TWI398361B - Method for manufacturing cantilever-type piezoelectric ink jet head - Google Patents

Description

Method for manufacturing cantilever piezoelectric head structure

The present invention relates to a cantilever type piezoelectric head structure, and more particularly to a method for manufacturing a cantilever type piezoelectric head structure.

With the advancement of inkjet technology, inkjet technology is no longer only used in the traditional printing market. In recent years, it has been applied to the process technology of flat panel display and semiconductor industry. However, in order to reduce costs and save process time, new ones are sought. Inkjet technology, the most widely used of these, is piezoelectric inkjet technology.

Please refer to FIG. 1A , which is a schematic plan view of a conventional ink jet head multilayer structure before cutting. As shown, the conventional ink jet head multilayer structure 1 is mainly stacked by a multi-layer stainless steel plate member by a high temperature diffusion bonding technique. And forming the microstructure of the multi-layer structure 1 of the ink-jet head, wherein the multi-layer structure 1 of the ink-jet head has a plurality of ink-jet units 100. Referring to the first drawing B, each of the ink-jet units 100 has an ink supply flow corresponding thereto. a microstructure of the liquid inlet passage 101, the liquid storage chamber 102 for storing ink, the pressure chamber 103, the liquid discharge passage 104, and the nozzle hole 105 for ejecting the ink, and the liquid flow in the ink jet unit 100 A vibrating plate 106 is disposed above the microstructures of the channel 101, the liquid storage chamber 102, the pressure chamber 103, the liquid outlet channel 105, and the nozzle hole 105, and is above the vibrating plate 106 and corresponds to the position of the pressure chamber 103. The actuator piece 107 is set.

However, as the piezoelectric inkjet technology is applied to various technical fields, the structural design of the inkjet unit 100 disclosed in FIG. B will not meet the requirements, and the multilayer structure of the inkjet head having different types of designs needs to be designed. Development.

However, in the conventional laser cutting process of the piezoelectric actuator 107, it is necessary to precisely control the position of the cutting and the uniform power to align the rectangular edges of each of the ink-jet units 100, and also to precisely control The depth and width of the cutting are not to damage the vibrating plate 106 under the piezoelectric actuator 107 due to the deep cutting, or to affect the adjacent inkjet unit 100 due to poor width control. Therefore, it is necessary to perform cutting before cutting. Set parameters such as the wavelength of the laser, the energy, and the time of the laser to ensure that the size of the laser after cutting can reach the size of the predetermined actuator 107. As a result, it takes a lot before laser cutting. Time setting related cutting parameters is not only complicated but also time consuming.

In addition, except for the fact that the cutting rate is different at the initial stop or turn, the power unevenness causes the defect rate of uneven cutting depth to be high, and the cost is wasted, and the price of the laser machine is more expensive than other cutting tools. Expensive, and the use of laser cutting is prone to high temperatures due to the instability of the laser power, which in turn causes the magnetic strength and physical strength of the actuating sheet 107 to be affected during the cutting operation.

Furthermore, the ink jet unit shown in the first drawing B is mainly assembled by using a metal fusion bonding process by first plating gold on the surface of each stainless steel plate and then superimposing the plates in the order of direction, and then Hot pressing is performed to diffuse the gold atoms between each of the two plates, and finally a fusion action is achieved. Although this type of assembly has the advantage of excellent joint strength, it needs to be carried out at a high temperature of 500 to 1000 ° C in an oxygen-free environment, so that the equipment is difficult to set up and expensive, and the fixture for assisting the hot pressing is also required. Carefully selected, otherwise it is easy to deform, deteriorate, or even crack, and the high-temperature process fixture is cracked or heavily viscous, so the rate of wear is extremely fast. In addition to the high cost of fixture replacement, the quality is extremely unstable under mass production. Furthermore, the increasing price of gold, the difficulty in batching of the melting process, and the improper surface treatment easily affect the fusion effect and yield, etc., which raise the manufacturing cost of the conventional ink-jet unit using metal fusion.

Therefore, how to develop a manufacturing method of a cantilever type piezoelectric head structure which can improve the above-mentioned conventional techniques is an urgent problem to be solved.

The main purpose of the present invention is to provide a method for manufacturing a cantilever piezoelectric head structure, which solves the problem that the structural design of the conventional ink jet unit cannot meet the requirements, and the conventional actuating sheet takes a lot of time to set the relevant before performing laser cutting. The cutting parameters are not only complicated but also time consuming. In addition, the conventional ink jet unit is mainly assembled by a metal fusion bonding process, and needs to be performed under an oxygen-free environment, and the equipment is difficult and expensive to build and requires high manufacturing cost. The shortcomings.

In order to achieve the above object, an embodiment of the present invention provides a method for manufacturing a cantilever piezoelectric head structure, comprising at least the steps of: (a) providing a fixing base having a liquid supply flow path; (b) having a liquid supply path; The orifice plate of the nozzle hole is disposed on the fixing seat only on one side, and a dry film layer is coated on the nozzle plate; (c) providing a plurality of intermediate flow channel plates having the liquid flow channel disposed on the orifice plate Above, such that one of the intermediate flow channel plates has a liquid flow path communicating with the liquid supply flow path of the fixed seat, and a dry film layer is coated on the intermediate flow path plate; (d) providing a vibration The plate is disposed above the intermediate flow channel plate to form a plurality of substrates on the fixed seat; (e) a hot pressing is performed by heating the substrate up and down simultaneously, and the temperature is lowered to near room temperature when the pressure is applied. Resolving that the dry film layer is completely cured and positioned on each of the substrate layers; (f) providing a uniform moving piece correspondingly disposed on the plurality of substrates; (g) performing the activating film on both sides of each substrate Straight line cutting, causing the actuating piece to generate a plurality of points corresponding to the substrate Actuating units to form a cantilevered piezoelectric head structure.

Some exemplary embodiments embodying the features and advantages of the present invention are described in detail in the following description. It is to be understood that the present invention is capable of various modifications in the various aspects of the present invention, and the description and illustration are in the nature of

Please refer to FIG. 2A and FIG. 2B. FIG. 2 is a cross-sectional view of the cantilever piezoelectric head structure of the preferred embodiment of the present invention, and FIG. 2B is a top view of a part of the structure of the second FIG. As shown in FIG. 2A, the cantilever piezoelectric head structure 2 of the present invention can be composed of a fixing base 21, a plurality of substrates 22, and a plurality of actuating units 231, wherein the fixing base 21 can have a liquid supply flow. Each of the plurality of substrates 22 is disposed on the fixing base 21, and each of the substrates 22 has an orifice plate 221, an intermediate flow channel plate 222, and a vibration plate 223. The orifice plate 221 has a nozzle hole 2211 and It is only fixed on one side of the fixed seat 21 (as shown in FIG. 2C), and the intermediate flow channel plate 222 is stacked above the orifice plate 221 and has a liquid flow channel 2221 (such as the second figure B). As shown, the liquid outlet channel 2221 is in communication with the liquid supply channel 211 and the nozzle hole 2211 of the fixed seat 21 for discharging the fluid to the nozzle hole 2211 via the liquid supply channel 211 and the liquid outlet channel 2221. As for the vibrating plate 223, it is stacked above the intermediate flow path plate 222.

Referring to FIG. 2A again, the plurality of actuating units 231 included in the cantilevered piezoelectric head structure 2 of the present invention are respectively disposed on the corresponding substrate 22, and when the actuating unit 231 is actuated by a voltage, The vibration plate 223 is driven to vibrate, so that the fluid of the liquid supply flow path 211 is sent to the nozzle hole 2211 through the liquid discharge channel 2221, and since the substrate 22 of the present invention is only fixed to the fixing seat 21 on one side, the pressure of the present invention can be made. The electric head structure forms a cantilever type piezoelectric head structure 2. Therefore, in the case of the cantilever type piezoelectric head structure 2, a plurality of substrates 22 are arranged on the fixed base 21 in an equidistant arrangement manner, so that the plurality of actuating units 231 are arranged. The method can save a lot of working time by straight cutting.

Referring to FIG. 2A again, in this embodiment, each of the actuating units 231 is non-correspondingly disposed above the fixed seat 21, that is, the setting position of the actuating unit 231 does not correspond to the fixed seat 21, of course, the case The position of the actuating unit 231 is not limited thereto. Alternatively, as shown in the third figure B, the actuating unit 331 can be correspondingly disposed above the fixed seat 21, that is, the setting position of the actuating unit 331 is The fixing base 21 is correspondingly arranged, and different liquid discharging effects can be achieved compared to the structure of the second drawing A.

Referring to FIG. 2A, B and C again, the manufacturing method of the cantilever piezoelectric head structure 2 of the present invention is as follows: firstly, a fixing seat 21 is provided, which has a liquid supply flow path 211 for providing a fluid; Next, the orifice plate 221 having a nozzle hole 2211 is disposed on the fixing seat 21 only on one side, and a dry film layer is coated on the nozzle plate 221, and the material used for the dry film layer is generally blocked. For the solvent-based Acrylic series dry film, for the solvent type and hardening ink, an epoxy resin (Epoxy) series film can be used, but not limited thereto; and the intermediate flow path plate 222 is disposed on The orifice plate 221 is connected to the liquid supply passage 222 and the nozzle flow passage 211 and the nozzle hole 2211 of the fixed seat 21 (as shown in the second FIGS. B and C); and subsequently, the intermediate flow passage plate 222 A dry film layer is coated thereon, and the vibrating plate 223 is capped over the intermediate flow channel plate 222; then, a hot pressing is performed by heating the substrate 22 up and down simultaneously, and the use temperature is about 150 to 200 ° C, and the pressure is about Then between 3 and 6 kg/cm ² , the time takes about 1 hour, and the pressure is lowered to the temperature. At a near room temperature, the dry film layer is completely cured and positioned on each of the plate layers of the substrate 22 to form a plurality of substrates 22 on the fixing base 21 (as shown in FIG. 2A); and then, as shown in FIG. The actuating piece 23 of the large block is correspondingly disposed on the plurality of substrates 22, wherein the actuating piece 23 of the large block is non-correspondingly disposed above the fixed seat 21, that is, the setting position of the area of the actuating piece 23. The actuating sheet 23 is cut along the two sides 224 of the substrate 22 by a wafer dicing blade, respectively, so that the actuating sheet 23 corresponds to each substrate 22. A cell block actuation unit 231 (shown in Figure 2A) is created to form a cantilevered piezoelectric head structure 2.

Of course, as shown in FIG. 3A, in some embodiments, the actuation block 33 of a large block may be correspondingly disposed on the plurality of substrates 22, wherein the area of the actuation piece 33 is correspondingly disposed on the fixed seat. Above the 21, that is, the position of the area of the actuating piece 33 is covered on the fixing base 21. Finally, the actuating piece 33 is also cut along the two sides 224 of the substrate 22 by the wafer cutting blade, respectively. The actuating plate 33 respectively generates an actuating unit 331 (as shown in the third figure B) corresponding to each of the substrates 22 to form a cantilevered piezoelectric head structure 2 of another different structural design, compared to the second figure. The structure of A can achieve different spray effects.

The actuating sheets 23, 33 described above may be formed of, but not limited to, a lead zirconate Titanate (PZT) piezoelectric material.

In summary, the manufacturing method of the cantilever piezoelectric head structure of the present invention replaces the conventional metal fusion process by means of dry film bonding. Since the dry film layer is used as the adhesive layer, the metal plates of the various layers do not need to be further Gold plating can save a lot of cost. At the same time, it can be assembled with simple hot pressing equipment and methods, and can be batch processed to make the production process more efficient. In addition, the symmetric arrangement of a plurality of inkjet units, using a wafer dicing blade, compared to conventional laser cutting, the wafer dicing blade does not need to set a number of relevant cutting parameters before the cutting operation, and the wafer dicing blade can The actuating unit can be produced in a straight line without repeating the alignment of the next rectangular edge in the rectangular edge of the prior art to speed up the time required for the cutting operation, thereby saving a lot of work time, in addition to saving work. In addition to time, the process of cutting operations can be controlled more precisely. Moreover, the machine for wafer cutting knives is cheaper than the machine for laser cutting, which saves equipment costs, because the above advantages are conventional techniques. It is not possible to form a piezoelectric head structure that is different from the conventional one to meet the needs of different application fields.

This case has been modified by people who are familiar with the technology, but it is not intended to be protected by the scope of the patent application.

1‧‧‧Inkjet head multilayer structure

100‧‧‧Inkjet unit

101‧‧‧Into the flow channel

102‧‧‧Liquid chamber

103‧‧‧pressure chamber

104‧‧‧Drain flow channel

105‧‧‧Nozzle hole

106‧‧‧vibration board

107, 23, 33‧‧‧ Actuation

2‧‧‧Cantilever piezoelectric head structure

21‧‧‧ Fixed seat

211‧‧‧liquid supply channel

22‧‧‧Substrate

224‧‧‧ side

221‧‧‧ orifice plate

2211‧‧‧Nozzle hole

222‧‧‧Intermediate flow channel plate

2221‧‧‧Drain flow channel

223‧‧‧vibration board

231, 331‧‧‧ actuation unit

First Figure A: It is a schematic plan view of a conventional multi-layer structure of an ink jet head before cutting.

First Figure B: This is a cross-sectional view of the ink jet unit shown in Figure AA.

Second Figure A: is a cross-sectional view of a cantilevered piezoelectric head structure of the first preferred embodiment of the present invention.

Second figure B: It is a top view of a part of the structure of the second figure A.

Second Figure C: This is a bottom view of the second Figure A.

Figure 2D is a schematic view showing the structure of an actuating sheet on a plurality of substrates.

Third figure A is a schematic structural view of another actuating sheet disposed on a plurality of substrates.

Figure 3B is a cross-sectional view showing the cantilever piezoelectric head structure of the second preferred embodiment of the present invention.

2‧‧‧Cantilever piezoelectric head structure

21‧‧‧ Fixed seat

22‧‧‧Substrate

221‧‧‧ orifice plate

2211‧‧‧Nozzle hole

222‧‧‧Intermediate flow channel plate

2221‧‧‧Drain flow channel

223‧‧‧vibration board

231‧‧‧Activity unit

Claims (6)

A method for manufacturing a cantilever piezoelectric head structure, comprising at least the steps of:
(a) providing a fixing base having a liquid supply flow path;
(b) the orifice plate having a nozzle hole is disposed on the fixing seat only on one side, and a dry film layer is coated on the orifice plate;
(c) providing a plurality of intermediate flow passage plates having an outlet flow passage disposed on the orifice orifice plate such that the outlet flow passage of each of the intermediate flow passage plates and the liquid supply passage of the fixed seat Connected to each other and coated with a dry film layer on the intermediate flow channel plate;
(d) providing a vibrating plate disposed above the intermediate flow channel plate to form a plurality of substrates on the fixing base;

(e) performing a hot pressing in such a manner that the substrate is heated up and down simultaneously, and when the pressure is lowered to a temperature close to room temperature, the dry film layer is completely cured and positioned on each of the substrate layers;
(f) providing a uniform motion piece correspondingly attached to the plurality of substrates;
(g) linearly cutting the actuating sheet to form two sides of each of the substrates, causing the actuating sheet to generate a plurality of actuating units corresponding to the substrate to form a cantilever piezoelectric head structure . The manufacturing method of the cantilever type piezoelectric head structure according to the first aspect of the invention, wherein the actuating piece of the step (f) is attached to the substrate, and the position of the actuating piece is set. Not covered above the mount. The manufacturing method of the cantilever type piezoelectric head structure according to the first aspect of the invention, wherein the actuating piece of the step (f) is attached to the substrate, and the position of the actuating piece is set. Covered above the mount. The method for manufacturing a cantilever piezoelectric head structure according to the above aspect of the invention, wherein the dry film layer is an Acrylic series material having a barrier aqueous solvent. The method for manufacturing a cantilever piezoelectric head structure according to the first aspect of the invention, wherein the dry film layer is a solvent type and a hardened ink, and an epoxy resin (Epoxy) series film can be used. The method for manufacturing a cantilever piezoelectric head structure according to claim 1, wherein the hot pressing process is performed at a temperature of about 150 to 200 ° C and a pressure of 3 to 6 kg / cm ² , and the time is about It takes 1 hour, and when the pressure is lowered to near room temperature, the dry film layer is completely cured and positioned on each of the layers of the substrate.