TWI422705B - 氣體供應裝置 - Google Patents
氣體供應裝置 Download PDFInfo
- Publication number
- TWI422705B TWI422705B TW096109537A TW96109537A TWI422705B TW I422705 B TWI422705 B TW I422705B TW 096109537 A TW096109537 A TW 096109537A TW 96109537 A TW96109537 A TW 96109537A TW I422705 B TWI422705 B TW I422705B
- Authority
- TW
- Taiwan
- Prior art keywords
- gas
- flow selector
- inlet
- manifold
- flow
- Prior art date
Links
- 238000005086 pumping Methods 0.000 claims abstract description 31
- 238000011010 flushing procedure Methods 0.000 claims description 40
- 238000010926 purge Methods 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 125
- 238000000034 method Methods 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000009530 blood pressure measurement Methods 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000036461 convulsion Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000010790 dilution Methods 0.000 description 2
- 239000012895 dilution Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000002920 convulsive effect Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
- F16K11/02—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit
- F16K11/08—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only taps or cocks
- F16K11/085—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only taps or cocks with cylindrical plug
- F16K11/0856—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only taps or cocks with cylindrical plug having all the connecting conduits situated in more than one plane perpendicular to the axis of the plug
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/30—Details
- F16K3/32—Means for additional adjustment of the rate of flow
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
- F16K11/02—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit
- F16K11/06—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements
- F16K11/065—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements with linearly sliding closure members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
- F16K11/02—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit
- F16K11/06—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements
- F16K11/065—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements with linearly sliding closure members
- F16K11/0655—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements with linearly sliding closure members with flat slides
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
- F16K11/02—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit
- F16K11/08—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only taps or cocks
- F16K11/085—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only taps or cocks with cylindrical plug
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Measuring Volume Flow (AREA)
- Sampling And Sample Adjustment (AREA)
- Branch Pipes, Bends, And The Like (AREA)
- Pipeline Systems (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GBGB0605554.5A GB0605554D0 (en) | 2006-03-20 | 2006-03-20 | Gas supply apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200813251A TW200813251A (en) | 2008-03-16 |
| TWI422705B true TWI422705B (zh) | 2014-01-11 |
Family
ID=36293092
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW096109537A TWI422705B (zh) | 2006-03-20 | 2007-03-20 | 氣體供應裝置 |
Country Status (7)
| Country | Link |
|---|---|
| EP (1) | EP1996842B1 (cg-RX-API-DMAC10.html) |
| JP (1) | JP5266201B2 (cg-RX-API-DMAC10.html) |
| KR (1) | KR101321323B1 (cg-RX-API-DMAC10.html) |
| AT (1) | ATE553323T1 (cg-RX-API-DMAC10.html) |
| GB (1) | GB0605554D0 (cg-RX-API-DMAC10.html) |
| TW (1) | TWI422705B (cg-RX-API-DMAC10.html) |
| WO (1) | WO2007107781A1 (cg-RX-API-DMAC10.html) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4900051B2 (ja) | 2007-05-31 | 2012-03-21 | ソニー株式会社 | 情報処理装置、および情報処理方法、並びにコンピュータ・プログラム |
| GB2500610A (en) | 2012-03-26 | 2013-10-02 | Edwards Ltd | Apparatus to supply purge gas to a multistage vacuum pump |
| GB2535703B (en) * | 2015-02-23 | 2019-09-18 | Edwards Ltd | Gas supply apparatus |
| CN106870800B (zh) * | 2017-01-06 | 2022-12-30 | 重庆金山医疗技术研究院有限公司 | 流体切换电磁阀及装有该电磁阀的内窥镜 |
| CN209221267U (zh) * | 2017-11-23 | 2019-08-09 | 北京万生人和科技有限公司 | 一种智能呼吸过滤装置 |
| EP3719399A1 (en) * | 2019-04-02 | 2020-10-07 | BSH Hausgeräte GmbH | Gas valve and gas stove |
| FR3121962B1 (fr) * | 2021-04-16 | 2023-05-12 | Pfeiffer Vacuum | Pompe à vide |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003229417A (ja) * | 2001-11-28 | 2003-08-15 | Tokyo Electron Ltd | 真空処理装置及びその制御方法 |
| TW573044B (en) * | 2000-05-17 | 2004-01-21 | Anelva Corp | CVD apparatus |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2278246A (en) * | 1937-12-21 | 1942-03-31 | Cordova Jose Juan | Valve and the like |
| US2855955A (en) * | 1955-01-21 | 1958-10-14 | Harper Wyman Co | Gas valves |
| GB845187A (en) * | 1955-11-23 | 1960-08-17 | Tecalemit Ltd | Improvements in or relating to fluid control selector valves |
| US3678959A (en) * | 1970-07-30 | 1972-07-25 | Richard B Liposky | Hand operable selector valve |
| JPH0678927B2 (ja) * | 1985-12-16 | 1994-10-05 | 帝人株式会社 | 流量計 |
| JPS62194077A (ja) * | 1986-02-17 | 1987-08-26 | Toyoda Autom Loom Works Ltd | 可変オリフイス装置 |
| JPH09280388A (ja) * | 1996-04-19 | 1997-10-28 | Toshiba Corp | 可変式流量制限オリフィスおよびこのオリフィスを用いた配管構造体 |
| DE10152186C1 (de) * | 2001-10-23 | 2003-06-12 | Ballard Power Systems | Brennstoffzellanlage mit einer Vorrichtung zur dosierten Zufuhr von sauerstoffhaltigem Medium an Dosierstellen eines Gaserzeugungssystems |
-
2006
- 2006-03-20 GB GBGB0605554.5A patent/GB0605554D0/en not_active Ceased
-
2007
- 2007-02-15 EP EP07705380A patent/EP1996842B1/en active Active
- 2007-02-15 KR KR1020087022812A patent/KR101321323B1/ko active Active
- 2007-02-15 WO PCT/GB2007/050067 patent/WO2007107781A1/en not_active Ceased
- 2007-02-15 AT AT07705380T patent/ATE553323T1/de active
- 2007-02-15 JP JP2009500933A patent/JP5266201B2/ja active Active
- 2007-03-20 TW TW096109537A patent/TWI422705B/zh active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW573044B (en) * | 2000-05-17 | 2004-01-21 | Anelva Corp | CVD apparatus |
| JP2003229417A (ja) * | 2001-11-28 | 2003-08-15 | Tokyo Electron Ltd | 真空処理装置及びその制御方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP1996842B1 (en) | 2012-04-11 |
| GB0605554D0 (en) | 2006-04-26 |
| ATE553323T1 (de) | 2012-04-15 |
| KR20080104154A (ko) | 2008-12-01 |
| TW200813251A (en) | 2008-03-16 |
| KR101321323B1 (ko) | 2013-10-23 |
| EP1996842A1 (en) | 2008-12-03 |
| JP5266201B2 (ja) | 2013-08-21 |
| WO2007107781A1 (en) | 2007-09-27 |
| JP2009530563A (ja) | 2009-08-27 |
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