TWI395332B - 薄膜電晶體陣列面板 - Google Patents
薄膜電晶體陣列面板 Download PDFInfo
- Publication number
- TWI395332B TWI395332B TW095137135A TW95137135A TWI395332B TW I395332 B TWI395332 B TW I395332B TW 095137135 A TW095137135 A TW 095137135A TW 95137135 A TW95137135 A TW 95137135A TW I395332 B TWI395332 B TW I395332B
- Authority
- TW
- Taiwan
- Prior art keywords
- electrode
- reflective
- insulating layer
- drain
- transmissive
- Prior art date
Links
- 239000010409 thin film Substances 0.000 title claims description 8
- 239000003990 capacitor Substances 0.000 claims description 112
- 239000000758 substrate Substances 0.000 claims description 45
- 239000004065 semiconductor Substances 0.000 claims description 31
- 230000000149 penetrating effect Effects 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 8
- 239000004973 liquid crystal related substance Substances 0.000 description 100
- 239000010408 film Substances 0.000 description 21
- 230000035515 penetration Effects 0.000 description 18
- 229910052751 metal Inorganic materials 0.000 description 13
- 239000002184 metal Substances 0.000 description 13
- 238000002161 passivation Methods 0.000 description 12
- 229910045601 alloy Inorganic materials 0.000 description 10
- 239000000956 alloy Substances 0.000 description 10
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 8
- 229910052782 aluminium Inorganic materials 0.000 description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 8
- 239000004020 conductor Substances 0.000 description 8
- 229910052750 molybdenum Inorganic materials 0.000 description 8
- 239000011733 molybdenum Substances 0.000 description 8
- 238000002834 transmittance Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 230000005684 electric field Effects 0.000 description 7
- 239000012212 insulator Substances 0.000 description 7
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 5
- 230000000903 blocking effect Effects 0.000 description 5
- 238000009413 insulation Methods 0.000 description 5
- 229910004205 SiNX Inorganic materials 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 4
- 239000011651 chromium Substances 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 4
- 229910052709 silver Inorganic materials 0.000 description 4
- 239000004332 silver Substances 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910052758 niobium Inorganic materials 0.000 description 3
- 239000010955 niobium Substances 0.000 description 3
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 229910001316 Ag alloy Inorganic materials 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 229910001182 Mo alloy Inorganic materials 0.000 description 1
- 206010034972 Photosensitivity reaction Diseases 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 229920001940 conductive polymer Polymers 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- XSOKHXFFCGXDJZ-UHFFFAOYSA-N telluride(2-) Chemical compound [Te-2] XSOKHXFFCGXDJZ-UHFFFAOYSA-N 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133553—Reflecting elements
- G02F1/133555—Transflectors
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136213—Storage capacitors associated with the pixel electrode
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/134309—Electrodes characterised by their geometrical arrangement
- G02F1/134345—Subdivided pixels, e.g. for grey scale or redundancy
- G02F1/134354—Subdivided pixels, e.g. for grey scale or redundancy the sub-pixels being capacitively coupled
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Liquid Crystal (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020050093440A KR101197051B1 (ko) | 2005-10-05 | 2005-10-05 | 박막 트랜지스터 표시판 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200721504A TW200721504A (en) | 2007-06-01 |
| TWI395332B true TWI395332B (zh) | 2013-05-01 |
Family
ID=37901540
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW095137135A TWI395332B (zh) | 2005-10-05 | 2006-10-05 | 薄膜電晶體陣列面板 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US7948588B2 (enExample) |
| JP (1) | JP5101851B2 (enExample) |
| KR (1) | KR101197051B1 (enExample) |
| CN (1) | CN100573882C (enExample) |
| TW (1) | TWI395332B (enExample) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040109103A1 (en) * | 1998-06-30 | 2004-06-10 | Hitachi, Ltd. | Liquid crystal display device |
| KR20060069080A (ko) * | 2004-12-17 | 2006-06-21 | 삼성전자주식회사 | 박막 트랜지스터 표시판 및 이를 포함하는 액정 표시 장치 |
| KR20080077538A (ko) | 2007-02-20 | 2008-08-25 | 삼성전자주식회사 | 박막트랜지스터 기판과 액정표시장치 |
| EP2166406A4 (en) * | 2007-06-14 | 2010-12-29 | Sharp Kk | LIQUID CRYSTAL DISPLAY PANEL AND LIQUID CRYSTAL DISPLAY DEVICE |
| KR101404550B1 (ko) * | 2008-04-01 | 2014-06-09 | 삼성디스플레이 주식회사 | 액정 표시 장치 및 그 제조 방법 |
| CN101576681B (zh) * | 2008-05-08 | 2013-08-21 | 群创光电股份有限公司 | 半透射半反射显示单元 |
| KR20100022372A (ko) * | 2008-08-19 | 2010-03-02 | 삼성전자주식회사 | 표시장치 및 그 제조 방법 |
| CN102073179B (zh) * | 2009-11-20 | 2013-04-17 | 群康科技(深圳)有限公司 | 半穿透半反射式液晶显示装置及其驱动方法 |
| KR101958392B1 (ko) * | 2014-01-23 | 2019-07-05 | 삼성디스플레이 주식회사 | 표시판 및 표시 장치 |
| CN105158946B (zh) * | 2015-09-10 | 2019-01-15 | 武汉华星光电技术有限公司 | 一种液晶显示模组及其制备方法 |
| KR102698919B1 (ko) * | 2019-12-30 | 2024-08-23 | 엘지디스플레이 주식회사 | 액정표시장치 |
| KR102710588B1 (ko) * | 2020-02-25 | 2024-09-26 | 삼성디스플레이 주식회사 | 표시 장치 |
| US11644715B2 (en) * | 2021-07-08 | 2023-05-09 | Sharp Display Technology Corporation | Liquid crystal display device comprising a plurality of pixels each having a reflective region with a reflective electrode and a transmissive region with a transparent electrode |
| JP7503092B2 (ja) * | 2022-04-12 | 2024-06-19 | シャープディスプレイテクノロジー株式会社 | 液晶表示装置 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6628367B2 (en) * | 2000-07-28 | 2003-09-30 | Seiko Epson Corporation | Method for manufacturing electrooptical device, and electrooptical device |
| US6750926B2 (en) * | 2000-03-06 | 2004-06-15 | Hitachi, Ltd. | Liquid crystal display device and manufacturing method thereof |
| US6781657B1 (en) * | 1997-05-30 | 2004-08-24 | Hyundai Electronics Industries Co., Ltd. | Method of producing two domains within a liquid crystal layer and liquid crystal display device |
| US6830787B1 (en) * | 1994-03-17 | 2004-12-14 | Hitachi, Ltd. | Active matrix liquid crystal display apparatus |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5576858A (en) * | 1991-10-14 | 1996-11-19 | Hosiden Corporation | Gray scale LCD control capacitors formed between a control capacitor electrode on one side of an insulating layer and two subpixel electrodes on the other side |
| KR100462376B1 (ko) * | 2001-12-31 | 2004-12-17 | 비오이 하이디스 테크놀로지 주식회사 | 반사형 액정표시장치 및 그 제조방법 |
| JP2004163461A (ja) | 2002-11-08 | 2004-06-10 | Samsung Electronics Co Ltd | カラーフィルター表示板及びその製造方法とそれを含む反射透過型液晶表示装置 |
| US7807999B2 (en) | 2002-12-21 | 2010-10-05 | Samsung Electronics Co., Ltd. | Array substrate, liquid crystal display apparatus having the same and method for driving liquid crystal display apparatus |
| KR100936954B1 (ko) * | 2002-12-31 | 2010-01-14 | 엘지디스플레이 주식회사 | 반사투과형 액정표시장치와 그 제조방법 |
| JP2004252047A (ja) * | 2003-02-19 | 2004-09-09 | Sharp Corp | 半透過型表示装置 |
| KR100617031B1 (ko) * | 2003-12-30 | 2006-08-30 | 엘지.필립스 엘시디 주식회사 | 반사투과형 액정표시장치 및 그 제조방법 |
| JP2005258410A (ja) * | 2004-03-08 | 2005-09-22 | Samsung Electronics Co Ltd | 液晶表示装置及びその製造方法 |
| JP3915792B2 (ja) * | 2004-03-12 | 2007-05-16 | セイコーエプソン株式会社 | 液晶表示装置および電子機器 |
| KR20060069080A (ko) | 2004-12-17 | 2006-06-21 | 삼성전자주식회사 | 박막 트랜지스터 표시판 및 이를 포함하는 액정 표시 장치 |
| US7768604B2 (en) * | 2005-09-20 | 2010-08-03 | Au Optronics Corporation | Transflective liquid crystal display with partially shifted reflectivity curve |
-
2005
- 2005-10-05 KR KR1020050093440A patent/KR101197051B1/ko not_active Expired - Fee Related
-
2006
- 2006-10-03 US US11/543,317 patent/US7948588B2/en not_active Expired - Fee Related
- 2006-10-03 JP JP2006271417A patent/JP5101851B2/ja not_active Expired - Fee Related
- 2006-10-05 TW TW095137135A patent/TWI395332B/zh not_active IP Right Cessation
- 2006-10-08 CN CNB200610140365XA patent/CN100573882C/zh not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6830787B1 (en) * | 1994-03-17 | 2004-12-14 | Hitachi, Ltd. | Active matrix liquid crystal display apparatus |
| US6849309B2 (en) * | 1994-03-17 | 2005-02-01 | Hitachi, Ltd. | Active matrix type liquid crystal display apparatus |
| US6781657B1 (en) * | 1997-05-30 | 2004-08-24 | Hyundai Electronics Industries Co., Ltd. | Method of producing two domains within a liquid crystal layer and liquid crystal display device |
| US6750926B2 (en) * | 2000-03-06 | 2004-06-15 | Hitachi, Ltd. | Liquid crystal display device and manufacturing method thereof |
| US6628367B2 (en) * | 2000-07-28 | 2003-09-30 | Seiko Epson Corporation | Method for manufacturing electrooptical device, and electrooptical device |
Also Published As
| Publication number | Publication date |
|---|---|
| US20070076148A1 (en) | 2007-04-05 |
| JP2007102226A (ja) | 2007-04-19 |
| CN1956200A (zh) | 2007-05-02 |
| KR101197051B1 (ko) | 2012-11-06 |
| TW200721504A (en) | 2007-06-01 |
| US7948588B2 (en) | 2011-05-24 |
| CN100573882C (zh) | 2009-12-23 |
| JP5101851B2 (ja) | 2012-12-19 |
| KR20070038281A (ko) | 2007-04-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |