TWI294402B - A method for fabricating a micro-optical element and an apparatus thereof - Google Patents

Description

1294402 IX. Description of the Invention: The present invention relates to a method for fabricating a micro-optical element and a device for fabricating the same, and a method for fabricating a micro-optical element and a micro-optical array element by using micro-droplets Its production equipment. [Prior Art] Today's inkjet-based technology has controllable micro-droplet generation capability, and micro-droplets have the basic functions of immediate spraying and curing, while micro-liquid The drop volume is between 5 picoliters (pico-iiter pi) and 200 picolitres, and the corresponding microdroplet diameter is between 1 micron (micrometer) and 50 micrometers. In recent years, micron-scale fluid generation technology has begun to study bio-discs for biomedical applications, organic thin film transistors in the semiconductor field, and liquid crystal display color filters in the field of optoelectronics (LCD color). In the important fields such as filter, LCD CF) and Polymer Light-emitting Diode (PLED), the single dimension width can be summarized in terms of the characteristic dimension of the main active areas of these micro-components. It is between 10 microns and 100 microns, and the wire diameter is no more than 1 micron. ' The single width of the above feature size is closely related to the diameter of the microdroplet of the current inkjet core technology, especially the basic principle that the diameter of the microdroplet cannot be larger than the width of the wire diameter. In the same day, in order to reduce the viscosity coefficient of the fluid In the ejectable conditions (viscosity is 5~40cps), most of the composition of the microdroplets can be steamed at room temperature, so the thickness of the line 1294402 is mostly less than i micron, however, the microdroplets In the process of evaporation and solidification, especially when the micro-size is mieiOpatterning, the characteristics of the I-pass filming are similar to those caused by the microfluid nature, and are often the process of inkjet application process. The main obstacles of objects, such as microlens arrays (miero_lensarray), belong to such stereoscopic high curvature objects. _ Advance-step consideration (4) After the balance of the ambiguity, at this time, the reading body must be further transformed into a solid through the cooling phase of the Aihua or the treatment (Walk), and finally form the desired micro-image Φ. This pain is transformed by the liquid. For the phase transition process of solids, the time may have to be experienced, the number of spoons to the number, if the solid surface of the I medium object is in phase with the liquid (Hydrophilic, θ < 90 degree), in the normal heat transfer capillary flow and other diffusion Under the action, it will naturally form a valley-like contour with a flattened but high edge. The area ratio and height of the flat area and the souther edge area are determined by the composition of the solid concentration of the mineral, and this self-distribution As a result, it is impossible to form a circular and convex shape, and the result of the k-shaped mechanical image is distorted, and the circular curvature requirement of the general micro-optical element φ cannot be achieved. U.S. Patent Publication No. 5,498,844 and U.S. Patent No. 5,778, 768 disclose a method of making an optical lens using an ink jet head, which is a micro-optical component based on a jet-technology technique. How to fabricate optical components of various shapes without illustrating how to make precise positioning and systematic fabrication on a media substrate. In view of the manufacturing problem of microlens arrays, the Institute of Industrial and Commercial Research has published a method for the implementation of so-called microfluids in the Patent Case No. 1224210 of the Republic of China (in Chinese)

FluidicMethGd) 'The method includes providing an aged substrate, and then working on the film on the medium substrate and patterning the film to form one of the microlens patterns without (8)__ on the medium substrate, and then performing a microfluidic laying step to microfluid It is placed in the (4) film area to form a microlens object. When the silk medium (4) m-age surface and the new phase are secret (HydiOph〇bic, θ > 90 degree), the above phenomenon can be avoided, and thus the dried and solidified to form a circular convex microstructured object, and therefore must be directed to a general hydrophilic substrate. For the hydrophobic surface treatment, the final ratio of the diameter to the length at the initial curing and the height ratio will be determined by the composition of the solid concentration. SUMMARY OF THE INVENTION The object of the present invention is to provide a method for fabricating a microlens and a microlens array by using a microfluid to fabricate a microlens array and a device for fabricating the same, which overcomes the fundamental problem discussed above, and is based on inkjet-based technology. Based on the basis of the hydrophobic material and the placement of the micro-droplets to achieve the evaporation forming process, the desired patterning of the micro-optical φ elements can be accomplished. According to the above object, a micro-optical element manufacturing method disclosed in the present invention is a method of disposing a solution and forming a micro-optical element having a specific diameter, and the method of micro-optical element I includes the following steps to provide a surface having been performed. a hydrophobically treated substrate, and calculating a predetermined concentration of the microfluid according to a specific radius of curvature to prepare a solution, and calculating a solution discharge amount according to a specific diameter, and discharging a bath of a certain amount of liquid on the substrate to form a micro Optical element. According to the above object, the present invention further discloses a micro-optical element manufacturing apparatus for disposing a solution on a substrate to form a micro-optical element of a specific diameter, and the micro-optical element manufacturing apparatus includes a droplet discharge device and a central control unit. Wherein, the droplet discharge device is used for preparing the solution and discharging the solution on the substrate, and the central control unit is different according to the concentration of the solution and the amount of the liquid discharged according to the specific diameter leaf, and controls the droplet discharge device to have a certain concentration. The solution is placed with a solution of a certain amount of liquid on the substrate to form a micro-optical element having a specific diameter. According to the method for fabricating a micro-optical element and the apparatus for fabricating the same according to the present invention, the micro-optical patterns of various wire diameters and individual pitches can be adjusted by pre-difference and simpleness. Component specifications, and can use the image of the micro-droplet to achieve the desired brightness-increasing layer, light guide, etc. In addition, the number of micro-droplets and the evaporation forming process can further control its diameter. Length and height to obtain a stereo micro-optical array element of variable size (_ble size) and variable pitch lion pitch. In order to make the above and other objects, features and advantages of the present invention more comprehensible, the embodiments are described in detail with reference to the accompanying drawings. [Embodiment] According to the method for fabricating micro-optical elements and the fabrication thereof, the micro-optical element (4) refers to a micro-relay, and is not limited to a microlens, such as micro-flowing The microfilament component of the present invention can also be applied to the technique of the present invention, and the present invention will use a microlens as an application embodiment. As shown in Figure 1A, the basic structure of the three-dimensional micro-droplet is shown in the figure. The evaporation after the micro-distribution is completed by the initial period of 1294402 Wet state, t=〇) evolved to the final state of complete evaporation and solidification (dry, t = final time), which includes the initial micro-droplet i〇a, the initial micro-droplet l〇a has The solid droplet diameter i〇c of the initial diameter Di (wet droplet diameter) and the initial height Hi (wet droplet height)' has a solid droplet diameter and a dry droplet height (Hs). Obviously, the initial diameter A should be greater than the curing diameter Ds. Similarly, the initial height 珣 should be greater than the curing diameter Ds, and the ratio of the curing diameter Ds to the initial diameter 〇1 is defined as the heart, and the curing height Hs and the initial height are The ratio is Xh:

Ds/DrXd<l ^ Hs/H!=Xh<l (1) In other words, the basic structure of a single microdroplet can be specified by using equation (1). Continued to refer to "Figure 1A" to further clarify the technical basis for the deposition of a single micro-droplet on the substrate 20 to form a microlens, the illustration comprising a droplet discharge device 68 having a plurality of sprays The spray head 682 of the cloth hole 681, the substrate 20, and the main process steps of laying the initial micro-droplet 10a, evaporating the micro-droplet i〇b, and solidifying the micro-droplet 1〇c, wherein the surface of the substrate 20 has been hydrophobic For example, a hydrophobic layer is formed on the surface of the substrate 2, and a hydrophobic layer is formed on the substrate, optionally by Physical Vapor Deposition (PVD) or Chemical Vapor Deposition (CVD). And one of the wet coatings, the thickness of which is between 100 nanometers (nm) and 1 centimeter (millimeter, 1294402 mm), and the material of the hydrophobic layer has a fine fluoride (4) PTFE) > ^^6^(P〇lyvinylchl〇ride) pvc) ^ ^6##(p〇lyvinyl cohol, PVA Zheng strip light _, so, the initial micro-droplet is placed at an angle greater than the contact angle 90 degrees' makes the micro-droplets avoid diffusion during the evaporation and solidification process. Flat but mixed with high valley like rim phenomenon, the initial micro-liquid = pool will evaporate the solvent over time, and become the droplets of the evaporating towel full, after the solvent is evaporated, the evaporation of the droplets Conversion to solidified microdroplets i〇C. • For micro-sized objects, the initial diameter Di and initial height warfare values are mostly defined between tens of microns and hundreds of microns, where wet-solid The diameter ratio Xd and the height ratio Xh are determined by the composition of the material such as the solid concentration. As shown in Figure 1B, the basic structure of the three-dimensional micro-droplet is shown in the figure. When the micro-droplets are placed on the surface of the substrate 20 in ordinary air, the liquid, solid, and air interface lines will eventually reach an equilibrium angle state (in equilibrium w pool Specific c〇ntact • angle) The physical relationship can be known by Y〇ung_Laplace equations:

YlvC〇s(0c)=ysv-yls (2) and AP=pgt=yLS(l/R1+l/R2) (3) where 'Θ. The value indicates the contact angle of the liquid-solid interface line, while the 丫^, 11 1294402 ^, and irLS values indicate the surface energy of the liquid-gas, solid-gas, and liquid-solid interfaces, respectively, △! The internal and external pressure difference of the droplet, the p value indicates the microdroplet density, the g value indicates the gravitational acceleration, the t value indicates the maximum height of the microdroplet, and the & R2 values indicate the radius of curvature of the microdroplet in the two directions of the solid surface, respectively. If it is assumed that the radius of curvature of the micro-droplets in the two directions of the solid surface is exactly the same (ie, Ri=R2=R), the m-value and the r-value can be further obtained from the equation (4) and the equation (5)·· ν^π/ Όχ^+ΒΛ] (4) (5) “where R is the radius of curvature of the microdroplet, r is the radius of the microdroplet, and because the radius of curvature R is thinner than the microlens, it is possible to precisely control the droplets. The position of the surface and the result of the forming thereof are as shown in Fig. 2A and Fig. 2B. In the figure, the initial microfluids 1〇3 are placed on the substrate 20 at a predetermined interval, respectively. A plurality of solidified microdroplets l〇c form a microlens array, and each of the separated solid droplets 1〇c has a horizontal direction gate Px is the pitch Py in the vertical direction, but the actual users kg for an arrangement pattern may be determined with a micro-optical element according to the design requirements of the size of the distance. Further, the substrate for the medium may be a copolymerized polypropylene (c〇p〇lymerpp), a polyethylene terephthalate (p〇lyethyleneter intaglio, ρΕτ) or the like, and a material related to the microfluid. In terms of general optical plastic materials with good optical properties and mechanical strength, such as polyethyl alcohol (500) gamma (four) cis plant polyamine S (olyurethane, PU), polyester / pu / xi 2), Poly 12 1294402 Polyurethane-Acrylate (PUA), Polydimethylmethysiloxane (PDMS), Polymethyl Methacrylate (PMMA), Polystyrene (p〇lyStyrene, PS) and polycarbonate (PC) and other materials, in general, these optical plastics as microfluidic materials, the finished product has higher impact resistance than glass, and is less prone to breakage and safety. The cost is also lower than glass and light weight. In order to be suitable for working conditions at normal temperature and pressure (20 ° C, lamat), the microfluid material can be used as a solution type material, that is, the microfluid material is used as a solute material, and can be dissolved and dissolved. In a suitable solvent material, a liquid solution type material is synthesized, and the solvent material is an evaporative material, and the solvent material comprises pure water (H2 〇), methanol (Methanol), ethanol (Ethanol) and B. 2-Ethoxyethanol, etc., assuming that the content of the solute component is s, the content of the solvent component is 100%-s. In this case, the final volume of the microlens structure is reduced to Vxs, or is reduced. 100%-s, for example, if a volume v of microdroplets is composed of a hexahydrate solute of polyurethane, ie s=60%, and 40% solvent, such as Pure water, a solution composed of polyurethane and pure water, the microlens composed of the final solidified forming volume will be reduced to Vx60%, or the volume v is reduced by 40%. 〇In addition, the application of Snell's Law Design principle, beam refraction can be determined To explicitly regulate the equation ⑹. (6) η 1X sin(ai )=n2x sin(a2) 1294402 where 111 is the refractive index of the incident beam at the incident end (generation 6^ along ^^^^, n2 is the refractive index of the exit end, % is the incident angle, % is The angle of the exit. ...the eye is shown in the "3rd diagram". In the illustration, a light source 5 〇 from the substrate 20 having the refractive index % is one side of the astigmatically emitted light beam, such as gamma (four), wherein the non-vertical beam is based on The different angles of the human beings follow the Snell's miscellaneous and the different light directions are deflected. In the space with the refractive index Π4, when the incident angles of the incident light beams 34a and 36a are 鲥, the exit has appeared. The outgoing beams 34b and 36b are at an angle of 9 degrees. Therefore, if the incident angles of the incident beams 34a and 36a are greater than δ, the interface will not be able to pass through the interface, and the reflected beams 34c and 36c of the internal total reflection (tQtal intemal refl_n) will be formed. Constantly reflecting forward at the interface of the substrate 2〇, so the point source width through which the point source 50 can pass satisfies equation (6) and equation (7): ' sin(5)=n4/n3 (7) and according to Pythagorean theorem (Pythagorean theorem), interface The degree w〇 and the angle δ can be written as the equation (8): (8) tan(6)=0.5W〇/H〇 where H〇 is the thickness of the substrate, so that w〇 can be obtained, and the original point source 5〇 passes through the substrate. After 20, the exit angle has been diffused, and it becomes the non-1294402 of the approximate surface h_F2. The uniform divergent light advances in the space, and its overall light-emitting rate (〇111{)11^〇) is 5/90. . As shown in Figure 3B, the figure shows the microstructure design of adding a solid droplet 10c to the substrate 2〇. It should be noted that the inherent microdroplet width ^ and the refractive index ns solidified microfluid The structure of the drop 1〇c has locally increased the curvature value of the original 'and thus changed the original incident angle and the exit angle, and the solidified micro-droplet 10c, the substrate 20 and the deployment space 41 are connected. At the point τ, the original normal N〇 at this point will change the position due to the deployment of the solidified micro-droplet 10c, so the normal N〇 is rotated by the angle of 90-β to become Nl, and then the original If the incident angle 1 becomes Φ, if the incident angle ω is larger than the critical angle of the original substrate 2〇, the incident light beams 44a, 46a will not be able to pass through the interface and proceed in the total reflection direction to have the reflected light beams 44c, 46c. Since the solidified micro-droplet i〇c distorts the curvature of the original plane, the original incident angle 1 is reduced to the incident angle φ, and the incident light beams 44a, 46a are further formed in the direction of the refractive angle ε to form the outgoing beam. Go into the deployment space 41 and move on. The point source 5 〇 passes through the width of the substrate 2 〇 〇 • 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非 非The overall light emission improvement rate is Wm/WG'. Further, when the structure coverage of the solidified micro-droplet 10c is wider, that is, the wider the width Wm of the solidified micro-droplet is, the higher the light-increasing rate is up to the incident angle Φ. When the critical value is reached, the experimental results of the glass substrate (light refractive index η=1·5) are applied to a different convex spectrum using a convex spherical structure (η=1·5, Wm/w〇=14). (Wavelength is 400~700 nm), the light improvement rate can be as high as 4〇~7〇%. See the "Division 3B", in which the solidified micro-droplets i〇c are not limited to the circle 15 1294402 spherical and the number, which can be long, square, round, elliptical, etc. The number can also be plural, so that the solidified micro-droplets are separated into a shape, a column, and the optimal design can be achieved according to the light source configuration and the substrate 20, and the highest coverage can be achieved by the coverage ratio of the spacing. Overall light increase rate. The government's light is shown in Figure 4, which depicts the structure in which a plurality of beams are conducted in the substrate 20 of the solidified droplet arrays A, B, and C. According to Snell's law, when the incident angle is greater than When the critical angle of refraction is incident, the interface is incident on the mountain, so that the incident beam 53ai enters the substrate 2〇, and the reflected beam 53b that forms the internal total reflection is not formed by the micro-droplet array A, and will be directed to the other side. Continually reflecting forward between the interfaces S1, S2, if the incident light beam 53a in the above-mentioned advancement is to be allowed to pass through the interface at some positions, the stereoscopically shaped micro-droplets can be utilized for this purpose. Continuing to refer to FIG. 4, the incident light beams 54a, 54b, 54c are respectively refracted downward by the solidified micro-droplet arrays A, B, and C to form φ-beams 56a, 56b, respectively. And a filter plate 51 is disposed between the adjacent solidified droplet arrays a, B, and C. The reflector 51 deflects the incident light beam in a certain direction to a predetermined direction, so that the reflector 51 can be used separately. The outgoing beams 56a, 56b, 56c are passed through the substrate 20' into the derivation beams 58a, 58b, 58c, and continue to advance in the derivation direction, that is, in the vertical direction, by solidifying the micro-droplet array to destroy the total reflection boundary, Effectively transforming the beam that has been traversed in the horizontal direction into the vertical direction V, and it can be used as a light guide plate because the incident light source applied to the side passes through a medium substrate and is turned into a vertical light source. . 16 1294402 month "1 5A", factory 5B", "5C", the straight picture of the factory is the structure of the micro-optical component making device 6Q, and the bottom stage is phantom. There is also a motion platform 64 for carrying the substrate, the motion platform 64 has a driving mode, and the 1 driving pull group 641 is controlled by the central control unit 7〇 so that the motion level 0 can be horizontally oriented with respect to the bottom load Φ 62 . χTouch the direction of the object γ and other directions ^, at the same time, mount the height measuring device on the pylon table 66 and the liquid droplets are placed. The liquid droplet scatterer 68 is used to prepare the solution and the solution. The substrate, the ruthenium droplet is placed as a dip and contains a plurality of nozzles 682 having a plurality of nozzle holes for arranging the liquid supply for the supply of the liquid concentration, and for controlling the solution in the solution discharge liquid. Lang module 685, so that the amount of liquid can be placed on the image of the micro-optical components: the soil plate and the Hebutou 682 series are optional as hot bubble type and piezoelectric type (four) heart coffee, PZT) - height The measurer 67 is adjacent to the drop dispenser 68, and the measurer 67 is controlled by the central control unit 7〇, thereby enabling height measurement to facilitate viewing of the micro-optical image; The device 68 is additionally provided with a image pickup unit 69, and the image pickup unit 69 is controlled by the central control unit 70 for dividing Detecting the placement of the droplet placement device 68 and the image result of the micro-optical element, and photographing the image result of the placement, and the central control unit 7 is based on a specific diameter. The concentration of the juice solution and the cloth The amount of liquid is discharged, and the droplet discharge device 68 is controlled to prepare a solution concentration and a solution of a certain amount of liquid is disposed on the substrate to form a micro-optical element of a specific diameter. Therefore, the central control unit 70 is associated with the control driving module. 64 ΐ, height measurer 67, supply module 684, adjustment module 685 and camera 69 actuate each other. Of course, it must be specifically stated that the embodiment of the above device is not limited to this architecture, 17 1294402, for example, 'the droplet placement device 68 and the direction of motion can be further extended to a plurality of, and the more "f" The "distributor" and "moving direction" are the more accurate the image placement and the precise placement. μ Referring to "Fig. 6A" and "Fig. 6B", the illustration is a step of implementing the micro-optical element by the micro-droplet deployment method of the present invention, first providing a substrate whose surface has been subjected to hydrophobic treatment. (Step 11〇), the substrate must be cleaned and the non-fouling treatment is to form a hydrophobic layer on the substrate. One of its physical rib deposition methods, chemical vapor deposition method and wet coating method, the thickness of the hydrophobic layer Between qingnan and 1 cm 'and the hydrophobic layer materials such as PTFE, polyvinyl chloride, polyethyl ethoxylate and Shishi gum photoresist, etc.' then calculate the microfluid according to the specific radius of curvature The pre-concentration concentration is used to prepare the solution (step 120), and in order to apply the working condition under normal temperature and normal pressure, the microfluid is used as a solute material to be dissolved in the appropriate solvent material, and the synthetic-liquid solution type material is The solvent material is an evaporative material, and the solvent material includes pure water (H2 〇), methanol (Methanol), ethanol (Ethan 〇 1) and ethylene bis (Eth 〇 Xyethano1), etc., due to the volume of the micro-optical component. Microfluidics The volume ratio of the solution, thus determining the micro-optical element forming volume (step 122), and selecting the composition ratio of the microfluidic material to the solvent material (step 123). In addition, the specific diameter of the micro-optical element is proportional to the amount of liquid discharged. The relationship, the proportional relationship is further determined by the specific diameter equal to the constant multiplied by the third of the discharge amount, so that the solution discharge amount can be calculated (step 130), and then the solution is discharged. 'The solution is placed on the substrate (step 14〇), and the stacking is continued to increase the thickness of the final micro-optical element. After the solvent material in the solution evaporates completely 18 1294402, it will cause microfluidics. Curing (step 15〇), the microfluids form a micro-optical element due to curing (step 16G). Similarly, if a micro-optical array element is to be formed, the solution is laid at a predetermined interval when the solution is initially laid. The liquid discharge amount is placed on the substrate such that the micro-optical elements are distributed in an array on the substrate to form a micro-optical array element. Please refer to "Fig. 7A" and "Fig. 7B". The diagram shows the relationship between a plurality of microdroplets stacked on a medium substrate to form microlenses. According to theoretical calculations and experimental results, polyurethane is shown. The solution (15 wt%) solidified microlens diameter width (D) is proportional to the one-third of the number of droplets (N) of the stack (ie, ~Ν)' is the curve 72, which illustrates Using the amount of liquid in the stack, the diameter of the microlens can be controlled and determined. In addition, according to theoretical calculations and experimental results (as shown in Figure 7), the original wet and cured microlenses are used. The diameter width (9) is also proportional to the curve relationship 74, 76 ' with the number of droplets (N) of the stack, respectively. In the curve 74, when the number of droplets is 1, the diameter of the microlens is 91 μm. When the number of droplets in the curve 76 is 1, the diameter of the microlens is 4 μm, which indicates that the evaporation curing process is used, and the liquid amount control of the stack can be determined to determine the microlens diameter before and after curing. Any predetermined micro-optical image can be calculated as a single The desired amount of liquid lens structure laying stacked facilitate achieve large demand for small changes. As shown in the "Figure 8", the polyurethane solution (i5wt%) showed a microlens diameter shrinkage Xd of 9 〇〇/〇 (2004 μm / 2196 μm) before and after curing. ), the high shrinkage ratio & is 50% (6% micron / 1432 micron) 'the process is as shown in the "1A map", in general, the overall volume shrinkage of 19 1294402 size is slightly equal to the volume percentage of the solute solid content . Please refer to "Fig. 9A" and "Fig. 9B". The illustration shows a spin coating of a hydrophobic material of polytetrafluoroethylene on a clean, non-staining glass substrate, and then brewing a solution to make a microlens array. Structure, the experimental results show that in the glass plate: The core 3〇 array lens is made with a diameter of 293 μm ± 8 μm and a buckle contact angle of 65 °, indicating that the circular appearance is homogeneous. Although the present invention has been disclosed in the foregoing embodiments, the present invention is not limited to the spirit and scope of the present invention, and is equivalent to the invention. Within the scope of the special care. [Simple description of the diagram] Figure 1A is a schematic diagram of the basic structure of a single micro-droplet. Figure 1B is another schematic view of the basic structure of a single micro-droplet. Figure 2A is a top view of the appearance of the microlens array. Figure 2B is a side view of the appearance of the microlens array. Figure 3A is a schematic diagram of the conduction of a light beam of a point source in a substrate. Fig. 3B is a schematic diagram showing the conduction of a light beam of a point source in a substrate on which microdroplets are placed. Figure 4 is a diagram showing the conduction of the incident beam in the substrate on which the microdroplets are placed. Fig. 5 Fig. 5A is a schematic view showing the appearance of the micro-optical device fabrication apparatus. Fig. 5B is a diagram showing the operation of placing micro droplets on the micro-optical element manufacturing apparatus. Figure 5C is a diagram showing the operation of the central control unit of the micro-optical element making device (4). 20 1294402 Fig. 6A is a diagram showing the steps of fabricating a micro-optical element by using micro-droplet placement in the present invention. Figure 6B is a diagram showing the implementation of the predetermined concentration of the microfluid of the present invention to prepare a solution. Fig. 7A is a graph comparing experimental results and theoretical calculations for laying a polyurethane solution to make a microlens. Fig. 7B is a graph showing the experimental results and theoretical calculations of the original wet state and solidification of the microlens by laying a polyurethane solution. Figure 8 is a schematic diagram of an experimental process for making microlenses from a polyurethane solution. Fig. 9A is a plan view showing the experimental results of making a microlens array using a polyurethane solution. Fig. 9B is a side view showing the experimental results of making a microlens array using a polyurethane solution. [Main component symbol description] a, b, c....................................... ........cured microdroplet array

Dj................................................. ...........initial i path

Ds................................................. ...........curing diameter Η.................................... ......................... Horizontal direction Η〇........................ ......................................Substrate thickness Η!........ .................................................. .. initial height

Hs................................................. ...........curing height N〇-Ni.................................... ..................Normal 21 2129440

Px................................................. ...........horizontal spacing

Py................................................. ........... Vertical spacing R.................................. ..........................path

Wo................................................ .........interface width wm...................................... ....................curing microdroplet width

Si ' S2............................................... .....interface T........................................... ..................Contact point V................ n3 - ιΐ4 " n5 δ, φ, ω... β................

Vertical direction ray refractive index incident angle angle ε................................................ ..................... folding body stomach degree θ〇....................... .....................................接_胃度 l〇a...... .................................................. .. initial microdroplets

L〇b.............................................. .........Evaporation of micro-droplets l〇c.................................... ......................... Curing microdroplets 20.................... ........................................ wires 34a, 36a, 44a, 46a, 53a , 54a, 54b, 54c, ..., incident light beams 34b, 36b, 44b, 46b, 56a, 56b, 56c........... .... outgoing beam 34c, 36c, 44c, 46c, 53b, 53c......................... reflected beam 41................................................. ............laying space 50.................................. ...........................point light source 22 1294402 51 reflectors 58a, 58b, 58c 60" 62·· 64" 641 66·· 67·· 68" 68a Derived beam micro-optical component making device bottom stage motion platform drive module pylon height measuring device droplet placement micro-droplet

681 682 684 685 69" 70·· 72, 74, 76 Spray hole Spray head Supply module Adjustment module Shadow detector Central control unit Curve

twenty three

Claims (1)

1294402 X. Patent Application Range: L A method for fabricating a micro-optical component is a method of disposing a solution and forming a micro-optical component having a specific diameter, the micro-optical component manufacturing method comprising the step of arranging: providing a surface a substrate subjected to hydrophobic treatment; calculating a predetermined concentration of a microfluid according to a specific radius of curvature to prepare a liquid, a liquid; calculating a liquid discharge amount of the solution according to the specific diameter; and discharging the liquid discharge amount A solution is applied to the substrate to form the micro-optical element. 2. For the method of fabricating the microfilament component as described in the scope of claim 1, the first step of the hydrophobic treatment is to form the water (I) step 1 to form the water I. 3. Silk component manufacturing method, ::: selected as physical vapor deposition method, chemical vapor deposition method "4. The micro-optical component manufacturing method described in the patent application item 2, the water layer thickness is between 100 nm and 1 Between the centimeters and the middle. 5. The micro-optical water layer as described in item 2 of the patent application is optionally selected as a polytetrafluoroethylene, polyvinyl chloride/one of which is one of the sparse. Alcohol and silicone photoresists 6. and II: The method for producing micro-optical elements described in item 〖" is the second; the granule material is an evaporative material. 7. The method for producing a micro-optical element according to the above-mentioned item 6, wherein the solvent material is any one of pure water, methanol, ethanol and ethylene glycol. One of the 8 8. In the method of making the micro-optical element described in the application of the patent, the cough micro-system is optionally poly- _, poly, polyamine, urethane, and: - Jialu Wei, polymethyl methacrylate A, polystyrene and polycarbonate 9. If you apply for a patent Gu Di! The method for fabricating a micro-optical element according to the invention, wherein the step of determining a micro-optical component forming volume according to a T-specific conversion calculation-micro-transfer concentration (four) solution, and selecting the microfluidic The composition ratio of the solvent material. 1) The method for fabricating a micro-optical component according to claim 1, wherein the step of calculating the amount of the liquid discharged by the solution according to the specification is based on the amount of the liquid that is directly supplied to the package- Proportional relationship to calculate. 11. A method of making a micro-optical tree as described in claim 1G, wherein the proportional relationship is determined by multiplying the specific diameter by a constant multiplied by a third of the amount of the discharge liquid. The method for fabricating a micro-optical component according to the first aspect of the invention, wherein the step of disposing the Wei_substrate (10) of the discharge liquid 4 into a wire-receiving component is to continuously stack and stack to increase the final micro-optical component. thickness of. 13. The method of fabricating a micro-optical element according to claim 6, wherein the step of discharging the bath in the liquid discharge to the substrate to form the micro-optical element is to evaporate the material. After the complete microflow, the micro-optical element is formed 25 1294402 pieces. 14. The method of fabricating a micro-optical element according to claim 1, wherein the step of disposing the solution of the discharge liquid onto the substrate to form the micro-optical element is the micro-optical element volume The volume of the solution occupied by the fluid. The method of fabricating a micro-optical element according to claim 1, wherein the pattern of the micro-optical element is optionally one of a geometric shape such as a long strip, a square, a circle, or an ellipse. The method of fabricating the micro-optical element according to claim 1, wherein a '-reflecting element is disposed adjacent to the micro-optical element. 17. The method of fabricating a micro-optical element according to claim 1, wherein the amount of the discharge liquid is placed on the substrate at a predetermined interval, and the micro-optical elements are arranged in an array on the substrate. A micro-optical array element. 18. A micro-optical component fabrication apparatus for depositing a solution onto a substrate to form a micro-optical component of a particular diameter, the micro-optical component fabrication apparatus comprising: a droplet placement device for formulating The solution and the solution are disposed on the substrate; and a central control unit calculates the concentration of the solution and the amount of the liquid to be dispensed according to the specific diameter, and controls the droplet dispenser to prepare the solution of the concentration and deploy the solution A solution of liquid is applied to the substrate to form the micro-optical element of the particular diameter. The micro-optical component manufacturing apparatus according to claim 18, wherein the droplet dispenser further comprises at least one spray head for discharging the solution, and a supply module for preparing the solution concentration. And an adjustment to control the amount of liquid discharged from the solution 26 1294402 Module. The micro-optical element manufacturing apparatus according to claim 19, wherein the lance head is optionally one of a thermal bubble type and a piezoelectric type. The micro-optical element manufacturing apparatus according to claim 18, wherein a height measuring device is further disposed adjacent to the liquid droplet discharging device, and the height measuring device is controlled by the central control unit. The micro-optical component manufacturing apparatus according to claim 18, wherein a photodetector is further disposed adjacent to the droplet discharge device, and the image pickup device is controlled by the central control unit. The camera is configured to analyze and detect the placement of the droplet dispenser and the image result of the micro-optical element.