TWI513584B - Autoclave - Google Patents

Autoclave Download PDF

Info

Publication number
TWI513584B
TWI513584B TW101106053A TW101106053A TWI513584B TW I513584 B TWI513584 B TW I513584B TW 101106053 A TW101106053 A TW 101106053A TW 101106053 A TW101106053 A TW 101106053A TW I513584 B TWI513584 B TW I513584B
Authority
TW
Taiwan
Prior art keywords
processing unit
seal
receiving chamber
autoclave
processing
Prior art date
Application number
TW101106053A
Other languages
Chinese (zh)
Other versions
TW201240820A (en
Inventor
Woong Ki Park
Original Assignee
Shindo Engineering Lab Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shindo Engineering Lab Ltd filed Critical Shindo Engineering Lab Ltd
Publication of TW201240820A publication Critical patent/TW201240820A/en
Application granted granted Critical
Publication of TWI513584B publication Critical patent/TWI513584B/en

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/0046Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by constructional aspects of the apparatus
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/04Pressure vessels, e.g. autoclaves
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/10Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the pressing technique, e.g. using action of vacuum or fluid pressure

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nonlinear Science (AREA)
  • Fluid Mechanics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Press Drives And Press Lines (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)

Description

熱壓釜Hot autoclave

本發明之實施例係有關於熱壓釜,用以於製造具有堆疊結構的面板時同時加熱並緊壓面板,更具體而言,本發明有關於具有顯著改善之密封結構的熱壓釜,此密封結構係位於熱壓釜之本體與處理單元之間,以在接收將於處理空間中被處理的基板時,進入或離開本體之容納室,從而減少面板之製造成本與熱壓釜之維護成本。Embodiments of the present invention relate to an autoclave for simultaneously heating and pressing a panel when manufacturing a panel having a stacked structure, and more particularly, the present invention relates to an autoclave having a significantly improved sealing structure, The sealing structure is located between the body of the autoclave and the processing unit to enter or leave the receiving chamber of the body when receiving the substrate to be processed in the processing space, thereby reducing the manufacturing cost of the panel and the maintenance cost of the autoclave .

習知熱壓釜接收將於處理空間中被處理之面板,並加熱此面板至最佳溫度,同時於預設壓力下緊壓面板一段給定時間,以製造出如平板顯示器等之具有堆疊結構的面板。在面板的加熱和緊壓作業期間,處理空間必須被密封,以不與熱壓釜的外面相通。The conventional autoclave receives the panel to be processed in the processing space, and heats the panel to an optimum temperature, and simultaneously presses the panel for a given time at a preset pressure to manufacture a stacked structure such as a flat panel display. Panel. During the heating and compacting operation of the panel, the processing space must be sealed so as not to communicate with the outside of the autoclave.

如第1圖至第3圖所示,在習知處理單一基板的熱壓釜的實例中,用以接收將被處理之基板的處理單元2係一抽屜型式,其可從容納室延伸或可縮回進入容納室中。處理單元2係容納於由上本體部分和下本體部分3和4所構成的容納室5中。在基板1的加熱和緊壓作業期間,分別形成於容納室5之上、下側的上、下本體部分3和4中的密封件6,會膨脹以密封處理單元2與上、下本體部分3和4之間,以致處理單元2之處理空間20 不與熱壓釜的外面相通。As shown in FIGS. 1 to 3, in an example of a conventional autoclave for processing a single substrate, the processing unit 2 for receiving the substrate to be processed is a drawer type which may extend from the housing chamber or may be Retracted into the containment chamber. The processing unit 2 is housed in a housing chamber 5 composed of an upper body portion and a lower body portion 3 and 4. During the heating and pressing operation of the substrate 1, the seals 6 respectively formed in the upper and lower body portions 3 and 4 above and below the accommodating chamber 5 are expanded to seal the processing unit 2 and the upper and lower body portions. Between 3 and 4, so that the processing space 20 of the processing unit 2 Does not communicate with the outside of the autoclave.

每一個密封件6包圍實質存在於整個處理單元2之水平區域的處理空間20。密封件6係分別安裝在安裝槽60中,此些安裝槽60係分別以封閉迴路的形狀形成於上、下本體部分3和4中。每一個密封件6係可膨脹或收縮的。每一個可變形的密封件6具有一中空空間,此中空空間可藉由外部氣體的注入而被膨脹,以分別加壓接觸處理單元2的上下側,來密封處理單元2的上下側與相面對之上、下本體部分3和4之間,以使處理空間20不與熱壓釜的外面相通。在完成利用熱壓釜來加熱和緊壓容納於處理單元之處理空間中的基板1後,利用可變形的密封件之彈力或其他釋放機制,來將注入於可變形密封件6內的氣體釋放至外部。藉此,每一個可變形的密封件6收縮至一初始狀態,以與處理單元2分離,來使處理單元2與上、下本體部分3和4之間的密封失效。於此密封失效狀態,處理單元2由上、下本體部分3和4往延伸位置滑動,然後由處理單元2中取出處理後基板1。然後,熱壓釜係處於準備狀態以進行後續的處理。Each seal 6 encloses a processing space 20 that is substantially present throughout the horizontal area of the processing unit 2. The seals 6 are respectively mounted in the mounting grooves 60, which are respectively formed in the upper and lower body portions 3 and 4 in the shape of a closed circuit. Each seal 6 is expandable or contractible. Each of the deformable seals 6 has a hollow space which can be expanded by the injection of external air to pressurize and contact the upper and lower sides of the processing unit 2, respectively, to seal the upper and lower sides of the processing unit 2 and the opposite sides. Between the upper and lower body portions 3 and 4, so that the processing space 20 does not communicate with the outside of the autoclave. After completing the use of the autoclave to heat and compact the substrate 1 contained in the processing space of the processing unit, the gas injected into the deformable seal 6 is released by the elastic force or other release mechanism of the deformable seal. To the outside. Thereby, each of the deformable seals 6 is contracted to an initial state to be separated from the treatment unit 2 to invalidate the seal between the treatment unit 2 and the upper and lower body portions 3 and 4. In this sealed failure state, the processing unit 2 is slid from the upper and lower body portions 3 and 4 to the extended position, and then the processed substrate 1 is taken out from the processing unit 2. The autoclave is then in a ready state for subsequent processing.

在此習知熱壓釜,密封件6因下述理由而具有短的壽命。密封件6係在容納室5上、下側的上、下本體部分3和4中,且密封件6係為封閉迴路形狀,每一個密封件6包圍實質存在於整個處理單元2之水平區域的處理空間20。在熱壓釜中,重複進行加熱和緊壓作業。處理單元2經常以可延伸與可縮回的方式移動以接收和處理 其中之基板1。據此,每一個密封件6,尤其是密封件6位於靠近處理單元2(特別是其處理空間20)的部分,遭受到因基材1之加熱與緊壓作業重複與處理單元2之頻繁移動而造成的嚴厲條件。此即為密封件6之壽命會縮短的緣由。再者,由於在習知的熱壓釜中,分別由密封件6所構成之處理單元2與上、下本體部分3和4間的密封部分係相對較長的,故密封件6相對較可能受外部衝擊所損壞。此導致密封件6維修的困難,生產力的降低,且面板製造成本的增加。Here, in the autoclave, the seal 6 has a short life for the following reasons. The sealing member 6 is in the upper and lower body portions 3 and 4 on the lower side of the accommodating chamber 5, and the sealing member 6 is in the shape of a closed circuit, each of which surrounds a horizontal region substantially present throughout the entire processing unit 2. Processing space 20. In the autoclave, heating and pressing operations are repeated. Processing unit 2 is often moved in an extendable and retractable manner to receive and process Among them, the substrate 1. Accordingly, each of the sealing members 6, particularly the sealing member 6, is located adjacent to the processing unit 2 (particularly its processing space 20), subject to frequent heating and compacting operations of the substrate 1 and frequent movement of the processing unit 2 And the harsh conditions caused. This is why the life of the seal 6 is shortened. Furthermore, since in the conventional autoclave, the sealing portion between the processing unit 2 composed of the sealing member 6 and the upper and lower body portions 3 and 4, respectively, is relatively long, the sealing member 6 is relatively likely Damaged by external impact. This results in difficulty in repairing the seal 6, reduced productivity, and increased panel manufacturing costs.

本發明的目的Purpose of the invention

本發明係有鑑於上述問題而被製作。本發明的目的係提供一種熱壓釜,其中用以密封本體之間的可膨脹或可收縮的密封件只被提供在對應至容納室之處理單元入口的位置上,亦即,位於用以接收將被處理之基板的處理單元的處理空間的前方,其中該本體具有固定接收室形成於其中而處理單元可沿著容納室移動。當處理單元已完全縮回至容納室時,密封件藉由其本身的膨脹以密封本體與處理單元之間。然而,在處理單元的處理空間中的加熱和緊壓作業期間,不需要分離的密封作業。因此,因基材之重複加熱與緊壓作業所造成的嚴厲條件並不會直接且不利地影響密封件,藉以延長密封件壽命,並減 少熱壓釜之維護成本與面板之製造成本。The present invention has been made in view of the above problems. It is an object of the present invention to provide an autoclave in which an expandable or contractible seal for sealing between bodies is provided only at a position corresponding to the inlet of the processing unit of the receiving chamber, that is, for receiving The front of the processing space of the processing unit of the substrate to be processed, wherein the body has a fixed receiving chamber formed therein and the processing unit is movable along the receiving chamber. When the processing unit has been fully retracted into the containment chamber, the seal expands between itself and the processing unit by its own expansion. However, during the heating and compacting operations in the processing space of the processing unit, a separate sealing operation is not required. Therefore, the severe conditions caused by the repeated heating and pressing operations of the substrate do not directly and adversely affect the seal, thereby prolonging the life of the seal and reducing The maintenance cost of the less autoclave and the manufacturing cost of the panel.

根據本發明之一態樣,熱壓釜包含具有處理空間之處理單元、本體和密封件,其中處理空間係形成於處理單元中,用以加熱並緊壓容納於處理空間中之基板;本體具有形成於其中的容納室,用以包圍並接收處理單元;處理單元係以可延伸與可縮回方式而可移動於容納室中;密封件係配置以密封處理單元與具有容納室的本體之間,當密封件包圍處理單元之所有上、下、左和右側面時,密封件係設置於處理單元之處理空間的前方。According to one aspect of the present invention, an autoclave includes a processing unit having a processing space, a body, and a seal, wherein a processing space is formed in the processing unit for heating and pressing a substrate housed in the processing space; a receiving chamber formed therein for enclosing and receiving the processing unit; the processing unit being movable in the accommodating chamber in an extendable and retractable manner; the sealing member being configured to seal between the processing unit and the body having the accommodating chamber When the seal surrounds all of the upper, lower, left and right sides of the processing unit, the seal is disposed in front of the processing space of the processing unit.

在本發明之一實施例中,前述之本體係由相互結合之上本體部分和下本體部分所形成。下本體部分可具有形成於其中的容納室,該容納室具有前方開口,以接收處理單元。上本體部分可與下本體部分結合,以覆蓋具有容納室之下本體部分的上部分。In an embodiment of the invention, the foregoing system is formed by combining the upper body portion and the lower body portion with each other. The lower body portion may have a receiving chamber formed therein having a front opening to receive the processing unit. The upper body portion can be coupled to the lower body portion to cover the upper portion having the body portion below the receiving chamber.

在本發明之一實施例中,密封件可擬合於安裝槽中,其中當處理單元於容納室中係處於縮回狀態下之一狀態中時,安裝槽係形成於封閉迴路形狀中,而該封閉迴路形狀在容納室之前方開口外部具有圓形的左及右側面。密封件可具有形成於其中之可膨脹或可收縮的中空空間。In an embodiment of the invention, the sealing member may be fitted in the mounting groove, wherein the mounting groove is formed in the closed loop shape when the processing unit is in a state in the retracted state in the receiving chamber, The closed loop shape has a circular left and right side faces outside the opening of the receiving chamber. The seal can have a swellable or collapsible hollow space formed therein.

在本發明之一實施例中,密封件可擬合於一安裝槽中,其中當處理單元於容納室中係處於縮回狀態下之一狀態中時,安裝槽係形成於封閉迴路形狀中,而該封閉 迴路形狀在容納室之前方開口內部具有圓形的左及右側面。密封件可具有形成於其中之可膨脹或可收縮的中空空間。In an embodiment of the present invention, the sealing member may be fitted in a mounting groove, wherein the mounting groove is formed in the closed loop shape when the processing unit is in a state in which the receiving chamber is in the retracted state, And the closure The shape of the circuit has a circular left and right side inside the opening before the receiving chamber. The seal can have a swellable or collapsible hollow space formed therein.

根據本發明熱壓釜之熱壓釜,可膨脹或收縮的密封件只被提供在對應至容納室之處理單元入口的位置上,亦即,位於用以接收將被處理之基板的處理單元的處理空間的前方,其中此密封件係用以密封具有固定容納室的本體與處理單元之間,固定容納室係形成於本體中以接收處理單元,而處理單元可沿著容納室移動。當處理單元完全縮回至容納室時,密封件透過其膨脹而密封本體與處理單元之間。然而,在加熱和緊壓處理單元的處理空間作業期間,不需要分離的密封作業。因此,因基材之加熱與緊壓作業重複而造成的嚴厲條件係不會直接地且不利地影響密封件,以延長密封件壽命,減少熱壓釜之維護成本與面板之製造成本。According to the autoclave of the autoclave of the present invention, the expandable or contractible seal is only provided at a position corresponding to the inlet of the processing unit of the receiving chamber, that is, at the processing unit for receiving the substrate to be processed. In front of the processing space, wherein the seal is for sealing between the body having the fixed receiving chamber and the processing unit, the fixed receiving chamber is formed in the body to receive the processing unit, and the processing unit is movable along the receiving chamber. When the processing unit is fully retracted into the receiving chamber, the seal expands therethrough to seal between the body and the processing unit. However, separate sealing operations are not required during the processing space of the heating and compacting processing unit. Therefore, severe conditions caused by repeated heating and pressing operations of the substrate do not directly and adversely affect the seal, thereby prolonging the life of the seal, reducing the maintenance cost of the autoclave and the manufacturing cost of the panel.

本發明之額外態樣的一部分將於以下描述中闡明,而另一部分將由描述明顯得知,或可由本發明之實作得知。A part of the additional aspects of the invention will be set forth in the description which follows.

將仔細參照本發明之實施例,其例示係說明於所附圖示中,其中相似的元件符號係指全文中之相似元件。The embodiments of the present invention will be described with reference to the accompanying drawings, wherein like reference numerals refer to like elements throughout.

以下,根據本發明之例示實施例的熱壓釜將參照所附 圖示來詳細地描述。Hereinafter, an autoclave according to an exemplary embodiment of the present invention will be referred to with the attached The illustration is described in detail.

根據本發明之例示實施例的每一個熱壓釜,如第4圖至第7圖所示,包含有處理單元2、本體7和密封件8,其中處理單元2具有形成於其中的處理空間20,用以加熱並緊壓容納於處理空間20中之基板1;本體7具有形成於其中的容納室70,用以包圍並接收處理單元2,而處理單元2係以可延伸與可縮回的方式而可移動於容納室70中;密封件8係配置以密封處理單元2及具有容納室70形成於其中之本體之間,當密封件8包圍處理單元2之所有上、下、左和右側面時,密封件8設置在處理單元2之處理空間20的前方。Each autoclave according to an exemplary embodiment of the present invention, as shown in FIGS. 4 to 7, includes a processing unit 2, a body 7, and a seal 8, wherein the processing unit 2 has a processing space 20 formed therein For heating and pressing the substrate 1 housed in the processing space 20; the body 7 has a receiving chamber 70 formed therein for surrounding and receiving the processing unit 2, and the processing unit 2 is extendable and retractable The method is movable in the accommodating chamber 70; the sealing member 8 is configured to seal the processing unit 2 and the body having the accommodating chamber 70 formed therein, when the sealing member 8 surrounds all the upper, lower, left and right sides of the processing unit 2 In the case of a face, the seal 8 is disposed in front of the processing space 20 of the processing unit 2.

處理單元2具有水平地形成於其中心位置的處理空間20。處理空間20係配置藉由懸掛方式來接收將被處理的基板1。處理單元2可使用切割製程、鑄造製程或壓模製程等由具有優良熱傳導性的銅合金或鋁合金等所製成。The processing unit 2 has a processing space 20 that is horizontally formed at its center position. The processing space 20 is configured to receive the substrate 1 to be processed by a suspension method. The processing unit 2 can be made of a copper alloy or an aluminum alloy having excellent thermal conductivity or the like using a cutting process, a casting process, or a press molding process.

本體7包含相互結合之上本體部分7b和下本體部分7a。如第4圖至第7圖所示,下本體部分7a具有形成於其中的容納室70,容納室70具有前方開口72,用以接收處理單元2。上本體部分7b與下本體部分7a結合,以覆蓋具有容納室70之下本體部分7a的上部分。每一個上本體部分7b和下本體部分7a可由具有優良強度、良好的加工性與耐用性的銅合金或鋁合金等所製成。本體7可具有各種結構,此些各種結構包含單一本體結構 或本體部分的組裝結構,此些本體部分係分開的或以上、下、左、右、前、和/或後方向相互結合,只要組合成的結構具有形成於其中的容納室70,且容納室70具有開口72以接收處理單元2即可。The body 7 includes a body portion 7b and a lower body portion 7a joined to each other. As shown in FIGS. 4 to 7, the lower body portion 7a has a housing chamber 70 formed therein, and the housing chamber 70 has a front opening 72 for receiving the processing unit 2. The upper body portion 7b is combined with the lower body portion 7a to cover the upper portion having the body portion 7a below the accommodation chamber 70. Each of the upper body portion 7b and the lower body portion 7a can be made of a copper alloy or an aluminum alloy or the like having excellent strength, good workability and durability. The body 7 can have various structures, and the various structures include a single body structure Or an assembly structure of the body portion, the body portions being combined with each other, or the above, the lower, the left, the right, the front, and/or the rear direction, as long as the combined structure has the accommodation chamber 70 formed therein, and the accommodation chamber 70 has an opening 72 to receive the processing unit 2.

如第4圖至第6圖所示,密封件8係設置於一安裝槽82中,該安裝槽82係形成於下本體部分7a中。安裝槽82係設置於對應至本體7的入口的位置上,處理單元2係透過本體7的入口插入至容納室70中,安裝槽82並形成為位於本體7之前方開口72外部的封閉迴路形狀。安裝槽82具有如第6圖所示之圓形的左及右側面。密封件8係被強迫地擬合於安裝槽82中。密封件8具有形成於其中的中空空間80,以被膨脹或收縮。亦即,密封件8位於用以接收將被處理之基板1的處理單元2的處理空間20的前方。As shown in Figs. 4 to 6, the sealing member 8 is disposed in a mounting groove 82 formed in the lower body portion 7a. The mounting groove 82 is disposed at a position corresponding to the inlet of the body 7, and the processing unit 2 is inserted into the accommodating chamber 70 through the inlet of the body 7, and the groove 82 is mounted and formed into a closed loop shape outside the opening 72 of the body 7 . The mounting groove 82 has circular left and right side faces as shown in Fig. 6. The seal 8 is forcibly fitted into the mounting groove 82. The seal 8 has a hollow space 80 formed therein to be expanded or contracted. That is, the seal 8 is located in front of the processing space 20 of the processing unit 2 for receiving the substrate 1 to be processed.

或者,如第7圖所示,根據本發明之又一例示,密封件8係設置形成於處理單元2中的安裝槽82內。在處理單元2處於容納室70內之縮回狀態的狀態中,安裝槽82係在本體7之前方開口72內,以封閉迴路形狀形成在對應至本體7之處理單元入口的位置上。安裝槽82具有如第6圖所示之圓形的左及右側面。密封件8係被強迫地擬合於一安裝槽82中。密封件8具有形成於其中的中空空間80,以被膨脹或收縮。亦即,密封件8係位於用以接收將被處理之基板1之處理單元2的處理空間20的前方。Alternatively, as shown in Fig. 7, in accordance with still another example of the present invention, the sealing member 8 is disposed in the mounting groove 82 formed in the processing unit 2. In a state where the processing unit 2 is in the retracted state in the accommodating chamber 70, the mounting groove 82 is formed in the front opening 72 of the body 7, and is formed in a closed loop shape at a position corresponding to the processing unit inlet of the body 7. The mounting groove 82 has circular left and right side faces as shown in Fig. 6. The seal 8 is forcibly fitted into a mounting groove 82. The seal 8 has a hollow space 80 formed therein to be expanded or contracted. That is, the sealing member 8 is located in front of the processing space 20 for receiving the processing unit 2 of the substrate 1 to be processed.

此後,將詳述根據本發明之例示實施例之熱壓釜的操作與功效如下。Hereinafter, the operation and efficacy of the autoclave according to the exemplified embodiment of the present invention will be described in detail as follows.

首先,如第5圖所示,在處理單元2處於從本體7之容納室70延伸之狀態中時,處理單元2係安置於處理單元2之處理空間20中所欲的處理位置中。然後,如第4圖或第7圖所示,處理單元2被帶入至本體7之容納室70內的縮回狀態中。接著,密封件8藉由注入其中空空間80之外部氣體而被膨脹,以自安裝槽82密封膨脹出,因而於對應至容納室70之處理單元2入口的位置上,密封處理單元2與本體7之間。亦即,特別地,容納室70的前方開口72係被完全地密封。藉此,處理空間20不與熱壓釜的外面相通,而準備好以處理基板1。First, as shown in FIG. 5, when the processing unit 2 is in a state of extending from the housing chamber 70 of the body 7, the processing unit 2 is disposed in a desired processing position in the processing space 20 of the processing unit 2. Then, as shown in FIG. 4 or FIG. 7, the processing unit 2 is brought into a retracted state in the housing chamber 70 of the body 7. Next, the sealing member 8 is expanded by being injected into the air outside the empty space 80 to be sealed and expanded from the mounting groove 82, thereby sealing the processing unit 2 and the body at a position corresponding to the inlet of the processing unit 2 of the housing chamber 70. Between 7. That is, in particular, the front opening 72 of the accommodating chamber 70 is completely sealed. Thereby, the processing space 20 is not in communication with the outside of the autoclave, but is prepared to process the substrate 1.

然後,以熱壓釜加熱與緊壓放置在所欲之處理位置的基板1一段給定時間。Then, the substrate 1 placed in the desired processing position is heated and pressed in a hot autoclave for a given period of time.

完成基板1的處理後,將注入至密封件8之中空空間80內的氣體釋放至熱壓釜的外部。因此,可變形的密封件8收縮至其初始狀態,以使處理單元2與本體7之間的密封失效,並使容納室70與熱壓釜的外面相通。在此密封失效的狀態中,處理單元2以可延伸的方式由容納室70經前方開口72滑動。在處理單元2的延伸狀態中,由處理單元2之處理空間20中取出被處理過的基板1。此被處理過的基板1將遭受到另一種製程。緊接著將被處理的基板1,係以懸掛方式被放置於空的處理空間20中,並遭受熱壓釜的加熱與緊壓作業。After the processing of the substrate 1 is completed, the gas injected into the hollow space 80 of the sealing member 8 is released to the outside of the autoclave. Therefore, the deformable seal 8 is contracted to its original state to disable the seal between the treatment unit 2 and the body 7, and to communicate the accommodation chamber 70 with the outside of the autoclave. In this sealed failure state, the processing unit 2 is slidable by the receiving chamber 70 through the front opening 72 in an extendable manner. In the extended state of the processing unit 2, the processed substrate 1 is taken out of the processing space 20 of the processing unit 2. This processed substrate 1 will be subjected to another process. The substrate 1 to be processed is placed in an empty processing space 20 in a suspended manner and subjected to heating and pressing operations of the autoclave.

根據本發明之熱壓釜,可膨脹或收縮的密封件8只被提供在對應至容納室70之處理單元2之入口的位置上,亦即,位於用以接收將被處理之基板1的處理單元2的處理空間20的前方,其中此密封件8係用以密封具有固定容納室70的本體7與處理單元之間,固定容納室70係形成於本體中以接收處理單元2,而處理單元2可沿著容納室70移動。當處理單元完全縮回至容納室70時,密封件8透過其膨脹,以密封本體7與處理單元2之間。然而,在處理單元2之處理空間20中之基板1的加熱和緊壓作業期間,不需要分開的密封作業。因此,因加熱和緊壓基板1重複作業所導致的嚴厲環境不會直接且不利地影響密封件8,由於與密封件8擬合之安裝槽82的長度變短,故密封件8較不易損壞。此造成延長密封件8的壽命,並減少熱壓釜之維護成本與面板之製造成本。According to the autoclave of the present invention, the expandable or contractible seal 8 is provided only at the position corresponding to the inlet of the processing unit 2 of the accommodating chamber 70, that is, at the processing for receiving the substrate 1 to be processed. In front of the processing space 20 of the unit 2, wherein the sealing member 8 is used to seal between the body 7 having the fixed receiving chamber 70 and the processing unit, the fixed receiving chamber 70 is formed in the body to receive the processing unit 2, and the processing unit 2 can move along the accommodation chamber 70. When the processing unit is fully retracted to the receiving chamber 70, the seal 8 is expanded therethrough to seal between the body 7 and the processing unit 2. However, during the heating and pressing operation of the substrate 1 in the processing space 20 of the processing unit 2, a separate sealing operation is not required. Therefore, the severe environment caused by the repeated operation of heating and pressing the substrate 1 does not directly and adversely affect the sealing member 8, and since the length of the mounting groove 82 fitted to the sealing member 8 becomes short, the sealing member 8 is less likely to be damaged. . This results in prolonging the life of the seal 8 and reducing the maintenance cost of the autoclave and the manufacturing cost of the panel.

雖然已顯示並描述本發明之一些實施例,但在不脫離本發明之原理與精神內,任何熟習此技藝者當可理解可對這些實施例作各種改變,其範圍係定義於申請專利範圍與其均等者。While some embodiments of the present invention have been shown and described, it will be understood by those skilled in the art Equal.

1‧‧‧基板1‧‧‧Substrate

2‧‧‧處理單元2‧‧‧Processing unit

3‧‧‧上本體部分3‧‧‧Upper body part

4‧‧‧下本體部分4‧‧‧ Lower body part

5‧‧‧容納室5‧‧‧ accommodating room

6‧‧‧密封件6‧‧‧Seal

7‧‧‧本體7‧‧‧ Ontology

7a‧‧‧下本體部分7a‧‧‧ Lower body part

7b‧‧‧上本體部分7b‧‧‧Upper body part

8‧‧‧密封件8‧‧‧Seal

20‧‧‧處理空間20‧‧‧Processing space

60‧‧‧安裝槽60‧‧‧Installation slot

70‧‧‧容納室70‧‧‧ accommodating room

72‧‧‧開口72‧‧‧ openings

80‧‧‧中空空間80‧‧‧ hollow space

82‧‧‧安裝槽82‧‧‧Installation slot

本發明之這些和/或其他態樣將由下述實施例之描述與所附圖式的結合而變得明顯易懂,所附圖式為: 第1圖係繪示習知熱壓釜的垂直剖面圖;第2圖係繪示處理單元處於第1圖所示之延伸位置之狀態的垂直剖面圖;第3圖係繪示位於第1圖所示之線Ⅲ-Ⅲ之水平面的頂立面圖(Top Elevation View);第4圖係繪示根據本發明之一例示實施例之熱壓釜的垂直剖面圖;第5圖係繪示處理單元處於第4圖所示之延伸位置之狀態的垂直剖面圖;第6圖係繪示密封失效狀態的前立面圖;以及第7圖係繪示根據本發明之又一例示實施例之熱壓釜的垂直剖面圖。These and/or other aspects of the present invention will be apparent from the description of the embodiments described herein. 1 is a vertical sectional view showing a conventional autoclave; FIG. 2 is a vertical sectional view showing a state in which the processing unit is in an extended position shown in FIG. 1; and FIG. 3 is a first drawing; The top elevation view of the horizontal plane of the line III-III is shown; the fourth drawing is a vertical sectional view of the autoclave according to an exemplary embodiment of the present invention; and the fifth drawing shows the processing A vertical cross-sectional view of the unit in the extended position shown in FIG. 4; a front elevational view showing a sealed failure state; and a seventh drawing showing heat according to still another exemplary embodiment of the present invention. Vertical section of the autoclave.

1‧‧‧基板1‧‧‧Substrate

2‧‧‧處理單元2‧‧‧Processing unit

7‧‧‧本體7‧‧‧ Ontology

7a‧‧‧下本體部分7a‧‧‧ Lower body part

7b‧‧‧上本體部分7b‧‧‧Upper body part

8‧‧‧密封件8‧‧‧Seal

20‧‧‧處理空間20‧‧‧Processing space

70‧‧‧容納室70‧‧‧ accommodating room

72‧‧‧開口72‧‧‧ openings

80‧‧‧中空空間80‧‧‧ hollow space

82‧‧‧安裝槽82‧‧‧Installation slot

Claims (4)

一種熱壓釜(Autoclave),包含:一處理單元(2),該處理單元(2)具有形成於其中的一處理空間,用以加熱並緊壓容納於該處理空間中之一基板(1);一本體(7),該本體(7)具有形成於其中的一容納室(70),用以包圍並容納該處理單元(2),該處理單元(2)係以一可延伸與縮回的方式而可移動於該容納室(70)中;以及一密封件(8),該密封件(8)配置以密封該處理單元(2)與具有該容納室(70)形成於其中的該本體(7)之間,其中當該密封件(8)包圍該處理單元(2)之所有上、下、左和右側面時,該密封件(8)被設置於該處理單元(2)之該處理空間(20)的前方。An autoclave comprising: a processing unit (2) having a processing space formed therein for heating and pressing a substrate (1) accommodated in the processing space a body (7) having a receiving chamber (70) formed therein for enclosing and accommodating the processing unit (2), the processing unit (2) being extendable and retractable Means movable in the receiving chamber (70); and a seal (8) configured to seal the processing unit (2) and the one having the receiving chamber (70) formed therein Between the bodies (7), wherein the sealing member (8) is disposed in the processing unit (2) when the sealing member (8) surrounds all of the upper, lower, left and right sides of the processing unit (2) The front of the processing space (20). 如申請專利範圍第1項所述之熱壓釜,其中該本體(7)係由相互結合之一上本體部分(7b)和一下本體部分(7a)所形成,其中具有該容納室(70)形成於其中的該下本體部分(7a)係具有一前方開口(72),用以容納該處理單元(2),其中該上本體部分(7b)係與該下本體部分(7a)結合,以覆蓋具有該容納室(70)之該下本體部分(7a)的一上部分。The autoclave according to claim 1, wherein the body (7) is formed by combining an upper body portion (7b) and a lower body portion (7a) with the receiving chamber (70). The lower body portion (7a) formed therein has a front opening (72) for receiving the processing unit (2), wherein the upper body portion (7b) is coupled to the lower body portion (7a) to An upper portion of the lower body portion (7a) having the receiving chamber (70) is covered. 如申請專利範圍第1項所述之熱壓釜,其中該密封件(8)係擬合於一安裝槽(82)中,其中當該處理單元(2)於該容納室(70)中係處於一縮回狀態下之一狀態中時,該安裝槽(82)係形成於一封閉迴路形狀中,而該封閉迴路形狀在該容納室(70)之該前方開口(72)外部具有圓形的左及右側面;其中該密封件(8)具有形成於其中之可膨脹或收縮的一中空空間(80)。The autoclave according to claim 1, wherein the sealing member (8) is fitted in a mounting groove (82), wherein the processing unit (2) is in the receiving chamber (70) When in a state of a retracted state, the mounting groove (82) is formed in a closed loop shape, and the closed loop shape has a circular shape outside the front opening (72) of the receiving chamber (70) The left and right sides; wherein the seal (8) has a hollow space (80) formed therein that is expandable or contractible. 如申請專利範圍第1項所述之熱壓釜,其中該密封件(8)係擬合於一安裝槽(82)中,其中當該處理單元(2)於該容納室(70)中係處於一縮回狀態下之一狀態中時,該安裝槽(82)係形成於一封閉迴路形狀中,而該封閉迴路形狀在該容納室(70)之該前方開口(72)內部具有圓形的左及右側面;其中該密封件(8)具有形成於其中之可膨脹或收縮的一中空空間(80)。The autoclave according to claim 1, wherein the sealing member (8) is fitted in a mounting groove (82), wherein the processing unit (2) is in the receiving chamber (70) When in a state of a retracted state, the mounting groove (82) is formed in a closed loop shape, and the closed loop shape has a circular shape inside the front opening (72) of the receiving chamber (70) The left and right sides; wherein the seal (8) has a hollow space (80) formed therein that is expandable or contractible.
TW101106053A 2011-03-02 2012-02-23 Autoclave TWI513584B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020110018318A KR101247831B1 (en) 2011-03-02 2011-03-02 Autoclave

Publications (2)

Publication Number Publication Date
TW201240820A TW201240820A (en) 2012-10-16
TWI513584B true TWI513584B (en) 2015-12-21

Family

ID=46758357

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101106053A TWI513584B (en) 2011-03-02 2012-02-23 Autoclave

Country Status (4)

Country Link
KR (1) KR101247831B1 (en)
CN (1) CN103403611B (en)
TW (1) TWI513584B (en)
WO (1) WO2012118295A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101592847B1 (en) 2013-12-02 2016-02-11 주식회사 이노테크 Autoclave Apparatus With Sliding Door
CN105569637B (en) * 2014-11-07 2019-01-18 中国石油化工股份有限公司 Heavy crude heat extraction microscopic displacement experiment system
KR20170004773A (en) * 2015-07-03 2017-01-11 김재욱 Multistage degassing device available autoclave
KR101890119B1 (en) 2015-08-17 2018-08-22 주식회사 이노테크 Autoclave Apparatus Use As A Hast
KR101933808B1 (en) * 2017-12-29 2019-04-05 경규오 Autoclave apparatus having separate chambers

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010026411A2 (en) * 2008-09-04 2010-03-11 Airbus Operations Limited Assembling and shaping laminate panel

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100585994B1 (en) * 2004-03-23 2006-06-08 박웅기 Treating Apparatus for Autoclave
KR20070048439A (en) * 2005-11-04 2007-05-09 삼성전자주식회사 In-line auto clave system and method for processing liquid crystal display panel using the same
KR200430404Y1 (en) * 2006-09-27 2006-11-13 박웅기 Treatment Apparatus for Autoclave
KR100782119B1 (en) * 2006-09-27 2007-12-05 박웅기 Autoclave

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010026411A2 (en) * 2008-09-04 2010-03-11 Airbus Operations Limited Assembling and shaping laminate panel

Also Published As

Publication number Publication date
CN103403611A (en) 2013-11-20
KR20120099849A (en) 2012-09-12
TW201240820A (en) 2012-10-16
WO2012118295A3 (en) 2012-12-20
CN103403611B (en) 2016-04-13
WO2012118295A2 (en) 2012-09-07
KR101247831B1 (en) 2013-04-03

Similar Documents

Publication Publication Date Title
TWI513584B (en) Autoclave
JP6265952B2 (en) Battery casing
RU2537336C2 (en) Apparatus and method of producing multilayer safety glass
CN105990623A (en) Battery pack
KR20140140046A (en) Vacuum extraction device, vacuum glass manufacturing system, and related method
JP2016040081A (en) Electromagnetic induction heating type mold device for molding and vulcanizing rubber packing
US20160221070A1 (en) Rotating molding with integrated mirror welding
CN104923767A (en) Vacuum casting electric heating sand box
EP3387343B1 (en) Insulation compaction device and method for forming an insulated structure for an appliance
CN202769033U (en) Ultrahigh temperature-resistant gate valve
CN108215036B (en) High-temperature hot-pressing forming machine
IT201800003490A1 (en) PLASTIC INJECTION MOLDING EQUIPMENT
JP4843742B1 (en) Casting equipment
JP5585945B2 (en) Seal structure and joining device
ES2763127T3 (en) Molding apparatus for molding metals in a high vacuum environment
US11114218B2 (en) Mechanical stress isolation conductors in lead frames
CN107520407A (en) A kind of ultra-thin shell hot investment casting combines rod core with decompression type
KR101307221B1 (en) Wiring box having dew preventing function and manufaturing method thereof
JP5770062B2 (en) Seal structure, sealing method, casting system using the same, and casting method
JP5136211B2 (en) Vacuum die casting apparatus and vacuum die casting method
JP6498539B2 (en) Vacuum die casting apparatus and vacuum die casting method
CN103957676A (en) Waterproof case of controller for electric vehicle
CN114783662B (en) Flame-retardant silane crosslinked polyethylene cable material and preparation method thereof
CN216181491U (en) Filter core die
KR101057577B1 (en) Pressure chamber