TWI492998B - A method for using protective film compound in etching process - Google Patents

A method for using protective film compound in etching process Download PDF

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TWI492998B
TWI492998B TW101144694A TW101144694A TWI492998B TW I492998 B TWI492998 B TW I492998B TW 101144694 A TW101144694 A TW 101144694A TW 101144694 A TW101144694 A TW 101144694A TW I492998 B TWI492998 B TW I492998B
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protective film
etching process
film composition
meth
composition
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TW201420696A (en
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Pei Hsuan Chen
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Advance Materials Corp
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一種蝕刻製程中保護膜組成物之使用方法Method for using protective film composition in etching process

本發明係有關一種蝕刻製程中保護膜組成物之使用方法,尤指一種防蝕之保護膜組成物。The present invention relates to a method of using a protective film composition in an etching process, and more particularly to an anti-corrosion protective film composition.

隨著電子產業的蓬勃發展,電子產品之製造也逐漸邁向高性能的趨勢。目前用於觸控面板上之玻璃,經切割、研磨後,於玻璃邊緣上會產生缺陷,故用氫氟酸蝕刻玻璃邊緣,以整平該玻璃之邊緣,而達到強化玻璃之效果(如第201121911號台灣專利、特開2011-231010日本專利、或第2012/0083401號美國專利)。With the rapid development of the electronics industry, the manufacture of electronic products has gradually entered a trend of high performance. At present, the glass used on the touch panel is cut and polished, and defects are generated on the edge of the glass. Therefore, the edge of the glass is etched with hydrofluoric acid to level the edge of the glass to achieve the effect of strengthening the glass (such as Taiwan Patent No. 201121911, Japanese Patent Laid-Open No. 2011-231010, or US Patent No. 2012/0083401.

再者,於蝕刻製程前,該玻璃不需蝕刻之部份係覆有抗蝕刻油墨層以作為保護,而於蝕刻製程後,再藉由剝墨液或溶劑移除該油墨層(第20110092670號韓國專利或第20110086475號韓國專利)。然而,於剝墨過程中,容易因鹼液或溶劑腐蝕玻璃表面之線路,而造成良率下降。Furthermore, before the etching process, the portion of the glass that is not to be etched is covered with an anti-etching ink layer for protection, and after the etching process, the ink layer is removed by a stripping ink or a solvent (No. 20110092670) Korean Patent or Korean Patent No. 20110086475). However, in the process of stripping the ink, it is easy to cause corrosion of the surface of the glass due to alkali or solvent, resulting in a decrease in yield.

於另一習知蝕刻製程中,係使用保護膜黏貼於該玻璃不需蝕刻之部份,而於蝕刻製程後,再撕除該保護膜。然而,需使用貼膜設備進行黏貼作業以避免造成氣泡,故需購買貼膜設備因而增加製程成本,且因保護膜係由一保護膜片、一層黏著劑與一層離型膜(或紙)所構成之三層結構,故其材料成本較油墨高,因而增加製程成本。又針對玻璃不同形狀大小,需切割該保護膜,因而增加製程成本。In another conventional etching process, a protective film is adhered to the portion of the glass that does not need to be etched, and after the etching process, the protective film is removed. However, it is necessary to use a filming device for the bonding operation to avoid air bubbles, so that the filming device needs to be purchased, thereby increasing the process cost, and the protective film is composed of a protective film, a layer of adhesive and a release film (or paper). The three-layer structure, so the material cost is higher than the ink, thus increasing the process cost. In addition, for different shapes and sizes of glass, the protective film needs to be cut, thereby increasing the process cost.

因此,遂發展出一種利用塗佈印刷液態保護膠之方 式,藉以形成所需之形狀大小,而省略切割作業,故能製程簡化以降低製程成本。其中,該液態保護膠之主要成份係為聚氯乙烯樹脂或壓克力樹脂,藉以承受玻璃切割與研磨製程之外力而使玻璃不受碰撞損傷,但該材質卻不耐氫氟酸之蝕刻,致使於氫氟酸蝕刻製程後,該保護膠容易脫落,導致玻璃受到侵蝕。Therefore, 遂 developed a method of using coating printing liquid protective glue In order to form the required shape and size, the cutting operation is omitted, so that the process can be simplified to reduce the process cost. The main component of the liquid protective glue is a polyvinyl chloride resin or an acrylic resin, so as to withstand the external force of the glass cutting and polishing process to protect the glass from collision damage, but the material is not resistant to the etching of hydrofluoric acid. After the hydrofluoric acid etching process, the protective adhesive is easily peeled off, causing the glass to be eroded.

因此,如何克服上述習知技術之種種問題,實已成目前亟欲解決的課題。Therefore, how to overcome the various problems of the above-mentioned prior art has become a problem that is currently being solved.

鑑於上述習知技術之種種缺失,本發明係提供一種蝕刻製程中膠狀固化而成之保護膜之使用方法,以於蝕刻製程中,能保護覆蓋於該保護膜下之物質不受氫氟酸侵蝕。In view of the above-mentioned various deficiencies of the prior art, the present invention provides a method for using a protective film formed by colloidal curing in an etching process, so as to protect a substance covering the protective film from hydrofluoric acid during the etching process. erosion.

本發明之蝕刻製程中保護膜組成物之使用方法係包括:於待進行蝕刻製程之物件表面以印刷方式分散保護膜組成物,其中,該保護膜組成物係包括紫外光固化樹酯,係包含感光性寡聚物(oligomer)及反應性單體;氟化樹脂,其中,相對於該紫外光固化樹酯100重量份,該氟化樹脂之含量為5至200重量份;以及光起始劑,其中,相對於該紫外光固化樹酯100重量份,該光起始劑之含量係為0.1至20重量份;固化該保護膜組成物,以形成保護膜;以及使該物件進行該蝕刻製程。The method for using the protective film composition in the etching process of the present invention comprises: dispersing the protective film composition in a printed manner on the surface of the object to be subjected to the etching process, wherein the protective film composition comprises an ultraviolet curing resin, a photosensitive oligomer (oligomer) and a reactive monomer; a fluorinated resin, wherein the fluorinated resin is contained in an amount of 5 to 200 parts by weight based on 100 parts by weight of the ultraviolet curable resin; and a photoinitiator Wherein the photoinitiator is in an amount of 0.1 to 20 parts by weight based on 100 parts by weight of the ultraviolet curable resin; curing the protective film composition to form a protective film; and subjecting the article to the etching process .

本發明之蝕刻製程中保護膜組成物之使用方法係藉由固化該氟化樹脂而達到抗氫氟酸性之目的。再者,本發明之蝕刻製程中保護膜組成物之使用方法係用於保護面板, 但不限於平面,亦可保護不規格形狀之表面。又,該保護膜組成物可應用於各種材質之面板上,如觸控面板,並無特別限制。The method of using the protective film composition in the etching process of the present invention achieves the purpose of resisting hydrofluoric acidity by curing the fluorinated resin. Furthermore, the method of using the protective film composition in the etching process of the present invention is for protecting a panel. However, it is not limited to the plane, but also protects the surface of the irregular shape. Further, the protective film composition can be applied to panels of various materials, such as a touch panel, and is not particularly limited.

所述之保護膜組成物之整體黏度係為500至100000cps,較佳為10000至80000cps,更佳為20000至50000cps。若該保護膜組成物之整體黏度太高,會造成塗佈印刷於表面之困難,如觸控面板之導電膜或導電玻璃表面;若該保護膜組成物之整體黏度太低,則易造成流膠。The protective film composition has an overall viscosity of 500 to 100,000 cps, preferably 10,000 to 80,000 cps, more preferably 20,000 to 50,000 cps. If the overall viscosity of the protective film composition is too high, it may cause difficulty in coating and printing on the surface, such as the conductive film of the touch panel or the surface of the conductive glass; if the overall viscosity of the protective film composition is too low, the flow is likely to be caused. gum.

所述之紫外光固化樹酯之中,該感光性寡聚物係可為含有一個未飽和雙鍵之寡聚物,例如,可選自聚氨酯(甲基)丙烯酸酯寡聚物、環氧(甲基)丙烯酸酯寡聚物、純(甲基)丙烯酸酯寡聚物、胺基(甲基)丙烯酸酯寡聚物、有機矽(甲基)丙烯酸酯寡聚物及聚酯(甲基)丙烯酸酯寡聚物之至少一者,故該感光性寡聚物可包含單一寡聚物組成或二種以上寡聚物組成,且寡聚物成份之種類並無限制。In the ultraviolet curable resin, the photosensitive oligomer may be an oligomer containing an unsaturated double bond, for example, may be selected from a urethane (meth) acrylate oligomer, epoxy ( Methyl) acrylate oligomer, pure (meth) acrylate oligomer, amino (meth) acrylate oligomer, organic fluorene (meth) acrylate oligomer, and polyester (methyl) At least one of the acrylate oligomers, the photosensitive oligomer may comprise a single oligomer composition or two or more oligomers, and the type of the oligomer component is not limited.

所述之反應性單體係含有一未飽和雙鍵,且因官能基的不同,而產生單官能基反應性單體及多官能基反應性單體。其中,該單官能基反應性單體係例如,月桂酸丙烯酸酯(lauryl acrylate)、硬酸酯丙烯酸酯(stearyl acrylate)或苄基丙烯酸酯(benzyl acrylate);該多官能基反應性單體係例如,乙二醇二甲基丙烯酸酯(ethylene glycol dimethacrylate)、乙氧化雙酚A二丙烯酸酯(ethoxylated bisphenol-A diacrylate)、1,4-丁二醇二丙烯酸酯(1,4-butanediol diacrylate)、丙氧化甘油三丙烯酸酯 (propoxylated glyceryl triacrylate)、季戊四醇三丙烯酸酯(pentaerythritol triacrylate)、乙氧化季戊四醇四丙烯酸酯(ethoxylated pentaerythritol tetraacrylate)或二季戊四醇六丙烯酸酯(dipentaerytjritol hexaacrylate)。再者,上述各種單體可單獨使用,亦可結合兩種或多種使用。The reactive single system contains an unsaturated double bond and, depending on the functional group, produces a monofunctional reactive monomer and a polyfunctional reactive monomer. Wherein the monofunctional reactive single system is, for example, lauryl acrylate, stearyl acrylate or benzyl acrylate; the polyfunctional reactive single system For example, ethylene glycol dimethacrylate, ethoxylated bisphenol-A diacrylate, 1,4-butanediol diacrylate Propoxyglycerol triacrylate (propoxylated glyceryl triacrylate), pentaerythritol triacrylate, ethoxylated pentaerythritol tetraacrylate or dipentaerytjritol hexaacrylate. Further, the above various monomers may be used singly or in combination of two or more.

所述之氟化樹脂係為含氟素結構單體聚合而成,其材質係為單一種類單體聚合或至少任二種類單體聚合而成,且其材質種類係例如,四氟乙烯(tetrafluoro ethylene)、偏二氟乙烯(vinylidene fluoride)、六氟丙烯(hexafluoropropylene)及全氟甲基乙烯基醚(perfluoromethyl vinylether)等,又該聚合方式可為乳化聚合或總體聚合。The fluorinated resin is obtained by polymerizing a fluorinated structural monomer, and the material thereof is a single type of monomer polymerization or at least two kinds of monomers, and the material type thereof is, for example, tetrafluoroethylene (tetrafluoroethylene). Ethylene), vinylidene fluoride, hexafluoropropylene, and perfluoromethyl vinylether, and the polymerization method may be emulsion polymerization or overall polymerization.

再者,該氟化樹脂係為粉體,其粒徑為0.1um至100um。若其粒徑小於0.1um,則吸油量高且作業性不佳;若其粒徑粒徑大於100um,則印刷成膜表面將過於粗糙。又,該氟化樹脂粉(成品)之來源例如,杜邦(DU PONT)Zonyl® MP-1200,MP1300等系列之PTFE POWDER、明尼蘇達礦業(3M)Dyneon TF9207,TF9205等系列之PTFE POWDER、或KITAMURA KTL-4N與KTL-8N之PTFE POWDER。Further, the fluorinated resin is a powder having a particle diameter of 0.1 um to 100 um. If the particle diameter is less than 0.1 um, the oil absorption amount is high and workability is poor; if the particle diameter is larger than 100 um, the surface of the printed film formation is too rough. Further, the source of the fluorinated resin powder (finished product) is, for example, DU PONT Zonyl ® MP-1200, MP1300 series PTFE POWDER, Minnesota Mining (3M) Dyneon TF9207, TF9205 series PTFE POWDER, or KITAMURA KTL -4N and KTL-8N PTFE POWDER.

另外,相對於該紫外光固化樹酯100重量份,該氟化樹脂之含量較佳為10至150重量份。若該氟化樹脂之含量太高,容易造成該氟化樹脂分散不均而造成膜面呈針孔,且黏度會偏高,致使作業性不佳;若該氟化樹脂之含量太 低,會造成該保護膜之抗氫氟酸性不佳,而無法達到預期效果。Further, the content of the fluorinated resin is preferably from 10 to 150 parts by weight based on 100 parts by weight of the ultraviolet curable resin. If the content of the fluorinated resin is too high, the fluorinated resin is easily dispersed unevenly, and the film surface is pinhole, and the viscosity is high, resulting in poor workability; if the content of the fluorinated resin is too If it is low, the anti-hydrofluoric acidity of the protective film is not good, and the desired effect cannot be achieved.

所述之光起始劑係為藉由紫外線照射而產生自由基之光聚合起始劑,例如,苯氯乙酮(chloroacetophenone)、對-氨基苯乙酮(a-amino acetophenone)、二苯甲酮(benzoatephenone)、2-苯甲醯基苯甲酸甲酯(methyl-2-benzoyl benzoate)、苄基二甲縮酮(benzyl dimethyl ketal)、羥基苯乙酮(hydroxyl acetophenone)、二乙氧基苯乙酮(diethoxy acetophenone)、塞噸酮(thioxanthone)及安息香雙甲醚(benzyl dimethyl ketal)或安息香醚(benzoin ether)。The photoinitiator is a photopolymerization initiator which generates a radical by ultraviolet irradiation, for example, chloroacetophenone, a-amino acetophenone, and diphenylene. Benzoatephenone, methyl-2-benzoyl benzoate, benzyl dimethyl ketal, hydroxyl acetophenone, diethoxybenzene Diethoxy acetophenone, thioxanthone and benzyl dimethyl ketal or benzoin ether.

另外,該光起始劑之含量範圍較佳係控制在可使該保護膜維持固化速率以及強度之含量範圍內,因此,相對於該紫外光固化樹酯100重量份,該光起始劑之含量較佳為1至10重量份,更佳為2至8重量份。In addition, the content of the photoinitiator is preferably controlled within a range in which the protective film can maintain a curing rate and a strength, and therefore, the photoinitiator is 100 parts by weight relative to the ultraviolet curable resin. The content is preferably from 1 to 10 parts by weight, more preferably from 2 to 8 parts by weight.

以下藉由特定的具體實施例說明本發明之實施方式,熟悉此技藝之人士可由本說明書所揭示之內容輕易地瞭解本發明之其他優點及功效。須知,本說明書所附圖式所繪示之結構、比例、大小等,均僅用以配合說明書所揭示之內容,以供熟悉此技藝之人士之瞭解與閱讀,並非用以限定本發明可實施之限定條件,故不具技術上之實質意義,任何結構之修飾、比例關係之改變或大小之調整,在不影響本發明所能產生之功效及所能達成之目的下,均應仍落 在本發明所揭示之技術內容得能涵蓋之範圍內。The other embodiments of the present invention will be readily understood by those skilled in the art from this disclosure. It is to be understood that the structure, the proportions, the size, and the like of the present invention are intended to be used in conjunction with the disclosure of the specification, and are not intended to limit the invention. The conditions are limited, so it is not technically meaningful. Any modification of the structure, change of the proportional relationship or adjustment of the size should not fall under the influence of the invention and the purpose that can be achieved. It is within the scope of the technical contents disclosed in the present invention.

本發明之保護膜組成物之調配方法,係先將各成分調配攪拌混合或研磨混合成膠狀,再以印刷方式均勻分散於欲保護表面(如觸控面板)上,經固化成膜後,即可得到所需之保護膜。其中,該印刷方式例如,網印印刷、滾輪塗佈、噴塗、轉印印刷或含浸塗佈,但並不限於上述。The method for preparing the protective film composition of the present invention is to first mix and mix the components, or grind and mix them into a gel, and then uniformly disperse them on the surface to be protected (such as a touch panel) by printing, and after solidifying into a film, The desired protective film can be obtained. Here, the printing method is, for example, screen printing, roller coating, spray coating, transfer printing, or impregnation coating, but is not limited thereto.

再者,本發明之保護膜組成物形成於欲保護表面上之厚度為5至200um,較佳為15至120um,更佳為30至80um。若成膜厚度太薄,則成膜抗氫氟酸性不足,無法達到保護及可直接剝除之效果;若成膜厚度太厚,則不符合經濟效益。Further, the protective film composition of the present invention is formed on the surface to be protected to have a thickness of 5 to 200 μm, preferably 15 to 120 μm, more preferably 30 to 80 μm. If the film thickness is too thin, the film formation is resistant to hydrogen fluoride, and the effect of protection and direct stripping cannot be achieved; if the film thickness is too thick, it is not economical.

又,該固化製程係使該保護膜組成物經由紫外光固化成膜。Further, the curing process causes the protective film composition to be cured by ultraviolet light to form a film.

另外,使該欲保護表面進行蝕刻製程後,若欲撕除固化後之保護膜,可用膠帶黏貼撕除該保護膜,而不會殘留樹脂於欲保護表面上;亦可留在欲保護表面上而不必撕除。In addition, after the surface to be protected is subjected to an etching process, if the cured protective film is to be removed, the protective film may be peeled off with a tape, without leaving the resin on the surface to be protected; or may be left on the surface to be protected. And don't have to tear it up.

請參閱表一,係為調配各材料之實施例與比較例,其中,實施例以「實」表示,比較例以「比」表示,特此述明。Please refer to Table 1 for the examples and comparative examples of the materials. The examples are shown in "real" and the comparative examples are shown as "ratio".

於表一中:In Table 1:

感光性寡聚物1係為脂肪族聚氨酯(甲基)丙烯酸酯(6131,來自長興化工)。The photosensitive oligomer 1 is an aliphatic urethane (meth) acrylate (6131 from Changxing Chemical).

感光性寡聚物2係為聚氨酯(甲基)丙烯酸酯(Doublemer 850,來自雙鍵化學)。The photosensitive oligomer 2 is a urethane (meth) acrylate (Doublemer 850, derived from double bond chemistry).

感光性寡聚物3係為環氧(甲基)丙烯酸酯(6233,來自長興化工)。Photosensitive oligomer 3 is epoxy (meth) acrylate (6233 from Changxing Chemical).

反應性單體1係為硬酸酯丙烯酸酯(stearyl acrylate)。The reactive monomer 1 is a stearyl acrylate.

反應性單體2係為乙二醇二甲基丙烯酸酯(ethylene glycol dimethacrylate)。The reactive monomer 2 is ethylene glycol dimethacrylate.

反應性單體3係為季戊四醇三丙烯酸酯(pentaerythritol triacrylate)。The reactive monomer 3 is pentaerythritol triacrylate.

氟化樹脂粉1係為MP-1200(來自杜邦)。The fluorinated resin powder 1 is MP-1200 (from DuPont).

氟化樹脂粉2係為TF9205(來自明尼蘇達礦業)。Fluorinated resin powder 2 is TF9205 (from Minnesota Mining).

於本實驗中,所使用之光起始劑係為二苯甲酮(benzoatephenone)。In this experiment, the photoinitiator used was benzoatephenone.

請參閱表二,係為成膜之評估測試。其中,測試狀態之膜厚為70至80um,環境乾燥條件為1000mj/cm2 ,測試項目如下:Please refer to Table 2 for the evaluation test of film formation. Among them, the film thickness in the test state is 70 to 80 um, and the environmental drying condition is 1000 mj/cm 2 . The test items are as follows:

抗氫氟酸性:於室溫(15至30℃)下,將覆有保護膜之觸控面板浸泡於氫氟酸濃度10%(wt%)之溶液中1小時,若保護膜未脫落,且側蝕深度小於300um係為良好,以「○」表示;若保護膜剝落,且側蝕深度大於300um則為不良,以「×」表示。其中,所使用之檢查儀器型號為:金像顯微鏡HM-2000;其放大倍數為100倍。Anti-hydrofluoric acid: The touch panel coated with the protective film is immersed in a solution of hydrofluoric acid concentration of 10% (wt%) for 1 hour at room temperature (15 to 30 ° C), if the protective film does not fall off, and The side etching depth is less than 300 um, which is good, and is indicated by "○". If the protective film is peeled off and the side etching depth is more than 300 um, it is bad, and it is represented by "x". Among them, the type of inspection instrument used is: Golden Image Microscope HM-2000; its magnification is 100 times.

黏著力:到試保護膜從觸控面板之導電膜上撕除的拉力值(g/cm)。Adhesion: The tensile force (g/cm) of the protective film peeled off from the conductive film of the touch panel.

撕裂強度:測試保護膜撕裂時的拉力值(g/cm)。其中,所使用之測試拉力秤之製造公司為:大場計器製作所。Tear strength: The tensile force value (g/cm) at which the protective film was torn was tested. Among them, the manufacturer of the test rally scale used is: the large field meter manufacturer.

如第1圖所示,係為黏著力及撕裂強度測試之步驟(a)至(e)示意圖。將保護膜1拉長,如步驟(a)至(c)所示;當拉至極限時,該保護膜1會斷裂,如步驟(d)至(e)所示。其中,測試用之保護膜1之尺寸並不限於步驟(a)中所示。As shown in Fig. 1, it is a schematic diagram of steps (a) to (e) of the adhesion and tear strength test. The protective film 1 is elongated as shown in steps (a) to (c); when pulled to the limit, the protective film 1 is broken as shown in steps (d) to (e). Here, the size of the protective film 1 for testing is not limited to that shown in the step (a).

由表二可知,實施例1至5係加入氟化樹脂,故經氫氟酸蝕刻測試,該保護膜不會腐蝕劣化及剝落,且側蝕深度不會超過300um,故保護膜下之導電膜(或玻璃)不會受到侵蝕。It can be seen from Table 2 that Examples 1 to 5 are added with a fluorinated resin, so the protective film will not corrode and degrade under the hydrofluoric acid etching test, and the side etching depth will not exceed 300 um, so the conductive film under the protective film (or glass) will not be eroded.

相對地,比較例1至3並未加入氟化樹脂,故經氫氟酸蝕刻測試,該保護膜將因腐蝕劣化而剝落,造成保護膜下之導電膜(或玻璃)受到侵蝕。On the other hand, in Comparative Examples 1 to 3, the fluorinated resin was not added, so that the protective film was peeled off due to corrosion deterioration by the hydrofluoric acid etching test, and the conductive film (or glass) under the protective film was eroded.

另外,於本發明之保護膜組成物中,復可適當加入添加劑,如黏著促進劑、搖變劑、熱安定劑、填充料、顏料或染料等,該添加劑之含量可視特性需求調整,並無特別限制。In addition, in the protective film composition of the present invention, an additive such as an adhesion promoter, a rocking agent, a heat stabilizer, a filler, a pigment or a dye may be appropriately added, and the content of the additive may be adjusted according to the characteristic requirements, and Special restrictions.

上述實施例係用以例示性說明本發明之原理及其功效,而非用於限制本發明。任何熟習此項技藝之人士均可在不違背本發明之精神及範疇下,對上述實施例進行修改。因此本發明之權利保護範圍,應如後述之申請專利範圍所列。The above embodiments are intended to illustrate the principles of the invention and its effects, and are not intended to limit the invention. Any of the above-described embodiments may be modified by those skilled in the art without departing from the spirit and scope of the invention. Therefore, the scope of protection of the present invention should be as set forth in the appended claims.

1‧‧‧保護膜1‧‧‧Protective film

第1圖係為本發明之保護膜組成物之黏著力與撕裂強 度測試之步驟(a)至(e)示意圖。Figure 1 is a diagram showing the adhesion and tear of the protective film composition of the present invention. A schematic diagram of steps (a) to (e) of the degree test.

1‧‧‧保護膜1‧‧‧Protective film

Claims (14)

一種蝕刻製程中保護膜組成物之使用方法,係包括:於待進行蝕刻製程之物件表面以印刷方式分散保護膜組成物,其中,該保護膜組成物係包括紫外光固化樹酯,係包含感光性寡聚物及反應性單體;氟化樹脂,其中,相對於該紫外光固化樹酯100重量份,該氟化樹脂之含量為5至200重量份;以及光起始劑,其中,相對於該紫外光固化樹酯100重量份,該光起始劑之含量係為0.1至20重量份;固化該保護膜組成物,以形成保護膜;以及使該物件進行該蝕刻製程。 A method for using a protective film composition in an etching process, comprising: dispersing a protective film composition on a surface of an object to be subjected to an etching process, wherein the protective film composition comprises an ultraviolet curing resin, and comprises a photosensitive film And a reactive monomer; a fluorinated resin, wherein the fluorinated resin is contained in an amount of 5 to 200 parts by weight based on 100 parts by weight of the ultraviolet curable resin; and a photoinitiator, wherein The photoinitiator is contained in an amount of 0.1 to 20 parts by weight based on 100 parts by weight of the ultraviolet curable resin; the protective film composition is cured to form a protective film; and the article is subjected to the etching process. 如申請專利範圍第1項所述之蝕刻製程中保護膜組成物之使用方法,其中,該感光性寡聚物係選自聚氨酯(甲基)丙烯酸酯寡聚物、環氧(甲基)丙烯酸酯寡聚物、純(甲基)丙烯酸酯寡聚物、胺基(甲基)丙烯酸酯寡聚物、有機矽(甲基)丙烯酸酯寡聚物及聚酯(甲基)丙烯酸酯寡聚物所組成群組之至少一者。 The method for using a protective film composition in an etching process according to the first aspect of the invention, wherein the photosensitive oligomer is selected from the group consisting of a urethane (meth) acrylate oligomer and an epoxy (meth) acrylate. Ester oligomer, pure (meth) acrylate oligomer, amino (meth) acrylate oligomer, organic fluorene (meth) acrylate oligomer and polyester (meth) acrylate oligomer At least one of the group of objects. 如申請專利範圍第1項所述之蝕刻製程中保護膜組成物之使用方法,其中,該反應性單體係選自單官能基反應性單體及多官能基反應性單體所組成群組之至少一者。 The method for using a protective film composition in an etching process according to claim 1, wherein the reactive single system is selected from the group consisting of a monofunctional reactive monomer and a polyfunctional reactive monomer. At least one of them. 如申請專利範圍第1項所述之蝕刻製程中保護膜組成物之使用方法,其中,該氟化樹脂係為含氟素結構單體聚合而成。 The method for using a protective film composition in an etching process according to the first aspect of the invention, wherein the fluorinated resin is obtained by polymerizing a fluorine-containing structural monomer. 如申請專利範圍第1項所述之蝕刻製程中保護膜組成物之使用方法,該氟化樹脂之材質係為單一種類單體聚合或至少任二種類單體共聚合而成。 The method for using the protective film composition in the etching process according to claim 1, wherein the material of the fluorinated resin is a single type of monomer polymerization or a copolymerization of at least two types of monomers. 如申請專利範圍第1項所述之蝕刻製程中保護膜組成物之使用方法,該氟化樹脂係為粉體。 A method of using a protective film composition in an etching process as described in claim 1, wherein the fluorinated resin is a powder. 如申請專利範圍第6項所述之蝕刻製程中保護膜組成物之使用方法,其中,該粉體之粒徑範圍係為0.1um至100um。 The method for using a protective film composition in an etching process as described in claim 6, wherein the powder has a particle size ranging from 0.1 um to 100 um. 如申請專利範圍第1項所述之蝕刻製程中保護膜組成物之使用方法,其中,該光起始劑係為藉由紫外線照射而產生自由基之光聚合起始劑。 The method for using a protective film composition in an etching process according to the first aspect of the invention, wherein the photoinitiator is a photopolymerization initiator which generates a radical by ultraviolet irradiation. 如申請專利範圍第1項所述之蝕刻製程中保護膜組成物之使用方法,復包括於該蝕刻製程後使用膠帶黏貼撕除該保護膜。 The method for using the protective film composition in the etching process as described in claim 1 is further included in the etching process, and the protective film is peeled off by using a tape. 如申請專利範圍第1項所述之蝕刻製程中保護膜組成物之使用方法,其中,該蝕刻製程係包括使用氫氟酸蝕刻。 The method of using a protective film composition in an etching process as described in claim 1, wherein the etching process comprises etching using hydrofluoric acid. 如申請專利範圍第1項所述之蝕刻製程中保護膜組成物之使用方法,其中,該印刷方式係網印印刷、滾輪塗佈、噴塗、轉印印刷或含浸塗佈。 The method of using a protective film composition in an etching process as described in claim 1, wherein the printing method is screen printing, roller coating, spray coating, transfer printing or impregnation coating. 如申請專利範圍第1項所述之蝕刻製程中保護膜組成物之使用方法,其中,該物件表面係觸碰面板之導電膜表面或導電玻璃表面。 The method of using a protective film composition in an etching process as described in claim 1, wherein the surface of the object touches a surface of the conductive film of the panel or a surface of the conductive glass. 如申請專利範圍第1項所述之蝕刻製程中保護膜組成 物之使用方法,其中,該固化係紫外光照射。 The composition of the protective film in the etching process as described in the first application of the patent scope The method of using the object, wherein the curing is ultraviolet light irradiation. 如申請專利範圍第1項所述之蝕刻製程中保護膜組成物之使用方法,其中,該保護膜組成物形成於該物件表面上之厚度為5至200um。 The method of using a protective film composition in an etching process according to the first aspect of the invention, wherein the protective film composition is formed on the surface of the article to have a thickness of 5 to 200 μm.
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200805441A (en) * 2006-07-13 2008-01-16 Semitool Inc Electro-chemical processor
CN101308347A (en) * 2006-05-17 2008-11-19 株式会社理光 Image forming apparatus and image forming method

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101308347A (en) * 2006-05-17 2008-11-19 株式会社理光 Image forming apparatus and image forming method
TW200805441A (en) * 2006-07-13 2008-01-16 Semitool Inc Electro-chemical processor

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