TWI516869B - An alkali developing type photosensitive resin composition, a dry film thereof and a cured product thereof, and a printed circuit board formed using one another - Google Patents

An alkali developing type photosensitive resin composition, a dry film thereof and a cured product thereof, and a printed circuit board formed using one another Download PDF

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TWI516869B
TWI516869B TW102118413A TW102118413A TWI516869B TW I516869 B TWI516869 B TW I516869B TW 102118413 A TW102118413 A TW 102118413A TW 102118413 A TW102118413 A TW 102118413A TW I516869 B TWI516869 B TW I516869B
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photosensitive resin
alkali
resin composition
coating film
carboxyl group
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TW102118413A
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Chinese (zh)
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TW201430492A (en
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Kenji Kato
Huamin Gu
Changhong Wu
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Taiyo Ink Suzhou Co Ltd
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings
    • H05K3/285Permanent coating compositions
    • H05K3/287Photosensitive compositions
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0388Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer

Description

鹼顯影型感光性樹脂組合物、其乾膜及其固化物以及使用彼而形成的印刷電路板 Alkali development type photosensitive resin composition, dry film thereof and cured product thereof, and printed circuit board formed using the same

本發明係關於鹼顯影型感光性樹脂組合物,其適於作為印刷電路板之阻焊劑組合物的、及其乾膜和固化物,以及使用彼而形成的印刷電路板,特別關於該鹼顯影型感光性樹脂組合物透過紫外線曝光及用稀鹼水溶液顯影時可以形成圖像,尤其該鹼顯影型感光性樹脂組合物的耐爆孔性、耐空泡性、及與通孔(through hole,以下稱為TH)內的銅的密合性和耐裂紋性優異。 The present invention relates to an alkali-developable photosensitive resin composition which is suitable as a solder resist composition for a printed circuit board, a dry film thereof and a cured product thereof, and a printed circuit board formed using the same, particularly regarding the alkali development When the photosensitive resin composition is exposed to ultraviolet light and developed with a dilute aqueous alkali solution, an image can be formed, and in particular, the alkali-developing photosensitive resin composition has blast resistance, cavitation resistance, and through holes (through holes). The copper in the TH) is excellent in adhesion and crack resistance.

從高精度、高密度的觀點來看,現在,在一部分民用印刷電路板以及幾乎所有工業用印刷電路板的阻焊劑組合物中,使用紫外線曝光後顯影從而形成圖像、並透過熱及光照射進行完全固化(主固化)的液態顯影型阻焊劑組合物。此外,從環境問題的顧慮來看,使用稀鹼水溶液作為顯影液的鹼顯影型液態阻焊劑組合物成為主流。作為使用稀鹼水溶液的鹼顯影型的阻焊劑組合物,例如,專利文獻1所述的活性能量射線固化性樹脂(其係在酚醛清漆型環 氧化合物與不飽和單羧酸的反應生成物上加成多元酸酐而得到的)、光聚合引發劑、稀釋劑及環氧化合物形成的液態阻焊劑組合物被廣泛使用。 From the viewpoint of high precision and high density, in some solder resists for consumer printed circuit boards and almost all industrial printed circuit boards, ultraviolet light is used for post-exposure development to form images, and to transmit heat and light. A fully developed (main curing) liquid developing type solder resist composition was carried out. Further, from the viewpoint of environmental concerns, an alkali-developing type liquid solder resist composition using a dilute aqueous alkali solution as a developing solution has become mainstream. An alkali-developing type solder resist composition using a dilute alkali aqueous solution, for example, an active energy ray-curable resin described in Patent Document 1 (which is a novolac type ring) A liquid solder resist composition comprising a photopolymerization initiator, a diluent, and an epoxy compound, which is obtained by adding a polybasic acid anhydride to a reaction product of an oxygen compound and an unsaturated monocarboxylic acid, is widely used.

然而,例如在以直接充填在具有TH的電路板上的方法中使用現有的液態阻焊劑組合物的情況下,所形成的阻焊劑膜有下述問題:在焊料整平(Solder levelling)時TH周邊會有浮起的現象(以下簡稱為“空泡”);或在後固化和焊料整平時,充填在TH內的塗膜會有溢出的現象(以下簡稱為“爆孔”)。 However, in the case of using an existing liquid solder resist composition, for example, in a method of directly filling a circuit board having TH, the formed solder resist film has the following problem: at the time of solder leveling (TH) There is a phenomenon of floating around (hereinafter referred to as "vacuum"); or when post-curing and soldering are leveled, the coating film filled in TH may overflow (hereinafter referred to as "burst").

特別在以中國為首的亞洲地區,使用液態阻焊劑組合物充填銅TH電路板上全部貫通孔為主流,需要開發出應對所述空泡和爆孔之問題的阻焊劑組合物。眾所周知的有例如專利文獻2或專利文獻3係揭示使用具有感光性與鹼顯影性的雙酚型樹脂、甲酚酚醛清漆型樹脂、和共聚型樹脂而得到的液態阻焊劑組合物。 Particularly in the Asian region headed by China, it is necessary to use a liquid solder resist composition to fill all the through-holes on the copper TH circuit board, and it is necessary to develop a solder resist composition that addresses the problems of the voids and the blast holes. For example, Patent Document 2 or Patent Document 3 discloses a liquid solder resist composition obtained by using a bisphenol type resin having a photosensitivity and alkali developability, a cresol novolak type resin, and a copolymer resin.

另一方面,印刷電路板使用逐年輕薄短小化及具有各種各樣的孔徑的印刷電路板。其中若在孔徑為Φ500以上的印刷電路板中使用具有所述耐空泡與耐爆孔性的阻焊劑組合物則有時會發生由TH內的銅與阻焊劑組合物介面的密合性不足而產生裂紋的不良情況。圖1表示該不良情況的形狀。這樣的不良情況有可能會引發下述新的不良情況:在焊劑(flax)塗布時焊劑容易進入TH內,焊劑回流至焊劑塗布面的相反面,污染基板表面、TH內殘留焊劑在後處理即整平時會產生膨脹,因此期望開發出一種耐 爆孔性、耐空泡性、及與TH內的銅的密合性和耐裂紋性優異的阻焊劑組合物。 On the other hand, printed circuit boards use printed circuit boards that are thinner and younger and have a variety of apertures. In the case where the solder resist composition having the cavitation resistance and the blast resistance is used in a printed circuit board having a hole diameter of Φ500 or more, the adhesion between the copper and the solder resist composition interface in the TH may be insufficient. A bad condition that causes cracks. Figure 1 shows the shape of this inconvenience. Such a problem may lead to the following new problems: the flux easily enters the TH when the flux is applied, and the flux reflows to the opposite side of the flux coated surface, contaminating the surface of the substrate, and the residual flux in the TH is post-treated. It will swell when leveling, so it is expected to develop a resistance A solder resist composition excellent in blasthole property, cavitation resistance, and adhesion to copper in TH and crack resistance.

專利文獻1:日本特開昭61-243869號 Patent Document 1: Japanese Patent Laid-Open No. 61-243869

專利文獻2:日本特開2008-116813號 Patent Document 2: JP-A-2008-116813

專利文獻3:國際公開號2003-059975號 Patent Document 3: International Publication No. 2003-059975

專利文獻4:日本特開2002-256060號 Patent Document 4: Japanese Patent Laid-Open No. 2002-256060

本發明的目的在於,提供耐爆孔性、耐空泡性、及與TH內的銅的密合性和耐裂紋性優異且可以得到固化塗膜的鹼顯影型感光性樹脂組合物與其固化物以及印刷電路板。本發明的主要目的在於,提供與TH內的銅的密合性和耐裂紋性優異且適合作為印刷電路板之阻焊劑組合物的鹼顯影型感光性樹脂組合物。 An object of the present invention is to provide an alkali-developable photosensitive resin composition which is excellent in blast resistance, cavitation resistance, adhesion to copper in TH, and crack resistance, and which can provide a cured coating film, and a cured product thereof. A printed circuit board. A main object of the present invention is to provide an alkali-developable photosensitive resin composition which is excellent in adhesion to copper in TH and excellent in crack resistance and is suitable as a solder resist composition for a printed circuit board.

更具體而言,本發明的目的在於,提供不僅阻焊劑組合物所要求的耐爆孔性和耐空泡性優異,而且在現有技術中不足但在本發明中與TH內的銅的密合性和耐裂紋性優異的鹼顯影型感光性樹脂組合物。 More specifically, it is an object of the present invention to provide not only excellent resistance to blasthole resistance and cavitation resistance required for a solder resist composition but also insufficient adhesion in the prior art to copper in TH in the present invention. An alkali-developable photosensitive resin composition excellent in crack resistance.

本發明人等為解決所述問題進行反復深入研究,結果發現,如下所述的鹼顯影型感光性樹脂組合物可解決所述 問題,從而完成本發明,所述鹼顯影型感光性樹脂組合物的特徵在於,含有(A)含羧基之樹脂、(B)光聚合引發劑、(C)稀釋溶劑、(D)在一分子中具有兩個以上的乙烯性不飽和基團的化合物及(E)滑石,作為(A)含羧基之樹脂,含有使至少一種雙酚型環氧化合物(a)與不飽和羧酸(b)進行酯化反應而生成具有環氧基的酯化生成物,接著再與飽和或不飽和多元酸酐(c)反應而得到的含羧基之樹脂(A-1),並且(E)滑石的含量為總量的10質量%以上且60質量%以下。 The inventors of the present invention have conducted intensive studies to solve the above problems, and as a result, have found that the alkali-developing photosensitive resin composition as described below can solve the above-mentioned problems. In the present invention, the alkali-developable photosensitive resin composition is characterized by comprising (A) a carboxyl group-containing resin, (B) a photopolymerization initiator, (C) a diluent solvent, and (D) a molecule. a compound having two or more ethylenically unsaturated groups and (E) talc as (A) a carboxyl group-containing resin containing at least one bisphenol type epoxy compound (a) and an unsaturated carboxylic acid (b) The esterification reaction is carried out to form an esterified product having an epoxy group, followed by a carboxyl group-containing resin (A-1) obtained by reacting with a saturated or unsaturated polybasic acid anhydride (c), and (E) the content of talc is The total amount is 10% by mass or more and 60% by mass or less.

即,本發明的鹼顯影型感光性樹脂組合物的特徵在於,含有(A)含羧基之樹脂、(B)光聚合引發劑、(C)稀釋溶劑、(D)在一分子中具有兩個以上的乙烯性不飽和基團的化合物及(E)滑石,作為(A)含羧基之樹脂,含有使至少一種雙酚型環氧化合物(a)與不飽和羧酸(b)進行酯化反應生成具有環氧基的酯化生成物,接著再與飽和或不飽和多元酸酐(c)反應而得到的含羧基之樹脂(A-1),並且(E)滑石的含量為總量的10質量%以上且60質量%以下。 In other words, the alkali-developable photosensitive resin composition of the present invention contains (A) a carboxyl group-containing resin, (B) a photopolymerization initiator, (C) a diluent solvent, and (D) two in one molecule. The above ethylenically unsaturated group-containing compound and (E) talc, as (A) carboxyl group-containing resin, esterification reaction of at least one bisphenol epoxy compound (a) with an unsaturated carboxylic acid (b) a carboxyl group-containing resin (A-1) obtained by reacting an esterified product having an epoxy group with a saturated or unsaturated polybasic acid anhydride (c), and (E) a talc content of 10 parts by mass % or more and 60% by mass or less.

此外,較佳地,其用於充填TH。 Further, preferably, it is used to fill TH.

此外,較佳地,其含有除(E)滑石以外的(F)填料。 Further, preferably, it contains (F) a filler other than (E) talc.

此外,較佳地,其含有(G)熱固化性成分。 Further, preferably, it contains (G) a thermosetting component.

此外,較佳地,其塗布在銅上而使用。 Further, preferably, it is applied to copper and used.

此外,本發明的乾膜的特徵在於,是在載體膜上塗布 所述鹼顯影型感光性樹脂組合物並乾燥而得到的。 Further, the dry film of the present invention is characterized in that it is coated on a carrier film The alkali-developable photosensitive resin composition is obtained by drying.

此外,本發明的固化物的特徵在於,是將如下的塗膜光固化而得到的,所述塗膜為:將所述鹼顯影型感光性樹脂組合物塗布在銅上並乾燥而得到的塗膜;或將該鹼顯影型感光性樹脂組合物塗布在載體膜上並乾燥,將所得光固化性的乾膜層壓在銅上而得到的塗膜。 Further, the cured product of the present invention is obtained by photocuring a coating film obtained by applying the alkali-developing photosensitive resin composition onto copper and drying it. A film obtained by applying the alkali-developable photosensitive resin composition onto a carrier film, drying the film, and laminating the obtained photocurable dry film on copper.

此外,本發明的印刷電路板的特徵在於,是將如下的塗膜光固化後進行熱固化而得到的,所述塗膜為:將所述鹼顯影型感光性樹脂組合物塗布在基材上並乾燥而得到的塗膜;或將該鹼顯影型感光性樹脂組合物塗布在載體膜上並乾燥,將所得光固化性的乾膜層壓在基材上而得到的塗膜。 Further, the printed wiring board of the present invention is obtained by photocuring a coating film obtained by applying the alkali developing type photosensitive resin composition onto a substrate, and then thermally curing the coating film. A coating film obtained by drying the coating film, or a coating film obtained by applying the alkali-developable photosensitive resin composition onto a carrier film, drying the film, and laminating the obtained photocurable dry film on a substrate.

本發明的鹼顯影型感光性樹脂組合物的最主要技術特徵在於,作為(A)含羧基之樹脂,含有使至少一種雙酚型環氧化合物(a)與不飽和羧酸(b)進行酯化反應而生成具有環氧基的酯化生成物,接著再與飽和或不飽和多元酸酐(c)反應而得到的含羧基之樹脂(A-1),並且(E)滑石的含量為總量的10質量%以上且60質量%以下。 The most important technical feature of the alkali-developable photosensitive resin composition of the present invention is that the (A) carboxyl group-containing resin contains at least one bisphenol epoxy compound (a) and an unsaturated carboxylic acid (b). a carboxyl group-containing resin (A-1) obtained by reacting an esterification product having an epoxy group, followed by reaction with a saturated or unsaturated polybasic acid anhydride (c), and (E) a total amount of talc 10% by mass or more and 60% by mass or less.

基於上述之最主要技術特徵,透過使用具有撓性的所述含羧基之樹脂(A-1)作為(A)含羧基之樹脂,並且使(E)滑石的含量為總量的10質量%以上且60質量%以下,可以使固化物的硬度柔和、賦予該固化物具有其所使用之鹼顯影型感光性樹脂組合物的柔軟性。結果,可以緩 和後固化時鹼顯影型感光性樹脂組合物固化時的固化收縮,並且,由於該鹼顯影型感光性樹脂組合物的柔軟性,該鹼顯影型感光性樹脂組合物能夠良好地隨著TH內的銅表面的凹凸地進行固化,由此可以防止TH內的銅與該鹼顯影型感光性樹脂組合物介面上的裂紋。此外,該鹼顯影型感光性樹脂組合物的流動性變好,在印刷時其向TH內的埋入性(embeddedness)變好。 Based on the above-mentioned most important technical feature, the carboxyl group-containing resin (A-1) having flexibility is used as the (A) carboxyl group-containing resin, and the content of the (E) talc is 10% by mass or more based on the total amount. When the amount is 60% by mass or less, the hardness of the cured product can be made soft, and the cured product can be provided with the flexibility of the alkali-developable photosensitive resin composition used. The result can be slow And the curing shrinkage at the time of curing of the alkali-developing photosensitive resin composition at the time of post-curing, and the alkali-developing photosensitive resin composition can satisfactorily follow TH in the flexibility of the alkali-developing photosensitive resin composition The unevenness of the copper surface is cured, whereby cracks in the interface between the copper in the TH and the alkali-developable photosensitive resin composition can be prevented. Moreover, the fluidity of the alkali-developable photosensitive resin composition is improved, and the embeddingness in the TH is improved at the time of printing.

相反地,現有的具有耐空泡性的阻焊劑組合物雖然可得到耐空泡性,但是不能充分得到與TH內的銅的密合性。其理由是,現有的阻焊劑組合物雖然含有所述含羧基之樹脂(A-1)和(F)填料,但(F)填料通常使用莫氏硬度高的硫酸鋇(莫氏硬度:3)、二氧化矽(莫氏硬度:7),而莫氏硬度的硬度尺度係使用1~10的整數值,數位越大,表明礦物的硬度越高。由於使用莫氏硬度高的硫酸鋇和二氧化矽,因此不能賦予所述鹼顯影型感光性樹脂組合物充分的柔軟性。結果,後固化時固化收縮的緩和變得不充分,難以充分隨著TH內的銅表面的凹凸進行固化,不能充分地獲得與TH內的銅的密合性。 On the contrary, in the conventional solder resist composition having cavitation resistance, although the foam resistance is obtained, the adhesion to copper in TH cannot be sufficiently obtained. The reason is that the conventional solder resist composition contains the carboxyl group-containing resin (A-1) and (F) filler, but the (F) filler usually uses barium sulfate having a high Mohs hardness (Mohs hardness: 3). , cerium oxide (Mohs hardness: 7), and the hardness scale of Mohs hardness is an integer value of 1 to 10. The larger the number, the higher the hardness of the mineral. Since barium sulfate and cerium oxide having a high Mohs hardness are used, sufficient flexibility of the alkali-developable photosensitive resin composition cannot be imparted. As a result, the relaxation of the curing shrinkage at the time of post-curing is insufficient, and it is difficult to sufficiently cure the unevenness of the copper surface in the TH, and the adhesion to the copper in the TH cannot be sufficiently obtained.

如上所述,上述現有的鹼顯影型感光性樹脂組合物的柔軟性不足,難以賦予該鹼顯影型與TH內的銅的密合性。因此,本發明中,透過使用莫氏硬度為1且在礦物中為最柔軟的礦物之一的(E)滑石來改善前述的問題。 As described above, the conventional alkali-developable photosensitive resin composition has insufficient flexibility, and it is difficult to impart adhesion between the alkali-developing type and copper in TH. Therefore, in the present invention, the aforementioned problem is improved by using (E) talc having a Mohs hardness of 1 and being one of the softest minerals in minerals.

如上所述可知,利用本發明,能夠提供與TH內的銅的密合性、耐爆孔性、耐空泡性及耐裂紋性優異的鹼顯影型感光性樹脂組合物及其固化物。 As described above, according to the present invention, it is possible to provide an alkali-developable photosensitive resin composition which is excellent in adhesion to copper in TH, blasthole resistance, cavitation resistance, and crack resistance, and a cured product thereof.

1‧‧‧墨 1‧‧‧ ink

2‧‧‧銅 2‧‧‧ copper

3‧‧‧基材 3‧‧‧Substrate

[圖1]a為表示TH的銅和塗膜沒有剝離等異常的圖。b為表示TH的銅和塗膜剝離的圖。 Fig. 1A is a view showing an abnormality such as copper and a coating film of TH without peeling. b is a graph showing the peeling of the copper and the coating film of TH.

以下,對本發明的鹼顯影型感光性樹脂組合物中的各成分進行說明。 Hereinafter, each component in the alkali-developable photosensitive resin composition of the present invention will be described.

本發明的鹼顯影型感光性樹脂組合物的特徵在於含有(E)滑石作為必要成分,因此首先對(E)滑石進行說明。 The alkali-developing photosensitive resin composition of the present invention is characterized in that (E) talc is contained as an essential component, and therefore (E) talc will be described first.

(E)滑石 (E) Talc

本發明的鹼顯影型感光性樹脂組合物中所使用的(E)滑石是為了提高與TH內的銅的密合性與耐裂紋性。 The (E) talc used in the alkali-developable photosensitive resin composition of the present invention is for improving adhesion to copper in TH and crack resistance.

作為(E)滑石,母岩石為碳酸鎂、蛇紋石、二氧化矽/二氧化矽-氧化鋁、鎂沉積物中的任一種即可,為所謂矽酸鹽礦物中的任一種亦可,形狀可以為塊狀也可以為微粉狀。可以進行表面處理也可以不進行表面處理。 As the (E) talc, the mother rock may be any of magnesium carbonate, serpentine, cerium oxide/cerium oxide-alumina, and magnesium deposit, and may be any of the so-called citrate minerals. It may be in the form of a block or a fine powder. Surface treatment may or may not be performed.

(E)滑石的含量為總量的10質量%以上且60質量% 以下是合適的。不足10質量%時,不能充分得到與TH內的銅的密合性與耐裂紋性,超過60質量%時,鹼顯影型感光性樹脂組合物的流動性變差,印刷時向TH內的埋入性變差。 (E) The content of talc is 10% by mass or more and 60% by mass based on the total amount The following is appropriate. When the amount is less than 10% by mass, the adhesion to the copper in the TH and the crack resistance are not sufficiently obtained. When the amount is more than 60% by mass, the fluidity of the alkali-developable photosensitive resin composition is deteriorated, and the film is buried in the TH during printing. Into the sex is getting worse.

(A)含羧基之樹脂 (A) carboxyl group-containing resin

首先,對作為本發明的含羧基之樹脂(A)而言,以至少一種雙酚型環氧化合物(a)與不飽和羧酸(b)進行酯化反應生成具有環氧基的酯化生成物,接著再與飽和或不飽和多元酸酐(c)反應而得到的含羧基之樹脂(A-1)進行說明。 First, as the carboxyl group-containing resin (A) of the present invention, esterification reaction of at least one bisphenol type epoxy compound (a) with an unsaturated carboxylic acid (b) to form an epoxy group is formed. The carboxyl group-containing resin (A-1) obtained by further reacting with a saturated or unsaturated polybasic acid anhydride (c) will be described.

在含羧基之樹脂(A-1)的製造中,所使用的至少一種雙酚型環氧化合物(a),係使用在雙酚A型或雙酚F型的醇性羥基上以相對於醇性羥基1當量為1當量以上的量加成表氯醇等表鹵醇而得到的化合物。 In the production of the carboxyl group-containing resin (A-1), at least one bisphenol type epoxy compound (a) used is used on an alcoholic hydroxyl group of a bisphenol A type or a bisphenol F type with respect to an alcohol A compound obtained by adding an epihalohydrin such as epichlorohydrin to an equivalent amount of 1 equivalent or more of the hydroxyl group.

作為向所述雙酚型環氧化合物的環氧基上加成的不飽和羧酸(b),可列舉出:丙烯酸、丙烯酸的二聚體、甲基丙烯酸、(甲基)丙烯酸羥乙酯、(甲基)丙烯酸羥丙酯、(甲基)丙烯酸羥丁酯、(甲基)丙烯酸苯基縮水甘油酯、(甲基)丙烯酸己內酯加成物等含羥基丙烯酸酯的不飽和二元酸酐加成物等,其中特別佳者為丙烯酸、甲基丙烯酸。這些含不飽和基團的單羧酸可以單獨或混合使用。 Examples of the unsaturated carboxylic acid (b) to be added to the epoxy group of the bisphenol epoxy compound include dimers of acrylic acid and acrylic acid, methacrylic acid, and hydroxyethyl (meth)acrylate. Hydroxypropyl acrylate (meth) acrylate, hydroxybutyl (meth) acrylate, phenyl glycidyl (meth) acrylate, caprolactone (meth) acrylate adduct, etc. Amino acid anhydride adducts and the like, among which acrylic acid and methacrylic acid are particularly preferred. These unsaturated group-containing monocarboxylic acids may be used singly or in combination.

作為與由所述雙酚型環氧化合物與所述不飽和羧酸的 酯化反應生成的酯化物中的醇性羥基反應的飽和或不飽和多元酸酐(c),可列舉出:甲基四氫鄰苯二甲酸酐、四氫鄰苯二甲酸酐、六氫鄰苯二甲酸酐、甲基六氫鄰苯二甲酸酐、琥珀酸酐、馬來酸酐、鄰苯二甲酸酐、衣康酸酐等脂肪族或芳香族二元酸酐。 And as the bisphenol type epoxy compound and the unsaturated carboxylic acid The saturated or unsaturated polybasic acid anhydride (c) which reacts with an alcoholic hydroxyl group in the esterified product formed by the esterification reaction may, for example, be methyltetrahydrophthalic anhydride, tetrahydrophthalic anhydride or hexahydroorthophenylene. An aliphatic or aromatic dibasic acid anhydride such as dicarboxylic anhydride, methylhexahydrophthalic anhydride, succinic anhydride, maleic anhydride, phthalic anhydride or itaconic anhydride.

此外,這種飽和或不飽和多元酸酐較佳地在所得到的含羧基之樹脂(A-1)的酸值為45~120mgKOH/g的範圍內添加。 Further, such a saturated or unsaturated polybasic acid anhydride is preferably added in such a range that the acid value of the obtained carboxyl group-containing resin (A-1) is from 45 to 120 mgKOH/g.

接著,作為其他的含羧基之樹脂(A)的具體例子,較佳者為以下列舉的化合物(為低聚物和聚合物中的任一種即可)。 Next, as a specific example of the other carboxyl group-containing resin (A), a compound (which may be any of an oligomer and a polymer) which is exemplified below is preferable.

可列舉出:(1)(甲基)丙烯酸等不飽和羧酸與除其以外的具有不飽和雙鍵的一種以上化合物共聚而得到的含羧基之共聚樹脂、(2)在(甲基)丙烯酸等不飽和羧酸與除其以外的具有不飽和雙鍵的一種以上化合物的共聚體中,利用(甲基)丙烯酸縮水甘油酯、(甲基)丙烯酸3,4-環氧基環己基甲酯等具有環氧基與不飽和雙鍵的化合物、(甲基)丙烯酸氯化物等加成乙烯性不飽和基團作為側鏈,從而得到的感光性含羧基之共聚樹脂、(3)使(甲基)丙烯酸縮水甘油酯、(甲基)丙烯酸3,4-環氧環己基甲酯等具有環氧基和不飽和雙鍵的化合物與除其以外的具有不飽和雙鍵的化合物的共聚物與、 (甲基)丙烯酸等不飽和羧酸反應,使生成的二級羥基(secondary hydroxyl)與多元酸酐反應而得到的感光性含羧基之共聚樹脂、(4)使馬來酸酐等具有不飽和雙鍵的酸酐與除其以外的具有不飽和雙鍵的化合物的共聚物與(甲基)丙烯酸2-羥乙酯等具有羥基和不飽和雙鍵的化合物反應而得到的感光性含羧基之共聚樹脂、(5)使多官能環氧化合物和不飽和單羧酸反應,使生成的羥基與飽和或不飽和多元酸酐反應而得到的含羧基之感光性樹脂、(6)使聚乙烯醇衍生物等含羥基聚合物與飽和或不飽和多元酸酐反應後,使生成的羧酸與一分子中具有環氧基和不飽和雙鍵的化合物反應而獲得的含羥基和羧基的感光性樹脂、(7)使多官能環氧化合物、不飽和單羧酸、以及一分子中具有至少一個醇性羥基和與環氧基反應的除醇性羥基以外的一個反應性基團的化合物的反應產物與、飽和或不飽和多元酸酐反應而得到的含羧基之感光性樹脂、(8)使一分子中具有至少2個氧呾(oxetane)環的多官能氧呾化合物與不飽和單羧酸反應,使得到的改性氧呾樹脂中的一級羥基(primary hydroxyl)與飽和或不飽和多元酸酐反應而得到的含羧基之感光性樹脂、和(9)使多官能環氧樹脂與不飽和單羧酸反應後,使多元酸酐反應得到的含羧基之樹脂,接著進一步與分子中 具有一個環氧乙烷環與一個以上乙烯性不飽和基團的化合物反應而得到的含羧基之感光性樹脂等,但並不限定於上述物質。 (1) a carboxyl group-containing copolymer resin obtained by copolymerizing an unsaturated carboxylic acid such as (meth)acrylic acid with one or more compounds having an unsaturated double bond, and (2) in (meth)acrylic acid In the copolymer of an unsaturated carboxylic acid and one or more compounds having an unsaturated double bond other than the above, a glycidyl (meth)acrylate or a 3,4-epoxycyclohexylmethyl (meth)acrylate is used. a compound having an epoxy group and an unsaturated double bond, an ethylenically unsaturated group such as a (meth)acrylic acid chloride or the like as a side chain, thereby obtaining a photosensitive carboxyl group-containing copolymer resin, and (3) Copolymers of a compound having an epoxy group and an unsaturated double bond, such as glycidyl acrylate, 3,4-epoxycyclohexylmethyl (meth)acrylate, and a compound having an unsaturated double bond other than , Reaction of an unsaturated carboxylic acid such as (meth)acrylic acid, a photosensitive carboxyl group-containing copolymer resin obtained by reacting a secondary hydroxyl group with a polybasic acid anhydride, and (4) an unsaturated double bond such as maleic anhydride a photosensitive carboxyl group-containing copolymer resin obtained by reacting a copolymer of an acid anhydride with a compound having an unsaturated double bond and a compound having a hydroxyl group and an unsaturated double bond such as 2-hydroxyethyl (meth)acrylate, (5) a carboxyl group-containing photosensitive resin obtained by reacting a polyfunctional epoxy compound with an unsaturated monocarboxylic acid to react a generated hydroxyl group with a saturated or unsaturated polybasic acid anhydride, and (6) a polyvinyl alcohol derivative or the like a hydroxyl group- and carboxyl group-containing photosensitive resin obtained by reacting a hydroxy polymer with a saturated or unsaturated polybasic acid anhydride, and reacting the produced carboxylic acid with a compound having an epoxy group and an unsaturated double bond in one molecule, (7) a reaction product of a polyfunctional epoxy compound, an unsaturated monocarboxylic acid, and a compound having at least one alcoholic hydroxyl group and a reactive group other than an alcoholic hydroxyl group which reacts with an epoxy group in one molecule a carboxyl group-containing photosensitive resin obtained by reacting an unsaturated polybasic acid anhydride, and (8) reacting a polyfunctional oxonium compound having at least two oxetane rings in one molecule with an unsaturated monocarboxylic acid to cause a change a carboxyl group-containing photosensitive resin obtained by reacting a primary hydroxyl group with a saturated or unsaturated polybasic acid anhydride in an oxygen oxime resin, and (9) reacting a polyfunctional epoxy resin with an unsaturated monocarboxylic acid to cause a reaction a carboxyl group-containing resin obtained by reacting a polybasic acid anhydride, and then further with a molecule A carboxyl group-containing photosensitive resin obtained by reacting a compound having one oxirane ring and one or more ethylenically unsaturated groups, but is not limited to the above.

特別佳者為上述(2)、(5)、(7)和(9)的含羧基之樹脂。 Particularly preferred are the carboxyl group-containing resins of the above (2), (5), (7) and (9).

需要說明的是,在本說明書中,(甲基)丙烯酸酯是統稱丙烯酸酯、甲基丙烯酸酯及其混合物的術語,對其他類似的表達也同樣。 It should be noted that in the present specification, (meth) acrylate is a term collectively referred to as acrylate, methacrylate, and a mixture thereof, and the same applies to other similar expressions.

上述含羧基之樹脂(A)由於在主鏈聚合物的側鏈上具有多個游離的羧基,因此可以利用稀鹼水溶液進行顯影。 Since the carboxyl group-containing resin (A) has a plurality of free carboxyl groups in the side chain of the main chain polymer, it can be developed with a dilute aqueous alkali solution.

另外,上述含羧基之樹脂(A)的酸值較佳地為40~200mgKOH/g的範圍,更佳地為45~120mgKOH/g的範圍。含羧基之樹脂的酸值不足40mgKOH/g時,難以鹼顯影,另一方面,超過200mgKOH/g時,會促進顯影液對曝光部份的溶解,因此,線變得比所需要的更細,有時曝光部份和未曝光部份無區別地被顯影液溶解剝離,而難以描繪正常的抗蝕圖案。 Further, the acid value of the carboxyl group-containing resin (A) is preferably in the range of 40 to 200 mgKOH/g, more preferably in the range of 45 to 120 mgKOH/g. When the acid value of the carboxyl group-containing resin is less than 40 mgKOH/g, it is difficult to develop alkali. On the other hand, when it exceeds 200 mgKOH/g, the dissolution of the developer to the exposed portion is promoted, and therefore, the wire becomes finer than necessary. Sometimes, the exposed portion and the unexposed portion are dissolved and peeled off by the developer without distinction, and it is difficult to draw a normal resist pattern.

此外,前述含羧基之樹脂(A)的重量平均分子量根據樹脂骨架而不同,通常較佳地為2000~150000,進一步較佳地為5000~100000的範圍。重量平均分子量不足2000時,有時向基板的塗布接著乾燥後的不黏手性能變差,此外,有時曝光後的塗膜的耐濕性惡化、顯影時所產生的膜變少、解析度大幅變差。另一方面,重量平均分子 量超過150000時,有時顯影性會顯著劣化、保存穩定性會變差。 Further, the weight average molecular weight of the carboxyl group-containing resin (A) varies depending on the resin skeleton, and is usually preferably from 2,000 to 150,000, and more preferably from 5,000 to 100,000. When the weight average molecular weight is less than 2,000, the non-sticking property after application to the substrate and subsequent drying may be deteriorated, and the moisture resistance of the coating film after exposure may be deteriorated, and the film generated during development may be reduced, and the resolution may be Greatly worse. On the other hand, the weight average molecule When the amount exceeds 150,000, the developability is remarkably deteriorated, and the storage stability may be deteriorated.

該含羧基之樹脂(A)的含量理想地為全部組合物的20~60質量%,較佳地為30~50質量%。該含羧基之樹脂(A)的含量少於所述範圍的情況下,塗膜強度降低。另一方面,多於所述範圍的情況下、組合物的粘性變高或塗布性等降低。 The content of the carboxyl group-containing resin (A) is desirably 20 to 60% by mass, preferably 30 to 50% by mass based on the total composition. When the content of the carboxyl group-containing resin (A) is less than the above range, the coating film strength is lowered. On the other hand, in the case of more than the above range, the viscosity of the composition becomes high, or the coatability and the like are lowered.

(B)光聚合引發劑 (B) Photopolymerization initiator

作為本發明的鹼顯影型感光性樹脂組合物中可適宜使用的光聚合引發劑(B),可列舉出:苯偶姻(benzoin)、苯偶姻甲醚、苯偶姻乙醚、苯偶姻異丙醚等苯偶姻和苯偶姻烷基醚類;苯乙酮、2,2-二甲氧基-2-苯基苯乙酮、2,2-二乙氧基-2-苯基苯乙酮、1,1-二氯苯乙酮、1-[4-(4-苯甲醯基苯基磺醯基)-2-甲基-2-(4-甲基苯基磺醯基)]丙烷-1-酮等苯乙酮類;2-甲基-1-[4-(甲硫基)苯基]-2-N-啉基丙酮(morpholinoacetone)-1、2-苄基-2-二甲胺基-1-(4-N-啉基苯基)-丁酮-1等胺基苯乙酮類;2-甲基蒽醌、2-乙基蒽醌、2-(三級丁基)蒽醌、1-氯蒽醌等蒽醌類;2,4-二甲基9-氧硫(thioxanthone)、2,4-二乙基9-氧硫、2-氯9-氧硫、2,4-二異丙基9-氧硫 等9-氧硫類;苯乙酮二甲基縮酮、2,2-二甲氧基-2-苯基苯乙酮(benzil dimethyl ketal)等縮酮類;二苯甲酮等二苯甲酮類或酮(酮(xanthone))類;雙(2,6-二甲氧基苯甲醯基)(2,4,4-三甲基戊基)氧化膦、雙(2,4,6-三甲基苯甲醯基)-苯基氧化膦、2,4,6-三甲基苯甲醯基二苯基氧化膦、2,4,6-三甲基苯甲醯基苯基膦酸乙酯等醯基氧化膦類;各種過氧化物類等,可以單獨或組合使用兩種以上這些公知常用的光聚合引發劑。 The photopolymerization initiator (B) which can be suitably used in the alkali-developable photosensitive resin composition of the present invention includes benzoin, benzoin methyl ether, benzoin ethyl ether, and benzoin. Benzoin and benzoin alkyl ethers such as isopropyl ether; acetophenone, 2,2-dimethoxy-2-phenylacetophenone, 2,2-diethoxy-2-phenyl Acetophenone, 1,1-dichloroacetophenone, 1-[4-(4-benzylidenephenylsulfonyl)-2-methyl-2-(4-methylphenylsulfonyl) )] acetophenones such as propan-1-one; 2-methyl-1-[4-(methylthio)phenyl]-2-N- Morpholinoacetone-1, 2-benzyl-2-dimethylamino-1-(4-N- Amino acetophenones such as phenylphenyl)-butanone-1; 2-methylindole, 2-ethylhydrazine, 2-(tributyl)anthracene, 1-chloroindole, etc. Terpenoids; 2,4-dimethyl 9-oxosulfur (thioxanthone), 2,4-diethyl 9-oxosulfur 2-chloro 9-oxosulfur 2,4-diisopropyl 9-oxosulfur 9-oxosulfur a ketal such as acetophenone dimethyl ketal or 2,2-dimethoxy-2-phenyl acetophenone; a benzophenone such as benzophenone or ketone( Ketone (xanthone) class; bis(2,6-dimethoxybenzylidene) (2,4,4-trimethylpentyl)phosphine oxide, bis(2,4,6-trimethylbenzene Mercapto)-phenylphosphine oxide, 2,4,6-trimethylbenzimidyldiphenylphosphine oxide, 2,4,6-trimethylbenzimidylphenylphosphonic acid ethyl ester, etc. The phosphine oxides, various peroxides, and the like may be used alone or in combination of two or more of these conventionally known photopolymerization initiators.

作為(B)光聚合引發劑,較佳地使用2-甲基-1-[4-(甲硫基)苯基]-2-N-啉基丙酮(morpholinoacetone)-1,其為市售品,可以列舉出:Ciba-Geigy Company製造的IRGACURE 907等。 As the (B) photopolymerization initiator, 2-methyl-1-[4-(methylthio)phenyl]-2-N- is preferably used. Morpholinoacetone-1, which is a commercially available product, is exemplified by IRGACURE 907 manufactured by Ciba-Geigy Company.

關於這些光聚合引發劑(B)的含量,相對於100質量份所述含羧基之樹脂(A)為0.01~30質量份是合適的,較佳地為5~25質量份。光聚合引發劑的使用量比所述範圍少的情況下,組合物的光固化性變差,另一方面,過多的情況下,作為阻焊劑的特性降低。 The content of the photopolymerization initiator (B) is preferably 0.01 to 30 parts by mass, preferably 5 to 25 parts by mass, per 100 parts by mass of the carboxyl group-containing resin (A). When the amount of the photopolymerization initiator used is less than the above range, the photocurability of the composition is deteriorated. On the other hand, when the amount is too large, the properties as a solder resist are lowered.

(C)有機溶劑 (C) organic solvent

關於本發明的鹼顯影型感光性樹脂組合物中所使用的有機溶劑(C),為了合成前述含羧基之樹脂(A)、製備組合 物、或為了調整黏度以便塗布在基板和載體膜上,可使用有機溶劑。 The organic solvent (C) used in the alkali-developable photosensitive resin composition of the present invention is used to synthesize the carboxyl group-containing resin (A) and to prepare a combination thereof. An organic solvent may be used, or in order to adjust the viscosity so as to be coated on the substrate and the carrier film.

作為有機溶劑,可列舉出:酮類、芳香族烴類、二醇醚類、二醇醚乙酸酯類、酯類、醇類、脂肪族烴、石油系溶劑等。更具體而言,可列舉出:甲乙酮、環己酮等酮類;甲苯、二甲苯、四甲苯等芳香族烴類;賽路蘇(cellosolve)、甲基賽路蘇、丁基賽路蘇、卡必醇、甲基卡必醇、丁基卡必醇、丙二醇單甲醚、二丙二醇單甲醚、二丙二醇二乙醚、三乙二醇單乙醚等二醇醚類;醋酸乙酯、醋酸丁酯、二丙二醇甲醚乙酸酯、丙二醇甲醚乙酸酯、丙二醇乙醚乙酸酯、丙二醇丁醚乙酸酯等酯類;乙醇、丙醇、乙二醇、丙二醇等醇類;辛烷、癸烷等脂肪族烴;石油醚、石腦油、氫化石腦油、溶劑石腦油等石油系溶劑等。上述有機溶劑可以單獨使用或以兩種以上的混合物的形式使用。 Examples of the organic solvent include ketones, aromatic hydrocarbons, glycol ethers, glycol ether acetates, esters, alcohols, aliphatic hydrocarbons, and petroleum solvents. More specifically, ketones such as methyl ethyl ketone and cyclohexanone; aromatic hydrocarbons such as toluene, xylene, and tetramethylbenzene; cellosolve, methyl stilbene, and butyl siroliol; Glycol ethers such as carbitol, methyl carbitol, butyl carbitol, propylene glycol monomethyl ether, dipropylene glycol monomethyl ether, dipropylene glycol diethyl ether, triethylene glycol monoethyl ether; ethyl acetate, butyl acetate Esters such as ester, dipropylene glycol methyl ether acetate, propylene glycol methyl ether acetate, propylene glycol diethyl ether acetate, propylene glycol butyl ether acetate; alcohols such as ethanol, propanol, ethylene glycol, propylene glycol; octane, An aliphatic hydrocarbon such as decane; a petroleum solvent such as petroleum ether, naphtha, hydrogenated naphtha or solvent naphtha. The above organic solvents may be used singly or in the form of a mixture of two or more.

(D)分子中具有兩個以上乙烯性不飽和基團的化合物 (D) a compound having two or more ethylenically unsaturated groups in the molecule

本發明的鹼顯影型感光性樹脂組合物中所使用的分子中具有兩個以上乙烯性不飽和基團的化合物(D)是透過照射活性能量射線進行光固化使前述含羧基之樹脂(A)不溶於鹼水溶液、或有助於前述含羧基之樹脂不溶於鹼水溶液的化合物。作為此類化合物的具體例,可列舉出:丙烯酸2-羥乙酯、丙烯酸2-羥丙酯等丙烯酸羥烷基酯類; 乙二醇、甲氧基四乙二醇、聚乙二醇、丙二醇等二醇的單丙烯酸酯或二丙烯酸酯類;N,N-二甲基丙烯醯胺、N-羥甲基丙烯醯胺、N,N-二甲胺基丙基丙烯醯胺等丙烯醯胺類;丙烯酸N,N-二甲胺基乙酯、丙烯酸N,N-二甲胺基丙酯等丙烯酸胺基烷基酯類;己二醇、三羥甲基丙烷、季戊四醇、二季戊四醇、三羥乙基異氰脲酸酯等多元醇或其環氧乙烷加成物或環氧丙烷加成物等的多元丙烯酸酯類;苯氧基丙烯酸酯、雙酚A二丙烯酸酯、及這些酚類的環氧乙烷加成物或環氧丙烷加成物等丙烯酸酯類;甘油二縮水甘油醚、甘油三縮水甘油醚、三羥甲基丙烷三縮水甘油醚、三縮水甘油基異氰脲酸酯等縮水甘油醚的丙烯酸酯類;及三聚氰胺丙烯酸酯、及與上述丙烯酸酯對應的各甲基丙烯酸酯類的至少任一種等。 The compound (D) having two or more ethylenically unsaturated groups in the molecule used in the alkali-developable photosensitive resin composition of the present invention is photocured by irradiation with an active energy ray to form the carboxyl group-containing resin (A). It is insoluble in an aqueous alkali solution or a compound which contributes to the insoluble of the aforementioned carboxyl group-containing resin in an aqueous alkali solution. Specific examples of such a compound include hydroxyalkyl acrylates such as 2-hydroxyethyl acrylate and 2-hydroxypropyl acrylate; Monoacrylate or diacrylate of diols such as ethylene glycol, methoxytetraethylene glycol, polyethylene glycol, propylene glycol; N,N-dimethyl decylamine, N-methylol acrylamide Acrylamides such as N,N-dimethylaminopropyl acrylamide; aminoalkyl acrylates such as N,N-dimethylaminoethyl acrylate and N,N-dimethylaminopropyl acrylate Polyols such as hexylene glycol, trimethylolpropane, pentaerythritol, dipentaerythritol, trishydroxyethyl isocyanurate or the like, or an ethylene oxide adduct thereof or a propylene oxide adduct Class; phenoxy acrylate, bisphenol A diacrylate, and acrylates such as ethylene oxide adducts or propylene oxide adducts of these phenols; glycerol diglycidyl ether, glycerol triglycidyl ether And an acrylate of a glycidyl ether such as trimethylolpropane triglycidyl ether or triglycidyl isocyanurate; and at least one of melamine acrylate and each methacrylate corresponding to the above acrylate One kind.

進而,還可以列舉出:使甲酚酚醛清漆型環氧樹脂等多官能環氧樹脂與丙烯酸反應而成的環氧丙烯酸酯樹脂、進一步使該環氧丙烯酸酯樹脂的羥基與季戊四醇三丙烯酸酯等羥基丙烯酸酯和異佛爾酮二異氰酸酯等二異氰酸酯的半胺基甲酸酯(half urethane)化合物反應而成的環氧胺基甲酸酯丙烯酸酯化合物等。 Further, an epoxy acrylate resin obtained by reacting a polyfunctional epoxy resin such as a cresol novolak epoxy resin with acrylic acid, and a hydroxyl group of the epoxy acrylate resin and pentaerythritol triacrylate may be used. An epoxy urethane acrylate compound obtained by reacting a hydroxy acrylate with a half urethane compound of a diisocyanate such as isophorone diisocyanate.

相對於100質量份前述含羧基之樹脂(A),此類分子中具有兩個以上乙烯性不飽和基團的化合物(D)的含 量期望為5~100質量份,更佳地為10~70質量份。所述含量相對於100質量份所述含羧基之樹脂(A)不足5質量份的情況下,所得到的鹼顯影型感光性樹脂組合物的光固化性降低,難以透過活性能量射線照射後而鹼顯影形成圖案。另一方面,超過100質量份時,對鹼水溶液的溶解性降低、固化塗膜變脆。 The content of the compound (D) having two or more ethylenically unsaturated groups in such a molecule with respect to 100 parts by mass of the above carboxyl group-containing resin (A) The amount is desirably 5 to 100 parts by mass, more preferably 10 to 70 parts by mass. When the content is less than 5 parts by mass based on 100 parts by mass of the carboxyl group-containing resin (A), the photocurability of the obtained alkali-developable photosensitive resin composition is lowered, and it is difficult to pass the active energy ray irradiation. The alkali develops to form a pattern. On the other hand, when it exceeds 100 parts by mass, the solubility in an aqueous alkali solution is lowered, and the cured coating film becomes brittle.

(F)填料 (F) filler

為了提高耐熱性與TH內的銅的密合性,本發明的鹼顯影型感光性樹脂組合物可以使用(F)填料。 In order to improve the adhesion between the heat resistance and the copper in the TH, the (F) filler can be used for the alkali-developable photosensitive resin composition of the present invention.

作為(F)填料,可列舉出:硫酸鋇、鈦酸鋇、氧化矽粉、球狀二氧化矽、黏土、碳酸鎂、碳酸鈣、氧化鋁、氫氧化鋁、玻璃纖維、碳纖維、雲母粉等公知常用的無機或有機填料。(F)填料可以進行表面處理也可以沒有進行表面處理。 Examples of the (F) filler include barium sulfate, barium titanate, barium oxide powder, spherical ceria, clay, magnesium carbonate, calcium carbonate, alumina, aluminum hydroxide, glass fiber, carbon fiber, mica powder, and the like. Commonly used inorganic or organic fillers are known. (F) The filler may or may not be surface treated.

(F)填料的含量在總量的0.01質量%以上且50質量%以下是合適的。不足0.01質量%時,不能充分得到與TH內的銅的密合性與耐熱性,超過50質量%時,鹼顯影型感光性樹脂組合物的流動性變差,在印刷時向TH內的埋入性變差。 The content of the filler (F) is preferably 0.01% by mass or more and 50% by mass or less based on the total amount. When the amount is less than 0.01% by mass, the adhesion to the copper in the TH and the heat resistance are not sufficiently obtained. When the content is more than 50% by mass, the fluidity of the alkali-developable photosensitive resin composition is deteriorated, and it is buried in the TH during printing. Into the sex is getting worse.

(G)熱固化性成分 (G) thermosetting component

為了賦予耐熱性和耐裂紋性,本發明中所使用的鹼顯影型感光性樹脂組合物混合分子中具有兩個以上反應基團 (環狀醚基及環狀硫醚基中的至少任一種(以下簡稱為環狀(硫)醚基))的熱固化性成分(G)。 The alkali-developable photosensitive resin composition used in the present invention has two or more reactive groups in a mixed molecule in order to impart heat resistance and crack resistance. A thermosetting component (G) of at least one of a cyclic ether group and a cyclic thioether group (hereinafter simply referred to as a cyclic (thio)ether group).

熱固化性成分(G)是分子中具有三員環、四員環或五員環的環狀醚基或環狀硫醚基中的任一種或者兩種或兩種以上的化合物,例如,可列舉出:分子內具有至少兩個以上環氧基的化合物即多官能環氧化合物(G-1),分子內具有至少兩個以上氧呾基的化合物即多官能氧呾化合物(G-2),分子內具有至少兩個以上硫醚基的化合物即環硫化物樹脂(G-3)等。 The thermosetting component (G) is any one or two or more kinds of a cyclic ether group or a cyclic thioether group having a three-membered ring, a four-membered ring or a five-membered ring in the molecule, for example, The polyfunctional epoxy compound (G-1) which is a compound having at least two or more epoxy groups in the molecule, and a compound having at least two or more oxon groups in the molecule, that is, a polyfunctional oxonium compound (G-2) A compound having at least two or more thioether groups in the molecule, that is, an episulfide resin (G-3) or the like.

作為所述多官能環氧化合物(G-1),例如,可列舉出:三菱化學株式會社製造的EPICOAT828、EPICOAT834、EPICOAT1001、EPICOAT1004,DIC製造的Epiclon840、Epiclon850、Epiclon1050、Epiclon2055,東都化成公司製造的Epotote YD-011、YD-013、YD-127、YD-128,Dow Chemical Company製造的D.E.R.317、D.E.R.331、D.E.R.661、D.E.R.664,住友化學工業公司製造的Sumiepoxy ESA-011、ESA-014、ELA-115、ELA-128,旭化成工業公司製造的A.E.R.330、A.E.R.331、A.E.R.661、A.E.R.664等(均為商品名)雙酚A型環氧樹脂;三菱化學製造的EPICOAT YL903,DIC製造的Epiclon152、Epiclon165,東都化成公司製造的Epotote YDB-400、YDB-500,Dow Chemical Company製造的D.E.R.542,住友化學工業公司製造的Sumiepoxy ESB-400、ESB-700,旭化成工業公司製造的A.E.R.711、 A.E.R.714等(均為商品名)溴化環氧樹脂;三菱化學株式會社製造的EPICOAT152、EPICOAT154,Dow Chemical Company製造的D.E.N.431、D.E.N.438,DIC製造的EpiclonN-730、EpiclonN-770、EpiclonN-865,東都化成公司製造的Epotote YDCN-701、YDCN-704,日本化藥公司製造的EPPN-201、EOCN-1025、EOCN-1020、EOCN-104S、RE-306,住友化學工業公司製造的Sumiepoxy ESCN-195X、ESCN-220,旭化成工業公司製造的A.E.R.ECN-235、ECN-299等(均為商品名)酚醛清漆型環氧樹脂;DIC製造的Epiclon830,三菱化學株式會社製造EPICOAT807,東都化成公司製造的Epotote YDF-170、YDF-175、YDF-2004等(均為商品名)雙酚F型環氧樹脂;東都化成公司製造的Epotote ST-2004、ST-2007、ST-3000(商品名)等氫化雙酚A型環氧樹脂;三菱化學株式會社製造的EPICOAT604,東都化成公司製造的Epotote YH-434,住友化學工業公司製造的Sumiepoxy ELM-120等(均為商品名)縮水甘油胺型環氧樹脂;乙內醯脲型環氧樹脂;DAICEL CHEMICAL INDUSTRIES,LTD.製造的Celoxide2021等(均為商品名)脂環式環氧樹脂;三菱化學株式會社製造的YL-933,Dow Chemical Company製造的T.E.N.、EPPN-501、EPPN-502等(均為商品名)三羥基苯基甲烷型環氧樹脂;三菱化學株式會社製造的YL-6056、YX-4000、YL-6121(均為商品名)等聯二甲苯酚型或雙酚型環氧樹脂或它們的混合物;日本化 藥公司製造的EBPS-200,旭電化工業公司製造的EPX-30,DIC製造的EXA-1514(商品名)等雙酚S型環氧樹脂;三菱化學株式會社製造的EPICOAT157S(商品名)等雙酚A酚醛清漆型環氧樹脂;三菱化學株式會社製造的EPICOAT YL-931等(均為商品名)四羥苯基乙烷型環氧樹脂;日產化學工業公司製造的TEPIC等(均為商品名)雜環式環氧樹脂;日本油脂公司製造的Blemmer DGT等鄰苯二甲酸二縮水甘油酯樹脂;東都化成公司製造的ZX-1063等四縮水甘油基二甲苯酚乙烷(tetraglycidyl xylenoyl ethane)樹脂;新日鐵化學公司製造的ESN-190、ESN-360,DIC製造的HP-4032、EXA-4750、EXA-4700等含萘基環氧樹脂;DIC製造的HP-7200、HP-7200H等具有二環戊二烯骨架的環氧樹脂;日本油脂公司製造的CP-50S、CP-50M等甲基丙烯酸縮水甘油酯共聚系環氧樹脂;以及環己基馬來醯亞胺與甲基丙烯酸縮水甘油酯的共聚環氧樹脂;環氧改性聚丁二烯橡膠衍生物(例如DAICEL CHEMICAL INDUSTRIES,LTD.製造的PB-3600等)、CTBN改性環氧樹脂(例如東都化成公司製造的YR-102、YR-450等)等,但不限於這些。這些環氧樹脂可以單獨或組合使用兩種以上。在它們中,特別佳者為雙酚A型環氧樹脂或它們的混合物。 Examples of the polyfunctional epoxy compound (G-1) include EPICOAT828, EPICOAT834, EPICOAT1001, EPICOAT1004 manufactured by Mitsubishi Chemical Corporation, Epiclon 840, Epiclon 850, Epiclon 1050, and Epiclon 2055 manufactured by DIC, manufactured by Tohto Kasei Co., Ltd. Epotote YD-011, YD-013, YD-127, YD-128, DER317, DER331, DER661, DER664 manufactured by Dow Chemical Company, Sumiepoxy ESA-011, ESA-014, ELA manufactured by Sumitomo Chemical Industries -115, ELA-128, AER330, AER331, AER661, AER664, etc. (all trade names) bisphenol A epoxy resin manufactured by Asahi Kasei Industrial Co., Ltd.; EPICOAT YL903 manufactured by Mitsubishi Chemical Corporation, Epiclon152 manufactured by DIC, Epiclon 165, Epotote YDB-400 manufactured by Dongdu Chemical Co., Ltd., YDB-500, DER542 manufactured by Dow Chemical Company, Sumiepoxy ESB-400 manufactured by Sumitomo Chemical Industries, Ltd., ESB-700, AER711 manufactured by Asahi Kasei Industrial Co., Ltd. AER714 (both trade names) brominated epoxy resin; EPICOAT152, EPICOAT154 manufactured by Mitsubishi Chemical Corporation, DEN431, DEN438 manufactured by Dow Chemical Company, Epiclon N-730, Epiclon N-770, Epiclon N-865 manufactured by DIC Epotote YDCN-701, YDCN-704 manufactured by Dongdu Chemical Co., Ltd., EPPN-201, EOCN-1025, EOCN-1020, EOCN-104S, RE-306 manufactured by Nippon Kayaku Co., Ltd., Sumiepoxy ESCN manufactured by Sumitomo Chemical Industries, Ltd. 195X, ESCN-220, AERECN-235, ECN-299, etc. (all trade names) manufactured by Asahi Kasei Kogyo Co., Ltd. (all are brand name) novolac type epoxy resin; Epiclon 830 manufactured by DIC, EPICOAT807 manufactured by Mitsubishi Chemical Corporation, manufactured by Dongdu Chemical Co., Ltd. Epotote YDF-170, YDF-175, YDF-2004 (all are trade names) bisphenol F-type epoxy resin; Epotote ST-2004, ST-2007, ST-3000 (trade name) manufactured by Dongdu Chemical Co., Ltd. Bisphenol A type epoxy resin; EPICOAT604 manufactured by Mitsubishi Chemical Corporation, Epotote YH-434 manufactured by Dongdu Chemical Co., Ltd., Sumiepoxy ELM-120 manufactured by Sumitomo Chemical Industries Co., Ltd. (all trade names) glycidylamine type epoxy tree ; 乙 醯 醯 环氧树脂 环氧树脂 ; ; DA DA DA DA DA DA DA DA DA DA DA DA DA DA DA DA DA DA DA DA DA DA DA DA DA DA DA DA DA DA DA DA DA DA DA DA DA DA DA DA DA DA DA DA DA DA DA EPPN-501, EPPN-502 (all are trade names), trihydroxyphenylmethane type epoxy resin; YL-6056, YX-4000, YL-6121 (all trade names) manufactured by Mitsubishi Chemical Corporation A phenolic or bisphenol type epoxy resin or a mixture thereof; EBPS-200 manufactured by PharmaTech, EPX-30 manufactured by Asahi Chemical Industry Co., Ltd., bisphenol S-type epoxy resin such as EXA-1514 (trade name) manufactured by DIC, and EPICOAT157S (trade name) manufactured by Mitsubishi Chemical Corporation Phenol A novolac type epoxy resin; EPICOAT YL-931 (all are trade names) manufactured by Mitsubishi Chemical Corporation, tetraphenylolethane type epoxy resin; TEPIC manufactured by Nissan Chemical Industries Co., Ltd. (all are trade names) a heterocyclic epoxy resin; a diglycidyl phthalate resin such as Blemmer DGT manufactured by Nippon Oil & Fats Co., Ltd.; a tetraglycidyl xylenoyl ethane resin such as ZX-1063 manufactured by Dongdu Chemical Co., Ltd. ESN-190, ESN-360 manufactured by Nippon Steel Chemical Co., Ltd., HP-4032, EXA-4750, EXA-4700 and other naphthalene-containing epoxy resins manufactured by DIC; HP-7200 and HP-7200H manufactured by DIC have Epoxy resin of dicyclopentadiene skeleton; glycidyl methacrylate copolymer epoxy resin such as CP-50S and CP-50M manufactured by Nippon Oil & Fats Co., Ltd.; and cyclohexylmaleimide and glycidol methacrylate Ester copolymer epoxy resin; epoxy modified poly Butadiene rubber derivative (for example, PB-3600 manufactured by DAICEL CHEMICAL INDUSTRIES, LTD.), CTBN modified epoxy resin (for example, YR-102, YR-450, etc. manufactured by Tosho Kasei Co., Ltd.), etc., but not limited thereto . These epoxy resins may be used alone or in combination of two or more. Among them, particularly preferred are bisphenol A type epoxy resins or a mixture thereof.

作為前述多官能氧呾化合物(G-2),可列舉出:雙[(3-甲基-3-氧呾基甲氧基)甲基]醚、雙[(3-乙基-3-氧呾基甲氧基)甲基]醚、1,4-雙[(3-甲基-3-氧呾基甲氧基)甲基] 苯、1,4-雙[(3-乙基-3-氧呾基甲氧基)甲基]苯、丙烯酸(3-甲基-3-氧呾基)甲酯、丙烯酸(3-乙基-3-氧呾基)甲酯、甲基丙烯酸(3-甲基-3-氧呾基)甲酯、甲基丙烯酸(3-乙基-3-氧呾基)甲酯、它們的低聚物或共聚物等多官能氧呾類、以及氧雜環丁醇與酚醛清漆樹脂、聚(對羥基苯乙烯)、cardo型雙酚類、杯芳烴類(calixarene)、間苯二酚杯芳烴(calixresorcinarene)類或倍半矽氧烷(silsesquioxane)等具有羥基的樹脂的醚化物等。另外,還可列舉出具有氧呾環的不飽和單體與(甲基)丙烯酸烷基酯的共聚物等。 Examples of the polyfunctional oxonium compound (G-2) include bis[(3-methyl-3-oxomethoxymethyl)methyl]ether and bis[(3-ethyl-3-oxo). Mercaptomethoxy)methyl]ether, 1,4-bis[(3-methyl-3-oxomethoxymethyl)methyl] Benzene, 1,4-bis[(3-ethyl-3-oxomethoxymethyl)methyl]benzene, (3-methyl-3-oxomethyl)methyl acrylate, acrylic acid (3-ethyl 3-oxomethoxy)methyl ester, (3-methyl-3-oxomethyl)methyl methacrylate, (3-ethyl-3-oxomethyl)methyl methacrylate, their oligomerization Polyfunctional oxime such as a substance or a copolymer, and oxetane and novolac resin, poly(p-hydroxystyrene), cardo type bisphenol, calixarene, resorcinol calixarene ( An ether compound of a resin having a hydroxyl group such as calixresorcinarene or silsesquioxane. Further, a copolymer of an unsaturated monomer having an oxonium ring and an alkyl (meth)acrylate may, for example, be mentioned.

作為所述分子中具有兩個以上環狀硫醚基的化合物(G-3),例如可列舉出:三菱化學公司制的雙酚A型環硫化物樹脂YL7000等。另外,也可以使用採用同樣的合成方法將酚醛清漆型環氧樹脂的環氧基的氧原子置換成硫原子而得到的環硫樹脂等。 The compound (G-3) having two or more cyclic thioether groups in the molecule may, for example, be a bisphenol A type episulfide resin YL7000 manufactured by Mitsubishi Chemical Corporation. Further, an episulfide resin obtained by replacing the oxygen atom of the epoxy group of the novolac type epoxy resin with a sulfur atom by the same synthesis method may be used.

關於所述分子中具有兩個以上環狀(硫)醚基的(G)熱固化性成分的含量,相對於1當量之所述含羧基之樹脂(A)的羧基,較佳地,環狀(硫)醚基為0.6~2.0當量,更佳地為0.8~1.5當量的範圍。分子中具有兩個以上環狀(硫)醚基的熱固化性成分(G)的含量不足0.6當量的情況下,阻焊劑膜中有殘存羧基,耐熱性、耐鹼性、電絕緣性等降低。另一方面,超過2.0當量的情況下,由於在乾燥塗膜中有殘存低分子量的環狀(硫)醚基,因此塗膜的強度等降低。 The content of the (G) thermosetting component having two or more cyclic (thio)ether groups in the molecule is preferably a ring with respect to 1 equivalent of the carboxyl group of the carboxyl group-containing resin (A). The (thio)ether group is in the range of 0.6 to 2.0 equivalents, more preferably in the range of 0.8 to 1.5 equivalents. When the content of the thermosetting component (G) having two or more cyclic (thio)ether groups in the molecule is less than 0.6 equivalent, the carboxyl group remains in the solder resist film, and heat resistance, alkali resistance, electrical insulation, and the like are lowered. . On the other hand, in the case of more than 2.0 equivalents, since a low-molecular-weight cyclic (thio)ether group remains in the dried coating film, the strength and the like of the coating film are lowered.

在使用所述分子中具有兩個以上環狀(硫)醚基的熱固化性成分(G)的情況下,該鹼顯影型感光性樹脂組合物較佳地含有熱固化催化劑。作為熱固化催化劑,例如可列舉出:咪唑、2-甲基咪唑、2-乙基咪唑、2-乙基-4-甲基咪唑、2-苯基咪唑、4-苯基咪唑、1-氰乙基-2-苯基咪唑、1-(2-氰乙基)-2-乙基-4-甲基咪唑等咪唑衍生物;雙氰胺、苄基二甲胺、4-(二甲胺基)-N,N-二甲基苄胺、4-甲氧基-N,N-二甲基苄胺、4-甲基-N,N-二甲基苄胺等胺化合物;己二酸二醯肼、癸二酸二醯肼等醯肼化合物;三苯基膦等磷化合物等,另外,關於市售品之熱固化催化劑,例如可列舉出四國化成工業公司製造的2MZ-A、2MZ-OK、2PHZ、2P4BHZ、2P4MHZ(均為咪唑系化合物的商品名),SAN-APRO公司製造的U-CAT3503N、U-CAT3502T(均為二甲胺的封閉異氰酸酯化合物的商品名)、DBU、DBN、U-CATSA102、U-CAT5002(均為二環式脒化合物及其鹽)等,並不特別限定於這些化合物。環氧樹脂的熱固化催化劑、氧呾化合物的熱固化催化劑、或促進環氧基和氧呾基的至少任一者與羧基反應的催化劑亦可,可以單獨使用或亦可以混合兩者以上使用。此外,也可以使用胍胺、甲基胍胺、苯并胍胺、三聚氰胺、2,4-二胺基-6-甲基丙烯醯氧基乙基-對稱三(sym-triazine)、2-乙烯基-2,4-二胺基-對稱三、2-乙烯基-4,6-二胺基-對稱三‧異氰脲酸加成物、2,4-二胺基-6-甲基丙烯醯氧基乙基-對稱三‧異氰脲酸加成物等對稱三衍生物,較佳地將作為密合性賦 予劑之化合物與前述熱固化催化劑組合使用。 In the case of using the thermosetting component (G) having two or more cyclic (thio)ether groups in the molecule, the alkali-developable photosensitive resin composition preferably contains a thermosetting catalyst. Examples of the thermosetting catalyst include imidazole, 2-methylimidazole, 2-ethylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 4-phenylimidazole, and 1-cyanoquinone. Imidazole derivatives such as ethyl-2-phenylimidazole and 1-(2-cyanoethyl)-2-ethyl-4-methylimidazole; dicyandiamide, benzyldimethylamine, 4-(dimethylamine) Amine compounds such as N-N,N-dimethylbenzylamine, 4-methoxy-N,N-dimethylbenzylamine, 4-methyl-N,N-dimethylbenzylamine; adipic acid An antimony compound such as diterpene or azelaic acid dioxime; a phosphorus compound such as triphenylphosphine; and the like, and a thermosetting catalyst of a commercial product, for example, 2MZ-A manufactured by Shikoku Chemicals Co., Ltd., 2MZ-OK, 2PHZ, 2P4BHZ, 2P4MHZ (all trade names of imidazole-based compounds), U-CAT3503N and U-CAT3502T (trade names of blocked isocyanate compounds of dimethylamine) manufactured by SAN-APRO Co., Ltd., DBU, DBN, U-CATSA102, U-CAT5002 (both bicyclic hydrazine compounds and salts thereof) and the like are not particularly limited to these compounds. The thermosetting catalyst of the epoxy resin, the thermosetting catalyst of the oxonium compound, or the catalyst for promoting the reaction of at least one of the epoxy group and the oxon group with the carboxyl group may be used singly or in combination of two or more. In addition, guanamine, methyl decylamine, benzoguanamine, melamine, 2,4-diamino-6-methylpropenyloxyethyl-symmetric three can also be used. (sym-triazine), 2-vinyl-2,4-diamino-symmetric three 2-vinyl-4,6-diamino-symmetric three ‧Isocyanuric acid adduct, 2,4-diamino-6-methylpropenyloxyethyl-symmetric three ‧ Isocyanuric acid adducts and other symmetry three The derivative preferably uses a compound as an adhesion-imparting agent in combination with the above-mentioned thermosetting catalyst.

其他成分 Other ingredients

本發明的鹼顯影型感光性樹脂組合物可以根據需要進一步混合酞花青藍(Phthalocyanine Blue)、酞花青綠(Phthalocyanine Green)、碘綠(Iodine green)、雙偶氮黃、結晶紫、氧化鈦、炭黑、萘藍黑(Naphthalene black)等公知常用的著色劑,氫醌、氫醌單甲基醚、三級丁基茶酚、1,2,3-三羥基苯(Pyrogallol)、啡噻(phenothiazine)等公知常用的熱聚合反應抑制劑,微粉(微粒狀或粉末狀)二氧化矽、有機膨潤土、蒙脫土等公知常用的增稠劑,有機矽系、氟系、高分子系等消泡劑及平流劑(leveling agent)的至少任一者,咪唑系、噻唑系、三唑系等密合性賦予劑、矽烷偶合劑等亦是公知常用的添加劑類。 The alkali-developable photosensitive resin composition of the present invention may further contain Phthalocyanine Blue, Phthalocyanine Green, Iodine green , disazo yellow, crystal violet, and titanium oxide as needed. , commonly known coloring agents such as carbon black, naphthalene black, etc., hydroquinone, hydroquinone monomethyl ether, tert-butyl catechol, 1,2,3-trihydroxybenzene (Pyrogallol), thiophene Commonly known thermal polymerization inhibitors such as (phenothiazine), known powder thickeners such as fine powder (particulate or powdery) cerium oxide, organic bentonite, montmorillonite, organic lanthanide, fluorine-based, polymer-based, etc. At least one of an antifoaming agent and a leveling agent is also a commonly known additive such as an imidazole imparting agent such as an imidazole-based, a thiazole-based or a triazole-based or a decane coupling agent.

在使用本發明的鹼顯影型感光性樹脂組合物作為形成印刷電路板的阻焊劑時,根據需要將本發明的鹼顯影型感光性樹脂組合物的黏度調整至適合塗布方法所需的黏度後,透過絲網印刷法、簾幕印刷法、噴塗法、輥塗法等方法將其塗布在例如在預先形成有電路的印刷電路板上,根據需要例如透過以約60~100℃的溫度進行乾燥處理,可形成不黏手的塗膜。然後,透過形成有規定的曝光圖案的光掩膜,選擇性地利用活性光線進行曝光,通過鹼性水溶液顯影未曝光部份,可以形成抗蝕圖案,進而,例如透過加 熱至約140~180℃的溫度使其熱固化,從而可以促進所述熱固化性成分的固化反應和感光性樹脂成分的聚合,提高得到的抗蝕覆膜的耐熱性、耐溶劑性、耐酸性、耐吸濕性、PCT耐受性、密合性、電特性等各種特性。 When the alkali-developing photosensitive resin composition of the present invention is used as a solder resist for forming a printed circuit board, if necessary, the viscosity of the alkali-developable photosensitive resin composition of the present invention is adjusted to a viscosity suitable for the coating method. It is applied to, for example, a printed circuit board on which a circuit is formed by a screen printing method, a curtain printing method, a spray coating method, a roll coating method, or the like, and is dried, for example, at a temperature of about 60 to 100 ° C as needed. It can form a coating film that is not sticky. Then, the photomask formed with the predetermined exposure pattern is selectively exposed by the active light, and the unexposed portion is developed by the alkaline aqueous solution to form a resist pattern, and further, for example, by adding The heat is cured to a temperature of about 140 to 180 ° C, whereby the curing reaction of the thermosetting component and the polymerization of the photosensitive resin component can be promoted, and the heat resistance, solvent resistance, and acid resistance of the obtained resist film can be improved. Various properties such as properties, moisture absorption resistance, PCT resistance, adhesion, and electrical properties.

作為上述顯影時使用的鹼水溶液,可以使用氫氧化鉀、氫氧化鈉、碳酸鈉、碳酸鉀、磷酸鈉、矽酸鈉、氨、胺類等的鹼水溶液。此外,作為用於光固化的照射光源,低壓汞燈、中壓汞燈、高壓汞燈、超高壓汞燈、半導體雷射器、固體鐳射、氙氣燈或金屬鹵化物燈等是合適的。 As the aqueous alkali solution used in the above development, an aqueous alkali solution such as potassium hydroxide, sodium hydroxide, sodium carbonate, potassium carbonate, sodium phosphate, sodium citrate, ammonia or an amine can be used. Further, as the irradiation light source for photocuring, a low pressure mercury lamp, a medium pressure mercury lamp, a high pressure mercury lamp, an ultrahigh pressure mercury lamp, a semiconductor laser, a solid laser, a xenon lamp or a metal halide lamp or the like is suitable.

實施例 Example

基於實施例及比較例更詳細地對本發明進行說明,但本發明的保護範圍及其實施方式並不限定於這些。實施例及比較例中的“份”或“%”若無特別說明則為質量基準。通過以下敍述的方法,進行本實施例的組合物的特性值(character value)試驗。 The present invention will be described in more detail based on examples and comparative examples, but the scope of the invention and the embodiments thereof are not limited thereto. The "parts" or "%" in the examples and comparative examples are based on mass unless otherwise specified. The characteristic value test of the composition of the present example was carried out by the method described below.

合成例1 Synthesis Example 1

向配有氣體導入管、攪拌裝置、冷凝管、溫度計、及連續滴加用的滴液漏斗的反應容器中投入86質量份之1,4-環己烷二羧酸(羧酸當量86g/當量的1,4-環己烷二羧酸)與378質量份之雙酚A型環氧樹脂(三菱化學公司製造、EPICOAT 828、環氧當量189g/當量的雙酚A型環氧樹脂),在氮氣氛圍下,在攪拌下在110℃下使其溶解。 然後,添加0.3質量份之三苯基膦,將反應容器內的溫度升溫至150℃,一邊保持溫度在150℃,一邊反應約90分鐘,得到環氧當量464g/當量的環氧化合物。接著將燒瓶內的溫度冷卻至40℃,添加390質量份之卡必醇醋酸酯,加熱溶解,添加0.46質量份之甲基氫醌和1.38質量份之三苯基膦,加熱至95~105℃,緩慢滴加72質量份之丙烯酸,使其反應16小時。將該反應生成物冷卻至80~90℃,添加190質量份之四氫鄰苯二甲酸酐,使其反應8小時。如此操作得到的含羧基之感光性樹脂的不揮發成分為65%,固體成分的酸值為100mgKOH/g。以下將該樹脂溶液稱為清漆A。 86 parts by mass of 1,4-cyclohexanedicarboxylic acid (carboxylic acid equivalent: 86 g/eq.) was placed in a reaction vessel equipped with a gas introduction tube, a stirring device, a condenser, a thermometer, and a dropping funnel for continuous dropwise addition. 1,4-cyclohexanedicarboxylic acid) and 378 parts by mass of bisphenol A epoxy resin (manufactured by Mitsubishi Chemical Corporation, EPICOAT 828, epoxy equivalent 189 g/eq. of bisphenol A epoxy resin), It was dissolved at 110 ° C under stirring in a nitrogen atmosphere. Then, 0.3 parts by mass of triphenylphosphine was added, and the temperature in the reaction vessel was raised to 150 ° C, and the reaction was carried out for about 90 minutes while maintaining the temperature at 150 ° C to obtain an epoxy compound having an epoxy equivalent of 464 g / equivalent. Next, the temperature in the flask was cooled to 40 ° C, 390 parts by mass of carbitol acetate was added, dissolved by heating, and 0.46 parts by mass of methylhydroquinone and 1.38 parts by mass of triphenylphosphine were added and heated to 95 to 105 ° C. 72 parts by mass of acrylic acid was slowly added dropwise and allowed to react for 16 hours. The reaction product was cooled to 80 to 90 ° C, and 190 parts by mass of tetrahydrophthalic anhydride was added to carry out a reaction for 8 hours. The carboxyl group-containing photosensitive resin obtained in this manner had a nonvolatile content of 65%, and the solid content had an acid value of 100 mgKOH/g. Hereinafter, the resin solution is referred to as varnish A.

合成例2 Synthesis Example 2

向配有攪拌器及回流冷凝管的四口燒瓶中投入214質量份之甲酚酚醛清漆型環氧樹脂EPICLON N-695(DIC製造、環氧當量=214),添加103質量份之卡必醇醋酸酯、103質量份之石油系烴溶劑(Japan Energy Corporation製造商品名:Cactus Fines SF-01)加熱溶解。接著,添加作為聚合反應抑制劑的0.1質量份之氫醌和作為反應催化劑的2.0質量份之三苯基膦。將該混合物加熱至95~105℃,緩慢滴加72質量份之丙烯酸,使其反應16小時。將得到的反應生成物冷卻至80~90℃,添加91.2質量份之四氫鄰苯二甲酸酐,使其反應8小時,冷卻後取出。如此操作得到的含羧基光聚合性不飽和化合物的 不揮發成分為65%,固體成分的酸值為87.5mgKOH/g。以下,將該反應生成物的溶液稱為清漆B。 214 parts by mass of a cresol novolac type epoxy resin EPICLON N-695 (manufactured by DIC, epoxy equivalent = 214) was placed in a four-necked flask equipped with a stirrer and a reflux condenser, and 103 parts by mass of carbitol was added. The acetate and 103 parts by mass of a petroleum hydrocarbon solvent (manufactured by Japan Energy Corporation: Cactus Fines SF-01) were dissolved by heating. Next, 0.1 part by mass of hydroquinone as a polymerization inhibitor and 2.0 parts by mass of triphenylphosphine as a reaction catalyst were added. The mixture was heated to 95 to 105 ° C, and 72 parts by mass of acrylic acid was slowly added dropwise to carry out a reaction for 16 hours. The obtained reaction product was cooled to 80 to 90 ° C, and 91.2 parts by mass of tetrahydrophthalic anhydride was added thereto, and the mixture was reacted for 8 hours, and then taken out after cooling. The carboxyl group-containing photopolymerizable unsaturated compound thus obtained The nonvolatile content was 65%, and the acid value of the solid content was 87.5 mgKOH/g. Hereinafter, the solution of the reaction product is referred to as varnish B.

使用所述合成例1-2的含羧基之樹脂溶液(清漆A和清漆B),以表1中所示的各種成分和其比例(質量份)混合,用攪拌機預混合後,用3輥磨混煉,製備鹼顯影型感光性樹脂組合物。在此,用ERICHSEN公司製造的粒度測定儀進行粒度測定,對得到的鹼顯影型感光性樹脂組合物的分散度進行評價,結果為15μm以下。 Using the carboxyl group-containing resin solution (varnish A and varnish B) of the synthesis example 1-2, the various components shown in Table 1 and the ratio (parts by mass) thereof were mixed, premixed with a stirrer, and then subjected to a 3-roll mill. The alkali-developable photosensitive resin composition was prepared by kneading. Here, the particle size measurement was performed by a particle size analyzer manufactured by ERICHSEN Co., Ltd., and the degree of dispersion of the obtained alkali-developable photosensitive resin composition was evaluated and found to be 15 μm or less.

性能評價: Performance evaluation: (1)耐爆孔性 (1) blast resistance

向Φ0.5、0.8mmt的基板中充填上述實施例1-4及比較例1-3的各鹼顯影型感光性樹脂組合物後,進行光固化與熱固化而得到固化的塗膜,根據JIS C6481的試驗方法,使用松香系及水溶性焊劑將上述塗膜浸漬在288℃的焊料浴中10秒3次。然後目視觀察TH部分的塗膜狀態。評價基準如下所示。 Each of the alkali-developable photosensitive resin compositions of the above Examples 1-4 and Comparative Examples 1-3 was filled in a substrate of Φ0.5 and 0.8 mmt, and then cured by photocuring and heat curing to obtain a cured coating film according to JIS. In the test method of C6481, the above coating film was immersed in a solder bath at 288 ° C for 3 seconds 3 times using a rosin-based and water-soluble flux. Then, the state of the coating film of the TH portion was visually observed. The evaluation criteria are as follows.

○:Φ500的TH500孔中塗膜完全沒有突出 ○: The coating film in the TH500 hole of Φ500 is completely absent.

△:Φ500的TH500孔中塗膜的突出不足5個 △: less than 5 protrusions of the coating film in the TH500 hole of Φ500

×:Φ500的TH500孔中塗膜的突出為5個以上 ×: The protrusion of the coating film in the TH500 hole of Φ500 is 5 or more

(2)耐空泡性 (2) Cavitation resistance

向Φ0.5、0.8mmt的基板中充填上述實施例1-4及比較例1-3的各鹼顯影型感光性樹脂組合物後,進行光固化與熱固化而得到固化的塗膜,根據JIS C6481的試驗方法,使用松香系及水溶性焊劑將上述塗膜浸漬在288℃的焊料浴中10秒3次。然後進行膠帶剝離,確認TH周邊的剝離狀態。評價基準如下所示。 Each of the alkali-developable photosensitive resin compositions of the above Examples 1-4 and Comparative Examples 1-3 was filled in a substrate of Φ0.5 and 0.8 mmt, and then cured by photocuring and heat curing to obtain a cured coating film according to JIS. In the test method of C6481, the above coating film was immersed in a solder bath at 288 ° C for 3 seconds 3 times using a rosin-based and water-soluble flux. Then, the tape was peeled off, and the peeling state around TH was confirmed. The evaluation criteria are as follows.

○:Φ500的TH500孔中完全沒有產生空泡 ○: No bubble is generated in the TH500 hole of Φ500

△:Φ500的TH500孔中產生不足5個空泡 △: less than 5 vacuoles are produced in the TH500 hole of Φ500

×:Φ500的TH500孔中產生5個以上空泡 ×: More than 5 vacuoles are generated in the TH500 hole of Φ500

(3)與TH內的銅的密合性 (3) Adhesion to copper in TH

向Φ0.5、0.8mmt的基板中充填上述實施例1-4及比較例1-3的各鹼顯影型感光性樹脂組合物後,進行光固化與熱固化,形成固化塗膜。然後用光學顯微鏡確認基板的剖面狀態。評價基準如下所示。圖中示出了剖面形狀的示意圖。 Each of the alkali-developable photosensitive resin compositions of the above Examples 1-4 and Comparative Examples 1-3 was filled in a substrate of Φ0.5 and 0.8 mmt, and then photocured and thermally cured to form a cured coating film. Then, the cross-sectional state of the substrate was confirmed by an optical microscope. The evaluation criteria are as follows. A schematic view of the cross-sectional shape is shown.

○:TH的銅與塗膜沒有剝離等異常 ○: There is no abnormality such as peeling of copper and coating film of TH

×:TH的銅與塗膜剝離 ×: TH is peeled off from the coating film

(4)耐裂紋性 (4) Crack resistance

向Φ0.5、0.8mmt的基板中充填所述實施例1-4及比 較例1-3的各鹼顯影型感光性樹脂組合物後,進行光固化與熱固化,形成固化塗膜。然後用光學顯微鏡觀察TH部分的塗膜狀態。評價基準如下所示。 Filling the substrates of Φ0.5 and 0.8 mmt with the examples 1-4 and the ratio Each of the alkali-developable photosensitive resin compositions of Comparative Example 1-3 was subjected to photocuring and thermal curing to form a cured coating film. Then, the state of the coating film of the TH portion was observed with an optical microscope. The evaluation criteria are as follows.

○:Φ500的TH500孔中完全沒有裂紋 ○: There is no crack in the TH500 hole of Φ500.

△:Φ500的TH500孔中產生不足5個裂紋 △: less than 5 cracks in the TH500 hole of Φ500

×:Φ500的TH500孔中產生5個以上裂紋 ×: More than 5 cracks are generated in the TH500 hole of Φ500

將上述各試驗的結果示於表2。 The results of the above tests are shown in Table 2.

由以上可知,透過調整為實施例1-4的組成,可以得到耐爆孔性、耐空泡性、及與TH內的銅的密合性和耐裂紋性優異的感光性樹脂組合物。與此相對,比較例1中,由於(E)滑石的含量低而密合性不充分,其結果,不能得到與TH內的銅的密合性。比較例2中,雖然(E)滑石的含量充分,但不含有含羧基之樹脂(A-1),因此柔軟性不充分,其結果,不能得到耐爆孔性、耐空泡性。比較例3中,由於不含有(E)滑石而密合性與柔軟性不充分,其結果,不能得到與TH內的銅的密合性和耐裂紋性。 As described above, by adjusting the composition of Example 1-4, it is possible to obtain a photosensitive resin composition which is excellent in blast resistance, cavitation resistance, and adhesion to copper in TH and crack resistance. On the other hand, in Comparative Example 1, since the content of (E) talc was low, the adhesion was insufficient, and as a result, the adhesion to copper in TH could not be obtained. In Comparative Example 2, although the content of the (E) talc is sufficient, the carboxyl group-containing resin (A-1) is not contained, so that the flexibility is insufficient, and as a result, the blast resistance and the cavitation resistance are not obtained. In Comparative Example 3, since the (E) talc was not contained, the adhesion and the flexibility were insufficient, and as a result, the adhesion to the copper in the TH and the crack resistance could not be obtained.

1‧‧‧墨 1‧‧‧ ink

2‧‧‧銅 2‧‧‧ copper

3‧‧‧基材 3‧‧‧Substrate

Claims (7)

一種鹼顯影型感光性樹脂組合物,其特徵在於,含有(A)含羧基之樹脂、(B)光聚合引發劑、(C)稀釋溶劑、(D)在一分子中具有兩個以上乙烯性不飽和基團的化合物、(E)滑石,及(F)滑石以外的填料;作為(A)含羧基之樹脂,含有使至少一種雙酚型環氧化合物(a)與不飽和羧酸(b)進行酯化反應而生成具有環氧基的酯化生成物,接著再與飽和或不飽和多元酸酐(c)反應而得到的含羧基之樹脂(A-1),並且(E)滑石的含量為組成物總量的10質量%以上且60質量%以下。 An alkali-developable photosensitive resin composition comprising (A) a carboxyl group-containing resin, (B) a photopolymerization initiator, (C) a diluent solvent, and (D) two or more ethyl groups in one molecule. a compound of an unsaturated group, (E) talc, and (F) a filler other than talc; and (A) a carboxyl group-containing resin containing at least one bisphenol type epoxy compound (a) and an unsaturated carboxylic acid (b) a carboxyl group-containing resin (A-1) obtained by an esterification reaction to form an esterification product having an epoxy group, followed by reaction with a saturated or unsaturated polybasic acid anhydride (c), and (E) a content of talc It is 10% by mass or more and 60% by mass or less of the total amount of the composition. 根據申請專利範圍第1項之鹼顯影型感光性樹脂組合物,其中,其用於充填通孔(TH)。 The alkali-developable photosensitive resin composition according to the first aspect of the invention, which is used for filling a through hole (TH). 根據申請專利範圍第1項之鹼顯影型感光性樹脂組合物,其中,其含有(G)熱固化性成分。 The alkali-developable photosensitive resin composition according to the first aspect of the invention, wherein the (G) thermosetting component is contained. 根據申請專利範圍第1項之鹼顯影型感光性樹脂組合物,其中,其塗布在銅上而使用。 The alkali-developable photosensitive resin composition according to the first aspect of the invention, which is applied to copper and used. 一種光固化性的乾膜,其特徵在於,其是將如申請專利範圍第1~4項中任一項之鹼顯影型感光性樹脂組合物塗布在載體膜上並乾燥而得到的。 A photocurable dry film obtained by applying the alkali-developable photosensitive resin composition according to any one of claims 1 to 4 to a carrier film and drying it. 一種固化物,其特徵在於,其是將如下的塗膜光固化而得到的,該塗膜為:將如申請專利範圍第1~4項中任一項之鹼顯影型感光性樹脂組合物塗布在銅上並乾燥而得到的塗膜;或將如申請專利範圍第1~4項中任一項之鹼 顯影型感光性樹脂組合物塗布在載體膜上並乾燥,將所得光固化性的乾膜層壓在銅上而得到的塗膜。 A cured product obtained by photocuring a coating film obtained by coating an alkali developing type photosensitive resin composition according to any one of claims 1 to 4 a coating film obtained by drying on copper; or a base according to any one of claims 1 to 4; The development type photosensitive resin composition is coated on a carrier film and dried, and the obtained photocurable dry film is laminated on copper to obtain a coating film. 一種印刷電路板,其特徵在於,其具備將如下的塗膜光固化後進行熱固化而得到的固化物,該塗膜為:將如申請專利範圍第1~4項中任一項之鹼顯影型感光性樹脂組合物塗布在基材上並乾燥而得到的塗膜;或將如申請專利範圍第1~4項中任一項之鹼顯影型感光性樹脂組合物塗布在載體膜上並乾燥,將所得光固化性的乾膜層壓在基材上而得到的塗膜。 A printed circuit board comprising: a cured product obtained by photocuring a coating film which is thermally cured, and the coating film is an alkali developed according to any one of claims 1 to 4. A coating film obtained by applying a photosensitive resin composition to a substrate and drying the film, or applying the alkali-developing photosensitive resin composition according to any one of claims 1 to 4 to a carrier film and drying A coating film obtained by laminating a obtained photocurable dry film on a substrate.
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