TWI468663B - 使用co2雷射及諧波產生以產生超音波之改良中紅外線雷射及超音波偵測系統 - Google Patents

使用co2雷射及諧波產生以產生超音波之改良中紅外線雷射及超音波偵測系統 Download PDF

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Publication number
TWI468663B
TWI468663B TW98116305A TW98116305A TWI468663B TW I468663 B TWI468663 B TW I468663B TW 98116305 A TW98116305 A TW 98116305A TW 98116305 A TW98116305 A TW 98116305A TW I468663 B TWI468663 B TW I468663B
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TW
Taiwan
Prior art keywords
harmonic
wavelength
laser beam
laser
microns
Prior art date
Application number
TW98116305A
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English (en)
Chinese (zh)
Other versions
TW201007156A (en
Inventor
Thomas E Drake
Marc Dubois
Peter W Lorraine
John B Deaton
Robert Filkins
Original Assignee
Lockheed Corp
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Application filed by Lockheed Corp filed Critical Lockheed Corp
Publication of TW201007156A publication Critical patent/TW201007156A/zh
Application granted granted Critical
Publication of TWI468663B publication Critical patent/TWI468663B/zh

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22Details, e.g. general constructional or apparatus details
    • G01N29/24Probes
    • G01N29/2418Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G01N2021/1706Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in solids

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
  • Laser Surgery Devices (AREA)
TW98116305A 2008-05-15 2009-05-15 使用co2雷射及諧波產生以產生超音波之改良中紅外線雷射及超音波偵測系統 TWI468663B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US12/121,012 US8113056B2 (en) 2008-05-15 2008-05-15 Mid-IR laser for generation of ultrasound using a CO2 laser and harmonic generation

Publications (2)

Publication Number Publication Date
TW201007156A TW201007156A (en) 2010-02-16
TWI468663B true TWI468663B (zh) 2015-01-11

Family

ID=40888301

Family Applications (1)

Application Number Title Priority Date Filing Date
TW98116305A TWI468663B (zh) 2008-05-15 2009-05-15 使用co2雷射及諧波產生以產生超音波之改良中紅外線雷射及超音波偵測系統

Country Status (12)

Country Link
US (1) US8113056B2 (https=)
EP (1) EP2294384A1 (https=)
JP (2) JP2011521233A (https=)
KR (1) KR20110010114A (https=)
CN (1) CN102089643B (https=)
AU (1) AU2009246284B2 (https=)
BR (1) BRPI0912750A2 (https=)
CA (1) CA2724333C (https=)
IL (1) IL209294A (https=)
SG (1) SG190639A1 (https=)
TW (1) TWI468663B (https=)
WO (1) WO2009140480A1 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9625423B2 (en) * 2012-10-30 2017-04-18 The Boeing Company System and method for testing a composite structure using a laser ultrasound testing system
US10050721B2 (en) * 2013-02-01 2018-08-14 Jozef W. Eerkens Neutrino communication system
JP6841609B2 (ja) 2015-07-10 2021-03-10 3スキャン インコーポレイテッド 組織学的染色の空間的多重化
CN113227781B (zh) * 2018-12-20 2024-02-13 株式会社岛津制作所 缺陷检查装置和缺陷检查方法
CN110456381B (zh) * 2019-07-08 2022-01-25 中国科学院国家空间科学中心 一种全固态金属原子和离子层探测的激光雷达
CN119915768B (zh) * 2024-12-19 2026-03-27 甬江实验室 亚微米级异物无损检测装置及亚微米级异物无损检测方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10209689A (ja) * 1997-01-20 1998-08-07 Taiyo Yuden Co Ltd 回路モジュールの製造方法
US5982482A (en) * 1997-07-31 1999-11-09 Massachusetts Institute Of Technology Determining the presence of defects in thin film structures
TW455686B (en) * 1999-07-27 2001-09-21 Lockheed Corp System and method for laser-ultrasonic frequency control using optimal wavelength tuning
JP2001314990A (ja) * 2001-03-26 2001-11-13 Ibiden Co Ltd レーザ加工装置及び多層プリント配線板の製造装置
EP1228501B1 (en) * 1999-07-27 2005-12-14 Lockheed Martin Corporation System and method for ultrasonic laser testing using a laser source to generate ultrasound having a tunable wavelength

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002529691A (ja) * 1998-11-04 2002-09-10 ナショナル リサーチ カウンシル オブ カナダ 薄いシートの弾性特性およびそれに印加される張力のレーザー超音波測定
CA2411628C (en) * 2000-07-14 2009-12-01 Lockheed Martin Corporation A system and method of determining porosity in composite materials using ultrasound
JP3722211B2 (ja) * 2001-03-30 2005-11-30 鹿島建設株式会社 コンクリート構造物の診断方法及び装置
US7117134B2 (en) * 2001-10-18 2006-10-03 Lockheed Martin Corporation Method to optimize generation of ultrasound using mathematical modeling for laser ultrasound inspection
JP2004219675A (ja) * 2003-01-15 2004-08-05 Bega:Kk 遠赤外固体レーザー発振装置
WO2004092776A2 (en) * 2003-04-15 2004-10-28 Yeda Research And Development Company Ltd. Method and system for use in optical code division multiple access
WO2006020341A2 (en) * 2004-07-23 2006-02-23 Massachusetts Institute Of Technology Characterization of materials with optically shaped acoustic waveforms

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10209689A (ja) * 1997-01-20 1998-08-07 Taiyo Yuden Co Ltd 回路モジュールの製造方法
US5982482A (en) * 1997-07-31 1999-11-09 Massachusetts Institute Of Technology Determining the presence of defects in thin film structures
TW455686B (en) * 1999-07-27 2001-09-21 Lockheed Corp System and method for laser-ultrasonic frequency control using optimal wavelength tuning
EP1228501B1 (en) * 1999-07-27 2005-12-14 Lockheed Martin Corporation System and method for ultrasonic laser testing using a laser source to generate ultrasound having a tunable wavelength
JP2001314990A (ja) * 2001-03-26 2001-11-13 Ibiden Co Ltd レーザ加工装置及び多層プリント配線板の製造装置

Also Published As

Publication number Publication date
TW201007156A (en) 2010-02-16
US20090282919A1 (en) 2009-11-19
JP5951673B2 (ja) 2016-07-13
CA2724333C (en) 2014-11-18
BRPI0912750A2 (pt) 2016-05-17
JP2014170004A (ja) 2014-09-18
KR20110010114A (ko) 2011-01-31
AU2009246284A1 (en) 2009-11-19
CA2724333A1 (en) 2009-11-19
WO2009140480A1 (en) 2009-11-19
IL209294A0 (en) 2011-01-31
EP2294384A1 (en) 2011-03-16
US8113056B2 (en) 2012-02-14
JP2011521233A (ja) 2011-07-21
SG190639A1 (en) 2013-06-28
AU2009246284B2 (en) 2014-07-03
CN102089643A (zh) 2011-06-08
CN102089643B (zh) 2014-02-12
IL209294A (en) 2013-03-24

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