201240820 六、發明說明： 【發明所屬之技術領域】 本發明之實施例係有關於熱壓釜，用以於製造具有堆 疊結構的面板時同時加熱並緊壓面板，更具體而言，本 發明有關於具有顯著改善之密封結構的熱壓釜，此密封 結構係位於熱壓釜之本體與處理單元之間，以在接收將 於處理空間中被處理的基板時，進入或離開本體之容納 室’從而減少面板之製造成本與熱壓釜之維護成本。 【先前技術】 習知熱壓爸接收將於處理空間中被處理之面板，並加 熱此面板至最佳溫度，同時於預設壓力下緊壓面板一段 給定時間，以製造出如平板顯示器等之具有堆疊結構的 面板。在面板的加熱和緊壓作業期間，處理空間必須被 密封’以不與熱壓釜的外面相通。 如第1圖至第3圖所示，在習知處理單一基板的熱壓 釜的貫例中，用以接收將被處理之基板的處理單元2係 一抽屜型式，其可從容納室延伸或可縮回進入容納室 中。處理單元2係容納於由上本體部分和下本體部分3 和4所構成的耗室5中。在基板i的加熱和緊壓作業 期間，分別形成於容納室5之上、下側的上、下本體部 分3和4中的密封件6,會膨脹以密封處理單元2與上、 下本體部分3和4之間，以致處理單元2之處理空間μ 4 201240820 不與熱壓爸的外面相通。 每一個密封件6包圍實質存在於整個處理單元2之水 平區域的處理空間20。密封件6係分別安裝在安裝槽6〇 中’此些安裝槽60係分別以封閉迴路的形狀形成於上、 下本體部分3和4中。每一個密封件6係可膨脹或收縮 的。每一個可變型的密封件6具有一中空空間，此中空 二間可藉由外部氣體的注入而被膨脹’以分別加壓接觸 處理單元2的上下側，來密封處理單元2的上下側與相 面對之上、下本體部分3和4之間，以使處理空間2〇不 與熱壓釜的外面相通。在完成利用熱壓釜來加熱和緊壓 容納於處理單元之處理空間中的基板1後，利用可變形 的密封件之彈力或其他釋放機制，來將注入於可變形密 封件6内的氣體釋放至外部。藉此，每一個可變型的密 封件6收縮至一初始狀態，以與處理單元2分離，來使 處理單元2與上、下本體部分3和4之間的密封失效。 於此密封失效狀態，處理單元2由上、下本體部分3和 4往延伸位置滑動’然後由處理單元2中取出處理後基 板1然後，熱壓釜係處於準備狀態以進行後續的處理。 在此1知熱壓爸，密封件6因下述理由而 命。密封件6係在容納室5上、下側的上、下本體部： 3和4中密封件6係為封閉迴路形狀，每―個密封 件6包圍實質存在於整個虛 ⑴题理早兀2之水平區域的處理 空間20。在執壓签中，舌$ _ &金中重複進行加熱和緊壓作業。處理 早凡2 ·纟常以可延_ /φ *ΰΓ V** ，、了縮回的方式移動以接收和處理 5 201240820 其中之基板1。據此，每—個穷私A < #《固密封件6 ’ t其是密封件6 位於罪近處理早元2(特別县立走抑而 (符別疋其處理空間2〇)的部分， 受到因基材1之加熱與緊壓作業重複與處理單元2 繁移動而造成的嚴厲條件。此即為密封“之壽命合縮 短的緣由。再者，由於在習知的熱壓蚤中，分別由密封 件6所構成之處理單元9^ 早兀2與上、下本體部分3和4 密封部分係相對較長的，故密封件6相對較可能受外， 衝擊所損壞。此導致密封件6維修的困難，生產力的降 低’且面板製造成本的增加。 【發明内容】 本發明的目的 本發明係有鑑於上沭M >由丨丄 上迷問碭而破製作。本發明的目的係 提供一種熱壓爸，其中用以密 川从在封本體之間的可膨脹或可 收縮的密封件只被提供在對應至容納室之處理單元入口 的位置上’亦即’位於用以接收將被處理之基板的處理 單元的處理空間的前方，甘α ，、t該本體具有固定接收室形 成於其中而處理單元可沿著衮 有合納至移動8當處理單元已 完全縮回至容納室時，密封杜 在封件藉由其本身的膨脹以密封 本體與處理單元之間。麸 …、而’在處理單元的處理空間中 的加熱和緊壓作業期間，不 个减要为離的畨封作業。因此， 因基材之重複加執虫怒蔽〜麻 ......緊壓作業所造成的嚴厲條件並不會 直接且不利地影攀穷4+姓 ** 瞽在封件，藉以延長密封件壽命，並減 6 201240820 少熱壓釜之維護成本與面板之製造成本。 本發明的解決手段 根據本發明之一態樣，熱壓爸包含具有處理空間之處 理單7L、本體和密封件，Λ中處理空間係形成於處理單 兀中，用以加熱並緊壓容納於處理空間中之基板；本體 -有形成於其中的谷納室，用以包圍並接收處理單元； 處理單元係以可延伸與可縮回方式而可“於容納室 中；密封件係配置以密封處理單元與具有容納室的本體 之間’當密封件包圍處理單元之所有上、下、左和右側 面時’密封件係設置於處理單元之處理空間的前方。 在本發明之一實施例中，前述之本體係由相互結合之 上本體部分和下本體部分所形成β下本體部分可具有形 成於其中的容納室，該容納室具有前方開口，以接收處 理單元。上本體部分可與下本體部分結合，以覆蓋且有 容納室之下本體部分的上部分。 覆盖“ 在本發明之-貫施例中，密封件可擬合於安裝槽中， 其中當處理單元^容納室中係處於縮回狀態下之-狀態 中時，安裝槽係形成於封閉迴路形狀中，而該封閉迴路 形狀在容納室之前方開口外部具有圓形的左及右側面。 密封件可具有形成於其中之可膨脹或可收縮的中空空 間。 在本發明之一實施你,]Φ h 】中，在、封件可擬合於一安裝槽 中1中當處理單元於容_中係處於縮时態下之一 狀態中時’安裝槽係形成於封閉迴路形狀争，而該封閉 7 201240820 迴路形狀在容納室之前方開口内部具㈣形的左及右側 面。密封件可具有形成於其中之可膨脹或可 空間。 本發明的效果 根據本發明熱壓爸之熱壓爸，可膨脹或收縮的密封件 只被提供在對應至容納室之處理單元人口的位置上亦 卩位於用以接收將被處理之基板的處理單元的處理空 間的别方’其中此密封件係用以密封具有固定容納室的 本體與處理單元之間’固^容納室係、形成於本體中以接 處理單元’而處理單元可沿著容納室移動。當處理單 元完全縮回至容納室時，密封件透過其膨脹而密封本體 與處理單7〇之間。然而’在加熱和緊壓處理單元的處理 空間作業期間’不需要分離的密封作業。因此，因基材 之加熱與緊壓作業重複而造成的嚴厲條件係不會直接地 且不利地衫響在、封件，以延長密封件壽命，減少熱壓釜 之維護成本與面板之製造成本。 本發明之額外態樣的一部分將於以下描述中闡明，而 另一部分將由描述明顯得知，或可由本發明之實作得知。 【實施方式】 將仔細參照本發明之實施例，其例示係說明於所附圖 示中’其中相似的元件符號係指全文中之相似元件。 以下’根據本發明之例示實施例的熱壓釜將參照所附 8 201240820 圖示來詳細地描述。 根據本發明之例示實施例的每一個熱壓釜，如第4圖 至第7圖所示，包含有處理單元2、本體7和密封件8, 其中處理單兀2具有形成於其中的處理空間20，用以加 熱並緊壓容納於處理空間2G中之基板1;本體7具有形° 成於其中的容納室70,用以包圍並接收處理單元2,而 士理早兀2係以可延伸與可縮回的方式而可移動於容納 ^ 7〇中，密封件8係配置以密封處理單元2及具有容納 =〇形成於其令之本體之間，當密封件8包圍處理單元 。之所有上、下、左和右側面時密封件8設置在處理 單元2之處理空間20的前方。 處理單元2具有水平地形成於其中心位置的處理空間 ^處理空間20係配置藉由懸掛方式來接收將被處理的 :板卜處理單元2可使用切割製程、鑄造製程或壓模 製程等由具有優良熱料性㈣合金⑭合金等所製 不遛/包含相互結合之上本 一，" ，^ p r伞媸邵分 7a。如第4圖至第7闾 _ 第7圓所不，下本體部分7a具有形成於 其中的容納室70，六& — 谷納室70具有前方開口 72，用以接 收處理單元2。卜*触*、 上本體部分7b與下本體部分7社入， 以覆蓋具有容納宮7Λ + 丄 ，·’〇 〇 之下本體部分7a的上部分。每一 個上本體部分7h> & τ _ 下本體部分7a可由具有優良強度、 艮好的加工性盘科fp ^ 。耐用性的銅合金或銘合金等所製成。本 體7可具有各種社拔 種、，·。構，此些各種結構包含單一本體結構 201240820 或本體部分分的組裝結構，此些本體部分分係分開的或 以上、下、左、右、前、和/或後方向相互結合，只要組 合成的結構具有形成於其中的容納室7〇，且容納室7〇 具有開口 7 2以接收處理單元2即可。 如第4圖至第6圖所示，密封件8係設置於一安裝槽 82中，該女裝槽82係形成於下本體部分7a中。安裝槽 82係叹置於對應至本體7的入口的位置上處理單元2 係透過本體7的入口插入至容納室7〇中，安裝槽82並 形成為位於本體7之前方開口 72外部的封閉迴路形狀。 安裝槽82具有如第6圖所示之圓形的左及右側面。密封 件8係被強迫地擬合於安裝槽82中。密封件8具有形成 於其中的中空空間80，以被膨脹或收縮。亦即密封件 8位於用以接收將被處理之基板丨的處理單元2的處理 空間20的前方。 或者，如第7圖所示，根據本發明之又一例示，密封 件8係設置形成於處理單元2中的安裝槽㈡内。在處理 單疋2處於容納室70内之縮回狀態的狀態中安裝槽 Μ係在本體7之前方開口 72内’以封閉迴路形狀形成 在對應至本體7之處理單元人口的位置上。安裝槽82具 有如第6圖所示之圓形的左及右側面。密封件8係被強 迫地擬合於-安裝槽82中。密封件8具有形成於其中的 中空空間8〇 ’以被膨脹或收縮。亦即，密封件8係位於 用以接收將被處理之基板1之處理單元2的處理空間20 的前方。 10 201240820 此後，將詳述根據本發明之例示實施例之熱壓釜的操 作與功效如下。 首先，如第5圖所示，在處理單元2處於從本體7之 容納室70延伸之狀態中時，處理單元2係安置於處理單 元2之處理空間2〇中所欲的處理位置中。然後，如第* 圖或第7圖所示’處理單元2被帶入至本體了之容納室 7〇内的縮回狀態中。接著，密封件8藉由注入其中空空 間8 0之外。卩氣體而被膨脹，以自安裝槽8 2密封膨脹出， 因而於對應至容納室70之處理單元2〇入口的位置上， 在、封處理單元2與本體7之間。亦即，特別地，容納室 70的前方開口 72係被完全地密封。藉此，處理空間2〇 不與熱壓釜的外面相通，而準備好以處理基板1q 然後’以熱壓釜加熱與緊壓放置在所欲之處理位置的 基板1 一段給定時間。 完成基板1的處理後，將注入至密封件8之中空空間 8〇内的氣體釋放至熱壓釜的外部。因此，可變形的密封 件8收縮至其初始狀態，以使處理單元2與本體7之間 的密封失效’並使容納室70與熱壓釜的外面相通。在此 密封失效的狀態中，處理單元2以可延伸的方式由容納 室70經前方開口 72滑動。在處理單元2的延伸狀態中， 由處理單元2之處理空間20中取出被處理過的基板1。 此被處理過的基板1將遭受到另一種製程。緊接著將被 處理的基板1，係以懸掛方式被放置於空的處理空間2 0 中，並遭受熱壓爸的加熱與緊壓作業。 201240820 根據本發明之熱壓釜，可膨脹或收縮的密封件8只被 提供在對應至容納室7〇之處理單元2之入口的位置上， 亦即，位於甩以接收將被處理之基板1的處理單元2的 處理空間20的前方，其中此密封件8係用以密封具有固 定容納室70的本體7與處理單元之間，固定容納室 係形成於本體中以接收處理單元2，而處理單元2可沿 著容納室70移動。當處理單元完全縮回至容納室7〇時， 密封件8透過其膨脹，以密封本體7與處理單元“之 間。然而，在處理單元2之處理空間2〇中之基板丨的加 熱和緊壓作業期間’不需要分開的密封作f。因此，因 加熱和緊壓基板1重複作業所導致的嚴厲環境不會直接 且不利地影響密封件8，由於與密封件8擬合之安裝槽 82的長度變短，故密封件8較不易損壞。此造成延長密 封件8的壽命，並減少熱壓爸之維護成本與面板之製造 成本。 雖然已顯示並描述本發明之一些實施例，但在不脫離 本發明之原理與精神内，任何熟習此技藝者當可理解可 對這些實施例作各種改變，其範圍係定義於申請專利範 圍與其均等者。 【圖式簡單說明】 ， 本發明之這些和/或其他態樣將由下述實施例之描述 與所附圖式的結合而變得明顯易懂，所附圖式為· 12 201240820 第1圖係繪示習知熱壓釜的垂直剖面圖； 第2圖係繪示處理單元處於第1圖所示之延伸位置之 狀態的垂直剖面圖； 第3圖係繪示位於第1圖所示之線皿-皿之水平面的頂 立面圖（Top Elevation view); 第4圖係繪不根據本發明之一例示實施例之熱壓釜的 垂直剖面圖； 第5圖係繪不處理單元處於第4圖所示之延伸位置之 狀態的垂直剖面圖； 第6圖係繪不密封失效狀態的前立面圖；以及 第7圖係繪不根據本發明之又一例示實施例之熱壓釜 的垂直剖面圖。 【主要元件符號說明】 1 : 基板 2 :處理單元 3 : 上本體部分 4 :下本體部分 5 ： 容納室 6 :密封件 7 : 本體 7a :下本體部分 7b :上本體部分 8 :密封件 20 :處理空間 60 :安裝槽 70 •容納室 72 :開口 80 :中空空間 82 :安裝槽 13201240820 VI. Description of the Invention: [Technical Field] The present invention relates to an autoclave for simultaneously heating and pressing a panel when manufacturing a panel having a stacked structure, and more particularly, the present invention has With regard to an autoclave having a significantly improved sealing structure, the sealing structure is located between the body of the autoclave and the processing unit to enter or exit the receiving chamber of the body upon receiving the substrate to be processed in the processing space. Thereby reducing the manufacturing cost of the panel and the maintenance cost of the autoclave. [Prior Art] Conventional hot pressure dad receives the panel to be processed in the processing space, and heats the panel to the optimum temperature, while pressing the panel for a given time at a preset pressure to manufacture a flat panel display, etc. A panel having a stacked structure. During the heating and compacting operation of the panel, the processing space must be sealed 'not to communicate with the outside of the autoclave. As shown in FIGS. 1 to 3, in a conventional example of an autoclave for processing a single substrate, the processing unit 2 for receiving the substrate to be processed is a drawer type which can be extended from the housing chamber or Can be retracted into the receiving chamber. The processing unit 2 is housed in a consuming compartment 5 composed of an upper body portion and a lower body portion 3 and 4. During the heating and pressing operation of the substrate i, the sealing members 6 respectively formed in the upper and lower body portions 3 and 4 on the lower side of the accommodating chamber 5 are expanded to seal the processing unit 2 and the upper and lower body portions. Between 3 and 4, so that the processing space μ 4 201240820 of the processing unit 2 does not communicate with the outside of the hot pressing dad. Each seal 6 encloses a processing space 20 that is substantially present throughout the horizontal area of the processing unit 2. The seal members 6 are respectively mounted in the mounting grooves 6'. These mounting grooves 60 are formed in the upper and lower body portions 3 and 4, respectively, in the shape of a closed circuit. Each seal 6 is expandable or contractible. Each of the variable seal members 6 has a hollow space which can be expanded by injection of external air to pressurize and contact the upper and lower sides of the processing unit 2, respectively, to seal the upper and lower sides of the processing unit 2 and the phase The upper and lower body portions 3 and 4 are faced so that the processing space 2 does not communicate with the outside of the autoclave. After completing the use of the autoclave to heat and compact the substrate 1 contained in the processing space of the processing unit, the gas injected into the deformable seal 6 is released by the elastic force or other release mechanism of the deformable seal. To the outside. Thereby, each of the variable type seal members 6 is contracted to an initial state to be separated from the process unit 2 to invalidate the seal between the process unit 2 and the upper and lower body portions 3 and 4. In this sealed failure state, the processing unit 2 is slid by the upper and lower body portions 3 and 4 toward the extended position' and then the treated substrate 1 is taken out of the processing unit 2. Then, the autoclave system is in a ready state for subsequent processing. Here, it is known that the heat exchanger dad and the seal 6 are killed for the following reasons. The sealing member 6 is attached to the upper and lower body portions on the lower side of the accommodating chamber 5: 3 and 4, the sealing member 6 is in the shape of a closed loop, and each of the sealing members 6 is substantially present in the entire virtual (1). The processing space 20 of the horizontal area. In the execution of the check, the heating and pressing operations are repeated in the tongue $ _ & gold. Handling 2 纟 纟 纟 纟 _ _ / / / / / 、 ** 移动 移动 移动 移动 移动 移动 移动 移动 移动 移动 移动 移动 移动 移动 移动 移动 移动 2012 2012 2012 2012 2012 2012 According to this, each of the poor private A <# "Solid seal 6 ' t is the seal 6 located in the sin near processing early 2 (special county holdings and (fu 疋 疋 its processing space 2 〇) part It is subjected to severe conditions caused by repeated heating and pressing operations of the substrate 1 and the movement of the processing unit 2. This is the reason why the life of the seal is shortened. Furthermore, in the conventional hot pressing, The processing unit 9^, which is composed of the sealing member 6, respectively, is relatively long with the upper and lower body portions 3 and 4, so that the sealing member 6 is relatively more likely to be damaged by external shock. This leads to the sealing member. 6 Difficulties in maintenance, reduction in productivity, and increase in manufacturing cost of the panel. [ OBJECT OF THE INVENTION] The present invention is made in view of the above-mentioned 沭M > Providing a hot stamping dad, wherein the swellable or contractible seal between the body and the seal is provided only at a position corresponding to the inlet of the processing unit of the receiving chamber, that is, for receiving Processing space of the processing unit of the substrate to be processed In front, the body has a fixed receiving chamber formed therein and the processing unit can be integrated to move 8 along the crucible when the processing unit has been fully retracted into the receiving chamber, sealing the seal in the seal by itself Expansion to seal between the body and the processing unit. Bran... and 'during the heating and pressing operation in the processing space of the processing unit, the sealing operation is not reduced. Therefore, due to the repeated addition of the substrate The insects are irritated~ Ma... The severe conditions caused by the compaction work will not directly and unfavorably affect the poor 4+ surname ** 封 in the seal, in order to extend the life of the seal, and reduce 6 201240820 The maintenance cost of the less autoclave and the manufacturing cost of the panel. According to one aspect of the invention, the hot pressing dad comprises a processing unit 7L having a processing space, a body and a sealing member, and the processing space in the crucible is formed in The processing unit is configured to heat and press the substrate housed in the processing space; the body has a valley chamber formed therein for surrounding and receiving the processing unit; and the processing unit is in an extendable and retractable manner Can be accommodated The seal is configured to seal the processing unit from the body having the receiving chamber. 'When the seal surrounds all of the upper, lower, left and right sides of the processing unit, the seal is disposed in front of the processing space of the processing unit. In an embodiment of the present invention, the foregoing system may have a accommodating chamber formed therein by combining the upper body portion and the lower body portion to form a accommodating chamber formed therein, the accommodating chamber having a front opening to receive the processing unit The upper body portion can be combined with the lower body portion to cover and have an upper portion of the body portion below the receiving chamber. Covering "In the present invention, the seal can be fitted into the mounting groove, wherein when processed When the unit is in the state of being retracted, the mounting groove is formed in the closed loop shape, and the closed loop shape has rounded left and right sides outside the opening of the receiving chamber. The seal can have a swellable or collapsible hollow space formed therein. In one embodiment of the present invention, Φ h 】, the seal can be fitted into a mounting slot 1 when the processing unit is in one of the states of the contracted state, the mounting slot Formed in a closed loop shape, and the closed 7 201240820 loop shape has a (four) shape left and right side inside the opening of the accommodating chamber. The seal can have an expandable or space formed therein. EFFECTS OF THE INVENTION According to the present invention, the swellable or contracted seal is provided only at a position corresponding to the population of the processing unit of the accommodating chamber, and also at the processing for receiving the substrate to be processed. The other part of the processing space of the unit, wherein the sealing member is used to seal between the body having the fixed receiving chamber and the processing unit, and is formed in the body to receive the processing unit, and the processing unit can be accommodated along the receiving unit. Room moves. When the processing unit is fully retracted into the receiving chamber, the seal is expanded therethrough to seal between the body and the processing unit. However, a separate sealing operation is not required during the processing space of the heating and squeezing process unit. Therefore, the severe conditions caused by the repeated heating and pressing operations of the substrate do not directly and unfavorably ring and seal the parts to prolong the life of the seal, reduce the maintenance cost of the autoclave and the manufacturing cost of the panel. . A part of the additional aspects of the invention will be set forth in the description which follows. [Embodiment] The embodiments of the present invention will be described with reference to the embodiments of the present invention. The following "autoclave according to an exemplified embodiment of the present invention will be described in detail with reference to the attached Figure 8 201240820. Each autoclave according to an exemplary embodiment of the present invention, as shown in FIGS. 4 to 7, includes a processing unit 2, a body 7, and a seal 8, wherein the processing unit 2 has a processing space formed therein 20, for heating and pressing the substrate 1 accommodated in the processing space 2G; the body 7 has a receiving chamber 70 formed therein to surround and receive the processing unit 2, and the Scheringer 2 is extensible In a retractable manner, it is movable in the housing, the sealing member 8 is configured to seal the processing unit 2 and has a housing that is formed between the body and the sealing member 8 to surround the processing unit. The seals 8 are disposed in front of the processing space 20 of the processing unit 2 for all of the upper, lower, left and right side faces. The processing unit 2 has a processing space horizontally formed at a central position thereof. The processing space 20 is configured to be received by a suspension method to be processed: the processing unit 2 can use a cutting process, a casting process, or a molding process, etc. Excellent hot material (4) alloy 14 alloy, etc. are not produced / contain the combination of the above, ", ^ pr umbrella 媸 Shao points 7a. As shown in Figs. 4 to 7闾_7, the lower body portion 7a has a housing chamber 70 formed therein, and the six&-nano chamber 70 has a front opening 72 for receiving the processing unit 2. The upper body portion 7b and the lower body portion 7 are joined to cover the upper portion having the body portion 7a under the chamber 7 Λ + 〇 · 。 。. Each of the upper body portion 7h >& τ _ lower body portion 7a can be made of a well-strength, well-processed disc family fp ^ . Made of durable copper alloy or alloy. The body 7 can have various kinds of social species, . The various structures comprise a single body structure 201240820 or a body part assembly structure, the body parts being separated or combined with the above, the lower, the left, the right, the front, and/or the rear direction, as long as they are combined The structure has a receiving chamber 7〇 formed therein, and the receiving chamber 7〇 has an opening 7 2 to receive the processing unit 2. As shown in Figs. 4 to 6, the sealing member 8 is disposed in a mounting groove 82 formed in the lower body portion 7a. The mounting groove 82 is slid at a position corresponding to the inlet of the body 7, and the processing unit 2 is inserted into the accommodating chamber 7 through the inlet of the body 7, and the groove 82 is installed and formed as a closed circuit outside the opening 72 in front of the body 7. shape. The mounting groove 82 has circular left and right side faces as shown in Fig. 6. The seal 8 is forcibly fitted into the mounting groove 82. The seal 8 has a hollow space 80 formed therein to be expanded or contracted. That is, the seal 8 is located in front of the processing space 20 of the processing unit 2 for receiving the substrate to be processed. Alternatively, as shown in Fig. 7, in accordance with still another example of the present invention, the sealing member 8 is disposed in the mounting groove (2) formed in the processing unit 2. In the state in which the processing unit 2 is in the retracted state in the accommodating chamber 70, the mounting groove 内 is formed in the closed circuit shape in the closed circuit shape at the position corresponding to the processing unit population of the body 7. The mounting groove 82 has circular left and right sides as shown in Fig. 6. The seal 8 is forcibly fitted into the mounting groove 82. The seal 8 has a hollow space 8'' formed therein to be expanded or contracted. That is, the sealing member 8 is located in front of the processing space 20 for receiving the processing unit 2 of the substrate 1 to be processed. 10 201240820 Hereinafter, the operation and efficacy of the autoclave according to an exemplary embodiment of the present invention will be described in detail below. First, as shown in Fig. 5, when the processing unit 2 is in a state of extending from the accommodating chamber 70 of the body 7, the processing unit 2 is disposed in a desired processing position in the processing space 2 of the processing unit 2. Then, the processing unit 2 is brought into the retracted state in the housing chamber 7 of the body as shown in Fig. 7 or Fig. 7. Next, the sealing member 8 is injected by means of the empty space 80. The helium gas is expanded to be sealed and expanded from the mounting groove 82, and thus is sealed between the sealing unit 2 and the body 7 at a position corresponding to the inlet of the processing unit 2 of the housing chamber 70. That is, in particular, the front opening 72 of the accommodating chamber 70 is completely sealed. Thereby, the processing space 2 is not in communication with the outside of the autoclave, but is prepared to process the substrate 1q and then heat-press and pressurize the substrate 1 placed at the desired processing position for a given period of time. After the completion of the treatment of the substrate 1, the gas injected into the hollow space 8 of the sealing member 8 is released to the outside of the autoclave. Therefore, the deformable seal 8 is contracted to its original state to disable the seal between the treatment unit 2 and the body 7 and to communicate the accommodation chamber 70 with the outside of the autoclave. In this state in which the seal is inoperative, the processing unit 2 is slidably moved from the accommodating chamber 70 through the front opening 72 in an extendable manner. In the extended state of the processing unit 2, the processed substrate 1 is taken out of the processing space 20 of the processing unit 2. This processed substrate 1 will be subjected to another process. Immediately after the substrate 1 to be processed is placed in the empty processing space 20 in a suspended manner, it is subjected to the heating and pressing operation of the hot pressing dad. 201240820 According to the autoclave of the present invention, the expandable or contractible seal 8 is only provided at a position corresponding to the inlet of the processing unit 2 of the receiving chamber 7〇, that is, at the crucible to receive the substrate 1 to be processed. The front of the processing space 20 of the processing unit 2, wherein the sealing member 8 is used to seal between the body 7 having the fixed receiving chamber 70 and the processing unit, and the fixed receiving chamber is formed in the body to receive the processing unit 2, and the processing The unit 2 is movable along the accommodation chamber 70. When the processing unit is fully retracted to the receiving chamber 7〇, the sealing member 8 is expanded therethrough to seal between the body 7 and the processing unit. However, the heating and tightness of the substrate in the processing space 2〇 of the processing unit 2 During the pressing operation, a separate seal is not required. Therefore, the severe environment caused by repeated work of heating and pressing the substrate 1 does not directly and adversely affect the sealing member 8, due to the mounting groove 82 fitted to the sealing member 8. The length of the seal 8 is less susceptible, so that the seal 8 is less susceptible to damage. This results in prolonging the life of the seal 8, and reducing the maintenance cost of the hot press and the manufacturing cost of the panel. Although some embodiments of the invention have been shown and described, It will be understood by those skilled in the art that various changes may be made to the embodiments without departing from the scope of the invention. The scope of the invention is defined by the scope of the claims and the equivalents thereof. And/or other aspects will be apparent from the description of the following embodiments in combination with the accompanying drawings, wherein the drawings are: 12 201240820 Figure 1 shows a conventional autoclave Straight sectional view; Fig. 2 is a vertical sectional view showing the state in which the processing unit is in the extended position shown in Fig. 1; Fig. 3 is a view showing the standing of the horizontal plane of the wire-dish dish shown in Fig. 1. FIG. 4 is a vertical sectional view of an autoclave not according to an exemplary embodiment of the present invention; FIG. 5 is a diagram showing a state in which the processing unit is in the extended position shown in FIG. A vertical cross-sectional view of Fig. 6 is a front elevational view showing an unsealed failure state; and Fig. 7 is a vertical sectional view showing an autoclave not according to still another exemplary embodiment of the present invention. 】 1 : Substrate 2 : Processing unit 3 : Upper body part 4 : Lower body part 5 : Storage chamber 6 : Seal 7 : Main body 7 a : Lower body part 7 b : Upper body part 8 : Seal 20 : Processing space 60 : Installation Slot 70 • accommodating chamber 72: opening 80: hollow space 82: mounting groove 13