TWI494166B - Ion exchange device, method of making the same, and device - Google Patents

Description

Ion exchange device, manufacturing method thereof, device

The present invention relates to a method and apparatus for producing an ion exchange apparatus by filling an ion exchange resin in a container, and more particularly to a method and apparatus for producing an ion exchange apparatus suitable for use in the production of an ion exchange apparatus used in an ultrapure water production process. The present invention relates to an ion exchange apparatus produced by the method and apparatus. Further, the present invention relates to a method and apparatus for forming an ion exchange resin layer by filling an ion exchange resin in a container. The present invention relates to an ion exchange apparatus having an ion exchange resin layer formed by the method and apparatus.

Conventionally, as the ion exchange device, the following structures (especially fixed ion exchange devices) have been used. In the structure of the ion exchange apparatus, a cation exchange resin, an anion exchange resin, a mixed resin thereof, or the like, or a mixed resin thereof and another resin are filled in a container to form an ion exchange resin layer, and the liquid to be treated is passed therethrough. Ion exchange treatment. After the ion exchange resin layer is saturated, the passage of the liquid to be treated is stopped, the regeneration liquid is passed, and the ion exchange resin layer is regenerated. Then, the cleaning liquid is passed through and washed, and then the liquid to be treated is again passed again. The ion exchange treatment is started.

However, the ion exchange apparatus which alternately performs ion exchange treatment and regeneration in this manner has a disadvantage that ion exchange treatment cannot be performed when the ion exchange resin layer is regenerated. Therefore, in place of such an ion exchange apparatus, there is a unit exchange type ion exchange apparatus which is a removable ion exchange resin filling unit which is filled with an ion exchange resin in a movable main body container, and is transported to the site. The ion exchange device is installed in an ion exchange device to perform ion exchange treatment. After the ion exchange resin layer is saturated, the ion exchange resin charging unit is removed from the ion exchange device, and a new unit is replaced to continue the ion exchange treatment. The exchange resin filling unit is recovered, and the used ion exchange resin is regenerated as needed.

The unit exchange type ion exchange apparatus includes a non-regeneration type ion exchange apparatus that directly discards an ion exchange resin charging unit that has been removed from the ion exchange apparatus without being regenerated, and regenerates the ion exchange resin and reuses it. Regeneration type ion exchange unit. In the latter case, a method of regenerating the ion exchange resin for each of the recovered units is carried out; the ion exchange resin is collected from the unit and regenerated, and the regenerated ion exchange resin is filled in the unit and transported to the site for standby, and then installed. The method of performing ion exchange treatment on an ion exchange device, and the like.

The ion exchange unit described in the above-mentioned Japanese Patent Publication No. Hei 9-70546 discloses that the main body container is filled with an ion exchange resin, and the tube protruding from the container is connected to a raw water pipe, a treated water pipe, or the like. Fig. 2 is an ion exchange unit U described in the document. The ion exchange unit U is filled with the adjusted ion exchange resin 2 in the container 1 having the opening 1a. A cover 6 is attached to the opening 1a. The inlet 6 of the ion exchange resin is provided on the lid 6, and the raw water introduction path 4 and the treated water extraction path 5 are provided in a penetrating shape. The raw water introduction path 4 is inserted into the bottom of the container 1, and a filter 4a is provided at the lower end thereof.

The filter 5a installed at the lower end of the treated water take-out path 5 is an upper portion located inside the container 1.

The ion exchange resin 2 is filled in the container 1 through the resin introduction port 3. The inlet 3 is sealed afterwards. The resin introduction port 3 is used for draining, discharging air, and the like at the time of connection, and is usually sealed during ion exchange treatment.

The ion exchange unit is sealed by being cut away from the position of the connectors 4b and 5b and transported to the site for mounting. Further, the connectors 4b and 5b are connected to the expansion joints 7 and 8 to introduce the raw water and take out the treated water (ultra-pure water) (see paragraphs 0021 to 0022).

The ion exchange resin may be a case where the cation exchange resin or the anion exchange resin is separately filled, and the two may be mixed and filled at a ratio of a capacity ratio of 1:3 to 3:1. (Paragraph 0018)

The ion exchange unit U attached to the ion exchange system introduces raw water from the raw water flow path (not shown) of the ion exchange apparatus into the container 1 through the raw water introduction path 4 and the first filter 4a, and passes through the ion exchange resin layer. (2) The ion exchange is performed, and the treated water is taken out from the treated water take-out path 5 through the treated water flow path (not shown) of the ion exchange apparatus after the second filter 5a is collected. After the ion exchange resin 2 is saturated, the ion exchange unit U is detached by the connectors 4b, 5b and replaced with a new unit to continue the ion exchange treatment.

The used ion exchange unit U is transported in a state of being removed and recovered, and the ion exchange resin is taken out and regenerated as necessary, and the regenerated ion exchange resin is again filled in the container 1 to constitute an ion exchange device to re-supply ions. Exchange processing.

In order to charge the ion exchange resin in the main body container 1 of the ion exchange unit U, the ion exchange resin is dispersed in water and introduced as a slurry, and the water of the entrained water is separated by the filters 4a and 5a and discharged. According to this method, it is difficult to fill the main body container 1 with a certain amount of ion exchange resin.

An example disclosed in Patent Document 4 (JP-A-2002-28501) is that an ion exchange resin is placed in an ion exchange resin moving container and transported to the site, and is filled in an ion exchange device at the site for ion exchange, and when saturated, After the ion exchange resin is taken out from the ion exchange device and stored in the ion exchange resin moving container, it is transported to the installation place of the regeneration device, and the regenerated ion exchange resin is again stored in the ion exchange resin moving container and transported to the site. The ion exchange resin moving container is provided with a pipe connected to a filter member (corresponding to a filter) in the container. The ion exchange resin is dispersed in water and introduced in a slurry form, and the water is separated by a filter member. The discharge was carried out to fill the ion exchange resin, but it was not revealed that the ion exchange resin was filled in a certain amount.

The ion exchange resin is easy to measure a certain amount of resin in a dry state. However, in the case of ion exchange, since the ion exchange resin is used in the liquid phase and the characteristics are expressed on the basis of the volume of the ion exchange resin layer, the amount of the resin filled in the container is required to exist in the liquid. The state of the phase becomes a certain capacity. In this case, the ion exchange resin is introduced into the container in the form of a slurry dispersed in water. However, since the concentration of the ion exchange resin in the slurry cannot be made constant, even if the slurry is measured, a certain amount of resin cannot be filled.

In the method of filling a certain amount of resin, the method of measuring the resin to be filled in advance and then filling it is necessary to measure a certain amount of the regenerated resin in advance, and then to disperse it into a slurry to be introduced into the water. It is cumbersome to use a combination of complicated steps, and actually there are difficulties. Further, the method of measuring the weight of the resin for each container is difficult to perform accurate measurement because the amount of water present affects the measurement of the weight. Further, in the method of measuring the resin filling amount by visual observation, it is necessary to repeatedly stop the liquid passing and the visual measurement, and if the container is increased in size and the resin filling amount is increased, it is difficult to perform accurate measurement, and there is a problem.

In general, if the contents are filled in a container of a certain volume until they are full, the capacity of the filling amount will be constant. In Patent Documents 1 and 4, the ion exchange resin layer filled in the container is not filled, and a space in which the ion exchange resin layer is not formed remains in the upper portion of the container. In such a container having a margin, it is difficult to fill a certain amount of the ion exchange resin, but the capacity and the volume of the container and the filter, the piping, and the like disposed therein are fixed, and the capacity is a constant volume. When the ion exchange resin is filled in the container of such a constant volume until it is full, the capacity of the ion exchange resin layer should be constant.

If the ion exchange resin is introduced into the slurry in a general container, useless water is also introduced. Since it is difficult to make the concentration of the ion exchange resin in the slurry constant, it is difficult to make the capacity of the ion exchange resin to be filled constant. On the other hand, as shown in Patent Documents 1 and 2, a pipe connected to a filter in a container is provided, and the ion exchange resin is introduced into a slurry dispersed in water, and the water is separated and discharged by the filter. Here, the method of filling the ion exchange resin, if it is full, the capacity of the ion exchange resin to be filled should be constant.

However, when the ion exchange resin slurry is transported by a pump, if it is still transported by a pump after being filled, the packing density of the resin becomes too high to be able to pass water, or resin breakage occurs, or the filter And piping is easy to block, and there are many problems. In this case, it is considered that the ion exchange resin in the container is filled to stop the supply of the slurry according to the pressure rise of the supply slurry, but in order to correctly detect the pressure rise to stop the supply of the slurry, complicated It is difficult to separate the ion exchange resin in the slurry from the water of the crucible to form a filling layer having a uniform filling density, and thus there are many problems.

It is described in the patent document 5 (JP-A-2002-221160) that an air pressure-driven diaphragm pump is used as the fluid pressure-driven pump. The air pressure driven diaphragm pump is a double diaphragm type pump, and a diaphragm is provided in each of the two pump chambers, and is coupled to a distal end of the main shaft (which is slidable through the intermediate wall) to be integrated, thereby allowing reciprocating movement. However, it has not been revealed that the ion exchange resin filling amount is made a certain amount.

A control mechanism is disclosed in the patent document 6 (JP-A-2007-305019), in an air pressure-driven pump or the like, when the air pressure for driving the pump reaches a predetermined pressure, the air pressure acting on the pump is released and the pump is stopped. . However, this control mechanism idling due to damage of the diaphragm or the like causes the driving air pressure to rise, and detects the rise of the air pressure to stop driving the pump, which does not reveal that the ion exchange resin is filled. The amount becomes a certain amount.

Patent Documents 2 and 3 below describe a method for purifying an ion exchange resin and a chemical for purification.

[Patent Literature]

Patent Document 1: Japanese Patent Laid-Open No. Hei 9-70546

Patent Document 2: Japanese Laid-Open Patent Publication No. 5-15789

Patent Document 3: Japanese Patent Publication No. 9-201539

Patent Document 4: Japanese Patent Laid-Open No. 2002-28501

Patent Document 5: Japanese Patent Laid-Open No. 2002-221160

Patent Document 6: JP-A-2007-305019

In the semiconductor industry, ultrapure water is used in the cleaning and other uses of semiconductor products. The water quality requirements for the ultrapure water are becoming more and more stringent. For example, the metal concentration is below 1ppt, and 0.1ppt is required depending on the situation. The following super high water quality conditions.

In this case, in order to prevent leakage of metal or the like from the ion exchange device, it is necessary to fill the ion exchange device with a highly purified ion exchange resin.

However, in the past, highly purified ion exchange resins were filled in a container in the atmosphere, so that dust in the air was mixed, which may cause a slight contamination of the ion exchange resin.

A first object of the present invention is to provide a method and an apparatus for producing an ion exchange apparatus capable of preventing dust from contaminating an ion exchange resin in air, and an ion exchange apparatus produced by using the method and apparatus.

A second object of the present invention is to provide an ion exchange resin layer which can accurately fill a certain amount of ion exchange resin into a container in a short time by a simple mechanism and operation, and can prevent high-density filling of the ion exchange resin. A method and apparatus for forming an ion exchange layer of a plugged or broken tube, and an ion exchange apparatus having an ion exchange resin layer formed using the method and apparatus.

The method and apparatus for producing an ion exchange apparatus according to a first aspect are a method of preparing an ion exchange apparatus by filling a purified ion exchange resin in a container, wherein a step of filling the ion exchange resin in the container is In a clean room.

In the first aspect, the ion exchange resin is purified in a state in which it is not in contact with the atmosphere, and then is placed in the filling step without being in contact with the atmosphere via a pipe. Transfer.

In the first or second aspect, in the first or second aspect, the purification apparatus for performing the purification treatment is provided in parallel, and only one ion exchange resin of the same type is processed in one purification apparatus. Different types of ion exchange resins are processed in different refining equipment.

In the third aspect, in the third aspect, the plurality of types of ion exchange resins are separately purified by different refining apparatuses, and then measured by different metering tanks. The mixing tank is mixed and filled in the aforementioned container.

In a method and apparatus for producing an ion exchange apparatus according to a fifth aspect, in any one of the first to fourth aspects, the cleanliness of the clean room is 10,000 or less.

In a method and apparatus for producing an ion exchange device according to a sixth aspect, in any one of the first to fifth aspects, the ion exchange device filled with the ion exchange resin is subjected to ultrapure water in the clean room. The effluent water from the ion exchange unit was analyzed to inspect the ion exchange unit.

In the sixth aspect of the method and apparatus for producing an ion exchange apparatus according to the seventh aspect, the analysis of the effluent water is performed in a clean room having a cleanliness level of 1000 or less. Further, the cleanliness of the clean room of the present invention is the number of floating fine particles of 0.3 μm or more in a volume of 1 cubic 呎 (1 ft ³ ), and the level 10000 means 10,000 fine particles in 1 cubic ,, and the level 1000 represents 1 cubic. There are 1000 particles in the sputum.

In the method and apparatus for producing an ion exchange apparatus according to the first to seventh aspects, since the filling step of filling the ion exchange resin in the container is performed in the clean room, it is possible to prevent dust in the air from being mixed into the ion exchange device in the filling step. Inside. Therefore, ultrapure water having good water quality can be produced by using the ion exchange apparatus produced by the method and apparatus. The present invention is particularly suitable for use in an ultrapure water production apparatus, and is particularly suitable for use in an ion exchange purification processing apparatus (Ion Exchange Polisher) which is a subsystem (secondary pure water system). The present invention is particularly suitable for use as an ultrapure water production apparatus for producing high-purity ultrapure water, for example, as an ion exchange apparatus for manufacturing an ultrapure water production apparatus for manufacturing a wafer or a semiconductor. According to the ultrapure water production apparatus of the ion exchange apparatus produced by the method and apparatus of the present invention, ultrapure water having a metal concentration of 1 ppt or less (further than 0.1 ppt or less) can be easily produced.

According to the method and apparatus of the second aspect, since the ion exchange resin does not come into contact with the atmosphere in the refining step and the subsequent transfer step, it is possible to prevent dust in the air from being mixed into the ion exchange resin in these steps.

According to the method and apparatus of the third aspect, since different types of ion exchange resins are purified by mutually different refining apparatuses, it is possible to prevent different kinds of ion exchange resins from being mixed into the ion exchange resin.

According to the method and apparatus of the fourth aspect, since the metering tanks are separately provided in accordance with the type of the ion exchange resin, even in the mixed bed type ion exchange apparatus, the ion exchange resin conforming to the regulations can be mixed and filled.

As in the fifth aspect, the cleanliness of the clean room should be 10,000 or less.

According to the method and apparatus of the sixth aspect, the ion exchange device filled with the ion exchange resin is passed through water, and the water quality of the effluent water is checked before being shipped, so that the quality of the ion exchange device can be ensured. In the seventh aspect, since the water quality inspection is performed in a clean room having a high cleanliness level of 1000 or less, the inspection accuracy is high.

A method and an apparatus for forming an ion exchange resin layer according to an eighth aspect, wherein a mixed slurry of an ion exchange resin and water is introduced into a container, and water is separated by a filter and discharged from the container, whereby the container is filled with an ion exchange resin. And a method and apparatus for forming an ion exchange resin layer, characterized in that a mixed slurry of ion exchange resin and water is supplied to a container by a fluid pressure driven pump, when the fluid pressure for driving the pump reaches a predetermined pressure, The fluid pressure acting on the pump is released and the pump is stopped.

The method and apparatus for forming an ion exchange resin layer according to the ninth aspect, in the eighth aspect, when the fluid pressure for pump driving reaches a predetermined pressure, the fluid pressure acting on the pump is released, and the pump is stopped, and the pump starts again. The pump is driven to stop the driving of the pump when the fluid pressure for driving the pump reaches the predetermined pressure again, releasing the fluid pressure acting on the pump.

In a method and apparatus for forming an ion exchange resin layer according to a tenth aspect, in the eighth or ninth aspect, the container includes: a raw water introduction path connected to the first filter; and a treated water connected to the second filter a road and a resin introduction path; a mixed slurry of ion exchange resin and water is introduced into the container through a resin introduction path, and the water is separated by the first and/or second filter, and then the raw water introduction path and/or the treated water extraction path are taken. The discharge is performed to form an ion exchange resin layer in the container.

The method and apparatus for forming an ion exchange resin layer according to the eleventh aspect, wherein in the eighth to tenth aspects, the fluid pressure driven pump is an air pressure driven pump, and has: when the air pressure for driving the pump reaches a predetermined pressure At the time, the control mechanism that drives the pump is stopped by releasing the air pressure acting on the pump.

In the eighth to eleventh aspects, the fluid pressure driven pump is preferably an air pressure driven diaphragm pump.

In the eighth to eleventh aspect, the ion exchange resin is preferably a mixed resin of a cation exchange resin and an anion exchange resin.

Hereinafter, embodiments of the first to seventh aspects will be described with reference to Fig. 1 . In the present embodiment, the anion exchange resin and the cation exchange resin are separately purified and measured, and then mixed and filled in a container.

The anion exchange resin is sent to a dedicated storage tank 111 from a flexible container bag or the like for storage. The anion exchange resin in the storage tank 111 is sent to a refining tower (adjusting tower) 114 through a pump 112 and a pipe 113. In the refining column, the ion exchange resin is purified by ultrapure water and an adjusting drug. As the medicine for adjustment, various kinds of medicines described in the above Patent Documents 1 to 3 and the like can be used. The purified wastewater is sent to a recovery system (not shown), and is recycled as ultrapure water after treatment. The same treatment was carried out in the purification column of the cation exchange resin to be described later, and the same treatment was carried out for the treatment of the drainage.

The anion exchange resin after the purification treatment is sent to the metering tank 119 through the pipe 115, the storage tank 116, the pump 117, and the pipe 118.

The cation exchange resin is stored in a dedicated storage tank 121, sent to the purification tower 124 via the pump 122 and the piping 123, and after being purified, is sent to the metering tank 129 through the piping 125, the storage tank 126, the pump 127, and the piping 128.

These measuring tanks 119 and 129 and the mixing tank 130 and the like behind the same are installed in the clean room 141 having a cleanliness of 10,000 or less. The anion exchange resin and the cation exchange resin which are quantitatively measured in the measurement tanks 119 and 129 are introduced into the mixing tank 130 through the dedicated pipes 119a and 129a, respectively, and mixed. The mixed ion exchange resin is sent to the container 133 through the pump 131 and the pipe 132 to be filled. The container 133 has the same structure as that of the second embodiment, and the ion exchange resin is filled in the container 133 from the resin inlet of the container 133 to constitute an ion exchange device.

After the filling is completed, the resin introduction port is sealed. Then, the ion exchange device is sent to the inspection step in the clean room 141. In the inspection step, the ultra-pure water is introduced from the raw water inlet of the container 133 through the pipe 135, and the treated water taken out from the treated water outlet is sent to the analysis device 137 in the analysis chamber 142 through the pipe 136 for water quality. analysis. The inspection drainage is discharged through the piping 138 toward the recovery system. When the inspection result is acceptable, the raw water inlet port and the treated water outlet port of the container 133 are sealed, and are sent out to the outside of the clean room 141 through the clean room inlet and outlet 143. The defective ion exchange device is also taken out from the inlet and outlet 143 toward the outside of the clean room 141. The analysis chamber 142 is a high-cleanness clean room having a cleanliness of 1000 or less.

In the method of producing the ion exchange apparatus of Fig. 1, the filling step of filling the ion exchange resin in the container 133 is performed in the clean room 141 having a cleanliness of 10,000 or less, thereby preventing dust from entering the air in the filling step. Inside the ion exchange unit. Therefore, by using the ion exchange apparatus thus produced, ultrapure water having good water quality can be produced.

In the present embodiment, after the anion exchange resin and the cation exchange resin are subjected to a purification treatment in a state where the atmosphere is not in contact with the atmosphere in the purification towers 114 and 124, the ion exchange resin is placed in the state of not contacting the atmosphere by the pipes 115, 118, and 125. The transfer is performed at 128, and the metering tanks 119 and 129 and the mixing tank 130 are metered and mixed without being exposed to the atmosphere. Therefore, it is possible to prevent dust in the air in the transfer, metering, and mixing steps from being mixed into the ion exchange resin.

Further, in the present embodiment, the anion exchange resin and the cation exchange resin are transferred and purified by using the dedicated storage tanks 111 and 121, the purification towers 114 and 124, the storage tanks 116 and 126, the metering tanks 119 and 129, and the respective pipes and pumps. The metering thus prevents mixing of different kinds of ion exchange resins into the ion exchange resin in these steps. In addition, since the anion exchange resin and the cation exchange resin, which are purely composed of only a single type, which are not mixed with different kinds of ion exchange resins, are metered and mixed and filled in the container 133, it is possible to prepare a mixture filled with an anion exchange resin and a predetermined mixture. Mixed bed type ion exchange device for cation exchange resin.

In the present embodiment, the ion exchange device filled with the ion exchange resin is passed through the ultrapure water, and the water quality of the effluent water is inspected and then shipped. Therefore, the high quality ion exchange device can be reliably shipped. Since the water quality inspection is performed in the clean room 142 having a high cleanliness level of 1000 or less, the inspection accuracy is high.

In the above embodiment, the anion exchange resin and the cation exchange resin are treated and transferred by the dedicated storage tank 111 to the measurement tank 119 and the storage tank 121 to the metering tank 129, respectively, and different types of resins are used for the anion exchange resin. In the case of a dedicated storage tank to a metering tank for each model, the anion exchange resin is treated by a dedicated line for each model. Regarding the cation exchange resin, when different types of resins are used, dedicated lines are provided for each model, and each model is processed by a dedicated line. In this way, different types of anion exchange resins can be prevented from being mixed into the anion exchange resin, or different types of cation exchange resins can be mixed into the cation exchange resin.

In the above embodiment, the anion exchange resin and the cation exchange resin are metered in the metering tanks 119 and 129, and then mixed in the mixing tank 130 to be filled in the vessel 133. However, only the anion exchange resin from the metering tank 119 or the metering tank is used. The cation exchange resin of 129 may be filled in the vessel 133 to form an anion exchange device or a cation exchange device.

In the present invention, it is preferred to attach a barcode to the container to manage progress and origin.

Examples and comparative examples of the first to seventh aspects will be described below.

[Example 1]

Using an ion exchange apparatus production apparatus shown in Fig. 1, an anion exchange resin and a cation exchange resin were mixed at a ratio of 1:1 in the vessel (72L) shown in Fig. 2 to prepare an ion exchange apparatus. In the ion exchange apparatus, ultrapure water having a metal ion concentration shown in Table 1 was passed through the water for 24 hours in a state of SV=60/h. The water quality of the effluent from the ion exchange unit taken at the 24th hour is shown in Table 1.

[Comparative Example 1]

In the first embodiment, an ion exchange device was produced in the same manner as in Example 1 except that an apparatus for producing an ion exchange device in which the clean room 141 was not provided was used, and a water passing test was performed. The water quality of the effluent from the ion exchange unit taken at the 24th hour is shown in Table 1.

As is apparent from Table 1, ultrapure water of high water quality can be produced by using the ion exchange apparatus produced by the method and apparatus of the present invention.

Next, the eighth to eleventh aspects will be explained.

The ion exchange resin layer of the eighth to eleventh aspect is an ion exchange resin layer formed in an ion exchange device such as a pure water production device, an ultrapure water production device, a wastewater treatment device, or an ion adsorption device, and is provided in a stationary type. An ion exchange resin layer such as an ion exchange device, a unit exchange type ion exchange device, or a resin exchange type ion exchange device using an ion exchange resin moving container. Further, the object includes an ion exchange resin filling unit used in the unit exchange type ion exchange apparatus, an ion exchange resin moving container used in a resin exchange type ion exchange apparatus, or a container ion or the like. Exchange the resin layer. Among them, the ion exchange resin layer of the ion exchange resin filling unit used in the unit exchange type ion exchange apparatus is preferably used as the object.

Examples of the ion exchange resin constituting the ion exchange resin layer include a cation exchange resin, an anion exchange resin, a chelating resin, another selective adsorbent resin, a mixed resin thereof, or the like, or a mixture thereof with an inert resin or other resin. Resins and the like are all granular resins. These resins may be either a new resin or a resin. However, in any case, it is preferred to introduce the regenerated resin into a container to form an ion exchange resin layer.

The container for filling the ion exchange resin is not particularly limited, and can be directly filled in a container which is required to form an ion exchange resin layer. Examples of such a container include an ion exchange column of a fixed type, a resin exchange type, another ion exchange apparatus, an ion exchange resin charging unit used in a unit exchange type ion exchange apparatus, and an ion used in a resin exchange type ion exchange apparatus. Exchange resin moving containers, resin storage tanks, other containers, and the like. Particularly suitable is that a container of a certain volume can be filled with a certain capacity of resin at a certain filling density, and a certain capacity of the ion exchange resin layer can be formed when it is filled. As such a container, an ion exchange resin filling unit used in a unit exchange type ion exchange apparatus can be cited.

The container filled with the ion exchange resin preferably has a resin introduction path (for introducing a mixed slurry of ion exchange resin and water into the container), a filter (separating the water in the container), and separating the water to be discharged. The filling means of the road (discharging the separated water from the container). It is preferable to have a container having a constant internal volume in a state in which the filling means is provided. Further, a container which does not have such a filling means may be used, and in this case, filling of the resin is possible by mounting the filling means. In the container, the raw water introduction path connected to the first filter, the treated water extraction path connected to the second filter, and the resin introduction path are provided in the container for the ion exchange treatment, such as the ion exchange column and the ion exchange resin filling unit. In the case, one or both of them may be used as the aforementioned filling means. Preferably, the filter has an opening of 0.1 to 0.3 mm in order to prevent the ion exchange resin having a particle diameter of 0.4 to 0.5 mm from flowing out.

In the eighth to eleventh aspect, a mixed slurry of an ion exchange resin and water is introduced into a container to fill an ion exchange resin, and water is separated by a filter and discharged from the container, thereby forming an ion exchange resin layer in the container. . In this case, the mixed slurry of the ion exchange resin and water is supplied to the container by the fluid pressure driven pump, and the separated water is discharged. If the container is filled with the ion exchange resin, the discharge pressure of the pump becomes high, accompanied by this. The fluid pressure for driving the pump is also increased. Therefore, when the fluid pressure for driving the pump reaches a predetermined pressure, the fluid pressure acting on the pump is released, whereby the pump is stopped and a certain volume of the ion exchange resin layer can be formed in the container.

In the eighth to eleventh aspect, the capacity of the ion exchange resin is such that the ion exchange resin is introduced into pure water (ultra-pure water) until the resin layer does not change, and it is generally allowed to stand for 10 to 20 minutes. The capacity measured in the settled state. In the case where a mixed resin such as a cation exchange resin or an anion exchange resin is used as the ion exchange resin, the capacity of the ion exchange resin is a capacity measured by putting a mixed resin into pure water (ultra-pure water) and allowing it to stand still. . In the ion exchange resin, since the mixed slurry is filled in a pressurized state, the packing density of the ion exchange resin layer formed in the container is increased, and therefore the resin capacity constituting the ion exchange resin layer is equal to the volume of the container. The case where the resin capacity is more. In the present invention, the capacity of the ion exchange resin filled in a pressurized state is made constant.

The mixed slurry of the ion exchange resin and water is a mixed slurry of the above ion exchange resin and water. If the mixing ratio of the resin becomes high, the fluidity of the slurry becomes low and the resin becomes clogged easily, and if the resin is mixed. When it is lowered, the amount of water to be separated increases, which hinders operability. Therefore, the mixing ratio of the ion exchange resin and water is preferably such that the capacity ratio of the ion exchange resin to water in the state in which the aqueous phase is formed (the state in which the sediment is left still and the water is separated) is (70:30)~( 90:10).

In the eighth to eleventh aspect, the mixed slurry of the ion exchange resin and the water is pressurized by the fluid pressure driven pump and then introduced into the container, and the supply pressure of the mixed slurry to the container (ie, the discharge pressure of the pump) The pressure which is easy to carry out the filling operation of the resin and which can prevent the resin from being broken and uniformly filled can be generally set to a pressure in the range of 0.2 to 0.7 MPa. As such a filling pressure, if the pressure of the hydraulic pressure applied to the ion exchange resin layer in the ion exchange device is the same, in the case of the ion exchange resin filling unit used in the unit exchange type ion exchange device, the ion exchange device mounting unit After that, it is preferable to carry out the liquid transfer without adjusting the ion exchange resin layer before the liquid passage.

The mixed slurry is supplied to the container under the pump discharge pressure, and when the fluid pressure for driving the pump reaches a predetermined pressure, the fluid pressure acting on the pump is released to stop driving the pump, thereby forming a certain capacity in the container. Although the ion exchange resin layer may have a non-uniform packing density, it may be difficult to form an ion exchange resin layer having a completely uniform packing density by the initial filling operation. Therefore, after stopping the driving of the pump in one filling operation, the pump is again driven to supply the slurry, and when the fluid pressure for driving the pump reaches the predetermined pressure again, the fluid pressure acting on the pump is released and the pump is stopped. An ion exchange resin layer of uniform packing density is formed. In this case, it is preferable to leave the pump for a certain period of time, for example, 1 to 20 minutes, more preferably 5 to 10 minutes, after the initial filling operation stops driving the pump. It is only necessary to repeatedly stop and drive the pump in such a manner, but the more uniform the plurality of times, the more uniform the resin can be filled.

The fluid pressure-driven pump may include a control mechanism that releases the fluid pressure acting on the pump when the fluid pressure for driving the pump reaches a predetermined pressure. Therefore, when the container is filled with a predetermined amount of ion exchange resin and becomes full, the fluid pressure for pump driving increases as the slurry pushing pressure rises, so that the fluid pressure for pump driving reaches a predetermined pressure. At the time of the point, the fluid pressure acting on the pump is automatically released. This allows the pump to be stopped without excessive or insufficient ion exchange resin filling.

In a control mechanism that detects the discharge pressure of the pump and stops the pump, or a mechanism that automatically stops the pump at the time when the discharge pressure of the pump becomes high, it is difficult to use a complicated mechanism and operation in a mixed system of resin and water. However, in such a system, the fluid pressure for pump driving rises sensitively in response to an increase in the discharge pressure of the pump formed by filling the resin, so that as long as the fluid pressure for driving the pump is controlled, it is possible to fill the resin. Let the pump stop. In this case, since the fluid for pump driving does not contain a resin-like solid substance, the configuration and operation of the machine can be simplistic. In particular, when air is used as the fluid for pump driving, the structure and operation of the machine become more simplistic, and it is easy to take in, discharge, and the like with respect to the system, and it is possible to quickly perform accurate control.

As the fluid pressure driven pump, preferably an air pressure driven pump, the advantages of using air pressure as the fluid pressure include: easy to generate, handle, and discard, and are compressed at the time of action to reduce resin stress. Damage caused by impact, etc. Further, it is preferable that when the air pressure for driving the pump reaches a predetermined pressure, the control mechanism for driving the pump can be released by releasing the air pressure acting on the pump, thereby making the control easy, without damaging the resin and being correct. The filling density is filled to form a certain volume of the ion exchange resin layer. The air pressure driven pump may be a reciprocating piston pump or the like, but is preferably an air pressure driven diaphragm pump. By using an air pressure-driven diaphragm pump, the impact on the resin can be reduced, and the damage of the resin can be further reduced, and the control can be easily performed, and the ion exchange resin layer having a certain capacity can be formed by filling at a proper filling density.

As the container, a container having a raw water introduction path (connected to the first filter), a treated water take-out path (connected to the second filter), and a resin introduction path is used, for example, an ion used in a unit exchange type ion exchange device. In the case of exchanging the resin filling unit, the mixed slurry of the ion exchange resin and water is introduced into the container through the resin introduction path, and the water is separated by the first and/or second filter, and then introduced from the raw water and/or treated water. The take-out path is discharged, whereby an ion exchange resin layer can be formed in the container. The container in which the ion exchange resin layer is formed in this manner can be directly attached to the ion exchange device, whereby the liquid to be treated is subjected to ion exchange treatment, and after the saturation, the container is recovered and the resin is regenerated and then refilled, and can be repeatedly use.

In the eighth to eleventh aspect, as the ion exchange resin layer to be formed, the ion exchange device for different purposes such as a pure water production device, an ultrapure water production device, a wastewater treatment device, and an ion adsorption device is used as the impurity amount to be introduced. In the case of the water to be used for transportation, it is preferable to form the ion exchange resin layer using pure water or ultrapure water corresponding to the required purity, and to perform the environment such as dust in a clean room or the like. Filling operation.

According to the eighth to eleventh aspects, a method in which a mixed slurry of an ion exchange resin and water is introduced into a container, water is separated by a filter, and discharged from the container, thereby filling the container with an ion exchange resin to form an ion exchange resin layer a mixed slurry of ion exchange resin and water is supplied to the container by a fluid pressure driven pump. When the fluid pressure for driving the pump reaches a predetermined pressure, the fluid pressure acting on the pump is released to stop driving the pump. Since the ion exchange resin layer is formed, a certain amount of ion exchange resin can be correctly filled into the container in a short time by a simple mechanism and a simple operation to form an ion exchange resin layer and ion exchange having the ion exchange resin layer. The device can prevent high-density filling and breaking of the ion exchange resin, or blockage of piping.

Hereinafter, an embodiment of the eighth to eleventh aspects will be described using FIG. In Fig. 3, the container 1 is an ion exchange unit U used in a unit exchange type ion exchange unit, and has the same structure as that of Fig. 2. In other words, the ion exchange unit U is a regenerated ion exchange resin layer 2 formed inside the detachable container 1. The opening 1a is formed in the upper part of the container 1, and the cover 6 is attached (the resin introduction path 3, the raw water introduction path 4, and the process water extraction path 5 are integrated). In the lower portion of the raw water introduction path 4 and the treated water take-out path 5, the first filter 4a and the second filter 5a are respectively provided at the distal end portions extending into the container 1. Further, the adapters 4b and 5b are attached to the upper portions of the raw water introduction path 4 and the treated water extraction path 5, respectively, and the expansion joints 7 and 8 connectable to the resin filling device are formed. The expansion joints 7, 8 are connected to the external flow paths 11, 12 by the joints 9, 10.

In Fig. 2, the ion exchange resin layer 2 is not filled in the entire container 1, and a water layer is formed on the upper portion of the container 1. In Fig. 3, the ion exchange resin layer 2 is filled in the container 1 in a filled state. The whole. Further, the ion exchange resin layer 2 is a mixed resin filled with a cation exchange resin and an anion exchange resin. The structure of the other ion exchange unit U and the basic operation of filling the resin with the container 1 are substantially the same as those described in Fig. 2 .

The ion exchange unit U in which the ion exchange resin layer 2 is formed is similarly sealed as in the case of Fig. 2, and is sealed and transported to the site in a state where the positions of the connectors 4b and 5b are separated. After being attached to the ion exchange apparatus, the connectors 4b and 5b are connected to the raw water flow path and the treated water flow path (both not shown) of the ion exchange devices corresponding to the external flow paths 11 and 12 to perform ion exchange. The resin introduction path 3 at this time is used for air discharge or the like.

In the third embodiment, in order to fill the container 1 with the mixed resin, the cation exchange resin regeneration tank 21, the anion exchange resin regeneration tank 22, and the mixing tank 23 are provided, and after the ion exchange resin is separated, regenerated, mixed, and the like, The regenerated resin is introduced into the vessel 1 filled in the ion exchange unit U by the pump 30.

Next, when the used ion exchange resin is separated and regenerated from the recovered ion exchange unit U and then mixed and filled, the mixed resin constituting the ion exchange resin layer 2 is taken from the container 1 of the recovered ion exchange unit U. The line L1 is introduced into the cation exchange resin regeneration tank 21, pure water is transported from the line L2, and the resin is subjected to backwash separation, and the separated anion exchange resin is introduced into the anion exchange resin recovery tank 22 from the line L5. Then, the cation exchange resin regeneration tank 21 is passed through the line L3 to pass the regenerant (acid), the regeneration liquid is discharged from the line L4 to regenerate the cation exchange resin, and the regenerated cation exchange resin is transferred from the line L6 to the mixing tank 23. . Further, pure water is sent to the anion exchange resin tank 22 from the line L7, and the resin is backwashed. Then, the reconstituted liquid (alkali) is passed through the line L8, and the regenerated liquid is discharged from the line L9 to regenerate the anion exchange resin. The regenerated anion exchange resin is transferred from the line L11 to the mixing tank 23.

In the mixing tank 23, air and pure water are supplied from the line L12, and pure water is supplied from the line L13 to be mixed with the resin to form a mixed slurry of resin and water. The mixed slurry is introduced into the vessel 1 through the resin introduction path 3 of the ion exchange unit U from the line L15 by the pump 30 by suction and pressurization from the line L14, and the first filter 4a and the second filter are carried by the first filter 4a and the second filter. After the separator 5a is separated, it is discharged from the external flow paths 11 and 12 through the expansion joints 7, 8 and the joints 9, 10, whereby the ion exchange resin layer 2 is formed.

The pump 30 is an air pressure driven diaphragm pump. As the air pressure-driven diaphragm pump, for example, a double diaphragm type pump disclosed in Patent Document 5 (JP-A-2002-221160) or the like is used. The pump 30 is formed by providing the diaphragms 33a and 33b in the two pump chambers 32a and 32b formed adjacent to the casing 31 so as to be joined to the front end of the main shaft 35 (which is slidable through the intermediate wall 34). And can move back and forth.

Drive air chambers 36a, 36b (connected to the drive air passages 37a, 37b, respectively) are formed on the opposite sides of the diaphragms 33a, 33b of the pump chambers 32a, 32b. Check valves 38a and 38b are provided at the lower portions of the pump chambers 32a and 32b, and communicate with the line L14 through the slurry suction passage 41. Further, check valves 39a and 39b are provided in the upper portions of the pump chambers 32a and 32b, and communicate with the line L15 through the slurry supply path 42. The drive air passages 37a and 37b are connected to the switching valve 43 without crossing the slurry supply passage 42. The switching valve 43 is connected to the air supply path 44 and the air discharge path 45.

The pump 30 is provided such that when the air pressure for driving the pump reaches a predetermined pressure, the air pressure acting on the pump is released and the control device 50 for driving the pump is stopped. The control device 50 is disclosed, for example, in Patent Document 6 (JP-A-2007-305019). The control device 50 is composed of a control valve 51, a three-way valve 52, and a regulating valve 53. The control valve 51 is partitioned into a first fluid chamber 56 and a second fluid chamber 57 by a valve body 54 (adjusted by a regulator 55). A drive air inlet 58 and a drive air outlet 59 are provided in the first fluid chamber 56, and compressed air from the air compressor 60 through the line L16 having the valve 61 enters from the drive air inlet 58, and the drive air outlet 59 passes through the line L17. The air supply path 44 is supplied to the switching valve 43.

Further, the first fluid chamber 56 is provided with a control air outlet 62, communicates with the three-way valve 52 via the line L18, and further communicates with the regulator valve 53 via the line L19. The control air inlet 63 is provided in the second fluid chamber 57, and communicates with the regulator valve 53 through the line L21. The regulator 55 adjusts the flow rate of the driving air passing through the first fluid chamber 56 by adjusting the position of the valve body 54. The regulator 64 is provided in the regulator valve 53, and the operating pressure of the regulator valve 53 can be adjusted. The switch 65 is provided in the three-way valve 52, and the flow path of the three-way valve 52 can be switched to discharge the control air, and the control valve 51 can be reset.

In the above configuration, the compressed air from the air compressor 60 is flow-regulated by the valve 61, introduced into the drive air inlet 58 of the control valve 51 through the line L16, and supplied to the switching valve of the pump 30 through the line L17 from the drive air outlet 59. 43 air supply path 44. In the switching valve 43, the driving air passages 37a, 37b are alternately switched to alternately introduce the driving air into the driving air chambers 36a, 36b, and at this time, the driving air is discharged toward the air discharge path 45 from the other driving air passages 37b, 37a. Thereby, the diaphragms 33a and 33b are moved in the same direction through the main shaft 35, and the mixed slurry is sucked and pressurized from the line L14, and then introduced into the container 1 through the resin introduction path 3 of the ion exchange unit U from the line L15.

Fig. 3 shows that the pump 30 introduces driving air from the switching valve 43 through the driving air passage 37b into the driving air chamber 36b, and discharges the driving air of the driving air chamber 36a from the driving air passage 37a through the air discharge path 45 to the outside of the system. status. At this time, the driving air that drives the air chamber 36a is discharged, and the diaphragm 33a is moved toward the intermediate wall 34 side, whereby the mixed slurry of the mixing tank 23 enters the slurry suction path 41 of the pump 30 from the line L14, and passes through the check valve 38a. It is sucked into the pump chamber 32a. At the same time, the diaphragm 33b moves toward the pump chamber 32b side, thereby pressurizing the mixed slurry in the pump chamber 32b, and enters the slurry supply path 42 from the check valve 39b, and passes through the resin of the ion exchange unit U from the line L15. The channel 3 is introduced and introduced into the container 1. At this time, since the check valve 39a is closed, the mixed slurry of the slurry supply path 42 does not enter the pump chamber 32a.

Then, the switching valve 43 is switched, and the driving air is introduced into the driving air chamber 36a from the driving air passage 37a, and the driving air of the driving air chamber 36b is discharged from the switching valve 43 through the air discharge path 45 to the outside of the system through the driving air passage 37b. Thereby, the diaphragms 33a and 33b are moved to the right in the first drawing, and the mixed slurry entering the slurry suction path 41 of the pump 30 from the mixing tank 23 is sucked into the pump chamber 32b through the check valve 38b. At the same time, the mixed slurry in the pump chamber 32a is pressurized, enters the slurry supply path 42 from the check valve 39a, and is introduced into the container 1 of the ion exchange unit U from the line L15. Thus, by switching the switching valve 43 to alternately switch the flow paths of the driving air and the mixed slurry, the introduction of the mixed slurry toward the container 1 can be continued.

The mixed slurry of the container 1 is introduced from the line L15, wherein the ion exchange resin is filled in the container 1, and the water is separated by the first filter 4a and the second filter 5a, through the expansion joints 7, 8, and the joint 9. Then, 10 is discharged from the external flow paths 11 and 12, whereby the ion exchange resin layer 2 is formed. At the initial stage of filling of the ion exchange resin, the ion exchange resin layer 2 in the container 1 is small, and in the state where a large amount of the water layer exists, the mixed water is separated and discharged, and the mixed slurry can be introduced one after another by switching the valve. The switching of 43 is performed in turn to supply the mixed slurry.

As the filling of the ion exchange resin progresses, when the entire inside of the container 1 is filled with the ion exchange resin layer 2, the mixed slurry becomes unable to enter the container 1. As a result, the discharge pressure of the pump 30 becomes high, and the load applied to the diaphragms 33a and 33b increases, so that the driving air pressure becomes high. In the control valve 51, a part of the driving air in the first fluid chamber 56 is supplied as control air, supplied from the control air outlet 62 to the three-way valve 52 through the line L18, and further supplied to the regulating valve 53 through the line L19, at the driving air pressure. When the predetermined pressure is reached, the regulating valve 53 is opened.

By opening the regulating valve 53, the control air 53 enters the second fluid chamber 57 from the regulating valve 53 through the line L21 and the control air inlet 63, and moves the valve body 54 to the right in the first drawing to close the first fluid chamber 56. Thereby, the supply of the driving air to the pump 30 is stopped, the driving air pressure acting on the pump 30 is released, and the driving of the pump 30 is stopped. Thereby, the pump 30 stops supplying the mixed slurry to the container 1. At this stage, since the container 1 is in a full state, the container 1 is an ion exchange resin layer 2 which forms a certain capacity.

In this manner, when the driving air pressure of the pump 30 reaches a predetermined pressure, the driving air pressure acting on the pump 30 is released and the driving pump 30 is stopped, whereby the ion exchange resin layer 2 having a constant capacity can be formed in the container 1, but There is still a case where the filling density is not uniform. Therefore, after stopping the driving of the pump 30 in one filling operation, after a certain period of time (for example, 1 to 10 minutes), the pump 30 is again driven to supply the mixed slurry, and when the driving air pressure is again increased. When the predetermined pressure is reached, the air pressure acting on the pump 30 is released and the drive pump 30 is stopped, whereby the ion exchange resin layer 2 having a uniform filling density can be formed.

When the pump 30 is started to be driven again, the flow path of the three-way valve 52 is switched by the switch 65 provided in the three-way valve 52 to discharge the control air in the second fluid chamber 57, thereby making the control valve 51 The valve body 54 is reset to reset the control valve 51. By stopping and placing the pump 30, the filling stress of the ion exchange resin layer 2 in the container 1 can be released to form a uniform ion exchange resin layer 2, and the water layer can be separated to form a resin inflow space in the container 1, at which time The control valve 51 is reset and the drive pump 30 is again started to re-start the supply of the mixed slurry in the container 1. When the driving air pressure reaches the predetermined pressure again, the regulating valve 53 is opened, the air pressure acting on the pump 30 is released, and the driving of the pump 30 is stopped. Thereby, the ion exchange resin layer 2 having a more uniform packing density can be formed.

After the ion exchange resin layer 2 is formed in this manner, or when the filling amount of the ion exchange resin layer 2 is not strictly required, the reverse filling operation can be omitted, and the container 1 is replaced and the ion exchange resin layer 2 is subjected to the next container 1. Formation. The replacement of the container 1 is performed by the connectors 4b and 5b being separated from the expansion joints 7, 8 and replaced with a new one. After replacing the new container 1, the flow path of the three-way valve 52 is switched by the switch 65 to reset the control valve 51, thereby supplying the driving air to the first fluid chamber 56 of the control valve 51, and starting again by The pump 30 supplies the mixed slurry to the container 1, and the ion exchange resin is filled in the same manner as described above to form the ion exchange resin layer 2.

The operating pressure of the regulating valve 53, that is, the driving air pressure when the regulating valve 53 is opened, is set to a pressure in the range of 0.2 to 0.7 MPa, and the regulator 64 can adjust the pressure to facilitate the filling operation of the resin. It can avoid the pressure of uniform filling of resin. In this case, it is not necessary to measure or adjust the discharge pressure of the pump 30, and if the operating pressure of the regulator valve 53 is adjusted, the control valve 51 can be closed and the air pressure acting on the pump 30 can be released to stop the drive of the pump 30.

Examples and comparative examples of the eighth to eleventh aspects will be described below.

[Examples 2 to 6]

In the apparatus shown in Fig. 3, in the container 1 (volume 70 L), a cation exchange resin CRM (trademark of Kurita Industrial Co., Ltd.) and an anion exchange resin KR (trademark of Kurita Industrial Co., Ltd.) were used in a capacity ratio of 1: 1.6 Mixed resin obtained by mixing the mixed resin into a state in which an aqueous phase is formed (the state in which the sediment is left still and the water is separated), and the mixed slurry in which the water is mixed at a capacity ratio of 80:20 is set in the pump 30. The filling was carried out at a pressure of 0.294 MPa to form the ion exchange resin layer 2. When the pump 30 reached 0.294 MPa and stopped, it was allowed to stand for 10 minutes, and the pump 30 was again driven at a set pressure of 0.294 MPa to be filled. The results of the five containers 1 being sequentially replaced and filled are shown in Table 2.

According to the results of Table 2, the average value of the excess or deficiency of the ion exchange resin layer 2 in the container 1 was +1.1 L, and the capacity ratio with respect to the reference amount (70 L) was 1.57%, which was excessive and did not exist. Insufficient examples are judged as qualified.

[Comparative Example 2~4]

Using the same container and mixed slurry as in Examples 2 to 6, a funnel was provided in the resin introduction path 3 of the container 1 shown in Fig. 3, and the mixed slurry was poured into the container 1 until the container 1 was filled. An ion exchange resin layer 2 is formed. The results of sequentially replacing the three containers 1 are shown in Table 3.

According to the results of Table 3, in each of the examples, the capacity of the ion exchange resin layer 2 in the container 1 was insufficient in the range of 5 to 10 L, and the variation was large.

The eighth to eleventh aspects can be used in a container used in an ion exchange device such as a pure water production device, an ultrapure water production device, a wastewater treatment device, or an ion adsorption device, and a cation exchange resin, an anion exchange resin, and the like. A method of filling a mixed resin or a mixed resin thereof with another resin in a container to form an ion exchange resin layer.

While the invention has been described with respect to the embodiments of the present invention, various modifications can be made by those skilled in the art without departing from the scope of the invention.

This application is based on the Japanese application filed on June 30, 2009 (Japanese Patent Application No. 2009-155660) and the Japanese application filed on November 24, 2009 (Japanese Patent Application No. 2009-266401). It is used in the present invention.

1, 133. . . container

1a. . . Opening

2. . . Ion exchange resin

3. . . Guide

4. . . Raw water introduction road

4a, 5a. . . filter

4b, 5b. . . Connector

5. . . Treatment water withdrawal road

6. . . cover

7, 8. . . Expansion joint

9, 10. . . Connector

11,12. . . External flow path

twenty one. . . Cation exchange resin regeneration tank

twenty two. . . Anion exchange resin regeneration tank

23, 130. . . Mixing tank

30, 112, 117, 122, 127, 131. . . Pump

31. . . case

32a, 32b. . . Pump room

33a, 33b. . . Diaphragm

34. . . Intermediate wall

35. . . Spindle

36a, 36b. . . Drive air chamber

37a, 37b. . . Drive air path

38a, 38b, 39a, 39b. . . Check valve

41. . . Slurry suction path

42. . . Slurry supply road

43. . . Switching valve

44. . . Air supply road

45. . . Air discharge road

50. . . Control device

51. . . Control valve

52. . . Three-way valve

53. . . Regulating valve

54. . . Valve body

55, 64. . . Regulator

56. . . First fluid chamber

57. . . Second fluid chamber

58. . . Drive air inlet

59. . . Drive air outlet

60. . . Air compressor

61. . . valve

62. . . Control air outlet

63. . . Control air inlet

65. . . Switcher

111, 121. . . Storage slot

113, 115, 118, 119a, 123, 125, 128, 129a, 132, 135, 136, 138. . . Piping

114, 124. . . Refined tower

116, 126. . . Storage tank

119, 129. . . Metering tank

137. . . Analytical machine

141. . . Clean room

142. . . Analysis room

143. . . Clean room entrance

L1~9, L11~19, L21. . . Pipeline

U. . . Ion exchange unit

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a flow chart showing a method and apparatus for fabricating an ion exchange apparatus according to an aspect of the present invention.

Figure 2 is a cross-sectional view of an ion exchange device.

Fig. 3 is a flow chart showing a method and an apparatus for forming an ion exchange resin layer according to an embodiment.

111, 121. . . Storage slot

112, 117, 122, 127, 131. . . Pump

113, 115, 118, 119a, 123, 125, 128, 129a, 132, 135, 136, 138. . . Piping

114, 124. . . Refined tower

116, 126. . . Storage tank

119, 129. . . Metering tank

130. . . Mixing tank

133. . . container

137. . . Analytical machine

141. . . Clean room

142. . . Analysis room

143. . . Clean room entrance

Claims (12)

A method for producing an ion exchange apparatus which is equipped in an ultrapure water production apparatus for producing ultrapure water having a metal concentration of 0.1 ppt or less, and is prepared by filling a purified ion exchange resin in a container. In the state in which the ion exchange resin is purified without being exposed to the atmosphere, the ion exchange resin is transferred to the filling step without contact with the atmosphere via a pipe. The filling step is dust-free at a cleanliness level of 10,000 or less. In the room, the purified ion exchange resin is filled in the container. The method for producing an ion exchange apparatus according to the first aspect of the invention, wherein the purification equipment for performing the purification treatment is provided in parallel, and only one type of ion exchange resin is treated in one purification apparatus, and different types of ion exchange resins are used. It is processed in different refining equipment. The method for producing an ion exchange apparatus according to claim 2, wherein the plurality of types of ion exchange resins are separately purified by different purification apparatuses, and then metered in different measurement tanks, and then mixed in the mixing tank. Filled in the aforementioned container. The method for producing an ion exchange device according to any one of the first to third aspects of the present invention, wherein the ion exchange device after the ion exchange resin is filled is subjected to ultrapure water in the clean room, and the analysis is performed. The effluent from the ion exchange unit is used to inspect the ion exchange unit. The method for producing an ion exchange device according to claim 4, wherein the analysis of the effluent water is below a cleanliness level of 1000 or less The high cleanliness is carried out in a clean room. An apparatus for producing an ion exchange apparatus which is equipped in an ultrapure water production apparatus for producing ultrapure water having a metal concentration of 0.1 ppt or less, and is formed by filling a refining ion exchange resin in a container. The purification means for purifying the ion exchange resin in a state where it is not exposed to the atmosphere, and the transfer of the ion exchange resin purified by the purification means to the filling step without contact with the atmosphere through the pipe The means and the clean room having a cleanliness level of 10,000 or less for carrying out the step of filling the refining ion exchange resin in the container. The apparatus for producing an ion exchange apparatus according to claim 6, wherein the purification equipment for performing the purification treatment is provided in parallel, and only one type of ion exchange resin is processed in one purification apparatus, and different types of ion exchange resins are used. It is processed in different refining equipment. The apparatus for producing an ion exchange apparatus according to claim 7, wherein the plurality of types of ion exchange resins are separately purified by different purification apparatuses, and then metered in different metering tanks, and then mixed in the mixing tank. Filled in the aforementioned container. The apparatus for producing an ion exchange apparatus according to any one of claims 6 to 8, wherein the apparatus is provided with an inspection means for the ion exchange apparatus after filling the ion exchange resin in the clean room. Passing water through ultrapure water, analyzing from ions The water flowing out of the exchange device is used to inspect the ion exchange device. The apparatus for producing an ion exchange apparatus according to claim 9, wherein the apparatus for performing the analysis of the effluent water has a cleanliness level of 1000 or less. An ion exchange apparatus, which is an ion exchange apparatus manufactured by the method of any one of claims 1 to 5. An ion exchange apparatus, which is an ion exchange apparatus manufactured by the apparatus of any one of claims 6 to 10.