TWI462678B - Method of manufacturing printed circuit board - Google Patents

Method of manufacturing printed circuit board Download PDF

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TWI462678B
TWI462678B TW101147886A TW101147886A TWI462678B TW I462678 B TWI462678 B TW I462678B TW 101147886 A TW101147886 A TW 101147886A TW 101147886 A TW101147886 A TW 101147886A TW I462678 B TWI462678 B TW I462678B
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substrate
line
printed circuit
circuit board
carrier
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TW101147886A
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Chinese (zh)
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TW201427521A (en
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Chia Hua Chiang
Chih Min Chao
Chien Hwa Chiu
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Ichia Tech Inc
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製造印刷電路板之方法Method of manufacturing a printed circuit board

本發明大致上係關於一種印刷電路板(printed circuit board)及其製作方法。具體而言之,本發明尤指一種利用疊合(stack)的基板來製作具有埋入式線路的印刷電路板的方法。The present invention generally relates to a printed circuit board and a method of fabricating the same. In particular, the present invention particularly relates to a method of fabricating a printed circuit board having a buried wiring using a stacked substrate.

印刷電路板已被廣泛應用於各種電子產品中,用來作為接合電子產品內各種電子零件之重要元件。隨著技術發展,高密度互連(high density interconnection,HDI)印刷電路板的出現於是滿足了實現電子產品小型化與輕量化的要求。在目前高密度互連印刷電路板的製造方法之中,採用導電膏來實現電氣互連的任意層內部導通孔(any layer inner via hole,ALIVH)技術是最為業界所熟知的方法之一。Printed circuit boards have been widely used in various electronic products as an important component for joining various electronic components in electronic products. With the development of technology, the emergence of high density interconnection (HDI) printed circuit boards has met the requirements for miniaturization and weight reduction of electronic products. Among the current methods of manufacturing high-density interconnected printed circuit boards, any layer inner via hole (ALIVH) technology that uses conductive paste to achieve electrical interconnection is one of the most well-known methods.

但是在任意層內部導通孔方法中,係利用基底中的導電膏來連通不同層之間的線路,然而,導電膏的材料多為含有導電粉末的高分子材料膠體,因此其導電性不如金屬材料。此外,任意層內部導通孔方法在製作多層線路時,係將複數個已具有銅箔線路圖案的基底互相堆疊壓合,因此存在有貼合誤差之問題需要克服。However, in the method of conducting via holes in any layer, the conductive paste in the substrate is used to connect the wires between the different layers. However, the material of the conductive paste is mostly a polymer material colloid containing conductive powder, so the conductivity is not as good as that of the metal material. . In addition, the method of the via hole of any layer in the process of fabricating a multilayer wiring is to stack and laminate a plurality of substrates having a copper foil line pattern on each other, so that there is a problem that the fitting error needs to be overcome.

再者,以上述方法製作的線路是突出於每層基底之表 面,因此每增加一層線路,便必須增加一層基底和一層銅箔片的厚度。當印刷電路板為含有多層線路時,整體印刷電路板的厚度便限制了使印刷電路板能更加輕薄的可能性。Furthermore, the line produced by the above method is a table protruding from the base of each layer. Face, so for each additional layer of wire, you must add a layer of substrate and a layer of copper foil thickness. When the printed circuit board contains multiple layers of wiring, the thickness of the overall printed circuit board limits the possibility of making the printed circuit board lighter and thinner.

本發明的目的之一在於提供一種利用疊層基板(stack substrate)來製作具有埋入式線路之印刷電路板的方法,以縮短製程、節省成本、免除使用黃光來蝕刻線路之缺點。同時本發明方法不使用濕製程,又可以免除使用有毒藥水而增加環境汙染之缺點。It is an object of the present invention to provide a method of fabricating a printed circuit board having a buried wiring using a stack substrate to shorten the process, save cost, and eliminate the disadvantage of etching the line using yellow light. At the same time, the method of the invention does not use a wet process, and can eliminate the disadvantage of using toxic water to increase environmental pollution.

為達上述目的,本發明提供了一種印刷電路板的製作方法。首先,提供第一基底。第一基底具有彼此平行之上表面與下表面,而且上表面上還設有第一載體。其次,圖案化第一載體與第一基底,而於第一基底之上表面形成至少一第一線路圖案。然後,進行導電處理製程,於第一基底之上表面形成第一薄導電層,其覆蓋第一線路圖案之表面。再來,又在移除第一載體後進行電鍍製程,而於第一線路圖案之表面形成至少一第一線路。接著,利用第一黏合層來將具有第一線路之第一基底,貼附於已預先線路化之第二基底上。To achieve the above object, the present invention provides a method of fabricating a printed circuit board. First, a first substrate is provided. The first substrate has an upper surface and a lower surface parallel to each other, and a first carrier is further provided on the upper surface. Next, the first carrier and the first substrate are patterned, and at least one first line pattern is formed on the upper surface of the first substrate. Then, a conductive treatment process is performed to form a first thin conductive layer on the upper surface of the first substrate, which covers the surface of the first line pattern. Then, the electroplating process is performed after the first carrier is removed, and at least one first line is formed on the surface of the first line pattern. Next, the first substrate having the first line is attached to the second substrate that has been pre-wired by the first bonding layer.

在本發明之一實施方式中,第一基底之下表面設有第二載體。還可以繼續圖案化第二載體,而於第一基底之下表面形成至少一第二線路圖案。繼續,進行導電處理製程,於第一基底之下表面形成第一薄導電層,而覆蓋第二線路圖案 之表面。再來,在移除第二載體後,進行電鍍製程,而於第二線路圖案之表面形成至少一第二線路。In an embodiment of the invention, the lower surface of the first substrate is provided with a second carrier. It is also possible to continue patterning the second carrier while forming at least one second line pattern on the lower surface of the first substrate. Continuing, performing a conductive treatment process to form a first thin conductive layer on the lower surface of the first substrate and covering the second line pattern The surface. Then, after the second carrier is removed, an electroplating process is performed, and at least one second line is formed on the surface of the second line pattern.

在本發明之另一實施方式中,形成已預先線路化之第二基底之步驟可以是先提供第二基底。第二基底具有彼此平行之上表面與下表面,而且上表面設有第三載體。其次,圖案化第三載體與第二基底,而於第二基底之上表面形成至少一第三線路圖案。然後,進行導電處理製程,於第二基底之上表面形成第二薄導電層,其覆蓋第三線路圖案之表面。在來,在移除第三載體後進行電鍍製程,而於第三線路圖案之表面形成至少一第三線路。In another embodiment of the invention, the step of forming the pre-lined second substrate may be to first provide a second substrate. The second substrate has an upper surface and a lower surface parallel to each other, and the upper surface is provided with a third carrier. Next, the third carrier and the second substrate are patterned, and at least one third line pattern is formed on the upper surface of the second substrate. Then, a conductive treatment process is performed to form a second thin conductive layer covering the surface of the third line pattern on the upper surface of the second substrate. Thereafter, the electroplating process is performed after the third carrier is removed, and at least a third line is formed on the surface of the third line pattern.

在本發明之另一實施方式中,第二基底的下表面還可以有第四線路。形成第四線路之步驟可以是先圖案化位於第二基底下表面上之第四載體,而於第二基底之下表面上形成至少一第四線路圖案。然後進行導電處理製程,於第二基底之下表面形成第二薄導電層,其覆蓋第四線路圖案之表面。其次,在移除第四載體後進行電鍍製程,而於第四線路圖案之表面形成至少一第四線路。In another embodiment of the invention, the lower surface of the second substrate may also have a fourth line. The step of forming the fourth line may be to first pattern the fourth carrier on the lower surface of the second substrate and form at least one fourth line pattern on the lower surface of the second substrate. Then, a conductive treatment process is performed to form a second thin conductive layer covering the surface of the fourth line pattern on the lower surface of the second substrate. Next, after the fourth carrier is removed, an electroplating process is performed, and at least a fourth line is formed on the surface of the fourth line pattern.

在本發明之另一實施方式中,又可以利用第二黏合層來將具有第二線路之第一基底,貼附於預先線路化之第三基底上。In another embodiment of the present invention, the second substrate having the second line may be attached to the pre-lined third substrate by using the second bonding layer.

在本發明之另一實施方式中,線路化第三基底之步驟可以是先提供第三基底。第三基底具有彼此平行之上表面與下表面,而且上表面還設有第五載體。其次,圖案化第五載 體與第三基底,而於第三基底之上表面形成至少一第五線路圖案。然後,進行導電處理製程,於第三基底之上表面形成第三薄導電層,其覆蓋第五線路圖案之表面。接著,在移除第五載體後進行電鍍製程,而於第五線路圖案之表面形成至少一第五線路。In another embodiment of the invention, the step of routing the third substrate may be to first provide a third substrate. The third substrate has an upper surface and a lower surface parallel to each other, and the upper surface is further provided with a fifth carrier. Second, the fifth of the pattern The body and the third substrate form at least one fifth line pattern on the upper surface of the third substrate. Then, a conductive treatment process is performed to form a third thin conductive layer on the upper surface of the third substrate, which covers the surface of the fifth line pattern. Then, after the fifth carrier is removed, an electroplating process is performed, and at least a fifth line is formed on the surface of the fifth line pattern.

在本發明之另一實施方式中,第三基底的下表面還可以有第六線路。形成第六線路之步驟可以是先圖案化位於第三基底下表面上之第六載體,而於第三基底之下表面上形成至少一第六線路圖案。然後進行導電處理製程,於第三基底之下表面形成第三薄導電層,其覆蓋第六線路圖案之表面。繼續,又在移除第六載體後進行電鍍製程,而於第六線路圖案之表面形成至少一第六線路。In another embodiment of the invention, the lower surface of the third substrate may also have a sixth line. The step of forming the sixth line may be to first pattern the sixth carrier on the lower surface of the third substrate and form at least a sixth line pattern on the lower surface of the third substrate. Then, a conductive treatment process is performed to form a third thin conductive layer on the lower surface of the third substrate, which covers the surface of the sixth line pattern. Continuing, the electroplating process is performed after the sixth carrier is removed, and at least a sixth line is formed on the surface of the sixth line pattern.

在本發明之另一實施方式中,又可以組合複數個具有第一線路之第一基底、複數個黏合層以及複數個具有第三線路之第二基底,而形成疊合印刷電路板。在疊合印刷電路板中,任一個黏合層會使得具有第一線路之第一基底或是具有第三線路之第二基底,貼附於具有第一線路之第一基底或是具有第五線路之第三基底之其中之一者上。In another embodiment of the present invention, a plurality of first substrates having a first line, a plurality of adhesive layers, and a plurality of second substrates having a third line may be combined to form a laminated printed circuit board. In the laminated printed circuit board, any of the adhesive layers may cause the first substrate having the first line or the second substrate having the third line to be attached to the first substrate having the first line or having the fifth line One of the third bases.

在本發明之另一實施方式中,在疊合印刷電路板裡,具有第一線路之第一基底又具有第二線路。In another embodiment of the invention, in a laminated printed circuit board, the first substrate having the first line in turn has a second line.

在本發明之另一實施方式中,在疊合印刷電路板裡,而具有第三線路之第二基底又具有第四線路。In another embodiment of the invention, in the laminated printed circuit board, the second substrate having the third line in turn has a fourth line.

在本發明之另一實施方式中,第一基底、第二基底與 第三基底可以為軟性基底或是硬式基板。In another embodiment of the present invention, the first substrate and the second substrate are The third substrate may be a soft substrate or a rigid substrate.

在本發明之另一實施方式中,第一基底、第二基底與第三基底其中至少一者可以為聚醯亞胺(polyimide,PI)膜、聚萘酸乙酯(polyethylene naphthalate,PEN)膜、聚丙烯(polypropylene,PP)板或是液晶高分子聚合物(liquid crystal polymer,LCP)膜。In another embodiment of the present invention, at least one of the first substrate, the second substrate and the third substrate may be a polyimide (PI) film or a polyethylene naphthalate (PEN) film. , polypropylene (PP) plate or liquid crystal polymer (LCP) film.

在本發明之另一實施方式中,又可以繼續進行成孔步驟而形成通孔。通孔會連通相鄰之第一基底、線路化第二基底與線路化第三基底其中之至少兩者。In another embodiment of the present invention, the hole forming step can be continued to form a through hole. The vias connect at least two of the adjacent first substrate, the lined second substrate, and the lined third substrate.

在本發明之另一實施方式中,又可以繼續進行導通步驟,使得通孔電連接相鄰之第一基底、線路化第二基底或是線路化第三基底。In another embodiment of the present invention, the conducting step may be further performed such that the via is electrically connected to the adjacent first substrate, the lined second substrate, or the lined third substrate.

在本發明之另一實施方式中,圖案化第一載體與第一基底之製程可藉由雷射製程所完成。In another embodiment of the present invention, the process of patterning the first carrier and the first substrate can be accomplished by a laser process.

在本發明之另一實施方式中,在圖案化第一載體與第一基底後,更包括對第一基底進行膠渣清理(desmear)製程。In another embodiment of the present invention, after patterning the first carrier and the first substrate, the method further includes performing a desmear process on the first substrate.

在本發明之另一實施方式中,導電處理製程包括化學銅製程(electroless copper deposition process)、化學鎳製程(electroless nickel process)、化學銀製程(immersion silver process)、黑孔製程(blackhole process)、黑影製程(shadow process)、金屬觸媒製程(synthesize catalytic ink process)、奈米銅噴印製程(nano copper material ink-jet printing process)或奈米銅印刷製程(nano copper material screen printing process)。In another embodiment of the present invention, the conductive treatment process includes an electroless copper deposition process, an electroless nickel process, an immersion silver process, a blackhole process, Shadow process, synthesize catalytic ink process, nano copper material ink-jet printing Process) or nano copper material screen printing process.

在本發明之另一實施方式中,第一線路圖案、第三線路圖案及第五線路圖案分別包括通孔圖案、盲孔圖案或埋孔圖案其中之至少一者。In another embodiment of the present invention, the first line pattern, the third line pattern, and the fifth line pattern respectively comprise at least one of a via pattern, a blind via pattern, or a buried pattern.

由於本發明係先在基底中形成線路圖案,再於形成之線路圖案中填入金屬材料,因此本發明印刷電路板中的線路皆係埋設於基底中,可以減少印刷電路板的整體厚度,且基底中的線路或導通孔等電性元件內皆為金屬材料,因此可以大幅提昇導電氣特性與信賴性。本發明利用黏著層將線路化之基底直接黏合,可以簡單製程完成印刷電路板之製作。Since the present invention first forms a wiring pattern in the substrate and then fills the formed wiring pattern with a metal material, the wiring in the printed circuit board of the present invention is embedded in the substrate, which can reduce the overall thickness of the printed circuit board, and The electrical components such as the wires or via holes in the substrate are made of a metal material, so that the characteristics and reliability of the conductive gas can be greatly improved. The invention utilizes an adhesive layer to directly bond the lined substrate, and can complete the manufacture of the printed circuit board by a simple process.

為使熟習本發明所屬技術領域之一般技藝者能更進一步瞭解本發明,下文特列舉本發明之較佳實施例,並配合所附圖式,詳細說明本發明的構成內容及所欲達成之功效,惟不因此侷限本發明之範圍。The present invention will be further understood by those of ordinary skill in the art to which the present invention pertains. However, it is not intended to limit the scope of the invention.

請參考第1圖至第15圖,其繪示本發明印刷電路板的製作方法的流程示意圖。本發明之印刷電路板,係經由貼合複數個核心基板的疊合(stack)基板法所製作的印刷電路板。首先,如第1圖所示,提供第一基底110與第二基底120。第一基底110其具有互相平行設置之上表面111與下表面112。類似地,第二基底120其亦具有互相平行設置之上表 面121與下表面122。視情況需要,如第2圖所示,還可以提供第三基底130。第三基底130也會具有互相平行設置之上表面131與下表面132。Please refer to FIG. 1 to FIG. 15 for a schematic flow chart of a method for fabricating the printed circuit board of the present invention. The printed circuit board of the present invention is a printed circuit board produced by a stack substrate method in which a plurality of core substrates are bonded. First, as shown in FIG. 1, a first substrate 110 and a second substrate 120 are provided. The first substrate 110 has an upper surface 111 and a lower surface 112 disposed in parallel with each other. Similarly, the second substrate 120 also has a table arranged parallel to each other. Face 121 and lower surface 122. A third substrate 130 may also be provided as shown in FIG. 2 as needed. The third substrate 130 also has an upper surface 131 and a lower surface 132 disposed in parallel with each other.

請注意,無論是第一基底110、第二基底120或是第三基底130,在上表面111/121/131或是下表面112/122/132其中至少一者上,都已預先形成有線路(traces),分別稱為第一線路119、第三線路129與第五線路139,而作為本發明印刷電路板的功能性走線(functional traces)。另外,第一基底110、第二基底120或是第三基底130彼此的材料或是特性既可以相同也可以不同,其可以為軟性基底或是硬式基板。例如,在本發明的一個實施例中,預先形成有線路的第一基底110、第二基底120或是第三基底130可以分別為聚醯亞胺(polyimide,PI)膜或聚萘酸乙酯(polyethylene naphthalate,PEN)膜,也可為液晶高分子聚合物(liquid crystal polymer,LCP)膜。Please note that whether the first substrate 110, the second substrate 120 or the third substrate 130 has a line formed in advance on at least one of the upper surface 111/121/131 or the lower surface 112/122/132 Traces, referred to as first line 119, third line 129, and fifth line 139, respectively, serve as functional traces for the printed circuit board of the present invention. In addition, the material or characteristics of the first substrate 110, the second substrate 120, or the third substrate 130 may be the same or different, and may be a soft substrate or a hard substrate. For example, in one embodiment of the present invention, the first substrate 110, the second substrate 120, or the third substrate 130, which are formed with a line in advance, may be a polyimide (PI) film or a polybutylene naphthalate, respectively. The (polyethylene naphthalate, PEN) film may also be a liquid crystal polymer (LCP) film.

然後,如第3A圖所示,將具有第一線路之第一基底110貼附於已預先線路化的第二基底120上,而得到本發明之印刷電路板100。視情況需要,如第4A圖所示,也可以將已預先線路化的第二基底120以及第三基底130,一起貼附於具有第一線路之第一基底110上,而得到本發明之印刷電路板100。Then, as shown in FIG. 3A, the first substrate 110 having the first line is attached to the second substrate 120 which has been pre-wired to obtain the printed circuit board 100 of the present invention. Optionally, as shown in FIG. 4A, the pre-routed second substrate 120 and the third substrate 130 may be attached together on the first substrate 110 having the first line to obtain the printing of the present invention. Circuit board 100.

例如,如果第二基底120與第三基底130為聚醯亞胺膜、聚萘酸乙酯膜或聚丙烯板時,可以使用具有黏著功能之 第一黏合層101,或是進一步使用第二黏合層102,分別將已預先線路化的第二基底120與視情況需要的第三基底130黏著固定於第一基底110之上表面111與下表面112上。在其他實施例中,當第二基底146與視情況需要的第三基底148為液晶高分子聚合物膜時,則可省略第一黏合層101或是第二黏合層102,並選擇性配合加熱與加壓方式直接將第二基底120與視情況需要的第三基底130壓合固定於第一基底110之表面,如第4B圖所示。For example, if the second substrate 120 and the third substrate 130 are a polyimide film, a polyethylene naphthalate film or a polypropylene plate, an adhesive function can be used. The first adhesive layer 101 or the second adhesive layer 102 is further used to adhere the second substrate 120 that has been pre-wired to the third substrate 130 as needed, respectively, to the upper surface 111 and the lower surface of the first substrate 110. 112 on. In other embodiments, when the second substrate 146 and the third substrate 148 as needed are liquid crystal polymer films, the first adhesive layer 101 or the second adhesive layer 102 may be omitted and selectively combined with heating. The second substrate 120 and the third substrate 130 as needed are directly pressed and fixed to the surface of the first substrate 110 in a pressurized manner, as shown in FIG. 4B.

製作線路化的第一基底110、第二基底120或是第三基底130的方式可以參考以下之介紹。以第一基底110為例,請參考第5圖所示,先於第一基底110的上表面111上設置第一載體113。視情況需要,第一基底110的下表面112上另可以設置有第二載體114。第一載體113或是第二載體114可分別為聚對苯二甲酸乙二酯(polyethylene terephthalate,PET)膜、聚酯(polyester)膜、乾式光阻材料膜(以下稱乾膜(dry film))或液態感光膜(以下稱濕膜(liquid photoimable ink))。乾膜可包含乾式光阻材料或感光材料,乾膜的材料舉例如包含壓克力樹酯單體(monomer)、連結劑(binder)、起始劑(photo initiator)等材料之混合,濕膜可包含液態感光材料(liquid photoresist)或濕式感光材料,濕膜的材料舉例如包含聚丙烯酸脂(acrylic Resin)、感光起始劑(photoinitiator)、有機顏料(organic pigment,phtalocyanine green)、硫酸鋇(barium sulfate)、二氧化矽 (silica)、二甘醇乙醚醋酸酯(diethylene glycol monoethyl ether acetate)、石油精(petroleum naphtha)、矽聚合物(silicon polymer)等材料之混合。The manner in which the lined first substrate 110, the second substrate 120, or the third substrate 130 is formed can be referred to the following description. Taking the first substrate 110 as an example, referring to FIG. 5, the first carrier 113 is disposed on the upper surface 111 of the first substrate 110. A second carrier 114 may be further disposed on the lower surface 112 of the first substrate 110 as occasion demands. The first carrier 113 or the second carrier 114 may be a polyethylene terephthalate (PET) film, a polyester film, or a dry photoresist film (hereinafter referred to as a dry film). Or a liquid photosensitive film (hereinafter referred to as a liquid photoimable ink). The dry film may comprise a dry photoresist material or a photosensitive material, and the material of the dry film may be, for example, a mixture of materials including a monomer, a binder, a photo initiator, and the like. It may comprise a liquid photosensitive material or a wet photosensitive material, and the wet film material may include, for example, an acrylic resin, a photoinitiator, an organic pigment (phtalocyanine green), barium sulfate. (barium sulfate), cerium oxide (silica), a mixture of materials such as diethylene glycol monoethyl ether acetate, petroleum naphtha, and silicon polymer.

若第一載體113或是第二載體114為聚對苯二甲酸乙二酯膜或聚酯膜,則其可藉由一膠層貼附於第一基底110的上表面111或下表面112。另一方面,若第一載體113或是第二載體114為乾膜,其可藉由如壓膜方式將乾膜材料壓合至第一基底110表面,再藉由照光處理以固化乾膜。又,若第一載體113或是第二載體114為濕膜,則可藉由如網版印刷方式將濕膜材料印刷於第一基底110上,然後加以烘烤固化。其中,乾膜與濕膜的材料可包含光阻材料,或是為添加了光阻劑或光固化材料的樹脂。各材料厚度舉例如下:聚萘酸乙酯膜的厚度可為約25至100微米(micron meter),聚醯亞胺膜的厚度可為約8至100微米,液晶高分子聚合物膜的厚度可為約25至100微米,乾膜的厚度可為約15至40微米。If the first carrier 113 or the second carrier 114 is a polyethylene terephthalate film or a polyester film, it may be attached to the upper surface 111 or the lower surface 112 of the first substrate 110 by a glue layer. On the other hand, if the first carrier 113 or the second carrier 114 is a dry film, the dry film material can be pressed to the surface of the first substrate 110 by, for example, lamination, and then cured by a light treatment to cure the dry film. Moreover, if the first carrier 113 or the second carrier 114 is a wet film, the wet film material can be printed on the first substrate 110 by, for example, screen printing, and then baked and cured. The material of the dry film and the wet film may include a photoresist material or a resin to which a photoresist or a photocurable material is added. The thickness of each material is exemplified as follows: the thickness of the polyethylene naphthalate film may be about 25 to 100 micrometers, the thickness of the polyimide film may be about 8 to 100 micrometers, and the thickness of the liquid crystal polymer film may be For a thickness of from about 25 to 100 microns, the dry film may have a thickness of from about 15 to 40 microns.

然後,如第6A圖所示,圖案化第一載體113與第一基底110,而於第一基底110之上表面111形成至少一第一線路圖案115。視情況需要,如第6B圖所示,亦可以一併圖案化第二載體114,而於第一基底110之下表面112形成至少一第二線路圖案116。此時的圖案化製程可為雷射製程。當第一基底110為聚萘酸乙酯膜、聚醯亞胺膜或是液晶高分子聚合物膜時,較佳會使用紫外光(UV)雷射光或二 氧化碳雷射,來圖案化第一基底110的上表面111或是下表面112。Then, as shown in FIG. 6A, the first carrier 113 and the first substrate 110 are patterned, and at least a first line pattern 115 is formed on the upper surface 111 of the first substrate 110. As needed, as shown in FIG. 6B, the second carrier 114 may also be patterned together, and at least one second line pattern 116 may be formed on the lower surface 112 of the first substrate 110. The patterning process at this time can be a laser process. When the first substrate 110 is a polyethylene naphthalate film, a polyimide film or a liquid crystal polymer film, ultraviolet (UV) laser light or two is preferably used. A carbon oxide laser is used to pattern the upper surface 111 or the lower surface 112 of the first substrate 110.

舉例而言,若第一基底110為液晶高分子聚合物膜時,可使用二氧化碳雷射製程。在本實施例中,第一線路圖案115或是第二線路圖案116可以包含盲孔圖案103與通孔圖案104其中至少一者。以第一線路圖案115為例,盲孔圖案103係貫穿第一載體113而形成於第一基底110中,其底部暴露出部分第一基底110,而通孔圖案104則貫穿了第一載體113、第一基底110與第二載體114。第二線路圖案116之細節可以參考第一線路圖案115之說明。For example, if the first substrate 110 is a liquid crystal polymer film, a carbon dioxide laser process can be used. In this embodiment, the first line pattern 115 or the second line pattern 116 may include at least one of the blind via pattern 103 and the via pattern 104. Taking the first line pattern 115 as an example, the blind hole pattern 103 is formed in the first substrate 110 through the first carrier 113, a portion of the first substrate 110 is exposed at the bottom thereof, and the through hole pattern 104 penetrates the first carrier 113. The first substrate 110 and the second carrier 114. The details of the second line pattern 116 can be referred to the description of the first line pattern 115.

盲孔圖案103可用來製作線路,而通孔圖案104可用來製作通孔。一般而言,通孔圖案104的尺寸可為約50至100微米左右,而盲孔圖案103的尺寸可為約200至250微米左右。上述第一線路圖案115與第二線路圖案116的圖案僅為舉例說明,並不限制本發明以雷射圖案化第一基底110的圖案。舉例而言,本發明直接以雷射在基底表面雕刻出線路圖案的製程,可以包含雕刻出盲孔圖案、通孔圖案、埋孔圖案、焊墊圖案或尺寸更細的線路圖案,亦即,不論尺寸大小或形狀,皆以雷射雕刻出基底中欲形成之電性元件的圖案。接著,視情況需要還可以對第一基底110進行膠渣清理(desmear)製程,例如為電漿製程,以清除雷射製程所產生的膠渣140或是焦渣140,如第7圖所示。The blind via pattern 103 can be used to make a line, and the via pattern 104 can be used to make a via. In general, the via pattern 104 may have a size of about 50 to 100 microns, and the blind via pattern 103 may have a size of about 200 to 250 microns. The patterns of the first line pattern 115 and the second line pattern 116 are merely illustrative, and do not limit the present invention to pattern the first substrate 110 by laser. For example, the process of directly engraving a line pattern on a surface of a substrate by laser may include engraving a blind hole pattern, a via pattern, a buried hole pattern, a pad pattern, or a thinner line pattern, that is, Regardless of size or shape, the pattern of the electrical components to be formed in the substrate is laser-engraved. Then, as needed, the first substrate 110 may be subjected to a desmear process, such as a plasma process, to remove the slag 140 or the coke slag 140 generated by the laser process, as shown in FIG. .

繼續,如第8A圖所示,又進行導電處理製程,於第 一基底110之上表面111形成第一薄導電層117,而覆蓋住在雷射製程中所形成之第一線路圖案115的表面。或是,視情況需要,如第8B圖所示,又於第一基底110之下表面112形成第二薄導電層118,而覆蓋住在雷射製程中所形成之第二線路圖案116的表面。Continue, as shown in Figure 8A, and conduct a conductive processing process, in the first A surface 111 of the substrate 110 forms a first thin conductive layer 117 to cover the surface of the first line pattern 115 formed in the laser process. Or, as needed, as shown in FIG. 8B, a second thin conductive layer 118 is formed on the lower surface 112 of the first substrate 110 to cover the surface of the second line pattern 116 formed in the laser process. .

由第8A圖/第8B圖中可知,第一薄導電層117或是第二薄導電層118覆蓋了通孔圖案104與盲孔圖案103的底部與側壁表面,同時也覆蓋了第一載體113與視情況需要第二載體114的外側表面。導電處理製程可為化學銅製程(electroless copper deposition process)、化學鎳製程(electroless nickel process)、化學銀製程(immersion silver process)、黑孔製程(blackhole process)、黑影製程(shadow process)、金屬觸媒製程(synthesize catalytic ink process)或奈米銅材料的噴印或印刷製程(nano copper material ink-jet printing or screen printing process),但不限於此。第一薄導電層117或是第二薄導電層118的材料可包含銅、碳、石墨、銀或金。As can be seen from FIG. 8A/8B, the first thin conductive layer 117 or the second thin conductive layer 118 covers the bottom and sidewall surfaces of the via pattern 104 and the blind via pattern 103, and also covers the first carrier 113. The outer side surface of the second carrier 114 is required as appropriate. The conductive treatment process can be an electroless copper deposition process, an electroless nickel process, an immersion silver process, a blackhole process, a shadow process, a metal. The nano copper material ink-jet printing or screen printing process, but is not limited thereto. The material of the first thin conductive layer 117 or the second thin conductive layer 118 may comprise copper, carbon, graphite, silver or gold.

接著,如第9A圖所示,移除第一載體113,以及視情況需要之第二載體114,如第9B圖所示,因此剩下的第一薄導電層117或是視情況需要的第二薄導電層118,會僅僅覆蓋於通孔圖案104與盲孔圖案103的內部表面。再來,在移除第一載體113或是視情況需要之第二載體114後又會進行電鍍製程,而於第一線路圖案115,如第10A圖所示,或 是視情況需要的第二線路圖案116之表面,如第10B圖所示,形成至少一第一線路119,以及視情況需要的至少一第二線路119’。Next, as shown in FIG. 9A, the first carrier 113 and, as the case may be, the second carrier 114 are removed, as shown in FIG. 9B, so that the remaining first thin conductive layer 117 is optionally required. The two thin conductive layers 118 will only cover the inner surfaces of the via pattern 104 and the blind via pattern 103. Then, after the first carrier 113 or the second carrier 114 as needed, the electroplating process is performed, and the first line pattern 115 is as shown in FIG. 10A, or The surface of the second line pattern 116, as desired, is formed as shown in Fig. 10B to form at least a first line 119 and, if desired, at least one second line 119'.

此電鍍製程,例如為一金屬電鍍製程,在具有第一薄導電層117,或是視情況需要的第二薄導電層118的表面電鍍形成金屬層,使具導電性的材料,例如金屬材料填入盲孔圖案103與通孔圖案104內,以形成至少一第一線路119、視情況需要的至少一第二線路119’與通孔106。如此,便完成了本發明印刷電路板100中,具有單層導電線路(第一線路119)或是雙層導電線路(第一線路119以及第二線路119’一起)之任一單一核心基板(single core substrate)初步的內部線路製作。線路化第二基底120以及線路化第三基底130的方式可以參考製作線路化第一基底110的方式,故不再次重複贅述。第3B圖繪示雙層導電線路之第一基底110搭配單層導電線路之第二基底,第3C圖繪示單層導電線路之第一基底110搭配雙層導電線路之第二基底120,第4C圖繪示雙層導電線路之第一基底110搭配單層導電線路之第二基底120以及第三基底130,第4D圖繪示單層導電線路之第一基底110搭配雙層導電線路之第二基底120以及第三基底130等等不同可能之組合。The electroplating process, for example, a metal plating process, is performed by forming a metal layer on the surface of the second thin conductive layer 117 having the first thin conductive layer 117 or, as the case may be, to fill the conductive material, such as a metal material. The blind via pattern 103 and the via pattern 104 are formed to form at least one first line 119, at least one second line 119' and a via 106 as needed. Thus, in the printed circuit board 100 of the present invention, any single core substrate having a single-layer conductive line (first line 119) or a double-layer conductive line (the first line 119 and the second line 119' together) is completed ( Single core substrate) preliminary internal circuit production. The manner in which the second substrate 120 is lined and the third substrate 130 is lined may be referred to the manner in which the first substrate 110 is formed. Therefore, the description thereof will not be repeated. 3B illustrates a first substrate 110 of a double-layer conductive line with a second substrate of a single-layer conductive line, and FIG. 3C illustrates a first substrate 110 of a single-layer conductive line with a second substrate 120 of a double-layer conductive line, 4C shows a first substrate 110 of a double-layer conductive line with a second substrate 120 and a third substrate 130 of a single-layer conductive line, and FIG. 4D shows a first substrate 110 of a single-layer conductive line with a double-layer conductive line. Different combinations of the two substrates 120 and the third substrate 130 are possible.

之後,視情況需要,第11圖所示,還可以在第一基底110、第二基底120或是第三基底130之上表面與下表面分別形成一上保護層107與一下保護層108,例如為絕緣層 (coverlay),再進行表面處理製程、電性測試、成型製程(punch)及目視檢測(visual inspection)等步驟,以修飾本發明印刷電路板100。其中,成型製程舉例如模具成型、雷射切割等製程。Then, as shown in FIG. 11, an upper protective layer 107 and a lower protective layer 108 may be respectively formed on the upper surface and the lower surface of the first substrate 110, the second substrate 120, or the third substrate 130, for example, for example, Insulation (coverlay), a surface treatment process, an electrical test, a punching process, and a visual inspection are performed to modify the printed circuit board 100 of the present invention. Among them, the molding process is, for example, a mold forming process or a laser cutting process.

在本發明之一實施方式中,如第12A圖或第12B圖所繪示,又可以對疊合印刷電路板100進行成孔步驟而形成通孔106。通孔106會連通相鄰之第一基底110、線路化第二基底120與線路化第三基底130其中之至少兩者。在本發明之另一實施方式中,如第13A圖或第13B圖所繪示,又可以繼續對疊合印刷電路板100進行導通步驟,使得填入導電材料之通孔106電連接相鄰之第一基底110、線路化第二基底120或是線路化第三基底130,使得相鄰之基底得以彼此電連接。另外,透過填入導電材料之通孔106的電連接,不相鄰之基底也得以透過相鄰之基底而電連接。In one embodiment of the present invention, as shown in FIG. 12A or FIG. 12B, the through hole 106 may be formed by performing a hole forming step on the laminated printed circuit board 100. The via 106 will communicate with at least two of the adjacent first substrate 110, the lined second substrate 120, and the lined third substrate 130. In another embodiment of the present invention, as shown in FIG. 13A or FIG. 13B, the conducting step of the laminated printed circuit board 100 can be further continued, so that the through holes 106 filled with the conductive material are electrically connected to the adjacent ones. The first substrate 110, the lined second substrate 120, or the lined third substrate 130 are such that adjacent substrates are electrically connected to each other. In addition, through the electrical connection of the vias 106 filled with the conductive material, the non-adjacent substrates are also electrically connected through the adjacent substrates.

由於本發明之高密度互連印刷電路板100中包含線路化之第一基底110、線路化之第二基底120以及視情況需要之線路化第三基底130,所以本發明方法亦可以組合複數個具有第一線路119之第一基底110、複數個黏合層101/102、複數個具有第三線路129之第二基底120,以及視情況需要之複數個具有第五線路139之第三基底130,而形成疊合印刷電路板100,如第14圖所示。視情況需要,第一基底110還可以具有第二線路119’、第二基底120還可以具有第四線路129’,第三基底130還可以具有第六線路139’。Since the high-density interconnected printed circuit board 100 of the present invention includes a lined first substrate 110, a lined second substrate 120, and optionally a lined third substrate 130, the method of the present invention can also combine a plurality of a first substrate 110 having a first line 119, a plurality of adhesive layers 101/102, a plurality of second substrates 120 having a third line 129, and a plurality of third substrates 130 having a fifth line 139, as the case may be, The laminated printed circuit board 100 is formed as shown in FIG. The first substrate 110 may also have a second line 119', the second substrate 120 may also have a fourth line 129', and the third substrate 130 may also have a sixth line 139', as the case may be.

在疊合印刷電路板中100,任一個黏合層(101或102)會使得具有第一線路119之第一基底110或具有第三線路129之第二基底120,貼附於具有第一線路119之第一基底110、具有第三線路129之第二基底120或是具有第五線路139之第三基底130之其中之一者上。In the laminated printed circuit board 100, any one of the adhesive layers (101 or 102) causes the first substrate 110 having the first line 119 or the second substrate 120 having the third line 129 to be attached to the first line 119. The first substrate 110, the second substrate 120 having the third line 129, or one of the third substrates 130 having the fifth line 139.

視情況需要,可以藉由雷射製程在第一基底110的上表面111與下表面112,分別形成第一線路圖案115與第二線路圖案116。其中第二線路圖案116可包含至少一盲孔圖案103與至少一通孔圖案104。值得注意的是,通孔圖案104可在製作第一線路圖案115或第二線路圖案116其中一者時,例如製作第一線路圖案115時,直接以雷射雕刻出慣穿第一基底110的貫穿孔,而不用分兩次製作。接著,再進行類似第一實施例之後續製程,包括膠渣清理製程、導電處理製程、載體移除、電鍍等製程,便可完成具有兩層線路(第一線路119以及第二線路119’)以及通孔106的印刷電路板100。The first line pattern 115 and the second line pattern 116 may be formed on the upper surface 111 and the lower surface 112 of the first substrate 110 by a laser process, as occasion demands. The second line pattern 116 may include at least one blind via pattern 103 and at least one via pattern 104. It should be noted that the via pattern 104 can directly engrave the first substrate 110 by laser when the first line pattern 115 or the second line pattern 116 is formed, for example, when the first line pattern 115 is formed. Through the hole, without making it twice. Then, a subsequent process similar to that of the first embodiment, including a grit cleaning process, a conductive process, a carrier removal, an electroplating process, etc., can be completed to complete the two-layer circuit (the first line 119 and the second line 119'). And a printed circuit board 100 of the via 106.

本發明之印刷電路板及其製作方法並不以上述實施例為限。下文將繼續揭示本發明之其它實施例或變化形,然為了簡化說明並突顯各實施例或變化形之間的差異,下文中使用相同標號標注相同元件,並不再對重覆部分作贅述。The printed circuit board of the present invention and the method of fabricating the same are not limited to the above embodiments. The other embodiments and variations of the present invention are described in the following, and the same reference numerals will be used to refer to the same elements, and the repeated parts will not be described again.

另外,如第15圖所示,以雷射製程在本發明以先前方式所完成之印刷電路板100中形成貫穿孔150圖案,然後參考前述方式進行導電處理與電鍍製程,使貫穿孔圖案150內 填入導電材料,例如銅。然後在最外部之基底外表面,例如第二基底120或是第三基底130之外表面,分別形成一層保護層151,例如為絕緣層。之後可再進行表面處理、電性測試、成型與目視檢測,即完成本發明高密度互連印刷電路板100的製作。在其他實施例中,保護層151也可為防焊層(solder mask)。In addition, as shown in FIG. 15, a pattern of through holes 150 is formed in the printed circuit board 100 completed in the prior art by the laser process, and then the conductive processing and the plating process are performed in the manner described above to make the through hole pattern 150 Fill in a conductive material such as copper. A protective layer 151, such as an insulating layer, is then formed on the outermost substrate outer surface, such as the second substrate 120 or the outer surface of the third substrate 130, respectively. Surface treatment, electrical testing, molding, and visual inspection can then be performed to complete the fabrication of the high density interconnect printed circuit board 100 of the present invention. In other embodiments, the protective layer 151 can also be a solder mask.

由前述實施例可知,本發明利用如雷射等製程對基板挖孔,並利用電鍍製程於孔洞中形成線路圖案,再將線路化之基板互相貼合,以製作印刷電路板,因此可以減少PCB板的整體厚度,且包括金屬材料之線路具有良好的電性,降低雜訊干擾,提供良好的電氣特性與信賴性。It can be seen from the foregoing embodiments that the present invention utilizes a process such as laser to dig a hole in a substrate, and forms a circuit pattern in the hole by using an electroplating process, and then bonding the circuitized substrates to each other to form a printed circuit board, thereby reducing the PCB. The overall thickness of the board, and the circuit including the metal material has good electrical properties, reduces noise interference, and provides good electrical characteristics and reliability.

以上所述僅為本發明之較佳實施例,凡依本發明申請專利範圍所做之均等變化與修飾,皆應屬本發明之涵蓋範圍。The above are only the preferred embodiments of the present invention, and all changes and modifications made to the scope of the present invention should be within the scope of the present invention.

100‧‧‧印刷電路板100‧‧‧Printed circuit board

101‧‧‧第一黏合層101‧‧‧First adhesive layer

102‧‧‧第二黏合層102‧‧‧Second adhesive layer

103‧‧‧盲孔圖案103‧‧‧Blind hole pattern

104‧‧‧通孔圖案104‧‧‧through hole pattern

106‧‧‧通孔106‧‧‧through hole

107‧‧‧上保護層107‧‧‧Upper protective layer

108‧‧‧下保護層108‧‧‧ lower protective layer

110‧‧‧第一基底110‧‧‧First base

111‧‧‧上表面111‧‧‧Upper surface

112‧‧‧下表面112‧‧‧ lower surface

113‧‧‧第一載體113‧‧‧First carrier

114‧‧‧第二載體114‧‧‧Second carrier

115‧‧‧第一線路圖案115‧‧‧First line pattern

116‧‧‧第二線路圖案116‧‧‧second line pattern

117‧‧‧第一薄導電層117‧‧‧First thin conductive layer

118‧‧‧第二薄導電層118‧‧‧Second thin conductive layer

119‧‧‧第一線路119‧‧‧First line

119’‧‧‧第二線路119’‧‧‧second line

120‧‧‧第二基底120‧‧‧second base

121‧‧‧上表面121‧‧‧ upper surface

122‧‧‧下表面122‧‧‧ lower surface

129‧‧‧第三線路129‧‧‧ third line

130‧‧‧第三基底130‧‧‧ third base

131‧‧‧上表面131‧‧‧ upper surface

132‧‧‧下表面132‧‧‧ lower surface

139‧‧‧第五線路139‧‧‧ fifth line

150‧‧‧貫穿孔150‧‧‧through holes

151‧‧‧保護層151‧‧‧Protective layer

第1圖至第15圖繪示本發明印刷電路板的製作方法的流程示意圖,其中:第3B圖繪示雙層導電線路搭配單層導電線路;第3C圖繪示單層導電線路搭配雙層導電線路;第4C圖繪示雙層導電線路搭配單層導電線路之不同基底;第4D圖繪示單層導電線路搭配雙層導電線路之不同基底。1 to 15 are schematic flow charts showing a method of fabricating a printed circuit board according to the present invention, wherein: FIG. 3B shows a double-layer conductive line with a single-layer conductive line; and FIG. 3C shows a single-layer conductive line with a double layer. Conductive line; Figure 4C shows the two-layer conductive line with different bases of the single-layer conductive line; Figure 4D shows the single-layer conductive line with different bases of the double-layer conductive line.

100‧‧‧印刷電路板100‧‧‧Printed circuit board

101‧‧‧第一黏合層101‧‧‧First adhesive layer

102‧‧‧第二黏合層102‧‧‧Second adhesive layer

110‧‧‧第一基底110‧‧‧First base

111‧‧‧上表面111‧‧‧Upper surface

112‧‧‧下表面112‧‧‧ lower surface

119‧‧‧第一線路119‧‧‧First line

119’‧‧‧第二線路119’‧‧‧second line

120‧‧‧第二基底120‧‧‧second base

121‧‧‧上表面121‧‧‧ upper surface

122‧‧‧下表面122‧‧‧ lower surface

129‧‧‧第三線路129‧‧‧ third line

130‧‧‧第三基底130‧‧‧ third base

131‧‧‧上表面131‧‧‧ upper surface

132‧‧‧下表面132‧‧‧ lower surface

139‧‧‧第五線路139‧‧‧ fifth line

Claims (20)

一種印刷電路板的製作方法,其包括:提供一第一基底,其具有彼此平行之一上表面與一下表面,其中該上表面設有一第一載體;圖案化該第一載體與該第一基底,而於該第一基底之該上表面形成至少一第一線路圖案;進行一導電處理製程,於該第一基底之該上表面形成一第一薄導電層,而覆蓋該第一線路圖案之表面;移除該第一載體;進行一電鍍製程,而於該第一線路圖案之表面形成至少一第一線路;以及將具有該第一線路之該第一基底貼附於一線路化第二基底。A method of fabricating a printed circuit board, comprising: providing a first substrate having an upper surface and a lower surface parallel to each other, wherein the upper surface is provided with a first carrier; and patterning the first carrier and the first substrate Forming at least one first line pattern on the upper surface of the first substrate; performing a conductive processing process, forming a first thin conductive layer on the upper surface of the first substrate, and covering the first line pattern a surface; removing the first carrier; performing an electroplating process to form at least one first line on a surface of the first line pattern; and attaching the first substrate having the first line to a lined second Substrate. 如請求項1所述之印刷電路板的製作方法,其中該下表面設有一第二載體。The method of fabricating a printed circuit board according to claim 1, wherein the lower surface is provided with a second carrier. 如請求項2所述之印刷電路板的製作方法,更包含:圖案化該第二載體,而於該第一基底之該下表面形成至少一第二線路圖案;進行該導電處理製程,於該第一基底之該下表面形成該第一薄導電層,而覆蓋該第二線路圖案之表面;移除該第二載體;以及進行該電鍍製程,而於該第二線路圖案之表面形成至少一第二 線路。The method of manufacturing the printed circuit board of claim 2, further comprising: patterning the second carrier, and forming at least one second line pattern on the lower surface of the first substrate; performing the conductive processing process The lower surface of the first substrate forms the first thin conductive layer to cover the surface of the second line pattern; the second carrier is removed; and the plating process is performed, and at least one surface is formed on the surface of the second line pattern second line. 如請求項1所述之印刷電路板的製作方法,更包含:提供一第二基底,其具有彼此平行之一上表面與一下表面,其中該上表面設有一第三載體;圖案化該第三載體與該第二基底,而於該第二基底之該上表面形成至少一第三線路圖案;進行一導電處理製程,於該第二基底之該上表面形成一第二薄導電層,而覆蓋該第三線路圖案之表面;移除該第三載體;以及進行一電鍍製程,而於該第三線路圖案之表面形成至少一第三線路。The manufacturing method of the printed circuit board of claim 1, further comprising: providing a second substrate having an upper surface and a lower surface parallel to each other, wherein the upper surface is provided with a third carrier; and the third is patterned Forming at least a third line pattern on the upper surface of the second substrate; performing a conductive processing process to form a second thin conductive layer on the upper surface of the second substrate a surface of the third line pattern; removing the third carrier; and performing an electroplating process to form at least one third line on a surface of the third line pattern. 如請求項4所述之印刷電路板的製作方法,更包含:圖案化位於該第二基底之該下表面之一第四載體,而於該第二基底之該下表面形成至少一第四線路圖案;進行該導電處理製程,於該第二基底之該下表面形成該第二薄導電層,而覆蓋該第四線路圖案之表面;移除該第四載體;以及進行該電鍍製程,而於該第四線路圖案之表面形成至少一第四線路。The method of manufacturing the printed circuit board of claim 4, further comprising: patterning a fourth carrier on the lower surface of the second substrate, and forming at least one fourth line on the lower surface of the second substrate Patterning; performing the conductive processing process, forming the second thin conductive layer on the lower surface of the second substrate to cover the surface of the fourth line pattern; removing the fourth carrier; and performing the plating process, and The surface of the fourth line pattern forms at least one fourth line. 如請求項3項所述之印刷電路板的製作方法,更包含: 利用一第二黏合層來將具有該第二線路之該第一基底貼附於一線路化第三基底。The method for manufacturing a printed circuit board according to claim 3, further comprising: The first substrate having the second line is attached to a lined third substrate by a second adhesive layer. 如請求項6所述之印刷電路板的製作方法,更包含:提供一第三基底,其具有彼此平行之一上表面與一下表面,其中該上表面設有一第五載體;圖案化該第五載體與該第三基底,而於該第三基底之該上表面形成至少一第五線路圖案;進行一導電處理製程,於該第三基底之該上表面形成一第三薄導電層,而覆蓋該第五線路圖案之表面;移除該第五載體;以及進行一電鍍製程,而於該第五線路圖案之表面形成至少一第五線路。The method of manufacturing the printed circuit board of claim 6, further comprising: providing a third substrate having an upper surface and a lower surface parallel to each other, wherein the upper surface is provided with a fifth carrier; and the fifth is patterned a carrier and the third substrate, and forming at least a fifth line pattern on the upper surface of the third substrate; performing a conductive processing process, forming a third thin conductive layer on the upper surface of the third substrate, and covering a surface of the fifth line pattern; removing the fifth carrier; and performing an electroplating process to form at least a fifth line on a surface of the fifth line pattern. 如請求項7所述之印刷電路板的製作方法,更包含:圖案化位於該第三基底之該下表面之一第六載體,而於該第三基底之該下表面形成至少一第六線路圖案;進行該導電處理製程,於該第三基底之該下表面形成該第三薄導電層,而覆蓋該第六線路圖案之表面;移除該第六載體;以及進行該電鍍製程,而於該第六線路圖案之表面形成至少一第六線路。The method of manufacturing the printed circuit board of claim 7, further comprising: patterning a sixth carrier on the lower surface of the third substrate, and forming at least a sixth line on the lower surface of the third substrate Patterning; performing the conductive processing process, forming the third thin conductive layer on the lower surface of the third substrate to cover the surface of the sixth line pattern; removing the sixth carrier; and performing the plating process, and The surface of the sixth line pattern forms at least one sixth line. 如請求項1項所述之印刷電路板的製作方法,更包含:組合複數個具有該第一線路之該第一基底、複數個黏合層以及複數個該線路化第二基底以形成一疊合(stack)印刷電路板,其中任一黏合層使得具有該第一線路之該第一基底以及具該線路化第二基底其中之一者貼附於具有該第一線路之該第一基底以及該線路化第二基底其中之一者。The manufacturing method of the printed circuit board of claim 1, further comprising: combining a plurality of the first substrate having the first line, a plurality of bonding layers, and a plurality of the lined second substrates to form a stack a printed circuit board, wherein any of the adhesive layers causes the first substrate having the first line and one of the lined second substrates to be attached to the first substrate having the first line and the One of the second substrates is lined. 如請求項9項所述之印刷電路板的製作方法,其中具有該第一線路之該第一基底具有一第二線路。The method of fabricating a printed circuit board according to claim 9, wherein the first substrate having the first line has a second line. 如請求項9項所述之印刷電路板的製作方法,其中具有該第二基底具有一第三線路與一第四線路。The method of fabricating a printed circuit board according to claim 9, wherein the second substrate has a third line and a fourth line. 如請求項1或7項所述之印刷電路板的製作方法,其中該第一基底、該第二基底與該第三基底其中之一者為一軟性基底與一硬式基板其中之一者。The method of fabricating a printed circuit board according to claim 1 or 7, wherein one of the first substrate, the second substrate and the third substrate is one of a flexible substrate and a rigid substrate. 如請求項1或7項所述之印刷電路板的製作方法,其中該第一基底、該第二基底與該第三基底其中至少一者係為一聚醯亞胺(polyimide,PI)膜、一聚萘酸乙酯(polyethylene naphthalate,PEN)膜、一聚丙烯(polypropylene,PP)板或一液晶高分子聚合物(liquid crystal polymer,LCP)膜。The method of fabricating a printed circuit board according to claim 1 or 7, wherein at least one of the first substrate, the second substrate and the third substrate is a polyimide film. A polyethylene naphthalate (PEN) film, a polypropylene (PP) plate or a liquid crystal polymer (LCP) film. 如請求項1或6項所述之印刷電路板的製作方法,更包含:進行一成孔步驟,而形成一通孔以連通相鄰之該第一基底、該線路化第二基底與該線路化第三基底其中之至少兩者。The manufacturing method of the printed circuit board of claim 1 or 6, further comprising: performing a hole forming step to form a through hole to connect the adjacent first substrate, the lined second substrate, and the line At least two of the third substrates. 如請求項14項所述之印刷電路板的製作方法,更包含:進行一導通步驟,使得該通孔電連接相鄰之該第一基底、該線路化第二基底與該線路化第三基底。The manufacturing method of the printed circuit board of claim 14, further comprising: performing a conducting step, wherein the through hole electrically connects the adjacent first substrate, the lined second substrate, and the lined third substrate . 如請求項1項所述之印刷電路板的製作方法,其中該圖案化該第一載體與該第一基底之製程係藉由一雷射製程所完成。The method of fabricating a printed circuit board according to claim 1, wherein the process of patterning the first carrier and the first substrate is performed by a laser process. 如請求項1項所述之印刷電路板的製作方法,在該圖案化該第一載體與該第一基底後更包括:對該第一基底進行一膠渣清理(desmear)製程。The method of manufacturing the printed circuit board of claim 1, further comprising: performing a desmear process on the first substrate after the patterning the first carrier and the first substrate. 如請求項1項所述之印刷電路板的製作方法,其中該導電處理製程包括一化學銅製程(electroless copper deposition process)、一化學鎳製程(electroless nickel process)、一化學銀製程(immersion silver process)、一黑孔製程(blackhole process)、一黑影製程(shabow process)、一金屬觸媒製程(synthesize catalytic ink Process)、一奈米銅噴印製程(nano copper material ink-jet printing process)或一奈米銅印刷製程(nano copper material screen printing process)。The method of fabricating a printed circuit board according to claim 1, wherein the conductive processing process comprises an electroless copper deposition process, an electroless nickel process, and an immersion silver process. ), a blackhole process, a shabow process, a synthesize catalytic ink process, a nano copper material ink-jet printing process or A nano copper material screen printing process. 如請求項1,4或7項所述之印刷電路板的製作方法,其中該第一線路圖案、該第三線路圖案及該第五線路圖案分別包括至少一通孔圖案、一盲孔圖案或一埋孔圖案。The method of manufacturing the printed circuit board of claim 1, wherein the first line pattern, the third line pattern, and the fifth line pattern respectively comprise at least one via pattern, a blind hole pattern or a Buried hole pattern. 如請求項1所述之印刷電路板的製作方法,其中利用一第一黏合層來將具有該第一線路之該第一基底貼附於該線路化第二基底。The method of fabricating a printed circuit board according to claim 1, wherein a first adhesive layer is used to attach the first substrate having the first line to the lined second substrate.
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Citations (3)

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Publication number Priority date Publication date Assignee Title
TW200418150A (en) * 2003-03-11 2004-09-16 Phoenix Prec Technology Corp Multilayer laminating structure of IC packing substrate and method for fabricating the same
TW200903671A (en) * 2007-07-06 2009-01-16 Unimicron Technology Corp Structure with embedded circuit
TW201029534A (en) * 2008-12-02 2010-08-01 Panasonic Elec Works Co Ltd Method for manufacturing circuit board, and circuit board obtained using the manufacturing method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200418150A (en) * 2003-03-11 2004-09-16 Phoenix Prec Technology Corp Multilayer laminating structure of IC packing substrate and method for fabricating the same
TW200903671A (en) * 2007-07-06 2009-01-16 Unimicron Technology Corp Structure with embedded circuit
TW201029534A (en) * 2008-12-02 2010-08-01 Panasonic Elec Works Co Ltd Method for manufacturing circuit board, and circuit board obtained using the manufacturing method

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