201221295 六、發明說明: 【發明所屬之技術領域】 本發明係與磨邊機的技術領域有關,特別是有關於一 種具有角度補正機構之磨邊機載臺裝置。 【先前技術】 請參考圖1,係表示習知磨邊機載臺之立體外觀圖; 習知的磨邊機載臺10在磨邊製程中,在進行玻璃基板(面 Φ 板,圖未示)磨邊前,必須要先進行玻璃基板定位之程序; 亦即,將玻璃基板傳送到兩側的氣浮裝置11上,於氣浮裝 置11真空吸附而定位後,以對位CCD進行取像,再計算 輸出補正角度值,之後便令氣浮裝置11真空破壞且造成氣 浮,並驅動位於該載臺10中央部份的旋轉基座12上昇, 以令該玻璃基板脫離該氣浮裝置11,再驅動馬達(圖未示) 轉動旋轉基座12以補正該玻璃基板之角度至計算後之預 定角度,然後再驅動旋轉基座12下降,而將該玻璃基板交 φ 付給氣浮裝置11並將該玻璃基板予以真空吸附,以利後續 • 對位CCD進行取像之動作。 - 若再次取像並計算該玻璃基板之角度不符合預設值時 ,該磨邊機載臺1Ό使要再重複進行前述之玻璃基板定位程 序,直到該玻璃基板之角度符合預設值,此時,方可進行 玻璃基板之磨邊作業。 由於旋轉基座12上昇、下降或轉動,以及氣浮裝置 11對玻璃基板進行真空吸附,難免會有機械誤差產生;使 得該玻璃基板之定位程序往往要執行至少二次,導致整體 201221295 之作業工時拉長,生產成本增加,而有再加以改進之必要 〇 基於上述問題,發明人提出了一種具有角度補正機構 之磨邊機載臺裝置,以克服現有技術的缺陷。 【發明内容】 本發明目的在於提供一種藉由角度補正機構對基板進 行角度補正之磨邊機載臺裝置。 本發明之另一目的,係在於提供一種可縮短工時,且 降低成本的磨邊機載臺裝置。 為達上述目的,本發明係提供一種具有角度補正機構之 磨邊機載臺裝置,其係包括:基座,其係連設於旋轉盤上, 而旋轉盤係樞設於旋轉盤固定座;及角度補正機構,其架 設於基座與旋轉盤固定座之間,角度補正機構包括有:固 定板、樞動板、致動器及從動器,而固定板係連設於該旋 轉盤固定座,樞動板係樞接於固定板,該致動器係固設於 樞動板,並透過從動器而框接基座;藉此便可利用致動器 之動力而驅動從動器運動,使得基座可相對旋轉盤固定座 作旋轉,進而可對一承載於基座上之基板進行角度之補正。 【實施方式】 雖然本發明使用了幾個較佳實施例進行解釋,但是下 列圖式及具體實施方式僅僅是本發明的較佳實施例;應說 明的是,下面所揭示的具體實施方式僅僅是本發明的例 子,並不表示本發明限於下列圖式及具體實施方式。 201221295 請同時參考圖2至圖5,其中,圖2係表示本發明磨 邊機載臺之立體外觀圖’圖3係表示本發明磨邊機載臺之 部分立體外觀圖’圖4係表示本發明磨邊機載臺裝置之角 度補正機構的立體圖,圖5係表示本發明磨邊機栽臺裴置 之角度補正機構的部分分解圖。 本發明之磨邊機載臺1係如圖2所示,至少包括—角 度補正機構2及一基座3。 基座3係大致呈矩形結構’其係連設於一旋轉盤3〗上 ’而旋轉盤31係樞設於一旋轉盤固定座32 ;而基座3上 具有相對應設置的二線性軌33,其係可設置一用以承載某 板(圖未示;如:玻璃基板等)之裝置(圖中未示;如. > 二 裝置)。 n 角度補正機構2係包括一致動器21、一從動器22、一 固定板23及一樞動板24,而致動器21可為一伺服馬達, 致動器21與從動器22係設置在樞動板24上,從動器22 包括一導螺桿221及一螺套222,而導螺桿221係樞'^螺 套222,當致動器21令導螺桿221轉動時,螺套222便可 在導螺桿221上移動,而可帶動基座3相對旋轉盤固定座 32作旋轉;致動器21連接導螺桿221的一端,螺套222 突設有一支撐柱223,使得從動器22可透過支撐柱223而 枢接基座3 ’固定板23係連設於旋轉盤固定座32,樞動板 24係樞接於固定板23,致動器21係固設於樞動板24,並 透過從動器22而枢接基座3 ;枢動板24突設有一樞軸241 ’固定板23設有一樞孔231,藉由樞軸241與樞孔231之 組配’而令固定板23可樞接枢動板24。 .···»: 201221295 -磨邊载$裝置1更包括有—弧形導軌4, 樞動板24與固定板23之間,弧形導勺:二二於 滑槽41及與該弧形滑槽41相組配 =^形 板=係固設於樞動板24,弧形滑執42係固設於固定 再者’磨邊載臺裝置】尚包括有二個擔塊5i、52,l 弧形導軌4兩端’用以限制該弧形導… 動^ ^要進行角度補正時,#由致動11 21驅動從 動益22導螺桿22丨轉動,並罄 切攸 , ▼動累套222線性移動,同時 ,曰使杷動板24二形滑槽41與弧形滑軌42的相對作用 =動:24下的弧形滑槽41隨著弧 麵轉動,進而帶動載台1的基座3 。 、讀θ角的微幅轉動,以進行角度的補正 影像^行取得’係可以根據對位_榻取 補= : = = :本發明之角度 的補正〇 邊域台1的基座3進行θ角 孫明在執行基衫㈣序齡中,基板 透在氣浮置上’而無需如先前技術所述的::需 圖1之12)上昇、下降或轉動,心 複動作U)對基板進行真空吸附或破真空等反 是動作。因此,本發明相較習 之定位程序時係至少可減少2.5秒的時間== 201221295 工時、降低成本的功效。 雖然本發明以相關的較佳實施例進行解釋,但是這並 不構成對本發明的限制。應說明的是,本領域的技術人員 根據本發明的思想能夠構造出很多其他類似實施例,這些 均在本發明的保護範圍之中。 201221295 【圖式簡單說明】 圖J 圖2 圖3 圖4201221295 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to the technical field of an edger, and more particularly to an edging machine stage device having an angle correction mechanism. [Prior Art] Please refer to FIG. 1 , which is a perspective view showing a conventional edging machine stage; a conventional edging machine stage 10 is in a edging process, and a glass substrate (surface Φ plate is shown, not shown) Before edging, the procedure of positioning the glass substrate must be performed first; that is, the glass substrate is transferred to the air floating device 11 on both sides, and after the air floating device 11 is vacuum-adsorbed and positioned, the image is taken by the alignment CCD. Then, the output correction angle value is calculated, and then the air floating device 11 is vacuum-destroyed and caused to float, and the rotating base 12 located at the central portion of the stage 10 is driven to rise, so that the glass substrate is separated from the air floating device 11 And driving the motor (not shown) to rotate the rotating base 12 to correct the angle of the glass substrate to a predetermined angle after calculation, and then driving the rotating base 12 to lower, and the glass substrate is delivered to the air floating device 11 The glass substrate is vacuum-adsorbed to facilitate the follow-up operation of the alignment CCD. - if the image is taken again and the angle of the glass substrate is not up to the preset value, the edging machine stage 1 repeats the above-mentioned glass substrate positioning process until the angle of the glass substrate meets the preset value. The edging operation of the glass substrate can be performed. Since the rotating base 12 is raised, lowered or rotated, and the air floating device 11 vacuum-adsorbs the glass substrate, mechanical errors are inevitable; the positioning procedure of the glass substrate is often performed at least twice, resulting in the overall work of 201221295 The time is elongated, the production cost is increased, and there is a need for further improvement. Based on the above problems, the inventors have proposed an edging machine stage device having an angle correction mechanism to overcome the drawbacks of the prior art. SUMMARY OF THE INVENTION An object of the present invention is to provide an edging machine stage device for correcting an angle of a substrate by an angle correcting mechanism. Another object of the present invention is to provide an edging machine stage apparatus which can reduce man-hours and reduce costs. In order to achieve the above object, the present invention provides an edging machine stage device having an angle correcting mechanism, comprising: a base connected to the rotating disk, and the rotating disk is pivotally mounted on the rotating disk fixing seat; And an angle correction mechanism, which is disposed between the base and the rotating disk holder, the angle correcting mechanism comprises: a fixing plate, a pivoting plate, an actuator and a slave, and the fixing plate is connected to the rotating disk The pivoting plate is pivotally connected to the fixed plate, and the actuator is fixed to the pivoting plate and is coupled to the base through the driven device; thereby driving the driven device by using the power of the actuator The movement enables the base to rotate relative to the rotating disk holder, thereby correcting the angle of a substrate carried on the base. The present invention has been described in terms of several preferred embodiments, but the following drawings and specific embodiments are merely preferred embodiments of the present invention; it should be noted that the specific embodiments disclosed below are only The examples of the invention are not intended to limit the invention to the following drawings and specific embodiments. 201221295 Please refer to FIG. 2 to FIG. 5 at the same time, wherein FIG. 2 is a perspective view showing the edging machine stage of the present invention. FIG. 3 is a partial perspective view showing the edging machine stage of the present invention. FIG. 4 is a view showing the present invention. Fig. 5 is a partially exploded perspective view showing the angle correcting mechanism of the edging machine stage device of the present invention. The edging machine stage 1 of the present invention, as shown in Fig. 2, includes at least an angle correcting mechanism 2 and a susceptor 3. The base 3 has a substantially rectangular structure 'connected to a rotating disc 3' and the rotating disc 31 is pivotally mounted on a rotating disc holder 32; and the base 3 has corresponding two linear rails 33. It can be provided with a device for carrying a certain plate (not shown; for example, a glass substrate, etc.) (not shown; for example, > two devices). n The angle correcting mechanism 2 includes an actuator 21, a follower 22, a fixing plate 23 and a pivoting plate 24, and the actuator 21 can be a servo motor, and the actuator 21 and the actuator 22 Disposed on the pivoting plate 24, the slave 22 includes a lead screw 221 and a threaded sleeve 222, and the lead screw 221 is pivoted 222. When the actuator 21 rotates the lead screw 221, the screw sleeve 222 It can move on the lead screw 221, and can drive the base 3 to rotate relative to the rotating disc holder 32; the actuator 21 is connected to one end of the lead screw 221, and the screw sleeve 222 protrudes with a supporting column 223, so that the slave 22 The fixing plate 23 is connected to the rotating plate fixing base 32 through the support column 223. The pivoting plate 24 is pivotally connected to the fixing plate 23, and the actuator 21 is fixed to the pivoting plate 24. The pivoting plate 24 is pivotally connected to the base 3; the pivoting plate 24 is provided with a pivot 241. The fixing plate 23 is provided with a pivot hole 231, and the fixing plate is fixed by the combination of the pivot 241 and the pivot hole 231. 23 can pivot the pivoting plate 24. .···»: 201221295 - The edging load device 1 further includes an arc-shaped guide rail 4, between the pivoting plate 24 and the fixed plate 23, an arc-shaped guide spoon: two-two in the chute 41 and the curved shape The chute 41 phase combination = ^ shaped plate = is fixed on the pivoting plate 24, the curved sliding buff 42 is fixed in the fixed and further 'extinguishing stage device" still includes two load blocks 5i, 52, l Both ends of the curved guide rail 4 are used to limit the arc guide... When the angle is corrected, the #11 is driven by the actuating 11 21 to drive the lead screw 22 to rotate, and 罄 攸, ▼ The sleeve 222 moves linearly, and at the same time, the relative action of the two-shaped chute 41 and the curved slide rail 42 of the swaying plate 24 is reversed: the arc-shaped sliding groove 41 under the rotation of the curved surface 41 rotates along the curved surface, thereby driving the stage 1 Pedestal 3 . And reading the θ angle of the micro-rotation to correct the angle of the image ^ line can be obtained according to the alignment _ couch complement = = = =: the angle of the invention of the correction of the pedestal 3 of the pedestal 3 θ In the execution of the basecoat (four) sequence, the angle of the substrate is on the air floating 'without the prior art:: need to be as shown in the prior art: 12) rise, fall or rotate, the heart re-action U) on the substrate Vacuum adsorption or vacuum breaking is the action. Therefore, the present invention can reduce the time by at least 2.5 seconds when the positioning procedure is compared with the conventional positioning procedure == 201221295, and the cost reduction effect. Although the present invention has been explained in connection with the preferred embodiments, it is not intended to limit the invention. It should be noted that many other similar embodiments can be constructed in accordance with the teachings of the present invention, which are all within the scope of the present invention. 201221295 [Simple diagram of the diagram] Figure J Figure 2 Figure 3 Figure 4
表示^知磨邊機载臺之立體外觀圖。 表示本發明磨邊機裁臺之立體外觀圖。 表示本·1¾明磨邊機載臺之部分立體外觀圖。 表不本發明磨邊機载臺裝置之角度補正機構的立體 圖。 表不本發明磨邊機載臺裝置之角度補正 分解圖。 機構的部分 【主要元件符號說明】 10 磨邊機載臺 11 氣浮裝置 12 旋轉基座 1 磨邊機載臺 2 角度補正機構 21 致動器 22 從動器 221 導螺桿 222 螺套 223 支撐柱 23 固定板 231 樞孑L 24 樞動板 241 才區車由 3 基座 201221295 31 旋轉盤 32 旋轉盤固定座 33 線性軌 4 弧形導軌 41 弧形滑槽 42 弧形滑軌 51 擋塊 52 擋塊 Θ 角度It shows the stereoscopic appearance of the grinding machine. A perspective view showing the edging machine cutting table of the present invention. It shows a partial three-dimensional appearance of the Ben 13⁄4 Ming edging machine. The perspective view of the angle correcting mechanism of the edging machine stage device of the present invention is shown. It is not an angle correction exploded view of the edging machine stage device of the present invention. Part of the mechanism [Key component symbol description] 10 Edging machine stage 11 Air flotation device 12 Rotary base 1 Edging machine stage 2 Angle correction mechanism 21 Actuator 22 Follower 221 Lead screw 222 Screw sleeve 223 Support column 23 Fixing plate 231 Pivot L 24 Pivot plate 241 Car area 3 Base 201221295 31 Rotating disk 32 Rotating disk holder 33 Linear rail 4 Curved rail 41 Curved chute 42 Curved rail 51 Block 52 Block Block Θ angle