TWI470285B - Color filter and manufacturing method thereof - Google Patents

Description

Color filter and manufacturing method thereof

The present invention relates to an optical film and a method of manufacturing the same, and more particularly to a color filter and a method of manufacturing the same.

In the current technology, the liquid-based liquid crystal panel (LCoS) can be roughly classified into CF-LCoS and CS-LCoS. The CF-LCoS will form a color filter (CF) on its liquid crystal panel, and display different colors through the color filter, that is, provide spatial light mixing to display color images, and the light source module thereof. White light can be correspondingly provided as a light source. In addition, the CS-LCoS does not form a color filter on the liquid crystal panel, and realizes temporal mixing using a color sequential (CS) method to display a color image.

However, in the case of CF-LCoS, in order to form a color filter on a liquid crystal panel, in a general color filter process, a pixel of several colors is required on the liquid crystal panel, and it is necessary to form a photoresist of the same color and corresponding Process. Taking the RGBCY process as an example, the process requires five colors of pixels to be formed on the liquid crystal panel, so at least five corresponding processes are required. Therefore, based on time and cost considerations, it is necessary to provide a more economical color filter process.

The invention provides a method for manufacturing a color filter, which can be greatly reduced Low cost and reduced process time.

The present invention provides a color filter that is made in a more economical manufacturing process and that provides good optical quality.

The present invention provides a method of manufacturing a color filter comprising the following steps. A substrate is provided. The substrate has a first region and a second region. Forming a first layer of filter material in the first portion of the first region and the first portion of the second region. Forming a second layer of filter material in a second portion of the second region. Forming a third layer of filter material in the second portion of one of the first regions and the third portion of the second region. When a white light is projected onto the color filter, the first region and the second region reflect a plurality of color lights.

In an embodiment of the invention, the first region is composed of a plurality of single-layer film filter units, and the second region is composed of a plurality of multilayer film filter units.

In an embodiment of the invention, the step of forming the first filter material layer comprises: forming a plurality of first single-layer film filter units in the first portion of the first region. When the white light is projected to the first single layer film filter unit, the first single layer film filter unit reflects a first color light.

In an embodiment of the invention, the step of forming the third filter material layer comprises: forming a plurality of second single-layer film filter units in the second portion of the first region. When a white light is projected onto the second single layer film filter unit, the second single layer film filter unit reflects a second color light.

In an embodiment of the invention, the step of forming the second filter material layer comprises: forming a plurality of first multilayer film filter units at a portion where the first portion and the second portion of the second region overlap. When the white light is projected onto the first multilayer film filter unit, the first multilayer film filter unit reflects a third color light.

In an embodiment of the invention, the step of forming the third filter material layer comprises: forming a plurality of second multilayer film filter units at a portion where the second portion of the second region overlaps with the third portion. When the white light is projected onto the second multilayer film filter unit, the second multilayer film filter unit reflects a fourth color light.

In an embodiment of the invention, the step of forming the third filter material layer comprises: forming a plurality of third multilayer film filter units at a portion where the first portion and the third portion of the second region overlap. When the white light is projected to the third multilayer film filter unit, the third multilayer film filter unit reflects a fifth color light.

In an embodiment of the invention, when white light is projected onto the color filter, the first region reflects a yellow light and a Cyan color light.

In an embodiment of the invention, when white light is projected onto the color filter, the second region reflects a red light, a blue light, and a green light.

In an embodiment of the invention, the material of the first filter material layer, the second filter material layer and the third filter material layer is a color photoresist.

The invention provides a color filter comprising a substrate, a plurality of single layer film filter units and a plurality of multilayer film filter units. The substrate has a first region and a second region. The single-layer film filter units are respectively disposed on the substrate and located in the first region. The multilayer film filter sheets are respectively disposed on the substrate and located in the second region. When a white light is projected onto the color filter, the single layer film filter unit and the multilayer film filter unit reflect a plurality of color lights.

In an embodiment of the invention, the single-layer film filter unit comprises a plurality of first single-layer film filter units. When the white light is projected to the first single layer film filter unit, the first single layer film filter unit reflects a first color light.

In an embodiment of the invention, the single layer membrane filter unit comprises A plurality of second single layer membrane filter units. When the white light is projected to the second single layer film filter unit, the second single layer film filter unit reflects a second color light.

In an embodiment of the invention, the multilayer film filter unit comprises a plurality of first multilayer film filter units, and when the white light is projected onto the first multilayer film filter unit, the first multilayer film filter unit Reflecting a third color light.

In an embodiment of the invention, the multilayer film filter unit comprises a plurality of second multilayer film filter units. When the white light is projected onto the second multilayer film filter unit, the second multilayer film filter unit reflects a fourth color light.

In an embodiment of the invention, the multilayer film filter unit comprises a plurality of third multilayer film filter units. When the white light is projected to the third multilayer film filter unit, the third multilayer film filter unit reflects a fifth color light.

In an embodiment of the invention, when white light is projected onto the color filter, the single layer film filter unit reflects a yellow light and a Cyan color light.

In an embodiment of the invention, when white light is projected onto the color filter, the multilayer film filter unit reflects a red light, a blue light, and a green light.

In an embodiment of the invention, the material of the single-layer film filter unit and the multilayer film filter unit is a color photoresist.

Based on the above, in an exemplary embodiment of the present invention, the color filter manufacturing method uses a color mixing principle and a half-tone mask to form a plurality of colors on a substrate with fewer process steps. The purpose of the picture.

The above described features and advantages of the present invention will be more apparent from the following description.

1 is a top plan view of two adjacent pixel units on a liquid-based liquid crystal panel (LCoS) according to an embodiment of the invention.

Referring to FIG. 1, in the embodiment, the 矽-based liquid crystal panel is, for example, a CF-LCoS. On the liquid crystal panel, the pixel color distribution is, for example, connected to each other by the plurality of pixel units 110, 120 and sequentially arranged in order. Of course, in other embodiments not shown, the pixel color distribution may also exhibit a non-periodic arrangement.

In this embodiment, each pixel unit has a color filter (CF) of different colors, and the 矽-based liquid crystal panel displays different colors through the color filter to provide spatial mixing. The color image is displayed, and the light source module correspondingly provides white light as a light source. Therefore, when white light is projected onto the 矽-based liquid crystal panel, each of the pixel units reflects color light of a plurality of colors.

Here, for convenience of explanation, FIG. 1 only shows two adjacent pixel units 110, 120 on a liquid-based liquid crystal panel (LCoS). In FIG. 1, each pixel unit includes a plurality of filter units, each of which is either a single layer filter unit or a multilayer film filter unit and can reflect a corresponding color light.

For example, the pixel unit 110 includes a plurality of filter units 110a-110d, wherein the filter unit 110d is a single-layer film filter unit, and the filter units 110a-110c are each a multi-layer filter unit. Here, the color symbol indicated on each of the filter units represents, for example, the color of the corresponding color light reflected by the filter unit when the white light is projected onto the 矽-based liquid crystal panel. For example, the filter unit 110a is marked with G, which represents when white light is projected to the ruthenium-based liquid crystal. At the time of the panel, the filter unit 110a reflects a green light. B, R, and Y respectively represent that when the white light is projected onto the 矽-based liquid crystal panel, the filter units 110b, 110c, and 110d respectively reflect a blue light (blue), a red light (red), and a yellow light (yellow).

On the other hand, in the pixel unit 120, it includes a plurality of filter units 120a-120d, wherein the filter unit 120d is a single-layer film filter unit, and the filter units 120a-120c are each a multi-layer filter. Light unit. Here, the filter units 120a, 120b, and 120c are the same as the filter units 110a, 110c, and 110b. When white light is projected onto the 矽-based liquid crystal panel, the filter units 120a, 120b, and 120c respectively reflect a green light and a red light ( Red), a blue light (blue). In addition, the filter unit 120d indicates C, which means that when white light is projected onto the 矽-based liquid crystal panel, the filter unit 110a reflects a cyan light.

2 to 4 are respectively a flow chart showing the steps of a method of manufacturing a color filter according to an embodiment of the present invention. 2 is a top view of the pixel unit of FIG. 1, and FIG. 3 is a top sectional view of the pixel unit of FIG. 1 (ie, the filter units 110a, 110d, 120a, 120d), and 4 is a lower cross-sectional view of the pixel unit of FIG. 1 (filter units 110b, 110c, 120b, 120c).

Referring to FIG. 2 to FIG. 4, the method for manufacturing the color filter of the embodiment includes the following steps. First, a substrate 100 is provided. In this embodiment, the substrate 100 has, for example, a first region and a second region, and the first region is composed of a plurality of single-layer membrane filter units, and the second region is composed of a plurality of multi-layer membranes. The light unit is composed of. For example, after the manufacturing method of the embodiment is completed, the single-layer film filter units 110d and 120d in FIG. 2 belong to the substrate. The first region of 100, and the multilayer film filter units 110a-110c, 120a-120c belong to the second region of the substrate 100.

Next, a first filter material layer Y is formed on the filter unit 110d (ie, the first portion of the first region of the substrate), and the filter units 110a, 110c, 120a, 120b (ie, the first portion of the second region of the substrate) Share). Here, for example, it is called "Y process".

After the "Y process" is completed, the first filter material layer Y forms a single-layer film filter unit in the filter unit 110d, and when the white light is projected onto the single-layer film filter unit 110d, the single-layer film filter unit 110d It will reflect a yellow light.

In addition, after the "Y process" is completed, the first filter material layer Y also forms one of the layers of the multilayer film filter units 110a, 110c, 120a, 120b at the first portion of the second region of the substrate.

In this embodiment, the material of the first filter material layer Y includes a photosensitive material, such as a yellow negative photoresist. The "Y process" is, for example, a process step such as coating, exposure, and development.

In particular, in the present embodiment, the photomask used in the exposing step includes a half-tone mask to form different thicknesses at different filter units in the curing forming step. A layer of filter material Y. Therefore, taking the exposure step of the "Y process" in FIG. 3 as an example, when the ultraviolet light for exposure is incident on the reticle of different light transmittance, different arrow lengths indicate that the light transmittance of the corresponding reticle is different.

For example, when the ultraviolet light penetrates the semipermeable membrane mask, the length of the arrow after the penetration is half of the original, indicating that the penetrated mask is a half-transmissive mask. Similarly, when ultraviolet light penetrates the full permeable mask, it penetrates the back arrow The length of the head is unchanged, which means that the penetrated reticle is a full permeable mask, and the ultraviolet light cannot penetrate the latter, indicating that the reticle is an opaque reticle.

Therefore, after the end of the "Y process", as shown in the upper cross-sectional view of FIG. 3, the first filter material layer Y of different thickness is formed on the filter units 110a, 110d, 120a, and 120d. As can be seen from the lower cross-sectional view of FIG. 4, the first filter material layer Y of the same thickness is formed on the filter units 110c and 120b.

Thereafter, a second filter material layer M is formed on the filter units 110b, 110c, 120b, 120c (ie, the second portion of the second region of the substrate). Here, for example, it is called "M process".

Specifically, in the present embodiment, when the "M process" is performed, the second filter material layer M is not formed in the filter units 110a, 110d, 120a, and 120d of the upper row. Therefore, in the upper sectional view of FIG. 3, the "M process" is not shown.

After the "M process" is finished, the second filter material layer M is formed in the second portion of the second region of the substrate, forming another film layer of the multilayer film filter units 110c, 120b, and simultaneously forming the multilayer film filter unit 110b. One of the layers of 120c. In this embodiment, the material of the second filter material layer M includes a photosensitive material, such as a magenta negative photoresist.

Therefore, after the end of the "M process", as shown in the lower cross-sectional view of FIG. 4, the second filter material layer M having the same thickness is formed on the filter units 110b, 110c, 120b, and 120c.

In other words, after the end of the "M process", a multilayer film filter unit 110c is formed at a portion where the first portion of the second region of the substrate overlaps with the second portion. 120b, and the multilayer film filter unit 110c, 120b includes a first filter material layer Y and a second filter material layer M. Based on the CMY color mixing principle, when white light is projected onto the multilayer film filter units 110c, 120b, the multilayer film filter units 110c, 120b reflect a red light, which is represented by the color mixture relationship Y+M=R in FIG.

Similarly, in the present embodiment, the "M process" is, for example, a coating step such as coating, exposure, and solidification forming to form the second filter material layer M. In particular, in the present embodiment, the reticle used in the exposing step is a full permeable film mask to form a second filter material layer M of the same thickness at different filter units in the curing forming step. .

Then, a third filter material layer C is formed on the filter unit 120d (ie, the second portion of the first region of the substrate), and the filter units 110a, 110b, 120a, 120c (ie, the third portion of the second region of the substrate) Part). Here, for example, it is called "C process".

After the "C process" is completed, the third filter material layer C forms a single-layer film filter unit in the filter unit 120d, and when the white light is projected onto the single-layer film filter unit 120d, the single-layer film filter unit 120d It will reflect a cyan color.

Further, after the "C process" is completed, the third filter material layer C forms another film layer of the multilayer film filter units 110a, 110b, 120a, 120c in the third portion of the second region of the substrate. In this embodiment, the material of the third filter material layer C includes a photosensitive material, such as a cyan negative photoresist.

In other words, after the end of the "C process", the multilayer film filter unit 110b is formed at a portion where the second portion of the second region of the substrate overlaps with the third portion. 120c, and the multilayer film filter units 110b, 120c include a second filter material layer M and a third filter material layer C. Based on the CMY color mixing principle, when white light is projected onto the multilayer film filter units 110b, 120c, the multilayer film filter units 110b, 120c reflect a blue light, which is represented by the color mixture relationship M+C=B in FIG.

On the other hand, after the end of the "C process", at the overlap of the first portion and the third portion of the second region of the substrate, the multilayer film filter units 110a, 120a are formed, and the multilayer film filter units 110a, 120a The first filter material layer Y and the third filter material layer C are included. Based on the CMY color mixing principle, when white light is projected onto the multilayer film filter units 110a, 120a, the multilayer film filter units 110a, 120a reflect a green light, which is represented by the color mixture relationship C + Y = G in FIG.

Similarly, in the present embodiment, the "C process" is, for example, a coating process such as coating, exposure, and solidification forming to form a third filter material layer C. In particular, in the present embodiment, the photomask used in the exposing step includes a semi-permeable film mask to form a third filter material layer C of different thickness at the corresponding filter unit in the curing forming step. .

Therefore, after the above-mentioned "Y process", "M process", and "C process", a single-layer film filter unit and a multilayer film filter unit can be formed on the substrate. Based on the CMY color mixing principle, the single-layer film filter unit or the multi-layer film filter unit can display the color light that the designer wants to display according to the filter material included therein to provide spatially mixed light and display a color image. In other words, in the present embodiment, the effect of forming five color pixels can be achieved in only three processes.

It should be noted that, in the present embodiment, the arrangement of the pixel colors is for illustrative purposes only and is not intended to limit the present invention. In other embodiments, it may be presented in different ways depending on the needs of the designer.

In summary, in an exemplary embodiment of the present invention, a color filter manufacturing method uses a color mixing principle and a semi-transmissive film mask to achieve a plurality of color pixels on a substrate with fewer process steps. .

Although the present invention has been disclosed in the above embodiments, it is not intended to limit the invention, and any one of ordinary skill in the art can make some modifications and refinements without departing from the spirit and scope of the invention. The scope of the invention is defined by the scope of the appended claims.

100‧‧‧Substrate

110, 120‧‧‧ pixel units

110a~110d, 120a~120d‧‧‧ filter unit

Y‧‧‧First filter material layer

M‧‧‧Second filter material layer

C‧‧‧First filter material layer

1 is a top plan view of two adjacent pixel units on a germanium-based liquid crystal panel according to an embodiment of the invention.

2 to 4 are respectively a flow chart showing the steps of a method of manufacturing a color filter according to an embodiment of the present invention.

110, 120‧‧‧ pixel units

110a~110d, 120a~120d‧‧‧ filter unit

Claims (18)

A method for manufacturing a color filter, comprising: providing a substrate having a first region and a second region; forming a first filter material layer in the first portion of the first region and the first a first portion of the second region; forming a second filter material layer in a second portion of the second region; and forming a third filter material layer in the second portion of the first region and a third portion of the second region; wherein when a white light is projected onto the color filter, the first region and the second region reflect a plurality of color lights, wherein the first region is filtered by a plurality of single layer films The unit is composed of a plurality of multilayer membrane filter units. The method of manufacturing the color filter of claim 1, wherein the forming the first filter material layer comprises: forming a plurality of first single-layer film filter units in the first region a portion, wherein the first single-layer film filter unit reflects a first color light when the white light is projected to the first single-layer film filter units, wherein the single-layer film filter units include the Some first single layer membrane filter units. The method for manufacturing a color filter according to claim 1, wherein the forming the third filter material layer comprises: forming a plurality of second single-layer film filter units in the first region a second part, wherein when a white light is projected onto the second single layer film filter units, the second single layer film filter units reflect a second color light, wherein the single layers The membrane filter unit includes the second single layer membrane filter units. The method of manufacturing the color filter of claim 1, wherein the forming the second filter material layer comprises: forming a plurality of first multilayer film filter units in the second region a portion overlapping the second portion, wherein the first multilayer film filter unit reflects a third color light when the white light is projected to the first multilayer film filter units, wherein the plurality of layers The membrane filter unit includes the first multilayer membrane filter units. The method of manufacturing the color filter of claim 1, wherein the forming the third filter material layer comprises: forming a plurality of second multilayer film filter units in the second region And overlapping the two portions with the third portion, wherein when the white light is projected to the second multilayer film filter units, the second multilayer film filter units reflect a fourth color light, wherein the plurality of layers The membrane filter unit includes the second multilayer membrane filter units. The method of manufacturing the color filter of claim 1, wherein the forming the third filter material layer comprises: forming a plurality of third multilayer film filter units in the second region a portion overlapping the third portion, wherein the third multilayer film filter unit reflects a fifth color light when the white light is projected to the third multilayer film filter units, wherein the The multilayer film filter unit includes the third multilayer film filter units. The method of manufacturing the color filter of claim 1, wherein the first area is reversed when the white light is projected onto the color filter. Shoot a yellow light and a Cyan color. The method of manufacturing a color filter according to claim 1, wherein the second region reflects a red light, a blue light, and a green light when the white light is projected onto the color filter. The method of manufacturing a color filter according to claim 1, wherein the first filter material layer, the second filter material layer, and the third filter material layer are made of a color photoresist. A color filter comprising: a substrate having a first region and a second region; a plurality of single-layer film filter units respectively disposed on the substrate and located in the first region; and a plurality of multilayer films The filter units are respectively disposed on the substrate and located in the second region, wherein when a white light is projected onto the color filter, the single-layer film filter units and the plurality of film filter units reflect multiple color lights . The color filter of claim 10, wherein the single-layer film filter unit comprises a plurality of first single-layer film filter units, and the white light is projected to the first single-layer film filters In the unit, the first single layer membrane filter units reflect a first color light. The color filter of claim 10, wherein the single-layer film filter unit comprises a plurality of second single-layer film filter units, and the white light is projected onto the second single-layer film filters In the unit, the second single layer membrane filter units reflect a second color light. a color filter according to claim 10, wherein The multilayer film filter unit includes a plurality of first multilayer film filter units, and when the white light is projected to the first multilayer film filter units, the first multilayer film filter units reflect a third Shade. The color filter of claim 10, wherein the plurality of film filter units comprise a plurality of second multilayer film filter units, and the white light is projected onto the second multilayer film filter units The second multilayer film filter unit reflects a fourth color light. The color filter of claim 10, wherein the plurality of film filter units comprise a plurality of third multilayer film filter units, and the white light is projected to the third multilayer film filter units The third multilayer film filter unit reflects a fifth color light. The color filter of claim 10, wherein the single-layer film filter unit reflects a yellow light and a Cyan color light when the white light is projected onto the color filter. The color filter of claim 10, wherein the multilayer film filter unit reflects a red light, a blue light, and a green light when the white light is projected onto the color filter. The color filter of claim 10, wherein the single-layer film filter unit and the multi-layer film filter unit are made of a color photoresist.