TWI520252B - Substrate discrimination device - Google Patents
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Description
本發明，是關於從基板的搬運路線將基板搬運到其下游之處理裝置的基板區分裝置。The present invention relates to a substrate sorting device for transporting a substrate to a processing device downstream from a conveyance path of a substrate.
例如，作為將半導體的基板搬運到製程裝置等之處理裝置的單片式搬運路線上之基板的滯留對策，可舉出利用將基板暫時性保管的暫存裝置。在以往的暫存裝置中，有藉由機械手臂或托叉將基板遞送於進行昇降的匣式框架與搬運路線之間者(例如，專利文獻1)、或是組裝在搬運路線上的昇降式框架的路線內暫存裝置(例如，專利文獻2)。For example, as a measure for retaining a substrate on a monolithic conveyance path in which a substrate of a semiconductor is transported to a processing device such as a process device, a temporary storage device that temporarily stores the substrate can be cited. In the conventional temporary storage device, the substrate is transported between the frame and the conveyance path by the robot arm or the fork (for example, Patent Document 1) or the lift type assembled on the conveyance path. A temporary storage device in the route of the frame (for example, Patent Document 2).
對於在框架與搬運路線之間遞送基板之暫存裝置之情形，由於是對搬運路線上的基板進行存取，所以必須要有不同於搬運路線的機械手臂或托叉，又，由於要使基板對框架的各段進行取出置入動作，所以必須要有使框架昇降的機構。因此必須使此等構成連動的暫存裝置就變得複雜而大型化。又，由於必須使基板相對於位在搬運路徑之外的框架進行收授，所以也要有在收授基板時用來使基板不會損傷的措施。In the case of the temporary storage device for transferring the substrate between the frame and the transport route, since the substrate on the transport route is accessed, it is necessary to have a robot arm or a fork different from the transport route, and Since the insertion and removal operations are performed on the respective sections of the frame, it is necessary to have a mechanism for lifting the frame. Therefore, it is necessary to make these temporary storage devices complicated and large. Further, since it is necessary to receive the substrate with respect to the frame outside the conveyance path, there is a need to prevent the substrate from being damaged when the substrate is received.
另一方面，對於路線內暫存裝置之情形，由於是被組裝在搬運路線上，所以不需要機械手臂或托叉，因而可以避免裝置的複雜化。又，因為是在搬運路線上進行基板的暫存作用，所以不需要對位在搬運路徑之外的框架進行基板的收授以及該情形下之防止基板損傷措施。就以上此點，路線內暫存裝置比先前的暫存裝置具有優點。然而，由於一面使框架一段段逐一昇降，一面來將基板取出置入，所以造成基板相對於框架的進出成為先進後出方式。因此，當搬運目的地不同的基板混同存在時，就必須設置依搬運目的地類別將基板予以區分的工序。On the other hand, in the case of the temporary storage device in the route, since it is assembled on the conveyance route, the robot arm or the fork is not required, and the complication of the device can be avoided. Further, since the substrate is temporarily stored on the conveyance path, it is not necessary to perform the substrate reception on the frame other than the conveyance path and the substrate damage prevention measures in this case. In this regard, the in-route temporary storage device has advantages over the prior temporary storage device. However, since the substrate is taken out and placed one by one while lifting the frame one by one, the entry and exit of the substrate with respect to the frame becomes a advanced rear-out mode. Therefore, when the substrates having different transfer destinations are mixed, it is necessary to provide a process of distinguishing the substrates according to the transfer destination category.
在將基板依搬運目的地類別進行區分時，例如可以使用橫向輸送機(例如，專利文獻3)。但是，若當區分好的基板滯留在區分目的地之搬運路線上時，不用多久，發生滯留的基板列便越過橫向輸送機而到達其作業前方，導致沒有基板滯留的搬運路線亦變成不能將基板區分。When the substrate is distinguished by the destination type, for example, a lateral conveyor can be used (for example, Patent Document 3). However, when the well-differentiated substrate stays on the transportation route of the destination, it is not necessary for a long time, and the remaining substrate row passes over the lateral conveyor and reaches the front of the work, so that the conveyance path without the substrate remains becomes impossible. distinguish.
[專利文獻1]日本專利第3892494號公報[Patent Document 1] Japanese Patent No. 3892494
[專利文獻2]日本特開2007-15789號公報[Patent Document 2] Japanese Patent Laid-Open Publication No. 2007-15789
[專利文獻3]日本特開2006-312507號公報[Patent Document 3] Japanese Laid-Open Patent Publication No. 2006-312507
針對於要抑制如上述之位在單片式搬運路線上之基板的滯留，不需要使基板移動到搬運路徑之外，並且，即使搬運目的地不同的基板混雜存在之情形也可以確實地對應之構成為佳。In order to suppress the retention of the substrate on the one-piece conveyance path as described above, it is not necessary to move the substrate outside the conveyance path, and even if the substrates having different conveyance destinations are mixed, the corresponding correspondence can be surely performed. The composition is better.
本發明的目的，在於提供一種即使搬運目的地不同的基板混雜存在之情形時，不用使基板移動到搬運路徑之外，就能夠抑制位在搬運路線上之基板的滯留之基板區分裝置。An object of the present invention is to provide a substrate sorting apparatus capable of suppressing the retention of a substrate on a conveyance path without moving the substrate to the conveyance path even when the substrates having different transfer destinations are mixed.
為了達成上述目的，本發明之態樣為：基板區分裝置，係具備有：搬運基板的搬運路線、及設在上述搬運路線的下游，用以處理基板的處理裝置、及設在上述搬運路線與上述處理裝置之間的隨機存取暫存裝置，該隨機存取暫存裝置，具有將基板暫時性地予以保持的複數個保持部，可從上述搬運路線將基板接收於上述複數個保持部之中任意的保持部中，且，可從任意的保持部將基板排出至上述處理裝置；又上述隨機存取暫存裝置，係可於上述保持部所保存著的基板之中，挑選出依上述處理裝置所處理之種類的基板，並排出至上述處理裝置，來作為發明要旨。In order to achieve the above object, an aspect of the present invention provides a substrate sorting apparatus including a transport path for transporting a substrate, a processing device provided downstream of the transport path for processing the substrate, and a transport path provided in the transport path. a random access temporary storage device between the processing devices, wherein the random access temporary storage device has a plurality of holding portions for temporarily holding the substrate, and the substrate can be received by the plurality of holding portions from the transport path In any of the holding portions, the substrate may be discharged from the arbitrary holding portion to the processing device; and the random access temporary storage device may be selected from the substrates stored in the holding portion. The substrate of the type processed by the processing apparatus is discharged to the processing apparatus as the gist of the invention.
依據上述態樣，在將基板從搬運路線搬運至處理裝置時，藉由隨機存取暫存裝置挑選出：被接收於隨機存取暫存裝置之基板之中依處理裝置所處理之種類的基板，並排出至處理裝置。According to the above aspect, when the substrate is transported from the transport route to the processing device, the random access temporary storage device selects a substrate that is received by the processing device among the substrates received by the random access temporary storage device. And discharged to the processing device.
不由處理裝置進行處理之種類的基板，例如，是維持被接收狀態地被保持在隨機存取暫存裝置中。而維持被接收狀態於隨機存取暫存裝置中所保持之其他種類的基板，例如，當處理裝置被更換成處理該其他種類之基板的裝置時，便從隨機存取暫存裝置挑選並排出。The substrate of a type that is not processed by the processing device is held in the random access buffer device, for example, while maintaining the received state. And maintaining other types of substrates held in the random access temporary storage device, for example, when the processing device is replaced with a device for processing the other types of substrates, picking and discharging from the random access temporary storage device .
因此，於隨機存取暫存裝置可以實現：將藉由搬運路線所搬運之基板予以暫時性地保持之暫存處理、以及挑選出依處理裝置所處理之種類的基板的區分處理之兩方。因此，即使搬運目的地不同的基板混雜於搬運路線，可以不用使基板從搬運路徑移動到路徑外地確實抑制基板的滯留。Therefore, in the random access temporary storage device, it is possible to realize both the temporary storage process of temporarily holding the substrate transported by the transport route and the sorting process of selecting the substrate to be processed by the processing device. Therefore, even if the substrates having different transfer destinations are mixed in the transport route, it is possible to surely suppress the retention of the substrate without moving the substrate from the transport path to the outside of the path.
又，基板區分裝置，亦可以更進一步地具備有：使上述隨機存取暫存裝置在包含上述搬運路線之下游位置的複數個位置之間進行移動的移動單元，上述處理裝置，係配置在上述複數個位置之中的第1位置的下游，上述隨機存取暫存裝置，係可於上述保持部所保存著的基板之中，挑選出依上述處理裝置所處理之種類的基板，並於上述第1位置中排出至上述處理裝置。Further, the substrate dividing device may further include: a moving unit that moves the random access temporary storage device between a plurality of positions including a downstream position of the transport path, wherein the processing device is disposed Downstream of the first position among the plurality of positions, the random access temporary storage device selects a substrate of a type processed by the processing device among the substrates stored in the holding portion, and The first position is discharged to the processing device.
依據上述構成，藉由移動單元移動至搬運路線之下游位置的隨機存取暫存裝置，從搬運路線將複數個種類混雜存在的基板接收至各保持部。又，藉由移動單元而移動至第1位置的隨機存取暫存裝置，從被接收於各保持部中的基板之中挑選出依處理裝置所處理之種類的基板並將之排出。According to the above configuration, the mobile unit moves to the random access temporary storage device at the downstream position of the transport path, and the plurality of types of mixed substrates are received from the transport path to the respective holding units. Further, the random access temporary storage device that has moved to the first position by the moving unit picks up and discharges the substrate of the type processed by the processing device from among the substrates received in the respective holding units.
不藉由處理裝置所處理之種類的基板，係藉由：利用移動單元而移動至第1位置以外之位置的隨機存取暫存裝置，依種類別挑選並被排出。例如，於隨機存取暫存裝置移動到第1位置以外之位置的下游處配置有其他的搬運路線之情形時，可以挑選於其搬運路線上進行搬運之對象之種類的基板並將之排出。The substrate that is not processed by the processing device is selected and discharged according to the type of the random access temporary storage device that is moved to a position other than the first position by the moving unit. For example, when another random conveyance route is disposed downstream of the position where the random access temporary storage device moves to the position other than the first position, the substrate of the type to be transported on the conveyance route can be selected and discharged.
因此，藉由移動單元適當地移動隨機存取暫存裝置，藉此可以將隨機存取暫存裝置所接收的基板依種類別區分至各別的搬運目的地。Therefore, by appropriately moving the random access temporary storage device by the mobile unit, the substrate received by the random access temporary storage device can be classified into the respective transfer destinations according to the type.
又，上述基板區分裝置，亦可以更進一步地具備有：配置在上述複數個位置之中之與上述第1位置不同之第2位置的下游，所處理之基板的種類與上述處理裝置不同的其他處理裝置，上述隨機存取暫存裝置，係可於上述保持部所保存著的基板之中，挑選出依上述其他處理裝置所處理之種類的基板，並於上述第2位置中排出至上述其他處理裝置。Further, the substrate dividing device may further include: a downstream portion disposed at a second position different from the first position among the plurality of positions, and a type of the substrate to be processed different from the processing device The processing device, wherein the random access temporary storage device selects a substrate of a type processed by the other processing device among the substrates stored in the holding portion, and discharges the substrate to the other position in the second position Processing device.
依據上述構成，藉由移動單元而移動至與第1位置不同之第2位置的隨機存取暫存裝置，於上述保持部所接收的基板之中，挑選出依其他處理裝置所處理之種類的基板並將之排出。According to the above configuration, the random access temporary storage device that moves to the second position different from the first position by the moving unit selects the type of the substrate processed by the other processing device among the substrates received by the holding unit. The substrate is discharged.
因此，藉由移動單元適當地移動隨機存取暫存裝置，藉此可以將隨機存取暫存裝置所接收的基板依種類別區分至進行對各別之基板之處理的處理裝置。Therefore, by appropriately moving the random access temporary storage device by the mobile unit, the substrate received by the random access temporary storage device can be classified into processing devices for performing processing on the respective substrates.
又，上述基板區分裝置，亦可以更進一步地具備有：配置在上述複數個位置之中之與上述第1位置不同之第2位置的下游，用以搬運基板之其他搬運路線，上述隨機存取暫存裝置，係可於上述保持部所保存著的基板之中，挑選出依上述其他搬運路線所要搬運之種類的基板，並於上述第2位置中排出至上述其他搬運路線。Further, the substrate dividing device may further include: a downstream of the second position different from the first position among the plurality of positions, and another transport route for transporting the substrate, the random access The temporary storage device selects a substrate of a type to be transported by the other conveyance route among the substrates stored in the holding portion, and discharges the substrate to the other conveyance route at the second position.
依據上述構成，隨機存取暫存裝置，係於移動目的地的第2位置，可以挑選出配置在第2位置之下游的其他搬運路線上所要搬運之對象之種類的基板，並將之排出。According to the above configuration, the random access temporary storage device can select the substrate of the type to be transported on the other transport route downstream of the second position, and discharge it at the second position of the destination.
又，上述第1位置，亦可以為上述搬運路線之下游的位置。Further, the first position may be a position downstream of the conveyance path.
又，上述移動單元，亦可在藉由上述隨機存取暫存裝置從上述搬運路線所進行之基板的接收完畢後，當藉由上述處理裝置進行處理之種類的基板從上述保持部全部被排出後時，使上述隨機存取暫存裝置從上述第1位置移動至上述第2位置。Further, the moving unit may be discharged from the holding unit after the receiving of the substrate by the processing means by the random access temporary storage device is completed. Thereafter, the random access temporary storage device is moved from the first position to the second position.
依據本發明的基板區分裝置，即使是搬運目的地不同的基板混雜存在之情形下，不用使基板移動到搬運路徑之外，就能夠抑制位在搬運路線上之基板的滯留。According to the substrate sorting apparatus of the present invention, even when substrates having different transfer destinations are mixed, it is possible to suppress the retention of the substrate on the transport path without moving the substrate to the transport path.
以下，對於本發明之實施形態，一面參照圖面一面加以說明。Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[第1實施形態][First Embodiment]
第1圖是本發明之第1實施形態中，該基板區分裝置1之構成的平面圖。本實施形態的基板區分裝置1，係具有複數種的基板101混雜存在進行搬運的搬運路線3、以及將搬運路線3上的基板101予以區分的隨機存取暫存裝置5。Fig. 1 is a plan view showing the configuration of the substrate separating apparatus 1 in the first embodiment of the present invention. The substrate dividing device 1 of the present embodiment has a plurality of types of substrates 101 in which a transport path 3 for transporting and a random access temporary storage device 5 for distinguishing the substrate 101 on the transport path 3 are mixed.
搬運路線3是由複數個輸送機CV、CV、…所構成。基板101是從搬運路線3之位在第1圖中最左方(左側)之搬入側的輸送機CV被搬入。又，搬運路線3之位在第1圖中最右方(右側)之搬出側的輸送機CV處，接連有隨機存取暫存裝置5的搬入側。於隨機存取暫存裝置5的下游側配置有製程裝置9(處理裝置)。於製程裝置9的上游側及下游側，接連有基板101之搬入用及搬出用的各個輸送機CV。隨機存取暫存裝置5，是將搬運路線3上的基板101，區分成：在製程裝置9進行處理之種類的基板101以及不在製程裝置9進行處理之種類的基板101。The conveyance route 3 is composed of a plurality of conveyors CV, CV, . The substrate 101 is carried in from the conveyor CV on the loading side of the leftmost side (left side) in the first drawing from the position of the conveyance path 3. Further, the conveyance path 3 is located on the carry-in side of the transport side CV of the far right side (right side) in the first drawing, and the carry-in side of the random access temporary storage device 5 is connected. A processing device 9 (processing device) is disposed on the downstream side of the random access buffer device 5. On the upstream side and the downstream side of the processing apparatus 9, the respective conveyors CV for loading and unloading the substrate 101 are connected. The random access temporary storage device 5 divides the substrate 101 on the transport path 3 into a substrate 101 of a type that is processed by the processing device 9 and a substrate 101 of a type that is not processed by the processing device 9.
第2圖，是顯示隨機存取暫存裝置5之具體上之構成的立體圖。如第2圖所示，隨機存取暫存裝置5，係於用來保持基板101的複數個保持部11的兩側具備有能夠昇降的基板支撐機構12。隨機存取暫存裝置5，是藉由基板支撐機構12，使基板101能夠朝向複數個保持部11之中的任意的保持部11進行插入，並且，能夠從正被保持著的複數個基板101之中的任意的基板予以取出。基板支撐機構12，是藉由控制裝置所控制。Fig. 2 is a perspective view showing a concrete configuration of the random access temporary storage device 5. As shown in FIG. 2, the random access temporary storage device 5 is provided with a substrate supporting mechanism 12 capable of moving up and down on both sides of a plurality of holding portions 11 for holding the substrate 101. In the random access temporary storage device 5, the substrate support mechanism 12 allows the substrate 101 to be inserted into any of the plurality of holding portions 11 and can be inserted from the plurality of substrates 101 being held. Any of the substrates is taken out. The substrate support mechanism 12 is controlled by a control device.
對於隨機存取暫存裝置5之構成，為本案申請人先前所提案之日本特開2005-170675公報及日本特開2005-175429公報所記載者。The configuration of the random access temporary storage device 5 is described in Japanese Laid-Open Patent Publication No. 2005-170675 and Japanese Patent Application Laid-Open No. Hei No. 2005-175429.
使用第2圖之隨機存取暫存裝置5之第1圖中的基板區分裝置1，是將搬入到搬運路線3之搬入側的輸送機CV的基板101，從搬運路線3之搬出側的輸送機CV接取，然後藉由搬入側的基板支撐機構12依序插入於隨機存取暫存裝置5之空著的保持部11。此時，讀取貼附於基板101的IC標籤等，來判別基板101的種類。在以後的說明中，是假定在搬運路線3上有基板A101A、基板B101B之2種類作為要被搬入的基板。又，在第1圖的製程裝置9是進行對基板A101A之處理。The substrate dividing device 1 in the first drawing of the random access buffer device 5 of the second drawing is the substrate 101 of the conveyor CV that is carried into the loading side of the transport path 3, and is transported from the transport side of the transport path 3 The machine CV is picked up, and then inserted into the empty holding portion 11 of the random access temporary storage device 5 by the substrate supporting mechanism 12 on the loading side. At this time, the IC tag or the like attached to the substrate 101 is read to determine the type of the substrate 101. In the following description, it is assumed that there are two types of the substrate A 101A and the substrate B 101B on the transport path 3 as the substrates to be carried in. Further, the processing device 9 of Fig. 1 performs processing for the substrate A101A.
在被2種類的基板A101A及基板B101B依序插入於保持部11的隨機存取暫存裝置5中，是藉由搬出側的基板支撐機構12只將基板A101A從保持部11取出，然後經由搬入用的輸送機CV排出至製程裝置9。此時，基板A101A之朝向製程裝置9的排出動作，其步調是以配合由製程裝置9所進行之基板A101A的處理步調來進行。In the random access temporary storage device 5 in which the two types of the substrate A 101A and the substrate B 101B are sequentially inserted into the holding portion 11 , only the substrate A 101A is taken out from the holding portion 11 by the substrate supporting mechanism 12 on the carry-out side, and then carried in. The conveyor CV used is discharged to the process unit 9. At this time, the step of the discharge operation of the substrate A 101A toward the processing device 9 is performed in accordance with the processing step of the substrate A 101A by the processing device 9.
因此，在進行對基板A101A處理的製程裝置9中，沒有進行處理的基板B101B、或是搬入步調以高出於在製程裝置9中之處理步調方式被搬入到搬運路線3的基板A101A，只要在隨機存取暫存裝置5之保持部11有空缺就會被暫時性地保持(緩衝作用)。Therefore, in the processing apparatus 9 that performs the processing on the substrate A101A, the substrate B101B that has not been processed, or the substrate A101A that has been loaded into the transport path 3 by the processing step in the processing apparatus 9 is as long as When the holding portion 11 of the random access buffer device 5 is vacant, it is temporarily held (buffering action).
當基板A101A全部從隨機存取暫存裝置5的保持部11被排出，而保持部11變成只有基板B101B時，就將製程裝置9，從進行對基板A101A的處理裝置，更換成為進行對基板B101B的處理裝置。When all of the substrates A101A are discharged from the holding portion 11 of the random access temporary storage device 5, and the holding portion 11 becomes only the substrate B101B, the processing device 9 is replaced from the processing device for the substrate A101A to the substrate B101B. Processing device.
然後，如第3圖之說明圖所示，藉由隨機存取暫存裝置5之搬出側的基板支撐機構12將基板B101B從保持部11取出，然後經由搬入用的輸送機CV排出至製程裝置9。與此同時進行，將被搬入至搬運路線3的基板A101A或是基板B101B，藉由搬入側的基板支撐機構12插入於隨機存取暫存裝置5之空著的保持部11。Then, as shown in the explanatory diagram of FIG. 3, the substrate B101B is taken out from the holding portion 11 by the substrate supporting mechanism 12 on the carrying-out side of the random access temporary storage device 5, and then discharged to the processing device via the transporting CV for loading. 9. At the same time, the substrate A101A or the substrate B101B to be carried into the transport path 3 is inserted into the vacant holding portion 11 of the random access temporary storage device 5 by the substrate supporting mechanism 12 on the loading side.
因此，在進行對基板B101B處理的製程裝置9中，沒有進行處理的基板A101A、或是搬入步調以高出於在製程裝置9中之處理步調方式被搬入到搬運路線3的基板B101B，只要在隨機存取暫存裝置5之保持部11有空缺就會被暫時性地保持(緩衝作用)。Therefore, in the processing apparatus 9 that performs the processing on the substrate B101B, the substrate A101A that has not been processed, or the substrate B101B that has been loaded into the transport path 3 by the processing step in the processing apparatus 9 is as long as When the holding portion 11 of the random access buffer device 5 is vacant, it is temporarily held (buffering action).
當基板B101B全部從隨機存取暫存裝置5的保持部11被排出，而保持部11變成只有基板A101A時，就將製程裝置9，從進行對基板B101B的處理裝置，再次更換成為進行對基板A101A的處理裝置。When all of the substrates B101B are discharged from the holding portion 11 of the random access temporary storage device 5, and the holding portion 11 becomes only the substrate A101A, the processing device 9 is replaced again from the processing device for the substrate B101B to the opposite substrate. Processing device of A101A.
然後，如第1圖之說明圖所示地，藉由隨機存取暫存裝置5之搬出側的基板支撐機構12將基板A101A從保持部11取出，然後經由搬入用的輸送機CV排出至製程裝置9。與此同時進行，將被搬入至搬運路線3的基板A101A或是基板B101B，藉由搬入側的基板支撐機構12插入於隨機存取暫存裝置5之空著的保持部11。Then, as shown in the explanatory diagram of Fig. 1, the substrate A101A is taken out from the holding portion 11 by the substrate supporting mechanism 12 on the carrying-out side of the random access temporary storage device 5, and then discharged to the manufacturing process via the transporting conveyor CV. Device 9. At the same time, the substrate A101A or the substrate B101B to be carried into the transport path 3 is inserted into the vacant holding portion 11 of the random access temporary storage device 5 by the substrate supporting mechanism 12 on the loading side.
重複以上的動作，直到朝向搬運路線3之基板A101A或是基板B101B的搬入完畢為止。當朝向搬運路線3之基板A101A或是基板B101B的搬入一完畢時，對於在此時點接連於隨機存取暫存裝置5的製程裝置9，便將在該製程裝置9進行處理之基板A101A(或是基板B101B)之排出作業予以終了完畢。在此，於保持部11若殘存有在該製程裝置9沒有進行處理的基板B101B(或是基板A101A)之情形時，便進行製程裝置9的更換之後，將殘存於保持部11的基板B101B(或是基板A101A)全部排出至製程裝置9。The above operation is repeated until the loading of the substrate A 101A or the substrate B 101B toward the conveyance path 3 is completed. When the loading of the substrate A101A or the substrate B101B toward the transport path 3 is completed, the substrate A101A processed in the processing device 9 is processed for the processing device 9 connected to the random access buffer device 5 at this time (or The discharge operation of the substrate B101B) is completed. Here, when the substrate B101B (or the substrate A101A) that has not been processed by the processing device 9 remains in the holding portion 11, the substrate B101B remaining in the holding portion 11 is replaced after the processing device 9 is replaced ( Or the substrate A101A) is completely discharged to the process device 9.
依據如以上構成之本實施形態的基板區分裝置1，例如，當進行對基板A101A之處理的製程裝置9接連於隨機存取暫存裝置5之情形時，插入到隨機存取暫存裝置5之保持部11之2種類的基板A101A及基板B101B之中，將在製程裝置9沒有進行處理的基板B101B，無變動地持保持在隨機存取暫存裝置5而能夠與基板A101A區分開。According to the substrate dividing apparatus 1 of the present embodiment configured as described above, for example, when the processing device 9 for processing the substrate A101A is connected to the random access temporary storage device 5, it is inserted into the random access temporary storage device 5. Among the substrate A 101A and the substrate B 101B of the type 2 of the holding portion 11, the substrate B 101B which has not been processed by the processing device 9 is held in the random access temporary storage device 5 without being changed, and can be distinguished from the substrate A 101A.
又，將搬入步調以高出於在製程裝置9中之處理步調方式被搬入到搬運路線3的基板A101A，暫時性地保持(緩衝作用)於隨機存取暫存裝置5，可以防止基板A101A或是基板B101B滯留在製程裝置9的作業前方。Moreover, the substrate A101A that has been loaded into the transport path 3 by the processing step in the processing device 9 is temporarily held (buffered) in the random access buffer device 5, and the substrate A101A or the substrate A101A can be prevented. The substrate B101B is retained in front of the operation of the processing device 9.
依據本實施形態的基板區分裝置1，例如，當進行對基板B101B之處理的製程裝置9接連於隨機存取暫存裝置5之情形時，插入到隨機存取暫存裝置5之保持部11之2種類的基板A101A及基板B101B之中，將在製程裝置9沒有進行處理的基板A101A，無變動地持保持在隨機存取暫存裝置5而能夠與基板B101B區分開。According to the substrate dividing apparatus 1 of the present embodiment, for example, when the processing device 9 for processing the substrate B101B is connected to the random access temporary storage device 5, it is inserted into the holding portion 11 of the random access temporary storage device 5. Among the two types of the substrate A101A and the substrate B101B, the substrate A101A that has not been processed by the processing device 9 can be held in the random access temporary storage device 5 without being changed, and can be distinguished from the substrate B101B.
又，將搬入步調以高出於在製程裝置9中之處理步調方式被搬入到搬運路線3的基板B101B，暫時性地保持(緩衝作用)於隨機存取暫存裝置5，可以防止基板A101A或是基板B101B滯留在製程裝置9的作業前方。Further, the carry-in step is carried forward to the substrate B101B of the transport path 3 by the processing step in the processing device 9, and temporarily held (buffered) in the random access buffer device 5, thereby preventing the substrate A101A or The substrate B101B is retained in front of the operation of the processing device 9.
因此，搬運目的地不同之2種類的基板A101A及基板B101B即使於搬運路線3混雜存在時，不用使基板A101A及基板B101B從搬運路線3移動至路線外，便能夠確實地抑制基板A101A及基板B101B的滯留。Therefore, even if the two types of substrates A101A and B101B having different transport destinations are mixed in the transport path 3, the substrates A101A and B101B can be reliably suppressed from moving from the transport path 3 to the route. Staying.
當基板A101A全部從隨機存取暫存裝置5的保持部11被排出，保持部11成為只有基板B101B時，若基板B101B沒有必要在製程裝置進行處理之情形時，也可以把進行對基板A101A之處理的製程裝置9更換為輸送機CV。在將製程裝置9更換為輸送機CV之後，藉由隨機存取暫存裝置5之搬出側的基板支撐機構12將基板B101B從保持部11取出，排出於搬入用的輸送機CV或是其所接續下去的輸送機CV。當然與此同時並行地，可以將被搬入到搬運路線3的基板A101A或是基板B101B，藉由搬入側的基板支撐機構12插入到隨機存取暫存裝置5之空著的保持部11。When all of the substrates A101A are discharged from the holding portion 11 of the random access temporary storage device 5, and the holding portion 11 is only the substrate B101B, if the substrate B101B does not need to be processed by the processing device, the substrate A101A can be performed. The processed process unit 9 is replaced with a conveyor CV. After the process device 9 is replaced with the conveyor CV, the substrate B101B is taken out from the holding portion 11 by the substrate supporting mechanism 12 on the carry-out side of the random access temporary storage device 5, and is discharged to the transporting conveyor CV or the like. Continued conveyor CV. Of course, in parallel with this, the substrate A 101A or the substrate B 101B carried into the transport path 3 can be inserted into the empty holding portion 11 of the random access temporary storage device 5 by the substrate supporting mechanism 12 on the loading side.
[第2實施形態][Second Embodiment]
於上述的第1實施形態中，是對於隨機存取暫存裝置5為固定式之情形下進行說明，但亦可將隨機存取暫存裝置5以移動式來實施。如此之構成者，為第4圖之平面圖所顯示之本發明之第2實施形態的基板區分裝置1A。In the first embodiment described above, the case where the random access temporary storage device 5 is of a fixed type will be described. However, the random access temporary storage device 5 may be implemented by a mobile type. The substrate division device 1A according to the second embodiment of the present invention shown in the plan view of Fig. 4 is the same.
在本實施形態的基板區分裝置1A中，是同時地運用：進行對基板A101A之處理的製程裝置A9A與進行對基板B101B之處理的製程裝置B9B。因而，本實施形態的基板區分裝置1A，係具有：用以使隨機存取暫存裝置5在第1位置與第2位置之相互間進行移動的移動單元13。移動單元13，例如，藉由馬達使載置有隨機存取暫存裝置5的滑塊在軌道上移動之裝置。In the substrate dividing apparatus 1A of the present embodiment, the processing apparatus A9A that performs the processing on the substrate A101A and the processing apparatus B9B that performs the processing on the substrate B101B are simultaneously used. Therefore, the board division device 1A of the present embodiment has the moving unit 13 for moving the random access temporary storage device 5 between the first position and the second position. The moving unit 13 is, for example, a device that moves a slider on which the random access temporary storage device 5 is placed on a rail by a motor.
本實施形態的隨機存取暫存裝置5，藉由移動單元13在第1位置與第2位置之間移動。在第1位置上，搬入側的基板支撐機構12可以從搬運路線3之搬出側的輸送機CV接取基板A101A或是基板B101B。又，在第1位置上，搬出側的之基板支撐機構12可以將基板A101A排出到製程裝置A9A之搬入用的輸送機CV。在第2位置上，搬出側的基板支撐機構12可以將基板B101B排出到製程裝置B9B之搬入用的輸送機CV。The random access buffer device 5 of the present embodiment moves between the first position and the second position by the moving unit 13. At the first position, the substrate supporting mechanism 12 on the loading side can pick up the substrate A 101A or the substrate B 101B from the conveyor CV on the transport side of the transport path 3 . Further, at the first position, the substrate supporting mechanism 12 on the carry-out side can discharge the substrate A101A to the conveyor CV for carrying in the processing apparatus A9A. At the second position, the substrate supporting mechanism 12 on the carry-out side can discharge the substrate B101B to the conveyor CV for loading the processing device B9B.
在第4圖的基板區分裝置1A中，係藉由移動單元13使隨機存取暫存裝置5移動到第1位置。然後，將已搬入到搬運路線3之搬入側之輸送機CV的基板A101A或是基板B101B，從搬運路線3之搬出側的輸送機CV予以接取之後，藉由搬入側的基板支撐機構12依序插入於隨機存取暫存裝置5之空著的保持部11。此時，讀取貼附於基板A101A或基板B101B的IC標籤等，來判別基板A101A或基板B101B的種類。In the substrate dividing device 1A of Fig. 4, the random access temporary storage device 5 is moved to the first position by the moving unit 13. Then, the substrate A101A or the substrate B101B of the conveyor CV that has been carried in the transport side of the transport path 3 is picked up from the transport CV on the transport side of the transport path 3, and then supported by the substrate support mechanism 12 on the carry-in side. The sequence is inserted into the empty holding portion 11 of the random access buffer device 5. At this time, the IC tag or the like attached to the substrate A101A or the substrate B101B is read to determine the type of the substrate A101A or the substrate B101B.
在被基板A101A或是基板B101B依序插入於保持部11的隨機存取暫存裝置5中，在位於第1位置的期間，是藉由搬出側的基板支撐機構12只將基板A101A從保持部11取出，然後經由搬入用的輸送機CV排出至製程裝置A9A。此時，基板A101A之朝向製程裝置A9A的排出動作，其步調是以配合由製程裝置A9A所進行之基板A101A的處理步調來進行。In the random access temporary storage device 5 in which the substrate A 101A or the substrate B 101B is sequentially inserted into the holding portion 11 , only the substrate A 101A is held from the holding portion by the substrate supporting mechanism 12 on the carry-out side while in the first position. 11 is taken out, and then discharged to the process apparatus A9A via the conveyance conveyor CV. At this time, the step of the discharge operation of the substrate A 101A toward the processing apparatus A9A is performed in accordance with the processing step of the substrate A 101A by the processing apparatus A9A.
因此，在製程裝置A9A中沒有進行處理的基板B101B、或是搬入步調以高出於在製程裝置A9A中之處理步調方式被搬入到搬運路線3的基板A101A，只要在隨機存取暫存裝置5之保持部11有空缺就會被暫時性地保持(緩衝作用)。Therefore, the substrate B101B which is not processed in the processing apparatus A9A, or the substrate A101A which is loaded into the transport route 3 by the processing step in the processing apparatus A9A, as long as it is in the random access temporary storage apparatus 5 When the holding portion 11 has a vacancy, it is temporarily held (buffering action).
當朝向搬運路線3之基板A101A或是基板B101B的搬入一完畢時，基板A101A就會從隨機存取暫存裝置5的保持部11全部被排出，當保持部11成為只有基板B101B之時點，便藉由移動單元13使隨機存取暫存裝置5從第1位置朝向第2位置移動。然後，藉由搬出側的基板支撐機構12取出殘存在隨機存取暫存裝置5之保持部11的基板B101B，再經由搬入用的輸送機CV排出至製程裝置B9B。When the loading of the substrate A101A or the substrate B101B toward the conveyance path 3 is completed, the substrate A101A is completely discharged from the holding portion 11 of the random access temporary storage device 5, and when the holding portion 11 becomes the substrate B101B only, The random access temporary storage device 5 is moved from the first position to the second position by the moving unit 13. Then, the substrate B101B remaining in the holding portion 11 of the random access temporary storage device 5 is taken out by the substrate supporting mechanism 12 on the carry-out side, and then discharged to the processing device B9B via the transporting conveyor CV.
依據如以上所構成之本實施形態的基板區分裝置1A，插入到隨機存取暫存裝置5之保持部11之2種類的基板A101A及基板B101B之中，於第1位置將基板A101A排出至製程裝置A9A，於第2位置將基板B101B排出至製程裝置B9B，藉此，能後將2種類的基板A101A及基板B101B予以區分開。According to the substrate dividing device 1A of the present embodiment configured as described above, the substrate A101A and the substrate B101B of the type 2 of the holding portion 11 of the random access temporary storage device 5 are inserted, and the substrate A101A is discharged to the process at the first position. The device A9A discharges the substrate B101B to the processing device B9B at the second position, whereby the two types of the substrate A101A and the substrate B101B can be distinguished.
又，將搬入步調以高出於在製程裝置A9A中之處理步調方式被搬入到搬運路線3的基板A101A，暫時性地保持(緩衝作用)於隨機存取暫存裝置5，可以防止基板A101A或是基板B101B滯留在製程裝置A9A的作業前方。Moreover, the substrate A101A that has been loaded into the transport path 3 by the processing step in the processing apparatus A9A is temporarily held (buffered) in the random access temporary storage device 5, and the substrate A101A or the substrate A101A can be prevented. It is the substrate B101B that stays in front of the operation of the processing apparatus A9A.
因此，搬運目的地不同之2種類的基板A101A、基板B101B，即使於搬運路線3混雜存在時，不用使基板A101A及基板B101B從搬運路線3移動至路線外，便可以確實地抑制基板A101A或基板B101B的滯留。Therefore, when the substrate A101A and the substrate B101B of the two types of transport destinations are different, even if the transport path 3 is mixed, the substrate A101A and the substrate B101B can be reliably prevented from moving from the transport path 3 to the route, and the substrate A101A or the substrate can be reliably suppressed. The retention of B101B.
[第3實施形態][Third embodiment]
在第4圖的第2實施形態中，雖已將隨機存取暫存裝置5移動在第1位置與第2位置之間的構成，利用在對2種類之製程裝置A9A及製程裝置B9B區分出各別之處理對象的基板A101A及基板B101B之情形進行了說明。不過，只有製程裝置A9A存在之情形時，亦可以利用隨機存取暫存裝置5移動在第1位置與第2位置之間之構成。In the second embodiment of Fig. 4, the random access temporary storage device 5 is moved between the first position and the second position, and is distinguished from the two types of the processing device A9A and the processing device B9B. The case of the substrate A101A and the substrate B101B of the respective processing targets has been described. However, only when the process device A9A is present, the random access temporary storage device 5 can be moved between the first position and the second position.
第5圖係如此所構成之本發明之第3實施形態的基板區分裝置1B的平面圖。在本實施形態的基板區分裝置1B中，在隨機存取暫存裝置5之第2位置的下游，配置有由複數個輸送機CV、CV、…所構成的旁通路線VP。Fig. 5 is a plan view showing a substrate dividing apparatus 1B according to a third embodiment of the present invention. In the substrate dividing apparatus 1B of the present embodiment, a bypass line VP composed of a plurality of conveyors CV, CV, ... is disposed downstream of the second position of the random access temporary storage device 5.
於第5圖的基板區分裝置1B中，係藉由移動單元13使隨機存取暫存裝置5移動到第1位置。然後，將已搬入到搬運路線3之搬入側之輸送機CV上的基板A101A或是基板B101B，從搬運路線3之搬出側的輸送機CV予以接取之後，藉由搬入側的基板支撐機構12依序插入於隨機存取暫存裝置5之空著的保持部11。此時，讀取貼附於基板A101A或基板B101B的IC標籤等，來判別基板A101A或基板B101B的種類。In the substrate dividing device 1B of Fig. 5, the random access temporary storage device 5 is moved to the first position by the moving unit 13. Then, the substrate A101A or the substrate B101B that has been carried onto the conveyor CV on the transport side of the transport path 3 is picked up from the transport CV on the transport side of the transport path 3, and then the substrate support mechanism 12 on the carry-in side is transported. The vacant holding portion 11 of the random access temporary storage device 5 is sequentially inserted. At this time, the IC tag or the like attached to the substrate A101A or the substrate B101B is read to determine the type of the substrate A101A or the substrate B101B.
在被基板A101A或是基板B101B依序插入於保持部11的隨機存取暫存裝置5中，在位於第1位置的期間，是藉由搬出側的基板支撐機構12只將基板A101A從保持部11取出，然後經由搬入用的輸送機CV排出至製程裝置A9A。此時，基板A101A之朝向製程裝置A9A的排出動作，其步調是以，配合由製程裝置A9A所進行之基板A101A的處理步調來進行。In the random access temporary storage device 5 in which the substrate A 101A or the substrate B 101B is sequentially inserted into the holding portion 11 , only the substrate A 101A is held from the holding portion by the substrate supporting mechanism 12 on the carry-out side while in the first position. 11 is taken out, and then discharged to the process apparatus A9A via the conveyance conveyor CV. At this time, the step of the discharge operation of the substrate A 101A toward the processing apparatus A9A is performed in accordance with the processing step of the substrate A 101A by the processing apparatus A9A.
因此，在製程裝置A9A中沒有進行處理的基板B101B、或是搬入步調以高出於在製程裝置A9A中之處理步調方式被搬入到搬運路線3的基板A101A，只要在隨機存取暫存裝置5之保持部11有空缺就會被暫時性地保持(緩衝作用)。Therefore, the substrate B101B which is not processed in the processing apparatus A9A, or the substrate A101A which is loaded into the transport route 3 by the processing step in the processing apparatus A9A, as long as it is in the random access temporary storage apparatus 5 When the holding portion 11 has a vacancy, it is temporarily held (buffering action).
當朝向搬運路線3之基板A101A或是基板B101B的搬入完畢時，基板A101A就會從隨機存取暫存裝置5的保持部11全部被排出，當保持部11成為只有基板B101B之時點，便藉由移動單元13使隨機存取暫存裝置5從第1位置朝向第2位置移動。然後，藉由搬出側的基板支撐機構12取出殘存在隨機存取暫存裝置5之保持部11的基板B101B，再排出至旁通路線VP的輸送機CV。When the loading of the substrate A101A or the substrate B101B toward the conveyance path 3 is completed, the substrate A101A is completely discharged from the holding portion 11 of the random access temporary storage device 5, and when the holding portion 11 is only the substrate B101B, it is borrowed. The mobile unit 13 moves the random access buffer 5 from the first position to the second position. Then, the substrate B101B remaining in the holding portion 11 of the random access buffer device 5 is taken out by the substrate supporting mechanism 12 on the carry-out side, and discharged to the conveyor CV of the bypass line VP.
依據如以上所構成之本實施形態的基板區分裝置1B，插入到隨機存取暫存裝置5之保持部11之2種類的基板A101A及基板B101B之中，於第1位置將基板A101A排出至製程裝置A9A，於第2位置將基板B101B排出至旁通路線VP，藉此，能後將2種類的基板A101A及基板B101B予以區分開。According to the substrate dividing device 1B of the present embodiment configured as described above, the substrate A101A and the substrate B101B of the type 2 of the holding portion 11 of the random access temporary storage device 5 are inserted, and the substrate A101A is discharged to the process at the first position. The device A9A discharges the substrate B101B to the bypass line VP at the second position, whereby the two types of the substrate A101A and the substrate B101B can be distinguished.
又，將搬入步調以高出於在製程裝置A9A中之處理步調方式被搬入到搬運路線3的基板A101A，暫時性地保持(緩衝作用)於隨機存取暫存裝置5，可以防止基板A101A或是基板B101B滯留在製程裝置A9A的作業前方。Moreover, the substrate A101A that has been loaded into the transport path 3 by the processing step in the processing apparatus A9A is temporarily held (buffered) in the random access temporary storage device 5, and the substrate A101A or the substrate A101A can be prevented. It is the substrate B101B that stays in front of the operation of the processing apparatus A9A.
因此，搬運目的地不同之2種類的基板A101A、基板B101B，即使於搬運路線3混雜存在時，不用使基板A101A或基板B101B從搬運路線3移動至路線外，便可以確實地抑制基板A101A或基板B101B的滯留。Therefore, when the substrate A101A and the substrate B101B of the two types of transport destinations are different, even if the transport path 3 is mixed, the substrate A101A or the substrate B101B can be reliably suppressed from moving from the transport path 3 to the route. The retention of B101B.
可以提供一種：即使搬運目的地不同的基板混雜存在時，不用使基板移動至搬運路線之外，便能夠抑制位在搬運路線上之基板的滯留，之基板區分裝置。It is possible to provide a substrate sorting device capable of suppressing the retention of the substrate on the conveyance path without moving the substrate to the conveyance route even when the substrates having different transfer destinations are mixed.
1．．．基板區分裝置1. . . Substrate distinguishing device
3．．．搬運路線3. . . Handling route
5．．．隨機存取暫存裝置5. . . Random access temporary storage device
9(A9A、B9B)．．．製程裝置9 (A9A, B9B). . . Process device
11．．．保持部11. . . Holding department
12．．．基板支撐機構12. . . Substrate support mechanism
13．．．移動單元13. . . Mobile unit
101(A101A、B101B)．．．基板101 (A101A, B101B). . . Substrate
CV．．．輸送機CV. . . Conveyor
VP．．．旁通路線VP. . . Bypass line
第1圖，是本發明之第1實施形態中，該基板區分裝置之概略構成的平面圖。Fig. 1 is a plan view showing a schematic configuration of the substrate dividing device in the first embodiment of the present invention.
第2圖，是第1圖之隨機存取暫存裝置之構成的立體圖。Fig. 2 is a perspective view showing the configuration of the random access temporary storage device of Fig. 1.
第3圖，是第1圖之基板區分裝置的動作的平面圖。Fig. 3 is a plan view showing the operation of the substrate dividing device of Fig. 1.
第4圖，是本發明之第2實施形態中，該基板區分裝置之概略構成的平面圖。Fig. 4 is a plan view showing a schematic configuration of the substrate dividing device in the second embodiment of the present invention.
第5圖，是本發明之第3實施形態中，該基板區分裝置之概略構成的平面圖。Fig. 5 is a plan view showing a schematic configuration of the substrate sorting device in the third embodiment of the present invention.
1．．．基板區分裝置1. . . Substrate distinguishing device
3．．．搬運路線3. . . Handling route
5．．．隨機存取暫存裝置5. . . Random access temporary storage device
9．．．製程裝置9. . . Process device
101(A101A、B101B)．．．基板101 (A101A, B101B). . . Substrate
CV．．．輸送機CV. . . Conveyor
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| JP2009091801A JP2010245250A (en) | 2009-04-06 | 2009-04-06 | Substrate-sorting device |
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| TWI520252B true TWI520252B (en) | 2016-02-01 |
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| CN106477306B (en) * | 2016-12-01 | 2019-11-01 | 东旭（昆山）显示材料有限公司 | Cassette bogey, liquid crystal display panel production system and its cassette transport method |
| CN110391161A (en) * | 2019-06-25 | 2019-10-29 | 福建省福联集成电路有限公司 | A kind of intelligence system of storing wafer, device and method |
| CN114408452B (en) * | 2022-01-27 | 2023-08-04 | 赛美特科技有限公司 | Wafer conveying method and device, electronic equipment and storage medium |
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| JP2539447B2 (en) * | 1987-08-12 | 1996-10-02 | 株式会社日立製作所 | Production method by single-wafer carrier |
| JP3619346B2 (en) * | 1996-09-19 | 2005-02-09 | 大日本スクリーン製造株式会社 | Substrate processing apparatus and method |
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| JP4023543B2 (en) * | 2003-05-29 | 2007-12-19 | 東京エレクトロン株式会社 | Substrate transfer apparatus, substrate transfer method, and vacuum processing apparatus |
| JP4371009B2 (en) * | 2003-11-21 | 2009-11-25 | 株式会社Ｉｈｉ | Substrate transfer device, substrate storage and transfer device, substrate carry-in system, substrate carry-out system, and substrate carry-in / carry-out system |
| JP4461960B2 (en) * | 2003-11-21 | 2010-05-12 | 株式会社Ｉｈｉ | Substrate storage and transfer device, substrate carry-in system, substrate carry-out system, and substrate carry-in / carry-out system |
| JP2007015789A (en) * | 2005-07-05 | 2007-01-25 | Micronics Japan Co Ltd | In-line buffer device |
| JP4561655B2 (en) * | 2006-03-03 | 2010-10-13 | 村田機械株式会社 | Transport vehicle |
| JP4884039B2 (en) * | 2006-03-14 | 2012-02-22 | 東京エレクトロン株式会社 | Substrate buffer apparatus, substrate buffering method, substrate processing apparatus, control program, and computer-readable storage medium |
| JP2008098198A (en) * | 2006-10-05 | 2008-04-24 | Ihi Corp | Substrate conveyor |
| KR101215591B1 (en) * | 2007-09-19 | 2012-12-26 | 히라따기꼬오 가부시키가이샤 | substrate transfer system |
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