201215929 HSI-2010-0006-TW 35314twf.doc/n 六、發明說明： 【發明所屬之技術領域】 本發明是有關於一種光學膜片及其製造方法，且特別 是有關於一種彩色滤光片及其製造方法。 【先前技術】 . · · 以現令技術而言，矽基液晶面板(LCoS)大致可分為 • CF-LCoS及CS-LCos。CF-LC〇S會在其液晶面板上形成彩 色濾光片（Color Filter，CF)，透過彩色濾光片顯示不同的 色彩，亦即提供空間性的混光，以顯示彩色影像，並且其 光源模組可對應地提供白色光作為光源。另外，CS_LC的 則不會在液晶面板上形成彩色濾光片，並且利用色序 (ColorSequentia卜CS)法實現時間性的混光，以顯示彩 色影像。 / 然而，就CF-LCoS而言，為了在液晶面板上形成彩色 濾光片，在一般彩色濾光製程中，液晶面板上需要幾種顏 色的晝素，就必須形成相同種顏色的光阻與對應的製程。 以RGBCY製程為例，該製程需要在液晶面板上形成五種 顏色的晝素，因此至少需要五道對應的製程。是以，基於 時間及成本的考量，提供更經濟實惠的彩色濾光製程^其 必要性。 再 【發明内容】 本發明提供一種彩色濾光片的製造方法，其可大幅降 201215929 HSI-2010-0006-TW 35314twf.doc/n 低成本與減少製程時間。 本發明提供一種彩色濾光片，其以較經濟實惠的製造 方法製成，並可提供良好光學品質。 本發明提供一種彩色濾光片的製造方法，其包括如下 步驟。提供一基板。所述基板具有一第一區及一第二區。 形成一第一應光材料層於第一區之一第一部份及第二區之 一第一部份。形成一第二濾光材料層於第二區之一第二部 份。形成一第三濾光材料層於第一區之一第二部份及第二 區之一第三部份。當一白光投射至彩色濾光片時，第一區 及第二區反射多種色光。 在本發明之一貫施例中，上述之第一區由多個單層膜 濾光單元所組成’而第二區由多個多層膜濾光單元所組成。 在本發明之一實施例中，上述之形成第一濾光材料層 的步驟包括：形成多個第一單層膜濾光單元於第一區之第 一部份。當白光投射至第一單層膜濾光單元時，第一單層 膜渡光單元反射一第一色光。 在本發明之一實施例中，上述之形成第三濾光材料層 的步驟包括：形成多個第二單層膜濾光單元於第一區之第 二部份。當一白光投射至第二單層膜濾光單元時，第二單 層膜遽光單元反射一第二色光。 在本發明之一實施例令’上述之形成第二濾光材料層 的步驟包括：形成多個第一多層膜濾光單元於第二區之第 一部份與第二部份重疊處。當白光投射至第一多層膜濾光 單元時，第一多層膜濾光單元反射一第三色光。 201215929 HSI-2010-0006*TW 35314twf.doc/n 在本發明之一實施例中，上述之形成第三濾光材料層 的步驟包括：形成多個第二多層膜濾光單元於第二區之第 二部份與第三部份重疊處。當白光投射至第二多層膜濾光 單元時，第二多層膜濾光單元反射一第四色光。201215929 HSI-2010-0006-TW 35314twf.doc/n VI. Description of the Invention: [Technical Field] The present invention relates to an optical film and a method of manufacturing the same, and more particularly to a color filter and Its manufacturing method. [Prior Art] · · In terms of current technology, liquid-based liquid crystal panels (LCoS) can be roughly classified into CF-LCoS and CS-LCos. CF-LC〇S will form a color filter (CF) on its liquid crystal panel, and display different colors through the color filter, that is, provide spatial mixing to display color images, and its light source The module can correspondingly provide white light as a light source. In addition, the CS_LC does not form a color filter on the liquid crystal panel, and realizes temporal mixing using a color sequence (ColorSequentia Bu CS) method to display a color image. / However, in the case of CF-LCoS, in order to form a color filter on a liquid crystal panel, in a general color filter process, a liquid of several colors is required on the liquid crystal panel, and it is necessary to form a photoresist of the same color and The corresponding process. Taking the RGBCY process as an example, the process requires five colors of pixels on the liquid crystal panel, so at least five corresponding processes are required. Therefore, based on time and cost considerations, it is more necessary to provide a more economical color filter process. Further, the present invention provides a method of manufacturing a color filter, which can significantly reduce the cost and process time of 201215929 HSI-2010-0006-TW 35314twf.doc/n. The present invention provides a color filter that is made in a more economical manufacturing process and that provides good optical quality. The present invention provides a method of manufacturing a color filter comprising the following steps. A substrate is provided. The substrate has a first region and a second region. Forming a first layer of photo-sensitive material in the first portion of the first region and a first portion of the second region. A second layer of filter material is formed in a second portion of the second region. Forming a third layer of filter material in a second portion of the first region and a third portion of the second region. When a white light is projected onto the color filter, the first and second regions reflect a plurality of color lights. In a consistent embodiment of the invention, the first zone is comprised of a plurality of single layer membrane filter units and the second zone is comprised of a plurality of multilayer membrane filter units. In an embodiment of the invention, the step of forming the first filter material layer comprises: forming a plurality of first single-layer film filter units in the first portion of the first region. When the white light is projected onto the first single layer film filter unit, the first single layer film a light unit reflects a first color light. In an embodiment of the invention, the step of forming the third filter material layer comprises: forming a plurality of second single-layer film filter units in the second portion of the first region. When a white light is projected onto the second single layer film filter unit, the second single layer film calender unit reflects a second color light. In one embodiment of the invention, the step of forming the second filter material layer comprises forming a plurality of first multilayer film filter units at a portion where the first portion and the second portion of the second region overlap. When the white light is projected onto the first multilayer film filter unit, the first multilayer film filter unit reflects a third color light. 201215929 HSI-2010-0006*TW 35314twf.doc/n In an embodiment of the invention, the step of forming the third filter material layer comprises: forming a plurality of second multilayer film filter units in the second region The second part overlaps with the third part. When the white light is projected onto the second multilayer film filter unit, the second multilayer film filter unit reflects a fourth color light.
在本發明之一實施例中，上述之形成第三濾光材料層 的步驟包括：形成多個第三多層膜濾光單元於第二區之第 一部份與第三部份重疊處。當白光投射至第三多層膜濾光 單元時，第三多層膜濾光單元反射一第五色光。 在本發明之一實施例中’當白光投射至彩色濾光片 時，第一區反射一黃色光及一藍綠(Cyan)色光。 在本發明之一實施例中，當白光投射至彩色濾光片 時，第二區反射一紅色光、一藍色光及一綠色光。 在本發明之一實施例中，上述之第一濾光材料層、第 二濾光材料層及第三濾光材料層之材質為彩色光阻。 本發明提供一種彩色渡光片包括一基板、多個單層膜 濾光單元以及多個多層膜濾光單元。所述基板具有一第一 區及一第二區。單層膜濾光單元分別配置於基板上且位於 第一區中。多層膜濾光單分別配置於基板上且位於第二區 中。當-白光投射至彩色濾、光片時，單層顧光單元及多 層膜濾光單元反射多種色光。 在本發明之-實施例中，上述之單.層膜滤光單元包括 二個^層膜濾光單元。#自光投射至第_單層膜遽光 早7L時，第一單層膜濾光單元反射一第一色光。 在本發明之-實施例中，上述之單層誠光單元包括 201215929 HSI-20】0-0006-TW 35314twf.doc/n 多個第二單層膜濾光單元。當白光投射至第二單層膜濾光 單元時’第二單層膜濾、光單元反射一第二色光。 在本發明之一實施例中，上述之多層膜濾先單元包括 多個第一多層膜渡光單元，當白光投射至第一多層膜濾光 單元時’第一多層膜濾光單元反射一第三色光。 在本發明之一實施例中，上述之多層膜濾光單元包括 多個第一多層膜濾光單元。當白光投射至第二多層膜濾光 單元時，第二多層膜濾光單元反射一第四色光。 在本發明之一實施例中，上述之多層膜濾光單元包括 多個第二多層膜濾光單元。當白光投射至第三多層膜濾光 單兀時，第三多層膜濾光單元反射一第五色光。 ，本發明之-實施例中，當白光投射至彩色滤光片 時’早層膜渡光單元反射一黃色光及一藍綠^㈣色光。 碎，Λ本實關中，#白光投射至彩色滤光片 ，’夕日臈滤光早反射—紅色光、—藍色光及—綠色光。 在本發明之一實施例中，上述之單 廣義光單元之㈣為彩色絲。.單兀及夕 製造 ::較少的製程步驟達到在基板上形成多:顏色" 兴實trr之上述雜和優點，下文特 舉貫施例，並配合所附圖式作詳細說明如下下 6 201215929 HSI-2010-0006-TW 35314twf.doc/n 【實施方式】 圖1繪示本發明一實施例之矽基液晶面板(LC〇s)上相 鄰兩晝素單元的俯視圖。 請參照圖1，在本實施例中，矽基液晶面板例如是一 CF-LCoS。而在液晶面板上，晝素顏色分佈例如是由多個 畫素單元110、120彼此相連且依序週期性排列。當然，於 其他未繪示的實施例中’晝素顏色分佈亦可呈現非週期性 φ 的排列方式。 在本實施例中’每一畫素單元上具有不同顏色的彩色 濾光片（Color Filter ’ CF) ’而矽基液晶面板透過彩色渡光 片顯示不同的色彩，可提供空間性的混光，以顯示彩色影 像’並且其光源模組對應地提供白色光作為光源。因此， 當白光投射至矽基液晶面板時，每一晝素單元的會反射多 種顏色的色光。 在此，為了方便說明起見，圖1僅緣示矽基液晶面板 (LCoS)上相鄰的兩晝素單元11〇、120。在圖1中，每一書 • 素單元包括多個濾光單元，每一濾光單元或為單層膜濾光 單元，或為多層膜濾光單元，並可反射一對應的色光。 以晝素單元110為例，其包括多個濾光單元 110a〜。ll〇d，其中濾光單元110d為一單層膜濾光單元，而 濾光單元ll〇a〜110c各為一多層膜濾光單元。在此，每一 濾光單元上所標示的顏色符號例如代表當白光投射至矽基 液晶面板時’該濾光單元所反射的對應色光之顏色。例如， 濾光單元ll〇a所標示者為G’代表當白光投射至矽基液晶 201215929 x^x^x/iv-v〇〇6-TW 35314twf.doc/n 面板時，滤光單元ll〇a會反射一綠色光(green)。而B、R、 Y則分別代表當白光投射至矽基液晶面板時，濾光單元 11 Ob、110c、110d分別反射一藍色光(blue)、一紅色光(red)、 一黃色光(yellow)。 另一方面，在晝素單元120中，其包括多個濾光單元 120a〜120d ’其中濾光單元I20d為一單層膜濾光單元，而 遽光單元120a〜120c各為一多層膜滤光單元。在此，濾光 單元 120a、120b、120c 與濾光單元 ll〇a、li〇c、ii〇b 相 同’當白光投射至矽基液晶面板時，濾光單元12〇a、12〇b、 120c分別反射一綠色光、一紅色光(red)、一藍色光(blue；^ 此外’濾光單元120d所標示者為c，代表當白光投射至矽 基液晶面板時，濾光單元ll〇a會反射一藍綠色光(cyan)。 圖2至圖4分別繪示本發明一實施例之彩色濾光片的 製造方法之步驟流程圖。圖2所繪示者係圖1中的晝素單 元之俯視圖，圖3所繪示者係圖1中畫素單元的上排剖面 圖（即濾光單元110a、ll〇d、120a、120d)，而圖4所緣示 者係圖1中畫素單元的下排剖面圖（濾光單元11〇b、11〇c、 120b 、 120c)。 請參考圖2至圖4，本實施例之彩色濾光片的製造方 法，其包括如下步驟。首先，提供一基板1〇〇。在本實施 例中，基板100例如具有一第一區及一第二區，而該第一 區係由多個單層膜濾光單元所喊，而該第二區係由多個 多層膜〉f光單摘纟域。例如，在本實關之製造方法完 成後，圖2中的單層膜濾光單元u〇d、12〇d即屬於基板 201215929 HS1-2010-0006-TW 35314twf.doc/n 100的第一區，而多層膜濾光單元ll〇a〜ll〇c、120a〜120c 即屬於基板100的第二區。 接著，形成一第一濾光材料層γ於濾光單元ll〇d(即 基板第一區的第一部份），以及濾光單元l1〇a、110c、120a、 120b (即基板第二區的第一部份）。在此，例如稱為「Y製 程」。 在「Υ製释」結束後，第一濾光材料層Υ於濾光單元 ll〇d形成一單層膜濾光單元，而當白光投射至單層膜濾光 單元110d時，單層膜濾光單元110d會反射一黃色光。 此外，在「Y製程」結束後，第一濾光材料層γ亦同 時在基板第二區的第一部份，形成多層膜濾光單元110a、 ll〇c、120a、120b 的其中一膜層。 在本實施例中，第一滤光材料層Y的材質包括感光材 料’例如是黃色負光阻。而「Y製程」例如是塗佈(c〇at)、 曝光(exposure)及固化成形(develop)等製程步驟。 特別是，在本實施例中，在曝光步驟中所使用的光罩 包括半透膜光罩(half-tone mask)，以在固化成形步輝中可 於不同的濾光單元處形成不同厚度的第一濾光材料層γ。 因此，以圖3中「Y製程」的曝光步驟為例，當曝^用的 紫外光線入射至不同透光程度的光罩後，不同的箭頭長度 代表對應的光罩之透光程度不同。 一例如，當紫外光線穿透半透膜光罩後，其穿透後的箭 頭長度為原本的-半’絲該被穿透的光罩為_半透膜光 罩。類似地，當紫外光線穿透全透膜光罩後，其穿透後箭 201215929 n〇x--；,uiv-Vv)06-TW 35314twf.doc/n 頭長度不變者’代表該被穿透的光罩為一全透膜光罩，而 紫外光線無法穿透後者，代表該光罩為一不透光光罩。 疋以’在「Y製程」結束後，由圖3所綠示的上排剖 面圖可知，滤光單元110a、1繼、120a、上形成不同 厚度的第一濾光材料層Y。而由圖4所繪示的下排剖面圖 可知，濾光單元110c、120b上係形成相同厚度的第一濾光 材料層Y。 之後，形成一第二濾光材料層Μ於濾光單元ii〇b、 ll〇c、120b、120c (即基板第二區的第二部份）。在此，例 如稱為「M製程」。 須特別說明的是，在本實施例中，進行「Μ製程」時， 並未有第二濾光材料層Μ形成於上排的濾光單元u〇a、 110d、120a、120d。因此，在圖3的上排剖面圖中，並未 綠示「M製程」。 在「M製程」結束後，第二濾光材料層Μ在基板第 二區的第二部份，形成多層膜濾光單元110c、120b的另一 膜層，並同時形成多層膜滤光單元110b、120c的其中一Μ 層。在本實施例中，第二濾光材料層Μ的材質包括感光材 料，例如是紫紅色(magenta)負光阻。 是以，在「M製程」結束後，由圖4所繪示的下排剖 面圖可知，濾光單元ll〇b、110c、120b、120c上係形成相 同厚度的第二濾光材料層Μ。 換句話說，在「Μ製程」結束後，在基板第二區之第 一部份與第二部份重疊處，會形成多層膜濾光單先110c、 201215929 HSI-2010-0006-TW 35314tAvf.doc/n 120b，且多層膜遽光單元110c、120b包括第—遽光材料層 Y與第二濾光材料層Μ»基於CMY混色原理，當白光投 射至多層膜濾光單元110c、120b時，多層膜濾光單元 110c、120b會反射一紅色光’在圖2中係以混色關係式 Y+M=R代表之。 類似地，在本實施例中，「M製程」例如是塗佈、曝 光及固化成形等製程步驟，以形成第二濾光材料層M。特 別是，在本實施例中，在曝光步驟中所使用的光罩係全透 膜光罩，以在固化成形步驟中可於不同的濾光單元處形成 相同厚度的第二濾光材料層Μ。 繼之’形成一第三濾、光材料層C於濾、光單元i20d (即 基板第一區的第二部份），以及濾光單元ll〇a、ii〇b、i2〇a、 120c (即基板第二區的第三部份）。在此，例如稱為「c製 程」。 在「C製程」結束後，第三濾光材料層c於濾光單元 120d形成一單層膜濾光單元，而當白光投射至單層膜渡光 單元120d時，單層膜濾光單元12〇d會反射一藍綠(cyan) 色光。 此外’在「C製程」結束後，第三濾光材料層C在基 板第二區的第三部份’形成多層膜濾光單元110a、ll〇b、 120a、120c的另一膜層》在本實施例中，第三濾光材料層 C的材質包括感光材料’例如是藍綠色(Cyan)負光阻。 換句話說，在「C製程」結束後，在基板第二區之第 二部份與第三部份重疊處，會形成多層膜濾光單元11〇b、 201215929 HS1-2U1U-U006-TW 35314twf.doc/n 120c，且多層膜濾光單元ll〇b、120c包括第二濾光材料層 Μ與第三濾光材料層C。基於CMY混色原理，當白光投 射至多層膜濾光單元ll〇b、120c時，多層膜濾光單元 110b、120c會反射一藍色光，在圖2中係以混色關係式 M+OB代表之。In an embodiment of the invention, the step of forming the third filter material layer comprises: forming a plurality of third multilayer film filter units at a portion where the first portion and the third portion of the second region overlap. When the white light is projected onto the third multilayer film filter unit, the third multilayer film filter unit reflects a fifth color light. In an embodiment of the invention, when the white light is projected onto the color filter, the first region reflects a yellow light and a Cyan color light. In one embodiment of the invention, the second region reflects a red light, a blue light, and a green light when the white light is projected onto the color filter. In an embodiment of the invention, the material of the first filter material layer, the second filter material layer and the third filter material layer is a color photoresist. The present invention provides a color light-passing sheet comprising a substrate, a plurality of single-layer film filter units, and a plurality of multilayer film filter units. The substrate has a first region and a second region. The single layer film filter units are respectively disposed on the substrate and located in the first region. The multilayer film filter sheets are respectively disposed on the substrate and located in the second region. When the white light is projected onto the color filter or the light sheet, the single layer photo unit and the multi-layer film filter unit reflect the plurality of color lights. In an embodiment of the invention, the single layer membrane filter unit comprises two membrane filter units. #自光投影到第一_单膜膜遽 When 7L early, the first single-layer film filter unit reflects a first color light. In an embodiment of the invention, the single-layer agstrom unit comprises a plurality of second single-layer membrane filter units of 201215929 HSI-20]0-0006-TW 35314twf.doc/n. When the white light is projected onto the second single layer film filter unit, the second single layer film filter, the light unit reflects a second color light. In an embodiment of the invention, the multi-layer membrane filter unit comprises a plurality of first multilayer film aeration units, and the first multilayer film filter unit is when white light is projected onto the first multilayer film filter unit. Reflecting a third color light. In an embodiment of the invention, the multilayer film filter unit comprises a plurality of first multilayer film filter units. When the white light is projected onto the second multilayer film filter unit, the second multilayer film filter unit reflects a fourth color light. In an embodiment of the invention, the multilayer film filter unit comprises a plurality of second multilayer film filter units. When the white light is projected onto the third multilayer film filter unit, the third multilayer film filter unit reflects a fifth color light. In the embodiment of the present invention, when the white light is projected onto the color filter, the early film a light-emitting unit reflects a yellow light and a blue-green color. Broken, Λ本实关, #白光projected to color filter, '夕日臈 filter early reflection - red light, - blue light and - green light. In an embodiment of the invention, (4) of the single generalized light unit is a colored wire. . 兀 兀 : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : 6201215929 HSI-2010-0006-TW 35314twf.doc/n Embodiments FIG. 1 is a plan view showing two adjacent pixel units on a 矽-based liquid crystal panel (LC〇s) according to an embodiment of the present invention. Referring to Fig. 1, in the present embodiment, the 矽-based liquid crystal panel is, for example, a CF-LCoS. On the liquid crystal panel, the halogen color distribution is, for example, connected to each other by a plurality of pixel units 110, 120 and sequentially arranged in order. Of course, in other embodiments not shown, the 昼 prime color distribution may also exhibit a non-periodic φ arrangement. In this embodiment, 'each color element has a color filter 'CF' of different colors, and the 矽-based liquid crystal panel displays different colors through the color light-emitting sheet, and can provide spatial mixed light. In order to display the color image 'and its light source module correspondingly provides white light as a light source. Therefore, when white light is projected onto the 矽-based liquid crystal panel, each of the pixel units reflects color light of a plurality of colors. Here, for convenience of explanation, FIG. 1 only shows two adjacent pixel units 11A and 120 on a liquid crystal panel (LCoS). In Fig. 1, each of the book elements includes a plurality of filter units, each of which is either a single film filter unit or a multilayer film filter unit, and can reflect a corresponding color light. Taking the pixel unit 110 as an example, it includes a plurality of filter units 110a~. The filter unit 110d is a single-layer film filter unit, and the filter units 11a to 110c are each a multilayer film filter unit. Here, the color symbol indicated on each of the filter units represents, for example, the color of the corresponding color light reflected by the filter unit when white light is projected onto the 矽-based liquid crystal panel. For example, the filter unit ll 〇 a is marked as G ′ when the white light is projected onto the 矽-based liquid crystal 201215929 x^x^x/iv-v〇〇6-TW 35314twf.doc/n panel, the filter unit 〇 a will reflect a green light (green). B, R, and Y respectively represent that when the white light is projected onto the 矽-based liquid crystal panel, the filter units 11 Ob, 110c, and 110d respectively reflect a blue light (blue), a red light (red), and a yellow light (yellow). . On the other hand, in the pixel unit 120, it includes a plurality of filter units 120a to 120d', wherein the filter unit I20d is a single-layer film filter unit, and the calender units 120a-120c are each a multi-layer membrane filter. Light unit. Here, the filter units 120a, 120b, 120c are the same as the filter units 11a, li〇c, ii〇b 'When white light is projected onto the 矽-based liquid crystal panel, the filter units 12〇a, 12〇b, 120c Reflecting a green light, a red light (red), a blue light (blue; ^ In addition, the filter unit 120d is marked as c, which means that when white light is projected onto the 矽-based liquid crystal panel, the filter unit ll〇a will Figure 2 to Figure 4 are respectively a flow chart showing the steps of a method for manufacturing a color filter according to an embodiment of the present invention. Figure 2 is a diagram showing the pixel unit of Figure 1. In the top view, FIG. 3 is a top cross-sectional view of the pixel unit in FIG. 1 (ie, filter units 110a, 110〇d, 120a, 120d), and FIG. 4 is the pixel unit in FIG. The lower row sectional view (filter unit 11〇b, 11〇c, 120b, 120c). Referring to FIG. 2 to FIG. 4, the method for manufacturing the color filter of the embodiment includes the following steps. First, providing a substrate 1 . In the embodiment, the substrate 100 has, for example, a first region and a second region, and the first region is composed of a plurality of single-layer films. The light unit is shouted, and the second zone is surrounded by a plurality of multilayer films. For example, after the manufacturing method of the present embodiment is completed, the single-layer film filter unit u〇d in FIG. 2, 12〇d belongs to the first area of the substrate 201215929 HS1-2010-0006-TW 35314twf.doc/n 100, and the multilayer film filter units 11〇allllc, 120a~120c belong to the second area of the substrate 100 Next, a first filter material layer γ is formed on the filter unit 11〇d (ie, the first portion of the first region of the substrate), and the filter units 11a, 110c, 120a, 120b (ie, the substrate second The first part of the zone. Here, for example, it is called "Y process". After the "Υ" release, the first filter material layer is formed on the filter unit 11〇d to form a single-layer film filter unit. When the white light is projected to the single-layer film filter unit 110d, the single-layer film filter unit 110d reflects a yellow light. Further, after the "Y process" is finished, the first filter material layer γ is also simultaneously on the substrate. The first portion of the second region forms one of the layers of the multilayer film filter units 110a, 110c, 120a, 120b. In this embodiment, the first filter material The material of Y includes a photosensitive material 'for example, a yellow negative photoresist. The "Y process" is, for example, a coating step such as coating, exposure, and development. In particular, in the present embodiment The photomask used in the exposing step includes a half-tone mask to form a first filter material layer γ of different thicknesses at different filter units in the curing forming step. Therefore, taking the exposure step of the "Y process" in FIG. 3 as an example, when the ultraviolet light for exposure is incident on the reticle of different light transmittance, different arrow lengths represent different degrees of light transmission of the corresponding reticle. For example, when ultraviolet light penetrates the semipermeable membrane mask, the length of the arrow after the penetration is the original - half of the filament. The penetrated mask is a semi-permeable membrane mask. Similarly, when the ultraviolet light penetrates the full permeable mask, it penetrates the back arrow 201215929 n〇x--;, uiv-Vv) 06-TW 35314twf.doc/n the length of the head does not change 'represents the worn The transparent reticle is a full permeable reticle, and the ultraviolet light cannot penetrate the latter, indicating that the reticle is an opaque reticle. After the end of the "Y process", it can be seen from the upper sectional view shown by green in Fig. 3 that the filter units 110a, 1 are successively formed on the 120a, and the first filter material layer Y having different thicknesses is formed. As can be seen from the lower cross-sectional view of Fig. 4, the first filter material layer Y of the same thickness is formed on the filter units 110c and 120b. Thereafter, a second filter material layer is formed on the filter units ii 〇 b, ll 〇 c, 120 b, 120 c (ie, the second portion of the second region of the substrate). Here, for example, it is called "M process". It should be particularly noted that in the present embodiment, when the "twisting process" is performed, the second filter material layer is not formed in the upper rows of filter units u〇a, 110d, 120a, and 120d. Therefore, in the upper sectional view of Fig. 3, the "M process" is not displayed green. After the "M process" is finished, the second filter material layer is layered on the second portion of the second region of the substrate to form another film layer of the multilayer film filter units 110c, 120b, and at the same time, the multilayer film filter unit 110b is formed. One of the layers of 120c. In this embodiment, the material of the second filter material layer includes a photosensitive material, such as a magenta negative photoresist. Therefore, after the end of the "M process", as shown in the lower cross-sectional view of Fig. 4, the second filter material layer 相 of the same thickness is formed on the filter units 11b, 110c, 120b, and 120c. In other words, after the end of the "Μ process", a multilayer film filter first 110c, 201215929 HSI-2010-0006-TW 35314tAvf is formed at the overlap between the first portion and the second portion of the second region of the substrate. Doc/n 120b, and the multilayer film calendering unit 110c, 120b includes a first photo-setting material layer Y and a second filter material layer 基于 based on the CMY color mixing principle, when white light is projected onto the multilayer film filter units 110c, 120b, The multilayer film filter units 110c, 120b reflect a red light 'in Fig. 2, represented by a color mixing relationship Y + M = R. Similarly, in the present embodiment, the "M process" is, for example, a coating step of coating, exposure, and solidification forming to form the second filter material layer M. In particular, in the present embodiment, the reticle used in the exposure step is a full permeable film mask to form a second filter material layer of the same thickness at different filter units in the curing forming step. . Following 'forming a third filter, photo material layer C in the filter, light unit i20d (ie the second part of the first region of the substrate), and filter units 11a, ii, b, i2〇a, 120c ( That is, the third part of the second region of the substrate). Here, for example, it is called "c process". After the "C process" is completed, the third filter material layer c forms a single-layer film filter unit in the filter unit 120d, and when the white light is projected onto the single-layer film a light-emitting unit 120d, the single-layer film filter unit 12 〇d will reflect a cyan color. In addition, after the end of the "C process", the third filter material layer C forms another film layer of the multilayer film filter unit 110a, llb, 120a, 120c in the third portion of the second region of the substrate. In this embodiment, the material of the third filter material layer C includes a photosensitive material 'for example, a Cyan negative photoresist. In other words, after the end of the "C process", a multilayer film filter unit 11〇b, 201215929 HS1-2U1U-U006-TW 35314twf is formed at a portion where the second portion of the second region of the substrate overlaps with the third portion. .doc/n 120c, and the multilayer film filter unit 110b, 120c includes a second filter material layer Μ and a third filter material layer C. Based on the CMY color mixing principle, when white light is incident on the multilayer film filter units 11b, 120c, the multilayer film filter units 110b, 120c reflect a blue light, which is represented by the color mixture relationship M+OB in FIG.
另一方面，在「C製程」結束後，在基板第二區之第 一部份與第三部份重疊處，會形成多層膜濾光單元ll〇a、 120a，且多層膜濾光單元110a、120a包括第一濾光材料層 Y與第三濾光材料層C。基於CMY混色原理，當白光投 射至多層膜濾光單元110a、120a時，多層膜濾光單元 110a、120a會反射一綠色光，在圖2中係以混色關係式 C+Y=G代表之。On the other hand, after the end of the "C process", at the overlap of the first portion and the third portion of the second region of the substrate, the multilayer film filter units 11a, 120a are formed, and the multilayer film filter unit 110a 120a includes a first filter material layer Y and a third filter material layer C. Based on the CMY color mixing principle, when white light is incident on the multilayer film filter units 110a, 120a, the multilayer film filter units 110a, 120a reflect a green light, which is represented by the color mixture relationship C + Y = G in Fig. 2.
類似地，在本實施例中，「C製程」例如是塗佈、曝 光及固化成形等製程步驟，以形成第三濾光材料層C。特 別是，在本實施例中，在曝光步驟中所使用的光罩包括半 透膜光罩，以在固化成形步驟中可於對應的濾光單元處形 成不同厚度的第三濾光材料層c。 是以，在經過上述「Y製程」、ΓΜ製程」、「C製 ，」之後，可在基板上形成單層膜濾光單元及多層膜濾光 單元。基於CMY混色絲’單層難光單元衫声= 光單兀依據其所包括㈣、光材料，可騎設計 的色光’以提供m性的混光，齡彩色影像。二’^， 在本實施财，僅以三道製程即可相形成、色:辛Similarly, in the present embodiment, the "C process" is, for example, a process step of coating, exposure, and solidification forming to form a third filter material layer C. In particular, in the present embodiment, the photomask used in the exposing step includes a semi-permeable film mask to form a third thickness of the third filter material layer at the corresponding filter unit in the curing forming step. . Therefore, after the "Y process", the "process", and the "C system", a single-layer film filter unit and a multilayer film filter unit can be formed on the substrate. Based on CMY mixed color yarn 'single layer hard light unit shirt sound = light single 兀 according to its (4), light material, rideable design color light 'to provide m-color mixed light, age color image. Two '^, in this implementation, only three processes can be formed, color: Xin
的效果。 至颂巴旦I 12 201215929 HSI-20l0-0006.TW353l4twf.doc/n 須特別說明的是，在本實施例中，晝素顏色的排列方 式僅用以例示說明，並不用以限定本發明。在其他實施例 中，依據設計者的需求，也可以不同的方式呈現。 综上所述，在本發明之範例實施例中，彩色濾光片的 製造方法使用色彩混光原理及半透膜光罩，以較少的製程 步驟達到在基板上形成多種顏色晝素之目的。 雖然本發明已以實施例揭露如上，然其並非用以限定 • 本發明’任何所屬技術領域中具有通常知識者，在不脫離 本發明之精神和範圍内’當可作些許之更動與潤飾，故本 發明之保護範圍當視後附之申請專利範圍所界定者為準。 【圖式簡單說明】 圖1繪示本發明一實施例之矽基液晶面板上相鄰兩晝 素單元的俯視圖。 圖2至圖4分別繪示本發明一實施例之彩色濾光片的 製造方法之步驟流程圖。 【主要元件符號說明】 100 :基板 110、120 :晝素單元 110a〜110d、120a〜120d :濾光單元 Y:第一濾光材料層 Μ :第二濾光材料層 C :第一濾光材料層 13Effect. 。 。 。 I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I In other embodiments, it may be presented in different ways depending on the needs of the designer. In summary, in the exemplary embodiment of the present invention, the color filter manufacturing method uses the color mixing principle and the semi-transmissive film mask to achieve the purpose of forming a plurality of color halogens on the substrate in a small number of processing steps. . Although the present invention has been disclosed in the above embodiments, it is not intended to limit the scope of the present invention, and the invention may be modified and modified without departing from the spirit and scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a plan view showing adjacent two pixel units on a samarium-based liquid crystal panel according to an embodiment of the present invention. 2 to 4 are respectively a flow chart showing the steps of a method of manufacturing a color filter according to an embodiment of the present invention. [Description of main component symbols] 100: Substrate 110, 120: Alizardin units 110a to 110d, 120a to 120d: Filter unit Y: First filter material layer 第二: Second filter material layer C: First filter material Layer 13