TWI477358B - 用於製造化學機械研磨墊研磨層的方法及混合頭組合件 - Google Patents
用於製造化學機械研磨墊研磨層的方法及混合頭組合件 Download PDFInfo
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- TWI477358B TWI477358B TW099108642A TW99108642A TWI477358B TW I477358 B TWI477358 B TW I477358B TW 099108642 A TW099108642 A TW 099108642A TW 99108642 A TW99108642 A TW 99108642A TW I477358 B TWI477358 B TW I477358B
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
- B24D18/0009—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for using moulds or presses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
- B01F27/05—Stirrers
- B01F27/07—Stirrers characterised by their mounting on the shaft
- B01F27/072—Stirrers characterised by their mounting on the shaft characterised by the disposition of the stirrers with respect to the rotating axis
- B01F27/0722—Stirrers characterised by their mounting on the shaft characterised by the disposition of the stirrers with respect to the rotating axis perpendicular with respect to the rotating axis
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
- B01F27/05—Stirrers
- B01F27/07—Stirrers characterised by their mounting on the shaft
- B01F27/072—Stirrers characterised by their mounting on the shaft characterised by the disposition of the stirrers with respect to the rotating axis
- B01F27/0724—Stirrers characterised by their mounting on the shaft characterised by the disposition of the stirrers with respect to the rotating axis directly mounted on the rotating axis
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
- B01F27/05—Stirrers
- B01F27/11—Stirrers characterised by the configuration of the stirrers
- B01F27/112—Stirrers characterised by the configuration of the stirrers with arms, paddles, vanes or blades
- B01F27/1121—Stirrers characterised by the configuration of the stirrers with arms, paddles, vanes or blades pin-shaped
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/181—Preventing generation of dust or dirt; Sieves; Filters
- B01F35/189—Venting, degassing or ventilating of gases, fumes or toxic vapours during mixing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/40—Mounting or supporting mixing devices or receptacles; Clamping or holding arrangements therefor
- B01F35/41—Mounting or supporting stirrer shafts or stirrer units on receptacles
- B01F35/411—Mounting or supporting stirrer shafts or stirrer units on receptacles by supporting only one extremity of the shaft
- B01F35/4111—Mounting or supporting stirrer shafts or stirrer units on receptacles by supporting only one extremity of the shaft at the top of the receptacle
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29B—PREPARATION OR PRETREATMENT OF THE MATERIAL TO BE SHAPED; MAKING GRANULES OR PREFORMS; RECOVERY OF PLASTICS OR OTHER CONSTITUENTS OF WASTE MATERIAL CONTAINING PLASTICS
- B29B7/00—Mixing; Kneading
- B29B7/02—Mixing; Kneading non-continuous, with mechanical mixing or kneading devices, i.e. batch type
- B29B7/06—Mixing; Kneading non-continuous, with mechanical mixing or kneading devices, i.e. batch type with movable mixing or kneading devices
- B29B7/10—Mixing; Kneading non-continuous, with mechanical mixing or kneading devices, i.e. batch type with movable mixing or kneading devices rotary
- B29B7/12—Mixing; Kneading non-continuous, with mechanical mixing or kneading devices, i.e. batch type with movable mixing or kneading devices rotary with single shaft
- B29B7/16—Mixing; Kneading non-continuous, with mechanical mixing or kneading devices, i.e. batch type with movable mixing or kneading devices rotary with single shaft with paddles or arms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29B—PREPARATION OR PRETREATMENT OF THE MATERIAL TO BE SHAPED; MAKING GRANULES OR PREFORMS; RECOVERY OF PLASTICS OR OTHER CONSTITUENTS OF WASTE MATERIAL CONTAINING PLASTICS
- B29B7/00—Mixing; Kneading
- B29B7/74—Mixing; Kneading using other mixers or combinations of mixers, e.g. of dissimilar mixers ; Plant
- B29B7/7404—Mixing devices specially adapted for foamable substances
- B29B7/7409—Mixing devices specially adapted for foamable substances with supply of gas
- B29B7/7414—Mixing devices specially adapted for foamable substances with supply of gas with rotatable stirrer, e.g. using an intermeshing rotor-stator system
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29B—PREPARATION OR PRETREATMENT OF THE MATERIAL TO BE SHAPED; MAKING GRANULES OR PREFORMS; RECOVERY OF PLASTICS OR OTHER CONSTITUENTS OF WASTE MATERIAL CONTAINING PLASTICS
- B29B7/00—Mixing; Kneading
- B29B7/74—Mixing; Kneading using other mixers or combinations of mixers, e.g. of dissimilar mixers ; Plant
- B29B7/7404—Mixing devices specially adapted for foamable substances
- B29B7/7409—Mixing devices specially adapted for foamable substances with supply of gas
- B29B7/7428—Methodical aspects
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29B—PREPARATION OR PRETREATMENT OF THE MATERIAL TO BE SHAPED; MAKING GRANULES OR PREFORMS; RECOVERY OF PLASTICS OR OTHER CONSTITUENTS OF WASTE MATERIAL CONTAINING PLASTICS
- B29B7/00—Mixing; Kneading
- B29B7/80—Component parts, details or accessories; Auxiliary operations
- B29B7/802—Constructions or methods for cleaning the mixing or kneading device
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29B—PREPARATION OR PRETREATMENT OF THE MATERIAL TO BE SHAPED; MAKING GRANULES OR PREFORMS; RECOVERY OF PLASTICS OR OTHER CONSTITUENTS OF WASTE MATERIAL CONTAINING PLASTICS
- B29B7/00—Mixing; Kneading
- B29B7/80—Component parts, details or accessories; Auxiliary operations
- B29B7/84—Venting or degassing ; Removing liquids, e.g. by evaporating components
- B29B7/845—Venting, degassing or removing evaporated components in devices with rotary stirrers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29B—PREPARATION OR PRETREATMENT OF THE MATERIAL TO BE SHAPED; MAKING GRANULES OR PREFORMS; RECOVERY OF PLASTICS OR OTHER CONSTITUENTS OF WASTE MATERIAL CONTAINING PLASTICS
- B29B7/00—Mixing; Kneading
- B29B7/80—Component parts, details or accessories; Auxiliary operations
- B29B7/88—Adding charges, i.e. additives
- B29B7/90—Fillers or reinforcements, e.g. fibres
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29B—PREPARATION OR PRETREATMENT OF THE MATERIAL TO BE SHAPED; MAKING GRANULES OR PREFORMS; RECOVERY OF PLASTICS OR OTHER CONSTITUENTS OF WASTE MATERIAL CONTAINING PLASTICS
- B29B7/00—Mixing; Kneading
- B29B7/80—Component parts, details or accessories; Auxiliary operations
- B29B7/88—Adding charges, i.e. additives
- B29B7/94—Liquid charges
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C70/00—Shaping composites, i.e. plastics material comprising reinforcements, fillers or preformed parts, e.g. inserts
- B29C70/58—Shaping composites, i.e. plastics material comprising reinforcements, fillers or preformed parts, e.g. inserts comprising fillers only, e.g. particles, powder, beads, flakes, spheres
- B29C70/66—Shaping composites, i.e. plastics material comprising reinforcements, fillers or preformed parts, e.g. inserts comprising fillers only, e.g. particles, powder, beads, flakes, spheres the filler comprising hollow constituents, e.g. syntactic foam
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/30—Driving arrangements; Transmissions; Couplings; Brakes
- B01F2035/35—Use of other general mechanical engineering elements in mixing devices
- B01F2035/351—Sealings
- B01F2035/3513—Sealings comprising a stationary member in frontal contact with a movable member
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/30—Driving arrangements; Transmissions; Couplings; Brakes
- B01F2035/35—Use of other general mechanical engineering elements in mixing devices
- B01F2035/352—Bearings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/181—Preventing generation of dust or dirt; Sieves; Filters
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29B—PREPARATION OR PRETREATMENT OF THE MATERIAL TO BE SHAPED; MAKING GRANULES OR PREFORMS; RECOVERY OF PLASTICS OR OTHER CONSTITUENTS OF WASTE MATERIAL CONTAINING PLASTICS
- B29B7/00—Mixing; Kneading
- B29B7/74—Mixing; Kneading using other mixers or combinations of mixers, e.g. of dissimilar mixers ; Plant
- B29B7/7471—Mixers in which the mixing takes place at the inlet of a mould, e.g. mixing chambers situated in the mould opening
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Description
本發明通常係關於化學機械研磨之領域。尤其,本發明係有關用於製造具減少之載氣包體缺陷(entrained gas inclusion defect)之研磨墊研磨層的方法以及用於製造該研磨墊研磨層之混合頭組合件。
於積體電路及其他電子裝置之製造中,係將多層之導體材料、半導體材料及介電材料沉積於半導體晶圓之表面上或自半導體晶圓之表面移除。可藉由多種沉積技術沉積導體材料、半導體材料及介電材料之薄層。現代製程之普遍沉積技術係包括物理氣相沉積(PVD)(亦稱為濺鍍)、化學氣相沉積(CVD)、電漿輔助化學氣相沉積(PECVD)以及電化學電鍍(ECP)。
隨著多層之材料被依序沉積並移除,該晶圓之最上方表面變得不平整。因為後續之半導體加工(如金屬化)需要該晶圓具有平坦表面,所以該晶圓需經平坦化。平坦化係適用於移除非所欲之表面形貌及表面缺陷,如粗糙表面、黏聚之材料、晶格損壞、刮痕以及被污染之層或材料。
化學機械平坦化,或化學機械研磨(CMP),是用於平坦化基板如半導體晶圓之一般技術。於傳統CMP中,係將晶圓安裝於載體組合件上並放置為與CMP設備中的研磨墊接觸。該載體組合件係對該晶圓提供可控制之壓力,將其壓向該研磨墊。藉由外部驅動力使該墊相對於該晶圓移動(如轉動)。於此同時,在該晶圓與該研磨墊之間提供化學組成物("漿料")或其他研磨溶液。因此,藉由該墊表面及漿料之化學及機械作用研磨該晶圓表面並使其平坦化。
萊因哈特(Reinhardt)等人於美國專利案第5,578,362號中揭露了該技藝中已知之例示性研磨墊。萊因哈特之該化學機械研磨墊研磨層係包含聚合物基質,且於整個聚合物基質中分散有微球。通常,該微球係於諸如質量流饋料輸送系統中與液體聚合物材料摻合及混合,再轉移至模具中進行硬化。隨後切割模製物件以形成研磨墊。不幸的是,以此方式形成之研磨墊研磨層可能具有不期望之載氣包體缺陷(亦即,於該研磨墊研磨層中含載著氣泡,其將密度變化引入該研磨墊中)。
載氣包體缺陷為在將聚合物材料之混合物引入模具之前,載氣自該聚合物材料之混合物不完全排出的結果。此等載氣包體缺陷係不期望者,因為其可能造成一層研磨墊研磨層與下一層研磨墊研磨層間非預期且也許有害的研磨效能差異。此外,此等載氣包體缺陷可能於給定之研磨墊研磨層的壽命期內對該研磨墊研磨層之研磨效能產生負面影響(亦即,於研磨過程中及隨著該研磨層之調整(corditioning)蝕去表面材料)。先前技術之製造設備及方法係不足以且無法滿足CMP工業中日益增加之品質控制需求。
因此,亟需用於形成具有最小氣包體缺陷之化學機械研磨墊研磨層的裝置及有效方法。
於本發明之一態樣中,係提供用於形成化學機械研磨墊研磨層之方法,該方法包括:提供模具;提供液體預聚物材料;提供複數個位於惰性載劑氣體中之微球;提供惰性沖洗氣體;提供具有殼體(housing)之混合頭組合件,該殼體具有至少一個殼體入口及殼體出口;提供具有延伸出該殼體外的軸之旋轉混合器;其中,該軸具有貫通之通道,該貫通之通道具有軸通道入口及軸通道出口以促使該惰性載劑氣體及該惰性沖洗氣體自該殼體排出;在該旋轉混合器之作用下,於該殼體內組合該液體預聚物材料與該複數個位於惰性載劑氣體中之微球,形成液體預聚物與微球之混合物;將該惰性沖洗氣體供應至該殼體;透過該軸通道自該殼體排出該惰性載劑氣體及該惰性沖洗氣體;透過該殼體出口將該液體預聚物與微球之混合物轉移至該模具;使該液體預聚物與微球之混合物於該模具內固化以形成塊狀物(cake);以及自該塊狀物獲得化學機械研磨墊研磨層。
於本發明之另一態樣中,係提供用於形成化學機械研磨墊研磨層之混合頭組合件,該混合頭組合件包括:具有殼體入口及殼體出口之混合頭組合件殼體;安裝於該殼體之曲徑軸封(labyrinth seal)(其中該曲徑軸封係包含:具有惰性沖洗氣體入口及氣體出口之密封塊(seal block);裝配於該密封塊之嚙合定子(engaging stator);插置於該密封塊與該嚙合定子之間的嚙合定子o-環,其中,該嚙合定子o-環將該嚙合定子固定至該密封塊);具有具軸通道之軸的旋轉混合器,其中,該軸通道係具有設置於該殼體內之通道入口及與該密封塊氣體出口呈氣體流動連通(gas flow communication)之通道出口;裝配於該軸之轉子,其中,該轉子與該嚙合定子嚙合;插置於該轉子與該軸之間的轉子o-環,其中,該轉子o-環將該轉子固定至該軸;第一軸承,具有第一軸承外環、第一軸承內環以及複數個插置於該第一軸承外環與該第一軸承內環之間的第一軸承滾珠;第二軸承,具有第二軸承外環、第二軸承內環以及複數個插置於該第二軸承外環與該第二軸承內環之間的第二軸承滾珠;裝配於該軸之軸套筒;插置於該軸套筒與該軸之間的軸o-環,其中該軸o-環將該軸套筒固定至該軸;以及軸承螺帽;軸承間隔件;液體預聚物材料;複數個微球;以及惰性氣體;其中,該第一軸承外環係緊壓於該密封塊與該嚙合定子之間,該第二軸承外環係壓抵該密封塊,該第二軸承內環係緊抵該軸承螺帽與該軸承間隔件之間,以及該第一軸承內環係緊壓於該軸承間隔件與該轉子之間,因此該旋轉混合器可相對於該密封塊轉動;以及其中,該液體預聚物材料、該複數個微球以及該惰性氣體係置於該殼體內。
本文及後附申請專利範圍中所使用之術語"載氣包體缺陷"係指在化學機械研磨墊研磨層內而不含於微球內(如於Expancel微粒內)之空隙空間。
圖式係提供本發明之較佳混合頭組合件30
之說明。尤其,該圖式係說明包含混合頭組合件殼體35
之混合頭組合件,該殼體係具有至少一個用於接收液體預聚物材料饋料及位於惰性載劑氣體內之微球饋料的原料饋料入口10
。該液體預聚物材料之饋料及該位於惰性載劑氣體內之微球之饋料係視需要經由單一入口10
以例如同心饋料形態饋入該殼體中。該液體預聚物材料之饋料及該位於惰性載劑氣體內之微球之饋料係視需要經由不同入口10
饋入該殼體中。該混合頭組合件殼體35
亦具有殼體出口40
,通過該出口係產生其內分散有微球之液體預聚物材料之產物流。
該混合頭組合件進一步包含安裝於該混合頭組合件殼體35
之曲徑軸封80
。該曲徑軸封80
較佳為放射狀曲徑軸封。該曲徑軸封80
係包含具有惰性沖洗氣體入口70
及氣體出口50
之密封塊85
。該放射狀曲徑軸封80
亦包含裝配於該密封塊85
之嚙合定子84
。嚙合定子o-環120
係插置於該密封塊85
與該嚙合定子84
之間。該嚙合定子o-環之功能係將該嚙合定子84
固定至該密封塊85
。
該混合頭組合件進一步包含旋轉混合器60
。該旋轉混合器60
具有具軸通道66
之軸65
。該軸通道66
係自通道入口67
延伸至通道出口68
。當組裝於該混合頭組合件時,該通道入口67
係設置於該殼體35
內,且該通道出口68
係與該密封塊氣體出口50
呈氣體流動連通。
該混合頭組合件進一步包含裝配於該軸65
之轉子82
。該轉子82
係可滑動地嚙合於該嚙合定子84
。介於該轉子82
與該嚙合定子84
之間的平均間隙較佳為0.300至0.450毫米(mm);更佳為0.330至0.430 mm;最佳為0.360至0.410 mm。轉子o-環140
係插置於該轉子82
與該軸65
之間。該轉子o-環140
之功能係將該轉子82
固定至該軸65
。
該混合頭組合件進一步包含至少一個軸承。該至少一個軸承較佳為密封軸承。該混合頭組合件較佳係進一步包含第一軸承95
及第二軸承90
。該第一軸承95
與該第二軸承90
較佳係彼此共軸對準,且沿著該軸65
分隔開來。該第一軸承95
係具有第一軸承外環98
、第一軸承內環96
及複數個第一軸承滾珠97
,其中該複數個第一軸承滾珠97
係插置於該第一軸承外環98
與該第一軸承內環96
之間,因此該第一軸承內環96
可相對於該第一軸承外環98
於一軸上轉動。該第二軸承90
係具有第二軸承外環92
、第二軸承內環94
及複數個第二軸承滾珠93
,其中該複數個第二軸承滾珠93
係插置於該第二軸承外環92
與該第二軸承內環94
之間,因此該第二軸承內環94
可相對於該第二軸承外環92
於一軸上轉動。
於較佳之混合頭組合件30
形態中,該第一軸承95
及該第二軸承90
係使用軸承螺帽130
、軸套筒100
及軸承間隔件110
併入該混合頭組合件30
中。該軸套筒100
係裝配於該軸65
。軸o-環150
係插置於該軸套筒100
與該軸65
之間。該軸o-環150
之功能係將該軸套筒100
固定至該軸65
。該軸承間隔件110
係於該軸套筒100
上滑動。該第一軸承95
係配置於該混合頭組合件30
中,以使該第一軸承內環96
與固定於該軸65
之該轉子82
相匹配,其中,該第一軸承內環96
係插置於該轉子82
與該軸承間隔件110
之間。該第一軸承外環98
係與該密封塊85
及該嚙合定子84
相匹配。該第二軸承90
係配置於該混合頭組合件30
中,以使該第二軸承外環92
與該密封塊85
相匹配。該第二軸承內環94
係與該軸套筒100
相匹配,且係插置於該軸承間隔件110
與該軸承螺帽130
之間。該軸承螺帽130
較佳為在該混合頭組合件之使用過程中抵抗鬆動之鎖定螺帽(locknut)。或者,該軸承螺帽130
可使用諸如黏著劑(如Loctite®
)、梢排列(如開口梢、夾針梢)、鎖緊螺帽、鎖緊墊圈(如開口墊圈、盤型墊圈)於適當位置鎖緊,以於該混合頭組合件之使用過程中抵抗或防止鬆動。於此形態中,該旋轉混合器60
可隨意地相對於該密封塊85
旋轉。
在用於製造化學機械研磨墊研磨層之過程中,該混合頭組合件係進一步包含全部設置於該混合頭組合件殼體35
內之液體預聚物材料(圖式中未顯示)、複數個微球(圖式中未顯示)及惰性氣體(圖式中未顯示)。該液體預聚物材料、該複數個微球及該惰性氣體係於該混合頭組合件殼體35
內由該旋轉混合器60
進行攪動。該液體預聚物材料與該複數個微球係於該混合頭組合件殼體35
內混合在一起,同時該惰性氣體(惰性載劑氣體及惰性沖洗氣體之組合)係經由該軸通道66
及該混合頭組合件氣體出口50
排出該混合頭組合件殼體35
。
於製造包含複數個微球之化學機械研磨墊研磨層之過程中,使該複數個微球於惰性氣體中流體化以促進該複數個微球於容器之間傳輸係有益者。為了確保將微球一致且精確地添加至預聚物材料中,具有一致之微球流體化密度(fluidized density)係重要者。彼等熟悉該技藝之人士將認知存在最適之微球流體化密度以促進微球於容器間之傳輸。彼等具有該技藝通常知識之人士亦將認知到將該流體化之複數個微球中的載劑氣體之體積增加至超出該最適流體化密度會造成處理困難(若載劑氣體之濃度過高,可能會阻礙該材料自一個容器轉移至另一容器)。亦不認為增加該流體化之複數個微球中的載劑氣體之體積有益於減少載氣包體缺陷。反之,咸信增加該流體化之複數個微球中的載劑氣體之體積可能會增加載氣包體缺陷的發生率。
已意外發現,於混合液體預聚物與流體化微球之過程中,將惰性沖洗氣體加入該混合頭組合件殼體中,會提升自該混合頭組合件殼體萃取惰性氣體之效能,因此,得以將由組合之液體預聚物與流體化微球所形成之該化學機械研磨墊研磨層中不期望之載氣包體缺陷最小化。該惰性沖洗氣體較佳係加入該混合頭組合件殼體中與該曲徑軸封相鄰之氣相空間(vapor space)。該惰性沖洗氣體更佳係經由介於該嚙合定子於該轉子之間的間隙空間引入該混合頭組合件殼體中。於該旋轉混合器之作用下,係環繞該軸形成渦流。不欲受理論所束縛,咸信惰性沖洗氣體流入該混合頭組合件殼體中係協助安定環繞該軸所形成之渦流,因而增強透過該軸通道自該混合頭組合件殼體排氣。
於本發明之某些具體實施例中,形成化學機械研磨墊研磨層之方法係包括:提供模具;提供液體預聚物材料;提供複數個位於惰性載劑氣體中之微球;提供惰性沖洗氣體;提供具有殼體之混合頭組合件,該殼體具有殼體入口及殼體出口;提供旋轉混合器,其具有延伸出該殼體外的軸、轉動該旋轉混合器之驅動器;其中,該軸具有貫通之通道,該貫通之通道具有軸入口及軸出口以促使該惰性載劑氣體及該惰性沖洗氣體自該殼體排出;在該旋轉混合器之作用下,於該殼體內組合該液體預聚物材料與該複數個位於惰性載劑氣體中之微球,形成液體預聚物與微球之混合物;將該惰性沖洗氣體供應至該殼體;透過該軸通道自該殼體排出該惰性載劑氣體及該惰性沖洗氣體;透過該殼體出口將該液體預聚物與微球之混合物轉移至該模具;使該液體預聚物與微球之混合物於該模具內固化以形成塊狀物;以及自該塊狀物獲得化學機械研磨墊研磨層。該旋轉混合器較佳係以1,000至10,000 rpm,更佳2,500至6,000 rpm,最佳3,000至4,000 rpm之速度轉動。該惰性沖洗氣體較佳係經由與該旋轉混合器軸聯結之封口以200至30,000立方公分(cm3
)/分鐘(min.),更佳1,000至20,000 cm3
/min.,最佳3,000至14,000 cm3
/min.之流速供應至該殼體。較佳地,相較於使用與本發明之方法相同但不提供該惰性沖洗氣體之製程所生產之塊狀物,使用本發明之方法所生產之塊狀物係含有較少之載氣包體缺陷。更佳地,相較於使用與本發明之方法相同但不提供該惰性沖洗氣體之製程所生產之塊狀物,使用本發明之方法所生產之塊狀物係含有少於前者至少20%之載氣包體缺陷。最佳地,相較於使用與本發明之方法相同但不提供該惰性沖洗氣體之製程所生產之塊狀物,使用本發明之方法所生產之塊狀物係含有少於前者至少50%之載氣包體缺陷。於此等具體實施例之某些態樣中,該方法視需要進一步包含將該塊狀物切成複數個化學機械研磨墊研磨層。
於本發明之某些具體實施例中,形成化學機械研磨墊研磨層之方法係包括:提供模具;提供液體預聚物材料;提供複數個位於惰性載劑氣體中之微球;提供惰性沖洗氣體;提供具有殼體之混合頭組合件,該殼體具有至少一個(較佳至少兩個)殼體入口及殼體出口;提供旋轉混合器,其具有延伸出該殼體外的軸、轉動該旋轉混合器之驅動器;其中,該軸具有貫通之通道,該貫通之通道具有軸入口及軸出口以促使該惰性載劑氣體及該惰性沖洗氣體自該殼體排出;提供曲徑軸封,其中,該曲徑軸封係與該殼體接合,且其中該軸延伸通過該曲徑軸封;透過該曲徑軸封將該惰性沖洗氣體饋入該殼體中;在該旋轉混合器之作用下,於該殼體內組合該液體預聚物材料與該複數個位於惰性載劑氣體中之微球,形成液體預聚物與微球之混合物;將該惰性沖洗氣體供應至該殼體;透過該軸通道自該殼體排出該惰性載劑氣體及該惰性沖洗氣體;透過該殼體出口將該液體預聚物與微球之混合物轉移至該模具;使該液體預聚物與微球之混合物於該模具內固化以形成塊狀物;以及自該塊狀物獲得化學機械研磨墊研磨層。該旋轉混合器較佳係以1,000至10,000 rpm,更佳2,500至6,000 rpm,最佳3,000至4,000 rpm之速度轉動。該惰性沖洗氣體較佳係經由該旋轉混合器軸聯結之密口以200至30,000 cm3
/min.,更佳1,000至20,000 cm3
/min.,最佳3,000至14,000 cm3
/min.之流速供應至該殼體。較佳地,相較於使用與本發明之方法相同但不提供該惰性沖洗氣體之製程所生產之塊狀物,使用本發明之方法所生產之塊狀物係含有較少之載氣包體缺陷。更佳地,相較於使用與本發明之方法相同但不提供該惰性沖洗氣體之製程所生產之塊狀物,使用本發明之方法所生產之塊狀物係含有少於前者至少20%之載氣包體缺陷。最佳地,相較於使用與本發明之方法相同但不提供該惰性沖洗氣體之製程所生產之塊狀物,使用本發明之方法所生產之塊狀物係含有少於前者至少50%之載氣包體缺陷。該曲徑軸封較佳為放射狀曲徑軸封。用於本發明之較佳放射狀曲徑軸封係包括固定於該軸之轉子、固定於密封塊之嚙合定子、以及至少一個具有固定於該密封塊之外環與固定於該軸之內環的軸承。於此等具體實施例之某些態樣中,該方法視需要進一步包括將該塊狀物切成複數個化學機械研磨墊研磨層。
用於本發明之液體預聚物材料較佳為含有聚異氰酸酯之材料。更佳為聚異氰酸酯(如二異氰酸酯)與含有羥基之材料的反應產物。舉例而言,較佳之聚異氰酸酯係包括亞甲基雙4,4’-環己基-異氰酸酯;環己烷二異氰酸酯;異佛酮二異氰酸酯;六亞甲基二異氰酸酯;伸丙基-1,2-二異氰酸酯;四亞甲基-1,4-二異氰酸酯;1,6-六亞甲基-二異氰酸酯;十二烷-1,12-二異氰酸酯;環丁烷-1,3-二異氰酸酯;環己烷-1,3-二異氰酸酯;環己烷-1,4-二異氰酸酯;1-異氰酸基-3,3,5-三甲基-5-異氰酸基甲基環己烷;甲基伸環己基二異氰酸酯;六亞甲基二異氰酸酯之三異氰酸酯;2,4,4-三甲基-1,6-己烷二異氰酸酯之三異氰酸酯;六亞甲基二異氰酸酯之異氰酸酯二聚物(urtdione);伸乙基二異氰酸酯;2,2,4-三甲基六亞甲基二異氰酸酯;2,4,4-三-甲基六亞甲基二異氰酸酯;二環己基甲烷二異氰酸酯;及其組合。最佳之聚異氰酸酯為脂肪族且具有少於14%未反應之異氰酸酯基者。
用於本發明之含有羥基之材料較佳為多元醇。例示性多元醇係包括,舉例而言,聚醚多元醇、羥基封端之聚丁二烯(包括部份及完全氫化之衍生物)、聚酯多元醇、聚己內酯多元醇、聚碳酸酯多元醇、及其混合物。
較佳之多元醇係包括聚醚多元醇。聚醚多元醇之實例係包括聚四亞甲基醚二醇("PTMEG")、聚乙烯丙二醇(polyethylene propylene glycol)、聚氧丙烯二醇(polyoxypropylene glycol)、及其混合物。該烴鏈可具有飽和或不飽和鍵以及經取代或未經取代之芳香族及環狀基團。本發明之多元醇較佳係包括PTMEG。適宜之聚酯多元醇係包括,但不限於,聚己二酸乙二醇酯二醇;聚己二酸丁二醇酯二醇;聚己二酸乙二醇丙二醇酯二醇(polyethylene propylene adipate glycol);鄰苯二甲酸酯-1,6-己二醇;聚(己二酸六亞甲基酯)二醇;及其混合物。該烴鏈可具有飽和或不飽和鍵,或經取代或未經取代之芳香族及環狀基團。適宜之聚己內酯多元醇係包括,但不限於,1,6-己二醇起始之聚己內酯;二乙二醇起始之聚己內酯;三羥甲基丙烷起始之聚己內酯;新戊基二醇起始之聚己內酯;1,4-丁二醇起始之聚己內酯;PTMEG起始之聚己內酯;及其混合物。該烴鏈可具有飽和或不飽和鍵,或經取代或未經取代之芳香族及環狀基團。適宜之聚碳酸酯係包括,但不限於,聚對苯二甲酸酯碳酸酯及聚(碳酸六亞甲基酯)二醇。
適用於本發明之微球係包括聚合物微球,如聚乙烯醇、果膠、聚乙烯基吡咯烷酮、羥基乙基纖維素、甲基纖維素、羥丙基甲基纖維素、羧甲基纖維素、羥基丙基纖維素、聚丙烯酸、聚丙烯醯胺、聚乙二醇、聚羥基醚丙烯酸酯(polyhydroxyetheracrylite)、澱粉、馬來酸共聚物、聚環氧乙烷、聚胺酯、環糊精、及其組合(如來自瑞典松茲瓦爾(Sundsvall)之Akzo Nobel公司的ExpancelTM
)。該微球可藉由諸如接枝(branching)、嵌段及交聯而經化學修飾以改變其溶解性、溶脹性(swelling)及其他性質。該微球較佳係具有少於150微米(μm)之平均直徑,更佳少於50μm之平均直徑。該微球最佳係具有少於15μm之平均直徑。注意,該微球之平均直徑可變且可使用具有不同尺寸之微球或不同微球之混合物。用於該微球之最佳材料為丙烯腈與偏二氯乙烯之共聚物。
該液體預聚物材料係進一步包含硬化劑(curing agent)。硬化劑可選自二胺類。適宜之聚二胺係包括一級胺及二級胺兩者。較佳之聚二胺係包括,但不限於,二乙基甲苯二胺("DETDA");3,5-二甲基硫基-2,4-甲苯二胺及其異構物;3,5-二乙基甲苯-2,4-二胺及其異構物(如3,5-二乙基甲苯-2,6-二胺);4,4’-雙-(第二丁基胺基)-二苯基甲烷;1,4-雙-(第二丁基胺基)苯;4,4’-亞甲基-雙-(2-氯苯胺);4,4’-亞甲基-雙-(3-氯-2,6-二乙基苯胺)("MCDEA");聚環氧丁烷-二-對胺基苯甲酸酯;N,N’-二烷基二胺基二苯基甲烷;p,p’-亞甲基二苯胺("MDA");間苯二胺("MPDA");亞甲基-雙-2-氯苯胺("MBOCA");4,4’-亞甲基-雙-(2-氯苯胺)("MOCA");4,4’-亞甲基-雙-(2,6-二乙基苯胺)("MDEA");4,4’-亞甲基-雙-(2,3-二氯苯胺)("MDCA");4,4’-二胺基-3,3’-二乙基-5,5’-二甲基二苯基甲烷;2,2’,3,3’-四氯二胺基二苯基甲烷;二-對胺基苯甲酸三亞甲基二醇酯;及其混合物。該硬化劑較佳係選自3,5-二甲基硫基-2,4-甲苯二胺及其異構物。
硬化劑亦可包括二醇、三醇、四醇及羥基封端之固化劑(curative)。適宜之二醇、三醇、及四醇群組係包括乙二醇;二乙二醇;聚乙二醇;丙二醇;聚丙二醇;較低分子量之聚四亞甲基醚二醇;1,3-雙(2-羥基乙氧基)苯;1,3-雙-[2-(2-羥基乙氧基)乙氧基]苯;1,3-雙-{2-[2-(2-羥基乙氧基)乙氧基]乙氧基}苯;1,4-丁二醇;1,5-戊二醇;1,6-己二醇;間苯二酚-二-(β-羥基乙基)醚;氫醌-二-(β-羥基乙基)醚;及其混合物。較佳之羥基封端之固化劑係包括1,3-雙(2-羥基乙氧基)苯;1,3-雙-[2-(2-羥基乙氧基)乙氧基]苯;1,3-雙-{2-[2-(2-羥基乙氧基)乙氧基]乙氧基}苯;1,4-丁二醇;及其混合物。
該羥基封端之固化劑及二胺固化劑可包括一個或多個飽和、不飽和、芳香族及環狀基團。此外,該羥基封端之固化劑及二胺固化劑可包括一個或多個鹵素基團。
可使用硬化劑之混合物。
可使用不與該預聚物材料及該微球反應或不干擾該預聚物材料及該微球之任何惰性氣體作為本發明方法中之該惰性載劑氣體。該惰性載劑氣體較佳為二氧化碳。
可使用不與該預聚物材料及該微球反應或不干擾該預聚物材料及該微球之任何惰性氣體作為本發明方法中之該惰性沖洗氣體。該惰性沖洗氣體較佳為二氧化碳。
10...原料饋料入口
30...混合頭組合件
35...混合頭組合件殼體
40...殼體出口
50...氣體出口
60...旋轉混合器
65...軸
66...軸通道
67...通道入口
68...通道出口
70...惰性沖洗氣體入口
80...曲徑軸封
82...轉子
84...嚙合定子
85...密封塊
90...第二軸承
92...第二軸承外環
93...第二軸承滾珠
94...第二軸承內環
95...第一軸承
96...第一軸承內環
97...第一軸承滾珠
98...第一軸承外環
100...軸套筒
110...軸承間隔件
120...嚙合定子o-環
130...軸承螺帽
140...轉子o-環
150...軸o-環
第1圖係說明本發明之混合頭組合件的截面正視圖。
10...原料饋料入口
30...混合頭組合件
35...混合頭組合件殼體
40...殼體出口
50...氣體出口
60...旋轉混合器
65...軸
66...軸通道
67...通道入口
68...通道出口
70...惰性沖洗氣體入口
80...曲徑軸封
82...轉子
84...嚙合定子
85...密封塊
90...第二軸承
92...第二軸承外環
93...第二軸承滾珠
94...第二軸承內環
95...第一軸承
96...第一軸承內環
97...第一軸承滾珠
98...第一軸承外環
100...軸套筒
110...軸承間隔件
120...嚙合定子o-環
130...軸承螺帽
140...轉子o-環
150...軸o-環
Claims (10)
- 一種形成化學機械研磨墊研磨層之方法,係包括:提供模具;提供液體預聚物材料;提供複數個位於惰性載劑氣體中之微球;提供惰性沖洗氣體;提供具有殼體之混合頭組合件,該殼體具有至少一個殼體入口、殼體出口、以及具延伸出該殼體外的軸之旋轉混合器;其中,該軸具有貫通之通道,該貫通之通道具有軸通道入口及軸通道出口以促使該惰性載劑氣體及該惰性沖洗氣體自該殼體排出;在該旋轉混合器之作用下,於該殼體內組合該液體預聚物材料與該複數個位於該惰性載劑氣體中之微球,形成液體預聚物與微球之混合物;將該惰性沖洗氣體供應至該殼體;透過該軸通道自該殼體排出該惰性載劑氣體及該惰性沖洗氣體;透過該殼體出口將該液體預聚物與微球之混合物轉移至該模具;使該液體預聚物與微球之混合物於該模具內固化成塊狀物;以及自該塊狀物獲得化學機械研磨墊研磨層。
- 如申請專利範圍第1項之方法,其中,該液體預聚物材料係包括含有聚異氰酸酯之材料。
- 如申請專利範圍第2項之方法,其中,該液體預聚物材料係進一步包括硬化劑。
- 如申請專利範圍第1項之方法,進一步包括:提供曲徑軸封,其中,該曲徑軸封係與該殼體接合,且其中該軸延伸通過該曲徑軸封;以及透過該曲徑軸封將該惰性沖洗氣體饋入該殼體中。
- 如申請專利範圍第4項之方法,其中,該曲徑軸封為放射狀曲徑軸封。
- 如申請專利範圍第1項之方法,進一步包括:將該塊狀物切成複數個化學機械研磨墊研磨層。
- 如申請專利範圍第1項之方法,其中,該塊狀物係含有與不提供該惰性沖洗氣體之相同製程所製造之塊狀物相比來得較少之載氣包體缺陷。
- 如申請專利範圍第1項之方法,其中,該惰性載劑氣體為二氧化碳。
- 如申請專利範圍第1項之方法,其中,該惰性沖洗氣體為二氧化碳。
- 一種用於形成化學機械研磨墊研磨層之混合頭組合件,係包括:具有殼體入口及殼體出口之混合頭組合件殼體;安裝於該殼體之曲徑軸封,其中,該曲徑軸封係包括:具有惰性沖洗氣體入口及氣體出口之密封塊;裝配於該密封塊之嚙合定子;插置於該密封塊與該嚙合定子之間的嚙合定子o-環,其中,該嚙合定子o-環將該嚙合定子固定至該密封塊;具有具軸通道之軸的旋轉混合器,其中,該軸通道係具有設置於該殼體內之通道入口及與該密封塊氣體出口呈氣體流動連通之通道出口;裝配於該軸之轉子,其中,該轉子與該嚙合定子嚙合;插置於該轉子與該軸之間的轉子o-環,其中,該轉子o-環將該轉子固定至該軸;第一軸承,具有第一軸承外環、第一軸承內環以及複數個插置於該第一軸承外環與該第一軸承內環之間的第一軸承滾珠;第二軸承,具有第二軸承外環、第二軸承內環以及複數個插置於該第二軸承外環與該第二軸承內環之間的第二軸承滾珠;裝配於該軸之軸套筒;插置於該軸套筒與該軸之間的軸o-環,其中,該軸o-環將該軸套筒固定至該軸;以及軸承螺帽;軸承間隔件;液體預聚物材料;複數個微球;以及惰性氣體;其中,該第一軸承外環係緊壓於該密封塊與該嚙合定子之間,該第二軸承外環係壓抵該密封塊,該第二軸承內環係緊壓於該軸承螺帽與該軸承間隔件之間,以及該第一軸承內環係壓抵該軸承間隔件與該轉子之間,因此該旋轉混合器可相對於該密封塊轉動;以及其中,該液體預聚物材料、該複數個微球以及該惰性氣體係置於該殼體內。
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US9463550B2 (en) * | 2014-02-19 | 2016-10-11 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Method of manufacturing chemical mechanical polishing layers |
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US20100269416A1 (en) | 2010-10-28 |
FR2944725B1 (fr) | 2015-03-06 |
CN101870093B (zh) | 2012-11-28 |
KR101669283B1 (ko) | 2016-10-25 |
FR2944725A1 (fr) | 2010-10-29 |
US20110185967A1 (en) | 2011-08-04 |
US7947098B2 (en) | 2011-05-24 |
DE102010018012B4 (de) | 2023-06-29 |
TW201043399A (en) | 2010-12-16 |
US8118897B2 (en) | 2012-02-21 |
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