TWI465791B - Method and system for repairing flat panel module - Google Patents

Method and system for repairing flat panel module Download PDF

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TWI465791B
TWI465791B TW099141681A TW99141681A TWI465791B TW I465791 B TWI465791 B TW I465791B TW 099141681 A TW099141681 A TW 099141681A TW 99141681 A TW99141681 A TW 99141681A TW I465791 B TWI465791 B TW I465791B
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display module
flat display
femtosecond laser
polarizing plate
repairing
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TW099141681A
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TW201224580A (en
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Cen Ying Lin
Chih Wei Chien
Wei Chih Shen
Chung Wei Cheng
Chuan Kai Wang
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Ind Tech Res Inst
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Description

平面顯示模組之修補方法與系統Patching module repair method and system

本發明係為修補技術,尤其是對於顯示模組製程中液晶組立製程(cell)段之修面板補方法與系統。The invention is a repairing technology, in particular, a repairing panel repairing method and system for a liquid crystal grouping process (cell) segment in a display module process.

液晶顯示器為非主動發光元件,其色彩之顯示必須透過背光模組提供光源,搭配驅動電路與液晶控制形成灰階之亮度顯示,並透過濾光片的紅色(R)、綠色(G)以及藍色(B)色層給予每一個畫素特定顏色,不同顏色的畫素即形成彩色畫面。面板若存在瑕疵,將造成顯示器中該像素無法正確顯示所需色彩,而形成亮點或是暗點,尤以亮點對顯示器使用者而言特別明顯,因此亮點數亦為面板等級評定要素之一。如圖一所示,該圖係為液晶顯示模組示意圖,在液晶顯示模組10的上下兩面貼附有一偏光板11與12,在習用技術中,由於偏光板11與12內層或黏著層之異物,於通電測試時畫面會產生嚴重漏光,因此會讓液晶顯示模組與背光模組結合後,所形成的液晶顯示器產生亮點的缺陷13。在修補偏光板11與12所產生的亮點缺線時多用準分子雷射加工,不過這樣的加工方式熱影響區大,導致顯示器周圍區域以及偏光板表面受損。The liquid crystal display is a non-active light-emitting component, and the color display must provide a light source through the backlight module, and the driving circuit and the liquid crystal control form a gray scale brightness display, and the red (R), green (G) and blue of the filter light are transmitted through the filter. The color (B) color layer gives each pixel a specific color, and the pixels of different colors form a color picture. If there is a flaw in the panel, the pixel in the display will not display the desired color correctly, and a bright spot or a dark dot will be formed. Especially the bright spot is particularly obvious for the display user, so the number of bright spots is also one of the panel rating elements. As shown in FIG. 1 , the figure is a schematic diagram of a liquid crystal display module. A polarizing plate 11 and 12 are attached to upper and lower sides of the liquid crystal display module 10 . In the conventional technology, the inner layer or the adhesive layer of the polarizing plates 11 and 12 is used. The foreign matter will cause serious light leakage during the power-on test, so that the liquid crystal display module and the backlight module are combined, and the formed liquid crystal display generates a defect of the bright spot 13 . Excimer laser processing is often used when repairing the bright spots caused by the polarizing plates 11 and 12. However, such a processing method has a large heat-affected area, resulting in damage to the area around the display and the surface of the polarizing plate.

在習用的修補技術中,例如:中華民國公開號200827819所提出的液晶顯示面板之修復方法,其係利用第一道奈秒雷射使濾光片產生間隙裂縫,第二道飛秒雷射(450nm、10MHz以上)或二極體雷射(Diode Laser),透過線性吸收使已有間隙的濾光片產生物理性質變化,以降低亮點透光性。此外,又如中華民國公開號200829977與200887821揭露一種液晶顯示面板之修復方法與裝置,其係使用450nm飛秒雷射,利用RGB線性吸收區間進行修復,需由液晶顯示器之電晶體面加工,若從彩色濾光面進行修復,則易破壞偏光膜。In the conventional repairing technique, for example, the method for repairing a liquid crystal display panel proposed by the Republic of China Publication No. 200827819 uses a first nanosecond laser to cause a gap crack in the filter, and a second femtosecond laser ( 450 nm, 10 MHz or more) or Diode Laser, through the linear absorption, the filter of the existing gap is changed in physical properties to reduce the light transmittance of the bright spot. In addition, as disclosed in the Republic of China Publication No. 200829977 and 200887821, a method and a device for repairing a liquid crystal display panel are disclosed, which use a 450 nm femtosecond laser to repair using a linear absorption interval of RGB, which is processed by a crystal face of a liquid crystal display. Repairing from the color filter surface can easily damage the polarizing film.

另外又如WO 2008-156286揭露一種修補方法,其係透過雷射照射,使光阻材料和玻璃之間形成間隙(gap),再透過雷射配合掃描將周圍黑色矩陣(black matrix)融化帶至gap中,使有亮點的光阻區域形成黑化。(非直接黑化光阻)。又如美國專利US.Pat.No. 7,502,094也揭露一種修補方法,其係透過雷射(Nd:YAG laser 380~740nm,<55Hz)以光罩之方式照射,使濾光片面向基材面產生黑化(使光源所產生的光線無法通過濾光片),因照射過程中產生擴散區,因此需以三組大小不同之光罩進行加工,修補亮點。此外,又如美國專利US.Pat.No. 7,636,148則揭露一種修復液晶顯示器的方法與系統,其係揭露三種修復方式,第一種為在面板下上的玻璃基材上鍍上一層修復膜,將有亮點的位置利用雷射(YAG、excimer、diode laser)加工修復膜。第二種在黑色矩陣加工。第三種在支撐物(pattern spacer)加工將融化的支撐物覆蓋到有亮點的彩色光阻上。而美國專利US.Pat.No.7,126,232,亦是屬於將修復膜(repair film)轉移至缺陷位置的一種修補機制。In addition, as disclosed in WO 2008-156286, a repair method is disclosed in which a gap is formed between the photoresist material and the glass by laser irradiation, and the surrounding black matrix is melted by laser scanning. In the gap, the photoresist region having a bright spot is blackened. (not directly blackening the photoresist). A repairing method is also disclosed in U.S. Patent No. 7,502,094, which is irradiated by a laser (Nd:YAG laser 380-740 nm, <55 Hz) in a reticle to cause the filter to face the substrate surface. Blackening (so that the light generated by the light source cannot pass through the filter), due to the diffusion zone generated during the irradiation process, it is necessary to process the three sets of different sizes of masks to repair the bright spots. In addition, a method and system for repairing a liquid crystal display is disclosed in US Pat. No. 7,636,148, which discloses three repair methods. The first one is to apply a repair film on the glass substrate under the panel. The repair film is processed by a laser (YAG, excimer, diode laser) at a position where there is a bright spot. The second is processed in black matrix. A third type of pattern spacer process covers the melted support onto a colored photoresist with bright spots. U.S. Patent No. 7,126,232 is also a repair mechanism for transferring a repair film to a defect location.

另外,又如美國專利US.Pat.No.5,926,246或US.Pub.No.2006050623也揭露一種修復方法,其係利用雷射加工在液晶面板裡的配向膜,利用偏光膜旋轉方向來檢測亮點區,進行雷射加工配向膜。而中華民國新型專利M381804,則提供一種含有濾光片之顯示器之修補裝置,係包含至少一雷射源、至少二反射鏡組、至少二鏡頭與至少一鏡組控制單元,其可選擇性輸出不同波長之雷射光以黑化濾光片上不同顏色之色點,而完成亮點修補。In addition, as disclosed in US Pat. No. 5,926,246 or US Pat. No. 2006050623, a repairing method is also disclosed which utilizes an alignment film processed by a laser in a liquid crystal panel to detect a bright spot region by using a rotating direction of the polarizing film. , laser processing alignment film. The Republic of China new patent M381804 provides a repair device for a display containing a filter, comprising at least one laser source, at least two mirror groups, at least two lenses and at least one lens group control unit, which are selectively outputtable The laser light of different wavelengths is used to blacken the color points of different colors on the filter to complete the bright spot repair.

本發明提供平面顯示模組之修補方法與系統,其係利用飛秒雷射聚焦至對應到有瑕疵的偏光板上,而對偏光板進行改質加工,由於飛秒雷射可讓被加工之偏光板產生多光子非線性吸收;有熱影響區小以及控制加工深度的特點,因此可以直接修補具有瑕疵的顯示模組,而不會損傷顯示模組內其他區域的結構。The invention provides a method and a system for repairing a flat display module, which utilizes a femtosecond laser to focus on a polarizing plate corresponding to a flaw, and performs a modification process on the polarizing plate, because the femtosecond laser can be processed. The polarizer produces multiphoton nonlinear absorption; it has the characteristics of small heat affected zone and controlled processing depth, so it can directly repair the display module with defects without damaging the structure of other areas in the display module.

本發明提供平面顯示模組之修補方法與系統,其係使飛秒雷射光透過偏光板上方之表層,聚焦於偏光板上對應亮點瑕疵之位置,使偏光板內層進行改質黑化,使原來所形成面板上之亮點變成暗點,並且不會對其他區域造成傷害,提高顯示器產品的品質與等級。The invention provides a method and a system for repairing a flat display module, which is configured to enable femtosecond laser light to pass through a surface layer above a polarizing plate, and focus on a position corresponding to a bright spot on the polarizing plate, so that the inner layer of the polarizing plate is modified and blackened. The bright spots on the original formed panel become dark spots, and will not cause damage to other areas, improving the quality and grade of the display products.

本發明提供平面顯示模組之修補方法與系統,其係可以在液晶顯示模組生產過程中之液晶組立製程(cell)段製程時,即對具有亮點缺陷的顯示模組進行修復,以提升液晶顯示器之製程的良率與生產效率。The invention provides a method and a system for repairing a flat display module, which can repair a display module with a bright spot defect during the liquid crystal group manufacturing process in the production process of the liquid crystal display module to improve the liquid crystal The yield and productivity of the display process.

在一實施例中,本發明提供一種平面顯示模組修補方法,其係包括有下列步驟:提供一平面顯示模組,其表面貼附有一偏光板,該平面顯示模組具有至少一亮點;以及提供一飛秒雷射聚焦照射於對應該亮點之該偏光板上,使對應該亮點之該偏光板產生非線性多光子吸收而形成一改質區域,進而將該亮點轉換成暗點。In one embodiment, the present invention provides a method for repairing a flat display module, comprising the steps of: providing a flat display module having a polarizing plate attached to a surface thereof, the flat display module having at least one bright point; A femtosecond laser is provided to focus on the polarizing plate corresponding to the bright spot, so that the polarizing plate corresponding to the bright spot generates nonlinear multiphoton absorption to form a modified region, thereby converting the bright spot into a dark spot.

在另一實施例中,本發明提供一種平面顯示模組修補系統,其係包括有:一移動平台,其係用以承載具有一亮點缺陷之一平面顯示模組;以及一飛秒雷射源,其係提供一飛秒雷射,以聚焦照射於對應該亮點之該平面顯示模組上,使該平面顯示模組產生非線性多光子吸收而改質,進而將該亮點轉換成暗點。In another embodiment, the present invention provides a flat display module repairing system, comprising: a mobile platform for carrying a flat display module having a bright spot defect; and a femtosecond laser source The system provides a femtosecond laser to focus on the planar display module corresponding to the corresponding bright spot, so that the planar display module generates nonlinear multiphoton absorption and is modified, thereby converting the bright spot into a dark spot.

為使 貴審查委員能對本發明之特徵、目的及功能有更進一步的認知與瞭解,下文特將本發明之裝置的相關細部結構以及設計的理念原由進行說明,以使得 審查委員可以了解本發明之特點,詳細說明陳述如下:請參閱圖二所示,該圖係為本發明之平面顯示模組修補方法實施例流程示意圖。該修補方法2首先以步驟20提供一平面顯示模組。如圖三所示,該圖係為平面顯示模組剖面示意圖。本實施例中,該平面顯示模組3係為液晶平面顯示模組,但不以此為限,只要是需要貼附偏光板之顯示器都可以利用本實施例之方法予以修補。本實施例中之顯示模組係為在液晶組立製程(cell)段時所形成之具有偏光板之液晶顯示模組。In order to enable the reviewing committee to have a further understanding and understanding of the features, objects and functions of the present invention, the related detailed structure of the device of the present invention and the concept of the design are explained below so that the reviewing committee can understand the present invention. The detailed description is as follows: Please refer to FIG. 2, which is a schematic flowchart of an embodiment of a method for repairing a flat display module of the present invention. The repair method 2 first provides a flat display module in step 20. As shown in FIG. 3, the figure is a schematic cross-sectional view of a planar display module. In this embodiment, the flat display module 3 is a liquid crystal flat display module, but not limited thereto, as long as the display that needs to be attached with the polarizing plate can be repaired by the method of the embodiment. The display module in this embodiment is a liquid crystal display module having a polarizing plate formed in a liquid crystal group process segment.

該平面顯示模組3具有一液晶層單元30,其係具有上基板31與下基板32,其係可以為玻璃或者是塑膠等透光材質。上基板31與下基板32間填充有液晶301,在上基板31與該液晶301間具有一濾光層34。在本實施例中,該濾光層34為彩色濾光層。該上基板31之表面310係為該平面顯示模組3之顯示面,在該下基板32之底面320係為該平面顯示模組3之受光面,其係可以接收背光源所發出之光場。該下基板32上有一薄膜電晶體層300,其上具有液晶301,其內具有支撐物302(spacer)。在本實施例中該平面顯示模組3之上基板31之表面310與下基板32之底面320分別設置有一偏光板4與5。該平面顯示模組3存在瑕疵94,本實施例中的瑕疵94係為亮點的缺陷。所謂的亮點缺陷,可能由偏光板4或6內層或黏著層之異物,於通電測試時產生嚴重漏光的瑕疵,或者是由濾光層34、液晶30或者是電路缺陷所造成的。圖示中的瑕疵94係指由偏光板4或5內層或黏著層之異物,於通電測試時產生嚴重漏光的瑕疵。The flat display module 3 has a liquid crystal layer unit 30 having an upper substrate 31 and a lower substrate 32, which may be made of glass or plastic. A liquid crystal 301 is filled between the upper substrate 31 and the lower substrate 32, and a filter layer 34 is provided between the upper substrate 31 and the liquid crystal 301. In this embodiment, the filter layer 34 is a color filter layer. The surface 310 of the upper substrate 31 is the display surface of the flat display module 3, and the bottom surface 320 of the lower substrate 32 is the light receiving surface of the flat display module 3, which can receive the light field emitted by the backlight. . The lower substrate 32 has a thin film transistor layer 300 having a liquid crystal 301 having a spacer 302 therein. In the embodiment, the surface 310 of the substrate 31 and the bottom surface 320 of the lower substrate 32 of the flat display module 3 are respectively provided with polarizing plates 4 and 5. The flat display module 3 has a flaw 94, and the crucible 94 in this embodiment is a defect of a bright spot. The so-called bright spot defects may be caused by foreign matter in the inner layer or the adhesive layer of the polarizing plate 4 or 6, which may cause serious light leakage during the power-on test, or may be caused by the filter layer 34, the liquid crystal 30, or a circuit defect. The 瑕疵94 in the figure refers to a foreign matter which is caused by a foreign matter in the inner layer or the adhesive layer of the polarizing plate 4 or 5, which causes a serious light leakage during the power-on test.

接著進行步驟21,提供一飛秒雷射聚焦照射於對應該亮點之偏光板上,使對應該亮點之偏光板內產生非線性多光子吸收而改質黑化,進而將該亮點轉換成暗點。如圖四所示,藉由飛秒雷射90聚焦照射於對應該亮點之偏光板4上,使得偏光板4內部改質而形成黑化區域91。步驟21中的改質,係可以藉由飛秒雷射光束,使對應亮點之偏光板4上的區域因為多光子吸收,而產生物理改變,進而形成黑化,亦不會有其它區域受損。要說明的是,本發明可以藉由調整該飛秒雷射之波長、脈衝頻率、雷射功率以及偏極方向來調整飛秒雷射之狀態,進而使該偏光板內部對應該亮點的區域因為非線性多光子吸收,而產生物理反應,使此該區域形成黑化,亦不會有其它區域受損。其中,該飛秒雷射之波長範圍為200~1100 nm;而該飛秒雷射之雷射脈衝頻率介於1Hz~2MHz;該飛秒雷射投射至該偏光板之投射功率密度大於108 W/cm2 。飛秒雷射之脈衝寬度小於等於500飛秒。Then proceeding to step 21, providing a femtosecond laser focusing illumination on the polarizing plate corresponding to the bright spot, causing nonlinear multiphoton absorption in the polarizing plate corresponding to the bright spot, and modifying the blackening, thereby converting the bright spot into a dark spot . As shown in FIG. 4, the femtosecond laser 90 is focused on the polarizing plate 4 corresponding to the bright spot, so that the inside of the polarizing plate 4 is modified to form a blackened region 91. The modification in step 21 can make the physical change of the region on the polarizing plate 4 corresponding to the bright spot due to multiphoton absorption by the femtosecond laser beam, thereby forming blackening and no other damage. . It should be noted that the present invention can adjust the state of the femtosecond laser by adjusting the wavelength of the femtosecond laser, the pulse frequency, the laser power, and the polarization direction, thereby making the area corresponding to the bright spot inside the polarizing plate Non-linear multiphoton absorption produces a physical reaction that causes blackening of this area and no damage to other areas. Wherein, the wavelength range of the femtosecond laser is 200~1100 nm; and the laser pulse frequency of the femtosecond laser is between 1 Hz and 2 MHz; the projection power density of the femtosecond laser projected onto the polarizing plate is greater than 10 8 W/cm 2 . The pulse width of the femtosecond laser is less than or equal to 500 femtoseconds.

請參閱圖五A所示,該圖係為本發明之平面顯示模組修補系統示意圖。該平面顯示模組修補系統6包括有一移動平台60以及一飛秒雷射源61。該移動平台60具有一平台600以及一驅動單元601,該驅動單元601驅動該平台600產生三維度線性位移運動。本實施例中,該驅動單元601係由馬達與螺桿等元件所組成或者是線性馬達所構成,但不以此為限制。該驅動單元601驅動該平台600產生X與Y方向的位移運動,使得平台600可以在水平面上進行位置調整的動作;另外,驅動單元601驅動該平台600產生Z軸方向的位移運動以調整聚焦單元64與該平台600間的距離。在該移動平台60上放置有一平面顯示模組3,其係具有亮點的缺陷,該平面顯示模組3的結構係如圖三所示,在此不作贅述。Please refer to FIG. 5A, which is a schematic diagram of the flat display module repairing system of the present invention. The flat display module repair system 6 includes a mobile platform 60 and a femtosecond laser source 61. The mobile platform 60 has a platform 600 and a driving unit 601 that drives the platform 600 to generate a three-dimensional linear displacement motion. In this embodiment, the driving unit 601 is composed of a component such as a motor and a screw or a linear motor, but is not limited thereto. The driving unit 601 drives the platform 600 to generate a displacement movement in the X and Y directions, so that the platform 600 can perform a position adjustment action on a horizontal plane; in addition, the driving unit 601 drives the platform 600 to generate a displacement movement in the Z-axis direction to adjust the focusing unit. 64 The distance from the platform 600. A planar display module 3 is disposed on the mobile platform 60, which has a defect of a bright spot. The structure of the planar display module 3 is as shown in FIG. 3, and details are not described herein.

該移動平台60更耦接一控制單元62,該控制單元62係可以為電腦或具有運算處理能力的單晶片與記憶體組合。藉由該控制單元62所提供的輸入介面,輸入亮點之位置,使該控制單元62記錄關於該亮點之位置。該控制單元62可以產生控制訊號使該移動平台60移動而使該亮點位置對應到飛秒雷射90,使該飛秒雷射90聚焦於平面顯示模組3之偏光板4上。在本實施例中,該偏光板4指的為上基板31上的偏光板4,但不以此為限制,例如下基板32的底面所貼附的偏光板5,亦可以實施。該控制單元62產生之控制訊號給驅動單元601,驅動單元601收到了驅動訊號之後,驅動該平台600產生對應該驅動訊號之位移運動。The mobile platform 60 is further coupled to a control unit 62, which can be a computer or a single chip with computing processing capability combined with a memory. The position of the bright spot is input by the input interface provided by the control unit 62, so that the control unit 62 records the position about the bright spot. The control unit 62 can generate a control signal to move the mobile platform 60 to correspond to the femtosecond laser 90, and focus the femtosecond laser 90 on the polarizing plate 4 of the flat display module 3. In the present embodiment, the polarizing plate 4 refers to the polarizing plate 4 on the upper substrate 31. However, the polarizing plate 5 attached to the bottom surface of the lower substrate 32 may be implemented without limitation. The control unit 62 generates a control signal to the driving unit 601. After receiving the driving signal, the driving unit 601 drives the platform 600 to generate a displacement motion corresponding to the driving signal.

該飛秒雷射源61設置在該移動平台60之一側,本實施例為上方,其係可以產生一飛秒雷射90。該飛秒雷射源61更耦接有一調整單元63。本實施例中,該調整單元63更包括有一雷射波長調整裝置630,雷射頻率調整裝置631,以及雷射能量與偏振調整裝置632,以調整該飛秒雷射之波長、脈衝頻率、雷射能量以及偏極角度等特徵。其中該雷射波長調整裝置630可以調整飛秒雷射之波長範圍係為200~1100nm。而利用該雷射頻率調整裝置631調整飛秒雷射頻率的範圍在1Hz~2MHz之間。另外,雷射能量與偏振調整裝置632可以對飛秒雷射的能量進行調整,在本實施例中,該雷射能量與偏振調整裝置632調整飛秒雷射的投射功率係大於108 W/cm2The femtosecond laser source 61 is disposed on one side of the moving platform 60. In this embodiment, it is an upper portion, which can generate a femtosecond laser 90. The femtosecond laser source 61 is further coupled to an adjustment unit 63. In this embodiment, the adjusting unit 63 further includes a laser wavelength adjusting device 630, a laser frequency adjusting device 631, and a laser energy and polarization adjusting device 632 to adjust the wavelength, pulse frequency, and thunder of the femtosecond laser. Features such as energy and polar angle. The laser wavelength adjusting device 630 can adjust the wavelength range of the femtosecond laser to be 200 to 1100 nm. The laser frequency adjusting device 631 adjusts the range of the femtosecond laser frequency between 1 Hz and 2 MHz. In addition, the laser energy and polarization adjusting device 632 can adjust the energy of the femtosecond laser. In the embodiment, the laser energy and the polarization adjusting device 632 adjust the projection power of the femtosecond laser to be greater than 10 8 W/ Cm 2 .

另外,請參閱圖六所示,該圖係為光束通過偏光板示意圖。由於本發明之精神在於提供飛秒雷射聚焦照射於偏光板上,而在圖六中,如果飛秒雷射的偏極方向沒有被控制,如圖六A中的飛秒雷射90所示,則會有部分的飛秒雷射穿透偏光板4,而到達平面顯示模組內的其他區域,進而可能造成對平面顯示模組內部結構的損傷。因此,根據偏光板對不同極化方向光線吸收率不同之特性,雷射能量與偏振調整裝置632更可以藉由調整雷射偏極方向控制修補加工效果,需使雷射偏極方向與偏光板成一夾角,該夾角可以大於零度。比較好的效果是如圖六B所示,可以讓該飛秒雷射90的偏極化方下與該偏光板4之偏極化角度成垂直關係,使雷射能量易被偏光板吸收,產生黑化。In addition, please refer to FIG. 6 , which is a schematic diagram of a light beam passing through a polarizing plate. Since the spirit of the present invention is to provide a femtosecond laser focusing illumination on the polarizing plate, in FIG. 6, if the polarization direction of the femtosecond laser is not controlled, as shown by the femtosecond laser 90 in FIG. Then, a part of the femtosecond laser penetrates the polarizing plate 4 and reaches other areas in the flat display module, which may cause damage to the internal structure of the flat display module. Therefore, according to the characteristics that the polarizing plate has different light absorption rates for different polarization directions, the laser energy and polarization adjusting device 632 can control the repairing effect by adjusting the polarization direction of the laser, and the laser polarizing direction and the polarizing plate are required. At an angle, the angle can be greater than zero degrees. The better effect is as shown in FIG. 6B, which can make the polarization of the femtosecond laser 90 perpendicular to the polarization angle of the polarizing plate 4, so that the laser energy is easily absorbed by the polarizing plate. Blackening occurs.

再回到圖五A所示,為了增加該飛秒雷射90的聚焦效果,在該飛秒雷射90投射至該平面顯示模組3之光路上設置有聚焦物鏡64。該聚焦物鏡64係由至少一聚焦透鏡或反射鏡所構成,其組成可以利用習用技術之透鏡予以組合。該飛秒雷射90之焦距也可藉由改變聚焦透鏡64的高度或焦距來達成。另外,在飛秒雷射90之光路上亦可以視狀況而設置反射鏡65以導引該飛秒雷射90至平面顯示模組3上。在本實施例中,該聚焦物鏡64係為之數值光圈(numerical aperture,NA)值大於等於0.5。藉由高數值光圈值的聚焦物鏡64,可以使得聚焦焦點處能量集中,離焦處由於發散角較大可有效降低雷射劑量,避免焦點外的區域受到雷射加工。Returning to FIG. 5A, in order to increase the focusing effect of the femtosecond laser 90, a focusing objective 64 is disposed on the optical path of the femtosecond laser 90 projected onto the planar display module 3. The focusing objective 64 is composed of at least one focusing lens or mirror, the composition of which can be combined using lenses of the prior art. The focal length of the femtosecond laser 90 can also be achieved by varying the height or focal length of the focusing lens 64. In addition, a mirror 65 may be disposed on the optical path of the femtosecond laser 90 to guide the femtosecond laser 90 to the flat display module 3. In the present embodiment, the focusing objective 64 has a numerical aperture (NA) value of 0.5 or more. By focusing the objective lens 64 with a high numerical aperture value, the energy at the focus focus can be concentrated, and the defocus angle is large, the laser dose can be effectively reduced, and the area outside the focus is prevented from being subjected to laser processing.

如圖七A所示,該圖係為利用高NA值聚焦物鏡所產生的聚焦光斑示意圖。由於高NA物鏡聚焦光斑92較小,雖可以對偏光板產生好的改質效果,不過並不適合大面積加工製程。因此,在另一實施例中,如圖五B所示,在該聚焦物鏡64之前,更可以設置一整形元件66,使飛秒雷射在進入該聚焦物鏡64之前,先通過該整形元件66,以調整該聚焦光斑之形狀。在本實施例中,該整形元件66係為一狹縫結構,但不以此為限制。狹縫之形狀可以為多邊形,本實施例係為矩形。當雷射光經過整形元件66產生繞射再由聚焦物鏡64聚焦後其光斑將會橫向的被拉長,以形成如圖七B所示之聚焦光斑93,但光束方向其能量分佈則不變,此方法可補償高NA物鏡加工效率低的缺點。由於飛秒雷射本身低熱加工效應之特性,搭配光路整合針對焦點處的光斑做有效率之整形(shaping),即可實現在偏光板薄膜內部快速改質,以修補缺陷。藉由聚焦物鏡以及整形元件的組合,可實現在厚度為30~50μm之偏光板內部快速製作出一層更薄的改質區。As shown in Fig. 7A, the figure is a schematic view of a focused spot produced by focusing an objective lens with a high NA value. Since the high NA objective lens has a small spot size 92, it can produce a good modification effect on the polarizing plate, but it is not suitable for a large-area processing process. Therefore, in another embodiment, as shown in FIG. 5B, before the focusing objective 64, a shaping element 66 may be further disposed to pass the femtosecond laser through the shaping element 66 before entering the focusing objective 64. To adjust the shape of the focused spot. In this embodiment, the shaping element 66 is a slit structure, but is not limited thereto. The shape of the slit may be a polygon, and this embodiment is a rectangle. When the laser light is diffracted by the shaping element 66 and then focused by the focusing objective 64, its spot will be laterally elongated to form a focused spot 93 as shown in FIG. 7B, but the energy distribution of the beam direction is unchanged. This method can compensate for the disadvantages of low efficiency of high NA objective processing. Due to the low thermal processing effect of the femtosecond laser itself, the optical path is integrated with the spot for the focus to make efficient shaping, which can be quickly modified inside the polarizing film to repair defects. By combining the objective lens and the shaping element, it is possible to quickly produce a thinner modified region inside the polarizing plate having a thickness of 30 to 50 μm.

如圖五A所示,該平面顯示模組修補系統6根據圖二所示之步驟,對具有亮點的該平面顯示模組3進行修補。一開始藉由控制單元62設定關於各亮點或者是要修補的位置,該控制單元62根據設定的位置控制驅動單元601以使該平台600產生對應的位移運動。由於飛秒雷射源61固定不動,因此藉由平台600的位移運動,可以將亮點移動至對應該飛秒雷射90之位置,使得飛秒雷射90聚焦於該平面顯示模組3內部對應該亮點位置之偏光板4上,使對應該亮點之透光基材產生非線性多光子吸收而形成一改質區域91,雷射光修補位置亦可藉由光路的調變與聚焦模組64位置的改變達成,而待修補之平面顯示模組之位置固定不動(飛行光路);或者是搭配二者相互位移來達成。當對應亮點的偏光板4黑化之後,經由亮點所發出之光後到改質區域內的結構所產生的散射或反射等現象,使得光無法穿透偏光板。藉由修補系統6對偏光板進行改質,可以在偏光板表面沒有受損及側面漏光現象的條件下,達到局部黑化修補顯示器亮點,進而提高顯示器的等級。As shown in FIG. 5A, the flat display module repairing system 6 repairs the flat display module 3 having bright spots according to the steps shown in FIG. The control unit 62 initially sets the position for each bright spot or to be repaired. The control unit 62 controls the drive unit 601 according to the set position to cause the platform 600 to generate a corresponding displacement motion. Since the femtosecond laser source 61 is stationary, the bright spot can be moved to the position corresponding to the femtosecond laser 90 by the displacement movement of the platform 600, so that the femtosecond laser 90 is focused on the internal display module 3 The polarizing plate 4 at the position of the bright spot should be made to generate a modified region 91 by nonlinear multiphoton absorption corresponding to the light-transmitting substrate corresponding to the bright spot, and the laser light repairing position can also be adjusted by the optical path and the position of the focusing module 64. The change is achieved, and the position of the flat display module to be repaired is fixed (flying light path); or it is achieved by displacing the two. When the polarizing plate 4 corresponding to the bright spot is blackened, the phenomenon of scattering or reflection caused by the light emitted from the bright spot to the structure in the modified region makes the light unable to penetrate the polarizing plate. By modifying the polarizing plate by the repairing system 6, the local blackening repair highlights can be achieved under the condition that the surface of the polarizing plate is free from damage and side leakage, thereby improving the level of the display.

另外,要說明的是,如圖三所示,雖然前述之實施例中,係為針對平面顯示模組3中的上基板31的表面310的偏光板4進行修補,但是並不以上基板為限制,亦即,如果漏光之缺陷發生在下基板32底面上之偏光板5,亦可以對該偏光板5進行修補。此外,在另一實施例中,針對如圖八所示含有背光源7的平面顯示器8,亦可以利用本發明之方法與系統進行修補。雖然前述之實施例係為在偏光板內形成黑化的改質區域,但是根據本發明之精神,只要調整飛秒雷射之聚焦位置,該飛秒雷射也可以在偏光板之表面形成改質區域,同樣也可以達到修補的效果。In addition, as shown in FIG. 3, in the foregoing embodiment, the polarizing plate 4 of the surface 310 of the upper substrate 31 in the flat display module 3 is repaired, but the above substrate is not limited. That is, if the light leakage defect occurs on the polarizing plate 5 on the bottom surface of the lower substrate 32, the polarizing plate 5 can also be repaired. Moreover, in another embodiment, the planar display 8 containing the backlight 7 as shown in FIG. 8 can also be repaired using the method and system of the present invention. Although the foregoing embodiment is to form a blackened modified region in the polarizing plate, according to the spirit of the present invention, the femtosecond laser can be formed on the surface of the polarizing plate as long as the focus position of the femtosecond laser is adjusted. The quality area can also achieve the effect of repairing.

惟以上所述者,僅為本發明之實施例,當不能以之限制本發明範圍。即大凡依本發明申請專利範圍所做之均等變化及修飾,仍將不失本發明之要義所在,亦不脫離本發明之精神和範圍,故都應視為本發明的進一步實施狀況。However, the above is only an embodiment of the present invention, and the scope of the present invention is not limited thereto. It is to be understood that the scope of the present invention is not limited by the spirit and scope of the present invention, and should be considered as a further embodiment of the present invention.

10...液晶顯示模組10. . . Liquid crystal display module

11、12...偏光板11,12. . . Polarizer

13...缺陷13. . . defect

2...平面顯示模組修補方法2. . . Flat display module repair method

20~21...步驟20~21. . . step

3...平面顯示模組3. . . Flat display module

30...液晶層單元30. . . Liquid crystal layer unit

300...薄膜電晶體層300. . . Thin film transistor layer

301...液晶301. . . liquid crystal

302...支撐物302. . . Support

31...上基板31. . . Upper substrate

310...表面310. . . surface

32...下基板32. . . Lower substrate

320...底面320. . . Bottom

34...濾光層34. . . Filter layer

4、5...偏光板4, 5. . . Polarizer

6...平面顯示模組修補系統6. . . Flat display module repair system

60...移動平台60. . . mobile platform

61...飛秒雷射源61. . . Femtosecond laser source

600...平台600. . . platform

601...驅動單元601. . . Drive unit

62...控制單元62. . . control unit

63...調整單元63. . . Adjustment unit

630...雷射波長調整裝置630. . . Laser wavelength adjustment device

631...雷射頻率調整裝置631. . . Laser frequency adjustment device

632...雷射能量與偏振調整裝置632. . . Laser energy and polarization adjustment device

64...聚焦單元64. . . Focus unit

65...反射鏡65. . . Reflector

66...整形元件66. . . Shaping element

90...飛秒雷射90. . . Femtosecond laser

91...黑化區域91. . . Blackened area

92、93...聚焦光斑92, 93. . . Focus spot

94...瑕疵94. . . defect

圖一係為液晶顯示模組示意圖。Figure 1 is a schematic diagram of a liquid crystal display module.

圖二係為本發明之平面顯示模組修補方法實施例流程示意圖。FIG. 2 is a schematic flow chart of an embodiment of a method for repairing a flat display module according to the present invention.

圖三係為平面顯示模組剖面示意圖。Figure 3 is a schematic cross-sectional view of a flat display module.

圖四係為平面顯示模組之偏光板內形成黑色改質區域示意圖。Figure 4 is a schematic view showing the formation of a black modified region in the polarizing plate of the flat display module.

圖五A係為本發明之平面顯示模組修補系統示意圖。FIG. 5A is a schematic diagram of a flat display module repairing system of the present invention.

圖五B係為本發明之平面顯示模組修補系統另一實施例示意圖。FIG. 5B is a schematic diagram of another embodiment of the flat display module repairing system of the present invention.

圖六A與圖六B係為飛秒雷射通過偏光板示意圖。Figure 6A and Figure 6B are schematic diagrams of a femtosecond laser passing through a polarizing plate.

圖七A係為本發明利用高NA值聚焦物鏡所產生的聚焦光斑示意圖。Figure 7A is a schematic view of a focused spot produced by a high NA value focusing objective lens of the present invention.

圖七B係為本發明利用高NA值聚焦物鏡與整形元件所產生的聚焦光斑示意圖。Figure 7B is a schematic view of the focused spot generated by the high NA value focusing objective lens and the shaping element of the present invention.

圖八所示含有背光源的平面顯示器示意圖。Figure 8 shows a schematic diagram of a flat panel display with a backlight.

2...平面顯示模組修補方法2. . . Flat display module repair method

20~21...步驟20~21. . . step

Claims (26)

一種平面顯示模組修補方法,其係包括有下列步驟:提供一平面顯示模組,其表面貼附有一偏光板,該平面顯示模組具有至少一亮點;以及提供一飛秒雷射聚焦照射於對應該亮點之該偏光板上,藉由調整該飛秒雷射之波長、脈衝頻率、雷射功率與偏極方向,使對應該亮點之該偏光板產生非線性多光子吸收而形成一改質區域,進而將該亮點轉換成暗點;其中,該飛秒雷射之偏極方向與該偏光板之偏極角度成垂直關係。 A flat display module repairing method comprising the steps of: providing a flat display module having a polarizing plate attached to a surface thereof, the flat display module having at least one bright point; and providing a femtosecond laser focusing illumination On the polarizing plate corresponding to the bright spot, by adjusting the wavelength, pulse frequency, laser power and polarization direction of the femtosecond laser, a nonlinear multiphoton absorption is generated for the polarizing plate corresponding to the bright spot to form a modified a region, which in turn converts the bright spot into a dark spot; wherein the polarization direction of the femtosecond laser is perpendicular to the polarization angle of the polarizing plate. 如申請專利範圍第1項之平面顯示模組修補方法,其中該飛秒雷射之波長範圍為200~1100nm。 For example, the flat display module repairing method of claim 1 is characterized in that the wavelength range of the femtosecond laser is 200~1100 nm. 如申請專利範圍第1項之平面顯示模組修補方法,其中該飛秒雷射之雷射脈衝頻率介於1Hz~2MHz。 For example, the flat display module repairing method of claim 1 is characterized in that the laser pulse frequency of the femtosecond laser is between 1 Hz and 2 MHz. 如申請專利範圍第1項之平面顯示模組修補方法,其中該飛秒雷射投射至該偏光板之投射功率密度大於108 W/cm2The method for repairing a flat display module according to claim 1, wherein the projection power density of the femtosecond laser projected onto the polarizing plate is greater than 10 8 W/cm 2 . 如申請專利範圍第1項之平面顯示模組修補方法,其係更包括有使該飛秒雷射經由一反射鏡以及一聚焦物鏡而投射至對應該亮點之該偏光板上之步驟。 The method for repairing a flat display module according to claim 1, further comprising the step of projecting the femtosecond laser through a mirror and a focusing objective onto the polarizing plate corresponding to the bright spot. 如申請專利範圍第5項之平面顯示模組修補方法,其中該聚焦物鏡之數值光圈值係大於等於0.5。 The method for repairing a flat display module according to claim 5, wherein the numerical aperture value of the focusing objective is greater than or equal to 0.5. 如申請專利範圍第5項之平面顯示模組修補方法,其係更包括該飛秒雷射進入該聚焦物鏡之前更包括有使該 飛秒雷射通過一整形元件之步驟。 The method for repairing a flat display module according to claim 5, further comprising the step of the femtosecond laser entering the focusing objective The femtosecond laser passes through a step of shaping the component. 如申請專利範圍第7項之平面顯示模組修補方法,其中該整形元件係為具有一狹縫結構之元件。 The flat display module repairing method of claim 7, wherein the shaping element is an element having a slit structure. 如申請專利範圍第1項之平面顯示模組修補方法,其更包括有調變該飛秒雷射之偏極方向之一步驟。 For example, the flat display module repairing method of claim 1 further includes one step of modulating the polarization direction of the femtosecond laser. 如申請專利範圍第9項之平面顯示模組修補方法,其中該飛秒雷射之偏極方向係與該偏光板之偏極方向成一夾角,該夾角係大於零度。 The flat display module repairing method of claim 9, wherein the polarization direction of the femtosecond laser is at an angle to a polarization direction of the polarizing plate, and the angle is greater than zero degrees. 如申請專利範圍第1項之平面顯示模組修補方法,其中該平面顯示模組系為一液晶模組,其係與一背光模組結合而形成一平面顯示器,該液晶模組具有一顯示面以及一受光面,該受光面係與該背光模組之一出光面相對應,該偏光板係貼附於該顯示面上。 The flat display module repairing method of claim 1, wherein the flat display module is a liquid crystal module, which is combined with a backlight module to form a flat display, and the liquid crystal module has a display surface. And a light receiving surface corresponding to one of the light emitting surfaces of the backlight module, the polarizing plate being attached to the display surface. 如申請專利範圍第1項之平面顯示模組修補方法,其中該平面顯示模組系為一液晶模組,其係與一背光模組結合而形成一平面顯示器,該液晶模組具有一顯示面以及一受光面,該受光面係與該背光模組之一出光面相對應,該偏光板係貼附於該受光面上。 The flat display module repairing method of claim 1, wherein the flat display module is a liquid crystal module, which is combined with a backlight module to form a flat display, and the liquid crystal module has a display surface. And a light receiving surface corresponding to a light emitting surface of the backlight module, wherein the polarizing plate is attached to the light receiving surface. 一種平面顯示模組修補系統,其係包括有:一移動平台,其係用以承載具有一亮點缺陷之一平面顯示模組,該平面顯示模組表面貼附有一偏光板;以及一飛秒雷射源,其係提供一飛秒雷射,以聚焦照射於對應該亮點之該偏光板上,藉由調整該飛秒雷射之波長、脈衝頻率、雷射功率與偏極方向,使對 應該亮點之該偏光板產生非線性多光子吸收而改質,進而將該亮點轉換成暗點;其中,該飛秒雷射之偏極方向與該偏光板之偏極角度成垂直關係。 A flat display module repairing system includes: a mobile platform for carrying a flat display module having a bright spot defect, the flat display module surface is attached with a polarizing plate; and a femtosecond mine a source, which provides a femtosecond laser to focus on the polarizing plate corresponding to the bright spot, by adjusting the wavelength, pulse frequency, laser power and polarization direction of the femtosecond laser The polarizing plate that should be brightened produces non-linear multiphoton absorption and is modified, thereby converting the bright spot into a dark spot; wherein the polarization direction of the femtosecond laser is perpendicular to the polarization angle of the polarizing plate. 如申請專利範圍第13項之平面顯示模組修補系統,其中該飛秒雷射源更具有一調整單元,以調整該飛秒雷射之波長、脈衝頻率、雷射功率以及偏極方向。 For example, in the flat display module repairing system of claim 13, wherein the femtosecond laser source further has an adjusting unit for adjusting the wavelength, pulse frequency, laser power and polarization direction of the femtosecond laser. 如申請專利範圍第14項之平面顯示模組修補系統,其中該飛秒雷射之波長範圍為200~1100nm。 For example, the flat display module repairing system of claim 14 wherein the femtosecond laser has a wavelength range of 200 to 1100 nm. 如申請專利範圍第14項之平面顯示模組修補系統,其中該飛秒雷射之雷射脈衝頻率介於1Hz~2MHz。 For example, in the flat display module repairing system of claim 14, wherein the laser pulse frequency of the femtosecond laser is between 1 Hz and 2 MHz. 如申請專利範圍第14項之平面顯示模組修補系統,其中該飛秒雷射投射至該平面顯示模組之投射功率密度大於108 W/cm2For example, in the flat display module repairing system of claim 14, wherein the projection power density of the femtosecond laser projected onto the flat display module is greater than 10 8 W/cm 2 . 如申請專利範圍第13項之平面顯示模組修補系統,其中於該飛秒雷射之光路上更設置有一反射鏡以及至少一聚焦物鏡,以調制該飛秒雷射。 The flat display module repairing system of claim 13, wherein a mirror and at least one focusing objective are further disposed on the optical path of the femtosecond laser to modulate the femtosecond laser. 如申請專利範圍第18項之平面顯示模組修補系統,其中該聚焦物鏡之數值光圈值係大於等於0.5。 For example, the flat display module repairing system of claim 18, wherein the numerical aperture value of the focusing objective lens is greater than or equal to 0.5. 如申請專利範圍第13項之平面顯示模組修補系統,其中該飛秒雷射進入該聚焦物鏡之前,係通過一整形元件。 The flat display module repairing system of claim 13, wherein the femtosecond laser passes through a shaping element before entering the focusing objective. 如申請專利範圍第20項之平面顯示模組修補系統,其中該整形元件係為具有一狹縫結構之元件。 The flat display module repairing system of claim 20, wherein the shaping element is an element having a slit structure. 如申請專利範圍第13項之平面顯示模組修補系統,其 中該移動平台包括有一平台以及一驅動單元,該驅動單元提供驅動該平台產生一三維線性位移運動。 Such as the flat display module repairing system of claim 13 of the patent scope, The mobile platform includes a platform and a driving unit that provides driving of the platform to generate a three-dimensional linear displacement motion. 如申請專利範圍第13項之平面顯示模組修補系統,其係更包括有一控制單元,該控制單元記錄關於該亮點之位置,以產生控制訊號使該移動平台移動而使該亮點對應到飛秒雷射,使該飛秒雷射聚焦於該平面顯示模組上。 The flat display module repairing system of claim 13 further includes a control unit, wherein the control unit records the position of the bright spot to generate a control signal to move the mobile platform to make the bright spot correspond to the femtosecond. The laser causes the femtosecond laser to be focused on the planar display module. 如申請專利範圍第13項之平面顯示模組修補系統,其中該平面顯示模組系為一液晶模組,其係與一背光模組結合而形成一平面顯示器,該液晶模組具有一顯示面以及一受光面,該受光面係與該背光模組之一出光面相對應,該偏光板係貼附於該顯示面上。 The flat display module repairing system of claim 13 , wherein the flat display module is a liquid crystal module, which is combined with a backlight module to form a flat display, the liquid crystal module has a display surface And a light receiving surface corresponding to one of the light emitting surfaces of the backlight module, the polarizing plate being attached to the display surface. 如申請專利範圍第13項之平面顯示模組修補系統,其中該平面顯示模組系為一液晶模組,其係與一背光模組結合而形成一平面顯示器,該液晶模組具有一顯示面以及一受光面,該受光面係與該背光模組之一出光面相對應,該偏光板係貼附於該受光面上。 The flat display module repairing system of claim 13 , wherein the flat display module is a liquid crystal module, which is combined with a backlight module to form a flat display, the liquid crystal module has a display surface And a light receiving surface corresponding to a light emitting surface of the backlight module, wherein the polarizing plate is attached to the light receiving surface. 如申請專利範圍第13項之平面顯示模組修補系統,其中該飛秒雷射具有一偏極方向,其係與該偏光板之偏極方向成一夾角,該夾角係大於零度。The planar display module repairing system of claim 13, wherein the femtosecond laser has a polarization direction, which is at an angle to a polarization direction of the polarizing plate, and the angle is greater than zero degrees.
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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5926246A (en) * 1994-11-15 1999-07-20 Sharp Kabushiki Kaisha Method for the correction of a defect in a liquid crystal display device
TW200504408A (en) * 2003-07-25 2005-02-01 Au Optronics Corp A method for repairing the light spot of the liquid crystal display
TW200714973A (en) * 2005-10-06 2007-04-16 Samsung Electronics Co Ltd Repairing manufacturing defects in flat panel displays
CN101221299A (en) * 2007-01-10 2008-07-16 Charm&Ci株式会社 Method and apparatus for repairing liquid crystal display panel

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5926246A (en) * 1994-11-15 1999-07-20 Sharp Kabushiki Kaisha Method for the correction of a defect in a liquid crystal display device
TW200504408A (en) * 2003-07-25 2005-02-01 Au Optronics Corp A method for repairing the light spot of the liquid crystal display
TW200714973A (en) * 2005-10-06 2007-04-16 Samsung Electronics Co Ltd Repairing manufacturing defects in flat panel displays
CN101221299A (en) * 2007-01-10 2008-07-16 Charm&Ci株式会社 Method and apparatus for repairing liquid crystal display panel

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