TWI435851B - Cutter wheel holder unit - Google Patents

Description

Cutter wheel holder unit

The present invention relates to a cutter wheel holder unit for holding a scribing wheel for scribing a substrate of a brittle material.

In order to score the brittle material substrate to the desired size and to break it, a scoring device is used. The scoring device has a cutter wheel holder unit that is aligned with the brittle material substrate. Figure 1 is a side view of a conventional cutter wheel holder unit. The cutter wheel holder unit 100 has a cutter wheel holder 110, a scribing wheel 120, and a pin 130 to which a scribing wheel is attached.

As shown in FIG. 1, a holder groove 111 and a pin hole 112 are formed in a lower portion of the cutter wheel holder 110. The scribing wheel 120 is a disk-shaped member having a through hole penetrating the center of the two circular side faces and having a V-shaped blade along the outer peripheral portion of the scribing wheel 120. The V-shaped blade forms an ridge along the outer circumference of the scribing wheel 120. The inclined faces (outer peripheral portions) on both sides of the ridge line are usually crossed at an angle of 90 to 160 (convergence angle) to form a ridge line. The pin 130 is a cylindrical member that is inserted into the through hole of the scribing wheel 120 and the pin hole 112 of the holder 110 to keep the scribing wheel 120 rotatable.

The cutter wheel holder 110 holds the scribing wheel 120 in the holder groove 111 by using the pin 130, and is held by a cap shaft cover (not shown). As the scribing device including the above-described holder unit, there is a patent document 1 as shown in Patent Document 1.

Further, Patent Document 2 proposes a scribing wheel formed by integrating a shaft and a scribing wheel body portion. This scribing wheel has a cross-sectional rhombus shape, and both end portions are held by the cutter holder.

[Patent Literature]

[Patent Document 1] International Patent Publication WO2007/063979

[Patent Document 2] International Publication WO2003/51784

Since the conventional scribing wheel uses the pin groove as a bearing, if the rotation resistance of the scribing wheel is large and the gap between the scribing wheel and the holder groove is large, the linearity of the scribing formed on the substrate is lowered. The rolling friction coefficient when the linearity is maintained at an appropriate value is, for example, 0.2 to 0.25 cN‧cm, and the coefficient of friction tends to increase as time passes. Therefore, it is difficult to reduce the resistance of the scribing wheel to stably maintain it.

Moreover, when the scribing wheel integrated with the shaft and the wheel is rotatably held, the stronger the locking, the greater the rotational resistance, and if the locking is insufficient, the linearity of the scribe line formed on the substrate is reduce. The rolling friction coefficient when the linearity is maintained at an appropriate value is, for example, 0.2 to 0.25 cN‧cm, and the coefficient of friction tends to increase as time passes. Therefore, it is difficult to reduce the resistance of the scribing wheel to stably maintain it.

The present invention has been made in view of the above conventional problems, and an object thereof is to provide a cutter wheel holder unit capable of stably holding a scribing wheel and reducing rotational resistance.

In order to solve the above problems, a cutter wheel holder unit according to the present invention includes: a cutter wheel holder having a holder groove formed by a pair of support portions and having a through hole penetrating an end portion of the pair of support portions; a scribing wheel a disk-shaped wheel body portion formed of sintered diamond having a circular ridge line in a plane at the center, and a cylindrical shaft portion formed coaxially on the left and right sides of the wheel body portion; and a pair of bearings respectively disposed on the pair The through hole of the support portion can hold the cylindrical shaft portion of the scribing wheel and rotate freely.

Further, a position adjustment screw for adjusting a position of at least one of the pair of bearings may be further provided.

Further, a cover plate may be further provided on the outer side of at least one of the pair of support portions, and has a screw groove at a position corresponding to the through hole penetrating the support portion; the cover plate is fixed to the aforementioned Outside the support portion, the position adjustment screw is engaged with the threaded hole of the cover plate.

In order to solve the above problems, the cutter wheel holder unit of the present invention includes: a scribing wheel having a circular plate shape and having a through hole at the center, and having two curved surfaces forming a blade having a V-shaped ridge along the outer peripheral portion of the circular plate; The holder has a retainer groove for inserting the scribing wheel into a fixed width between one of the support faces, a pin hole for coaxially penetrating the pair of support portions, and a plug hole for inserting The pin hole and the through hole of the scribing wheel and holding the scribing wheel in a rotatable pin in the holder groove; and having one of a cylindrical shape and a collar having contact with both sides of the scribing wheel a predetermined thickness of the side wall; and a bearing disposed between the pair of collars and the support portion to hold the collar and the scribing wheel rotatably.

Here, the aforementioned collar may also have a flange that does not contact the bearing.

According to the cutter wheel holder unit of the first to third aspects of the patent application having the above-described features, the pin that is passed through the scribing wheel is held by a pair of bearings. Therefore, the rolling friction coefficient becomes small and can be smoothly rotated. The rolling friction coefficient does not increase even after a long period of time, but maintains a smooth rotation.

According to the fourth and fifth aspect of the invention, in the cutter wheel holder unit of the above-mentioned feature, the tapered portion of the cylindrical shaft portion of the scribing wheel is held by a pair of bearings. Therefore, the rolling friction coefficient becomes small and can be smoothly rotated. The rolling friction coefficient does not increase even after a long period of time, but maintains a smooth rotation. Moreover, since the holding position of the scribing wheel is stable, the linearity of the scribing at the time of scribing can be improved.

(First embodiment)

A cutter wheel holder unit according to a first embodiment of the present invention will be described with reference to the drawings. Figure 2 is a front view of the cutter wheel holder unit. The cutter holder unit 1A has a cutter holder 10 and a scribing wheel 30, and the scribing wheel 30 is held rotatably at the lower end of the cutter holder 10. As shown in FIG. 3, FIG. 4, and FIG. 5, the cutter wheel holder 10 is a rectangular parallelepiped member formed below, and has a through hole 11 for fixing the cutter wheel holder 10 at the upper portion. Below the cutter wheel holder 10, a triangular holder groove 12 is formed to open below. The triangular portion across the holder groove 12 is the support portion 13, 14. Through-holes 15, 16 penetrating through the support portions 13, 14 are formed at the lowermost ends of the left and right support portions 13, 14. The through holes 15, 16 are slits which are slightly open at the lower end. Further, screw holes 17, 18 which pass through the support portions 13, 14 on both sides are formed on the left and right of the support portions 13, 14.

Fig. 6 shows a cover plate attached to the outer side of the support portions 13, 14 of the cutter wheel holder. Since the cover sheet uses two cover sheets 20A, 20B of the same shape, only the cover sheet 20A will be described below. The cover plate 20A is a substantially triangular flat plate member having substantially the same shape as the support portion 13, and a screw groove 21 for a precision screw is formed at a position corresponding to the through hole 15 at a lower end thereof. Further, through holes 22, 23 are formed at positions corresponding to the screw grooves 17, 18 of the support portions 13, 14.

Next, an example of the scribing wheel 30 used in the present embodiment will be described. Fig. 7(a) is a front view of the first scribing wheel 30A, and Fig. 7(b) is a right side view thereof. As shown in the figures, the scribing wheel 30A is a tapered wheel body portion 31A having two stages at the center, and a tapered shape including a ridge line including a largest circumference included in a plane is formed in the center in the thickness direction of the wheel main body portion 31A. Part of it serves as the blade portion 32A. Further, coaxial cylindrical shaft portions 33 and 34 are provided on the sides of both sides of the wheel main body portion 31A. Conical portions 35, 36 having the same inclination angle α are formed at the outer end portions of the cylindrical shaft portions 33 and 34, respectively. This scribing wheel 30A is integrally formed by sintering diamonds.

Further, the assembly of the cutter holder unit will be described with reference to Figs. 2 and 8 . First, the scribing wheel 30A is held in the middle of the through holes 15 and 16 of the holder groove 12, and the inner ring of the bearing 41 contacts the taper portion 35 of the scribing wheel 30A and the bearing 41 in the through hole 15 of the support portion 13. The cylindrical collar 42 is disposed adjacently as shown in FIG. Similarly, in the through hole 16 of the support portion 14, the inner ring of the bearing 44 is brought into contact with the tapered portion 36 of the scribing wheel 30A, and a cylindrical collar 45 is disposed adjacent to the bearing 41. The collars 42, 45 are only in contact with the outer rings of the bearings 41, 44, respectively. Next, the cover plates 20A, 20B are attached and fixed to the outer sides of the support portions 13, 14 of the cutter wheel holder 10 by screws 24A and screws 24B (not shown) and the screws 25A, 25B. Further, the position adjusting screws 43, 46 are inserted from the screw grooves 21 of the cover plates 20A, 20B. The position adjusting screws 43, 46 are engaged with the screw grooves 21 at the lower ends of the cover plates 20A, 20B to rotate in opposite directions to each other to press the collars 42, 45 to adjust the cutter holder 30A to be located at the central portion of the holder groove 12. . Thereby, the slopes of the tapered portions 35, 36 on both sides of the scribing wheel 30A are held by the inner rings of the bearings 41, 44. Further, the outer peripheral portions of the bearings 41, 44 are held substantially without a gap by the through holes 15, 16. Next, after the bearings 41, 44 are pressed at a predetermined pressure and the scribing wheel 30A is held, the scribing wheel 30A can be gradually moved in the left-right direction of FIG. 8 by rotating the screws 43, 46 in the same direction, whereby the position can be adjusted. .

Here, the bearings 41, 44 are, for example, small diameter bearings having an inner diameter of 0.6 mm and an outer diameter of 1.5 mm. When the both ends of the scribing wheel are held by such a small-diameter bearing, the friction of the bearing portion is reduced when the scribing wheel is rotated, and the rolling friction coefficient can be greatly reduced to 0.05 to 0.07 cN‧m. Therefore, the rotation is smooth, and the scoring load is lighter. Further, even if the adjusting screws 41, 46 are fixed from the right and left locking bearings 41, 44, the scribing wheel can be surely held at a predetermined position with little increase in the rolling friction coefficient, and the scoring load is lost without loss. It is transmitted to the scribing wheel, thus improving the linearity of the scribing.

Next, various examples of the scribing wheel 30 will be described. Fig. 9 shows the second scribing wheel 30B. This scribing wheel 30B is the same as the scribing wheel 30A except for the wheel main body portion 31B and the blade portion 32B. This scribing wheel 30B forms a tapered surface of the wheel body portion 31B as shown in Fig. 9(a).

Next, a third example of the scribing wheel 30 will be described using FIG. This scribing wheel 30C is the same as the scribing wheel 30A except for the wheel main body portion 31C and the blade portion 32C. In the scribing wheel 30C, the wheel main body portion 31C is formed into a circular plate as shown in Fig. 10 (a), and only the outer circumference is tapered.

Next, a fourth example of the scribing wheel 30 will be described using FIG. This scribing wheel 30D is the same as the scribing wheel 30A except for the wheel main body portion 31D and the blade portion 32D. In the scribing wheel 30D, the wheel body portion 31D is formed into a three-stage tapered surface as shown in Fig. 11(a).

Next, a fifth example of the scribing wheel 30 will be described using FIG. This scribing wheel 30E is the same as the scribing wheel 30A except for the wheel main body portion 31E and the blade portion 32E. The blade portion 32E of the scribing wheel 30E has a disc portion 37 provided at the center of the wheel main body portion 31E, and the ridge line is formed into a tapered blade edge.

Further, in the first embodiment, a pair of cover plates are provided on the support portion, and adjustment screws are provided to adjust the position of the scribing wheel, but either one of the bearings may be fixed first, and only the other side may be adjusted. Keep the scribing wheel in the given position. Further, instead of the cover plate, a screw groove may be provided directly to the support portion to adjust the position of the bearing.

(Second embodiment)

A cutter wheel holder unit according to a second embodiment of the present invention will be described with reference to the drawings. Figure 13 is a front view of the cutter wheel holder unit. The cutter holder unit 1B has a cutter holder 60 and a scribing wheel 80, and the scribing wheel 60 is held rotatably at the lower end of the cutter holder 60. As shown in FIG. 14, FIG. 15, and FIG. 16, the cutter wheel holder 60 is a rectangular parallelepiped member formed below, and has a through hole 61 for fixing the cutter holder 60 at the upper portion. Below the cutter wheel holder 60, a triangular retainer groove 62 is formed to open below. The triangular portion of the holder groove 62 is a support portion 63, 64. The opposing faces of the support portions 63, 64 of the cutter wheel holder 60 are formed substantially in parallel, and the interval w between the retainer grooves 62 is first set to be sufficiently larger than the width of the scribing wheel 80.

Coaxial pin holes 65, 66 that penetrate the support portions 63, 64, respectively, are formed at the lowermost ends of the left and right support portions 63, 64. The pin holes 65, 66 are perpendicularly intersecting the holder groove 62 and are circular through holes for the pins of the scribing wheel 80. The pin holes 65, 66 are slightly open slits at the lower end. Further, on the left and right of the support portions 63, 64, screw grooves 67, 68 that pass through the support portions 63, 64 on both sides are formed.

The scribing wheel 80 is formed of, for example, a sintered diamond, for example, a disk-shaped member having a thickness d of about 0.65 nm, and has a through hole at the center. Further, the scribing wheel 80 has a V-shaped blade that forms a ridge line along the outer peripheral portion. The inclined faces (outer peripheral portions) on both sides of the ridge line are generally formed to intersect each other at an angle of 75 to 170°, more preferably 90 to 150° (convergence angle), to form a ridge line. The pin 81 is a cylindrical member formed of a metal such as a cemented carbide or a sintered diamond, and has a pointed shape at one end.

Fig. 17 shows a cover plate attached to the outer sides of the support portions 63, 64 of the cutter wheel holder. Since the cover plate uses two cover plates 70A, 70B of the same shape, only the cover plate 70A will be described below. The cover plate 70A is a substantially triangular flat plate member having substantially the same shape as the support portion 63, and through holes 71, 72 are formed at positions corresponding to the screw grooves 67, 68 of the support portions 63, 64.

Further, the assembly of the cutter wheel holder unit will be described with reference to Figs. 13 and 18 . First, the cover plate 70A is attached from the support portion 63 side by the screws 74A, 75A, and one end of the pin hole 65 is closed. Next, the pin 81 is inserted into the pin hole 66 from the portion of the pointed shape, and the bearing 91, and the cylindrical collar 92 shown in Fig. 19(a) is inserted into the holder groove 62 while holding the one side. The through hole of the scribing wheel 80 is inserted and inserted into the pin hole 65. Next, the collar 93 and the bearing 94 are passed through the pin 81. Thereby, as shown in FIG. 18, the collar 92 is brought into contact with the right side wall of the scribing wheel 80, and the inner ring of the bearing 91 is brought into contact with the collar 92, and the outer wheel of the bearing 91 can be placed in contact with the support portion 63. Similarly, the cylindrical collar 93 is brought into contact with the left side wall of the scribing wheel 80, and the inner ring of the bearing 94 is brought into contact with the collar 93, so that the outer ring of the bearing 94 can be placed in contact with the support portion 64. That is, the collars 92, 93 are only in contact with the inner wheels of the bearings 91, 94, respectively. Next, the cover plate 70B is attached and fixed to the outside of the support portion 64 of the cutter wheel holder 60 by a screw 75A and a screw 75B (not shown). Thereby, the left end of the pin hole 66 can be closed. The pin 81 does not fall off the pin hole. Then, by appropriately selecting the thickness of the collars 92, 93, the scribing wheel 80 can be rotatably held by the bearings 91, 94 together with the collars 92, 93 without moving in the axial direction.

Here, the bearings 91, 94 are, for example, small diameter bearings having an inner diameter of 0.7 mm and an outer diameter of 2.0 mm. When the both ends of the scribing wheel are held by such a small-diameter bearing, the friction of the bearing portion is reduced when the scribing wheel is rotated, and the rolling friction coefficient can be greatly reduced to, for example, 0.05 to 0.07 cN‧m. Therefore, the rotation is smooth, and the scoring load is lighter. Further, since the scoring load is transmitted to the scribing wheel without loss, the linearity of the scribing can be improved.

Further, in the present embodiment, the pins are held by the cover plates 70A and 70B from both sides of the pin holes 65 and 66. However, the diameter of one of the pin holes may be reduced on the outer peripheral side of the support portion to hold the pin.

(Third embodiment)

In the second embodiment, the collars 92 and 93 are simple cylindrical members. However, as the collar 95 (96), as shown in Fig. 19 (b), the collars 95 and 93 may not be in contact with the bearings 91 and 94. The flange 95a (96a). Fig. 20 is a cross-sectional view showing a cutter wheel holder unit 1C according to a third embodiment of the collar 95, 96. Thereby, the possibility that the debris during the scoring is mixed into the bearings 91, 94 can be reduced by the flanges 95a, 96a.

The cutter wheel holder unit according to each embodiment of the present invention is not limited to the automatic scribe device for automatically dicing a brittle material substrate, and may be attached to a brittle material cutting tool for manually cutting a brittle material substrate.

The cutter wheel holder unit of the present invention can be used very effectively for scribing a brittle material substrate such as a semiconductor substrate and cutting the head of the scoring device or the scratching head of the manual scribing tool.

1A, 1B, 1C. . . Cutter wheel holder unit

10. . . Knife wheel holder

11,15,16,22,23. . . Through hole

12. . . Hold slot

13,14. . . Support

17,18,21. . . Screw groove

20A, 20B. . . Cover plate

24A, 24B, 25A, 25B. . . Screw

30, 30A, 30B, 30C, 30D, 30E. . . Scribing wheel

31A, 31B, 31C, 31D, 31E. . . Wheel body

32A, 32B, 32C, 32D, 32E. . . Blade

33,34. . . Cylindrical shaft

35,36. . . Cone

37. . . Round plate

41,44. . . Bearing

42,45. . . Collar

43,46. . . Adjustment screw

60. . . Knife wheel holder

61. . . Through hole

62. . . Hold slot

63,64. . . Support

65,66. . . Pin hole

67,68. . . Screw groove

70A, 70B. . . Cover plate

71,72. . . Through hole

74A, 74B, 75A, 75B. . . Screw

80. . . Scribing wheel

81. . . pin

91,94. . . Bearing

92,93,95,96. . . Collar

95a, 95b. . . Burst

100. . . Cutter wheel holder unit

111. . . Hold slot

112. . . Pin hole

110. . . Knife wheel holder

120. . . Scribing wheel

130. . . pin

Figure 1 is a diagram showing the construction of a conventional holder unit.

Fig. 2 is a front view of the cutter wheel holder unit according to the first embodiment of the present invention.

Fig. 3 is a front view of the cutter wheel holder used in the first embodiment.

Fig. 4 is a side view of the cutter wheel holder used in the first embodiment.

Fig. 5 is a central longitudinal sectional view showing a cutter wheel holder used in the first embodiment.

Fig. 6 is a front view of the cover plate used in the first embodiment.

Fig. 7 is a front view and a right side view showing an example of a cutter wheel used in the first embodiment.

Fig. 8 is a longitudinal sectional view showing a cutter wheel holder unit according to a first embodiment of the present invention.

Fig. 9 is a front view and a right side view showing another example of the scribing wheel used in the first embodiment.

Fig. 10 is a front view and a right side view showing another example of the scribing wheel used in the first embodiment.

Fig. 11 is a front view and a right side view showing another example of the scribing wheel used in the first embodiment.

Fig. 12 is a front view and a right side view showing another example of the scribing wheel used in the first embodiment.

Fig. 13 is a front view showing the configuration of a cutter wheel holder unit according to a second embodiment of the present invention.

Fig. 14 is a front view showing the configuration of a cutter wheel holder according to a second embodiment of the present invention.

Figure 15 is a side view of a cutter wheel holder according to a second embodiment of the present invention.

Figure 16 is a cross-sectional view showing a cutter wheel holder according to a second embodiment of the present invention.

Figure 17 is a front view of a cover plate according to a second embodiment of the present invention.

Fig. 18 is a cross-sectional view showing the configuration of a cutter wheel holder unit according to a second embodiment of the present invention.

Fig. 19 is a perspective view showing an example of a collar according to a second embodiment of the present invention.

Fig. 20 is a cross-sectional view showing the configuration of a cutter wheel holder unit according to a third embodiment of the present invention.

10. . . Knife wheel holder

11. . . Through hole

20A, 20B. . . Cover plate

25A, 25B. . . Screw

30A. . . Scribing wheel

41,44. . . Bearing

42,45. . . Collar

43,46. . . Adjustment screw

Claims (4)

A cutter wheel holder unit having: a cutter wheel holder; a holder groove formed by a pair of support portions; and a through hole penetrating an end portion of the pair of support portions; the scribing wheel having a plane at a center a circular plate-shaped wheel body portion formed of a sintered diamond having a circular ridge line therein, and a cylindrical shaft portion formed coaxially at the left and right sides of the wheel body portion and having a tapered portion at an outer end portion; and a pair of bearings respectively disposed in the pair The through hole of the support portion can hold the cylindrical shaft portion of the scribing wheel and rotate freely; and the outer side of the bearing only contacts the collar of the outer wheel of the bearing; the inner wheel of the bearing contacts the tapered portion. A cutter wheel holder unit according to claim 1, further comprising a position adjusting screw that adjusts a position of at least one of the pair of bearings through the collar. A cutter wheel holder unit according to claim 2, further comprising a cover plate provided on an outer side of at least one of the pair of support portions at a position corresponding to a through hole penetrating the support portion The threaded groove is provided; the cover plate is fixed to the outside of the support portion, and the position adjusting screw is engaged with the threaded hole of the cover plate. A cutter wheel holder unit comprising: a scribing wheel having a circular plate shape and a through hole at a center thereof; and having two curved surfaces forming a blade edge formed by a V-shaped ridge line along an outer peripheral portion of the circular plate; and a holder having a The aforementioned scribing wheel is inserted into a retainer groove having a certain width between one of the supporting faces facing each other, and the aforementioned a pin hole through which the pair of support portions are coaxially penetrated, and a pin having a through hole inserted into the pin hole and the scribing wheel and holding the scribing wheel in the holder groove; and having a cylindrical shape a pair of collars having a predetermined thickness contacting the side walls of the both sides of the scribing wheel; and a bearing disposed between the pair of collars and the support portion to hold the collar and the scribing wheel in a rotatable manner; The pair of collars are only in contact with the inner wheel of the bearing, and the pair of collars have a flange larger than the outer wheel of the bearing, and the flange does not contact the bearing and the scribing wheel.