TWI413585B - Method of manufacturing microelements using inkjet technology - Google Patents

Abstract

A manufacturing method for micro components using inkjet technology includes the following steps: obtaining a hydrophobic substrate having a depression pattern on its surface; providing an inkjet printing equipment with an ink nozzle; driving the inkjet printing equipment to control the volumes of the liquid micro-droplets to be put in the depression pattern; solidifying the liquid micro-droplets in the depression pattern to make the micro components; obtaining the micro components from the depression pattern.

Description

Method of manufacturing micro-components using inkjet technology

This invention relates to a method of making a microcomponent, and more particularly to a method of fabricating a microcomponent using inkjet technology.

In order to achieve the goal of thinness and lightness, today's electronic products are also miniaturized, making consumers more convenient to carry in addition to the versatility of electronic products. Therefore, in order to meet the purpose of miniaturization of electronic products, the industry has begun to use various methods (such as micro Molding and photolithography) to manufacture micro-components, and it is known that the manufacture of micro-components has been It has attracted the attention of the industry.

In view of this, the present invention provides a method of manufacturing a micro component by an inkjet (Ink-Jet Printing) technique.

According to the above object, the present invention provides a method for manufacturing a micro component by using an ink jet technique, comprising: obtaining a hydrophobic substrate having a concave pattern on a surface; providing a printing device having a spray hole; and driving the printing device to control the discharge of the spray hole The amount of liquid droplets in the recessed pattern; the microdroplets in the cured recess pattern make it a micro-element; the micro-element is removed from the recessed pattern.

A method of fabricating a micro-component using ink jet technology according to an embodiment of the invention further comprises cleaning the hydrophobic substrate prior to the step of driving the printing device.

According to a method of manufacturing a micro-component by using an ink-jet technique according to an embodiment of the present invention, the hydrophobic substrate is obtained by: providing a substrate; performing a first cleaning process on the substrate; applying a photoresist to the substrate On the material; using a photomask to perform an exposure process on the photoresist to form a pattern; performing a second cleaning process on the substrate; applying a resist layer on the surface of the substrate and the pattern; The hydrophobic material is on the surface of the substrate and the pattern; the hydrophobic material is cured to be the hydrophobic substrate; and the hydrophobic substrate is detached from the substrate.

According to a method of manufacturing a microcomponent by an inkjet technique according to an embodiment of the present invention, the material of the hydrophobic substrate is polydimethyl siloxane, ABS resin or polyurethane.

According to the method of manufacturing a micro-component by using an ink-jet technique according to an embodiment of the present invention, the surface of the hydrophobic substrate includes a plurality of recess patterns, wherein the recess patterns are arranged in a matrix, and the shapes of the recess patterns are capable of Designed to be the same or different depending on the needs.

A method of manufacturing a micro-element using an ink-jet technique according to an embodiment of the present invention, the micro-element comprising a concave mirror body, a plane mirror body or a convex mirror body.

According to a method of manufacturing a microcomponent by an inkjet technique according to an embodiment of the present invention, the microdroplet comprises a polymer material.

The features of the invention are:

1. Since the recess pattern is designed according to the manufacturer's structure for the required micro-components, and the liquid amount control of the micro-droplets is added, the manufacturer can more quickly manufacture micro-components of various structures and mass-produce. In order to greatly improve the manufacturing efficiency of micro components.

2. Due to the hydrophobic nature of the hydrophobic substrate, the micro-droplets in the recessed pattern are not adhered to the hydrophobic substrate, so that the micro-elements after solidification molding can be easily taken out from the recess pattern.

3. The shape of the recess pattern on the surface of the hydrophobic substrate can be different depending on the design, and can be arranged in a matrix, so that it is possible to simultaneously manufacture different micro-components and mass-produce the micro-components.

4. Due to the use of inkjet technology processes, it is possible to manufacture microcomponents more quickly.

5. The hydrophobic substrate can be repeatedly used, which can further reduce the manufacturing cost of the micro component and is more environmentally friendly.

The above described objects, features, and characteristics of the present invention will become more apparent from the aspects of the invention.

Referring to FIG. 1A, FIG. 1A is a flow chart of a method for manufacturing a micro component by using an inkjet technology according to an embodiment of the present invention.

As shown in FIG. 1A, a method 1 for manufacturing a micro component by an inkjet (Ink-Jet Printing) technique includes the steps of: obtaining a hydrophobic substrate having a concave pattern on a surface (step S10); and providing a printing apparatus having an orifice ( Step S11): driving the printing device to control the amount of liquid droplets of the microfluids placed in the concave pattern (step S12); curing the micro-droplets in the concave pattern to become micro-components (step S13) The micro-element is taken out from the recessed pattern (step S14).

Please refer to FIG. 1B to FIG. 1E to understand the above steps, wherein FIG. 1B is a schematic view of the hydrophobic substrate of FIG. 1A; FIG. 1C is a flow chart of the printing device of FIG. 1A for discharging micro-droplets on a hydrophobic substrate. Schematic diagram of the recessed pattern; FIG. 1D is a schematic view of the micro-droplet of FIG. 1A solidified into a micro-element in a recessed pattern; FIG. 1E is a schematic view of the micro-element taken out from the recessed pattern of FIG. 1A.

As shown in FIG. 1B, when the manufacturer wants to manufacture the micro-elements by the ink-jet technique, this step can be performed by taking a hydrophobic substrate having a concave pattern on the surface (step S10).

The material of the hydrophobic substrate 2 can be poly-dimethylsiloxane (PDMS), ABS resin or polyurethane (PU). In this embodiment, the material of the hydrophobic substrate 2 is exemplified by polydimethyl siloxane. Moreover, depending on the structure of the micro-component to be manufactured, the manufacturer can design a desired recess pattern 21 on the surface 20 of the hydrophobic substrate 2 in advance, wherein the number of the recess patterns 21 can be one or more. In the embodiment, the plurality of recess patterns 21 are exemplified, but are not limited thereto.

In addition, in this embodiment, the recess patterns 21 can be arranged in a matrix on the surface 21 of the hydrophobic substrate, and the shapes of the recess patterns 21 are the same. The shape of the recess pattern 21 is, for example, a circular, triangular or square geometric shape, as shown in FIG. 1B, and the shapes of the recess patterns 21 are all the same circular shape. Of course, with the difference in the structural requirements of the micro-components, the manufacturer can also design the shapes of the recess patterns 21 to be different from each other.

Next, this step is performed: a printing apparatus having an orifice is provided (step S11).

In this step, as shown in FIG. 1C, the manufacturer can prepare a printing device (Ink-Jet Printing Equipment), and a droplet discharge device 3 of the printing device has an injection hole 30, in actual use, The droplet dispenser 3 can have a plurality of orifices 30 (for example, array orifices). Only one orifice 30 is illustrated in FIG. 1C, but is not limited thereto, and the manufacturer positions the hydrophobic substrate 2 On the working platform of the printing equipment.

Thereafter, the step of: driving the printing device to control the amount of liquid droplets of the micro-droplets in the recessed pattern is controlled (step S12): in this step, when the manufacturer activates the power of the printing device, the manufacturer The liquid amount of the micro-droplets 31 in which the nozzle holes 30 are placed in the recess pattern 21 can be controlled by the recess pattern 21 on the surface 20 of the hydrophobic substrate 2 by a droplet discharge program of the printing apparatus. The liquid component of the microdroplet 31 contains a polymer material having optical properties (for example, polyurethane (PU), polyvinyl alcohol (PVA), or polystyrene (PS), etc.). In FIG. 1D, assuming that the recess pattern 21 has a height H, the nozzle hole 30 can precisely control the micro droplets placed in the recess pattern 21 by using, for example, the height H and the bottom area 210 of the recess pattern 21. In the liquid amount of 31, it should be particularly noted that when the micro-droplets 31 are placed in the recess pattern 21, they can be in a stable state, that is, the micro-droplets 31 are stabilized by the physical properties in the recess pattern 21. In this way, it is possible to improve the quality of the micro-droplets formed into micro-components.

For example, when the amount of liquid in which the micro-droplet 31a is placed in the recess pattern 21 is slightly higher than the height H, the upper surface of the micro-droplet 31a becomes a convex shape, and the lower surface of the micro-droplet 31a has a depression. The shape of the pattern 21 (for example, the circular shape of this embodiment); when the amount of liquid in which the micro-droplet 31b is placed in the recess pattern 21 is slightly lower than the height H, the upper surface of the micro-droplet 31b becomes a concave shape, and micro The lower surface of the liquid droplet 31b has a shape of the concave pattern 21; when the liquid amount of the micro-droplet 31c placed in the concave pattern 21 is equivalent to the height H, the upper surface of the micro-droplet 31c becomes a planar shape, and the micro-liquid The lower surface of the drop 31c has the shape of the recess pattern 21.

From this, it can be seen that with the control of the liquid amount, the manufacturer can directly adjust the curvature of the upper surface of the micro-droplet located in the recess pattern 21 to conform to the manufacturer's demand for the micro-components of different structures.

In addition, before the step of driving the printing apparatus to control the amount of the liquid droplets of the micro-droplets in the recess pattern (before step S12), the cleaning hydrophobic substrate 2 is further included to ensure that the hydrophobic substrate 2 is dirty. In the case of contamination, the micro-droplets 31 are placed in the recess pattern 21 by the orifices 30, thereby avoiding the influence of the quality of the micro-components.

Next, this step is performed: the micro-droplets in the recess pattern are cured to become micro-components (step S13).

In the above, when the micro-droplets 31a, 31b, and 31c are respectively placed in the recess pattern 21, the micro-droplets 31a, 31b, and 31c are solidified into the micro-components in the recess pattern 21 according to the shape of the recess pattern 21. Among them, the micro-droplets 31a, 31b, and 31c do not adhere to the recess pattern 21 after being cured due to the hydrophobic property of the hydrophobic substrate 2. Further, the micro-droplets 31a, 31b, and 31c can be naturally solidified into microelements at normal temperature.

Next, this step is performed: the micro-element is taken out from the recess pattern (step S14).

As shown in FIG. 1E, after the droplets 31a, 31b, and 31c are solidified into the micro-element in the recess pattern 21, the manufacturer can cure the droplets 31a, 31b, and 31c by automatic (for example, robotic arm) or manual means. The separately formed micro-elements 310a, 310b, and 310c are taken out from the recess pattern 21, that is, the manufacture of the micro-components is completed. In addition, it should be noted that after the micro component is taken out from the recess pattern 21, the hydrophobic substrate 2 can continue to be used in the next manufacture of the micro component, so that the manufacturing cost of the micro component can be reduced and the environmental protection requirement can be more satisfied.

Therefore, the micro-components manufactured by the ink-jet technique, for example, the micro-elements 310a, 310b, and 310c of the above-described embodiments can be used as a convex mirror body, a concave mirror body, and a plane mirror body, respectively. Of course, from the description of the above embodiments, since the recess pattern 21 is designed according to the manufacturer's structure for the required micro-components, and the liquid amount control of the micro-droplets 31 is added, the method provided by the present invention is utilized. The micro-components of various structures can be manufactured more quickly and produced in large quantities to greatly improve the manufacturing efficiency of the micro-components.

Please refer to FIG. 2A. FIG. 2A is a flowchart of a method for obtaining the hydrophobic substrate of FIG. 1B according to the present invention.

As shown in FIG. 2A, the manufacturer can obtain the hydrophobic substrate 2 by using the following steps: providing a substrate (step S100); performing a first cleaning process on the substrate (step S110); applying a photoresist to the substrate (step S120) The exposure process of the photoresist is performed by the photomask to form a pattern for the photoresist (step S130); the second cleaning process is performed on the substrate (step S140); and the anti-staining layer is coated on the surface and the substrate of the substrate (step S150) And coating the hydrophobic material on the surface and the pattern of the substrate (step S160); curing the hydrophobic material to form a hydrophobic substrate (step S170); and detaching the hydrophobic substrate from the substrate (step S180).

Please refer to FIG. 2B at the same time. FIG. 2B is a schematic diagram of obtaining a hydrophobic substrate according to an embodiment of the present invention.

When the hydrophobic substrate 2 is to be obtained, this step is first performed: a substrate is provided (step S100).

In this step, the manufacturer can prepare a substrate 201, such as a tantalum substrate or a glass substrate.

Next, the following steps are performed: performing a first cleaning process on the substrate (step S110); applying a photoresist to the substrate (step S120).

After the substrate 201 is prepared, a first cleaning process is performed on the substrate 201 to remove the stain on the substrate 201, and then the photoresist 202 is coated on the surface of the substrate 201, for example, by spin coating. The SU-8 photoresist material is coated on the surface of the substrate 201.

Next, the following steps are performed: performing an exposure process on the photoresist by the photomask to form a pattern of the photoresist (step S130)

In this step, the manufacturer can design different mask patterns according to the structure of the required micro-components, and expose the photoresist 202 by the mask 203 to form the pattern 204 in the photoresist 202.

Thereafter, the following steps are performed: performing a second cleaning process on the substrate (step S140); applying a resist layer on the surface of the substrate and the pattern (step S150); and after forming the pattern 204 on the photoresist 202, The substrate 201 performs a second cleaning process to remove dirt on the substrate 201 and the pattern 204, and then a resist layer 205 is applied to the surface of the substrate 201 and the pattern 204.

Next, this step is performed: the hydrophobic material is applied to the surface of the substrate and the pattern (step S160).

In the above, when the anti-staining layer 205 is applied on the surface of the substrate 201 and the pattern 204, the manufacturer can apply a hydrophobic material on the surface of the substrate 201 and the pattern 204, wherein the material of the hydrophobic material can be Polydimethyl siloxane, ABS resin or polyurethane (these materials are materials for the hydrophobic substrate 2).

Thereafter, this step is carried out: the hydrophobic material is cured to become a hydrophobic substrate (step S170).

In this step, the manufacturer can cure the hydrophobic material by, for example, baking, and the hydrophobic material after cooling and solidification becomes the hydrophobic substrate 2.

Next, this step is performed: the hydrophobic substrate is detached from the substrate (step S180).

In this step, the manufacturer can detach the hydrophobic substrate 2 from the substrate 201 by a mold turning operation. Since the substrate 201 and the hydrophobic substrate 2 have a corresponding structure, the hydrophobic substrate 2 has a recess pattern 21 formed by the pattern 204, and the recess pattern 21 is a position at which the micro droplets are disposed.

Please refer to FIG. 3 and FIG. 4. FIG. 3 is a schematic diagram of a hydrophobic substrate according to another embodiment of the present invention; FIG. 4 is a schematic diagram of a hydrophobic substrate according to another embodiment of the present invention.

As shown in FIG. 3, the recess pattern on the surface 20 of the hydrophobic substrate 2 can be designed to grow the groove-shaped recess pattern 21a and be arranged in a matrix on the surface of the hydrophobic substrate 2 in accordance with the structure of the micro-component required by the manufacturer. 21; or, as shown in FIG. 4, the concave pattern on the surface 20 of the hydrophobic substrate 2 can be designed with a circular concave pattern on the surface 20 of the hydrophobic substrate 2 according to the structure of the micro-component required by the manufacturer. 21. The triangular recessed pattern 21b, the square recessed pattern 21c, and the long groove-shaped recessed pattern 21a have geometric shapes different from each other, and are arranged in a matrix on the surface 20 of the hydrophobic substrate.

From this, it can be seen that the manufacturer can manufacture the micro-components of various structures by using the predetermined recess pattern and the control of the amount of the micro-droplet liquid disposed on the recess patterns. Moreover, it is worth mentioning that the hydrophobic substrate 2 can be repeatedly used, so that the manufacturing cost of the micro component can be reduced and the environmental protection requirement can be more satisfied.

In view of the above, the present invention provides a method for manufacturing a micro component using an ink jet technique, which has the following features:

1. Since the recess pattern is designed according to the manufacturer's structure for the required micro-components, and the liquid amount control of the micro-droplets located in the recess pattern (directly adjusting the curvature of the upper surface of the micro-droplet), the manufacturer The micro-components of various structures can be manufactured more quickly and produced in large quantities to greatly improve the manufacturing efficiency of the micro-components.

2. Due to the hydrophobic nature of the hydrophobic substrate, the micro-droplets in the recessed pattern are not adhered to the hydrophobic substrate, so that the micro-elements after solidification molding can be easily taken out from the recess pattern.

3. The shape of the recess pattern on the surface of the hydrophobic substrate can be different depending on the design, and can be arranged in a matrix, so that different micro-elements can be simultaneously manufactured and a large number of micro-components can be produced.

4. When the micro-droplets are placed in the recessed pattern, they can be in a stable state (this is the application of physical properties), which can improve the quality of the micro-components.

5. Due to the use of inkjet technology, it is possible to manufacture microcomponents more quickly.

6. The hydrophobic substrate can be repeatedly used, which can further reduce the manufacturing cost of the micro component and is more environmentally friendly.

In summary, the present invention is only described as a preferred embodiment or embodiment of the technical means for solving the problem, and is not intended to limit the scope of the invention. That is, the equivalent changes and modifications made in accordance with the scope of the patent application of the present invention or the scope of the invention are covered by the scope of the invention.

2. . . Hydrophobic substrate

20. . . surface

201. . . Substrate

202. . . Photoresist

203. . . Mask

204. . . pattern

205. . . Anti-stick layer

twenty one. . . Sag pattern

21a. . . Long groove shape concave pattern

21b. . . Triangle depression pattern

21c. . . Square depression pattern

210. . . Bottom area

3. . . Droplet dispenser

30. . . Spray hole

31, 31a, 31b, 31c. . . Microdroplet

310a, 310b, 310c. . . Micro component

H. . . height

Step: S10~S14

Step: S100~S180

1A is a flow chart of a method for manufacturing a micro component by using an inkjet technique according to an embodiment of the present invention;

1B is a schematic view of the hydrophobic substrate of FIG. 1A;

1C is a schematic view showing the concave pattern of the micro-droplets on the hydrophobic substrate by using the orifice cloth of the printing apparatus of FIG. 1A;

1D is a schematic view of the micro-droplet of FIG. 1A solidified into a micro-element in a recess pattern;

FIG. 1E is a schematic view of the micro-element taken out from the recess pattern in FIG. 1A; FIG.

2A is a flow chart of a method for obtaining the hydrophobic substrate of FIG. 1B according to the present invention;

2B is a schematic view of a hydrophobic substrate according to an embodiment of the invention;

3 is a schematic view of a hydrophobic substrate according to another embodiment of the present invention;

4 is a schematic view of a hydrophobic substrate according to another embodiment of the present invention.

Step: S10~S14

Claims (9)

A method for manufacturing a micro component by using an inkjet technique, comprising: obtaining a hydrophobic substrate having a concave pattern on a surface; providing a printing device having an orifice; driving the printing device to control the orifice placement a liquid amount of a microdroplet in the recess pattern; curing the microdroplet in the recess pattern to become a micro component; and removing the micro component from the recess pattern; wherein the hydrophobic substrate is subjected to the following steps Obtaining: providing a substrate; performing a first cleaning process on the substrate; applying a photoresist to the substrate; performing an exposure process on the photoresist by using a mask to form a pattern on the photoresist; Performing a second cleaning process on the substrate; applying a resist layer to the surface of the substrate and the pattern; casting a hydrophobic material on the surface of the substrate and the pattern; curing the hydrophobic material to make Forming the hydrophobic substrate; and detaching the hydrophobic substrate from the substrate. A method of manufacturing a micro-component using an ink-jet technique as described in claim 1, wherein the step of driving the printing device further comprises cleaning the hydrophobic substrate. A method of manufacturing a microcomponent by an inkjet technique according to the first aspect of the invention, wherein the hydrophobic substrate is made of polydimethyl siloxane, ABS resin or polyurethane. A method of manufacturing a microcomponent by an inkjet technique according to the first aspect of the invention, wherein the surface of the hydrophobic substrate comprises a plurality of the recess patterns. A method of manufacturing a micro-element using an ink-jet technique as described in claim 4, wherein the recess patterns are arranged in a matrix. A method of manufacturing a micro-element using an ink-jet technique as described in claim 4, wherein the recess patterns have the same shape. A method of manufacturing a micro-element using an ink-jet technique as described in claim 4, wherein the shape of the recess patterns is different. A method of fabricating a microcomponent using ink jet technology as described in claim 1, wherein the microcomponent comprises a concave mirror body, a plane mirror body or a convex mirror body. A method of manufacturing a microcomponent by an inkjet technique according to the first aspect of the invention, wherein the microdroplet comprises a polymer material.