TWI446083B - Optical filter element and method for manufacturing same, camera module and portable electronic device - Google Patents
Optical filter element and method for manufacturing same, camera module and portable electronic device Download PDFInfo
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本發明涉及一種濾光元件及其製造方法、使用該濾光元件的相機模組以及使用該相機模組的便攜式電子裝置。 The present invention relates to a filter element, a method of manufacturing the same, a camera module using the filter element, and a portable electronic device using the same.
隨著攝像技術的發展,鏡頭模組與各種便攜式電子裝置如手機、攝像機、電腦等的結合,更是得到眾多消費者的青睞,所以市場對小型化鏡頭模組的需求增加。 With the development of camera technology, the combination of lens modules and various portable electronic devices such as mobile phones, video cameras, computers, etc., has been favored by many consumers, so the market demand for miniaturized lens modules has increased.
目前小型化鏡頭模組多採用精密模具等製程製造出微型光學元件,然後與矽晶圓製成的影像感測器電連接、封裝,然後切割,得到相機模組。然而,隨著鏡頭模組向著更加微小化發展,目前所採用的製程越來越不能滿足微型光學元件的精度要求,而且製程中經常採用的黃光、微影、蝕刻等製程對環境影響大。 At present, the miniaturized lens module uses a precision mold and other processes to manufacture micro-optical components, and then electrically connects, packages, and then cuts the image sensor made of the silicon wafer to obtain a camera module. However, as the lens module is becoming more and more miniaturized, the current process is increasingly unable to meet the precision requirements of micro-optical components, and the processes of yellow light, lithography, etching, etc., which are often used in the process, have a great influence on the environment.
有鑒於此,有必要提供一種能夠更好的適應鏡頭模組向更加微小化發展的趨勢,並且製程成本低廉且環境友好的濾光元件及其製造方法、使用該濾光元件的相機模組以及使用該相機模組的便攜式電子裝置。 In view of the above, it is necessary to provide a filter element that can better adapt to the trend of miniaturization of the lens module, and that is inexpensive and environmentally friendly, a manufacturing method thereof, a camera module using the filter element, and A portable electronic device using the camera module.
一種濾光元件,其包括透明基板及設置在該透明基板上的薄膜濾 光片,其中:進一步包括金屬薄膜層,該金屬薄膜層塗覆在該薄膜濾光片表面,該金屬薄膜層的幾何中心還設置有一通光孔,該通光孔用來使外部光線照射進入該薄膜濾光片。 A filter element comprising a transparent substrate and a membrane filter disposed on the transparent substrate a light sheet, wherein: further comprising a metal film layer coated on the surface of the film filter, the geometric center of the metal film layer is further provided with a light passing hole for illuminating external light The film filter.
一種製造濾光元件的方法,其包括:提供一個透明基板;在該透明基板上塗敷至少一層陶瓷粉體,並且每層陶瓷粉體採用鐳射硬化的方式進行初步硬化;在初步硬化後的陶瓷粉體的上表面幾何中心設置UV硬化樹脂,並硬化該UV硬化樹脂;在該初步硬化後的陶瓷粉體表面通過連續濺鍍的方式鍍上金屬薄膜層,該金屬薄膜層的厚度小於或者等於固化後的UV硬化樹脂的厚度;用酒精擦除UV硬化樹脂形成通光孔;將該透明基板放入高溫環境中對該陶瓷粉體進行深度硬化,高溫環境的溫度高於採用鐳射初步硬化的溫度;將該陶瓷粉體全部去除,形成一個以該透明基板為底、該金屬薄膜層為壁的空腔;在該空腔內部以離子助鍍法形成薄膜濾光片。 A method of manufacturing a filter element, comprising: providing a transparent substrate; coating at least one layer of ceramic powder on the transparent substrate, and initially hardening each layer of ceramic powder by laser hardening; ceramic powder after preliminary hardening a UV hardening resin is disposed on the geometric center of the upper surface of the body, and the UV hardening resin is hardened; the surface of the initially hardened ceramic powder is plated with a metal thin film layer by continuous sputtering, and the thickness of the metal thin film layer is less than or equal to curing The thickness of the UV-curable resin; the UV-curing resin is wiped with alcohol to form a light-passing hole; the transparent substrate is placed in a high-temperature environment to deeply harden the ceramic powder, and the temperature in the high-temperature environment is higher than the temperature at which the laser is initially hardened. The ceramic powder is completely removed to form a cavity having the transparent substrate as a base and the metal thin film layer as a wall; and a thin film filter is formed inside the cavity by ion plating.
一種相機模組,其包括鏡頭模組及與該鏡頭模組相對設置的感測器,其中:進一步包括濾光元件,該濾光元件設置在該鏡頭模組靠近物側的端部,並且與該鏡頭模組處於同一光軸上。 A camera module includes a lens module and a sensor disposed opposite to the lens module, further comprising: a filter element disposed at an end of the lens module near the object side, and The lens modules are on the same optical axis.
一種便攜式電子裝置,其包括電子裝置本體及設置在該電子裝置本體上的相機模組,該相機模組包括濾光元件。 A portable electronic device includes an electronic device body and a camera module disposed on the electronic device body, the camera module including a filter element.
與先前技術相比,本發明所提供的濾光元件及其製造方法通過採用以陶瓷粉體作為犧牲材料,以鐳射法硬化該陶瓷粉體的製作方式,免去了在晶圓級的相機模組製程中所經常採用的黃光、微影、蝕刻等製程,使得本發明所提供的製造濾光元件的方法能夠更好的適應鏡頭模組向更加微小化發展的趨勢,製程簡單,成本低 廉且環境友好,本發明還涉及使用該濾光元件的相機模組以及使用該相機模組的便攜式電子裝置。 Compared with the prior art, the filter element and the manufacturing method thereof provided by the present invention eliminate the need for a camera module at the wafer level by using a ceramic powder as a sacrificial material to harden the ceramic powder by laser method. The process of manufacturing the filter element provided by the invention can better adapt to the trend of the lens module to be more miniaturized, the process is simple, and the cost is low. The invention is also inexpensive and environmentally friendly, and the invention also relates to a camera module using the filter element and a portable electronic device using the same.
10‧‧‧濾光元件 10‧‧‧ Filter elements
11‧‧‧透明基板 11‧‧‧Transparent substrate
12、27‧‧‧薄膜濾光片 12, 27‧‧‧ film filter
13、25‧‧‧金屬薄膜層 13, 25‧‧‧ metal film layer
14、26‧‧‧通光孔 14, 26‧‧ ‧ light hole
131、251‧‧‧氮化鉻膜層 131, 251‧‧‧ chromium nitride coating
132、252‧‧‧銅膜層 132, 252‧‧‧ copper film
133、253‧‧‧不銹鋼薄膜層 133, 253‧‧‧Stainless steel film layer
20‧‧‧透明基板 20‧‧‧Transparent substrate
21、21a‧‧‧陶瓷粉體層 21, 21a‧‧‧Ceramic powder layer
22‧‧‧鐳射頭 22‧‧‧Laser head
23、23a‧‧‧陶瓷粉體初步硬化層 23, 23a‧‧‧Preliminary hardening layer of ceramic powder
24‧‧‧UV硬化樹脂 24‧‧‧UV hardening resin
40‧‧‧電子裝置 40‧‧‧Electronic devices
30、42‧‧‧相機模組 30, 42‧‧‧ camera module
31‧‧‧濾光元件 31‧‧‧ Filter elements
32‧‧‧鏡頭模組 32‧‧‧Lens module
33‧‧‧感測器 33‧‧‧ Sensors
41‧‧‧電子裝置本體 41‧‧‧Electronic device body
圖1是本發明實施例中所提供的濾光元件的結構示意圖。 1 is a schematic structural view of a filter element provided in an embodiment of the present invention.
圖2是本發明實施例中所提供的製造濾光元件的方法的流程示意圖。 2 is a flow chart showing a method of manufacturing a filter element provided in an embodiment of the present invention.
圖3是本發明實施例中所提供的相機模組的結構示意圖。 FIG. 3 is a schematic structural diagram of a camera module provided in an embodiment of the present invention.
圖4是本發明實施例中所提供的便攜式電子裝置的示意圖。 4 is a schematic diagram of a portable electronic device provided in an embodiment of the present invention.
下面將結合附圖對本發明作進一步詳細說明。 The invention will now be described in further detail with reference to the accompanying drawings.
請參見圖1,本發明實施例所提供的濾光元件10,其包括透明基板11、薄膜濾光片12、金屬薄膜層13及通光孔14。 Referring to FIG. 1 , a filter element 10 according to an embodiment of the present invention includes a transparent substrate 11 , a thin film filter 12 , a metal thin film layer 13 , and a light passing hole 14 .
該透明基板11是玻璃基板,可以理解地,該透明基板11可以是由任何透光性材料所製成,其作用是能夠讓外部光源所發出的光線能夠穿透該透明基板11。 The transparent substrate 11 is a glass substrate. It can be understood that the transparent substrate 11 can be made of any light transmissive material, and can function to allow light emitted by an external light source to penetrate the transparent substrate 11.
該薄膜濾光片12是紅外光截止濾光片,其設置在該透明基板11上,其剖面成倒T型,可以理解地,該薄膜濾光片12還可以是紫外光截止濾光片等其他類型的薄膜濾光片,而且其可以根據實際需要而做成其他形狀,如其剖面可以是與該透明基板11同寬的長方形或者正方形地。 The thin film filter 12 is an infrared light cut filter disposed on the transparent substrate 11 and has an inverted T-shaped cross section. It can be understood that the thin film filter 12 can also be an ultraviolet cut filter or the like. Other types of thin film filters, and which can be formed into other shapes according to actual needs, such as a cross section which may be a rectangular or square shape which is the same width as the transparent substrate 11.
該金屬薄膜層13包覆在該薄膜濾光片12表面。在本實施例中,該金屬薄膜層13是多層結構,其包覆在該透明基板11側邊及薄膜濾 光片12表面,自該薄膜濾光片12表面向外依次是氮化鉻膜層131、銅膜層132及不銹鋼薄膜層133。其中,該氮化鉻膜層131是作為擋光層來使用,其可以防止外來的雜散光進入濾光元件,該銅膜層132及不銹鋼薄膜層133作為抗電磁幹擾膜來使用。可以理解地,該金屬薄膜層13也可以是單層結構,其材料也可以是具有不同功能用途的其他金屬,而且該金屬薄膜層13也可以僅僅包覆在該薄膜濾光片12表面。 The metal thin film layer 13 is coated on the surface of the thin film filter 12. In this embodiment, the metal thin film layer 13 is a multi-layer structure, which is coated on the side of the transparent substrate 11 and the membrane filter. The surface of the light sheet 12 is a chromium nitride film layer 131, a copper film layer 132, and a stainless steel film layer 133 in this order from the surface of the film filter 12. Here, the chromium nitride film layer 131 is used as a light blocking layer, which prevents external stray light from entering the filter element, and the copper film layer 132 and the stainless steel film layer 133 are used as an electromagnetic interference preventing film. It can be understood that the metal thin film layer 13 can also be a single layer structure, and the material thereof can also be other metals having different functional uses, and the metal thin film layer 13 can also be coated only on the surface of the thin film filter 12.
該通光孔14設置於與該透明基板11相對的金屬薄膜層13的幾何中心,其用來使外部光線照射進入該薄膜濾光片12。 The light passing hole 14 is disposed at a geometric center of the metal thin film layer 13 opposite to the transparent substrate 11 for irradiating external light into the thin film filter 12.
請參見圖2,本發明所提供的一種製造濾光元件的方法,其包括以下步驟。 Referring to FIG. 2, a method for manufacturing a filter element according to the present invention includes the following steps.
(1)提供一個透明基板20。 (1) A transparent substrate 20 is provided.
該透明基板20是玻璃基板。 The transparent substrate 20 is a glass substrate.
(2)在該透明基板上塗敷至少一層陶瓷粉體21,並且每層陶瓷粉體採用鐳射硬化的方式將其進行初步硬化。 (2) Applying at least one layer of ceramic powder 21 on the transparent substrate, and each layer of the ceramic powder is preliminarily hardened by laser hardening.
該陶瓷粉體21是磷酸鋁、二氧化矽與水的混合物,其採用旋轉塗佈的方式塗敷在該透明基板20上。 The ceramic powder 21 is a mixture of aluminum phosphate, cerium oxide and water, which is applied onto the transparent substrate 20 by spin coating.
將該塗敷有該陶瓷粉體層21的透明基板20放置於若干鐳射頭22下,將該陶瓷粉體層21進行初步硬化使之在該透明基板20上形成一層陶瓷粉體初步硬化層23,該鐳射硬化溫度範圍可以是[100℃,200℃],在本發明中,該鐳射硬化溫度是130℃。 The transparent substrate 20 coated with the ceramic powder layer 21 is placed under a plurality of laser heads 22, and the ceramic powder layer 21 is preliminarily hardened to form a ceramic powder preliminary hardening layer 23 on the transparent substrate 20. The laser hardening temperature range may be [100 ° C, 200 ° C], and in the present invention, the laser hardening temperature is 130 ° C.
在該陶瓷粉體初步硬化層23上採用旋轉塗佈的方法再塗敷一層該 陶瓷粉體層21,並將其鐳射硬化,其目的是為了使本發明所製作的濾光元件達到一定的高度,所以此步驟可以根據實際需要而重複進行。而且,從第二層陶瓷粉體層21開始,其鐳射硬化的範圍可以是全部陶瓷粉體層,也可以是部分陶瓷粉體層,其根據實際所要制得的濾光元件的外形來決定。例如,當濾光元件的外形是圓柱狀時,每層的陶瓷粉體層將會被全部硬化,而當濾光元件的外形呈階梯狀時,每層的陶瓷粉體層將按照需要被部分硬化,而未被硬化的部分陶瓷粉體會在塗佈下一層陶瓷粉體層之前使用純水將其清洗去除。 Applying a layer of the ceramic powder on the preliminary hardened layer 23 by spin coating The ceramic powder layer 21 is hardened by laser irradiation, and the purpose thereof is to make the filter element produced by the present invention reach a certain height, so this step can be repeated according to actual needs. Further, from the second ceramic powder layer 21, the range of laser hardening may be all ceramic powder layers, or may be a partial ceramic powder layer, which is determined according to the outer shape of the filter element to be actually produced. For example, when the shape of the filter element is cylindrical, the ceramic powder layer of each layer will be completely hardened, and when the shape of the filter element is stepped, the ceramic powder layer of each layer will be partially as needed. The hardened, partially hardened ceramic powder is cleaned and removed with pure water before the next layer of ceramic powder is applied.
在本實施例中,在該透明基板20上共塗敷了五層陶瓷粉體層,從第二層陶瓷粉體層開始,每層該陶瓷粉體21將該陶瓷粉體層的正中心施以鐳射硬化以形成陶瓷粉體初步硬化層23a,並在塗敷下一層陶瓷粉體層之前使用純水將該未被硬化的陶瓷粉體21a清洗去除。 In this embodiment, five layers of ceramic powder layers are co-coated on the transparent substrate 20. Starting from the second layer of ceramic powder layers, each layer of the ceramic powder body 21 is applied to the center of the ceramic powder layer. The hardened layer 23a of the ceramic powder is formed by laser hardening, and the unhardened ceramic powder 21a is removed by washing with pure water before the next layer of the ceramic powder layer is applied.
(3)在該陶瓷粉體初步硬化層23a的上表面幾何中心設置UV硬化樹脂24,並硬化該UV硬化樹脂24。 (3) A UV hardening resin 24 is provided on the geometric center of the upper surface of the ceramic powder preliminary hardened layer 23a, and the UV hardening resin 24 is cured.
(4)在該陶瓷粉體初步硬化層23a表面通過連續濺鍍的方式鍍上金屬薄膜層25,該金屬薄膜層25的厚度小於或者等於固化後的UV硬化樹脂24的厚度。 (4) A metal thin film layer 25 is formed by continuous sputtering on the surface of the ceramic powder preliminary hardened layer 23a, and the thickness of the metal thin film layer 25 is less than or equal to the thickness of the cured UV hardening resin 24.
在本實施例中,該金屬薄膜層25塗敷在該透明基板20側面及該陶瓷粉體初步硬化層23及23a表面,且自該陶瓷粉體初步硬化層23及23a的表面向外依次是氮化鉻薄膜層251、銅薄膜層252及不銹鋼薄膜層253,其總厚度小於或者等於該UV硬化樹脂24的厚度。其中,該氮化鉻薄膜層251是作為擋光層來使用,其可以防止外 來的雜散光進入濾光元件;銅薄膜層252及不銹鋼薄膜層253作為抗電磁幹擾膜來使用。可以理解地,該金屬薄膜層25也可以只塗敷在該陶瓷粉體初步硬化層23a表面。 In this embodiment, the metal thin film layer 25 is coated on the side surface of the transparent substrate 20 and the surface of the ceramic powder preliminary hardening layers 23 and 23a, and is sequentially outward from the surface of the ceramic powder preliminary hardening layers 23 and 23a. The chromium nitride film layer 251, the copper film layer 252, and the stainless steel film layer 253 have a total thickness less than or equal to the thickness of the UV curable resin 24. Wherein, the chromium nitride film layer 251 is used as a light blocking layer, which can prevent the outside The coming stray light enters the filter element; the copper film layer 252 and the stainless steel film layer 253 are used as an anti-electromagnetic interference film. It is to be understood that the metal thin film layer 25 may also be applied only to the surface of the ceramic powder preliminary hardened layer 23a.
(5)用酒精擦除該UV硬化樹脂24形成通光孔26。 (5) The UV-curable resin 24 is erased with alcohol to form a light-passing hole 26.
(6)將該透明基板20放入高溫環境中對該陶瓷粉體初步硬化層23及23a進行深度硬化,該高溫環境的溫度高於採用鐳射初步硬化的溫度;在本發明中,該高溫環境是由高溫爐來提供,對該陶瓷粉體初步硬化層23及23a進行深度硬化的溫度範圍是[250℃,1000℃]。在本實施例中,優選地,對該陶瓷粉體初步硬化層23及23a進行深度硬化的溫度是250℃。 (6) The ceramic substrate preliminary hardening layers 23 and 23a are deeply hardened by placing the transparent substrate 20 in a high temperature environment, and the temperature of the high temperature environment is higher than the temperature at which the laser is initially hardened; in the present invention, the high temperature environment It is provided by a high temperature furnace, and the temperature range in which the ceramic powder preliminary hardened layers 23 and 23a are hardened is [250 ° C, 1000 ° C]. In the present embodiment, preferably, the temperature at which the ceramic powder preliminary hardening layers 23 and 23a are subjected to deep hardening is 250 °C.
(7)將經過深度硬化的該陶瓷粉體硬化層23及23a全部去除,形成一個以該透明基板20為底,該金屬薄膜層25為壁的空腔50。 (7) The deep-hardened ceramic powder hardened layers 23 and 23a are all removed to form a cavity 50 having the transparent substrate 20 as a base and the metal thin film layer 25 being a wall.
通過對該陶瓷粉體初步硬化層23及23a進行深度硬化,能夠減弱該陶瓷粉體硬化層23及23a與鍍在其周圍的金屬薄膜層25之間的結合力,同時也減弱該陶瓷粉體硬化層23及23a與該透明基板20之間的結合力,使得在後續清洗製程中能夠很容易的將該陶瓷粉體硬化層23及23a全部去除,以形成一個以該透明基板20為底,該金屬薄膜層25為壁且頂端帶有通光孔26的空腔50。 By deepening the ceramic powder preliminary hardened layers 23 and 23a, the bonding force between the ceramic powder hardened layers 23 and 23a and the metal thin film layer 25 plated thereon can be weakened, and the ceramic powder can also be weakened. The bonding force between the hardened layers 23 and 23a and the transparent substrate 20 enables the ceramic powder hardened layers 23 and 23a to be easily removed in a subsequent cleaning process to form a transparent substrate 20 as a base. The metal thin film layer 25 is a cavity 50 having a light-passing hole 26 at its top end.
(8)在該空腔50內部以離子助鍍法形成薄膜濾光片27。 (8) A thin film filter 27 is formed inside the cavity 50 by ion plating.
在本實施例中,該薄膜濾光片27是紅外光截止濾光片(IR-Cut)薄膜。可以理解地,該薄膜濾光片27的類型可以根據不同的需求而變化,例如該薄膜濾光片27還可以是紫外光截止濾光片。 In the present embodiment, the thin film filter 27 is an infrared light cut filter (IR-Cut) film. It can be understood that the type of the thin film filter 27 can be changed according to different requirements. For example, the thin film filter 27 can also be an ultraviolet cut filter.
為了避免在離子助鍍的過程中將該空腔50的外層也鍍上該薄膜濾光片27,可以在步驟(7)完成之後,採用旋轉塗佈的方式將該空腔50的外層塗敷一層陶瓷粉體,然後再進行步驟(8)。待步驟(8)完成後,使用純水將塗敷在該空腔50外層的陶瓷粉體去除。 In order to avoid coating the outer layer of the cavity 50 with the thin film filter 27 during ion assist plating, the outer layer of the cavity 50 may be coated by spin coating after the step (7) is completed. A layer of ceramic powder is then subjected to step (8). After the completion of the step (8), the ceramic powder coated on the outer layer of the cavity 50 is removed using pure water.
本發明還提供一種具有該濾光元件的相機模組及使用該相機模組的電子裝置。 The invention also provides a camera module having the filter element and an electronic device using the same.
請參見圖3,本發明所提供的相機模組30,其包括濾光元件31、鏡頭模組32及感測器33。 Referring to FIG. 3 , the camera module 30 of the present invention includes a filter element 31 , a lens module 32 , and a sensor 33 .
該濾光元件31可以是上述實施例所提供的濾光元件中的任意一種。該濾光元件31設置在該鏡頭模組32靠近物側的端部,並通過UV固化樹脂與該鏡頭模組32相互固定。 The filter element 31 may be any one of the filter elements provided in the above embodiments. The filter element 31 is disposed at an end portion of the lens module 32 near the object side, and is fixed to the lens module 32 by a UV curing resin.
該鏡頭模組32包括若干鏡片,該鏡頭模組32的光軸與該濾光元件31的光軸重合。 The lens module 32 includes a plurality of lenses, and an optical axis of the lens module 32 coincides with an optical axis of the filter element 31.
該感測器33與該鏡頭模組32相對設置,外部光線照射經過該濾光元件31,然後再經過該鏡頭模組32入射到該感測器33上。 The sensor 33 is disposed opposite to the lens module 32. External light is irradiated through the filter element 31, and then incident on the sensor 33 through the lens module 32.
可以理解地,在本發明中,該鏡頭模組32及該感測器33的類型以及封裝方式可以是先前技術當中出現的任何一種。 It can be understood that, in the present invention, the type of the lens module 32 and the sensor 33 and the packaging manner may be any ones appearing in the prior art.
請參見圖4,本發明所提供的電子裝置40,其包括本體41及相機模組42,該相機模組42設置在該本體41上。 Referring to FIG. 4 , the electronic device 40 of the present invention includes a body 41 and a camera module 42 . The camera module 42 is disposed on the body 41 .
在本實施例中,該電子裝置40是手機,該相機模組42可以是上述實施例所提供的相機模組中的任意一種。 In this embodiment, the electronic device 40 is a mobile phone, and the camera module 42 can be any one of the camera modules provided in the foregoing embodiments.
綜上所述,本發明確已符合發明專利之要件,遂依法提出專利申 請。惟,以上所述者僅為本發明之較佳實施方式,自不能以此限制本案之申請專利範圍。舉凡熟悉本案技藝之人士援依本發明之精神所作之等效修飾或變化,皆應涵蓋於以下申請專利範圍內。 In summary, the present invention has indeed met the requirements of the invention patent, and has filed a patent application according to law. please. However, the above description is only a preferred embodiment of the present invention, and it is not possible to limit the scope of the patent application of the present invention. Equivalent modifications or variations made by persons skilled in the art in light of the spirit of the invention are intended to be included within the scope of the following claims.
30‧‧‧相機模組 30‧‧‧ camera module
31‧‧‧濾光元件 31‧‧‧ Filter elements
32‧‧‧鏡頭模組 32‧‧‧Lens module
33‧‧‧感測器 33‧‧‧ Sensors
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