TWI523139B - Protective sheet and method for conveying substrate - Google Patents
Protective sheet and method for conveying substrate Download PDFInfo
- Publication number
- TWI523139B TWI523139B TW099125847A TW99125847A TWI523139B TW I523139 B TWI523139 B TW I523139B TW 099125847 A TW099125847 A TW 099125847A TW 99125847 A TW99125847 A TW 99125847A TW I523139 B TWI523139 B TW I523139B
- Authority
- TW
- Taiwan
- Prior art keywords
- protective sheet
- substrate
- glass substrate
- molecular weight
- weight
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D57/00—Internal frames or supports for flexible articles, e.g. stiffeners; Separators for articles packaged in stacks or groups, e.g. for preventing adhesion of sticky articles
- B65D57/002—Separators for articles packaged in stacks or groups, e.g. stacked or nested
- B65D57/003—Separators for articles packaged in stacks or groups, e.g. stacked or nested for horizontally placed articles, i.e. for stacked or nested articles
- B65D57/004—Separators for articles packaged in stacks or groups, e.g. stacked or nested for horizontally placed articles, i.e. for stacked or nested articles the articles being substantially flat panels, e.g. wooden planks
Landscapes
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Wood Science & Technology (AREA)
- Mechanical Engineering (AREA)
- Packaging Frangible Articles (AREA)
- Buffer Packaging (AREA)
- Pallets (AREA)
- Wrappers (AREA)
Description
本發明係關於被用在積層彩色濾光片等所使用基板的保護片及基板之輸送方法。The present invention relates to a protective sheet used for a substrate used for a laminated color filter or the like and a method of transporting the substrate.
近年來隨著液晶顯示裝置的大型化,用以製造彩色濾光片的玻璃基板亦使用大型尺寸者(例如一邊為1m以上)。如上所示之玻璃基板係具有厚度薄(例如1mm以下)、易彎曲的性質。因此,玻璃基板大部分1枚1枚地被收納在專用托架(tray)。In recent years, as the size of the liquid crystal display device has increased, the glass substrate for manufacturing the color filter has also been used in a large size (for example, 1 m or more on one side). The glass substrate as described above has a property of being thin (for example, 1 mm or less) and being easily bendable. Therefore, most of the glass substrates are housed in a dedicated tray one by one.
第2圖係習知之玻璃基板輸送托架的斜視圖,第3圖係顯示積層第2圖所示之玻璃基板輸送托架的狀態的斜視圖。Fig. 2 is a perspective view showing a conventional glass substrate transport carriage, and Fig. 3 is a perspective view showing a state in which a glass substrate transport carriage shown in Fig. 2 is laminated.
玻璃基板輸送托架101係用以在輸送時等收納玻璃基板102者,由托架狀金屬框103;用以載置玻璃基板102的緩衝構件104;及用以支持緩衝構件的橫栓105所構成。The glass substrate transport tray 101 is used for accommodating the glass substrate 102 during transportation, such as a bracket-shaped metal frame 103, a buffer member 104 for mounting the glass substrate 102, and a horizontal plug 105 for supporting the cushion member. Composition.
在該玻璃基板輸送托架101收納有1枚玻璃基板102。此時為了使玻璃基板102完全收入在玻璃基板輸送托架101內,玻璃基板輸送托架101的深度係設計地比玻璃基板102的厚度充分大。One glass substrate 102 is accommodated in the glass substrate transfer tray 101. At this time, in order to completely absorb the glass substrate 102 in the glass substrate transport tray 101, the depth of the glass substrate transport tray 101 is designed to be sufficiently larger than the thickness of the glass substrate 102.
如第3圖所示,收納有玻璃基板102的複數玻璃基板輸送托架101係在彼此相疊合的狀態下予以輸送。此時,玻璃基板102係被收納在玻璃基板輸送托架101的內側,因此防止玻璃基板102、與疊合在其上段的輸送托架101相接觸。As shown in FIG. 3, the plurality of glass substrate transport trays 101 in which the glass substrate 102 is housed are transported in a state of being superposed on each other. At this time, since the glass substrate 102 is accommodated inside the glass substrate conveyance bracket 101, the glass substrate 102 is prevented from coming into contact with the conveyance bracket 101 superposed on the upper stage.
[專利文獻1]日本特開2004-59116號公報[Patent Document 1] Japanese Patent Laid-Open Publication No. 2004-59116
但是,若按每1枚玻璃基板102使用1個玻璃基板輸送托架101,由於在卡車或貨櫃係具有裝載空間的高度限制,因此一次可搬送的玻璃基板102的枚數受到限制,會有導致輸送成本增加的問題。However, when one glass substrate transport tray 101 is used for each glass substrate 102, the height of the loading space is limited in the truck or the container system, so the number of glass substrates 102 that can be transported at one time is limited, which may result in The problem of increased transportation costs.
因此,本發明之目的在提供可一面防止因基板彼此接觸所造成的傷痕、破損發生,一面可進行有效率的基板輸送的保護片及基板之輸送方法。Accordingly, an object of the present invention is to provide a protective sheet and a method for transporting a substrate which can efficiently transport substrates while preventing scratches and breakage due to contact between substrates.
本發明係關於在積層複數基板時,被夾在基板各個之間的保護片。該保護片之特徵在於由不織布所構成。The present invention relates to a protective sheet sandwiched between respective substrates when a plurality of substrates are laminated. The protective sheet is characterized by being composed of a non-woven fabric.
此外,本發明係關於彩色濾光片所代表之基板之輸送方法。在該輸送方法中,其特徵為在托板(pallet)的內部構成交替堆疊由不織布所構成的保護片及基板的積層體。Further, the present invention relates to a method of transporting a substrate represented by a color filter. In the transport method, a laminate in which a protective sheet and a substrate composed of a non-woven fabric are alternately stacked is formed inside a pallet.
若使用本發明之保護片,可使基板無須相互接觸而可相積層。藉此,可防止基板的傷痕、破損。此外,由於可減小基板積層體的高度,因此可進行有效率的搬送。If the protective sheet of the present invention is used, the substrates can be laminated without being in contact with each other. Thereby, it is possible to prevent scratches and breakage of the substrate. Further, since the height of the substrate laminate can be reduced, efficient transportation can be performed.
第1圖係顯示使用本發明之實施形態之保護片的基板之搬送方法的剖面圖。更為特定而言,(a)係顯示基板積層過程圖,(b)係顯示基板積層後的狀態圖,(c)係搬送所積層的基板的狀態圖。Fig. 1 is a cross-sectional view showing a method of transporting a substrate using a protective sheet according to an embodiment of the present invention. More specifically, (a) shows a substrate stacking process diagram, (b) shows a state diagram after the substrate is laminated, and (c) shows a state diagram of the stacked substrate.
本發明之實施形態之保護片1係作為積層基板2時的保護材加以使用。具體而言,如第1圖(a)所示,保護片1係被夾在所積層基板2的各個之間。該保護片1係由不織布所構成。不織布若為由例如乙烯系聚合物所構成者,即適於使用,但是並非特別限定於此。其中,乙烯系聚合物係指由相對乙烯,添加少量碳數3~20之烯烴作為共聚單體者所構成的聚合物。以乙烯系聚合物而言,列舉有聚乙烯(PE)。PE係加工性最佳,容易成形為不織布。此外,PE係通用性樹脂之中最為柔軟,不需要添加以軟化為目的的添加劑等。由該等,與使用其他素材的情形相比,可抑制不織布的製造成本。其中,在本說明書中,基板2係包含成為製造彩色濾光片的材料的玻璃基板、完成品的彩色濾光片基板、中間品的基板(在玻璃基板上形成有至少1種層的基板)的總稱。The protective sheet 1 according to the embodiment of the present invention is used as a protective material when the substrate 2 is laminated. Specifically, as shown in FIG. 1( a ), the protective sheet 1 is sandwiched between the laminated substrates 2 . This protective sheet 1 is composed of a non-woven fabric. The nonwoven fabric is preferably made of, for example, a vinyl polymer, but is not particularly limited thereto. Here, the ethylene-based polymer means a polymer composed of a small amount of an olefin having 3 to 20 carbon atoms as a comonomer with respect to ethylene. Polyethylene (PE) is mentioned as a vinyl type polymer. The PE system has the best processability and is easily formed into a non-woven fabric. Further, the PE-based general-purpose resin is the softest, and it is not necessary to add an additive for softening. From these, the manufacturing cost of the nonwoven fabric can be suppressed as compared with the case of using other materials. In the present specification, the substrate 2 includes a glass substrate which is a material for manufacturing a color filter, a color filter substrate of a finished product, and a substrate of an intermediate product (a substrate having at least one layer formed on the glass substrate) The general term.
在此,若構成保護片1的不織布由乙烯系聚合物所構成時,以該乙烯系聚合物的數平均分子量(Mw)為17000以上,將重量平均分子量除以數平均分子量(Mw/Mn)所得的值為5以下為佳。若Mw低於17000或Mw/Mn超過5,低分子量成分會由不織布溶出,而造成基板2污染。Here, when the nonwoven fabric constituting the protective sheet 1 is composed of a vinyl polymer, the number average molecular weight (Mw) of the vinyl polymer is 17,000 or more, and the weight average molecular weight is divided by the number average molecular weight (Mw/Mn). The value obtained is preferably 5 or less. If Mw is less than 17,000 or Mw/Mn exceeds 5, the low molecular weight component will be eluted from the nonwoven fabric, causing contamination of the substrate 2.
構成不織布的乙烯系聚合物中的分子量1000以下的成分的重量分率係以1.0重量%以下為佳。若該重量分率超過1.0重量%,低分子量成分會由不織布溶出,而造成基板2污染。The component having a molecular weight of 1,000 or less in the ethylene-based polymer constituting the nonwoven fabric preferably has a weight fraction of 1.0% by weight or less. If the weight fraction exceeds 1.0% by weight, the low molecular weight component is eluted from the nonwoven fabric to cause contamination of the substrate 2.
構成不織布的乙烯系聚合物所含有的氯原子的重量分率係以5重量ppm以下為較佳。若含有氯原子的重量分率超過5重量ppm,氯原子本身會由不織布溶出而發生基板2污染。或者,在氯原子存在下,乙烯聚合物的熱安定性會降低,由此低分子量成分會由不織布溶出,而發生基板2污染。其中,Mw及Mw/Mn、分子量1000以下之成分的重量分率、及含有氯原子的重量分率若同時滿足上述範圍,則更佳。The weight fraction of chlorine atoms contained in the ethylene-based polymer constituting the nonwoven fabric is preferably 5 ppm by weight or less. When the weight fraction containing chlorine atoms exceeds 5 ppm by weight, the chlorine atoms themselves are eluted from the nonwoven fabric to cause contamination of the substrate 2. Alternatively, in the presence of a chlorine atom, the thermal stability of the ethylene polymer is lowered, whereby the low molecular weight component is eluted from the nonwoven fabric, and the substrate 2 is contaminated. Among them, Mw and Mw/Mn, a weight fraction of a component having a molecular weight of 1,000 or less, and a weight fraction containing a chlorine atom are more preferably at the same time satisfying the above range.
為了搬送基板2,首先,使用用以搬送基板2的機械手等(未圖示),如(a)所示,在托板3內依序收容保護片1與基板2。接著,如(b)所示,藉由交替積層預定枚數的保護片1與基板2,在托板3的內側形成積層體10。In order to convey the substrate 2, first, a robot or the like (not shown) for transporting the substrate 2 is used, and as shown in (a), the protective sheet 1 and the substrate 2 are sequentially housed in the pallet 3. Next, as shown in (b), the laminated body 10 is formed inside the pallet 3 by alternately stacking a predetermined number of the protective sheets 1 and the substrate 2.
接著,如(c)所示,收容有積層體10的托板3係藉由例如叉動車(Folk lift)而被輸送至卡車或貨櫃。Next, as shown in (c), the pallet 3 in which the laminated body 10 is accommodated is conveyed to a truck or a container by, for example, a fork lift.
如以上所示,以夾在基板2之間的方式設置保護片1,藉此防止基板2彼此接觸。此外,由於保護片1係以不織布所形成,因此藉由保護片1本身,不會有基板2產生傷痕的情形。藉由該等,防止所積層的基板2的傷痕及破損發生。As shown above, the protective sheets 1 are provided in such a manner as to be sandwiched between the substrates 2, thereby preventing the substrates 2 from coming into contact with each other. Further, since the protective sheet 1 is formed by a non-woven fabric, there is no possibility that the substrate 2 is scratched by the protective sheet 1 itself. By these, it is possible to prevent the occurrence of scratches and breakage of the laminated substrate 2.
此外,當積層相同枚數的基板2時,如習知技術所示,與使用各1枚1枚收容玻璃基板的托架的情形(第3圖)相比,積層體10的高度會變低。藉此,增加在一定輸送空間可輸送的枚數,可效率佳地收容且輸送基板2,因此實現平均基板1枚的輸送成本減低。 Further, when the same number of substrates 2 are laminated, as shown in the prior art, the height of the laminated body 10 becomes lower than in the case of using one bracket for accommodating a glass substrate (Fig. 3). . Thereby, the number of pieces that can be transported in a certain transport space is increased, and the substrate 2 can be efficiently accommodated and transported, so that the transport cost of one average substrate is reduced.
其中,在上述實施形態中,係使用大於基板的保護片。但是,若為可防止基板彼此接觸者,其大小並未特別限定。亦可使用例如與基板為相同尺寸者。 Among them, in the above embodiment, a protective sheet larger than the substrate is used. However, if it is possible to prevent the substrates from coming into contact with each other, the size thereof is not particularly limited. It is also possible to use, for example, the same size as the substrate.
此外,在上述實施形態中,係在托板積層基板,但是托板的種類並非特別限定於此。例如,亦可使用可收容更多枚數的基板者。 Further, in the above embodiment, the substrate is laminated on the pallet, but the type of the pallet is not particularly limited thereto. For example, a person who can accommodate a larger number of substrates can also be used.
以下針對具體實施本發明的實施例加以說明。 The embodiments of the present invention will be described below.
在實施例1之保護片係使用由聚乙烯(PE)所構成的不織布(單位面積重量=30g/m2)。在PE係使用重量平均分子量(Mw)為37000,將重量平均分子量除以數平均分子量所得的數值(Mw/Mn)為3.0,分子量1000以下的聚合物含有率為1%以下,所含有的氯原子為5ppm以下者。 In the protective sheet of Example 1, a non-woven fabric (weight per unit area = 30 g/m 2 ) composed of polyethylene (PE) was used. The PE has a weight average molecular weight (Mw) of 37,000, a weight average molecular weight divided by a number average molecular weight (Mw/Mn) of 3.0, a molecular weight of 1000 or less, a polymer content of 1% or less, and chlorine contained therein. The atom is 5 ppm or less.
實施例2之保護片與實施例1之保護片相比,PE的種類不同。具體而言,係使用Mw為18000、Mw/Mn為3.2、分子量1000以下的聚合物含有率為1%以下、所含有的氯原子為5ppm以下的聚乙烯。 The protective sheet of the second embodiment differs from the protective sheet of the first embodiment in the type of PE. Specifically, a polyethylene having a Mw of 18,000, a Mw/Mn of 3.2, a molecular weight of 1,000 or less, a polymer content of 1% or less, and a chlorine atom of 5 ppm or less is used.
實施例3之保護片與實施例1之保護片相比,PE的種類不同。具體而言,係使用Mw為47000、Mw/Mn為4.0、分子量1000以下的聚合物含有率為1%以下,所含有的氯原子為5%以下的PE。 The protective sheet of Example 3 differs from the protective sheet of Example 1 in the type of PE. Specifically, a polymer having a Mw of 47,000, a Mw/Mn of 4.0, a molecular weight of 1,000 or less, a polymer content of 1% or less, and a chlorine atom of 5% or less is used.
在比較例1之保護片係使用PE膜(旭化成化學股份有限公司製、厚度35μm、單位面積重量30g/m2)。在PE係使用Mw為45000、Mw/Mn為2.5、分子量1000以下的聚合物含有率為1%以下、所含有的氯原子為5%以下者。 In the protective sheet of Comparative Example 1, a PE film (manufactured by Asahi Kasei Chemicals Co., Ltd., thickness: 35 μm, weight per unit area: 30 g/m 2 ) was used. In the PE system, the Mw is 45,000, the Mw/Mn is 2.5, the polymer content of the molecular weight of 1,000 or less is 1% or less, and the chlorine atom contained is 5% or less.
比較例2之保護片與實施例1之保護片相比,PE的種類不同。具體而言,係使用Mw為50000、Mw/Mn為6.0、分子量1000以下的聚合物含有率超過1%、所含有的氯原子為超過5%的PE。其中,比較例2的PE係使用戚格勒-納他觸媒(Ziegler-Natta catalyst)所合成者。 The protective sheet of Comparative Example 2 differed from the protective sheet of Example 1 in the type of PE. Specifically, a polymer having a Mw of 50,000, a Mw/Mn of 6.0, a molecular weight of 1,000 or less, a polymer content of more than 1%, and a chlorine atom of more than 5% is used. Among them, the PE of Comparative Example 2 was synthesized using a Ziegler-Natta catalyst.
比較例3之保護片與實施例1之保護片相比,PE的種類不同。具體而言,係使用Mw為10000、Mw/Mn為3.5、分子量1000以下的聚合物含有率為1%以下、所含有的氯原子為5%以下的PE。 The protective sheet of Comparative Example 3 differed from the protective sheet of Example 1 in the type of PE. Specifically, a polymer having a Mw of 10,000, a Mw/Mn of 3.5, a molecular weight of 1,000 or less, a polymer content of 1% or less, and a chlorine atom of 5% or less is used.
使用實施例1~3及比較例1~3之保護片(750mm×940mm),交替堆積彩色濾光片所使用的玻璃基板(730mm×920mm×厚度0.7mm),在專用托板的內部構成重疊有玻璃基板300枚的積層體。接著,將專用托板裝載在卡車,進行輸送。接著,針對輸送後的玻璃基板,進行以下各項目所示之評估試驗。表1係將評估試驗的結果彙整者。Using the protective sheets (750 mm × 940 mm) of Examples 1 to 3 and Comparative Examples 1 to 3, the glass substrates (730 mm × 920 mm × thickness 0.7 mm) used for the color filters were alternately stacked, and the inside of the dedicated pallet was overlapped. There is a laminated body of 300 glass substrates. Next, the dedicated pallet is loaded on the truck for transportation. Next, the evaluation test shown in the following items was performed about the glass substrate after conveyance. Table 1 is the result of the evaluation of the test results.
[玻璃基板表面的傷痕][Scars on the surface of the glass substrate]
在投影機光源下,目測觀察輸送後的玻璃基板表面。此外,在彩色濾光片製造線的自動檢查中檢查該基板表面。藉由「○:無發生傷痕、×:有發生傷痕」來評估該等結果。The surface of the glass substrate after the conveyance was visually observed under a projector light source. Further, the surface of the substrate is inspected in an automatic inspection of the color filter manufacturing line. These results were evaluated by "○: no scars occurred, ×: scars occurred".
[玻璃基板表面的污染][Contamination of the surface of the glass substrate]
在投影機光源下目測觀察輸送後玻璃基板的表面。此外,藉由乙醇抽出積層前及輸送後的玻璃基板表面,藉由離子色層分析(ion chromatography)測定出離子檢測量,而將兩者的值作比較。藉由「○:沒有目測所得之污染,而且輸送前後的離子檢測量沒有差,×:有目視所得之污染,或者輸送前後的離子檢量有差」來評估該等的結果。The surface of the glass substrate after the conveyance was visually observed under a projector light source. Further, the surface of the glass substrate before and after the deposition was extracted by ethanol, and the ion detection amount was measured by ion chromatography, and the values of the two were compared. The results were evaluated by "○: no visually-obtained contamination, and there was no difference in the amount of ion detection before and after the transport, x: there was visual contamination, or the ion-detection amount before and after the transport was poor".
即使使用實施例1~3的任一保護片,均未發現在輸送後的玻璃基板發生傷痕及污染。因此,藉由構成玻璃基板及由不織布所構成之保護片的積層體,即使使用任一保護片,均可效率佳地輸送玻璃基板。Even when any of the protective sheets of Examples 1 to 3 was used, no scratches and contamination were observed in the glass substrate after the conveyance. Therefore, by using the laminated body which comprises a glass substrate and the protective sheet which consists of a nonwoven fabric, even if it is using any protective sheet, the glass substrate can be conveyed efficiently.
另一方面,在使用比較例1之保護片所輸送的玻璃基板並未發現有傷痕發生。此係因為比較例1之保護片由膜所構成之故。亦即,玻璃基板彼此的接觸雖被防止,但是膜本身會使玻璃基板產生傷痕。由此確認出在保護片使用不織布的有效性。On the other hand, no scar was observed in the glass substrate conveyed by using the protective sheet of Comparative Example 1. This is because the protective sheet of Comparative Example 1 is composed of a film. That is, although the contact of the glass substrates with each other is prevented, the film itself causes scratches on the glass substrate. This confirmed the effectiveness of using a non-woven fabric on the protective sheet.
此外,在使用比較例2之保護片所輸送的玻璃基板並未發現有污染發生。此係因為在相對上,比較例2之構成保護片的Mw/Mn大、而且分子量1000以下的聚合物的比例高、及所含有氯原子的比例多之故。亦即,以第一個原因而言,列舉低分子量的PE含有比率變高。PE的低分子量成分係與其他PE成分的關連較弱,因此若保護片接觸到玻璃基板表面,則低分子量的PE容易移至玻璃基板表面之故。此外,以第二個原因而言,列舉出含有大量氯原子。Further, no contamination was observed in the glass substrate conveyed by using the protective sheet of Comparative Example 2. This is because the ratio of the Mw/Mn of the protective sheet of Comparative Example 2 is large, and the ratio of the polymer having a molecular weight of 1,000 or less is high, and the ratio of chlorine atoms contained therein is large. That is, for the first reason, the low molecular weight PE content ratio is high. Since the low molecular weight component of PE is weakly related to other PE components, if the protective sheet contacts the surface of the glass substrate, the low molecular weight PE easily moves to the surface of the glass substrate. Further, for the second reason, a large amount of chlorine atoms are listed.
因氯原子的存在,聚合物的熱安定性降低,因分子鏈分解而發生低分子量的PE,該低分子量的PE容易移至玻璃基板表面之故。Due to the presence of chlorine atoms, the thermal stability of the polymer is lowered, and low molecular weight PE occurs due to molecular chain decomposition, and the low molecular weight PE easily migrates to the surface of the glass substrate.
此外,關於使用比較例3之保護片所輸送的玻璃基板,亦未發現有污染發生。此係在相對上,構成比較例3之保護片的PE的Mw小之故。關於該等,亦列舉出低分子量之PE含有比率高為原因。Further, no contamination was observed in the glass substrate conveyed by the protective sheet of Comparative Example 3. In this case, the Mw of the PE constituting the protective sheet of Comparative Example 3 was relatively small. Regarding these, it is also cited that the low molecular weight PE content ratio is high.
由比較例2及3的結果可知,調整構成不織布的PE的Mw、Mw/Mn、分子量1000以下的PE含有比率及氯原子含有比率,在玻璃基板防止污染發生方面極具效果。From the results of Comparative Examples 2 and 3, it was found that adjusting the Mw, Mw/Mn of the PE constituting the nonwoven fabric, the PE content ratio of the molecular weight of 1,000 or less, and the chlorine atom content ratio were extremely effective in preventing contamination of the glass substrate.
本發明係可利用在用以積層彩色濾光片等所使用基板的保護片及基板之輸送方法。In the present invention, a protective sheet for transferring a substrate used for a color filter or the like and a method of transporting the substrate can be used.
1...保護片1. . . Protective sheet
2...基板2. . . Substrate
3...托板3. . . Pallet
10...積層體10. . . Laminated body
101...玻璃基板輸送托架101. . . Glass substrate transport bracket
102...玻璃基板102. . . glass substrate
103...金屬框103. . . Metal frame
104...緩衝構件104. . . Cushion member
105...橫栓105. . . Cross bolt
第1圖(a)~(c)係顯示使用本發明之實施形態之保護片的基板之輸送方法的剖面圖。Fig. 1 (a) to (c) are cross-sectional views showing a method of transporting a substrate using a protective sheet according to an embodiment of the present invention.
第2圖係習知之玻璃基板收納托架的斜視圖。Fig. 2 is a perspective view of a conventional glass substrate storage tray.
第3圖係顯示積層第2圖所示之收納托架的狀態的斜視圖。Fig. 3 is a perspective view showing a state in which the storage tray shown in Fig. 2 is laminated.
1...保護片1. . . Protective sheet
2...基板2. . . Substrate
3...托板3. . . Pallet
10...積層體10. . . Laminated body
Claims (8)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009182705 | 2009-08-05 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201118974A TW201118974A (en) | 2011-06-01 |
TWI523139B true TWI523139B (en) | 2016-02-21 |
Family
ID=43544121
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW099125847A TWI523139B (en) | 2009-08-05 | 2010-08-04 | Protective sheet and method for conveying substrate |
Country Status (3)
Country | Link |
---|---|
JP (1) | JPWO2011016211A1 (en) |
TW (1) | TWI523139B (en) |
WO (1) | WO2011016211A1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5787783B2 (en) * | 2012-02-09 | 2015-09-30 | 京セラ株式会社 | Panel member and transfer device |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4224381B2 (en) * | 2003-02-28 | 2009-02-12 | フタムラ化学株式会社 | Glass-like board slip |
JP2008101282A (en) * | 2006-10-17 | 2008-05-01 | Daifuku Paper Mfg Co Ltd | Interleaving paper and method for producing the same |
JP2009108177A (en) * | 2007-10-30 | 2009-05-21 | Asahi Kasei Chemicals Corp | Ethylene-based polymer for nonwoven fabric and nonwoven fabric |
JP5048543B2 (en) * | 2007-12-27 | 2012-10-17 | ユニチカ株式会社 | Buffer sheet on glass plate |
-
2010
- 2010-07-30 WO PCT/JP2010/004849 patent/WO2011016211A1/en active Application Filing
- 2010-07-30 JP JP2011525778A patent/JPWO2011016211A1/en active Pending
- 2010-08-04 TW TW099125847A patent/TWI523139B/en active
Also Published As
Publication number | Publication date |
---|---|
TW201118974A (en) | 2011-06-01 |
JPWO2011016211A1 (en) | 2013-01-10 |
WO2011016211A1 (en) | 2011-02-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TW200909368A (en) | Inserting paper for glass plate and glass plate laminate | |
TWI508853B (en) | Glass plate laminate | |
TWI436931B (en) | Glass plate binding body and glass plate laminated body packing method | |
KR20060069788A (en) | Packaging device for stacked large-sized thin glass panes | |
KR20130033361A (en) | Glass-plate packing body | |
KR20090040068A (en) | Surface protective film, method for preparing the same, pouch using the surface protective film and method for preparing the same | |
WO2010013585A1 (en) | Glass plate package body | |
KR20130139191A (en) | Method for stacking glass sheet stack, glass sheet stack and glass sheet packing body | |
WO2012115109A1 (en) | Glass plate stack, and method of extracting glass plate | |
JP2016169053A (en) | Lamination method of slip sheet to glass plate and removal method of slip sheet from glass plate laminate | |
TWI523139B (en) | Protective sheet and method for conveying substrate | |
KR20190002483U (en) | Packing body and packing container | |
JP2007153395A (en) | Large platelike object packing box | |
JP5630599B2 (en) | Plate-shaped body laminate | |
JP6682224B2 (en) | Raw glass packaging device, raw glass packaging method, and raw glass packaging | |
JP2003267366A (en) | Carrying box of sputtering target | |
JP2006273521A (en) | Inserting method and device for glass plate to vessel groove | |
JP2010275006A (en) | Protective member for protecting substrate and protecting method for substrate using this protective member | |
JP6646385B2 (en) | Separator | |
JP2018530487A (en) | Glass substrate transport structure and method | |
JP2012071878A (en) | Wafer protective sheet | |
JP3966167B2 (en) | Transport system | |
CN211032651U (en) | Transport vehicle | |
WO2017145408A1 (en) | Buffering material for surface protection and method for producing same | |
WO2018008213A1 (en) | Packing device and packing method |