CN1265212C - Manufacturing method of microlens - Google Patents
Manufacturing method of microlens Download PDFInfo
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- CN1265212C CN1265212C CN 03146486 CN03146486A CN1265212C CN 1265212 C CN1265212 C CN 1265212C CN 03146486 CN03146486 CN 03146486 CN 03146486 A CN03146486 A CN 03146486A CN 1265212 C CN1265212 C CN 1265212C
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Abstract
一种微透镜的制造方法，特别是有关于一种利用微流体布着制造微透镜及微透镜数组的方法，包括提供一媒介基底；接着，形成一薄膜于媒介基底上，并图案化该薄膜，以形成具有图案化的无薄膜区域或有薄膜区域在媒介基底上；然后，进行微流体布着步骤，将一微流体布着于无薄膜区域或有薄膜区域，以形成一微透镜。
A method for manufacturing a microlens, in particular, a method for manufacturing a microlens and a microlens array by using microfluid deposition, comprising providing a medium substrate; then, forming a thin film on the medium substrate, and patterning the thin film to form a patterned non-film area or film area on the medium substrate; then, performing a microfluid deposition step to deposit a microfluid on the non-film area or film area to form a microlens.
Description
Technical field
The invention relates to method for manufacturing micro-lens, particularly the method for making lenticule and lenticule array relevant for a kind of microfluid cloth that utilizes.
Background technology
On low-light electrical accessory finished product field, because optical lens has the basic function that permission light passed through and changed the light path path, therefore little by little to be applied to " optical communication " and photovoltaic aspects such as " digitized videos ".When above-mentioned utilization, mostly this miniature passive optical component, is to fit on the main system (major system body) in modes such as viscose glues during the stage in little encapsulation (micro-package) again, and its major defect is:
This two stage (two-pass) encapsulation way often is the principal element of low-light electricity product (micro-opto-electric product) processing procedure error.
Traditional ink-jet core technology (inkjet-based technology) has the ability that the little drop of may command produces, and its drop volume size is between 5-12pl (pico-liter; Abbreviation pl) between, its corresponding liquid-drop diameter size is then between 10 μ m to 50 μ m.In recent years, micron-sized fluid generating technique like this has begun to be used in the biochip of biomedical sector, the LCD colored filter of photoelectric field, and the key areas such as organic transistor of semiconductor applications.Aspect the characteristic dimension (characteristic dimension) of this main zone of action of a little elements, directly width is many between 10 μ m to 100 μ m can to conclude its single line, and line footpath thickness then is not more than about 10 μ m.
The single-width of above-mentioned characteristic dimension has substantial connection with little liquid-drop diameter size of ink-jet core technology now, and particularly liquid-drop diameter cannot be greater than the cardinal rule of line footpath width.Simultaneously, most in the composition of little drop for steaming (waving) solvent under the normal temperature, so line footpath thickness mostly is greatly less than 1 micron.Therefore, when we use this dimension analysis (dimensional analysis) on aspect lenticule (micro-lens) processing procedure, the radius of circle of finding its characteristic dimension can be from tens microns to hundreds of between the micron, and this is roughly to fall within the width range of the big I formation of little liquid-drop diameter basically.Yet it is unfortunately, really not so aspect the height of characteristic dimension.For example, for semicircle lenticule (semi-sphericallens), its height value (t) can be by mathematical expression R=[t
2+ (D/2)
2]/(2t) asked for acquisition,
Herein, its radius-of-curvature of R value representation, and its circular diameter of D value representation.And this radius of curvature R value can be asked for acquisition by physical relation formula f=R/ (n-1);
Herein, the f value is represented its lens focus radius (focallength), and its ray refractive index of n value representation (refractiveindex).
So, when we used general glass (n=1,5) desire to make a focused radius (f) to be the lenticule of 450 μ m, the estimation of its focused radius R value was about 225 μ m;
So, when the radius of circle (D/2) of these lens was 180 μ m, then can calculate its height t value will be up to 90 μ m.Significantly, this lens height is much larger than the cardinal rule of general case noted earlier less than 1 micron, and this just causes a big manufacturing issue.
United States Patent (USP) the 5th, 434, No. 876 a kind of manufacture methods based on little developing technique (photolithography-based technology) of announcement are made a lenticule array (micro-lensa rray).Though little developing technique has the advantage of high position precision, the relevant manufacturing restriction of exposure energy is being arranged aspect the painting photoresist height.
United States Patent (USP) the 5th, 644, No. 431 announcements are a kind of to squeeze type and model technology (extruding ﹠amp; Molding technology), general optical plastic material (plastic, for example PP, PPT) is utilized particular mold have (mask) to make a lenticule array (micro-lensa rray sheet).This technology has the advantage of highly producing, and makes restriction but exist on manufacturing dimension and precision.
It should be noted that especially: said method all need use to be made pattern (mask or mould) in advance and produces, and so alters into the difficulty that microlens location elasticity changes and the raising of cost.
United States Patent (USP) the 5th, 498,444 and 5,707, No. 684 announcements utilize ink gun to make the method for optical lens, mainly are that core is made micro optical element with the ink-jet technology.Yet the ink-jet technology content of its exposure terminates in optical element how to make different shape, how not to make accurate location and systematized method in a media substrate (media substrate) but inquire into explanation.Also ignored simultaneously, at the height of single lens drop (lens droplet) during much larger than 1 micron, because of contiguous microlens drop spacing dwindle cause the problem of phase mutual interference (cross-talking in-between drops).
Further it, when the liquid that discusses the lenticule drop (liquid flow) is injected into media substrate surperficial in air, wherein liquid, solid, gas phase interface line (interfacial line) are reached a contact angle equilibrium state the most at last, and this physical relation formula can be by the equational γ of Young-Laplace
LVCos (θ)=γ
SV-γ
LSAnd Δ P=ρ gt=γ
LS(1/r
1+ 1/r
2) ask for;
Herein, the θ value is represented the contact angle (contact angle) of liquid-solid interface line, γ
LV, γ
SV, γ
LSValue is represented the surface energy (surface energy) of liquid gas, solid and gas, liquid-solid interface respectively, the pressure differential that Δ P value representation liquid is inside and outside, ρ value representation fluid density, g value representation acceleration of gravity, the maximum height of t value representation liquid, and r
1, r
2Value difference express liquid is in the radius-of-curvature of solid surface two directions.
Can find thus, as given certain γ of difference
LV, γ
SV, γ
LSDuring numerical value, the contact angle θ value of liquid-solid interface line can be tried to achieve via calculating; Simultaneously, suppose that again liquid is identical (promptly in the circular arc of directivity difference, r in the radius-of-curvature of solid surface two directions
1=r
2=r) and liquid volume (V), density, acceleration of gravity all known, then this t value and r value then can be further by relationship V=π/6 * [t
3+ 3r
2T] calculate and try to achieve.
So far learn, can utilize this liquid gas, solid and gas, liquid-solid surface energy properties to come the position and the moulding result of liquid with precise control at the media substrate surface to the interface.Easy speech, can be according to desired microlens location and size, make water wettability and hydrophobic pattered region (hydrophilic orhydrophobic patterning) at the media substrate surface, so liquid just can precisely be controlled at the ad-hoc location of media substrate surface and be finished lenticular moulding (formation of shape).
Yet, must further consider the current intelligence (fluiddynamics) of liquid before reaching the contact angle equilibrium state.When utilization ink-jet technology when coming spray liquid, the microfluid with quality (m) arrive the media substrate surface before have movement velocity (v), this just give this microfluid have moment of inertia (momentum of inertia, P) and energy (energy, E); Wherein, moment of inertia P value can be represented by physical relation formula P=mv, and the ENERGY E value can be by E=1/2 * mv
2Represent kinetic energy.
So, momentum change Δ P matter just produces strength, and this strength just overcomes prevention by the glutinousness (viscosity) of liquid produces friction force (τ) and surface energy of liquid between solid surface tension force (σ).Because the speed of microfluid can be up to 10meter/second, make and to experience tens of approximately microseconds (micro-second, μ s) by microfluid (mini-second, time ms) just can reach above-mentioned Young-Laplace static balancing to tens of milliseconds.Yet liquid is at the dynamic contact radius of circle (r of media substrate surface during this is of short duration
t), sometimes may be greater than static equilibrium radius of circle r value (over-size), sometimes also may be less than static equilibrium radius of circle r value (under-size);
And variable quantity (Δ r/r=|r
t-r|/r) value can be up to more than 25%, this just makes and occurs the phenomenon of phase mutual interference (cross-talking) between the contiguous microlens drop and cause mixed deformation, thereby can't reach the predetermined static equilibrium position.
Notice: the fundamemtal phenomena of the little liquid of vibration back and forth (oscillating) of this viscoelasticity (viscosity) trend will continue to carry out to be directly changed into heat energy and till all dissipating up to its ENERGY E.After static balancing was reached, this moment, liquid must be sent out by the phase change or the steaming (waving) of cooling, further changed into solid phase, formed the lenticule of being wished to get at last.This class changes into the phase change process of solid phase (do not have mobile) by liquid, and its time must be experienced approximately between the several seconds to several minutes; Betwixt, value is rough to remain unchanged though its radius of circle changes
But still cause alteration of form (deformation) because of the contact of external other object.
Summary of the invention
The object of the present invention is to provide a kind of method for manufacturing micro-lens, utilize microfluid cloth the method for making lenticule and lenticule array, overcome the defective of above-mentioned prior art, and, reach the purpose that parent's (dredging) water-based pattered region (patterning) of (localizing) little drop can be accurately located in development one based on ink-jet technology.
A further object of the present invention is to provide a kind of method for manufacturing micro-lens, by single-order segmentation (one-pass) method that need not to fit again is provided, reach the purpose that directly accurately lenticule is manufactured in the media substrate of being scheduled to (mediasubstrate).
Another object of the present invention is to provide a kind of method for manufacturing micro-lens and manufacturing installation thereof, the insufflation of (interlaced deposition) by staggered cloth, reaching the lenticular manufacturing of being wished to get is shaped, main utilization " time " reaches " position " and divides the staggered cloth that comes the spray rule (jetting methodology) of (interlaced deposition), during reaching above-mentioned static balancing, even in during reaching phase transformationization, the moulding of contiguous microlens liquid, reach the phenomenon influence of guaranteeing not to be subjected to phase mutual interference (cross-talking), and the purpose of normally finishing.
The object of the present invention is achieved like this: a kind of method for manufacturing micro-lens comprises the following steps: to provide a media substrate; Form a film in this media substrate; This film of patterning has a no film zone of microlens pattern or the film zone is arranged in this media substrate with formation; And carry out microfluid cloth and step, a microfluid cloth in this no film zone or the film zone is arranged, to form a lenticule.
The present invention also provides a kind of method for manufacturing micro-lens, is applicable to that mode with staggered cloth makes the lenticule array, comprises the following steps: to provide a media substrate; Form a film in this media substrate; This film of patterning has a no film zone of microlens pattern or the film zone is arranged in this media substrate with formation; And mode with staggered cloth and carry out microfluid cloth and step, a microfluid cloth regional or the film zone arranged in this no film.
According to a better embodiment of the present invention, wherein, this staggered cloth mode and is divided into four times with the time, and cooperation position divides four zones and finish, and also comprises the following steps:
Definition the first initial point carries out very first time spray, in X and Y direction to double the p of spacing p value
1Be the spray spacing, the cloth that interlocks, and finishes first area microfluid pattern cloth and;
Define second starting point, carry out the spray of second time, again with p
1Be the spray spacing,, finish second area microfluid pattern cloth and in X and the Y direction cloth that interlocks;
Define the 3rd starting point, carry out the spray of the 3rd time, again with p
1Be the spray spacing,, finish the 3rd regional microfluid pattern cloth and in X and the Y direction cloth that interlocks;
And define fourth initial point, carry out the spray of the 4th time, again with p
1Be the spray spacing,, finish the 4th regional microfluid pattern cloth and in X and the Y direction cloth that interlocks; Wherein, relative first initial point position of this second starting point is in X and Y direction transfer p distance, and relative first initial point position of the 3rd starting point is in directions X transfer p distance, and relative first initial point position of this fourth initial point is in Y direction transfer p distance.
Another better embodiment according to the present invention, wherein, this staggered cloth mode and is divided into secondary and cooperation position with the time and divides two zones and finish, and also comprises the following steps:
Define a first initial point, carry out very first time spray, in directions X to double the p of spacing p value
1Is the spray spacing for the spray spacing and in the Y direction with 1/2nd spacing p values, and the cloth that interlocks, and finishes first area microfluid pattern cloth and;
And define one second starting point, carry out the spray of second time, in directions X to double the p of spacing p value
1Is the spray spacing for the spray spacing and in the Y direction with 1/2nd spacing p values, and the cloth that interlocks, and finishes second area microfluid pattern cloth and; Wherein, superimposed naturally the becoming one of whole spray fluids in the same Y direction has the rectangular cylindrical microlens array series of radian to obtain one; Wherein, relative first initial point position of this second starting point is transferred p at directions X.
The present invention provides a kind of lenticular manufacturing installation again, comprising: a microfluid spray unit, to carry out the spray of microlens material; One spray control module is used for controlling the spray of carrying out microfluid in this spray unit and produces; One motion platform comprises a media base seat, and collaborative this microfluid spray unit motion with the staggered cloth that carries out microfluid; One driving control unit is used for linking the coordinates of motion position of controlling this motion platform; And a computer control unit, be used for getting in touch this spray control module and this driving control unit.
Above-mentioned lenticular manufacturing installation wherein also comprises: a pulse wave timing unit; One first light source; One dodges formula light source control frequently, is used for controlling first light source; One first video camera, the contact of synergetic computer control module dodge frequency formula light source control orders about pulse wave timing unit and spray unit, is used for realizing watching the microfluid in arbitrary moment harmoniously; One secondary light source; One secondary light source control module is used for controlling secondary light source; And one second video camera, open secondary light source by the secondary light source control module, examine and see the lenticule result.
The present invention provides a kind of method for manufacturing micro-lens again again, is applicable to the lenticule lenticular lenses of making stereopsis, comprises the following steps: to provide a medium object, has one first and one second; Color jet-ink is dripped spray printing first in medium object, to form a color plane image; Utilize a heating unit to quicken dry color plane image, to live the color plane image surely; And the spray of lenticule fluent material is in second of medium object, to produce a lenticule array; This first and second medium object that is printed on color plane image and lenticule array respectively is the lenticular lenses with stereopsis.
The present invention provides a kind of lenticular manufacturing installation again again, is applicable to microfluid cloth the lenticule lenticular lenses that the spray mode is made stereopsis, comprising: one group of feeding roller, import in order to the medium object that will the be scheduled to direction that moves forward; One color jet-ink seal gauge outfit unit is in order to drip spray printing in medium object with color jet-ink, to form a color plane image; One heating unit lives surely image in order to quicken dry color plane image; One counter-rotating roller reverses down in order to the medium object that will be printed on image; And a lenticule spray unit, in order to the spray of lenticule fluent material in the medium object reverse side, produce a lenticule array.
Following conjunction with figs. and preferred embodiment describe in detail.
Description of drawings
Fig. 1 is the synoptic diagram of single lenticular basic structure proposed by the invention as technical foundation;
Fig. 2 is the synoptic diagram of many lenticule basic structures proposed by the invention as technical foundation;
Fig. 3 is that the present invention utilizes little developing method and microfluid cloth mode to make lenticular implementation step synoptic diagram;
Fig. 4 is the opposite implementation step synoptic diagram of Fig. 3 of the present invention;
To be the present invention mode with multiple drop and microfluid stack cloth to Fig. 5 makes lenticular implementation step synoptic diagram;
Fig. 6 is a kind of little visualization way of the present invention, and the interface that is fit to be applied to media substrate surface and microlens material is essentially the situation of sympathy;
Fig. 7 is that the present invention discloses another kind of little visualization way, is fit to be applied to the media substrate surface and is essentially the situation of dredging property mutually with the interface of microlens material;
Fig. 8 is the spray rule synoptic diagram that a kind of staggered cloth of the present invention;
Fig. 9 is the spray rule synoptic diagram that the present invention provides a kind of staggered cloth that is applicable to long strip type lenticule array in addition;
Figure 10 is that the invention process microfluid cloth method or stack cloth the employed insufflation apparatus configuration diagram of method;
Figure 11 is that the present invention utilizes microfluid cloth method or stack cloth method, carries out the implementation step and the device synoptic diagram of the lenticule lenticular lenses of stereopsis now.
Embodiment
At first, for the technical method that simple and convenient explanation institute of the present invention desire discloses, the present invention proposes one single lenticular basic structure, as technical foundation.
Consult shown in Figure 1ly, media substrate 1 (mediasubstrate) and two the main objects of a lenticule 3 (micro-lens) with a surface 2 are provided; Wherein, lenticule 3 is fitted and is contacted with on the surface 2 of media substrate 1.
At this, clearly define single lenticular basic structure size, comprise the height H of media substrate 1, the refractive index n of media substrate 1 (refractive index of mediasubstrate), lenticular circular diameter D, lenticular radius of curvature R and lenticular thickness t.
If as optical lens (opticallens), this lenticule must have the basic function that allows light to pass through (transmittance) and change light path path (changing of raypath) with this lenticule; For example the directional light of a branch of incident is assembled and passed through on a certain common focus (focuspoint), this focal distance f value (focus length) can be tried to achieve by following formula (1).Simultaneously, the bulking value of lenticule 3 also can be tried to achieve by formula (2).
f＝R/(n-1) (1)
V＝π/6×[t
3+3r
2t]，r＝D/2 (2)
Wherein, R=[t
2+ r
2]/(2t)
Consult shown in Figure 2ly, further, propose more than one lenticule basic structure as technical foundation in this expansion.
Cooperation is consulted shown in Figure 2, provides a media substrate 1 (media substrate) and most lenticules (micro-lens) to comprise most individual mainly objects such as lenticule 3, lenticule 4, lenticule 5.
At this, clearly define many lenticular basic structure sizes, comprise the height H of media substrate 1, the refractive index n of media substrate 1 (refractive index of media substrate), lenticular radius of circle r, lenticular radius of curvature R and lenticular thickness t.
In addition, still need add each other center distance value p (pitch of lens) between lenticule about in the relative position relation between these lenticule arrays.Wherein, the gap width 6 of lenticule 3 and lenticule 4, and the gap width 7 of lenticule 3 and lenticule 5, this two gap width w (not graphic) can be more than or equal to zero.So, for many lenticular expansion arrays, must be careful the lenticule array relative position relation of following formula (3) institute standard.
2×r+w＝p，w≥0 (3)
At the target object of micro-dimension, this lenticular radius of circle r value and focal distance f are defined in tens microns mostly between the hundreds of micron.
For instance, the radius of circle r value of supposing a given glass lenticule (n=1,5) is that 180 μ m and focal distance f value are 450 μ m, so can utilize formula 1 and formula 2 to calculate required focused radius R value respectively, be about 225 μ m, the height t value is 90 μ m, and volume V value is estimated as 4.96nano-liter (nl).
To time till, the present invention with to single lenticule extremely many lenticules make enough complete basic structure and define.After this, will elaborate as microfluid how and make contents such as these lenticular technical methods, flow process and equipment framework.
In order to reach lenticule in the accurate location of media substrate (precisedeposition), the invention provides and utilize little development (lithographypatterning, abbreviation LP) method and microfluid cloth (micro-fluidicdeposition, abbreviation MD) reaches this purpose, manufacturing step flow process as shown in Figure 3.
Consult shown in Figure 3ly, a media substrate 1 (media substrate) of a cleanliness without any pollution at first is provided;
Then, in step S3-1, utilize physical vaporous deposition (PVD) or wet type rubbing method (wetdeposition by spin or slitcoating) at the media substrate 1 positive film 8 of making; Generally speaking, the material of this film 8 is for having hydrophobic photo anti-corrosion agent material (photoresist, abbreviation PR), for example Teflon (Teflon), Polyvinylchloride (PVC), polyvinyl alcohol (PVA) (PVA) or silica gel photoresist, thickness can be between about 10 nanometers are to about 1 micron.
Then, in step S3-2, utilize one to have the identical mask of lenticule pattern, expose and development, for example I-line 365nm/5mW mercury lamp light source shines, and so just can obtain the lenticule plane pattern of being wished to get on the surface of media substrate 1.Meanwhile, the surface region of media substrate 1 is divided into one a film 8a zone and a no film 8b zone are arranged, and film 8a zone and microlens material are arranged (for example, tygon butyral resin (poly-vinyl-butyral, PVB) cured granulate thing (ParticulateMatter, PM), acetate butyl glycol ether ester (propylene glycol monomethyl etheracetate, PGMEA)) interface is for dredging property mutually between, the interface is a sympathy between film 8b zone and the microlens material but do not have, that is media substrate 1 is all water wettability or is all hydrophobic material with microlens material and constitutes.For instance, the radius of circle value of the lenticule plane pattern of mask is r, and gap width is w, and the width that does not then have film 8b zone is w, and the width in film 8a zone is arranged is 2 * r=D.
At last, in step S3-3, microfluid cloth (micro-fluidic depositing), and formed the lenticule of being wished to get 3 in no film 8b zone.
What be worth paying special attention to is: the media substrate 1 of this embodiment is essentially sympathy with the interface of microlens material, that is media substrate 1 is all water wettability or is all hydrophobic material with microlens material and constitutes.As before described, when the lenticule fluid reaches static balancing (static equilibrium), it will be owing to blind date (dredging) the property pattered region on media substrate 1 surface, and obtains the accurate location that natural force orders about.
In addition, pattern shown in Figure 3 can be various geometric configuratioies such as strip, square, circular, ellipse, decides on the lenticule pattern of being wished to get.
Shown in Figure 4 is to show the manufacture method flow process opposite with Fig. 3, disclose another kind of little visualization way, be fit to be applied to media substrate 1 surface and be essentially the situation of dredging property mutually with the interface of microlens material, for example, (polyethyleneterephthalate PET) waits material for copolymerization polypropylene (PP), polyethyleneterephthalate in media substrate 1.
Consult shown in Figure 4ly, in step S4-1, utilize the method identical with the step S3-1 of Fig. 3 to make a film 9, generally speaking, the material of this film is the material of general possess hydrophilic property (for example, SiO
2, TiO
2), thickness can be between about 10 nanometers are to about 1 micron.
Then, in step S4-2, utilize one to have the identical mask sheet of lenticule pattern, carry out exposure image and development, for example I-line 365nm/5mW mercury lamp light source shines, and so just can obtain the lenticule plane pattern of being wished to get on the surface of media substrate 1.Meanwhile, the surface region of media substrate 1 is divided into a no film 9a zone and film 9b zone is arranged, and (for example do not have film 9a zone and microlens material, tygon butyral resin (poly-vinyl-butyral, PVB) cured granulate thing (ParticulateMatter, PM), acetate butyl glycol ether ester (propylene glycol mono methyle theracetate, PGMEA)) interface is for dredging property (hydrophobic) mutually between, and the interface is a sympathy between film 9b zone and the lenticule but have.
At last, in step S4-3, microfluid cloth (micro-fluidicdepositing) in film 9b zone is arranged, and form the lens of being wished to get 3.Once more as before described, when the lenticule fluid of being wished to get reaches static balancing (static equilibrium), it will be owing to blind date (dredging) the property pattered region on media substrate 1 surface, and obtains the accurate location that natural force orders about.
In addition, pattern shown in Figure 4 can be various geometric configuratioies such as strip, square, circular, ellipse, decides on the lenticule pattern of being wished to get.
Herein, we are specifically noted that: the effect of above-mentioned " blind date (dredging) property pattered region (patterning) " method is to have limited lenticular circular diameter (D) size of being wished to get; In other words, for the miniflow drop of a certain concrete long-pending V, and desire obtains bigger height t value, and then said method seems and still enough do not reach this purpose.On the other hand, the solution mainly formed of the miniflow drop (fluid) of numerous species by solute and two kinds of compositions of solvent.
Generally speaking, suppose that the solute component content is s, then the solvent component content is 100%-s.Under this case condition, though lenticular circular diameter (D) size can not change, lenticular final volume will be reduced to V * s (in other words, having reduced 100%-s).
For example, if the miniflow drop of a certain volume V by 60 percent (that is, s=60%) solute tygon butyral resin (poly-vinyl-butyral, PVB) and 40 percent (that is, (the propylene glycol mono methyl ethe racetate of solvent acetic acid butyl glycol ether ester 100%-s=40%), PGMEA) form solution, then the lenticular volume that finally solidify to form of its formation will be reduced to V * 60% (in other words, having reduced 40%).
Consult shown in Figure 5, we the method that (micro-fluid deposition) obtains to adjust and improve the t value at the microfluid cloth that further expands among the above-mentioned steps S4-3 below, shown in the sectional view of Fig. 5, more specifically, describe in detail and (stacking micro-fluidic deposition, abbreviation SMD) mode with multiple drop (multiple drops) and microfluid stack cloth and make lenticular implementation step.
At first, one to have diameter be φ (volume V
φBe π/6 * φ
3) the first miniflow drop 5a, by spray in a media substrate surface with patterning (that is, the lenticule pattern is circular diameter D);
Then, the solidified forming step of step and step S5-2 through the cloth of step S5-1, and finish lenticular ground floor (1
StStack also is a bottom (bottomstack)), it highly is t
1(not icon).Similarly, the second miniflow drop 5b successively be injected in the original place (with the first miniflow drop 5a spray in same position);
Then, the solidified forming step of step and step S5-4 through the cloth of step S5-3, and finish the lenticular second layer (2
NdStack also is middle layer (middlestack)), it highly is t
2(not icon).
At last, the 3rd miniflow drop 5c successively be injected in the original place (with the first miniflow drop 5a and the second miniflow drop 5b spray in same position); Then, the solidified forming step of step and step S5-6 through the cloth of step S5-5, and finish lenticular the 3rd layer (3
RdStack also is upper strata (topstack)), it highly is t
3(not icon).This moment, we have also finished one and have had circular diameter value D (and radius of circle value r), height value t, and the lenticule of bulking value V.Apparently, we can obtain t=t
1+ t
2+ t
3And V=3 * V
φAnd the average height that defines each layer herein is t
AveThen height value t also can be expressed as t=3 * t
Ave
Hereat, look back (1) formula, if radius of circle value r (definite value) greater than height value t many (that is, r＞＞t
1, t
2And t
3), then the height of each layer increase to equate, all with the volume V of drop
φBe directly proportional.
In addition, when considering the volume-diminished factor s of miniflow drop, then further be modified to height value t=s * 3 * t in the solidified forming step
AveAnd bulking value V=s * 3 * V
φ
Be exemplified below: with tygon butyral resin (poly-vinyl-butyral, PVB)/(propylene glycol mono methyl ether acetate, PGMEA) optical material solution (wherein the s value is 67%) is miniflow drop (the volume V of 120 μ m with diameter φ to acetate butyl glycol ether ester
φBe about 0,905nl) spray goes into to have on the media substrate table that radius of circle r value is 180 one patterned;
So, can obtain individual layer cloth the height t value and is about 17 μ m[that is t=(0.905nl * 2)/(π * 180 μ m * 180 μ m)=17 μ m], when through after three layers of cloth step altogether, then the height t value increases to 51 μ m (that is, t=3 * 17 μ m=51 μ m).Consider that the miniflow drop is at the volume-diminished factor s of solidified forming step at 67% o'clock, then further corrected altitude t value is 34 μ m (that is, t=67% * 3 * 17 μ m=34 μ m).So, we just can produce one have the radius of curvature R value be 493 μ m (promptly, R=(34 μ m * 34 μ m+180 μ m * 180 μ m)/(2 * 34 μ m)=493 μ m) and the focal distance f value approximately slightly 986 μ m are (promptly, f=493 μ m/ (1,5-1)=986 μ m supposes n=1,5) lenticule.
Consult shown in Figure 6ly, can propose one at this and include little development (lithographypatterning, abbreviation LP) method and microfluid stack cloth and the microfluid of (SMD) method and make the lens method, shown in the manufacture method flow process of Fig. 6.
The media substrate 1 of one cleanliness without any pollution at first is provided;
Then, in step S6-1, utilize physical vaporous deposition (PVD) or wet type rubbing method (wetdeposition by spin or slitcoating) at the media substrate 1 positive film 8 of making; Generally speaking, the material of this film is for having hydrophobic photo anti-corrosion agent material (photoresist, abbreviation PR), for example Teflon (Teflon), Polyvinylchloride (PVC), polyvinyl alcohol (PVA) (PVA) or silica gel photoresist, thickness can be between about 10 nanometers are to about 1 micron.
Then, in step S6-2, utilize one to have the identical mask of lenticule pattern, expose and development, for example I-line 365nm/5mW mercury lamp light source shines, and so just can obtain the lenticule plane pattern of being wished to get on the surface of media substrate 1.Meanwhile, the surface region of media substrate 1 is divided into one a film 8a zone and a no film 8b zone are arranged, and film 8a zone and microlens material are arranged (for example, tygon butyral resin (poly-vinyl-butyral, PVB) cured granulate thing (ParticulateMatter, PM), the interface is for dredging property mutually between the acetate butyl glycol ether ester (propylene glycol mono methyl ether acetate, PGMEA)), the interface is a sympathy between film 8b zone and the lenticule but do not have.For instance, the radius of circle value of the lenticule plane pattern of mask is r, and gap width is w, and the width that does not then have film 8b zone is w, and the width in film 8a zone is arranged is 2 * r=D.
At last, in step S6-3, microfluid 5a cloth (micro-fluidicdepositing) in no film 8b zone, 6a and form the ground floor cloth of being wished to get.
What be worth paying special attention to is: the media substrate 1 and the lenticular interface of this embodiment are essentially sympathy, that is media substrate 1 is all water wettability or is all hydrophobic material with lenticule and constitutes.As before described, when the lens fluid of being desired reaches static balancing (static equilibrium), it will be owing to blind date (dredging) the property pattered region on media substrate 1 surface, and obtains the accurate location that natural force orders about.
At last, in step S6-4, we use microfluid stack cloth (SMD) method, again with miniflow drop 5b, and 5c inject the original place in regular turn, the second layer cloth of being wished to get 6b and the 3rd layer of cloth 6c and form, as before described; So, in step S6-5, can obtain the lenticule of being wished to get.In addition, pattern shown in Figure 6 can be various geometric configuratioies such as strip, square, circular, ellipse, decides on the lenticule pattern of being wished to get.
Consult shown in Figure 7ly, similarly, disclose another kind of little visualization way, be fit to be applied to media substrate 1 surface and be essentially the situation of thin property mutually with lenticular interface, for example, the manufacture method flow process of materials such as PP, PET.
Consult shown in Figure 7ly, in the 1st step (step1), utilize the step S7-1 identical with the step S3-1 of Fig. 3 to make a film 9, generally speaking, the material of this film is the material of general possess hydrophilic property (for example, SiO
2, TiO
2), thickness can be between about 10 nanometers are to about 1 micron.
Then, in step S7-2, utilize one to have the identical mask sheet of lenticule pattern, carry out exposure image and development, for example I-line 365nm/5mW mercury lamp light source shines, and so just can obtain the lenticule plane pattern of being wished to get on the surface of media substrate 1.Meanwhile, the surface region of media substrate 1 is divided into a no film 9a zone and film 9b zone is arranged, and (for example do not have film 9a zone and microlens material, tygon butyral resin (poly-vinyl-butyral, PVB) cured granulate thing (ParticulateMatter, PM), the interface is a sympathy between the acetate butyl glycol ether ester (propylene glycol mono methylether acetate, PGMEA)), but the interface is arranged between film 9b zone and the lenticule for dredging property mutually.
At last, in step S7-3, microfluid 5a cloth (micro-fluidicdepositing) in film 9b zone is arranged, 7a and form the ground floor cloth of being wished to get.Notice: the media substrate 1 and the lenticule of this embodiment is in the nature dredges property mutually.Once more as before described, when lens fluid reaches static balancing (staticequilibrium), it will be owing to blind date (dredging) the property pattered region on media substrate 1 surface, and obtains the accurate location that natural force orders about.
At last, in step S7-4, we use microfluid stack cloth (SMD) method, again with miniflow drop 5b, and 5c inject the original place in regular turn and form that the second layer cloth of being wished to get 7b and the 3rd layer of cloth 7c, as before described; So, in step S7-5, can obtain the lenticule of being wished to get.
In addition, pattern shown in Figure 7 can be various geometric configuratioies such as strip, square, circular, ellipse, decides on the lenticule pattern of being wished to get.
At this, what deserve particular mention is: in embodiment such as above-mentioned Fig. 5-Fig. 7, wherein the microfluid stack cloth stack number of plies of (SMD) method is not restricted to three layers.In the most general possibility, its superimposed layer numerical value is m, then is that fluid cloth the height value stack number of plies and also is m (m 〉=2).
So far, the present invention has disclosed a kind of LP and has added that MD or LP add the microfluid manufacturing lens method of SMD, can be applicable to single lenticule and many lenticule arrays.
In addition, still must further consider the current intelligence (fluid dynamics) of liquid before reaching the balance angle state.When using ink-jet technology (inkjet-based technology) when coming spray liquid, the microfluid that micro-droplet generator (droplet actuator) is pulled the trigger out has inertia (inertia) and momentum (momentum), also therefore provides little drop to have the outer ability of expanding (spreading) in MD or SMD step process.
Yet this microfluid stretches to the arrival static balancing by extending out, and may experience tens of approximately microseconds (μ s) between tens of milliseconds (ms); In this blink, dynamically contact radius of circle r in the moment on media substrate 1 surface
tMay be greater than static balancing radius of circle r value, however this changes value (Δ r/r=|r
t-r|/r) can be up to more than 25%.On the occasion, look back in the lenticule array relative position relation shown in the formula 3, its clear and definite standard goes out given lens radius of circle r value, spacing p value and gap w value;
In view of this, if contact of a certain moment radius of circle r
tWith two times of the difference of balance radius of circle r greater than gap w value, that is radius of circle r
tTwo times greater than spacing p value, so then will cause to occur phase mutual interference (crosstalking) between the contiguous microlens drop, and mixed deformation, thereby, can't reach predetermined equipoise.
Therefore, the present invention propose to utilize " time (timing) " reach the staggered cloth that " position (locating) " branch comes (interlaceddeposition, spray rule (jettingmethodology) ID), as detailed in the following.
Consult shown in Figure 8ly, specifically described a kind of staggered cloth and (interlaceddeposition, spray rule ID).
At first, imagination satisfies the lenticule array of above-mentioned formula 3 relative position relations, that is meets the dimensional requirement of each lens radius of circle r value, spacing p value and gap w value.Thereby will divide with " time (timing) " and finish for four times and " position (locating) " divides the staggered cloth in four zones.
In the spray first time constantly, define a first initial point, and to double the p of spacing p value
1For spray spacing (X, Y two directions all like this), finish (A) 1 then
St Microfluid pattern 10 cloth;
In the spray second time constantly, aspect " position (locating) ", shift spacing p then
2(X, Y two directions all like this) defines one second starting point, and to double the p of spacing p value
1For spray spacing (X, Y two directions all like this), finish (B) 2 then
Nd Microfluid pattern 11 cloth.Wherein, the lenticule spacing w value between pattern 10 and the pattern 11 increases to 0,828r+1,414w (that is,
In the case, promptly order spacing w value is zero, the transient behavior contact radius of circle r between wantonly two adjacent lens drops
tCan allow greatly circle lens radius r value, so just can avoid its phase mutual interference (crosstalking) and mixed deformation to 82%.
In the same manner, continue in the spray for the third time constantly, aspect " position (locating) ", shift spacing p
2(directions X) defines one the 3rd starting point and to double the p of spacing p value
1For spray spacing (X, Y two directions all like this), finish (C) 3
RdThe result that pattern 12 cloth.
And, in the 4th spray constantly, aspect " position (locating) ", shift spacing p
2(Y direction), definition one fourth initial point and to double the p of spacing p value
1For spray spacing (X, Y two directions all like this), finish (D) 4
ThThe result that pattern 13 cloth.After this result that cloth between twice spray, significantly with preceding twice complete one to and do not have a mutual interference mutually.
Certainly, should further point out between spray pattern cloth each time, can allow one drying (drying) period further to reduce the possibility of its phase mixed deformation that mutual interference causes.Particularly, finish (C) 3 for the third time
RdFinish (D) 4 between pattern 12 and the pattern 11 and at the 4th time
ThBetween pattern 13 and the pattern 12.
Certainly, at this must benly be: the foregoing description with four staggered cloth and is exceeded, but to excellent with four staggered cloth; For example, as above-mentioned ground, its expansion that also can generalize " time (timing) " is to 9 times, 16 times, 25 times or K
2Inferior (for example, K is 2,3,4,5 etc.), and cooperate relatively that to cut apart " position (locating) " be 9 times, 16 times, 25 times or K
2Inferior (for example, K be 2,3,4,5 etc.).
Perhaps except that above-mentioned, it can extend to 5 times, 6 times, 7 times of generalizing most or J time (J belongs to integer).On this lay special stress on ground be: the more " time (timing) " staggered cloth of reaching between " position (locating) ", and is to guarantee that more the problem of not having the phase mutual interference takes place; Yet it relatively will need more time to finish whole spray patterns.
Except above-mentioned this type of lenticule array, the spray rule that the present invention provides a kind of staggered cloth that is applicable to long strip type lenticule array in addition, as shown in Figure 9.
At first, imagination satisfies the lenticule array of above-mentioned formula 3 relative position relations once again, that is meets the dimensional requirement of each lens radius of circle r value, spacing p value and gap w value.Thereby will divide secondary to finish and " position (locating) " divides the staggered cloth in two zones with " time (timing) ".In the spray first time constantly, define a first initial point, to double the p of spacing p value
1For being injected in distance between the directions X, finish (A) 1 then
St Microfluid pattern 14 cloth.Notice that what wished to get is the rectangular cylinder (cylender) with arcuation this moment, become one naturally at whole spray fluids next superimposed (overlaptomerge) of Y direction with 1/2nd spacing p values so must apply to the SMD method.
Then, the microfluid that continues to finish (B) is dried to static balancing position pattern 15 cloth and, may the tens of approximately microseconds of experience (μ s) between tens of milliseconds (ms).In the spray second time constantly, aspect the directions X of " position (locating) ", shift spacing p
2, and to double spacing p
1Be the spray spacing of directions X, apply to the SMD method at the whole spray fluids next superimposed (overlap to merge) of Y direction with above-mentioned step then, finish (C) 2 with 1/2nd spacing p values
Nd Microfluid pattern 16 cloth.
At last, the microfluid that passes through (D) once again is dried to static balancing position pattern 17 cloth and.So, just, finish whole spray patterns to obtain a long strip type lenticule array.
In the foregoing description, and microfluid stack cloth (SMD) method and is not restricted to the whole spray fluids superimposed (overlap to merge) of Y direction with 1/2nd spacing p values.In the most general possibility, its Y direction is come superimposed (overlap to merge), wherein m (m 〉=2) with whole spray fluids of integer m/spacing p value.
Certainly, at this must benly be: the foregoing description with the staggered cloth of secondary and is exceeded, but to excellent with the staggered cloth of secondary; For example, as above-mentioned ground, its expansion that also can generalize " time (timing) " is to 4 times, 8 times, 16 times or 2
LInferior (for example, L is 2,3,4 etc.), and cooperate relatively that to cut apart " position (locating) " be 4 times, 8 times, 16 times or 2
LInferior (for example, L be 2,3,4 etc.).
Perhaps except that above-mentioned, it can extend to 3 times, 5 times, 6 times of generalizing most or I time (I belongs to integer).
On this lay special stress on ground be: the more " time (timing) " staggered cloth of reaching between " position (locating) ", and is to guarantee that more the problem of not having the phase mutual interference takes place; Yet it relatively will need more time to finish whole spray patterns.
Consult shown in Figure 10, above-mentioned microfluid cloth (MD) method or stack cloth (SMD) method in order to implement, the present invention uses the insufflation apparatus framework of the following stated to carry out, at first this insufflation apparatus framework comprises an XY motion platform (xy) 18, it can be by a computer control unit (PC) 19 by contact driving control unit (stagedriver) 20 its coordinate position (for example, X, Y) that moves.And computer control unit 19 can activate microfluid spray unit (jethead) 24 by contact spray control module (headdriver) 21, and the spray of carrying out microfluid (microdroplet) 29 produces.Whether normally produce in order to understand the spray that detects microfluid, aforementioned calculation machine control module 19 can be by contact one pulse wave timing unit 22, order about one and dodge formula light source control (LEDdriver) 23 (being used for controlling first light source 23 ') and spray control modules 21 frequently, and as one man watch the microfluid 29 in a certain moment by time coordination by one first video camera (camera) 28.
Notice: first video camera 28 preferably can be done the adjustment in height Z direction and angle θ orientation, to watch the microfluid result of diverse location.
In addition, to detect microfluid whether be injected in the micro-lens forming 30 on media substrate 1 surface normal in order to understand, this equipment framework preferably has one second video camera 25 and is supervising micro-lens forming 30 results opening a secondary light source 26 by a secondary light source control module 27.Certainly, this second video camera 25 preferably also can be done the adjustment in height Z direction and angle θ orientation, to watch the microfluid result of diverse location.So, just can use this insufflation apparatus framework to carry out the enforcement that microfluid cloth, and finish when participating in the cintest that (in-situ) supervises, and detect the result of microfluid spray and micro-lens forming.Certainly, insufflation apparatus framework of the present invention is not as limit, if this insufflation apparatus framework does not have above-mentioned parts such as video camera, still can finish the processing procedure of above-mentioned MD method and SMD method.But this insufflation apparatus framework partly carries out detecting to excellent on the line to have above-mentioned video camera etc.
At last, manufacturing method thereof of the present invention also can be as practicing of stereopsis now; That is utilize above-mentioned microfluid cloth (MD) method or the stack cloth (SMD) method, carry out the manufacturing of the lenticule lenticular lenses of stereopsis (lenticular lens sheet) now, as shown in figure 11.
At first, this sprayed printed system framework comprises one group of feeding front-wheel (feed roller) 32.
Then, predetermined medium object (media) 31 forward direction 33 are imported into.
Then, utilize color jet-ink seal head unit (color image jet-heads) 34 with colored ink droplet 35 spray printings in medium object 31, form a color plane image 37.
Hereat, in order to quicken dry color plane image 37, preferably use a heating unit (heatdryer) 36 that it is dried fast and live image surely.Then, utilize a counter-rotating roller (reverseroller) 38, this medium object face that is printed on image is reversed down; Then, carry out the spray of lenticule fluent material 40 in utilization one lenticule spray unit 39, producing a lenticule array 41, this is the have lenticular lenses stereopsis finished product (lenticularimage) of (lenticular lens sheet).
At last, native system will have the medium object of lenticular lenses (lenticular lens sheet), pass out lenticular lenses by shifting out direction 42, promptly finish whole manufacture processes.
Notice: above-mentioned medium object 31 can be to utilize above-mentioned LP method to finish certain specific region one patterned in advance in advance.So just spray lenticule array 41 backward precisely can be located; In other words, before medium object 31 enters feeding roller (feed roller) 32, finished LP processing procedure (consulting aforesaid Fig. 3 and shown in Figure 4).
In addition, this spray process can use above-mentioned MD or SMD processing procedure to adjust increases lenticular height, and utilizes the ID method cloth that interlock, to guarantee not have the problem generation of adjacent fluid phase mutual interference.
Feature of the present invention and effect are as follows:
1, feature of the present invention and effect are: the invention provides single-order segmentation (one-pass) method that need not to fit again, can directly accurately lenticule be manufactured in the media substrate of being scheduled to (mediasubstrate).And, develop parent's (dredging) the water-based pattered region (patterning) that accurately to locate (localizing) little drop then based on ink-jet technology.
2, in addition, the present invention the manufacturing shaping that the spray rule of (interlaced deposition) is reached the lens of being wished to get by staggered cloth.Main utilization " time (timing) " reaches " position (locating) " and divides the staggered cloth that comes the spray rule (jettingmethodology) of (interlaced deposition); So, above-mentioned reach static balancing during, even in during reaching phase transformationization, the moulding of contiguous microlens liquid can be guaranteed not to be subjected to the phenomenon influence of phase mutual interference (cross-talking), and normally finish.
3, also have, because the present invention uses multiple drop (multiple drops) and microfluid stack cloth (stacking micro-fluidic deposition, abbreviation SMD) mode is fabricated to the implementation step of lens, repeat microfluid cloth and step, continue storehouse, to increase final lenticule at the suprabasil thickness of media.
Though the present invention discloses as above with preferred embodiment, so it is not in order to limiting the present invention, any those who are familiar with this art, and without departing from the spirit and scope of the present invention, institute does to change and retouch, and all belongs within protection scope of the present invention.
Claims (24)
1, a kind of method for manufacturing micro-lens is characterized in that: comprise the following steps:
One media substrate is provided;
Form a film in this media substrate;
This film of patterning has the no film zone of patterning in this media substrate to form one;
Carry out microfluid cloth and step, a microfluid cloth in this no film zone, to form a lenticule;
This media substrate is essentially sympathy with this lenticular interface; The material of this film is Teflon, Polyvinylchloride, polyvinyl alcohol (PVA) or silica gel photoresist; The thickness of this film is between between 10 nanometers to 1 micron.
2, method for manufacturing micro-lens according to claim 1 is characterized in that: this microfluid comprises a lens material.
3, method for manufacturing micro-lens according to claim 1 is characterized in that: this lenticule is the cured granulate thing or the acetate butyl glycol ether ester of tygon butyral resin.
4, method for manufacturing micro-lens according to claim 1 is characterized in that: the static diameter that this microfluid cloth on this media substrate surface equates with the diameter dimension in this no film zone.
5, method for manufacturing micro-lens according to claim 1, it is characterized in that: further comprising and repeat this microfluid cloth and step, continue storehouse, to increase final lens at the suprabasil thickness of this media, its superimposed layer numerical value is m, and this m is the integer more than or equal to 2.
6, method for manufacturing micro-lens according to claim 1 is characterized in that: it is applicable to that mode with staggered cloth makes the lens array, mode with staggered cloth and carries out microfluid cloth and step, and a microfluid cloth in this no film zone; This lens array has each lenticule radius of circle r value, spacing p value and gap w value.
7, method for manufacturing micro-lens according to claim 6 is characterized in that: this staggered cloth mode and is divided into K with the time
2Inferior, and cooperation position is divided K
2Finish in the zone; Wherein, this K is the integer more than or equal to 2.
8, method for manufacturing micro-lens according to claim 7 is characterized in that: this staggered cloth mode and is divided into four times with the time, and cooperation position divides four zones and finish, and comprises the following steps:
Define a first initial point, carry out very first time spray, in X and Y direction to double the p of spacing p value
1Be the spray spacing, the cloth that interlocks, and finishes first area microfluid pattern cloth and;
Define one second starting point, carry out the spray of second time, again with p
1Be the spray spacing,, finish second area microfluid pattern cloth and in X and the Y direction cloth that interlocks;
Define one the 3rd starting point, carry out the spray of the 3rd time, again with p
1Be the spray spacing,, finish the 3rd regional microfluid pattern cloth and in X and the Y direction cloth that interlocks;
Definition one fourth initial point carries out the spray of the 4th time, again with p
1Be the spray spacing,, finish the 4th regional microfluid pattern cloth and in X and the Y direction cloth that interlocks;
Wherein, this first initial point position is in X and Y direction transfer p distance relatively for this second starting point, and this first initial point position is in directions X transfer p distance relatively for the 3rd starting point, and relative this first initial point position of this fourth initial point is in Y direction transfer p distance.
9, method for manufacturing micro-lens according to claim 6 is characterized in that: this staggered cloth mode and is divided into J time with the time, and finish in cooperation position division J zone; Wherein, this J is the integer more than or equal to 5.
10, method for manufacturing micro-lens according to claim 6, it is characterized in that: further comprising and repeat this microfluid cloth and step, continue storehouse, to increase final lens at the suprabasil thickness of this media, this superimposed layer numerical value is m, and this m is the integer more than or equal to 2.
11, method for manufacturing micro-lens according to claim 6 is characterized in that: this staggered cloth mode and is divided into 2 with the time
LInferior, and cooperation position divides 2
LFinish in the zone; Wherein, this L is the integer more than or equal to 1.
12, method for manufacturing micro-lens according to claim 11 is characterized in that: this staggered cloth mode and is divided into secondary with the time, and cooperation position divides two zones and finish, and comprises the following steps:
Define a first initial point, carry out very first time spray, in directions X to double the p of spacing p value
1Is the spray spacing for the spray spacing and in the Y direction with m/spacing p value, and the cloth that interlocks, and finishes first area microfluid pattern cloth and;
Define one second starting point, carry out the spray of second time, in directions X to double the p of spacing p value
1Be the spray spacing, and be the spray spacing in the Y direction with m/spacing p value that the cloth that interlocks, and finishes second area microfluid pattern cloth and, wherein, this m is the integer more than or equal to 2; Superimposed naturally the becoming one of whole spray fluids in this same Y direction has the rectangular cylindrical lens array series of radian to obtain one;
This second starting point this first initial point position is relatively transferred the p distance at directions X.
13, a kind of method for manufacturing micro-lens, it is characterized in that: it comprises the following steps:
One media substrate is provided;
Form a film in this media substrate;
This film of patterning has one of patterning with formation and the film zone is arranged in this media substrate;
Carry out microfluid cloth and step, a microfluid cloth in this film zone, to form a lenticule;
This media substrate and this lenticular interface are for dredging property mutually; The material of this film is SiO
2Or TiO
2The thickness of this film is between between 10 nanometers to 1 micron.
14, method for manufacturing micro-lens according to claim 13 is characterized in that: this microfluid is to comprise a lens material.
15, method for manufacturing micro-lens according to claim 13 is characterized in that: this lenticule is the cured granulate thing or the acetate butyl glycol ether ester of tygon butyral resin.
16, method for manufacturing micro-lens according to claim 13 is characterized in that: the static diameter that this microfluid cloth on this media substrate surface has the diameter dimension in film zone to equate with this.
17, method for manufacturing micro-lens according to claim 13, it is characterized in that: further comprising and repeat this microfluid cloth and step, continue storehouse to increase final lens at the suprabasil thickness of this media, its superimposed layer numerical value is m, and this m is the integer more than or equal to 2.
18, method for manufacturing micro-lens according to claim 13, it is characterized in that: it is applicable to that mode with staggered cloth makes the lens array, mode with staggered cloth and carry out microfluid cloth and step, a microfluid cloth in this film zone, to form a lenticule array; This lens array has each lens radius of circle r value, spacing p value and gap w value dimensional requirement.
19, method for manufacturing micro-lens according to claim 18 is characterized in that: this staggered cloth mode and is divided into K with the time
2Inferior, and cooperation position is divided K
2Finish in the zone; Wherein, this K is the integer more than or equal to 2.
20, method for manufacturing micro-lens according to claim 19 is characterized in that: this staggered cloth mode and is divided into four times with the time, and cooperation position divides four zones and finish, and comprises the following steps:
Define a first initial point, carry out very first time spray, in X and Y direction to double the p of spacing p value
1Be the spray spacing, the cloth that interlocks, and finishes first area microfluid pattern cloth and;
Define one second starting point, carry out the spray of second time, again with p
1Be the spray spacing,, finish second area microfluid pattern cloth and in X and the Y direction cloth that interlocks;
Define one the 3rd starting point, carry out the spray of the 3rd time, again with p
1Be the spray spacing,, finish the 3rd regional microfluid pattern cloth and in X and the Y direction cloth that interlocks;
Definition one fourth initial point carries out the spray of the 4th time, again with p
1Be the spray spacing,, finish the 4th regional microfluid pattern cloth and in X and the Y direction cloth that interlocks;
Wherein, this first initial point position is in X and Y direction transfer p distance relatively for this second starting point, and this first initial point position is in directions X transfer p distance relatively for the 3rd starting point, and relative this first initial point position of this fourth initial point is in Y direction transfer p distance.
21, method for manufacturing micro-lens according to claim 18 is characterized in that: this staggered cloth mode and is divided into J time with the time, and finish in cooperation position division J zone; Wherein, this J is the integer more than or equal to 5.
22, method for manufacturing micro-lens according to claim 18 it is characterized in that: further comprising and repeats this microfluid cloth and step, continues storehouse, to increase final lenticule at the suprabasil thickness of this media; Wherein, this superimposed layer numerical value is m, and wherein, this m is the integer more than or equal to 2.
23, method for manufacturing micro-lens according to claim 18 is characterized in that: this staggered cloth mode and is divided into 2 with the time
LInferior, and cooperation position divides 2
LFinish in the zone; Wherein, this L is the integer more than or equal to 1.
24, method for manufacturing micro-lens according to claim 23 is characterized in that: this staggered cloth mode and is divided into secondary with the time, and cooperation position divides two zones and finish, and also comprises the following steps:
Define a first initial point, carry out very first time spray, in directions X to double the p of spacing p value
1Is the spray spacing for the spray spacing and in the Y direction with m/spacing p value, and the cloth that interlocks, and finishes first area microfluid pattern cloth and;
Define one second starting point, carry out the spray of second time, in directions X to double the p of spacing p value
1Is the spray spacing for the spray spacing and in the Y direction with m/spacing p value, and the cloth that interlocks, and finishes second area microfluid pattern cloth and, and wherein, this m is the integer more than or equal to 2; Wherein, superimposed naturally the becoming one of whole spray fluids in the same Y direction has the rectangular cylindrical microlens array series of radian to obtain one;
This second starting point this first initial point position is relatively transferred the p distance at directions X.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03146486 CN1265212C (en) | 2003-07-16 | 2003-07-16 | Manufacturing method of microlens |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03146486 CN1265212C (en) | 2003-07-16 | 2003-07-16 | Manufacturing method of microlens |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1570674A CN1570674A (en) | 2005-01-26 |
| CN1265212C true CN1265212C (en) | 2006-07-19 |
Family
ID=34471752
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 03146486 Expired - Fee Related CN1265212C (en) | 2003-07-16 | 2003-07-16 | Manufacturing method of microlens |
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| Country | Link |
|---|---|
| CN (1) | CN1265212C (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2011155445A1 (en) * | 2010-06-07 | 2013-08-01 | 新日鉄住金化学株式会社 | Lenticular lens manufacturing method, lenticular lens, optical element, and stereoscopic display |
| CN103395739B (en) * | 2013-07-22 | 2016-01-06 | 江苏物联网研究发展中心 | A kind of preparation method of micro-concave mirror |
| CN106199835A (en) * | 2016-07-20 | 2016-12-07 | 京东方科技集团股份有限公司 | A kind of optical fiber lens manufacture method and optical fiber lens |
| CN110444691B (en) * | 2019-08-28 | 2023-04-18 | 京东方科技集团股份有限公司 | Color film substrate, display panel, preparation method of display panel and display device |
| CN111025516B (en) * | 2019-12-20 | 2022-04-29 | 诚瑞光学(常州)股份有限公司 | Lens structure and lens ink coating method |
| TWI833343B (en) * | 2022-09-05 | 2024-02-21 | 占暉光學股份有限公司 | Optical lens structure having a micro thin film |
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2003
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| CN1570674A (en) | 2005-01-26 |
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