TWI431155B - Maintain the management of electroless gold plating bath plating capacity of the method - Google Patents

Maintain the management of electroless gold plating bath plating capacity of the method Download PDF

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TWI431155B
TWI431155B TW096149929A TW96149929A TWI431155B TW I431155 B TWI431155 B TW I431155B TW 096149929 A TW096149929 A TW 096149929A TW 96149929 A TW96149929 A TW 96149929A TW I431155 B TWI431155 B TW I431155B
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plating bath
gold
formaldehyde
gold plating
electroplating
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TW200842203A (en
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Masayuki Kiso
Yukinori Oda
Seigo Kurosaka
Tohru Kamitamari
Yoshikazu Saijo
Katsuhisa Tanabe
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Uyemura C & Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31Coating with metals
    • C23C18/42Coating with noble metals
    • C23C18/44Coating with noble metals using reducing agents
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601Process or apparatus
    • C23C18/1619Apparatus for electroless plating
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/18Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/24Reinforcing the conductive pattern

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemically Coating (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Description

維持管理無電解鍍金浴之電鍍能力的方法Method for maintaining the electroplating ability of an electroless gold plating bath

本發明係關於維持管理無電解鍍金浴之電鍍能力的方法。The present invention relates to a method of maintaining the electroplating ability of an electroless gold plating bath.

金係於金屬中離子化傾向最小,亦即,最安定且不易生鏽之金屬。並且不僅如此,因為導電性亦優異,所以廣泛地使用於電子工業領域。取代鍍金係廣泛地使用為印刷基板之電路或IC封裝之實裝部份或端子部份等之最終表面處理。具體上,有如以下方法,分別具有如下之特徵。Gold has the least tendency to ionize in metals, that is, the most stable and less rustable metal. Moreover, since it is excellent in electrical conductivity, it is widely used in the field of the electronics industry. Instead of gold plating, the final surface treatment of a printed circuit board or a mounted portion or a terminal portion of an IC package is widely used. Specifically, there are the following methods, each having the following features.

(1)ENIG(Electroless Nickel Immersion Gold:無電解鎳/取代金) .於底層無電解鍍鎳被膜上,形成取代鍍金被膜之方法。 .防止銅擴散、防止鎳氧化、可提升電路或端子/耐蝕性。 .可使用於銲錫接合。(1) ENIG (Electroless Nickel Immersion Gold: Electroless Nickel / Substitute Gold) . A method of replacing the gold plating film is formed on the underlying electroless nickel plating film. . Prevents copper from diffusing, prevents nickel oxidation, and improves circuit or terminal/corrosion resistance. . Can be used for solder bonding.

.ENIG處理後,施以加厚金,亦可使用於打線接合(wire bonding)。. After ENIG treatment, thick gold is applied and can also be used for wire bonding.

.打線接合時,於電鍍處理後進行加熱處理,但因此鎳擴散於金被膜上。為防止其發生,於鎳/取代金被膜上更施以無電解鍍金浴,增加金之膜厚以因應鎳擴散。. At the time of wire bonding, heat treatment was performed after the plating treatment, but nickel was diffused on the gold film. In order to prevent this, an electroless gold plating bath is applied to the nickel/substituted gold film to increase the thickness of the gold film in response to the diffusion of nickel.

(2)DIG(Direct Immersion Gold:直接取代金) .於銅上,直接形成取代鍍金被膜之方法。(2) DIG (Direct Immersion Gold: Direct Replacement Gold) . On copper, a method of replacing the gold plating film is directly formed.

.防止銅氧化、防止銅擴散、可提升電路或端子之耐蝕性。. Prevents copper oxidation, prevents copper from spreading, and improves the corrosion resistance of circuits or terminals.

.亦可使用於銲錫接合、打線接合。. It can also be used for solder bonding and wire bonding.

.與鎳/金或鎳/鈀/金相比較時,長期信賴性略差,但於未加以太多熱負荷之條件(熱處理溫度低,回流次數少等之條件),可足以使用。. When compared with nickel/gold or nickel/palladium/gold, the long-term reliability is slightly inferior, but it is sufficient for use without excessive heat load conditions (low heat treatment temperature, low number of reflows, etc.).

.因為步驟簡單,所以成本低。. Because the steps are simple, the cost is low.

(3)ENEPIG(Electroless Nickel Electroless Palladium Immersion Gold:無電解鎳/無電解鈀/取代金) .於底層無電解鍍鎳被膜及取代鍍金被膜間,設有無電解鍍鈀被膜之方法。(3) ENEPIG (Electroless Nickel Electroless Palladium Immersion Gold: Electroless Nickel/Electroless Palladium/Replacement Gold) . A method of providing an electroless palladium coating between the underlying electroless nickel plating film and the replacement gold plating film.

.防止銅擴散、防止鎳氧化並防止擴散、及可提升電路或端子之耐蝕性。. Prevents copper from diffusing, prevents oxidation of nickel and prevents diffusion, and improves the corrosion resistance of circuits or terminals.

.最適合近年推行之無鉛銲錫接合(無鉛銲錫與錫鉛共晶銲錫相比較,因銲錫接合時施以熱負荷,鎳/金時接合特性降低)。. It is most suitable for lead-free solder bonding in recent years. (Lead-free solder is less thermally bonded than tin-lead eutectic solder, and the bonding characteristics are reduced when nickel/gold is used).

.適合於打線接合。. Suitable for wire bonding.

.即使不增厚金膜厚度,亦不發生鎳擴散。. Nickel diffusion does not occur even if the thickness of the gold film is not increased.

.即使以鎳/金可對應者,適合於欲更提升信賴性時。. Even if it is compatible with nickel/gold, it is suitable for the purpose of improving reliability.

取代鍍金係利用鎳等之底層與電鍍浴中氧化還原電位的差,用以析出金,金侵蝕鎳,因氧化(溶出)而發生腐蝕點。此因氧化之腐蝕點係於後續之銲錫回流時,成為使銲錫層的錫與鎳連接時之阻礙因素,而有降低強度等接合特性之問題。In place of the gold plating, the difference between the underlying layer of nickel or the like and the oxidation-reduction potential in the plating bath is used to precipitate gold, which erodes nickel and causes corrosion points due to oxidation (dissolution). This corrosion point due to oxidation is a hindrance factor when the solder of the solder layer is connected to nickel, and there is a problem that the bonding characteristics such as strength are lowered.

為解決此問題,含有醛之亞硫酸鹽加成物之無電解鍍金浴係揭示於特開2004-137589號公報(專利文獻1),含有烴基烷基磺酸之鍍金浴係揭示於國際公開第2004/111287號手冊(專利文獻2)。此等技術係以抑制底層金屬腐蝕為目的者。In order to solve this problem, an electroless gold plating bath containing an aldehyde sulfite adduct is disclosed in JP-A-2004-137589 (Patent Document 1), and a gold-plated bath system containing a hydrocarbyl alkylsulfonic acid is disclosed in International Publication No. Handbook No. 2004/111287 (Patent Document 2). These techniques are aimed at inhibiting corrosion of the underlying metal.

但是,如國際公開第2004/111287號手冊(專利文獻2)所記載之三伸乙基四胺,使用存在胺基(-NH2 )之1級胺化合物時,因鎳表面之粒界侵蝕,金的被覆力降低,發生被膜外觀變紅之不適狀況。However, in the case of the tri-ethyltetramine described in the handbook of International Publication No. 2004/111287 (Patent Document 2), when the amine compound of the amine group (-NH 2 ) is present, the grain boundary of the nickel surface is eroded. The coating power of gold is lowered, and the appearance of the appearance of the film becomes red.

〔專利文獻1〕特開2004-137589號公報 〔專利文獻2〕國際公開第2004/111287號手冊 〔專利文獻3〕特開2002-226975號公報 〔專利文獻4〕特許第2538461號公報[Patent Document 1] JP-A-2004-137589 [Patent Document 2] International Publication No. 2004/111287 [Patent Document 3] JP-A-2002-226975 [Patent Document 4] Patent No. 2538461

發明之揭示Invention disclosure

本發明係有鑑於上述情況所實施者,提供不因鎳表面之粒界侵蝕進行而發生外觀不良,長期間、安定地維持管理可得到良好被膜外觀之鍍金被膜之無電解鍍金浴之電鍍能力的方法,進而,長期間、安定地維持管理因電鍍處理而氰化金鹽被消耗之無電解鍍金浴的方法為目的。In view of the above, the present invention provides an electroless gold plating bath which does not cause appearance defects due to grain boundary erosion of the nickel surface, and which maintains the electroless gold plating bath of a gold plating film which can obtain a good film appearance for a long period of time. In addition, the method of maintaining an electroless gold plating bath in which cyanide gold salt is consumed by electroplating treatment is stably maintained for a long period of time.

本發明者發現使用含有作為金成份之氰化金鹽、作為還原劑成份之甲醛亞硫酸氫鹽加成物、及以下述一般式(1)或(2)R1 -NH-C2 H4 -NH-R2 (1) R3 -(CH2 -NH-C2 H4 -NH-CH2 )n -R4 (2)(式(1)及(2)中,R1 、R2 、R3 及R4 係表示-OH、-CH3 、-CH2 OH、-C2 H4 OH、-CH2 N(CH3 )2 、-CH2 NH(CH2 OH)、-CH2 NH(C2 H4 OH)、-C2 H4 NH(CH2 OH)、-C2 H4 NH(C2 H4 OH)、-CH2 N(CH2 OH)2 、-CH2 N(C2 H4 OH)2 、-C2 H4 N(CH2 OH)2 或-C2 H4 N(C2 H4 OH)2 ,可為相同或相異,n為1~4之整數)所表示之胺化合物之無電解鍍金浴,不易發生如上述鎳表面之粒界腐蝕,但已知此等電鍍浴係不論有無電鍍作業,胺及還原劑成份之甲醛亞硫酸氫鹽加成物及以上述-般式(1)或(2)所表示之胺化合物自電鍍浴中緩緩消失,有發生電解浴分解之問題。因此,發現以適當正確濃度比率逐次少量補給此等消失成份而可解決上述問題。The present inventors have found that a formaldehyde bisulfite adduct containing a gold cyanide salt as a gold component, a reducing agent component, and the following general formula (1) or (2) R 1 -NH-C 2 H 4 are used. -NH-R 2 (1) R 3 -(CH 2 -NH-C 2 H 4 -NH-CH 2 ) n -R 4 (2) (in the formulae (1) and (2), R 1 , R 2 And R 3 and R 4 represent -OH, -CH 3 , -CH 2 OH, -C 2 H 4 OH, -CH 2 N(CH 3 ) 2 , -CH 2 NH(CH 2 OH), -CH 2 NH(C 2 H 4 OH), -C 2 H 4 NH(CH 2 OH), -C 2 H 4 NH(C 2 H 4 OH), -CH 2 N(CH 2 OH) 2 , -CH 2 N (C 2 H 4 OH) 2 , -C 2 H 4 N(CH 2 OH) 2 or -C 2 H 4 N(C 2 H 4 OH) 2 , which may be the same or different, n is 1 to 4 An electroless gold plating bath of an amine compound represented by an integer) is less likely to cause grain boundary corrosion such as the above nickel surface, but it is known that such an electroplating bath system has a formaldehyde bisulfite addition of an amine and a reducing agent component regardless of the presence or absence of electroplating operation. The amine compound represented by the above formula (1) or (2) gradually disappears from the plating bath, and there is a problem that the electrolytic bath is decomposed. Therefore, it has been found that the above problems can be solved by replenishing these disappearing components in small amounts at appropriate correct concentration ratios.

亦即,本發明係提供下述之維持管理無電解鍍金浴之電鍍能力的方法。That is, the present invention provides the following method for maintaining the electroplating ability of an electroless gold plating bath.

〔1〕為保持含有氰化金鹽、配位劑、甲醛亞硫酸氫鹽加成物、及以下述一般式(1)或(2)R1 -NH-C2 H4 -NH-R2 (1) R3 -(CH2 -NH-C2 H4 -NH-CH2 )n -R4 (2)(式(1)及(2)中,R1 、R2 、R3 及R4 係表示-OH、-CH3 、-CH2 OH、-C2 H4 OH、-CH2 N(CH3 )2 、-CH2 NH(CH2 OH) 、-CH2 NH(C2 H4 OH)、-C2 H4 NH(CH2 OH)、-C2 H4 NH(C2 H4 OH)、-CH2 N(CH2 OH)2 、-CH2 N(C2 H4 OH)2 、-C2 H4 N(CH2 OH)2 或-C2 H4 N(C2 H4 OH)2 ,可為相同或相異,n為1~4之整數)所表示之胺化合物之無電解鍍金浴於70~90℃之狀態,安定地維持管理上述無電解鍍金浴之電鍍能力的方法,定期地補給作為第1補給成份之氰化鹼及上述甲醛亞硫酸氫鹽加成物及胺化合物為特徵之無電解鍍金浴之電鍍能力的方法。[1] in order to maintain a gold cyanide salt, a complexing agent, a formaldehyde bisulfite adduct, and the following general formula (1) or (2) R 1 -NH-C 2 H 4 -NH-R 2 (1) R 3 -(CH 2 -NH-C 2 H 4 -NH-CH 2 ) n -R 4 (2) (in the formulae (1) and (2), R 1 , R 2 , R 3 and R 4 represents -OH, -CH 3 , -CH 2 OH, -C 2 H 4 OH, -CH 2 N(CH 3 ) 2 , -CH 2 NH(CH 2 OH) , -CH 2 NH(C 2 H 4 OH), -C 2 H 4 NH(CH 2 OH), -C 2 H 4 NH(C 2 H 4 OH), -CH 2 N(CH 2 OH) 2 , -CH 2 N (C 2 H 4 OH) 2 , -C 2 H 4 N(CH 2 OH) 2 or -C 2 H 4 N(C 2 H 4 OH) 2 , which may be the same or different, n is an integer from 1 to 4) The electroless gold plating bath of the amine compound is maintained at a temperature of 70 to 90 ° C, and the method of managing the electroplating ability of the electroless gold plating bath is stably maintained, and the cyanide base as the first replenishing component and the above-mentioned formaldehyde bisulfite are periodically replenished. The composition and amine compound are methods for electroplating ability of an electroless gold plating bath.

〔2〕上述氰化鹼、甲醛亞硫酸氫鹽加成物及胺化合物之補給比率係補給成氰化鹼:甲醛亞硫酸氫鹽加成物:胺化合物=0.5~5:1:0.1~5(莫耳比)為特徵之〔1〕記載之維持管理無電解鍍金浴之電鍍能力的方法。[2] The replenishment ratio of the above cyanide base, formaldehyde bisulfite adduct and amine compound is replenished to cyanide base: formaldehyde bisulfite adduct: amine compound = 0.5~5:1:0.1~5 (Morby) is a method of maintaining the electroplating ability of an electroless gold plating bath as described in [1].

〔3〕上述以該甲醛亞硫酸氫鹽加成物基準,將建浴時濃度之0.1~5莫耳%,以每1小時分1~20次補給上述第1補給成份為特徵之〔2〕記載之維持管理無電解鍍金浴之電鍍能力的方法。[3] The above-mentioned first replenishing component is characterized by adding 0.1 to 5 mol% of the concentration at the time of bathing, based on the formaldehyde bisulfite adduct, and replenishing the first replenishing component 1 to 20 times per hour [2] A method of maintaining the plating ability of an electroless gold plating bath is described.

〔4〕進而相對於由電鍍處理而金被消耗之電鍍浴,補給作為第2補給成份之上述氰化金鹽、甲醛亞硫酸氫鹽加成物及胺化合物為特徵之〔1〕至〔3〕記載之維持管理無電解鍍金浴之電鍍能力的方法。[4] Further, the electroplating bath in which gold is consumed by the electroplating treatment is supplemented with the above-mentioned cyanide gold salt, formaldehyde bisulfite adduct and amine compound as the second replenishing component [1] to [3]. The method of maintaining the electroplating ability of the electroless gold plating bath is described.

〔5〕上述氰化金鹽、甲醛亞硫酸氫鹽加成物及胺化合物之補給比率係補給成氰化金鹽:甲醛亞硫酸氫鹽加成物:胺化合物=1:0.1~5:0.5~5(莫耳比)為特徵之〔4〕記載之維持管理無電解鍍金浴之電鍍能力的方法。[5] The replenishment ratio of the above-mentioned cyanide gold salt, formaldehyde bisulfite adduct and amine compound is replenished into a gold cyanide salt: formaldehyde bisulfite adduct: amine compound = 1: 0.1 to 5: 0.5 ~5 (Morby ratio) is a method described in [4] for maintaining the plating ability of an electroless gold plating bath.

〔6〕以該甲醛亞硫酸氫鹽加成物基準,將建浴時濃度之0.1~5莫耳%,以每1小時分1~20次補給上述第2補給成份為特徵之〔5〕記載之維持管理無電解鍍金浴之電鍍能力的方法。[6] Based on the formaldehyde bisulfite adduct, the concentration of the bath is 0.1 to 5 mol%, and the second replenishment component is characterized by 1 to 20 times per hour. A method of maintaining the electroplating ability of an electroless gold plating bath.

〔7〕上述甲醛亞硫酸氫鹽加成物之1次補給量係每1L電鍍浴為2毫莫耳以下為特徵之〔3〕或〔6〕記載之維持管理無電解鍍金浴之電鍍能力的方法。[7] The primary reductive amount of the formaldehyde hydrogen sulfite adduct is characterized by maintaining the electroplating ability of the electroless gold plating bath described in [3] or [6] per 1 L of the electroplating bath. method.

〔8〕取代上述甲醛亞硫酸氫鹽加成物,以同莫耳量之甲醛補給部份或全部之上述補給甲醛亞硫酸氫鹽加成物為特徵之〔1〕至〔7〕中任一項記載之維持管理無電解鍍金浴之電鍍能力的方法。[8] Substituting the above-mentioned formaldehyde hydrogen sulfite adduct, one or more of [1] to [7] characterized by replenishing part or all of the above-mentioned supplemental formaldehyde bisulfite adduct with a molar amount of formaldehyde A method for maintaining the electroplating ability of an electroless gold plating bath as described in the section.

依據本發明,不因鎳表面之粒界侵蝕進行而引起外觀不良,可長期間、安定地維持管理形成良好被膜外觀之鍍金被膜之無電解鍍金浴之電鍍能力,並且,可長期間、安定地維持管理因電鍍處理而氰化金鹽被消耗之無電解鍍金浴。According to the present invention, the appearance of the grain boundary of the nickel surface is not deteriorated, and the electroplating ability of the electroless gold plating bath for managing the gold plating film which forms a good film appearance can be stably maintained for a long period of time, and the plating ability can be stably maintained for a long period of time. An electroless gold plating bath that manages the consumption of cyanide gold salts due to electroplating treatment is maintained.

用以實施發明之最佳形態The best form for implementing the invention

以下,更詳細地說明關於本發明。Hereinafter, the present invention will be described in more detail.

本發明之無電解鍍金浴係含有氰化金鹽、配位劑、甲醛亞硫酸氫鹽加成物、及以下述一般式(1)或(2)R1 -NH-C2 H4 -NH-R2 (1) R3 -(CH2 -NH-C2 H4 -NH-CH2 )n -R4 (2)(式(1)及(2)中,R1 、R2 、R3 及R4 係表示-OH、-CH3 、-CH2 OH、-C2 H4 OH、-CH2 N(CH3 )2 、-CH2 NH(CH2 OH)、-CH2 NH(C2 H4 OH)、-C2 H4 NH(CH2 OH)、-C2 H4 NH(C2 H4 OH)、-CH2N(CH2 OH)2 、-CH2 N(C2 H4 OH)2 、-C2 H4 N(CH2 OH)2 或-C2 H4 N(C2 H4 OH)2 ,可為相同或相異,n為1~4之整數)所表示之胺化合物。The electroless gold plating bath of the present invention contains a gold cyanide salt, a complexing agent, a formaldehyde bisulfite adduct, and the following general formula (1) or (2) R 1 -NH-C 2 H 4 -NH -R 2 (1) R 3 -(CH 2 -NH-C 2 H 4 -NH-CH 2 ) n -R 4 (2) (in the formulae (1) and (2), R 1 , R 2 , R 3 and R 4 represent -OH, -CH 3 , -CH 2 OH, -C 2 H 4 OH, -CH 2 N(CH 3 ) 2 , -CH 2 NH(CH 2 OH), -CH 2 NH ( C 2 H 4 OH), -C 2 H 4 NH(CH 2 OH), -C 2 H 4 NH(C 2 H 4 OH), -CH 2 N(CH 2 OH) 2 , -CH 2 N (C 2 H 4 OH) 2 , -C 2 H 4 N(CH 2 OH) 2 or -C 2 H 4 N(C 2 H 4 OH) 2 , which may be the same or different, n is an integer from 1 to 4) Amine compound.

本發明之無電解鍍金浴係與傳統的取代鍍金浴不同,於相同的電鍍浴中,取代反應與還原反應雙方進行之取代-還原型無電解鍍金浴。於鍍金浴中,使含有甲醛亞硫酸氫鹽加成物、及具有上述一般式(1)或(2)所表示之特有構造之胺化合物,本發明之無電解鍍金浴係於銅、鎳等之底層金屬上,由取代反應析出金,同時以該析出金作為觸媒,由還原劑析出金。The electroless gold plating bath of the present invention is different from the conventional substituted gold plating bath in the same electroplating bath as the substitution-reduction type electroless gold plating bath which is carried out by both the reaction and the reduction reaction. In the gold plating bath, an amine compound containing a formaldehyde bisulfite adduct and a specific structure represented by the above general formula (1) or (2) is used, and the electroless gold plating bath of the present invention is used for copper, nickel, or the like. On the underlying metal, gold is precipitated by the substitution reaction, and gold is precipitated from the reducing agent by using the precipitated gold as a catalyst.

因為本發明之無電解鍍金浴係抑制底層金屬之侵蝕至最低限度,底層金屬離子溶出於電鍍浴中少,即使經長期使用,仍可保持安定的析出速度。例如若為通常的取代電鍍,析出金與溶出之底層金屬(例如銅或鎳)的量雖依化學量論為等量,本發明之電鍍浴中,例如進行ENIG步驟時,因為大部份析出的金,由取代電鍍移位成還原電鍍,相對於析出的金,溶出底層鎳的析出非常少,此時,可抑制至傳統通常之取代鍍金之1/8程度。Since the electroless gold plating bath of the present invention suppresses the erosion of the underlying metal to a minimum, the underlying metal ions are dissolved in the electroplating bath, and the stable deposition rate can be maintained even after long-term use. For example, in the case of usual substitution plating, the amount of precipitated gold and the eluted underlying metal (for example, copper or nickel) is equal by the stoichiometric amount, and in the electroplating bath of the present invention, for example, when the ENIG step is performed, most of the precipitation occurs. The gold is displaced by the substitution plating to the reduction plating, and the precipitation of the eluted underlying nickel is very small with respect to the precipitated gold. In this case, it can be suppressed to about 1/8 of the conventional usual substitution gold plating.

因此,可抑制底層金屬侵蝕成最低限度,而且得到均 勻緻密的鍍金被膜。另外,因為含有還原劑,於析出的金上,金連續析出,所以不另外進行加厚用鍍金,可以1個電鍍浴厚膜化。另外,可安定地維持金之析出速度,即使厚膜化,電鍍被膜亦不泛紅,可保持金特有檸檬黃色。Therefore, the corrosion of the underlying metal can be suppressed to a minimum, and Uniform dense gold-plated film. Further, since the reducing agent is contained, gold is continuously deposited on the precipitated gold. Therefore, gold plating for thickening is not additionally performed, and one plating bath can be thickened. In addition, the precipitation rate of gold can be stably maintained, and even if the film is thickened, the plating film is not reddish, and the gold-colored lemon yellow is maintained.

底層為鈀時,與鎳或銅時不同,鈀與金之電位差小。因此,使用傳統之取代型鍍金浴,於鈀上進行鍍金時,不能得到均勻膜厚,更不能得到充分的膜厚。對此,本發明之無電解鍍金浴係將鈀表面活性化,以鈀為觸媒,可由還原劑析出金,另外,以析出的金作為觸媒,可更加析出金,所以即使於鈀上,仍可使鍍金被膜厚膜化。When the bottom layer is palladium, unlike nickel or copper, the potential difference between palladium and gold is small. Therefore, when a conventional substitution type gold plating bath is used for gold plating on palladium, a uniform film thickness cannot be obtained, and a sufficient film thickness cannot be obtained. On the other hand, in the electroless gold plating bath of the present invention, the surface of palladium is activated, palladium is used as a catalyst, gold can be precipitated from a reducing agent, and gold can be precipitated by using precipitated gold as a catalyst. Therefore, even on palladium, The gold-plated film can still be thickened.

作為本發明之無電解鍍金浴中所含之氰化金鹽,可舉例如氰化金、氰化金鉀、氰化金鈉、氰化金銨等,以氰化金鉀、氰化金鈉尤佳。Examples of the gold cyanide salt contained in the electroless gold plating bath of the present invention include gold cyanide, gold potassium cyanide, gold gold cyanide, gold ammonium cyanide, and the like, and potassium gold cyanide and sodium gold cyanide. Especially good.

氰化金鹽於建浴時及補給後之含有量係以金基準為0.0001~1莫耳/L為宜,以0.001~0.5莫耳/L尤佳。未滿上述範圍時,析出速度有降低之虞,若超過上述範圍時,經濟上將不利。The content of the cyanide gold salt during the construction of the bath and after the replenishment is preferably 0.0001 to 1 mol/L on a gold basis, and particularly preferably from 0.001 to 0.5 mol/L. When the above range is not satisfied, the precipitation rate is lowered, and if it exceeds the above range, it is economically disadvantageous.

作為本發明之無電解鍍金浴中所含之配位劑,可使用無電解電鍍浴所使用之已知配位劑,可舉例如磷酸鹽、硼酸、檸檬酸、葡糖酸、酒石酸、乳酸、蘋果酸、伸乙基二胺、三乙醇胺、伸乙基二胺四乙酸、氮川三乙酸、二伸乙基三胺五乙酸、烴乙基伸乙基二胺三乙酸、三伸乙基四胺六乙酸、1,3-丙烷二胺四乙酸、1,3-二胺基-2-烴基丙烷四乙酸、烴乙基亞胺基二醋酸、二烴甘胺酸、乙二醇醚二胺 四乙酸、二羧甲基麩胺酸、烴基亞乙基二磷酸、伸乙基二胺四(伸甲基磷酸)、或該鹼金屬(例如鈉、鉀)鹽、鹼土類金屬鹽、銨鹽等。As the complexing agent contained in the electroless gold plating bath of the present invention, a known complexing agent used in the electroless plating bath can be used, and examples thereof include phosphate, boric acid, citric acid, gluconic acid, tartaric acid, and lactic acid. Malic acid, ethyl diamine, triethanolamine, ethyldiaminetetraacetic acid, nitrilotriacetic acid, diethylidene triamine pentaacetic acid, hydrocarbon ethylethyldiaminetriacetic acid, triamethylenetetraamine Hexaacetic acid, 1,3-propanediaminetetraacetic acid, 1,3-diamino-2-hydrocarbylpropanetetraacetic acid, hydrocarbon ethylimidodiacetic acid, dihydroglycine, glycol ether diamine Tetraacetic acid, dicarboxymethylglutamic acid, hydrocarbyl ethylene diphosphate, ethyldiamine tetra(methylphosphoric acid), or alkali metal (such as sodium, potassium), alkaline earth metal salt, ammonium salt Wait.

於建浴時及補給後之配位劑濃度係以0.001~1莫耳/L為宜,以0.01~0.5莫耳/L尤佳。未滿上述範圍時,因溶出的金屬而有析出速度降低之虞,若超過上述範圍時,對經濟上不利。The concentration of the complexing agent in the bath and after the replenishment is preferably 0.001 to 1 mol/L, and preferably 0.01 to 0.5 mol/L. When the range is less than the above range, the precipitation rate is lowered by the eluted metal, and if it exceeds the above range, it is economically disadvantageous.

本發明之無電解鍍金浴中含有甲醛亞硫酸氫鹽加成物。作為此甲醛亞硫酸氫鹽加成物,具體上可舉例如甲醛亞硫酸鈉、甲醛亞硫酸鉀、甲醛亞硫酸銨等。The electroless gold plating bath of the present invention contains a formaldehyde bisulfite adduct. Specific examples of the formaldehyde hydrogen sulfite adduct include, for example, sodium formaldehyde sulfite, potassium formaldehyde sulfite, ammonium formaldehyde sulfite, and the like.

此等甲醛亞硫酸氫鹽加成物於建浴時及補給後之濃度係以0.0001~0.5莫耳/L為宜,以0.001~0.3莫耳/L尤佳。未滿上述範圍時,底層鎳有腐蝕之虞,若超過上述範圍時,有電鍍浴變得不安定之虞。The concentration of such formaldehyde bisulfite adducts in the bath and after replenishment is preferably 0.0001 to 0.5 mol/L, and particularly preferably 0.001 to 0.3 mol/L. When the above range is not satisfied, the underlying nickel is corroded, and if it exceeds the above range, the plating bath becomes unstable.

本發明之無電解鍍金浴係含有以下述一般式(1)或(2)R1 -NH-C2 H4 -NH-R2 (1) R3 -(CH2 -NH-C2 H4 -NH-CH2 )n -R4 (2)(式(1)及(2)中,R1 、R2 、R3 及R4 係表示-OH、-CH3 、-CH2 OH、-C2 H4 OH、-CH2 N(CH3 )2 、-CH2 NH(CH2 OH)、-CH2 NH(C2 H4 OH)、-C2 H4 NH(CH2 OH)、-C2 H4 NH(C2 H4 OH)、-CH2 N(CH2 OH)2 、-CH2 N(C2 H4 OH)2 、-C2 H4 N(CH2 OH)2 或-C2 H4 N(C2 H4 OH)2 ,可為相同或相異,n為1~4之整數)所表示之胺化合物。本發明之甲醛亞硫酸氫鹽加成物係僅 甲醛亞硫酸氫鹽加成物則不作為還原劑作用,與此胺化合物共存時發生還原作用。The electroless gold plating bath of the present invention contains the following general formula (1) or (2) R 1 -NH-C 2 H 4 -NH-R 2 (1) R 3 -(CH 2 -NH-C 2 H 4 -NH-CH 2 ) n -R 4 (2) (In the formulae (1) and (2), R 1 , R 2 , R 3 and R 4 represent -OH, -CH 3 , -CH 2 OH, - C 2 H 4 OH, -CH 2 N(CH 3 ) 2 , -CH 2 NH(CH 2 OH), -CH 2 NH(C 2 H 4 OH), -C 2 H 4 NH(CH 2 OH), -C 2 H 4 NH(C 2 H 4 OH), -CH 2 N(CH 2 OH) 2 , -CH 2 N(C 2 H 4 OH) 2 , -C 2 H 4 N(CH 2 OH) 2 Or -C 2 H 4 N(C 2 H 4 OH) 2 , which may be the same or different, and n is an integer of 1 to 4). The formaldehyde hydrogen sulfite adduct of the present invention is only a formaldehyde hydrogen sulfite adduct which does not act as a reducing agent, and a reducing action occurs when it coexists with the amine compound.

於建浴時及補給後之胺化合物濃度係以0.001~3莫耳/L為宜,以0.01~1莫耳/L尤佳。未滿上述範圍時,有析出速度降低之虞,若超過上述範圍時,有電解浴變得不安定之虞。The concentration of the amine compound in the bath and after the replenishment is preferably 0.001 to 3 m/L, and preferably 0.01 to 1 mol/L. When the above range is not satisfied, there is a possibility that the deposition rate is lowered, and if it exceeds the above range, the electrolytic bath may become unstable.

本發明之無電解鍍金浴係可添加已知之無電解電鍍所使用之安定劑。作為此安定劑,可舉例如2-巰基苯并噻唑、2-巰基苯并咪唑、巰基乙酸、巰基琥珀酸、硫代硫酸、硫甘醇、硫脲、硫代蘋果酸等之硫化物、苯并三唑、1,2,4-胺基三唑等之氮化合物。The electroless gold plating bath of the present invention may be added with a stabilizer which is known for electroless plating. Examples of the stabilizer include sulfides of 2-mercaptobenzothiazole, 2-mercaptobenzimidazole, mercaptoacetic acid, mercaptosuccinic acid, thiosulfuric acid, thioglycol, thiourea, thiomalic acid, and the like. And a nitrogen compound such as triazole or 1,2,4-aminotriazole.

於建浴時及補給後之安定劑濃度係以於0.0000001~0.01莫耳/L為宜,以0.000001~0.005莫耳/L尤佳。未滿上述範圍時,有電鍍浴變得不安定之虞,若超過上述範圍時,有析出速度降低之虞。The concentration of stabilizer in Yujian bath and after replenishment is preferably 0.0000001~0.01 mol/L, especially 0.000001~0.005 mol/L. When the above range is not satisfied, the plating bath may become unstable, and if it exceeds the above range, the deposition rate may decrease.

本發明之無電解鍍金浴之pH係以5~10為宜。未滿上述範圍時,析出速度有降低之虞,若超過上述範圍時,有電鍍浴變得不安定之虞。作為pH調整劑,可使用已知電鍍浴所使用之氫氧化鈉、氫氧化鉀、氨、硫酸、磷酸、硼酸等。The pH of the electroless gold plating bath of the present invention is preferably from 5 to 10. When the range is less than the above range, the deposition rate is lowered, and if it exceeds the above range, the plating bath may become unstable. As the pH adjuster, sodium hydroxide, potassium hydroxide, ammonia, sulfuric acid, phosphoric acid, boric acid or the like which is used in a known plating bath can be used.

另外,本發明之無電解鍍金浴之使用溫度係以70~90℃為宜。未滿上述範圍時,有析出速度降低之虞,若超過上述範圍時,有電鍍浴變得不安定之虞。Further, the use temperature of the electroless gold plating bath of the present invention is preferably 70 to 90 °C. When the above range is not satisfied, there is a possibility that the deposition rate is lowered, and if it exceeds the above range, the plating bath may become unstable.

本發明中,上述無電解鍍金浴,連續保持該浴溫為70 ~90℃,尤其80℃以上時,藉由定期地補給作為第1補給成份之氫氧化鈉、氫氧化鉀等之氰化鹼及作為無電解鍍金浴成份之上述甲醛亞硫酸氫鹽加成物及胺化合物,可維持無電解鍍金浴之電鍍能力。In the present invention, the above electroless gold plating bath continuously maintains the bath temperature at 70. When the temperature is ~90 ° C, especially 80 ° C or higher, the above-mentioned formaldehyde hydrogen sulfite adduct as an electroless gold plating bath component is periodically replenished by a cyanide base such as sodium hydroxide or potassium hydroxide as a first replenishing component. And amine compounds, can maintain the electroplating ability of electroless gold plating bath.

此時,氰化鹼、甲醛亞硫酸氫鹽加成物及胺化合物之補給比率係補給此等成份成氰化鹼:甲醛亞硫酸氫鹽加成物:胺化合物=0.5~5:1:0.1~5(莫耳比)為宜。超過此補給比率時,氰化鹼過剩時,金的被覆力降低,並且鎳有腐蝕之虞,過少時,有加速電解浴分解之虞。甲醛亞硫酸氫鹽加成物過剩時,有加速電解浴分解之虞,過少時,還原力降低,鎳腐蝕,並且金的被覆力有降低之虞。胺化合物過剩時,有加速電解浴分解之虞,過少時,還原力降低,鎳腐蝕,並且金的被覆力有降低之虞。此時,甲醛亞硫酸氫鹽加成物與胺化合物之平衡尤其重要。At this time, the replenishment ratio of the cyanide base, the formaldehyde bisulfite adduct and the amine compound is supplemented with these components to form a cyanide base: formaldehyde bisulfite adduct: amine compound = 0.5 to 5: 1: 0.1 ~5 (Morbi) is appropriate. When the ratio of the supply exceeds this, when the cyanide base is excessive, the coating power of gold is lowered, and the nickel is corroded, and when it is too small, the decomposition of the electrolytic bath is accelerated. When the formaldehyde bisulfite adduct is excessive, there is an increase in the decomposition of the electrolytic bath. When the amount is too small, the reducing power is lowered, the nickel is corroded, and the coating power of gold is lowered. When the amine compound is excessive, there is an increase in the decomposition of the electrolytic bath. When the amount is too small, the reducing power is lowered, the nickel is corroded, and the coating power of gold is lowered. At this time, the balance between the formaldehyde bisulfite adduct and the amine compound is particularly important.

另外,於本發明中,相對於由電鍍處理而金被消耗之電鍍浴,可再補給無電解鍍金浴之成份之該氰化金鹽、甲醛亞硫酸氫鹽加成物及胺化合物為作為第2補給成份。Further, in the present invention, the cyanide gold salt, the formaldehyde hydrogen sulfite adduct, and the amine compound which are added to the electroless gold plating bath component may be added to the electroplating bath in which the gold is consumed by the electroplating treatment. 2 supply ingredients.

此時,氰化金鹽、甲醛亞硫酸氫鹽加成物及胺化合物之補給比率係補給此等成份成氰化金鹽:甲醛亞硫酸氫鹽加成物:胺化合物=1:0.1~5:0.5~5(莫耳比)為宜。超過此補給比率時,氰化金鹽過剩時,有不利於成本之虞,過少時金濃度降低,有金被膜特性劣化之虞。甲醛亞硫酸氫鹽加成物過剩時,有加速電解浴分解之虞,過少時,還原力降低,鎳腐蝕,並且金的被覆力有降低之虞。胺化 合物過剩時,有加速電解浴分解之虞,過少時,還原力降低,鎳腐蝕,並且金的被覆力有降低之虞。此時,甲醛亞硫酸氫鹽加成物與胺化合物之平衡尤其重要。At this time, the replenishment ratio of the gold cyanide salt, the formaldehyde bisulfite adduct and the amine compound is replenished to the cyanide gold salt: formaldehyde bisulfite adduct: amine compound=1: 0.1~5 : 0.5~5 (Morbi) is appropriate. When the replenishment ratio is exceeded, when the gold cyanide salt is excessive, the cost is unfavorable, and when the amount is too small, the gold concentration is lowered, and the gold film characteristics are deteriorated. When the formaldehyde bisulfite adduct is excessive, there is an increase in the decomposition of the electrolytic bath. When the amount is too small, the reducing power is lowered, the nickel is corroded, and the coating power of gold is lowered. Amination When the compound is excessive, there is an increase in the decomposition of the electrolytic bath. When the amount is too small, the reducing power is lowered, the nickel is corroded, and the coating power of gold is lowered. At this time, the balance between the formaldehyde bisulfite adduct and the amine compound is particularly important.

另外,由此等第1及2之補給成份之各個補給中,以該甲醛亞硫酸氫鹽加成物基準,將建浴時濃度之0.1~5莫耳%,以每1小時分1~20次,以等間隔補給為宜,另外,甲醛亞硫酸氫鹽加成物之1次補給量,以每1L之電鍍浴為2毫莫耳以下為宜。補給間隔若過長時,電鍍浴內之組成變化變大,有發生被膜特性不齊之虞。另外,1次補給量過多時,電鍍浴內之組成變化變大,有發生被膜特性不齊之虞。In addition, in the respective replenishment of the first and second replenishing components, the concentration of the bath is 0.1 to 5 mol% based on the formaldehyde bisulfite adduct, and is 1 to 20 per hour. In this case, it is preferred to replenish at equal intervals, and the amount of replenishment of the formaldehyde bisulfite adduct is preferably 2 mmol or less per 1 L of the plating bath. If the replenishment interval is too long, the composition change in the plating bath becomes large, and the film characteristics may be irregular. Further, when the amount of replenishment is too large, the composition change in the plating bath becomes large, and the film characteristics are not uniform.

另外,本發明中,將部份或全部之補給甲醛亞硫酸氫鹽加成物,取代甲醛亞硫酸氫鹽加成物,補給與甲醛亞硫酸氫鹽加成物同莫耳量之甲醛。甲醛亞硫酸氫鹽加成物係由電鍍浴之溫度上升或電鍍處理而產生亞硫酸,所產生的亞硫酸堆積於電鍍浴中。於電鍍浴中,亞硫酸抑制由還原劑之反應,所以作為防止電鍍浴分解之所謂的安定劑作用,但過剩時,亞硫酸抑制由還原劑之反應,取代反應比率增加,而有使底層鎳腐蝕之虞。若底層鎳腐蝕時,因為焊錫接合性降低等之不良情況發生,所以將部份或全部之補給甲醛亞硫酸氫鹽加成物,取代甲醛亞硫酸氫鹽加成物,補給與甲醛亞硫酸氫鹽加成物同莫耳量之甲醛,可抑制因亞硫酸過剩之上述不良情況。尤其,使用第1補給成份中之甲醛亞硫酸氫鹽加成物、第2補給成份中之甲醛,亦容 易管理補給成份,可適當地維持電鍍浴中之亞硫酸濃度,電解浴安定性、焊錫接合性皆變得良好,所以適宜。Further, in the present invention, part or all of the formaldehyde hydrogen sulfite adduct is supplied, and the formaldehyde hydrogen sulfite adduct is replaced, and the formaldehyde hydrogen sulfite adduct is supplied in the same molar amount as the formaldehyde. The formaldehyde bisulfite adduct is produced by the temperature rise of the electroplating bath or by electroplating to produce sulfurous acid, and the produced sulfurous acid is deposited in the electroplating bath. In the electroplating bath, sulfurous acid suppresses the reaction by the reducing agent, so it acts as a so-called stabilizer for preventing decomposition of the plating bath, but when it is excessive, sulfurous acid suppresses the reaction by the reducing agent, and the substitution reaction ratio increases, and the underlying nickel is present. Corrosion. If the underlying nickel is corroded, due to defects such as reduced solder jointability, some or all of the formaldehyde bisulfite adduct is replaced by the formaldehyde bisulfite adduct, and the hydrogen peroxide is replenished. The salt adduct is the same as the molar amount of formaldehyde, which can suppress the above-mentioned adverse conditions due to excess sulfite. In particular, the formaldehyde bisulfite adduct in the first replenishing component and the formaldehyde in the second replenishing component are also used. Since it is easy to manage the replenishing component, the concentration of sulfurous acid in the plating bath can be appropriately maintained, and the electrolytic bath stability and solder jointability are all good, so it is suitable.

尤其,於上述第2補給成份之補給中,自由第2補給成份對電鍍浴建浴時之金的補給總量為0.2g/L以上,以0.1g/L以上時為宜,取代甲醛亞硫酸氫鹽加成物,補給與甲醛亞硫酸氫鹽加成物同莫耳量之甲醛為宜。In particular, in the replenishment of the second replenishing component, the total amount of gold supplied by the second replenishing component to the plating bath is 0.2 g/L or more, and preferably 0.1 g/L or more, instead of formaldehyde sulfurous acid. The hydrogen salt adduct is replenished with formaldehyde formaldehyde bisulfite adduct with the molar amount of formaldehyde.

本發明之無電解鍍金浴中,浴中之甲醛之亞硫酸氫鹽加成物與胺化合物共存一事,認為係產生如下式所示之甲醛-胺複合物,作為還原劑成份作用。In the electroless gold plating bath of the present invention, the bisulfite adduct of formaldehyde in the bath coexists with the amine compound, and it is considered that a formaldehyde-amine complex represented by the following formula is produced as a reducing agent component.

甲醛之亞硫酸氫鹽加成物+胺化合物 →還原劑成份(甲醛-胺複合物)+亞硫酸Formaldehyde bisulfite adduct + amine compound →Reducing agent component (formaldehyde-amine complex) + sulfurous acid

浴中此還原劑成份(甲醛-胺複合物)被消耗,亦即,甲醛之亞硫酸氫鹽加成物及胺化合物被消耗。此時,雖必須補給被消耗的甲醛之亞硫酸氫鹽加成物及胺化合物,但亦可補給甲醛以取代甲醛之亞硫酸氫鹽加成物。此補給時,若不考慮各成份之補給平衡而補給時,因為發生浴分解、鎳腐蝕、金被覆力降低等之不良狀況,所以必須考慮此補給比率。亦即,甲醛之亞硫酸氫鹽加成物:胺化合物、甲醛:胺化合物或甲醛之亞硫酸氫鹽加成物及甲醛:胺化合物,於莫耳比率上分別以一定比率補給係重要的。This reducing agent component (formaldehyde-amine complex) is consumed in the bath, that is, the bisulfite adduct of formaldehyde and the amine compound are consumed. At this time, it is necessary to supply the consumed bisulfite adduct of formaldehyde and the amine compound, but it is also possible to supply formaldehyde to replace the bisulfite adduct of formaldehyde. At the time of replenishment, if the replenishment balance of each component is not considered, the replenishment ratio must be considered because of a problem such as bath decomposition, nickel corrosion, and reduction in the gold coating power. That is, the bisulfite adduct of formaldehyde: an amine compound, a formaldehyde: an amine compound or a bisulfite adduct of formaldehyde, and a formaldehyde: an amine compound, which are important in a certain ratio at a molar ratio.

使用本發明之無電解鍍金浴,作為電鍍處理時基體之金屬表面(被電鍍面)之材質,可以銅、銅合金、鎳、鎳合金、鈀、鈀合金等作為對象。作為上述鎳合金,可舉例如鎳-磷合金、鎳-硼合金等,作為鈀合金,可舉例如鈀-磷 合金等。如此之金屬表面係基體本身為金屬(合金)之表面之外,亦可為於基體表面上金屬被膜所形成之該被膜表面。金屬被膜係由電鍍所形成者,由無電解電鍍所形成者中任一種皆可,但為鎳、鎳合金、鈀、鈀合金時,一般由無電解電鍍所形成者。另外,基體上介由鎳或鎳合金被膜所形之鈀或鈀合金被膜表面,亦適合進行無電解鍍金處理。The electroless gold plating bath of the present invention can be used as a material of a metal surface (plated surface) of the substrate during the plating treatment, and may be made of copper, a copper alloy, nickel, a nickel alloy, palladium or a palladium alloy. Examples of the nickel alloy include a nickel-phosphorus alloy and a nickel-boron alloy. Examples of the palladium alloy include palladium-phosphorus. Alloys, etc. Such a metal surface is itself a surface of a metal (alloy), and may be a surface of the film formed by a metal film on the surface of the substrate. The metal film may be formed by electroplating, and may be formed by electroless plating. However, when it is nickel, a nickel alloy, palladium or a palladium alloy, it is generally formed by electroless plating. In addition, the surface of the palladium or palladium alloy film formed on the substrate via a nickel or nickel alloy film is also suitable for electroless gold plating.

本發明之無電解鍍金浴係可使用於ENIG(Electroless Nickel Immersion Gold),亦即(於銅上所形成)底層無電解鍍鎳被膜上,形成鍍金被膜之方法、DIG(Direct Immersion Gold),亦即,於銅上直接形成鍍金被膜之方法、ENEPIG(Electroless Nickel Ekectroless Palladium Immersion Gold),亦即於(於銅上所形成)底層無電解鍍鎳被膜上,介由無電解鍍鈀被膜,形成鍍金被膜之方法中任一種之鍍金被膜形成。The electroless gold plating bath of the present invention can be used for ENIG (Electroless Nickel Immersion Gold), that is, a method of forming a gold-plated film on a bottom electroless nickel plating film formed on copper, DIG (Direct Immersion Gold), That is, a method of directly forming a gold-plated film on copper, ENEPIG (Electroless Nickel Ekectroless Palladium Immersion Gold), that is, on a bottom electroless nickel plating film (formed on copper), forming a gold plating through an electroless palladium coating film A gold-plated film of any of the methods of the film is formed.

本發明之無電解鍍金浴及使用其之無電解鍍金方法係適合使用於例如將印刷配線基板或IC封裝等之電子零件之配線電路實裝部份或端子部份,進行鍍金處理時,於如此鍍金處理,可適合使用本發明之維持管理無電解鍍金浴之電鍍能力的方法。The electroless gold plating bath of the present invention and the electroless gold plating method using the same are suitably used, for example, when a wiring circuit mounting portion or a terminal portion of an electronic component such as a printed wiring board or an IC package is subjected to gold plating treatment. The gold plating treatment can be suitably applied to the method of maintaining the electroplating ability of the electroless gold plating bath of the present invention.

另外,本發明之電鍍浴係即使金屬表面(被電鍍面)為銅時,仍可得到良好被膜,底層為銅時,可得到抑制銅氧化、擴散之良好焊錫接合特性。另外,厚膜化亦可使用於打線接合。另外,因為本發明之電鍍浴係即使於鈀上仍 可析出良好的金被膜,最適合使用於無鉛焊錫接合或打線接合。Further, in the plating bath of the present invention, even when the metal surface (electroplated surface) is copper, a good film can be obtained, and when the underlayer is copper, good solder bonding properties for suppressing oxidation and diffusion of copper can be obtained. In addition, thick film formation can also be used for wire bonding. In addition, because the electroplating bath of the present invention is still on palladium A good gold film can be deposited, which is most suitable for lead-free solder bonding or wire bonding.

底層為鈀時,與鎳或銅的情況不同,鈀與金之電位差小。因此,使用傳統之取代型鍍金浴,於鈀上進行鍍金時,不能得到均勻膜厚,更不能得到充分的膜厚。對此,本發明之無電解鍍金浴係將鈀表面活性化,以鈀為觸媒,可由還原劑使金析出,另外,因為以析出的金作為觸媒,可更使金析出,所以即使於鈀上,仍可使鍍金被膜厚膜化。When the bottom layer is palladium, unlike the case of nickel or copper, the potential difference between palladium and gold is small. Therefore, when a conventional substitution type gold plating bath is used for gold plating on palladium, a uniform film thickness cannot be obtained, and a sufficient film thickness cannot be obtained. On the other hand, in the electroless gold plating bath of the present invention, the surface of palladium is activated, palladium is used as a catalyst, gold can be precipitated by a reducing agent, and gold is precipitated by using precipitated gold as a catalyst, so that even if On the palladium, the gold plating film can still be thickened.

〔實施例〕[Examples]

以下係舉實施例及比較例具體地說明本發明,但本發明並非侷限於下述實施例者。Hereinafter, the present invention will be specifically described by way of examples and comparative examples, but the present invention is not limited to the following examples.

〔實施例1,2及比較例1〕[Examples 1, 2 and Comparative Example 1]

以表1所示之鍍金浴,作為建浴時之電鍍浴,將此保持80℃,定期地補給(實施例1,2)或不補給(比較例1)表2所示比率之第1補給成份,保持100小時。由目測電鍍液狀態,確認有無浴分解徵兆之金析出於容器,無析出時,施以作為鎳/金步驟之表6所示處理之於貼銅印刷基板上,浸漬於各鍍金浴,施以鍍金,確認電鍍外觀之結果如表3所示。補給係每1小時之氰化鉀之補給量為15mg/L,補給成份係以上述比率,每1小時分別5次,每隔12分鐘補給。The gold plating bath shown in Table 1 was used as an electroplating bath at the time of bathing, and this temperature was maintained at 80 ° C, and the first supply of the ratio shown in Table 2 was not periodically replenished (Example 1, 2) or not supplied (Comparative Example 1). Ingredients, keep it for 100 hours. By visually checking the state of the plating solution, it was confirmed whether or not the gold was precipitated in the container, and when it was not deposited, the treatment shown in Table 6 as a nickel/gold step was applied to the copper-plated printed substrate, and immersed in each gold-plated bath. The results of gold plating and confirming the appearance of plating are shown in Table 3. The replenishment amount of potassium cyanide per hour is 15 mg/L, and the replenishment component is replenished every 12 minutes at the above ratio every 5 hours.

〔實施例3,4〕[Examples 3, 4]

以實施例1之條件進行運作,加入於實施例1所示之第1補給成份,再將表4所示之第2補給成份,每消耗0.1g/L的金,每1次之氰化金鉀之補給量為0.15g/L,以 上述比率補給。每補給0.5g/L的金,施以作為鎳/金步驟之表6所示處理之於貼銅印刷基板上,浸漬於各鍍金浴,施以鍍金。將所得之鍍金被膜,由上村工業製金剝離劑COPKIA RIP剝離金,剝離金後之鎳表面有無腐蝕如表5所示。The operation was carried out under the conditions of Example 1, and the first replenishing component shown in Example 1 was added, and the second replenishing component shown in Table 4 was used, and each time the gold was consumed, 0.1 g/L of gold was used. Potassium replenishment is 0.15g/L, The above ratio is replenished. Each of 0.5 g/L of gold was supplied to the copper-clad printed substrate as shown in Table 6 of the nickel/gold step, and immersed in each gold plating bath to be gold-plated. The obtained gold-plated film was peeled off from gold by the Kokumura Industrial Gold Stripping Agent COPKIA RIP, and the presence or absence of corrosion of the nickel surface after peeling off the gold is shown in Table 5.

實施例3中,取代甲醛亞硫酸鈉,由同莫耳量之甲醛補給,因為亞硫酸不生產過剩,所以剝離金後之鎳表面良好無腐蝕,但另一方面,實施例4中,認為因金補給總量超過1g/L,亞硫酸生產過剩,剝離金後之鎳表面發生腐蝕 。In Example 3, instead of sodium formaldehyde sulfite, it was replenished with formaldehyde in the same molar amount. Since the sulfurous acid was not produced excessively, the nickel surface after peeling gold was not corroded well, but on the other hand, in Example 4, it was considered that gold was supplied. The total amount exceeds 1g/L, the excess production of sulfite is excessive, and the surface of nickel after corrosion is corroded. .

Claims (9)

一種維持管理無電解鍍金浴之電鍍能力的方法,為保持含有氰化金鹽、配位劑、甲醛亞硫酸氫鹽加成物、及以一般式(1)或(2)R1 -NH-C2 H4 -NH-R2 (1) R3 -(CH2 -NH-C2 H4 -NH-CH2 )n -R4 (2)(式(1)及(2)中,R1 、R2 、R3 及R4 係表示-OH、-CH3 、-CH2 OH、-C2 H4 OH、-CH2 N(CH3 )2 、-CH2 NH(CH2 OH)、-CH2 NH(C2 H4 OH)、-C2 H4 NH(CH2 OH)、-C2 H4 NH(C2 H4 OH)、-CH2 N(CH2 OH)2 、-CH2 N(C2 H4 OH)2 、-C2 H4 N(CH2 OH)2 或-C2 H4 N(C2 H4 OH)2 ,可為相同或相異,n為1~4之整數)所表示之胺化合物之無電解鍍金浴於70~90℃之狀態,安定地維持管理該無電解鍍金浴之電鍍能力的方法,其特徵為定期地補給作為第1補給成份之氰化鹼及該甲醛亞硫酸氫鹽加成物及胺化合物。A method for maintaining the electroplating ability of an electroless gold plating bath, in order to maintain a gold cyanide salt, a complexing agent, a formaldehyde bisulfite adduct, and a general formula (1) or (2) R 1 -NH- C 2 H 4 -NH-R 2 (1) R 3 -(CH 2 -NH-C 2 H 4 -NH-CH 2 ) n -R 4 (2) (in the formulae (1) and (2), R 1 , R 2 , R 3 and R 4 represent -OH, -CH 3 , -CH 2 OH, -C 2 H 4 OH, -CH 2 N(CH 3 ) 2 , -CH 2 NH(CH 2 OH) , -CH 2 NH(C 2 H 4 OH), -C 2 H 4 NH(CH 2 OH), -C 2 H 4 NH(C 2 H 4 OH), -CH 2 N(CH 2 OH) 2 , -CH 2 N(C 2 H 4 OH) 2 , -C 2 H 4 N(CH 2 OH) 2 or -C 2 H 4 N(C 2 H 4 OH) 2 , which may be the same or different, n is The electroless gold plating bath of the amine compound represented by the integer of 1 to 4 is in a state of 70 to 90 ° C, and the method of managing the electroplating ability of the electroless gold plating bath is stably maintained, and is characterized in that it is periodically replenished as the first replenishing component. The cyanide base and the formaldehyde hydrogen sulfite adduct and the amine compound. 如申請專利範圍第1項之維持管理無電解鍍金浴之電鍍能力的方法,其中該氰化鹼、甲醛亞硫酸氫鹽加成物及胺化合物之補給比率係補給成氰化鹼:甲醛亞硫酸氫鹽加成物:胺化合物=0.5~5:1:0.1~5(莫耳比)。 The method for maintaining the electroplating ability of an electroless gold plating bath according to the first aspect of the patent application, wherein the supply ratio of the cyanide base, the formaldehyde bisulfite adduct and the amine compound is replenished to a cyanide base: formaldehyde sulfurous acid Hydrogen salt adduct: amine compound = 0.5~5:1:0.1~5 (mole ratio). 如申請專利範圍第2項之維持管理無電解鍍金浴之電鍍能力的方法,其中以該甲醛亞硫酸氫鹽加成物基準,將建浴時濃度之0.1~5莫耳%,以每1小時分1~20次補給該第1補給成份。 For example, in the method of claim 2, the method for maintaining the electroplating ability of the electroless gold plating bath, wherein the concentration of the bath is 0.1 to 5 mol% per hour, based on the formaldehyde bisulfite adduct. The first supply component is replenished in 1 to 20 times. 如申請專利範圍第1項之維持管理無電解鍍金浴 之電鍍能力的方法,其中進而相對於由電鍍處理而金被消耗之電鍍浴,補給作為第2補給成份之該氰化金鹽、甲醛亞硫酸氫鹽加成物及胺化合物。 For example, the maintenance management of electroless gold plating bath in the first application of patent scope In the method of electroplating ability, the cyanide gold salt, the formaldehyde hydrogensulfite adduct, and the amine compound as the second replenishing component are further supplied to the electroplating bath in which the gold is consumed by the electroplating treatment. 如申請專利範圍第4項之維持管理無電解鍍金浴之電鍍能力的方法,其中該氰化金鹽、甲醛亞硫酸氫鹽加成物及胺化合物之補給比率係補給成氰化金鹽:甲醛亞硫酸氫鹽加成物:胺化合物=1:0.1~5:0.5~5(莫耳比)。 For example, in the method of claim 4, the method for maintaining the electroplating ability of the electroless gold plating bath, wherein the supply ratio of the cyanide gold salt, the formaldehyde bisulfite adduct and the amine compound is replenished into a gold cyanide salt: formaldehyde Bisulfite adduct: amine compound = 1: 0.1 ~ 5: 0.5 ~ 5 (mole ratio). 如申請專利範圍第5項之維持管理無電解鍍金浴之電鍍能力的方法,其中以該甲醛亞硫酸氫鹽加成物基準,將建浴時濃度之0.1~5莫耳%,以每1小時分1~20次補給該第2補給成份。 For example, in the method of claim 5, the method for maintaining the electroplating ability of the electroless gold plating bath, wherein the concentration of the bath is 0.1 to 5 mol% per hour, based on the formaldehyde bisulfite adduct. The second supply component is replenished in 1 to 20 times. 如申請專利範圍第3項或第6項之維持管理無電解鍍金浴之電鍍能力的方法,其中該甲醛亞硫酸氫鹽加成物之1次補給量係每1L電鍍浴為2毫莫耳以下。 The method for maintaining the electroplating ability of an electroless gold plating bath according to the third or sixth aspect of the patent application, wherein the first supply of the formaldehyde bisulfite adduct is less than 2 millimoles per 1 L of the electroplating bath. . 如申請專利範圍第1項至第3項中任一項之維持管理無電解鍍金浴之電鍍能力的方法,其中取代該甲醛亞硫酸氫鹽加成物,以同莫耳量之甲醛補給部份或全部之該補給甲醛亞硫酸氫鹽加成物。 A method for maintaining the electroplating ability of an electroless gold plating bath according to any one of the first to third aspects of the patent application, wherein the formaldehyde bisulfite adduct is replaced by a formaldehyde replenishing portion with a molar amount Or all of the supplemental formaldehyde bisulfite adduct. 如申請專利範圍第1項之維持管理無電解鍍金浴之電鍍能力的方法,其中表示該胺化合物之一般式(1)及(2)中,R1 及R3 表示-OH、-CH2 OH、-C2 H4 OH、-CH2 N(CH3 )2 、-CH2 NH(CH2 OH)、-CH2 NH(C2 H4 OH)、-C2 H4 NH(CH2 OH)、-C2 H4 NH(C2 H4 OH)、-CH2 N(CH2 OH)2 、 -CH2 N(C2 H4 OH)2 、-C2 H4 N(CH2 OH)2 或-C2 H4 N(C2 H4 OH)2 ,R2 及R4 表示-OH、-CH3 、-CH2 OH、-C2 H4 OH、-CH2 N(CH3 )2 、-CH2 NH(CH2 OH)、-CH2 NH(C2 H4 OH)、-C2 H4 NH(CH2 OH)、-C2 H4 NH(C2 H4 OH)、-CH2 N(CH2 OH)2 、-CH2 N(C2 H4 OH)2 、-C2 H4 N(CH2 OH)2 或-C2 H4 N(C2 H4 OH)2A method for maintaining the electroplating ability of an electroless gold plating bath according to the first aspect of the patent application, wherein in the general formulas (1) and (2) of the amine compound, R 1 and R 3 represent -OH, -CH 2 OH , -C 2 H 4 OH, -CH 2 N(CH 3 ) 2 , -CH 2 NH(CH 2 OH), -CH 2 NH(C 2 H 4 OH), -C 2 H 4 NH(CH 2 OH ), -C 2 H 4 NH(C 2 H 4 OH), -CH 2 N(CH 2 OH) 2 , -CH 2 N(C 2 H 4 OH) 2 , -C 2 H 4 N(CH 2 OH 2 or -C 2 H 4 N(C 2 H 4 OH) 2 , R 2 and R 4 represent -OH, -CH 3 , -CH 2 OH, -C 2 H 4 OH, -CH 2 N (CH 3 2 , -CH 2 NH(CH 2 OH), -CH 2 NH(C 2 H 4 OH), -C 2 H 4 NH(CH 2 OH), -C 2 H 4 NH(C 2 H 4 OH) , -CH 2 N(CH 2 OH) 2 , -CH 2 N(C 2 H 4 OH) 2 , -C 2 H 4 N(CH 2 OH) 2 or -C 2 H 4 N (C 2 H 4 OH ) 2 .
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