TWI394225B - Quickly sorting machine and its method - Google Patents

Description

Grain rapid sorting arrangement machine and method

The invention relates to a grain sorting arrangement machine and a sorting and arranging method, in particular to an image capturing device, which preliminarily compares the grain position data on the carrier disk to be classified with the pre-stored data to confirm the grain fast. Sorting machine and quick sorting method.

In order to meet the trend of thin and light electronic devices, most of the current circuit components are miniaturely laid onto semiconductor substrates, and semiconductor devices are used to manufacture components required for electronic products. The semiconductor material is first formed by wafer growth and dicing, and is wired on the wafer to form, for example, tens of thousands of circuit elements, and then cut into grooves between the circuit elements. The entire wafer is then adhered to a viscous flexible substrate and adhered. The current flexible substrate is a blue film and is generally referred to as a "blue film." When the flexible substrate is pulled away from the outside of the square, the adhered crystal grains are broken from each other according to the cutting groove, and are divided into tens of thousands of crystal grains; at this time, the stretched flexible substrate is clamped by a frame. It constitutes a carrier disk carrying tens of thousands of crystal grains.

Since the crystal grains carried at this time are not classified yet, they are referred to as carrier disks to be classified. And the electrical characteristics of each die placed on the carrier to be classified are different. It is necessary to first record all the crystals on the carrier through a large-scale, low-resolution camera through a detection machine. Relative position, and confirming the electrical characteristics of each die to store the electrical characteristics of each die together with their relative positions on the carrier; and classifying them according to the aforementioned detection results by another sorting machine, The dies are respectively transferred to respective different sorting carriers according to their respective characteristics.

In the general machine, the carrier disk to be classified is the same as the class carrier disk. The only difference is whether the carrier die is classified. As shown in FIG. 1 , the carrier tray 1 ′ to be classified includes a flexible base layer 11 ′ and a frame 12 ′. As described above, the blue film as the flexible base layer 11 ′ is stretched and expanded into a plane, and then separated into The frame 12' of the upper and lower frames is sandwiched and fixed on the upper and lower sides. For convenience of explanation, the center of the extending plane of the flexible base layer 11' is hereinafter referred to as a placement area 13', away from the placement area 13 The part of ' is called the border area 14'. The granules that are carried in the placement area 13' of the tray 1' to be sorted are not yet removed. Although the dies are not drawn one by one in the figure, the granules are specifically classified into I according to characteristics. Regions with different characteristics such as II, III, IV, V, VI; each region includes a plurality of grains.

The machine for classifying the crystal grains is as shown in FIG. 2, and mainly includes: a control module (not shown), a mobile device 2' that moves the carrier disk 1 to be classified, and a mobile device 2 that moves the classified carrier 3', And the working arm 4'. wherein the lower left of the figure is the carrier tray 1' to be classified, and the adhered crystal grains in the placement area 13' are still shown as I, II, III, IV as shown in FIG. V, VI and other different characteristic regions, and moving the to-be-classified carrier 1' to the upper left position of the drawing (not labeled) according to the direction of the arrow via the moving device 2', for the working arm 4' to suck the die 5, and Moving a sorting carrier 3' by another mobile device 2", so that the sorting carrier 3' is moved to the carrying position (not labeled) at the upper right of the drawing, so that its placement area 13" corresponds to the working arm 4' The placement position of the transfer operation is performed. The control module then manipulates the working arm 4' to transfer the die 5 conforming to the characteristics to the placement area 13" of the classification carrier 3'.

When, for example, the type III die 5 on the carrier tray 1 to be classified has been transferred, the control module controls the mobile device 2 to move the third type of classification carrier 3' back to the storage area of the machine, and In the storage area of the classification carrier 3', the carrier tray of another type is removed to the carrying position for further transfer. Of course, if the type III die 5 in the carrier tray 1' to be classified has not been completely removed yet, the carrier tray 3 is classified. 'Already fully loaded, the fully loaded sorting tray 3' will be moved back to the storage area by the mobile device 2, and another empty classified carrier tray 3' will be taken out, and the type of crystal grains 5 on the carrier tray 1' to be classified will continue to be moved. The load is completed. When the transfer operation is completed, all the loaded trays to be classified are placed with the same characteristics of the crystal grains, and the operator will use the manual to display the label corresponding to the grain characteristics according to the characteristics as shown in FIG. 35' is adhered to the side edge area 34' of each class carrier tray 3' for identification in subsequent operations.

However, the conventional sorting machine is provided with a monitoring camera only in the capturing position and the carrying position. The former monitoring working arm takes out the die from the carrier to be classified, and the latter monitors the working arm to put the die into the sorting carrier. However, when the die is detected and its characteristics are determined, it is operated in another machine, and the subsequent sorting operation may not be performed immediately after the test is completed. When the detection operation is separated from the classification operation for a long time, the blue film may be deformed by various factors such as different stretching degrees or environmental temperature and humidity changes, so that the previously recorded crystal grains are opposite to the carrier to be classified. The position changes.

Since the surveillance camera set in the pickup position needs to be monitored with high resolution and small range, information such as the precise position and angle of the captured crystal can be obtained during the transfer process; once the blue film shrinks or When the grain position movement caused by stretching reaches, for example, the size of a half grain, or when it is twisted to a certain extent, it will be quite difficult to match the previously recorded grain position in an image of only a few hundred grains in the monitoring range. Align and determine which row or column of the row or column was recorded when the offset die was originally detected. This kind of comparison error will undoubtedly cause considerable troubles in the classification process and add opportunities for misjudgment.

Therefore, in the current classification process, the conventional classification machine first moves the to-be-classified carrier to the capture position by the mobile device, and the camera performs a wide range of the placement area of the carrier to be classified in a low-rate manner. The photograph was taken to compare with the grain distribution data recorded by the original inspection machine, and the distribution position and electrical characteristics of each crystal grain were confirmed. Then adjust the resolution of the camera to high resolution, and reduce the range of photography, and then carry out the grain transfer operation under the supervision of the working arm. When the die is selected and transferred by the pick and place device to the corresponding sorting carrier of the carrying position, the monitoring camera is monitored by another monitoring camera with high resolution and small range photography to ensure the placement process of the working arm. The dies on the sorting carrier are arranged neatly.

However, on the one hand, the surveillance camera at the pickup position needs to repeatedly switch between the low-magnification wide-range photography and the high-magnification small-range photography mode, so that the capturing process and the comparison process are interrupted each other, resulting in delay in the workflow. On the other hand, surveillance cameras continue to switch between high and low magnifications, which not only causes consumable damage to machinery and equipment, reduces service life, increases the cost of downtime maintenance and replacement of photographic equipment, and results in inefficient work. In reciprocating autofocus, the out-of-focus problem occurs occasionally and the shutdown frequency is increased.

Therefore, how to improve work efficiency, reduce the chance of misidentification of die position, reduce the loss of mechanical equipment and the frequency of downtime is an important method to increase output, reduce costs, and improve the competitiveness of sorting machines.

An object of the present invention is to provide a die rapid sorting and arranging machine for increasing sorting efficiency by monitoring a plurality of sets of exclusive detecting and photographic apparatuses according to different needs.

Another object of the present invention is to provide a die rapid sorting machine that reduces the need for rate change of a monitoring device, thereby improving output efficiency.

Still another object of the present invention is to provide a die rapid sorting machine that reduces the need for rate change of a monitoring device and thereby extends the life of the monitoring device.

Another object of the present invention is to provide a rapid grain sorting method for increasing sorting efficiency by monitoring multiple different sets of dedicated photographic equipment according to different needs.

The die fast sorting machine according to the present invention is a sorting and arranging machine for sorting at least one die to be classified with a plurality of known characteristic crystal grains, and a plurality of respectively Corresponding to the different characteristic dies, and each having a carrier for placing a plurality of dies; wherein the grain characteristics on the carrier to be classified and the dies are on the carrier to be classified The location data is stored in a storage device; the machine includes: a conveying device that drives the to-be-classified carrier tray through an image capturing position to a die extraction position; and a corresponding image capturing position, which is immediately captured An image capturing device for classifying the die position data on the carrier disk; receiving an instant image data captured by the image capturing device, and storing the crystal grains on the to-be-classified carrier disk pre-stored in the storage device A control device for comparing the crystal grain position data to confirm the respective characteristics of the crystal grains; an extraction monitoring device corresponding to the crystal grain extraction position; and a classification carrier disk transfer Positioning, in accordance with an instruction of the control device, moving at least one of the classified carrier trays to a predetermined load bearing position; a load bearing monitoring device corresponding to the predetermined load bearing position; and a drive device driven by the control device at the die extraction position Obtaining, by the extraction monitoring device, a die of a characteristic category of the classified carrier tray located on the to-be-classified carrier, corresponding to the predetermined carrier position, under the monitoring of the bearer monitoring device, and moving to the predetermined location The classification of the carrying position carries the pick-and-place device on the carrier of the disk.

The method for rapidly sorting and arranging the crystal grains disclosed in the present invention is for classifying the crystal grains on a carrier to be classified on which a plurality of crystal grains are placed, according to the grain characteristics thereof; wherein the crystal grains are in accordance with the crystal grains thereof. When the particle characteristics are classified, and the grain characteristics of the crystal grains are detected, the position data of the crystal grains on the carrier to be classified are collectively stored in a memory device, and the method includes the following steps:

a) capturing, by an image capturing device, the current position data of the same on the to-be-classified carrier;

b) comparing the current location data with the stored location data, confirming the position of each of the die characteristics of the die relative to the to-be-classified carrier, and moving the to-be-classified carrier to a crystal monitored by an extraction monitoring device Grain extraction location; and selecting one of the categories, and moving a classified carrier tray corresponding to the classification to a predetermined bearing location monitored by a load bearing monitoring device;

c) driving, by a control device, a pick-and-place device at the die extraction position, being monitored by the extraction monitoring device, and picking up a characteristic class of the classified carrier disk located on the to-be-classified carrier tray corresponding to the predetermined carrier position The particles are transferred to the classified carrier tray at the predetermined carrying position under the monitoring of the load bearing monitoring device.

Therefore, the die rapid sorting machine and method of the present invention perform image capturing and monitoring through multiple sets of monitoring devices according to the requirements of respective operating environments, and the image capturing magnification of each monitoring device does not need to be repeatedly changed, which not only effectively improves The output efficiency of the grain sorting arrangement also reduces the probability of misjudgment, reduces the probability of unnecessary downtime, and prolongs the service life of the monitoring device, which is different from the previous detection methods and achieves all of the above objectives.

The die fast sorting and arranging machine of the present invention is also provided with at least one carrier disk to be classified, and a plurality of classifying carrier disks respectively corresponding to different characteristic crystal grains and respectively having a carrier for placing a plurality of crystal grains. Classification actions for sorting and arranging unclassified grains.

As shown in FIG. 4, the die fast sorting machine 1 of the first preferred embodiment of the present invention has at least one carrying tray 11 to be classified, and the carrying area on the carrying tray 11 is to be classified and carries 20,000 pieces. Known characteristics such as light-emitting diode dies; the carrier tray placement area 19 is shown in the upper left of the figure, and is illustrated as eight storage areas, one of which is filled with the fully loaded carrier tray and the other is stored. The area is emptied of the classified carrier, and the classified carrier 12 of the remaining six storage areas respectively correspond to the crystals of the six different types of characteristics in this example. The die positions on the carrier tray 11 to be classified and the respective electrical characteristic data have been recorded by the detection machine of the previous stage and transmitted to a storage device for storage.

The machine main 1 includes: a conveying device 13, an image capturing device 14, a control device, a storage device, an extraction monitoring device 15, a sorting carrier transfer device 16, a load monitoring device 17, a pick-and-place device 18, and a carrier tray Put area 19. The image capturing device 14, the extraction monitoring device 15, and the load monitoring device 17 are both CCD cameras in this example, but the image capturing device 14 takes a wide range but has a low resolution in response to different operating conditions. The condition captures the image, and the other two are monitored with high resolution and small range of operating conditions.

Referring to the flow of FIG. 10, first, in step 21, as shown in FIG. 5, since the crystal grains in the carrier tray 11 to be classified have been separately detected, and each of the crystal grains is classified according to its characteristics, The location data on the carrier tray 11 to be classified has been transferred to the memory device of the machine 1 for storage. Therefore, the transport device 13 moves the tray 11 to be classified to an image capturing position, and corresponds to the image. The image capturing device 14 of the position captures the current position data of all the crystal grains on the carrier tray 11 to be classified in a low-resolution large-range shooting mode, for example, a mode of capturing hundreds to thousands of crystal grains per frame.

In step 22, the control device receives the real-time image data transmitted by the image capturing device 14, and compares the current distribution position data of the die to be sorted with the pre-stored all the grain position data to confirm each Correspondence between the grain position and the current position of the grain when it is initially detected. Further, since the grain position and the grain characteristic are originally stored in association with the original detection, the relationship between the current position of the grain and the position at the time of detection is determined. After that, each grain characteristic can be determined together.

When the confirmation is completed, that is, step 23 is performed as shown in FIG. 6, the carrier tray 11 to be sorted is moved by the conveying device 13 to a die extraction position in accordance with an instruction of the control device. In the die extraction position, an extraction monitoring device 15 is provided correspondingly. In order to ensure that the current die position is offset and twisted smoothly when the die is captured, the extraction monitoring device 15 needs to reduce the image capturing range to the whole. The range of tens to hundreds of dies is increased, and the resolution is improved at the same time, so that not only the position of each granule but also the precise angle at that position can be distinguished. . Therefore, one of the class of the grain characteristics can be selected. Under the monitoring of the extraction monitoring device 15, the pick-and-place device 18 of the working arm having the nozzle is used to sort the die of the class from the tray 11 to be classified. take out. Of course, if the current position of the die is deviated from the pick-and-place device 18, and the pick-and-place device 18 itself can be moved in three dimensions, it can be directly compensated by the pick-and-place device 18; however, to save the working time of the pick-and-place device 18 and reduce it The cost is set and unnecessary maintenance complexity is reduced. In this example, positioning, correction, and coordinate compensation are performed by controlling the conveyor 13.

As shown in FIG. 7, a sorting carrier 12 corresponding to the above classification is first taken out from the placement area 19 by the transfer device 16 and moved to a predetermined carrying position of the corresponding load monitoring device 17. And in step 25, the pick-and-place device 18 carries the die that was originally taken out from the tray to be sorted, rotates along a pivot, and under the monitoring of the load-bearing monitoring device 17, the die is placed and placed at a predetermined load position. On the carrier of the classification carrier 12, in order to ensure accurate position and angle when placed, the load monitoring device 17 also monitors the correctness of the grain transfer and placement position in a high-resolution small-range shooting mode. Similarly, if the grain extraction angle or position is deviated or deflected, in this example, the positioning, correction, and coordinate compensation are performed by the transfer device of the sorting carrier.

When the die placement area of the sorting carrier is full of the die, step 26 is performed. As shown in FIG. 8, the control device drives the transfer device 16 to move the fully loaded sorting carrier 12 to the carrier placement area 19 And the tray placement area 19 is placed for the fully loaded classification carrier 12; if the classification carrier 12 is not fully loaded, the loading is continued in step 27 until the category of crystals carried by the tray to be classified After the particles have been transferred, as shown in FIG. 9, the sorting carrier 12 of the corresponding category is also sent back to the carrying tray placement area 19 by the transfer device 16, and the sorting carrier tray corresponding to another category is taken out. 12. Transfer another type of die on the carrier to be classified. The conveying device and the sorting carrier transfer device are both two-dimensional stages, and are moved to the corresponding positions of the pick-and-place device in the X-axis and Y-axis directions for the pick-and-place device to suck or place the crystal grains. The classification carrier trays of the classified transfer operations may be completed, and in step 28, the classifications may be additionally marked on the classified carrier trays by means of additional labels for identification purposes.

The classification machine and method for rapid grain detection provided by the invention have the following advantages when compared with the conventional technology:

1. Compared with the prior art, each position comparison and monitoring operation works through a dedicated photographic apparatus, because it is only responsible for a single operation, thereby reducing the time taken by the photographic apparatus to continuously adjust the image capturing state. Effectively improve output efficiency.

2. The photographic equipment only needs a single operation, so there is no need to carry out alternating cycles of high and low magnification, reducing the consumable damage caused by frequent alternating conversion of the equipment, reducing the number of unnecessary maintenance or replacement of the photographic equipment, and reducing the operating cost.

3. Each photographic equipment has a specific single operating condition. Because there is no need for continuous conversion, the operating conditions are easy to maintain, so that the correctness of the dies in position alignment and transfer is greatly increased, which makes the operation more convenient. , the work efficiency will not be lowered due to errors in the process of grain alignment and transfer.

However, the above is only the preferred embodiment of the present invention, and the scope of the present invention is not limited thereto, that is, the simple equivalent changes and modifications according to the scope of the present invention and the description of the invention are still It is within the scope of the patent of the present invention.

1', 11. . . Tolerant carrier

11’. . . Flexible base

12’. . . frame

13', 13"... placement area

14’. . . Bianbu District

2', 2"... mobile device

3', 12. . . Classification carrier

4’. . . Working arm

5. . . Grain

34’. . . Bianbu District

35’. . . label

1. . . Machine

13. . . Conveyor

14. . . Image capture device

15. . . Extraction monitoring device

16. . . Classification carrier tray transfer device

17. . . Carrying monitoring device

18. . . Pick and place device

19. . . Carrier tray placement area

1 is an architectural diagram of a conventional carrier to be classified;

2 is a structural diagram of a conventional crystal sorting machine;

3 is a schematic view showing a conventional label adhered to a side of a sorting carrier;

4 is a schematic view of a quick sorting and arranging machine according to a first preferred embodiment of the present invention;

FIG. 5 is a schematic diagram of the movement of the carrier to be classified to the image capturing position of the machine of FIG. 4; FIG.

6 is a schematic diagram of the tray to be sorted of the machine of FIG. 4 moved from the conveying device to the die extraction position;

FIG. 7 is a schematic diagram of the pick-and-place device of the machine of FIG. 4 carrying the die taken out from the tray to be classified and placed on the sorting carrier.

Figure 8 is a schematic view showing the loading of the fully loaded classification carrier of the machine of Figure 4 to the placement area of the carrier;

FIG. 9 is a schematic diagram of the machine of FIG. 4 taking out another type of carrier tray and transferring another type of die on the carrier to be classified; and

Figure 10 is a flow chart of the quick sorting arrangement machine of the first preferred embodiment of the present invention.

1. . . Machine

11. . . Tolerant carrier

12. . . Classification carrier

13. . . Conveyor

14. . . Image capture device

15. . . Extraction monitoring device

16. . . Classification carrier tray transfer device

17. . . Carrying monitoring device

18. . . Pick and place device

19. . . Carrier tray placement area

Claims (11)

A die fast sorting and arranging machine for placing at least one carrier disk to be classified with a plurality of known characteristic crystal grains, and a plurality of corresponding different characteristic crystal grains respectively, and having one for respectively placing a plurality of crystal grains a sorting carrier of the carrier; wherein the die characteristics on the carrier to be classified and the location information of the die on the carrier to be classified are stored in a storage device; the machine includes: a conveying device for driving the tray to be classified through an image capturing position to a die extraction position; an image capturing device corresponding to the image capturing position and instantly capturing the position information of the die on the carrier to be classified; Receiving the real-time image data captured by the image capturing device, and comparing with the die position data of the die carried on the to-be-classified carrier disk pre-stored in the storage device to confirm the respective crystal grains Characteristic control device; an extraction monitoring device corresponding to the die extraction position; a classification carrier disk transfer device, according to the instruction of the control device, the above classification bearing At least one of the plurality of movements to a predetermined load bearing position; a load monitoring device corresponding to the predetermined load bearing position; and a drive device driven by the control device, and being monitored by the extraction monitoring device to capture the load to be classified The dies on the disc, corresponding to the characteristic category of the classified carrier of the predetermined carrying position, are monitored by the carrying monitoring device and transferred to the pick-and-place device of the classified carrying carrier at the predetermined carrying position. The fast sorting sorting machine of claim 1, wherein the waiting sorting carrier tray and the sorting carrier tray respectively comprise a piece of carrier and a frame for fixing the carrier. The fast sorting and arranging machine of the first aspect of the patent application, wherein the extracting monitoring device and the carrying monitoring device are respectively a camera, and the image capturing device has a wide analytical range and a lower resolution The extraction monitoring device and the camera carrying the monitoring device. For example, the fast sorting sorting machine of claim 1 is wherein the pick-and-place device is a working arm having a nozzle. The fast sorting machine of claim 1, wherein the pick-and-place device rotates along a pivot, and the transport device and the sorting carrier transfer device respectively comprise a two-dimensional stage. A method for rapidly sorting and arranging grains for classifying the crystal grains on a tray to be classified on which a plurality of crystal grains are placed, according to the grain characteristics thereof; wherein the crystal grains are classified according to their grain characteristics When the classification data and the grain characteristics of the crystal grains are detected, the position data of the crystal grains on the carrier to be classified are collectively stored in a memory device, and the method comprises the following steps: a) Obtaining, by an image capturing device, the current position data of the die on the to-be-classified carrier; b) comparing the current location data with the stored location data, and confirming that the die of each of the die characteristics is relative to the The tray position is to be classified, and the tray to be classified is moved to a die extraction position monitored by an extraction monitoring device; and one of the categories is selected, and a class carrier corresponding to the classification is moved to one subject Carrying a predetermined carrying position monitored by the monitoring device; and c) driving a pick-and-place device at the die extraction position, being monitored by the extraction monitoring device, and being located on the carrier to be classified, The die is located in the characteristic category classification of the predetermined position of the carrier disk bearing, and the monitoring device monitors the carrier, is transferred to the classification of the tray positioned on the predetermined position of the carrier. For example, in the method of claim 6, the step c) further includes the following steps: c1) the image capturing device has a smaller image capturing range and higher resolution than the image capturing device. a mode of monitoring the pick-and-place device to capture the die; and c2) monitoring, by the load-bearing monitoring device, a mode in which the image capturing device has a smaller image capturing range and a higher resolution, and monitoring the pick-and-place device to move the die The placement position, correction and coordinate compensation are carried out to the classification carrier tray process. The method for arranging the fast-distribution of the grain according to the sixth or seventh aspect of the patent application further includes, after the step c), when the placement area of the classification carrier is fully loaded and/or the carrier tray to be classified corresponds to Step d) of replacing the classified carrier when the dies of the classified carrier are all transferred. For example, the method for arranging the grain fast sorting in the sixth or seventh aspect of the patent application further includes the step e) of additionally labeling the sorting sheets on the sorting trays by means of additional labels. The method for arranging a grain rapid sorting according to claim 6 or 7, wherein in the step b), moving the to-be-classified carrier tray to a die extraction position monitored by an extraction monitoring device is performed by the control device Driving a conveyor to move in two dimensions. The method according to claim 6 or 7, wherein in the step b), the sorting carrier tray is moved to the predetermined carrying position, and the control device drives a sorting carrier tray transfer device. The two-dimensional direction is achieved.