TWI483653B - 插入式晶片及電漿火炬 - Google Patents

插入式晶片及電漿火炬 Download PDF

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Publication number
TWI483653B
TWI483653B TW100128807A TW100128807A TWI483653B TW I483653 B TWI483653 B TW I483653B TW 100128807 A TW100128807 A TW 100128807A TW 100128807 A TW100128807 A TW 100128807A TW I483653 B TWI483653 B TW I483653B
Authority
TW
Taiwan
Prior art keywords
wafer
nozzle
nozzle member
hole
refrigerant
Prior art date
Application number
TW100128807A
Other languages
English (en)
Chinese (zh)
Other versions
TW201234930A (en
Inventor
Shigeru Sato
Tadashi Hoshino
Original Assignee
Nippon Steel & Sumikin Welding
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel & Sumikin Welding filed Critical Nippon Steel & Sumikin Welding
Publication of TW201234930A publication Critical patent/TW201234930A/zh
Application granted granted Critical
Publication of TWI483653B publication Critical patent/TWI483653B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K10/00—Welding or cutting by means of a plasma
    • B23K10/02—Plasma welding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K37/00—Auxiliary devices or processes, not specially adapted for a procedure covered by only one of the other main groups of this subclass
    • B23K37/003—Cooling means for welding or cutting
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/28—Cooling arrangements
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/341—Arrangements for providing coaxial protecting fluids
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/42—Plasma torches using an arc with provisions for introducing materials into the plasma, e.g. powder or liquid
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/44—Plasma torches using an arc using more than one torch

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mechanical Engineering (AREA)
  • Optics & Photonics (AREA)
  • Plasma Technology (AREA)
  • Arc Welding In General (AREA)
TW100128807A 2011-01-30 2011-08-12 插入式晶片及電漿火炬 TWI483653B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011017342A JP5626994B2 (ja) 2011-01-30 2011-01-30 インサートチップおよびプラズマトーチ

Publications (2)

Publication Number Publication Date
TW201234930A TW201234930A (en) 2012-08-16
TWI483653B true TWI483653B (zh) 2015-05-01

Family

ID=46555802

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100128807A TWI483653B (zh) 2011-01-30 2011-08-12 插入式晶片及電漿火炬

Country Status (4)

Country Link
JP (1) JP5626994B2 (cg-RX-API-DMAC7.html)
KR (1) KR101311042B1 (cg-RX-API-DMAC7.html)
CN (1) CN102615408B (cg-RX-API-DMAC7.html)
TW (1) TWI483653B (cg-RX-API-DMAC7.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5796847B2 (ja) * 2012-03-08 2015-10-21 日鐵住金溶接工業株式会社 インサートチップおよびプラズマトーチ
JP6214048B2 (ja) * 2013-12-06 2017-10-18 日鐵住金溶接工業株式会社 複数電極の溶接トーチ
CN114411086A (zh) * 2021-12-23 2022-04-29 南京威登等离子科技设备有限公司 多喷头等离子表面处理设备
CN119368987B (zh) * 2024-12-27 2025-03-21 浙江劳士顿科技股份有限公司 一种电焊机的冷却装置及其使用方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2756311A (en) * 1954-03-24 1956-07-24 Union Carbide & Carbon Corp High-speed tandem arc working
US6172333B1 (en) * 1999-08-18 2001-01-09 Lincoln Global, Inc. Electric welding apparatus and method
US6265690B1 (en) * 1998-04-03 2001-07-24 Cottin Development Ltd. Plasma processing device for surfaces
CN1726111A (zh) * 2002-12-12 2006-01-25 弗罗纽斯国际有限公司 用于焊炬的导电嘴的保护帽和带有保护帽的焊炬
CN101495263A (zh) * 2006-08-02 2009-07-29 大阳日酸株式会社 串联气体保护金属极电弧焊接方法、该方法中使用的焊接用焊炬及焊接装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6072678A (ja) * 1983-09-28 1985-04-24 Nippon Steel Corp 高速度ア−ク溶接法
JPS60213364A (ja) * 1984-04-06 1985-10-25 Honda Motor Co Ltd プラズマト−チ
US5008511C1 (en) * 1990-06-26 2001-03-20 Univ British Columbia Plasma torch with axial reactant feed
JP2914583B2 (ja) * 1990-11-09 1999-07-05 亮拿 佐藤 プラズマアーク発生装置
JP3714517B2 (ja) * 1999-05-21 2005-11-09 株式会社小松製作所 プラズマトーチ、プラズマトーチ用電極及びその製造方法
AT411972B (de) * 2002-09-18 2004-08-26 Fronius Int Gmbh Brennerkopf für schweissbrenner sowie gasdüse, kontaktdüse und isolierhülse für einen solchen brennerkopf
JP2004298896A (ja) * 2003-03-28 2004-10-28 Jfe Engineering Kk 開先加工方法およびレーザとアークの複合溶接方法
FR2908677B1 (fr) * 2006-11-17 2009-02-20 Air Liquide Procede de soudage par faisceau laser a penetration amelioree
JP2010104996A (ja) * 2008-10-28 2010-05-13 Daihen Corp プラズマ電極及びプラズマミグ溶接トーチ
JP2010120018A (ja) * 2008-11-17 2010-06-03 Daihen Corp プラズマ溶接トーチ
JP4920029B2 (ja) * 2008-12-14 2012-04-18 日鐵住金溶接工業株式会社 インサートチップおよびプラズマトーチ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2756311A (en) * 1954-03-24 1956-07-24 Union Carbide & Carbon Corp High-speed tandem arc working
US6265690B1 (en) * 1998-04-03 2001-07-24 Cottin Development Ltd. Plasma processing device for surfaces
US6172333B1 (en) * 1999-08-18 2001-01-09 Lincoln Global, Inc. Electric welding apparatus and method
CN1726111A (zh) * 2002-12-12 2006-01-25 弗罗纽斯国际有限公司 用于焊炬的导电嘴的保护帽和带有保护帽的焊炬
CN101495263A (zh) * 2006-08-02 2009-07-29 大阳日酸株式会社 串联气体保护金属极电弧焊接方法、该方法中使用的焊接用焊炬及焊接装置

Also Published As

Publication number Publication date
KR20120088508A (ko) 2012-08-08
JP5626994B2 (ja) 2014-11-19
JP2012157868A (ja) 2012-08-23
CN102615408A (zh) 2012-08-01
TW201234930A (en) 2012-08-16
KR101311042B1 (ko) 2013-09-24
CN102615408B (zh) 2014-10-08

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees