TWI436869B - Transfer machine - Google Patents
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- TWI436869B TWI436869B TW97141621A TW97141621A TWI436869B TW I436869 B TWI436869 B TW I436869B TW 97141621 A TW97141621 A TW 97141621A TW 97141621 A TW97141621 A TW 97141621A TW I436869 B TWI436869 B TW I436869B
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Description
本發明係關於所謂雙腕多關節式之移載機，特別是關於即使縮短臂或叉仍可達成必要之移載行程，使移載機小型輕量且低價格，且又不須旋轉動作即可在前後之棚進出的移載機。The invention relates to a so-called double-wrist multi-joint type transfer machine, in particular to the fact that even if the arm or the fork is shortened, the necessary transfer stroke can be achieved, so that the transfer machine is small, lightweight and low in price, and does not need to rotate. The transfer machine can be accessed in the front and rear sheds.
以往在潔淨室內進行液晶等大形基板之搬送時，作為其移載機係使用例如雙腕多關節式之移載機。Conventionally, when a large-sized substrate such as a liquid crystal is transported in a clean room, a transfer device such as a double-wound multi-joint type is used as the transfer machine.
該移載機係如第10圖~第13圖所示，左右配設有1對可屈伸地連結著的第1臂1及第2臂2，第1臂1的基部各自連接在驅動軸3，並以第2臂2的前端部支撐叉4，利用各臂1、2的屈伸使叉4進退。As shown in FIGS. 10 to 13 , the transfer device is provided with a pair of first arm 1 and second arm 2 that are flexibly connected to each other, and the bases of the first arms 1 are respectively connected to the drive shaft 3 . The fork 4 is supported by the front end portion of the second arm 2, and the fork 4 is advanced and retracted by the flexion and extension of each of the arms 1, 2.
且，該移載機為了防止第2臂2與棚互相干涉，而將叉4設成長形且支撐其後端部，為了收納該長形叉4，如第13圖所示，各臂1、2在收縮時被折疊成反轉到伸長側的相反側為止。In order to prevent the second arm 2 and the shed from interfering with each other, the transfer machine is formed in a long shape and supports the rear end portion thereof. To accommodate the elongated fork 4, as shown in Fig. 13, each arm 1 2 is folded to be reversed to the opposite side of the extension side when contracted.
因此，在前後的棚進出時，移載機必須旋轉而必須有旋轉機構和旋轉直徑長度的空間，因此有移載機大型化且重量增加、和前後的棚之間隔變大儲存處的寬度變大之問題。Therefore, when the front and rear sheds are in and out, the transfer machine must be rotated and there must be a space for the rotating mechanism and the length of the rotating diameter. Therefore, the transfer machine is enlarged and the weight is increased, and the interval between the front and rear sheds becomes larger. Big problem.
且，像這樣地移載機必須旋轉、移載機的行程較長，因此也有動作時間變長的問題。Further, since the transfer machine has to be rotated in this way and the stroke of the transfer machine is long, there is a problem that the operation time becomes long.
本發明係鑑於上述習知之移載機所具有的問題而發明者，其目的在於提供即使縮短臂或叉仍可達成必要之移載行程，使移載機小型輕量且低價格，且又不須旋轉動作即可在前後之棚進出，而可縮短動作時間之移載機。The present invention has been made in view of the problems of the conventional transfer machine described above, and an object of the present invention is to provide a transfer case that can achieve a necessary transfer stroke even if the arm or the fork is shortened, so that the transfer machine is small, lightweight, and low in price, and does not It is necessary to rotate the movement to move in and out of the front and rear sheds, and to shorten the movement time of the transfer machine.
為了達成上述目的，本發明之移載機係左右配設1對可屈伸地連結著的第1臂及第2臂，第1臂的基部係連接在各驅動軸，並以第2臂的前端部支撐叉，利用各臂的屈伸使叉進退，其特徴為：在第2臂的前端部配設齒輪，且在叉設有在第2臂的內側與各齒輪嚙合之1對進退方向的齒條設。In order to achieve the above object, the transfer machine of the present invention is provided with a pair of first and second arms that are flexibly extendable to the right and left, and the base of the first arm is connected to each of the drive shafts, and the front end of the second arm is connected The support fork is configured to extend and retract the fork by the flexion and extension of each arm, and is characterized in that a gear is disposed at a distal end portion of the second arm, and a pair of teeth in the forward and backward directions that mesh with the respective gears on the inner side of the second arm are provided in the fork. Article design.
此外，其中所說的叉係載置工件(本說明書中包含收容工件的匣盒)的移載機之意。Further, the said fork is intended to carry a workpiece (the present invention includes a cassette for accommodating a workpiece).
於該情形下，在第2臂的前端部固定設置齒輪，且可隨著配設臂的揺動一體地旋轉。In this case, the gear is fixedly provided at the front end portion of the second arm, and can be integrally rotated in accordance with the sway of the arrangement arm.
且，將第1臂和第2臂的收縮後停止位置設在與叉的進退方向形成大致直角之位置，並在該停止位置使齒輪位於叉的進退方向中心附近之位置。Further, the post-shrink stop position of the first arm and the second arm is set at a position that is substantially perpendicular to the advancing and retracting direction of the fork, and the gear is placed at a position near the center of the fork in the advancing and retracting direction at the stop position.
且，使齒條可左右位移地支撐在叉。Moreover, the rack is supported on the fork so as to be displaceable left and right.
且，將用於確認叉上工件之有無的光感測器配設在移載機本體側，並可將用於反射光感測器之光的反射板設在叉側。Further, a photo sensor for confirming the presence or absence of the workpiece on the fork is disposed on the side of the transfer machine body, and a reflection plate for reflecting the light of the photo sensor is provided on the fork side.
根據本發明之移載機，在左右配設1對可屈伸地連結著的第1臂及第2臂，第1臂的基部係連接在各驅動軸，並以第2臂的前端部支撐叉，利用各臂的屈伸使叉進退之移載機中，藉由將第2臂的前端部配設在齒輪，且在第2臂的內側將嚙合在各齒輪的1對進退方向之齒條設在叉的方式，當臂屈伸使叉前進時，藉由配設在第2臂的前端部之齒輪，可透過齒條使叉在前方滑行移動，藉此，即使縮短臂或叉仍可達成必要的移載行程，可縮短動作時間之外，並且可使移載機小型輕量且低價格。According to the transfer machine of the present invention, a pair of the first arm and the second arm that are flexibly connected are disposed on the right and left sides, and the base of the first arm is coupled to each of the drive shafts, and the fork is supported by the distal end portion of the second arm. By using the flexion and extension of each arm to move the fork forward and backward, the front end portion of the second arm is disposed on the gear, and the pair of teeth in the forward and backward directions of each gear are meshed on the inner side of the second arm. In the manner of the fork, when the arm is flexed and extended to advance the fork, the gear disposed at the front end portion of the second arm can move the fork forward through the rack, thereby achieving the necessity even if the arm or the fork is shortened. The transfer stroke can shorten the operating time and make the transfer machine small, lightweight and low in price.
且，藉由在第2臂的前端部固定設置齒輪，且裝設成隨著配設臂的揺動一體地旋轉之方式，利用與第2臂的揺動一起旋轉的齒輪，不須追加新的驅動軸或驅動機構，就可以透過齒條使叉在前方滑行移動，而可使驅動機構簡略化。Further, by providing a gear fixed to the distal end portion of the second arm and installing it so as to rotate integrally with the urging of the arm, the gear that rotates together with the sway of the second arm does not need to be newly added. The drive shaft or drive mechanism allows the fork to slide forward through the rack, which simplifies the drive mechanism.
且，藉由將第1臂和第2臂的收縮後停止位置設在與叉的進退方向形成大致直角之位置，並在該停止位置使齒輪位於叉的進退方向中心附近之位置的方式，可將叉的進退設定成可逆性，藉此，不須旋轉動作即可在前後的棚進出，省略旋轉機構且縮小儲存處的寬度，且可縮短移載機的週期時間(Takt time)。Further, the contraction stop position of the first arm and the second arm is set at a position that is substantially perpendicular to the advancing and retracting direction of the fork, and the gear is placed at a position near the center of the fork in the advancing and retracting direction at the stop position. The advancement and retreat of the fork is set to be reversible, whereby the front and rear sheds can be moved in and out without a rotation operation, the rotation mechanism is omitted, the width of the storage portion is reduced, and the cycle time (Takt time) of the transfer machine can be shortened.
且，藉由將齒條可左右位移地支撐在叉的方式，當叉在導輥的間隙中偏離時，仍可使齒條追隨該偏離進行移動，且將齒條和齒輪經常保持一定的齒接觸，可防止在齒條和叉的連結部分施加大的負荷。Moreover, by supporting the fork in a manner of being displaceable to the left and right, when the fork deviates in the gap of the guide roller, the rack can still be moved following the deviation, and the rack and the gear are often kept with a certain tooth. Contact prevents the application of a large load on the joint portion of the rack and the fork.
且，藉由將用於確認叉上工件之有無的光感測器配設在移載機本體側，並可將用於反射光感測器之光的反射板設在叉側的方式，不須在叉側施行光感測器之配線，就可以確認工件之有無。Further, by arranging the photo sensor for confirming the presence or absence of the workpiece on the fork on the side of the transfer machine body, and the reflection plate for reflecting the light of the photo sensor can be disposed on the fork side, The wiring of the photo sensor must be applied to the fork side to confirm the presence or absence of the workpiece.
以下根據圖式說明本發明之移載機的實施形態。Embodiments of the transfer machine of the present invention will be described below based on the drawings.
第1圖~第8圖表示本發明之移載機的一實施例。1 to 8 show an embodiment of the transfer machine of the present invention.
該移載機係左右配設1對可屈伸地連結著的第1臂1及第2臂2，且將第1臂1的基部各自連接在驅動軸3，並以第2臂2的前端部支撐叉4，藉由各臂1、2的屈伸使叉4進退。The transfer machine is provided with a pair of first arm 1 and second arm 2 that are flexibly connected to each other, and the base of the first arm 1 is connected to the drive shaft 3, and the front end of the second arm 2 is provided. The support fork 4 advances and retracts the fork 4 by the flexion and extension of the arms 1, 2.
然後，該移載機係於第2臂2的前端部固定設置隨著第2臂2之揺動而一體旋轉的齒輪5，並在第2臂2的內側將嚙合在各齒輪5之朝進退方向的齒條6設在叉4。Then, the transfer machine is fixed to the front end portion of the second arm 2 so as to be fixedly provided with the gear 5 that rotates integrally with the second arm 2, and is meshed with the gears 5 on the inner side of the second arm 2 A rack 6 in the direction is provided on the fork 4.
第1臂1係基部被固定在設於移載機本體7的馬達之驅動軸3，藉由驅動軸3的轉動在預定範圍的角度揺動。The first arm 1 base is fixed to the drive shaft 3 of the motor provided in the transfer machine main body 7, and is tilted by a predetermined range of angles by the rotation of the drive shaft 3.
第2臂2係基部樞設在第1臂1的前端部，且其前端部樞設在叉4的齒輪箱41，藉由驅動軸3的轉動而與第1臂1屈伸成朝外側彎曲的ㄑ字狀。The second arm 2 base is pivotally provided at the front end portion of the first arm 1, and the front end portion thereof is pivotally provided to the gear case 41 of the fork 4, and is bent outwardly from the first arm 1 by the rotation of the drive shaft 3 ㄑ字状.
第1臂1和第2臂2係形成收縮時的停止位置位在與叉4的進退方向大致直角，且上下重疊之位置。The stop positions at which the first arm 1 and the second arm 2 are contracted are located at substantially right angles to the advancing and retracting direction of the fork 4, and are vertically overlapped.
齒輪5係如第3圖所示，以在第2臂2的前端部透過軸51朝上方突出的方式設置，以隨著第2臂2的揺動僅旋轉該揺動角度距離的方式一體地固定在第2臂2。As shown in FIG. 3, the gear 5 is provided so as to protrude upward at the distal end portion of the second arm 2 through the transmission shaft 51, and is integrally integrated so as to rotate only the swaying angle distance in accordance with the sway of the second arm 2. It is fixed to the second arm 2.
藉由齒輪5的軸51以可轉動方式被軸支在叉4的齒輪箱41之方式，將第2臂2樞設在叉4，而設在軸51上端的齒輪5係於齒輪箱41上部，嚙合在叉4的齒條6。The second arm 2 is pivotally mounted on the fork 4 by the shaft 51 of the gear 5 rotatably supported by the gear box 41 of the fork 4, and the gear 5 provided at the upper end of the shaft 51 is attached to the upper portion of the gear box 41. Engaged in the rack 6 of the fork 4.
叉4係用於載置玻璃基板等工件W(包含收容工件W的匣盒)之移載機，外框框架的內部具備齒條6。The fork 4 is used to mount a workpiece W such as a glass substrate (including a cassette containing the workpiece W), and the rack frame 6 is provided inside the outer frame.
齒條6係以1對之齒條6背對背的狀態，一體地設在叉4寬度方向中心且在進退方向中心。The rack 6 is integrally provided in a state in which the pair of racks 6 are back to back, and is integrally provided at the center in the width direction of the fork 4 and at the center in the advancing and retracting direction.
各齒輪5係以夾入該齒條6的方式配設在對稱位置，藉此，左右之第2臂2形成同步地揺動。Each of the gears 5 is disposed at a symmetrical position so as to sandwich the rack 6, whereby the left and right second arms 2 are synchronously swayed.
齒輪箱41係相對於叉4設成透過導輥42、43可朝進退方向滑動，藉由齒輪5利用第2臂2的揺動進行旋轉且使齒條6移動的方式，使叉4在該齒輪箱41上前後滑行移動。The gear case 41 is slidable in the forward and backward direction by the guide rollers 42 and 43 with respect to the fork 4, and the fork 4 is rotated by the rotation of the second arm 2 by the gear 5 and the rack 6 is moved. The gear box 41 slides forward and backward.
且，本實施例中，將第1臂1和第2臂2的收縮後停止位置設成位在與叉4的進退方向大致形成直角之位置，且在該停止位置將齒輪5設成位在叉4的進退方向中心附近之位置。Further, in the present embodiment, the post-shrink stop position of the first arm 1 and the second arm 2 is set to a position that is substantially at right angles to the advancing and retracting direction of the fork 4, and the gear 5 is set at the stop position. The position of the fork 4 near the center of the advance and retreat direction.
藉此，可將叉4的進退設定成可逆性，不須旋轉動作即可在前後的棚8進出。Thereby, the advance and retreat of the fork 4 can be set to be reversible, and the front and rear sheds 8 can be accessed without a rotation operation.
若是像習知之移載機需要旋轉動作時，則如第4圖(a)所示需要旋轉空間S，從移載機本體7的中心到棚8的距離L1將變大，因此儲存處的寬度L2進而變大。If the conventional transfer machine requires a rotation operation, the rotation space S is required as shown in Fig. 4(a), and the distance L1 from the center of the transfer machine body 7 to the shed 8 becomes large, so the width of the storage place is increased. L2 is then increased.
相對於此，本實施例的移載機由於不須旋轉動作，因此如第4圖(b)所示，與棚8的間隔為最小限，可縮短從移載機本體7的中心到棚8之距離L1，藉此進而可縮短儲存處的寬度L2。On the other hand, since the transfer machine of the present embodiment does not require a rotation operation, as shown in FIG. 4(b), the interval from the shed 8 is minimized, and the distance from the center of the transfer machine body 7 to the shed 8 can be shortened. The distance L1 is thereby further shortened the width L2 of the storage.
且，於這種本實施例的移載機，使叉4滑行移動時，為了對應隨著叉4大型化之加工精確度惡化、隨著工件W重量增加之彎曲等變形，如第5圖~第7圖所示，必須在引導叉4的導輥43和叉4之間設置間隙，以具備對於尺寸誤差之逸退構造，但針對齒輪5和齒條6的嚙合部位置，必須保持一定的位置關係，結果有在齒條6和叉4的連結部分施加大的負荷之問題。Further, in the transfer machine of the present embodiment, when the fork 4 is slidably moved, in order to cope with the deterioration of the machining accuracy as the fork 4 is enlarged, the bending of the workpiece W is increased, and the like, as shown in Fig. 5 As shown in Fig. 7, it is necessary to provide a gap between the guide roller 43 of the guide fork 4 and the fork 4 to have a retreat structure for the dimensional error, but the position of the meshing portion of the gear 5 and the rack 6 must be kept constant. The positional relationship has a problem in that a large load is applied to the joint portion of the rack 6 and the fork 4.
此外，為了將齒輪5和齒條6保持在一定的位置關係，齒條6係藉由配設在齒輪箱41的導引機構(省略圖示)所導引，進行揺動動作。藉由在該導引機構的部分使用偏心之方式，可調整被夾持著的齒條6之位置。Further, in order to maintain the gear 5 and the rack 6 in a fixed positional relationship, the rack 6 is guided by a guide mechanism (not shown) disposed in the gear case 41, and the swaying operation is performed. The position of the held rack 6 can be adjusted by using eccentricity in the portion of the guiding mechanism.
因此，本實施例中，如第5圖~第7圖所示，藉由將齒條6的前部和後部在叉4的前部和後部各自安裝成可揺動的方式，使齒條6可左右位移地支撐在叉4。Therefore, in the present embodiment, as shown in FIGS. 5 to 7, the rack 6 is made by attaching the front and rear portions of the rack 6 to the front and rear portions of the fork 4 in a slidable manner. It can be supported on the fork 4 in a left-right displacement.
具體而言，兩端使用具有球面軸承9的金屬軸91，藉由將齒條6的前部和叉4的前部、齒條6的後部和叉4的後部，各自連結在具有該球面軸承9的金屬軸91之方式，當作吸收叉4和齒條6相對偏離的構造，即使齒輪5和齒條6的嚙合部被保持在一定的位置關係，也不會在叉4和齒條6的接合部施壓加過度的力量。Specifically, the metal shaft 91 having the spherical bearing 9 is used at both ends, and the front portion of the rack 6 and the front portion of the fork 4, the rear portion of the rack 6 and the rear portion of the fork 4 are respectively coupled to each other having the spherical bearing The manner of the metal shaft 91 of 9 is a configuration in which the absorption fork 4 and the rack 6 are relatively deviated, and even if the meshing portions of the gear 5 and the rack 6 are held in a certain positional relationship, the fork 4 and the rack 6 are not The joint pressure exerts excessive force.
此外，本實施例中，叉4和齒條6之間安裝有球面軸承9，但取代球面軸承9，例如可使用如套筒之橡膠狀彈性體(省略圖示)、或以使叉4和齒條6具有柔軟性的軸(省略圖示)直接連結、或亦可減少叉4本身的剛性且藉由叉4本身的變形使其在齒條6左右位移以避免過度之力量。Further, in the present embodiment, the spherical bearing 9 is mounted between the fork 4 and the rack 6, but instead of the spherical bearing 9, for example, a rubber-like elastic body (not shown) such as a sleeve, or the fork 4 and The flexible shaft (not shown) of the rack 6 is directly coupled or the rigidity of the fork 4 itself can be reduced and the fork 4 itself can be displaced to the left and right of the rack 6 to avoid excessive force.
如此地，藉由設置相對於叉4的偏離之齒條6的逸退構造之方式，即使叉4在導輥43的間隙中偏離時，齒條6仍追隨該偏離而移動，可將齒條6和齒輪5經常保持在一定的齒接觸，藉此，可防止在齒條6和叉4的連結部分施加大的負荷。Thus, by providing the escape structure of the rack 6 with respect to the deviation of the fork 4, even if the fork 4 deviates in the gap of the guide roller 43, the rack 6 moves following the deviation, and the rack can be moved. The gears 5 and 6 are often kept in a certain tooth contact, whereby a large load is applied to the joint portion of the rack 6 and the fork 4.
另一方面，移載機必須配設用於辨識叉4上有工件W的感測器，但本實施例之移載機由於使叉4滑行移動，因此有對叉4上的感測器配線非常困難之問題。On the other hand, the transfer machine must be provided with a sensor for recognizing the workpiece W on the fork 4. However, since the transfer machine of the embodiment moves the fork 4, the sensor wiring on the fork 4 is provided. Very difficult problem.
因此，本實施例中，如第8圖~第9圖所示，將用於確認叉4上有無工件W的光感測器10配設在移載機本體側，並藉由將用於反射光感測器10的光之鏡子等所構成的反射板11、和工件W被載置在叉4上時就旋轉而將反射板11遮光的遮光板12兩者設在叉4側，使叉4側不須施行光感測器10的配線就可以確認有無工件W。Therefore, in the present embodiment, as shown in Figs. 8 to 9, the photo sensor 10 for confirming the presence or absence of the workpiece W on the fork 4 is disposed on the side of the transfer machine body, and is used for reflection. The reflector 11 composed of a light mirror of the photosensor 10 and the shutter W that rotates when the workpiece W is placed on the fork 4 and shields the reflector 11 from light is provided on the side of the fork 4 to make the fork The presence or absence of the workpiece W can be confirmed on the 4 side without performing the wiring of the photo sensor 10.
此外，遮光板12的作動機構13並無特限定，但在本實施例中，如第9圖所示，由利用彈簧13b而被推迫的工件檢測片13a、與工件檢測片13a運動而下降及上昇的變換螺帽13c、以及螺合在變換螺帽13c的螺軸13d所構成，當工件W被載置在叉4上時就下降，當工件W被從叉4上取下時就上昇。Further, the actuating mechanism 13 of the light shielding plate 12 is not particularly limited. However, in the present embodiment, as shown in Fig. 9, the workpiece detecting piece 13a urged by the spring 13b and the workpiece detecting piece 13a are moved downward. And the rising conversion nut 13c and the screw shaft 13d screwed to the conversion nut 13c are lowered when the workpiece W is placed on the fork 4, and rise when the workpiece W is removed from the fork 4. .
然後，該遮光板12的作動機構13在工件W被載置在叉4上時，對抗彈簧13b的推迫使工件檢測片13a下降，與其運動的變換螺帽13c下降，螺合在變換螺帽13c的螺軸13d旋轉，配設在螺軸13d的遮光板12旋轉預定角度，將反射板11遮光，使反射板11不反射光感測器10的光，而偵知工件W已被載置在叉4上的情形(叉4上有工件W的情形)。另一方面，將工件W從叉4上取下時，藉由彈簧13b的推迫使工件檢測片13a上昇，與其運動的變換螺帽13c上昇，螺合在變換螺帽13c的螺軸13d朝反方向旋轉，配設在螺軸13d的遮光板12以預定角度朝反方向旋轉，使反射板11不遮光，而使反射板11反射光感測器10的光，而偵知工件W被從叉4上取下的情形(叉4上無工件W的情形)。Then, when the workpiece W is placed on the fork 4, the actuation mechanism 13 of the visor 12 forces the workpiece detecting piece 13a to descend against the spring 13b, and the moving nut 13c is lowered, and is screwed into the conversion nut 13c. The screw shaft 13d rotates, and the light shielding plate 12 disposed on the screw shaft 13d is rotated by a predetermined angle to shield the reflection plate 11 from light, so that the reflection plate 11 does not reflect the light of the light sensor 10, and it is detected that the workpiece W has been placed thereon. The case on the fork 4 (the case where the workpiece W is on the fork 4). On the other hand, when the workpiece W is detached from the fork 4, the workpiece detecting piece 13a is forced to rise by the pushing of the spring 13b, and the moving nut 13c that moves therewith is raised, and the screw shaft 13d of the shift nut 13c is screwed toward the opposite side. When the direction is rotated, the light shielding plate 12 disposed on the screw shaft 13d is rotated in a reverse direction at a predetermined angle so that the reflection plate 11 does not block light, and the reflection plate 11 reflects the light of the light sensor 10, and the workpiece W is detected from the fork. 4 The case of removal (the case where there is no workpiece W on the fork 4).
於該情形下，本實施例之移載機由於叉4將進退方向中心當作通常的待機位置，在前後的棚8進出，因此在對於反射板11正對之位置配設光感測器10時，光感測器10和反射板11將產生干涉之問題，但藉由將光感測器10的安裝位置配設在偏離反射板11通過的路徑之方式，可防止干涉。In this case, the transfer device of the present embodiment uses the fork 4 as the normal standby position in the forward and backward direction, and the shed 8 enters and exits in the front and rear. Therefore, the photo sensor 10 is disposed at a position facing the reflector 11 At the same time, the photo sensor 10 and the reflecting plate 11 cause interference problems, but interference can be prevented by disposing the mounting position of the photo sensor 10 in a path away from the path through which the reflecting plate 11 passes.
且，藉由將光感測器10的安裝位置配設在偏離反射板11通過的路徑之方式，以1個光感測器10無法辨識移載動作中叉4上一直有工件W的情形，但例如藉由配設複數個光感測器10的方式，可常時進行監視。Further, by arranging the mounting position of the photo sensor 10 on the path that deviates from the path of the reflecting plate 11, one photo sensor 10 cannot recognize that the workpiece W is always present on the fork 4 during the transfer operation. However, monitoring can be performed frequently, for example, by providing a plurality of photosensors 10.
如此地，將光感測器10配設在固定側，設定成叉4在出位置時可檢測反射板11，並且藉由將光感測器10配設在偏離叉4的進退路徑上之方式，可防止光感測器10和反射板11的干涉，且叉4上不須配設光感測器10，可省略到叉4之配線。In this manner, the photo sensor 10 is disposed on the fixed side, and the reflector 4 can be detected when the fork 4 is in the exit position, and the photo sensor 10 is disposed on the advancing and retreating path of the fork 4 by way of The interference between the photo sensor 10 and the reflection plate 11 can be prevented, and the photo sensor 10 is not required to be disposed on the fork 4, and the wiring to the fork 4 can be omitted.
如此一來，本實施例之移載機係在左右配設1對可屈伸地連結著的第1臂1及第2臂2，第1臂2的基部係連接在各驅動軸3，並以第2臂2的前端部支撐叉4，利用各臂1、2的屈伸使叉4進退之移載機中，在第2臂2的前端部固定設置有隨著第2臂2的摇動而一體旋轉的齒輪5，並在第2臂2的內側將嚙合在各齒輪5之朝進退方向的齒條6設在叉4，因此當臂屈伸使叉4前進時，可藉由與第2臂2的揺動一起旋轉的齒輪5，透過齒條6使叉4朝前方滑行移動，即使縮短臂或叉4仍可達成必要的移載行程，可縮短動作時間並使移載機小型輕量且低價格。In this way, the transfer machine of the present embodiment has a pair of first arm 1 and second arm 2 that are flexibly connected to each other, and the base of the first arm 2 is connected to each of the drive shafts 3, and The distal end portion of the second arm 2 supports the fork 4, and the fork 4 is moved forward and backward by the flexion and extension of the arms 1 and 2, and the distal end of the second arm 2 is fixedly provided with the swing of the second arm 2 The gear 5 is integrally rotated, and the rack 6 meshing in the advancing and retracting direction of each of the gears 5 is provided on the inner side of the second arm 2, so that when the arm is flexed and extended to advance the fork 4, the second arm can be used The gear 5 that rotates together 2 moves the fork 4 forward by the rack 6, and even if the arm or the fork 4 is shortened, the necessary transfer stroke can be achieved, the operation time can be shortened, and the transfer machine can be small and lightweight. low price.
且，藉由將第1臂1和第2臂2的收縮後停止位置設在位於與叉4的進退方向大致形成直角之位置，且在該停止位置將齒輪5設在位於叉4的進退方向中心附近之位置的方式，可將叉4的進退設成可逆性，藉此，不須旋轉動作即可在前後的棚8進出，可省略旋轉機構並縮短儲存處之寬度，且可縮短移載機之週期時間。Further, the contraction stop position of the first arm 1 and the second arm 2 is set at a position substantially at right angles to the advancing and retracting direction of the fork 4, and the gear 5 is placed in the advancing and retracting direction of the fork 4 at the stop position. The position of the vicinity of the center can set the advance and retreat of the fork 4 to be reversible, thereby allowing the front and rear sheds 8 to enter and exit without a rotation operation, omitting the rotation mechanism and shortening the width of the storage place, and shortening the transfer Cycle time of the machine.
此外，本實施例中，在第2臂2的前端部固定設置有隨著第2臂2的揺動而一體旋轉的齒輪5，但亦可將配設在第2臂2前端部的齒輪5，藉由將適當的驅動手段例如配設在第1臂1基端側的馬達等驅動手段之驅動力，透過傳動帶等傳動機構傳達的方式而予以驅動、或藉由配設在第2臂2前端部的馬達等驅動手段之驅動力而予以驅動。Further, in the present embodiment, the gear 5 that integrally rotates with the sway of the second arm 2 is fixed to the distal end portion of the second arm 2, but the gear 5 disposed at the distal end portion of the second arm 2 may be provided. The appropriate driving means is driven, for example, by a driving force of a driving means such as a motor provided on the proximal end side of the first arm 1, by a transmission mechanism such as a transmission belt, or by being disposed in the second arm 2 The driving force of a driving means such as a motor at the front end portion is driven.
且，第2臂2的前端部附設旋轉機構，藉由透過旋轉機構支撐叉4的方式，可自由改變載置在叉4的工件W之進出方向。Further, a rotation mechanism is attached to the distal end portion of the second arm 2, and the movement direction of the workpiece W placed on the fork 4 can be freely changed by the rotation mechanism supporting the fork 4.
且，藉由將齒條6可左右位移地支撐在叉4之方式，即使叉4在導輥43的間隙中偏離時，齒條6仍可追隨該偏離而移動，且將齒條6和齒輪5一直保持一定的齒接觸，並可防止在齒條6和叉4的連結部分施加大的負荷。Moreover, by supporting the rack 6 in the left-right displacement manner in the fork 4, even if the fork 4 deviates in the gap of the guide roller 43, the rack 6 can follow the deviation and move, and the rack 6 and the gear 5 A certain tooth contact is maintained at all times, and a large load is applied to the joint portion of the rack 6 and the fork 4.
且，藉由將用於確認叉4上有無工件W的光感測器10配設在移載機本體側，並將用於反射光感測器10的光之反射板11設在叉4側的方式，不須在叉4側進行光感測器10的配線，就可以確認有無工件W。Further, the photosensor 10 for confirming the presence or absence of the workpiece W on the fork 4 is disposed on the side of the transfer machine body, and the reflection plate 11 for reflecting the light of the photo sensor 10 is disposed on the side of the fork 4. In this way, it is possible to confirm the presence or absence of the workpiece W without wiring the photo sensor 10 on the side of the fork 4.
以上，針對本發明之移載機，已根據實施例說明，但本發明不限定於上述實施例所記載之構成，只要不逸脫其主旨之範圍，皆可適當變更其構成。As described above, the transfer machine of the present invention has been described based on the embodiments. However, the present invention is not limited to the configurations described in the above embodiments, and the configuration thereof can be appropriately changed as long as the scope of the gist of the invention is not removed.
本發明之移載機即使縮短臂或叉仍可達成必要之移載行程，使移載機小型輕量且低價格，且又具有不須旋轉動作即可在前後之棚進出的特性，因此可廣泛地適用於例如當作搭載在搬送液晶玻璃基板等煙囪式起重機(Stacker crane)或RGV等之移載機。The transfer machine of the present invention can achieve the necessary transfer stroke even if the arm or the fork is shortened, so that the transfer machine is small, lightweight, and low in price, and has the characteristics of being able to enter and exit the front and rear sheds without rotating motion. It is widely used, for example, as a transfer machine mounted on a stacker crane such as a liquid crystal glass substrate or an RGV.
1．．．第1臂1. . . First arm
2．．．第2臂2. . . Second arm
3．．．驅動軸3. . . Drive shaft
4．．．叉4. . . cross
41．．．齒輪箱41. . . Gearbox
42、43．．．導輥42, 43. . . Guide rollers
5．．．齒輪5. . . gear
51．．．軸51. . . axis
6．．．齒條6. . . rack
7．．．移載機本體7. . . Transfer machine body
8．．．棚8. . . shed
9．．．球面軸承9. . . Spherical bearing
91．．．金屬軸91. . . Metal shaft
10．．．光感測器10. . . Light sensor
11．．．反射板11. . . Reflective plate
12．．．遮光板12. . . Shading
13．．．遮光板的作動機構13. . . Shading mechanism
第1圖係表示本發明之移載機之一實施例及其移載動作之俯視圖。Fig. 1 is a plan view showing an embodiment of the transfer machine of the present invention and its transfer operation.
第2圖表示該移載動作詳細情形之俯視圖。Fig. 2 is a plan view showing the details of the transfer operation.
第3圖表示該實施例之移載機，(a)表示在臂收縮後的停止位置之齒輪和齒條之俯視圖，(b)為其縱向剖視圖。Fig. 3 is a view showing the transfer machine of the embodiment, (a) showing a plan view of the gear and the rack at the stop position after the arm is contracted, and (b) a longitudinal sectional view thereof.
第4圖(a)表示以往的移載機和棚之間隔之俯視圖，(b)表示本賣施例的移載機和棚之間隔之俯視圖。Fig. 4(a) is a plan view showing the interval between the conventional transfer machine and the shed, and Fig. 4(b) is a plan view showing the interval between the transfer machine and the shed in the present embodiment.
第5圖表示將齒條可位移地支撐著的移載機之實施例及其移載動作之俯視圖。Fig. 5 is a plan view showing an embodiment of a transfer machine in which a rack is movably supported and a transfer operation thereof.
第6圖表示該移載動作詳細情形之俯視圖。Fig. 6 is a plan view showing the details of the transfer operation.
第7圖表示該移載機，(a)表示在臂收縮後的停止位置之齒輪和齒條之俯視圖，(b)為其縱向剖視圖。Fig. 7 shows the transfer machine, (a) shows a plan view of the gear and the rack at the stop position after the arm is contracted, and (b) is a longitudinal sectional view thereof.
第8圖表示該移載機的光感測器和反射板之配置之俯視圖。Fig. 8 is a plan view showing the arrangement of the photosensor and the reflecting plate of the transfer machine.
第9圖表示該移載機的反射板和遮光板之配置，(a)為俯視圖，(b)為前視圖，(c)為側視圖。Fig. 9 is a view showing the arrangement of the reflecting plate and the light shielding plate of the transfer machine, (a) being a plan view, (b) being a front view, and (c) being a side view.
第10圖表示以往的移載機之立體圖。Fig. 10 is a perspective view showing a conventional transfer machine.
第11圖表示該移載機的臂伸張後的狀態之俯視圖。Fig. 11 is a plan view showing a state in which the arm of the transfer machine is extended.
第12圖表示該移載機的臂收縮途中的狀態之俯視圖。Fig. 12 is a plan view showing a state in which the arm of the transfer machine is in the middle of contraction.
第13圖表示該移載機的臂收縮後的停止位置的狀態之俯視圖。Fig. 13 is a plan view showing a state in which the arm of the transfer machine is in a stopped position after contraction.
1．．．第1臂1. . . First arm
2．．．第2臂2. . . Second arm
4．．．叉4. . . cross
5．．．齒輪5. . . gear
6．．．齒條6. . . rack
8．．．棚8. . . shed
41．．．齒輪箱41. . . Gearbox
W．．．工件W. . . Workpiece
Claims (3)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007328207 | 2007-12-20 | ||
| JP2008229494A JP5136788B2 (en) | 2007-12-20 | 2008-09-08 | Transfer machine |
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| Publication Number | Publication Date |
|---|---|
| TW200927621A TW200927621A (en) | 2009-07-01 |
| TWI436869B true TWI436869B (en) | 2014-05-11 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW97141621A TWI436869B (en) | 2007-12-20 | 2008-10-29 | Transfer machine |
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| Country | Link |
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| JP (1) | JP5136788B2 (en) |
| TW (1) | TWI436869B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP5240460B2 (en) * | 2009-01-20 | 2013-07-17 | 株式会社ダイフク | Transfer machine |
| JP2011104695A (en) * | 2009-11-16 | 2011-06-02 | Ulvac Japan Ltd | Robot arm and conveying device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPS61256056A (en) * | 1985-05-09 | 1986-11-13 | Canon Inc | Shuttle mover |
| JPH06345261A (en) * | 1993-04-16 | 1994-12-20 | Daihen Corp | Transporting hand of automatic transport device |
| JPH106267A (en) * | 1996-06-20 | 1998-01-13 | Tokico Ltd | Industrial robot |
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2008
- 2008-09-08 JP JP2008229494A patent/JP5136788B2/en not_active Expired - Fee Related
- 2008-10-29 TW TW97141621A patent/TWI436869B/en not_active IP Right Cessation
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| JP2009166230A (en) | 2009-07-30 |
| JP5136788B2 (en) | 2013-02-06 |
| TW200927621A (en) | 2009-07-01 |
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