TWI467157B - Method and apparatus for measuring optically anisotropic parameters - Google Patents

Description

Optical anisotropy parameter measuring method and measuring device

The present invention relates to an optical anisotropy parameter measuring method and a measuring apparatus for measuring a phase difference of a complex amplitude reflectance ratio of an optical anisotropic film formed on a surface of a measuring object, and is particularly suitable for inspection of a liquid crystal alignment film.

The liquid crystal display is configured such that a back side glass substrate on which a transparent electrode and an alignment film are laminated on the surface and a surface side glass substrate on which a color filter, a transparent electrode, and an alignment film are laminated are formed with a spacer interposed therebetween. The alignment film is sealed while the liquid crystal is sealed in the gap of the alignment film, and a polarizing filter is laminated on both sides of the front surface.

Here, in order for the liquid crystal display to operate normally, the liquid crystal molecules must be uniformly arranged in the same direction, and the alignment film determines the directivity of the liquid crystal molecules.

The alignment film can align the liquid crystal molecules neatly because of the axial optical anisotropy. When the entire surface of the alignment film has uniform axial optical anisotropy, the liquid crystal display is less prone to defects. When there is a portion where the optical anisotropy is uneven, the liquid crystal display becomes a defective product because the direction of the liquid crystal molecules is disordered.

That is, the quality of the alignment film directly affects the quality of the liquid crystal display. When the alignment film is defective, the liquid crystal display also has defects due to the directional disorder of the liquid crystal molecules.

Therefore, when assembling a liquid crystal display, it is possible to improve the yield of the liquid crystal display and improve the production efficiency by checking the presence or absence of defects of the alignment film in advance and requiring the use of an alignment film of stable quality.

Therefore, general ellipsometry (ellipsometry) is known from the conventional inspection method of the alignment film (Non-Patent Document 1).

Non-Patent Document 1: R.M.A. Azzam and N.M. Bashara: Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1986)

This method measures the reflected polarization state for three or more kinds of incident polarization states, and measures the complex amplitude reflectance ratio R _pp ≡r _pp /r _ss , R _ps ≡r _ps /r _ss , R _sp ≡r _sp / r _ss measures the azimuthal direction dependence.

Here, R _x (x is a polarization state) is defined by the complex amplitude reflectance of the incident light that is respectively irradiated to the measurement point, specifically, the complex amplitude reflectance of the P-polarized light when the P-polarized light is incident. _Pp , the complex amplitude reflectance r _ss of the S polarized light when the S polarized light is incident, the complex amplitude reflectance r _{ps of the} P polarized light when the S polarized light is incident, and the complex amplitude reflectance r _sp of the S polarized light when the P polarized light is incident. The ratio is defined.

When the measurement is performed by rotating the measurement azimuth of the incident light by 360 degrees around the normal line extended from the measurement point, the measurement azimuth direction dependence of the complex amplitude reflectance ratio can be measured, so that the molecular alignment of the alignment film can be evaluated in detail. , but there are problems with measuring time. Further, when the film thickness is thin, since the detection ability of the anisotropy is low, the anisotropy may not be detected.

Therefore, the present inventors have proposed a differential SMP (Symmetric Multi Processors) method for measuring the optical anisotropy according to the molecular alignment at a high speed.

Patent Document 1: Japanese Laid-Open Patent Publication No. 2008-76324

This method is to use either P-polarized or S-polarized light with respect to the object to be measured. The direction of the person is used as the reference direction, and one of the incident light and the measurement light is linearly polarized in the reference direction, and the other of the incident light and the measurement light is set to π/2±α with respect to the reference direction (0< One of the direction vibrations of α<π/2) is linearly polarized, and the light intensity of the two kinds of measurement light corresponding to the pair of polarized lights is measured, and the optical anisotropy is measured according to the difference data indicating the difference between the obtained two pieces of light intensity data. The sexual parameter can measure the alignment direction of the measurement object, the inclination angle of the optical axis, and the size of the alignment as a parameter of optical anisotropy in a short time.

However, in the differential SMP method, the phase difference and the magnitude of the complex amplitude reflectance ratio which best expresses the characteristics of the optically anisotropic substance cannot be measured. Therefore, it is necessary to use other methods such as ellipsometry.

As long as the phase difference and magnitude of the complex amplitude reflectance ratio corresponding to the measured azimuth can be measured, all of the optical anisotropy parameters (alignment orientation, tilt angle of the optical axis, and the total tilt angle of the optical axis can be measured according to the measurement result by a conventionally known method. The ordinary refractive index, the extraordinary refractive index, the thickness of the alignment layer, the refractive index of the alignment layer, and the film thickness of the unaligned layer).

Therefore, the technical problem of the present invention is to further develop the differential SMP method, on the one hand, it is possible to measure the phase difference of the complex amplitude reflectance ratio in different three polarization states, and on the other hand, to measure the complex amplitude reflection of each polarization state. Rate ratio.

In order to solve the above problems, the invention of claim 1 is an optical anisotropy parameter measuring method for irradiating incident light from a predetermined measuring azimuth to a measuring point on a measuring object surface at a certain incident angle, according to the measurement. a method for measuring a phase difference Δ _x (x is a polarization state) of a complex amplitude reflectance ratio of an optical anisotropy parameter by measuring a light intensity data obtained by a light intensity of a polarization component in a specific direction included in the reflected light; In the case where the incident light is polarized and the polarized incident light is irradiated to the measurement point and measured in a predetermined measurement orientation, the measurement target surface is used as a reference and is orthogonal to the measurement target surface. The linearly polarized light of the in-plane vibration is used as the P-polarized light, and when the linearly polarized light vibrating in the direction orthogonal to the P-polarized light is used as the S-polarized light, each of the four is measured in accordance with at least three of the four polarization states of the following A to D. The light intensity data obtained by the total of twelve kinds of reflected light are in accordance with a preset program, and the reflected light of the polarization state is equal to the phase difference between the given polarizations. The difference between the two data is calculated degree of difference between two light intensity data, in addition to these two light intensity difference count data, whereby the phase difference between the complex amplitude reflectance of the incident light measured orientation ratio Δ _x; the The four polarization states of A to D are:

(A) One pair of polarized light is vibrated in the direction of ±α _A (0<α _A <π/2) with respect to the vibration direction of P-polarized light, and the phase difference between the polarization of each of the P-polarized component and the S-polarized component is already When the total of four types of polarized light of γ _A1 and γ _A2 is used as the incident light and is reflected by the surface of the measuring object, the total of four kinds of S polarized light contained in each reflected light is included;

(B) When P-polarized light is used as the incident light and is reflected by the surface of the measurement target, the phase difference between the P-polarized component of the reflected light and the polarization of the S-polarized component is adjusted to two types of light, γ _B1 and γ _B2 . a total of four types of polarized light that are vibrated in a direction of ±α _B (0<α _B <π/2) with respect to the vibration direction of the S-polarized light;

(C) One pair of polarized light is vibrated in the direction of ±α _C (0<α _C <π/2) with respect to the vibration direction of the S-polarized light, and the phase difference between the polarized light component of each of the P-polarized components and the S-polarized component is already When four types of polarized light of γ _C1 and γ _{C2 are} adjusted as incident light and reflected by the surface of the measuring object, a total of four types of P-polarized light included in each reflected light are included;

(D) When the S-polarized light is incident on the surface of the measurement target, the phase difference between the P-polarized component of the reflected light and the polarization of the S-polarized component is adjusted to two types of γ _D1 and γ _D2 . The total polarization of the polarized light contained in the polarized light with respect to the direction of vibration of the P-polarized light in the direction of ±α _D (0<α _D <π/2) is four.

The invention of claim 2 is based on measuring the azimuth of the measurement direction by changing the aforementioned measurement orientation around a normal line rising from the measurement point, and measuring the measurement directions obtained by measuring the total of twelve kinds of reflected light in at least three kinds of polarization states. The light intensity data is calculated by a predetermined program to calculate a phase difference Δ _{x of} a complex amplitude reflectance ratio corresponding to the measured direction of the incident light.

The invention of claim 3 is an optical anisotropic parameter measuring device, comprising: an illuminating optical system that illuminates light that is polarized into a predetermined polarization state from a predetermined measuring azimuth to a measuring object surface at a certain incident angle. a measuring point; a light receiving optical system detects a light intensity of light whose polarized light has been polarized into a predetermined polarized state; and an arithmetic device that calculates a complex amplitude reflectance which becomes an optical anisotropy parameter based on the measured light intensity a phase difference Δ _x (x is a polarization state); in the optical anisotropy parameter measuring device, a light source for illuminating monochromatic light, a polarizer capable of adjusting a polarization direction, and the like are sequentially disposed in the illuminating optical system The light-emitting side phase compensator capable of adjusting the phase; the light-receiving side phase compensator capable of adjusting the phase, the photodetector capable of adjusting the polarization direction, and the light intensity measuring the polarization of the penetrating photodetector are sequentially disposed in the light-receiving optical system a sensor; when the surface of the measurement object is used as a reference, the linearly polarized light that vibrates in the plane orthogonal to the surface of the measurement object is used as P-polarized light, and When the linearly polarized light vibrating in the direction orthogonal thereto is S-polarized light, the arithmetic unit measures the total of twelve kinds of reflected light for each of the four kinds of the four polarization states A to D. The light intensity data is calculated according to a preset program, and two light intensity difference data are calculated for two differences between the reflected light intensity data of the polarization states from which the phase differences between the polarization directions are equal, and the two light beams are calculated. The intensity difference data is used to calculate the phase difference Δ _x of the complex amplitude reflectance ratio of the measured azimuth of the incident light.

The invention of claim 4 is characterized in that the illuminating optical system and the light receiving optical system are arranged to be relatively rotatable about a normal line rising from a measuring point or radially arranged around the normal line; a computing device that calculates a phase difference Δ _x (x is a polarized state) of a complex amplitude reflectance ratio that is an optical anisotropy parameter according to a light intensity corresponding to a measured azimuth of the incident light; The measurement direction-light intensity data obtained by measuring the total of twelve kinds of reflected light of each of the four polarization states A to D in at least three kinds of polarization states, according to a preset program, each polarization state is given Calculating two measurement azimuth-light intensity difference data by calculating two differences between the reflected light intensity data with equal phase difference between the polarizations, and calculating the two light intensity difference data, thereby calculating the measurement of the incident light The phase difference Δ _x of the complex amplitude reflectance ratio corresponding to the orientation.

Further, in the inventions of the fifth to eighth inventions, the sum of the reflected light intensity data of a group having the same phase in each polarization state is calculated as the light intensity and the data, and one of the light intensity difference data and the light is obtained. The ratio of intensity to data calculates the magnitude of the complex amplitude reflectance ratio ∣R _x ∣ of the measured orientation of the incident light (or corresponding thereto ₎ .

According to the inventions of claims 1 and 3, when the incident light is irradiated to the measurement point from a predetermined measurement azimuth and the light intensity of the reflected light is measured, the measurement is performed in three preset polarization states, and the calculation is performed. The ratio of the light intensity difference data is used, whereby the phase difference Δ _x (x is a polarization state) of the complex amplitude reflectance ratio of the various polarization states can be measured for the measurement azimuth direction.

Here, as in the inventions of the fifth and seventh aspects of the patent application, as long as the ratio of the light intensity difference data to the light intensity and the data is calculated, the complex amplitude reflectance ratio of various polarization states can be measured for the measured azimuth direction. ∣R _x ∣ (x is the polarized state).

Further, as in the inventions of claims 2 and 4, for example, the illuminating optical system and the light receiving optical system are arranged so as to be rotatable around a normal line rising from a measuring point or radially around the normal line. The measurement can be performed while continuously or stepwise measuring the measurement azimuth, that is, the phase difference Δ _x (x is a polarization state) of the complex amplitude reflectance ratio corresponding to the measurement direction of the incident light can be measured, and The phase difference Δ _{x is} measured as a function of the measured orientation.

Here, as in the inventions of claims 6 and 8, the complex amplitude reflectance ratio of various polarization states can be measured for the measured azimuth direction by calculating the ratio of the light intensity difference data to the light intensity and the data. The size ∣R _x ∣ (x is the polarization state), and the magnitude of the complex amplitude reflectance ratio can be measured as a function of the measured orientation.

In order to achieve the purpose of further developing the differential SMP method and measuring the phase difference of the complex amplitude reflectance ratio in different three polarization states, the optical anisotropy parameter measurement method of the present invention irradiates the incident light at a certain incident angle. To the measurement point on the measurement target surface, the light intensity data obtained by measuring the light intensity of the polarization component in a specific direction contained in the reflected light is measured, and the phase difference Δ _x of the complex amplitude reflectance ratio which becomes the optical anisotropy parameter is measured. (X is a method of polarizing). In this method, the incident light is polarized, and when the polarized incident light is irradiated to the measurement point and measured in a predetermined measurement orientation, the measurement target surface is measured. As a standard, a linearly polarized light that vibrates in a plane orthogonal to the surface to be measured is P-polarized, and a linearly polarized light that vibrates in a direction orthogonal to the P-polarized light is used as S-polarized light, and is based on the following four to four The light intensity data obtained by measuring the total of twelve kinds of reflected light in at least three kinds of polarization states in the polarized state, according to a preset program, each polarized state is given Calculating two light intensity difference data by calculating two differences between the reflected light intensity data with equal phase difference between the polarizations, and calculating the two light intensity difference data, thereby calculating the complex orientation of the incident light The phase difference Δ _{x of the} amplitude reflectance ratio; the four polarization states of the A to D are:

(A) One pair of polarized light is vibrated in the direction of ±α _A (0<α _A <π/2) with respect to the vibration direction of P-polarized light, and the phase difference between the polarization of each of the P-polarized component and the S-polarized component is already When the total of four types of polarized light of γ _A1 and γ _A2 is used as the incident light and is reflected by the surface of the measuring object, the total of four kinds of S polarized light contained in each reflected light is included;

(B) When P-polarized light is used as the incident light and is reflected by the surface of the measurement target, the phase difference between the P-polarized component of the reflected light and the polarization of the S-polarized component is adjusted to two types of light, γ _B1 and γ _B2 . a total of four types of polarized light that are vibrated in a direction of ±α _B (0<α _B <π/2) with respect to the vibration direction of the S-polarized light;

(C) One pair of polarized light is vibrated in the direction of ±α _C (0<α _C <π/2) with respect to the vibration direction of the S-polarized light, and the phase difference between the polarized light component of each of the P-polarized components and the S-polarized component is already When four types of polarized light of γ _C1 and γ _{C2 are} adjusted as incident light and reflected by the surface of the measuring object, a total of four types of P-polarized light included in each reflected light are included;

(D) When the S-polarized light is incident on the surface of the measurement target, the phase difference between the P-polarized component of the reflected light and the polarization of the S-polarized component is adjusted to two types of γ _D1 and γ _D2 . The total polarization of the polarized light contained in the polarized light with respect to the direction of vibration of the P-polarized light in the direction of ±α _D (0<α _D <π/2) is four.

Fig. 1 is an explanatory view showing an example of an optical anisotropy parameter measuring device of the present invention. Fig. 2 is a flow chart showing the processing procedure of the main routine of the arithmetic unit. Fig. 3 is a flow chart showing the processing sequence of the subroutine. Fig. 4 is a graph showing light intensity difference data and light intensity and data in the polarized state A. Fig. 5 is a graph showing light intensity difference data and light intensity and data in the polarization state B. Fig. 6 is a graph showing light intensity difference data and light intensity and data in the polarization state C. Fig. 7 is a graph showing light intensity difference data and light intensity and data in the polarization state D. Figure 8 is a graph showing the phase difference of the calculated complex amplitude reflectance ratio. Figure 9 is a graph showing the calculated magnitude of the complex amplitude reflectance ratio.

First, the measurement theory of the complex amplitude reflectance and the phase difference thereof of the present invention will be described.

Considering the reflection of polarized light, the complex amplitude reflectance r _x (x is the polarized state) is expressed as:

r _x =∣r _x ∣exp[iδ _x ]

r _pp : complex amplitude reflectance of P-polarized light of reflected light when incident on P-polarized light

r _sp : complex amplitude reflectance of S-polarized light of reflected light when incident on P-polarized light

r _ps : complex amplitude reflectance of P-polarized light of reflected light when incident on S-polarized light

r _ss : complex amplitude reflectance of S-polarized light of reflected light when incident on S-polarized light

δ _pp : jump of the phase of the P-polarized light of the reflected light with respect to the phase of the P-polarized light incident on the light

δ _sp : jump of the phase of the S-polarized light of the reflected light with respect to the phase of the P-polarized light incident on the light

δ _ps : jump of the phase of the P-polarized light of the reflected light with respect to the phase of the S-polarized light incident on the light

δ _ss : jump of the phase of the S-polarized light of the reflected light with respect to the phase of the S-polarized light incident on the light

At this time, when the following formula defines the complex amplitude reflectance ratio R _x , it becomes

R _x =r _x /r _SS =(∣r _x ∣exp[iδ _x ])/(∣r _SS ∣exp[iδ _SS ])=(∣r _x ∣/∣r _SS ∣)exp[i(δ _x -δ _SS )]=∣R _x ∣exp[iΔ _x ]

Multiplexed amplitude reflectance ratio based retardation Δ _x R _x is expressed as

Δ _x =δ _x -δ _SS

The three-phase difference Δ _pp , Δ _sp , Δ _ps and the three sizes ∣R _pp ∣, ∣R _sp ∣, ∣R _ps ∣ of the complex amplitude reflectance ratio Rx defined in this way are optical anisotropies such as phase-matching films. The physical properties of the material are important, and it is particularly important to know that the phase differences Δ _pp , Δ _sp , Δ _ps are important for the evaluation of their optically anisotropic materials.

The theoretical formula of the intensity of the reflected light measured in each polarization state is as follows.

[Polarized state A]

The pair of polarized light is vibrated in the direction of ±α _A (0<α _A <π/2) with respect to the vibration direction of the P-polarized light, and the phase difference between the polarization of the P-polarized component and the S-polarized component of each is adjusted to γ. The light intensity of the four kinds of polarized light in which _A1 and γ _{A2 are} combined as the reflected light and reflected by the surface of the measuring object is expressed by a Jones matrix in the following manner.

[Math 1]

I _A =∣E _out ∣ ² = I ₀ {M _R (-θ _A )‧M _A ‧M _R (θ _A )‧M _S ‧Q _γ ‧M _R (-θ _P )‧M _P ‧M _R ( θ _p )‧E _in }

Here, I _o is the device constant, E _in and E _out are the polarization vectors of the incident light and the measurement light, and M _p , Q, M _S , M _A , and M _R are polarizers, phase plates, samples, and photodetectors, respectively. The Jones matrix of the coordinate rotation is provided in the following form.

γ: phase difference between polarizers

θ _p : deflection angle of the polarizer

θ _A : deflection angle of the photodetector

When the deflection angle of the polarized light of the incident light is θ, the light intensity I _A (θ, γ) is calculated by the following equation.

In the polarized state A, the measurement of the light intensity is performed in accordance with the following conditions.

Measurement 1: [γ, θ _p , θ _A ] = [γ _A1 , +α _A , 90°]

Measurement 2: [γ, θ _p , θ _A ] = [γ _A1 , -α _A , 90°]

Measurement 3: [γ, θ _p , θ _A ] = [γ _A2 , +α _A , 90°]

Measurement 4: [γ, θ _p , θ _A ] = [γ _A1 , -α _A , 90°]

Substituting this value into the above equation, respectively

I _A11 =I _A (α _A ,γ _A1 )

I _A12 =I _A (α _A ,γ _A2 )

I _A21 = I _A (-α _A , γ _A1 )

I _A22 =I _A (-α _A ,γ _A2 )

, take the difference and the sum, and provide the following.

DI _A1 : the difference between I _A11 and I _A21

DI _A2 : the difference between I _A12 and I _A22

SI _A : I _A11 and I _A21 or the sum of I _A12 and I _A22

[Polarized state B]

When the P-polarized light is incident on the surface of the measurement target, the phase difference between the P-polarized component of the reflected light and the polarization of the S-polarized component is adjusted to be polarized light of two types of γ _B1 and γ _B2 . The total light intensity of the four types of polarized light in the direction of ±α _B (0<α _B <π/2) with respect to the vibration direction of the S-polarized light is calculated by the following equation.

[Math 5]

When the deflection angle of the polarized light of the reflected light is θ, the light intensity I _B (θ, γ) is calculated by the following equation.

In the polarized state B, the light intensity was measured in accordance with the following conditions.

Measurement 1: [γ, θ _p , θ _A ] = [γ _B1 , 0°, 90° + α _B ]

Measurement 2: [γ, θ _p , θ _A ] = [γ _B1 , 0°, 90°-α _B ]

Measurement 3: [γ, θ _p , θ _A ] = [γ _B2 , 0°, 90° + α _B ]

Measurement 4: [γ, θ _p , θ _A ] = [γ _B1 , 0°, 90°-α _B ]

Substituting this value into the above formula, respectively

I _B11 = I _B (α _B , γ _B1 )

I _B12 =I _B (α _B ,γ _B2 )

I _B21 =I _B (-α _B ,γ _B1 )

I _B22 =I _B (-α _B ,γ _B2 )

Take the difference and the sum and provide the following.

DI _B1 : the difference between I _B11 and I _B21

DI _B2 : the difference between I _B12 and I _B22

SI _B : I _B11 and I _B21 or the sum of I _B12 and I _B22

[Polarized state C]

The pair of polarized light is vibrated in the direction of ±α _C (0<α _C <π/2) with respect to the vibration direction of the S-polarized light, and the phase difference between the polarization of the P-polarized component and the S-polarized component of each is adjusted to γ. The total intensity of the reflected light when the four kinds of polarized light of _C1 and γ _C2 are incident light and reflected by the surface of the measuring object is expressed by the following equation.

When the deflection angle of the polarized light is θ, the light intensity I _C (θ, γ) is calculated by the following equation.

In the polarized state C, the measurement of the light intensity was performed in accordance with the following conditions.

Measurement 1: [γ, θ _P , θ _A ] = [γ _C1 , 90° + α _C , 0°]

Measurement 2: [γ, θ _P , θ _A ] = [γ _C1 , 90° - α _C , 0°]

Measurement 3: [γ, θ _P , θ _A ] = [γ _C2 , 90° + α _C , 0°]

Measurement 4: [γ, θ _P , θ _A ] = [γ _C1 , 90° - α _C , 0°]

Substituting this value into the above formula, respectively

I _C11 =I _C (α _C ,γ _C1 )

I _C12 =I _C (α _C ,γ _C2 )

I _C21 =I _C (-α _C ,γ _C1 )

I _C22 =I _C (-α _C ,γ _C2 )

Take the difference and the sum and provide the following.

DI _C1 : the difference between I _C11 and I _C21

DI _C2 : the difference between I _C12 and I _C22

SI _C : I _C11 and I _C21 or the sum of I _C12 and I _C22

[Polarization state D]

When the S-polarized light is incident on the surface of the measurement target, the phase difference between the P-polarized component of the reflected light and the S-polarized component is adjusted to be polarized light of two types of γ _D1 and γ _D2 . The total of the four types of polarized light with respect to the vibration direction of the P-polarized light in the direction of ±α _D (0<α _D <π/2) is expressed by the following equation.

When the deflection angle of the polarized light is θ, the light intensity I _D (θ, γ) is calculated by the following equation.

In the polarized state D, the light intensity was measured in accordance with the following conditions.

Measurement 1: [γ, θ _p , θ _A ] = [γ _D1 , 90 ° , 0 ° + α _D ]

Measurement 2: [γ, θ _p , θ _A ] = [γ _D1 , 90 ° , 0 ° - α _D ]

Measurement 3: [γ, θ _p , θ _A ] = [γ _D2 , 90°, 0° + α _D ]

Measurement 4: [γ, θ _p , θ _A ] = [γ _D1 , 90 ° , 0 ° - α _D ]

Substituting this value into the above equation, respectively

I _D11 = I _D (α _D , γ _D1 )

I _D12 =I _D (α _D ,γ _D2 )

I _D21 =I _D (-α _D ,γ _D1 )

I _D22 =I _D (-α _D ,γ _D2 )

Take the difference and the sum and provide the following.

The ratio between the difference between the reflected light intensities measured in the polarized states A to D and the ratio of the difference to the sum are obtained, and the following expression is derived.

[Polarized state A]

(1) ratio of difference

DI _A1 /DI _A2 =cos(Δ _SP +γ _A1 )/cos(Δ _SP +γ _A2 )

(2) the ratio of difference to sum

DI _A1 /SI _A =sin(2α _A )|R _SP |cos(Δ _SP +γ _A1 )/{2(|R _SP | ² cos ² α _A +sin ² α _A )}

[Polarized state B]

(1) ratio of difference

DI _B1 /DI _B2 =cos(Δ _PP -△ _SP +γ _B1 )/cos(Δ _PP -△ _SP +γ _B2

(2) the ratio of difference to sum

DI _B1 /SI _B =sin(2α _B )∣R _PP ∣∣R _SP ∣cos(Δ _PP -Δ _SP +γ _B1 )/{2(∣R _PP ∣ ² cos ² α _B +∣R _SP ∣ ² sin ² α _B )}

[Polarized state C]

(1) ratio of difference

DI _C1 /DI _C2 =cos(Δ _PP -Δ _PS +γ _C1 )/cos(Δ _PP -Δ _PS +γ _C2 )

(2) the ratio of difference to sum

DI _C1 /SI _C =sin(2α _C )∣R _PP ∣∣R _PS ∣cos(Δ _PP -Δ _PS +γ _C1 ))/{2(∣R _PP ∣ ² cos ² α _C +∣R _PS ∣ ² Sin ² α _C )}

[Polarization state D]

(1) ratio of difference

DI _D1 /DI _D2 =cos(Δ _PS +γ _D1 )/cos(Δ _PS +γ _D2 )

(2) the ratio of difference to sum

DI _D1 /SI _D =sin(2α _D )∣R _PS ∣cos(Δ _PS +γ _D1 )/{2(∣R _PS ∣ ² cos ² α _D +sin ² α _D )}

In the above formula, the light intensity difference data DI _A1 , DI _A2 , DI _B1 , DI _B2 , DI _C1 , DI _C2 , DI _D1 , DI _D2 are known values that can be calculated from the measured reflected light intensity, polarized The deflection angles α _A to α _D and the phase difference γ _A1 , γ _A2 , γ _B1 , γ _B2 , γ _C1 , γ _C2 , γ _D1 , γ _D2 given by the phase compensator or the like are also known settings. value.

In addition, since the phase differences Δ _pp , Δ _sp , Δ _ps of the three complex amplitude reflectance ratios and the magnitudes of the three complex amplitude reflectance ratios ∣R _pp ∣, ∣R _sp ∣, ∣R _ps ∣ are unknown, the values are substituted. , can calculate these unknowns.

Further, as long as the intensity of the reflected light is measured while changing the measurement azimuth of the incident light toward the measurement point around the normal line rising from the measurement point, the intensity with respect to the reflected light, the light intensity difference data, and the light can be measured. The change in the measured orientation of the intensity and the data, and the direction of the alignment can be obtained from the change in the light intensity difference data. In addition, the phase difference Δ _pp , Δ _sp , Δ _{ps ,} and the complex amplitude reflectance ratio ∣R _pp ∣ , ∣R _sp ∣, ∣R _ps ∣ Measure the change relative to the measured azimuth.

In this case, the phase difference Δ _x and the size ∣R _x ∣ of the complex amplitude reflectance ratio can be used as the orientation direction, the tilt angle of the optical axis, the ordinary light refractive index, the extraordinary light refractive index, the alignment layer film thickness, and the alignment. Since the function of the seven parameters of the layer refractive index and the film thickness of the aligning layer is not shown, the above seven optical anisotropy can be obtained by a conventionally known method of fitting using a computer based on the six values. parameter.

[Examples]

The optical anisotropy parameter measuring apparatus 1 shown in FIG. 1 arranges or surrounds the light-emitting optical system 10 and the light-receiving optical system 20 so as to be rotatable relative to the normal line 5 rising from the measurement point 4 The normal light is arranged in a radial manner, and the light-emitting optical system 10 irradiates light that has been polarized into a predetermined polarization state to a surface (measurement target surface) 3 of the sample placed on the table 2 at a predetermined angle of incidence from a predetermined measurement azimuth. The measuring point 4, and the light receiving optical system 20 detects the light intensity of the light whose reflected light has been polarized into a predetermined polarization state, and the optical anisotropy parameter measuring device 1 is provided with a computer (computing device) 30, the computer light intensity corresponding to the azimuth measurement system 30 according to the calculated incident light becomes isotropic phase complex amplitude reflectance ratio parameter of the optical anisotropy Δ _{x (x} is a polarization state) and size |R _x |.

Further, an auto collimator 6 for detecting the amount of tilt is disposed above the table 2, and the table 2 is mounted on the reclining table 7, the height adjusting table 8, and the rotary table 9. .

The light-emitting optical system 10 is provided with a light source 11 for irradiating monochromatic light, a polarizer 12 for adjusting the polarization direction, and a light-emitting side phase compensator 13 for adjusting the phase.

In this example, the light source 11 uses a semiconductor-excited SHG (Second Harmonic Generation) laser having a transmission wavelength of 532 nm, and the polarized photon uses a Grand Thompson 消 with an extinction ratio of 10 ^-6 ( Glan-Thompson prism), the phase compensator 13 uses a Babinet-Soleil compensator.

The light-receiving optical system 20 is provided with a light-receiving side phase compensator 21 that can adjust the phase difference between the polarization of the P-polarized component and the S-polarized component, a photodetector 22 that can adjust the polarization direction, and a polarized light that is measured after passing through the photodetector 22. Light intensity photo sensor 23.

In this example, the phase compensator 21 uses a Babinet-Sorre compensator, the photodetector 22 uses a Glan Thompson 消 with an extinction ratio of 10 ^-6 , and the photo sensor 23 uses a photomultiplier tube. Further, the A/D (Analog-to-Digital) converter incorporated in the computer 30 is used to digitally convert the light intensity detected by the photo sensor 23 to be readable.

Further, in this example, the pair of light-emitting optical systems 10 and the light-receiving optical system 20 are arranged to be relatively rotatable relative to the table 2 on which the sample is placed so that the measurement azimuth of the incident angle can be continuously changed. Specifically, it is formed by rotating a rotary table that drives the table 2 horizontally.

In this case, the table 2 may be fixed, and the light-emitting optical system 10 and the light-receiving optical system 20 may be rotatably arranged. For example, the plurality of pairs of the light-emitting optical system 10 and the light-receiving optical system 20 may be equiangularly arranged. Radial.

Further, in the case where the phase difference Δ _x and the magnitude ∣ R _x复 of the complex amplitude reflectance ratio are measured only in a specific measurement azimuth, it is not necessary to configure the illuminating optical system 10 and the light receiving optical system 20 to be responsive to the table 2 Rotate or radially set a plurality of peer-to-peer measurement azimuth variable mechanisms.

Next, the table is rotated, and the measured azimuth-light intensity data is measured for a total of twelve kinds of reflected light of each of the four types of polarization states of the four polarization states A to D, while the measurement direction of the incident light is changed. :

(A) One pair of polarized light is vibrated in the direction of ±α _A (0<α _A <π/2) with respect to the vibration direction of P-polarized light, and the phase difference between the polarization of each of the P-polarized component and the S-polarized component is already When the total of four types of polarized light of γ _A1 and γ _A2 is used as the incident light and is reflected by the surface of the measuring object, the total of four kinds of S polarized light included in each reflected light.

(B) When the P-polarized light is incident on the surface of the measurement target, the phase difference between the P-polarized component of the reflected light and the polarization of the S-polarized component is adjusted to two types of γ _B1 and γ _B2 . The total polarization of the polarized light contained in the direction of ±α _B (0<α _B <π/2) with respect to the vibration direction of the S-polarized light is four.

(C) One pair of polarized light is vibrated in the direction of ±α _C (0<α _C <π/2) with respect to the vibration direction of the S-polarized light, and the phase difference between the polarized light component of each of the P-polarized components and the S-polarized component is already When four types of polarized light of γ _C1 and γ _C2 are used as the incident light and are reflected by the surface of the measuring object, the total of the four types of P-polarized light included in each reflected light.

(D) When the S-polarized light is incident on the surface of the measurement target, the phase difference between the P-polarized component of the reflected light and the polarization of the S-polarized component is adjusted to two types of γ _D1 and γ _D2 . The total polarization of the polarized light contained in the polarized light with respect to the direction of vibration of the P-polarized light in the direction of ±α _D (0<α _D <π/2) is four.

The input side of the computer 30 is connected to a rotation angle sensor 9s for driving the rotary table 9 of the table 2, and a light sensor 23. The output side of the computer 30 is connected to the light source 11 and the driving mechanism of the rotary table 9. 9d, the drive mechanism 12d of the polarizer 12, the drive mechanism 13d of the light-emitting side phase compensator 13, the drive mechanism 21d of the light-receiving side phase compensator 21, and the drive mechanism 22d of the photodetector 22.

In this manner, the adjustment polarizer 12, the light-emitting side phase compensator 13, the light-receiving side phase compensator 21, and the photodetector 22 can be set to the polarization states A to D, and the photosensors are respectively used in the respective polarization states A to D. 23 detects the light intensity while inputting the measured orientation of the incident light at the detection time point.

Further, in the computer 30, two measurement azimuth-light intensity difference data are calculated from two differences between the reflected light intensity data of equal phase in each polarization state according to a preset program, and from the two The ratio of the light intensity difference data calculates the phase difference Δ _x and the magnitude ∣R _x ∣ of the complex amplitude reflectance ratio corresponding to the measured orientation of the incident light.

Figures 2 and 3 show a flow chart of the processing sequence performed by the computer.

First, step STP1 performs initial setting.

The three polarization states to be measured in which of the polarization states A to D are set, and the deflection angle α with respect to the P-polarized light and the S-polarized light set by the polarizer 12 is set in accordance with the polarization state set here. _A and α _C and the deflection angles α _B and α _D with respect to the S-polarized and P-polarized light set by the photodetector 22 are set by the light-emitting side phase compensator 13 and the light-receiving side phase compensator 21 Phase difference.

In this example, the polarization states A to C are set, and the deflection angle of the polarizer 12 or the photodetector is set to α _A = α _B = α _C = α _D = 10°, by the light-emitting side phase compensator 13 and the light receiving The phase difference between the polarizations given by the side phase compensator 21 is set to: γ _A1 = γ _B1 = γ _C1 = γ _D1 =0°

γ _A2 =γ _B2 =γ _C2 =γ _D2 =90°

In step STP2, standby is performed until a predetermined start switch is pressed, and after the switch is pressed, the light source 11 and the photo sensor 23 are turned "ON" in step STP3, and the sample placed on the table 2 is started. Measurement of optical anisotropy parameters was performed.

First, in step STP4, it is determined whether or not the polarization state A is selected. When the polarization state A is selected, the processing of the subroutine A is performed. When the polarization state A is not selected or when the processing ends, the process proceeds to step STP5.

In step STP5, it is determined whether or not the polarization state B is selected, and if the polarization state B is selected, the processing of the subroutine B is performed, and when the polarization state is not selected. At time B or at the time point when the process ends, the process proceeds to step STP6.

In step STP6, it is determined whether or not the polarization state C is selected. When the polarization state C is selected, the processing of the subroutine C is performed. When the polarization state C is not selected or when the processing ends, the process proceeds to step STP7.

In step STP7, it is determined whether or not the polarization state D is selected. When the polarization state D is selected, the processing of the sub-program D is performed. When the polarization state D is not selected or at the time when the processing ends, the process proceeds to step STP8.

For the sake of simplicity, the angles of the polarizer and the photodetector are 0° in the P-polarization direction, 90° in the S-polarization direction, and the angle of the polarizer 12 is θ _p , and the polarization between the light-emitting side phase compensator 13 is given. The phase difference is λ _in , and the phase difference between the polarizations given by the light-receiving side phase compensator 21 is λ _out , and the angle of the photodetector 22 is θ _A .

In step STP11 of the subroutine A shown in Fig. 3(a), each of the drive mechanisms 12d, 13d, 21d, and 22d is activated to become [θ _p , λ _in , λ _out , θ _A ] = [0 + α In the manner of _A , 0, 0, and 90], the light-emitting optical system 10 and the light-receiving optical system 20 are adjusted, and in step STP12, the light intensity IA ₁₁ is read at intervals of a predetermined angle while rotating the table 2 by 360°.

In step STP13, the illuminating optical system 10 and the light receiving optical system 20 are adjusted so that [θ _p , λ _in , λ _out , θ _A ] = [0 - α _A , 0, 0, 90], in step STP14 The light intensity IA ₂₁ is read at intervals of a predetermined angle while rotating the table 2 by 360°.

At step STP 15, to become _{[θ p, λ in, λ} out, θ A] = [0 + α A, 90,0,90] The light-emitting optical system 10 is adjusted and the light receiving optical system 20, at step STP16 The light intensity IA ₁₂ is read at intervals of a predetermined angle while rotating the table 2 by 360°.

In step STP17, the illuminating optical system 10 and the light receiving optical system 20 are adjusted so that [θ _p , λ _in , λ _out , θ _A ] = [0 - α _A , 90, 0, 90], in step STP18 The light intensity IA ₂₂ is read at intervals of a predetermined angle while rotating the table 2 by 360°.

Similarly, in step STP21 of the subroutine B shown in Fig. 3(b), it becomes [θ _p , λ _in , λ _out , θ _A ] = [0, 0, 0, 90 + α _B ] The mode is adjusted, and the light intensity I _{B11 is} read in step STP22.

In step STP23, it is adjusted so as to become [θ _p , λ _in , λ _out , θ _A ] = [0, 0, 0, 90-α _B ], and the light intensity I _{B21 is} read in step STP24.

In step STP25, it is adjusted so as to become [θ _p , λ _in , λ _out , θ _A ] = [0, 0, 90, 90 + α _B ], and the light intensity I _{B12 is} read in step STP26.

In step STP27, it is adjusted so as to become [θ _p , λ _in , λ _out , θ _A ] = [0, 90, 0, 90-α _B ], and the light intensity I _{B22 is} read in step STP28.

In step STP31 of the subroutine C shown in FIG. 3(c), it is adjusted so as to become [θ _p , λ _in , λ _out , θ _A ]=[90+α _C , 0, 0, 0]. The light intensity I _{C11 is} read in step STP22.

In step STP23, it is adjusted so as to become [θ _p , λ _in , λ _out , θ _A ] = [90 - α _C , 0, 0, 0], and the light intensity I _{C21 is} read in step STP23.

In step STP25, it is adjusted so as to become [θ _p , λ _in , λ _out , θ _A ] = [90 + α _C , 90, 0, 0], and the light intensity I _{C12 is} read in step STP26.

In step STP27, it is adjusted so as to become [θ _p , λ _in , λ _out , θ _A ] = [90 - α _C , 90, 0, 0], and the light intensity I _{C22 is} read in step STP28.

In step STP41 of the subroutine D shown in FIG. 3(d), it is adjusted so as to become [θ _p , λ _in , λ _out , θ _A ]=[0, 0, 0, 90+α _B ]. And the light intensity I _{D11 is} read in step STP42.

In step STP43, it is adjusted so as to become [θ _p , λ _in , λ _out , θ _A ] = [0 - α _B , 0, 0, 90], and the light intensity I _{D21 is} read in step STP44.

In step STP45, it is adjusted so as to become [θ _p , λ _in , λ _out , θ _A ] = [0 + α _B , 90, 0, 90], and the light intensity I _{D12 is} read in step STP46.

In step STP47, to become _{[θ p, λ in, λ} out, θ A] = [0-α B, 90,0,90] The method of adjusting, at step STP48 and read light intensity I _D22.

When the measurement by each of the sub-programs A to D is completed, the process proceeds to step STP8, and the phase difference Δ _x and the magnitude | R _x | of the complex amplitude reflectance ratio are calculated based on the measurement results.

In step STP8, according to the light intensity measured by each of the polarization states A to D, two measurement azimuth-light intensity difference data are calculated from the two differences between the reflected light intensity data of the same phase in each polarization state, and The sum of the reflected light intensity data of equal phase as the measured azimuth-light intensity and information To calculate.

Fig. 4 (a) to (c) are the reflected light intensity difference DI _A1 = I _{A11 -} I _A21 in the polarized state A, the reflected light intensity difference DI _A2 = I _{A12 -} I _A22 , and the reflected light intensity and SI _A = I _A11 + I _A21 measurement results.

Fig. 5 (a) to (c) are the reflected light intensity difference DI _B1 = I _{B11 -} I _B21 in the polarized state B, the reflected light intensity difference DI _B2 = I _{B12 -} I _B22 , and the reflected light intensity and SI _B = I _B11 + I _B21 measurement results.

Fig. 6 (a) to (c) are the reflected light intensity difference in the polarization state C DI _C1 = I _{C11 -} I _C21 , the reflected light intensity difference DI _C2 = I _{C12 -} I _C22 , and the reflected light intensity and SI _C = Measurement results of I _C11 + I _C21 .

Fig. 7 (a) to (c) show the difference in reflected light intensity in the polarized state D DI _D1 = I _{D11 -} I _D21 , the reflected light intensity difference DI _D2 = I _{D12 -} I _D22 , and the reflected light intensity and SI _D = I _D11 + I _D21 measurement results.

Next, in step STP9, the ratio of the two light intensity difference data is calculated for each polarization state, and the ratio of one of the light intensity difference data to the light intensity and the data is calculated.

Next, in step STP10, phase differences Δ _pp , Δ _sp , Δ _{ps ,} and magnitude | R _pp |, | R _sp |, | R _ps | of the complex amplitude reflectance ratio are calculated.

At this time, the logical expression indicating the ratio of the light intensity difference data and the ratio indicating the ratio of the light intensity difference data to the light intensity and the data are rewritten from the parameters set in step STP1 to the following equation.

[Polarized state A] (1) ratio of difference

DI _A1 /DI _A2 =cot(△ _SP )

(2) the ratio of difference to sum

DI _A1 /SI _A =cos(Δ _SP )/{tan10/∣R _SP ∣+∣R _SP ∣/tan10}

Since DI _A1 , DI _A2 , and SI _A can be calculated from the measured values, Δ _sp and ∣R _sp ∣ are calculated from the equation.

[Polarized state B]

(1) ratio of difference

DI _B1 /DI _B2 =cot(Δ _PP -Δ _SP )

(2) the ratio of difference to sum

DI _B1 /SI _B =cos(Δ _PP -Δ _SP )/{∣R _SP ∣tan10/∣R _PP ∣+∣R _PP ∣/tan10}

Since DI _B1 , DI _B2 , and SI _B are known values that can be calculated from the measured values, and Δ _sp and ∣ R _sp ∣ are known from the measurement results of the polarization state A, Δ is calculated from the equation _Pp and ∣R _pp ∣.

[Polarized state C]

(1) ratio of difference

DI _C1 /DI _C2 = cot(Δ _PP -Δ _PS )

(2) the ratio of difference to sum

DI _C1 /SI _C =cos(Δ _PP -Δ _PS )/{∣R _SP ∣tan10/∣R _PP ∣+∣R _PP ∣/tan10}

Since DI _C1 , DI _C2 , and SI _C are known values that can be calculated from the measured values, and Δ _pp and ∣R _pp ∣ are known from the measurement results of the polarization state B, Δ is calculated from the equation _Ps and ∣R _ps ∣.

[Polarization state D]

(1) ratio of difference

DI _D1 /DI _D2 =cot(Δ _PS )

(2) the ratio of difference to sum

DI _D1 /SI _D =cos(Δ _PS )/{tan10/∣R _PS ∣+∣R _PS ∣/tan10}

Since DI _D1 , DI _D2 , and SI _D can calculate a known value from the measured value, Δ _ps and ∣R _ps ∣ are calculated from the equation.

In this way, from the polarization states A to D, the three phase differences Δ _pp , Δ _sp , Δ _ps related to the complex amplitude reflectance ratio and the ratios of the ratios of the four kinds of light intensity difference data which are the total of the unknown numbers are given. Since it is established, the phase difference Δ _pp , Δ _sp , Δ _ps can be calculated using three of them, so that the reflected light intensity can be measured for the three kinds of polarization states.

Further, similarly, from the polarization states A to D, the three sizes ∣R _pp ∣, ∣R _sp ∣, ∣R _ps相关 related to the complex amplitude reflectance ratio and the total light intensity of the four as the unknown number Since the logical formula of the ratio of the difference data is established, the phase difference Δ _pp , Δ _sp , Δ _ps can be calculated using three of them, so that the reflected light intensity can be measured for the three polarization states.

Fig. 8(a) to (c) are graphs showing the phase differences Δ _pp , Δ _sp , Δ _ps of the calculated complex amplitude reflectance ratio, and Fig. 9 (a) to (c) show the calculated complex A graph of the magnitude of the amplitude reflectance ratio ∣R _pp ∣, ∣R _sp ∣, ∣R _ps ∣.

Further, since the phase difference Δ _pp , Δ _sp , Δ _{ps ,} and the magnitudes ∣R _pp ∣, ∣R _sp ∣, ∣R _ps ∣ of the complex amplitude reflectance ratio calculated in this manner can be used as the alignment orientation, respectively, and the optical The parameters of the seven parameters of the tilt angle of the axis, the refractive index of the ordinary light, the refractive index of the extraordinary light, the thickness of the alignment layer, the refractive index of the alignment layer, and the film thickness of the unaligned layer are expressed by the six values. The above seven optical anisotropy parameters were obtained by a conventionally known method of fitting using a computer.

According to the phase difference and magnitude of the complex amplitude reflectance ratio measured by using the liquid crystal alignment film as a sample, the result of the above parameters was obtained by fitting using a 4×4 matrix of Berreman, and the orientation direction was 90.3°. The tilt angle of the optical axis is 24.6°, the refractive index of ordinary light is 1.76, the refractive index of the extraordinary light is 1.79, the film thickness of the alignment layer is 6.0 nm, the refractive index of the alignment layer is 1.77, and the film thickness of the unaligned layer is 94.1 nm. The measurements made by the ellipsometry method are consistent.

Further, in the measurement, it is necessary to adjust the illuminating optical system 10 and the light receiving optical system 20 to rotate the table 2 a total of twelve times. Even so, the total measurement time is about 20 seconds to 30 seconds, and the general ellipsometry is performed. Compared with the measurement carried out by the law, it can be measured in a very short time of 1/10 time, and can be applied to product inspection of a production line of a factory.

Further, although the Babinet-Sorre compensator is used for the phase compensators 12 and 21 on the light-emitting side and the light-receiving side, the present invention is not limited thereto, and may be used to move backward and backward toward the optical path. In this way, a phase compensator of a phase plate with a fixed phase difference is arranged.

(industrial availability)

The present invention is suitable for quality inspection of articles having optical anisotropy, and the like, and is particularly suitable for quality inspection of liquid crystal alignment films.

1. . . Optical anisotropy parameter measuring device

2. . . Workbench

3. . . Surface of the sample (measurement object surface)

4. . . Measuring point

5. . . Normal

6. . . Automatic collimator

7. . . Inclination adjustment workbench

8. . . Height adjustment workbench

9. . . Rotary table

9s. . . Rotation angle sensor

9d, 12d, 13d, 21d, 22d. . . Drive mechanism

10. . . Illuminating optical system

11. . . light source

12. . . Polarized photon

13. . . Luminous side phase compensator

20. . . Light receiving optical system

twenty one. . . Light-receiving side phase compensator

twenty two. . . Photodetector

twenty three. . . Light sensor

30. . . Computer (computing device)

Fig. 1 is an explanatory view showing an example of an optical anisotropy parameter measuring device of the present invention.

Fig. 2 is a flow chart showing the processing procedure of the main program of the arithmetic unit.

Fig. 3 (a) to (d) are flowcharts showing the processing procedure of the subroutine.

Fig. 4 (a) to (c) show the light intensity difference data and the light intensity and data in the polarized state A.

Fig. 5 (a) to (c) are graphs showing light intensity difference data and light intensity and data in the polarization state B.

Fig. 6 (a) to (c) show the light intensity difference data and the light intensity and data in the polarized state C.

Fig. 7 (a) to (c) show the light intensity difference data and the light intensity and data in the polarized state D.

Fig. 8 (a) to (c) are graphs showing the phase difference of the calculated complex amplitude reflectance ratio.

Fig. 9 (a) to (c) are graphs showing the calculated magnitude of the complex amplitude reflectance ratio.

1. . . Optical anisotropy parameter measuring device

2. . . Workbench

3. . . Surface of the sample (measurement object surface)

4. . . Measuring point

5. . . Normal

6. . . Automatic collimator

7. . . Inclination adjustment workbench

8. . . Height adjustment workbench

9. . . Rotary table

9s. . . Rotation angle sensor

9d, 12d, 13d, 21d, 22d. . . Drive mechanism

10. . . Illuminating optical system

11. . . light source

12. . . Polarized photon

13. . . Luminous side phase compensator

20. . . Light receiving optical system

twenty one. . . Light-receiving side phase compensator

twenty two. . . Photodetector

twenty three. . . Light sensor

30. . . Computer (computing device)

Claims (8)

An optical anisotropic parameter measuring method is characterized in that an incident light is irradiated from a predetermined measuring azimuth to a measuring point on a measuring object surface at a certain incident angle, and the light intensity of a polarizing component in a specific direction contained in the reflected light is measured. The obtained light intensity data is a method of measuring a phase difference Δ _x (x is a polarization state) of a complex amplitude reflectance ratio of an optical anisotropy parameter; in the method, the incident light is polarized and preset When the measured azimuth is irradiated to the measurement point and the measurement is performed, the linearly polarized light vibrating in the plane orthogonal to the measurement target surface is used as the P-polarized light with the measurement target surface as a reference. When the linearly polarized light of the P-polarized orthogonal direction vibration is used as the S-polarized light, the light intensity data obtained by measuring the total of twelve kinds of reflected light in each of the four polarization states of the following A to D are measured, According to a preset program, two light intensity difference data are calculated for two differences between the reflected light intensity data of the polarized states from which the phase differences between the polarized lights are equal, except Calculating the two light intensity difference data, thereby calculating the phase difference Δ _x of the complex amplitude reflectance ratio of the measured azimuth of the incident light; the four polarization states of the A to D are: (A) The vibration direction of the P-polarized light vibrates in the direction of ±α _A (0<α _A <π/2), and the phase difference between the polarization of each of the P-polarized component and the S-polarized component has been adjusted to γ _A1 and γ. _{When a} total of four kinds of polarized light of _A2 is incident light and is reflected by the surface of the measuring object, the total of four types of S-polarized light contained in each reflected light is used; (B) P-polarized light is used as the incident light and is measured. In the case of surface reflection, the phase difference between the P-polarized component of the reflected light and the polarization of the S-polarized component is adjusted to ±α _B with respect to the vibration direction of the S-polarized light in the polarized light contained in the two types of γ _B1 and γ _B2 ( 0<α _B <π/2) directional vibrations of four kinds of polarized light; (C) one pair of vibrations in the direction of ±α _C (0<α _C <π/2) with respect to the vibration direction of S-polarized light polarization, the polarization between those of each component and the S-polarized P-polarized component has been adjusted is the total phase difference γ _C1 and four kinds of polarization as the incident γ _C2 When the surface to be measured is reflected by the surface of the object to be measured, the total of the P-polarized light contained in each of the reflected light is included. (D) When the S-polarized light is used as the incident light and is reflected by the surface of the measuring object, the P-polarized component of the reflected light is reflected. The phase difference between the polarizations of the S-polarized component and the γ _D1 and γ _D2 are adjusted to be in the direction of ±α _D (0<α _D <π/2) with respect to the vibration direction of the P-polarized light. The total of the vibrations of the four kinds of polarization. An optical anisotropic parameter measuring method is characterized in that an incident light is irradiated from a predetermined measuring azimuth to a measuring point on a measuring object surface at a certain incident angle, and the light intensity of a polarizing component in a specific direction contained in the reflected light is measured. The obtained light intensity data is measured by a method of measuring a phase difference Δ _x (x is a polarization state) of a complex amplitude reflectance ratio of an optical anisotropy parameter; in this method, the measurement target surface is used as a reference, and the measurement target is The linearly polarized light having the in-plane vibration orthogonal to the surface is used as the P-polarized light, and when the linearly polarized light vibrating in the direction orthogonal to the P-polarized light is used as the S-polarized light, the measured azimuth is changed according to the normal line rising around the self-measuring point. The measured azimuth-light intensity data obtained by measuring the total of twelve kinds of reflected light in at least three of the four polarization states of the following A to D, according to a preset program, the respective polarization states are Calculating two measured azimuth-light intensity difference data from the difference between the reflected light intensity data of the phase difference between the polarized lights given, from the ratio of the two light intensity difference data Measuring the incident light and the orientation of the corresponding complex amplitude reflectance ratio of the phase difference Δ _x; A to D of the polarization state of four: (A) for vibration direction with respect to P-polarized ± α _A (0 < One of the directional vibrations of α _A <π/2) is polarized, and the phase difference between the polarization of the P-polarized component and the S-polarized component of each of them is adjusted to be the total of four kinds of polarized light of γ _A1 and γ _A2 as the incident light. When the surface to be measured is reflected by the surface of the object to be measured, the total of the four kinds of S-polarized light contained in each of the reflected lights; (B) when the P-polarized light is used as the incident light and is reflected by the surface of the measuring object, the P-polarized component of the reflected light is The phase difference between the polarizations of the S-polarized component has been adjusted so that the polarization of the light of the two types of γ _B1 and γ _B2 is vibrated in the direction of ±α _B (0<α _B <π/2) with respect to the vibration direction of the S-polarized light. The total of four types of polarized light; (C) one pair of polarized light vibrating in the direction of ±α _C (0<α _C <π/2) with respect to the vibration direction of S-polarized light, and the P-polarized component and S-polarized light of each when the phase difference between polarization components have been adjusted as γ _C1 and γ _C2 total four kinds of polarized light incident on a target surface to be measured and allowed to reflection When the S-polarized light is used as the incident light and is reflected by the surface to be measured, the phase difference between the P-polarized component of the reflected light and the polarized component of the S-polarized component is already present. The polarized light contained in the light of the two types of γ _D1 and γ _D2 is a total of four types of polarized light vibrating in the direction of ±α _D (0<α _D <π/2) with respect to the vibration direction of the P-polarized light. An optical anisotropic parameter measuring device comprising: an illuminating optical system for illuminating a light that is polarized into a predetermined polarization state from a predetermined measurement azimuth to a measurement point on a measurement target surface at a certain injection angle; and the light receiving optical system detects The light intensity of the light whose polarization is polarized into a predetermined polarization state; and the arithmetic means calculates the phase difference Δ _x of the complex amplitude reflectance ratio which becomes the optical anisotropy parameter based on the measured light intensity (x is In the optical anisotropy parameter measuring device, a light source for irradiating monochromatic light, a polarizer capable of adjusting a polarization direction, and a light-emitting side phase compensator capable of adjusting a phase are sequentially disposed in the light-emitting optical system. The light-receiving optical system is sequentially provided with a light-receiving side phase compensator capable of adjusting the phase, a photodetector capable of adjusting the polarization direction, and a photosensor for measuring the light intensity of the polarized light after passing through the photodetector; The surface is the reference, and the linearly polarized light vibrating in the plane orthogonal to the surface of the measuring object is used as the P-polarized light, and will vibrate in the direction orthogonal thereto. When the polarized light is S-polarized light, in the arithmetic unit, the light intensity data measured by the total of twelve kinds of reflected light of each of the four types of polarization states of the four polarization states A to D below is set in accordance with the preset a program for calculating two light intensity difference data from two differences between the reflected light intensity data of the phase differences obtained by the polarization states of the respective polarization states, and calculating the ratio of the two light intensity difference data The phase difference Δ _x of the complex amplitude reflectance ratio of the measured azimuth of the incident light; the four polarization states of the A to D are: (A) for the vibration direction with respect to the P polarized light at ±α _A (0<α _A One of the directional vibrations of <π/2) is polarized, and the phase difference between the polarization of each of the P-polarized component and the S-polarized component is adjusted to be four kinds of polarized light of γ _A1 and γ _A2 as the incident light. When the surface to be measured is reflected by the surface, the total of the four kinds of S-polarized light contained in each of the reflected lights; (B) When the P-polarized light is used as the incident light and is reflected by the surface of the measurement target, the P-polarized component of the reflected light and the S-polarized light are reflected. The phase difference between the polarizations of the components has been adjusted to γ _B1 and γ _B2 The polarized light contained in the two types of light is vibrated in the direction of ±α _B (0<α _B <π/2) with respect to the vibration direction of the S-polarized light; (C) the vibration against the S-polarized light The direction vibrates in one direction of ±α _C (0<α _C <π/2), and the phase difference between the polarization of each of the P-polarized component and the S-polarized component has been adjusted to the total of γ _C1 and γ _C2 . When the polarized light is incident on the surface of the measurement target and is reflected by the surface of the measurement target, the total of the four types of P-polarized light included in each of the reflected lights; (D) when the S-polarized light is incident on the surface of the measurement target, The phase difference between the P-polarized component of the reflected light and the S-polarized component is adjusted to be ±α _D (0<α _D with respect to the vibration direction of the P-polarized light in the polarized light of the two types of γ _D1 and γ _D2 . The directional vibration of <π/2) is a total of four types of polarized light. An optical anisotropy parameter measuring device comprising: an illuminating optical system, wherein the light polarized into a predetermined polarization state is irradiated from a predetermined measurement azimuth to a measurement point on a measurement target surface at a certain incident angle; and the light receiving optical system is Detecting light intensity of light whose polarized light has been polarized into a predetermined polarization state; the light-emitting optical system and the light-receiving optical system are arranged to be rotatable relative to a normal rising from the measurement point, or around the method The line is radial; and is provided with an arithmetic device that calculates a phase difference Δ _x (x is a complex amplitude reflectance ratio of the optical anisotropy parameter according to the light intensity corresponding to the measured orientation of the incident light. In the optical anisotropy parameter measuring device, a light source for irradiating monochromatic light, a polarizer capable of adjusting a polarization direction, and a light-emitting side phase compensator capable of adjusting a phase are sequentially disposed in the light-emitting optical system. Providing the light-receiving side phase compensator with adjustable phase, the photodetector capable of adjusting the polarization direction, and the measurement in the above-mentioned light receiving optical system a light sensor that transmits the intensity of the polarized light after the photon is detected; when the surface of the measuring object is used as a reference, the linearly polarized light that vibrates in the plane orthogonal to the surface of the measuring object is regarded as P-polarized light, and will be orthogonal thereto. When the linear polarization of vibration is used as the S-polarized light, the measurement is obtained by measuring the total of twelve kinds of reflected light of each of the four types of polarization states of the four polarization states A to D, depending on the measurement orientation. In the azimuth-light intensity data, in the arithmetic device, according to a preset program, two measurement azimuths - light are calculated for two differences between the reflected light intensity data of the polarization states from which the phase differences between the polarizations are equal. The intensity difference data calculates a phase difference Δ _x of the complex amplitude reflectance ratio corresponding to the measured orientation of the incident light from the ratio of the two light intensity difference data; the four polarization states of the A to D are: (A The pair of polarized light is vibrated in the direction of ±α _A (0<α _A <π/2) with respect to the vibration direction of the P-polarized light, and the phase difference between the polarization of the P-polarized component and the S-polarized component of each is adjusted to γ _A1 and γ _A2 total four When the polarized light is incident on the surface of the object to be measured and reflected by the surface of the object to be measured, the total of the four types of S-polarized light contained in each of the reflected lights; (B) when the P-polarized light is incident on the surface of the object to be measured, The phase difference between the P-polarized component of the reflected light and the polarization of the S-polarized component is adjusted to be ±α _B (0<α _B ) with respect to the vibration direction of the S-polarized light in the polarized light of the two types of γ _B1 and γ _B2 . a total of four kinds of polarized lights in the direction vibration of <π/2); (C) one pair of polarized lights vibrating in the direction of ±α _C (0<α _C <π/2) with respect to the vibration direction of the S-polarized light, When the phase difference between the P-polarized component and the S-polarized component is adjusted to be four kinds of polarized light of γ _C1 and γ _C2 as the incident light and reflected by the measurement target surface, the total of the reflected light is four. (P) When the S-polarized light is incident on the surface of the object to be measured, the phase difference between the P-polarized component of the reflected light and the S-polarized component is adjusted to γ _D1 and γ _D2 . The polarization of the two kinds of light is vibrated in the direction of ±α _D (0<α _D <π/2) with respect to the vibration direction of the P-polarized light. The total of four kinds of polarized light. The optical anisotropy parameter measuring method according to claim 1, wherein the light intensity data measured for the total of twelve kinds of reflected light of each of the four kinds of polarization states is followed by a preset program. Calculating, as light intensity and data, the sum of the reflected light intensity data in which the phase difference between the polarizations is equal is given for each polarization state, and calculating the incidence from the ratio of one of the light intensity difference data to the light intensity and the data. The magnitude of the complex amplitude reflectance ratio of the measured azimuth of light ∣R _x ∣ (x is the polarized state). The optical anisotropy parameter measuring method of claim 2, wherein the measured azimuth-light intensity data measured for the total of twelve kinds of reflected light in each of the three kinds of polarization states is set according to a preset The program calculates the sum of the reflected light intensity data of the phase difference between the polarizations given by the respective polarization states as the measured azimuth-light intensity and the data, and from the light intensity difference data and the light intensity and data The magnitude ∣R _x ∣ (x is a polarization state) of the complex amplitude reflectance ratio corresponding to the measured orientation of the incident light is calculated. The optical anisotropy parameter measuring device according to claim 3, wherein in the arithmetic device, the light intensity data measured by the total of twelve kinds of reflected light of each of the four kinds of polarization states is followed in advance. The set program calculates the sum of the reflected light intensity data having the phase difference between the polarized lights given by the respective polarization states as the light intensity and the data, and calculates the ratio of the light intensity difference data to the light intensity and the data. The magnitude of the complex amplitude reflectance ratio of the measured azimuth of the incident light ∣R _x ∣ (x is a polarized state). The optical anisotropy parameter measuring device according to claim 4, wherein in the arithmetic device, the measured azimuth-light intensity data measured according to the total of twelve kinds of reflected light of each of the four kinds of polarization states According to a preset program, the sum of the reflected light intensity data having the phase difference between the polarized lights given by the respective polarization states is calculated as the measured azimuth-light intensity and the data, and the light and the light intensity difference data are combined with the light. The ratio of the intensity to the data calculates the magnitude of the complex amplitude reflectance ratio ∣R _x ∣ (x is the polarized state) corresponding to the measured orientation of the incident light.