TWI518886B - Photosensitive device and method for forming the same - Google Patents

Description

Light sensing device and its manufacturing method

The present invention relates to a semiconductor sensing device, and more particularly to a light sensing device and a method of fabricating the same.

With the rapid development of the electronics industry, the functional requirements of electronic products have increased, and in order to meet the needs of multi-functional use, semiconductor packages and electronic components of various functions need to be disposed on circuit boards in electronic products. However, the increase in the number of semiconductor packages and electronic components is bound to increase the layout space of the circuit board, thereby increasing the volume of electronic products, resulting in the inability of electronic products to meet the demand for miniaturization. Therefore, in order to meet the demand for miniaturization, the conventional technology improves the integration degree, that is, the semiconductor package integrates the electronic components into the micro electro mechanical system (MEMS) package, which not only reduces the layout space of the circuit board but also reduces the layout space of the circuit board. Reduce the size of electronic products and maintain the demand for versatility.

The semiconductor package formed by stacking, packaging, and dicing the wafer can be applied to, for example, various micro electro mechanical systems (MEMS), especially image sensing measured by electrical or capacitive changes. Image sensor device. Can also choose to use Wafer-level package (WSP) process for image sensing components, RF circuits, accelerators, gyroscopes, micro actuators, or pressure sensors (process) Sensors and other semiconductor packages.

The conventional light sensing device 1 shown in FIG. 1 , that is, the image sensor, is provided with a package 1 a on a circuit board 12 , and a support member 13 is disposed on the circuit board 12 , and the support member is provided. A holder 13 has a through hole 130 for placing an infrared ray filter 15 and a lens 14. The package 1a has a stacked wafer 10 and a glass sheet 11. The wafer 10 has an opposite active surface 10a and an inactive surface 10b. The non-active surface 10b is bonded and electrically connected by a plurality of conductive bumps 101. The circuit board 12 has a photosensitive region S corresponding to the filter 15 and the lens 14 on the active surface 10a. The glass sheet 11 is disposed on the active surface 10a by a plurality of dams 111. The filter 15 is used to prevent the design of infrared rays, so that the photosensitive region S can receive light that enters through the lens 14 and is filtered through the filter 15.

However, in the conventional light sensing device 1, in the mass production assembly process, the filter 15 is placed one by one in the through hole 130 of the support member 13, resulting in a long assembly time, resulting in an increase in cost.

Moreover, the length H of the through hole 130 of the support member 13 needs to reserve the space for the filter 15 to be placed. Therefore, the length H of the through hole 130 needs to be increased, thereby increasing the height of the overall structure, so that the demand for miniaturization cannot be satisfied. .

Therefore, in order to improve the above-mentioned defects, a light-sensing device has been developed, in which a filter layer is directly formed on a glass sheet, and reference is made to US Patent No. 2 or No. 7227236.

As shown in FIG. 2, the conventional light sensing device 2 is provided with a package 2a on a circuit board 22, and a support member 23 is disposed on the package 2a, and the support member 23 has a through hole 230 for placing the lens 24. . The package 2a has a stacked wafer 20 and a glass sheet 21, and the wafer 20 has an opposite active surface 20a and an inactive surface 20b. The non-active surface 20b is bonded to the circuit board 22, and the active surface 20a The photosensitive layer S and the plurality of wire bonding pads 200 are electrically connected to the wire bonding pads 200 and the circuit board 22 by the bonding wires 201, and the glass plate 21 has a filter layer 210 exposed on the through holes 230.

When the package 2a is fabricated, the filter layer 210 is formed on the glass sheet 21. Therefore, in the subsequent assembly process, the filter is not required to be placed one by one, and the support member 23 can be shortened when the support member 23 is fabricated. The length of the through hole 230 can simultaneously reduce the manufacturing cost and the need for miniaturization.

However, in the conventional light sensing device 2, a plurality of wire bonding pads 200 are disposed around the active surface 20a of the wafer 20, so that the area X of the glass chip 21 needs to be smaller than the area Z of the active surface 20a of the wafer 20, so that the bonding wires cannot be fabricated. 201, the filter layer 210 cannot filter all the light entering the lens 14, and the unfiltered light enters the photosensitive region S through the side of the glass sheet 21, so that the photosensitive region S is disturbed and transmits an error signal. Therefore, the operation of the wafer 20 is destroyed, and the photosensitive device 2 becomes a defective product.

Moreover, the layout area of the photosensitive region S is limited by the wire bonding pads 200, and cannot be increased, so that the function of the wafer 20 cannot be improved.

Moreover, the size of the glass sheet 21 needs to be smaller than the size of the wafer 20. Therefore, when the package 2a is fabricated, the whole glass sheet is first cut into a plurality of glass sheets. The glass sheet 21 is placed on the wafer one by one, and then the wafer is cut so that the glass sheets 21 are correspondingly located on the wafers 20, thereby increasing the mass production process time. This has led to a significant increase in production costs.

Therefore, how to overcome the various problems in the above-mentioned prior art has become a problem that is currently being solved.

In order to overcome the problems of the above-mentioned prior art, the present invention provides a light sensing device for improving a wafer and a light-transmissive sheet in a package such that the area of the filter layer on the surface of the transparent sheet is greater than or equal to the active surface of the wafer. The area is such that all the light entering from the lens passes through the filtering layer to enter the photosensitive region of the active surface of the wafer to prevent unfiltered light from entering the photosensitive region through the side of the transparent sheet.

Furthermore, the non-active surface of the wafer can be bonded and electrically connected to the circuit board by the conductive bumps, so that the bonding surface of the wafer does not need to form a wire pad or other contacts, so the layout area of the photosensitive region can be The requirements are not limited in design to enhance the functionality of the wafer.

Therefore, the present invention provides a method for fabricating a light sensing device, comprising: stacking a substrate including a plurality of wafers with a light-transmitting plate having a filter layer on a surface thereof; and then cutting along edges of the respective wafers to form a plurality of packages, and the light-transmissive plate is a plurality of transparent sheets corresponding to the wafer, and the area of the filter layer is greater than or equal to the area of the active surface to cover all of the active surfaces; and assembling the package and the circuit Plates, supports and lenses.

In the foregoing method of the present invention, since the area of the filter layer needs to be greater than or equal to the area of the active surface, when the package is fabricated, the entire layout can be penetrated. The light plate is directly placed on the substrate, and the wafer and the light-transmissive sheet are cut together in a cutting manner. Therefore, the method of the present invention can be greatly reduced compared with the conventional two-cutting process and the single-disposing glass piece process. The time of mass production process can greatly reduce the production cost.

1,2,3,4‧‧‧Light sensor

1a, 2a, 3a, 4a‧‧‧Package

10,20,30,40‧‧‧ wafer

10a, 20a, 30a, 40a‧‧‧ action surface

10b, 20b, 30b, 40b‧‧‧ non-active surface

101,301‧‧‧Electrical bumps

11,21‧‧‧ glass pieces

111,311‧‧‧ dam

12, 22, 32‧‧‧ boards

13,23,33‧‧‧Support

130,230,330‧‧‧through holes

14,24,34‧‧‧ lenses

15‧‧‧Filter

200‧‧‧Line mat

201‧‧‧welding line

210,310‧‧‧Filter layer

30', 40'‧‧‧ substrate

300‧‧‧矽 piercing

31'‧‧‧Transparent board

31‧‧‧Transparent film

31a‧‧‧ first surface

31b‧‧‧ second surface

42‧‧‧ Positioning Department

5‧‧‧12 wafers

6‧‧‧Carrier

60‧‧‧Adhesive layer

S‧‧‧Photosensitive area

T, W, X, Z‧‧‧ area

R‧‧‧distance

D‧‧‧ spacing

L‧‧‧ cutting line

H‧‧‧ length

1 and 2 are schematic cross-sectional views of various aspects of a conventional light sensing device; FIGS. 3A to 3D are schematic cross-sectional views showing a first embodiment of the manufacturing method of the photosensitive device of the present invention; wherein the 3D' image is the first Another embodiment of the 3D diagram; and 4A to 4F are schematic cross-sectional views of a second embodiment of the method of fabricating the photosensitive device of the present invention.

The other embodiments of the present invention will be readily understood by those skilled in the art from this disclosure.

It is to be understood that the structure, the proportions, the size, and the like of the present invention are intended to be used in conjunction with the disclosure of the specification, and are not intended to limit the invention. The conditions are limited, so it is not technically meaningful. Any modification of the structure, change of the proportional relationship or adjustment of the size should remain in this book without affecting the effects and the objectives that can be achieved by the present invention. The technical content disclosed in the invention can be covered. In the meantime, the terms "a", "an" and "the" are used in the description, and are not intended to limit the scope of the invention, and the relative relationship may be changed or adjusted. The entire scope of the invention is considered to be within the scope of the invention.

Please refer to FIGS. 3A to 3D, which are the manufacturing method of the first embodiment of the photosensitive device 3 of the present invention.

As shown in Fig. 3A, a substrate 30' including a plurality of wafers 30 having opposing surfaces 30a and 30b is provided.

In this embodiment, the substrate 30' is a wafer, which is composed of the wafers 30, and each of the active surfaces 30a of the wafer 30 has a photosensitive region S, and the distribution area of the photosensitive region S is It is smaller than the area of the active surface 30a.

As shown in FIG. 3B, a light transmissive plate 31' having a first surface 31a and a second surface 31b opposite to each other is provided, and an infrared ray 310 is formed on the light transmissive plate 31. On the first surface 31a of the ', a plurality of dams 311 are formed on the second surface 31b of the light-transmitting plate 31'.

Next, the light-transmitting plate 31' is bonded to the active surface 30a of the wafer 30 of the substrate 30' by the dams 311.

In the present embodiment, the light-transmitting plate 31' is a glass plate, and the filter layer 310 is also selectively formed on the second surface 31b of the light-transmitting plate 31', and the filter layer 310 is The distance r between the active faces 30a is less than 600 um or less than 500 um, for example 440 um.

As shown in FIG. 3C, the substrate 30' and the light-transmitting plate 31' are cut along the edge of each of the wafers 30 (such as the cutting line L shown in FIG. 3B) by a cutting tool (not shown) to form a plurality of The package member 3a, and the light-transmitting plate 31' becomes a plurality of light-transmissive sheets 31 corresponding to the wafer 30, and the light-transmitting sheet 31 The area T of a surface 31a or a second surface 31b is greater than or equal to the area W of the active surface 30a of the wafer 30 to cover all of the active surface 30a.

In the embodiment, the package 3a is a chip scale package (CSP), and the package 3a is a micro electro mechanical system (MEMS) applied to an image sensor. Further, at the time of cutting, the dam block 311 can be cut together.

In addition, in the present embodiment, the other processing processes related to the wafer 30 are not technical features of the present invention, and therefore will not be described in detail, and thus will be described.

As shown in FIG. 3D, the package 3a is bonded and electrically connected to a circuit board 32 by a plurality of conductive bumps 301 on the non-active surface 30b of the wafer 30. Next, a support member 33 having a through hole 330 is disposed on the circuit board 32, and the support member 33 is disposed over the package member 3a to expose the filter layer 310 of the transparent sheet 31 to the through hole. 330. Finally, a lens 34 is disposed on the through hole 330 of the support member 33.

In the manufacturing method of the present invention, the wafer 30 is electrically connected to the circuit board 32 by the conductive bumps 301 by the non-active surface 30b, so that the wafer is not required to form a wire bonding pad or a wire bonding process on the active surface as in the prior art. The area T of the first surface 31a of the transparent sheet 31 (or the distribution area of the filter layer 310) may be greater than or equal to the area W of the active surface 30a of the wafer 30, so that all the lenses 34 enter the support member 33. The light must pass through the filter layer 310 to enter the photosensitive zone S. Therefore, the method of the present invention can effectively prevent unfiltered light from entering the photosensitive region S through the side of the light-transmitting sheet 31.

Moreover, since the bonding pad or the bonding pad 30a is not required on the active surface 30a of the wafer 30 Other contacts, so the layout area of the photosensitive area S can be designed according to requirements, for example, the area of the photosensitive area S is equal to the area W of the active surface 30a, thereby improving the function of the wafer 30. .

Moreover, since the area T of the first surface 31a of the light-transmissive sheet 31 (the distribution area of the filter layer 310) needs to be greater than or equal to the area W of the active surface 30a, the entire layout can be formed when the package 3a is fabricated. The light-transmitting plate 31' is directly placed on the substrate 30', and when the cutting process is performed, the substrate 30' and the light-transmitting plate 31' are cut together. Therefore, compared with the prior art, the package 3a of the present invention requires only one cutting process and does not require a single process of placing the transparent sheet 31, so that the mass production time of the package 3a can be greatly reduced. In order to achieve the purpose of reducing production costs.

Further, in another embodiment of the wafer 30, there may be a meandering through hole 300 connecting the active surface 30a and the non-active surface 30b as shown in Fig. 3D'.

Please refer to FIGS. 4A to 4F for the manufacturing method of the second embodiment of the photosensitive device 4 of the present invention. The difference between this embodiment and the first embodiment is that the process of the wafer 40 and the substrate 40' are heat dissipating tape, enamel plate or glass plate.

As shown in FIG. 4A, a 12-inch wafer 5 is placed on a carrier 6 and the 12-inch wafer 5 is diced to form a plurality of wafers 40. In the present embodiment, the carrier 6 is a glass plate that is bonded to the 12-inch wafer 5 by an adhesive layer 60.

As shown in FIG. 4B, each of the wafers 40 is moved from the carrier 6 to a substrate 40' having a plurality of positioning portions 42, and the non-active surface 40b of each of the wafers 40 is bonded to the substrate 40'. The positioning portions 42 correspond to the bits Between each of the wafers 40, there is a spacing d between the wafers 40.

In this embodiment, the substrate 40 ′ is a heat dissipating tape, a enamel plate or a glass plate, and the positioning portion 42 is a protrusion on the substrate 40 ′ to enable the positioning portion 42 to The wafers 40 cut by the 12 wafers 5 are rearranged into a pattern corresponding to 8 wafers, that is, the spacing d between the wafers 40 is equal to the spacing between the wafers after the 8 wafers are cut.

As shown in Fig. 4C, the light-transmitting plate 31' shown in Fig. 3A is bonded to the active surface 40a of the wafer 40 by the dam blocks 311.

As shown in Fig. 4D, the substrate 40' and the positioning portions 42 are removed.

In addition, in the present embodiment, the other processing processes related to the wafer 40 are not technical features of the present invention, and therefore will not be described in detail, and thus will be described.

As shown in FIG. 4E, the light-transmissive plate 31' (such as the cutting line L shown in FIG. 4D) is cut along a pitch d between the wafers 40 by a cutting tool (not shown) to form a plurality of packages. Piece 4a.

As shown in Figure 4F, please refer to the description of Figure 3D for the subsequent process, so I won't go into details.

The invention provides a light sensing device 3, 4, comprising: a circuit board 32, a package 3a, 4a disposed on the circuit board 32, disposed on the circuit board 32 and having a support of a through hole 330 And a lens 34 disposed on the through hole 330.

The package 3a, 4a may be a wafer size package having a wafer 30, 40 and a light transmissive sheet 31.

The wafers 30, 40 have opposing active faces 30a, 40a and non-active faces 30b, 40b. The non-acting faces 30b, 40b of the wafers 30, 40 are by a plurality The conductive bumps 301 are bonded and electrically connected to the circuit board 32, and the active surfaces 30a, 40a have a photosensitive region S thereon.

The transparent sheet 31 is a glass sheet and has a first surface 31a and a second surface 31b. The first surface 31a of the transparent sheet 31 has a filter layer 310, and the transparent sheet 31 The second surface 31b is coupled to the plurality of dams 311 to provide the transparent sheet 31 on the active surfaces 30a, 40a of the wafers 30, 40, and the filter layer 310 of the transparent sheet 31 is exposed to the support member. The through hole 330 of the 33, and the area T of the filter layer 310 is greater than or equal to the area W of the active surface 30a.

In another embodiment, the wafer 30 has at least one through hole 300 connecting the active surface 30a and the non-active surface 30b, and the second surface 31b of the transparent sheet 31 may also have the filter layer 310. .

In summary, the light sensing device of the present invention and the manufacturing method thereof are electrically connected to the circuit board by flip chip, so that the area of the first surface of the light transmitting sheet is greater than or equal to the area of the active surface of the wafer. Therefore, all the light entering from the lens must pass through the filter layer to enter the photosensitive region, so that unfiltered light can be prevented from interfering with the photosensitive region, and the improper operation of the wafer can be effectively avoided to enhance the light sensing device. Reliability.

Moreover, since the bonding pad does not need to form a wire pad or other contacts, the layout area of the photosensitive area can be designed according to requirements, thereby effectively improving the function of the chip.

Moreover, the area of the first surface of the light-transmissive sheet is greater than or equal to the area of the active surface, so that when the package is fabricated, the full-length transparent plate can be directly placed on the substrate, and the substrate is cut together. Translucent plate, so in making this In the case of a package, only one cutting process is required, and a single process of placing the light-transmissive sheet is not required, thereby effectively reducing the mass production time, thereby achieving the purpose of reducing the manufacturing cost.

The above embodiments are intended to illustrate the principles of the invention and its effects, and are not intended to limit the invention. Any of the above-described embodiments may be modified by those skilled in the art without departing from the spirit and scope of the invention. Therefore, the scope of protection of the present invention should be as set forth in the appended claims.

3‧‧‧Light sensor

3a‧‧‧Package

30‧‧‧ wafer

30a‧‧‧Action surface

30b‧‧‧Non-active surface

301‧‧‧Electrical bumps

31‧‧‧Transparent film

31a‧‧‧ first surface

31b‧‧‧ second surface

310‧‧‧Filter layer

311‧‧‧ dam

32‧‧‧ boards

33‧‧‧Support

330‧‧‧through hole

34‧‧‧ lenses

S‧‧‧Photosensitive area

Claims (19)

A light sensing device includes: a circuit board; a package disposed on the circuit board, having a wafer and a light transmissive sheet, wherein the wafer has opposite active and non-active surfaces, so that the wafer is inactive The light transmissive sheet has a first surface and a second surface opposite to each other, so that the light transmissive sheet is disposed on the active surface by the second surface thereof, and the active surface has a photosensitive region. The first surface of the transparent sheet has a filter layer, and the area of the filter layer is greater than or equal to the area of the active surface; the support member is disposed over the package and has a through hole to enable the A filter layer of the light transmissive sheet is exposed in the through hole; and a lens is disposed on the through hole of the support member. The light sensing device of claim 1, wherein the package is a wafer size package. The photosensitive device according to claim 1, wherein the wafer has a meandering hole connecting the active surface and the non-active surface. The photosensitive device of claim 1, wherein the inactive surface of the wafer is bonded and electrically connected to the circuit board by conductive bumps. The light sensing device according to claim 1, wherein the light transmitting sheet is a glass sheet. The light sensing device of claim 1, wherein the second surface of the light transmissive sheet is bonded to the active surface of the wafer by a dam. The light sensing device of claim 6, wherein the second surface of the light transmissive sheet has the filter layer. The light sensing device of claim 1, wherein the distance between the filter layer and the active surface is less than 500 um or 600 um. A method of fabricating a light sensing device, comprising: providing a substrate comprising a plurality of wafers having opposite active and non-active surfaces, wherein the active surface has a photosensitive region; and having a first surface opposite thereto The light-transmissive plate of the two surfaces is disposed on one side of the substrate with the active surface, and a filter layer is formed on all the first surfaces of the light-transmitting plate, and the light-transmitting plate is disposed on the substrate by the second surface thereof Cutting along the edge of each of the wafers to form a plurality of packages, so that the light-transmissive plate becomes a plurality of light-transmissive sheets corresponding to the wafer, and the area of the filter layer is greater than or equal to the area of the active surface, Covering all of the active surface; the package is disposed on a circuit board with its non-active surface; and a support member having a through hole is disposed over the package to expose the filter layer of the transparent sheet to the through surface a hole; and a lens is disposed on the through hole of the support member. The method of fabricating a photosensitive device according to claim 9, wherein the substrate is a wafer, a heat dissipating tape, a enamel plate or a glass plate. The method of fabricating a light sensing device according to claim 10, wherein the substrate is a heat dissipating tape, a enamel plate or a glass plate, and the substrate is removed first and then cut along an edge of each of the wafers. The method for manufacturing a light sensing device according to claim 11, further comprising forming a plurality of positioning portions on the substrate, and placing the wafers on the substrate, wherein the positioning portions are located between the wafers. The wafers are spaced apart from each other, and when the substrate is removed, the positioning portion is removed. The method of fabricating a light sensing device according to claim 9, wherein the light transmissive plate is a glass plate. The method of fabricating a light sensing device according to claim 9, wherein the second surface of the light transmissive plate is bonded to the active surface of the wafer by a dam. The method of fabricating a light sensing device according to claim 14, wherein the second surface of the light transmissive plate has the filter layer. The method of fabricating a light sensing device according to claim 9, wherein the distance between the filter layer and the active surface is less than 500 um or 600 um. The method of fabricating a light sensing device according to claim 9, wherein the package is a wafer size package. The method of fabricating a photosensitive device according to claim 9, wherein the wafer has a perforated hole connecting the active surface and the non-active surface. The method of fabricating a photosensitive device according to claim 9, wherein the inactive surface of the wafer is bonded and electrically connected to the circuit board by conductive bumps.