TWI401199B - Substrate buffer unit - Google Patents

Description

Substrate buffer unit

The present invention relates to a substrate buffer unit for temporarily retracting a glass substrate, such as a flat panel display (FPD), which is transported by a substrate transport path, from the substrate transport path, and more particularly to a method for cleaning the air in the interior of the buffer device. The substrate buffer unit is efficiently executed by the program.

In the manufacturing process of the FPD, a circuit pattern is formed on a glass substrate for FPD using lithography. The lithography forms a circuit pattern by first coating a photoresist on a glass substrate to form a photoresist film, exposing the photoresist film in a corresponding circuit pattern, and then performing development processing. The circuit pattern is formed by using a manufacturing line in which each processing unit that performs processing such as photoresist coating or development is disposed along a transport path (substrate transport path). The glass substrate is transported along the transport path and subjected to predetermined processing at each processing unit.

Further, in order to adjust the timing of substrate reception and transfer between the respective processing units, the manufacturing line usually has a buffer device that temporarily evacuates the glass substrate from the transport path and stores the glass substrate. In the case of the above-mentioned cushioning device, the applicant of the present invention disclosed a lifting cushion device (hereinafter referred to as a lifting buffer) that allows the substrate to be lifted and lowered by placing the glass substrate in a plurality of stages, thereby feeding or sending the substrate. Device).

The substrate retracting operation of the lifting cushion device disclosed in Patent Document 1 will be briefly described with reference to Fig. 7 . The lifting/lowering buffer device 200 shown in FIGS. 7(a) to 7(c) includes a shed portion 205 which is provided in the middle of the conveying path, and is provided with the substrate placing portions 202a to 202f which are provided in a plurality of stages; The mechanism 206 supports the shed portion 205 in a movable manner. When it is necessary to evacuate the substrate into the lift buffer device 200, the auxiliary conveyance mechanism 210 on the downstream side in the X direction is stopped. Further, as shown in FIG. 7(a), when the first substrate G1 conveyed from the upstream side in the X direction passes through the inlet 201a of the housing 201, and the entire substrate is placed on the placing portion 202a, the conveying mechanism 250a It stops. Thereby, the substrate G1 is placed in a state of being placed on the mounting portion 202a.

Next, when the next substrate G2 is subsequently transported from the upstream side in the X direction, the connection of the transport mechanism 250a to its drive source is released.

Then, any one of the placing portions 202b to 202f, for example, as shown in FIG. 7(b), the elevating mechanism 206 raises the scaffolding portion 205 so that the mounting portion 202b coincides with the height of the transport path, and allows the mounting portion to be placed. The conveying mechanism 250b of 202b is connected to its driving portion and is driven. Here, the substrate G1 is in a state of being retracted from the conveyance path as in the placing portion 202a. Then, when the entire substrate G2 is placed on the placing portion 202b, the driving mechanism 250b is stopped.

By repeating these steps, after the standby state of the substrate conveyance is released, the subsequent substrates G3 and G4, which are transported by the transport path, are placed on the mounting portions 202c and 202d, respectively, and are stored. Figure 7 (c)].

Further, the lift buffer device 200 is installed in the clean room together with other units. A clean air supply device called an FFU (Fan Filter Unit) is provided at the top of the clean room, whereby the air flows downward to form a vertical laminar flow (downflow).

Conventionally, the degree of cleanliness in the room is ensured by the downflow, and the cleanness of the inside of the shed portion 205 of the storage substrate is ensured.

In other words, as shown in FIG. 8, the top surface of the casing 201 as the exterior panel is formed into an open structure in order to suck the clean air flowing downward from the upper side into the casing 201. Therefore, the downflow in the clean room forms a clean air flow that flows into the inside of the casing 201 from the top surface of the casing 201 and flows out from the substrate feed-in ports 201a and 201b.

[Advanced technical literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2007-250671

However, in this configuration, when the gantry portion 205 is moved up and down in the casing 201 by the elevating mechanism 206, the volume of the space 207 below the shed portion 205 as shown in FIG. 9 changes, and is formed in the casing. The air flow in 201 will be disrupted and may cause adverse effects.

In other words, in the up-and-down movement of the shed portion 205, the volume of the lower space 207 changes to cause compression expansion, and the dust generated by the elevating mechanism 206 is rolled up, and the dust flows into the inside of the shed portion 205, possibly adhering. It is placed on the substrate placed in the shed portion 205.

In view of the above problems, an object of the present invention is to provide a substrate buffer unit that temporarily evacuates a substrate transported in a single direction and efficiently performs an air cleaning process in a buffer space.

In order to solve the above problems, the present invention provides a substrate buffer unit that temporarily stores a substrate conveyed by a substrate transport path and retreats the substrate from the substrate transport path, and includes a box-shaped frame having a top surface open; a mounting portion that mounts a substrate that is fed into the housing from the substrate transport path; and a box-shaped shed portion that is disposed to move the mounting portion to a predetermined position away from the substrate transport path; a guide inlet provided on one side of the shed portion, introducing clean air into the mounting portion; an exhaust mechanism connecting the shed portion, sucking air in the shed portion out of the frame; and exhausting The window is disposed on a side surface of the frame lower than the shed portion, and discharges the air in the frame.

By providing the exhaust mechanism in this manner, the clean air can be forcibly introduced from the side surface of the shed portion in the casing, and can be discharged and discharged in a single direction. Further, by providing the exhaust window on the lower side surface of the casing, it is possible to efficiently discharge the clean air that has not been introduced into the inside of the booth portion and flows below the booth portion.

Further, in the casing, the upper space can be formed with a positive pressure in comparison with the lower space, and the airflow in the lower space can be suppressed from being rolled up.

Further, it is preferable that the exhaust window is changed in a plurality of stages by a plurality of opening and closing members which are respectively provided in an openable and closable manner.

Further, an air pressure detecting mechanism is provided to detect the air pressure of the upper space and the lower space in the casing or the air pressure of either one; the opening and closing drive mechanism drives the opening and closing members to open and close; and the control mechanism controls the at least Opening and closing the drive mechanism and the exhaust mechanism; the control mechanism preferably determines at least the opening area of the exhaust window and the row of the exhaust mechanism according to a comparison result between the detection result of the air pressure detecting mechanism and a predetermined air pressure value One of the gas outputs, and controls at least one of the opening and closing drive mechanism and the exhaust mechanism.

With these structures, the opening area of the exhaust window and the exhaust gas output of the exhaust mechanism can be changed in accordance with the lifting movement of the shed portion, and a stable downflow can be formed in the casing.

In this case, it is possible to prevent the air from flowing back or rolling up in the casing, and to prevent dust generated by the drive system such as a motor from flowing into the booth portion.

Further, it is preferable that the side surface of the box-shaped shed portion is provided with a first rectifying plate that guides the clean air flowing down from the side of the shed portion to the louver.

Further, it is preferable that the top surface of the box-shaped shed portion is provided with a second flow regulating plate that guides the clean air flowing down from the upper side to the side of the shed portion.

By providing the first and second flow regulating plates in this manner, it is possible to rectify the clean air introduced from above, thereby suppressing the occurrence of turbulence, and forming a flow of air that flows through the rectification to the side of the shed portion and the louver. .

The present invention provides a substrate buffer unit that temporarily evacuates a substrate transported in a single direction, and allows the air cleaning step of the buffer space to be efficiently performed.

Hereinafter, an embodiment of the substrate buffer unit of the present invention will be described in detail based on the drawings. In the middle of the manufacturing line in which the circuit pattern is formed by the lithography step, the substrate buffer unit of the present invention temporarily stores the FPD glass substrate as the substrate to be processed, and retreats from the manufacturing line. In the following embodiments, an embodiment applied to the lifting cushion device will be described.

1 is a side cross-sectional view of a substrate buffer unit of the present invention, FIG. 2 is an end view taken along line AA of FIG. 1, FIG. 3 is an end view taken along line BB of FIG. 2, and FIG. 4 is taken along line CC of FIG. End view.

The substrate buffer unit 100 shown in the drawing includes a box-shaped shed portion 2 in which a glass substrate G as a substrate to be processed is placed in a plurality of stages (in the figure, five stages) in the unit casing 1; and the shed is supported from below. The table portion 2 is moved up and down together with the lifting mechanism 3.

In the substrate buffer unit 100, the glass substrate G is fed from the inlet 1a of the unit casing 1 shown in Fig. 1, and is stored in the booth portion 2, and then sent out from the opposite side of the delivery port 1b as appropriate.

The inlet 1a and the outlet 1b of the casing 1 are provided upstream and downstream of the buffer unit 100, and are provided in conjunction with a height position of a so-called flat flow substrate transport path (substrate transport path).

The shed portion 2 shown in FIGS. 1 and 2 is provided with a box-shaped casing 20, and the mounting portion 6 of the substrate G of, for example, five stages is provided in the casing 20. On the side surface of the casing 20 facing the feeding/discharging ports 1a and 1b of the casing 1, a plurality of substrate feeding ports 2a and a delivery port 2b are provided corresponding to the respective segment placing portions 6.

When the shed portion 2 (the casing 20) can be moved up and down by the elevating mechanism 3 in the casing 1, when the glass substrate G is fed and fed to the placing portion 6 of the predetermined stage, the elevating mechanism 3 allows the shed portion to be moved. 2 The lifting movement moves the placement portion 6 of the predetermined section to the height of the delivery inlet 1a and the delivery outlet 1b.

Further, after the substrate G is placed on the predetermined placing portion 6, the elevating mechanism 3 moves the gantry portion 2 up and down to a predetermined position away from the substrate transport path, thereby retracting the substrate G from the substrate transport path.

Further, as shown in Fig. 2, each of the placing portions 6 is provided with a plurality of roller conveying shafts 13 for performing substrate conveyance in a side-by-side manner, and a shaft rotation driving mechanism 14 is provided at one end of each of the shafts 13, which is provided by a motor or the like. The member is constructed to rotationally drive the respective shafts 13.

Moreover, the top surface of the frame 1 shown in FIG. 1 and FIG. 2 forms an open structure. Therefore, when the buffer unit 100 is installed in the clean room and the clean air is supplied from the top thereof in a downflow manner, the clean air can be supplied from the upper side of the casing 1 to the inside of the casing 1 as shown.

Here, on the top surface of the shed portion 2, a rectifying plate 45 (second rectifying plate) in which a central portion protrudes in a dome shape is provided, and the upward downflow is guided to the side of the shed portion 2.

An air introduction port 6a for introducing clean air into each of the mounting portions 6 is provided on one side surface of the shed portion 2. A portion of the downflow that flows from the upper side to the side of the shed portion 2 flows into the respective placing portions 6 from the air introduction port 6a, and forms a clean air flow as indicated by an arrow in Fig. 2 .

Since the shaft rotation drive mechanism 14 of each of the mounting portions 6 is provided on the downstream side, dust of the drive mechanism does not flow into the respective placement portions 6. More specifically, the plurality of shaft rotation drive mechanisms 14 are covered by the cover portion 15, and the lower portion thereof is provided with an exhaust pipe 16 extending downward, and the exhaust pipe 16 is connected to the exhaust device 30 outside the frame body (exhaust mechanism) ).

In other words, by providing the exhaust device 30, the clean air is introduced into the respective mounting portions 6 from the air introduction port 6a by the suction force thereof, and the clean air flow in a single direction is forcibly formed in each of the mounting portions 6. Therefore, after the clean air is rotated by the downstream shaft to drive the mechanism 14, it does not flow backward and is necessarily discharged to the outside.

Further, the exhaust device 30 is preferably provided in a structure in which the exhaust gas output can be changed. In this case, an optimum exhaust gas output can be set in accordance with factors such as a downflow state supplied to the casing 1.

Further, as shown in FIG. 3 and FIG. 4, the left and right side surfaces of the frame body 1 on which the substrate of the non-frame 1 is fed out and the surface are provided in the lower portion of each surface so as to be horizontally arranged, for example, to form the frame. The exhaust window 40 that can be opened and closed by the exhaust gas in 1 is exhausted.

Each of the exhaust windows 40 is provided with a plurality of opening and closing members. For example, four opening and closing plates 41a, 41b, 41c, and 41d are provided side by side in the longitudinal direction, and the opening and closing plates 41a to 41d can be independently opened and closed.

Each of the opening and closing plates 41a to 41d is preferably controlled by an opening and closing drive mechanism 42a, 42b, 42c, 42d of an electric motor or the like as shown in Fig. 5, and each of the drive mechanisms 42a to 42d is constituted by a computer. (Control mechanism) drive control.

Further, as shown in FIG. 1 and FIG. 2, it is preferable to provide a gas pressure sensor S1 (a gas pressure detecting mechanism) for detecting a space pressure in the upper portion of the housing 1 and a gas pressure sensor S2 for detecting a lower air pressure in the housing 1 ( The air pressure detecting mechanism) controls the opening area of the exhaust window 40 based on the detection results.

At this time, for example, when the detection results of the sensors S1 and S2 respectively exceed a predetermined pressure value set in advance, or when the pressure difference between the sensors S1 and S2 is equal to or higher than a predetermined pressure value, the control unit 43 controls each. The drive mechanisms 42a to 42d are opened and closed to determine the opening area of the exhaust window 40.

Here, the opening and closing of the opening and closing plates 41a to 41d is controlled so that the air pressure in the casing 1 is not affected by the lifting movement of the shed portion 2, and a positive pressure is often formed in the upper portion, whereby the air in the lower space in the casing 1 is formed. The flow is rectified to suppress the wind from rolling up.

In this case, it is possible to effectively suppress the air-up of the casing 1 in the lower space, and it is preferable that the opening and closing plates 41a to 41d of the exhaust window 40 are sequentially opened from the lower opening and closing plates 41a, for example, and the rows are changed in a plurality of stages. The opening area of the louver 40. For example, FIG. 5 shows a state in which only the opening and closing plate 41a is opened, FIG. 6(a) shows a state in which the opening and closing plates 41a, 41b are opened, and FIG. 6(b) shows a state in which the opening and closing plates 41a, 41b, 41c are opened, and FIG. 6(c) The state in which all of the opening and closing plates 41a to 41d are opened is displayed.

Further, a screen member 44 is provided on the back side of the opening and closing plates 41a to 41d to rectify the exhaust gas.

Further, it is preferable that the control unit 43 further controls the exhaust gas output of the exhaust device 30 based on the detection results of the air pressure sensors S1 and S2. At this time, the air flow in the casing 1 can be further rectified.

Further, as shown in FIG. 2, a rectifying plate 48 (first rectifying plate) is provided on the side surface of the shed portion 2, and the clean air that has not flowed into the placing portion 6 among the upper descending flows is guided to the louver 40. .

Further, the clean air flowing down the shed portion 2 is sucked into the casing 46 surrounding the elevating mechanism 3 in addition to being discharged from the louver 40. That is, the casing 46 is connected to the exhaust device 30 through the exhaust pipe 47, and particularly when the shed portion 2 is lowered (when the lower space is compressed), only the rolled air that cannot be completely discharged by the vent window 40 is forcibly sucked. It is discharged to the outside by the exhaust device 30. With this configuration, it is possible to prevent the dust generated by the elevating mechanism 3 from flowing to the shed portion 2 due to the air being rolled up.

As described above, according to the embodiment of the present invention, by providing the exhaust device 30, the clean air is forcibly introduced from the side surface of the shed portion 2 in the casing 1, and is discharged and discharged in a single direction. Further, an exhaust window 40 is provided on the lower side surface of the casing 1, and the clean air that has not been sucked into the shed portion 2 and flows under the shed portion 2 is efficiently discharged, and the opening area (discharge amount) ) can be changed at will.

With these configurations, in the shed portion 2, after the clean air passes through the shaft rotation driving mechanism 14, it does not flow backward, but is necessarily discharged to the outside.

Further, in the casing 1, the upper space is often formed with a positive pressure in comparison with the lower space, so that the airflow in the lower space can be suppressed from being rolled up. In particular, the opening area of the exhaust window 40 provided on the lower side surface of the casing 1 is changed in accordance with the lifting movement of the shed portion 2, whereby a stable downflow can be formed in the casing 1.

In this case, it is possible to suppress the backflow or the winding of the air generated inside the casing 1 and prevent the dust generated by the drive system such as the motor from flowing to the shed portion 2 (the mounting portion 6).

Further, in this embodiment, the air pressure sensor S1 for detecting the air pressure in the upper space and the air pressure sensor S2 for detecting the air pressure in the lower space are provided as the air pressure detecting means for detecting the internal air pressure of the casing 1, and when the detected air pressure value exceeds When the predetermined value is used, or when the difference between the detection results exceeds a predetermined value, the opening and closing plates 41a to 41d of the exhaust window 40 are opened and closed. However, the present invention is not limited to the configuration, and a gas pressure sensor may be provided as one of the upper space or the lower space in the casing 1 as the air pressure detecting mechanism, and when the detected air pressure value exceeds a predetermined value, The opening and closing plates 41a to 41d of the exhaust window 40 are subjected to opening and closing control.

Further, in the embodiment, the control unit 43 controls the opening and closing plates 41a to 41d to open and close based on the detection results of the air pressure sensors S1 and S2, and it is preferable that the control unit 43 controls the exhaust gas output of the exhaust device 30.

However, the present invention is not limited to the above-described configurations, and the control unit 43 may control at least one of the opening and closing of the opening and closing plates 41a to 41d and the exhaust gas output of the exhaust device 30 based on the detection results of the air pressure sensors S1 and S2. One party.

Further, in this embodiment, the present invention is shown in an embodiment applied to a multi-stage lifting cushion device, but the present invention is not limited to this embodiment. For example, a single-stage substrate buffering device may be used instead of the multi-stage type, or a lifting device 3 for feeding the plurality of substrates by a member such as a robot arm may be used without using the lifting mechanism 3 of the gantry portion 2.

1. . . framework

1a. . . Substrate feed

1b. . . Substrate delivery

2. . . Shed department

2a. . . Substrate feed

2b. . . Substrate delivery

3. . . Lifting mechanism

6. . . Mounting department

6a. . . Air inlet

13. . . Roller conveyor shaft

14. . . Shaft rotary drive mechanism

15. . . Cover

16. . . exhaust pipe

20. . . case

30. . . Exhaust device

40. . . Exhaust window

41a, 41b, 41c, 41d. . . Opening and closing plate

42a, 42b, 42c, 42d. . . Opening and closing drive mechanism

43. . . Control department

44. . . Screen member

45. . . Rectifier plate (second rectification plate)

46. . . case

47. . . exhaust pipe

48. . . Rectifier plate (first rectifying plate)

100. . . Substrate buffer unit

200. . . Lifting buffer

201. . . framework

201a. . . Substrate feed

201b. . . Substrate delivery

202a～202f. . . Substrate mounting unit

205. . . Shed department

206. . . Lifting mechanism

207. . . space

210. . . Auxiliary transport mechanism

250a. . . Transport mechanism

250b. . . Transport mechanism

S1. . . Air pressure sensor (air pressure detection mechanism)

S2. . . Air pressure sensor (air pressure detection mechanism)

G1～G5. . . Glass substrate (substrate)

A-A, B-B, C-C. . . Section line

X. . . axis

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a side cross-sectional view showing a substrate buffer unit of the present invention.

Figure 2 is an end view taken along line A-A of Figure 1.

Figure 3 is an end view taken along line B-B of Figure 2.

Figure 4 is an end view taken along line C-C of Figure 2.

Fig. 5 is a block diagram for explaining the opening and closing control of the exhaust window provided in the substrate buffer unit of Fig. 1.

Fig. 6 is a phase change diagram of the opening area of the exhaust window.

Fig. 7 is an explanatory diagram of a substrate retracting operation of the lifting cushion device.

Figure 8 is a cross-sectional view showing the flow of air inside the conventional lifting cushion device.

Figure 9 is a cross-sectional view showing other air flows inside a conventional lifting cushion device.

1a. . . Substrate feed

2. . . Shed department

2a. . . Substrate feed

2b. . . Substrate delivery

3. . . Lifting mechanism

16. . . exhaust pipe

20. . . case

30. . . Exhaust device

44. . . Screen member

45. . . Rectifier plate (second rectification plate)

46. . . case

100. . . Substrate buffer unit

S1. . . Air pressure sensor (air pressure detection mechanism)

S2. . . Air pressure sensor (air pressure detection mechanism)

A-A. . . Section line

Claims (5)

A substrate buffer unit for temporarily accommodating a substrate transported by a substrate transport path to retreat the substrate from the substrate transport path, comprising: a box-shaped frame having a top surface open; and a mounting portion being arranged side by side a plurality of roller transporting shafts for performing transport of the substrate are provided, and at one end of each of the shafts, a shaft rotation driving mechanism for rotationally driving the respective shafts is provided to mount the substrates fed into the casing from the substrate transport path a box-shaped shed portion provided in such a manner as to be movable to a predetermined position away from the substrate transport path; an air introduction port provided on one side of the shed portion to clean air Introducing the mounting portion; a cover portion covering the plurality of shaft rotation driving mechanisms; and an exhausting mechanism for sucking air in the platform portion to pass the plurality of shaft rotation driving mechanisms covered by the cover portion And exhausted to the outside of the frame; and an exhaust window disposed on a side of the frame lower than the shed portion, exhausting the gas in the frame; and the air is attracted by the attraction of the venting mechanism guide The clean air introduction port mounting parts, the air flow in the mounting parts is formed in a single direction, it is rotated by the shaft driving mechanism, and the air is discharged to the outside through the mounting parts. The substrate buffer unit of claim 1, wherein the venting window has a plurality of opening and closing members that are arbitrarily opened and closed, so that the opening area can be changed in a plurality of stages. The substrate buffer unit of claim 2, further comprising: a gas pressure detecting mechanism for detecting the air pressure of the upper space and the lower space in the frame, or the air pressure of either one; and the opening and closing drive mechanism capable of driving Opening and closing of each opening and closing member; and controlling means for controlling at least one of the opening and closing driving mechanism and the exhausting mechanism; The control unit determines at least one of an opening area of the exhaust window and an exhaust output of the exhaust mechanism based on a comparison result between the detection result of the air pressure detecting means and a predetermined air pressure value, and controls the opening and closing drive mechanism At least one of the venting mechanisms. The substrate buffer unit according to any one of claims 1 to 3, wherein a first rectifying plate is disposed on a side surface of the box-shaped shed portion for discharging from a side of the shed portion Clean air is directed to the venting window. The substrate buffer unit according to any one of claims 1 to 3, wherein a second rectifying plate is disposed on a top surface of the box-shaped shed portion for guiding the clean air flowing down from above The side of the shed.