氧樹脂與玻璃纖維的組合物,或一聚合物薄膜,例如:PET或PEN。 該核芯可被適合於應用的使用。雖然未於圖式中顯示,該基材200可選擇性的進一步於該核芯210之表面上包含一熱塑性樹脂層,該黏附層220將於該處被形成。該黏附層之作用係結合該銅薄層230與該核芯210。多種聚合物樹脂黏著劑可被使用作為黏附層220之材料。當一核芯係由聚醯亞胺構成時,該黏附層220可使用高度相容於該聚醯亞胺之一黏著劑形成。該銅薄層230構成一印刷電路板之一電路圖案。該電路圖案可藉由蝕刻或半加成法形成。當應用一半加成法時,另具有一預定圖案的銅薄層可被形成於該銅薄層230之上。該載體240係結合至該銅薄層230。包含該多孔層241以及該密封層242之一分離誘導層可 被形成於該銅薄層230與該載體240之間。該分離誘導層作用為防止該載體之金屬組成與該銅薄層之銅,在藉由熱壓結合該銅薄層與該核芯時,彼此間的交互擴散,在後續的處理步驟中便於該載體與該銅薄層之間的分離,同時維持該分離之銅薄層一貫的厚度以及表面粗糙度。 Figure 2 is a diagram showing copper produced in accordance with an embodiment of the present invention. A cross-sectional view of a substrate structure composed of a thin layer. Referring to FIG. 2, the substrate 200 includes a core 210, an adhesion layer 220, a copper thin layer 230, a sealing layer 242, a porous layer 241, and a carrier 240. The core 210 is a substrate of a printed circuit board and may be fabricated from a rigid material or a soft material. For example, the rigid material can be a metal, glass or an epoxy/glass fiber composition, and the soft material can be a polyimide resin. The core 210 can be a structure for a printed circuit board, such as a metal, glass or combination of epoxy and fiberglass, or a polymeric film such as PET or PEN. The core can be adapted for use in an application. Although not shown in the drawings, the substrate 200 may optionally further comprise a layer of thermoplastic resin on the surface of the core 210, where the adhesion layer 220 will be formed. The adhesion layer acts to bond the copper thin layer 230 to the core 210. A variety of polymer resin adhesives can be used as the material of the adhesion layer 220. When a core is composed of polyimine, the adhesion layer 220 can be formed using an adhesive that is highly compatible with one of the polyimides. The copper thin layer 230 constitutes a circuit pattern of a printed circuit board. The circuit pattern can be formed by etching or semi-additive. When a half-additive method is applied, a thin copper layer having a predetermined pattern may be formed on the copper thin layer 230. The carrier 240 is bonded to the copper thin layer 230. The porous layer 241 and one of the sealing layer 242 may be separated and induced It is formed between the copper thin layer 230 and the carrier 240. The separation inducing layer functions to prevent the metal composition of the carrier and the copper of the copper layer from being mutually diffused when the copper thin layer and the core are bonded by hot pressing, which is facilitated in a subsequent processing step. The separation between the carrier and the thin layer of copper while maintaining the consistent thickness and surface roughness of the separated copper layer.

在此,根據本發明具體實施例之具有銅薄層形成之基材的生產 方法係基於個別的步驟加以說明。 Here, the production of a substrate having a thin layer of copper according to an embodiment of the present invention is produced. The method is described based on individual steps.

第一,一載體係被提供。可使用一鋁片作為載體。一離型紙可 透過一壓感黏著劑被附著於附著於該載體之一面。 First, a carrier is provided. An aluminum sheet can be used as a carrier. a release paper Attached to one side of the carrier by a pressure sensitive adhesive.

隨後,一多孔層係被形成於該載體之至少一面上。該多孔層係 藉由使用一溶劑處理一鋁片形成,該溶劑包含鹼性化合物、鐵化合物或碳酸化合物作為主要成分以及至少一功能性添加劑。舉例來說,該鹼性化合物可為氫氧化鈉(NaOH)或氫氧化鉀(KOH),該鐵化合物可為氰化鐵或檸檬酸鐵,該碳酸化合物可為碳酸鉀或碳酸鈉,以及該功能性添加劑可為一螯合劑。亦即,形成該多孔層之步驟係藉由使用一化學藥品處理鋁之表面進行,不需要電的使用,與使用電的陽極氧化程序不同。此一化學藥品處理,伴隨著微蝕刻,係用於鋁表面上微孔之形成的一概念。該無電化學藥品處理可為用於蝕刻該鋁表面以形成該多孔層之一程序。具體而言,此一程序可藉由在約40℃至約60℃下浸泡該鋁載體至該化學藥品中約3分鐘至約10分鐘進行。一般而言,陽極氧化使用電形成一不導電層。相對而言,該多孔層係藉由該化學藥品處理形成,具有一結構,其中僅微孔被形成於該基底材料中。由於此一結構,該基底材料作為一導體的特性保持不變,且因此該多孔層之電流承載特性並未受到該化學藥品處理的影響。由於該多孔層的主要組成並非氧化鋁而為鋁,故該載體可藉由僅使用用於鋁移除之蝕刻溶液的化學程序,從一銅薄層分離與移除。少量的其他組成如氫氧化鋁可能殘留於該多孔層中。然而,由於這些組成的厚度小,在鋁蝕刻 的過程中,其可藉由蝕刻溶液分離與移除。 Subsequently, a porous layer is formed on at least one side of the carrier. The porous layer It is formed by treating an aluminum sheet with a solvent containing a basic compound, an iron compound or a carbonic acid compound as a main component and at least one functional additive. For example, the basic compound may be sodium hydroxide (NaOH) or potassium hydroxide (KOH), and the iron compound may be iron cyanide or ferric citrate, and the carbonic acid compound may be potassium carbonate or sodium carbonate, and the The functional additive can be a chelating agent. That is, the step of forming the porous layer is carried out by treating the surface of aluminum with a chemical, and does not require electrical use, unlike the anodizing procedure using electricity. This chemical treatment, along with microetching, is a concept for the formation of micropores on aluminum surfaces. The electroless drug treatment can be a procedure for etching the aluminum surface to form the porous layer. Specifically, this procedure can be carried out by soaking the aluminum support to the chemical at about 40 ° C to about 60 ° C for about 3 minutes to about 10 minutes. In general, anodization uses electricity to form a non-conductive layer. In contrast, the porous layer is formed by the chemical treatment, and has a structure in which only micropores are formed in the base material. Due to this structure, the properties of the base material as a conductor remain unchanged, and thus the current carrying characteristics of the porous layer are not affected by the chemical treatment. Since the main composition of the porous layer is not aluminum but aluminum, the carrier can be separated and removed from a thin layer of copper by a chemical procedure using only an etching solution for aluminum removal. A small amount of other components such as aluminum hydroxide may remain in the porous layer. However, due to the small thickness of these compositions, the aluminum is etched In the process, it can be separated and removed by an etching solution.

隨後,一密封層係形成於該多孔層之上。此一步驟係選擇性的。 該密封層之作用係作為一潤滑劑以便該載體與一銅薄層之間的分離,其中該銅薄層將形成於該密封層之上。該密封層填充該多孔層之微孔,其作用係使該銅薄層之表面平滑,同時在藉由熱壓結合一核芯至該銅薄層的過程中,防止一種因載體之鋁與銅薄層之銅彼此間之擴散所造成的合金層。該密封層可使用一無機或有機材料或一聚合物樹脂形成。適合用於該密封層的材料包含例如:氮化硼(BN)、二硫化鉬(MoS2)、鐵氟龍以及聚四氟乙烯(PTFE)。或者,一金屬-聚合物組成物例如:鉻-聚合物組成物,或一金屬材料例如:鈷-鉻亦可被使用以形成該密封層。雖然第2圖顯示該多孔層及該密封層係彼此區別的次序層疊,但該密封層之組成材料可被填充於該多孔層之微孔中。該多孔層與該密封層形成一分離誘導層。該多孔層係一多孔鋁層以及該密封層係塗佈於該多孔層之上。亦即,該分離誘導層具有一結構,其中該密封層係被形成於該多孔鋁層之上。 Subsequently, a sealing layer is formed over the porous layer. This step is optional. The sealing layer functions as a lubricant to separate the carrier from a thin layer of copper, wherein the thin layer of copper will be formed over the sealing layer. The sealing layer fills the micropores of the porous layer, and the effect is to smooth the surface of the copper thin layer, and prevent a kind of aluminum and copper of the carrier during the process of bonding a core to the copper thin layer by hot pressing. An alloy layer caused by the diffusion of thin layers of copper between each other. The sealing layer can be formed using an inorganic or organic material or a polymer resin. Materials suitable for the sealing layer include, for example, boron nitride (BN), molybdenum disulfide (MoS 2 ), Teflon, and polytetrafluoroethylene (PTFE). Alternatively, a metal-polymer composition such as a chromium-polymer composition, or a metal material such as cobalt-chromium may also be used to form the sealing layer. Although FIG. 2 shows that the porous layer and the sealing layer are laminated in a different order from each other, the constituent material of the sealing layer may be filled in the micropores of the porous layer. The porous layer forms a separation inducing layer with the sealing layer. The porous layer is a porous aluminum layer and the sealing layer is coated on the porous layer. That is, the separation inducing layer has a structure in which the sealing layer is formed on the porous aluminum layer.

該分離誘導層由該多孔層與密封層所組成係形成於該載體與該 銅薄層之間。缺少該分離誘導層將導致在350℃或更高之高溫下熱壓該銅薄層及一核芯的過程中,於該載體與該銅薄層之介面間的擴散。此一擴散使得該載體與該銅薄層之間難以分離。另一方面,位於該載體與該銅薄層之間的分離誘導層之存在防止該載體之鋁與該銅薄層之銅在高溫下形成一擴散層,並且可使該鋁載體藉由化學蝕刻從該銅薄層分離的過程中,僅需使用一鋁蝕刻溶液不須使用一氧化鋁蝕刻溶液,簡化該生產程序並降低生產成本。 The separation inducing layer is formed of the porous layer and the sealing layer on the carrier and the Between the thin layers of copper. The absence of the separation inducing layer will result in diffusion between the carrier and the interface of the copper layer during the hot pressing of the copper thin layer and a core at a high temperature of 350 ° C or higher. This diffusion makes it difficult to separate the carrier from the thin layer of copper. On the other hand, the presence of the separation inducing layer between the support and the copper thin layer prevents the aluminum of the support from forming a diffusion layer with the copper thin layer of copper at a high temperature, and the aluminum support can be chemically etched. In the process of separating the copper thin layer, it is only necessary to use an aluminum etching solution without using an alumina etching solution, which simplifies the production process and reduces the production cost.

隨後,一銅薄層係被形成於該密封層之上。該銅薄層可藉由無 電鍍銅形成。該藉由無電鍍銅形成之銅薄層,其形成係基於不使用電的一化學反應機構。該銅薄層可被鍍敷以具有次微米至數十微米的均勻厚度。因此,根據該銅薄層之厚度,一電路圖案可藉由蝕刻或半加成法形成。該無電鍍銅可從 置換鍍銅及無電還原鍍銅中被合適的選擇,其中該置換鍍銅基於不同離子化傾向,而該無電還原鍍銅基於根據所需應用之還原劑功能。 Subsequently, a thin layer of copper is formed over the sealing layer. The copper thin layer can be used without Electroplated copper is formed. The thin layer of copper formed by electroless copper is formed based on a chemical reaction mechanism that does not use electricity. The copper thin layer can be plated to have a uniform thickness from submicron to tens of microns. Therefore, depending on the thickness of the copper thin layer, a circuit pattern can be formed by etching or semi-additive. The electroless copper can be obtained from Displacement copper plating and electroless reduction copper plating are suitably selected, wherein the replacement copper plating is based on different ionization tendency, and the electroless reduction copper plating is based on a reducing agent function according to a desired application.

隨後,一核芯被結合至該銅薄層。為了此一結合,一黏附層或 底塗層可被形成於該核芯與該銅薄層之間。該黏附層或底塗層可使用與該核芯之聚合材料高度相容的材料形成。合適於該核芯的聚合材料包含例如:聚對苯二甲酸乙二酯(PET)、聚醯亞胺以及軟性環氧樹脂。或者,該黏附層或底塗層可使用一有機鈦或有機矽烷化合物。亦可使用包含樹脂作為主要成分的混合物。 除了固有之與該核芯材料結合的作用外,該黏附層或底塗層可作為有能力避免該銅薄層之氧化的一抗鏽蝕層。為了該底塗層更好的黏附效果,在使用底漆的同時可以同時貼附一黏附膠帶。 Subsequently, a core is bonded to the thin layer of copper. For this combination, an adhesive layer or An undercoat layer may be formed between the core and the thin layer of copper. The adhesive layer or primer layer can be formed using a material that is highly compatible with the polymeric material of the core. Polymeric materials suitable for the core include, for example, polyethylene terephthalate (PET), polyimide, and soft epoxy. Alternatively, the adhesion layer or undercoat layer may be an organotitanium or organodecane compound. A mixture containing a resin as a main component can also be used. In addition to the inherent incorporation of the core material, the adhesion layer or primer layer acts as a rust resistant layer capable of avoiding oxidation of the thin layer of copper. For better adhesion of the primer layer, an adhesive tape can be attached at the same time as the primer.

根據本發明之具體實施例生產之基材可被使用作為印刷電路板 之材料,更具體而言,係用於多層印刷電路板之製造。根據先前技術以及根據本發明之一具體實施例的關於多層印刷電路板的製造方法將相繼地予以說明。 A substrate produced in accordance with a specific embodiment of the present invention can be used as a printed circuit board The materials, and more specifically, are used in the manufacture of multilayer printed circuit boards. The method of manufacturing a multilayer printed circuit board according to the prior art and according to an embodiment of the present invention will be successively described.

第3圖係說明先前技術之多層印刷電路板之製造方法的 流程圖。參照第3圖,一軟性覆銅層疊板(flexible copper clad laminate,FCCL)被切割為一預定尺寸(S1)。在該軟性覆銅層疊板中,該銅薄膜係結合至一聚醯亞胺核芯。隨後,該經切割的軟性覆銅層疊板膜係被蝕刻以於其上形成一內部電路(S2),以及接著一保護層係與其結合(S3)。隨後,另一軟性覆銅層疊板係透過一結合片層疊於該保護層之上(S4)。隨後,於該經層疊的軟性覆銅層疊板之上進行銅電鍍,以形成一銅鍍層(S5),以及接著該銅鍍層係被鑽孔以形成多個貫穿孔(S6)。隨後,藉由一去鑽污程序,去除加工後殘留在該貫穿孔之內壁上之殘留物例如:碎片(S7)。隨後,依序進行無電鍍銅及銅電鍍,以形成一銅鍍層(S8及S9)。 隨後,於該銅鍍層上進行蝕刻,以形成一外部電路(S10),以及接著於該外部電路上進行印刷程序,以形成一PSR印刷層(S11)。 Figure 3 is a view showing the manufacturing method of the prior art multilayer printed circuit board flow chart. Referring to Fig. 3, a flexible copper clad laminate (FCCL) is cut into a predetermined size (S1). In the soft copper clad laminate, the copper film is bonded to a polyimine core. Subsequently, the cut flexible copper clad laminate film is etched to form an internal circuit (S2) thereon, and then a protective layer is bonded thereto (S3). Subsequently, another soft copper clad laminate is laminated on the protective layer through a bonding sheet (S4). Subsequently, copper plating is performed on the laminated soft copper-clad laminate to form a copper plating layer (S5), and then the copper plating layer is drilled to form a plurality of through holes (S6). Subsequently, the residue remaining on the inner wall of the through hole after processing, for example, debris (S7), is removed by a desmear process. Subsequently, electroless copper plating and copper plating are sequentially performed to form a copper plating layer (S8 and S9). Subsequently, etching is performed on the copper plating layer to form an external circuit (S10), and then a printing process is performed on the external circuit to form a PSR printed layer (S11).

根據傳統的製造方法,該軟性覆銅層疊板之使用包含複雜、昂 貴之銅薄膜導致成本上升,且該複雜的層疊程序以及增加使用輔助材料提升了該多層印刷電路板的厚度。相對而言,在一多層印刷電路板的製造中以一簡化、經濟的方式使用根據本發明之基材係有效率的。根據本發明的關於多層印刷電路板之製造方法將予以詳細說明。 According to the conventional manufacturing method, the use of the soft copper clad laminate includes complicated The expensive copper film causes an increase in cost, and the complicated lamination procedure and increased use of auxiliary materials increase the thickness of the multilayer printed circuit board. In contrast, the use of a substrate according to the present invention in a simplified, economical manner in the manufacture of a multilayer printed circuit board is efficient. The method of manufacturing a multilayer printed circuit board according to the present invention will be described in detail.

第4圖係說明根據本發明之一具體實施例之印刷電路板 之製造方法的流程圖。參照第4圖,首先,藉由經參照第2圖說明之方法生產之基材係被使用作為一軟性覆銅層疊板,且被切割至一預定尺寸(S1)。隨後,該經切割之基材係選擇性的被鑽孔以形成複數個貫穿孔(S2)。隨後,該貫穿孔之內壁係使用一導電聚合物處理或經無電鍍銅。該導電聚合物處理或無電鍍銅係一用於鍍敷的前處理程序(S3)。隨後,一乾膜係層疊於該基材之上,曝光以形成一正像,並經顯影(S4)。隨後,該經前處理之基材經銅電鍍以形成一銅薄層(S5)。 隨後,藉由銅鍍敷形成電路後,殘留之乾膜係被剝離(S6)。隨後,該殘留於乾膜已被剝離之部分之基底層上的銅薄層係被蝕刻(S7)。隨後,一覆蓋層係鋪設至除暴露電路以外的部分(S8)。 Figure 4 is a diagram illustrating a printed circuit board in accordance with an embodiment of the present invention. A flow chart of the manufacturing method. Referring to Fig. 4, first, a substrate produced by the method described with reference to Fig. 2 is used as a soft copper clad laminate and is cut to a predetermined size (S1). Subsequently, the cut substrate is selectively drilled to form a plurality of through holes (S2). Subsequently, the inner wall of the through hole is treated with a conductive polymer or electroless copper. The conductive polymer treated or electroless copper is a pretreatment process for plating (S3). Subsequently, a dry film is laminated on the substrate, exposed to form a positive image, and developed (S4). Subsequently, the pretreated substrate is subjected to copper plating to form a thin copper layer (S5). Subsequently, after the circuit is formed by copper plating, the remaining dry film is peeled off (S6). Subsequently, the copper thin layer remaining on the underlying layer of the portion where the dry film has been peeled off is etched (S7). Subsequently, a cover layer is laid to a portion other than the exposed circuit (S8).

根據使用根據本發明之具體實施例生產之基材的印刷電路板製 造方法,僅有用於電路形成的部分係被暴露且被鍍敷材料填充,以形成一電路。 相對而言,根據傳統製造方法,一面板之整體區域係被鍍敷上銅,且用於電路形成以外的部分係被蝕刻。因此,根據本發明具體實施例之製造方法係非常的經濟且適合用於細微電路的形成。特別地,隨著近期科技進展的趨勢,對於細微電路有逐漸增加的需求,已難以藉由傳統的蝕刻程序達成。在此情況下,發展使用鍍敷材料填充電路部分的半加成法至關重要。 According to a printed circuit board made using a substrate produced according to a specific embodiment of the present invention In the method of fabrication, only portions for circuit formation are exposed and filled with plating material to form an electrical circuit. In contrast, according to the conventional manufacturing method, the entire area of one panel is plated with copper, and portions other than the circuit formation are etched. Therefore, the manufacturing method according to the embodiment of the present invention is very economical and suitable for the formation of fine circuits. In particular, with the recent trend in technology, there is an increasing demand for fine circuits, which has been difficult to achieve by conventional etching procedures. In this case, it is important to develop a semi-additive method of filling a circuit portion with a plating material.

在此,經參照第4圖說明之根據本發明具體實施例之製造方法, 將基於聚醯亞胺核芯的使用,更為詳盡地說明。首先,使用根據本發明具體實 施例生產之基材之覆銅層疊板被切割至一預定尺寸。隨後,經切割之覆銅層疊板選擇性地經加工形成孔洞。形成於該基材之二面的電路係透過該孔洞彼此電連通。該孔洞通常藉由機械加工,使用CNC鑽孔或雷射鑽孔形成。或者,該孔洞可藉由化學加工,使用一聚醯亞胺蝕刻劑形成。根據本發明之具體實施例中所使用的鋁載體可作為一蓋板(entry board),在使用一鑽針的程序中,有利於提升孔洞的位置精準度並有散熱的作用。此一孔洞加工亦可被省略。於該鑽孔加工之後,鋁載體係從該銅薄層分離。一物理或化學方法可被使用以分離該鋁載體以及該銅薄層。鋁與銅係為相異的金屬並因此易於分離。據此,一般而言一物理方法可被使用以分離該鋁載體以及該銅薄層。在以聚醯亞胺作為核芯之材料的情況下,係在約350℃或更高的高溫下結合至該銅薄層,在該載體鋁與該銅薄層之間發生擴散,使得二者之間難以均勻地剝離。在此情況下,需要一方法使用一合適的化學藥品例如:氫氧化鈉,以僅將鋁移除。根據本發明,由於該多孔層係形成於該鋁載體的表面,固有的氧化鋁或氫氧化鋁之厚度可被忽略。 據此,有利於僅使用一鋁蝕刻溶液移除該鋁載體。隨後,該所得之結構係使用一導電聚合物處理或經無電鍍銅。此一處理或鍍敷係於該等孔洞之內壁上形成導電層之程序,以允許電流透過該等孔洞流通。因為該鋁載體已從該銅箔層疊板移除,銅箔層疊板之孔洞加工部分之內壁係由非導電的聚醯亞胺構成,是故形成該導電層。除了該使用導電聚合物或無電鍍銅的處理外,亦可應用其他程序例如:使用碳粒子的黑孔(black hole)及黑影(shadow)程序。於該導電聚合物處理或無電鍍銅後,化學銅鍍敷或直接銅電鍍可進一步於該導電層上進行。隨後一乾膜係附著至該經導電性加工的基材上,曝光以形成一正像,並經顯影。隨後,該用於電路形成之暴露部分係鍍敷上銅以形成電路,以及接著該殘留之乾膜係被剝離。隨後,該殘留於部分基底層上的薄銅箔係被蝕刻。隨後,一覆蓋層係鋪設至電路以外的部分,完成印刷電路板之製造。 Here, a manufacturing method according to an embodiment of the present invention, which is described with reference to FIG. 4, The use of a polyimine core is described in more detail. First, using the actual implementation according to the present invention The copper clad laminate of the substrate produced by the example was cut to a predetermined size. Subsequently, the cut copper clad laminate is selectively processed to form a hole. Circuits formed on both sides of the substrate are in electrical communication with each other through the holes. The holes are typically formed by machining, using CNC drilling or laser drilling. Alternatively, the pores can be formed by chemical processing using a polyimide etchant. The aluminum carrier used in the specific embodiment of the present invention can be used as an entry board. In the procedure of using a drill, it is advantageous to improve the positional accuracy of the hole and to dissipate heat. This hole machining can also be omitted. After the drilling process, the aluminum carrier is separated from the thin layer of copper. A physical or chemical process can be used to separate the aluminum support and the thin layer of copper. Aluminum and copper are dissimilar metals and are therefore easy to separate. Accordingly, a physical method can generally be used to separate the aluminum support and the thin layer of copper. In the case of a material having a polyimine as a core, it is bonded to the copper thin layer at a high temperature of about 350 ° C or higher, and diffusion occurs between the carrier aluminum and the copper thin layer, so that It is difficult to peel evenly between them. In this case, a method is needed to use a suitable chemical such as sodium hydroxide to remove only aluminum. According to the present invention, since the porous layer is formed on the surface of the aluminum support, the thickness of the intrinsic alumina or aluminum hydroxide can be ignored. Accordingly, it is advantageous to remove the aluminum carrier using only one aluminum etching solution. Subsequently, the resulting structure is treated with a conductive polymer or electroless copper. This processing or plating is a procedure for forming a conductive layer on the inner walls of the holes to allow current to flow through the holes. Since the aluminum carrier has been removed from the copper foil laminate, the inner wall of the hole-processed portion of the copper foil laminate is composed of a non-conductive polyimide, so that the conductive layer is formed. In addition to the treatment using a conductive polymer or electroless copper plating, other procedures such as a black hole using a carbon particle and a shadow program can be applied. After the conductive polymer treatment or electroless copper plating, chemical copper plating or direct copper plating may be further performed on the conductive layer. A dry film is then attached to the electrically conductive substrate, exposed to form a positive image, and developed. Subsequently, the exposed portion for circuit formation is plated with copper to form an electrical circuit, and then the remaining dry film is peeled off. Subsequently, the thin copper foil remaining on a portion of the base layer is etched. Subsequently, a cover layer is laid out to the portion other than the circuit to complete the manufacture of the printed circuit board.

本發明將參照下述之實施例更為詳盡地說明。 The invention will be explained in more detail with reference to the following examples.

實施例 Example

(1)鋁載體表面去油(清潔以及多孔層形成) (1) Degreasing of aluminum carrier surface (cleaning and formation of porous layer)

一鋁載體係使用稀釋之去油劑(Al clean 193,YMT)去油,於30-50℃下進行2-5分鐘,以從其表面上移除污染物例如:有機物質。藉此,該鋁載體之表面被部分蝕刻,以形成一多孔層。 An aluminum support was degreased using a diluted degreaser (Al clean 193, YMT) and allowed to stand at 30-50 ° C for 2-5 minutes to remove contaminants such as: organic matter from its surface. Thereby, the surface of the aluminum carrier is partially etched to form a porous layer.

(2)鉻-聚合物層(密封層)之形成 (2) Formation of chromium-polymer layer (sealing layer)

一薄鉻(Cr)-聚合物膜係被形成於該經去油之鋁上(於該多孔層上)。該鉻-聚合物膜的形成有助於一銅薄層與該底層鋁層之間的分離。該鉻-聚合物膜係藉由在50-70℃下浸泡於一鉻(1wt%)的酸性水溶液中10-15分鐘被後處理。該酸性水溶液係CrF3.3H2O與聚乙二醇(PEG)之混合物。 A thin chromium (Cr)-polymer film is formed on the degreased aluminum (on the porous layer). The formation of the chromium-polymer film facilitates separation between a thin layer of copper and the underlying aluminum layer. The chromium-polymer film is immersed in a chromium at 50-70 ° C ( 1 wt%) of the acidic aqueous solution was post-treated for 10-15 minutes. The acidic aqueous solution is CrF 3 . A mixture of 3H 2 O and polyethylene glycol (PEG).

(3)銅鍍敷 (3) Copper plating

無電鍍銅係在30-50℃下於該鉻-聚合物層進行5-15分鐘。該銅薄層之厚度係經由增加或減少鍍敷時間進行調整。 The electroless copper is applied to the chromium-polymer layer at 30-50 ° C for 5-15 minutes. The thickness of the copper layer is adjusted by increasing or decreasing the plating time.

(4)樹脂塗佈(黏附層之形成) (4) Resin coating (formation of adhesion layer)

該經銅鍍敷之鋁載體係用於製造一覆銅層疊板。為達此一目的,一樹脂係塗佈至該銅薄層之表面上,具有約7-9μm的厚度。聚乙烯(PE)或環氧樹脂係取決於後續步驟中要被層疊之基底而被作為樹脂使用。該經樹脂塗佈之結構係在80-100℃下於一烘箱中乾燥至少5分鐘,以移除存在於該樹脂中之溶劑。 The copper-plated aluminum carrier is used to manufacture a copper clad laminate. To achieve this, a resin is applied to the surface of the copper thin layer to have a thickness of about 7 to 9 μm. Polyethylene (PE) or epoxy resin is used as a resin depending on the substrate to be laminated in the subsequent step. The resin coated structure was dried in an oven at 80-100 ° C for at least 5 minutes to remove the solvent present in the resin.

(5)層疊(核芯結合) (5) cascading (core bonding)

該經樹脂塗佈之結構係被層疊於一底層基底上,該底層基底例如:PET、PEN、PI或預浸漬體(Pre-preg)取決於其所欲之應用。當該基底係一軟性材料時係使用一卷對卷程序(roll-to-roll process),以及當該基底為剛性時係使 用一熱壓程序。 The resin coated structure is laminated to an underlying substrate such as PET, PEN, PI or Pre-preg depending on the desired application. When the substrate is a soft material, a roll-to-roll process is used, and when the substrate is rigid, the system is made Use a hot pressing procedure.

(6)鋁載體之移除 (6) Removal of aluminum carrier

該不必要之鋁載體係自該層疊結構中移除。由於(2)中形成之離型層的存在,該鋁載體之剝離強度不高於100gf/cm。 This unnecessary aluminum carrier is removed from the laminate structure. The peel strength of the aluminum support is not higher than 100 gf/cm due to the presence of the release layer formed in (2).

評量實施例 Evaluation example

該載體與該銅薄層之剝離強度係藉由90°剝離測試測量。 The peel strength of the carrier and the copper layer was measured by a 90 peel test.

不具有分離誘導層之一比較產品表現約300gf/cm的剝離強度,以及在具有分離誘導層經約30℃下3分鐘處理後形成的產品中,發現銅薄層與載體間具有約100gf/cm或更小的剝離強度。這些結果顯示該銅箔誘導層之存在,可促進該銅薄層之轉移後,該銅薄層與該載體間的剝離。 The peeling strength of about 300 gf/cm of the comparative product was exhibited without one of the separation inducing layers, and about 100 gf/cm between the thin layer of copper and the carrier was found in the product formed after the separation inducing layer was treated at about 30 ° C for 3 minutes. Or less peel strength. These results show the presence of the copper foil inducing layer which promotes the peeling of the copper thin layer from the carrier after the transfer of the copper thin layer.

該銅薄層與該載體之間剝離強度的差異係取決於該載體之表面粗糙度。當該載體藉由使用一鹼性化合物之蝕刻溶液蝕刻約0.1μm時,獲得約1.5-2.0的表面粗糙度(surface roughness,Ra)。當該載體使用包含一腐蝕抑制劑作為功能性添加物之蝕刻溶液細微地蝕刻約0.1μm時,獲得約0.4-0.5的表面粗糙度(Ra)。 The difference in peel strength between the copper thin layer and the support depends on the surface roughness of the support. When the carrier is etched by using an etching solution of a basic compound for about 0.1 μm, a surface roughness (Ra) of about 1.5 to 2.0 is obtained. When the carrier is finely etched by about 0.1 μm using an etching solution containing a corrosion inhibitor as a functional additive, a surface roughness (Ra) of about 0.4 to 0.5 is obtained.

該鋁載體之表面粗糙度隨著厚度之減少而減少。據此,無電鍍銅減少該載體與該銅薄層之間的剝離強度從約300gf/cm至約200gf/cm,致使其彼此間更易於剝離。 The surface roughness of the aluminum carrier decreases as the thickness decreases. Accordingly, the electroless copper reduces the peel strength between the carrier and the copper thin layer from about 300 gf/cm to about 200 gf/cm, making it easier to peel off from each other.

雖然本發明之技術思想已參照上述之具體實施例揭露,所屬技術領域中具有通常知識者將了解,可以進行多種變化與修改,而不背離本發明之主要特徵。因此,該等具體實施例僅為說明性,且不應被視為限制本發明之技術思想。本發明之範疇係藉由所附之申請專利範圍界定,且落入該申請專利範圍之均等範圍中的所有技術思想應被視為落入本發明之範疇中。 Although the technical idea of the present invention has been disclosed with reference to the specific embodiments of the present invention, it will be understood by those skilled in the art that various changes and modifications can be made without departing from the essential features of the invention. Therefore, the specific embodiments are merely illustrative and should not be construed as limiting the technical idea of the invention. The technical scope of the present invention is defined by the scope of the appended claims, and all technical ideas falling within the scope of the claims are intended to fall within the scope of the invention.

S1‧‧‧步驟一 S1‧‧‧Step one

S2‧‧‧步驟二 S2‧‧‧Step 2

S3‧‧‧步驟三 S3‧‧‧Step three

S4‧‧‧步驟四 S4‧‧‧Step four

S5‧‧‧步驟五 S5‧‧‧Step five

S6‧‧‧步驟六 S6‧‧‧Step six

S7‧‧‧步驟七 S7‧‧‧Step seven

S8‧‧‧步驟八 S8‧‧‧Step eight

Claims (8)

一種具有銅薄層構成之基材的生產方法,該方法包括:提供一載體;於該載體之表面上形成一分離誘導層;於該分離誘導層上形成一銅薄層;以及結合一核芯至該銅薄層,其中該載體係由鋁構成,以及該分離誘導層係藉由於該載體表面上形成一多孔層,並於具有該多孔層構成之載體的表面上塗佈一密封劑形成。 A method for producing a substrate having a thin layer of copper, the method comprising: providing a carrier; forming a separation inducing layer on a surface of the carrier; forming a thin layer of copper on the separation inducing layer; and combining a core To the copper thin layer, wherein the carrier is composed of aluminum, and the separation inducing layer is formed by forming a porous layer on the surface of the carrier and coating a surface of the carrier having the porous layer with a sealant. . 如申請專利範圍第1項所述之方法,其中該多孔層係使用一溶劑於該載體表面上形成,該溶劑包含至少一化合物選自由鹼性化合物、鐵化合物以及碳酸化合物所組成之群組。 The method of claim 1, wherein the porous layer is formed on the surface of the support using a solvent comprising at least one compound selected from the group consisting of a basic compound, an iron compound, and a carbonic acid compound. 如申請專利範圍第1項所述之方法,其中該多孔層係藉由無電蝕刻於該載體表面上形成。 The method of claim 1, wherein the porous layer is formed on the surface of the support by electroless etching. 如申請專利範圍第1項所述之方法,其中該多孔層係於包含鋁之載體表面上形成。 The method of claim 1, wherein the porous layer is formed on a surface of a support comprising aluminum. 如申請專利範圍第1項所述之方法,其中該塗佈至具有多孔層構成之載體的表面的密封劑包含至少一材料選自由鈷-鉻、金屬-聚合物複合物、氮化硼、二硫化鉬以及聚四氟乙烯所組成之群組。 The method of claim 1, wherein the sealant applied to the surface of the carrier having the porous layer comprises at least one material selected from the group consisting of cobalt-chromium, metal-polymer composites, boron nitride, and A group consisting of molybdenum sulfide and polytetrafluoroethylene. 一種印刷電路板之製造方法,該方法包含:提供藉由如申請專利範圍第1項所述之方法生產之具有銅薄層構成之基材;從該基材中分離該載體以及該分離誘導層; 於該銅薄層上形成用於圖案形成之一遮罩並藉由電鍍於該銅薄層上形成一銅圖案;移除該用於圖案形成之遮罩;以及移除該銅薄層以留下一圖案化銅電路。 A method of manufacturing a printed circuit board, comprising: providing a substrate having a thin layer of copper produced by the method of claim 1; separating the carrier and the separation inducing layer from the substrate ; Forming a mask for patterning on the copper thin layer and forming a copper pattern by plating on the copper thin layer; removing the mask for pattern formation; and removing the copper thin layer to leave The next patterned copper circuit. 一種印刷電路板,其係藉由如申請專利範圍第6項所述之方法製造。 A printed circuit board manufactured by the method of claim 6 of the patent application. 一種基材,包含:一載體,其係由鋁製成;一分離誘導層,其係形成於該載體表面之上;一銅薄層,其係形成於該分離誘導層之上;以及一核芯,其係結合至該銅薄層,其中該分離誘導層係由一多孔鋁層及一密封層所組成,該密封層係形成於該多孔鋁層之上。 A substrate comprising: a carrier made of aluminum; a separation inducing layer formed on the surface of the carrier; a thin layer of copper formed on the separation inducing layer; and a core a core bonded to the copper thin layer, wherein the separation inducing layer is composed of a porous aluminum layer and a sealing layer formed on the porous aluminum layer.
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