TWI448704B - Test device, test method and device interface - Google Patents

Description

Test device, test method and device interface

The invention relates to a test device, a test method and a device interface.

Previously, the test apparatus tested the device under test such as a central processing unit (CPU), a memory, and the like. Further, it has been proposed to include an optical interface in the device under test (for example, refer to Patent Document 1, Non-Patent Documents 1 and 2).

Patent Document 1: International Publication No. 2007-013128

Non-Patent Document 1: Ian A. Young, et al., "Optical I/O Technology for Tera-Scale Computing", IEEE Journal of Solid-State Circuits, January 2010, Vol. 45, No. 1, pp. 235- 248

Non-Patent Document 2: Hiren D. Thacker, James D. Meindl, "Prospects for Wafer-Level Testing of Gigascale Chips with Electrical and Optical I/O Interconnects", IEEE International Test Conference, 2006, 25-1

Non-Patent Document 3: Shin Masuda, et al., "Liquid-crystal microlens with a beam-steering function", APPLIED OPTICS, July 1997, Vol. 36, No. 20, pp. 4772-4778

In order to test the device under test including the optical interface, the optical signal is used as a test signal and input to the light input portion of the device under test, and it is necessary to detect the optical response signal output from the light output portion of the device under test. For the test device, precise optical axis adjustment of such light input and output is required, and the throughput of the test is lowered to cause an increase in test cost. Further, as a test method of the device to be tested including the optical interface, the test can be performed in the form of a package in which an optical fiber is mounted. However, when the performance is less than the specification value, it is necessary to discard each package, and there is a problem that the manufacturing cost increases.

In order to solve the above problems, in a first aspect of the present invention, a test apparatus and a test method for testing a device under test including an optical coupler that is perpendicular to a device surface are provided. Transmitting an optical signal in a direction, the test device includes: a substrate on which the device under test is mounted; an optical transmission path for transmitting the optical signal; and a lens portion disposed on the substrate opposite to the optical coupler, and the optical coupler is provided One of the optical signals at the end of the optical transmission path is concentrated to the other.

Further, the summary of the above invention does not recite all of the essential features of the invention. Moreover, the sub combination of these feature groups can also be an invention.

Hereinafter, the present invention will be described by way of embodiments of the invention, but the following embodiments do not limit the invention described in the claims. Furthermore, all combinations of the features described in the embodiments are not necessarily limited to the means for solving the invention.

Fig. 1 shows an example of the configuration of an interface between the test apparatus 100 and the device under test 10 of the present embodiment. The test device 100 and the analog device, such as an analog circuit, a digital circuit, a memory, and a system-on-chip (SOC), which are optical interfaces, receive the illuminating signal and the electrical signal for testing. Here, the device under test 10 includes an optical coupler 12. Moreover, the device under test 10 can also include a terminal 16.

The optical coupler 12 transmits optical signals in a direction perpendicular to the plane of the device. The optical coupler 12 is configured, for example, optically coupled to an optical transmission path or an optical circuit formed inside the device under test 10, and receives a light-emitting signal from an optical transmission path or an optical circuit outside the device under test 10. As an example, the optical coupler 12 receives a light beam that can be collected by a predetermined condensing position and an opening angle, and outputs a light beam having a predetermined opening angle and a condensing position. Alternatively, the photocoupler 12 may input parallel light incident under conditions of a predetermined condensing position and beam diameter, and output parallel light of a predetermined beam diameter.

Terminal 16 transmits an electrical signal. Terminals 16 can be solder bumps, solder joints or connectors, and the like. The terminal 16 can be one or more input terminals that transmit and receive electrical signals, and one or more output terminals.

The test apparatus 100 mounts the device under test 10 in order to receive an illumination signal and an electric signal with the device under test 10 as described above. The test apparatus 100 includes a substrate 110, an optical transmission path 120, a lens unit 130, a lens control unit 140, an optical communication unit 150, an electrical communication unit 160, a moving unit 170, and a movement control unit 180.

The device under test 10 is mounted on the substrate 110. The substrate 110 includes an adsorption portion 112 and a suction portion 113. Here, the substrate 110 may include an electrode 119 when transmitting and receiving an electrical signal to the device under test 10 .

The adsorption portion 112 suctions and adsorbs the device under test 10. The adsorption portion 112 is formed on the surface of the substrate 110 and is in physical contact with the device under test 10 to suction and adsorb the device under test 10. Further, when the adsorption unit 112 is sealed between the device under test 10 and the substrate 110, the device under test 10 can be adsorbed by suctioning the sealed space. The suction unit 113 is connected to a pump or the like to suck air or ambient gas or the like on the substrate 110 from the adsorption unit 112.

The electrode 119 is connected to the electrical communication portion 160 and is in contact with the terminal 16 of the device under test 10. The electrode 119 can be a terminal, a probe, a cantilever or a diaphragm bump or the like that is in contact with the terminal 16 value. Further, in the case where the terminal 16 is a connector, the electrode 119 may be a connector embedded in the terminal 16. The substrate 110 has, for example, an electrode 119 of the number of terminals 16 included in the device under test 10 .

The optical transmission path 120 transmits an optical signal. The optical transmission path 120 can be an optical fiber or can be an optical waveguide instead. The optical transmission path 120 transmits an optical signal from the optical communication portion 150 connected to one end, and is outputted from the other end to the lens portion 130. The optical transmission path 120 outputs an optical signal, for example, at a predetermined opening angle. Moreover, the optical transmission path 120 transmits the optical signal input from the lens portion 130 to one end to the optical communication portion 150 connected to the other end.

The lens portion 130 is provided on the substrate so as to face the photocoupler 12, and condenses light signals from one direction of the end portions of the optical coupler 12 and the optical transmission path 120 in the other direction. The lens portion 130 may be one or more optical lenses. Further, the lens portion 130 includes a zoom lens in which at least one of a focal length and a focus position is variable. Further, the lens portion 130 may include an optical lens and a zoom lens in which the focal length and the focal position are fixed. Here, the zoom lens included in the lens unit 130 may be a liquid crystal lens that controls the alignment direction of the liquid crystal according to an electric signal to change the focal length and the focus position.

Alternatively, the zoom lens may be a zoom lens using an electrical optical crystal such as potassium tantalate niobate (KTN) or lead zirconate titanate (PZT) whose refractive index changes depending on an electric signal. Alternatively, the zoom lens may be a dynamorph lens that uses an interface between liquids that do not mix with each other as a refractive surface of light, and controls the shape of the refractive surface by the pressure of the liquid. Alternatively, the zoom lens may be a zoom lens in which a polyelectrolytic gel is pressed toward an opening by a polymer actuator, and the surface of the gel is bent to become a lens. The zoom lens can control the focus by the lens control unit 140.

The lens control unit 140 controls the focus of the zoom lens included in the lens unit 130. For example, the lens control unit 140 further includes a focal length control unit 142 that aligns the focal length of the lens unit 130 to establish optical coupling, and aligns the focus position of the lens unit 130 with the surface of the optical coupler 12. Further, the lens control unit 140 further includes a focus position control unit 144 that changes the focus position of the lens unit 130 to establish optical coupling, and aligns the focus position of the lens unit 130 with a predetermined condensing light on the surface of the photocoupler 12. position. Further, when the lens unit 130 includes a lens having a fixed focal position and a moving platform for moving the lens position, the lens control unit 140 may transmit a control signal to the moving platform to align the focus position of the fixed lens with the optical coupler 12 . A predetermined concentrating position on the surface and/or on the surface of the optical coupler 12.

The optical communication unit 150 is connected to the optical coupler 12 of the device under test 10 via the optical transmission path 120 and the lens unit 130, and transmits an optical signal to and from the device under test 10. The optical communication unit 150 may be mounted on the substrate 110 or may be mounted on another substrate instead. The optical communication unit 150 converts, for example, a test signal of an electrical signal supplied to the device under test 10 into an optical signal, and converts the optical response signal received from the device under test 10 into a response signal of the electrical signal.

The electrical communication unit 160 transmits an electrical signal to and between the devices under test via the electrode 119. The electrical communication unit 160 may be mounted on the substrate 110 or may be mounted on the test device 100 as another substrate. The electrical communication unit 160 supplies power to the device under test 10, for example. Moreover, the electrical communication unit 160 can supply the device under test 10 with a clock signal and/or a test signal having a lower frequency than the optical test signal.

The moving unit 170 adsorbs and moves the device under test 10 and mounts it on the substrate 110. The moving unit 170 includes an adsorption unit 172 and a suction unit 174. The adsorption portion 172 is formed on the surface of the moving portion 170 and is in physical contact with the device under test 10 to suck and adsorb the device under test 10. The suction unit 174 is connected to a pump or the like to suck air, ambient gas, or the like from the adsorption unit 172. The moving unit 170 includes an XYZθ stage or the like, and is movable by a control signal of the movement control unit 180.

The movement control unit 180 transmits a control signal to the moving unit 170 to move the moving unit 170, and controls the relative position of the device under test 10 and the substrate 110. The movement control unit 180 can detect the relative movement position of the device under test 110 and the substrate 110 by detecting the amount of movement of the moving portion 170 by a sensor or the like. For example, in the test apparatus 100, the material of the substrate 110 or the moving portion 170 is made of glass or enamel that penetrates infrared rays, and infrared rays are irradiated to the device under test 10 from above the moving portion 170 or below the substrate 110. The movement control unit 180 can detect the transmitted light or the reflected light of the infrared ray of the device under test by the substrate 110 or the moving portion 170, thereby acquiring the relative position of the device under test 10 and the substrate 110.

Here, the substrate 110 and/or the moving portion 170 may have alignment marks to be irradiated with infrared light. The movement control unit 180 can detect the position of the substrate 110 and/or the moving portion 170 by detecting the position of the substrate 110 and/or the moving portion 170 that illuminate the alignment mark with infrared light.

Fig. 2 shows an operational flow of the test apparatus 100 of the present embodiment. The test apparatus 100 adsorbs the device under test 10 to the moving unit 170 (S200). Here, the test apparatus 100 can align the relative positions of the moving portion 170 and the substrate 110.

The movement control unit 180 transmits a control signal to the moving unit 170 to move the device under test 10 to a position mounted on the substrate 110 (S210). Since the test apparatus 100 can adjust the focus position of the lens unit 130, the focus position of the lens unit 130 is adjusted after the terminal 16 of the device under test 10 is electrically connected to the electrode 119 of the substrate 110 as an example. Therefore, the test apparatus 100 moves the device under test 10 to a position where the terminal 16 of the device under test 10 is in physical contact with the electrode 119 of the substrate 110.

Then, the test apparatus 100 causes the device under test 10 to be adsorbed on the substrate 110 (S220). Thereby, the test apparatus 100 mounts the device under test 10 on the substrate 110 while ensuring electrical connection.

The test apparatus 100 tests the electrical connection of the device under test 10 (S230). The test apparatus 100 is supplied from the electrical communication unit 160 to an electrical signal having a predetermined electrical signal, that is, a predetermined logical value or pattern such as Hi/Lo, to the terminal 16 via the electrode 119. Then, the test apparatus 100 receives the response signal output from the terminal 16 via the electrode 119 via the electrode 119, and tests the connection state of the electrical signal.

The test apparatus 100 supplies a fixed voltage as a predetermined electric signal from the electrical communication unit 160, for example, and the electrical communication unit 160 receives a voltage value of a predetermined range, thereby determining that the connection state is good. In the case where the test apparatus 100 cannot detect a good connection state, the position of the device under test 10 is changed. In other words, the test apparatus 100 releases the adsorption of the device under test 10 by the adsorption unit 112 of the substrate 110 (S240), and returns to step S210 to re-execute the mounting of the device under test 10 on the substrate 110 by the moving unit 170. . The test apparatus 100 may repeat the process of step S210 to step S230 until the test result of the electrical connection becomes good.

Here, when the test apparatus 100 repeatedly performs the mounting of the device under test 10 and the electrical connection test result does not become good, it can be determined that the device under test 10 is defective. For example, when the test apparatus 100 repeatedly performs the mounting of the device under test 10 and the electrical connection test is defective, the electrical interface of the device under test 10 is determined to be defective, and the device under test 10 is terminated. Test.

When the electrical connection test of the device under test 10 is good, the test apparatus 100 adjusts the focus of the lens unit 130 (S250). For example, the test apparatus 100 transmits a control signal from the focal length control section 142 of the lens control section 140, and aligns the focal length of the lens section 130 with the surface of the optical coupler 12. Here, the focal length control unit 142 can make the focal length of the lens unit 130 conform to a predetermined distance. The test apparatus 100 can measure and record the distance between the lens unit 130 and the photocoupler 12 in advance, and read the recorded distance to match the focal length of the lens unit 130.

Alternatively, the lens unit 130 may include a light detecting unit that detects a component of the reflected light or the scattered light on the surface of the optical coupler 12 from the optical signal output from the optical transmission path 120, and the focal length control unit 142 may The focal length is aligned in accordance with the intensity of the reflected light or the scattered light observed by the light detecting portion. For example, in the case where the lens portion 130 is aligned on the surface of the photocoupler 12, the optical signal output from the optical transmission path 120 is condensed at one point on the surface of the optical coupler 12, thus reflecting light and scattered light. The intensity becomes the strongest. Therefore, the test apparatus 100 can output a fixed-intensity light output from the optical communication portion 150 and irradiate the surface of the optical coupler 12 via the optical transmission path 120, and change the focal length of the lens portion 130 so as to conform to the surface of the optical coupler 12. The reflected or scattered light generated on the surface is the strongest focal length and fixed.

Alternatively, the lens unit 130 may include a distance meter for measuring the distance from the photocoupler 12, and the distance meter receives the reflection reflected by the surface of the optical coupler 12 by irradiating the optical coupler 12 with laser light or the like. The distance from the optical coupler 12 is observed by light, and the focal length control unit 142 can align the focal length according to the distance between the lens portion 130 and the optical coupler 12 observed by the distance meter.

The test apparatus 100 can change the focus position of the lens portion 130 on the surface of the optical coupler 12 after aligning the focal length of the lens portion 130 on the surface of the optical coupler 12 so as to be aligned on the surface of the optical coupler 12. Pre-defined concentrating position. For example, the test apparatus 100 transmits a control signal from the focus position control section 144 of the lens control section 140, and aligns the focus position of the lens section 130 with the surface of the photocoupler 12.

Here, the focus position control unit 144 detects the focus position of the lens unit 130 in a state in which the focus position of the lens unit 130 is spirally moved in a plane parallel to the lens, and detects the focus position established by the optical coupling. Alternatively, the focus position control unit 144 detects the focus position of the optical coupling by detecting the state in which the focal position of the lens unit 130 is moved in a plurality of straight lines in a plane parallel to the lens while scanning light is coupled. . Thereby, the focus position control section 144 continuously scans the focus position of the lens section 130 and aligns with a predetermined condensing position on the surface of the photocoupler 12, so that the focus position can be aligned at high speed.

Further, the focus position control unit 144 can enlarge the focus diameter of the lens unit 130, change the focus, and coarsely adjust to the vicinity of the focus position at which optical coupling can be established, and then reduce the focus diameter and finely adjust the focus position. Thereby, the focus position control unit 144 can shorten the distance for scanning on the surface of the photocoupler 12 and can align the focus position at a higher speed than before the focus diameter of the lens unit 130 is enlarged.

Here, the device under test 10 receives the optical signal incident on the optical coupler 12, and can notify the test device 100 whether the received optical signal strength is within a predetermined light intensity range by an electrical signal or an optical signal. Alternatively, the device under test 10 may detect the intensity of the optical signal received from the optical coupler 12 and notify the test device 100 of the electrical or optical signal. Alternatively, the device under test 10 transmits a portion of the optical signal received from the optical coupler 12 to the test device 100 from the optical signal. In this case, the device under test 10 may branch the optical signal received from the optical coupler 12 by a light branching coupler or the like, causing one of them to be incident to the internal optical circuit and the other to the test device 100. Alternatively, when the device under test 10 adjusts the focus of the lens unit 130, the optical signal received from the photocoupler 12 can be transmitted to the test apparatus 100 by switching with an optical switch or the like.

The test apparatus 100 can align the focus position of the lens portion 130 on the surface of the photocoupler 12 according to the optical signal irradiated to the optical coupler 12 via the lens portion 130 and according to an electric signal or an optical signal transmitted from the device under test 10. , thereby testing the optical connection (S260). For example, when the signal transmitted from the device under test 10 is an electrical signal, the electrical signal is transmitted and received using the electrical connection established up to step S230, and it is determined whether or not the focus position of the lens unit 130 can be accurately adjusted. Alternatively, in the case where the signal transmitted from the device under test 10 is an optical signal, the substrate 110 further includes a light detecting portion that detects the optical signal, and can determine whether the lens can be accurately adjusted according to the detected optical signal. The focus position of the portion 130.

The test apparatus 100 changes the focus position of the lens unit 130 in the case where the optical connection is defective. That is, the test apparatus 100 can repeat the process of step S250 to step S260 until the test result of the optical connection becomes good.

Here, when the test apparatus 100 repeatedly changes the focus position of the lens unit 130 and the optical connection test result does not become good, it can be determined that the device under test 10 is defective. For example, when the test apparatus 100 repeats the change of the focus position of the lens unit 130 for a predetermined time or number of times and the optical connection test is defective, the optical interface and/or the optical interface of the device under test 10 are determined. The relative position of the interface is bad, and the test of the device under test 10 is ended.

When the test apparatus 100 obtains a good optical connection, the connection test of the device under test 10 and the substrate 110 is completed, and the adsorption of the moving portion 170 is released (S270). According to the above example, the test apparatus 100 obtains a good optical connection and electrical connection between the device under test 10 and the substrate 110, and can mount the device under test 10 on the substrate 110 without performing precise optical axis adjustment of optical input and output. on. In turn, the test device 100 can begin the action test of the device under test 10.

In the above example, an example in which the test apparatus 100 adjusts the focal length and the focus position of the lens portion 130 to establish optical coupling has been described. Alternatively, the test apparatus 100 may previously store control information of the lens unit 130 of at least one of the established focal length and focus position, read out the stored control information, and reproduce at least one of the established focal length and focus position. Thereby, the test apparatus 100 can shorten the time for establishing optical coupling. Moreover, the test apparatus 100 can observe the accuracy and/or deviation of the condensing position of the optical coupler 12 included in the device under test 10 by using the same focal length and focus position based on the stored control information for optical coupling. .

FIG. 3 also shows a configuration example of the test apparatus 100 of the present embodiment and the device under test 10. In the test apparatus 100 of the present embodiment, the same portions as those of the test apparatus 100 of the present embodiment shown in FIG. 1 are denoted by the same reference numerals, and their description is omitted. Test device 100 and analog device, digital circuit, analog/digital hybrid circuit, memory and system level chip (SOC), etc., including device under test 10 for transmitting optical signals in a direction perpendicular to the device surface The illuminating signal and the electrical signal are received for testing.

The test apparatus 100 supplies a test signal based on a test pattern for testing the device under test 10 to the device under test 10, and determines whether the device under test 10 is excellent based on an output signal output by the device under test 10 according to the test signal. Here, the test signal supplied from the test device 100 to the device under test 10 may be an electrical signal and/or an optical signal, and the output signal output by the device under test 10 may also be an electrical signal and/or an optical signal. The test apparatus 100 further includes a signal generating unit 410, a signal receiving unit 420, and a comparing unit 430.

The signal generation unit 410 generates a plurality of test signals supplied to the device under test 10 in accordance with the test program. The signal generating unit 410 transmits a test signal to the optical communication unit 150 when the optical test signal is supplied to the device under test 10 . The optical communication unit 150 supplies the optical test signal subjected to the electro-optical conversion of the received test signal to the device under test 10. Further, the signal generation unit 410 transmits a test signal to the optical communication unit 150 when the test signal of the electrical signal is supplied to the device under test 10. The optical communication unit 150 supplies the received test signal to the device under test 10. The signal generating section 410 can generate an expected value of the response signal output by the device under test 10 according to the test signal and transmit it to the comparing section 430.

When the optical communication unit 150 receives the optical response signal output by the device under test 10 based on the test signal of the electrical signal or the optical signal, the response signal obtained by photoelectrically converting the optical response signal is transmitted to the signal receiving unit 420. Further, when the optical communication unit 150 receives the response signal of the electrical signal output by the device under test 10 based on the electrical signal or the test signal of the optical signal, the received response signal is transmitted to the signal receiving unit 420. The signal receiving unit 420 can transmit the received response signal to the comparing unit 430. Further, the signal receiving unit 420 can also record the received response signal in the recording device.

The comparison unit 430 compares the expected value received from the signal generation unit 410 with the response signal received from the comparison unit 430. The test apparatus 100 can determine whether the device under test 10 is excellent based on the comparison result of the comparison unit 430. Thereby, the test apparatus 100 can perform the test by receiving the illuminating signal and the electric signal with the device under test 10 including the optical coupler.

Further, the test apparatus 100 transmits a high-frequency signal of, for example, several hundred MHz or more which is difficult to transmit in an electric signal as an optical signal, so that the test signal and the response signal can be transmitted and received at high speed with the device under test 10. Thereby, the test apparatus 100 can also perform the test by operating the to-be-tested apparatus 10 at the actual operation speed, for example.

The present invention has been described above using the embodiments, but the technical scope of the present invention is not limited to the scope disclosed in the above embodiments. Those skilled in the art will recognize that various modifications or improvements can be added to the above-described embodiments. It is to be understood from the disclosure of the scope of the invention that such modifications or improvements may be included in the technical scope of the present invention.

It should be noted that the order of execution of the processes, the procedures, the steps, the stages, and the like in the devices, systems, programs, and methods shown in the claims, the description, and the drawings is not specifically stated as "Before", "Before", etc., and can be implemented in any order as long as the output of the previous process is not used for the latter process. The operation flow in the patent application scope, the specification, and the drawings has been described using "first," "second," and the like for convenience, but it does not mean that it must be implemented in this order.

10. . . Tested device

12. . . Optocoupler

16. . . Terminal

100. . . Test device

110. . . Substrate

112. . . Adsorption section

113. . . Pumping section

119. . . electrode

120. . . Optical transmission path

130. . . Lens unit

140‧‧‧Lens Control Department

142‧‧‧Focus Control Department

144‧‧‧Focus position control

150‧‧‧Light Communication Department

160‧‧‧Electric Communication Department

170‧‧‧moving department

172‧‧‧Adsorption Department

174‧‧‧Sucking Department

180‧‧‧Mobile Control Department

410‧‧‧Signal Generation Department

420‧‧‧Signal Reception Department

430‧‧‧Comparative Department

Fig. 1 shows an example of the configuration of an interface between the test apparatus 100 and the device under test 10 of the present embodiment.

Fig. 2 shows an operational flow of the test apparatus 100 of the present embodiment.

FIG. 3 also shows a configuration example of the test apparatus 100 of the present embodiment and the device under test 10.

10. . . Tested device

12. . . Optocoupler

16. . . Terminal

100. . . Test device

110. . . Substrate

112. . . Adsorption section

113. . . Pumping section

119. . . electrode

120. . . Optical transmission path

130. . . Lens unit

140. . . Lens control unit

142. . . Focal length control unit

144. . . Focus position control

150. . . Optical communication department

160. . . Electrical communication department

170. . . Mobile department

172. . . Adsorption section

174. . . Pumping section

180. . . Mobile control department

Claims (18)

A testing device for testing a device under test including an optical coupler, wherein the optical coupler transmits an optical signal in a direction perpendicular to a device surface, the testing device comprising: a substrate carrying the device under test; and an optical transmission path Transmitting the optical signal; the lens portion is disposed on the substrate opposite to the optical coupler to condense an optical signal from the optical coupler; and the optical communication unit is configured to pass the optical transmission path Connected to the above-described optical coupler of the device under test described above, and transmits a test light signal based on the test pattern of the device under test to the device under test. The test apparatus according to claim 1, wherein the lens portion includes a zoom lens in which at least one of a focal length and a focus position is variable. The test apparatus according to claim 2, wherein the zoom lens is a liquid crystal lens that controls an alignment direction of the liquid crystal by an electric signal to change a focal length and a focus position. The test apparatus according to claim 2, further comprising a focal length control unit that establishes optical coupling by aligning a focal length of the lens portion. The test apparatus according to claim 2, further comprising a focus position control unit that changes a focus position of the lens unit to establish optical coupling. The test device of claim 5, wherein The focus position control unit detects the focus position of the lens unit in a spiral shape in a plane parallel to the lens, and detects a state in which the light is coupled. The test apparatus according to claim 5, wherein the focus position control unit enlarges a focus diameter of the lens unit, changes a focus, and coarsely adjusts to a vicinity of a focus position at which optical coupling can be established, and thereafter reduces a focus diameter and The focus position is finely adjusted. The test device of claim 5, wherein the device under test further comprises a terminal for transmitting an electrical signal, the test device further comprising an electrical communication portion for transmitting an electrical signal to the device under test, The substrate includes an electrode connected to the electrical communication unit and in contact with a terminal of the device under test, and the test device electrically connects the terminal of the device under test to the electrode of the substrate, and then performs focus position on the lens portion Adjustment. The test apparatus according to claim 2, wherein the lens portion includes an optical lens and a zoom lens whose focal length and focus position are fixed. The test apparatus of claim 1, wherein the substrate comprises an adsorption portion that sucks and adsorbs the device under test. The test apparatus according to any one of claims 1 to 10, further comprising a moving unit that moves the device under test such that the device under test is mounted on the substrate. For example, the test device described in claim 1 of the patent scope includes The comparison unit operates to compare the optical signal with an expected value signal. The test device of claim 1, further comprising a signal generating unit configured to generate the test light signal according to a test program. The test apparatus according to claim 13, wherein the signal generating unit generates an expected value and transmits the expected value to a comparing unit. A test method for testing a device under test including an optocoupler that transmits an optical signal in a direction perpendicular to a device surface, the test method comprising: a substrate mounting stage, mounting the device under test On the substrate; in the optical transmission phase, the optical signal is transmitted through the optical transmission path; in the concentrating phase, the lens portion is disposed on the substrate opposite to the optical coupler, and the optical coupling is used by the lens portion One optical signal of one end of the optical transmission path is condensed to the other; and an optical communication phase connecting the optical transmission path to the optical coupler of the device under test and transmitting a test pattern based on the device under test The light signal is sent to the device under test. a device interface for transmitting and receiving optical signals to a device including an optical coupler, wherein the optical coupler transmits an optical signal in a direction perpendicular to a device surface, the device interface comprising: a substrate on which the device is mounted; and optical transmission a path for transmitting the optical signal; and a lens portion disposed on the substrate opposite to the optical coupler and concentrating the optical signal from the optical coupler, The lens unit is a zoom lens in which at least one of a focal length and a focus position is variable; and an optical communication unit that is connected to the optical coupler of the device via the optical transmission path and transmits a test based on the device The patterned test light signal is to the above device. The device interface of claim 16, wherein the device establishes optical coupling by adjusting at least one of a focal length and a focus position of the lens portion. The apparatus interface of claim 16 or 17, wherein the device interface pre-memorizes control information of the lens portion of at least one of the established focal length and focus position, reads the stored control information, and reproduces At least one of the focal length and the focus position established above.