TWI460565B - Conveyance robot device - Google Patents

Conveyance robot device Download PDF

Info

Publication number
TWI460565B
TWI460565B TW098117235A TW98117235A TWI460565B TW I460565 B TWI460565 B TW I460565B TW 098117235 A TW098117235 A TW 098117235A TW 98117235 A TW98117235 A TW 98117235A TW I460565 B TWI460565 B TW I460565B
Authority
TW
Taiwan
Prior art keywords
command
transport robot
control device
executed
robot
Prior art date
Application number
TW098117235A
Other languages
Chinese (zh)
Other versions
TW201033770A (en
Inventor
Takashi Ohki
Original Assignee
Koyo Thermo Sys Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koyo Thermo Sys Co Ltd filed Critical Koyo Thermo Sys Co Ltd
Publication of TW201033770A publication Critical patent/TW201033770A/en
Application granted granted Critical
Publication of TWI460565B publication Critical patent/TWI460565B/en

Links

Description

搬運機器人裝置Handling robot

本發明係有關於搬運機器人裝置,其具備有控制裝置及藉由與控制裝置之信號交換而執行命令的搬運機器人。The present invention relates to a transport robot apparatus including a control device and a transport robot that executes commands by exchanging signals with the control device.

在產業現場常用的搬運機器人,一般是和外部的控制裝置連接,並因應於來自控制裝置的指令而進行動作。雙方具備有通信功能,藉信號交換(例如,參照特開平8-234825號公報及特開2002-108424號公報。)而可彼此進行通信。A transport robot commonly used at an industrial site is generally connected to an external control device and operates in response to an instruction from the control device. Both of them have a communication function, and can communicate with each other by means of a signal exchange (for example, Japanese Laid-Open Patent Publication No. Hei 8-234825 and No. 2002-108424).

例如,在進行液晶玻璃基板熱處理之步驟所使用的搬運機器人,本身是單獨命令的執行機器。為了可進行連續的動作,對於在一個命令完全結束(執行結束)後回到原點位置並完全停止的搬運機器人,控制裝置有需要重複地進行信號交換,並供給下一命令之動作。For example, the transfer robot used in the step of performing heat treatment of the liquid crystal glass substrate itself is a separately commanded execution machine. In order to perform continuous operations, the control device needs to repeatedly exchange signals and supply the next command to the transport robot that returns to the home position after the completion of one command (end of execution) and stops completely.

可是,如同上述,在每當一個命令完全結束後進行信號交換而使執行複數個命令的系統中,除了複數次的信號交換需要對應的時間以外,每次回到原點位置並完全停止是浪費時間,結果,整個步驟所需時間變長。又,一般,雖然搬運機器人具有即使未完全回到原點位置亦可執行下一命令的重疊功能,但是成為每當一個命令完全結束後就進行信號交換時,無法應用此功能。However, as described above, in a system in which a command is exchanged after a command is completely completed, and a plurality of commands are executed, except that a plurality of times of signal exchanges require a corresponding time, it is a waste of time to return to the origin position and stop completely. As a result, the time required for the entire step becomes longer. Further, in general, the transport robot has an overlapping function of executing the next command even if it is not completely returned to the origin position, but this function cannot be applied every time a signal is exchanged after one command is completely completed.

鑑於該以往之問題點,本發明之目的在於提供一種可縮短整個搬運步驟所需時間之搬運機器人裝置。In view of the conventional problems, it is an object of the present invention to provide a transfer robot apparatus which can shorten the time required for the entire transport step.

本發明之搬運機器人裝置具備有控制裝置及搬運機器人,可執行和藉由與該控制裝置的信號交換所指示之命令相應的處理,於現行命令執行當中並行地讀入下一命令,並在接於現行命令之後執行。The transport robot apparatus of the present invention includes a control device and a transport robot, and can execute processing corresponding to the command instructed by the signal exchange of the control device, and read the next command in parallel during the execution of the current command, and connect Executed after the current order.

在如上述所示之搬運機器人裝置,可依序進行於現行命令執行當中並行地進行下一命令的寫入、讀入,然後再予以執行之過程,可藉一次的信號交換而連續地執行複數個命令。In the transfer robot apparatus as described above, the process of writing, reading, and then executing the next command in parallel in the execution of the current command may be sequentially performed, and the plural number may be continuously executed by one-time signal exchange. Commands.

又,亦可作成該搬運機器人僅在已從該控制裝置收到表示是連續執行複數個命令之資訊的情況,進行下一命令的讀入,在未收到該資訊的情況,僅執行現行命令就結束。若根據這種資訊,而判斷是否應讀入下一命令,可進行確實的判斷,又,在不是連續(單獨)的情況不會進行浪費的動作。Further, the transport robot may be configured to read the next command only when the information indicating that the plurality of commands are continuously executed is received from the control device, and if the information is not received, only the current command is executed. It is over. If it is judged based on such information, whether or not the next command should be read, a reliable judgment can be made, and a wasteful operation is not performed in a case where it is not continuous (separate).

又,亦可該搬運機器人具有重疊功能,在命令之執行結束時,未完全停止,就執行下一命令。在此情況,因為可藉重疊功能而在一個命令結束時尚未完全停止就執行下一命令,所以更縮短執行整個搬運步驟所需時間。Further, the transfer robot may have an overlapping function, and when the execution of the command is completed, the next command is executed without completing the stop. In this case, since the next command can be executed without the complete stop at the end of one command by the overlapping function, the time required to execute the entire carrying step is further shortened.

若依據本發明的搬運機器人裝置,因為可藉一次的信號交換而連續地執行複數個命令,所以和對每個命令進行信號交換的情況相比,縮短執行整個搬運步驟所需時間。According to the handling robot apparatus of the present invention, since a plurality of commands can be continuously executed by one-time handshake, the time required to execute the entire carrying step is shortened as compared with the case of exchanging signals for each command.

第1圖係將本發明之一實施形態的搬運機器人裝置連同周邊的裝置一起作表示的圖。這例如是用以對液晶基板進行熱處理的搬運機器人裝置。在圖中,搬運機器人裝置係藉雙臂的搬運機器人1和由PLC(可程式控制器Programmable Controller)所成之控制裝置2所構成。藉電纜3連接搬運機器人1和控制裝置2,搬運機器人1是可執行和藉與控制裝置2之信號交換所指示的命令對應的處理。Fig. 1 is a view showing a transfer robot device according to an embodiment of the present invention together with peripheral devices. This is, for example, a transfer robot device for heat-treating a liquid crystal substrate. In the figure, the transport robot is composed of a transfer robot 1 that is extended by both arms and a control device 2 that is formed by a PLC (Programmable Controller). The transport robot 1 and the control device 2 are connected by a cable 3, and the transport robot 1 is a process that can be executed by a command instructed by the handshake of the control device 2.

具體而言,首先,搬運機器人1藉由雙臂從搬入部4搬入液晶基板的工件(未圖示)。此時,例如,進行臂的伸縮或吸附的動作。接著,搬運機器人1使用雙臂的各臂,將工件分別收容於第1爐體5及第2爐體6。又,放開所收容的工件後,再取出己完成熱處理之其他的工件並返回。然後,將這些已熱處理的工件收容於冷卻部(或搬出部)7,並向下一步驟進給。Specifically, first, the transfer robot 1 carries a workpiece (not shown) of the liquid crystal substrate from the loading unit 4 by the both arms. At this time, for example, an operation of stretching or adsorbing the arm is performed. Next, the transport robot 1 uses the arms of both arms to house the workpieces in the first furnace body 5 and the second furnace body 6, respectively. Further, after the stored workpiece is released, the other workpiece that has been subjected to the heat treatment is taken out and returned. Then, these heat-treated workpieces are housed in the cooling portion (or the unloading portion) 7, and are fed in the next step.

第2圖係搬運機器人1之動作的流程圖。動作開始後,搬運機器人1首先,進行動作準備所需之既定的起始處理(步驟S1)。接著,搬運機器人1判斷是否已從控制裝置2受理信號交換(步驟S2),在未受理時依然等待受理。此外,信號交換的受理例如是根據搬運機器人1收到來自控制裝置2的閃控(Strobe)信號而成立。受理信號交換時,搬運機器人1進入命令處理(步驟S3),在其執行結束後,進行回到原點位置並完全停止等之命令結束處理(步驟S4)。Fig. 2 is a flow chart showing the operation of the transport robot 1. After the start of the operation, the transport robot 1 first performs a predetermined initial process required for the preparation of the operation (step S1). Next, the transport robot 1 determines whether or not the handshake has been received from the control device 2 (step S2), and waits for acceptance even when it is not accepted. Further, the reception of the handshake is established, for example, based on the receipt of the Strobe signal from the control device 2 by the transport robot 1. When the handshake is accepted, the transport robot 1 enters the command processing (step S3), and after the execution is completed, the command end processing such as returning to the origin position and completely stopping is performed (step S4).

第3圖係表示在第2圖之命令處理(步驟S3)的細節的流程圖(副常式)。在第3圖,搬運機器人1從控制裝置2讀入命令(步驟S31)。此外,其細節為,從控制裝置2向搬運機器人1寫入命令後,控制裝置2向搬運機器人1要求讀入,藉此,搬運機器人1執行讀入命令。然後,搬運機器人1開始執行所讀入的命令(步驟S32)。例如,若命令是「搬入」,搬運機器人1從搬入部4(第1圖)開始搬入工件。Fig. 3 is a flow chart showing the details of the command processing (step S3) in Fig. 2 (sub-family). In Fig. 3, the transport robot 1 reads a command from the control device 2 (step S31). Further, in detail, after the control device 2 writes a command to the transport robot 1, the control device 2 requests reading from the transport robot 1, whereby the transport robot 1 executes the read command. Then, the transport robot 1 starts executing the read command (step S32). For example, when the command is "loading in", the transport robot 1 carries in the workpiece from the loading unit 4 (Fig. 1).

接著,搬運機器人1判斷是否是連續要求命令,即連續地執行複數個命令的模式(步驟S33)。連續要求是控制裝置2以表示命令之單獨/連續的旗標輸出者,在進行連續動作的期間,以連續的信號(例如固定為H位準)輸出。另一方面,在命令為單獨的情況,此旗標是L位準。在無連續要求的情況(即單獨的情況),搬運機器人1在步驟S34判斷命令的執行是否已結束,根據結束而回到主常式(第2圖),進行命令結束處理(步驟S4)。Next, the transport robot 1 judges whether or not it is a continuous request command, that is, a mode in which a plurality of commands are continuously executed (step S33). The continuous request is that the control device 2 outputs a separate/continuous flag output indicating the command, and is continuously signaled (for example, fixed to the H level) during the continuous operation. On the other hand, in the case where the command is separate, this flag is the L level. When there is no continuous request (that is, in a separate case), the transport robot 1 determines in step S34 whether or not the execution of the command has been completed, and returns to the main routine (Fig. 2) based on the end, and performs a command end process (step S4).

另一方面,在步驟S33有連續要求的情況,搬運機器人1在從現行命令之執行開始後迄至結束的期間,向控制裝置2進行可受理下一命令的報告(內容為可受理下一命令的報告)(步驟S35)。在不是進行該報告的時序時,一面執行現行命令,一面等待該時序。此外,在此所指的「結束」意指僅命令之實質內容的結束,而未包含回到原點位置並完全停止。On the other hand, if there is a continuous request in step S33, the transfer robot 1 performs a report that the next command can be accepted to the control device 2 from the time of execution of the current command to the end (the content is the next command acceptable). Report) (step S35). When the timing of the report is not performed, the current command is executed while waiting for the timing. In addition, the term "end" as used herein means only the end of the substantive content of the command, and does not include returning to the origin position and completely stopping.

具體而言,一個命令包含複數個動作,例如依序進行向指定位置旋轉、上昇、使手伸長、再上昇、接受工件、吸附以及使手回位之一連串的動作。因此,搬運機器人1例如最後使手回位的動作開始,同時進行可受理下一命令的報告。Specifically, a command includes a plurality of actions, such as sequentially rotating to a specified position, ascending, elongating, re-raising, accepting a workpiece, adsorbing, and causing a series of hand returns. Therefore, the transport robot 1 starts the operation of returning the hand, for example, and simultaneously reports that the next command can be accepted.

收到該可受理下一命令的報告後,控制裝置2對搬運機器人1寫入下一命令,寫入結束後,將已寫入下一命令的通知供給搬運機器人1。因此,搬運機器人1等待從控制裝置2送來已寫入下一命令的通知(步驟S36),確認已寫入後,回到步驟S31,並讀入已寫入的下一命令。讀入後,搬運機器人1開始執行下一命令(步驟S32)。但實際的機器人動作係接在現行命令的最後動作之後執行。例如,若現在執行當中的命令是搬入,下一命令成為收容於爐。Upon receiving the report of the next command, the control device 2 writes the next command to the transport robot 1. When the writing is completed, the notification that the next command has been written is supplied to the transport robot 1. Therefore, the transport robot 1 waits for a notification that the next command has been written from the control device 2 (step S36), confirms that it has been written, returns to step S31, and reads the next command that has been written. After reading in, the transfer robot 1 starts executing the next command (step S32). However, the actual robot action is executed after the last action of the current command. For example, if the command currently being executed is moved in, the next command becomes contained in the furnace.

依此方式,可在等待一個命令之執行結束所需時間的期間,寫入下一命令,若已寫入就可讀入。即,可預約下一個執行的命令。另一方面,所讀入的「下一命令」成為「現行命令」,搬運機器人1開始執行(步驟S32)。然後,搬運機器人1在開始執行後迄至結束為止的期間,向控制裝置2進行可受理下一命令的報告(步驟S35)。在還不是進行該報告的時序時,一面執行現行命令,一面等待進行該報告的時序。然後,搬運機器人1使現行命令之最後的動作開始,同時進行可受理下一命令的報告(步驟S35)。In this way, the next command can be written while waiting for the time required for the execution of one command to end, and can be read if it has been written. That is, the next executed command can be reserved. On the other hand, the "next command" read in is "current command", and the transfer robot 1 starts execution (step S32). Then, the transfer robot 1 performs a report for accepting the next command to the control device 2 until the end of the execution (step S35). When the timing of the report is not yet being performed, the current command is executed while waiting for the timing of the report. Then, the transfer robot 1 starts the last operation of the current command and simultaneously reports that the next command can be accepted (step S35).

例如,若執行之命令的順序是A命令、B命令、C命令,則搬運機器人1在A命令的執行當中(具體而言,在最後動作開始的同時)接受B命令的寫入,寫入結束後進行讀入。但在迄至C命令寫入前是不進行的。然後,搬運機器人1接於A命令之後隨即執行B命令。又,搬運機器人1在B命令的執行當中(具體而言,最後動作開始的同時)接受C命令的寫入,寫入結束後進行讀入。如此,總是一面可預約下一命令,一面連續地處理複數個命令。在連續之複數個命令已全部執行而並無連續要求的時間點(在步驟S33的「NO」),搬運機器人1等待最後之命令的執行結束(步驟S34),結束時回到主常式(第2圖),並進行命令結束處理(步驟S4)。For example, if the order of the commands executed is the A command, the B command, and the C command, the transport robot 1 accepts the writing of the B command during the execution of the A command (specifically, at the same time as the start of the last motion), and the writing ends. Then read it in. However, it is not performed until the C command is written. Then, the handling robot 1 executes the B command immediately after the A command. Further, the transport robot 1 accepts the writing of the C command during the execution of the B command (specifically, at the same time as the start of the last operation), and performs the reading after the writing is completed. In this way, a plurality of commands can be processed continuously while waiting for the next command. When a plurality of consecutive commands have been executed but there is no continuous request ("NO" in step S33), the transfer robot 1 waits for the execution of the last command to end (step S34), and returns to the main routine at the end ( Fig. 2), and the command end processing is performed (step S4).

在如上述所示之搬運機器人裝置,藉由依序進行於現行命令執行當中並行地進行下一命令的寫入、讀入(所謂的先讀),然後執行那樣的過程,可在一次的信號交換連續地執行複數個命令。因此,和對每個命令進行信號交換的情況相比,縮短執行整個搬運步驟所需時間。In the transport robot apparatus as described above, the writing and reading of the next command (so-called pre-reading) are performed in parallel in the execution of the current command in sequence, and then the process is performed, and the handshake can be performed once. Execute multiple commands in succession. Therefore, the time required to execute the entire carrying step is shortened as compared with the case where each command is exchanged.

例如,與就從搬入迄至收容於冷卻部7為止之各命令進行信號交換的情況相較下,可縮短約2秒。For example, it can be shortened by about 2 seconds as compared with the case where signals are exchanged from the time of loading to the respective commands stored in the cooling unit 7.

又,搬運機器人1僅在已從控制裝置2收到表示是連續執行複數個命令之模式(有連續要求的旗標)的情況會進行下一命令的讀入,在未收到該資訊的情況,僅執行現行命令就結束,藉此,可進行是否應讀入下一命令之確實的判斷,又,在不是連續(單獨)的情況,不會進行浪費的動作。Further, the transport robot 1 performs the reading of the next command only when the mode indicating that the plurality of commands are continuously executed (the flag having the continuous request) has been received from the control device 2, and the information is not received. The execution of the current command is completed, whereby the determination as to whether or not the next command should be read can be made, and in the case where it is not continuous (separate), the wasted operation is not performed.

另一方面,搬運機器人1具有重疊功能。即,即使回到原點位置而尚未完全停止,亦可執行下一命令。藉此重疊功能,因為可在一個命令結束而未完全停止時執行下一命令,所以更縮短執行整個搬運步驟所需時間。例如,和對從搬入迄至收容於冷卻部7為止之各命令應進行信號交換並每次使其完全停止的情況相較下,可縮短約6秒。即,加上信號交換次數之減少所引起的縮短時,可縮短約8秒。例如,在2個爐,搬運機器人裝置之節拍時間(tact)44秒的處理量為3928片/1天時,當縮短8秒而變成36秒時,處理量成為4800片/1天,生產力提高。On the other hand, the transport robot 1 has an overlapping function. That is, even if it is returned to the origin position and has not completely stopped, the next command can be executed. By this overlapping function, since the next command can be executed when one command ends without being completely stopped, the time required to execute the entire carrying step is shortened. For example, it can be shortened by about 6 seconds as compared with the case where the commands from the loading to the cooling unit 7 should be exchanged and stopped completely every time. That is, when the shortening caused by the decrease in the number of handshakes is shortened, it can be shortened by about 8 seconds. For example, in two furnaces, when the processing time of the robotic device tact is 44 seconds, the processing amount is 3,928 pieces/one day, and when it is shortened by 8 seconds and becomes 36 seconds, the processing amount is 4,800 pieces/one day, and the productivity is improved. .

此外,在上述的實施形態省略說明,在進行緊急停止的操作之情況,搬運機器人1除了馬上停止現行命令的執行以外,還捨棄下一命令。因此,可藉緊急停止,而確實停止搬運機器人1之現在及以後的動作。In addition, in the above-described embodiment, the description is omitted. When the emergency stop operation is performed, the transfer robot 1 discards the execution of the current command and discards the next command. Therefore, the current and subsequent operations of the robot 1 can be stopped by the emergency stop.

1...搬運機器人1. . . Handling robot

2...控制裝置2. . . Control device

3...電纜3. . . cable

4...搬入部4. . . Moving in

5...第1爐體5. . . First furnace body

6...第2爐體6. . . Second furnace body

7...冷卻部(搬出部)7. . . Cooling unit (moving unit)

第1圖係本發明之一實施形態的搬運機器人裝置連同周邊的裝置一起表示的圖。Fig. 1 is a view showing a transfer robot device according to an embodiment of the present invention together with a peripheral device.

第2圖係搬運機器人之動作的流程圖。Fig. 2 is a flow chart showing the operation of the transport robot.

第3圖係表示在第2圖之命令處理(步驟S3)的細節的流程圖(副常式)。Fig. 3 is a flow chart showing the details of the command processing (step S3) in Fig. 2 (sub-family).

Claims (2)

一種搬運機器人裝置,其特徵為具備有:控制裝置;及搬運機器人,係可執行和藉由與該控制裝置的信號交換所指示之命令相應的處理,於現行命令執行當中並行地讀入下一命令,並在接於現行命令之後執行,該搬運機器人僅在已從該控制裝置收到表示是連續執行複數個命令之模式的資訊之情況,進行下一命令的讀入,在未收到該資訊的情況,僅執行現行命令就結束。 A transport robot apparatus characterized by comprising: a control device; and a transport robot capable of performing processing corresponding to a command indicated by a signal exchange with the control device, and reading the next in parallel during execution of the current command The command is executed after the current command, and the transport robot performs the reading of the next command only after receiving information indicating that the plurality of commands are continuously executed from the control device. In the case of information, it only ends when the current order is executed. 如申請專利範圍第1項之搬運機器人裝置,其中該搬運機器人具有重疊功能,在命令之執行結束時,未完全停止,就執行下一命令。The handling robot apparatus of claim 1, wherein the handling robot has an overlapping function, and when the execution of the command ends, the next command is executed without stopping completely.
TW098117235A 2009-03-04 2009-05-25 Conveyance robot device TWI460565B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009050870A JP5367416B2 (en) 2009-03-04 2009-03-04 Transfer robot device

Publications (2)

Publication Number Publication Date
TW201033770A TW201033770A (en) 2010-09-16
TWI460565B true TWI460565B (en) 2014-11-11

Family

ID=42687524

Family Applications (1)

Application Number Title Priority Date Filing Date
TW098117235A TWI460565B (en) 2009-03-04 2009-05-25 Conveyance robot device

Country Status (3)

Country Link
JP (1) JP5367416B2 (en)
CN (1) CN101823259B (en)
TW (1) TWI460565B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106625674B (en) * 2016-12-29 2019-09-27 北京光年无限科技有限公司 A kind of command processing method and robot for robot
CN106779047B (en) * 2016-12-30 2019-06-18 纳恩博(北京)科技有限公司 A kind of information processing method and device
CN110716567A (en) * 2019-10-18 2020-01-21 上海快仓智能科技有限公司 Mobile equipment and control method and control device thereof
CN114816566A (en) * 2022-04-08 2022-07-29 山东云海国创云计算装备产业创新中心有限公司 Instruction moving method, system, equipment and medium

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5219264A (en) * 1986-09-19 1993-06-15 Texas Instruments Incorporated Mobile robot on-board vision system
TW565753B (en) * 1998-04-27 2003-12-11 Digital Electronics Corp Control system, display unit, control host computer and data transmission method
JP2005341617A (en) * 2005-07-25 2005-12-08 Kyocera Corp Personal digital assistant
EP1710639A2 (en) * 2005-04-01 2006-10-11 Rockwell Automation Technologies, Inc. Industrial automation interface systems and methods

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR950005415B1 (en) * 1986-09-19 1995-05-24 텍사스 인스트루먼츠 인코포레이티드 Mobile robot system
CN101395578B (en) * 2006-02-03 2013-01-09 拉塞尔·H·菲什三世 Thread optimized multiprocessor architecture
US7984279B2 (en) * 2006-11-03 2011-07-19 Qualcomm Incorporated System and method for using a working global history register
CN101362334A (en) * 2008-09-25 2009-02-11 塔米智能科技(北京)有限公司 Intelligent robot and operation method thereof

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5219264A (en) * 1986-09-19 1993-06-15 Texas Instruments Incorporated Mobile robot on-board vision system
TW565753B (en) * 1998-04-27 2003-12-11 Digital Electronics Corp Control system, display unit, control host computer and data transmission method
EP1710639A2 (en) * 2005-04-01 2006-10-11 Rockwell Automation Technologies, Inc. Industrial automation interface systems and methods
JP2005341617A (en) * 2005-07-25 2005-12-08 Kyocera Corp Personal digital assistant

Also Published As

Publication number Publication date
CN101823259A (en) 2010-09-08
JP5367416B2 (en) 2013-12-11
TW201033770A (en) 2010-09-16
JP2010201572A (en) 2010-09-16
CN101823259B (en) 2015-01-14

Similar Documents

Publication Publication Date Title
TWI460565B (en) Conveyance robot device
JP4321631B2 (en) Transport system, transport method, and transport vehicle
JPH10308334A (en) Process control system and method for controlling data transfer therefor
JP2009289819A (en) Coating/developing apparatus, coating/developing method, and storage medium
TW393717B (en) Wafer cassette transfer system and method
JP5807337B2 (en) Robot transfer device
JPS6356747A (en) Data processor
JP4406241B2 (en) Image processing device
JPWO2003012837A1 (en) Semiconductor manufacturing equipment control system
JP3548780B2 (en) Programmable controller and control method thereof
JP5929772B2 (en) Transport system and transport method for multi-model mixed flow processing line
KR101813309B1 (en) Method for conveying object to be processed, and device for processing object to be processed
JPH10223733A (en) Left-untaken wafer detector in semiconductor manufacturing device
JP2001075932A (en) Line controller, line control method and line system
JPH04305704A (en) Robot controller
JP2523167B2 (en) Command chain controller
JP2022167677A (en) Data transfer method
JP2008065512A (en) Data processor
JP2011158927A (en) Data processor
JP2020062253A5 (en)
JPH02258914A (en) Method for operating continuous heating furnace
JPS61271555A (en) Transferring system for direct memory access
JP2021098248A (en) Control method for robot system, robot system, manufacturing method for article using robot system, control program, and recording medium
JP2020062252A5 (en)
JP2001179664A (en) Tracking method, tracking system and tracking device

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees