TWI433800B - Stocker system and substrate cassette - Google Patents

Description

Warehousing system and substrate card

The present invention relates to a storage system, and more particularly to a storage system for storing substrate cassettes.

Please refer to FIG. 1 , which is a schematic diagram of a conventional storage system. The storage system 1 for storing a glass substrate is provided with a plurality of Fan Filter Units (FFUs) 13 at the top of the body 11, and the fan filter units 13 generate a down-blowing airflow (such as the arrow in FIG. 1). The direction is shown), and the airflow is blown to a plurality of substrate cassettes (Cassette) 12 for blowing the dust in the body 11 and the substrate cassettes 12 to the lower exhaust duct 14 of the storage system 1 along the airflow. The dust is discharged to maintain the cleanliness of the storage system 1.

As the size of the display panel becomes larger, the size of the glass substrate is relatively increased, and the volume of the storage system and the substrate cassette for storing the glass substrate is also increased. In order to maintain the handling efficiency, the transport unit of the transport unit is transported. The speed is also relatively increased. At this time, the air volume of the fan filter unit needs to be increased to avoid the airflow return situation, and in order to maintain the cleanliness of the storage system 1, the number of use of the fan filter unit is also greatly increased.

However, due to the deterioration of the environment and the lack of energy, people are now aware of the significance of environmental protection. In order to meet the requirements of energy saving and carbon reduction, the number of fan filter units should be reduced. Therefore, how to provide a storage system, which can reduce the use of the fan filter unit, to meet the demand for energy saving and carbon reduction, and to maintain the cleanliness in the storage system has become one of the important topics.

In view of the above problems, an object of the present invention is to provide a storage system and a substrate cassette that can be used in conjunction with a flow guiding unit to reduce the amount of use of the fan filter unit and maintain the cleanliness of the storage system.

To achieve the above object, a storage system according to the present invention comprises a body, at least one substrate cassette and at least one flow guiding unit. The body has a side wall and at least one receiving space located in the side wall. The substrate cassette is placed in the accommodating compartment, the substrate cassette has a cover body and a bottom plate, wherein the cover body has a plurality of connected cover plates, the bottom plate has an air outlet, and the bottom plate is connected with the cover body and encloses to form an air inlet . The flow guiding units are respectively connected to and correspond to the respective air inlets, and the size of the flow guiding unit is smaller than the size of the air inlet.

In an embodiment of the invention, the storage system further includes a first fan filter unit disposed on top of one of the bodies to supply the cleaned gas of the flow guiding unit.

In an embodiment of the invention, the storage system further includes a second fan filter unit disposed at one end of the flow guiding unit away from the air inlet.

In an embodiment of the invention, the shape of the flow guiding unit and the shape of the air inlet are matched, and the cover portions adjacent to the air inlet cover are disposed on the outer side of the flow guiding unit.

In an embodiment of the invention, the flow guiding unit at the cover has a gap between the cover plates adjacent thereto, and the gap is greater than 0 cm and less than 1 cm.

In an embodiment of the invention, the substrate cassette further has a plurality of connecting elements disposed between the cover plates or between the cover plates and the bottom plate.

In an embodiment of the invention, the cover plates adjacent to the air inlet are of a ㄇ type, and the cover plates have a first side length along one of the air inlets toward the air outlet, and the bottom plate has a second side length. The first side length is greater than the second side length.

In an embodiment of the invention, the storage system further includes a transport unit that travels in a traveling direction for transporting the substrate cassette. The transport unit has a loading platform and a baffle for supporting the substrate substrate and the baffle. Then disposed on one side of the back of the carrying platform opposite to the traveling direction and perpendicular to the traveling direction, and the baffle faces the air inlet of the substrate jam.

As described above, a storage system and a substrate cassette of the present invention cooperate with a substrate cassette and a flow guiding unit, since the size of the flow guiding unit is smaller than the size of the air inlet, the shape of the flow guiding unit, and the shape of the air inlet. Cooperating with each other, and the cover portions adjacent to the air inlet cover are disposed on the outer side of the flow guiding unit, but the cover plate and the flow guiding unit do not contact each other, so that the fine dust is less likely to fall in the substrate cassette, which can also make the fan The gas of the filter unit can be more concentratedly blown into the substrate cassette, and the fine dust in the substrate cassette is discharged from the air outlet to maintain the cleanliness in the substrate cassette. The storage system of the invention can reduce the usage of the fan filter unit, and can also effectively blow the gas of the fan filter unit into the substrate cassette to maintain the cleanliness of the glass substrate, thereby reducing the consumption and reduction of power consumption. Cost.

DETAILED DESCRIPTION OF THE INVENTION A storage system in accordance with a preferred embodiment of the present invention will now be described with reference to the accompanying drawings, in which the same elements will be described with the same reference numerals.

Please refer to FIG. 2, which is a schematic diagram of a storage system of the present invention. The storage system 2 is configured to store a plurality of glass substrates, and includes a body 21, a substrate cassette 22 and a flow guiding unit 23.

The body 21 includes a sidewall 211 and at least one receiving compartment 212. The receiving compartment 212 is disposed in the sidewall 211 of the body 21.

Please refer to FIG. 2 and FIG. 3 at the same time. FIG. 3 is a schematic diagram of the substrate cassette of the storage system of the present invention. The substrate cassette 22 is placed in the receptacle 212. The substrate cassette 22 has a cover 221, a bottom plate 222 and a plurality of connecting elements (not shown). The cover body 221 is of a ㄇ type, which is formed by a plurality of connected cover plates 221a (a top cover, two side covers and a back cover), and the bottom plate 222 has an air outlet 61, and the bottom plate 222 The cover plate 221a (a top cover plate, two side cover plates and a back cover plate) are connected and enclosed to form an air inlet 62. In this embodiment, one of the planes of the air outlet 61 is substantially perpendicular to the plane of one of the air inlets 62. In addition, the cover plates 221a (the top cover and the two side cover plates) have a first side length L1 along the air inlet 62 toward one of the air outlets 61, and the bottom plate 222 faces the air inlet 62 toward the air outlet 61. The first side length L1 is greater than the second side length L2, that is, the cover plate 221a (top cover and two side cover plates) adjacent to the air inlet 62 is lower than the bottom plate. 222 is more prominent. The connecting elements are disposed between the cover plates 221a (the top cover, the two side covers and the back cover). Or disposed between the cover plates 221a (the top cover, the two side covers and the back cover) and the bottom plate 222 for fixing the relative positions thereof. In this embodiment, the substrate cassette 22 further has a plurality of supporting members 223 for carrying a plurality of stored glass substrates. The supporting members 223 are disposed on the cover plates 221a perpendicular to the bottom plate 222 and are connected to each other. One of the surfaces of the cover plates 221a is substantially perpendicular.

Please refer to FIG. 2 and FIG. 4 simultaneously. FIG. 4 is a schematic diagram of a substrate cassette and a flow guiding unit according to the present invention. The air guiding unit 23 is disposed on the bottom plate 222 and the air inlet 62 surrounded by the cover 221 , and is disposed between the side wall 211 of the body 21 and the substrate cassette 22 . The size of the flow guiding unit 23 is smaller than the size of the air inlet 62, and the shape of the flow guiding unit 23 cooperates with the shape of the air inlet 62, and the cover plate 221a adjacent to the air inlet 62 (top cover and two side covers) The cover portion 221a (the top cover and the two side cover plates) is covered on the outer side of the flow guiding unit 23, but the cover plate 221a (the top cover) And the two side covers) are not in contact with the flow guiding unit 23. In other words, the flow guiding unit 23 at the hood has a gap between the adjacent cover plates 221a (the top cover and the two side covers). In this embodiment, the gap is greater than 0 cm and less than 1 cm. In addition, the storage system 2 of the present embodiment is exemplified by having the plurality of flow guiding units 23.

Referring to FIG. 2 again, the storage system 2 of the present invention further includes a duct 24 and at least one first fan filter unit 25. The air duct 24 is disposed along the side wall 211 of the body and a top portion 213. The air duct 24 has a plurality of openings 241, and some of the openings 241 are located at an intermediate position near the top portion 213, and some of the openings 241 are disposed opposite to the side wall 211. Flow unit 23 corresponds A portion of the openings 241 are disposed such that the flow guiding units 23 are in communication via the air passage 24. The first fan filter unit 25 is disposed at the top 213 of the body 21, and the gas generated by the first fan filter unit 25 is sent through the air passage 24 to supply the cleaned gas of the flow guiding unit 23 and the body 21. Due to the expansion of the storage system 2, it is easy for the gas received by the partial fan cassette 22 to the first fan filter unit 25 to be weak. Therefore, the storage system 2 further includes at least one second fan filter unit 26 disposed on the substrate cassette 22 far from the first fan filter unit 25 and located at one end of the flow guiding unit 23 away from the air inlet 62 to be cleaned. The gas is sent into the substrate cassette 22, and the fine dust in the substrate cassette 22 is discharged through the air outlet 61. The first fan filter unit 25 and the second fan filter unit 26 of the embodiment are exemplified by a fan filter.

Please refer to FIG. 5, which is another schematic diagram of the storage system of the present invention. The storage system 2 of the embodiment further includes a pick-and-place port 27, a pick-and-place channel 28, and a transport unit 29. The pick-and-place port 27 is disposed on the side wall 211, and the outside of the glass substrate can be placed on the substrate cassette 22 via the pick-and-place port 27 or the glass substrate can be taken out from the substrate cassette 22 . One end of the pick-and-place channel 28 is connected to the pick-and-place port 27, and the other end is connected to the air inlet 62 of the substrate cassette 22. The size of the access passage 28 is smaller than the size of the air inlet 62, and the shape of the access passage 28 cooperates with the shape of the air inlet 62, and the cover 221a (the top cover and the two side covers adjacent to the air inlet 62) The portion is disposed on the outer side of the pick-and-place channel 28, and a gap is formed between the pick-and-place channel 28 of the cover portion and the adjacent cover plate 221a (the top cover and the two side covers), in this embodiment This gap is greater than 0 cm and less than 1 cm.

Please refer to FIG. 5 and FIG. 6 simultaneously. FIG. 6 is a schematic diagram of a substrate cassette and a transport unit of the present invention. The transport unit 29 is movable in a traveling direction for carrying the substrate cassette 22 to and from the accommodating compartment 212 and the pick-and-place channel 28. The traveling direction of this embodiment is the X or Y direction as indicated by the arrow in FIG. The transport unit 29 has a carrying platform 291, at least one baffle 292a, 292b, a rotating mechanism 293, a lifting mechanism 294 and a robot arm 295. The carrier 291 carries the substrate cassette 22. In this embodiment, two baffles 292a and 292b are respectively exemplified, which are respectively disposed on one side of the carrying platform 291 opposite to the traveling direction X, Y and perpendicular to the traveling directions X and Y, that is, the baffles 292a and 292b respectively The baffles 292a and 292b are disposed at the air inlets 62 of the substrate cassette 22 to prevent the dust from falling into the substrate cassette 22, and the traveling directions X and Y are the same as the drawing surface. The direction of the vertical. The rotating mechanism 293 is disposed on the carrying platform 291 to drive the substrate cassette 22 to rotate. The lifting mechanism 294 is connected to the loading platform 291 to drive the loading platform 291 to move up and down. The mechanical arm 295 is disposed on the carrying platform 291 to transport the substrate cassette 22 into the receiving compartment 212, or the substrate cassette 22 is taken out by the receiving compartment 212.

The above is the structure of the storage system 2 disclosed in the present invention. The connection is still based on FIG. 2 to FIG. 6 , and the storage system 2 is used in the actual application as an example, and a brief description is given to explain the storage system. 2 action.

When the storage system 2 is in operation, the first fan filter unit 25 and the second fan filter unit 26 continuously supply clean gas to the body 21 and the substrate cassette 22 to prevent excessive generation of the substrate cassette 22 when transported in the body 21. The dust particles maintain the cleanliness of the body 21.

The glass substrate is transported from the pick-and-place port 27 and the pick-and-place channel 28 to the substrate cassette 22, and the size of the pick-and-place channel 28 is smaller than the size of the air inlet 62, and the shape of the pick-and-place channel 28 and the air inlet 62 are The shapes are matched with each other, and the cover plates 221a (top cover and two side cover plates) adjacent to the air inlet 62 are partially covered on the outer side of the access passage 28, so that the clean air is from the outside of the air pressure. The pick-and-place channel 28 is introduced into the substrate cassette 22 and the body 21, and the dust is prevented from falling into the substrate cassette 22 and the glass substrate during the placement process.

When the substrate cassette 22 is loaded, the transport unit 29 transfers the substrate cassette 22 to the receptacle 212 to be placed. The robot arm 295 moves the substrate cassette 22 from the relative position of the pick-and-place channel 28 to the carrying table 291 of the transport unit 29. At this time, the rotating mechanism 293 rotates the substrate cassette 22 by 90 degrees so that the substrate cassette 22 The air inlet 62 faces the rear end of the traveling direction X, and the baffle 292a seals the air inlet 62 of the substrate cassette 22 to maintain the cleanliness of handling. If the receptacle 212 is to be placed above the body 21, the lifting mechanism 294 of the transport unit 29 drives the carrying platform 291 to rise. When the carrier 291 and the substrate cassette 22 are transported to the front of the accommodating compartment 212, the rotating mechanism 293 rotates the substrate cassette 22 by 90 degrees so that the air inlet 62 side of the substrate cassette 22 faces the body 21. The side wall 211 is further placed into the receiving compartment 212 by the robot arm 295.

The flow guiding unit 23 is disposed at the air inlet 62 of the substrate cassette 22, and is disposed corresponding to the opening 241 of the air duct 24. The first fan filter unit 25 or the second fan filter unit 26 provides a clean gas to the substrate cassette 22 due to the proximity. The cover plate 221a and the two side cover portions of the air inlet 62 are partially covered on the outer side of the flow guiding unit 23, and the air guiding unit 23 of the cover portion and the air inlet 62 of the substrate cassette 22 are The gap is only greater than 0 cm and less than 1 cm, so that the gas in the air duct 24 or the gas of the second fan filter unit 25 can be more concentratedly blown to the substrate cassette 22, and the dust can be prevented from falling into the substrate cassette 22. The gas is blown into the substrate cassette 22 through the air inlet 62, and the fine dust in the substrate cassette 22 is blown to the air outlet 61 and discharged to keep the substrate cassette 22 and the glass substrate clean.

When the substrate cassette 22 is to be taken out of the receiving compartment 212, the transport unit 29 transfers the substrate cassette 22 from the receiving compartment 212 to the carrying platform 291 of the transport unit 29 by the mechanical handpiece 295. At this time, the rotating mechanism 293 will drive The substrate cassette 22 is rotated by 90 degrees so that the air inlet 62 of the substrate cassette 22 faces the rear end of the traveling direction Y, and the shutter 292b provided on the stage 291 seals the air inlet 62 of the substrate cassette 22 to maintain the carrying. Cleanliness. If the accommodating compartment 212 is placed above the body 21, the lifting mechanism 294 of the transport unit 29 will drive the carrying platform 291 down until it is flush with the pick-and-place port 27. When the transport unit 29 transports the substrate cassette 22 to the front of the pick-and-place channel 28, the rotating mechanism 293 rotates the substrate cassette 22 by 90 degrees so that the side of the air inlet 62 of the substrate cassette 22 faces the pick-and-place port 27, and then The substrate cassette 22 is transferred by the robot arm 295 to a position corresponding to the pick-and-place channel 28 to facilitate the external removal of the glass substrate or the placement of the glass substrate in the substrate cassette 22.

In addition, the present invention provides a substrate cassette for storing at least one glass substrate and for use with a flow guiding unit. The substrate cassette includes a cover Body and a bottom plate. The cover has a plurality of cover plates connected thereto. The bottom plate has an air outlet, and the bottom plate is connected with the cover body and encloses to form an air inlet. The size of the air inlet is matched with the size of the flow guiding unit. In the above embodiment, the cover body 221 and the bottom plate 222 have the same technical features, and therefore will not be described again.

In summary, a storage system and a substrate cassette of the present invention cooperate with a substrate cassette and a flow guiding unit, since the size of the flow guiding unit is smaller than the size of the air inlet, the shape of the flow guiding unit, and the shape of the air inlet. The cover portions that are mated to each other and adjacent to the air inlet cover are disposed on the outer side of the flow guiding unit but are not in contact with each other, so that the fine dust is less likely to fall into the substrate cassette, and the gas of the fan filter unit can be more concentratedly blown. The substrate is placed in the cassette, and the dust in the substrate cassette is discharged from the air outlet to maintain the cleanliness of the substrate. The storage system of the invention can reduce the usage of the fan filter unit, and can also effectively blow the gas of the fan filter unit into the substrate cassette to maintain the cleanliness of the glass substrate, thereby reducing the consumption and reduction of power consumption. Cost.

The above is intended to be illustrative only and not limiting. Any equivalent modifications or alterations to the spirit and scope of the invention are intended to be included in the scope of the appended claims.

1, 2‧‧ ‧ warehousing system

11, 21‧‧‧ ontology

12, 22‧‧‧ substrate card

13‧‧‧Fan filter unit

14‧‧‧Exhaust duct

211‧‧‧ side wall

212‧‧‧ 容

213‧‧‧ top

221‧‧‧ cover

221a‧‧‧ cover

222‧‧‧floor

223‧‧‧Support elements

23‧‧‧Guide unit

24‧‧‧ wind channel

241‧‧‧ openings

25‧‧‧First fan filter unit

26‧‧‧Second fan filter unit

27‧‧‧Stop

28‧‧‧ access channel

29‧‧‧Transporting unit

291‧‧‧Loading station

292a, 292b‧‧ ‧ baffle

293‧‧‧Rotating mechanism

294‧‧‧ Lifting mechanism

295‧‧ mechanical arm

61‧‧‧air outlet

62‧‧‧Air inlet

L1‧‧‧ first side length

L2‧‧‧ second side length

X, Y‧‧‧ direction of travel

1 is a schematic view of a conventional storage system; FIG. 2 is a schematic view of a storage system according to the present invention; and FIG. 3 is a schematic view of a substrate cassette according to the present invention; 4 is a schematic view of a substrate cassette and a flow guiding unit in accordance with the present invention; FIG. 5 is another schematic view of a storage system in accordance with the present invention; and FIG. 6 is a schematic view of a substrate cassette and transport unit in accordance with the present invention.

2. . . Warehousing system

twenty one. . . Ontology

211. . . Side wall

212. . .容格

213. . . top

twenty two. . . Substrate card

twenty three. . . Diversion unit

twenty four. . . Wind tunnel

241. . . Opening

25. . . First fan filter unit

26. . . Second fan filter unit

29. . . Conveyor unit

61. . . Air outlet

62. . . Air inlet

Claims (18)

A storage system includes: a body having a side wall and at least one receiving space in the side wall; at least one substrate card is disposed in the receiving space, the substrate card has a cover body and a bottom plate The cover body has a top cover plate, two side cover plates and a back cover plate, the bottom plate has an air outlet, the bottom plate is coupled with the cover body and encloses to form an air inlet; and at least one guide a flow unit, the flow guiding unit is respectively connected to and corresponding to the air inlet, and the bottom of the flow guiding unit is adjacent to the bottom plate, wherein the top cover and the two side covers adjacent to the air inlet are The top cover and the two side covers have a first side length along the air inlet to one of the air outlets, and the bottom plate has a second side length, the first side length is greater than The top side of the first side cover adjacent to the air inlet and the two side cover portions are respectively disposed on the outer side of the flow guiding unit, and the guiding unit at the cover is adjacent to the top cover And a gap between the two side covers, the gap is greater than 0 cm and less than 1 cm. The storage system of claim 1, further comprising: a duct disposed along the side wall and having a plurality of openings. The storage system of claim 2, wherein the flow guiding units are disposed corresponding to the openings, and the flow guiding units are in communication via the air passage. The storage system of claim 1, further comprising: at least one first fan filter unit disposed on top of one of the bodies to supply the clean gas of the flow guiding units. The storage system of claim 1, further comprising: at least one second fan filter unit disposed at one end of the flow guiding unit away from the air inlet. The storage system of claim 1, wherein the flow guiding unit is disposed between the side wall and the substrate cassette. The storage system of claim 1, wherein the substrate cassette further comprises: a plurality of connecting elements disposed between the top cover, the two side covers and the back cover, or disposed on the a top cover, the two side covers, and the back cover and the bottom plate. The storage system of claim 1, wherein the bottom plate having the air outlet is substantially perpendicular to a plane of the air inlet. The storage system of claim 1, further comprising: a transport unit traveling along a traveling direction for carrying the substrate cassette, the transport unit having a carrying platform and a baffle for The baffle is carried, and the baffle is disposed on one side of the carrying platform opposite to the traveling direction and perpendicular to the traveling direction, and the baffle faces the air inlet of the substrate. The warehousing system of claim 9, wherein the conveying unit further has a rotating mechanism on which the loading platform is located. The storage system of claim 9, wherein the delivery The unit further has: a lifting mechanism connected to the carrying platform to drive the loading platform to move up and down; and a mechanical arm disposed on the carrying platform to transport the substrate cassette into the receiving compartment, or the receiving The substrate is snapped out. The storage system of claim 1, further comprising: a pick-and-place port disposed on the side wall; and a pick-and-place channel having one end connected to the pick-and-place port and the other end connected to the substrate card The air inlet is formed, and the size of the access passage is smaller than the size of the air inlet. The storage system of claim 12, wherein the top cover adjacent to the air inlet and the two side cover portions are covered on the outer side of the access passage. The storage system of claim 13, wherein the access passage of the cover has a gap between the top cover adjacent to the cover and the two side covers. The storage system of claim 14, wherein the gap is greater than 0 cm and less than 1 cm. A substrate cassette for storing at least one glass substrate and for use with a flow guiding unit, the substrate cassette comprising: a cover body having a top cover plate and two side cover plates connected thereto a back cover; and a bottom plate having an air outlet, the bottom plate being coupled to the cover and surrounding to form an air inlet The top cover and the two side covers adjacent to the air inlet are of a ㄇ type, and the top cover and the two side covers have a first direction along the air inlet to one of the air outlets. The bottom plate has a second side length, the first side length is greater than the second side length, and the top cover adjacent to the air inlet and the two side cover portions are partially covered by the guide Outside the flow unit, the flow guiding unit at the cover has a gap between the top cover and the two side covers adjacent thereto, and the gap is greater than 0 cm and less than 1 cm. The substrate cassette of claim 16, further comprising: a plurality of connecting elements disposed between the top cover, the two side covers and the back cover, or disposed on the top cover, The two side covers and the back cover are between the bottom plate. The substrate cassette of claim 16, wherein the bottom plate having the air outlet is substantially perpendicular to a plane of the air inlet.