TWI224210B - Method for fabricating a micro-lens array and fabrication apparatus for the same - Google Patents

Abstract

A method for fabricating a micro-lens array. The method includes the steps of providing a media substrate with a thin film formed thereon. Then, a patterned region with/without thin film is formed by exposing and stripping. Finally, a micro fluid droplet is disposed on the region with/without thin film to form a micro-lens array.

Description

The technical field to which the invention belongs: The Ming system relates to a method for manufacturing microlenses and a manufacturing device thereof, and more particularly to a method for manufacturing microlenses and a microlens array using a microfluid cloth and a manufacturing device therefor. Previous technology: In the field of finished micro-optical components, because optical lenses have the basic function of allowing light, "Ni-Etsu and changing the optical path, they are gradually applied to optoelectronic products such as Shiguangtonghao and digital imaging" . In the above application, when the micro-passive optical element is in the micro-package stage, it is mostly bonded to the main system body by means of adhesive, etc., 14 types of two-pass (two_pass) Packaging practices are often the main cause of manufacturing errors in micro-opto-electric products. Therefore, the present invention provides a one-pass method without the need for lamination, which can directly and accurately fabricate microlenses on a predetermined media substrate. The conventional ink jet-based technology has the ability to control the generation of micro-droplets, and its droplet volume is about 5 pico-liter (abbreviated pi) to 12 pi, which corresponds to The droplet diameter is between 10 // m and 50 / zm. In recent years, such micron-scale fluid generation technology has begun to be used in important fields such as biochips in the biomedical field, color filters for liquid crystal displays in the field of amps, and organic electro-crystals in the field of semiconductors. In terms of the characteristic dimension M (characteristic dimension) of the main active areas of these components, a single wire diameter can be summarized

1224210 V. Description of the invention (2) = Mostly between 10 and 100 ㈣, and the diameter of the wire diameter is not large w ”m, the single width of the characteristic size and the size of the micro-droplet of the current inkjet core technology There is a close relationship, especially the basic principle that the diameter of the droplet cannot be larger than the width of the wire diameter. At the same time, the composition of the micro-droplets is mostly a solvent that can be evaporated (evaporated) at room temperature, so the thickness of the wire diameter is mostly less than 1 micron. When we apply this dimension analysis (dimensionai anaiySis) on the micro lens (jnicro-lens) process, we can find that the half of its characteristic size can be from tens of microns to hundreds of microns, this Basically it falls within the width that can be formed by the diameter of the micro-droplet. Unfortunately, the surface | is not the same in terms of the height of the feature size. For example, for a semi-spherical lens , Its height value (t) can be obtained by the mathematical formula R = [tH (D / 2) 2] / (2t); here, the r value represents its curvature radius, and the D value represents its circle diameter. , The value of this curvature radius r can be determined by the physical relationship f = R / ( n — 1) to obtain; here, the f value represents the focal length of its lens (focal length), and the n value represents its refractive index (refractive index). Therefore, when we use ordinary glass (11 = 1 · 5 ) When a microlens with a focus radius (f) of 45 is to be manufactured, the value of the focus radius R is estimated to be about 2 2 5 // m; then, when the circle radius (D / 2) of this lens is 180 // m At this time, it can be calculated that the height t value will be as high as m. Obviously, the height of this lens is already far greater than the basic principle of the general case less than 1 micron, which causes a major manufacturing problem. US Patent No. 5, 4 3 No. 4, 8 7 6 reveals a manufacturing method based on photo 1 ithography-based technology

0338-10214TW (N1); P08920036; j amngwo. P t d p. 5 1224210 V. Description of the invention (3) Method 'to make a microlens array (micr0_lens array). Although micro-development technology has the advantage of high position accuracy, it has manufacturing restrictions related to exposure energy in terms of coating photoresist height. U.S. Patent No. 5,644,31 discloses an extruding & molding technology, which uses a general optical plastic material (such as ρρ, ρρτ) to make a A micro-lens array sheet. This technology has the advantage of high production ', but there are manufacturing limitations in terms of manufacturing size and accuracy. It is particularly worth noting that the above methods all need to be produced in advance (photomask or mold) for production, which causes difficulties in the elastic change of the microlens position4 and increases the cost. U.S. Patent Nos. 5,498,444 and 5,707,684 disclose methods for manufacturing optical lenses by using inkjet heads, mainly using inkjet technology to manufacture micro-optical elements. However, the disclosed inkjet technology is limited to how to make various shapes of optical elements, but it has not explored how to make precise positioning and systematic methods on a media subrate. At the same time, it ignored the problem of cross-talking in-between drops caused by the narrowing of the distance between adjacent lens droplets when the height of a single lens droplet is much larger than 1 micron. Furthermore, when it is discussed that the liquid of the lens droplet (1 flow) is injected into the surface of the medium substrate in the air, the liquid, solid, and gas phase interfacial lines will eventually reach a contact angle balance State, this physical relationship can be obtained by rLVc〇s (0) = rsv- rLS and △ P ^ pghrLs (i / ri + 1 / r2) of the Young-Laplace equation

1224210 V. Explanation of the invention (4) Calculate; Here, 0 value represents the contact angle of the liquid-solid phase interface line (con tact angle), and rLV, 7SV, rLs values represent the liquid-gas, solid-gas, liquid-solid interface Surface energy, ΔP value represents the pressure difference between the inside and outside of the liquid, P value represents the density of the liquid, 'g value represents the acceleration of gravity, t value represents the maximum height of the liquid, and qh value represents the radius of curvature of the liquid in two directions on the solid surface . It can be found that when a certain value is given, rsv, rLS, the contact angle 0 of the liquid-solid phase interface line can be obtained by calculating the difference; at the same time, 'the curvature radii of the liquid in both directions on the solid surface are exactly the same. (That is, in the circular arc with directional difference, η = r2 = r) and the liquid volume (V), density, and acceleration of gravity are all known, the t value and r value can be further increased by 4 steps from the mathematical relationship V = 7Γ / 6 X [t3 + 3 r21]. The deduction thus far shows that the surface energy properties of the liquid-gas, solid-gas, and liquid-solid interfaces can be used to precisely control the position and molding results of the liquid on the surface of the media substrate. Easy to say 'can be used to make hydrophilic and hydrophobic patterned areas (hydrophi 1 ic or hydrophobic patterning) on the surface of the media substrate according to the desired lens position and size, so that the liquid can be precisely controlled on the specific surface of the media substrate The position and the formation of the shape of the lens object. However, 'the dynamic conditions (f 1 uiddynamics) of the liquid in achieving the equilibrium state of the contact angle must be further considered. When inkjet technology is used to inject liquid, 'microfluids with mass (m) have a speed of movement (v)' before reaching the surface of the medium substrate. This gives the microfluids with inertia momentum (m0mentum of inert ia 'P ) And energy (energy, e); where the value of inertia momentum p can be expressed by the physical relationship p: = mv, and the value of energy E can be φΕ = 1/2 > <

1224210 V. Description of invention (5) to represent kinetic energy. In this way, the momentum change Λρ quality is generated, and Yan 1 is multiplied by the viscosity of the liquid at the 闳 I 14 force (Γ) and the tension of the surface energy of the liquid (σ). ^^ ^ ^ ^ ^ prevent. Due to the microfluidic, the microfluid must pass through the time from micro-second '/ zs to Zhao Fenggu < 丨 mini-second (ms) to reach Bu 、 +, ≫ ν τ is at Τ // / „J 丄 迷 的 Young-Laplace ☆ During this short period of time, the fluid's dynamic contact angle on the surface of the substrate of the contact circle radius (rt) 'Sometimes may be larger than the semi-equilibrium circle half-edge value

Cover-size), sometimes it may be less than static. Take the value of the radius of ten equilibria, the meaning of%. The value of 1 rt —r | / r) can be as high as 25 / G or more, which causes the phenomenon of mutual interference (ci ^ osslklng) between the adjacent lens droplets, resulting in mixed deformation, so no 'reach a predetermined static equilibrium position . It is noted that this basic phenomenon of viscoelasticity (oscillating) micro-liquids oscillating back and forth, will continue until its energy E is directly converted into thermal energy and completely dissipated. After the static equilibrium is reached, this At this time, the liquid must pass through the cooled phase change or swell (volatilize), and further transform into the solid phase, and finally form the desired microlens object. The process of phase change from the liquid to the solid phase (no flow) Time must pass between several seconds and several minutes; in the meantime, although the change in the radius of the circle remains approximately the same, the shape is still changed due to the contact of external and other objects. content

1224210 V. Description of the invention (6) In view of this, the object of the present invention is to provide a method for fabricating microlenses and microlens arrays using microfluidic cloth, which can overcome the major problems discussed above. Based on inkjet technology, and then develop a water-based patterning area that can accurately locate (1 ocal izi ng) micro-droplets. Another object of the present invention is to provide The injection rule of interlaced deposition is used to achieve the desired lens manufacturing. It mainly uses the interlaceci deposition jetting methodology separated from "timing" and "locating"; so, during the above-mentioned static equilibrium, even during the solid phase During the change period, the forming of the liquid of the adjacent lens can ensure that it is normally completed without being affected by the phenomenon of cross-talking. According to the above purpose, a method for manufacturing a microlens includes the following steps: providing a media substrate; forming a thin film on the media substrate; and patterning the thin film 'to form a microlens pattern without a (area) film area in the On the medium substrate; and performing a microfluid distribution step to apply a microfluid to the film-free area to form a microlens object. According to the above object, the present invention also provides a method for manufacturing a microlens, which is suitable for fabricating a lens array in a staggered arrangement, including the following steps: providing a media substrate; forming a thin film on the media substrate; Forming a thin film to form a non-existing (existing) film area with a microlens pattern on the medium substrate; and performing a microfluidic disposing step in a staggered manner to apply a microfluid to the (existing) film area.

1224210 V. Description of the invention (7) According to a preferred embodiment of the present invention, the staggered layout is completed by dividing time into four times and dividing into four regions according to the position, and further includes the following steps: defining a first start Point, for the first time injection, in X and Y direction with twice the pitch p value as the injection pitch, staggered layout, complete the first area microfluidic pattern layout; define a second starting point The second time injection is performed, and Pi is used as the injection interval, and the X and Y directions are staggered to complete the second area microfluid pattern layout. A third starting point is defined to perform the third time injection. , And then use Pl as the injection pitch, and perform parental misalignment in the X and γ directions to complete the third area microfluid pattern layout; and define a fourth starting point, perform the fourth time injection, and then use P1 as The spray booths are spaced 4 times apart, staggered in the X and Y directions to complete the microfluidic pattern layout in the fourth area. Among them, the second starting point is shifted by P in the X and γ directions relative to the first starting point. The third starting point is in the X direction relative to the first starting point Forwarding p 'relative to the first starting point of the fourth transfer starting position in the γ direction P. According to another preferred embodiment of the present invention, the staggered layout is completed by dividing time into two times and dividing the two areas according to the position, and further includes the following steps: defining a first starting point and performing the first time injection. , In the X direction, P1, which is twice the pitch P value, is the injection pitch, and in the γ direction, the P value, which is one-half the pitch, is the injection pitch, staggered to complete the first area microfluid pattern layout; and A second starting point is defined, and the second time injection is performed. In the X direction, P1 is twice the pitch p value as the injection interval, and in the γ direction, the half interval P value is the injection interval. Cloth, complete the micro-fluid pattern layout in the second area; among them, all the injected fluids in the same Y direction are naturally superimposed into a whole to obtain a long cylindrical column array with radians;

〇338 · 1021 Qing (N1); _2_; j am_.ptd 1224210 V. Description of the invention (8) The starting point is shifted by p in the X direction relative to the-starting point position. White, red, and red provide a microlens manufacturing device including: a microfluidic injection unit ^ installed cry filling; a spray injection # 乂 进 仃 microlens material spray injection production; two motion platform, spoon ff The injection unit performs a microfluidic body injection unit including a media-based base, and in cooperation with the microfluidic unit, the IT enters the microfluid's staggered cloth to drive a computer-controlled single-axis platform's motion coordinate position L · to A unit; _ The first 弁 ··, the middle and more include a pulse wave timing system to drive the pulse wave timing unit and the spray, the main; the system is made of early-instantaneous% flash-based light source to control the micro-fluid at any time "" Early; ^ Used for; the inter-coordination-to-ground source control unit turns on the first camera and inspects the microlens results through the second light. According to the above purpose, the present invention further provides a microlens manufacturing process. A microlens grating sheet for producing a stereoscopic image includes the following steps: Provide a media object with a first one. Printed on the first side of the media object, the color image is used; the heating unit is added; dry; color;-the color floor plan II sacrifice your cedar color plane image to hold the color Xin Cheng K, the fluid material is sprayed on the media object The second side of the lens is used to generate a micro-lens array; the first side and the second one-sided image and the micro-transmissive array object are stereo images.

0338-10214TWF (Nl); P08920036; j amngwo. Ptd Page 11 1224210 ^ V. Description of the invention (9) According to the above purpose, the present invention is suitable for the manufacture of micro-fluid cloth with two main lenses =-microlens manufacturing Film, including Γ-type micro-lens for making stereoscopic image ί: forward direction A;-color inkjet print head, Ϊ — media object ink droplet nozzle printed on the medium #, to form a color image: to spray color to The media object with the image printed on it is reversely sprayed into the early stage I, and the microlens fluid material and microlens are generated with a micro-lens array. Pouting to the left of the media object. The following describes the implementation of the present invention in more detail with reference to the drawings and preferred embodiments: Second: The specific implementation technology of the present invention will be described in detail and ... First, a single micro-transmission technique m 1 is proposed, the inventor As shown. The basic structure of the lens is used as the technical basis. For example, refer to Fig. 1 'Providing a media substrate with a surface 2' and a micro lens 3 (micr0_lens), two main objects, of which the micro lens 3 fits in contact with the surface 2 of the medium substrate 1. Here, '明 #' defines the basic structure rule of a single microlens [including the height of the media substrate 1, the refractive index n (refractive index 0f media substrate) of the media substrate, the circle diameter 1 of the microlenses, and The radius of curvature R and the thickness t of the microlenses. If this micro lens is used as an optical lens

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(optical lens), the micro-transparent lens,., .u lens must have the basis to allow light to pass through (transm 11 tance) and change the umbrella plus from + from the slope. • chanSinS 〇f ray path For example, the .n beam will be collimated by a beam of incident parallel light passing through a t UN L y ntJ >. The focal length and focus f value can be welded by the following formula 1 ^. i find it. Seek to pass. Meanwhile, the volume value of the microlens 3 (1) (2) f = R / (n- 1) V = 7t / 6x [t3 + 3r2t] ^ r = D / 2 where R = [t2 + r2] / ( 2t) Further, in this expansion, the basic structure of a plurality of microlenses is proposed as the technical basis, as shown in Figure 2. Referring to FIG. 1, a media substrate and a plurality of microlenses (micr0-lensf including a plurality of main objects such as a microlens 3, a microlens 4, a microlens 5 and the like are provided. Similar to the foregoing, the definition of the second time is clearly defined The basic structural dimensions of multiple microlenses, including the height of the media substrate 1, the refractive index n (refractive index of media substrate) of the media substrate 1, the radius of the circle of the microlens !, the radius of curvature R of the microlens, and the radius of the microlens Thickness t. In addition, the relative positional relationship between the lens arrays still needs to include the value of the center distance p (pitch of lens) between the lenses. Among them, the gap value 6 of the microlens 3 and the microlens 4, and The gap value 7 between the lens 3 and the microlens 5 can be greater than or equal to zero. Therefore, for an expanded array of multiple microlenses, it is necessary to pay attention to the lens array specified by the following formula 3. Relative positional relationship (3) 2 X r + w = p, w ^ 0

0338-10214TW (N1); P08920036; j amngwo. Ptd page 13 1224210 V. Description of the invention (11) For micro-sized objects, the circle radius r value and focal length f of this microlens are mostly defined in the tens of microns To several hundred microns. For example, 'assuming a glass lens (η = 1 · 5) has a circle radius r value of 18 () // 111 and a focal length f value of 4 5 0 vm, this can be calculated using Equation 1 and Equation 2, respectively. The required focus radius R value is about 225 / zm, the height t value is 90em, and the volume V value is estimated to be 4.96 nano-liter (nl). Until this time, the basic definition of a single microlens and a very large number of microlenses was sufficiently complete. Hereafter, the technical methods, processes, and equipment architecture of how to make these microlenses with microfluidics will be explained in detail. patterning deposition step flow. In order to achieve precise positioning of microlenses on the media substrate, the present invention provides the use of micrography (Hthography abbreviation LP) method and microfluid distribution (micr0-fluidic abbreviation MD) to achieve this objective, as described in the section For the production shown in Fig. 3, please refer to Fig. 3. First, a clean and non-polluting media substrate 1 is provided. Then, in step "^, a physical vapor deposition method (PVD) or wet coating is used. Method (wet dep0siti〇n by spin or si i coat ing) to produce a thin film 8 on the front side of the medium substrate}; Generally speaking, the material of the thin film 8 is a hydrophobic photoresist material (photoreS1St, abbreviated PR ), Such as Teflon, polyvinyl chloride (PVC), polyvinyl alcohol (PVA), or stone gum photoresist, the thickness can be between about 10 nanometers and about 1 micron 'then' In step S3-2, a similar mask is used for exposure and development, such as I-line 365 nm / 5mW. On the surface of media substrate 1

0338-10214TW (Nl); P08920036; jamngw.ptd page 14 1224210 V. Description of the invention (12) The desired microlens plane style is obtained. At the same time, the surface of the media substrate 1 is separated into a thin 8a region and a thin film-free region, and a thin film 8a region and a microlens material (for example, polyvinyl butyral resin (0〇17111 ^ 1- 1) 1 ^ 乂 1 ^ 1, 1 ^ 8) / cured particles ({^ 1 ^ 1〇: 11131 ^ Matter), ethylene glycol butyl acetate (prOpy [ene giyc〇 夏 monomethyl ether ace tate, pGMEA)) is sparse, but the interface between the non-film 8b region and the microlens material is affinity, that is, the medium substrate 1 and the microlens material are both hydrophilic or hydrophobic materials. = For example, if the circle radius value of the micro lens plane pattern of the photomask is r and the gap value is W, the width of the area without the film 8b is w and the width of the area with the film 83 is 2x rD. Finally, in step 33-3, micro fluidic depositing is performed on the non-film 8b area to form the desired lens object 3. It is worth noting that the interface between the media substrate and the microlens material in this embodiment is essentially compatible, that is, the media substrate 1 and the microlens material are both hydrophilic or hydrophobic materials. As mentioned earlier, when the lens fluid reaches a static equilibrium (staUc), it will be accurately positioned by natural forces due to the blind (sparse) patterned areas on the surface of the media substrate 1. In addition, the pattern on the third illustration It can be in any shape, depending on the desired microlens style. Figure 4 shows the process of the production method opposite to Figure 3, and reveals another Ϊ ΪΠϊ, which is more suitable for the surface of the substrate 1 and the micro lens. In the case where the material-free double β W ρρ ^ is sparse, for example, the media substrate 1 is co-propylene (PP), polyethylene: alcohol versus stearic acid (㈣㈣ ... ㈣

1224210 V. Description of the invention (13) terephthalate (PET) and other materials. Among them, please refer to FIG. 4. In step S4-1, a thin film 9 is made by the same method as step S 3-1 in FIG. 3. Generally, the material of the thin film is generally hydrophilic. The thickness of the material (for example, 'S i 02, T i 02) can be between about 10 nanometers and about 1 micrometer. Then, in step S 4-2, a photomask with the same microlens pattern is used for exposure imaging and development, for example, irradiation with an I-line 36 5 nm / 5mW mercury lamp light source, so that the medium substrate 1 can be exposed. The desired microlens planar pattern is obtained on the surface. At the same time, the surface of the media substrate 1 is divided into a non-film 9a area and a thin film 9b area, and the non-film 9a area and a microlens material (for example, poly-vinyl butyral, PVB) / Particulate Matter (PM), propylene glycol mono methyl ether acetate (PGME A)) interface is hydrophobic (hydrophobi c) but there is a thin film 9b area and The interface between the microlens materials is affinity. Finally, in step S4-3, micro-fluidic depositing is performed on the area with the thin film 9b to form the desired lens object 3. Once again, as mentioned earlier, when the lens fluid reaches a static equilibrium, it will be due to the media base! Blind (sparse) patterned areas on the surface, resulting in quasi-locations driven by natural forces. In addition, the pattern shown in Figure 4 can be a variety of geometric shapes such as strips, squares, circles, ovals, etc., depending on the desired microlens style. Here, we should pay special attention to the effect of the above-mentioned "patterning (patterning)" method is to limit the desired

0338-10214TWF (Nl); P08920036; jamngwo.ptd page 16 1224210 V. Description of the invention (14)

The circle diameter (D) of the lens; in other words, for a micro-flow droplet ′ of a specific product v to obtain a higher height t value, the above method does not appear to be sufficient for this purpose. On the other hand, many types of microfluids are mainly composed of a solute and a solvent. In general, assuming that the content of the solute component is s, the content of the solvent component is 100% _s. In this case, the size of the microlens's circle diameter (D) will not change, but the final volume of the microlens will be reduced to V x s (or reduced by 100%-s). For example, 'if the microfluid droplets of a certain volume v consist of 60% (ie, s = 60%) of solute polybutyral resin (PVB) and 4% Ten (ie, 100% -s = 40%) of solvent propylene glycol monomethyl ether acetate (PGOMA), the solution formed, the final curing of the formed microlenses The formation volume will be reduced to 60% VX (or 40% reduction). Therefore, in the following, we further expand the micro-fluid deposition in step S4-3 to obtain the adjustment and increase the value of t.

The method is shown in the sectional view of Fig. 5. Please refer to FIG. 5 for a more specific and detailed description of the implementation steps of manufacturing microlenses by multiple droplets (mu 11 i p 1 e drops) and stacking micro-fluidic deposition (abbreviation SMD). First, a first microfluid droplet 5a having a diameter of Φ (volume Υφ is 7 ^ / 6 χ φ3) is sprayed onto a patterned medium (ie, the microlens pattern is a circle diameter D). The surface of the substrate; then, the cloth forming step of step S 5-1 and the curing forming step of step s 5-2

1224210 V. Description of the invention (15) The first layer of the microlens (1st stack., Which is also the bottom layer, bottom ^, its south degree is t (not shown). Similarly, the second microfluid droplet 5b is connected to β It is sprayed in place (the same position as the first microfluid droplet 5a is sprayed); and then the second layer of the microlens is formed after the clothing step of step S5-3 and the curing forming step of step S5-4. (2nd stack, which is also the middle layer (middle =, its degree is Ϊ2 (not shown). Finally, the third microfluid droplet 5c is sprayed in the same place as the first microfluid droplet 5 a and the second microfluid droplet 5 b are sprayed at the same position); then, the third layer of the microlens is completed through the step of laying out step S5-5 and the curing step of step S5-6 (3rd stack 'also (Top stack)), its height is% (not shown). At this moment 'we have also completed a microlens with a circle diameter value D (and circle radius value r), a height value t and a volume value V Obviously, we can get t = + t2 + ts and V = 3 χνΦ: And, here we define the average height of each layer as tave ', then the value of south degree t can also be expressed t = 3 X tave. Looking back at Formula 1, if the circle radius value r (fixed value) is greater than the height value t (ie, r > > ti, t2, and 扒), the height of each layer increases approximately Equal, both are proportional to the volume V of the droplet. In addition, when the volume reduction factor s of the microfluidic droplet in the solidification step is considered, it is further corrected to the height value t = s X 3 X tave and the volume value V = sx 3 χ νΦ. An example is as follows: Polyvinyl butyral resin (0〇1 丫-¥ 111 乂 1-1) 11 7 7 "31,? \ ^) / propylene glycol monobutyl ether (propylene glycol mono methyl ether acetate (PGMEA) optical material solution (where s value is 67%) with a diameter of φ12.

1224210 V. Description of the invention (16) The micro-fluid droplets (volume νφ about 0.95 ni) are sprayed onto the medium substrate surface with a circle radius Γ value of 180; thus, a single-layer cloth can be obtained. The value of the height t is about 17 // in (that is, BU (.905 nl X 2) / (疋 X 18〇X 180 = 17 em). After a total of three layers of laying steps, the height seven value increases to 51 / zm (that is, t = 3 x 17 ^). Considering that the volume reduction factor s of the microfluidic droplets during the solidification step is 67%, the height t value is further corrected to be 34 / zm (that is, t = 67% x 3χ 17 __ _). In this way, we can produce a radius of curvature [^ value is approximately 49 3 # m (that is, R-(34 // mx 34 / zm + 180 // mx 180 // m) / (2x 34 // m) = 493 ym) and the focal length f value is approximately 986 (ie, f = 493 " dm / (l · 5 -1) = 9 86, assuming n = i · 5 ). Therefore, a microfluidic lens manufacturing method including a micro-patterning (LP) method and a microfluidic overlay (SMD) method can be proposed here, as shown in FIG. 6. The method flow is shown. Please refer to Figure 6, first provide a Clean the uncontaminated media substrate i; then, in step S6-1, a physical vapor deposition method (pvD) or wet coating method (wet deposition by spin or slit coating) is made on the front surface of the media substrate 1. Film 8; In general, the material of the film is a hydrophobic photoresist (PR), for example, i (oil), polyvinyl chloride (PVC), and polyethylene glycol ^ Xilong Photoresist, «丨 thickness can be between about 10nm and about! Between micrometers. Then, in step S6-2, a mask with the same microlens pattern is used for exposure and development, for example, irradiation with an I-line 365 nm / 5mW mercury lamp light source.

1224210 V. Description of the invention (17) The desired microlens plane pattern is obtained on the surface of the medium substrate 1. At the same time, the surface of the media substrate 1 is divided into a region with a film 8a and a region without a film 8b, and the region with the film 8a and a microlens material (for example, poly-vinyl-butyral, PVB) / Particulate Matter (PM), propylene glycol mono methyl ether acetate 5 PGMEA) interface is sparse but the interface between the 8b area without film and the microlens material Blindness. For example, if the circle radius value of the micro lens plane pattern of the photomask is r and the gap value is w, then the width of the area without the film 8b is w and the width of the area with the film 8a is 2xr = D. Finally, in step S6-3, micro-fluidic depositing is performed on the hidden area of the non-film 8b to form a desired first-layer coating 6a. It is worth noting that the interface between the media substrate 1 and the microlens material in this embodiment is essentially a blind date, that is, the media substrate 1 and the microlens material are both hydrophilic or hydrophobic materials. As mentioned earlier, when the lens fluid reaches a static equilibrium, it will be accurately positioned due to natural forces due to the intimate (sparse) patterned areas on the surface of the media substrate i. Finally, in step S6-4, we use the microfluidic superposition (SMD) method, and then inject the microfluid droplets 5b and 5c in sequence to form the desired second layer 6b and the second layer Three layers are covered with 6c, as previously described; thus, in step S6-5, the desired microlens can be obtained. In addition, the patterns shown in Fig. 6 can be various geometric shapes such as strips, squares, circles, ovals, and so on, depending on the desired microlens style. Similarly, Figure 7 reveals another micro-development method, which is more suitable for taboos.

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V. Description of the invention (18) In the case where the interface between the surface of the media substrate 1 and the microlens material is sparse in nature, for example, the manufacturing process of materials such as PP and PET. Please refer to FIG. 7. In the first step (step 1), the same step S7-1 as that in step 3 of FIG. 3 is used to make a thin film 9. Generally speaking, the material of the thin film is generally The thickness of the hydrophilic material (for example, S i 〇2, τ i 〇2) can be between about 10 nanometers and about 1 micron. Then, in step 3_2, a mask with the same microlens pattern is used for exposure imaging and development, for example, irradiation with an I-line 3 6 5 nm / 5mW mercury lamp light source, so that it can be exposed on the media substrate. The surface of 1 is obtained from the desired microlens plane pattern. At the same time, the surface of the media substrate 1 is separated into a thin film-free region 9a and a thin film gb region, and the thin film-free region 9a and the microlens material (for example, polyvinyl butyral tree)

Matter (PM), prOpylene glyco1 mono methyl ether acetate (PGMEA)) is compatible with the interface but there is a thin layer between the 9b region of the film and the microlens material . Finally, in step S7-3, the microfluidic 5a is coated (micro-fluidic deposi ting) on the area of the thin film 9b to form a desired first-layer coating 7a. It is noted that the medium substrate 1 and the microlens material of this embodiment are inherently different. Once again, as mentioned previously, when the lens fluid reaches a static equilibrium, it will be accurately positioned by natural forces due to the intimate (sparse) patterned areas on the surface of the media substrate 1. Finally, in step S7-4, we use the microfluidic overlay (SMD) method, and then inject the microfluid droplets 5b and 5c in order to form the desired second layer of spread 7b and third. Layer 7c, as previously described; so, in step

0338-10214TWF (Nl); P08920036; jamngwo.ptd page 21 1224210

The desired micro lens can be obtained in step S7 5. In addition, the patterns shown in Figure 7 can be various geometric shapes such as strips, squares, circles, ovals, etc., depending on the desired microlens style. Here, it is worth mentioning that in the above-mentioned embodiments of FIG. 5, FIG. 6, and FIG. 7, the number of superimposed layers of the microfluidic superposition (SMD) method is not limited to two. In the most common possibility, the number of superimposed layers is an integer m, and the number of superimposed layers is the height of the fluid. The number of superimposed layers is also approximately m ❿ ^ 2). So far, the present invention discloses a microfluid manufacturing method of LP plus MD or LP plus SMD, which can be applied to a single microlens and multiple microlens arrays. In addition, we must further consider the tragic situation of the liquid when it reaches the equilibrium angle state (f 1 u i d dynam i cs). When inkjet-based technology is used to inject liquid, the microfluid fired by the droplet actuator has inertia and momentum, and therefore provides micro-droplets in the Sin or SMD steps have the ability to expand (Sprea (jing)). However, this microfluidic may have to go from tens of microseconds (// s) to tens of milliseconds (ms) from the expansion to the static equilibrium. In this short period of time, the instantaneous dynamic contact circle radius rt on the surface of the medium substrate 1 may be larger than the static equilibrium circle radius r value. However, this variation value (Ar / r: | rt-r | / r) may It is as high as ❿ 2 5% or more. On this occasion, when reviewing the relative positional relationship of the lens array shown in Equation 3, it clearly specifies the given lens circle radius r value, distance p value, and gap w value. If the difference between the contact circle radius q and the equilibrium circle radius r at a certain moment is greater than the gap w, that is, twice the circle radius dagger

1224210 V. Description of the invention (20) is larger than the p value of the distance. In this case, cross talk may occur between adjacent lens droplets and cause mixed deformation, so the predetermined static equilibrium position cannot be achieved. Therefore, the present invention proposes a jetting methodology using interlaced deposition (ID) separated by “time” and “locating”, as described in detail below. Fig. 8 illustrates an injection law of interlaced depositon (ID). First, imagine a microlens array that satisfies the relative positional relationship of Formula 3 above, that is, it meets the size requirements of the circle radius Γ value, the distance p value, and the gap w value of each lens. Therefore, “timing” will be completed in four times and “location” will be divided into four areas. At the time of the first injection, define a first starting point and use Pl twice as the interval p value as the injection interval (both in the X and γ directions), and then complete the (A) Ist microfluidic pattern 1 〇 cloth; then at the second injection time, in the "locating" transfer distance p2 (both in X and Y directions), define a second starting point and double the distance p value Pl is the injection pitch (both in the X and Y directions), and then the (B) 2nd microfluidic pattern 11 is laid out. Among them, the value of the lens distance ^^ between pattern 10 and pattern 增加 is increased to 0.828r + 1.414w (that is, (and x (4r + 2w) -4 factory) / 2 = (and -l) X2r + V ^ Wi «0.828r + 1.414w). In this case, even if the distance W is set to zero, the instantaneous dynamic contact circle radius rt between any two adjacent lens droplets can allow a circle lens radius r value of up to 82%, so as to avoid mutual interference (cr 0 ssta 1 king) and mixed deformation. phase

0338-10214TWF (N1); P08920036; jamngwo.ptd Page 23 1224210 V. Description of the invention (21) At the same time, continue to shift the distance P2 in terms of "position (10cating)" at the same time as the third injection. (X direction), define a third starting point and use p! Twice the pitch p value as the injection pitch (both in X and γ directions), and complete the result of (C) 3rd pattern 12 layout. And, at the fourth injection time, the pitch P2 (in the γ direction) is shifted in terms of "locating", a fourth starting point is defined, and Pl, which is twice the pitch p value, is the injection pitch (X The same is true for both directions of γ and γ) 'Completed (D) 4th pattern 13 results. The result, 'between the two subsequent injections, was clearly completely consistent with the previous two without interference. Of course, it should be further pointed out that between each spray pattern layout, a drying time can be allowed to further reduce the possibility of mixed deformation caused by mutual interference. In particular, between the third completion (c) 3rd pattern 12 and pattern 11 and between the fourth completion (D) 4th pattern 丨 3 and pattern 12. ', Of course', it must be particularly emphasized that the above embodiment is not limited to the four-time interlaced layout, but the four-time interlaced layout is preferred; for example, as described above, it can also be universally extended "Timing" to 9 times, 16 times, 25 times ......... or K2 times (for example, K is 2, 3, 4, 5, etc.), and cooperate with each other to separate "position ( "locating)" is 9 times, 16 times, 25 times ... or K2 times (for example, K is 2, 3, 4, 5, etc.). Or in addition to the above, it can be extended to the most generalized 5 times, 6 times, 7 times, or j times (J is a continuation_integer). It is particularly emphasized here that the more the interlacing between "timing" and "locating" is, the more it can ensure that there is no mutual interference. However, it will take more time. Here comes the complete spray pattern.

1224210 V. Description of the invention (22) In addition to the above-mentioned lens arrays, the present invention provides another applicable one; the staggered spraying rule of long lens arrays, as shown in Figure 9: Lu first, again It is assumed that the micro-transparency '歹 that satisfies the relative positional relationship of the above formula 3, that is, the radius r value, the distance P value, and the gap 付 / "size requirements of each lens circle radius are combined. Therefore," timing "will be completed in two times. "Locatlng" is staggered into two areas. In the first spraying, the first starting point is defined, and spraying is performed at a pitch twice as long as the value of 13 and the distance between the directions', and then the (A) Ist microfluidic pattern is distributed. It is noted that what is desired at this moment is an arc-shaped long cylinder (cylender), so the SMD method must be applied to the king of the P value at a half pitch in the γ direction.卩 Inject fluid to overlap (〇verlap t〇 托 naturally become one. However, continue to complete the microfluidic drying of (B) until the static equilibrium position pattern 15 is distributed, it may have to experience about tens of microseconds (" s ) To several tens of milliseconds (ms). At the second injection time, the pitch P2 is shifted in the X direction of the "position (IOcating)", and the injection pitch in the X direction is twice the pitch h. Then, the same steps as above are applied to the SMD method to overlap to merge all the injection fluids with a half pitch P value in the γ direction to complete the microfluidic pattern 16 of (C) 2. Finally, After the microfluid of (j)) is dried again to the static equilibrium position pattern, the cloth is distributed. In this way, the entire injection pattern is completed to obtain a long lens array. In the above embodiments, the microfluidic superimposed distribution (SMD) method is not limited to superimposing the entire fluid by injecting the fluid in the Y direction at a half pitch ρ value (0verUp t0 Torr; ^ .... In the general possibility, the entire injection fluid in the Y direction at an integer m interval of ρ overlaps (t (m ^ 2)).

1224210 V. Description of the invention (23) Of course, it must be particularly emphasized that the above embodiment does not use the second interlaced arrangement as a pretext, but the second interlaced arrangement is preferred; for example, as described above, it also The "timing" can be universally extended to 4 times, 8 times, ......... For example, L is 2, 3, 4, etc.), and cooperate to relatively The division "location (10cating)" is 4 times, 8 times, people, or 2 times (for example, L is 2, 3, 4, etc.). Or in addition to the above, it can be expanded / expanded to the most general 3 times, 5 times, 6 times, or 1 time (ι is a positive number). It is particularly emphasized here that the more the interlacing between "timing" and "locating" is, the more it can ensure that no mutual interference occurs; however, it will relatively require more comprehensive Spray pattern. In order to carry out the above-mentioned microfluidic coating (MD) method or superimposed coating method, the present invention is performed by using the following injection equipment structure, as shown in the figure. This injection equipment architecture has previously included a _γ motion platform (χγ 2 = 2 18 / t which can be controlled by a computer control unit (PC) 19 to control the stage driver 2 through a drive to move its coordinate position ( For example, χ, Y) and 1: control unit! 9 can be generated by contacting the injection control unit (head to start the microfluid injection unit (jet head) 24 into n = r]:? Piet) 29. In order to Understand whether the spray of u is detected: it is normal or not, the above-mentioned computer control unit 19 can be driven by contacting a pulse t-time unit 22-flashing light source control driver) 23 (: to control the first light source 23,) and injection The control unit 2m, and by time ^-due to-the first camera (came-time microfluidics 29. It is noted that the first-photography secretary can best

1224210 V. Description of the invention (24) Adjust the Z direction and the 0 direction of the angle to view the microfluidic results at different positions. In addition, in order to understand whether the microlens forming 30 of the microfluid injection onto the surface of the medium substrate 1 is normal, the device architecture preferably has a second camera 25 that controls a pre-light source 27 through a second light source to turn on a second light source 26 to Monitor the microlens forming 30 results. Of course, it is better that the second camera 25 can also adjust the Z direction and the angle 0 direction to view the microfluidic results at different positions. In this way, “the injection device architecture can be used to implement the implementation of microfluidic distribution” and the in-situ monitoring and inspection of microfluid injection and lens formation results are completed. Of course, the structure of the injection equipment of the present invention is not limited to this. If the structure of the injection equipment does not include the aforementioned camera and other parts, the participants can still complete the above-mentioned processes of the MD method and the SMD method. However, the injection device architecture is based on the above-mentioned camera and other parts for online detection as / excellent. 0 The farmer's process method of the present invention can also be used for the implementation of today's stereoscopic images; that is, using the above microfluidic cloth ( MD) method or superimposed cloth only (SMD) method is used to produce the lenticular lens sheet of current stereoscopic images, as shown in Fig. U. First, the printing system architecture includes a set of feed front wheels 32. Next, a predetermined media object 31 is introduced in the forward direction 33. Then, a color ink droplet 35 is sprayed onto the media object 31 using a color inkjet print head unit (c 〇 〇 r i m a g e jet-heads) 34 to form a color flat image 37. At this time, in order to accelerate the drying of the color flat image 37, it is better to use a heat dryer 36 to quickly dry it to hold the image. Then, using a reverse roller (reverse rOHer) 38, this

1224210 V. Description of the invention (25) A micro-lens generates a micro-sheet) The system will have the 3rd and 4th processes of injecting the micro-transmission feed roller by removing the LP method to adjust to ensure that there are no media objects printed with images The surface is reversed downward; then, the microlens fluid material 40 is injected by using the injection unit 39 to produce a lens array 41 ', which is a lenticular image with a lenticular lens (ienticuia) and iens. . Finally, the original lens object with a lenticular lens sheet in the direction 42 is handed over the grating sheet, and the entire manufacturing process is completed. Note that 'the above-mentioned media object 31 can be patterned in a specific area by using the previous one first. So Then the mirror array 41 can be accurately positioned in the future; in other words, the LP process has been completed before the media object 31 enters (feed rolle 32) (see the previous figure). In addition, this injection process can use the above MD or ⑽! The problem of increasing the height of the microlenses, and using the ID method to stagger adjacent fluids to interfere with each other arises. [Features and Effects of the Case] The features and effects of the present invention reside in the present invention. Provide a one-pass method without further bonding, which can directly and accurately make micro lenses on a predetermined media substrate. Based on inkjet technology, then develop a method that can accurately Local i zing water droplet patterning of local droplets. In addition, the present invention achieves the desired lens manufacturing by the injection rule of interlaced depositon. Forming: Interlaced deposition, which is separated from "timing" and "locating", is mainly used.

0338-10214TW (Nl); P08920036; j amngwo. P t d p. 28 ^ 224210 V. Description of the invention (26)

Getting methodology); In this way, during the above-mentioned static equilibrium period, even during the solid phase change, the cracking of adjacent lens liquids can be normally completed without being affected by the phenomenon of mutual interference (crossing). There are also 'implementation steps for making the lens using multiple droplets (mu 11 ip 1 e dr ops) and stacking micr〇_fluidic depοsitic n, j write SMD) method, Repeat the microfluidic cloth = step, and continue to stack to increase the thickness limit of the final lens object on the media substrate; i hair: the Yuejia embodiment is disclosed as above, but it is not used as a god and a fan. Defined by the scope of patent application attached to the following: J. The scope of protection of the present invention

1224210

The first circle system shows the basic structure of a single micro lens according to the present invention as the technical basis; the second circle system shows the basic structure of a plurality of micro lenses according to the present invention as the technical basis; the third circle system shows this The invention uses the micro-patterning (LP) method and the microfluidic deposition (abbreviation MD) method to make micro-lenses; Figure 4 shows the opposite of Figure 3 of the present invention. Implementation steps; FIG. $ Shows the implementation steps of the present invention to make microlenses by multiple droplets (mu 11 ip 1 e drops) and stacking micro-fluidic deposition (SMD); FIG. 6 shows Shown is a micro-development method of the present invention, which is more suitable for the case where the interface between the surface of the media substrate 1 and the micro-lens material is essentially hydrophi 1 ic; FIG. 7 is a view showing another micro-development according to FIG. 7 of the present invention. Method, which is more suitable for the case where the interface between the surface of the medium substrate 1 and the microlens material is essentially hydrophobic (ic); FIG. 8 shows a staggered layout of the present invention. interlaced deposition (ID); Figure 9 shows the present invention provides another spraying rule suitable for staggered arrays of long lens arrays; Figure 10 shows the microfluidic layout of the present invention (MD) method or superimposed distribution (SMD) method of the injection equipment architecture; and FIG. 11 shows the present invention using the microfluidic (MD) method or superimposed distribution

0338-10214TW (Nl); P08920036; jamngwo.ptd Page 30 1224210 The figure briefly explains the (SMD) method to implement the current lenticular lens sheet of stereo images and the implementation steps and devices. [Description of symbols] 1 ~ media substrate; 2 ~ surface; 3 ~ microlenses; Η ~ height of medium substrate 1; η ~ refractive index of medium substrate 1; D ~ circle diameter of microlenses; R ~ curvature radius of microlenses T ~ thickness of microlens; P ~ center distance between lenses; r ~ circle radius of microlens; 6 ~ gap value of microlens 3 and microlens 4; 7 ~ gap of microlens 3 and microlens 5 Values: 8, 9 ~ thin film; 8a, 9b ~ with thin film area; 8b, 9a ~ no thin film area; Φ ~ diameter of micro-droplet; 5 a, 5 b, 5 c ~ first, second, third micro flow Liquid droplets; 6a, 6b, 6c ~ first, second, and third layers of microfluids; 7a, 7b, 7c ~ first, second, and third layers of microfluids;

0338-10214TW (N1); P08920036; j amngwo. P t d p. 31 1224210 Schematic description

Pi ~ double the pitch p value; P2 ~ transfer pitch; 1 0, 11, 1 2, 1 3 ~ staggered spray pattern; 14, 15, 16, 17 ~ staggered spray pattern; 1 9 ~ Computer control unit; 20 ~ drive control unit; 2 injection control unit; 2 2 ~ pulse timing unit; 2 3 ~ flash frequency light source control; 2 3 '~ first light source; _ 2 4 ~ injection unit; 2 5 ~ second camera; 2 6 ~ second light source; 2 7 ~ second light source control unit; 2 8 ~ first camera; 2 9 ~ micro-droplet; 3 0 ~ micro lens forming; 3 1 ~ medium object; 32 ~ feed front wheel; 3 3 ~ forward direction; 3 4 ~ color inkjet print head unit; 3 5 ~ color ink drop; 36 ~ heating unit; 37 ~ color flat image;

0338-10214TW (N1); P08920036; j amngwo. Ptd page 32 1224210 Brief description of the drawing 3 8 ~ reverse roller; 39 ~ microlens injection unit; 40 ~ microlens fluid material; 41 ~ microlens array; 42 ~ moving direction 42; 5 3-1 ~ 3 ~ implementation steps; S 4 -1 ~ 3 ~ implementation steps; S 5-1 ~ 6 ~ implementation steps; 56-: 1 ~ 5 ~ implementation steps; 57-: l ~ 5 ~ Implementation steps. ❶

0338-10214TWF (N1); P08920036; j amngwo.ptd page 33

Claims (1)

6. Scope of Patent Application 1. A producer of a microlens provides a media substrate; includes the following steps: forming a film on the media substrate; patterning the film to form a film once it is on the media substrate; and / The thin film-free area of the lens pattern distributes the microfluid to the thin-film-free area, and performs the microfluid distribution step field to form a micro-lens object. Blindness. Wherein the film material has a sparse microlens manufacturing method, such as the scope of patent application 篦 q Hall where the film material is Teflon (Tefl's microlens manufacturing method 'Ethyl alcohol (m) cut glue photoresist dragon (TefUn), Ju Qi Yi Qing), Ju Ju Zhong 5, =: Lee? The method for making a microlens as described in item 1, wherein the thickness of the film material is between 10 nanometers and 1 micrometer. The method for manufacturing a microlens described in item 1 of the patent scope ', the medium δHW system includes a lens material. 7. The method for manufacturing a microlens as described in item 6 of the scope of the patent application, wherein the microlens material is poly-vinyl-butyral (PVB) / particulate Matter (PM), acetic acid Ethylene glycol butyl ether vinegar (prOpylene glyco1 mono methyl ether acetate (PGMEA)) ° 8 · The method for making microlenses as described in item 1 of the scope of patent application, 1224210 The static diameter of the microfluid disposed on the surface of the medium substrate is substantially equal to the diameter size of the film region. 9. The method of making a microlens as described in item 丨 of the patent application scope, which further includes repeatedly performing the micro The fluid distribution step is continuously stacked to increase the thickness of the final lens object on the medium substrate. Among them, the value of the superimposed layer is an integer, and the number of superimposed layers of the fluid distribution height is also approximately "2" 〇1 〇 -A method for manufacturing a microlens, including the following steps: providing a media substrate; forming a film on the media substrate; patterning the film on the media substrate; forming a film region with a microlens pattern and performing The microfluid distribution step is to apply a microfluid to the thin film area to form a microlens object. 11. The method for manufacturing a microlens as described in item 10 of the patent application scope, wherein the medium substrate The nature of the interface with the microlens material is sparse. 12. The method for making a microlens as described in item 10 of the scope of patent application, wherein the film material Materials with hydrophilic properties 13. The method for making a microlens as described in item 12 of the scope of the patent application, wherein the thin film material is Si02 or D102. 14. As the place of the patent scope 10 The manufacturing method of the microlens described above, wherein the thickness of the film material is between 10 meters and 1 micron. 15. The manufacturing method of the microlens as described in item 10 of the scope of patent application 1224210 VI. Scope of Patent Application Method 'wherein the microfluidic system includes a lens material. 16. The method for manufacturing a microlens as described in item 15 of the scope of the patent application, wherein the microlens material is polyvinyl butyral (PVB) / Particulate Matter (PM) 1, ethylene glycol butyl ether acetate (pr0pyiene glyc〇1 monomethyl ether acetate (PGMEA). 17. The method for making a microlens as described in item 10 of the scope of the patent application, wherein the diameter of the static fluid on the surface of the substrate of the microfluid is substantially equal to the diameter of the non-film region. Jade ', 18. The method for making a microlens as described in item 10 of the scope of patent application, which further includes repeating the microfluid laying step to increase the thickness of the final lens object on the medium substrate; The layer value is an integer m, which is the height of the fluid distribution layer and the number of layers is approximately plus / m (m 22). . Ling Ma 19. A method for manufacturing a microlens, suitable for fabricating a lens array in a staggered pattern, including the following steps: providing a medium substrate; forming a thin film on the medium substrate; Patterning the film to form a microlens pattern on the media substrate; and one of the tea-free areas of the tea is subjected to a microfluid coating step in a staggered pattern, & ′ A microfluidic cloth 20 · The micro method as described in item 19 of the scope of application for a patent, wherein the interface between the media substrate and the micro lens material lens 4 is essentially a blind date 0338-10214TWF (N1); P08920036; j amngwo.p t d 1224210 6. Scope of Patent Application 21. The method of making a microlens as described in item 19 of the scope of patent application, wherein the film material is hydrophobic. 22. The method for manufacturing a microlens as described in item 21 of the scope of the patent application, wherein the film material is Teflon, polyvinyl chloride (PVC), polyvinyl alcohol (pVA), or silicon photoresist. 23. The method for manufacturing a microlens as described in item 19 of the scope of the patent application, wherein the thickness of the film material is between tens of nanometers and 1 micrometer. 24. The method of making a microlens as described in item 19 of the scope of the patent application, wherein the microfluidic system includes a lens material. 25. The method for manufacturing a microlens as described in item 24 of the scope of the patent application, wherein the microlens material is a polyvinyl butyric resin (PVB) / cured particulate (Particulate Matter) 'PM), propylene glycoi mono methyl ether acetate (PGMEA) o 26. The method for manufacturing a microlens as described in item i 9 of the scope of patent application, wherein the lens array has each Lens circle radius r value, pitch p value, and gap w value. 2 7 · The manufacturing method of the microlens as described in item 26 of the scope of the patent application, wherein the staggered arrangement is divided into four times in time and is completed in accordance with the four areas of the position, and further includes the following steps: At a starting point, the first time injection is performed, and in the X and γ directions, Pi which is twice the pitch p value is used as the injection interval, and the interlacing is performed to complete the first area microfluidic pattern deployment; 1224210 VI. Scope of patent application ------- 'I. Define a second starting point, perform the second time injection, and then use P1 as the injection interval to stagger in the X and γ directions to complete the second area Microfluid pattern layout; Yes, define a third starting point, perform the third time injection, and then use P1 as the injection pitch, staggered in the X and Y directions to complete the third area microfluid pattern layout ; And Yiyi a fourth starting point, the fourth time injection, and then Pi as the injection pitch, staggered in the X and γ directions to complete the fourth area microfluidic pattern layout; Wherein, the second starting point is shifted in the X and γ directions relative to the first starting point position P ′, the third starting point is shifted in the X direction relative to the first starting point position P, and the fourth starting point is relative to the first _ The starting position is shifted by p in the γ direction. 2 8 · The manufacturing method of the microlens as described in the 2nd item of the scope of the patent application 'wherein the staggered pattern is divided into K2 times in time and the K2 area is divided according to the position; where κ is equal to 2, 3, 4 , 5 or integer. 2 9 · The manufacturing method of microlenses as described in item 27 of the scope of the patent application, wherein the staggered pattern is divided into J times in time and is divided into J regions with the position; where j is 5, 6, 7 or integer. 30. The method for making a microlens as described in item 27 of the scope of patent application, which further includes repeating the microfluidic step and continuously stacking to increase the thickness of the final lens object on the medium substrate; wherein, it is superimposed The layer value is an integer m, which is the height of the fluid cloth. The number of superimposed layers is also approximately m (m-2). 31. The method of making the microlens described in item 26 of the scope of patent application 0338-10214TWF (N1); P08920036; j amngwo.ptd Page 38 1224210 6. Application for Patent Scope Method, where the staggered layout is divided into two areas in time and coordinated with the location to divide the two areas, and includes the following steps: A first starting point is defined, and the first time injection is performed. Pi is twice the pitch P value in the X direction as the injection pitch, and half the pitch P value in the γ direction is the injection pitch. To complete the layout of the microfluidic pattern in the first area; and define a second starting point for the second time injection, with Pi twice the pitch p value in the X direction as the injection interval and two in the Y direction. The p-value of one-half interval is the injection interval, which is staggered to complete the layout of the microfluidic pattern in the second region. Among them, all the injection fluids in the same Y direction are naturally superimposed into φ to obtain a radian. A long round mirror row; wherein the second starting point is shifted in the X direction relative to the first starting point position P 032 · The method for manufacturing a microlens as described in item 31 of the patent application scope, wherein the staggering The layout is divided into 2 by time It is done L times and divided into 2L regions according to the position; L is equal to 2, 3, 4, or an integer. 33. The method of making a microlens as described in item 31 of the scope of the patent application, wherein the staggered arrangement is completed by dividing time into 1 and matching the position to divide the I area; where I is equal to 3, 5, 6, or Integer. 34. The method for making a microlens as described in item 31 of the scope of the patent application, in which the Y direction is an integer p between an integer m and the injection interval, and the microfluid distribution step is repeated, continuously Stacked to increase the thickness of the final lens object on the media substrate; of which, 35 · —a method of making microlenses, is suitable for the method of parental staggering 0338- 10214TWF (N1); P08920036; j amngwo. Ptd page 39 1224210 6. The scope of the patent application for making a lens array includes the following steps: providing a media substrate; forming a film on the media substrate; patterning the film to form a micro lens pattern on the media substrate; and, The microfluid distribution step is performed in a staggered pattern, and a thin body is spread on the filmed area to form a microlens array object. μ 36 · The manufacturer of the microlens as described in item 35 of the scope of patent application The method in which the interface between the media substrate and the microlens material is essentially sparse. 0 · 37 · The method for making a microlens as described in item 35 of the patent application scope, wherein the film material is a hydrophilic material . 38. The method for manufacturing a microlens as described in item 37 of the scope of patent application, wherein the thin film material is Si02 or Ding 02. 39. The method for manufacturing a microlens as described in item 35 of the scope of patent application, wherein the thickness of the thin film material is between 0 nm and 1 micron. 40. The method of making a microlens as described in claim 35, wherein the microfluidic system includes a lens material. 4 1 · The method for manufacturing a microlens as described in item 40 of the scope of the patent application, wherein the microlens material is a poly-vinyl butyral (PVB) / Particulate Matter (PM) Propylene glyceoi mono methyl ether acetate (PGMEA) ° 4 2 · The method of making microlenses as described in the 35th item of the patent application scope 0338-10214TWF (N1); P08920036; j amngwo.ptd page 40 1224210 VI. Patent Application Method ′ Wherein the lens array has the size of each lens circle radius Γ value, pitch p value, and gap w value. 4 3 · The method of making microlenses as described in item 42 of the scope of the patent application, wherein the staggered pattern is divided into four times and divided into four areas in accordance with the position, and further includes the following steps: At the starting point, the first time injection is performed, and in the X and γ directions, Pl, which is twice the pitch P value, is used as the injection pitch, and the interlaced layout is completed to complete the first area microfluidic pattern layout; define a second start Point, perform the second time injection, and then use P1 as the spray / main distance, staggered in the X and γ directions to complete the second area microfluidic pain I pattern layout; define a third starting point, and proceed to the first Three-time injection, and then use Pa as the injection interval, staggered in the X and Y directions to complete the micro-fluid pattern layout in the third area; and define a fourth starting point, perform the fourth time injection, and then Using P1 as the injection pitch, staggered the distribution in the X and Y directions to complete the microfluidic pattern layout in the fourth region; where the second starting point is shifted by P in the X and γ directions relative to the first starting point position, The third starting point is located relative to the first starting point at Transferring direction P, the fourth starting position relative to the first starting point p in the transfer direction γ. 44. The method of making a microlens as described in item 43 of the scope of the patent application, wherein the delta-height method is divided into π times and divided into κ2 regions in accordance with the position; where κ is equal to 2, 3, and 4 , 5 or integer ^. 45 · The manufacturer of the microlens as described in item 43 of the scope of patent application 0338-10214TWF (N1); P08920036; j amngwo.ptd Page 41 1224210 VI. Application for Patent Scope Method, where the staggered layout is divided into J times with time and J area is coordinated with position; where j equals 5 , 6, 7, or integer. 4 6 · The method of making a microlens as described in item 43 of the scope of the patent application, which further includes repeating the microfluid laying step and continuously stacking to increase the thickness of the final lens object on the medium substrate; The value of the superimposed layer is an integer m, which means that the height of the superimposed layer is approximately m (m-2). 4 7 · The manufacturing method of microlenses as described in item 42 of the scope of patent application, wherein the staggered arrangement is completed by dividing time into two and matching the position with two areas, and further includes the following steps: Starting point, the first time injection is performed. Pi is twice the pitch p value in the X direction as the injection pitch, and half the pitch p value in the Y direction is the injection pitch. An area of microfluidic pattern is laid out; and a second starting point is defined, and the second time injection is performed, with Pi twice the pitch p value as the injection interval in the X direction and a half interval in the γ direction. The P value is the jetting pitch, staggered to complete the microfluidic pattern layout in the first area; among them, all jetting fluids in the same Y direction are naturally superimposed into a whole to obtain a long round mirror. Column; wherein, the second starting point is shifted in the X direction relative to the position of the first starting point by P 〇 48. The method of making a microlens as described in item 47 of the patent application scope, wherein the staggered arrangement is divided by time Divide 2L times and match position 2 L region to complete; where L equals 2, 3, 4, or an integer. 0338-10214TWF (N1); P08920036; j amngwo. Ptd Page 42 1224210 VI. Application for patent scope 49 · Method of making microlenses as described in Item 47 of the scope of patent application 'where the interlaced arrangement is divided into This is done once and divided into I regions with the location; where 1 is equal to 3, 5, 6, or an integer. 50. The micro lens 微 manufacturing method described in item 47 of the scope of the patent application 'where the Y direction is an integer m-pitch p value is the injection pitch, repeat the microfluid deployment step, and continue stacking to increase the final lens The thickness of the object on the edge media substrate; where 2. 51 · A microlens manufacturing device comprising: a microfluid injection unit for injecting microlens material; an injection control unit for controlling the injection of microfluid by the injection unit;押 —a motion platform, including a media-based base, which cooperates with the microfluid injection unit to move the microfluids staggered; and a drive control unit for controlling the position of the motion target of the motion platform; and A computer control unit is used to contact the injection control unit and the motion control unit. w 5 2 · A microlens manufacturing and producing device as described in item 51 of the scope of patent application, further comprising: a pulse wave timing unit; a first light source; a flashing light source control for controlling the first A light source; a first camera, in cooperation with the computer control unit ^ the flash source control drives the pulse timing unit and the injection unit to protect 0338-10214TWF (N1); P08920036; j amngwo.pt d p. 43 1224210 VI. The scope of the patent application can be used to view the microfluid at any time; a second light source; a d :: binary system for controlling The second light source; and the camera / camera 'inspecting the microlens result through the checked out light source. A λ, the control unit turns on the second 53. A method for making a microlens, which is suitable for a microlens grating, including the following steps. A three-dimensional image is provided to provide a media object with a first surface. Color inkjet droplets are printed on the side of the rich man's heart,-a color plane image, · a medium, the first side of the object to form a dry color plane image accelerated by a heating unit, and yttrium. The cedar image is used to hold the color micro-lens fluid material to produce a micro-lens array; the medium, the second side of the piece, a color plane image and the micro-lens array Rasters of the color image are printed on the surfaces, respectively. ^ Column «Medium object is a stereoscopic lens 54 · ——manufacturing of a kind of micro lens ^ 彳 方 胂 制 你 fr & 丹 > You and Me Set'Suitable for the use of micro-fluid cloth spraying clothes for three-dimensional scenes M The micro _ bred a set of feed rollers, used to introduce the cat h I straw; one of the media objects in the forward direction a color inkjet print head to separate the media objects to form a color flat and use A color inkjet droplet is printed on the "image, a heating unit for adding a private image; the color flat image is quickly dried to hold the image I ΙΙΒϋ 0338-10214TWF (N1); 0890896; j amngwo. ptd page 44 1224210 VI. Patent application scope-an inversion roller for inverting the media object printed with the image downward; and a microlens injection unit for injecting microlens fluid material into the The opposite side of the media object creates a microlens array. 0338- 10214TW (N1); P08920036; j amngwo.ptd p. 45