TWI475758B - Connector and manufacturing method thereof - Google Patents

Connector and manufacturing method thereof Download PDF

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Publication number
TWI475758B
TWI475758B TW099115274A TW99115274A TWI475758B TW I475758 B TWI475758 B TW I475758B TW 099115274 A TW099115274 A TW 099115274A TW 99115274 A TW99115274 A TW 99115274A TW I475758 B TWI475758 B TW I475758B
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conductive
layer
conductive layer
hole
substrate
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TW099115274A
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Chinese (zh)
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TW201140947A (en
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Chang Ming Lee
Wen Fang Liu
Shih Jung Huang
ling kai Su
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Unimicron Technology Corp
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連接器及其製作方法Connector and manufacturing method thereof

本發明是有關於一種連接器及其製造方法,且特別是有關於一種製作成本較低的連接器及其製造方法。The present invention relates to a connector and a method of manufacturing the same, and more particularly to a connector that is less expensive to manufacture and a method of manufacturing the same.

一般而言,電子裝置上通常會配設有連接器並具有暴露出連接器的連接孔,如此一來,網路線或是音源線之類的外部線路即可藉由插置於連接孔中而與連接器電性連接。Generally, an electronic device is usually provided with a connector and has a connection hole exposing the connector, so that an external route such as a mesh route or a sound source line can be inserted into the connection hole. Electrically connected to the connector.

圖1A繪示習知之連接器的剖面圖,圖1B繪示圖1A之連接器的下視圖。請參照圖1A,習知的連接器100具有一基板110、一第一導電層120、多個連接端子130、一第二導電層140、一金層150與多個銲球160。基板110具有相對的一第一表面112、一第二表面114與多個貫通第一表面112與第二表面114的貫孔116。第一導電層120覆蓋貫孔116的內壁116a以及第一表面112與第二表面114之鄰近貫孔116的部分。連接端子130配置於貫孔116周圍。第二導電層140覆蓋連接端子130與第一導電層120,以使連接端子130與第一導電層120電性連接。1A is a cross-sectional view of a conventional connector, and FIG. 1B is a bottom view of the connector of FIG. 1A. Referring to FIG. 1A , a conventional connector 100 has a substrate 110 , a first conductive layer 120 , a plurality of connection terminals 130 , a second conductive layer 140 , a gold layer 150 , and a plurality of solder balls 160 . The substrate 110 has a first surface 112 , a second surface 114 , and a plurality of through holes 116 penetrating the first surface 112 and the second surface 114 . The first conductive layer 120 covers the inner wall 116a of the through hole 116 and a portion of the first surface 112 and the second surface 114 adjacent to the through hole 116. The connection terminal 130 is disposed around the through hole 116. The second conductive layer 140 covers the connection terminal 130 and the first conductive layer 120 to electrically connect the connection terminal 130 to the first conductive layer 120 .

於習知技術中,由於第二導電層140之位於貫孔116中的部分容易受到後續製程的影響以致於電性可靠度下降,因此,習知的金層150不但會覆蓋連接端子130,還會覆蓋第二導電層140之位於貫孔116中的部分。並且,為確保金層150完全覆蓋第二導電層140之位於貫孔116中的部分,習知技術所形成的金層150係自貫孔116內向第二導電層140之位於第二表面114上的部分延伸,以於第二表面114上形成一金環G。銲球160位於第二表面114上,且銲球160與第二導電層140之未被金環G所覆蓋的部分相連。In the prior art, since the portion of the second conductive layer 140 located in the through hole 116 is easily affected by the subsequent process so that the electrical reliability is lowered, the conventional gold layer 150 not only covers the connection terminal 130 but also A portion of the second conductive layer 140 that is located in the through hole 116 is covered. Moreover, in order to ensure that the gold layer 150 completely covers the portion of the second conductive layer 140 located in the through hole 116, the gold layer 150 formed by the prior art is located on the second surface 114 from the through hole 116 to the second conductive layer 140. The portion extends to form a gold ring G on the second surface 114. The solder balls 160 are located on the second surface 114, and the solder balls 160 are connected to portions of the second conductive layer 140 that are not covered by the gold ring G.

由於習知技術所形成的金層150需完全覆蓋第二導電層140之位於貫孔116中的部分,故金的用量偏高,而金的價錢又相當昂貴,因此,習知連接器的製作成本偏高。Since the gold layer 150 formed by the prior art needs to completely cover the portion of the second conductive layer 140 located in the through hole 116, the amount of gold is relatively high, and the price of gold is relatively expensive. Therefore, the fabrication of the conventional connector is made. The cost is high.

此外,於習知技術中,為增加佈線密度,金環G與銲球160的形成位置通常甚為靠近以縮小其所佔的佈線面積,因此,在形成銲球160時,銲料容易接觸到金環G。然而,當銲料與金環G接觸時會有銲料爬越(solder wicking)的現象產生,以致於銲球160縮小或消失。此外,銲球160為避免與金環G接觸,需與金環G錯開設置,因此,銲球160之間的間距無法降低。In addition, in the prior art, in order to increase the wiring density, the formation positions of the gold ring G and the solder balls 160 are usually very close to reduce the wiring area occupied by the solder balls 160. Therefore, when the solder balls 160 are formed, the solder easily contacts the gold rings G. . However, when the solder comes into contact with the gold ring G, there is a phenomenon of solder wicking, so that the solder balls 160 shrink or disappear. In addition, in order to avoid contact with the gold ring G, the solder ball 160 needs to be disposed offset from the gold ring G. Therefore, the pitch between the solder balls 160 cannot be lowered.

本發明提供一種連接器的製作方法,可有效降低製作成本並可避免銲料爬越的現象產生。The invention provides a method for manufacturing a connector, which can effectively reduce the manufacturing cost and avoid the phenomenon of solder climbing.

本發明提供一種連接器,其製作成本較低。The present invention provides a connector that is relatively inexpensive to manufacture.

本發明提出一種連接器的製作方法如下所述。提供一基板,基板具有相對的一第一表面、一第二表面與至少一貫孔,貫孔貫通第一表面與第二表面。於基板上形成一第一導電層,第一導電層覆蓋貫孔的內壁。將一塞孔材料填充於貫孔中,以形成一塞孔柱,部分第一導電層位於塞孔柱與基板之間。於第一表面上形成至少一導電彈性懸臂,並使導電彈性懸臂與第一導電層電性連接,導電彈性懸臂具有一固定端部、一自由端部與連接於固定端部與自由端部之間的一彎折部,固定端部與基板相連並位於貫孔周邊,彎折部自固定端部朝向遠離基板的方向彎折。於導電彈性懸臂以及部分的第一表面上形成一金層。於第二表面上形成至少一銲球,銲球與第一導電層電性連接。The present invention provides a method of fabricating a connector as follows. A substrate is provided, the substrate having a first surface, a second surface and at least a uniform aperture, the through hole penetrating the first surface and the second surface. A first conductive layer is formed on the substrate, and the first conductive layer covers the inner wall of the through hole. A plug material is filled in the through hole to form a plug post, and a portion of the first conductive layer is between the plug post and the substrate. Forming at least one conductive elastic cantilever on the first surface, and electrically connecting the conductive elastic cantilever to the first conductive layer, the conductive elastic cantilever has a fixed end portion, a free end portion and a fixed end portion and a free end portion A bent portion, the fixed end portion is connected to the substrate and located at the periphery of the through hole, and the bent portion is bent from the fixed end portion in a direction away from the substrate. A gold layer is formed on the conductive elastic cantilever and a portion of the first surface. Forming at least one solder ball on the second surface, the solder ball being electrically connected to the first conductive layer.

在本發明之一實施例中,連接器的製作方法更包括在形成塞孔柱之後,研磨塞孔柱之突出於貫孔的部分。In an embodiment of the invention, the method of fabricating the connector further includes grinding a portion of the plug post protruding from the through hole after forming the plug post.

在本發明之一實施例中,形成第一導電層的方法包括進行一全板電鍍製程,以形成一導電材料層,導電材料層全面覆蓋基板,以及在形成塞孔柱之後,圖案化導電材料層之位於第一表面與第二表面上的部分。In an embodiment of the invention, a method of forming a first conductive layer includes performing a full-plate plating process to form a conductive material layer, the conductive material layer completely covering the substrate, and patterning the conductive material after forming the plug post A portion of the layer on the first surface and the second surface.

在本發明之一實施例中,形成導電彈性懸臂的方法包括提供一膠層與一彈性導電片,其中膠層位於基板與彈性導電片之間,彈性導電片具有導電彈性懸臂,膠層具有至少一開口,以及壓合彈性導電片、膠層與基板,其中膠層的開口暴露塞孔柱與第一導電層,且導電彈性懸臂位於開口上方。In one embodiment of the present invention, a method of forming a conductive elastic cantilever includes providing a glue layer and an elastic conductive sheet, wherein the glue layer is between the substrate and the elastic conductive sheet, and the elastic conductive sheet has a conductive elastic cantilever, and the glue layer has at least An opening, and pressing the elastic conductive sheet, the adhesive layer and the substrate, wherein the opening of the adhesive layer exposes the plug post and the first conductive layer, and the conductive elastic cantilever is located above the opening.

在本發明之一實施例中,連接器的製作方法更包括在形成銲球之前,在第二表面上形成至少一接墊,接墊覆蓋第一導電層與塞孔柱,其中銲球形成於接墊上並透過接墊與第一導電層電性連接。In an embodiment of the invention, the method further includes forming at least one pad on the second surface before the solder ball is formed, the pad covering the first conductive layer and the plug post, wherein the solder ball is formed on the solder ball The pad is electrically connected to the first conductive layer through the pad.

在本發明之一實施例中,使導電彈性懸臂與第一導電層電性連接的方法包括於導電彈性懸臂以及第一表面上形成一第二導電層,且第二導電層電性連接導電彈性懸臂與第一導電層。In an embodiment of the invention, the method for electrically connecting the conductive elastic cantilever to the first conductive layer comprises: forming a second conductive layer on the conductive elastic cantilever and the first surface, and electrically connecting the second conductive layer to the conductive elastic The cantilever is coupled to the first conductive layer.

在本發明之一實施例中,形成第二導電層的方法包括進行一全板電鍍製程,以形成一導電材料層,導電材料層全面覆蓋導電彈性懸臂以及第一表面,以及圖案化導電材料層之位於第一表面上的部分。In an embodiment of the invention, a method of forming a second conductive layer includes performing a full-plate plating process to form a conductive material layer, the conductive material layer covering the conductive elastic cantilever and the first surface, and the patterned conductive material layer The portion on the first surface.

在本發明之一實施例中,自由端部與銲球皆位於一垂直於第一表面的垂直線上。In one embodiment of the invention, the free end and the solder balls are both on a vertical line perpendicular to the first surface.

在本發明之一實施例中,塞孔柱位於垂直線上。In one embodiment of the invention, the plug post is on a vertical line.

在本發明之一實施例中,塞孔柱位於垂直線的一側。In one embodiment of the invention, the plug post is located on one side of the vertical line.

本發明提出一種連接器包括一線路板、至少一導電彈性懸臂、一金層以及至少一銲球。線路板包括一基板、一第一導電層與一塞孔柱,基板具有相對的一第一表面、一第二表面與至少一貫孔,貫孔貫通第一表面與第二表面,第一導電層配置於基板上並覆蓋貫孔的內壁,塞孔柱填充於貫孔中,部分第一導電層位於塞孔柱與基板之間。導電彈性懸臂位於第一表面上,並與第一導電層電性連接,導電彈性懸臂具有一固定端部、一自由端部與連接於固定端部與自由端部之間的一彎折部,固定端部與線路板相連並位於貫孔周邊,彎折部自固定端部朝向遠離線路板的方向彎折。金層覆蓋導電彈性懸臂以及部分的第一表面。銲球配置於第二表面上並與第一導電層電性連接,其中自由端部與銲球皆位於一垂直於第一表面的垂直線上。The invention provides a connector comprising a circuit board, at least one electrically conductive elastic cantilever, a gold layer and at least one solder ball. The circuit board includes a substrate, a first conductive layer and a plug post. The substrate has a first surface, a second surface and at least a uniform hole. The through hole penetrates the first surface and the second surface, and the first conductive layer The inner wall of the through hole is disposed on the substrate, the plug hole is filled in the through hole, and a part of the first conductive layer is located between the plug post and the substrate. The conductive elastic cantilever is located on the first surface and electrically connected to the first conductive layer. The conductive elastic cantilever has a fixed end portion, a free end portion and a bent portion connected between the fixed end portion and the free end portion. The fixed end portion is connected to the circuit board and located at the periphery of the through hole, and the bent portion is bent from the fixed end portion in a direction away from the circuit board. The gold layer covers the electrically conductive elastic cantilever and a portion of the first surface. The solder ball is disposed on the second surface and electrically connected to the first conductive layer, wherein the free end and the solder ball are located on a vertical line perpendicular to the first surface.

在本發明之一實施例中,自由端部與銲球皆位於一垂直於第一表面的垂直線上。In one embodiment of the invention, the free end and the solder balls are both on a vertical line perpendicular to the first surface.

在本發明之一實施例中,塞孔柱位於垂直線上。In one embodiment of the invention, the plug post is on a vertical line.

在本發明之一實施例中,塞孔柱位於垂直線的一側。In one embodiment of the invention, the plug post is located on one side of the vertical line.

在本發明之一實施例中,第一導電層自第一表面經貫孔延伸至第二表面,塞孔柱具有相對的一第三端部與一第四端部,其中第三端部與第一導電層之位於第一表面上的部分齊平,第四端部與第一導電層之位於第二表面上的部分齊平。In an embodiment of the invention, the first conductive layer extends from the first surface through the through hole to the second surface, and the plug post has an opposite third end and a fourth end, wherein the third end is The portion of the first conductive layer on the first surface is flush, and the fourth end is flush with the portion of the first conductive layer on the second surface.

在本發明之一實施例中,連接器更包括一膠層,其連接於線路板與導電彈性懸臂之間。In an embodiment of the invention, the connector further includes a glue layer connected between the circuit board and the conductive elastic cantilever.

在本發明之一實施例中,膠層覆蓋第一表面,並具有至少一開口,開口暴露塞孔柱與第一導電層。In an embodiment of the invention, the glue layer covers the first surface and has at least one opening that exposes the plug post and the first conductive layer.

在本發明之一實施例中,連接器更包括一第二導電層,其配置於第一表面上,並覆蓋導電彈性懸臂與第一導電層,以電性連接導電彈性懸臂與第一導電層。In an embodiment of the invention, the connector further includes a second conductive layer disposed on the first surface and covering the conductive elastic cantilever and the first conductive layer to electrically connect the conductive elastic cantilever to the first conductive layer .

在本發明之一實施例中,連接器更包括一接墊,其配置於第二表面上,並覆蓋第一導電層與塞孔柱,其中銲球位於接墊上並透過接墊與第一導電層電性連接。In an embodiment of the invention, the connector further includes a pad disposed on the second surface and covering the first conductive layer and the plug post, wherein the solder ball is located on the pad and passes through the pad and the first conductive Layer electrical connection.

基於上述,由於本發明在貫孔中形成有填滿貫孔的塞孔柱,因此,塞孔柱可於後續的製程中保護導電層之位於貫孔中的部分,故本發明的金層可僅形成於導電彈性懸臂以及基板之配置有導電彈性懸臂的第一表面上,而毋須如習知技術一般還需額外形成在貫孔中以及基板之配置有銲球的第二表面上,進而可減少金的用量,從而降低本發明之連接器的製作成本。再者,由於金層並未形成在基板之配置有銲球的第二表面上,因此,本發明之連接器的製作方法可有效避免習知銲料與金接觸時所產生的銲料爬越現象。Based on the above, since the present invention forms a plug hole column filled in the through hole in the through hole, the plug hole column can protect the portion of the conductive layer located in the through hole in the subsequent process, so the gold layer of the present invention can be Formed only on the conductive elastic cantilever and the first surface of the substrate on which the conductive elastic cantilever is disposed, and the need to additionally be formed in the through hole and the second surface of the substrate on which the solder ball is disposed, as in the prior art. The amount of gold is reduced, thereby reducing the manufacturing cost of the connector of the present invention. Moreover, since the gold layer is not formed on the second surface of the substrate on which the solder balls are disposed, the method of fabricating the connector of the present invention can effectively avoid the solder creep phenomenon which occurs when the solder is in contact with gold.

為讓本發明之上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。The above described features and advantages of the present invention will be more apparent from the following description.

圖2A~圖2K繪示本發明一實施例之連接器的製程剖面圖。圖3A繪示本發明一實施例之連接器的剖面圖,圖3B繪示圖3A之連接器的下視圖。2A-2K are cross-sectional views showing a process of a connector according to an embodiment of the present invention. 3A is a cross-sectional view of the connector of the embodiment of the present invention, and FIG. 3B is a bottom view of the connector of FIG. 3A.

首先,請參照圖2A,提供一基板210,基板210具有相對的一第一表面212與一第二表面214,其中基板210例如為一雙面板(單一介電層之兩面分別具有一導電層的板材)、一單面板(單一介電層之單面具有一導電層的板材)、單一介電層或是一多層板(交替堆疊的多層介電層與多層導電層)。First, referring to FIG. 2A, a substrate 210 is provided. The substrate 210 has a first surface 212 and a second surface 214. The substrate 210 is, for example, a double panel (the two sides of the single dielectric layer respectively have a conductive layer). Sheet), a single panel (single mask of a single dielectric layer with a conductive layer of sheet), a single dielectric layer or a multilayer board (multiple layers of dielectric layers and multiple layers of conductive layers alternately stacked).

在本實施例中,基板210為一雙面板,基板210包括一介電層I以及二導電層C1、C2,其中介電層I具有上述第一表面212及第二表面214,而二導電層C1、C2分別位於第一表面212及第二表面214上。In this embodiment, the substrate 210 is a double-sided panel. The substrate 210 includes a dielectric layer I and two conductive layers C1 and C2. The dielectric layer I has the first surface 212 and the second surface 214, and the two conductive layers. C1 and C2 are located on the first surface 212 and the second surface 214, respectively.

接著,請參照圖2B,對基板210進行一鑽孔製程,以形成多個貫孔216,其中貫孔216穿過這些導電層C1及C2,並貫通第一表面212與第二表面214。Next, referring to FIG. 2B, a drilling process is performed on the substrate 210 to form a plurality of through holes 216, wherein the through holes 216 pass through the conductive layers C1 and C2 and penetrate the first surface 212 and the second surface 214.

然後,請參照圖2C,在本實施例中,可在基板210上進行一全板電鍍製程,以形成一導電材料層220a,導電材料層220a全面覆蓋基板210。詳細而言,導電材料層220a覆蓋基板210的第一表面212、第二表面214與貫孔216的內壁216a。Then, referring to FIG. 2C, in the embodiment, a full-plate plating process can be performed on the substrate 210 to form a conductive material layer 220a, and the conductive material layer 220a completely covers the substrate 210. In detail, the conductive material layer 220a covers the first surface 212, the second surface 214 of the substrate 210, and the inner wall 216a of the through hole 216.

之後,請參照圖2D,將一塞孔材料填充於貫孔216中,以形成一塞孔柱230,塞孔柱230的材質包括塞孔油墨或是其他適合的塞孔材料。塞孔柱230具有相對的一第三端部232與一第四端部234。部分導電材料層220a位於塞孔柱230與基板210之間。Thereafter, referring to FIG. 2D, a plug material is filled in the through hole 216 to form a plug post 230. The plug post 230 is made of a plug ink or other suitable plug material. The plug post 230 has a third end 232 and a fourth end 234 opposite to each other. A portion of the conductive material layer 220a is between the plug post 230 and the substrate 210.

然後,請參照圖2E,在本實施例中,可選擇性地研磨塞孔柱230之突出於貫孔216的部分(亦即第三端部232與第四端部234),以使第三端部232與導電材料層220a之位於第一表面212上的部分齊平,第四端部234與導電材料層220a之位於第二表面214上的部分齊平。Then, referring to FIG. 2E, in the embodiment, the portion of the plug post 230 protruding from the through hole 216 (ie, the third end portion 232 and the fourth end portion 234) may be selectively polished to make the third End portion 232 is flush with a portion of conductive material layer 220a that is on first surface 212, and fourth end portion 234 is flush with a portion of conductive material layer 220a that is on second surface 214.

接著,請參照圖2F,圖案化導電材料層220a之位於第一表面212上的部分以及導電層C1,以形成一圖案化導電材料層220b以及一圖案化導電層C3。Next, referring to FIG. 2F, the portion of the conductive material layer 220a on the first surface 212 and the conductive layer C1 are patterned to form a patterned conductive material layer 220b and a patterned conductive layer C3.

然後,請參照圖2G,於第一表面212上形成多個導電彈性懸臂240,導電彈性懸臂240具有一固定端部242、一自由端部244與連接於固定端部242與自由端部244之間的一彎折部246,固定端部242與基板210相連並位於貫孔216周邊,彎折部246自固定端部242朝向遠離基板210的方向彎折。Then, referring to FIG. 2G, a plurality of conductive elastic cantilevers 240 are formed on the first surface 212. The conductive elastic cantilever 240 has a fixed end portion 242, a free end portion 244, and a fixed end portion 242 and a free end portion 244. A bent portion 246, the fixed end portion 242 is connected to the substrate 210 and located at the periphery of the through hole 216, and the bent portion 246 is bent from the fixed end portion 242 in a direction away from the substrate 210.

在本實施例中,形成導電彈性懸臂240的其中一種方法如下所述,但下述導電彈性懸臂240的形成方法僅為舉例說明,並非用以限定本發明。首先,提供一膠層A(例如為一絕緣膠層)與一彈性導電片F(例如為一圖案化的銅箔),其中膠層A位於基板210與彈性導電片F之間,彈性導電片F具有多個導電彈性懸臂240,膠層A具有多個開口O。接著,壓合彈性導電片F、膠層A與基板210,以使彈性導電片F經由膠層A而固定於基板210上,其中膠層A的各開口O暴露對應的塞孔柱230與圖案化導電材料層220b,且各導電彈性懸臂240位於對應的開口O上方。In the present embodiment, one of the methods of forming the conductive elastic cantilever 240 is as follows, but the method of forming the conductive elastic cantilever 240 described below is merely illustrative and is not intended to limit the present invention. First, a glue layer A (for example, an insulating rubber layer) and an elastic conductive sheet F (for example, a patterned copper foil) are provided, wherein the glue layer A is located between the substrate 210 and the elastic conductive sheet F, and the elastic conductive sheet F has a plurality of electrically conductive elastic cantilevers 240, and the adhesive layer A has a plurality of openings O. Then, the elastic conductive sheet F, the adhesive layer A and the substrate 210 are pressed together, so that the elastic conductive sheet F is fixed on the substrate 210 via the adhesive layer A, wherein each opening O of the adhesive layer A exposes the corresponding plug post 230 and the pattern. The conductive material layer 220b is formed, and each of the conductive elastic cantilevers 240 is located above the corresponding opening O.

之後,請參照圖2H,在本實施例中,可於導電彈性懸臂240以及第一表面212上全面形成一導電材料層250a,且導電材料層250a電性連接導電彈性懸臂240與圖案化導電材料層220b。詳細而言,本實施例之導電材料層250a包括一銅層252a與一鎳層254a,而形成導電材料層250a的方法為先在導電彈性懸臂240以及第一表面212上全面形成銅層252a,之後,在銅層252a上全面形成鎳層254a。在本實施例中,在形成導電材料層250a時,可同時形成一全面覆蓋第二表面214的導電材料層260a。本實施例之導電材料層260a包括一銅層262a與一鎳層264a,而形成導電材料層260a的方法為先在第二表面214上全面形成銅層262a,之後,在銅層262a上全面形成鎳層264a。Then, referring to FIG. 2H, in the embodiment, a conductive material layer 250a is formed on the conductive elastic cantilever 240 and the first surface 212, and the conductive material layer 250a is electrically connected to the conductive elastic cantilever 240 and the patterned conductive material. Layer 220b. In detail, the conductive material layer 250a of the present embodiment includes a copper layer 252a and a nickel layer 254a, and the conductive material layer 250a is formed by first forming a copper layer 252a on the conductive elastic cantilever 240 and the first surface 212. Thereafter, a nickel layer 254a is formed entirely on the copper layer 252a. In the present embodiment, when the conductive material layer 250a is formed, a conductive material layer 260a that completely covers the second surface 214 may be simultaneously formed. The conductive material layer 260a of the present embodiment includes a copper layer 262a and a nickel layer 264a, and the conductive material layer 260a is formed by first forming a copper layer 262a on the second surface 214, and then forming the copper layer 262a on the copper layer 262a. Nickel layer 264a.

接著,請參照圖2I,於導電彈性懸臂240以及部分的第一表面212上形成一金層270。在本實施例中,形成金層270的方法例如為先在導電材料層250a上形成一電鍍罩幕(未繪示),電鍍罩幕例如為一圖案化的光阻,電鍍罩幕暴露出導電材料層250a之預定形成金層的區域,之後,以前述電鍍罩幕為罩幕進行電鍍製程,以形成金層270,然後,移除電鍍罩幕。Next, referring to FIG. 2I, a gold layer 270 is formed on the conductive elastic cantilever 240 and a portion of the first surface 212. In this embodiment, the method of forming the gold layer 270 is, for example, first forming a plating mask (not shown) on the conductive material layer 250a. The plating mask is, for example, a patterned photoresist, and the plating mask exposes the conductive layer. The region of the material layer 250a is intended to form a gold layer, after which an electroplating process is performed using the aforementioned plating mask as a mask to form a gold layer 270, and then the plating mask is removed.

然後,請參照圖2J,圖案化導電材料層250a之位於第一表面212上的部分,以形成第二導電層250。在本實施例中,在圖案化導電材料層250a時,可同時對導電材料層260a以及圖案化導電材料層220b之位於第二表面214上的部分以及導電層C2進行一圖案化製程,以形成多個接墊260、一第一導電層220以及一圖案化導電層C4,其中第一導電層220自第一表面212經貫孔216的內壁216a而延伸至第二表面214,各接墊260位於第一導電層220上並覆蓋對應的塞孔柱230的第四端部234。Then, referring to FIG. 2J, a portion of the conductive material layer 250a on the first surface 212 is patterned to form a second conductive layer 250. In this embodiment, when the conductive material layer 250a is patterned, a portion of the conductive material layer 260a and the patterned conductive material layer 220b on the second surface 214 and the conductive layer C2 may be simultaneously patterned to form a pattern. a plurality of pads 260, a first conductive layer 220, and a patterned conductive layer C4, wherein the first conductive layer 220 extends from the first surface 212 through the inner wall 216a of the through hole 216 to the second surface 214, each pad 260 is located on first conductive layer 220 and covers fourth end 234 of corresponding plug post 230.

之後,請參照圖2K,於各接墊260上形成一銲球280,且銲球280可透過接墊260與第一導電層220電性連接。此時,已初步完成本實施例之連接器200。在本實施例中,在理想狀態下,自由端部244與銲球280皆可位於一垂直於第一表面212的垂直線L上,但實際上仍允許約0.2公釐的誤差存在於自由端部244或銲球280與垂直線L之間。此外,塞孔柱230位於垂直線L的一側,換言之,塞孔柱230並未位於垂直線L上。Then, a solder ball 280 is formed on each of the pads 260, and the solder balls 280 are electrically connected to the first conductive layer 220 through the pads 260. At this time, the connector 200 of this embodiment has been initially completed. In the present embodiment, in the ideal state, both the free end portion 244 and the solder ball 280 may be located on a vertical line L perpendicular to the first surface 212, but actually still allow an error of about 0.2 mm to exist at the free end. Portion 244 or solder ball 280 is between the vertical line L. Further, the plug post 230 is located on one side of the vertical line L, in other words, the plug post 230 is not located on the vertical line L.

值得注意的是,由於本實施例在貫孔216中形成有填滿貫孔216的塞孔柱230,因此,塞孔柱230可於後續的製程中保護第一導電層220之位於貫孔216中的部分。如此一來,本實施例的金層270可僅形成於導電彈性懸臂240以及部分的第一表面212上,而毋須如習知技術一般還需額外形成在貫孔116中以及第二表面114上(如圖1A所示),進而可減少金的用量,從而降低本實施例之連接器的製作成本。再者,由於金層270並未形成在配置有銲球280的第二表面214上,因此,本實施例之連接器的製作方法可有效避免習知的銲料與金接觸時所產生的銲料爬越現象。It should be noted that since the plug hole 230 filled in the through hole 216 is formed in the through hole 216 in this embodiment, the plug post 230 can protect the first conductive layer 220 in the through hole 216 in a subsequent process. The part in it. As such, the gold layer 270 of the present embodiment can be formed only on the conductive elastic cantilever 240 and a portion of the first surface 212 without the need for additional formation in the through hole 116 and the second surface 114 as in the prior art. (As shown in FIG. 1A), the amount of gold can be reduced, thereby reducing the manufacturing cost of the connector of the embodiment. Furthermore, since the gold layer 270 is not formed on the second surface 214 on which the solder balls 280 are disposed, the method of fabricating the connector of the present embodiment can effectively avoid the solder creep generated when the solder is in contact with the gold. The more the phenomenon.

以下將就圖2K中的連接器200的結構部分進行詳細的描述。The structural portion of the connector 200 in Fig. 2K will be described in detail below.

請參照圖2K,本實施例之連接器200包括一線路板B、多個導電彈性懸臂240、一金層270以及多個銲球280。線路板B包括一基板210、一第一導電層220與一塞孔柱230,基板210具有相對的一第一表面212、一第二表面214、多個貫孔216、一介電層I與二圖案化導電層C3、C4,其中介電層I具有上述第一表面212及第二表面214,而圖案化導電層C3、C4分別配置於介電層I的第一表面212及第二表面214上,貫孔216穿過這些導電層C1及C2,並貫通第一表面212與第二表面214。Referring to FIG. 2K, the connector 200 of the embodiment includes a circuit board B, a plurality of conductive elastic cantilevers 240, a gold layer 270, and a plurality of solder balls 280. The circuit board B includes a substrate 210, a first conductive layer 220 and a plug post 230. The substrate 210 has a first surface 212, a second surface 214, a plurality of through holes 216, and a dielectric layer I. The second patterned conductive layer C3, C4, wherein the dielectric layer I has the first surface 212 and the second surface 214, and the patterned conductive layers C3, C4 are respectively disposed on the first surface 212 and the second surface of the dielectric layer I. At 214, the through holes 216 pass through the conductive layers C1 and C2 and penetrate the first surface 212 and the second surface 214.

第一導電層220配置於基板210上並覆蓋貫孔216的內壁216a。詳細而言,在本實施例中,第一導電層220自第一表面212經貫孔216延伸至第二表面214。塞孔柱230填充於貫孔216中,且部分第一導電層220位於塞孔柱230與基板210之間。此外,塞孔柱230可具有相對的一第三端部232與一第四端部234,且第三端部232與第一導電層220之位於第一表面212上的部分齊平,第四端部234與第一導電層220之位於第二表面214上的部分齊平。The first conductive layer 220 is disposed on the substrate 210 and covers the inner wall 216a of the through hole 216. In detail, in the present embodiment, the first conductive layer 220 extends from the first surface 212 through the through hole 216 to the second surface 214. The plug post 230 is filled in the through hole 216, and a portion of the first conductive layer 220 is located between the plug post 230 and the substrate 210. In addition, the plug post 230 can have a third end 232 and a fourth end 234 opposite to each other, and the third end 232 is flush with a portion of the first conductive layer 220 on the first surface 212, fourth End 234 is flush with a portion of first conductive layer 220 that is on second surface 214.

導電彈性懸臂240位於第一表面212上並與第一導電層220電性連接。導電彈性懸臂240具有一固定端部242、一自由端部244與連接於固定端部242與自由端部244之間的一彎折部246,固定端部242與線路板B相連並位於貫孔216周邊,彎折部246自固定端部242朝向遠離線路板B的方向彎折。金層270覆蓋導電彈性懸臂240以及第二導電層250。The conductive elastic cantilever 240 is located on the first surface 212 and electrically connected to the first conductive layer 220. The conductive elastic cantilever 240 has a fixed end portion 242, a free end portion 244 and a bent portion 246 connected between the fixed end portion 242 and the free end portion 244. The fixed end portion 242 is connected to the circuit board B and located in the through hole. Around the 216, the bent portion 246 is bent from the fixed end portion 242 in a direction away from the wiring board B. The gold layer 270 covers the conductive elastic cantilever 240 and the second conductive layer 250.

詳細而言,在本實施例中,固定端部242可經由一配置於第一表面212上的膠層A而與線路板B連接,其中膠層A具有多個開口O,且各開口O暴露對應的塞孔柱230與部分第一導電層220。此外,導電彈性懸臂240例如是經由覆蓋導電彈性懸臂240與第一導電層220的一第二導電層250而電性連接至第一導電層220。本實施例之第二導電層250包括一銅層252與一鎳層254,其中銅層252覆蓋導電彈性懸臂240與第一導電層220,而鎳層254覆蓋銅層252,且金層270覆蓋鎳層254。In detail, in the embodiment, the fixed end portion 242 can be connected to the circuit board B via a glue layer A disposed on the first surface 212, wherein the glue layer A has a plurality of openings O, and the openings O are exposed. Corresponding plug post 230 and a portion of first conductive layer 220. In addition, the conductive elastic cantilever 240 is electrically connected to the first conductive layer 220 via a second conductive layer 250 covering the conductive elastic cantilever 240 and the first conductive layer 220, for example. The second conductive layer 250 of the present embodiment includes a copper layer 252 and a nickel layer 254, wherein the copper layer 252 covers the conductive elastic cantilever 240 and the first conductive layer 220, and the nickel layer 254 covers the copper layer 252, and the gold layer 270 covers Nickel layer 254.

在本實施例中,可在第二表面214上配置多個接墊260,各接墊260覆蓋對應的塞孔柱230與第一導電層220。詳細而言,接墊260包括一銅層262與一鎳層264,其中銅層262覆蓋塞孔柱230與第一導電層220,而鎳層264覆蓋銅層262。In this embodiment, a plurality of pads 260 may be disposed on the second surface 214 , and each of the pads 260 covers the corresponding plug post 230 and the first conductive layer 220 . In detail, the pad 260 includes a copper layer 262 and a nickel layer 264, wherein the copper layer 262 covers the plug post 230 and the first conductive layer 220, and the nickel layer 264 covers the copper layer 262.

銲球280位於接墊260上並透過接墊260與第一導電層220電性連接。在本實施例中,在理想狀態下,自由端部244與銲球280皆可位於一垂直於第一表面212的垂直線L上,但實際上仍允許約0.2公釐的誤差存在於自由端部244或銲球280與垂直線L之間。此外,塞孔柱230例如位於垂直線L的一側,換言之,塞孔柱230並未位於垂直線L上。The solder ball 280 is located on the pad 260 and electrically connected to the first conductive layer 220 through the pad 260. In the present embodiment, in the ideal state, both the free end portion 244 and the solder ball 280 may be located on a vertical line L perpendicular to the first surface 212, but actually still allow an error of about 0.2 mm to exist at the free end. Portion 244 or solder ball 280 is between the vertical line L. Further, the plug post 230 is located, for example, on one side of the vertical line L, in other words, the plug post 230 is not located on the vertical line L.

此外,請參照圖3A與圖3B,在本實施例中,塞孔柱230可位於垂直線L上。本實施例之連接器300的結構相似於圖2K之連接器200的結構,兩者的差異之處在於本實施例之導電彈性懸臂240的自由端部244與銲球280分別位於貫孔216的正上方與正下方。In addition, referring to FIG. 3A and FIG. 3B, in the embodiment, the plug post 230 can be located on the vertical line L. The structure of the connector 300 of the present embodiment is similar to that of the connector 200 of FIG. 2K. The difference between the two is that the free end portion 244 of the conductive elastic cantilever 240 of the present embodiment and the solder ball 280 are respectively located in the through hole 216. Just above and below.

詳細而言,由於本實施例之塞孔柱230填滿於貫孔216中,因此,接墊260可覆蓋塞孔柱230且銲球280可以配置在貫孔216正下方。如此一來,可縮小各接墊260的面積,且銲球280之間的間距只需考量導電彈性懸臂240的配置即可,進而有助於縮小銲球280之間的間距。In detail, since the plug post 230 of the embodiment is filled in the through hole 216 , the pad 260 can cover the plug post 230 and the solder ball 280 can be disposed directly below the through hole 216 . In this way, the area of each of the pads 260 can be reduced, and the spacing between the solder balls 280 can only be considered in consideration of the configuration of the conductive elastic cantilever 240, thereby helping to reduce the spacing between the solder balls 280.

綜上所述,由於本發明在貫孔中形成有填滿貫孔的塞孔柱,因此,塞孔柱可於後續的製程中保護導電層之位於貫孔中的部分,故本發明的金層可僅形成於導電彈性懸臂以及基板之配置有導電彈性懸臂的第一表面上,而毋須如習知技術一般還需額外形成在貫孔中以及基板之配置有銲球的第二表面上,進而可減少金的用量,從而降低本發明之連接器的製作成本。再者,由於本發明的金層並未形成在基板之配置有銲球的第二表面上,因此,本發明之連接器的製作方法可有效避免習知的銲料與金接觸時所產生的銲料爬越現象。In summary, since the present invention forms a plug hole column filled in the through hole in the through hole, the plug hole column can protect the portion of the conductive layer located in the through hole in the subsequent process, so the gold of the present invention The layer may be formed only on the conductive elastic cantilever and the first surface of the substrate on which the conductive elastic cantilever is disposed, without the need to additionally form in the through hole and the second surface of the substrate on which the solder ball is disposed, as in the prior art. Further, the amount of gold can be reduced, thereby reducing the manufacturing cost of the connector of the present invention. Furthermore, since the gold layer of the present invention is not formed on the second surface of the substrate on which the solder balls are disposed, the method of fabricating the connector of the present invention can effectively avoid the solder generated when the solder is in contact with gold. Climb the phenomenon.

此外,由於本發明之塞孔柱填滿於基板的貫孔中,因此,接墊可覆蓋塞孔柱且銲球可以配置在貫孔正下方,故可縮小各接墊的面積,且銲球之間的間距只需考量導電彈性懸臂的配置即可,進而有助於縮小銲球之間的間距。In addition, since the plug post of the present invention fills the through hole of the substrate, the pad can cover the plug post and the solder ball can be disposed directly under the through hole, so that the area of each pad can be reduced, and the solder ball The spacing between the conductive elastic cantilever is only considered, which helps to reduce the spacing between the solder balls.

雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作些許之更動與潤飾,故本發明之保護範圍當視後附之申請專利範圍所界定者為準。Although the present invention has been disclosed in the above embodiments, it is not intended to limit the invention, and any one of ordinary skill in the art can make some modifications and refinements without departing from the spirit and scope of the invention. The scope of the invention is defined by the scope of the appended claims.

100、200、300‧‧‧連接器100, 200, 300‧‧‧ connectors

110、210‧‧‧基板110, 210‧‧‧ substrate

112、212‧‧‧第一表面112, 212‧‧‧ first surface

114、214‧‧‧第二表面114, 214‧‧‧ second surface

116、216‧‧‧貫孔116, 216‧‧‧through holes

116a、216a‧‧‧內壁116a, 216a‧‧‧ inner wall

120、220‧‧‧第一導電層120, 220‧‧‧ first conductive layer

130‧‧‧連接端子130‧‧‧Connecting terminal

140、250‧‧‧第二導電層140, 250‧‧‧ second conductive layer

150、270‧‧‧金層150, 270‧‧ ‧ gold layer

160、280‧‧‧銲球160, 280‧‧‧ solder balls

220a、250a‧‧‧導電材料層220a, 250a‧‧‧ conductive material layer

220b‧‧‧圖案化導電材料層220b‧‧‧ patterned conductive material layer

230‧‧‧塞孔柱230‧‧‧ plug hole

232‧‧‧第三端部232‧‧‧ third end

234‧‧‧第四端部234‧‧‧fourth end

240‧‧‧導電彈性懸臂240‧‧‧Electrically conductive cantilever

242‧‧‧固定端部242‧‧‧Fixed end

244‧‧‧自由端部244‧‧‧Free end

246‧‧‧彎折部246‧‧‧Bends

250a、260a‧‧‧導電材料層250a, 260a‧‧‧layer of conductive material

252、252a、262、262a‧‧‧銅層252, 252a, 262, 262a‧‧‧ copper layer

254、254a、264、264a‧‧‧鎳層254, 254a, 264, 264a‧‧‧ nickel layer

260‧‧‧接墊260‧‧‧ pads

A‧‧‧膠層A‧‧‧ glue layer

B‧‧‧線路板B‧‧‧ circuit board

C1、C2‧‧‧導電層C1, C2‧‧‧ conductive layer

C3、C4‧‧‧圖案化導電層C3, C4‧‧‧ patterned conductive layer

F‧‧‧彈性導電片F‧‧‧elastic conductive sheet

G‧‧‧金環G‧‧‧Golden Ring

I‧‧‧介電層I‧‧‧ dielectric layer

L‧‧‧垂直線L‧‧‧ vertical line

O‧‧‧開口O‧‧‧ openings

圖1A繪示習知之連接器的剖面圖,圖1B繪示圖1A之連接器的下視圖。1A is a cross-sectional view of a conventional connector, and FIG. 1B is a bottom view of the connector of FIG. 1A.

圖2A~圖2K繪示本發明一實施例之連接器的製程剖面圖。2A-2K are cross-sectional views showing a process of a connector according to an embodiment of the present invention.

圖3A繪示本發明一實施例之連接器的剖面圖,圖3B繪示圖3A之連接器的下視圖。3A is a cross-sectional view of the connector of the embodiment of the present invention, and FIG. 3B is a bottom view of the connector of FIG. 3A.

200...連接器200. . . Connector

210...基板210. . . Substrate

212...第一表面212. . . First surface

214...第二表面214. . . Second surface

216...貫孔216. . . Through hole

216a...內壁216a. . . Inner wall

220...第一導電層220. . . First conductive layer

230...塞孔柱230. . . Plug hole column

232...第三端部232. . . Third end

234...第四端部234. . . Fourth end

240...導電彈性懸臂240. . . Conductive elastic cantilever

242...固定端部242. . . Fixed end

244...自由端部244. . . Free end

246...彎折部246. . . Bending section

250...第二導電層250. . . Second conductive layer

252、262...銅層252, 262. . . Copper layer

254、264...鎳層254, 264. . . Nickel layer

260...接墊260. . . Pad

270...金層270. . . Gold layer

280...銲球280. . . Solder ball

A...膠層A. . . Glue layer

B...線路板B. . . circuit board

C3、C4...圖案化導電層C3, C4. . . Patterned conductive layer

I...介電層I. . . Dielectric layer

L...垂直線L. . . Vertical line

O...開口O. . . Opening

Claims (9)

一種連接器的製作方法,包括:提供一基板,該基板具有相對的一第一表面、一第二表面與至少一貫孔,該貫孔貫通該第一表面與該第二表面;於基板上形成一第一導電層,該第一導電層覆蓋該貫孔的內壁;將一塞孔材料填充於該貫孔中,以形成一塞孔柱,部分該第一導電層位於該塞孔柱與該基板之間,其中該第一導電層自該第一表面經該貫孔延伸至該第二表面,該塞孔柱具有相對的一第三端部與一第四端部,其中該第三端部與該第一導電層之位於該第一表面上的部分齊平,該第四端部與該第一導電層之位於該第二表面上的部分齊平;於該第一表面上形成至少一導電彈性懸臂,並使該導電彈性懸臂與該第一導電層電性連接,該導電彈性懸臂具有一固定端部、一自由端部與連接於該固定端部與該自由端部之間的一彎折部,該固定端部與該基板相連並位於該貫孔周邊,該彎折部自該固定端部朝向遠離該基板的方向彎折,其中形成該導電彈性懸臂的方法包括:提供一絕緣膠層與一彈性導電片,其中該絕緣膠層位於該基板與該彈性導電片之間,該彈性導電片具有該導電彈性懸臂,該絕緣膠層具有至少一開口;以及壓合該彈性導電片、該絕緣膠層與該基板,其中該絕緣膠層的該開口暴露該塞孔柱與該第一導電層,且該導電彈性懸臂位於該開口上方;於該導電彈性懸臂以及部分的該第一表面上形成一 金層;以及於該第二表面上形成至少一銲球,該銲球與該第一導電層電性連接。 A method of manufacturing a connector, comprising: providing a substrate having a first surface, a second surface, and at least a uniform hole, the through hole penetrating the first surface and the second surface; forming on the substrate a first conductive layer covering the inner wall of the through hole; a plug material is filled in the through hole to form a plug post, and the first conductive layer is located at the plug post and Between the substrates, wherein the first conductive layer extends from the first surface to the second surface through the through hole, the plug post has an opposite third end and a fourth end, wherein the third end The end portion is flush with a portion of the first conductive layer on the first surface, the fourth end portion is flush with a portion of the first conductive layer on the second surface; formed on the first surface At least one conductive elastic cantilever and electrically connecting the conductive elastic cantilever to the first conductive layer, the conductive elastic cantilever having a fixed end, a free end and being connected between the fixed end and the free end a bent portion, the fixed end portion is connected to the substrate The bent portion is bent from the fixed end portion away from the substrate, and the method for forming the conductive elastic cantilever comprises: providing an insulating rubber layer and an elastic conductive sheet, wherein the insulating layer Between the substrate and the elastic conductive sheet, the elastic conductive sheet has the conductive elastic cantilever, the insulating rubber layer has at least one opening; and the elastic conductive sheet, the insulating rubber layer and the substrate are pressed, wherein the insulating rubber The opening of the layer exposes the plug post and the first conductive layer, and the conductive elastic cantilever is located above the opening; forming a first surface on the conductive elastic cantilever and a portion of the first surface a gold layer; and forming at least one solder ball on the second surface, the solder ball being electrically connected to the first conductive layer. 如申請專利範圍第1項所述之連接器的製作方法,其中形成該第一導電層的方法包括:進行一全板電鍍製程,以形成一導電材料層,該導電材料層全面覆蓋該基板;以及在形成該塞孔柱之後,圖案化該導電材料層之位於該第一表面與該第二表面上的部分。 The method of fabricating the connector of claim 1, wherein the method of forming the first conductive layer comprises: performing a full-plate electroplating process to form a conductive material layer, the conductive material layer covering the substrate; And after forming the plug post, patterning the portion of the conductive material layer on the first surface and the second surface. 如申請專利範圍第1項所述之連接器的製作方法,更包括:在形成該銲球之前,在該第二表面上形成至少一接墊,該接墊覆蓋該第一導電層與該塞孔柱,其中該銲球形成於該接墊上並透過該接墊與該第一導電層電性連接。 The method of manufacturing the connector of claim 1, further comprising: forming at least one pad on the second surface before forming the solder ball, the pad covering the first conductive layer and the plug a hole column, wherein the solder ball is formed on the pad and electrically connected to the first conductive layer through the pad. 如申請專利範圍第1項所述之連接器的製作方法,其中使該導電彈性懸臂與該第一導電層電性連接的方法包括:於該導電彈性懸臂以及該第一表面上形成一第二導電層,且該第二導電層電性連接該導電彈性懸臂與該第一導電層。 The method of manufacturing the connector of claim 1, wherein the method of electrically connecting the conductive elastic cantilever to the first conductive layer comprises: forming a second on the conductive elastic cantilever and the first surface a conductive layer, and the second conductive layer is electrically connected to the conductive elastic cantilever and the first conductive layer. 如申請專利範圍第1項所述之連接器的製作方法,其中該自由端部與該銲球皆位於一垂直於該第一表面的垂直線上。 The method of manufacturing the connector of claim 1, wherein the free end portion and the solder ball are located on a vertical line perpendicular to the first surface. 一種連接器,包括一線路板、至少一導電彈性懸臂、一絕緣膠層、一金層以及至少一銲球,其中,該線路板包括一基板、一第一導電層以及一塞孔柱,其中, 該基板具有相對的一第一表面、一第二表面與至少一貫孔,該貫孔貫通該第一表面與該第二表面;該第一導電層配置於該基板上,並覆蓋該貫孔的內壁;該塞孔柱填充於該貫孔中,部分該第一導電層位於該塞孔柱與該基板之間,其中該第一導電層自該第一表面經該貫孔延伸至該第二表面,該塞孔柱具有相對的一第三端部與一第四端部,其中該第三端部與該第一導電層之位於該第一表面上的部分齊平,該第四端部與該第一導電層之位於該第二表面上的部分齊平;該至少一導電彈性懸臂位於該第一表面上,並與該第一導電層電性連接,該導電彈性懸臂具有一固定端部、一自由端部與連接於該固定端部與該自由端部之間的一彎折部,該固定端部與該線路板相連並位於該貫孔周邊,該彎折部自該固定端部朝向遠離該線路板的方向彎折;該絕緣膠層連接於該線路板與該導電彈性懸臂之間;該金層覆蓋該導電彈性懸臂以及部分的該第一表面;以及該至少一銲球配置於該第二表面上並與該第一導電層電性連接。 A connector comprising a circuit board, at least one conductive elastic cantilever, an insulating adhesive layer, a gold layer and at least one solder ball, wherein the circuit board comprises a substrate, a first conductive layer and a plug post, wherein , The substrate has a first surface, a second surface and at least a uniform hole, the through hole penetrating the first surface and the second surface; the first conductive layer is disposed on the substrate and covers the through hole An inner wall; the plug hole is filled in the through hole, a portion of the first conductive layer is located between the plug post and the substrate, wherein the first conductive layer extends from the first surface through the through hole to the first a second surface, the plug post has an opposite third end and a fourth end, wherein the third end is flush with a portion of the first conductive layer on the first surface, the fourth end The portion is flush with a portion of the first conductive layer on the second surface; the at least one conductive elastic cantilever is located on the first surface and electrically connected to the first conductive layer, the conductive elastic cantilever has a fixed An end portion, a free end portion and a bent portion connected between the fixed end portion and the free end portion, the fixed end portion being connected to the circuit board and located at a periphery of the through hole, the bent portion being fixed from the fixed portion The end is bent away from the circuit board; the insulating layer is connected to the Between the circuit board and the conductive resilient cantilever; the gold layer covers the electrically conductive elastic cantilever and the first surface portion; and at least one solder ball disposed on the second surface and connected to the first electrically conductive layer. 如申請專利範圍第6項所述之連接器,其中該自由端部與該銲球皆位於一垂直於該第一表面的垂直線上。 The connector of claim 6, wherein the free end and the solder ball are located on a vertical line perpendicular to the first surface. 如申請專利範圍第7項所述之連接器,其中該塞孔柱位於該垂直線上。 The connector of claim 7, wherein the plug post is located on the vertical line. 如申請專利範圍第7項所述之連接器,其中該塞孔柱位於該垂直線的一側。 The connector of claim 7, wherein the plug post is located on one side of the vertical line.
TW099115274A 2010-05-13 2010-05-13 Connector and manufacturing method thereof TWI475758B (en)

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