TWI501317B - - Google Patents
Info
- Publication number
- TWI501317B TWI501317B TW101151228A TW101151228A TWI501317B TW I501317 B TWI501317 B TW I501317B TW 101151228 A TW101151228 A TW 101151228A TW 101151228 A TW101151228 A TW 101151228A TW I501317 B TWI501317 B TW I501317B
- Authority
- TW
- Taiwan
Links
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210262373.7A CN102768476B (zh) | 2012-07-26 | 2012-07-26 | 光刻胶的去除方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201405661A TW201405661A (zh) | 2014-02-01 |
| TWI501317B true TWI501317B (zh) | 2015-09-21 |
Family
ID=47095918
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101151228A TW201405661A (zh) | 2012-07-26 | 2012-12-28 | 光刻膠的去除方法 |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN102768476B (zh) |
| TW (1) | TW201405661A (zh) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104345581B (zh) * | 2013-07-23 | 2018-07-31 | 中微半导体设备(上海)有限公司 | 一种等离子体去除光刻胶的方法 |
| CN111403829B (zh) * | 2020-04-24 | 2021-10-01 | 中国科学院上海硅酸盐研究所 | 具有低温工作特性的水系凝胶态电解质、极片添加剂以及固态钠离子电池 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW200705906A (en) * | 2005-04-04 | 2007-02-01 | Broadcom Corp | Local oscillation routing plan applicable to a multiple RF band RF MIMO transceiver |
| CN102044479A (zh) * | 2009-10-13 | 2011-05-04 | 中芯国际集成电路制造(上海)有限公司 | 半导体器件的形成方法 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5453157A (en) * | 1994-05-16 | 1995-09-26 | Texas Instruments Incorporated | Low temperature anisotropic ashing of resist for semiconductor fabrication |
| JPH1167626A (ja) * | 1997-08-12 | 1999-03-09 | Hitachi Ltd | レジスト除去方法および装置 |
| JP3886621B2 (ja) * | 1997-11-25 | 2007-02-28 | 宮崎沖電気株式会社 | レジスト除去方法 |
| US7067441B2 (en) * | 2003-11-06 | 2006-06-27 | Texas Instruments Incorporated | Damage-free resist removal process for ultra-low-k processing |
| CN101546136A (zh) * | 2008-03-25 | 2009-09-30 | 中芯国际集成电路制造(上海)有限公司 | 一种光刻胶去除方法 |
-
2012
- 2012-07-26 CN CN201210262373.7A patent/CN102768476B/zh active Active
- 2012-12-28 TW TW101151228A patent/TW201405661A/zh unknown
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW200705906A (en) * | 2005-04-04 | 2007-02-01 | Broadcom Corp | Local oscillation routing plan applicable to a multiple RF band RF MIMO transceiver |
| CN102044479A (zh) * | 2009-10-13 | 2011-05-04 | 中芯国际集成电路制造(上海)有限公司 | 半导体器件的形成方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102768476A (zh) | 2012-11-07 |
| CN102768476B (zh) | 2014-08-20 |
| TW201405661A (zh) | 2014-02-01 |