TWI433729B - Discharge apparatus and discharging method - Google Patents

Description

Discharge device and discharge method

The present invention relates to a discharge device and a discharge method.

With the development of an information society in recent years, the demand for larger liquid crystal display devices has increased, and it is expected to improve productivity. In a color liquid crystal display device, a color filter is used in order to fully color the display image. The color filter is produced by arranging three colors of inks of R (red), G (green), and B (blue) in a predetermined pattern on a substrate. Regarding the discharge of ink, most of the ink is discharged.

Conventionally, many discharge devices include a pedestal that is stationary with respect to a reference surface, a substrate moving portion that is movable in a first direction on the pedestal, and is movable in a second direction (perpendicular to the first direction and parallel to the reference plane) ) Moving the head holding portion.

The apparatus described in Patent Document 1 employs a head moving method (the head holding portion reciprocates to scan the substrate to eject ink). Depending on the head movement mode, it takes a longer time for the ink to be ejected as the substrate is enlarged, and it is difficult to control the head so that the ink can be dropped at a uniform interval.

The above-described problem can be solved by the head holding portion (the stationary portion with respect to the pedestal) having a plurality of discharge ports and allowing the head to discharge ink toward the substrate passing therebelow.

However, in the head rest mode, in order to discharge the ink from the discharge port to each landing position on the substrate, it is necessary to perform an operation of properly aligning the substrate and the head.

As the size of the substrate increases, it becomes difficult to control the movement of the substrate moving portion, and the alignment of the substrate and the head is performed even before the substrate enters the lower portion of the head, and the movement is performed in the first direction from the aligned position to the discharge position. The direction of the substrate moving portion may cause a tilt in a rotation direction parallel to the reference plane due to a difference in the amount of movement on each track (inclination with respect to the first direction or the second direction on a plane parallel to the reference plane) ).

In other words, in order to discharge the ink from the discharge port to each of the landing positions, it is necessary to perform the work of detecting and correcting the inclination of the substrate moving portion caused by the period below the head.

[Patent Document 1] Japanese Patent Laid-Open No. Hei 11-248925

[Patent Document 2] Japanese Patent Laid-Open Publication No. 2008-238143

[Patent Document 3] Japanese Patent Laid-Open Publication No. 2008-145203

[Patent Document 4] Japanese Laid-Open Patent Publication No. 2006-245174

The present invention has been made to solve the above problems of the prior art, and an object of the present invention is to provide a discharge device capable of detecting a laser using a laser to discharge a discharge liquid toward a substrate. The inclination of the rotation direction of the substrate moving portion which is generated in parallel with the reference plane is corrected and corrected.

In order to solve the above problems, the discharge device of the present invention includes a pedestal that is stationary with respect to the reference surface, two rails that are disposed in the first direction on the pedestal, and are fixed to the pedestal for holding the head (respectively provided a head holding portion having a plurality of discharge ports, a substrate moving portion on which the substrates are placed on the two tracks, and a substrate moving portion that moves in the first direction along the two tracks a rail moving mechanism below the head holding portion; a discharge liquid is discharged from the discharge port toward a substrate disposed on the substrate moving portion, and droplets of the discharge liquid are dropped on the substrate; and the discharge device includes: The first and second main light transmitting devices that respectively send the first and second main measurement lights in the first direction are separately provided in the second direction (perpendicular to the first direction and parallel to the reference surface) and are 1. The first and second main mirror devices that reflect the first and second main reflected light when the second main measurement light is irradiated, receive the first main measurement light, and the first main Detecting the first main interference device that detects the first main interference result of the first main measurement light and the first main reflected light, and receives the second main measurement light and the second main reflection light to detect the first a second main interference device that combines the second main measurement light and the second main interference result of the second main reflected light, and obtains the first main interference device and the first main mirror respectively according to the first and second main interference results a first primary distance between the devices, a second primary distance between the second primary interference device and the second primary mirror device, and a control device for transmitting the measurement results of the measurement device; the first and second The primary interference device and one of the first and second primary mirror devices are disposed on the substrate moving portion, and the other device is stationary with respect to the pedestal; the first and second primary interference devices are disposed in the foregoing Between the first and second main mirror devices and the first and second main light transmitting devices; the on-track moving mechanism includes: applying a relative to the first track to the substrate moving portion a first moving mechanism for moving the force, and a second moving mechanism for applying a second moving force to the second moving track to the substrate moving portion; wherein the control device determines the first portion according to the first and second main distances First, the size of the second moving force.

In the discharge device of the present invention, the control device controls the first and second moving mechanisms to move the substrate moving portion along the two tracks based on a set value of a difference between the first and second main distances.

The discharge device of the present invention includes: a head moving mechanism that can move the head in the second direction; a first sub-light transmitting device that sends the first sub-measurement light in the second direction, and the first sub-lighting device Measuring, by the sub-mirror device that reflects the first sub-reflected light when the light is irradiated, receives the first sub-measurement light and the first sub-reflected light, and detects the first sub-measurement light and the first sub-reflected light. a first sub-interference device that interferes with the result, and a measurement device that obtains a distance between the sub-mirror device and the first sub-interference device based on the first sub-interference result; among the first sub-interference device and the sub-mirror device One of the devices is disposed on a side parallel to the moving direction of the substrate moving portion (the first direction), and the other device is stationary with respect to the pedestal; the control device is based on the sub-mirror device and the first pair Calculating a position in the second direction of the substrate moving portion by a distance between the interference devices, and a position in the second direction of the substrate moving portion and the head portion The difference between the position of said second direction to determine the head moving mechanism so that the moving amount of the head.

The discharge device of the present invention includes: a head moving mechanism that can move the head in the second direction, a first and second sub-light transmitting device that sends out the first and second sub-measurements, and the first a second sub-mirror device that reflects the first and second sub-reflected lights while receiving the second sub-measurement light, and receives the first and second sub-measurement lights and the first and second sub-reflected lights to detect the foregoing First and second sub-interference devices that first and second sub-measurement light and interference results of the first and second sub-reflected lights, and the sub-mirror device and the first sub-interference device are obtained based on the first and second sub-interference results a device for measuring a distance between the first and second sub-interference devices; wherein one of the first and second sub-interference devices and the sub-mirror device is disposed in the substrate moving portion, and the other device is opposite to the pedestal The control device determines the substrate shift based on either or both of the distance between the sub-mirror device and the first sub-interference device and the distance between the sub-mirror device and the second sub-interference device. The position of the portion of the second direction in accordance with the difference between the position of the movable portion of the substrate in the second direction and the position of the head of a second direction to determine the head moving mechanism allows the head moving amount.

In the above-described control device, the control device is configured to control the head moving mechanism based on a set value of a difference between a position of the second moving direction of the substrate moving portion and a position of the head in the second direction. The substrate moving portion moves along the two tracks described above.

In the discharge method of the present invention, the substrate moving portion (moving in the first direction from the start point to the end point along the two tracks from the start point and the end point on the opposite side of the head portion on the water platform seat) is placed. The substrate moves the substrate moving portion toward the end point, and when the substrate passes under the head portion, discharges the discharge liquid from the discharge port toward the substrate, and when the substrate moving portion reaches the end point, the substrate is dried and then The substrate is removed from the substrate moving portion; and before the movement of the substrate moving portion, the tilt of the substrate moving portion with respect to the first direction or the second direction on a surface parallel to the reference surface is measured, and the substrate is moved. In the movement of the portion, the tilt of the substrate moving portion is measured, and the amount of movement on the two tracks is changed so that the error caused by the tilt of the substrate moving portion becomes zero, and the substrate moving portion is changed. The aforementioned inclination is the same as the aforementioned inclination before the movement, and the substrate is allowed to pass under the head.

In the discharge method of the present invention, the position of the substrate moving portion in the second direction is measured before the movement of the substrate moving portion, and the tilting of the substrate moving portion and the start of movement before the movement of the substrate moving portion are performed. After the inclination is the same, the position of the substrate moving portion in the second direction is measured, and the difference between the position of the substrate moving portion in the second direction and the position of the head in the second direction is Moving the head in the same manner, the substrate is passed under the head in a state in which the relative positional relationship between the substrate moving portion and the head in the second direction is the same as the relative positional relationship before the movement. .

In the discharge method of the present invention, after the substrate is placed on the substrate moving portion, the substrate moving portion is moved, and before the substrate enters the lower portion of the head portion, the substrate is placed on the substrate. Each landing position is aligned by being disposed directly below the discharge port of the head.

In the discharge method of the present invention, one of the substrate moving portion and the pedestal is disposed such that the first and second main reflected lights are deflected by the first and second main measurement lights, and the first and second main reflected lights are folded back. The main mirror device is configured to receive the first main interference light and the first main reflected light to detect a first main interference result of the first main measurement light and the first main reflection light of the first main reflection light And a second main interference device that receives the second main measurement light and the second main reflected light to detect a second main interference result of the second main measurement light and the second main reflection light; And obtaining, by the second main interference result, first and second main distances between the first and second main interference devices and the first and second main mirror devices, and measuring the first and second main distances The inclination of the substrate moving portion; and a sub-mirror device that reflects the first and second sub-reflected lights and is folded back when the first and second sub-measurement lights are irradiated, and is disposed in any one of the substrate moving portion and the pedestal; In another a first sub-interference device that receives the first sub-measurement light and the first sub-reflected light and detects a first sub-interference result of the first sub-measurement light and the first sub-reflected light, and receives the first a second sub-interference device that detects the second sub-interference result of the second sub-measurement light and the second sub-reflected light by the second measurement light and the second sub-reflected light; according to the first and second sub-interference results Calculating the first and second sub-distances between the first and second sub-interference devices and the sub-mirror device, and measuring the first portion of the substrate moving portion based on one or both of the first and second sub-distances The position in the second direction.

According to the difference in the amount of movement of the substrate moving portion (moving the substrate along the two tracks) on the respective tracks, the inclination of the rotation direction parallel to the reference surface is detected and corrected, so that the ink can be accurately ejected toward the substrate, and the substrate can be lifted. Manufacturing yield.

The case where the discharge device is used to manufacture RGB (red, green, and blue) color filters will be described as an example.

The present invention is not limited to the manufacture of RGB color filters, and includes, for example, EL (electroluminescence) display elements and liquid crystal display devices.

<Manufacture of spit device>

Fig. 1 is a side view of a discharge device 10 used in the present invention, and Fig. 2 is a plan view.

The discharge device 10 includes a pedestal 70 that is stationary with respect to a horizontal reference surface, elongated first and second rails 71a and 71b, a substrate moving portion 20, and a head holding portion 30. The first and second rails 71a and 71b are fixed to the pedestal 70 such that the longitudinal directions thereof are parallel to each other. The substrate moving portion 20 is disposed on the first and second rails 71a and 71b. The head holding portion 30 is fixed to the support 72 of the pedestal 70 and is fixed to a position higher than the height of the substrate moving portion 20 on the first and second rails 71a and 71b.

The substrate moving portion 20 has an on-track moving mechanism 41. The on-track moving mechanism 41 is disposed between the first and second rails 71a, 71b and the substrate moving portion 20.

The on-track moving mechanism 41 is provided with first and second moving mechanisms 48a and 48b on the first and second rails 71a and 71b, respectively. When the first and second moving mechanisms 48a, 48b respectively receive the signals transmitted by the control device 92, the first and second moving forces with respect to the first and second tracks 71a, 71b are applied to the substrate moving portion 20, so that The substrate moving portion 20 moves along the first and second rails 71a, 71b.

The first and second moving mechanisms 48a, 48b are, for example, linear motors. Fig. 6 is a cross-sectional view taken along the line A-A of the discharge device 10 which is an example of the structure of the rail moving mechanism 41. The first and second moving mechanisms 48a and 48b include first and second movable electromagnets 45a and 45b and a plurality of first and second fixed electromagnets 46a and 46b, respectively. The first and second movable electromagnets 45a and 45b are fixed below the substrate moving portion 20. The plurality of first and second fixed electromagnets 46a and 46b are fixed so as to be arranged at equal intervals in each of the tracks in the longitudinal direction of each of the first and second rails 71a and 71b.

An air ejection port 47 is provided on a downward surface of the substrate moving portion 20, and air is ejected from the air ejection port 47, so that the substrate moving portion 20 and the first and second rails 71a and 71b can be separated by an air layer. contact.

When receiving the signals transmitted from the control device 92, the first and second moving mechanisms 48a and 48b respectively change the magnetic poles of the plurality of first and second fixed electromagnets 46a and 46b in the longitudinal direction of each track. Thereby, the first and second movable forces with respect to the first and second rails 71a and 71b are applied to the substrate moving portion 20 to which the first and second movable electromagnets 45a and 45b are attached, respectively. Since the first and second rails 71a and 71b are fixed to the pedestal 70, the first and second moving forces are applied to the substrate moving portion 20, so that the first and second rails 71a and 71b can be moved.

The substrate moving portion 20 is reciprocally movable below the head holding portion 30 by moving along the first and second rails 71a and 71b.

In the discharge device 10 of the present invention, by moving the substrate moving portion 20 on the two tracks (the first and second tracks 71a, 71b), even if the substrate moving portion 20 is moved on one track, even if the substrate moves When the portion 20 is enlarged, stable movement can be performed.

Hereinafter, the moving direction (first direction) of the substrate moving portion 20 that moves along the first and second tracks 71a and 71b is referred to as a y-axis direction, and a direction (second direction) perpendicular thereto and parallel to the reference surface is referred to as a y-axis direction. Is the x-axis direction.

The head holding portion 30 includes a mounting plate 33 and a plurality of heads 32 attached to the mounting plate 33.

Fig. 4 is a view showing the arrangement of the head 32 and the discharge port 35.

Each head 32 has a plurality of discharge ports 35. A plurality of discharge ports 35 of one head 32 are arranged in a row on one side of the head portion 32 to form a discharge port row, or a plurality of rows parallel to each other to form a plurality of discharge port rows parallel to each other.

The discharge ports 35 in one of the heads 32 are arranged at equal intervals in one direction, and the interval is the discharge port interval (the distance between the centers of the discharge ports) D, and the discharge port intervals D of the respective head portions 32 are equal to each other.

In the present invention, the plurality of discharge port rows 35 of one head 32 may be arranged at equal intervals in one direction, and are not necessarily arranged on a straight line, and are formed in a zigzag manner as shown in FIG. A spit out column can also be used.

Here, each of the head portions 32 is attached to the mounting plate 33 so that the one direction is parallel to the x-axis direction.

The length of each of the head portions 32 in the one direction is larger than the length of the discharge port row (the distance in the one direction from the center of the discharge port of the end portion) plus the length of the discharge port interval D. Therefore, If a plurality of heads 32 are arranged in a row parallel to the x-axis and have the same position on the y-axis, the discharge port at the end of the discharge port of one head and the discharge port at the head of the adjacent head The distance between the discharge ports of the ends in the x-axis direction is greater than the distance D between the discharge ports.

In the present invention, the plurality of head portions 32 arranged along the x-axis direction are such that the distance between the discharge ports at the end portions of the different head portions is also the discharge port interval D, and the adjacent head portion is spit. The outlets 35 are disposed at different positions on the y-axis, and the end portions of the adjacent heads are overlapped on the x-axis, and the discharge ports between the different heads are included, and the discharge ports 35 are disposed so as to be spaced apart from each other across the x-axis. D arranged.

In this case, the plurality of head discharge ports 35 arranged along the x-axis can be alternately arranged at two positions on the y-axis, and if the adjacent head discharge ports are alternately arranged in two positions, A plurality of configured heads 32 are arranged in a zigzag configuration to form a head set 38.

The header array 38 of the complex array is disposed on the mounting board 33.

The predetermined number (n) of head groups 38 constitutes a head group, in one head group, between two adjacent discharge ports 35 of one head group, and the discharge ports 35 of the other head groups are on the x-axis. The directions are configured one by one at equal intervals of D/n.

The head holding portion 30 has an ink tank (not shown), and stores one color ink among the three colors of R, G, and B in the ink tank. Each head 32 is connected to an ink tank.

Each of the discharge ports 35 has an ink chamber filled with ink (discharge liquid), and a pressure generating device is disposed in each of the ink chambers. Each of the pressure generating devices receives the signal transmitted from the external control device 92, and causes the ink chamber to generate a predetermined pressure to discharge a predetermined amount of ink from the discharge port 35.

When the head holding portion 30 has three or more head groups, each head portion 32 connects each head group to an ink tank of a different color, whereby three colors of ink can be discharged from one head holding portion 30.

Fig. 7 is a cross-sectional view taken along the line B-B of the discharge device 10.

The substrate moving unit 20 has first and second mounting stages 24a and 24b. The first mounting table 24a is larger than the second mounting table 24b, the first mounting table 24a is disposed on the substrate moving portion 20, and the second mounting table 24b is disposed on the first mounting table 24a.

The upward facing surface of the second mounting table 24b is formed to have the same height as the upward facing surface of the first mounting table 24a.

The upward facing surfaces of the first and second mounting tables 24a and 24b each have a suction port (not shown), and the suction port is connected to a vacuum pump (not shown). After the substrate 50 is placed on the first and second mounting stages 24a and 24b (and on the two mounting stages), the substrate 50 is vacuum-adsorbed and held by the first and second mounting stages 24a and 24b by evacuation by a vacuum pump. on.

In the discharge device 10 of the present invention, as shown in Fig. 8, the first and second substrates 50a and 50b may be disposed on the first and second mounting stages 24a and 24b, respectively. After the first and second substrates 50a and 50b are disposed, the first and second substrates 50a and 50b are vacuum-adsorbed and held by the first and second mounting stages 24a and 24b, respectively, by evacuation by a vacuum pump (not shown). on.

Referring to FIGS. 2 and 8, the regions (falling positions) at which the respective colors of R, G, and B should fall are set on the substrate 50 and the first and second substrates 50a and 50b, respectively. The substrate 50 and the first and second substrates 50a and 50b each have a lattice-shaped black matrix parallel and perpendicular to one direction, and each landing position is disposed in a region drawn by the black matrix region.

The interval between the landing position of the substrate 50 and the first and second substrates 50a and 50b adjacent to each other on one of the substrates is the same as the discharge port spacing D/n adjacent to the x-axis direction of one of the head groups, or The length is formed as an integral multiple of the discharge port spacing D/n adjacent in the x-axis direction.

The discharge device 10 includes first and second main light-transmitting devices that respectively send the first and second main measurement lights 65a and 65b in the y-axis direction, and are separately provided in the x-axis direction to be first and second main measurement. The first and second main mirror devices 61a and 61b which are reflected when the light 65a and 65b are irradiated to fold back the first and second main reflected lights 66a and 66b receive the first main measurement light 65a and the first main reflected light 66a. The first main interference device 62a that detects the first main interference result of the first main measurement light 65a and the first main reflection light 66a, the second main measurement light 65b and the second main reflection light 66b are detected to detect the second main measurement The second main interference means 62b of the second main interference result of the light 65b and the second main reflected light 66b.

The first and second main interference devices 62a, 62b and one of the first and second primary mirror devices 61a, 61b are disposed on the substrate moving portion 20, and the other device is fixed to be stationary with respect to the reference surface. On the pedestal 70.

Here, the discharge device 10 includes at least one light source 75, first and second beam splitters 63a and 63b. The light source 75 and the first dichroic mirror 63a constitute a first main light transmitting means, and the light source 75 and the second dichroic mirror 63b constitute a second main light transmitting means. The first and second main measurement lights 65a and 65b are respectively sent from the first and second main light transmitting devices.

The first and second main interference devices 62a and 62b are disposed between the mirror surfaces of the first and second main mirror devices 61a and 61b and the first and second main light transmitting devices.

The first and second main interference results are transmitted to the second measuring device 93b, thereby obtaining the first between the first and second main interference devices 62a, 62b and the first and second primary mirror devices 61a, 61b, Second primary distance.

When the measurement result of the first and second main distances is transmitted, the control device 92 determines the magnitudes of the first and second moving forces based on the difference.

The difference ΔL between the first and second main distances can be set at the control device 92.

For example, the control device 92 sets the first and the first time when the arrangement of the discharge port 35 in the x-axis direction and the arrangement of the landing position on the substrate 50 in the x-axis direction are parallel before the substrate moving portion 20 starts moving in the y-axis direction. The difference ΔL between the two main distances; if the difference between the first and second main distances L ₁ and L ₂ transmitted during the movement of the substrate moving portion 20 is larger than the set value ΔL (L _{1 -} L ₂ > ΔL), the control device 92 Controlling the first moving mechanism 48a to reduce the first moving force, or controlling the second moving mechanism 48b to increase the second moving force, so that the amount of movement on the second rail 71b is larger than the amount of movement on the first rail 71a, so that The difference between the first and second main distances L ₁ and L ₂ and the set value ΔL are the same. If the difference between the first and second main distances L ₁ , L ₂ is smaller than the set value ΔL (L _{1 -} L ₂ < ΔL), the control device 92 controls the first moving mechanism 48a to increase the first moving force, or controls the second a second moving mechanism 48b to reduce the moving force of the moving rail 71b than the second moving amount on the first rail 71a is smaller, so that the first and second main distance L _1, L ₂ of the difference between the set value and ΔL becomes the same.

Therefore, the direction of the substrate moving portion 20 during movement with respect to the traveling direction can be maintained to be the same as the direction before the start of movement.

Furthermore, since the correct amount of movement of the substrate moving portion 20 can be detected, accurate movement control can be performed.

In the following description of the discharge device 10, the case where the substrate 50 is placed on the substrate moving unit 20 will be described. However, the same applies to the case where the first and second substrates 50a and 50b are placed on the substrate moving unit 20.

Before the substrate moving portion 20 starts moving, as will be described later, the substrate 50 placed on the substrate moving portion 20 is rotated, and the arrangement of the landing position on the substrate 50 in the x-axis direction and the arrangement of the discharge port 35 in the x-axis direction are performed. When the alignment of the substrate moving portion 20 with respect to the traveling direction can be maintained in the same direction as when the substrate 50 and the discharge port 35 are angularly aligned, the substrate moving portion 20 is opposed to the substrate 50 in the parallel direction. The outlet 35 is moved in the y-axis direction while being angularly aligned.

Therefore, when the substrate moving portion 20 is moved in the direction as described above, the distance between the respective landing positions on the substrate 50 and the discharge port 35 (discharged to the falling position) in the y-axis direction is before the start of the movement. The value of the substrate is reduced by the amount of movement of the substrate moving portion 20, and no error occurs at the time when the discharge liquid is discharged from the discharge port 35.

The discharge device 10 includes first and second sub-light-transmitting devices that respectively send the first and second sub-measurement lights 65c and 65d in the x-axis direction, and are reflected by the first and second sub-measurement lights 65c and 65d. The sub-mirror device 61c that folds the first and second sub-reflected lights receives the first sub-measurement light 65c and the first sub-reflected light, and detects the interference result of the first sub-measurement light 65c and the first sub-reflected light. The pair of interference devices 62c and the second sub-interference device 62d that receives the second sub-measurement light 65d and the second sub-reflected light and detects the interference result of the second sub-measurement light 65d and the second sub-reflected light.

Here, the discharge device 10 includes third and fourth beam splitters 63c and 63d. The light source 75 and the third beam splitter 63c constitute a first sub-light transmitting device, and the light source 75 and the fourth dichroic mirror 63d constitute a second sub-light transmitting device. The first and second sub-measurement lights 65c and 65d are respectively sent from the first and second sub-light-transmitting devices.

One of the first sub-interference device 62c and the sub-mirror device 61c is disposed on a side surface of the substrate moving portion 20 that is parallel to the moving direction (y-axis direction) (in the case of the first sub-interference device 62c, the light-receiving surface is disposed at In the side surface, the sub mirror device 61c has its reflection surface disposed on the side surface, and the other device is fixed to the pedestal 70 that is stationary with respect to the reference surface.

Here, the first sub-interference device 62c is disposed at a lateral position outside the range of movement of the substrate moving portion 20 of the pedestal 70 (which is stationary with respect to the reference surface), and is located laterally of the head holding portion 30; The sub mirror device 61c is provided on the side surface of the substrate moving portion 20 and has a mirror surface that can face the first sub interference device 62c.

Here, the substrate moving portion 20 starts moving from the starting point (the position at which the substrate 50 is placed on the substrate moving portion 20), and passes through the lower portion of the head holding portion 30 to reach the end point (the substrate 50 from which the ink is dropped is moved from the substrate) End the movement by removing the position on the 20th).

The first sub-interference device 62c is disposed at a position closer to the starting point than the discharge port 35 closest to the starting point among the discharge ports 35 in the head holding portion 30, and the end portion of the end surface side of the mirror surface of the sub-mirror device 61c is extended. It is closer to the end point than the landing position closest to the end point of the substrate 50 on the substrate moving portion 20.

Therefore, the landing position of the substrate 50 closest to the end point is started before the mirror end of the first sub-interference device 62c and the sub-mirror device 61c is reached before reaching the position closer to the end point than the discharge port 35 closest to the starting point.

The first sub-interference result is transmitted to the second measuring device 93b, and the first sub-distance between the first sub-interference device 62c and the sub-mirror device 61c is obtained.

The control device 92 stores the x coordinate of the first sub interference device 62c resting on the pedestal 70 with respect to the reference plane. Therefore, the control device 92 can obtain the x coordinate (the position in the x-axis direction) of the substrate moving portion 20 with respect to the reference surface based on the measurement result of the first sub-distance.

As will be described later, the head holding portion 30 includes a head moving mechanism 49 that integrally moves a plurality of head portions 32 in the x-axis direction with respect to the reference plane. The amount of movement of the head moving mechanism 49 in the x-axis direction (with a ± sign) is measured by the first measuring device 93a and transmitted to the control device 92. For example, the value of the first measuring device 93a is set to zero before the head 32 starts moving. When the head 32 is moved from this state, it can be seen that the head 32 after the movement of the position before the start of the movement is on the x-axis. The position of the direction.

When the measurement result of the first sub-distance is transmitted, the control device 92 obtains the position of the substrate moving unit 20 in the x-axis direction based on the measurement result of the first sub-distance, and the position in the x-axis direction of the substrate moving unit 20 is obtained. The difference between the position of the head 32 and the x-axis direction determines the amount of movement of the head moving mechanism 49 to move the head 32.

For example, before the substrate moving unit 20 starts moving, the value of the first measuring device 93a that performs the alignment (the position at which the landing position on the substrate 50 can pass directly below the discharge port 35) is set to zero. And the position of the substrate moving portion 20 in the x-axis direction is set to the control device 92, and if the value of the first sub-distance transmitted by the substrate moving portion 20 during the movement increases or decreases, the control device 92 controls according to the increase and decrease thereof. The head moving mechanism 49 moves the head 32 so that the difference between the position of the substrate moving portion 20 in the x-axis direction and the position of the head portion 32 in the x-axis direction is the same as the set value.

Therefore, the relative positional relationship between the moving substrate moving portion 20 and the head portion 32 in the x-axis direction can be maintained to be the same as before the start of the movement.

When the substrate moving portion 20 is about to start moving, as will be described later, after the angle between the substrate 50 and the discharge port 35 is aligned, the plurality of head portions 35 are integrally moved in the x-axis direction, and each of the landing positions can pass through the predetermined spout. The alignment in the x-axis direction is performed directly below the outlet 35, and the direction of the substrate moving portion 20 is maintained in the same direction as in the above-described general alignment, and the relative position in the x-axis direction between the substrate moving portion 20 and the head portion 32 is maintained. When the relationship is maintained in the same manner as the alignment in the x-axis direction, the substrate moving portion 20 can be moved in the y-axis direction by the state immediately below the predetermined discharge port 35 at each of the landing positions on the substrate 50.

Therefore, when the substrate moving portion 20 can be moved while maintaining the above-described direction and positional relationship, no error occurs at the time when the discharge liquid is discharged from the discharge port 35, and the predetermined landing position on the substrate 50 and the actual falling position of the discharge liquid do not occur. error.

On the pedestal 70, a second sub-interference device 62d is provided at a position closer to the end point than the first sub-interference device 62c.

When the substrate moving unit 20 moves, while the first sub-interference device 62c faces the mirror surface of the sub-mirror device 61c, the opposing between the second sub-interference device 62d and the sub-mirror device 61c starts, and the substrate moving portion 20 moves. After the end portion on the starting point side of the mirror surface of the sub-mirror device 61c is moved closer to the end point side than the first sub-interference device 62c, the first sub-interference device 62c is opposed to the mirror surface of the sub-mirror device 61c. When the measurement of the sub-distance is completed, the second sub-interference device 62d is opposed to the mirror surface of the sub-mirror device 61c, and the measurement of the second distance between the second sub-interference device 62d and the sub-mirror device 61c is started.

The control device 92 stores the x coordinate of the second sub-interference device 62d resting on the pedestal 70 with respect to the reference plane. Therefore, the control device 92 can obtain the x coordinate (the position in the x-axis direction) of the substrate moving portion 20 with respect to the reference surface based on the measurement result of the second sub-distance.

The present invention is not limited to the case where the measurement of the second sub-distance is started when the opposing faces of the first sub-interference device 62c and the mirror surface of the sub-mirror device 61c are completed; between the mirror faces of the second sub-interference device 62d and the sub-mirror device 61c When the opposing start is started, the second sub-distance is measured, and before the end of the mirror surface of the first sub-interference device 62c and the sub-mirror device 61c, the substrate moving portion 20 is obtained based on the measurement result of the second sub-distance. The position in the axial direction may be determined, or the position of the substrate moving portion 20 in the x-axis direction may be obtained from the measurement results of both the first and second sub-distances.

Here, the second sub-interference device 62d is disposed at a position closer to the end point than the position of the discharge port 35 closest to the end point; the end portion on the start side of the mirror surface of the sub-mirror device 61c extends to the specific substrate moving portion 20. The landing position of the upper substrate 50 closest to the starting point is closer to the starting point side.

Therefore, after the first sub-interference device 62c and the mirror surface of the sub-mirror device 61c are opposed to each other, the landing position of the substrate 50 closest to the starting point reaches the position closer to the end point than the discharge port 35 closest to the end point. 1. The alignment between the mirror surface of either or both of the second sub-interference devices 62c and 62d and the mirror surface of the sub-mirror device 61c is continued, and the relative positional relationship between the substrate moving portion 20 and the head portion 32 in the x-axis direction can be made. Maintain the state when aligned in the x-axis direction.

The present invention can also adopt a configuration in which the mirror surface of the sub-mirror device 61c is formed longer than the arrangement length of the landing position of the substrate 50 in the y-axis direction and the arrangement length of the discharge port 35 in the y-axis direction. When the landing position closest to the end point of the substrate 50 reaches the position closer to the end point than the discharge port 35 closest to the starting point, the landing position closest to the starting point of the substrate 50 reaches the end point closer to the discharge port 35 closest to the end point. The position between the first sub-interference device 62c and the mirror surface of the sub-mirror device 61c can be continued until the position is reached.

Further, in the present invention, the sub-mirror device 61c may be formed in a laterally long position and at a lateral position outside the range of movement of the substrate moving portion 20 on the pedestal 70 (which is stationary with respect to the reference surface), and may be in the head holding portion. The lateral position of 30 is disposed along the y-axis direction in the longitudinal direction, and the first and second sub-interference devices 62c, 62d are provided on the substrate moving portion 20.

The mirror surface of the sub-mirror device 61c is a range of movement toward the substrate moving portion 20, and when the one side surface of the substrate moving portion 20 passes the position facing the mirror of the sub-mirror device 61c, the first sub-interference device 62c or the second sub-interference The device 62d passes in a state of being opposed to the mirror surface of the sub-mirror device 61c.

The end portion on the starting point side of the sub-mirror device 61c extends to a position closer to the starting point side than the discharge port 35 closest to the starting point, and similarly, the end portion on the end side of the sub-mirror device 61c extends to the closest end point. The discharge port 35 is closer to the end point side.

The first sub-interference device 62c is disposed at a position closer to the end point than the landing position closest to the end point of the substrate 50, and the second sub-interference device 62d is disposed at a position closer to the starting point than the landing position closest to the starting point of the substrate 50.

Therefore, the substrate moving portion 20 moves from the starting point, and the mirror surface of the first sub-interference device 62c and the sub-mirror device 61c before the landing position of the substrate 50 closest to the end point reaches the position closer to the starting point than the discharge port 35 closest to the starting point. The opposite direction starts until the portion closest to the starting point of the substrate 50 reaches the position closer to the end point than the discharge port 35 closest to the end point, and the first sub-interference device 62c or the second sub-interference device 62d and the sub-mirror device 61c The opposing of the mirror surfaces continues, and the relative positional relationship between the substrate moving portion 20 and the head portion 32 in the x-axis direction can maintain the state in the x-axis direction alignment.

That is, the inclination of the rotation direction of the substrate moving portion 20 on the xy plane can be accurately detected by the first and second main interference devices 62a, 62b (relative to the x-axis direction or the y-axis direction on the xy plane) The amount of movement in the tilt and y-axis directions. Further, the first and second sub-interference devices 62c and 62d can accurately detect the amount of shift in the x-axis direction caused by the movement of the substrate moving portion 20 in the y-axis direction.

<Injection method of ink>

Next, a discharge step of discharging ink (discharge liquid) onto the substrate 50 will be described.

Hereinafter, a position at which the substrate 50 is placed on the substrate moving portion 20 before ejection is referred to as a starting point, and a position at which the substrate 50 is detached from the substrate moving portion 20 after ejection is referred to as an end point. The start point and the end point are on the opposite side of each other across the y-axis via the head holding portion 30.

The head portions 32 are aligned with respect to the reference position by the alignment operation of the first alignment step described later.

First, the substrate moving portion 20 is moved to the starting point and is stationary. The substrate 50 is placed on the first and second mounting stages 24a and 24b and on the two mounting stages, and vacuum suction is performed to adsorb and hold the substrate 50 on the first and second mounting stages 24a and 24b.

Next, the substrate 50 and the substrate moving portion 20 are moved toward the end point, and the positions of the respective landing positions on the substrate 50 and the alignment of the predetermined discharge port 35 are made to stand in front of the head holding portion 30.

The alignment of each of the landing positions on the substrate 50 and the predetermined discharge port 35 is performed by the mobile camera 21 and the first and second fixed cameras 31a and 31b as in the alignment operation of the second alignment step to be described later.

After the alignment, the first and second main interference devices 62a, 62b are opposed to the first and second main mirror devices 61a, 61b, respectively, and the first and second main interference devices 62a, 62b and the first and the second can be measured. The first and second main distances between the two primary mirror devices 61a, 61b, or the substrate moving portion 20 obtained from the first and second principal distances with respect to the x-axis direction (or the y-axis direction) on the xy plane The slope.

Further, the position of the substrate moving portion 20 in the x-axis direction is obtained by, for example, moving the movable camera 21 while the substrate moving portion 20 is stationary, and capturing the origin set on the reference surface.

Next, the substrate moving portion 20 is started to move toward the end point.

Controlling the first and second moving mechanisms 48a, 48b according to the measurement results of the first and second main distances, respectively changing the amount of movement on the first and second rails 71a, 71b, and making the first and second main distances The inclination or the inclination of the substrate moving portion 20 obtained from the difference between the first and second main distances with respect to the x-axis direction (or the y-axis direction) on the xy plane is the same as the value before starting the movement, thereby making the difference The direction of the substrate moving portion 20 with respect to the traveling direction is the same as the direction after alignment is started before starting the movement.

Therefore, the distance in the y-axis direction between each of the landing position and the discharge port 35 for discharging the discharge liquid to the landing position is a value obtained by subtracting the amount of movement of the substrate moving portion 20 from the value before the start of the movement, and the respective landings can be calculated. The position is a time at which the lower position of the discharge port 35 of the discharge liquid is discharged toward the landing position.

One or both of the first and second sub-interference devices 62c and 62d and the mirror surface of the sub-mirror device 61c are discharged from the discharge port 35 which is discharged last until the discharge is discharged from the discharge port 35 which is discharged first. The relative position is continued, and either or both of the first and second sub-distances between the first and second sub-interference devices 62c and 62d and the sub-mirror device 61c can be measured.

The position of the substrate moving portion 20 in the x-axis direction is obtained based on either or both of the measurement results of the first and second sub-distances, and the head moving mechanism 49 is controlled to move the head 32 to cause the x-axis of the substrate moving portion 20. The difference between the positional position and the position of the head 32 in the x-axis direction is the same as the value after the alignment is started, whereby the relative positional relationship between the substrate moving portion 20 and the head portion 32 in the x-axis direction is performed before the start of the movement. The relationship after alignment becomes the same.

Therefore, each landing position is directly below the discharge port 35 through which the discharge liquid is discharged toward the landing position. Since the time at which the landing position passes directly below is calculated, the discharged liquid discharged from each of the discharge ports 35 at the calculated time falls to a predetermined landing position.

When the substrate moving portion 20 reaches the end point, the discharge liquid falls on each of the landing positions on the substrate 50, and after drying at the removal position, the vacuum suction is released, and the substrate 50 is removed from the first and second mounting tables 24a and 24b. .

As shown in Fig. 8, the first and second substrates 50a and 50b are respectively mounted on the first and second mounting stages 24a and 24b, and the discharge liquid may be discharged onto the first and second substrates 50a and 50b. In this case, in the discharge method of the discharge liquid, after the first substrate 50a and the head portion 32 are aligned by the alignment operation of the second alignment step, the third alignment step described later is performed. The alignment of the second substrate 50b with the head portion 32 is performed in the quasi-operation, and then the substrate moving portion 20 is started to move toward the end point. As described above, the first and second substrates 50a and 50b can be moved in the y-axis direction while maintaining the state in alignment with the head portion 32, and the discharge liquid discharged from the discharge port 35 can be dropped on the first and second substrates 50a and 50b. The established landing position.

<First alignment step>

The first alignment step described below is composed of an origin position alignment operation, a head array alignment operation, and a position measurement operation of a camera reference point of the stationary camera.

The substrate moving unit 20 has a mobile camera 21. The mobile camera 21 is an end portion disposed in the y-axis direction of the substrate moving portion 20. The mobile camera 21 has a lens at the upper end, and the image captured by the mobile camera 21 is subjected to image processing by an external control device 92. The control device 92 is, for example, a computer.

In the substrate moving portion 20, a direction perpendicular to the moving direction of the substrate moving portion 20 and parallel to the reference surface is referred to as an X direction, and the substrate moving portion 20 has a camera moving mechanism 44 that can move the moving camera 21 in the X direction. The camera moving mechanism 44 is provided with a motor, and if the signal transmitted from the control device 92 is received, the mobile camera 21 is moved in the X direction.

<Original position alignment operation>

First, the alignment of the mobile camera 21 and the origin is performed to understand the xy coordinate of a point on the image captured by the mobile camera 21 with respect to the reference plane.

The external measuring device 93 is provided with an x-axis direction distance measuring device for measuring the amount of movement (with a ± sign) on the x coordinate of the mobile camera 21, and for measuring the amount of movement on the y coordinate (with ± The y-axis direction distance measuring device of the symbol); when moving between two points, the mobile camera 21 can understand the x component and the y component of the vector connecting the start point and the end point of the movement. Since the measured distance has a sign, the measured value in the case of reciprocating movement and returning to the starting point is zero.

In the field of view of the range in which the mobile camera 21 can capture, a moving reference point that does not move in the field of view is set.

In the discharge device 10, an origin of the xy coordinate which is stationary with respect to the reference surface is set.

Let the mobile camera 21 move to capture the origin (assuming that the mobile camera 21 captures a perpendicular line passing through the origin when the vertical line passing through the origin is taken), the image of the origin (or the image passing through the perpendicular of the origin) and the movement When the reference points match, the values of the x-axis direction distance measuring device and the y-axis direction distance measuring device are set to zero.

When the mobile camera 21 is moved from this state, it is possible to know the xy coordinate of the position on the image captured by the mobile camera 21 that overlaps with the movement reference point with respect to the reference plane.

<Head Array Alignment Job>

Next, the moving camera 21 is positioned below one discharge port 35 by the movement of the substrate moving portion 20 in the y-axis direction and the movement of the moving camera 21 in the x-axis direction.

When the image of the mobile camera 21 is observed, when the moving reference point coincides with the image center of the discharge port 35, the xy coordinate of the discharge port 35 with respect to the reference surface is obtained based on the value of the measuring device 93.

The measurement operation of the xy coordinates of the above-described discharge port 35 with respect to the reference surface is repeated for all the discharge ports 35.

Each of the discharge ports 35 has a predetermined setting value with respect to the xy coordinates of the reference surface. When there is an error in the measured value of the xy coordinate with respect to the reference plane and the set value, the individual head position correcting means (the jog screw) of each head 32 is controlled by the signal transmitted by the manual or control means 92. By correcting, the xy coordinates of the discharge port 35 with respect to the reference plane are matched with the set values. The corrected xy coordinates of the discharge ports 35 with respect to the reference surface are stored in the control device 92.

<Location measurement operation of the camera reference point of the fixed camera>

The head holding portion 30 has first, second, third, and fourth fixed cameras 31a, 31b, 31c, and 31d, and first, second, third, and fourth fixed cameras 31a, 31b, 31c, and 31d. It is fixed to one end of the head holding portion 30 in the y-axis direction. The first, second, third, and fourth stationary cameras 31a, 31b, 31c, and 31d have lenses at the lower end, and can photograph the substrate 50 and the first and second substrates 50a and 50b that move downward.

The first and second fixed cameras 31a and 31b are disposed so as to set the distance between the first and second camera reference points on the first and second fixed cameras 31a and 31b, respectively, and set the first and the first cameras respectively. The distance between the first and second substrate reference points 51a and 51b on the two substrates of the second substrates 50a and 50b is the same, and the line connecting the first and second camera reference points is designed to be parallel to the x-axis direction.

The third and fourth fixed cameras 31c and 31d are arranged to set the distance between the third and fourth camera reference points on the third and fourth fixed cameras 31c and 31d, respectively, and set the second and the second camera respectively. The distance between the third and fourth substrate reference points 51c and 51d on the two substrates of the substrate 50b is the same, and the line connecting the third and fourth camera reference points is designed to be parallel to the x-axis direction.

Actually, however, the first, second, third, and fourth stationary cameras 31a, 31b, 31c, and 31d are mounted at positions deviated from the design value due to the mounting error when the head holding portion 30 is fixed.

The first, second, third, and fourth fixed cameras 31a, 31b, 31c, and 31d respectively have positions of the camera reference point on the lens: fixed marks that can be taken from the outside by the mobile camera 21. The mobile camera 21 is moved to the lower side of the first stationary camera 31a. When the image of the fixed mark of the first stationary camera 31a coincides with the movement reference point on the image captured by the mobile camera 21, the camera reference point of the first stationary camera 31a is measured based on the value of the measuring device 93. The xy coordinate of the reference plane. The camera reference points of the second, third, and fourth stationary cameras 31b, 31c, and 31d are measured in the same manner and stored with respect to the xy coordinates of the reference plane.

The present invention is not limited to the case where the distance between the first and second substrate reference points 51a, 51b of the substrate 50 is the same as the distance between the first and second camera reference points, and by the first and second fixed cameras 31a. The case of photographing 31b; as long as the distance between two different camera reference points among the camera reference points of the four fixed cameras 31a, 31b, 31c, 31d is the same, and the corresponding two fixed cameras are used for shooting Just fine.

<Second alignment step>

In the following, the second alignment step is described in which one of the substrate 50 or the first substrate 50a (hereinafter referred to as the first substrate 50a) passes under the head holding portion 30, in order to land each of the substrates. The alignment is performed by the position directly under the at least one discharge port 35.

The image captured by the first and second fixed cameras 31a, 31b is subjected to image processing by the control device 92 to know the xy coordinates of the predetermined position within the image with respect to the reference plane.

First, the substrate moving portion 20 is moved in the y-axis direction so that the first and second substrate reference points 51a and 51b of the first substrate 50a are positioned below the first and second fixed cameras 31a and 31b, respectively.

Fig. 3(a) shows a schematic view of a fixed camera image when the images 85a, 85b of the first and second fixed cameras are placed in a plane coordinate.

In Fig. 3(a), reference numerals 81a and 81b denote camera reference points of the first and second fixed cameras 31a and 31b, and reference numerals 82a and 82b denote respective design values (first and second design values). Symbols 83a and 83b respectively indicate images of the first and second substrate reference points 51a and 51b captured by the first and second fixed cameras 31a and 31b.

The control device 92 calculates, based on the coordinates of each point, the straight line passing through the first and second design values 82a and 82b and the images 83a and 83b passing through the first and second substrate reference points. The value of the angle θ ₁ formed by the straight line.

The control device 92 knows the x-axis direction or the y-axis direction in the image, and calculates the straight line and the x-axis direction or the y-axis direction of the two points of the images 83a and 83b passing through the first and second substrate reference points by calculation. The angle can also be.

The substrate moving unit 20 includes a first substrate rotating mechanism 42 that allows the first mounting table 24a to rotate in parallel with the reference surface with respect to the substrate moving unit 20. The first substrate rotating mechanism 42 is, for example, an air bearing rotating shaft that is rotationally driven by compressed air.

The control device 92 transmits the rotation signal to the first substrate rotating mechanism 42 for making the line connecting the first and second substrate reference points 51a and 51b on the first substrate 50a parallel to the x-axis direction. The one mounting table 24a is rotated by a predetermined angle in parallel with the reference plane with respect to the substrate moving portion 20.

When the first substrate rotating mechanism 42 receives the signal transmitted from the control device 92, the first and second substrates 50a and 50b held on the first mounting table 24a and the first mounting table 24a are moved relative to the substrate moving portion 20. Rotate a predetermined angle in parallel with the reference plane.

The first and second substrate reference points 51a and 51b after the rotational movement are subjected to image processing via the control device 92, and are stored in the control device 92 with respect to the xy coordinates of the reference surface.

On the first substrate 50a, since the relative positions of the first and second substrate reference points 51a, 51b and the respective landing positions have been set in advance, the respective lands can be found based on the xy coordinates of the first and second substrate reference points 51a, 51b. The position is relative to the xy coordinate of the reference plane.

Each of the discharge ports 35 is aligned via the first alignment step, and the xy coordinates with respect to the reference surface are stored in the control device 92.

The head holding portion 30 has a head holding mechanism 49 that moves the mounting plate 33 in the x-axis direction with respect to the head holding portion 30. A head moving motor is provided at the head holding mechanism 49.

The control device 92 obtains an error based on the coordinates of the predetermined discharge port 35 and the x coordinates of the first and second substrate reference points 51a and 51b on the first substrate 50a. To make the error zero, the mounting plate 33 is placed along the x. A signal for moving the predetermined distance in the axial direction is transmitted to the head moving mechanism 49.

When the head moving mechanism 49 receives the signal transmitted from the control device 92, the mounting plate 33 and the head 32 mounted on the mounting plate 33 are moved by a predetermined distance in the x-axis direction with respect to the head holding portion 30.

The second alignment step is completed via the above sequence. In this state, while the first substrate 50a passes under the head holding portion 30, the respective landing positions on the first substrate 50a are passed directly under the at least one discharge port 35.

<Third alignment step>

Hereinafter, the third alignment step will be described in which the alignment operation is performed so that the respective landing positions on the second substrate 50b pass under the at least one discharge port 35 while the second substrate 50b passes under the head holding portion 30.

The images captured by the third and fourth fixed cameras 31c and 31d are subjected to image processing by the control device 92 to know the coordinates of the predetermined position within the image.

First, the substrate moving portion 20 is moved in the y-axis direction, and the third and fourth substrate reference points 51c and 51d of the second substrate 50b are positioned below the third and fourth fixed cameras 31c and 31d, respectively.

Figure 3(b) shows a schematic view of a fixed camera image when the images 85c, 85d of the third and fourth fixed cameras are placed in a plane coordinate.

In Fig. 3(b), reference numerals 81c and 81d denote camera reference points of the third and fourth fixed cameras 31c and 31d, and reference numerals 82c and 82d denote respective design values (third and fourth design values). Symbols 83c and 83d respectively indicate images of the third and fourth substrate reference points 51c and 51d captured by the third and fourth fixed cameras 31c and 31d.

The control device 92 calculates, based on the coordinates of each point, the straight line passing through the third and fourth design values 82c and 82d and the images 83c and 83d passing through the third and fourth substrate reference points. The value of the angle θ ₂ formed by the straight line.

The control device 92 knows the x-axis direction or the y-axis direction in the image, and calculates the straight line and the x-axis direction or the y-axis direction of the two points of the images 83c and 83d passing through the third and fourth substrate reference points by calculation. The angle can also be.

The substrate moving unit 20 includes a second substrate alignment mechanism 80 that can rotate the second mounting table 24b in parallel with the reference surface with respect to the first mounting table 24a and move in the x-axis direction. The second substrate alignment mechanism 80 is, for example, one of an xyθ stage or a UVW stage. According to the present invention, since the UVW stage can be used to form a mechanism for reducing the height, the stability of the second mounting table 24b can be ensured.

The control device 92 transmits the rotation signal to the second substrate alignment mechanism 80 for allowing the lines connecting the third and fourth substrate reference points 51c, 51d on the second substrate 50b to be parallel to the x-axis direction. The second mounting table 24b is rotated by a predetermined angle in parallel with the reference surface with respect to the first mounting table 24a.

The second substrate alignment mechanism 80 receives the signal transmitted from the control device 92, so that the second substrate 50b held on the second mounting table 24b and the second mounting table 24b is parallel to the reference plane with respect to the substrate moving portion 20. Rotate the ground at a given angle.

The third and fourth substrate reference points 51c and 51d after the rotational movement are subjected to image processing via the control device 92, and are stored in the control device 92 with respect to the xy coordinates of the reference plane.

On the second substrate 50b, since the relative positions of the third and fourth substrate reference points 51c and 51d and the respective landing positions have been set in advance, the respective lands can be obtained from the xy coordinates of the third and fourth substrate reference points 51c and 51d. The position is relative to the xy coordinate of the reference plane.

Each of the discharge ports 35 is aligned via the first and second alignment steps, and the xy coordinates with respect to the reference surface are stored in the control device 92.

The control device 92 obtains an error based on the x coordinate of the third and fourth substrate reference points 51c and 51d on the second substrate 50b and the x coordinate of the predetermined discharge port 35. To make the error zero, the second stage is placed. The signal of 24b moving a predetermined distance in the x-axis direction is transmitted to the second substrate alignment mechanism 80.

When the second substrate alignment mechanism 80 receives the signal transmitted from the control device 92, the second substrate 50b held on the second mounting table 24b is moved by a predetermined distance in the x-axis direction with respect to the first mounting table 24a.

The third alignment step is completed via the above sequence. In this state, while the second substrate 50b passes under the head holding portion 30, the respective landing positions on the second substrate 50b are passed directly under the at least one discharge port 35.

10. . . Discharge device

20. . . Substrate moving part

30. . . Head retention

32. . . head

35. . . Spit

41. . . Moving mechanism on the track

48a, 48b. . . First and second moving mechanisms

49. . . Head moving mechanism

50. . . Substrate

61a, 61b. . . First and second primary mirror devices

61c. . . Secondary mirror device

62a, 62b. . . First and second main interference devices

62c, 62d. . . First and second sub-interference devices

70. . . Pedestal

71a, 71b. . . First and second tracks

92. . . Control device

93a, 93b. . . First and second measuring devices

Fig. 1 is a side view showing an example of a discharge device of the present invention.

Fig. 2 is a plan view showing an example of the discharge device of the present invention.

Figure 3(a) is a schematic diagram of the image of the fixed camera when the images of the first and second fixed cameras are placed in one plane coordinate; the third (b) is the image of the third and fourth fixed cameras A schematic representation of the image of a stationary camera when the image is placed on a plane coordinate.

Fig. 4 is an explanatory view of the arrangement of the head and the spout.

Fig. 5 is an explanatory view showing the arrangement of the head and the discharge port in the case where a plurality of discharge ports are arranged in a zigzag manner to form one discharge port row.

Fig. 6 is a cross-sectional view showing the A-A line of the discharge device.

Fig. 7 is a cross-sectional view taken along the line B-B of the discharge device.

Fig. 8 is a plan view of the discharge device when the first and second substrates are placed.

10. . . Discharge device

20. . . Substrate moving part

twenty one. . . Mobile camera

24a, 24b. . . First and second mounting platforms

30. . . Head retention

31a, 31b, 31c, 31d. . . First, second, third, fourth fixed camera

32. . . head

33. . . Mounting plate

41. . . Moving mechanism on the track

42. . . First substrate rotating mechanism

44. . . Camera moving mechanism

48a, 48b. . . First and second moving mechanisms

49. . . Head moving mechanism

50. . . Substrate

51a, 51b. . . First and second substrate reference points

61a, 61b. . . First and second primary mirror devices

61c. . . Secondary mirror device

62a, 62b. . . First and second main interference devices

62c, 62d. . . First and second sub-interference devices

63a, 63b, 63c, 63d. . . First, second, third, and fourth beam splitters

65a, 65b. . . First and second main measurement light

65c, 65d. . . First and second sub-measurement light

66a, 66b. . . First and second main reflected light

70. . . Pedestal

71a, 71b. . . First and second tracks

72. . . pillar

75. . . light source

92. . . Control device

93a, 93b. . . First and second measuring devices

Claims (9)

A discharge device includes: a pedestal that is stationary with respect to a reference surface; two rails that are disposed in the first direction on the pedestal, and are fixed to the pedestal to hold the head (each of which has a plurality of discharge ports) a head holding portion, a substrate moving portion on which the substrate can be placed on the two rails, and a substrate moving portion that moves in the first direction along the two rails and can pass under the head holding portion a moving mechanism on the rail; the discharge liquid is discharged from the discharge port toward the substrate disposed on the substrate moving portion, and the liquid droplets of the discharge liquid are dropped on the substrate; and the discharge device is configured to send the first droplets along the first direction 1. The first and second main light-transmitting devices of the second main measurement light are separately disposed in the second direction (perpendicular to the first direction and parallel to the reference surface) to be separated by the first and second main measurement lights The first and second main mirror devices that reflect the first and second main reflected lights while being irradiated, receive the first main measurement light and the first main reflected light, and detect the first a first main interference device that detects a first main interference result of the light and the first main reflected light, receives the second main measurement light and the second main reflected light, and detects the second main measurement light and the second a second main interference device of the second main interference result of the main reflected light, Calculating a first main distance between the first main interference device and the first main mirror device and a second between the second main interference device and the second main mirror device according to the first and second main interference results a second main distance measuring device and a control device for transmitting the measurement result of the measuring device; wherein the first and second main interference devices and the first and second main mirror devices are disposed on the substrate The other device is stationary with respect to the pedestal; the first and second main interference devices are disposed between the first and second primary mirror devices and the first and second primary light transmitting devices; The upper moving mechanism includes: a first moving mechanism that applies a first moving force to the first track to the substrate moving portion; and a second moving force that applies a second moving force to the substrate moving portion to the second track a moving mechanism; the control device determines a size of the first and second moving forces based on the first and second main distances; and the discharging device is configured to: enable the head a head moving mechanism that moves in the second direction, and a first sub-light transmitting device that sends the first sub-measurement light in the second direction, and is reflected by the first sub-measurement light to cause the first sub-reflected light to be folded back a sub-mirror device and a first result of detecting interference between the first sub-measurement light and the first sub-reflected light by receiving the first sub-measurement light and the first sub-reflected light a sub-interference device that obtains a first sub-distance between the sub-mirror device and the first sub-interference device based on the first sub-interference result; wherein the first sub-interference device and the sub-mirror device One of the devices is disposed on a side surface parallel to the moving direction of the substrate moving portion (the first direction), and the other device is stationary with respect to the pedestal; the control device is based on the sub-mirror device and the first sub-interference Determining the position of the substrate moving portion in the second direction by the first sub-distance between the devices, and determining the difference between the position of the substrate moving portion in the second direction and the position of the head in the second direction The head moving mechanism moves the head movement amount, and includes a light source and first to third beam splitters, wherein the light source and the first beam splitter constitute the first main light transmitting device, the light source and the first The dichroic mirror constitutes the second main light transmitting device, and the light source and the third beam splitter constitute the first sub-light transmitting device. The discharge device according to claim 1, wherein the control device controls the first and second moving mechanisms to change the substrate moving portion based on a set value of a difference between the first and second main distances. Move along the aforementioned two tracks. The discharge device according to claim 1 or 2, further comprising: a head moving mechanism that can move the head in the second direction; a second sub-light transmitting device that sends out the second sub-measurement light; the sub-mirror device reflects when the second sub-measurement light is irradiated to fold back the second sub-reflected light, and includes: receiving the second sub-measurement light and a second sub-interference device that detects interference between the second sub-measurement light and the second sub-reflected light by the second sub-reflected light; and the measurement device obtains the sub-mirror based on the second sub-interference result a second sub-distance between the device and the second sub-interference device; wherein one of the first and second sub-interference devices and the sub-mirror device is disposed in the substrate moving portion, and the other device is stationary with respect to the pedestal The control device is based on either or both of the first sub-distance between the sub-mirror device and the first sub-interference device and the second sub-distance between the sub-mirror device and the second sub-interference device. Calculating a position of the substrate moving portion in the second direction, and determining a difference between a position of the substrate moving portion in the second direction and a position of the head in the second direction Determines the head moving mechanism so that the moving amount of the head; and a fourth beam splitter is provided, the light source system and the fourth beam splitter constituting the second sub-light-transmitting means. The discharge device according to claim 1, wherein the control device controls the aforementioned value based on a difference between a position of the second moving direction of the substrate moving portion and a position of the second direction of the head portion. a head moving mechanism, and the aforementioned substrate moving portion is along the foregoing The two tracks move. The discharge device according to claim 3, wherein the control device controls the aforementioned value based on a difference between a position of the second moving direction of the substrate moving portion and a position of the second direction of the head portion. The head moving mechanism moves the substrate moving portion along the two tracks. A method for discharging a substrate on a substrate moving portion (moving from the starting point to the end point along the two tracks in a first direction between a starting point and an end point on a side opposite to each other across a water platform seat) The substrate moving portion is moved toward the end point, and when the substrate passes under the head portion, the discharge liquid is discharged from the discharge port toward the substrate, and after the substrate moving portion reaches the end point, the substrate is dried and then moved from the substrate. Removing the substrate from the portion; and measuring the inclination of the substrate moving portion in the first direction or the second direction on a surface parallel to the reference surface before the movement of the substrate moving portion, in the substrate moving portion During the movement, the tilt of the substrate moving portion is measured, and the amount of movement on the two tracks is changed so that the error caused by the tilt of the substrate moving portion becomes zero, and the substrate moving portion is changed. The substrate is passed under the head portion in a state where the tilt is the same as the tilt before the movement; Any of the mobile plate and the pedestal portion of one of them arranged: reflection will be the first and second main reflection measurement light is irradiated first and second main The first and second primary mirror devices are configured to receive the first primary measurement light and the first primary reflected light to detect the first primary measurement light and the first primary reflected light. a first main interference device that is a result of the main interference, and a second main interference result that detects the second main measurement light and the second main reflection light by receiving the second main measurement light and the second main reflection light a main interference device; measuring first and second main distances between the first and second main interference devices and the first and second primary mirror devices according to the first and second main interference results, according to the first The second main distance is used to measure the inclination of the substrate moving portion; and one of the substrate moving portion and the pedestal is disposed to be reflected by the first and second sub-measurement lights to cause the first and second sub-reflections The photo-returning sub-mirror device is configured to receive the first sub-measurement light and the first sub-reflected light to detect the first sub-interference result of the first sub-measurement light and the first sub-reflected light One pair And a second sub-interference device that detects the second sub-interference result of the second sub-measurement light and the second sub-reflected light by receiving the second sub-measurement light and the second sub-reflected light; First, determining a first and second sub-distance between the first and second sub-interference devices and the sub-mirror device according to a second sub-interference result, and determining one or both of the first and second sub-distances a position of the substrate moving portion in the second direction; and a light source and first to fourth beam splitters; The light source and the first beam splitter constitute the first main light-transmitting device, and the light source and the second beam splitter constitute the second main light-transmitting device, and the light source and the third beam splitter form the first pair In the light-transmitting device, the light source and the fourth beam splitter constitute the second sub-light-transmitting device, and the first and second main measurement lights are sent from the first and second main light-transmitting devices, respectively, from the first The second sub-light transmitting device sends the first and second sub-measurement lights, respectively. The discharge method according to claim 6, wherein the position of the substrate moving portion in the second direction is measured before the movement of the substrate moving portion, and the substrate moving portion is moved during the movement of the substrate moving portion. After the inclination is the same as the inclination before the start of movement, the position of the substrate moving portion in the second direction is measured, and the position of the substrate moving portion in the second direction and the position of the head in the second direction are measured. The head is moved in the same manner as before the start of the movement, and the relative positional relationship between the substrate moving portion and the head in the second direction and the relative positional relationship before the movement are made the same. The substrate passes under the aforementioned head. The discharge method according to claim 6, wherein the substrate moving portion is moved after the substrate is placed on the substrate moving portion, and is stopped in front of the head before the substrate enters the lower portion of the head portion. The position is aligned such that each of the landing positions on the substrate is disposed directly below the discharge port of the head. The discharge method according to claim 7, wherein the substrate moving portion is moved after the substrate is placed on the substrate moving portion, and is stopped in front of the head before the substrate enters the lower portion of the head portion. The position is aligned such that each of the landing positions on the substrate is disposed directly below the discharge port of the head.