201114705 六、發明說明： 【發明所屬之技術領域】 本發明係關於保持用以對脆性材料基板進行刻劃之劃 線輪之刀輪保持具單元。 【先前技術】201114705 VI. Description of the Invention: [Technical Field] The present invention relates to a cutter wheel holder unit for holding a scribing wheel for scribing a brittle material substrate. [Prior Art]
為了將脆性材料基板刻劃成所欲尺寸並加以分斷，係 使用刻劃裝置。刻劃裝置，於與脆性材料基板對向之刻劃 頭具備刀輪保持具單元。圖1係習知之刀輪保持具單元之 側視圖。刀輪保持具單元⑽具有刀輪保持具ug、劃線輪 no、以及銷130,於刀輪保持具安裝有劃線輪。 " 所不’於刀輪保持具 肖孔112。劃線輪120係圓板狀構件，具有貫通兩個 ，形側面之中心之貫通孔，且具有沿劃線輪12〇外周部之V 字形刀刀4字形刀刃形成沿劃線輪m外周之稜線。棱線 兩側之傾斜面（外周邊部）通常係以9〇〜16〇。之角度（會聚 角）相互父又而形成稜線。銷130係圓柱形構件，插入於劃 線輪120之貫通孔及保持具UG之銷& 112，可將劃線 120保持成旋轉自如。 " 刀輪保持具110係使用銷130而在保持具槽lu内保 持劃線輪120，並藉由未圖示之壓軸罩保持。作為具備上述 保持具單元之刻劃裝置，有如專利文獻I所示者。 又’專利文獻2中提出了將軸與劃線輪本體部一體化 •形成之劃線輪。此劃線輪具有截面菱形之形狀，兩端部 破刀輪保持具保持來使用。 201114705 [專利文獻] [專利文獻1]國際專利公開W02007/063979號公報 [專利文獻2]國際公開w〇2003 / 5 1784號公報 【發明内容】 習知之劃線輪由於係將銷槽作為軸承’因此若劃線輪 之旋轉抵抗較大使其與保持具槽之間之空隙較大，形成於 基板之劃線之直線性即會降低。將直線性保持於適當值時 之滾動摩擦係數係例如〇·2〜〇.25cN· cm，隨著時間經過摩 擦係數有增加之傾向。因此，有難以減少劃線輪 穩定保持之缺點。 _ 又，將軸與輪-體化之劃線輪，當將劃線輪保持成旋 轉自如時，其鎖固越強則旋轉抵抗越大，若鎖固不充分則 形成於基板之劃線直線性即降低。將直線性保持於適春值 =擦係數係例如。·2〜。⑽，隨著時間：過 二:=增加之傾向。因此’有難以減少劃線輪之抵抗 以橋疋保持之缺點。 本發明有鑑於上述習知問題點，其目的在於 劃線輪穩定地保持且減少旋轉抵抗之刀輪保持具單元、： .為了解決上述問題，本發明之刀輪保持具 有.刀輪保持具，藉由一對支承且 …、 且有-平之貫通孔；劃線輪，具有以中心 部、以稜線之燒結鑽石形成之圓板狀輪本體 於Μ輪本體部左右形成為料之圓 及一對轴承’她m對支承部之貫通孔，可Γ 201114705 持前述劃線輪之圓杈軸部並旋轉自如。 亦可進一步具有用以調整前述一對軸承中至少-方軸 承之位置之位置調整螺桿。 此處亦可$步具有罩板，該罩板設於前述一對支 承部中至少一方支承部之外側，於與貫通前述支承部 通孔對應之位置具有螺桿槽；前述罩板固定於前述支承部 外側’前述位置調整螺桿係咬合於前述罩板之螺紋孔。 為了解決上述問顳，*欢Λ , 哺本發明之刀輪保持具單元，具備： 劃線輪Α圓板狀且於中心具有貫通孔，具有兩個形成^ 圆板外周部成v字形稜線之刀刀之曲面；以及保持具，： 有用以將前述劃線輪插入於具有彼此平行對向之面之—對 :之一定寬度之保持具槽'將前述-對支承部同轴 貫通之銷孔、以及具有插入於前述銷孔及前述劃線輪3 :孔且在前述保持具槽㈣前述劃線輪保㈣旋轉自^ m有· ®筒形狀之—對軸環’具有接觸於劃線輪兩 則壁之既定厚度；以及軸承，設於前述一對軸環與支 承部前述軸環及前述劃線輪保持成旋轉自如。、 此處’爾環亦可具有不接觸於軸承之突緣。 =具有上述特徵之中請專利範圍第丨至3項 保持具早疋，係以-對轴承保持貫通於割線輪 滾動摩擦係數變小 〜纟因此， ㈣具拉門介 暢“疋轉。滾動摩擦係數即使 、'過長時間亦不會增加’而能維持順暢之旋轉。使 :據具：上述特徵之申請專利範圍第 因此，滾動摩擦係數變小，而圓柱轴部之錐部。 而“員暢地旋轉。滚動摩擦係 5 201114705 數即使經過長時間亦不會增加 由於劃線輪之保持位置穩定， 線性。 ’而能維持順暢之旋轉。又， 因此能提升刻劃時之劃線直 【實施方式j (第1實施形態） -使用圖式說明本發明第1實施形態之刀輪保持具單 元。圖2係刀輪保持具單元之前視圖。刀輪保持具單元、Μ 具有刀輪保持具10與劃線輪3〇,於刀輪保持且 劃線輪3〇保持成旋轉自如。刀輪保持具10如圖、3圖4而圖 5所示，係下方形成為三角形之長方體狀構件，於上部且有 用以固定刀輪保持具10之貫通孔η。於刀輪保持具1〇、下 方’二角形之保持具槽12形成為開放下方。隔著保持具槽 12之此二角形部分為支承部13, 14。於左右支承部。μ 之最下端形成分別貫通支承部13，14之貫通孔15，16。此貫 通孔】5, 16為下端些微開放之狹縫。又，於此支承部13，14 左右形成有貫通兩側之支承部13, 14之螺桿槽ΐ7, Μ。 圖6係顯示安裝於刀輪保持具左右之支承部η，μ外 側之罩板。該罩板由於係使用相同形狀之兩月罩板20Α 細’因此以下僅說明罩板2〇α。罩板2〇Α係與支承部Η 大致相同形狀之大致三角形平板狀構件，於其下端之與貫 通孔1 5對應之位置形成精密螺桿用之螺桿槽2卜又，在與 支承。ΙΜ3, 14之螺桿槽17, 18對應之位置形成有貫 23。 -人說明用於本實施形態之劃線輪3〇 一例。圖7⑷ 201114705 係第！劃線輪30A之前視圖，圖7(b)係其右側視圖。如此 等圖所示，劃線輪30A係於中央具有兩段之錐狀輪本體部 31A，於輪本體部31八之厚度方向中央形成有包含於一平面 内所含之最大圓周之棱線之錐狀部分而作為刀刀部32A。 又’於輪本體部31A兩側之側方具有同軸之圓柱軸部”及 34。於圓柱轴部33及34各自之外側端部分別形成有且有 相同傾斜角度α之錐部35, 36。此劃線輪3qa均藉由燒結 鑽石而形成為一體。In order to scribe the brittle material substrate to a desired size and to break it, a scoring device is used. The scoring device has a cutter holder unit on the scribed head opposite to the brittle material substrate. Figure 1 is a side view of a conventional cutter wheel holder unit. The cutter wheel holder unit (10) has a cutter wheel holder ug, a scribing wheel no, and a pin 130 to which a scribing wheel is mounted. " does not hold the hole 121 in the cutter wheel. The scribing wheel 120 is a disc-shaped member having a through hole penetrating through the center of the two side surfaces, and has a V-shaped blade along the outer peripheral portion of the scribing wheel 12 to form a ridge line along the outer circumference of the scribing wheel m. . The inclined faces (outer peripheral portions) on both sides of the ridge line are usually 9 〇 16 〇. The angles (convergence angles) form a ridge line with each other. The pin 130 is a cylindrical member that is inserted into the through hole of the scribing wheel 120 and the pin & 112 of the holder UG, so that the scribing line 120 can be kept freely rotatable. " The cutter wheel holder 110 uses the pin 130 to hold the scribing wheel 120 in the holder groove lu and is held by a cap shaft (not shown). As the scribing device having the above-described holder unit, there is a case shown in Patent Document 1. Further, Patent Document 2 proposes a scribing wheel formed by integrating a shaft with a scribing wheel body portion. This scribing wheel has a cross-sectional rhombus shape, and the both ends of the cutter wheel holder are held for use. [Patent Document 1] [Patent Document 1] International Patent Publication No. WO2007/063979 (Patent Document 2) International Publication No. WO 2003/5 1784 SUMMARY OF THE INVENTION A conventional scribing wheel has a pin groove as a bearing Therefore, if the rotation resistance of the scribing wheel is large and the gap between the groove and the holder groove is large, the linearity of the scribe line formed on the substrate is lowered. The rolling friction coefficient when the linearity is maintained at an appropriate value is, for example, 〇·2~〇.25cN·cm, and the friction coefficient tends to increase as time passes. Therefore, it is difficult to reduce the disadvantage that the scribing wheel is stably maintained. _ In addition, when the scribing wheel is rotated and freely rotated, the stronger the locking is, the stronger the rotation resistance is. If the locking is insufficient, the scribing straight line formed on the substrate is formed. Sex is reduced. Keep the linearity at the spring value = the coefficient of rubbing is for example. ·2~. (10), with time: over two: = tendency to increase. Therefore, it is difficult to reduce the resistance of the scribing wheel to the disadvantage of the bridge. The present invention is directed to the above-mentioned conventional problems, and the object thereof is to provide a cutter wheel holder unit in which the scribing wheel stably holds and reduces the rotation resistance. In order to solve the above problem, the cutter wheel of the present invention maintains the cutter wheel holder. a pair of support and ... with a through hole; the scribing wheel has a disc-shaped wheel body formed by a center portion and a ridged sintered diamond, and is formed into a circle of material on the left and right sides of the body portion of the wheel For the through hole of the bearing 'm to the support part, the 14 Γ 201114705 holds the round 杈 shaft of the aforementioned scribing wheel and rotates freely. Further, a position adjusting screw for adjusting a position of at least one of the pair of bearings may be further provided. Here, the cover may have a cover plate provided on the outer side of at least one of the pair of support portions, and have a screw groove at a position corresponding to the through hole of the support portion; the cover plate is fixed to the support The outer side of the portion of the position adjustment screw is engaged with the threaded hole of the cover plate. In order to solve the above problem, the blade wheel holder unit of the invention is provided with: a scribing rim having a circular plate shape and a through hole at the center, and having two v-shaped ridge lines forming the outer peripheral portion of the disk plate. a curved surface of the knife; and a holder having: a retaining groove for inserting the scribing wheel into a face having a parallel direction opposite to each other: a pin hole having a certain width to the support portion And having a hole inserted into the pin hole and the scribing wheel 3: and in the holder groove (4), the scribing wheel (4) is rotated from the shape of the cylinder to have a contact with the scribing wheel And a predetermined thickness of the two walls; and the bearing is disposed on the pair of collars and the support portion, the collar and the scribing wheel are rotatably held. Here, the ring may also have a flange that does not contact the bearing. = Among the above features, please contact the third to third items of the patent range, which is to keep the rolling friction coefficient of the bearing through the secant ring to be smaller ~ 纟 Therefore, (4) with sliding door slid. Rolling friction Even if the coefficient does not increase over a long period of time, it can maintain a smooth rotation. Therefore: According to the patent application scope of the above feature, the rolling friction coefficient becomes smaller, and the tapered portion of the cylindrical shaft portion. Rotate smoothly. Rolling friction system 5 201114705 The number does not increase even after a long time. Because the holding position of the scribing wheel is stable and linear. 'can maintain a smooth rotation. In addition, it is possible to improve the straight line at the time of scribing. [Embodiment j (first embodiment)] A cutter wheel holder unit according to the first embodiment of the present invention will be described with reference to the drawings. Figure 2 is a front view of the cutter wheel holder unit. The cutter wheel holder unit, Μ has the cutter wheel holder 10 and the scribing wheel 3〇, is held by the cutter wheel, and the scribing wheel 3 is held freely rotatable. The cutter wheel holder 10 is as shown in Fig. 3, Fig. 4 and Fig. 5, and has a rectangular parallelepiped member formed at the lower side, and has a through hole η for fixing the cutter wheel holder 10 at the upper portion. The holder groove 12 having a 1 turn and a lower square at the cutter wheel holder is formed to be open below. The two-sided portion of the holder groove 12 is a support portion 13, 14 interposed therebetween. On the left and right support parts. The lowermost ends of the μ are formed with through holes 15, 16 that penetrate the support portions 13, 14 respectively. This through hole] 5, 16 is a slightly open slit at the lower end. Further, screw holes 7 and 贯通 are formed on the left and right of the support portions 13, 14 so as to penetrate the support portions 13 and 14 on both sides. Fig. 6 is a view showing a cover plate attached to the outer side of the support portion η, μ of the cutter wheel holder. Since the cover sheet is made of a two-month cover plate 20 of the same shape, only the cover plate 2A will be described below. The cover plate 2 is a substantially triangular flat plate member having substantially the same shape as the support portion ,, and a screw groove 2 for a precision screw is formed at a position corresponding to the through hole 15 at the lower end thereof, and is supported and supported. The positions of the screw grooves 17, 18 of the crucibles 3, 14 are formed to be continuous. - An example will be described for the scribing wheel 3〇 used in the present embodiment. Figure 7 (4) 201114705 Department! The front view of the scribing wheel 30A and the right side view of Fig. 7(b). As shown in the figures, the scribing wheel 30A is formed by a tapered wheel body portion 31A having two stages at the center, and a ridge line including a maximum circumference included in a plane is formed at the center in the thickness direction of the wheel body portion 31. The tapered portion serves as the blade portion 32A. Further, 'there are coaxial cylindrical shaft portions on the sides of both sides of the wheel main body portion 31A' and 34. The outer side end portions of the cylindrical shaft portions 33 and 34 are respectively formed with taper portions 35, 36 having the same inclination angle α. This scribing wheel 3qa is integrally formed by sintering diamonds.
進而，使用圖2及圖8說明刀輪保持具單元之组裝。 首先，將劃線輪30A保持於保持具槽12之貫通孔Η “中 間，於支承部13之貫通孔15,使轴承“之内輪接觸於劃 線輪30A之錐部35’與軸承41相鄰地將圓筒形狀之軸環 42如圖8所示地配置。同樣地，於支承部心貫通孔Μ， 使軸承44之内輪接觸於劃線輪30A之錐部36,與轴承41 相鄰地配置圓筒形狀之軸環45β軸環42,45 轴承❹之外輪。其次，從刀輪保持具心支承部ΐ3ΐ4 外側分別將罩板2〇Α，纖藉由螺桿24Α及未圖示螺桿MB 與螺桿25Α，25Β安裝固定。進而從罩板繼，_之螺桿槽 21插入位置調整螺桿43, 4…立置調整螺桿43,46盥罩‘ :二下端之螺桿槽21咬合，使之彼此往反方向旋轉而 *堅42, 45，將刀輪保持具3()A調 12之中央部分。藉此，劃線輪30A兩側之錐部35=^ 面保持於軸承41 44之内队 , ，44之内輪。又，軸承4】，44之外周部藉 士 ，16而大致無間隙地被保持。接著，以既定壓 按壓轴承41，44 ’並保持劃線輪嫩後，劃線輪30A可 201114705 螺桿43, 4“走轉於相同方向而逐步地移動於圖8之 左右方向’藉以能調整位置。 之小=Ϊ軸：A Μ係例如内徑為〇.6_、外徑為1.5_ 劃線以此種小徑軸承保持劃線輪之兩端，使 數大承部之摩擦變少，能使滚動摩擦係 刻劃行重二-0 05 0 07cN ·m。因此’其旋轉順暢，能使 二重較I…，即使藉由調整螺桿43,46從左右鎖固 轴承41，44,亦可在滚動摩擦係數幾乎不會增加之情況下將 劃線輪確實地保持於既定位置 .杳“，ώ 置亥J劃何重由於無損耗地傳 達至劃線輪，因此能提升劃線之直線性。 其次說明劃線輪30之各種例19係顯示第2劃線輪 則。此劃線輪3GB除了輪本體部31B及刀刀部灿以^ 其餘均與靠輪嫩相同。此劃線輪扇係將輪本體部31B 如圖9(a)所示作成兩段之錐面。 其次使用圖H)說明劃線輪3〇之第3例。此劃線輪就 除了輪本體部3 1 C及刀刀部q 9 Γ»丨、/ *fch 相同。此劃線輪就，係將幹本體部卜=均與 竹輪本體部31c如圖10(a)所示作 成圓板’並僅將外周作成錐面。Further, the assembly of the cutter holder unit will be described with reference to Figs. 2 and 8 . First, the scribing wheel 30A is held in the middle of the through hole 保持 of the holder groove 12, and the through hole 15 of the support portion 13 is such that the inner wheel of the bearing contacts the taper portion 35' of the scribing wheel 30A adjacent to the bearing 41. The cylindrical collar 42 is disposed as shown in FIG. Similarly, the inner peripheral portion of the bearing 44 is in contact with the tapered portion 36 of the scribing wheel 30A in the center of the support portion, and a cylindrical collar 45β collar 42 is disposed adjacent to the bearing 41, 45 bearing outer wheel . Next, the cover plate 2 is respectively placed outside the cutter wheel holding core support portion ΐ3ΐ4, and the fiber is attached and fixed by the screw 24Α and the screw MB not shown, and the screws 25Α, 25Β. Further, from the cover plate, the screw groove 21 of the cover plate is inserted into the position adjusting screw 43, 4... the vertical adjustment screw 43, 46, the cover: the screw groove 21 at the lower end is engaged, and is rotated in the opposite direction to each other. 45, the cutter wheel holder 3 () A to adjust the central part of 12. Thereby, the taper portion 35 on both sides of the scribing wheel 30A is held by the inner wheel of the bearing 41 44, and the inner wheel of 44. Further, the outer peripheral portions of the bearings 4, 44 are held substantially without a gap. Then, after the bearings 41, 44' are pressed by a predetermined pressure and the scribing wheel is kept tender, the scribing wheel 30A can be rotated in the same direction by the screws 14 and 4 in the same direction to gradually adjust the position in the left and right direction of FIG. The small = Ϊ axis: A 例如 system, for example, the inner diameter is 〇.6_, the outer diameter is 1.5_ scribe line to keep the two ends of the scribing wheel with such a small diameter bearing, so that the friction of several large bearing parts is reduced, The rolling friction system is scribed to the weight of 2-0 05 0 07cN · m. Therefore, the rotation thereof is smooth, so that the double weight can be compared with I... even if the screws 43 and 46 are adjusted by the adjustment screws 41 and 44 from the left and right. When the rolling friction coefficient hardly increases, the scribing wheel is surely held at the predetermined position. 杳 ", ώ 亥 J J J J 由于 由于 由于 由于 J J J J J J J J J 由于 由于 由于 由于 由于 由于 由于. Next, various examples 19 of the scribing wheel 30 will be described to show the second scribing wheel. The scribing wheel 3GB is identical to the wheel body except that the wheel body portion 31B and the blade portion are the same. This scribing wheel system makes the wheel body portion 31B a tapered surface as shown in Fig. 9(a). Next, the third example of the scribing wheel 3〇 will be described using FIG. This scribing wheel is identical except for the wheel body portion 3 1 C and the blade portions q 9 Γ»丨, / *fch. In the scribing wheel, the dry main body portion and the bamboo wheel main body portion 31c are formed as a circular plate as shown in Fig. 10 (a), and only the outer circumference is tapered.
其次使用圖11說明劃線輪30之第4例。此劃線輪3〇D 除了輪本體部3HD及刀刀部32D以外其餘均與劃線輪嫩 相同。此劃線輪30D’係將輪本體部加如圖u(a)所示作 成三段之錐面。 其次使用圖12說明劃線輪3〇之第5例。此劃線輪搬 除了輪本體部31E及刀刃部32E以外其餘均與劃線輪嫩 相同。此劃線輪3GE之刀㈣32E具有設於輪本體部犯 201114705 中央之圓板部37,將其稜線構成為錐狀之刀尖。 此外，第1實施形態中，雖於支承部 並分別設㈣整螺桿以進㈣線輪位置調整，但亦2固 疋任方之輛承，並僅對另一方進行位置調整而將劃線輪 保持於既定位置。χ ’亦可取代罩板而直接於支承部設置 螺杯槽，藉以進行軸承之位置調整。 (第2實施形態） —使用圖式說明本發明之第2實施形態之刀輪保持具單 π圖1 3係刀輪保持具單元之前視圖。刀輪保持具單元1 β 具有刀輪保持具6G與劃線輪8G,於77輪保持具6〇下端將 劃線輪60保持成旋轉自如。刀輪保持具6〇如冑14，圖α 圖1 6所不，係下方形成為三角形之長方體狀構件於上部 具有用以固定刀輪保持# 6G之貫通孔6ι。於刀輪保持具 60下方，三角形之保持具槽62形成為開放下方。隔著保持 ' 2之此一角形部分為支承部03，64。刀輪保持具6〇 支K邛63，64之相對向之面形成為大致平行，保持具槽 62之間隔W先設為較劃線輪80之寬度充分大。 :左右支承邛63，64之最下端形成分別貫通支承部63， 64之同軸之銷孔65, 66。銷孔65, 66係與保持具槽Μ垂直 地乂又’係保持劃線輪8〇之銷之圓形貫通孔。銷孔65, 66 為下端些微開放之狹縫。又，於此支承部63, 64左右形成 有貫通兩側之支承部63, 64之螺桿槽67, 68。 劃線輪80係以例如燒結鑽石形成之例如厚度d為約 〇.65_之圓板狀構件’於中心具有貫通孔。又，劃線輪肋 、。外周部形成稜線之V字形刀刃。稜線兩側之傾斜面 201114705 (外周邊部）通常係以75〜17〇。t角度、更佳為9〇〜⑼。 t角度（會聚角=互交又而形成棱線。銷81係以例如超硬 口金等金屬燒、纟。鑽石形成之圓柱形構件，—姓 形狀。 ％具有尖頭 圖17係顯示安裝於刀輪保持具左右之支承部63，以外 側之罩板。該罩板由於係使用相同形狀之兩片罩板7〇A 卿’因此以下僅說明罩板观。罩板取係與支承部= 大致相同形狀之大致三角形平板狀構件，在與支承部 之螺桿槽07, 68對應之位置形成有貫通孔”，u。 ，4 進而，使用圖13及圖18說明此刀輪保持 裝。首先，藉由螺桿74Α，75Α從支承部63側安裝罩板厂 封閉銷孔ό 5之一端。直次，蔣雜8 ρ ， 將銷81從尖頭形狀之部分插 入銷孔66、以及軸承91，圖19⑷所示 9;，將劃線輪8。插入保持具槽6…邊保持 線輪⑼之貫通孔，進而插入於銷孔65。其次 #入= 承94貫通於銷81。萨 使釉％ 93,軸 、線輪⑼之右二壁m 使轴環92接觸於劃 將細ic 内輪接觸於轴環92,而能 將軸承91之外輪接觸於支承部63來加 而- 使圓何來灿《V 4· 置^ 同樣地> 圓请狀之輛環93接觸於劃線輪8〇 94之内輪拄_ 之左側壁，使軸承 之内輪接觸於轴環93，而能將軸承9 觸於支承部“ 4之外輪配置成接 ^ ^ 4°亦即，轴環92,93分別僅接觸於軸承91 Q4 之内輪。其:欠，從刀輪保持具60之支承部6二承91，94 罩板70B藉由土 叉承。卩64外側分別將 由未圖不之螺桿75A、螺桿75b 此能關心66<^181+^固定。藉 藉由先適當壤h… 不會從銷孔脫落。接著， 選擇轴環92, 93之厚度，割線輪⑽可在幾乎不 201114705 會移動於輛方向之情況下，與轴環 保持成旋轉自如。 職轴承91，94 之小t Γ承91，94係例如内役為°·7_、外徑為2·°職 =轴承。藉由以此種小徑轴承保持劃線輪之兩端，使 劃線輪旋轉而刻劃時軸承部之摩擦 數夫舻诖, 支少此使滾動摩擦係 減t至例如°·。5〜0.°7eN.m。因此，其旋轉順暢， «刻劃何重較輕。又，刻劃荷重由於無損耗地傳達至 線輪’因此能提升劃線之直線性。 - 此外，本實施形態中，雖從銷孔65, 66之兩側使用罩 板心_保持銷’但亦可在支承部外周側縮小—方 孔之徑，以保持銷。 (第3實施形態） 第2實施形態中，轴環92,93雖係單純之圓筒形構件， 但作為轴環95(96)，亦可如圖19(b)所示具有不接觸於轴承 吒94之外輪之突緣9叫96小圖2〇係使用此轴環％ % 之第3實施形態之刀輪保持具單元lc之“圖。#此1 藉由突緣95a，96a減少刻劃時之碎屑混入軸承91，9 可能性。 ”，、丁〜，个丨仅於自 劃脆性材料基板之自動刻劃裝置，亦可安裝於手動切 性材料基板之脆性材料切斷用刀具來使用。 於刻劃 置之刻 本發明之刀輪保持具單元，可非常有效地運用 半導體基板等之脆性材料基板並加以分斷之刻劃裝 劃頭、或手動之劃線工具之刻劃頭。 、 201114705 【圖式簡單說明】 圖1係顯示習知保持具單元之構成之圖。 視圖 圖2係本發明之第1實施形態之刀輪保持具單元之 〇 圖5係使用於第1實施形態之刀輪保持具 圖3係使用於第丨實施形態之刀輪保持具之前視圖 圖4係使用於第1實施形態之刀輪保持具之側視圖 面圖 之中央縱戴 圖6係使用於第1實施形態之罩板之前視圖。 圖 圖7係顯示使用於第1實施形態之刀輪一‘ 及右側視圖。 J 月耳見 圖8係本發明之第1實施形態之刀輪保持具單元之 截面圖。 圖9係顯示使用於第1實施形態之劃線輪另 視圖及右側視圖。 圖1 〇係顯示使用於第1實施形態之劃線輪另一例之敢 視圖及右側視圖。 ~ 圖11係顯示使用於第1實施形態之劃線輪另一 視圖及右側視圖。 線輪另一例之前 圖1 2係顯示使用於第1實施形態之劃 視圖及右側視圖。 具單元之 圖1 3係顯示本發明第2實施形態之刀輪保持 構成之前視圖。 具之構成 圖14係顯示本發明第2實施形態之刀輪保持具 之前視圖。 12 201114705 圖15係本發明帛2實施形態之刀輪保持具之側視圖。 圖16係本發明第2實施形態之刀輪保持具之載面圖。 圖17係本發明第2實施形態之罩板之前視圖。 圖1 8係顯示本發明第2實施形態之刀輪保持具單元 構成之截面圖。 ( 圖19係顯示本發明第2實施形態之軸環—例 圖。 圖20係顯示本發明第3實施形態之刀輪保持具單元之 應 構成之截面圖。 刀輪保持具單元 刀輪保持具 貫通孔 保持具槽 支承部 螺桿槽 罩板 【主要元件符號說明】 ΙΑ,IB,1C 10 1 1，15, 16, 22, 23 12Next, a fourth example of the scribing wheel 30 will be described using FIG. This scribing wheel 3〇D is identical to the scribing wheel except for the wheel body portion 3HD and the blade portion 32D. This scribing wheel 30D' is formed by adding a three-stage tapered surface to the wheel body portion as shown in Fig. u(a). Next, a fifth example of the scribing wheel 3〇 will be described using FIG. This scribing wheel is identical to the scribing wheel except that the wheel main body portion 31E and the blade portion 32E are removed. The knives (4) 32E of the scribe wheel 3GE have a blade portion 37 which is provided in the center of the wheel body portion 201114705, and has a ridge line formed into a tapered blade edge. Further, in the first embodiment, although the (four) whole screw is provided in the support portion to adjust the position of the (four) reel, the carrier is also fixed, and the position adjustment is performed only on the other side. Stay in the given position. χ ' can also be provided with a screw groove directly on the support portion instead of the cover plate, thereby adjusting the position of the bearing. (Second Embodiment) - A front view of a cutter wheel holder unit according to a second embodiment of the present invention will be described with reference to the drawings. The cutter wheel holder unit 1 β has a cutter holder 6G and a scribing wheel 8G, and holds the scribing wheel 60 in a rotatable manner at the lower end of the 77-wheel holder 6〇. The cutter wheel holder 6 is, for example, 胄14, which is not shown in Fig. 16. The rectangular parallelepiped member formed into a triangular shape at the lower portion has a through hole 6ι for fixing the cutter wheel holding #6G. Below the cutter wheel holder 60, a triangular holder groove 62 is formed to open below. The angular portion of the retaining portion 2 is the support portion 03, 64. The cutter wheel holders 6 are formed so as to be substantially parallel with respect to the faces of the legs K, 63, and the spacing W of the holder grooves 62 is set to be sufficiently larger than the width of the scribing wheel 80. The lowermost ends of the left and right support jaws 63, 64 are formed with coaxial pin holes 65, 66 that penetrate the support portions 63, 64, respectively. The pin holes 65, 66 are perpendicular to the holder groove and are a circular through hole for holding the pin of the scribing wheel 8''. The pin holes 65, 66 are slits that are slightly open at the lower end. Further, on the left and right of the support portions 63, 64, screw grooves 67, 68 which pass through the support portions 63, 64 on both sides are formed. The scribing wheel 80 is formed of a sintered diamond, for example, a disk-shaped member having a thickness d of about 65.65_ having a through hole at the center. Also, the scribing wheel ribs. The outer peripheral portion forms a V-shaped blade of a ridge line. Inclined faces on both sides of the ridgeline 201114705 (outer peripheral portion) is usually 75 to 17 inches. The angle t is more preferably 9 〇 ~ (9). t angle (convergence angle = mutual intersection and ridge line formation. Pin 81 is made of metal such as super hard gold, crucible. Cylindrical member formed by diamond, - shape of last name. % with pointed head Figure 17 shows installation on knife The wheel holder has a left and right support portion 63 to the outer cover plate. Since the cover plate uses two cover plates of the same shape, the cover plate view is only described below. The cover plate is attached to the support portion = substantially the same The substantially triangular flat member having a shape has a through hole formed at a position corresponding to the screw grooves 07 and 68 of the support portion, u, and 4, and the cutter wheel holding device will be described with reference to Figs. 13 and 18. First, by The screw 74Α, 75Α is attached from the side of the support portion 63 to one end of the cover pin hole ό 5 of the cover plate factory. Straight, Jiang Mis 8 ρ , the pin 81 is inserted into the pin hole 66 from the portion of the pointed shape, and the bearing 91, Fig. 19 (4) 9; the scribing wheel 8 is inserted into the holder groove 6... while holding the through hole of the reel (9), and then inserted into the pin hole 65. Next #入=承94 penetrates the pin 81. Sa glaze% 93, the shaft , the right two walls of the reel (9) make the collar 92 contact with the stroke to bring the thin ic inner wheel into contact with the collar 92, and the outer wheel of the bearing 91 can be brought into contact with the support portion 63 to add - the circle He Lacan "V 4 · set ^ the same> the circular ring of the ring 93 contact the inner wheel of the scribing wheel 8 〇 94 The left side wall of 拄_ makes the inner wheel of the bearing contact the collar 93, and can contact the bearing 9 to the support portion. 4 The outer wheel is arranged to be connected to ^4°, that is, the collars 92, 93 respectively contact only the bearing 91. The inner wheel of Q4. It: owed, from the support part 6 of the cutter wheel holder 60, the second bearing 91, 94 the cover plate 70B is supported by the soil fork. The outer side of the 卩 64 will be the screw 75A and the screw 75b which are not shown respectively. ;^181+^ fixed. By the first appropriate soil h... will not fall off the pin hole. Then, select the thickness of the collars 92, 93, the secant wheel (10) can move in the direction of the vehicle in the almost 201114705 It is freely rotatable with the collar. The small bearings 91, 94 of the bearing 91, 94 are, for example, internally 7·7, and the outer diameter is 2·° = bearing. By retaining the bearing with such a small diameter At both ends of the reel, the number of frictions of the bearing portion is reduced when the scribing wheel is rotated, and the rolling friction is reduced by t to, for example, °·5~0.°7eN.m. The rotation is smooth, and the weight of the scoring is lighter. Moreover, the scoring load is transmitted to the reel without loss. Therefore, the linearity of the scribing line can be improved. - In addition, in the present embodiment, from the pin hole 65, The cover core _ retaining pin ' is used on both sides of the 66. However, the diameter of the square hole can be reduced on the outer peripheral side of the support portion to hold the pin. (Third Embodiment) In the second embodiment, the collars 92 and 93 are a simple cylindrical member, but as the collar 95 (96), as shown in Fig. 19 (b), there is a flange 9 which does not contact the outer wheel of the bearing 吒 94. % Figure 3 of the cutter wheel holder unit lc of the third embodiment. #这1 By the flanges 95a, 96a, the possibility of debris being mixed into the bearings 91, 9 during the scoring is reduced. ", Ding ~, 丨 丨 丨 丨 , , , 自 自 自 自 自 自 自 自 自 自 自 自 自 自 自 自 自 自 自 自 自 自 自 自 自 自 自 自 自动 自动 自动 自动 自动 自动 自动 自动 自动 自动 自动 自动 自动 自动 自动The holder unit can be used very effectively by using a brittle material substrate such as a semiconductor substrate and cutting the head with a scratch or a manual scribing tool. 201114705 [Simple description of the drawing] Fig. 1 shows Fig. 2 is a view showing a cutter wheel holder unit according to a first embodiment of the present invention. Fig. 5 is a cutter wheel holder used in the first embodiment. Fig. 3 is used in Fig. 3 FIG. 4 is a front view of a side view of the cutter wheel holder of the first embodiment, and is a front view of the cover plate used in the first embodiment. FIG. 7 is a front view of the cover wheel holder of the first embodiment. The cutter wheel 1' and the right side view of the first embodiment are shown. Fig. 8 is a cross-sectional view of the cutter wheel holder unit according to the first embodiment of the present invention. Fig. 9 shows the use of the first embodiment. Forming wheel Fig. 1 shows a dazzling view and a right side view of another example of the scribing wheel used in the first embodiment. Fig. 11 shows another view and a right side view of the scribing wheel used in the first embodiment. Fig. 1 2 shows a plan view and a right side view of the first embodiment. Fig. 13 shows a front view of a cutter wheel holding structure according to a second embodiment of the present invention. Fig. 15 is a side elevational view of a cutter wheel holder according to a second embodiment of the present invention. Fig. 16 is a perspective view of a cutter wheel holder according to a second embodiment of the present invention. Fig. 17 is a front view of a cover plate according to a second embodiment of the present invention. Fig. 1 is a cross-sectional view showing a configuration of a cutter wheel holder unit according to a second embodiment of the present invention. Fig. 20 is a cross-sectional view showing a configuration of a cutter wheel holder unit according to a third embodiment of the present invention. The cutter wheel holder unit cutter holder has a through hole holder groove support portion.Screw groove cover plate [Main component symbol description] ΙΑ, IB, 1C 10 1 1,15, 16, 22, 23 12
13，14 17, 18, 21 20A, 20B 24A, 24B, 25A, 25B 螺桿 30, 30A, 30B, 30C, 30D, 30E 劃線輪 31A, 31B, 31C, 31D, 31E 輪本體部 32A, 32B, 32C, 32D, 32E 刀刃部 33, 34 圓柱軸部 35, 36 37 錐部 圓板部 13 201114705 41, 44 42, 45 43, 46 60 61 62 63, 64 65,66 67, 68 70A, 70B 71, 72 74A, 74B, 75A, 75B 80 81 91, 94 92, 93, 95, 96 95a, 95b 100 111 1 12 110 120 130 軸承 軸環 調整螺桿 刀輪保持具 貫通孔 保持具槽 支承部 銷孔 螺桿槽 % 罩板 貫通孔 螺桿 劃線輪 銷 軸承 軸環 突緣 · 刀輪保持具單元 保持具槽 銷孔 刀輪保持具 劃線輪 銷 1413,14 17, 18, 21 20A, 20B 24A, 24B, 25A, 25B Screw 30, 30A, 30B, 30C, 30D, 30E Scribe wheel 31A, 31B, 31C, 31D, 31E Wheel body 32A, 32B, 32C , 32D, 32E Blade 33, 34 Cylindrical shaft 35, 36 37 Conical disc 13 201114705 41, 44 42, 45 43, 46 60 61 62 63, 64 65, 66 67, 68 70A, 70B 71, 72 74A, 74B, 75A, 75B 80 81 91, 94 92, 93, 95, 96 95a, 95b 100 111 1 12 110 120 130 Bearing collar adjustment screw cutter wheel holder through hole holder groove support pin hole screw groove % Cover plate through hole screw scribe wheel pin bearing collar flange · Cutter wheel holder unit retainer slot pin hole cutter wheel retaining scribe wheel pin 14