TWI433756B - A milling machine with an angle correction mechanism - Google Patents

Description

Edging machine stage device with angle correction mechanism

The invention relates to the technical field of the edging machine, and in particular to an edging machine stage device with an angle correction mechanism.

Please refer to FIG. 1 , which is a perspective view showing a conventional edging machine stage; in the edging process, the edging machine stage 10 must be edging the glass substrate (panel, not shown) before performing the edging process. The glass substrate positioning process is first performed; that is, the glass substrate is transferred to the air floating device 11 on both sides, and after the air floating device 11 is vacuum-adsorbed and positioned, the image is taken by the alignment CCD, and the output correction angle is calculated. After that, the air flotation device 11 is vacuum-destroyed and causes air floatation, and the rotating base 12 located at the central portion of the stage 10 is driven to rise, so that the glass substrate is detached from the air floating device 11, and then the motor is driven. The rotating base 12 is rotated to correct the angle of the glass substrate to a predetermined angle after calculation, and then the rotating base 12 is driven to descend, and the glass substrate is delivered to the air floating device 11 and the glass substrate is vacuum-adsorbed. In order to facilitate the subsequent image capture of the CCD.

If the image is taken again and the angle of the glass substrate is not up to the preset value, the edging machine stage 10 repeats the above-mentioned glass substrate positioning process until the angle of the glass substrate meets the preset value. In order to perform the edging operation of the glass substrate.

Since the rotating base 12 is raised, lowered or rotated, and the air floating device 11 vacuum-adsorbs the glass substrate, mechanical errors are inevitable; the positioning procedure of the glass substrate is often performed at least twice, resulting in an overall The working hours are lengthened, the production cost is increased, and there is a need for further improvement.

Based on the above problems, the inventors have proposed an edging machine stage device having an angle correcting mechanism to overcome the deficiencies of the prior art.

It is an object of the present invention to provide an edging machine stage apparatus for angularly correcting a substrate by an angle correction mechanism.

Another object of the present invention is to provide an edging machine stage apparatus which can reduce man-hours and reduce costs.

In order to achieve the above object, the present invention provides an edging machine stage device having an angle correcting mechanism, comprising: a base connected to the rotating disk, and the rotating disk is pivotally mounted on the rotating disk fixing seat; And an angle correction mechanism, which is disposed between the base and the rotating disk holder, the angle correcting mechanism comprises: a fixing plate, a pivoting plate, an actuator and a slave, and the fixing plate is connected to the rotating disk The pivoting plate is pivotally connected to the fixed plate, and the actuator is fixed to the pivoting plate and pivoted to the base through the actuator; thereby driving the actuator by using the power of the actuator The movement enables the base to rotate relative to the rotating disk holder, thereby correcting the angle of a substrate carried on the base.

While the invention has been described in terms of several preferred embodiments, the preferred embodiments of the present invention It is not intended that the invention be limited to the following drawings and embodiments.

Please refer to FIG. 2 to FIG. 5 , wherein FIG. 2 is a perspective view showing the edging machine stage of the present invention, FIG. 3 is a partial perspective view showing the edging machine stage of the present invention, and FIG. 4 is a view showing the present invention. Fig. 5 is a partially exploded perspective view showing the angle correcting mechanism of the edging machine stage device of the present invention.

As shown in FIG. 2, the edger table device 1 of the present invention includes at least an angle correcting mechanism 2 and a base 3.

The base 3 has a substantially rectangular structure and is connected to a rotating disk 31. The rotating disk 31 is pivotally mounted on a rotating disk holder 32. The base 3 has a corresponding two linear rails 33. It can be provided with a device for carrying a substrate (not shown; for example, a glass substrate, etc.) (not shown; for example, an air flotation device).

The angle correcting mechanism 2 includes an actuator 21, a slave 22, a fixing plate 23 and a pivoting plate 24. The actuator 21 can be a servo motor, and the actuator 21 and the actuator 22 are arranged. On the pivoting plate 24, the follower 22 includes a lead screw 221 and a threaded sleeve 222, and the lead screw 221 pivots through the threaded sleeve 222. When the actuator 21 rotates the lead screw 221, the threaded sleeve 222 can be Moving on the lead screw 221, the base 3 can be rotated relative to the rotating disc holder 32; the actuator 21 is connected to one end of the lead screw 221, and the screw sleeve 222 is provided with a supporting column 223 so that the actuator 22 can be permeable. The support post 223 is pivotally connected to the base 3. The fixed plate 23 is connected to the rotating plate fixing base 32. The pivoting plate 24 is pivotally connected to the fixed plate 23. The actuator 21 is fixed to the pivoting plate 24 and is transparent. The pivoting plate 24 is pivotally connected to the base 3; the pivoting plate 24 is provided with a pivot 241, and the fixing plate 23 is provided with a pivot hole 231. The fixing plate 23 can be assembled by the pivot 241 and the pivot hole 231. The pivoting plate 24 is pivoted.

The edging machine stage device 1 further includes an arc-shaped guide rail 4 which is disposed between the pivoting plate 24 and the fixed plate 23. The curved guide rail 4 includes an arc-shaped sliding groove 41 and the curved sliding groove 41. One of the arc-shaped slide rails 42 is assembled, and the curved chutes 41 are fixed to the pivoting plate 24, and the curved slide rails 42 are fixed to the fixed plate 23.

Furthermore, the edging machine stage device 1 further includes two stops 51, 52 which are respectively disposed at opposite ends of the curved guide rail 4 for limiting the maximum sliding stroke of the curved guide rail 4.

Therefore, when the angle correction is required, the lead screw 221 of the slave 22 is driven by the actuator 21 to rotate, and the screw sleeve 222 is linearly moved while being curved by the curved sliding groove 41 of the curved guide rail 4. The relative action of the rail 42 causes the arcuate chute 41 under the pivoting plate 24 to rotate along the curved sliding rail 42 and the pivoting plate 24 to perform a slight rotation of an angle θ, thereby driving the edging machine stage device 1 The susceptor 3 performs a slight rotation of an angle θ with the center of the rotary disk 31 to correct the angle.

Of course, the aforementioned θ angle can be obtained by taking an image from the alignment CCD for calculation.

With the above configuration, the angle correcting mechanism 2 of the present invention directly corrects the θ angle of the pedestal 3 of the edging machine stage device 1 as compared with the prior art. That is, in the process of performing the substrate positioning process of the present invention, the substrate system is always adsorbed on the air floating device without being as described in the prior art: it is necessary to rise, fall or rotate through the rotating base (as shown in FIG. 1 and 12). And the air-floating device (see FIG. 1 and 11) is used to perform vacuum adsorption or vacuum breaking on the substrate. Therefore, compared with the prior art, the present invention can reduce the time of the positioning process before the substrate edging by at least 2.5 seconds. To reduce the cost of working hours and reduce costs.

Although the present invention has been explained in connection with the preferred embodiments, it is not intended to limit the invention. It should be noted that many other similar embodiments can be constructed in accordance with the teachings of the present invention, which are within the scope of the present invention.

10‧‧‧ edging machine stage

11‧‧‧Air flotation device

12‧‧‧Spinning base

1‧‧‧ edging machine stage device

2‧‧‧Angle correction mechanism

21‧‧‧Actuator

22‧‧‧ slaves

221‧‧‧ lead screw

222‧‧‧Spiral sleeve

223‧‧‧Support column

23‧‧‧ Fixed plate

231‧‧‧ pivot hole

24‧‧‧ pivot board

241‧‧‧ pivot

3‧‧‧Base

31‧‧‧ rotating disk

32‧‧‧Rotary disk mount

33‧‧‧linear track

4‧‧‧Arc Guide

41‧‧‧Arc chute

42‧‧‧ Curved rails

51‧‧‧blocks

52‧‧‧blocks

Θ‧‧‧ angle

Figure 1 shows a perspective view of a conventional edging machine stage.

Figure 2 is a perspective view showing the apparatus of the edging machine stage of the present invention.

Fig. 3 is a partial perspective view showing the edging machine stage device of the present invention.

Fig. 4 is a perspective view showing the angle correcting mechanism of the edging machine stage device of the present invention.

Figure 5 is a partially exploded view showing the angle correcting mechanism of the edging machine stage device of the present invention.

2‧‧‧Angle correction mechanism

21‧‧‧Actuator

22‧‧‧ slaves

221‧‧‧ lead screw

222‧‧‧Spiral sleeve

223‧‧‧Support column

23‧‧‧ Fixed plate

24‧‧‧ pivot board

42‧‧‧ Curved rails

51‧‧‧blocks

Claims (10)

An edging machine stage device having an angle correcting mechanism, comprising: a base connected to a rotating disk, wherein the rotating disk is pivoted on a rotating disk fixing seat; and an angle correcting mechanism The angle correction mechanism includes: a fixing plate, a pivoting plate, an actuator, and a follower, wherein the fixing plate is connected to the base plate and the rotating plate fixing base a rotating plate fixing base, the pivoting plate is pivotally connected to the fixing plate, the actuator is fixed to the pivoting plate, and is pivotally connected to the base through the driven device; thereby utilizing the The power of the actuator drives the slave to move, so that the base can rotate relative to the rotating disk holder, thereby correcting the angle of a substrate carried on the base. The edging machine stage device of claim 1, wherein the follower includes a lead screw and a threaded sleeve, and the lead screw pivots through the threaded sleeve when the actuator When the lead screw rotates, the nut sleeve can move on the lead screw, and the base can be rotated relative to the rotating disc holder. The edging machine stage device according to claim 2, wherein the screw sleeve protrudes from a support column such that the slave can pivotally connect the base through the support column. The edging machine stage device according to claim 1, wherein the pivoting plate is provided with a pivot shaft, and the fixing plate is provided with a pivot hole, and the pivoting shaft and the pivot hole are combined to make The fixing plate is pivotally connected to the pivoting plate. According to the edging machine stage device described in item 1 of the patent application scope, There is an arc-shaped guide rail which is disposed between the pivoting plate and the fixing plate. The edging machine stage device according to claim 5, wherein the curved guide rail comprises an arc chute and an arc-shaped slide rail matched with the arc chute, and the arc shape The sliding slot is fixed to the pivoting plate, and the curved sliding rail is fixed to the fixing plate. The edging machine stage device according to Item 5 of the patent application scope further includes two stoppers respectively disposed at two ends of the curved guide rail for limiting the maximum sliding stroke of the curved guide rail. The edging machine stage device according to claim 1, further comprising an air floating mechanism mounted on the base to carry the substrate. The edging machine stage device according to claim 8, wherein the substrate is a glass substrate. The edging machine stage device according to claim 1, wherein the actuator is a servo motor.