TWI408475B - Active device array substrate and fabricating mothod thereof - Google Patents

Active device array substrate and fabricating mothod thereof Download PDF

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TWI408475B
TWI408475B TW98146357A TW98146357A TWI408475B TW I408475 B TWI408475 B TW I408475B TW 98146357 A TW98146357 A TW 98146357A TW 98146357 A TW98146357 A TW 98146357A TW I408475 B TWI408475 B TW I408475B
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lines
dielectric layer
scan
array substrate
device array
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TW98146357A
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TW201122691A (en
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Te Chun Huang
Kuo Yu Huang
Maw Song Chen
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Au Optronics Corp
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Abstract

An active device array substrate includes a substrate, scan lines, data lines, display units, scan signal transmission lines, a dielectric layer, a common line and a capacitor dielectric layer. Each display unit is electrically connected to two of the scan lines and one of the data line, respectively. Each display unit includes a first sub-pixel and a second sub-pixel. Two adjacent display units are electrically connected to the different data lines in the same row of the display units, respectively. Each scan signal transmission line is electrically connected to one of the scan lines, respectively. The dielectric layer covers the scan lines, data lines, a first and a second active devices of the first and the second sub-pixels. The common line is disposed between the dielectric layer and a first and a second pixel electrodes of the first and the second sub-pixels. The capacitor dielectric layer is disposed between the common line and the first and the second pixel electrodes.

Description

主動元件陣列基板及其製造方法Active device array substrate and manufacturing method thereof

本發明是有關於一種陣列基板及其製造方法,且特別是有關於一種主動元件陣列基板及其製造方法。The present invention relates to an array substrate and a method of fabricating the same, and more particularly to an active device array substrate and a method of fabricating the same.

一般而言,液晶顯示面板主要是由一主動元件陣列基板、一對向基板以及一夾於主動元件陣列基板與對向基板之間的液晶層所構成,其中主動元件陣列基板可分為顯示區(display region)與非顯示區(non-display region),其中在顯示區上配置有以陣列排列之多個畫素單元,而每一畫素單元包括薄膜電晶體(TFT)以及與薄膜電晶體連接之畫素電極(pixel electrode)。此外,在顯示區內配置有多條掃描線(scan line)與資料線(data line),每一個畫素單元之薄膜電晶體是與對應之掃描線與資料線電性連接。在非顯示區內則配置有訊號線、源極驅動器(source driver)以及閘極驅動器(gate driver)。Generally, the liquid crystal display panel is mainly composed of an active device array substrate, a pair of substrates, and a liquid crystal layer sandwiched between the active device array substrate and the opposite substrate, wherein the active device array substrate can be divided into display regions. (display region) and non-display region, wherein a plurality of pixel units arranged in an array are arranged on the display area, and each pixel unit includes a thin film transistor (TFT) and a thin film transistor Connected pixel electrode. In addition, a plurality of scan lines and data lines are disposed in the display area, and the thin film transistors of each pixel unit are electrically connected to the corresponding scan lines and data lines. In the non-display area, a signal line, a source driver, and a gate driver are disposed.

當液晶顯示面板欲顯示影像畫面時,其必須透過閘極驅動器來依序開啟顯示面板內的每一列畫素,且每一列畫素在開啟的時間內會對應的接收源極驅動器所提供的資料電壓。如此一來,每一列畫素中的液晶分子就會依據其所接收的資料電壓而作適當的排列。When the liquid crystal display panel is to display an image screen, it must sequentially open each column of pixels in the display panel through the gate driver, and each column of pixels will correspondingly receive the data provided by the source driver during the opening time. Voltage. In this way, the liquid crystal molecules in each column of pixels are properly arranged according to the data voltage they receive.

然而,隨著液晶顯示面板的解析度提昇,液晶顯示器就必須藉由增加閘極驅動器與源極驅動器的使用數目來配合解析度之提昇,且因閘極驅動器與源極驅動器的使用數目增加會讓非顯示區(或稱為邊框)之面積變大。基於上述理由,液晶顯示器之生產成本便隨著閘極驅動器、源極驅動器之始用數量而增加,同時邊框也越來越大。若能將閘極驅動器及/或源極驅動器的使用數目減少,便可輕易地解決成本無法降低的問題以及做出窄邊框,即非顯示區面積較小之產品。However, as the resolution of the liquid crystal display panel increases, the liquid crystal display must increase the resolution by increasing the number of gate drivers and source drivers, and the number of gate drivers and source drivers increases. Make the area of the non-display area (or border) larger. For the above reasons, the production cost of the liquid crystal display increases with the number of gate drivers and source drivers, and the frame size is also increasing. If the number of gate drivers and/or source drivers can be reduced, it is easy to solve the problem that the cost cannot be reduced and to make a narrow frame, that is, a product with a small non-display area.

本發明提供一種主動元件陣列基板,其透過介電層的設計可大幅降低資料線與共通線之間的寄生電容(Parasitic Capacitance)。The invention provides an active device array substrate, which can greatly reduce the parasitic capacitance between the data line and the common line through the design of the dielectric layer.

本發明還提供一種主動元件陣列基板的製造方法,其共通線亦可作為反射層,可有效減少製程步驟。The invention also provides a method for manufacturing an active device array substrate, wherein the common line can also serve as a reflective layer, which can effectively reduce the process steps.

本發明提出一種主動元件陣列基板,其包括一基板、多條掃描線、多條資料線、多個顯示單元、多條掃描信號傳遞線、一介電層、一共通線以及一電容介電層。掃描線配置於基板上。資料線配置於基板上,並與掃描線交錯以定義出多個顯示區域。顯示單元配置於顯示區域中,每一顯示單元分別與其中二條掃描線以及其中一條資料線電性連接。每一顯示單元包括一第一子畫素以及一第二子畫素。第一子畫素包括一第一主動元件以及一與第一主動元件電性連接之第一畫素電極。第二子畫素包括一第二主動元件以及一與第二主動元件電性連接之第二畫素電極。第一主動元件以及第二主動元件分別與不同掃描線電性連接,而第二主動元件透過第一主動元件與對應的資料線電性連接。在同一列之顯示單元中,二相鄰之顯示單元分別與不同資料線電性連接。每一掃描信號傳遞線分別與其中一條掃描線電性連接。介電層覆蓋掃描線、資料線、第一主動元件以及第二主動元件,且第一畫素電極與第二畫素電極配置於介電層上。共通線配置於第一畫素電極與介電層之間以及第二畫素電極與介電層之間。電容介電層配置於第一畫素電極與共通線之間以及第二畫素電極與共通線之間。The invention provides an active device array substrate, which comprises a substrate, a plurality of scan lines, a plurality of data lines, a plurality of display units, a plurality of scan signal transmission lines, a dielectric layer, a common line and a capacitor dielectric layer. . The scan line is disposed on the substrate. The data lines are disposed on the substrate and interleaved with the scan lines to define a plurality of display areas. The display unit is disposed in the display area, and each display unit is electrically connected to two of the scan lines and one of the data lines. Each display unit includes a first sub-pixel and a second sub-pixel. The first sub-pixel includes a first active component and a first pixel electrode electrically connected to the first active component. The second sub-pixel includes a second active component and a second pixel electrode electrically connected to the second active component. The first active component and the second active component are electrically connected to different scan lines, and the second active component is electrically connected to the corresponding data line through the first active component. In the display unit of the same column, the two adjacent display units are electrically connected to different data lines respectively. Each scan signal transmission line is electrically connected to one of the scan lines. The dielectric layer covers the scan line, the data line, the first active component, and the second active component, and the first pixel electrode and the second pixel electrode are disposed on the dielectric layer. The common line is disposed between the first pixel electrode and the dielectric layer and between the second pixel electrode and the dielectric layer. The capacitor dielectric layer is disposed between the first pixel electrode and the common line and between the second pixel electrode and the common line.

在本發明之一實施例中,上述之掃描線的延伸方向實質上垂直於資料線的延伸方向。In an embodiment of the invention, the extending direction of the scan line is substantially perpendicular to the extending direction of the data line.

在本發明之一實施例中,上述之掃描信號傳遞線的數量少於或等於資料線的數量。In an embodiment of the invention, the number of scan signal transmission lines is less than or equal to the number of data lines.

在本發明之一實施例中,上述之每一掃描信號傳遞線分別位於相鄰二資料線之間。In an embodiment of the invention, each of the scan signal transmission lines is located between two adjacent data lines.

在本發明之一實施例中,上述之掃描信號傳遞線的延伸方向與資料線的延伸方向實質上平行。In an embodiment of the invention, the extending direction of the scanning signal transmission line is substantially parallel to the extending direction of the data line.

在本發明之一實施例中,上述之每一掃描信號傳遞線包括一第一導電圖案以及一第二導電圖案。第二導電圖案與第一導電圖案電性連接,其中第二導電圖案與掃描線交錯。In an embodiment of the invention, each of the scan signal transmission lines includes a first conductive pattern and a second conductive pattern. The second conductive pattern is electrically connected to the first conductive pattern, wherein the second conductive pattern is staggered with the scan lines.

在本發明之一實施例中,上述之介電層的厚度介於1.5微米(μm)至4微米(μm)之間。In one embodiment of the invention, the dielectric layer has a thickness between 1.5 micrometers (μm) and 4 micrometers (μm).

在本發明之一實施例中,上述之介電層具有多個凸塊(bumps),而共通線覆蓋於凸塊上。In an embodiment of the invention, the dielectric layer has a plurality of bumps, and the common lines cover the bumps.

在本發明之一實施例中,上述之共通線之材料包括反射材料。In an embodiment of the invention, the material of the common line includes a reflective material.

在本發明之一實施例中,上述之共通線位於掃描信號傳遞線上方。In an embodiment of the invention, the common line is above the scan signal transmission line.

在本發明之一實施例中,上述之第一畫素電極以及第二畫素電極分別與共通線部分重疊。In an embodiment of the invention, the first pixel electrode and the second pixel electrode are partially overlapped with the common line.

在本發明之一實施例中,上述之主動元件陣列基板更包括一保護層,其中保護層覆蓋掃描線、資料線、第一主動元件以及第二主動元件,且保護層與介電層的一底表面接觸。In an embodiment of the present invention, the active device array substrate further includes a protective layer, wherein the protective layer covers the scan line, the data line, the first active device, and the second active device, and one of the protective layer and the dielectric layer The bottom surface is in contact.

本發明還提出一種主動元件陣列基板的製造方法,其包括下述之步驟。首先,於一基板上形成多條掃描線、多條資料線、多個主動元件以及多條掃描信號傳遞線。接著,形成一介電層,以覆蓋掃描線、資料線、主動元件以及掃描信號傳遞線。於介電層上形成一共通線。然後,於共通線以及介電層上形成一電容介電層。最後,於介電層以及電容介電層上形成多個畫素電極,其中每一畫素電極分別與其中一個主動元件電性連接。The present invention also provides a method of fabricating an active device array substrate comprising the steps described below. First, a plurality of scan lines, a plurality of data lines, a plurality of active elements, and a plurality of scan signal transmission lines are formed on a substrate. Next, a dielectric layer is formed to cover the scan lines, the data lines, the active elements, and the scan signal transfer lines. A common line is formed on the dielectric layer. Then, a capacitor dielectric layer is formed on the common line and the dielectric layer. Finally, a plurality of pixel electrodes are formed on the dielectric layer and the capacitor dielectric layer, wherein each of the pixel electrodes is electrically connected to one of the active elements.

在本發明之一實施例中,上述之掃描線、資料線、主動元件以及掃描信號傳遞線的製造方法包括:首先,於基板上形成多條掃描線、多個與掃描線電性連接的閘極以及第一導電圖案。接著,於基板上形成一閘絕緣層,以覆蓋掃描線、閘極以及第一導電圖案。然後,閘絕緣層上形成多個半導體圖案。最後,於閘絕緣層上形成多條資料線、多個與資料線電性連接的源極、多個汲極以及一與第一導電圖案電性連接之第二導電圖案,其中閘極、半導體圖案、源極以及汲極構成主動元件,而第一導電圖案與第二導電圖案構成掃描信號傳遞線。In an embodiment of the invention, the method for manufacturing the scan line, the data line, the active device, and the scan signal transmission line includes: first, forming a plurality of scan lines on the substrate, and plurality of gates electrically connected to the scan lines. a pole and a first conductive pattern. Next, a gate insulating layer is formed on the substrate to cover the scan lines, the gates, and the first conductive pattern. Then, a plurality of semiconductor patterns are formed on the gate insulating layer. Finally, a plurality of data lines, a plurality of sources electrically connected to the data lines, a plurality of drain electrodes, and a second conductive pattern electrically connected to the first conductive pattern are formed on the gate insulating layer, wherein the gate and the semiconductor are formed The pattern, the source and the drain constitute an active element, and the first conductive pattern and the second conductive pattern constitute a scan signal transmission line.

在本發明之一實施例中,上述之主動元件陣列基板的製造方法,更包括在形成介電層之前先形成一保護層,以覆蓋資料線、主動元件以及掃描信號傳遞線。In an embodiment of the invention, the method for fabricating the active device array substrate further includes forming a protective layer to cover the data line, the active device, and the scan signal transmission line before forming the dielectric layer.

在本發明之一實施例中,上述之介電層的厚度介於1.5微米(μm)至4微米(μm)之間。In one embodiment of the invention, the dielectric layer has a thickness between 1.5 micrometers (μm) and 4 micrometers (μm).

在本發明之一實施例中,上述之主動元件陣列基板的製造方法,更包括於介電層之一頂表面上形成多個凸塊(bumps)。In an embodiment of the invention, the method for fabricating the active device array substrate further includes forming a plurality of bumps on a top surface of the dielectric layer.

基於上述,本發明之主動元件陣列基板的設計是採用反射材質的共通線,因此共通線亦可視為一反射層,可減少製程步驟以及降低生產成本。另外,本實施例之介電層的設計可增加共通線與資料線之間的距離,以達到減少寄生電容的電容值。再者,由於本發明之主動元件陣列基板具有能夠與畫素電極耦合成儲存電容器的共通線,因此有助於提高儲存電容的電容值。Based on the above, the active device array substrate of the present invention is designed to use a common line of reflective materials, so that the common line can also be regarded as a reflective layer, which can reduce the manufacturing steps and reduce the production cost. In addition, the dielectric layer of the present embodiment is designed to increase the distance between the common line and the data line to achieve a capacitance value that reduces parasitic capacitance. Furthermore, since the active device array substrate of the present invention has a common line that can be coupled to the pixel electrode to be a storage capacitor, it contributes to an increase in the capacitance value of the storage capacitor.

為讓本發明之上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。The above described features and advantages of the present invention will be more apparent from the following description.

圖1A為本發明之一實施例之一種主動元件陣列基板的俯視示意圖。圖1B為沿圖1A之線I-I的剖面示意圖。圖1C為沿圖1A之線II-II的剖面示意圖。圖1D為沿圖1A之線III-III的剖面示意圖。請先參考圖1A與圖1B,本實施例之主動元件陣列基板100包括一基板110、多條掃描線120、多條資料線130、多個顯示單元140、多條掃描信號傳遞線150、一介電層160、一共通線170以及一電容介電層180。1A is a top plan view of an active device array substrate according to an embodiment of the invention. Fig. 1B is a schematic cross-sectional view taken along line I-I of Fig. 1A. Fig. 1C is a schematic cross-sectional view taken along line II-II of Fig. 1A. Figure 1D is a schematic cross-sectional view taken along line III-III of Figure 1A. Referring to FIG. 1A and FIG. 1B , the active device array substrate 100 of the present embodiment includes a substrate 110 , a plurality of scan lines 120 , a plurality of data lines 130 , a plurality of display units 140 , and a plurality of scan signal transmission lines 150 . The dielectric layer 160, a common line 170, and a capacitor dielectric layer 180.

詳細來說,掃描線120以及資料線130皆配置於基板110上,其中掃描線120的延伸方向實質上垂直於資料線130的延伸方向。在本實施例中,資料線130與掃描線120交錯以定義出多個顯示區域R,而顯示單元140配置於顯示區域R中。特別是,在本實施例中,每一顯示單元140分別與其中二條掃描線120以及其中一條資料線130電性連接。每一顯示單元140包括一第一子畫素140a以及一第二子畫素140b。第一子畫素140a包括一第一主動元件142a以及一與第一主動元件142a電性連接之第一畫素電極144a。第二子畫素140b包括一第二主動元件142b以及一與第二主動元件142b電性連接之第二畫素電極144b。其中,請同時參考圖1A與圖1C,本實施例之主動元件142(包括第一主動元件142a以及第二主動元件142b)例如是由閘極G、閘絕緣層GI、半導體圖案143、歐姆接觸層145、源極S以及汲極D所組成之薄膜電晶體(TFT)。In detail, the scan line 120 and the data line 130 are all disposed on the substrate 110 , wherein the extending direction of the scan line 120 is substantially perpendicular to the extending direction of the data line 130 . In the present embodiment, the data line 130 and the scan line 120 are interleaved to define a plurality of display areas R, and the display unit 140 is disposed in the display area R. In particular, in the embodiment, each display unit 140 is electrically connected to two scanning lines 120 and one of the data lines 130, respectively. Each display unit 140 includes a first sub-pixel 140a and a second sub-pixel 140b. The first sub-pixel 140a includes a first active element 142a and a first pixel electrode 144a electrically connected to the first active element 142a. The second sub-pixel 140b includes a second active element 142b and a second pixel electrode 144b electrically connected to the second active element 142b. Referring to FIG. 1A and FIG. 1C simultaneously, the active device 142 (including the first active component 142a and the second active component 142b) of the embodiment is, for example, a gate G, a gate insulating layer GI, a semiconductor pattern 143, and an ohmic contact. A thin film transistor (TFT) composed of a layer 145, a source S, and a drain D.

進一步而言,本實施例之第一主動元件142a以及第二主動元件142b分別與不同掃描線120電性連接,而第二主動元件142b透過第一主動元件142a與對應的資料線130電性連接。於其它實施例中,第一主動元件142a透過第二主動元件142a與對應的資料線130電性連接。換言之,在本實施例之主動元件陣列基板100中,並非所有的主動元件142都會與資料線130電性連接。當然,在其他可行之實施例中,各主動元件142亦可分別與對應之資料線130電性連接。此外,在同一列之顯示單元140中,二相鄰之顯示單元140分別與不同資料線130電性連接。Further, the first active component 142a and the second active component 142b of the embodiment are electrically connected to different scan lines 120, and the second active component 142b is electrically connected to the corresponding data line 130 through the first active component 142a. . In other embodiments, the first active component 142a is electrically connected to the corresponding data line 130 through the second active component 142a. In other words, in the active device array substrate 100 of the present embodiment, not all of the active devices 142 are electrically connected to the data line 130. Of course, in other feasible embodiments, each active component 142 can also be electrically connected to the corresponding data line 130. In addition, in the display unit 140 of the same column, the two adjacent display units 140 are electrically connected to different data lines 130, respectively.

簡言之,本實施例之主動元件陣列基板100的設計是使兩相鄰的第一子畫素140a與第二子畫素140b與同一條資料線130電性連接,因而得以使所需之資料線130的數目減半,進而減少源極驅動器(未繪示)的使用數量。此處,所述之畫素結構的設計即為所謂的半源極驅動(Half Source Driving,HSD)架構。In short, the active device array substrate 100 of the present embodiment is designed such that two adjacent first sub-pixels 140a and second sub-pixels 140b are electrically connected to the same data line 130, thereby enabling the required The number of data lines 130 is halved, thereby reducing the number of source drivers (not shown) used. Here, the design of the pixel structure is a so-called Half Source Driving (HSD) architecture.

請再同時參考圖1A與圖1B,在本實施例中,每一掃描信號傳遞線150分別與其中一條掃描線120電性連接。詳細而言,本實施例之每一掃描信號傳遞線150分別位於相鄰二資料線130之間,且掃描信號傳遞線150的延伸方向與資料線130的延伸方向實質上平行。換言之,本實施例之掃描信號傳遞線150的設計可有效減少掃描線120末端之扇出線路(fan-out trace)的數量。此處所述之掃描信號傳遞線150的設計即為一種於畫素上沿閘極線(Tracking Gate-line in Pixel,TGP)的佈線架構。Referring to FIG. 1A and FIG. 1B simultaneously, in the embodiment, each of the scan signal transmission lines 150 is electrically connected to one of the scan lines 120. In detail, each of the scan signal transmission lines 150 of the embodiment is located between the adjacent two data lines 130, and the extending direction of the scan signal transmission lines 150 is substantially parallel to the extending direction of the data lines 130. In other words, the design of the scan signal transmission line 150 of the present embodiment can effectively reduce the number of fan-out traces at the end of the scan line 120. The design of the scan signal transmission line 150 described herein is a wiring structure of a Tracking Gate-line in Pixel (TGP).

更進一步來說,本實施例之每一掃描信號傳遞線150包括一第一導電圖案152以及一第二導電圖案154,而第一導電圖案152是於製作掃描線120時同時形成,第二導電圖案154是於製作資料線130時同時形成。第二導電圖案154與第一導電圖案152電性連接,其中第二導電圖案154與掃描線120交錯,意即第二導電圖案154橫跨掃描線120。換言之,本實施例之每一掃描信號傳遞線150分別與其中一條掃描線120電性連接,而與其他條掃描線120電性絕緣。值得一提的是,掃描信號傳遞線150的數量可少於或等於資料線130的數量,在此並不加以限制。Further, each of the scan signal transmission lines 150 of the embodiment includes a first conductive pattern 152 and a second conductive pattern 154, and the first conductive pattern 152 is formed simultaneously when the scan line 120 is formed, and the second conductive The pattern 154 is formed simultaneously when the data line 130 is fabricated. The second conductive pattern 154 is electrically connected to the first conductive pattern 152 , wherein the second conductive pattern 154 is interdigitated with the scan line 120 , that is, the second conductive pattern 154 spans the scan line 120 . In other words, each of the scan signal transmission lines 150 of the embodiment is electrically connected to one of the scan lines 120 and electrically insulated from the other scan lines 120. It is worth mentioning that the number of scan signal transmission lines 150 may be less than or equal to the number of data lines 130, which is not limited herein.

請再同時參考圖1A與圖1C,本實施例之介電層160覆蓋掃描線120、資料線130、主動元件142(包括第一主動元件142a以及第二主動元件142b),且畫素電極144(包括第一畫素電極144a與第二畫素電極144b)配置於介電層160上。特別是,在本實施例中,介電層160的厚度例如是介於約1.5微米(μm)至約4微米(μm)之間。此外,介電層160具有多個凸塊162,而這些凸塊162例如是形成於介電層160上的表面微結構。Referring to FIG. 1A and FIG. 1C simultaneously, the dielectric layer 160 of the present embodiment covers the scan line 120, the data line 130, the active device 142 (including the first active device 142a and the second active device 142b), and the pixel electrode 144 The first pixel electrode 144a and the second pixel electrode 144b are disposed on the dielectric layer 160. In particular, in the present embodiment, the thickness of the dielectric layer 160 is, for example, between about 1.5 micrometers (μm) and about 4 micrometers (μm). In addition, the dielectric layer 160 has a plurality of bumps 162, and the bumps 162 are, for example, surface microstructures formed on the dielectric layer 160.

請同時參考圖1A、圖1B與圖1D,共通線170配置於第一畫素電極144a與介電層160之間以及第二畫素電極144b與介電層160之間。其中,本實施例之共通線170例如為一環形共通線(Common-ring),且與掃描線120以及資料線130分屬於不同膜層。特別是,本實施例之共通線170位於掃描信號傳遞線150上方,且共通線170覆蓋於凸塊162上。第一畫素電極144a以及第二畫素電極144b分別與共通線170部分重疊,且共通線170之材料例如是反射材料。Referring to FIG. 1A , FIG. 1B and FIG. 1D , the common line 170 is disposed between the first pixel electrode 144 a and the dielectric layer 160 and between the second pixel electrode 144 b and the dielectric layer 160 . The common line 170 of the present embodiment is, for example, a common-ring, and belongs to different film layers from the scan line 120 and the data line 130. In particular, the common line 170 of the present embodiment is located above the scan signal transmission line 150, and the common line 170 covers the bump 162. The first pixel electrode 144a and the second pixel electrode 144b partially overlap the common line 170, respectively, and the material of the common line 170 is, for example, a reflective material.

在本實施例中,由於主動元件陣列基板100的設計是採用反射材質的共通線170,因此此共通線170亦可視為一反射層。值得一提的是,在本實施例中,設置有共通線170的位置可視為一反射區,例如是共通線170與畫素電極144所重疊的區域,而未設置有共通線170的位置可視為一穿透區,例如是畫素電極144未與共通線170重疊的區域。換言之,每一子畫素(例如是第一子畫素140a或第二子畫素140b)可同時具有穿透區與反射區。因此,當本實施例之主動元件陣列基板100搭配一對向基板(未繪示)與一液晶層(未繪示)而構成一顯示面板(未繪示)時,此顯示面板可同時具有反射光線與使光源穿透的功能,此即為一種半穿透半反射式顯示面板(Transflective LCD,TR-LCD)。再者,由於本實施例之介電層160的厚度例如是介於約1.5微米(μm)至約4微米(μm)之間,因此可增加共通線170與資料線130之間的距離,可達到減少共通線170與資料線130之間的電容所造成的電源消耗(power consumption)。In the present embodiment, since the active device array substrate 100 is designed to use the common line 170 of the reflective material, the common line 170 can also be regarded as a reflective layer. It should be noted that, in this embodiment, the position where the common line 170 is disposed can be regarded as a reflective area, for example, the area where the common line 170 overlaps the pixel electrode 144, and the position where the common line 170 is not disposed is visible. A penetrating region is, for example, a region where the pixel electrode 144 does not overlap the common line 170. In other words, each sub-pixel (for example, the first sub-pixel 140a or the second sub-pixel 140b) may have both a penetrating region and a reflecting region. Therefore, when the active device array substrate 100 of the present embodiment is combined with a pair of substrates (not shown) and a liquid crystal layer (not shown) to form a display panel (not shown), the display panel can have reflection at the same time. Light and the function of penetrating the light source, this is a transflective display panel (Transflective LCD, TR-LCD). Moreover, since the thickness of the dielectric layer 160 of the embodiment is, for example, between about 1.5 micrometers (μm) and about 4 micrometers (μm), the distance between the common line 170 and the data line 130 can be increased. The power consumption caused by reducing the capacitance between the common line 170 and the data line 130 is achieved.

值得一提的是,本發明並不限定共通線170的形態,雖然此處所提及的共通線170具體化為環形共通線,且部份共通線170位於資料線130的上方,但於其他未繪示的實施例中,共通線170亦可為條狀、L型、U型、H型或其他適當的形狀,可降低共通線170與訊號線(資料線及掃描線)之間的電容所造成的電源消耗;或者,共通線170亦可不配置於資料線130的上方,以減少共通線170與資料線130之間的電容所造成的電源消耗;或者,共通線170延伸至部分第一畫素電極144a與部分第二畫素電極144b的正下方,以增加半穿透半反射式顯示面板之反射區的面積,同時亦可提高畫素電極144與共通線170之間的儲存電容的電容值,且亦不會造成開口率的損失。簡言之,共通線170的形態可以依據不同的使用需求而有多種變化,而圖1A所繪示的共通線170的結構設計僅是用以舉例說明,以讓此領域具有通常知識者能夠據以實施本發明,然其並非用以限定本發明所欲涵蓋之範疇。It should be noted that the present invention does not limit the form of the common line 170, although the common line 170 mentioned herein is embodied as a ring-shaped common line, and a part of the common line 170 is located above the data line 130, but other In the embodiment not shown, the common line 170 may also be strip, L-shaped, U-shaped, H-shaped or other suitable shape, which can reduce the capacitance between the common line 170 and the signal line (data line and scan line). The power consumption is caused by the power consumption; or the common line 170 may not be disposed above the data line 130 to reduce the power consumption caused by the capacitance between the common line 170 and the data line 130; or the common line 170 extends to the first part. The pixel electrode 144a and the portion of the second pixel electrode 144b directly underneath to increase the area of the reflective region of the transflective display panel, and also increase the storage capacitance between the pixel electrode 144 and the common line 170. The value of the capacitor does not cause a loss of aperture ratio. In short, the shape of the common line 170 can be varied according to different usage requirements, and the structural design of the common line 170 illustrated in FIG. 1A is only for illustration, so that the general knowledge in this field can be The invention is not intended to limit the scope of the invention as intended.

請同時參考圖1A與圖1D,在本實施例中,電容介電層180配置於第一畫素電極144a與共通線170之間以及第二畫素電極144b與共通線170之間。其中,畫素電極144(包括第一畫素電極144a以及第二畫素電極144b)可與共通線170耦合成一儲存電容器Cst,有助於提高儲存電容的電容值。Referring to FIG. 1A and FIG. 1D simultaneously, in the embodiment, the capacitor dielectric layer 180 is disposed between the first pixel electrode 144a and the common line 170 and between the second pixel electrode 144b and the common line 170. The pixel electrode 144 (including the first pixel electrode 144a and the second pixel electrode 144b) can be coupled to the common line 170 to form a storage capacitor Cst, which helps to increase the capacitance value of the storage capacitor.

此外,請再參考圖1A與圖1C,本實施例之主動元件陣列基板100更包括一保護層190,其中保護層190覆蓋掃描線120、資料線130、主動元件142(包括第一主動元件142a以及第二主動元件142b),且保護層190與介電層160的一底表面接觸。值得一提的是,在本實施例中,介電層160具有至少一貫穿保護層190的接觸窗164,其中接觸窗164暴露出主動元件142的汲極D,而畫素電極144透過接觸窗164直接與主動元件142的汲極D電性連接。In addition, referring to FIG. 1A and FIG. 1C, the active device array substrate 100 of the present embodiment further includes a protective layer 190, wherein the protective layer 190 covers the scan line 120, the data line 130, and the active device 142 (including the first active device 142a). And a second active component 142b), and the protective layer 190 is in contact with a bottom surface of the dielectric layer 160. It is worth mentioning that in the present embodiment, the dielectric layer 160 has at least one contact window 164 penetrating the protective layer 190, wherein the contact window 164 exposes the drain D of the active device 142, and the pixel electrode 144 passes through the contact window. The 164 is directly electrically connected to the drain D of the active component 142.

簡言之,由於本實施例是採用半源極驅動(HSD)的畫素架構搭配掃描信號傳遞線150的設計(即TGP的佈線架構),因此,可有效減少資料線130的使用數量以及有效減少掃描線120末端之扇出線路(fan-out trace)的數量,故可以輕易地達成窄邊界以及無邊界之設計需求。此外,本實施例之介電層160的設計可增加共通線170與資料線130之間的距離,可達到減少共通線170與資料線130之間的電容所造成的電源消耗。再者,由於本實施例之主動元件陣列基板100具有能夠與畫素電極144耦合成儲存電容器的共通線170,因此有助於提高儲存電容的電容值。In short, since the present embodiment uses a half-source driving (HSD) pixel architecture in combination with the design of the scanning signal transmission line 150 (ie, the wiring structure of the TGP), the number of data lines 130 can be effectively reduced and effectively By reducing the number of fan-out traces at the end of the scan line 120, narrow boundary and borderless design requirements can be easily achieved. In addition, the design of the dielectric layer 160 of the present embodiment can increase the distance between the common line 170 and the data line 130, and can reduce the power consumption caused by the capacitance between the common line 170 and the data line 130. Furthermore, since the active device array substrate 100 of the present embodiment has the common line 170 that can be coupled to the pixel electrode 144 to store the capacitor, it contributes to increasing the capacitance value of the storage capacitor.

以上僅介紹本發明之主動元件陣列基板100的結構,並未介紹本發明之主動元件陣列基板100的製造方法。對此,以下將以圖1A中的主動元件陣列基板100作為舉例說明,並配合圖2A至圖2F對本發明的主動元件陣列基板的製造方法進行詳細的說明。Only the structure of the active device array substrate 100 of the present invention will be described above, and the method of manufacturing the active device array substrate 100 of the present invention will not be described. In this regard, the active device array substrate 100 of FIG. 1A will be exemplified below, and the manufacturing method of the active device array substrate of the present invention will be described in detail with reference to FIGS. 2A to 2F.

圖2A至圖2F為本發明之一實施例之一種主動元件陣列基板的製造方法的流程示意圖。依照本實施例之主動元件陣列基板的製造方法,請同時參考圖1A與圖2A,先於一基板110上形成多條掃描線120、多條資料線130、多個主動元件142以及多條掃描信號傳遞線150。其中,掃描線120、資料線130、主動元件142以及掃描信號傳遞線150的製造方法包括下述步驟:首先,於基板110上形成多條掃描線120、多個與掃描線120電性連接的閘極G以及第一導電圖案152。也就是說,第一導電圖案152是於製作掃描線120時同時形成。接著,於基板110上形成一閘絕緣層GI,以覆蓋掃描線120、閘極G以及第一導電圖案152。2A to 2F are schematic flow charts showing a method of manufacturing an active device array substrate according to an embodiment of the present invention. According to the manufacturing method of the active device array substrate according to the embodiment, referring to FIG. 1A and FIG. 2A, a plurality of scan lines 120, a plurality of data lines 130, a plurality of active elements 142, and a plurality of scans are formed on a substrate 110. Signal transmission line 150. The manufacturing method of the scan line 120, the data line 130, the active device 142, and the scan signal transmission line 150 includes the following steps: First, a plurality of scan lines 120 are formed on the substrate 110, and a plurality of scan lines 120 are electrically connected to the scan lines 120. The gate G and the first conductive pattern 152. That is, the first conductive pattern 152 is formed simultaneously when the scan line 120 is formed. Next, a gate insulating layer GI is formed on the substrate 110 to cover the scan line 120, the gate G, and the first conductive pattern 152.

然後,閘絕緣層GI上形成多個半導體圖案143以及位於半導體圖案143上方的歐姆接觸層145。最後,於閘絕緣層GI上形成多條資料線130、多個與資料線130電性連接的源極S、多個汲極D以及一與第一導電圖案152電性連接之第二導電圖案154。也就是說,第二導電圖案154是於製作資料線130時同時形成。特別是,在本實施例中,閘極G、半導體圖案143、源極S以及汲極D構成主動元件142,而第一導電圖案152與第二導電圖案154構成掃描信號傳遞線150。Then, a plurality of semiconductor patterns 143 and an ohmic contact layer 145 over the semiconductor pattern 143 are formed on the gate insulating layer GI. Finally, a plurality of data lines 130, a plurality of source electrodes S electrically connected to the data lines 130, a plurality of drain electrodes D, and a second conductive pattern electrically connected to the first conductive patterns 152 are formed on the gate insulating layer GI. 154. That is, the second conductive pattern 154 is formed simultaneously when the data line 130 is fabricated. In particular, in the present embodiment, the gate G, the semiconductor pattern 143, the source S, and the drain D constitute the active device 142, and the first conductive pattern 152 and the second conductive pattern 154 constitute the scan signal transmission line 150.

接著,請參考圖2B,形成一保護層190,以覆蓋資料線130(請參考圖1A)、主動元件142以及掃描信號傳遞線150。並且,掃描信號傳遞線150與掃描線120分離。Next, referring to FIG. 2B, a protective layer 190 is formed to cover the data line 130 (please refer to FIG. 1A), the active device 142, and the scan signal transmission line 150. Also, the scan signal transmission line 150 is separated from the scan line 120.

接著,請參考圖2C,形成一介電層160,以覆蓋掃描線120、資料線130、主動元件142以及掃描信號傳遞線150。在本實施例中,介電層160的厚度例如是介於約1.5微米(μm)至約4微米(μm)之間,且介電層160之一頂表面上形成有多個凸塊162,其中這些凸塊162例如是形成於介電層160上的表面微結構。再者,本實施例之介電層160具有至少一貫穿保護層190的接觸窗164,其中接觸窗164暴露出主動元件142的汲極D。其中介電層160可為單層或多層結構,而其材料包含有機材料(例如:光阻、苯並環丁烯(enzocyclobutane,BCB)、環烯類、聚醯 亞胺類、聚醯胺類、聚酯類、聚醇類、聚環氧乙烷類、聚苯類、樹脂類、聚醚類、聚酮類、或其它合適材料、或上述之組合)、無機材料(例如:氮化矽、氧化矽、氮氧化矽、其它合適的材料、或上述之組合)、其它合適的材料、或上述之組合。Next, referring to FIG. 2C, a dielectric layer 160 is formed to cover the scan line 120, the data line 130, the active device 142, and the scan signal transfer line 150. In this embodiment, the thickness of the dielectric layer 160 is, for example, between about 1.5 micrometers (μm) and about 4 micrometers (μm), and a plurality of bumps 162 are formed on a top surface of one of the dielectric layers 160. The bumps 162 are, for example, surface microstructures formed on the dielectric layer 160. Moreover, the dielectric layer 160 of the present embodiment has at least one contact window 164 extending through the protective layer 190, wherein the contact window 164 exposes the drain D of the active element 142. The dielectric layer 160 may be a single layer or a multilayer structure, and the material thereof comprises an organic material (for example: photoresist, enzocyclobutane (BCB), cycloolefin, polyfluorene). Imines, polyamines, polyesters, polyalcohols, polyethylene oxides, polyphenyls, resins, polyethers, polyketones, or other suitable materials, or combinations thereof, Inorganic materials (e.g., tantalum nitride, hafnium oxide, niobium oxynitride, other suitable materials, or combinations thereof), other suitable materials, or combinations thereof.

接著,請同時參考圖1A與圖2D,於介電層160上直接形成一共通線170,其中共通線170例如為一環形共通線(Common-ring)。特別是,本實施例之共通線170是位於掃描信號傳遞線150上方,且共通線170覆蓋於凸塊162上。此外,共通線170可為單層或多層結構,其材料例如是反射材料,舉例而言,金、銀、銅、鋁、鈦、鉭、鎢、鉬、上述之合金、上述的氧化物、上述的氮化物、其它合適的化合物、其它合適的材料、或上述之組合。Then, referring to FIG. 1A and FIG. 2D, a common line 170 is directly formed on the dielectric layer 160, wherein the common line 170 is, for example, a common-ring. In particular, the common line 170 of the present embodiment is located above the scan signal transmission line 150, and the common line 170 covers the bump 162. In addition, the common line 170 may be a single layer or a multilayer structure, and the material thereof is, for example, a reflective material, for example, gold, silver, copper, aluminum, titanium, tantalum, tungsten, molybdenum, the above alloy, the above oxide, the above Nitride, other suitable compounds, other suitable materials, or combinations thereof.

由於本實施例是採用反射材質的共通線170,因此此共通線170亦可視為一反射層。故,本實施例可省略習知製作反射層的製程步驟,可有效降低生產成本。Since the present embodiment is a common line 170 using a reflective material, the common line 170 can also be regarded as a reflective layer. Therefore, in this embodiment, the manufacturing process of the conventional reflective layer can be omitted, and the production cost can be effectively reduced.

值得一提的是,在本實施例中,設置有共通線170的位置可視為一反射區,而未設置有共通線170的位置可視為一穿透區。再者,由於本實施例之介電層160的厚度例如是介於約1.5微米(μm)至約4微米(μm)之間,因此可增加共通線170與資料線130之間的距離,可達到減少電容值與電源消耗的效果。It is worth mentioning that in the present embodiment, the position where the common line 170 is disposed can be regarded as a reflection area, and the position where the common line 170 is not provided can be regarded as a penetration area. Moreover, since the thickness of the dielectric layer 160 of the embodiment is, for example, between about 1.5 micrometers (μm) and about 4 micrometers (μm), the distance between the common line 170 and the data line 130 can be increased. Achieve the effect of reducing the capacitance value and power consumption.

然後,請參考圖2E,於共通線170以及介電層160上直接形成一電容介電層180。Then, referring to FIG. 2E, a capacitor dielectric layer 180 is directly formed on the common line 170 and the dielectric layer 160.

最後,請參2F,於介電層160以及電容介電層180 上直接形成多個畫素電極144,其中每一畫素電極144分別透過接觸窗164直接與其中一個主動元件142的汲極D電性連接,且電容介電層180位於畫素電極144與共通線170之間。特別是,在本實施例中,畫素電極144可與共通線170耦合成一儲存電容器Cst,有助於提高儲存電容的電容值。至此,已完成主動元件陣列基板100的製作。Finally, please refer to 2F, in the dielectric layer 160 and the capacitor dielectric layer 180 A plurality of pixel electrodes 144 are directly formed on the pixel electrode 144, wherein each of the pixel electrodes 144 is electrically connected to the drain D of one of the active devices 142 through the contact window 164, and the capacitor dielectric layer 180 is located at the pixel electrode 144. Between lines 170. In particular, in the present embodiment, the pixel electrode 144 can be coupled to the common line 170 to form a storage capacitor Cst, which helps to increase the capacitance value of the storage capacitor. So far, the fabrication of the active device array substrate 100 has been completed.

綜上所述,由於本發明是採用半源極驅動(HSD)的畫素架構搭配掃描信號傳遞線的設計(即TGP的佈線架構),因此,可有效減少資料線的使用數量以及有效減少掃描線末端之扇出線路(fan-out trace)的數量,故可以輕易地達成窄邊界以及無邊界之設計需求。此外,本發明之主動元件陣列基板的設計是採用反射材質的共通線,因此共通線亦可視為一反射層,可減少製程步驟以及降低生產成本。再者,本發明之介電層的設計可增加共通線與資料線之間的距離,可達到減少共通線與資料線之間的電容所造成的電源消耗。另外,由於本發明之主動元件陣列基板具有能夠與畫素電極耦合成儲存電容器的共通線,因此有助於提高儲存電容的電容值。In summary, since the present invention adopts a half source driving (HSD) pixel structure with a scan signal transmission line design (ie, a TGP wiring structure), the number of data lines can be effectively reduced and the scanning can be effectively reduced. The number of fan-out traces at the end of the line makes it easy to achieve narrow boundaries and borderless design requirements. In addition, the active device array substrate of the present invention is designed to use a common line of reflective materials, so that the common line can also be regarded as a reflective layer, which can reduce the manufacturing steps and reduce the production cost. Furthermore, the design of the dielectric layer of the present invention can increase the distance between the common line and the data line, and can reduce the power consumption caused by the capacitance between the common line and the data line. In addition, since the active device array substrate of the present invention has a common line that can be coupled to the pixel electrode to be a storage capacitor, it contributes to an increase in the capacitance value of the storage capacitor.

雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作些許之更動與潤飾,故本發明之保護範圍當視後附之申請專利範圍所界定者為準。Although the present invention has been disclosed in the above embodiments, it is not intended to limit the invention, and any one of ordinary skill in the art can make some modifications and refinements without departing from the spirit and scope of the invention. The scope of the invention is defined by the scope of the appended claims.

100‧‧‧主動元件陣列基板100‧‧‧Active component array substrate

110‧‧‧基板110‧‧‧Substrate

120‧‧‧掃描線120‧‧‧ scan line

130‧‧‧資料線130‧‧‧Information line

140‧‧‧顯示單元140‧‧‧Display unit

140a‧‧‧第一子畫素140a‧‧‧First subpixel

140b‧‧‧第二子畫素140b‧‧‧Second subpixel

142‧‧‧主動元件142‧‧‧Active components

142a‧‧‧第一主動元件142a‧‧‧First active component

142b‧‧‧第二主動元件142b‧‧‧Second active component

143‧‧‧半導體圖案143‧‧‧ semiconductor pattern

144‧‧‧畫素電極144‧‧‧ pixel electrodes

144a‧‧‧第一畫素電極144a‧‧‧first pixel electrode

144b‧‧‧第二畫素電極144b‧‧‧second pixel electrode

145‧‧‧歐姆接觸層145‧‧ ohmic contact layer

150‧‧‧掃描信號傳遞線150‧‧‧ scan signal transmission line

152‧‧‧第一導電圖案152‧‧‧First conductive pattern

154‧‧‧第二導電圖案154‧‧‧Second conductive pattern

160‧‧‧介電層160‧‧‧ dielectric layer

162‧‧‧凸塊162‧‧‧Bumps

164‧‧‧接觸窗164‧‧‧Contact window

170‧‧‧共通線170‧‧‧Common line

180‧‧‧電容介電層180‧‧‧Capacitive dielectric layer

190‧‧‧保護層190‧‧‧Protective layer

Cst‧‧‧儲存電容器Cst‧‧‧ storage capacitor

D‧‧‧汲極D‧‧‧汲

G‧‧‧閘極G‧‧‧ gate

GI‧‧‧閘絕緣層GI‧‧‧ brake insulation

R‧‧‧顯示區域R‧‧‧ display area

S‧‧‧源極S‧‧‧ source

圖1A為本發明之一實施例之一種主動元件陣列基板 的俯視示意圖。1A is an active device array substrate according to an embodiment of the invention A schematic view of the top.

圖1B為沿圖1A之線I-I的剖面示意圖。Fig. 1B is a schematic cross-sectional view taken along line I-I of Fig. 1A.

圖1C為沿圖1A之線II-II的剖面示意圖。Fig. 1C is a schematic cross-sectional view taken along line II-II of Fig. 1A.

圖1D為沿圖1A之線III-III的剖面示意圖。Figure 1D is a schematic cross-sectional view taken along line III-III of Figure 1A.

圖2A至圖2F為本發明之一實施例之一種主動元件陣列基板的製造方法的流程示意圖。2A to 2F are schematic flow charts showing a method of manufacturing an active device array substrate according to an embodiment of the present invention.

100...主動元件陣列基板100. . . Active device array substrate

120...掃描線120. . . Scanning line

130...資料線130. . . Data line

140...顯示單元140. . . Display unit

140a...第一子畫素140a. . . First subpixel

140b...第二子畫素140b. . . Second subpixel

142...主動元件142. . . Active component

142a...第一主動元件142a. . . First active component

142b...第二主動元件142b. . . Second active component

143...半導體圖案143. . . Semiconductor pattern

144...畫素電極144. . . Pixel electrode

144a...第一畫素電極144a. . . First pixel electrode

144b...第二畫素電極144b. . . Second pixel electrode

150...掃描信號傳遞線150. . . Scanning signal transmission line

152...第一導電圖案152. . . First conductive pattern

154...第二導電圖案154. . . Second conductive pattern

162...凸塊162. . . Bump

170...共通線170. . . Common line

D...汲極D. . . Bungee

G...閘極G. . . Gate

R...顯示區域R. . . Display area

S...源極S. . . Source

Claims (17)

一種主動元件陣列基板,包括:一基板;多條掃描線,配置於該基板上;多條資料線,配置於該基板上,並與該些掃描線交錯以定義出多個顯示區域;多個顯示單元,配置於該些顯示區域中,各該顯示單元分別與其中二條掃描線以及其中一條資料線電性連接,各該顯示單元包括:一第一子畫素,包括一第一主動元件以及一與該第一主動元件電性連接之第一畫素電極;一第二子畫素,包括一第二主動元件以及一與該第二主動元件電性連接之第二畫素電極,該第一主動元件以及該第二主動元件分別與不同掃描線電性連接,而該第二主動元件透過該第一主動元件與對應的資料線電性連接,且在同一列之顯示單元中,二相鄰之顯示單元分別與不同資料線電性連接;多條掃描信號傳遞線,各該掃描信號傳遞線分別與其中一條掃描線電性連接;一介電層,覆蓋該些掃描線、該些資料線、該些第一主動元件以及該些第二主動元件,且該些第一畫素電極與該些第二畫素電極配置於該介電層上;一共通線,配置於該第一畫素電極與該介電層之間以及該第二畫素電極與該介電層之間;以及一電容介電層,配置於該第一畫素電極與該共通線之 間以及該第二畫素電極與該共通線之間。 An active device array substrate includes: a substrate; a plurality of scan lines disposed on the substrate; a plurality of data lines disposed on the substrate and interleaved with the scan lines to define a plurality of display areas; The display unit is disposed in the display areas, and each of the display units is electrically connected to the two scan lines and one of the data lines, and each of the display units includes: a first sub-pixel, including a first active component, and a first pixel electrode electrically connected to the first active component; a second sub-pixel comprising a second active component and a second pixel electrode electrically connected to the second active component, the first An active component and the second active component are respectively electrically connected to different scan lines, and the second active component is electrically connected to the corresponding data line through the first active component, and in the display unit of the same column, two phases The adjacent display units are electrically connected to different data lines respectively; a plurality of scanning signal transmission lines, each of which is electrically connected to one of the scanning lines; a dielectric layer covering The scan lines, the data lines, the first active elements, and the second active elements, and the first pixel electrodes and the second pixel electrodes are disposed on the dielectric layer; a common line And disposed between the first pixel electrode and the dielectric layer and between the second pixel electrode and the dielectric layer; and a capacitor dielectric layer disposed on the first pixel electrode and the common line It And between the second pixel electrode and the common line. 如申請專利範圍第1項所述之主動元件陣列基板,其中該些掃描線的延伸方向實質上垂直於該些資料線的延伸方向。 The active device array substrate according to claim 1, wherein the scanning lines extend in a direction substantially perpendicular to an extending direction of the data lines. 如申請專利範圍第1項所述之主動元件陣列基板,其中該些掃描信號傳遞線的數量少於或等於該些資料線的數量。 The active device array substrate according to claim 1, wherein the number of the scan signal transmission lines is less than or equal to the number of the data lines. 如申請專利範圍第1項所述之主動元件陣列基板,其中各該掃描信號傳遞線分別位於相鄰二資料線之間。 The active device array substrate according to claim 1, wherein each of the scanning signal transmission lines is located between adjacent two data lines. 如申請專利範圍第1項所述之主動元件陣列基板,其中該些掃描信號傳遞線的延伸方向與該些資料線的延伸方向實質上平行。 The active device array substrate according to claim 1, wherein the scanning signal transmission lines extend in a direction substantially parallel to the extending direction of the data lines. 如申請專利範圍第1項所述之主動元件陣列基板,其中各該掃描信號傳遞線包括:一第一導電圖案;以及一第二導電圖案,與該第一導電圖案電性連接,其中該第二導電圖案與該些掃描線交錯。 The active device array substrate of claim 1, wherein each of the scan signal transmission lines comprises: a first conductive pattern; and a second conductive pattern electrically connected to the first conductive pattern, wherein the first The two conductive patterns are interlaced with the scan lines. 如申請專利範圍第1項所述之主動元件陣列基板,其中該介電層的厚度介於1.5微米至4微米之間。 The active device array substrate of claim 1, wherein the dielectric layer has a thickness of between 1.5 micrometers and 4 micrometers. 如申請專利範圍第1項所述之主動元件陣列基板,其中該介電層具有多個凸塊(bumps),而該共通線覆蓋於該些凸塊上。 The active device array substrate of claim 1, wherein the dielectric layer has a plurality of bumps, and the common line covers the bumps. 如申請專利範圍第1項所述之主動元件陣列基板,其中該共通線之材料包括反射材料。 The active device array substrate according to claim 1, wherein the material of the common line comprises a reflective material. 如申請專利範圍第1項所述之主動元件陣列基 板,其中該共通線位於該些掃描信號傳遞線上方。 Active element array base as described in claim 1 a board, wherein the common line is located above the scan signal transmission lines. 如申請專利範圍第1項所述之主動元件陣列基板,其中該些第一畫素電極以及該些第二畫素電極分別與該共通線部分重疊。 The active device array substrate according to claim 1, wherein the first pixel electrodes and the second pixel electrodes respectively overlap the common line portion. 如申請專利範圍第1項所述之主動元件陣列基板,更包括一保護層,其中該保護層覆蓋該些掃描線、該些資料線、該些第一主動元件以及該些第二主動元件,且該保護層與該介電層的一底表面接觸。 The active device array substrate of claim 1, further comprising a protective layer, wherein the protective layer covers the scan lines, the data lines, the first active elements, and the second active elements, And the protective layer is in contact with a bottom surface of the dielectric layer. 一種主動元件陣列基板的製造方法,包括:於一基板上形成多條掃描線、多條資料線、多個主動元件以及多條掃描信號傳遞線,其中該些掃描信號傳遞線與該些掃描線分離;形成一介電層,以覆蓋該些掃描線、該些資料線、該些主動元件以及該些掃描信號傳遞線;於該介電層上直接形成一共通線;於該共通線以及該介電層上直接形成一電容介電層;以及於該介電層以及該電容介電層上直接形成多個畫素電極,且該電容介電層位於該些畫素電極與該共通線之間,其中各該畫素電極分別與其中一個主動元件電性連接。 A method for manufacturing an active device array substrate includes: forming a plurality of scan lines, a plurality of data lines, a plurality of active elements, and a plurality of scan signal transmission lines on a substrate, wherein the scan signal transmission lines and the scan lines Separating; forming a dielectric layer to cover the scan lines, the data lines, the active elements, and the scan signal transmission lines; forming a common line directly on the dielectric layer; and the common line and the Forming a capacitor dielectric layer directly on the dielectric layer; and forming a plurality of pixel electrodes directly on the dielectric layer and the capacitor dielectric layer, and the capacitor dielectric layer is located on the pixel electrodes and the common line And wherein each of the pixel electrodes is electrically connected to one of the active elements. 如申請專利範圍第13項所述之主動元件陣列基板的製造方法,其中該些掃描線、多條資料線、多個主動元件以及多條掃描信號傳遞線的製造方法包括:於該基板上形成多條掃描線、多個與該些掃描線電性連接的閘極以及第一導電圖案; 於該基板上形成一閘絕緣層,以覆蓋該些掃描線、該些閘極以及該第一導電圖案;該閘絕緣層上形成多個半導體圖案;以及於該閘絕緣層上形成多條資料線、多個與該些資料線電性連接的源極、多個汲極以及一與該第一導電圖案電性連接之第二導電圖案,其中該些閘極、該些半導體圖案、該些源極以及該些汲極構成該些主動元件,而該第一導電圖案與該第二導電圖案構成該些掃描信號傳遞線。 The method for manufacturing an active device array substrate according to claim 13, wherein the scan lines, the plurality of data lines, the plurality of active elements, and the plurality of scan signal transmission lines are formed by: forming on the substrate a plurality of scan lines, a plurality of gates electrically connected to the scan lines, and a first conductive pattern; Forming a gate insulating layer on the substrate to cover the scan lines, the gates and the first conductive pattern; forming a plurality of semiconductor patterns on the gate insulating layer; and forming a plurality of materials on the gate insulating layer a wire, a plurality of sources electrically connected to the data lines, a plurality of drains, and a second conductive pattern electrically connected to the first conductive pattern, wherein the gates, the semiconductor patterns, and the The source and the drains constitute the active components, and the first conductive pattern and the second conductive pattern constitute the scan signal transmission lines. 如申請專利範圍第13項所述之主動元件陣列基板的製造方法,更包括在形成該介電層之前先形成一保護層,以覆蓋該些資料線、該些主動元件以及該些掃描信號傳遞線。 The method for manufacturing an active device array substrate according to claim 13 , further comprising forming a protective layer to cover the data lines, the active elements, and the scan signals before forming the dielectric layer. line. 如申請專利範圍第13項所述之主動元件陣列基板的製造方法,其中該介電層的厚度介於1.5微米至4微米之間。 The method of fabricating an active device array substrate according to claim 13, wherein the dielectric layer has a thickness of between 1.5 micrometers and 4 micrometers. 如申請專利範圍第13項所述之主動元件陣列基板的製造方法,更包括於該介電層之一頂表面上形成多個凸塊(bumps)。 The method for manufacturing an active device array substrate according to claim 13, further comprising forming a plurality of bumps on a top surface of the dielectric layer.
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* Cited by examiner, † Cited by third party
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TW200719003A (en) * 2005-11-10 2007-05-16 Au Optronics Corp Transflective pixel structure and fabricating method thereof
CN101231359A (en) * 2006-10-31 2008-07-30 三星电子株式会社 Polarizer and liquid crystal display provided with the same
TW200837831A (en) * 2007-03-01 2008-09-16 Au Optronics Corp Method for forming display substrate and film

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200719003A (en) * 2005-11-10 2007-05-16 Au Optronics Corp Transflective pixel structure and fabricating method thereof
CN101231359A (en) * 2006-10-31 2008-07-30 三星电子株式会社 Polarizer and liquid crystal display provided with the same
TW200837831A (en) * 2007-03-01 2008-09-16 Au Optronics Corp Method for forming display substrate and film

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