TWI447252B - Method for forming tin film on the surface of a roller - Google Patents

Description

Method for forming titanium nitride film on roller surface

The present invention relates to a coating method, and more particularly to a method of forming a titanium nitride film on the surface of a roller.

At present, the optical film is formed by using a copper roller having a microstructure for engraving, and the resin carrier is embossed and cured by light, and in the process, it is difficult to prevent dust particles from falling on the surface of the roller. Since the hardness of the hard copper plating is small, when the roller continues to operate, the dust particles are driven between the resin carrier and the wheel surface, and finally scratches, resulting in poor optical quality of the film. On the other hand, since the wheel surface is made of copper, it is easy to form copper oxide when exposed to the atmosphere. When the area of the oxide layer is increased, the microstructure is destroyed. Finally, the roller is scrapped and must be re-engraved.

The roller is directly plated with a nickel layer or a titanium layer and then engraved. Although the hardness of the wheel surface is increased, the service life of the diamond tool is bound to be shortened. Therefore, the best way is to engrave the microstructure on the copper roller and then try to make a protective layer to achieve Wear resistance or oxidation resistance of the tread.

Due to the large volume of the roller, if the titanium nitride coating is performed by the general PVD method, not only the hardness is not high enough, but also due to the uniformity of the film layer, the target placement, the plasma source and the rotation of the roller may be considered. A more complex system must be recreated.

In view of the above, it is necessary to provide a method in which a thin film thickness is easily controlled and a thin film is formed on the surface of the roller to form a titanium nitride film.

A method for forming a titanium nitride film on a surface of a roller, comprising: placing a roller into a reaction chamber; vacuuming the reaction chamber; heating the roller; and introducing titanium into the reaction chamber at intervals of a pulse An organic gas and a nitrogen-containing gas are formed to form a titanium nitride film on the surface of the roller.

Compared with the prior art, the method for forming a titanium nitride film on the surface of the roller in the embodiment of the present invention is an atomic layer coating, and the thickness of the film can be controlled by controlling the number of cycles of introducing the gas, so that the thickness of the titanium nitride film can be easily controlled. The coating can be completed without affecting the pattern of the roller table; and the titanium nitride film formed by the above method has better smoothness and uniformity.

The embodiments of the present invention are further described in detail below with reference to the accompanying drawings.

The method for forming a titanium nitride film on the surface of the roller of the embodiment of the invention comprises the following steps:

a. Place the roller into the reaction chamber.

b, introducing a titanium-containing organic gas into the reaction chamber in a pulsed manner;

c, introducing an inert gas into the reaction chamber;

d, introducing a nitrogen-containing reaction gas into the reaction chamber in a pulsed manner;

e, introducing an inert gas into the reaction chamber;

f. Repeat steps b, c, d, and e until a titanium nitride film is formed on the surface of the roller.

Referring to FIG. 1, in particular, in step a, the cover 11 of the reaction chamber 20 is opened, and the roller 10 is placed on the support frame 23 provided on the base 12 to separate the roller 10 from the inner wall of the reaction chamber 20. At a certain distance, the cover 11 is covered on the base 12 to form a sealed space in the reaction chamber 20, and then the reaction chamber 20 is evacuated to a pressure in the reaction chamber 20 ranging from 1 mTorr to 100 mTorr, and the heating roller is used. The temperature is 200 to 400 degrees Celsius, preferably, the temperature is 200 to 250 degrees Celsius.

There is no strict sequence for evacuating the reaction chamber 20 and heating the roller. Preferably, the reaction chamber is evacuated and the roller is heated.

Specifically, in step b, the titanium-containing organic gas is introduced into the reaction chamber 20 through the gas inlet 21 provided in the reaction chamber 20 in a period of 10 to 20 seconds.

As the roller is exposed to the reaction chamber, titanium evaporates from the titanium-containing metal gas and chemically adsorbs on the surface of the roller to form a saturated titanium layer.

Of course, the roller can also be rotated in this step so that the titanium layer is more uniformly formed on the surface of the roller.

Titanium-containing organic gas is selected from , , , Or a mixture of at least two.

Specifically, in step c, an inert gas of hydrogen, argon, helium or a mixture of at least two gases is introduced into the reaction chamber 20 through an air inlet 21 disposed in the reaction chamber 20 to remove excess titanium. The organic gas is blown through the gas outlet 22 to purify the reaction chamber 20.

The duration of the introduction of the inert gas may be from 1 to 5 seconds.

Specifically, in step d, the nitrogen-containing reaction gas is introduced into the reaction chamber 20 through the gas inlet 21 provided in the reaction chamber 20 in a period of 10 to 20 seconds.

The nitrogen in the nitrogen-containing gas chemically reacts with the titanium chemically adsorbed in the titanium layer on the surface of the roller to form a layer of titanium nitride on the surface of the roller ( )film.

The nitrogen-containing reaction gas is selected from , Or a mixture of the two.

Of course, the roller can also be rotated in this step so that the titanium nitride film is more uniformly formed on the surface of the roller.

Specifically, in step e, an inert gas of hydrogen, argon, helium or a mixture of at least two gases is introduced into the reaction chamber 20 through an inlet 21 disposed in the reaction chamber 20 to remove excess nitrogen. The gas or its by-product reacted with the titanium-containing metal organic gas is blown out through the gas outlet 22 to purify the reaction chamber 20, thereby completing one cycle of coating.

Specifically, in the step f, since the titanium nitride film is an atomic layer film and a titanium nitride film is formed per cycle, a plurality of cycles of coating are required in order to obtain a titanium nitride film having a predetermined thickness or number of layers. .

Of course, if a thin film is required, it is not necessary to perform coating for a plurality of cycles.

The method for forming a titanium nitride film on the surface of the roller is an atomic layer coating, and the thickness of the film can be controlled by controlling the number of cycles of introducing the gas. Therefore, the thickness of the titanium nitride film can be easily controlled without affecting the pattern of the roller table. The coating is completed and the hardness of the titanium nitride film is high; and the titanium nitride film formed by the above method has better smoothness and uniformity.

In summary, the present invention has indeed met the requirements of the invention patent, and has filed a patent application according to law. However, the above description is only a preferred embodiment of the present invention, and it is not possible to limit the scope of the patent application of the present invention. Equivalent modifications or variations made by persons skilled in the art in light of the spirit of the invention are intended to be included within the scope of the following claims.

10. . . Wheel

20. . . Reaction chamber

twenty one. . . Air inlet

twenty two. . . Air outlet

twenty three. . . Support frame

11. . . Cover

12. . . Base

Figure 1 is a schematic view showing the film to be coated placed in a reaction chamber.

10. . . Wheel

20. . . Reaction chamber

twenty one. . . Air inlet

twenty two. . . Air outlet

twenty three. . . Support frame

11. . . Cover

12. . . Base

Claims (9)

A method of forming a titanium nitride film on a surface of a roller, comprising:
a, put the roller into the reaction chamber;
b, vacuuming the reaction chamber;
c, heating the roller;
d. introducing a titanium-containing organic gas and a nitrogen-containing gas into the reaction chamber at intervals of a pulse to form a titanium nitride film on the surface of the roller. A method for forming a titanium nitride film on a surface of a roller as described in claim 1, wherein the titanium-containing organic gas is selected from the group consisting of , , , Or a mixture of at least two. A method for forming a titanium nitride film on a surface of a roller as described in claim 2, wherein the nitrogen-containing reaction gas is selected from the group consisting of , Or a mixture of the two. A method of forming a titanium nitride film on a surface of a roller as described in claim 1, wherein the reaction chamber is evacuated to a pressure of between 1 mTorr and 100 mTorr. A method of forming a titanium nitride film on a surface of a roller as described in claim 1 wherein the roller is heated to 200 to 250 degrees Celsius. A method of forming a titanium nitride film on a surface of a roller as described in any one of claims 1 to 5, wherein the pulse period is 10 to 20 seconds. A method of forming a titanium nitride film on a surface of a roller as described in claim 6 wherein the roller is rotated after the roller is placed in the reaction chamber. A method for forming a titanium nitride film on a surface of a roller as described in claim 6 wherein step d comprises sequentially introducing a titanium-containing organic gas into the reaction chamber in a pulsed manner, introducing an inert gas into the reaction chamber, and pulsing The method introduces a nitrogen-containing reaction gas into the reaction chamber and introduces an inert gas into the reaction chamber. A method of forming a titanium nitride film on a surface of a roller as described in claim 8 wherein the inert gas is selected from the group consisting of hydrogen, argon, helium or a mixture of at least two.