TWI443072B - A wheel retainer and a method of manufacturing the same, and a cutter wheel holding mechanism using a wheel retainer - Google Patents

Description

Wheel holder, manufacturing method thereof and cutter wheel holding mechanism using wheel holder

The present invention relates to a wheel holder (also referred to as a cutter holder) for holding a cutter wheel when the cutter wheel is rotated for the brittle material substrate.

Generally, when the glass substrate, the ceramic substrate, the semiconductor wafer, or the like is separated, the wheel holder is mounted by the scratching device, and the cutter wheel holding the wheel holder is crimped to the brittle material substrate while engraving The predetermined line travels to form a score line. Thereafter, the substrate is separated by bending along a line to be formed by breaking a rod or the like.

The wheel holder for holding the cutter wheel is described in, for example, Patent Document 1. The use case shown in this document is to insert a shaft (tool pin) supported by a bearing portion (pin insertion hole) formed in the lower portion of the holder into the shaft hole of the cutter wheel. This cutter wheel requires high machining accuracy and long service life, so it is used for precision machining of super hard materials such as sintered diamond or super-hard alloy with excellent wear resistance. In addition, the shaft (tool pin) is also used in super hard materials with excellent wear resistance.

On the other hand, the use of tool steel in the bearing part of the lower part of the holder is inevitable when compared with parts made of super-hard materials. The rotating support portion of the cutter wheel, that is, the outer peripheral surface of the shaft or the inner surface portion of the shaft hole of the cutter wheel is also worn by the rotational friction caused by repeated use, even if the cutter wheel and the shaft are formed of superhard material, and finally It will still exceed the tolerance. If there is a gap between the shaft hole of the bearing portion or the cutter wheel and the shaft due to wear due to wear, the verticality of the cutter wheel is broken and the scribe line cannot be formed with high precision.

Patent Document 1: Japanese Laid-Open Patent Publication No. Hei 9-188534 (Fig. 15, etc.)

In order to solve the above problems, in order to reduce the problem caused by such wear, the cutter wheel holding mechanism of the wheel holder shown in Fig. 8 is used for the product.

This wheel holder is constituted by a pair of right and left holder members 21 that are joined by a joint bolt 20. A space in which the cutter wheel A is disposed is formed below the holder member 21, and the left and right support portions 22 are provided through the space. The left and right support portions 22 are provided with tool pin insertion holes 23 that are arranged on a straight line so as to coincide with each other. Further, a super-hard material (sintered diamond or super-hard alloy) having a pin hole 24 (slightly larger than the pin insertion hole 23) is brazed to the opening portion of the pin insertion hole 23 on the opposite inner side surface of the support portion 22 The ring body 25). The cutter wheel A, which is made of a super-hard material between the right and left ring bodies 25, is disposed in a slight contact state and supported by the cutter pin 26.

The cutter pin 26 is also made of a super-hard material, and is inserted into and supported by the pin insertion hole 23 of the right and left support portions 22 as a pin hole 24 penetrating the ring body 25, and one end thereof is such that a pin insertion hole 23 is thinner ( The small-diameter hole 27 is fixed, and the other end is fastened to the outside of the pin insertion hole 23 on the other side by a washer (cover) 29 supported by the screw 28 to prevent the pull-out.

As described above, by bringing the ring body 25 made of a super-hard material into contact with the left and right side faces of the cutter wheel A, the perpendicularity of the cutter wheel A is increased and the wear of the rotary support portion is suppressed to maintain the rotation accuracy of the figure. In addition, even if there is a gap between the inner surface of the shaft hole of the cutter wheel A and the outer peripheral surface of the cutter pin 26, the verticality of the cutter wheel A can be maintained, thereby extending the exchange cycle of the cutter wheel once set. It can also extend the exchange period of the holder itself.

Further, when the cutter wheel A is exchanged, the washer 29 is removed, and the tool pin 26 is pushed out by pressing the rod of the small diameter from the outer exposed surface of the small diameter hole 27 formed at the end of the pin insertion hole 23 of one side, The cutter wheel A can be taken out.

However, the above-described structure of the wheel holder is very effective in maintaining the rotation accuracy of the cutter wheel for a long period of time, but the construction thereof is very complicated and the processing cost is increased.

7(a) to (e) show the manufacturing steps. When the wheel holder is assembled, as shown in FIGS. 7(a) and 7(b), the inner side surface of the support portion 22 of the holder member 21 divided to the left and right is formed in the opening portion of the pin insertion hole 23. The ring body 25 of the super-hard material of the pin hole 24 is brazed in a state in which the axis of the pin insertion hole 23 coincides with the axis of the pin hole 24. This operation is such that the outer diameter (about 3 mm) of the ring body 25 or the diameter of the pin insertion hole 23 (about 0.8 mm) is very small and requires precision so that the hard surface (opening surface of the pin insertion hole 23) is exposed to the outside. It is necessary, therefore, to divide the wheel holder into two holder members 21.

Next, as shown in FIG. 7(c), the left and right holder members 21 are combined and joined by bolts 20. At this time, the adjustment of the width of the cutter wheel A to which the interval L between the left and right ring bodies 25 is fitted is limited to the tolerance. That is, when the interval L is exceeded from the allowable tolerance, the locked bolt 20 is removed and divided into the left and right holder members 21, and the inner side of the holder members 21 abutting each other when locked (the left and right sides are retained) After the joint surface of the member 21 is attached, the bolts 20 are combined to confirm whether the adjustment of the interval L is smoothly completed. Typically, this series of jobs is repeated until the interval L enters the tolerance.

Next, as shown in Fig. 7(d), the pin gauge 30 is inserted into the left and right pin insertion holes 23 and the pin holes 24 of the ring body 25 to confirm the straightness, and the wheel holder of Fig. 7(e) is completed.

As described above, in the production of the wheel holder, there are many processing steps and adjustment steps, and the troublesome and troublesome work is necessary, so that it takes time and high manufacturing cost.

Further, the prior art described above also has the following problems. That is, as long as the ring body 25 blocks a part of the pin insertion hole 23, the rotation, wear, and life of the tool pin 26 are significantly adversely affected. Therefore, as shown in Fig. 8, the diameter of the pin hole 24 of the ring body 25 is as shown in Fig. 8. It is formed to be slightly larger than the pin insertion hole 23. As a result, the distance from the open end of the pin insertion hole 23 supported by the cutter pin 26 to the point at which the cutter pin 26 supports the pin insertion hole 23 (specifically, the distance corresponding to the wall thickness of the ring body 25) is in this portion. Since the cutter pin 26 is in non-contact with the ring body 25, when the cutter wheel A has an upward force during the crimping, the moment acting on the tool pin 26 becomes larger corresponding to the distance, and the wear of the cutter pin 26 is accelerated. The cause.

In view of the above problems, first, the present invention aims to provide a reduction in the manufacturing steps and a reduction in the cost of the drawings, while maintaining the high rotation accuracy of the cutter wheel and extending the service life of the wheel holder and the manufacturing method thereof. .

Further, the second aspect of the present invention is to provide a small wheel holder and a manufacturing method which can reduce the wear of the tool pin which is accelerated by the influence of the moment generated corresponding to the wall thickness of the ring body 25.

In order to solve the above problems, the method for manufacturing a wheel holder according to the present invention is a method for manufacturing a wheel holder, which is provided with a groove formed to be formed in a downward opening of the lower storage cutter wheel and supported by the groove. a holder member that forms a cylindrical mounting hole that penetrates the left and right support portions, and a cylindrical body that is formed of a superhard material in the cylindrical mounting hole is mounted in a cylindrical body that crosses the groove and penetrates the left and right support portions a wire electrical discharge machining process from the lower side of the cylindrical body to the slit of the shaft, and processing the pin insertion hole through the pin insertion hole of the axial portion of the cylinder after the slit; The intermediate portion of the cylindrical body of the transverse groove is formed by a gap forming step of processing the gap between the storage cutter wheels.

Here, the term "line electric discharge machining" refers to a method in which a thin wire is used as a tool electrode, and the wire is moved so as to draw a two-dimensional contour shape, thereby discharging a hot melt material and cutting the contour as a wire saw. Since the wire discharge machining system can be processed as long as the workpiece is made of a conductive material, it can be applied to precision machining of a metal holder body such as tool steel.

The so-called superhard material, in particular, refers to sintered diamond or super hard alloy. These are based on materials with excellent wear resistance.

In the manufacturing method of the wheel holder of the present invention, the pin insertion holes of the left and right cylinders formed by cutting the intermediate portion of the cylinder (the portion exposed at the groove) are simultaneously processed by one line of the wire electric discharge machine, so It can be completely formed on the straight line, and the machining accuracy such as the straightness of the left and right pin insertion holes can be improved, and the rotation precision of the cutter wheel which is inserted into the pin insertion hole of the pin insertion hole can be improved, and the wear of the rotary support portion can be suppressed.

In addition, the pin insertion hole for carrying the cutter pin covers the entire length of the cylinder made of a super-hard material, so that the load is substantially uniformly received by the entire cylinder, and the inserted tool pin is stably maintained, so that the load resistance can be further improved.

Further, there is no part corresponding to the ring body, and the distance from the point where the tool pin is supported by the cylinder to the point at which the tool pin supports the cutter wheel is small enough to be negligible, so that the moment for accelerating the wear hardly occurs.

In the above invention, the wire electric discharge machining step may be performed in a continuous series of operations simultaneously with the processing of the outer contour of the lower portion of the holder member.

In this way, by the wire electric discharge machining, the machining of the pin insertion hole from the lower surface of the cylinder to the axial center portion of the through cylinder is performed in parallel with the contour of the lower portion of the processing holder member, thereby reducing the number of manufacturing steps. , the cost of the map can be reduced.

(means and effects to solve other problems)

Further, from another viewpoint, the wheel holder of the present invention is formed by the above-described manufacturing method, and is formed in a groove that is opened downward in the lower storage cutter wheel and a support portion that is opposed to the left and right via the groove. The holder member is formed with a cylindrical mounting hole penetrating the left and right support portions, and a cylindrical body made of a super-hard material is attached to the cylindrical mounting hole so as to cross the groove and penetrate the left and right support portions; a slit of the lower surface of the cylindrical body toward the axial center, a pin insertion hole penetrating the axial center of the cylindrical body after the slit, and a middle portion of the cylindrical body of the transverse groove is cut between the grooves to form a slit The gap between the cutter wheels.

According to the wheel holder, the left and right support portions are integrated, so that the number of parts can be reduced, and the pin insertion holes of the left and right cylinders after the middle portion of the cylinder is cut are processed by the wire discharge machining at the same time, so The line is correctly formed on the line to improve the machining accuracy such as straightness. In addition, the pin insertion hole for carrying the cutter pin covers the entire length of the cylinder made of a super-hard material, so that the load is substantially uniformly received by the entire cylinder, and the inserted tool pin is stably maintained, so that the load resistance can be further improved.

Further, there is no part corresponding to the ring body, and the distance from the point where the tool pin is supported by the cylinder to the point at which the tool pin supports the cutter wheel is small enough to be negligible, so that the moment for accelerating the wear hardly occurs.

Further, from another viewpoint, the cutter wheel holding mechanism of the present invention is a cutter wheel holding mechanism which is constituted by a cutter wheel and a wheel holder holding the cutter wheel, wherein the wheel holder is formed in the lower portion. a cylindrical mounting hole that penetrates the left and right support portions, and a cylindrical mounting hole that penetrates the right and left support portions, is formed in a groove that is downwardly opened by the cutter wheel, and is formed of a superhard material. The cylindrical body is attached to the support portion that crosses the groove and penetrates the left and right sides; and a pin insertion hole that penetrates the slit from the lower surface side of the cylindrical body toward the axial center and penetrates the axis of the cylindrical body after the slit is formed by wire electric discharge machining, Further, a gap in which the cutter wheel is accommodated is formed in the middle portion of the cylindrical body of the transverse groove between the grooves; the cutter wheel is disposed in a gap of the wheel holder; and the pin insertion hole of the cylindrical body is inserted through the hole The tool pin made of a hard material is supported by the cutter pin in a state where the cutter wheel contacts the end faces of the left and right cylinders in the groove; and further, the cover is formed on the outer side of the left and right support members. ; Supported by the mounting hole in the housing cover, both end portions of the cutter pin to prevent blockage of the pull-out tool pin.

According to the wheel holding mechanism, in addition to the above-described characteristics of the wheel holder, since the outer side of the left and right support members are supported by the outer cover mounting hole outer cover, the both ends of the cutter pin are blocked to prevent the cutter pin from being pulled out. In addition, when the cutter wheel is to be exchanged, it is easy to remove the cover and remove the cutter pin.

Hereinafter, the details of the processing method of the present invention will be described in detail based on the drawings showing the embodiments thereof.

Fig. 1 is a perspective view showing a wheel holder W manufactured by the manufacturing method of the present invention, and Fig. 5(d) which will be described later is a cross-sectional view thereof. In this wheel holder W, a holder 1 having a downward opening having a storage cutter wheel A, which will be described later, is provided, and a holder member 3 having a support portion 2 opposed to the left and right sides of the groove 1 is provided. A cylindrical body 4 (partially cut) made of a superhard material (sintered diamond or super hard alloy) is embedded in the support portion 2 through the support portion 2. Further, a pin insertion hole 9 is formed by wire electric discharge machining on the axial portion of the cylindrical body 4.

The steps of the manufacturing method of the present invention will be described below based on Figs. 2 to 5 .

First, as shown in FIG. 2 and FIG. 5(a), a groove 1 for accommodating the downward opening of the cutter wheel A is formed in the lower portion, and a metal such as tool steel having the support portion 2 opposed to the groove 1 is formed. The holder member 3 is held. In the holder member 3, the cylindrical mounting hole 5 that penetrates the left and right support portions 2 is previously processed, and the screw hole 6 of the washer that functions as a cover for preventing and removing the cutter pin to be described later is attached. W is mounted on the mounting hole 7 of the scribe head (not shown).

Next, as shown in Fig. 5 (b), the cylindrical body 4 made of a super-hard material is inserted into the cylindrical mounting hole 5 of the holder member 3, and then fixed by brazing.

Thereafter, the holder member 3 is placed on the stage as shown in Fig. 3, and the holder member 3 is moved by causing the line 8a of the wire electric discharge machine 8 to travel along the locus R shown by the arrows of Figs. 3 and 4. The outer contour is machined to the desired shape. At this time, if the slit S from the lower surface of the cylinder 4 to the axis of the cylinder 4 is machined, then the pin insertion hole 9 of the through-axis is machined in a series of operations so as to be wound around the axis of the cylinder 4. It is ideal for efficient processing (see Fig. 1 and Fig. 5(c)).

Further, since the diameter of the cutter wheel A used for the cutter wheel A is used to adjust the distance between the pin insertion hole 9 and the lowermost end of the holder member 3, the lower portion of the holder member 3 and the lower peripheral surface portion of the cylinder 4 are cut off correspondingly. The outer contour of the holder member 3 has a desired shape. The shape of the outer shape of the holder member 3 is not particularly limited. However, in order to make the leading edge of the blade easy to observe and the structure simple, the lower portion of the cylinder 4 is a horizontal plane as shown in FIG. 4, and is close to the left and right ends of the holder member 3. Ideal for inclined surfaces.

Next, by cutting the intermediate portion of the cylindrical body 4 of the transverse groove 1 between the grooves 1 with a diamond cutter or the like that matches the width of the width of the cutter wheel A, the gap 10 of the storage cutter wheel A is machined, as shown in Fig. 5 ( d) and the wheel holder W shown in FIG. In this process, although the width of the gap 10 must be limited to the tolerance corresponding to the width of the cutter wheel A, the cylinder 4 is machined, and the machining can be performed at the same time by directly measuring the gap between the gap gauges. It can be done simply.

The pin insertion hole 9 which is obtained by the above-mentioned wheel holder W is processed simultaneously by one line 8a of the wire electric discharge machine 8, so that it can be correctly formed on the straight line and the left and right pin insertion holes 9 can be improved. Processing accuracy such as true straightness. Further, the pin insertion hole 9 for carrying the cutter pin 12 covers the entire length of the cylinder 4 made of a super-hard material, so that the wear resistance or load resistance of the inserted tool pin 12 can be further improved.

The wheel holder W of the production is shown in Fig. 5(e), and the cutter wheel A made of superhard material and the pin insertion hole 9 and the cutter wheel A of the cylinder 4 are arranged by the gap 10 between the left and right cylinders 4. The pin hole 11 is inserted into the tool pin 12 made of super-hard material to support the cutter wheel A. The size of the gap 10 is set such that the end faces of the cylinders 4 which are left and right at this time slightly contact the left and right sides of the cutter wheel A.

Thereafter, as shown in FIG. 6, the cutter wheel holding mechanism C to which the washer 14 is attached by the screw 13 is completed on the outer side surfaces of the left and right support members 2. Thereby, both ends of the cutter pin 12 are blocked to prevent the cutter pin from being pulled out. Further, when the cutter wheel A is to be exchanged, it is easy to remove the washer 14 and take out the cutter pin 12.

Further, since the side surface of the cutter wheel A is in contact with the end faces of the left and right cylindrical bodies 4, the perpendicularity of the cutter wheel A is increased, and the wear of the rotary support portion can be suppressed. In addition, even if there is a gap between the inner surface of the shaft hole of the cutter wheel A and the outer peripheral surface of the cutter pin 12, the verticality of the cutter wheel A can be maintained, and the service life of the cutter wheel A can be prolonged.

The present invention has been described with reference to the preferred embodiments of the present invention. However, the present invention is not necessarily limited to the embodiments described above, and may be appropriately modified or changed without departing from the scope of the invention.

[Industrial availability]

The present invention is applicable to a wheel holder for holding a cutter wheel and a method for manufacturing the same when used for forming a scribe line on a glass substrate, a ceramic substrate, or a semiconductor wafer.

A. . . Knife wheel

C. . . Cutter wheel retention mechanism

R. . . Line movement track

W. . . Wheel holder

1. . . groove

2. . . Support department

3. . . Hold member

4. . . Cylinder

6. . . Screw hole (cover mounting hole)

9. . . Pin insertion hole

10. . . gap

12. . . Tool pin

14. . . Washer (cover)

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing an embodiment of a wheel holder of the present invention.

Fig. 2 is a perspective view showing the first stage of the manufacturing steps of the wheel holder of the present invention.

Figure 3 is a perspective view showing the second stage of the manufacturing steps of the wheel holder of the present invention.

Fig. 4 is an enlarged plan view showing a line trajectory of wire electric discharge machining.

Figure 5 is a cross-sectional view showing the steps of manufacturing the wheel holder of the present invention in stages.

Fig. 6 is a perspective view showing a cutter wheel holding mechanism in which a wheel holder of the present invention is mounted with a cutter wheel.

Fig. 7 is a cross-sectional view showing the steps of manufacturing the conventional wheel holder in stages.

Fig. 8 is a cross-sectional view showing a conventional wheel holder to which a cutter wheel is attached.

2. . . Support department

3. . . Hold member

4. . . Cylinder

8. . . Wire electric discharge machine

8a. . . line

R. . . Trajectory

Claims (4)

A method for manufacturing a wheel holder, wherein a holder for forming a downwardly opening groove of a lower storage cutter wheel and a holder member that faces the right and left support portions via the groove are formed, and a cylindrical body that penetrates the left and right support portions is formed a hole in which the cylindrical body formed of a super-hard material is mounted as a cylindrical body mounting step of traversing the groove and passing through the left and right support portions in the cylindrical mounting hole; and wire-cut machining from the lower side of the cylindrical body to the axial center a slit, and a wire electric discharge machining step of the pin insertion hole penetrating through the axial portion of the cylinder after the slit; cutting the intermediate portion of the cylindrical body of the transverse groove between the grooves to process the gap of the storage cutter wheel The gap forming step is constituted. The method of manufacturing a wheel holder according to the first aspect of the invention, wherein the wire electric discharge machining step is performed in a continuous series of operations simultaneously with the processing of the contour of the lower portion of the holder member. a wheel holder having a cylindrical mounting hole through which the left and right support portions are formed in a groove formed in a downwardly opening groove of the lower storage cutter wheel and a support portion that is opposed to the left and right via the groove; The cylindrical mounting hole is mounted with a cylindrical body made of a super-hard material so as to traverse the groove and penetrate the left and right support portions; a slit formed from the lower surface side of the cylindrical body to the axial center is formed by wire electric discharge, and penetrates through the slit The pin of the cylindrical body is inserted into the hole, and a gap between the groove is formed by cutting the intermediate portion of the cylindrical body of the transverse groove between the grooves. A cutter wheel holding mechanism comprising a cutter wheel and a wheel holder holding the cutter wheel, wherein the wheel holder is formed in a groove formed in a downward opening of the lower storage cutter wheel, and is opposed to the groove The holder member of the left and right support portions is formed with a cylindrical mounting hole penetrating the left and right support portions, and a cylindrical body made of a super-hard material is attached to the cylindrical mounting hole so as to cross the groove and penetrate the left and right support portions; The wire electric discharge machining forms a slit from the lower surface side of the cylindrical body toward the axial center, a pin insertion hole penetrating the axial center of the cylindrical body after the slit, and further, the middle of the cylindrical body which cuts the transverse groove between the grooves a gap for accommodating the cutter wheel is formed in the portion; the cutter wheel is disposed in a gap of the wheel holder; and a cutter pin made of a super-hard material is inserted into the pin insertion hole of the cylindrical body, and the cutter wheel contacts the groove in the groove The end surface of the cylindrical body is supported by the cutter pin; further, the outer cover mounting hole is formed on the outer side of the left and right support members; and the outer cover is supported by the outer cover mounting hole to block the cutter The opposite ends of the pin and prevents pull-out tool.