TWI471555B - Optical inspection device and array test apparatus having the same - Google Patents

Description

Array test device and optical detection unit thereof

The present invention relates to an optical detecting unit capable of testing and measuring a glass panel, and an array testing device having the optical detecting unit.

As far as the public is concerned, a flat panel display is a thin and light image display that is lighter and thinner than conventional cathode ray tube displays. A wide variety of flat panel displays have been developed and used, for example, liquid crystal displays, plasma displays, field emission displays, organic light emitting diode displays, and the like.

The liquid crystal display has a plurality of liquid crystal cell arrays, and provides data signals to the liquid crystal cells according to the image data to control the light transmittance of each liquid crystal cell to display the image. Liquid crystal displays have been widely used due to their advantages of thinness, light weight, low power consumption, and low operating voltage. In the manufacturing process of the liquid crystal display panel, a detection program is required to inspect whether a substrate (hereinafter referred to as a glass panel on which a thin film transistor and a pixel electrode are provided) has defects, such as detecting a data line disposed on the substrate. Or whether the electrical connection of the scan line is good or the accuracy of the color of the pixel unit is detected.

An array test device is typically used to test the glass panel. The array test apparatus includes a plurality of test units, a load unit, and an unload unit. The test unit is a test glass panel, the loading unit loads the glass panel to the test unit, and the unloading unit unloads the glass panel from the test unit.

In addition, the test unit includes an optical detection unit that detects defects in the appearance of the glass panel, such as defects in one of the circuit patterns on the glass panel, or surface defects. The optical detecting unit comprises an optical system and an imaging unit. The optical system comprises a plurality of lenses. When the glass panel passes through the optical system, the imaging unit images the glass panel.

Preferably, the magnification of the optical system of the optical detecting unit can be changed as much as possible, so that the glass panel can be detected at a desired resolution. In particular, the optical system can project the glass panel to the camera unit at a lower magnification and a higher magnification so that the portion to be detected can be found on the glass panel and magnified. To do this, it is necessary to use an object lens replacement method to replace the objective lens facing the glass panel, or to use a tube lens replacement method to replace the lens barrel between the objective lens and the camera unit. lens. However, the above method requires a driving unit to be coupled with the objective lens or the lens barrel, and the structure of the driving unit is complicated. In addition, foreign matter can create and contaminate the optical system or glass panel when the drive unit is actuated.

In view of the above problems, it is an object of the present invention to provide an optical detecting unit and an array testing device having an optical detecting unit to simplify the structure of one of the magnifications of the optical system and avoid generation when adjusting the magnification of the optical system. Impurities, thereby preventing the optical system or a glass panel from being contaminated by impurities.

To achieve the above object, an optical detecting unit according to the present invention comprises an objective lens, a plurality of lens barrel lenses, an image pickup unit, and a switching unit. The objective lens is placed facing a glass panel. The barrel lenses have different magnifications, and the light that exits the objective lens enters the barrel lenses. The camera unit picks up an image of light that is passed through one of the lens barrels. The switching unit selectively switches the light path such that light exiting the objective lens enters the selected one of the lens barrels.

To achieve the above object, an optical detecting unit according to the present invention comprises an objective lens, a plurality of lens barrel lenses, an image pickup unit, and a switching unit. The objective lens is placed facing a glass panel. The lens barrel lenses have different magnifications, and the light that exits the objective lens enters the lens barrels; The camera unit picks up an image of one of the rays that are passed through the lens barrels. The switching unit selectively switches the light path such that light that exits from the selected lens barrel enters the camera unit.

In one embodiment, the magnification of the light entering the camera unit can be controlled by a simple moving operation of the light blocking element. Therefore, the structure of the optical detecting unit of the present invention and the control of the image magnification are simpler than the conventional need to replace the objective lens or the lens barrel to control the magnification of the image.

Furthermore, the optical detecting unit of the present invention may comprise a plurality of transmittance conversion units that, when energized, enter a first state to pass light, and when energy is suspended, The equal transmittance conversion unit enters a second state to block the passage of light. In this case, by applying energy to the selected transmittance conversion unit and suspending the application of energy to the other, the magnification of the image taken by the camera unit can be easily controlled. In addition, the optical detecting unit of the present invention does not require a driving element for moving a member in the control of the magnification of the image taken by the image capturing unit, thereby avoiding impurities generated by the movement of the member or the actuation of the driving member, thereby avoiding Impurities contaminate optical systems or glass panels.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an array test apparatus and an optical detecting unit thereof according to a preferred embodiment of the present invention will be described with reference to the accompanying drawings, wherein the same elements will be described with the same reference numerals.

An array test apparatus according to a preferred embodiment of the present invention includes a base 10, a loading unit 30, a test unit 20, and an unloading unit 40. The loading unit 30 is loaded with a glass panel P, and the testing unit 20 tests the loaded glass panel P. The unloading unit 40 unloads the glass panel P tested by the testing unit 20 from the loading unit 30.

The test unit 20 tests the electrical defects of the glass panel P and includes a transparent support member 21, a test module 22, a probe assembly 23, and a control unit (not shown). The glass panel P is loaded by the loading unit 30 and disposed on the light-transmitting support member 21. The test module 22 tests whether the glass panel P located on the light-transmitting support member 21 has an electrical defect. The probe assembly 23 applies an electrical signal to the electrodes of the glass panel P on the light-transmissive support member 21. The control unit controls the test module 22 and the probe assembly 23.

In addition, a test module support frame 223 is disposed on the light-transmitting support member 21 and extends in a Y-axis direction by a predetermined length. The test module 22 is disposed on the test module support frame 223 and movable in the Y-axis direction. The embodiment may include a plurality of test modules 22 disposed on the test module support frame 223 and arranged along a direction in which the test module support frame 223 extends (Y-axis direction). The glass panel P is located on the transparent support 21, and the test module 22 is disposed on the glass panel P and tests whether the glass panel P has electrical defects. The test modules 22 each include a modulator unit 221 and an imaging unit 222. The modulator unit 221 is close to the glass panel P. The imaging unit 222 images the modulator unit 221.

The array test device can be classified into a reflective type and a light transmitting type. In the reflective mode, a light source is disposed in the test module 21, and a reflective layer (not shown) is disposed in the modulator unit 221 of the test module 22. Therefore, after the light source emits light into the modulator unit 221, it is determined whether the glass panel P has a defect by measuring the amount of light reflected by the reflective layer of the modulator unit 221.

The test unit 20 can be classified into a reflective type and a light transmitting type. In the reflective form, a light source is disposed in the test module 21, and a reflective layer is disposed on the light transmissive support 21. Therefore, after the light emitted from the light source is reflected by the reflective layer of the light-transmitting support member 21, it can be determined whether the glass panel P has a defect by measuring the amount of light passing through the modulator unit 221. In the light transmissive aspect, a light source is disposed under the light transmissive support member 21. Therefore, after the light source emits light, it is judged whether or not the glass panel P has a defect by measuring the amount of light passing through the modulator unit 221. Reflective or light transmissive aspects can be applied to the array test apparatus of this embodiment.

In addition, the testing unit 20 may further include an optical detecting unit 70 that detects an appearance defect of the glass panel P, for example, detecting a circuit pattern or surface defect on the glass panel P. The optical detecting unit 70 is disposed in the test module 22 and can move along the Y-axis direction with the test module 22 to detect the appearance defect of the glass panel P. The optical detecting unit 70 can be disposed in each test module 22 or only in some test modules 22 .

The modulator unit 221 of the test module 22 has a layer of electro-optic material which can vary the reflectance (in the reflective state) or the transmittance according to the electric field strength between the glass panel P and the modulator unit 221 (in In the light transmission pattern). The electro-optic material layer is composed of a material having specific physical properties. When power is applied to the glass panel P and the modulator unit 221, the physical properties of the material vary with the magnitude of the generated electric field, so that the modulator unit 221 is entered. The reflectance or transmittance of the light changes.

The probe assembly 23 includes a probe assembly support frame 231 and a plurality of probe heads 233. The probe assembly support frame 231 extends a predetermined length in the Y-axis direction. The probe heads 233 are arranged at a fixed pitch along the long axis direction (Y-axis direction) of the probe assembly supporting frame 231. Each probe head 233 has a plurality of probes (not shown).

The probe assembly support frame 231 is coupled to an X-axis drive unit 235 such that the probe assembly support frame 231 can be moved in the X-axis direction by the X-axis drive unit 235, and the X-axis direction is coupled to the probe assembly support frame 231. The long axis direction (Y axis direction) is horizontal and vertical. Further, a Y-axis driving unit 236 is disposed between the probe assembly supporting frame 231 and the probe head 233. The Y-axis driving unit 236 moves the probe head 233 in the Y-axis direction. A variety of linear drive members, such as a linear motor, a ball screw, etc., can be used as the X-axis drive unit 235 and/or the Y-axis drive unit 236.

The loading unit 30 supports the glass panel P to be tested and carries the glass panel P to the test unit 20. The unloading unit 40 supports the glass panel P that has been tested and carries the glass panel P from the test unit 20 away from the array test device. The loading unit 30 and the unloading unit 40 each include a plurality of support plates 50 and a glass panel transport unit 60. The support plates 50 are disposed at regular intervals and support the glass panel P thereon. The glass panel transport unit 60 carries the glass panel P.

Each of the support plates 50 may have a plurality of blow holes 51 to blow out the gas to suspend the glass panel. The blow hole 51 is connected to a gas supply unit (not shown), and the gas supply unit supplies a gas to the blow hole.

Hereinafter, an optical detecting apparatus according to a first embodiment of the present invention will be described with reference to Figs. 2 to 6 .

As shown in FIG. 2 and FIG. 3 , the optical detecting unit 70 includes an objective lens 71 , an illumination unit 72 , a plurality of barrel lenses 73 , an imaging unit 74 , a light distribution unit 75 , a light guiding unit 76 , and a switching unit 77 . And a frame 80. The objective lens 71 is disposed facing the glass panel P. The light unit 72 provides light to the objective lens 71. The barrel lenses 73 have different magnifications and are spaced apart, and are disposed at positions such that light passing through the objective lens 71 enters the corresponding barrel lens 73. The imaging unit 74 can image light passing through any of the lens barrels 73. The light distribution unit 75 is disposed between the objective lens 71 and the lens barrel 73 to distribute the light passing through the objective lens 71 to the lens barrel 73. The light guiding unit 76 guides the light passing through one of the lens barrels 73 to the imaging unit 74. The switching unit 77 can selectively switch the light path such that the light passing through the objective lens 71 can only enter a barrel lens 73. The frame 80 houses and supports at least the lens barrel 73.

The barrel lens 73 may include a first barrel lens 731 and a second barrel lens 732, and the second barrel lens 732 is adjacent to the first barrel lens 731. The first barrel lens 731 and the second barrel lens 732 are merely illustrative, and the barrel lens 73 of the present invention may include three or more barrel lenses. The barrel lens 73 has a different magnification. Each of the barrel lenses 73 preferably has a plurality of optical lenses arranged in a line.

The camera unit 74 can include a camera having a Charge Coupled Device (CCD).

The light distribution unit 75 includes a first half mirror 751 and a first mirror 752. The first half mirror 751 is disposed between the objective lens 71 and the first barrel lens 731. The first mirror 752 is adjacent to the first half mirror 751 and reflects the light reflected by the first half mirror 751 to the second barrel lens 732. Thereby, part of the light enters the first barrel lens 731 via the first half mirror 751 after penetrating the objective lens 71. The remaining light passing through the objective lens 71 is reflected by the first half mirror 751 and the first mirror 752 into the second barrel lens 732.

The light guiding unit 76 includes a second half mirror 761 and a second mirror 762. The first half mirror 761 is disposed between the imaging unit 74 and the second barrel lens 732. The second mirror 762 is adjacent to the second half mirror 761 and reflects the light passing through the first barrel lens 731 to the second half mirror 761. Thereby, the light passing through the first barrel lens 731 is reflected by the second mirror 762 and the second half mirror 761 to enter the imaging unit 74. The light that has passed through the second barrel lens 732 enters the imaging unit 74 via the second half mirror 761.

The light unit 72 includes a light source 721, a third mirror 722, and a third half mirror 723. The third mirror 722 reflects the light emitted by the light source 721. The third half mirror 723 reflects the light reflected by the third mirror 722 to the objective lens 71.

As shown in FIG. 2 to FIG. 4, the switching unit 77 includes a light blocking element 771 and a driving unit 772. The light blocking member 771 is movable between an area between the objective lens 71 and the first barrel lens 731 and a region between the objective lens 71 and the second barrel lens 732 to prevent light from entering the unselected first mirror The barrel lens 731 or the second barrel lens 732. The drive unit 772 moves the light blocking element 771.

In detail, the light blocking element 771 can be selectively located between the first half mirror 751 and the first barrel lens 731 or between the first mirror 752 and the second barrel lens 732. Therefore, as shown in FIG. 5, when the light blocking member 771 is located between the first mirror 752 and the second barrel lens 732, the light passing through the objective lens 71 enters the first barrel lens 731 but is blocked. The second lens barrel lens 732 is entered. Conversely, as shown in FIG. 6, when the light blocking member 771 is located between the first half mirror 751 and the first barrel lens 731, the light passing through the objective lens 71 enters the second barrel lens 732 but is Blocked and unable to enter the first barrel lens 731. As such, the position of the light blocking element 771 can be adjusted such that light enters only the selected first barrel lens 731 or second barrel lens 732, and the first barrel lens 731 and the second barrel lens 732 have different Magnification. Therefore, the magnification of the image captured by the image pickup unit 74 can be controlled by a simple operation of adjusting the light blocking member 771.

As shown in FIG. 4, the driving unit 722 includes an actuator 773, a connecting member 774, a moving block 775, a connecting rod 776, and a guide rail 777. The actuator 773 is disposed on an outer surface of the frame 80. A slit 81 is formed on the outer surface of the frame 80. The connecting member 774 passes through the slit 81 of the frame 80 and is connected to the light blocking member 771. Mobile block 775 is coupled to connection element 774. A connecting rod 776 is coupled between the moving block 775 and the actuator 773. A guide rail 777 is located on the outer surface of the frame 80 to guide the movement of the moving block 775. Actuator 773 can include a pneumatic or hydraulic cylinder. In the present invention, since the actuator 773 is disposed outside the frame 80, even if impurities are generated during the actuation of the actuator 773, impurities cannot enter the frame 80. Therefore, it is possible to prevent the light path from being contaminated by impurities. In addition, the present invention is not limited to the above structure, and the driving unit 722 can have various variations, such as a linear motor, a ball screw member, or the like, or a linear driving member that can drive the light blocking member 771 to move linearly, and can be used as a driving unit. 722.

As described above, in the optical detecting unit 70 of the first embodiment of the present invention, the magnification of the light entering the image pickup unit 74 can be controlled by the simple moving operation of the light blocking member 771. Therefore, the structure of the optical detecting unit 70 of the present embodiment and the control of the image magnification are simpler than the conventional need to replace the objective lens or the lens barrel to control the magnification of the image.

In addition, in the optical detecting unit 70 of the present embodiment, the driving unit 772 that drives the light blocking element 771 is disposed outside the frame 80, so that even if impurities are generated in the operation of the driving unit 772, impurities cannot enter the frame 80. . Therefore, the optical system can be protected from contamination by impurities.

Hereinafter, please refer to FIG. 7 and FIG. 8 for explaining an optical detecting unit according to a second embodiment of the present invention. In the present embodiment, the same members as those of the first embodiment are given the same reference numerals as those of the first embodiment, and will not be described in detail.

As shown in FIG. 7 and FIG. 8 , the optical detecting unit 70 includes an objective lens 71 , an illumination unit 72 , a plurality of barrel lenses 73 , an imaging unit 74 , a light distribution unit 75 , a light guiding unit 76 , and a switching unit 77 . And a frame 80. The objective lens 71 is disposed facing the glass panel P. The light unit 72 provides light to the objective lens 71. The barrel lenses 73 have different magnifications and are spaced apart, and are disposed at positions such that light passing through the objective lens 71 enters the corresponding barrel lens 73. The imaging unit 74 can image light passing through any of the lens barrels 73. The light distribution unit 75 is disposed between the objective lens 71 and the lens barrel 73 to distribute the light passing through the objective lens 71 to the lens barrel 73. The light guiding unit 76 guides the light passing through one of the lens barrels 73 to the imaging unit 74. The switching unit 77 can selectively switch the light paths such that only light passing through one of the lens barrels 73 enters the imaging unit 74. The frame 80 houses and supports at least the lens barrel 73.

The barrel lens 73 may include a first barrel lens 731 and a second barrel lens 732, and the second barrel lens 732 is adjacent to the first barrel lens 731. The first barrel lens 731 and the second barrel lens 732 are merely illustrative, and the barrel lens 73 of the present invention may include three or more barrel lenses.

The switching unit 77 includes a light blocking element 771 and a driving unit 772. The light blocking member 771 is slidable between a region between the image pickup unit 74 and the first barrel lens 731 and a region between the image pickup unit 74 and the second barrel lens 732 such that only the selected first lens barrel 731 is selected. Or the light that the second barrel lens 732 passes out enters the imaging unit 74. The drive unit 772 moves the light blocking element 771.

In detail, the light blocking element 771 can be selectively located between the second half mirror 761 and the second barrel lens 732 or between the second mirror 762 and the first barrel lens 731. Therefore, as shown in FIG. 7, when the light blocking member 771 is located between the second mirror 762 and the first barrel lens 731, the light passing through the second barrel lens 732 enters the imaging unit 74, but passes through the The light of one of the barrel lenses 731 is blocked from entering the image pickup unit 74. Conversely, as shown in FIG. 8, when the light blocking member 771 is located between the second half mirror 761 and the second barrel lens 732, the light passing through the first barrel lens 731 enters the imaging unit 74, but Light passing through the second barrel lens 732 is blocked from entering the imaging unit 74. As such, the position of the light blocking member 771 can be adjusted such that only the light that is selected to pass through the first barrel lens 731 or the light that is emitted from the second barrel lens 732 can enter the imaging unit 74, and A barrel lens 731 and a second barrel lens 732 have different magnifications. Therefore, the magnification of the image captured by the image pickup unit 74 can be controlled by a simple operation of adjusting the light blocking member 771.

The driving unit 772 of the second embodiment can be the same as the first embodiment.

As described above, in the optical detecting unit 70 of the present embodiment, the magnification of the light entering the imaging unit 74 can be controlled by a simple operation of adjusting the light blocking member 771. Therefore, the structure of the optical detecting unit 70 of the present embodiment and the control of the image magnification are simpler than the conventional need to replace the objective lens or the lens barrel to control the magnification of the image.

Hereinafter, an optical detecting unit according to a third embodiment of the present invention will be described with reference to FIGS. 9 to 11. In the present embodiment, the same members as those of the first embodiment or the second embodiment are given the same reference numerals and will not be described in detail.

As shown in FIG. 9 , the optical detecting unit 70 of the present embodiment includes an objective lens 71 , an illumination unit 72 , a plurality of barrel lenses 73 , an imaging unit 74 , a light distribution unit 75 , a light guiding unit 76 , and a switching unit . 90. The objective lens 71 is disposed facing the glass panel P. The light unit 72 provides light to the objective lens 71. The barrel lenses 73 have different magnifications and are spaced apart, and are disposed at positions such that light passing through the objective lens 71 enters the corresponding barrel lens 73. The imaging unit 74 can image light passing through any of the lens barrels 73. The light distribution unit 75 is disposed between the objective lens 71 and the lens barrel 73 to distribute the light passing through the objective lens 71 to the lens barrel 73. The light guiding unit 76 guides the light passing through one of the lens barrels 73 to the imaging unit 74. The switching unit 90 can selectively switch the light path such that the light passing through the objective lens 71 can enter only one of the lens barrels 73 at a time.

The barrel lens 73 may include a first barrel lens 731 and a second barrel lens 732, and the second barrel lens 732 is adjacent to the first barrel lens 731. The first barrel lens 731 and the second barrel lens 732 are merely illustrative, and the barrel lens 73 of the present invention may include three or more barrel lenses.

The switching unit 90 may include a plurality of transmittance conversion units 91, 92 that are respectively disposed corresponding to a barrel lens 73. In detail, in the embodiment, the switching unit 90 includes a first transmittance conversion unit 91, a second transmittance conversion unit 92, and an energy application unit 93. The first transmittance conversion unit 91 is disposed between the first half mirror 751 and the first barrel lens 731 , and the second transmittance conversion unit 92 is disposed between the first mirror 752 and the second barrel lens 732 . The energy application unit 93 can selectively apply energy to the first transmittance conversion unit 91 and the second transmittance conversion unit 92.

The energy application unit 93 includes an energy supply 931, a connection line 932, and a switch 933. The connection line 932 connects the energy supply 931 to the first transmittance conversion unit 91 and the second transmittance conversion unit 92. The switch 933 is disposed on the connection line 932 and can selectively apply energy to the first transmittance conversion unit 91 and the second transmittance conversion unit 92.

As shown in FIGS. 10 and 11, the first transmittance conversion unit 91 and the second transmittance conversion unit 92 each include a pair of glass substrates 97, a transmittance conversion element 99, and an electrode layer 98. The transmittance conversion element 99 is disposed between the two glass panels 97. The two electrode layers 98 are respectively disposed between the transmittance conversion element 99 and the glass substrate 97. The transmittance conversion element 99 may comprise a polymer dispersed liquid crystal (PDLC). The polymer dispersed liquid crystal system is uniformly distributed in a polymer matrix.

As shown in FIG. 11, in the transmittance conversion element 99, when energy is applied to the electrode layer 98, the liquid crystal is steered in one direction by the action of an electric field corresponding to the arrangement of the refractive indices of the polymer matrix. Thereby, the transmittance conversion element 99 enters a first state which causes light containing an object shape to pass through the transmittance conversion element 99. As shown in FIG. 10, when energy is applied to the electrode layer 98, the transmittance conversion element 99 enters a second state that prevents light from passing through the transmittance conversion element 99.

Further, the use of the polymer-dispersed liquid crystal as the transmittance conversion element 99 for each of the transmittance conversion units 91 and 92 is merely illustrative and is not intended to limit the present invention. For example, a liquid crystal can also be used as the transmittance conversion element 99.

In addition, each of the transmittance conversion units 91, 92 may have various structural variations, for example, the liquid crystal may be KDP (KH2PO4), ADP (NH4H2PO4), BSO (Bi12SiO20), BTO (Bi12TiO20) or LiNbO3. And the penetration of light can be based on certain specific conditions, such as the application of energy or the formation of an electric field.

Therefore, when the first transmittance conversion unit 91 enters the first state by applying energy and the second transmittance conversion unit 92 enters the second state by suspending the application of energy, the light that has passed through the objective lens 71 enters The first barrel lens 731 is blocked but cannot enter the second barrel lens 732. In this case, the optical path is as shown by path A of FIG. Conversely, when the first transmittance conversion unit 91 enters the second state by suspending the application of energy and the second transmittance conversion unit 92 enters the first state by applying energy, the light that has passed through the objective lens 71 It enters the second barrel lens 732 but is blocked from entering the first barrel lens 731. In this case, the optical path is as shown by path B in FIG.

As described above, in the optical detecting unit 70 of the present embodiment, by applying energy to the first or second transmittance conversion unit 91 or 92 and suspending the application of energy to the other, the light can be made to enter the selected first A barrel lens 731 or a second barrel lens 732, wherein the first barrel lens 731 and the second barrel lens 732 have different magnifications. Therefore, the magnification of the image taken by the image pickup unit 74 can be easily controlled.

In addition, the optical detecting unit 70 of the present embodiment does not require a driving element for moving a member in the control of the magnification of the image taken by the imaging unit 74, thereby avoiding impurities generated by the movement of the member or the actuation of the driving member. In order to avoid contamination of the optical system or the glass panel P by impurities.

Hereinafter, please refer to FIG. 12 to explain an optical detecting unit according to a fourth embodiment of the present invention. In the present embodiment, the same members as those of the first, second or third embodiment are given the same reference numerals and will not be described in detail.

As shown in FIG. 12, the optical detecting unit 70 of the present embodiment includes an objective lens 71, an illumination unit 72, a plurality of barrel lenses 73, an imaging unit 74, a light distribution unit 75, a light guiding unit 76, and a switching unit. 90. The objective lens 71 is disposed facing the glass panel P. The light unit 72 provides light to the objective lens 71. The barrel lenses 73 have different magnifications and are spaced apart, and are disposed at positions such that light passing through the objective lens 71 enters the corresponding barrel lens 73. The imaging unit 74 can image light passing through any of the lens barrels 73. The light distribution unit 75 is disposed between the objective lens 71 and the lens barrel 73 to distribute the light passing through the objective lens 71 to the lens barrel 73. The light guiding unit 76 guides the light passing through one of the lens barrels 73 to the imaging unit 74. The switching unit 90 can selectively switch the light path such that only light passing through one of the lens barrels 73 enters the imaging unit 74.

The barrel lens 73 may include a first barrel lens 731 and a second barrel lens 732, and the second barrel lens 732 is adjacent to the first barrel lens 731. The first barrel lens 731 and the second barrel lens 732 are merely illustrative, and the barrel lens 73 of the present invention may include three or more barrel lenses.

The switching unit 90 may include a plurality of transmittance conversion units 91, 92 that are respectively disposed corresponding to a barrel lens 73. In detail, in the embodiment, the switching unit 90 includes a first transmittance conversion unit 91, a second transmittance conversion unit 92, and an energy application unit 93. The first transmittance conversion unit 91 is disposed between the second mirror 762 and the first barrel lens 731 , and the second transmittance conversion unit 92 is disposed between the second half mirror 761 and the second barrel lens 732 . The energy application unit 93 can selectively apply energy to the first transmittance conversion unit 91 and the second transmittance conversion unit 92. The first transmittance conversion unit 91, the second transmittance conversion unit 92, and the energy application unit 93 are the same as the third embodiment.

Therefore, when the first transmittance conversion unit 91 enters the first state by applying energy and the second transmittance conversion unit 92 enters the second state by suspending the application of energy, the first lens barrel 731 has passed through. The light enters the imaging unit 74, but the light passing through the second barrel lens 732 is blocked from entering the imaging unit 74. In this case, the optical path is as shown by path A of FIG. Conversely, when the first transmittance conversion unit 91 enters the second state by suspending the application of energy and the second transmittance conversion unit 92 enters the first state by applying energy, it has passed through the second lens barrel. The light of the lens 732 enters the imaging unit 74, but the light passing through the first barrel lens 731 is blocked from entering the imaging unit 74. In this case, the optical path is as shown by path B in FIG.

As described above, in the optical detecting unit 70 of the present embodiment, by applying energy to the first or second transmittance conversion unit 91 or 92 and suspending the application of energy to the other, it is possible to make only the selected one The light that is passed through the one of the barrel lens 731 or the second barrel lens 732 can enter the imaging unit 74, wherein the first barrel lens 731 and the second barrel lens 732 have different magnifications. Therefore, the magnification of the image taken by the image pickup unit 74 can be easily controlled.

In addition, the optical detecting unit 70 of the present embodiment does not require a driving element for moving a member in the control of the magnification of the image taken by the imaging unit 74, thereby avoiding impurities generated by the movement of the member or the actuation of the driving member. In order to avoid contamination of the optical system or the glass panel P by impurities.

The technical features of all embodiments of the present invention may be implemented separately or in combination. Further, the optical detecting unit of the present invention can be applied to various devices such as a test device for a glass panel of a liquid crystal display device or a test device for a semiconductor substrate.

The above is intended to be illustrative only and not limiting. Any equivalent modifications or alterations to the spirit and scope of the invention are intended to be included in the scope of the appended claims.

10. . . Pedestal

20. . . Test unit

twenty one. . . Light-transmitting support

twenty two. . . Test module

221. . . Modulator unit

222. . . Camera unit

223. . . Test module support frame

twenty three. . . Probe assembly

231. . . Probe assembly support frame

233. . . Probe head

235. . . X-axis drive unit

236. . . Y-axis drive unit

30. . . Loading unit

40. . . Unloading unit

50. . . Support plate

51. . . Blow hole

60. . . Glass panel transport unit

70. . . Optical detection unit

71. . . Objective lens

72. . . Light unit

721. . . light source

722. . . Third mirror

723. . . Third half mirror

73. . . Barrel lens

731. . . First barrel lens

732. . . Second barrel lens

74. . . Camera unit

75. . . Light distribution unit

751. . . First half mirror

752. . . First mirror

76. . . Light guide unit

761. . . Second half mirror

762. . . Second mirror

77. . . Switching unit

771. . . Light blocking element

772. . . Drive unit

773. . . Actuator

774. . . Connecting element

775. . . Moving block

776. . . Connecting rod

777. . . guide

80. . . framework

81. . . Slit

90. . . Switching unit

91. . . First transmittance conversion unit

92. . . Second transmittance conversion unit

93. . . Energy application unit

931. . . Energy supply

932. . . Cable

933. . . Switcher

97. . . glass substrate

99. . . Transmission rate conversion element

98. . . Electrode layer

A. . . path

B. . . path

P. . . Glass panel

1 is a perspective view of an array test apparatus having an optical detecting unit according to a preferred embodiment of the present invention;

2 is a perspective view of an optical detecting unit according to a first embodiment of the present invention;

Figure 3 is a schematic view of the optical detecting unit shown in Figure 2;

4 is a schematic diagram of a switching unit of one of the optical detecting units shown in FIG. 2;

5 and FIG. 6 are schematic diagrams showing the operation of the optical detecting unit shown in FIG. 2;

7 and FIG. 8 are schematic diagrams showing an optical detecting unit according to a second embodiment of the present invention;

FIG. 9 is a schematic diagram of an optical detecting unit according to a third embodiment of the present invention; FIG.

10 and FIG. 11 are schematic diagrams showing a transmittance conversion unit of the optical detecting unit shown in FIG. 9;

FIG. 12 is a schematic diagram of an optical detecting unit according to a fourth embodiment of the present invention.

70. . . Optical detection unit

71. . . Objective lens

72. . . Light unit

721. . . light source

722. . . Third mirror

723. . . Third half mirror

73. . . Barrel lens

731. . . First barrel lens

732. . . Second barrel lens

74. . . Camera unit

75. . . Light distribution unit

751. . . First half mirror

752. . . First mirror

76. . . Light guide unit

761. . . Second half mirror

762. . . Second mirror

771. . . Light blocking element

80. . . framework

P. . . Glass panel

Claims (9)

An optical detecting unit comprises: an objective lens disposed facing a glass panel; a plurality of lens barrels having different magnifications, and the light passing through the objective lens enters the lens barrel; and an imaging unit is taken from An image of one of the light passing through one of the lens barrels; and a switching unit that selectively switches the light path such that light exiting the objective lens enters the selected one of the lens barrels. The optical detecting unit of claim 1, wherein the switching unit comprises: a light blocking member movable between the objective lens and the lens barrel and blocking light entering from the objective lens One of the lens barrels is not selected; and a driving unit moves the light blocking element. The optical detecting unit of claim 2, wherein the driving unit comprises: an actuator disposed on an outer surface of a frame, the frame receiving the lens barrel; a connecting component, Passing through a slit of the outer surface of the frame and connecting with the light blocking member; a moving block connected to the connecting member; and a connecting rod connecting the moving block to the actuator. The optical detecting unit of claim 1, wherein the switching unit comprises: a plurality of transmittance conversion units disposed between the objective lens and the lens barrels, and respectively located in the light entering the lens barrels In the path, when the energy is applied, the transmittance conversion units enter a first state to pass the light, and when the energy is suspended, the transmittance conversion units enter a second state to Blocking light passage; and an energy application unit selectively applying energy to the selected transmittance conversion unit. An optical detecting unit comprises: an objective lens disposed facing a glass panel; a plurality of lens barrels having different magnifications, and the light passing through the objective lens enters the lens barrel; and an imaging unit is taken from The lens lens passes through one of the light rays; and a switching unit selectively switches the light path such that light from the selected lens barrel enters the camera unit. The optical detecting unit of claim 5, wherein the switching unit comprises: a light blocking member movable between the lens barrel and the camera unit, and blocking the lens from being unselected The light that the lens passes out enters the camera unit; and a driving unit moves the light blocking element. The optical detecting unit of claim 6, wherein the driving unit comprises: an actuator disposed on an outer surface of a frame, the frame receiving the lens barrel; a connecting component, Passing through a slit of the outer surface of the frame and connecting with the light blocking member; a moving block connected to the connecting member; and a connecting rod connecting the moving block to the actuator. The optical detecting unit of claim 5, wherein the switching unit comprises: a plurality of transmittance conversion units disposed between the lens barrels and the imaging unit, and respectively located in the light from the equal lens barrel In the path of the penetration, when the energy is applied, the transmittance conversion units enter a first state to pass the light, and when the energy is suspended, the transmittance conversion units enter a second a state to block light passage; and an energy application unit to selectively apply energy to the selected transmittance conversion unit. An array test apparatus comprising: a test module disposed facing a glass panel to test defects of the glass panel, and the test module comprises the method of any one of claims 1 to 8 Optical detection unit.