TW201011273A - Method and apparatus for measuring optically anisotropic parameters - Google Patents

Abstract

Provided are a method and an apparatus for measuring optically anisotropic parameters, which are developed from a differential SMP method and capable of measuring the phase difference and the magnitude of a complex amplitude reflectivity ratio in different three polarizing states within a short time. In the present invention, the phase difference and the magnitude are measured based on total 12 kinds of light intensities of three polarizing states in A to D. (A) total 4 kinds of S polarized lights contained in reflective lights when total 4 kinds of polarized lights, in which inter-polarized-lighted phases with respect to P ± α A polarized light are adjusted to γ A1 and γ A2, are incident. (B) total 4 kinds of polarized lights vibrating in S ± α B, which are selected from polarized lights in which inter-polarized-lighted phase difference between P polarized light and S polarized light of reflective lights are adjusted to γ B1 and γ B2, when P polarized lights are incident. (C) total 4 kinds of P polarized lights contained in reflective lights when total 4 kinds of polarized lights, in which inter-polarized-lighted phases with respect to S ± α C polarized light are adjusted to γ C1 and γ C2, are incident. (D) total 4 kinds of polarized lights vibrating in P± α D, which are selected from polarized lights in which inter-polarized-lighted phase difference between P polarized light and S polarized light of reflective lights are adjusted to γ D1 and γ D2, when S polarized lights are incident.

Description

201011273 4 VI. Description of the Invention: [Technical Field] The present invention relates to an optical anisotropy parameter measuring method and measurement for measuring a phase difference of a complex amplitude reflectance ratio of an optical anisotropic film formed on a surface of a measuring object The device is especially suitable for inspection of liquid crystal alignment films and the like. [Prior Art] The liquid crystal display is configured such that a back side glass substrate having a transparent electrode and an alignment film formed on its surface is laminated with a surface-side glass substrate on which a color filter, a transparent electrode, and an alignment film are laminated. The spacers are aligned with each other, and the liquid crystal is sealed in a state in which the liquid crystal is sealed to the gap of the alignment film, and a polarizing filter is laminated on both sides of the front surface of the surface. Here, in order for the liquid crystal display to operate normally, the liquid crystal molecules must be uniformly arranged in the same direction, and the alignment film determines the directivity of the liquid crystal molecules. The reason why the alignment film can align the liquid crystal molecules because of the axial optical anisotropy is that the liquid crystal display is less prone to defects when the entire surface of the alignment film has a uniform axial optical anisotropy. When there is a portion where the optical anisotropy is uneven, the liquid crystal display becomes a defective product due to the disorder of the direction of the liquid crystal molecules. That is, the quality of the alignment film directly affects the quality of the liquid crystal display. When the alignment film is defective, the liquid crystal display also has defects due to the directional disorder of the liquid crystal molecules. Therefore, when assembling a liquid crystal display, it is possible to improve the yield of the liquid crystal display and improve the production efficiency by checking the presence or absence of the alignment film in advance and requiring the use of an alignment film of stable quality. 4 321299 201011273 Therefore, in general, an ellipsometry method (non-patent document 1) is known as a method for inspecting an alignment film of the related art. • Non-Patent Document 1: RMAAzzam and NMBashara: • Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1986) This method measures the reflected polarization state for three or more types of incident polarization states and measures complex amplitude reflections. The ratio of the ratio of RppErpp/rss, RPS Ξ rps/rss, Rsp Ξ rsp/rss is measured. Ο Here, 'Rx (X is a polarized state) is defined by the complex amplitude reflectance of the incident light that is respectively irradiated to the measurement point, specifically, the complex amplitude reflectance Γρρ of the p-polarized light when the p-polarized light is incident. The ratio of the complex amplitude reflectance rss of the s-polarized light when the S-polarized light is incident, the complex-amplitude reflectance rps of the ρ-polarized light when the S-polarized light is incident, and the complex-amplitude reflectance rsp of the S-polarized light when the p-polarized light is incident is defined. . Since the measurement is performed by rotating the measurement side of the incident light by 360 degrees around the normal line extending from the measurement point, the measurement azimuth direction dependence of the complex amplitude reflectance ratio can be measured, so that the alignment film can be evaluated in detail. Molecular alignment 'but there are problems with measuring time consuming. Further, when the film thickness is thin, since the detection ability of the anisotropy is low, the anisotropy may not be detected. Therefore, the method of measuring the optical anisotropy according to the molecular alignment at two speeds has been proposed by the inventors to propose a differential SMP (Symmetric Multi Processors) method. In the method of measuring the object to be measured, the direction of the person who emits the human light and the measurement light is set as the reference direction with respect to the direction of any of the P polarized light or the S polarized light 5 321299 201011273. For the linearly polarized light vibrating in the reference direction, the other of the human light and the measurement light is set to be a linearly polarized light in a direction of π/2±α (() <α<7Γ/2) with respect to the reference direction, The measurement of the optical intensity of the two kinds of measurement light corresponding to the pair of polarized lights is measured according to the difference between the two light intensities (10) obtained by measuring the optical anisotropy parameter, and the alignment of the measurement object can be measured in a short time. The orientation, the tilt angle of the optical axis, and the size of the alignment are used as optical anisotropy parameters. However in the differential SPM method

-..., it is impossible to measure the phase difference and size of the complex amplitude reflectance ratio which best expresses the characteristics of light and anisotropic substances, and i have to solve the problem of other methods such as the circular deviation method. As long as it can measure the complex amplitude reflectance ratio of the corresponding measured azimuth (4) person and size ', it can be measured according to the measurement result by using a conventionally known method. The seven rides have optical anisotropy parameters (orthogonal orientation, optical axis (four) layer plus 2 towel light-folding material, abnormal domain material, alignment layer film thickness, refractive index of the layer, and film thickness of the unaligned layer).

SUMMARY OF THE INVENTION (Problems to be Solved by the Invention) Therefore, the technical problem of the present invention is to advance the differential homing method, and to measure the different ratios of _ M b 07 on the one hand. Complex amplitude reflection ^ _ difference 'other side can measure the complex amplitude of the money light state (means to solve the problem) In order to solve the above problem, the invention of claim 1 is a 321299 6 201011273 - optical anisotropy The parameter measurement method is to inject light at a certain angle of incidence. The measurement point irradiated from the predetermined measurement azimuth to the measurement target surface is obtained according to the measurement* the light intensity of the polarization component of the specific direction contained in the reflected light. The light intensity data is a method of measuring a phase difference Δχ (X is a polarization state) of a complex amplitude reflectance ratio of an optical anisotropy parameter; in the method, the incident light is polarized at a predetermined measurement orientation When the polarized incident light is irradiated to the measurement point and measured, the measurement target surface is used as a reference to linearly polarize the vibration in the plane orthogonal to the measurement target surface. In the case of Ρpolarized light, a linearly polarized light that will vibrate in a direction orthogonal to the Ρ-polarized light is used as S-polarized light, and four of the four totals are measured in accordance with at least three of the four polarized states of the following a to D. The light intensity data obtained by the reflected light 'according to a preset program, two light intensity difference data are calculated for two differences between the reflected light intensity data of the polarization states from which the phase differences between the polarized lights are equal. The two light intensity difference data are used to calculate the phase difference ❿Δχ of the complex amplitude reflectance ratio of the measured azimuth of the incident light, and the four polarization states of the A to 〇 are: (A) the needle is relatively polarized with respect to P The vibration direction is one of the direction vibrations of ±αΑ(〇<αΑ <;r/2), and the phase difference between the polarization of each of the ρ polarization component and the S polarization component has been adjusted to T A1 and 7 Α2 When the four types of polarized light are used as the incident light and are reflected by the surface of the measurement target, the total of the four types of S-polarized light contained in each of the reflected lights is used; (Β) the ρ-polarized light is used as the incident light and is measured. When the surface is reflected, the reflected light will be polarized The phase difference between the polarizations of the S-polarized component and the polarization of the γΒι and r are adjusted to be ±αΒ(0<αΒ< ττ/2) with respect to the polarization direction of the 321299 7 201011273 S polarized light. The total of the directional vibrations is four kinds of polarizations; (C) For the vibration direction with respect to the S-polarized light, one of the vibrations in the direction of ±(3; (〇<< 7Γ/2) When the phase difference between the polarization of the component and the S-polarized component is adjusted to be four kinds of polarized light of γ Q and γ c2 as the incident light and reflected by the surface of the measurement target, the total of four types of Ρ contained in each reflected light (D) When the S-polarized light is used as the incident light and is reflected by the surface of the measuring object, the phase difference between the polarized light component of the reflected light and the polarized light of the s-polarized component has been adjusted to be 7〇1 and 71)2. The polarized light contained in the light has a total of four kinds of polarized light in the direction of the vibration of the ±polarized light in the direction of the ±heart (0<<>>" The invention of claim 2 is based on measuring the azimuth of the measurement direction by changing the aforementioned measurement orientation around a normal line rising from the measurement point, and measuring the measurement directions obtained by measuring the total of twelve kinds of reflected light in at least three kinds of polarization states. — The light intensity data, based on a preset program', calculates the phase difference of the complex amplitude reflectance ratio corresponding to the measured orientation of the incident light. The invention of claim 3 is an optical anisotropic parameter measuring device, comprising: an illuminating optical system that illuminates light that is polarized into a predetermined polarization state from a predetermined measuring azimuth to a measuring object surface at a certain incident angle. a measuring point; a light receiving optical system detects a light intensity of light whose polarized light has been polarized into a predetermined polarized state; and an arithmetic device that calculates a complex amplitude reflectance which becomes an optical anisotropy parameter based on the measured light intensity The phase difference of the ratio is 31 (the fork is in a polarized state); in the optical anisotropy 321299 8 201011273 - the number measuring device, a light source for illuminating the monochromatic light and an adjustable polarized light are sequentially disposed in the illuminating optical system. The polarized light of the direction and the light-emitting side phase supplement of the adjustable phase are provided in the light receiving optical system in sequence, the light receiving side phase compensator capable of adjusting the phase, the photodetector capable of adjusting the polarization direction, and the measuring a light sensor that transmits the intensity of the polarized light of the photodetector; when the surface of the measuring object is used as a reference, the surface will be vibrated in a plane orthogonal to the surface of the measuring object The linear linear polarization is p-polarized, and the linearly polarized light that vibrates in the direction orthogonal to this is used as the s-polarized light. In the aforementioned arithmetic device, each of the four kinds of polarization states for at least three of the four polarization states A to D is used. A total of twelve kinds of light intensity data measured by the reflected light are calculated according to a preset program, and two lights are calculated for two differences between the reflected light intensity data of the polarization states from which the phase differences between the polarization directions are equal. The intensity difference data 'receives the two light intensity difference data, thereby calculating the phase difference Δ χ of the complex amplitude reflectance ratio of the measured azimuth of the incident light. The invention of claim 4 is characterized in that the illuminating optical system and the light-receiving optical system are arranged to be relatively rotatable about a normal line rising from a measuring point or radially arranged around the normal line; There is an arithmetic device that emits a phase difference Δχ (X is a polarized state) which is a complex amplitude reflectance ratio of the optical anisotropy parameter according to a light intensity meter corresponding to the measured orientation of the incident light; The measurement direction-light intensity data obtained by measuring the total of twelve kinds of reflected light of each of the four kinds of polarization states Α to D at least three of the polarization states, according to a preset program' Calculate two measured azimuths—light intensity difference 321299 9 201011273 data from two differences between the reflected light intensity data of the phase difference between the given polarizations, except for the two light intensity difference data, the measured position The phase difference of the corresponding complex amplitude reflectance ratio is the first to leave; 4 is the circumference of the 5th to 8th inventions. The polarization of the reflected light intensity data of a group of::::! Γ = 'and the light intensity difference from the data - the measurement of the orientation of the incident light (or corresponding thereto) complex amplitude reflectance ratio of the size of the square of the light intensity H | Rx |. (Effects of the Invention) ρίθ According to the inventions of the first and third items of the patent application 11, in the predetermined two directions, the light is irradiated to the light, and the light intensity of the reflected light is measured to sigh in advance. The three kinds of polarization states are determined as the ratio of the difference data, so that the measurement orientation can be made to the state of the state, and the difference between the ratios of the four dimensions is four (the ratio of the ratio is 偏 她 偏 如 如 如 如 如 如 如 如 如 如 如 如The inventions of items 5 and 7 are as long as: the ratio of the light intensity difference data to the light intensity and the data can be measured for: :: Azimuth direction measures the magnitude of the complex amplitude reflectance ratio of various polarization states Κ I (X is a polarized state.) In addition, as in the inventions of the patents (4) 2 and 4, for example, the wire (four) system and the light-receiving optics (10) can be arranged around the (four) point to form a ^, rotation or Radially arranged around the normal line, and the measurement is performed while changing the measurement orientation, that is, the phase Δ mountain of the complex amplitude reflectance ratio corresponding to the measurement direction of the incident light is a polarization state) The phase difference ^ is performed as a function of measuring the orientation 1 〇 321299 201011273 the amount. Here, as in the inventions of claims 6 and 8, the complex amplitude reflectance of various pre-states can be measured for the measured azimuth direction by calculating the ratio of the light intensity difference data to the light intensity and the data. The size of the ratio |RX| (X is the polarization state), and the magnitude of the complex amplitude reflectance ratio can be measured as a function of the measured orientation. [Embodiment]

In order to achieve the purpose of further developing the differential SMP method and measuring the phase difference of the complex amplitude reflectance ratio in different three polarization states, the optical anisotropy parameter measurement method of the present invention irradiates the incident light at a certain incident angle. The measurement point on the measurement target surface is measured based on the light intensity data obtained by measuring the light intensity of the polarization component in the characteristic direction of the reflected light, and the phase difference Δχ of the complex amplitude reflectance ratio which becomes the optical anisotropy parameter is measured. (χ* polarized state) method; in the method, the above-mentioned incident light is polarized > and the measurement is performed when the pre-determined measurement is purely irradiated with the incident light of the partial filament; Using the measurement target surface as a reference, the linearly polarized light vibrating in the plane orthogonal to the surface of the whisker object is used as the ρ-polarized light, and when the polarized light of the positive (four) direction is used as the s-polarized light, the name = lower ^ to光 Light intensity data obtained from at least three types of reflected light in at least three of the four polarization states, according to 壬 equal, each of the polarized states is reflected from the phase difference of the phase 3 of the polarized light The difference data between the two data 'except for the two light intensity differences, the complex amplitude reflectance ratio of the measured azimuth for a long time = the calculated initial difference Δχ; the A to D# 321299 11 201011273 The four polarization states are: (A) For the polarization direction of the vibration direction of the P-polarized light in the direction of ±αΑ (0<αΑ < ττ/2), the polarization of the ρ and the S-polarized component of each The phase difference between the polarizers has been adjusted to a total of four kinds of polarized light of ~ and ~ as the incident light and reflected by the surface of the measurement target, the total of four kinds of s-polarized light contained in each reflected light; (B) Using p-polarized light as When the light is incident on the surface of the object to be measured and reflected, the phase difference between the polarization of the P-polarized component and the s-polarized component is adjusted to be the polarized light contained in the two types of light, rB1 and rB2, relative to the s-polarized light. The direction of vibration is a total of four types of polarized light in the direction of ±αΒ(()<αΒ<;Γ/2); (c) vibrating in the direction of soil < 7Γ /2) with respect to the direction of vibration of § polarized light One pair of polarized light, between the ρ polarized component of each and the polarized component of the S polarized component When the disparity of the four types of polarized light is adjusted as the incident light and the surface of the object to be measured is reflected, the total of the four types of P-polarized light contained in each of the reflected lights; (D) S-polarized light is used as the incident light. When the surface of the object to be measured is reflected, the phase difference between the P-polarized component of the reflected light and the polarization of the s-polarized component is adjusted to the vibration direction of the polarized light contained in the light of the two types of ·rD1 and yd2. Four types of polarized light are combined in the direction of ±aD (0<aD< π/2). Fig. 1 is an explanatory view showing an example of the optical anisotropy parameter measuring apparatus of the present invention. Fig. 2 is a flow chart showing the processing procedure of the main program (r〇utine) of the arithmetic unit. Figure 3 shows the processing sequence of the subprogram. 321299 12 201011273 Flowchart. Fig. 4 is a graph showing light intensity difference data and light intensity and data in the polarization state A. Fig. 5 is a graph showing light intensity difference data and light intensity and data in the polarization state b. Fig. 6 is a graph showing light intensity difference data and light intensity and data in the polarization state c. Fig. 7 is a graph showing light intensity difference data and light intensity and data in the polarization state D. Figure 8 is a graph showing the phase difference of the calculated complex amplitude reflectance ratio. Figure 9 shows a graph of the calculated complex amplitude reflectance ratio. First, the measurement theory of the complex amplitude reflectance and the phase difference thereof of the present invention will be described. Considering the reflection of polarized light, the complex amplitude reflectance Γχ (X is the polarized state) is expressed as: βχρίίδ χ]

复· Complex amplitude reflectance of the Ρ-polarized light of the reflected light when the ρ-polarized light is incident rsp: Complex-amplitude reflectance rps of the S-polarized light of the reflected light when the ρ-polarized light is incident: ρ-polarized of the reflected light when the S-polarized light is incident Complex amplitude reflectance, complex amplitude reflectance of s-polarized light of reflected light when incident S-polarized light: 5pp: jump of phase of P-polarized light of reflected light with respect to phase of ρ-polarized light of incident light: relative to incident light The phase of the S-polarized light of the reflected light of the phase of the ρ-polarized light is 5 ps: the jump of the phase of the P-polarized light of the reflected light with respect to the phase of the S-polarized light of the incident light. • The phase of the S-polarized light with respect to the incident light. S-displacement of reflected light 13 321299 201011273 Jump of phase of light At this time, when the complex amplitude reflectivity r Χ / Γ ss ratio Rx is defined by the following equation, it becomes rss I e X p [ j (5 ; c - δ ss)] δ ssl) and the phase difference of the complex amplitude reflectance ratio & is expressed as Δ Xs δ δ ss. In this way, the amplitude reflectance of the amplitude (R) is different from that of Rx ^ PP, lP, \s and 3 sizes | RpJ丨^丨,|R mountain system is important as a physical property parameter of an optical anisotropic material such as a phase film, especially It is important to know the phase difference Δρρ and to evaluate its optically anisotropic material. The theoretical formula of the intensity of the reflected light measured in each polarization state is as follows. [Polarization state A] For the polarization of the direction of the vibration of the p-polarized light in the direction of the soil αΑ(0 <aA<;r /2), the phase between the polarization of the ρ-polarized component and the s-polarized component The light intensity of the reflected light of the total of 7 ai and 7 a2 as the reflected light and reflected by the surface of the measuring object is expressed by the following equation using a Jess matrix (J0nes matrix). [Math 1] lA = Km\2 =^{μκ{-Θα)-Μα· M^(&A)-Ms-Qr-MK(-ep)-Mf-Mji(ep)^ Here, I . For the device constant, Ein and Eat are the polarization vectors of the incident light and the measurement light. Mp, Q, Ms, MA, and MR are respectively a polarizer, a phase plate, and a Jones matrix of the sample, the photodetector, and the coordinate rotation, respectively. It is provided in the form described below. [Math 2]

E (%, ❹

Mr (θ) = Μρ: cos0 sin^' sin0 cos^ 0,

Ms: Μα: PP rps .% rss '0 〇j 丫. Phase difference between polarizations θρ : (deflection angle) 0 A : Deflection angle of the photodetector, when the deflection angle of the polarization of the incident light is set to $, the light intensity θ , 7) is calculated by the following formula. [Math 3] ... ....... ) 〇{U| COS is called y Sm2 is called %||~丨sin (for example) c〇s (~-heart light) j In the polarized state A, 4 old, quantity. The light intensity is measured according to the following conditions. 321299 15 201011273 12 3 4 The amount of measurement is measured. ',,, 7 y V 7 —·"·: ·*-· _ .

AAAAVV 7 7 *TMI i-I i-- n Ilf 二 二 I iI I—I i-1 I—* AAAA ο ο ο ο ο ο ο ο 将该 将该 将该 将该 代 代 代 代 代 代 代 代 代 代 代 代 代 代 代 代 代 代 代 代 代(αΑ, Vai) ΙΑΐ2=ΙΑ(αΑ, yA2) I Α2 1 II I Α (- α Α, y Α1) I Α22= I Α (— α Α' y Α2), take the difference and the sum, and below Available. [Math 4] DIai = 2/〇sin(2%H|c〇s(Winter~sss+rA1) DIa2 = 270sin(2^)j^||^|cos(^ SIa =2/〇(|7vfcos , + r«fsin2 DIai : Difference between 1 8 11 and Ia21 DIa2 · Difference between 1 8 12 and Ia22 SIA · IaII and Ia21 or IA12 and Ia22 _ [Polarized state B] Ρ polarized light is used as incident light When the surface of the object to be measured is reflected by the surface of the object to be measured, the phase difference between the polarization of the Ρ-polarized component and the s-polarized component is adjusted to be ±αΒ among the polarizations of the light of the two types of Β1 and ΤΒ2 with respect to the S-polarized light. (〇<〇; Β < π / 2) The total of the four types of polarized light is calculated by the following equation: [Math 5] 321299 16 201011273

Ib ~ |E〇« |2 = /〇{ Mr {-Θα ) · Ma · Mr (^ ) · Qy · Ms · Ma (-θρ ) · Mp · Mr (^ ) · Eift | When polarized light is reflected When the deflection angle is set to Θ, the light intensity IB (0, γ) is calculated by the following equation. [Math 6] Called, r) = /0||^ If 2 is called r 〇 s2 called; + γ). i In the polarized state B, the light intensity is measured according to the following conditions. 12 3 4 quantity quantity ffu rf3 rtu ϋ

Ppppp Θ AD 6 @ % VVV VY77 rL [ I_ J 1....I ο ο ο 0 ο ο ο ο 112 1 BBBBV yry I — rw I_I I__I il fi II l{ TJ TJ I—SI—IAAAA θ β Θ d + - + I Ο Ο 〇0 ο ο ο ο 9 9 9 9 a BJ a b3a B] a B] Substituting this value into the above formula, respectively

HB 1 1 = IB ( a B » 8 12=18 ( α B, Β 2 1 = IB (~ α B > B 2 2 = IB a Β» ybi) y bz) yb〇y b2) * b 2 2 — i B < a B> 7 B 2 Take the difference and the sum, and provide the following equation [Math 7] View = 2 / » Ice 1 Bu. Also _^^) Lone 2 = 2J°sin (4) W4〇s( w~) a Called |~丨2 blood, +|rspf c〇s,) DIbi . Difference between IB11 and lB21 DIb2_. Difference between Ibi2 and Ib22 321299 17 201011273 Ϊβ · Ibii and IB21 or the sum of IB12 and ιΒ22 [polarized state c] one pair of polarized light in the direction of ±ac (0<ac<7r//2) with respect to the vibration direction of S-polarized light, the p of each The phase difference between the polarization of the polarizing component and the s-polarized component has been adjusted to the following equations: The light intensity of the reflected light when the four types of polarized light are combined with & [Math 8] |E〇«/| MR(^).Ms-Qr-MR(-<9p)-Mp-MR(^)-Ein} When the deflection angle of the polarized light is set to 0, the light intensity Ic ( θ, 7 ) is calculated by the following formula. [Math 9] Zombie) = /. {Bu small in2 called correction, s2 call, 』 and & polarized g c towel' are measured for light intensity according to the following conditions. 12 3 4 Quantity M1 quantity rfu rfu ®

Li = {I ί—I I—I I—I I—I A A A A Θ 0 θ Θ ''', p p p p CD 0 CD CD

112 1 c c c C Ύ V V 7 —I I—W I__> I_I ο ο ο ο ο ο ο ο 9 9 9 0 Substituting this value into the above equation, respectively, C 1 1 c 1 2 C 2 1 C 2 2

CC α c > I c (一(一^ c 1 ) y c2) ya) y 〇z) c ^ ac, 7 c, take the difference and the sum ' and provide the following formula 18 321299 201011273 . 】

Did =2/03^(2%)|^||^|〇〇8(^ + γα) DIc2 = <% ) 13⁄4 1I cos ^ δρρ - Sps + yc2^ . Sic =2/0[(^| 2sm2^+J^.|2cos2^j DIci : Difference between Icii and .Ic2i DIC2 ·· ϊ<:12 Difference with Ic22 Sic ·· Icil and Ic21 or Ici2 and Ic22 ❹ [Polarization state D] S-polarized When the incident light is reflected by the surface of the measurement target, the phase difference between the P-polarized component of the reflected light and the polarization of the S-polarized component is adjusted to be the polarized light of the light of the two types of 7 〇 1 and 7 D 2 . The total light intensity of the four types of polarized light with respect to the vibration direction of the p-polarized light in the direction of ±aD (〇<α〇<龙/2) is expressed by the following equation: [Formula 11] Lu/z? H (6) .<VMs.Mr(h9p).MP.Mr(6)·Ε^ When the deflection angle of the polarized light is Θ, the (fourth) degree θ(θ, 7) is calculated by the following equation: [Math 12] Ridge ')- 々{|... S2 must be remembered 2 called ▲ 丨 post,. 〆曰 〆曰 乌 状态 状态 ' ' ' 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据 依据θ θ Θ Θ DDDD 7ryY rL I_I i—I ί_j oooooooo 0 9 9 9 OOO 0 oooo Substituting this value into the above equation, respectively, find ID 1 1 ^ ^ D (aD, YD1)

Id12=Id (α D > VD2) 1021=10 ( — aD, VDi) I D 2 2 = 1 D (— a D» Ύ D 2 ) Take the difference sum and the fraction, and provide the following equation. [Math 13] DIdi ~ 2/q $111(2(3⁄4) j^jl^ | cos ^<5*^ — + yD} j D/历=2/0sin(2〇卜泰|cos(~- 3⁄4 + 〜 = 2/0 (|~ cos2 is called rw| sin26>) Find the ratio between the difference between the intensity of the reflected light measured in the polarized states A to D and the ratio of the difference to the sum, and derive the following formula [Polarization state A] (1) Ratio of difference DI A1/DI A2=c〇s (厶SP+"V Ai) /c〇s (厶SP+7 A2) (2) Ratio of difference to sum DIA i / s IA = sin (2 α A) | RSP I cos(A Sp + T ai) / { 2 ( IR s PI 2c〇s2 aA + sin2 αΑΠ [polarized state B] (1) ratio of difference DIB1/ DIB2 = cos (ΔΡΡ - Δρ+γΒΐ) /cos (App_Asp 20 321299 201011273 (2) Ratio of difference to sum DIB1/SIB = sin(2«B) I Rpp II Rsp I C0S(App^Asp+VBi) , / ^ 2 ( IR PP I 2 cos2 〇B+ I RSP I 2 sin2 a B)} • [Polarized state C] (1) Ratio of difference DI Ci/DI C2=cos (Δ ρρ~Δρδ+γ C1) /cos ( Δ pp-APS +y c2) (2) Ratio of difference to sum 〇DId/Slc =sin(2Q:c) I Rpp II RPS I cos(APP-APS+ycl)) ^ (|RPP|2c〇s2ac+| RPS| [Polarization state D] (1) Difference ratio DI di/D ID2=cos (Aps+7di) /cos (Δρ8 + Ύι>2) (2) Ratio of difference to sum

Di/s I D =sin(2〇:D) I Rps I C0S(APS + γ D1) / { 2 ( I R P s I 2 cos 2 a; :〇 + sin 2 a D)}

In the above formula, the light intensity difference data DIai, DIa2, DIbi, DIb2, DIci, DIC2 'DID1, DID2 are known values that can be calculated from the measured reflected light intensity, and the deflection angles aa to aD of the polarized light are used by The phase difference between the polarizations given by the phase compensator or the like 7 , r , ^ 7 A1 r A2 ^ Bi' r B2' r ci ' r C2' 7d and 7d2 are also known set values. Δ In addition, due to the phase difference Δedge Δps of the three complex amplitude reflectance ratios and the magnitude of the three complex amplitude reflectance ratios 丨Rpp|, |RP]丨, ^

RPS I is an unknown number, so the values are substituted and ^ can be calculated. I In addition, as long as the normal line from the self-measuring point is raised, the side is measured 321299 21 201011273 △ sp, Δ ps and complex

The measured orientation change of the incident light of the sp R 篁 point is measured by measuring the intensity of the reflected light, that is, the change in the measured azimuth relative to the reflected light (10), the light intensity difference (4), and the light intensity and the data, and can be based on the difference in light intensity (4) The change is obtained in the direction of the alignment, and in addition, the phase difference can also be

Rsp | Measure the relative amplitude of the reflectance ratio | |, the change in the measured azimuth. In this case, 'the phase difference between the complex amplitude reflectance ratio and the size 丨Rx I can be used as the orientation direction, the tilt angle of the optical axis, the ordinary light refractive index, the extraordinary light refractive index, the alignment layer film thickness, and the alignment layer refraction. The function of the seven parameters of the rate and the film thickness of the aligning layer is expressed. Therefore, the above seven optical anisotropy parameters can be obtained by a conventionally known method of fitting (4) the brain according to the six values. . [Embodiment] The optical anisotropy parameter measuring apparatus 1 shown in Fig. 1 rotates the illuminating optical system 10 and the X-ray optical system 2G so as to be relatively rotatable about a normal line 5 rising from the aforementioned measuring point 4. The mode g is disposed or radially arranged around the normal line. The illuminating optical system 1() illuminates the light that has been polarized into a predetermined polarization state from the predetermined measurement direction to the position placed on the table 2 at a predetermined angle. a measurement point 4 on the surface (measurement target surface) 3 of the sample, and the light-receiving optical system 20 detects the light intensity of light whose polarization has been polarized into a predetermined polarization state. The optical anisotropy parameter measuring device 1 is provided. There is a computer (computing device) 30 that calculates a phase difference Δχ (χ is a polarized state) and a size of a complex amplitude reflectance ratio that becomes an optical different recording parameter based on the light intensity corresponding to the measured orientation of the incident light. |Rj. 321299 22 201011273 - In addition, an automatic collimator 6 for detecting the amount of inclination is disposed above the table 2, and the table 2 is mounted on the tilt adjustment-construction table 7, and the height adjustment table 8 And on the rotary table 9. • The light-emitting optical system 10 is provided with a light source 11 for irradiating monochromatic light, a polarizer 12 for adjusting the polarization direction, and a light-emitting side phase compensator 13 for adjusting the phase. In this example, the light source 11 is a semiconductor-excited SHG (Second Harmonic Generation) laser having a transmission wavelength of 532 nm, and the polarized light system is a Glan-Tingson (Glan-) using an extinction ratio of 10_6. In the Thompson prism, the phase compensator 13 is provided with a Babinet-Soleil compensator, and the light-receiving optical system 20 is sequentially provided with a light-receiving phase difference between the P-polarized component and the S-polarized component. The side phase compensator 21, the photodetector 22 that can adjust the polarization direction, and the photo sensor 23 that measures the light intensity of the polarized light that passes through the photodetector 22 are in this example, and the phase compensator 21 uses Barbine The Soreling Compensator 'Detector 22 uses the extinction ratio i (T6's Glan Thompson, the photo sensor 23 uses a photoelectron multiplier, and is configured to use the A/D incorporated in the computer 30 (Analog) The -to-Digital; analog-to-digital conversion converter converts the light intensity detected by the photo sensor 23 digitally and can be read. Further, in this example, a pair of illuminating optical systems 10 and a light receiving optical system The 20 series is configured to be relatively rotatable relative to the table 2 on which the sample is placed so as to continuously change the measurement azimuth of the injection angle, specifically 23 321299 201011273, to drive the table 2 horizontally In this case, the table 2 can be fixed, and the illuminating optical system 10 and the light receiving optical system 20 can be rotatably arranged. For example, the plurality of illuminating optical systems 10 and the light receiving optical system 20 can be exemplified. Further, in the case where the phase difference Δχ and the magnitude 丨Rx | of the complex amplitude reflectance ratio are measured only in a specific measurement azimuth, it is not necessary to configure the illuminating optical system 10 and the light receiving optical system 20 to The plurality of peer-to-peer measurement azimuth variable mechanisms can be rotated relative to the table 2 or radially. Next, the table is rotated, and the measurement direction of the incident light is changed while being in the following four polarization states A to D. Measurement of azimuth-light intensity data for a total of twelve types of reflected light in each of at least three polarization states: (A) for the direction of vibration relative to P-polarized light 0: a (0<< 7Γ/2) direction vibration of one pair of polarized light, the phase difference between the polarization of each of the Ρ-polarized component and the S-polarized component has been adjusted to a total of 7 A1 and 7 Α 2 When the incident light is reflected by the surface of the measurement target, the total of the four types of S-polarized light contained in each of the reflected lights is included. (B) When the P-polarized light is incident on the surface of the measurement target, the reflected light is reflected. The phase difference between the P-polarized component and the S-polarized component has been adjusted to 7" B1 and 7 B2, and the polarization of the light contained in the B1 and 7B2 is ±αΒ (0<αΒ<π/2) with respect to the vibration direction of the S-polarized light. The direction of vibration is a total of four types of polarized light. (C) For the partial polarization of the directional vibration and the S-polarized component with respect to the vibration direction of the S-polarized light at ±ac (0< 24 321299 201011273 <7Γ/2), the ρ-polarized component of each of the four is calculated. The first step is to cut the phase difference has been adjusted to r. And rc2 combination When the reflected light contains the combined A and the surface of the object to be measured is reflected, each (D) will polarize D ^ four kinds of P.

At the time of P = 4 of the reflected light, the surface reflection of the object to be measured has been adjusted to 7 Dl and the phase difference between the polarization of the formed and S polarized components is 1> the direction of the polarization of the polarized light = 2 (4) Polarization in the polarized light relative to the total of four types. The input side of the computer 30 of the direction vibration of D (〇 < α〇 < redundant/2) is connected to drive the rotation angle sensor % of the guard =, and the output side of the connection is connected to the light source 热, heat & Electric drive 30 ^ ^ 12 drive mechanism 9d of the table 9, the drive mechanism 12d of the polarizer 12, 槿13d, a drive mechanism 13d of the front side phase compensator 13d, drive mechanism of the front side phase compensator 21 2ι 22 drive mechanism 22d.乂 and plate light, adjust the polarizer 12, the light-emitting side phase compensator 13, and receive light

The side phase compensator 21 and the photodetector 22 can be in a polarized state A to D, and the light intensity is detected by the photo sensor 23 in each of the polarization states A to D, and the incident at the detection time point is input. The measured orientation of the light. In addition, in the computer 30, two measurement azimuth-light intensity difference data are calculated from two differences between the reflected light intensity data of equal phase in each polarization state according to a preset program, and from the two The ratio of the light intensity difference is calculated as the phase difference Δχ of the complex amplitude reflectance ratio corresponding to the measured direction of the incident light and the magnitude 丨Rx| ^ 321299 25 201011273 Fig. 2 and Fig. 3 show the processing performed by the computer Sequence flow chart. Wang First, step STP1 is initially set. Set three polarization states to be measured in which of the polarization states A to D, and set the deflection angle a relative to the P-polarized and S-polarized light set by the polarizer 13 in accordance with the polarization state set here. The angles set by the light-emitting side phase compensator 13 and the light-receiving side phase compensator 21 are set with ac and the deflection angles 8: 8 and 01) with respect to the s-polarized light and the p-polarized light set by the photodetector 14. difference. In this example, the polarization states A to C' are set to determine the deflection angle of the photon according to the polarizer 13 to be α Α = α B = a c = α d = 1 〇. The phase difference between the light-emitting side phase compensator 13 and the light-receiving side phase compensator 21 is set to: r ai= r bi= r ci= r di = 〇° T A2= T B2= T C2 = T D2= 90 In step STP2, 'Enter the machine until the predetermined start switch is pressed. After the switch is pressed, the light source u and the light sensor are turned ON (ON) in step STP3, and the pair is placed. The apricot anisotropy parameter was measured on the table 2 1-tick/β heart-day g sample. First, in step STP4, it is judged whether or not the polarization state a is selected, and if the polarization state A_ is performed for the process of the sequence A, the state of the light state A or at the time point when the process ends, 幻^ is shifted to the step STP5. In the step STP5, it is judged whether or not the polarized HB is selected. If the polarized state β is selected, the subroutine B is processed. When the apricot release selects the polarized state 321299 26 201011273 B == time point, the step moves to step one (four)= ::Sub =, (4) At this point, the polarized towel 'touches the transfer shape (4), if the selection is partial, then enters (4) the processing of the procedure D, when the polarized shape D is not selected or at the end of the processing, then Move to step STP8. ~ ❹

For =, the angle of the polarizer and the photodetector is p with the p-polarization direction and the MS polarization direction is 90. The angle of the polarizer 12 is set to Θ The phase difference between the polarizations given by the light-emitting side phase compensator 13 is set to p I, and the phase difference between the polarizations given by the light-receiving side phase compensator 14 is set to out'. The angle of 12 is set to ΘΑ. In step STP11 of the subroutine 所示 shown in Fig. 3(a), each of the drive mechanisms 12d, 13d, 21d, and 22d is activated to become [0, λ, (10), ΘΑ] = [0 + α Α, 0, 0 In the manner of 90, the illuminating optical system and the light receiving optical system 20 are adjusted, and in step 12, the table 2 is rotated by 360°, and the light intensity ΙΑ ιι is read at intervals of a predetermined angle. In step STP13, the light-emitting optical system 1A and the light-receiving optical system 20 are adjusted so as to become [θρ, in., .η P ^ in ^ out ' ^ a]=[〇—αΑ, 0, 0, 90]. At the step STP14, the table 2 is rotated by 36 。. —^ The light intensity ια21 is read at intervals of every predetermined angle. In step STP15, the light-emitting optical system 1A and the light-receiving optical system 20' are adjusted so as to become [θρ, λίη, λ_, 0Α] π + α Α, 90, 0, 90], and the table 2 is rotated in step STP16. 36〇. — 321299 27 201011273 The light intensity ia12 is read at intervals of every predetermined angle. In step STP17, the light-emitting optical system 10 and the light-receiving optical system 20 are adjusted so that [θρ, λίη, A〇ut, θΑ]=[〇-αΑ, 90, 〇, 90], and the operation is performed in step STP18. The stage 2 is rotated 360° - the light intensity ΙΑ 22 is read at intervals of a predetermined angle. Similarly, in step STP21 of the subroutine 所示 shown in FIG. 3(b), it is adjusted so as to become [0ρ, λίη, 入灿, 0A]=[〇, 〇, 〇' 90+ αΒ], and At step 22, the light intensity ΙΒ11 is read. In step STP23, it is adjusted so as to become [θρ, λίη, Aout, θΑ] = [〇, 〇, 0, 90 - αΒ], and the light intensity Ιβ21 is read in step STP24. In step STP25, it is adjusted so as to become [0P,; lin, café, 0 Α] = [0, Q'9 〇, 90 + α Β], and the light intensity Ι β12 is read in step STP26. In step STP27, it is adjusted so as to become [θρ, λίη, A〇ut, θ Α] = [〇, 90 '〇, 9〇 - α Β] and the light intensity ΙΒ 22 is read in step STP28. In step STP31 of the subroutine C shown in Fig. 3(c),

It becomes [θρ, in, in (10), 0a]=[9O+q:c, 〇, O, 〇]2*S adjustment' and the light intensity IC11 is read in step 22. In step STP23, it is adjusted so as to become [θρ,; lin, again (10), θα] = [90 ~ ac, 0, 0, 0], and the light intensity is 1.21 in step STP23. In step STP25, it becomes [0P, Ain, λ. / Θα]=[90 321299 28 201011273 + a c, 90, 〇, 0] The mode is adjusted, and the light intensity is read in step STp26 by 1.12. In step STP27, it is adjusted so as to become [θρ, λίη, A〇ut, 0a]^[9〇—, 90, 0, 〇], and the light intensity is read in step STp28. 22 〇 in Fig. 3 (d) In the step STp41 of the subroutine D shown, 调整 becomes [0 p, λ in, λ om, 0 A] = [〇, 〇, 〇, 9〇 + ab] and is adjusted in steps 42 read in the light intensity Idu. In step STP43, it is adjusted so as to become [θρ, λίη, λ < θ Α > [() - α Β, 0, 〇, 90], and the light intensity Id21 0 is read in step STp44 in step STP45 to become [ Θρ, in, Aout, 0A, [〇+αΒ, 9〇, 〇, 90] are adjusted, and the light intensity ID12 is read in step STP46. In step STP47, the method is changed to [m, ~Bu [〇 © - αΒ, 90, 〇, 9〇], and the illuminance ID 22 is read in step STp48. When the measurement by each of the sub-programs A to D is completed, the process proceeds to step STP8', and the phase difference Δ of the complex amplitude reflectance ratio and the magnitude | rx | are calculated based on the measurement results. x In step STP8, 'the light intensity measured according to each of the polarization states a to D, and the difference between the reflected light intensity data of the phase with respect to each polarization state are two measurement directions - the light intensity difference data And the sum of the reflected light intensity data of equal phase is calculated as the measured azimuth-light intensity and data to 321299 29 201011273. Fig. 4 (a) to (c) show the difference in reflected light intensity in the polarized state A diai = IAh - IA21, reflected light intensity difference DIA2 = IAI2 - IA22, and reflected light intensity and SIA = IA11 + IA21. Fig. 5 (a) to (c) are the reflected light intensity difference DIB1 = Imi-iB21 in the polarized state B, the reflected light intensity difference 〇ΐΒ2 = ιΒ12 - ΙΒ22, and the measured results of the reflected light intensity and SIB = IB11 + IB2i . Fig. 6 (a) to (c) are the reflected light intensity difference DIC1 = IC11 - iC21 in the polarized state c, the reflected light intensity difference mc2 == Ici2 - Ic22, and the reflected light intensity and Sic == ICi 1 + Ic2i Measurement results. Fig. 7 (a) to (c) are the reflected light intensity difference in the polarized state ddid1 = id11 - iD21, reflected light intensity difference 〇1 〇 2 = 1 body - 1 〇 22, and reflected light intensity and sid = Idu + Id21 measurement results. Next, in step STP9, the ratio of the two light intensity difference nurturing is calculated for each polarization state, and the ratio of one of the light intensity difference data to the light intensity and the data is calculated. Then, in step STP10, the phase differences Δρρ, ^ and the sizes I RPP I, I Rsp 丨, I Rps | of the complex amplitude reflectance ratio are calculated. At this time, the logical expression indicating the ratio of the light intensity difference data and the ratio of the ratio of the squareness to the money and the data indicating the light intensity difference data are rewritten from the parameters set in the step STP1 to the following equation. [Polarized state A] (1) Ratio of difference DI a 1 / DIA 2 s = cot (厶sp) 321299 30 201011273 (2) Ratio of difference to sum D 】a 1 / SIA = c〇s ( Δ sp) / {tanlO/IR sp I + IR sp I Wei) Since DIA1, DIa2, and SIa can calculate the known values from the measured values, Asp and I Rsp丨 are calculated from the equation. [Polarization state B] (1) Ratio of difference DIB1/DlB2=c〇t (Δρρ-Δ8Ρ) Reference ❹ (2) Ratio of difference to sum

D 1 / S I B = cos (Δρρ - Δ SP) / { I R s P I tanlO / lRppl + lRp. ! / p 1 /-tanl〇} Since DIB1, Dim, and SIB are known values that can be calculated from the measured values, and Δπ and 丨Rsp I are known from the measurement results of the polarization state A, from this equation Calculate Δρρ and |Rpp|. [Polarized state C] (1) Ratio of difference D Ϊ c X ΧΌ 1 c 2 = cot (Δρρ - ΔΡδ) (2) Ratio of difference to sum

D I C1/S I

Cos (Δρρ-Δ pg) / { \ R sp I tanlO / IR pp I + I p I /t anl〇} Since DIC1, Die2, SIC can calculate the value from the measured value 'and Δ pp and 丨Rpp I Based on the measurement result of the polarization state B, Δ ps and 丨Rps | are calculated from the equation. [Polarization state D] (1) The ratio of the difference is known. 321299 31 201011273 co-j. ( Δ ps) (2 ) The ratio of difference to sum DI D1/SID = c〇s (Aps) / {tanl〇/ t Rps , + j Rpg (Since Dim, Dim, and SId can calculate the known values from the measured values, the Aps and 丨丨 are calculated from the equation. Thus, from the polarized states A to D, the correlation is The three phase differences Δρρ of the complex amplitude reflectance ratio and the logical expression of the ratio of the light intensity difference data of the four types of hinges as the unknown number are established. Therefore, the phase difference can be calculated using three of them. It is only necessary to measure the intensity of the reflected light for the two polarized states. In addition, similarly, from the polarized state of eight to D, the correlation will be related to the complex amplitude, three sizes, 1 Rpp, 1 Rsp, IRpsi, and the total of the unknowns. The logical formula of the ratio of the light intensity difference data is established, so that the phase difference can be calculated using three of them, and Δps' is to measure the reflected light for only three kinds of polarization states; Fig. 8(a) s ( c) indicates the calculated complex amplitude reflectance ratio, the target position difference Δρρ, The graph '⑷ to Figure 9 ⑷ system, not the size of f r calculated complex amplitude reflectance ratio ^, Shu%), ^ R ps I of the graph. : Δρρ, "and size | R ^, 丨 ^ azimuth orientation, tilt angle of the optical axis, ordinary light refraction. Rate, layer thickness of the alignment layer, refractive index of the alignment layer, and film thickness of the unaligned layer. The parameters come to (4), so B can obtain the above seven kinds of optics according to the conventionally known methods of calculating the complex amplitude reflectance ratio A of 321299 32 201011273 in this way. The anisotropy parameter. , based on the phase difference and size of the complex amplitude reflectance measured by using the liquid crystal alignment film as a sample, using the 4x4 matrix of Berreman, the result of the above parameters is obtained by fitting. The orientation is 90.3°, the tilt angle of the optical axis is 24.6°, the refractive index of ordinary light is 1.76, the refractive index of the extraordinary light is 1.79, the film thickness of the alignment layer is 6. Onm, the refractive index of the alignment layer is 1.77, and the film thickness of the alignment layer is It is a measurement result of ❹ 94 94 94 94 94 94 94 94 94 94 94 94 94 94 94 94 94 94 94 94 94 94 94 94 94 94 94 94 94 94 94 94 94 94 94 94 94 94 94 94 94 94 94 94 94 94 94 94 Times, ie In this way, the total measurement time is about 20 seconds to 30 seconds, and compared with the measurement performed by the general ellipsometry, the measurement can be performed in a very short time of 1/10 time, and can be applied to the product inspection of the factory production line. In addition, although the phase compensator 12 and the photo-receiving phase compensator 12 and the photo-receiving side are described using a Babione-Sorre compensator, the present invention is not limited thereto, and may be used to make a light path. A phase compensator for a phase plate having a fixed phase difference is disposed in a forward-rearward manner. (Industrial Applicability) The present invention is applicable to quality inspection of a product having optical anisotropy, and is particularly suitable for a liquid crystal alignment film. Fig. 1 is an explanatory view showing an example of the optical anisotropy parameter measuring device of the present invention. 33 321299 201011273 Fig. 2 is a flow chart showing the processing procedure of the main program of the arithmetic unit. Fig. 3 (4) to (4) show the flow chart of the Hu Cheng phase processing sequence. Fig. 4 (a) to (c) show the light intensity difference data and the light intensity and data in the polarized state A. Fig. 5 (a) to (c) show the light intensity difference data and the light intensity and data in the polarized state b.

Fig. 6 (a) to (c) are graphs showing light intensity difference data and light intensity and data in the polarization state c. Fig. 7 (a) to (C) show the light intensity difference data and the light intensity and data in the polarized state D. Fig. 8 (a) to (4) are graphs showing the phase difference of the calculated complex amplitude reflectance ratio. Fig. 9 (a) and (c) are graphs showing the calculated magnitude of the complex amplitude reflectance ratio. [Description of main component symbols] 〇1 Optical anisotropy parameter measuring device 2 Table 3 Surface of the sample (measurement object surface) 4 Measuring point 5 Normal line 6 Automatic collimator 7 Inclination adjustment table 8 Height adjustment table 321299 201011273 9 Rotary table 9s Rotation angle sensor 9d, 12d, 13d, 21d, 22d 10 Illumination optical system 11 Light source 12 Polarizer 13 Light-emitting side phase compensator 20 Light-receiving optical system 21 Light-receiving side phase compensator 22 Photodetector 23 Light perception Detector 30 computer (computing device) drive mechanism 35 321299

Claims (1)

201011273 VII. Patent application scope: 1. - The optical anisotropy parameter measurement method is to irradiate the incident light from a predetermined measurement azimuth to a measurement point on the measurement object surface at a certain angle of incidence, according to the measurement of the reflected light. a method of measuring a light intensity data obtained by a light intensity of a polarization component in a specific direction, and measuring a phase difference 复 of a complex amplitude reflectance t匕 of the optical anisotropy parameter is a polarization state; in the method, the aforementioned injection When the light is polarized and the polarized light is incident on the measurement point and measured in a predetermined measurement orientation, the measurement target surface is used as a reference, and the line vibrating in the plane perpendicular to the measurement target surface Polarized as? When the polarized light' is linearly polarized in the direction of the positive direction of the P-polarized light as the s-polarized light, the four kinds of the total of the twelve kinds of reflected light are measured in accordance with at least three of the four polarization states of the following A to D. The obtained light intensity data is calculated according to a preset program to calculate two light intensity difference data from two differences between the reflected light intensity data of the phase differences obtained by the polarization directions given to each polarization state, except for the data. Two light intensity difference data, thereby calculating a phase difference Δχ of the rehearsal reflectance ratio of the measured orientation of the 射 incident light; the four polarization states of the A to D are: (A) for the polarized light relative to p The vibration direction is vibrated in the direction of ±αΑ(〇&lt;αΑ&lt; ΤΓ/2)—for the polarized light, the phase difference between the ρ-polarized component and the S-polarized component of the S-polarized component has been adjusted to the total of ^ and rA2. When polarized light is incident on the surface of the measurement target and is reflected by the surface of the measurement target, the total of the four types of s-polarized light contained in each of the reflected lights; (B) The 1&gt; polarized light is used as the incident light and the surface of the object to be measured is reversed 321299 36 201011273 When shooting, 'will reflect the light p The phase difference between the polarization of the polarized component and the s-polarized component has been adjusted to be ± 〇 with respect to the vibration direction of the S-polarized light in the polarized light of the two types of 7B1 and 7 B2; b ( 0&lt; α Β &lt; 7Γ /2) The total of the directional vibrations of the four kinds of polarized light; (C) for the direction of vibration relative to the S-polarized light in the direction of ±ac; (〇 &lt; α c &lt; 7T/2), one pair of polarized light, each of which is polarized When the phase difference between the polarization of the component and the S-polarized component is adjusted to be four kinds of polarized light of 7 ci and r c2 as the incident light and reflected by the surface of the measurement target, the total of four kinds of p-polarized light contained in each reflected light (D) When the S-polarized light is incident on the surface of the object to be measured, the phase difference between the P-polarized component of the reflected light and the polarized component of the s-polarized component has been adjusted to two types, T D1 and 7〇2. The polarized light contained in the light has four types of polarized light in the direction of vibration of the P-polarized light in the direction of ±aD (0&lt;aD&lt;7γ/2). 2. A method for measuring an optical anisotropy parameter, which irradiates incident light from a predetermined measurement azimuth to a measurement point on a surface of a measurement object at a certain incident angle, and measures a polarization component of a specific direction contained in the reflected light. The light intensity data obtained by the light intensity is measured as a method of the phase hx (x is a polarization state) of the complex amplitude reflectance ratio of the optical anisotropy parameter; in the S method, the measurement target surface is used as a reference, and the measurement object is The linear polarized light of the in-plane vibration of the positive surface = as the P-polarized light, when the linear polarized light vibrating in the direction intersecting the P-polarized light f is 4 S polarized light, the above-mentioned measurement is made according to the normal line of the self-measuring point; Azimuth change, at least three of the four polarization states of A to D below: 321299 37 201011273 Amounts of four kinds of total reflections of twelve kinds of reflected light - Light intensity > Material 'Follow the preset a program for calculating two measured azimuth-light intensity differences data for each polarization state from the difference between the reflected light intensity data of the phase differences between the given polarizations. Two light intensity differences: the ratio of the shell material calculates the phase difference Δχ of the reverberation field reflectance ratio corresponding to the measured orientation of the incident light; the four polarization states of the A to D are: (A) The vibration direction of the p-polarized light is one of the pairwise polarizations in the direction of the soil (〇&lt;αΑ&lt;7Γ/2), and the phase difference between the polarization of the ρ-polarized ❹ component and the S-polarized component of each is adjusted to be the total of Τα2 When the polarized light is incident on the surface of the measurement target and is reflected by the surface of the measurement target, the total of the four types of s-polarized light contained in each of the reflected lights; (B) when the p-polarized light is incident on the surface of the measurement target, The phase difference between the P-polarized component of the reflected light and the polarized component of the s-polarized component has been adjusted to be ±αΒ (〇&lt;αβ&lt;&gt; with respect to the vibrational direction of the S-polarized light among the biasing forces of the two kinds of light of Tbi and &amp;疋/2) The total direction of vibration of the 〇 is four kinds of polarized light; (C) One pair of polarized light is vibrated in the direction of ±ac (0&lt; α π/2) with respect to the vibration direction of S-polarized light, and ρ of each The phase difference between the polarization of the polarized component and the S-polarized component has been adjusted to the total of four When the polarized light is incident on the surface of the object to be measured and reflected by the surface of the object to be measured, the total of the four kinds of p-polarized light contained in each of the reflected lights; (D) When the S-polarized light is incident on the surface of the object to be measured, The P-polarized component of the reflected light and the polarized phase of the s-polarized component 38 321299 201011273 The difference between the polarized light contained in the light of tdi and rD2 is adjusted to ±α〇(〇&lt; The a directional vibration of aD&lt;苁/2) is a total of four types of polarized light. 3. An optical anisotropy parameter measuring device, comprising: an illuminating optical system </ RTI> illuminating a light that is polarized into a predetermined polarization state from a predetermined measuring azimuth to a measuring point on a measuring object surface at a certain incident angle; ❹ the light-receiving optical system' detects the light intensity of the light whose polarization is polarized into a predetermined polarization state; and the arithmetic means calculates the complex amplitude reflectance ratio which becomes the optical anisotropy parameter based on the measured light intensity a phase difference Δχ (χ is a polarization state). In the optical anisotropy parameter measuring device, a polarizer for adjusting a polarization direction and an adjustable phase illuminating light for illuminating a monochromatic light source are sequentially disposed in the illuminating optical system. Side phase compensator; ^ The light-receiving optical system is sequentially provided with a compensated phase of the adjustable phase, a photodetector capable of adjusting the polarization direction, and a photosensor for measuring the light intensity of the polarizer after the child The in-plane reference 'will be the first to be the ρ-polarized light in the line perpendicular to the vibration of the surface to be measured, and the direction orthogonal thereto will be in the above-mentioned operation device according to the following direction. The light intensity measured by at least three kinds of polarized n-twelve kinds of reflected light in each of the four polarization states of each of the four types is 321299 39 201011273, according to the advance a predetermined program for calculating two light intensity difference data from two differences between the reflected light intensity data of the phase differences obtained by the polarization states of the respective polarization states, from the two light intensity difference data The phase difference Δχ of the complex amplitude reflectance ratio of the measured azimuth of the incident light is calculated; the four polarization states of the A to D are: (A) for the direction of vibration relative to the P-polarized light, “A” (〇&lt;; Α Α ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; When the object to be measured is reflected by the surface of the measurement, the total of the four types of s-polarized light contained in each of the reflection handles is used. (B) When the p-polarized light is used as the incident light and is reflected by the surface of the measurement target, the P-polarized component of the reflected light is The phase difference between the polarizations of the S-polarized component has been adjusted to be a total of four types of polarized light in the direction of the vibration of the S-polarized light in the polarized light contained in the light of the two types of light and the light of the S-polarized light; ) for the vibration direction relative to the S-polarized light at ±ae(G&lt; α c&lt; π/2) One of the directional vibrations is polarized, and the phase difference f between the ρ-polarized component and the S-polarized component of each of the directional polarizations is adjusted to be a total of four types of polarized light as the incident light and reflected by the surface of the measuring object. The total of four kinds of p-polarized light contained in the reflected light; (D) When the S-polarized light is incident on the surface of the measurement target, the phase between the P-polarized component of the reflected light and the s-polarized component is adjusted. The polarized light contained in the light of the two types of r Di and 7 〇 2 is a total of four types of polarized light vibrating in the direction of ±aD (〇&lt;aD&lt;疋/2) 321299 40 201011273 with respect to the vibration direction of the P-polarized light. An optical anisotropy parameter measuring device comprising: an illuminating optical system that measures light polarized into a predetermined polarization state from a predetermined measurement angle to a measurement point on a measurement target surface at a certain incident angle; and a light receiving optical system Is detecting the light intensity of light that has polarized its reflected light into a predetermined polarization state; 发光 the light-emitting optical system and the light-receiving optical system are arranged to be rotatable relative to a normal line rising from the measurement point or radially around the normal line; and the arithmetic device is provided Calculating a phase difference Δχ (χ is a polarization state) which is a complex amplitude reflectance ratio of the optical anisotropy parameter according to the light intensity corresponding to the measured orientation of the incident light; in the optical anisotropy parameter measuring device, The illuminating optical system sequentially sets a light source for illuminating the monochromatic light, a polarizer capable of adjusting the pre-direction, and an illuminating side phase compensator for adjusting the phase; the illuminating optical system is sequentially provided with the adjustable phase a. Compensator, ·# A penetrating well is sold early from the photodetector that corrects the direction of the polarized light, and the light sensor that measures the light intensity of the polarized light; the surface of the object is the reference, and will be The measurement object surface is orthogonal to the vertical of the vibration: ΐ::: as the p-polarized light will be orthogonalized to the other, and the four polarization states of the measurement orientation will be reduced to D according to the side when the s-polarized light is considered. At least three types of 321299 41 201011273 ^ The four states of the light state are measured by a total of twelve kinds of reflected light and the volume direction is obtained - the light intensity data 'in the aforementioned arithmetic device follows the pre-sighing program' Calculating two measurements = position light intensity difference = shell material by giving two differences between the reflected light intensity data of the phase difference between the polarized lights, and calculating the ratio of the two light intensity difference data The phase difference Δχ of the complex amplitude reflectance ratio corresponding to the measured orientation; the four polarization states of the person to the 为 are: (Α) for the direction of the vibration relative to the Ρ polarized light (〇&lt;αΑ&lt; ΤΓ/2) One of the vibrations is polarized, and the phase difference between the ρ-polarized component and the S-polarized component of the S-polarized component has been adjusted to a total of four kinds of polarized light of T and Tm as the incident light and reflected by the measuring object surface. The total of four types of polarized light contained in the reflected light; (B) The P-polarized light is used as the incident light and the surface of the object to be measured is reflected. The phase difference between the P-polarized component of the reflected light and the polarized component of the s-polarized component has been adjusted. For 7βι and ^ The polarized light contained in the light has a total of four types of polarized light in a direction of ±αΒ(〇&lt;αΒ&lt;;Γ//2) with respect to the vibration direction of the S-polarized light; (C) For the vibration with respect to the s-polarized light The direction is one of the pair of polarizations in the direction of the soil ac (〇 &lt; α c &lt; ττ /2), and the phase difference between the polarization of the ρ polarization component and the S polarization component of each of the elements is adjusted to rci and the total of four polarizations When the light is incident on the surface to be measured and reflected by the surface of the measurement target, the total of four types of P-polarized light contained in each of the reflected lights; (D) When the S-polarized light is incident on the surface of the measurement target, the reflected light is reflected. The polarization between the P-polarized component and the S-polarized component is 321299 42 201011273 - The difference has been adjusted to the polarization of the light of the two types of TD2, which is relative to the 1&quot;polarized vibration direction of the soil "D (0&lt;aD&lt;;;r/:2) ^ The total amount of polarized light in the direction of vibration. .5. The optical anisotropy parameter measuring method according to claim 1, wherein the light intensity data measured for the total of twelve kinds of reflected light of each of the four kinds of polarization states is set according to a preset The program calculates the sum of the anti-projection light intensity data of the phase difference between the polarizations given by the respective polarization states as the light intensity and the data, and calculates the ratio of the light intensity difference data to the light intensity and the data. The magnitude of the complex amplitude reflectance ratio of the measured azimuth of the incident light | | (X is a polarized state). 6. The optical anisotropy parameter measuring method according to item 2 of the claim patent scope, wherein 'measured azimuth-light intensity data measured according to the total of twelve kinds of reflected light of each of the four kinds of polarized states, According to a preset program, the sum of the reflected light intensity data with the phase difference between the polarized lights given by the polarization states is calculated as the measured azimuth-light intensity and the data, and the light intensity difference data is combined with the light and the light. The ratio of the intensity to the shell material calculates the magnitude 丨Rx| of the complex amplitude reflectance ratio corresponding to the measured orientation of the incident light (χ is the polarized state). 7. The optical anisotropy parameter measuring device according to claim 3, wherein the arithmetic device wipes the (four) degree data measured by a total of twelve kinds of reflected light for each of the three kinds of polarization states. According to the preset program, the sum of the reflected light intensity data with the phase difference between the polarizations of the respective offsets is calculated as the light intensity and the data are calculated as 321299 43 201011273, and one of the light intensity difference data and the light intensity are calculated. The ratio of the data to the ratio of the complex amplitude reflectance of the measured direction of the incident light | Rx | (X is the polarized state). 8. The optical anisotropy parameter measuring device according to claim 4, wherein 'in the aforementioned arithmetic device, the measured azimuth measured according to the total of twelve kinds of reflected light of each of the four kinds of polarization states - The intensity data is calculated according to a preset program, and the sum of the reflected light intensity data of the phase difference obtained by the polarization between the polarization states is calculated as the measured azimuth light intensity and the data, and the light intensity difference data is calculated from one side of the light intensity difference data. The ratio of the ratio of the light intensity to the data is calculated as the magnitude of the complex amplitude reflectance ratio corresponding to the measured orientation of the incident light. (χ is the polarization state) 〇321299 44