TWI417906B - Functionally graded rare earth permanent magnet - Google Patents

Functionally graded rare earth permanent magnet Download PDF

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TWI417906B
TWI417906B TW095102872A TW95102872A TWI417906B TW I417906 B TWI417906 B TW I417906B TW 095102872 A TW095102872 A TW 095102872A TW 95102872 A TW95102872 A TW 95102872A TW I417906 B TWI417906 B TW I417906B
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magnet
rare earth
atom
grain boundary
permanent magnet
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TW200634859A (en
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Hajime Nakamura
Koichi Hirota
Masanobu Shimao
Takehisa Minowa
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Shinetsu Chemical Co
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/032Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials
    • H01F1/04Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials metals or alloys
    • H01F1/047Alloys characterised by their composition
    • H01F1/053Alloys characterised by their composition containing rare earth metals
    • H01F1/055Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5
    • H01F1/057Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5 and IIIa elements, e.g. Nd2Fe14B
    • H01F1/0571Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5 and IIIa elements, e.g. Nd2Fe14B in the form of particles, e.g. rapid quenched powders or ribbon flakes
    • H01F1/0575Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5 and IIIa elements, e.g. Nd2Fe14B in the form of particles, e.g. rapid quenched powders or ribbon flakes pressed, sintered or bonded together
    • H01F1/0577Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5 and IIIa elements, e.g. Nd2Fe14B in the form of particles, e.g. rapid quenched powders or ribbon flakes pressed, sintered or bonded together sintered
    • AHUMAN NECESSITIES
    • A44HABERDASHERY; JEWELLERY
    • A44BBUTTONS, PINS, BUCKLES, SLIDE FASTENERS, OR THE LIKE
    • A44B11/00Buckles; Similar fasteners for interconnecting straps or the like, e.g. for safety belts
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    • A44B11/26Buckles; Similar fasteners for interconnecting straps or the like, e.g. for safety belts with two or more separable parts with push-button fastenings
    • A44B11/266Buckles; Similar fasteners for interconnecting straps or the like, e.g. for safety belts with two or more separable parts with push-button fastenings with at least one push-button acting parallel to the main plane of the buckle and perpendicularly to the direction of the fastening action
    • AHUMAN NECESSITIES
    • A44HABERDASHERY; JEWELLERY
    • A44BBUTTONS, PINS, BUCKLES, SLIDE FASTENERS, OR THE LIKE
    • A44B11/00Buckles; Similar fasteners for interconnecting straps or the like, e.g. for safety belts
    • A44B11/02Buckles; Similar fasteners for interconnecting straps or the like, e.g. for safety belts frictionally engaging surface of straps
    • A44B11/06Buckles; Similar fasteners for interconnecting straps or the like, e.g. for safety belts frictionally engaging surface of straps with clamping devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/0253Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets
    • H01F41/0293Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets diffusion of rare earth elements, e.g. Tb, Dy or Ho, into permanent magnets
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/032Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials
    • H01F1/04Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials metals or alloys
    • H01F1/047Alloys characterised by their composition
    • H01F1/053Alloys characterised by their composition containing rare earth metals
    • H01F1/055Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5
    • H01F1/058Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5 and IVa elements, e.g. Gd2Fe14C
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/0253Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets
    • H01F41/0266Moulding; Pressing

Description

機能分級式稀土族永久磁鐵Functional graded rare earth permanent magnet

本發明係關於具有分級式機能之高效稀士族永久磁鐵,其表層保磁力高於內部,且具有有效之經改良熱阻抗。The present invention relates to a highly efficient rare earth permanent magnet having a graded function, which has a surface coercive force higher than the inside and has an effective improved thermal resistance.

因為優異磁特性,發現到Nd-Fe-B永久磁鐵之應用範圍增加。為了滿足現今環境問題,磁鐵之使用範圍擴充至涵蓋家用電器、工業裝置、電動機車及風力發電機。此需要在Nd-Fe-B磁鐵之效能上進一步改良。Due to the excellent magnetic properties, the application range of Nd-Fe-B permanent magnets has been found to increase. In order to meet today's environmental problems, the use of magnets has expanded to cover household appliances, industrial installations, electric vehicles and wind turbines. This requires further improvement in the performance of the Nd-Fe-B magnet.

當溫度上升,Nd-Fe-B磁鐵之保磁力降低。因此,磁鐵之使用溫度(service temperature)受到保磁力大小及磁電路磁導之影響。磁鐵必需具有高保磁力以在高溫下使用。已建議很多方法用於增加保磁力,包括晶粒細化、使用Nd量增加之合金組成物、及加入有效之元素。現今最常用之方法為使用Dy或Tb部分地取代Nd之合金組成物。藉由用Dy或Tb取代Nd2 Fe1 4 B化合物中之一些Nd,則該化合物之各向異性磁場及保磁力均增加。另一方面,以Dy或Tb之取代使化合物飽和磁極化降低。因此,只要用此方法降低保磁力,則殘磁之降低係無法避免的。When the temperature rises, the coercive force of the Nd-Fe-B magnet decreases. Therefore, the service temperature of the magnet is affected by the magnitude of the coercive force and the magnetic conductance of the magnetic circuit. The magnet must have a high coercive force for use at high temperatures. A number of methods have been suggested for increasing the coercive force, including grain refinement, the use of alloy compositions with increased amounts of Nd, and the addition of effective elements. The most common method today is to partially replace the alloy composition of Nd with Dy or Tb. By replacing some of the Nd in the Nd 2 Fe 1 4 B compound with Dy or Tb, the anisotropic magnetic field and coercive force of the compound increase. On the other hand, substitution of Dy or Tb reduces the saturation magnetic polarization of the compound. Therefore, as long as the coercive force is reduced by this method, the reduction of residual magnetism cannot be avoided.

JP 3,471,876揭示具有改良抗腐蝕性之稀土磁鐵,其包括至少一稀士族元素R,且其由如下方式製得:藉由在氟氣體氛圍或包含氟氣體氛圍中進行氟化處理,以在磁鐵表層形成RF3 化合物或ROx Fy 化合物(其中x及y之數值滿足0<x<1.5及2x+y=3)或者組成相中具有R之其混合物,另在200至1,200℃進行熱處理。JP 3,471,876 discloses a rare earth magnet having improved corrosion resistance, comprising at least one rare earth element R, and which is obtained by fluorination treatment in a fluorine gas atmosphere or a fluorine gas-containing atmosphere to be on the surface of the magnet An RF 3 compound or a RO x F y compound (wherein the values of x and y satisfy 0 < x < 1.5 and 2 x + y = 3) or a mixture having R in the constituent phase, and heat treatment at 200 to 1,200 ° C is formed.

JP-A 2003-282312揭示R-Fe-(B,c)燒結磁鐵(其中R為稀土族元素,至少50%之R為Nd及/或Pr),其具有經改良可磁化性,且其係由如下方式製得:混合為R-Fe-(B,C)燒結磁鐵之合金粉末與稀土族氟化物粉末,使得粉末混合物包含3至20重量%稀土族氟化物(稀土族較佳為Dy及/或Tb),使粉末混合物在磁場中配向,及加以壓緊及燒結,則主相主要由Nd2 Fe1 4 B晶粒組成,晶粒邊界相在主相晶粒邊界或晶粒邊界三相點上形成,該晶粒邊界相包含稀土族氟化物,稀土族氟化物佔總燒結磁鐵之3至20重量%。明確言之,提供之R-Fe-(B,C)燒結磁鐵(其中R為稀土族元素,至少50%之R為Nd及/或Pr),其中磁鐵包括主要由Nd2 Fe1 4 B晶粒組成之主相,及晶粒邊界相包含稀土族氟化物,主相包含Dy及/或Tb,主相包含一區域,其中Dy及/或Tb之濃度低於總主相中Dy及/或Tb之平均濃度。JP-A 2003-282312 discloses R-Fe-(B,c) sintered magnets (wherein R is a rare earth element, at least 50% of which is Nd and/or Pr), which has improved magnetizability, and It is prepared by mixing an alloy powder of R-Fe-(B, C) sintered magnets with a rare earth fluoride powder such that the powder mixture contains 3 to 20% by weight of rare earth fluoride (the rare earth group is preferably Dy and / or Tb), the powder mixture is aligned in the magnetic field, and compacted and sintered, the main phase is mainly composed of Nd 2 Fe 1 4 B grains, and the grain boundary phase is at the main phase grain boundary or grain boundary 3 Formed at the phase, the grain boundary phase contains a rare earth fluoride, and the rare earth fluoride accounts for 3 to 20% by weight of the total sintered magnet. Specifically, R-Fe-(B, C) sintered magnets are provided (where R is a rare earth element, at least 50% of which is Nd and/or Pr), wherein the magnet comprises mainly Nd 2 Fe 1 4 B crystal The main phase of the grain composition, and the grain boundary phase comprises a rare earth fluoride, the main phase comprising Dy and/or Tb, the main phase comprising a region, wherein the concentration of Dy and/or Tb is lower than Dy and/or in the main main phase The average concentration of Tb.

然而這些建議在改良保磁力上係不夠的。However, these suggestions are not sufficient for improved coercive force.

JP-A 2005-11973揭示稀土族-鐵-硼系磁鐵,其由如下方式製得:將磁鐵置於真空槽中,將元素M或包含元素M之合金(M代表一或多種選自Pr、Dy、Tb及Ho之稀土族元素)沉積,在真空槽中藉由物理方法將整個或部分磁鐵表面蒸發或霧化,及進行包覆塗覆(pack cementation),則元素M擴散及從磁鐵表面滲透至磁鐵內部至至少一深度,該深度相當於暴露在磁鐵最外層表面上晶粒之半徑,以形成具有富含元素M之晶粒邊界層。在晶粒邊界層上元素M之濃度在最近於磁體表面之位置上較高。因此,磁鐵具有晶粒邊界層,該晶粒邊界層藉由從磁鐵表面擴散之元素M而富含元素M。保磁力Hcj及在總磁鐵中元素M含量具有下列關係: 其中Hcj為保磁力,其單位為MA/m,M為元素M在總磁鐵中之含量(重量%),及0.05M10。然而,此方法之生產性非常不高且非常不實用。JP-A 2005-11973 discloses a rare earth-iron-boron type magnet which is obtained by placing a magnet in a vacuum chamber, an element M or an alloy containing an element M (M represents one or more selected from Pr, Deposition of Dy, Tb and Ho rare earth elements), by physically evaporating or atomizing all or part of the magnet surface in a vacuum chamber, and performing pack cementation, element M diffuses and from the surface of the magnet Permeating into the interior of the magnet to at least one depth corresponding to the radius of the grains exposed on the outermost surface of the magnet to form a grain boundary layer rich in element M. The concentration of the element M on the grain boundary layer is higher at the position closest to the surface of the magnet. Therefore, the magnet has a grain boundary layer rich in the element M by the element M diffused from the surface of the magnet. The coercive force Hcj and the element M content in the total magnet have the following relationship: Where Hcj is the coercive force, the unit is MA/m, M is the content of the element M in the total magnet (% by weight), and 0.05 M 10. However, the productivity of this method is very low and very impractical.

本發明目的係在於提供具有分級式機能之稀土族永久磁鐵,其表層保磁力高於內部,及其熱阻抗係有效地被改良。SUMMARY OF THE INVENTION An object of the present invention is to provide a rare earth permanent magnet having a graded function, which has a surface coercive force higher than the inside, and whose thermal resistance is effectively improved.

一般而言,內建於磁電路之磁鐵在磁鐵整體並沒有呈現相同之磁導,亦即,磁鐵內部具有反磁場之分佈。例如,若板狀磁鐵在寬表面上具有一磁極,則其表面中心接收最大之反磁場。另外,相較於內部,磁鐵表層接收大的反磁場。所以,當磁鐵暴露於高溫下,則自其表層發生去磁性。關於R-Fe-B燒結磁鐵(其中R係一或多種選自包含Sc及Y之稀土族元素),典型地Nd-Fe-B燒結磁鐵,本發明人發現到當Dy及/或Tb及氟從磁鐵表面吸收及滲透至磁鐵內,Dy及/或Tb及氟係僅富含於鄰近於晶粒之界面處,以使磁鐵具有表層保磁力高於內部之分級式機能,且特別是磁鐵之保磁力從中心處往表層增加。因此,熱阻抗有效地被改良。In general, the magnet built into the magnetic circuit does not exhibit the same magnetic permeability in the entire magnet, that is, the inside of the magnet has a distribution of the diamagnetic field. For example, if a plate magnet has a magnetic pole on a wide surface, the center of its surface receives the largest diamagnetic field. In addition, the magnet surface receives a large diamagnetic field compared to the inside. Therefore, when the magnet is exposed to high temperatures, demagnetization occurs from its surface layer. Regarding R-Fe-B sintered magnets (wherein R is one or more selected from the group consisting of rare earth elements containing Sc and Y), typically Nd-Fe-B sintered magnets, the inventors have discovered that when Dy and/or Tb and fluorine Absorbed and infiltrated into the magnet from the surface of the magnet, Dy and / or Tb and fluorine are only enriched at the interface adjacent to the grain, so that the magnet has a stepped function of surface coercive force higher than the internal, and especially the magnet The coercive force increases from the center to the surface. Therefore, the thermal impedance is effectively improved.

所以,本發明提供一種為燒結磁體形式之機能分級式稀土族永久磁鐵,其具有合金組成物R1 a R2 b Tc Ad Fe Of Mg ,其中R1 為選自包含Sc及Y但不包含Tb及Dy之稀土族元素中之至少一元素,R2 為Tb及Dy中之一者或二者,T為鐵及鈷中之一者或二者,A為硼及碳中之一者或二者,F為氟,O為氧,及M為選自Al、Cu、Zn、In、Si、P、S、Ti、V、Cr、Mn、Ni、Ga、Ge、Zr、Nb、Mo、Pd、Ag、Cd、Sn、Sb、Hf、Ta及W中之至少一元素,a至g表示對應元素在合金中之原子百分比且範圍如下:10a+b15,3d15,0.01e4,0.04f4,0.01g11,剩餘為c,磁體具有中心及表面。晶粒邊界環繞燒結磁體內(R1 ,R2 )2 T1 4 A四方晶系之主相晶粒。包含於晶粒邊界之R2 /(R1 +R2 )濃度平均高於包含於主相晶粒之R2 /(R1 +R2 )的濃度。R2 之分佈使其濃度從磁體中心至表面平均地增加。(R1 ,R2 )氧氟化物存在從磁體表面延伸至深度至少20μm之晶粒邊界區域中的晶粒邊界。磁體表層之保磁力高於磁體內部。Accordingly, the present invention provides a functional graded rare earth permanent magnet in the form of a sintered magnet having an alloy composition R 1 a R 2 b T c A d F e O f M g , wherein R 1 is selected from the group consisting of containing Sc and Y, but not including at least one of the rare earth elements of Tb and Dy, R 2 is one or both of Tb and Dy, T is one or both of iron and cobalt, and A is boron and carbon. In one or both, F is fluorine, O is oxygen, and M is selected from the group consisting of Al, Cu, Zn, In, Si, P, S, Ti, V, Cr, Mn, Ni, Ga, Ge, Zr, At least one of Nb, Mo, Pd, Ag, Cd, Sn, Sb, Hf, Ta, and W, a to g represents the atomic percentage of the corresponding element in the alloy and the range is as follows: 10 a+b 15,3 d 15,0.01 e 4, 0.04 f 4,0.01 g 11, the remainder is c, the magnet has a center and a surface. The grain boundaries surround the main phase grains of the (R 1 , R 2 ) 2 T 1 4 A tetragonal system in the sintered magnet. The concentration of R contained in the grain boundaries 2 / (R 1 + R 2 ) is higher than the average concentration of R contained in the main phase crystal grains of 2 / (R 1 + R 2 ) a. The distribution of R 2 causes its concentration to increase evenly from the center of the magnet to the surface. The (R 1 , R 2 ) oxyfluoride has grain boundaries extending from the surface of the magnet to a grain boundary region having a depth of at least 20 μm. The coercive force of the surface of the magnet is higher than the inside of the magnet.

在較佳具體例中,在晶粒邊界(R1 ,R2 )氧氟化物包含Nd及/或Pr,包含於晶粒邊界之氧氟化物中Nd及/或Pr對(R1 +R2 )的原子比高於包含於晶粒邊界處但R3 氧氟化物及氧化物除外下Nd及/或Pr對(R1 +R2 )的原子比,其中R3 為選自包含Sc及Y之稀土族元素中至少一元素。In a preferred embodiment, the oxyfluoride at the grain boundary (R 1 , R 2 ) comprises Nd and/or Pr, and the Nd and/or Pr pair (R 1 + R 2 ) contained in the oxyfluoride at the grain boundary. The atomic ratio is higher than the atomic ratio of Nd and/or Pr pairs (R 1 + R 2 ) contained at the grain boundaries but excluding R 3 oxyfluorides and oxides, wherein R 3 is selected from the group consisting of rare earths containing Sc and Y At least one element of a family element.

在較佳具體例中,R1 包括至少10原子%之Nd及/或Pr;T包括至少60原子%鐵;及A包括至少80原子%硼。In a preferred embodiment, R 1 comprises at least 10 atomic percent of Nd and/or Pr; T comprises at least 60 atomic percent iron; and A comprises at least 80 atomic percent boron.

本發明永久磁鐵具有的磁結構中表層保磁力高於內部,且具有有效地改良之熱阻抗。The permanent magnet of the present invention has a magnetic structure in which the surface layer has a higher coercive force than the inside and has an effectively improved thermal impedance.

本發明稀土族永久磁鐵為具有式(1)合金組成物之燒結磁體的形式。The rare earth permanent magnet of the present invention is in the form of a sintered magnet having the alloy composition of the formula (1).

R1 a R2 b Tc Ad Fe Of Mg (1)其中R1 為選自包含Sc及Y但不包含Tb及Dy之稀土族元素中之至少一元素,R2 為Tb及Dy中之一者或二者,T為鐵及鈷中之一者或二者,A為硼及碳中之一者或二者,F為氟,O為氧,及M為選自Al、Cu、Zn、In、Si、P、S、Ti、V、Cr、Mn、Ni、Ga、Ge、Zr、Nb、Mo、Pd、Ag、Cd、Sn、Sb、Hf、Ta及W中之至少一元素,a至g表示對應元素在合金中之原子百分比且範圍如下:10a+b15,3d15,0.01e4,0.04f4,0.01g11,剩餘為c。R 1 a R 2 b T c A d F e O f M g (1) wherein R 1 is at least one element selected from the group consisting of Sc and Y but not including Tb and Dy, and R 2 is Tb and One or both of Dy, T is one or both of iron and cobalt, A is one or both of boron and carbon, F is fluorine, O is oxygen, and M is selected from Al, At least any of Cu, Zn, In, Si, P, S, Ti, V, Cr, Mn, Ni, Ga, Ge, Zr, Nb, Mo, Pd, Ag, Cd, Sn, Sb, Hf, Ta, and W An element, a to g, represents the atomic percentage of the corresponding element in the alloy and ranges as follows: 10 a+b 15,3 d 15,0.01 e 4, 0.04 f 4,0.01 g 11, the remaining is c.

明確言之,R1 係選自Sc、Y、La、Ce、Pr、Nd、Sm、Eu、Gd、Ho、Er 、Yb及Lu。合宜地,R1 包含Nd及/或Pr為主要組份,R1 中之Nd及/或Pr之量較佳至少10原子%,更佳R至少50原子%。R2 為Tb及Dy中之一者或二者。Specifically, R 1 is selected from the group consisting of Sc, Y, La, Ce, Pr, Nd, Sm, Eu, Gd, Ho, Er , Yb, and Lu. Conveniently, R 1 comprises Nd and/or Pr as the main component, and the amount of Nd and/or Pr in R 1 is preferably at least 10 atom%, more preferably at least 50 atom%. R 2 is one or both of Tb and Dy.

R1 及R2 之總量(a+b)為10至15原子%,如上所述,及較佳為12至15原子%。R2 的量(b)為0.01至8原子%,較佳為0.05至6原子%,及更佳為0.1至5原子%。The total amount (a+b) of R 1 and R 2 is 10 to 15 at%, as described above, and preferably 12 to 15 at%. The amount (b) of R 2 is from 0.01 to 8 atom%, preferably from 0.05 to 6 atom%, and more preferably from 0.1 to 5 atom%.

T的量(c),其中T為Fe及/或Co,較佳至少60原子%,及更佳至少70原子%。雖然可省略鈷(即0原子%),但是為了改良殘磁之溫度穩定性或其他目的,可包含之鈷的量至少1原子%,較佳為至少3原子%,更佳至少5原子%。The amount of T (c), wherein T is Fe and/or Co, preferably at least 60 atom%, and more preferably at least 70 atom%. Although cobalt (i.e., 0 atom%) may be omitted, the amount of cobalt may be included in an amount of at least 1 atom%, preferably at least 3 atom%, more preferably at least 5 atom%, in order to improve temperature stability of residual magnetism or other purposes.

A為硼及/或碳,較佳地包含至少80原子%(更佳至少85原子%)之硼。A的量(d)為3至15原子%,如上所述,較佳為4至12原子%,及更佳為5至8原子%。A is boron and/or carbon, and preferably contains at least 80 atom% (more preferably at least 85 atom%) of boron. The amount (d) of A is from 3 to 15 at%, as described above, preferably from 4 to 12 at%, and more preferably from 5 to 8 at%.

氟的量(e)為0.01至4原子%,如上所述,較佳為0.02至3.5原子%,及更佳為0.05至3.5原子%。氟量太低時,保磁力不會增強。氟量太高會改變晶粒邊界相,並造成保磁力降低。The amount (e) of fluorine is from 0.01 to 4 atom%, as described above, preferably from 0.02 to 3.5 atom%, and more preferably from 0.05 to 3.5 atom%. When the amount of fluorine is too low, the coercive force does not increase. Too high a fluorine content will change the grain boundary phase and cause a decrease in coercive force.

氧量(f)為0.04至4原子%,如上所述,較佳為0.04至3.5原子%,及更佳為0.04至3原子%。The oxygen amount (f) is from 0.04 to 4 atom%, as described above, preferably from 0.04 to 3.5 atom%, and more preferably from 0.04 to 3 atom%.

金屬元素M之量(g)為0.01至11原子%,如上所述,較佳為0.01至8原子%,及更佳為0.02至5原子%。其他金屬元素M之存在量為至少0.05原子%,及特別是至少0.1原子%。The amount (g) of the metal element M is from 0.01 to 11 atom%, as described above, preferably from 0.01 to 8 atom%, and more preferably from 0.02 to 5 atom%. The other metal element M is present in an amount of at least 0.05 atomic %, and especially at least 0.1 atomic %.

燒結磁體具有中心及表面。在本發明中,組成元素F及R2 在燒結磁體中之分佈係使得其濃度從磁鐵中心至表面平均地增加。明確言之,F及R2 的濃度在磁體表面最高及朝向磁體中心緩慢地降低。在磁體中心可不存在氟,因為本發明僅需要在從磁體表面至深度至少20μm之晶粒邊界區域中之晶粒邊界存在R1 及R2 之氧氟化物,典型地為(R1 1 x R2 x )OF(其中x為0至1之數目)。晶粒邊界係環繞燒結磁體內(R1 ,R2 )2 T1 4 A四方晶系之主相晶粒,而包含於晶粒邊界之R2 /(R1 +R2 )濃度平均地高於包含於主相晶粒之R2 /(R1 +R2 )的濃度。The sintered magnet has a center and a surface. In the present invention, the distribution of the constituent elements F and R 2 in the sintered magnet is such that the concentration thereof increases evenly from the center to the surface of the magnet. Specifically, the concentrations of F and R 2 are highest at the surface of the magnet and slowly toward the center of the magnet. There may be no fluorine present in the center of the magnet, as the present invention only requires the presence of fluorofluorides of R 1 and R 2 at the grain boundaries in the grain boundary region from the surface of the magnet to a depth of at least 20 μm, typically (R 1 1 - x R 2 x )OF (where x is the number from 0 to 1). The grain boundary is surrounded by the main phase grains of the (R 1 , R 2 ) 2 T 1 4 A tetragonal system in the sintered magnet, and the R 2 /(R 1 +R 2 ) concentration contained in the grain boundary is on average higher than The concentration of R 2 /(R 1 +R 2 ) contained in the main phase grains.

在較佳具體例中,存在於晶粒邊界之(R1 ,R2 )之氧氟化物係包含Nd及/或Pr,及包含於晶粒邊界之氧氟化物中Nd及/或Pr對(R1 +R2 )之原子比係高於包含於晶粒邊界但R3 氧氟化物及氧化物除外中Nd及/或Pr對(R1 +R2 )之原子比,其中R3 為選自包含Sc及Y之稀土族元素中之至少一元素。In a preferred embodiment, the oxyfluoride of (R 1 , R 2 ) present at the grain boundary comprises Nd and/or Pr, and Nd and/or Pr pairs in the oxyfluoride contained in the grain boundaries ( The atomic ratio of R 1 + R 2 ) is higher than the atomic ratio of Nd and/or Pr pair (R 1 + R 2 ) contained in the grain boundary but R 3 oxyfluoride and oxide, wherein R 3 is selected from the group consisting of At least one of the rare earth elements of Sc and Y.

本發明稀土族永久磁鐵之製造如下:藉由使Tb及/或Dy及氟從R-Fe-B燒結磁體之表面吸收及滲入。之後R-Fe-B燒結磁體可用習知方法製造,包含將母合金(mother alloy)壓碎、研磨、壓緊及燒結。The rare earth permanent magnet of the present invention is produced by absorbing and infiltrating Tb and/or Dy and fluorine from the surface of the R-Fe-B sintered magnet. The R-Fe-B sintered magnet can then be fabricated by conventional methods, including crushing, grinding, compacting, and sintering the mother alloy.

此處所用母合金包含R、T、A及M。R係選自包含Sc及Y之稀土族元素之至少一元素。R典型地選自Sc、Y、La、Ce、Pr、Nd、Sm、Eu、Gd、Tb、Dy、Ho、Er、Yb及Lu。合宜地,R包含Nd、Pr及Dy為主要組份,這些包含Sc及Y之稀土族元素較佳之存在量為總合金之10至15原子%,更佳為12至15原子%。更合宜地,R包含Nd及Pr中之一者或二者的量為全部R之至少10原子%,特別是至少50原子%。T為Fe及Co中之一者或二者,且所包含Fe量較佳佔總合金至少50原子%,及更佳至少65原子%。A為硼及碳中之一者或二者,且所包含硼量較佳佔總合金2至15原子%,及更佳為3至8原子%。M為選自Al、Cu、Zn、In、Si、P、S、Ti、V、Cr、Mn、Ni、Ga、Ge、Zr、Nb、Mo、Pd、Ag、Cd、Sn、Sb、Hf、Ta及W中之至少一元素。所包含之M量可佔總合金之0.01至11原子%,及較佳為0.1至5原子%。剩餘部分係由伴隨之雜質,如N及O,構成。The master alloy used herein contains R, T, A and M. R is at least one element selected from the group consisting of rare earth elements of Sc and Y. R is typically selected from the group consisting of Sc, Y, La, Ce, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Yb, and Lu. Conveniently, R contains Nd, Pr and Dy as main components, and these rare earth elements containing Sc and Y are preferably present in an amount of 10 to 15 atom%, more preferably 12 to 15 atom%, of the total alloy. More conveniently, R comprises one or both of Nd and Pr in an amount of at least 10 atom%, in particular at least 50 atom%, of all R. T is one or both of Fe and Co, and the amount of Fe contained is preferably at least 50 atom%, and more preferably at least 65 atom%, of the total alloy. A is one or both of boron and carbon, and the amount of boron contained is preferably 2 to 15 atom%, and more preferably 3 to 8 atom%, based on the total alloy. M is selected from the group consisting of Al, Cu, Zn, In, Si, P, S, Ti, V, Cr, Mn, Ni, Ga, Ge, Zr, Nb, Mo, Pd, Ag, Cd, Sn, Sb, Hf, At least one element of Ta and W. The amount of M contained may be from 0.01 to 11 atom%, and preferably from 0.1 to 5 atom%, based on the total alloy. The remainder consists of concomitant impurities such as N and O.

母合金之製備如下:在真空中或惰性氣體氛圍(典型地為氬氛圍)中將金屬或合金供料熔融,將熔融物澆鑄至平坦鑄模或書狀鑄模(book mold)或進行薄片狀鑄造。可用之另一方法為二合金方法,其包括分開地製成組成相關合金之主相之約為R2 Fe1 4 B化合物組成物的合金及在燒結溫度下為液相之富含R之合金,將之壓碎,然後秤重及混合。約為主相組成物之合金,若需要,則進行均化處理,以增加R2 Fe1 4 B化合物相之量,因為α-Fe視澆鑄期間之冷卻速率及合金組成而可能會留下。均化處理之加熱溫度在700至1,200℃,至少1小時於真空中或於Ar氛圍中。作為液相輔劑之富含R合金可應用所謂的熔融驟冷或薄片狀鑄造技術,以及上述澆鑄技術。The master alloy is prepared by melting a metal or alloy supply in a vacuum or an inert gas atmosphere (typically an argon atmosphere), casting the melt to a flat mold or a book mold or performing sheet casting. Another method that can be used is a two-alloy method comprising separately forming an alloy of a composition of a compound of R 2 Fe 1 4 B constituting a main phase of a related alloy and an alloy of R rich in a liquid phase at a sintering temperature. , crush it, then weigh and mix. An alloy of approximately the composition of the main phase, if necessary, is homogenized to increase the amount of the R 2 Fe 1 4 B compound phase, since α-Fe may remain depending on the cooling rate and alloy composition during casting. The homogenization treatment is carried out at a temperature of 700 to 1,200 ° C for at least 1 hour in a vacuum or in an Ar atmosphere. The R-rich alloy as a liquid phase adjuvant can be applied by so-called melt quenching or flaky casting techniques, as well as the casting techniques described above.

母合金通常壓碎至尺寸0.05至3 mm,較佳0.05至1.5 mm。壓碎步驟使用Brown研磨機或氫化粉碎,對於這些合金為薄片澆鑄件時,較佳使用氫化粉碎。然後將粗粉末微細分割成尺寸0.2至30 μm,較佳0.5至20 μm,例如,藉由在壓力下使用氮之噴射研磨機。燒結體之氧量可藉由此時間將少量氧與加壓氮混合而加以控制。最終燒結體之氧量(其為在製備鑄塊期間所加入氧以及從微細粉末變化成燒結體所吸收之氧)較佳為0.04至4原子%,更佳為0.04至3.5原子%。The master alloy is usually crushed to a size of 0.05 to 3 mm, preferably 0.05 to 1.5 mm. The crushing step uses a Brown mill or hydrogenation pulverization, and when these alloys are sheet castings, hydrogenation pulverization is preferably used. The coarse powder is then finely divided into a size of 0.2 to 30 μm, preferably 0.5 to 20 μm, for example, by a jet mill using nitrogen under pressure. The amount of oxygen in the sintered body can be controlled by mixing a small amount of oxygen with pressurized nitrogen at this time. The amount of oxygen of the final sintered body, which is oxygen which is added during the preparation of the ingot and oxygen which is changed from the fine powder to the sintered body, is preferably from 0.04 to 4 atom%, more preferably from 0.04 to 3.5 atom%.

然後將粉末在磁場下於壓擠鑄造機器上壓緊及置於燒結爐中。在真空或惰性氣體氛圍中於溫度900至1,250℃,較佳1,000至1,100℃,下進行燒結。所得燒結磁鐵包含60至99體積%,較佳80至98體積%,之作為主相的四方晶系R2 Fe1 4 B化合物,其餘為0.5至20體積%之富含R之相,0至10體積%之富含B之相,0.1至10體積%之R氧化物,及至少伴隨之雜質之碳化物、氮化物及氫氧化物中之一者或其混合物或複合物。The powder is then compacted in a compression casting machine under a magnetic field and placed in a sintering furnace. Sintering is carried out in a vacuum or an inert gas atmosphere at a temperature of 900 to 1,250 ° C, preferably 1,000 to 1,100 ° C. The obtained sintered magnet contains 60 to 99% by volume, preferably 80 to 98% by volume, of the tetragonal R 2 Fe 1 4 B compound as a main phase, and the balance is 0.5 to 20% by volume of the R-rich phase, 0 to 10% by volume of the B-rich phase, 0.1 to 10% by volume of the R oxide, and at least one of the carbides, nitrides and hydroxides accompanying the impurities or a mixture or composite thereof.

在稀土族元素(典型為Tb及/或及Dy)及氟原子吸收及滲透至磁體以賦予表層保磁力高於中心之特徵磁性結構後,燒結塊用機器切割成所給定形狀之磁體。After the rare earth elements (typically Tb and/or Dy) and the fluorine atoms absorb and penetrate into the magnet to impart a magnetic structure with a surface coercive force higher than the center, the sintered block is machine-cut into a magnet of a given shape.

關於典型的處理,包含Tb及/或Dy及氟原子之粉末被配置在磁體表面。充填粉末之磁體在真空或惰性氣體(如Ar或He)於不高於燒結溫度(稱為Ts)下,較佳200℃至(Ts-5)℃,特別是250℃至(Ts-10)℃,進行加熱處理約0.5至100小時,較佳約1至50小時。藉由熱處理,Tb及/或Dy及氟原子從磁鐵表面滲透,燒結磁體內之稀士族氧化物與氟反應成氧氟化物。For a typical treatment, a powder comprising Tb and/or Dy and a fluorine atom is disposed on the surface of the magnet. The powder-filled magnet is in a vacuum or an inert gas (such as Ar or He) at a temperature not higher than the sintering temperature (referred to as Ts), preferably 200 ° C to (Ts - 5) ° C, especially 250 ° C to (Ts - 10) At ° C, heat treatment is carried out for about 0.5 to 100 hours, preferably about 1 to 50 hours. By heat treatment, Tb and/or Dy and fluorine atoms permeate from the surface of the magnet, and the rare earth oxide in the sintered magnet reacts with fluorine to form an oxyfluoride.

磁鐵內R(包含Sc及Y之稀士族元素)之氧氟化物典型地為ROF,雖然其通常表示可達成本發明功效之包含R、氧及氟之氧氟化物,其包含ROm Fn (其中m及n為正的數目)及ROm Fn 之經改質或經穩定形式,其中部分R被金屬元素取代。The oxyfluoride of R (containing the rare elements of Sc and Y) in the magnet is typically ROF, although it generally represents an oxyfluoride comprising R, oxygen and fluorine up to the cost of the invention, which comprises RO m F n ( Where m and n are positive numbers) and a modified or stabilized form of RO m F n wherein a portion of R is replaced by a metal element.

此時吸收於磁體中之氟量隨所用粉末之組成及粒子大小、在加熱期間環繞磁體表面之粉末比例、加熱的時間及溫度,之不同而變化,但是所吸收之氟量較佳為0.01至4原子%,更佳為0.05至3.5原子%。基於增加表層保磁力的觀點,所吸收之氟量較佳為0.1至3.5原子%,特別是0.15至3.5原子%。對於吸收,供至磁體表面之氟量較佳為0.03至30 mg/cm2 表面,更佳為0.15至15 mg/cm2 表面。The amount of fluorine absorbed in the magnet at this time varies depending on the composition of the powder to be used and the particle size, the proportion of the powder surrounding the surface of the magnet during heating, the time and temperature of heating, but the amount of fluorine absorbed is preferably 0.01 to 4 atom%, more preferably 0.05 to 3.5 atom%. The amount of fluorine absorbed is preferably from 0.1 to 3.5 atom%, particularly from 0.15 to 3.5 atom%, from the viewpoint of increasing the coercive force of the surface layer. For absorption, the amount of fluorine supplied to the surface of the magnet is preferably from 0.03 to 30 mg/cm 2 surface, more preferably from 0.15 to 15 mg/cm 2 surface.

藉由熱處理,Tb及/或Dy組份亦在鄰近晶粒邊界處濃縮以增強各向異性。吸收於磁體中之Tb及Dy組份總量較佳為0.005至2原子%,更佳為0.01至2原子%,更更佳為0.02至1.5原子%。對於吸收,供至磁體表面之Tb及Dy組份總量較佳為0.07至70 mg/cm2 表面,更佳為0.35至35 mg/cm2 表面。By heat treatment, the Tb and/or Dy components are also concentrated at adjacent grain boundaries to enhance anisotropy. The total amount of the Tb and Dy components absorbed in the magnet is preferably from 0.005 to 2 atom%, more preferably from 0.01 to 2 atom%, still more preferably from 0.02 to 1.5 atom%. For absorption, the total amount of the Tb and Dy components supplied to the surface of the magnet is preferably from 0.07 to 70 mg/cm 2 surface, more preferably from 0.35 to 35 mg/cm 2 surface.

因此,所製得磁體表層之保磁力高於磁體內部。雖然對表層與內部間保磁力的差距並未特別要求,但是表層與內部間磁導的差距約0.5至30%的事實建議磁體表層保磁力比內部(距磁體表層至少2 mm深度處)高出5至150%,較佳10至150%,更佳20至150%。Therefore, the coercive force of the surface layer of the produced magnet is higher than that of the inside of the magnet. Although there is no special requirement for the difference in coercive force between the surface layer and the inside, the fact that the difference between the surface layer and the internal magnetic permeability is about 0.5 to 30% suggests that the surface coercive force of the magnet is higher than the internal (at least 2 mm depth from the surface of the magnet). 5 to 150%, preferably 10 to 150%, more preferably 20 to 150%.

磁體中不同地方的保磁力之測量如下:將磁體切割成小部分並測量該等小部分之磁性。The coercive force of the different places in the magnet is measured as follows: the magnet is cut into small portions and the magnetic properties of the small portions are measured.

本發明永久磁鐵材料具有表層保磁力高於內部之分級式機能,且可用作具有改良熱阻抗(特別在包括電動機及讀取致動器之應用)之永久磁鐵。The permanent magnet material of the present invention has a graded function in which the surface layer coercive force is higher than the inside, and can be used as a permanent magnet having improved thermal resistance (especially in applications including an electric motor and a reading actuator).

實例Instance

述於下文本發明實例係用作說明而非用於限制。The examples of the invention are described below for illustration and not for limitation.

實例1及比較例1Example 1 and Comparative Example 1

藉由如下方式製造一薄板形式之合金:使用純度至少99重量%之Nd、Cu、Al及Fe金屬及鐵硼(ferroboron),各秤取給定量,在Ar氛圍中將之高頻地熔融,以及將熔融物澆鑄成銅之單一冷卻輥(薄片狀鑄造技術)。該合金由13.5原子% Nd、0.5原子% Al、0.4原子% Cu、6.0原子% B及剩餘為Fe所組成。An alloy in the form of a thin plate is produced by using Nd, Cu, Al and Fe metals and ferroboron having a purity of at least 99% by weight, each weighing a certain amount, and melting it at a high frequency in an Ar atmosphere. And a single chill roll (sheet casting technique) that casts the melt into copper. The alloy is composed of 13.5 atom% Nd, 0.5 atom% Al, 0.4 atom% Cu, 6.0 atom% B, and the balance Fe.

藉由氫化技術將合金研磨至尺寸為30網眼。使用氮氣在壓力下用噴射研磨機將粗粉末微細分割成具有以質量為底之中位數直徑3.7 μm。在空氣遮蔽下,微細粉末在15 kOe磁場於氮氛圍中配向,及在壓力約1 ton/cm2 下壓緊。在空氣遮蔽下,該緊密物然後置於使用Ar氛圍之燒結爐中,在1,050℃下燒結2小時,製得一磁塊。於磁塊之所有表面上用機器切割成直徑20 mm及厚度(配向方向)14 mm之圓盤。此磁體之平均磁導值為2。磁體隨後用鹼性溶液、去離子水、乙酸水溶液及去離子水清洗,及加以乾燥。The alloy was ground to a size of 30 mesh by hydrogenation techniques. The coarse powder was finely divided by a jet mill using a nitrogen gas under pressure to have a mass-based median diameter of 3.7 μm. Under air shielding, the fine powder was aligned in a nitrogen atmosphere at a 15 kOe magnetic field and pressed at a pressure of about 1 ton/cm 2 . The compact was then placed in a sintering furnace using an Ar atmosphere and sintered at 1,050 ° C for 2 hours to obtain a magnetic block. A disk having a diameter of 20 mm and a thickness (orientation direction) of 14 mm was machine-cut on all surfaces of the magnet block. This magnet has an average permeability of 2. The magnet is then washed with an alkaline solution, deionized water, aqueous acetic acid and deionized water, and dried.

接著,具有平均粒徑5 μm之氟化鏑粉末分散於乙醇中以50重量%混合。將磁體浸漬於分散液中1分鐘,同時用於48 kHz下音波處理該分散液,進行吸收及用熱空氣立即乾燥。氟化鏑供應量為0.8 mg/cm2 。之後,經充填之磁體在Ar氛圍於900℃下進行吸收處理1小時,然後在520℃進行老化處理1小時及加以驟冷,製得在本發明範圍內之磁體。此磁體稱為M1。為了比較目的,製得不經氟化鏑套裝處理但進行熱處理之一磁體,其稱為P1。Next, the cesium fluoride powder having an average particle diameter of 5 μm was dispersed in ethanol and mixed at 50% by weight. The magnet was immersed in the dispersion for 1 minute while the dispersion was sonicated at 48 kHz, absorbed and immediately dried with hot air. The supply of cesium fluoride was 0.8 mg/cm 2 . Thereafter, the filled magnet was subjected to an absorption treatment at 900 ° C for 1 hour in an Ar atmosphere, and then subjected to an aging treatment at 520 ° C for 1 hour and quenched to obtain a magnet within the scope of the present invention. This magnet is called M1. For comparison purposes, a magnet that was not treated with a lanthanum fluoride package but was heat treated was referred to as P1.

測量磁體M1及P1之磁性(殘磁Br,保磁力Hcj),結果示於表1。磁鐵之組成示於表2。本發明磁鐵M1顯示之磁性實質上可比得上與不經氟化鏑套裝處理但進行熱處理之磁體P1的磁性。這些磁體在50至200℃範圍之不同溫度下處理1小時,之後測量總磁通量。比室溫總磁通量降低5%之總磁通量下之溫度為最大使用溫度(service temperature)。結果亦示於表1。雖然磁體M1及P1具有實質上相同保磁力,磁體M1之最大作用溫度比磁體P1高20℃。The magnetic properties (residual magnet Br, coercive force Hcj) of the magnets M1 and P1 were measured, and the results are shown in Table 1. The composition of the magnets is shown in Table 2. The magnet M1 of the present invention exhibits a magnetic property substantially comparable to that of the magnet P1 which is subjected to heat treatment without being subjected to a barium fluoride coating. These magnets were treated at different temperatures ranging from 50 to 200 ° C for 1 hour, after which the total magnetic flux was measured. The temperature at the total magnetic flux that is 5% lower than the total magnetic flux at room temperature is the maximum service temperature. The results are also shown in Table 1. Although the magnets M1 and P1 have substantially the same coercive force, the maximum operating temperature of the magnet M1 is 20 ° C higher than that of the magnet P1.

磁體M1及P1順著配向方向切割(14 mm厚度方向)成0.5 mm厚度,並切割成4 x 4 mm。測量小磁鐵部分4 mm x 4 mm x 0.5 mm(厚度)之保磁力,所得保磁力以相對於原始磁體表面之距離示於圖1。磁體P1保磁力維持一定,而磁體M1保磁力則在表層最高,並下降至內部最低,磁體M1內部最低之保磁力與P1係相同程度。基於這些小磁鐵部分顯示出磁體表層至內部之保磁力,可證實本發明磁體M1內具有一保磁力之分佈,其中保磁力在表層上最高。The magnets M1 and P1 are cut in the alignment direction (14 mm thickness direction) to a thickness of 0.5 mm and cut into 4 x 4 mm. The coercive force of the small magnet portion of 4 mm x 4 mm x 0.5 mm (thickness) was measured, and the resulting coercive force is shown in Fig. 1 with respect to the distance from the original magnet surface. The magnet P1 maintains a constant magnetic force, while the magnet M1 has the highest magnetic force at the surface layer and drops to the lowest inside. The lowest coercive force inside the magnet M1 is the same as that of the P1 system. Based on these small magnet portions showing the coercive force from the surface layer of the magnet to the inside, it was confirmed that the magnet M1 of the present invention has a coercive force distribution in which the coercive force is highest on the surface layer.

用電子微探分析(EPMA)分析磁體M1及P1之表層,其Dy分佈影像示於圖2a及2b。因為用於製造磁鐵之合金來源沒有Dy,明反襯點係表示在P1影像中並沒有發現到Dy。反觀,磁鐵M1進行吸收氟化鏑之處理,其亦僅在晶粒邊界處富含Dy。進行Dy滲透處理之磁鐵M1中Dy及F的濃度以相對於距離表面之深度示於圖3。從其中可看出Dy及F富含於晶粒邊界處,並向磁鐵內部降低。The surface layers of the magnets M1 and P1 were analyzed by electronic microanalysis (EPMA), and the Dy distribution images are shown in Figs. 2a and 2b. Since the source of the alloy used to make the magnet does not have Dy, the bright contrast point indicates that Dy was not found in the P1 image. In contrast, the magnet M1 performs a treatment for absorbing cesium fluoride, which is also rich in Dy only at the grain boundaries. The concentration of Dy and F in the magnet M1 subjected to the Dy infiltration treatment is shown in Fig. 3 with respect to the depth from the surface. It can be seen from this that Dy and F are rich in grain boundaries and are lowered toward the inside of the magnet.

圖4示Nd、O及F之分佈影像,以與圖2之相同方式拍攝。可以了解到一旦氟被吸收則與存在於磁鐵中之氧化釹反應形成氧氟化釹。Fig. 4 shows a distribution image of Nd, O and F, which is taken in the same manner as Fig. 2. It can be understood that once fluorine is absorbed, it reacts with cerium oxide present in the magnet to form yttrium oxyfluoride.

這些數據證實磁體具有富含Dy於晶粒邊界處、氧氟化物之分散、Dy及F之分級式濃度的特徵,以及磁體內部保磁力之分佈顯示加入少量Dy可提供良好之熱阻抗。These data confirm that the magnet is characterized by a Dy-rich grain boundary, oxyfluoride dispersion, Dy and F graded concentrations, and the internal coercive force distribution of the magnet shows that the addition of a small amount of Dy provides good thermal impedance.

實例2及比較例2Example 2 and Comparative Example 2

藉由如下方式製造一薄板形式之合金:使用純度至少99重量%之Nd、Dy、Cu、Al及Fe金屬及鐵硼(ferroboron),各秤取給定量,在Ar氛圍中將之高頻地熔融,以及將熔融物澆鑄成銅之單一冷卻輥(薄片狀鑄造技術)。該合金由12.0原子% Nd、1.5原子% Dy、0.5原子% Al、0.4原子% Cu、6.0原子% B及剩餘為Fe所組成。An alloy in the form of a thin plate is produced by using Nd, Dy, Cu, Al and Fe metals and ferroboron having a purity of at least 99% by weight, each weighing a certain amount, and high frequency in an Ar atmosphere Melting, and a single chill roll (sheet casting technique) that casts the melt into copper. The alloy is composed of 12.0 at% Nd, 1.5 at% Dy, 0.5 at% Al, 0.4 at% Cu, 6.0 at% B, and the balance Fe.

藉由氫化技術將合金研磨至尺寸為30網眼。使用氮氣在壓力下用噴射研磨機將粗粉末微細分割成具有以質量為底之中位數直徑4.2 μm。在空氣遮蔽下,微細粉末在15 kOe磁場於氮氛圍中配向,及在壓力約1 ton/cm2 下壓緊。在空氣遮蔽下,該緊密物然後置於使用Ar氛圍之燒結爐中,在1,060℃下燒結2小時,製得一磁塊。於磁塊之所有表面上用機器切割成直徑10 mm及厚度(配向方向)7 mm之圓盤。此磁體之平均磁導值為2。磁體隨後用鹼性溶液、去離子水、硝酸水溶液及去離子水清洗,及加以乾燥。The alloy was ground to a size of 30 mesh by hydrogenation techniques. The coarse powder was finely divided by a jet mill using a nitrogen gas under pressure to have a mass-based median diameter of 4.2 μm. Under air shielding, the fine powder was aligned in a nitrogen atmosphere at a 15 kOe magnetic field and pressed at a pressure of about 1 ton/cm 2 . The compact was then placed in a sintering furnace using an Ar atmosphere and sintered at 1,060 ° C for 2 hours to obtain a magnetic block. A disk having a diameter of 10 mm and a thickness (orientation direction) of 7 mm was machine-cut on all surfaces of the magnet block. This magnet has an average permeability of 2. The magnet is then washed with an alkaline solution, deionized water, aqueous nitric acid and deionized water, and dried.

接著,具有平均粒徑10 μm之氟化鋱粉末分散於去離子水中以50重量%混合。將磁體浸漬於分散液中1分鐘,同時用於48 kHz下音波處理該分散液,進行吸收及用熱空氣立即乾燥。氟化鋱供應量為1.2 mg/cm2 。之後,經充填之磁體在Ar氛圍於800℃下進行吸收處理5小時,然後在510℃進行老化處理1小時及加以驟冷,製得在本發明範圍內之磁體。此磁體稱為M2。為了比較目的,製得不經氟化鋱套裝處理但進行熱處理之一磁體,其稱為P2。Next, the cesium fluoride powder having an average particle diameter of 10 μm was dispersed in deionized water and mixed at 50% by weight. The magnet was immersed in the dispersion for 1 minute while the dispersion was sonicated at 48 kHz, absorbed and immediately dried with hot air. The supply of cesium fluoride is 1.2 mg/cm 2 . Thereafter, the filled magnet was subjected to an absorption treatment at 800 ° C for 5 hours in an Ar atmosphere, and then subjected to an aging treatment at 510 ° C for 1 hour and quenched to obtain a magnet within the scope of the present invention. This magnet is called M2. For comparison purposes, a magnet that was treated without a barium fluoride coating but was heat treated was referred to as P2.

測量磁體M2及P2之磁性(Br,Hcj)及實例1中所定義之最大作用溫度,結果示於表1。磁鐵之組成示於表2。相較於磁鐵P2,本發明磁鐵M2顯示實質上相等之殘磁,高保磁力,及最大作用溫度上升45℃。用EPMA分析磁體M2及P2中Tb及F之分佈,磁體M2及P2中Tb及F之分佈與實例1中Dy及F之分佈相同。用與實例1之相同方式測量所從磁鐵切割出來之小部分之保磁力的分佈。The magnetic properties (Br, Hcj) of the magnets M2 and P2 and the maximum operating temperature defined in Example 1 were measured. The results are shown in Table 1. The composition of the magnets is shown in Table 2. Compared to the magnet P2, the magnet M2 of the present invention exhibits substantially equal residual magnetism, high coercive force, and a maximum operating temperature rise of 45 °C. The distribution of Tb and F in magnets M2 and P2 was analyzed by EPMA. The distributions of Tb and F in magnets M2 and P2 were the same as those of Dy and F in Example 1. The distribution of the coercive force of a small portion cut out from the magnet was measured in the same manner as in Example 1.

這些數據證實磁體具有富含Tb於晶粒邊界處、氧氟化物之分散、Tb及F之分級式濃度的特徵,以及磁體內部保磁力之分佈顯示加入少量Tb可提供良好之熱阻抗。These data confirm that the magnet is characterized by a rich concentration of Tb at the grain boundaries, dispersion of oxyfluoride, fractional concentrations of Tb and F, and the distribution of the coercive force inside the magnet shows that the addition of a small amount of Tb provides good thermal impedance.

實例3-7及比較例3-7Examples 3-7 and Comparative Examples 3-7

藉由如下方式製造一薄板形式之合金:使用純度至少99重量%之Nd、Pr、Dy、Al、Fe、Cu、Co、Ni、MO、Zr及Ti金屬及鐵硼(ferroboron),各秤取給定量,在Ar氛圍中將之高頻地熔融,以及將熔融物澆鑄成銅之單一冷卻輥(薄片狀鑄造技術)。該合金由11.5原子% Nd、1.0原子% Pr、1.0原子% Dy、0.5原子% Al、0.3原子% Cu、1.0原子% M’(=Cr、Ni、Mo、Zr或Ti)、5.8原子% B及剩餘為Fe所組成。An alloy in the form of a thin plate is produced by using Nd, Pr, Dy, Al, Fe, Cu, Co, Ni, MO, Zr and Ti metals and ferroboron having a purity of at least 99% by weight, each weighing A given amount, a high-temperature melting in an Ar atmosphere, and a single cooling roll (sheet-like casting technique) in which the melt was cast into copper. The alloy is composed of 11.5 atom% Nd, 1.0 atom% Pr, 1.0 atom% Dy, 0.5 atom% Al, 0.3 atom% Cu, 1.0 atom% M' (=Cr, Ni, Mo, Zr or Ti), 5.8 atom% B And the remainder is composed of Fe.

藉由氫化技術將合金研磨至尺寸為30網眼。使用氮氣在壓力下用噴射研磨機將粗粉末微細分割成具有以質量為底之中位數直徑5.1 μm。微細粉末在15 kOe磁場於氮氛圍中配向,及在壓力約1 ton/cm2 下壓緊。該緊密物然後置於使用Ar氛圍之燒結爐中,在1,060℃下燒結2小時,製得一磁塊。於磁塊之所有表面上用機器切割成直徑10 mm及厚度(配向方向)7 mm之圓盤。此磁體之平均磁導值為2。磁體隨後用鹼性溶液、去離子水、硝酸水溶液及去離子水清洗,及加以乾燥。The alloy was ground to a size of 30 mesh by hydrogenation techniques. The coarse powder was finely divided by a jet mill using a nitrogen gas under pressure to have a mass-based median diameter of 5.1 μm. The fine powder was aligned in a nitrogen atmosphere at a 15 kOe magnetic field and compacted at a pressure of about 1 ton/cm 2 . The compact was then placed in a sintering furnace using an Ar atmosphere and sintered at 1,060 ° C for 2 hours to obtain a magnetic block. A disk having a diameter of 10 mm and a thickness (orientation direction) of 7 mm was machine-cut on all surfaces of the magnet block. This magnet has an average permeability of 2. The magnet is then washed with an alkaline solution, deionized water, aqueous nitric acid and deionized water, and dried.

隨後,磁體浸漬於90:10氟化鋱/氧化釹粉末混合物之50重量%的乙醇分散液中11分鐘,同時用於48 kHz下音波處理該分散液。氟化鋱及氧化釹粉末分別具有平均粒徑10 μm及1 μm。磁鐵進行吸收及在真空乾燥機中於室溫下乾燥30分鐘,同時用旋轉泵抽真空。氟化鋱供應量為1.5至2.3 mg/cm2 。之後,經充填之磁體在Ar氛圍於900℃下進行吸收處理3小時,然後在500℃進行老化處理1小時及加以驟冷,製得在本發明範圍內之磁體。這些磁體為M3至M7,其中M’分別為Cr、Ni、Mo、Zr及Ti。為了比較目的,製得不經粉末套裝處理但進行熱處理之磁體,為P3至P7。Subsequently, the magnet was immersed in a 50 wt% ethanol dispersion of a 90:10 cesium fluoride/yttria powder mixture for 11 minutes while sonicating the dispersion at 48 kHz. The lanthanum fluoride and cerium oxide powders each have an average particle diameter of 10 μm and 1 μm. The magnet was absorbed and dried in a vacuum dryer at room temperature for 30 minutes while vacuuming with a rotary pump. The amount of cesium fluoride supplied is 1.5 to 2.3 mg/cm 2 . Thereafter, the filled magnet was subjected to an absorption treatment at 900 ° C for 3 hours in an Ar atmosphere, and then subjected to an aging treatment at 500 ° C for 1 hour and quenched to obtain a magnet within the scope of the present invention. These magnets are M3 to M7, where M' is Cr, Ni, Mo, Zr and Ti, respectively. For comparison purposes, magnets prepared without heat treatment of the powder set were P3 to P7.

測量磁體M3至M7及P3至P7之磁性(Br,Hcj)及實例1中所定義之最大作用溫度,結果示於表1。磁鐵之組成示於表2。相較於比較用磁鐵,本發明磁鐵M3至M7顯示實質上相等之磁性,及最大作用溫度上升20-30℃。用EPMA分析磁體M3至M7及P3至P7中Tb及F之分佈,其與實例1中Dy及F之分佈相同。用與實例1之相同方式測量所從磁鐵切割出來之小部分之保磁力的分佈。The magnetic properties (Br, Hcj) of the magnets M3 to M7 and P3 to P7 and the maximum operating temperature defined in Example 1 were measured, and the results are shown in Table 1. The composition of the magnets is shown in Table 2. The magnets M3 to M7 of the present invention exhibit substantially equal magnetic properties as compared with the comparative magnets, and the maximum operating temperature rises by 20-30 °C. The distribution of Tb and F in the magnets M3 to M7 and P3 to P7 was analyzed by EPMA, which was the same as the distribution of Dy and F in Example 1. The distribution of the coercive force of a small portion cut out from the magnet was measured in the same manner as in Example 1.

這些數據證電磁體具有富含Tb於晶粒邊界處、氧氟化物之分散、Tb及F之分級式濃度的特徵,以及磁體內部保磁力之分佈顯示加入少量Tb可提供良好之熱阻抗。These data prove that the electromagnets are characterized by a rich concentration of Tb at the grain boundaries, dispersion of oxyfluoride, and fractional concentrations of Tb and F, and the distribution of the coercive force inside the magnet shows that the addition of a small amount of Tb provides good thermal impedance.

稀土族元素用如下方式測得分析值:將樣品(實例及比較例中所製得者)全部溶於王水,用感應耦合等離子體(ICP)進行測量,用惰性氣體熔化/紅外線吸收光譜測量氧之分析值,及用蒸汽蒸餾/金屬比色測量氟之分析值。The rare earth elements were measured in the following manner: the samples (produced in the examples and comparative examples) were all dissolved in aqua regia, measured by inductively coupled plasma (ICP), and measured by inert gas melting/infrared absorption spectroscopy. Analytical value of oxygen, and analysis of fluorine by steam distillation / metal colorimetric measurement.

圖1示實例1所製得磁體M1及經熱處理及機器切割成之磁體P1(磁體P1係用於比較)不同處之保磁力相對於離磁鐵表面之深度的圖。Figure 1 is a graph showing the coercive force of the magnet M1 produced in Example 1 and the heat-treated and machine-cut magnet P1 (the magnet P1 is used for comparison) at a different point from the surface of the magnet.

圖2a及2b分別示磁體M1及P1中Dy分佈影像的顯微照片。Figures 2a and 2b show photomicrographs of Dy distribution images in magnets M1 and P1, respectively.

圖3示磁體M1及P1中Dy及F之平均濃度相對於離磁鐵表面之深度的圖。Figure 3 is a graph showing the average concentration of Dy and F in magnets M1 and P1 with respect to the depth from the surface of the magnet.

圖4a、4b及4c分別示磁體M1中Nd、O及F之組成分佈影像之顯微照片。4a, 4b, and 4c show photomicrographs of the composition distribution images of Nd, O, and F in the magnet M1, respectively.

Claims (5)

一種為燒結磁體形式之機能分級式稀土族永久磁鐵,其具有合金組成物R1 aR2 bTcAdFeOfMg,其中R1為選自包含Sc及Y但不包含Tb及Dy之稀土族元素中之至少一元素,R2為Tb及Dy中之一者或二者,T為鐵及鈷中之一者或二者,A為硼及碳中之一者或二者,F為氟,O為氧,及M為選自Al、Cu、Zn、In、Si、P、S、Ti、V、Cr、Mn、Ni、Ga、Ge、Zr、Nb、Mo、Pd、Ag、Cd、Sn、Sb、Hf、Ta及W中之至少一元素,a至g表示對應元素在合金中之原子百分比且範圍如下:10a+b15,3d15,0.01e4,0.04f4,0.01g11,剩餘為c,該磁體具有中心及表面,其中晶粒邊界環繞燒結磁體內(R1,R2)2T14A四方晶系之主相晶粒,包含於晶粒邊界之R2/(R1+R2)濃度平均高於包含於主相晶粒之R2/(R1+R2)的濃度,R2之分佈使其濃度從磁體中心至表面平均地增加,(R1,R2)氧氟化物存在於從磁體表面延伸至深度至少20μm之晶粒邊界區域中的晶粒邊界,磁體表層之保磁力高於磁體內部。 A functional graded rare earth permanent magnet in the form of a sintered magnet having an alloy composition R 1 a R 2 b T c A d F e O f M g , wherein R 1 is selected from the group consisting of containing Sc and Y but not including Tb And at least one of the rare earth elements of Dy, R 2 is one or both of Tb and Dy, T is one or both of iron and cobalt, and A is one or two of boron and carbon F is fluorine, O is oxygen, and M is selected from the group consisting of Al, Cu, Zn, In, Si, P, S, Ti, V, Cr, Mn, Ni, Ga, Ge, Zr, Nb, Mo, Pd. At least one of Ag, Cd, Sn, Sb, Hf, Ta, and W, a to g represents the atomic percentage of the corresponding element in the alloy and the range is as follows: 10 a+b 15,3 d 15,0.01 e 4, 0.04 f 4,0.01 g 11, the remainder is c, the magnet has a center and a surface, wherein the grain boundary surrounds the main phase grain of the (R 1 , R 2 ) 2 T 1 4A tetragonal system in the sintered magnet, and is included in the grain boundary R 2 / The concentration of (R 1 + R 2 ) is on average higher than the concentration of R 2 /(R 1 +R 2 ) contained in the main phase grains, and the distribution of R 2 causes the concentration to increase evenly from the center to the surface of the magnet (R 1 , R 2 ) oxyfluoride is present in the grain boundary region extending from the surface of the magnet to a grain boundary region having a depth of at least 20 μm, and the coercive force of the surface layer of the magnet is higher than that inside the magnet. 如申請專利範圍第1項之稀土族永久磁鐵,其中,在晶粒邊界處(R1,R2)氧氟化物包含Nd及/或Pr,以及 包含於晶粒邊界之氧氟化物中Nd及/或Pr對(R1+R2)的原子比高於包含於晶粒邊界處但R3之氧氟化物及氧化物除外下Nd及/或Pr對(R1+R2)的原子比,其中R3為選自包含Sc及Y之稀土族元素中至少一元素。 The rare earth permanent magnet of claim 1, wherein the oxyfluoride at the grain boundary (R 1 , R 2 ) comprises Nd and/or Pr, and Nd contained in the oxyfluoride contained in the grain boundary / or the atomic ratio of Pr to (R 1 + R 2 ) is higher than the atomic ratio of Nd and / or Pr pair (R 1 + R 2 ) except for the oxyfluoride and oxide contained in the grain boundary but R 3 Wherein R 3 is at least one element selected from the group consisting of rare earth elements containing Sc and Y. 如申請專利範圍第1項之稀土族永久磁鐵,其中R1包括至少10原子%之Nd及/或Pr。 A rare earth permanent magnet according to claim 1, wherein R 1 comprises at least 10 atom% of Nd and/or Pr. 如申請專利範圍第1項之稀土族永久磁鐵,其中T包括至少60原子%鐵。 A rare earth permanent magnet as claimed in claim 1 wherein T comprises at least 60 at% iron. 如申請專利範圍第1項之稀土族永久磁鐵,其中A包括至少80原子%硼。A rare earth permanent magnet as claimed in claim 1 wherein A comprises at least 80 atomic percent boron.
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