TWI408062B - 輪胎壓力監控系統(tpms)中感應器預載於組裝後之自動調整 - Google Patents
輪胎壓力監控系統(tpms)中感應器預載於組裝後之自動調整 Download PDFInfo
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- 239000003550 marker Substances 0.000 claims 2
- 238000010897 surface acoustic wave method Methods 0.000 description 23
- 230000008901 benefit Effects 0.000 description 4
- 238000009529 body temperature measurement Methods 0.000 description 3
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- 238000009530 blood pressure measurement Methods 0.000 description 1
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- 230000000694 effects Effects 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
- G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
- G01L9/0025—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element with acoustic surface waves
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
- G01L1/162—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators
- G01L1/165—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators with acoustic surface waves
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
- G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/25—Constructional features of resonators using surface acoustic waves
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- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/4913—Assembling to base an electrical component, e.g., capacitor, etc.
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Measuring Fluid Pressure (AREA)
Description
本發明係關於表面聲波(SAW)式之輪胎壓力感應器(TPMS),且更特定言之,係關於在封裝之最終組裝後預載壓力SAW諧振器頻率的自動調整。
在此項技術中已知藉由安置於偵測區中之3個SAW諧振器之頻率變化來量測壓力及溫度。申請者擁有之較早申請案第GB 0302311.6號(頒為第GB 2386684號)揭示(例如)懸置於兩個突出部分之間的基板,如圖1中所示。封裝蓋/膜片具有壓在石英基板上之小凹坑。壓力之變化使SAW基板彎曲,此又使修改頻率之SAW諧振器畸變。所有三個諧振器皆回應溫度。僅P SAW回應壓力,因此△F(P-T1)與壓力成比例。石英為各向異性材料,因而T1及T2具有對溫度之不同回應,因此△F(T1-T2)與溫度成比例。
圖2展示TPMS感應器之總成。SAW晶粒位於兩個突出部分中央。將SAW線接合至電隔離之接腳。使蓋/膜片降低至石英上。
在製造過程期間,必需在一緊密頻率容差內預載壓力SAW,以減少製造變化並確保操作之頻率遵守相關射頻傳輸調節頻帶,例如ISM頻帶(工業、科學及醫學)。在預載過程期間,將封裝機械地拘束於一機械預載夾具內,同時量測壓力SAW之頻率。在達成正確頻率時,使用雷射焊接機來將封裝基座及蓋焊接在一起。然而,歸因於雷射焊接之機械效應,封裝之密封產生預載頻率之偏移。目前,必須藉由修改預載頻率而併入並考量此偏移及生產擴展。
根據本發明,提供一種調整壓力監控封裝之預載的方法,其藉由在密封封裝之外部上產生標記(涉及塑膠變形之較小區域)以產生封裝之預載頻率之偏移。可藉由(但不限於)使用雷射來產生此等標記。
根據本發明之另一態樣,提供一種製造一壓力監控封裝之方法,其包含下述步驟:將複數個SAW諧振器安裝至一基板上;將該基板安裝於一封裝基座中;將該封裝基座機械地拘束於一機械預載夾具內;在量測SAW之頻率的同時使用該夾具來調整預載,直至獲得所需頻率為止;使用一雷射焊接機來將一蓋焊接至該封裝基座;及接著藉由使用雷射焊接機以在該封裝之外部上產生雷射標記來微調預載頻率。
本發明具有以下優勢:本發明賦能預載頻率在已將蓋固定至基座(以往可發生預載頻率之改變的階段)後之非常精確之設定,本發明比先前技術方法有效得多,先前技術方法試圖預料將發生之頻率偏移並在焊接蓋之前調整跳動之預載頻率以補償此預料之偏移。
圖1展示自先前技術得知的諸如用於輪胎壓力監控之典型溫度補償式壓力感應器。該感應器包括一基板1,該基板1由膜片7之小凹坑6嚙合於點5處以將壓力變化傳輸至基板,既而在其中產生應變場變化,該變化又由安裝於基板1上之諧振器2、3、4偵測。詳言之,如圖1中所示,三個SAW提供於基板上:一第一壓力量測SAW,其安裝於基板1之應變區上;一第一溫度量測SAW,其安裝於基板1之未應變區上,其中第一溫度量測SAW之縱軸與壓力SAW之縱軸對準;及一第二溫度量測SAW,其亦安裝於基板1之未應變區上,其中第二溫度量測SAW之縱軸偏向壓力SAW及第一溫度SAW之縱軸。如自先前技術所知的,此組態使得能夠採取有效的溫度補償式壓力讀取。
如圖2中所示,將基板封閉於一封裝中以形成感應器總成,封裝10具有:一基座11,在基座11上,基板簡單地支撐於突出部分12上;及一膜片7,其由封裝蓋形成。膜片7將在其上表面上經受將量測之壓力環境,同時封裝10之內部13承受膜片7之下表面所經受之參考壓力。因此,外部環境之壓力變化引起膜片7之缺損,該壓力變化藉由小凹坑6而傳輸至基板1。
為了根據本發明來調整壓力監控封裝之預載,呈塑膠變形之較小區域之形式的標記21至28、31至38形成於密封封裝10之外部上。此等標記21至28、31至38產生該封裝之預載頻率之偏移,既而賦能該封裝之操作之頻率的微調。可以許多不同方式來產生該等斑點,諸如使用雷射。
更特定言之,將雷射斑點施加至封裝10之蓋/膜片7之表面及/或邊緣,例如,如圖3中所示,施加至蓋/膜片7之表面15的雷射斑點產生一頻率上移,而如圖4中所示,施加至蓋/膜片7之邊緣16的雷射斑點產生一頻率下移(若頻率下移係在蓋/膜片之邊緣上)。
換言之,施加至膜片之側面之雷射斑點減少預載頻率且施加至膜片之頂表面之斑點增加預載。由眼睛定位之每一雷射斑點產生一在20至40kHz之範圍內的預載頻率偏移。
由每一斑點產生之頻率偏移之量取決於標記之穿透之直徑、位置及深度。可藉由雷射之機械定位而達成頻率偏移之重複性。較佳地,每一雷射標記為一雷射斑點,雖然可使用其他標記,諸如連續雷射線。本發明具有另一優勢:頻率調諧雷射斑點之添加並未對感應器敏感性、滯後、局部疲勞等具有消極影響。
此方法為SAW式之TPMS感應器之大量製造提供極大之益處,例如,對精確機械預載頻率設定之較少需要;可達成之壓力SAW之頻率的較緊密容差;預載過程之自動化;及因此顯著之製造成本益處。
1‧‧‧基板
2‧‧‧諧振器
3‧‧‧諧振器
4‧‧‧諧振器
5‧‧‧點
6‧‧‧小凹坑
7‧‧‧蓋/膜片
10‧‧‧封裝
11‧‧‧基座
12‧‧‧突出部分
13‧‧‧內部
15‧‧‧表面
16‧‧‧邊緣
21-28、31-38‧‧‧標記
圖1為根據先前技術之溫度補償式SAW式之壓力感應器的圖示說明;圖2為實施圖1之感應器的壓力感應器總成之截面側視圖;圖3為展示用於增加預載頻率之斑點圖案的本發明之圖示說明;及圖4為展示用於減少預載頻率之斑點圖案的本發明之圖示說明。
1...基板
6...小凹坑
7...蓋/膜片
10...封裝
11...基座
12...突出部分
13...內部
15...表面
16...邊緣
Claims (18)
- 一種調整一壓力監控封裝(10)之預載之方法,其包含下述步驟:在該密封封裝(10)之外部(15、16)上產生至少一標記(21至28、31至38)以便產生該封裝之預載頻率之一偏移。
- 如請求項1之方法,其中該產生標記之步驟包含產生塑膠變形之較小區域。
- 如請求項1或2之方法,其中該等標記係藉由使用一雷射來產生。
- 如請求項3之方法,其中該等標記係使用一雷射焊接機來產生。
- 如請求項1或2之方法,其中該等標記係施加至該封裝(10)之一蓋(7)之表面(15)及該封裝(10)之該蓋/膜片(7)之一邊緣(16)中之至少一者。
- 如請求項1或2之方法,其中該標記或每一標記(21至28、31至38)之穿透的直徑、位置及深度經變化以變化藉此產生之所得頻率偏移。
- 如請求項1或2之方法,其中每一標記為一斑點。
- 如請求項1或2之方法,其中每一標記為一連續線。
- 一種製造一壓力監控封裝之方法,其包含下述步驟:將複數個諧振器(2、3、4)安裝至一基板(1)上;將該基板(1)安裝於一封裝基座(11)中;將該封裝基座(11)機械地拘束於一機械預載夾具中;在量測該等諧振器(2、3、4)之頻率的同時使用該夾具來調整預載,直至獲得所需頻 率為止;將一蓋(7)焊接至該封裝基座(11);及接著藉由在該封裝(10)之外部上產生標記(21至28、31至38)來微調該預載頻率。
- 如請求項9之方法,其中該產生標記之步驟包含產生塑膠變形之較小區域。
- 如請求項9或10之方法,其中該等標記係藉由使用一雷射來產生。
- 如請求項11之方法,其中該等標記係使用一雷射焊接機來產生。
- 如請求項9或10之方法,其中該等標記係施加至該封裝(10)之一蓋(7)之表面(15)及該封裝(10)之該蓋/膜片(7)之一邊緣(16)中之至少一者。
- 如請求項9或10之方法,其中該標記或每一標記(21至28、31至38)之穿透的直徑、位置及深度經變化以變化藉此產生之所得頻率偏移。
- 如請求項9或10之方法,其中每一標記為一斑點。
- 如請求項9或10之方法,其中每一標記為一連續線。
- 一種壓力監控封裝,其包含:複數個諧振器(2、3、4),該複數個諧振器(2、3、4)安裝至一基板(1)上,該基板(1)又安裝於一封裝基座(11)中;及一蓋(7),其焊接至該封裝基座(11)上,該封裝(10)之外部(15、16)具有在上面產生的微調該封裝之預載頻率的標記。
- 如請求項17之壓力監控封裝,其中該等標記係產生於該封裝(10)之該蓋(7)之表面(15)及該封裝(10)之該蓋/膜片(7)之一邊緣(16)中之至少一者上。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0612520A GB0612520D0 (en) | 2006-06-23 | 2006-06-23 | Post assembly automatic adjustment of tpms sensor preload |
GB0613060A GB2439344B (en) | 2006-06-23 | 2006-06-30 | Post assembly automatic adjustment of tpms sensor preload |
Publications (2)
Publication Number | Publication Date |
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TW200800659A TW200800659A (en) | 2008-01-01 |
TWI408062B true TWI408062B (zh) | 2013-09-11 |
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TW096112345A TWI408062B (zh) | 2006-06-23 | 2007-04-09 | 輪胎壓力監控系統(tpms)中感應器預載於組裝後之自動調整 |
Country Status (6)
Country | Link |
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US (1) | US7798006B2 (zh) |
EP (1) | EP2032960B1 (zh) |
JP (1) | JP5029851B2 (zh) |
GB (1) | GB2439344B (zh) |
TW (1) | TWI408062B (zh) |
WO (1) | WO2007148034A1 (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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GB2462128B (en) * | 2008-07-25 | 2012-05-02 | Transense Technologies Plc | SAW sensor with adjustable preload |
GB2465977A (en) * | 2008-12-02 | 2010-06-09 | Transense Technologies Plc | Sensor package with connection pins in lid |
CN107290096A (zh) | 2016-04-11 | 2017-10-24 | 飞思卡尔半导体公司 | 具有膜片的压力感测集成电路器件 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4331022A (en) * | 1979-07-27 | 1982-05-25 | Thomson-Csf | Sensor using two tunable oscillators connected to a frequency mixer comprising a device for calibrating the frequency of the output signal and a process for calibrating this frequency |
US20040255681A1 (en) * | 2003-06-18 | 2004-12-23 | Honeywell International, Inc. | Pressure sensor apparatus and method |
US20050050955A1 (en) * | 2003-09-10 | 2005-03-10 | Honeywell International, Inc. | Sensor top hat cover apparatus and method |
TW200531227A (en) * | 2003-09-26 | 2005-09-16 | Tessera Inc | Structure and method of making capped chips having vertical interconnects |
US20050262944A1 (en) * | 2004-04-21 | 2005-12-01 | Symyx Technologies, Inc. | Flexural resonator sensing device and method |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2797762B2 (ja) * | 1990-09-11 | 1998-09-17 | トヨタ自動車株式会社 | 圧力センサのダイヤフラム溶接方法 |
JP2001077661A (ja) * | 1999-09-07 | 2001-03-23 | Seiko Epson Corp | Sawデバイス及びその周波数調整方法 |
GB0206705D0 (en) * | 2002-03-21 | 2002-05-01 | Transense Technologies Plc | Pressure monitor incorporating saw device |
JP4320593B2 (ja) * | 2002-03-21 | 2009-08-26 | トランセンス テクノロジーズ ピーエルシー | Sawデバイスと併用される圧力モニター |
US6962084B2 (en) * | 2003-08-06 | 2005-11-08 | Honeywell International Inc. | Sensor with molded sensor diaphragm cover |
US20050109095A1 (en) * | 2003-11-20 | 2005-05-26 | Sinnett Jay C. | Saw transducer interface to pressure sensing diaphragm |
US7000461B2 (en) * | 2004-03-23 | 2006-02-21 | Honeywell International Inc. | Patch wireless test fixture |
JP2005354272A (ja) * | 2004-06-09 | 2005-12-22 | Seiko Epson Corp | 弾性表面波素子の製造方法および弾性表面波素子の周波数調整方法 |
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2006
- 2006-06-30 GB GB0613060A patent/GB2439344B/en not_active Expired - Fee Related
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2007
- 2007-03-28 JP JP2009515937A patent/JP5029851B2/ja not_active Expired - Fee Related
- 2007-03-28 WO PCT/GB2007/001142 patent/WO2007148034A1/en active Application Filing
- 2007-03-28 EP EP07732196A patent/EP2032960B1/en not_active Ceased
- 2007-03-28 US US12/306,201 patent/US7798006B2/en not_active Expired - Fee Related
- 2007-04-09 TW TW096112345A patent/TWI408062B/zh not_active IP Right Cessation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4331022A (en) * | 1979-07-27 | 1982-05-25 | Thomson-Csf | Sensor using two tunable oscillators connected to a frequency mixer comprising a device for calibrating the frequency of the output signal and a process for calibrating this frequency |
US20040255681A1 (en) * | 2003-06-18 | 2004-12-23 | Honeywell International, Inc. | Pressure sensor apparatus and method |
US20050050955A1 (en) * | 2003-09-10 | 2005-03-10 | Honeywell International, Inc. | Sensor top hat cover apparatus and method |
TW200531227A (en) * | 2003-09-26 | 2005-09-16 | Tessera Inc | Structure and method of making capped chips having vertical interconnects |
US20050262944A1 (en) * | 2004-04-21 | 2005-12-01 | Symyx Technologies, Inc. | Flexural resonator sensing device and method |
Also Published As
Publication number | Publication date |
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EP2032960A1 (en) | 2009-03-11 |
EP2032960B1 (en) | 2012-03-21 |
GB2439344B (en) | 2011-08-10 |
GB2439344A (en) | 2007-12-27 |
JP5029851B2 (ja) | 2012-09-19 |
TW200800659A (en) | 2008-01-01 |
JP2009541731A (ja) | 2009-11-26 |
WO2007148034A1 (en) | 2007-12-27 |
GB0613060D0 (en) | 2006-08-09 |
US20090277274A1 (en) | 2009-11-12 |
US7798006B2 (en) | 2010-09-21 |
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