TWI393162B - Transmission bias mechanism of vacuum continuous carrier - Google Patents

Description

Vacuum continuous stage transmission biasing device

The present invention relates to a biasing device, and more particularly to a vacuum continuous stage transfer biasing device.

Generally, the vacuum mechanical introduction module needs to have a function of linear motion and rotational motion in a vacuum. Among them, the linear motion function is to control the distance between the evaporation source of the organic matter and the carrying platform (bearing the vapor-deposited workpiece); the rotary motion function is to influence the uniformity of the coating formed by the evaporation process.

Taking organic light-emitting diodes (OLEDs) as an example, OLEDs are known as backlights for next-generation displays, which have the advantages of high brightness and low power consumption. At present, OLEDs have been commercialized, and many small sizes The OLED panel can be used in a variety of consumer electronics products.

However, due to the process characteristics of the OLED, the main process can only be carried out by means of evaporation. Therefore, it is necessary to manufacture a vacuum mechanical introduction module which is suitable for convenient operation for the requirements of the evaporation process, so that the evaporation process can be Successfully completed in a vacuum environment.

Wherein, if a negative bias of RF or DC is applied to the carrier, the quality of the coating can be enhanced, the sputtering efficiency and the type of coating can be enhanced. However, in the prior art, the design technique of the vacuum mechanical introduction module has only a single rotary motion or a separate linear motion, or only the batch type vacuum device is equipped with a biasing mechanism function, but Continuous vacuum equipment has not been equipped with this feature. Therefore, the characteristics of the coating of the continuous vacuum evaporation process (poor adhesion, poor particle size and poor uniformity) and continuous The application field of vacuum equipment cannot be improved.

In the continuous vacuum evaporation process, since the stage is continuously transported in the vacuum chamber, it is extremely difficult to apply a bias to the stage with continuous stability.

Therefore, it is necessary to provide an innovative and progressive vacuum continuous stage transfer biasing device to solve the above problems.

The present invention provides a vacuum continuous stage transfer biasing device for transmitting a bias voltage to a load bearing unit in a vacuum chamber, the load bearing unit having a first contact element, the load bearing unit being electrically insulated and coupled a mobile platform that moves along the guiding unit in the vacuum chamber.

The vacuum continuous stage transmission biasing device is electrically and electrically connected to the vacuum chamber. The vacuum continuous stage transmission biasing device comprises: a base, a contact unit and an electrical lead-in module. The pedestal is electrically insulated from the vacuum chamber. The contact unit is fixed to the base for electrically contacting the first contact element. The electrical lead-in module is electrically insulated from the vacuum cavity for conducting the bias voltage to the contact unit.

The vacuum continuous stage transmission biasing device of the present invention can transmit a bias voltage to the carrying unit in the vacuum chamber in an atmospheric environment, and can effectively maintain the vacuum degree of the vacuum chamber. And, the contact unit can continuously contact the first contact element to continuously conduct the bias voltage to the carrier unit. Thereby, the vacuum continuous stage transfer biasing device of the present invention can improve the uniformity, compactness and adhesion of the coating.

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a schematic illustration of the application of a vacuum continuous stage transfer biasing device of the present invention to a continuous vacuum apparatus. Among them, the continuous vacuum apparatus 1 has a vacuum chamber 11. The vacuum chamber 11 can be a vacuum chamber in a continuous vacuum physical vapor deposition (PVD) apparatus. The vacuum continuous stage transfer biasing device 2 is configured to transmit a bias voltage to one of the load carrying units 12 of the vacuum chamber 11 (for carrying the vapor-deposited workpiece), wherein an evaporation source 13 is disposed at the The relative position above the carrying unit 12. The carrier unit 12 has a first contact element 121. In this embodiment, the first contact element 121 is a metal substrate disposed on one side of the carrying unit 12 and substantially perpendicular to the surface of the carrying unit 12 . The carrying unit 12 is electrically insulated from the moving platform 14 , and the moving platform 14 moves along the guiding unit 15 (including a plurality of pulleys) in the vacuum chamber 11 .

The vacuum continuous stage transmission biasing device 2 is electrically and electrically connected to the vacuum chamber 11. The vacuum continuous stage transmission biasing device 2 includes a base 21, a first insulating material 22, and a first The mask 23, a contact unit 24, a second insulating material 25, a second mask 26 and an electrical lead-in module 27.

In the embodiment, the first insulating material 22 is disposed between the carrying unit 12 and the moving platform 14 to electrically insulate the carrying unit 12 from the moving platform 14. The first insulating material 22 is preferably It is teflon. The first mask 23 is disposed between the carrying unit 12 and the first insulating material 22, and the first mask 23 completely shields the first insulating material 22, thereby preventing the first insulating material 22 from being evaporated. The metal plating film is plated in the process to electrically conduct the carrying unit 12 to the moving platform 14.

In this embodiment, the carrying unit 12, the first insulating material 22 and the first mask 23 are fixed to the moving platform 14 by fixing elements 16 (for example, screws). It is to be noted that the fixing element 16 is also electrically insulated from the carrying unit 12 (for example, an insulating material is disposed between the fixing element 16 and the carrying unit 12) to prevent the carrying unit 12 from moving. The platform 14 is electrically conductive.

The susceptor 21 is electrically insulated from the vacuum chamber 11 . In the embodiment, the second insulating material 25 is disposed between the susceptor 21 and the vacuum chamber 11 to prevent the susceptor 21 from being electrically connected to the vacuum chamber 11 . The second insulating material 25 is preferably Teflon. The second mask 26 is disposed between the base 21 and the second insulating material 25, and the second mask 26 completely shields the second insulating material 25, thereby preventing the second insulating material 25 from being evaporated. A metal plating film is plated in the process to electrically conduct the susceptor 21 to the vacuum chamber 11.

In this embodiment, the susceptor 21, the second mask 26, and the second insulating material 25 are fixed to the vacuum chamber by a fixing member 17, wherein the fixing member 17 and the pedestal 21 are also It is electrically insulated (for example, an insulating material is disposed between the fixing member 17 and the susceptor 21) to prevent the susceptor 21 from being electrically connected to the vacuum chamber 11.

Figure 2 shows a schematic view of the contact unit of the present invention. With reference to FIG. 1 and FIG. 2 , in the embodiment, the contact unit 24 and the carrying unit 12 are located on the same side of the mobile platform 14 . The contact unit 24 includes a fixing base 241 and a plurality of second contact elements. 242 and at least one elastic expansion element 243, wherein the elastic expansion element 243 is connected to the base 21 and the fixing base The second contact element 242 is coupled to the fixing base 241. The second contact element 242 is a conductive roller (such as a bearing) and is rolled with the first contact element 121 (metal substrate). Contact is electrically conducted to the first contact element 121. Wherein at least two second contact elements 242 simultaneously contact the first contact element 121 to ensure that a bias voltage can be reliably conducted to the carrier unit 12 via the first contact element 121. It should be noted that the contact unit 24 of the present invention may not include the elastic expansion element 243 according to different applications.

In this embodiment, the elastic expansion element 243 is coupled to the base 21 and the fixing base 241 for tolerating the displacement of the carrying unit 12 when moving, and further ensures that the contact elements 242 can be continuously The first contact element 121 is contacted and can be restored to an initial state after the carrier unit 12 leaves to prepare for contact with the next carrier unit.

The electric lead-in module 27 is electrically insulated from the vacuum chamber 11 for conducting the bias voltage to the contact unit 24. In this embodiment, the electric lead-in module 27 includes an introduction channel module 271 and a wire 272. The introduction channel module 271 is electrically insulated from the vacuum cavity 11 , and the introduction channel module 271 is tightly coupled with the vacuum cavity 11 , so that the vacuum state of the vacuum cavity 11 can be maintained. . The lead wire 272 passes through the lead-in channel module 271 and is electrically connected to the contact unit 24 , and the bias voltage is transmitted to the contact unit 24 via the wire 272 . Wherein, the vacuum continuous stage transmission biasing device 2 of the present invention can withstand a voltage greater than 500 volts (V) and a current of 10 amps (A).

By the vacuum continuous stage transfer biasing device 2 of the present invention, the bias can be transmitted from the atmosphere to the vacuum environment (the vacuum chamber 11) The loading unit 12 can effectively maintain the vacuum degree of the vacuum chamber 11. Moreover, the contact unit 24 can ensure that at least two second contact elements 242 simultaneously contact the first contact element 121, and the elastic expansion element 243 can tolerate the offset generated by the carrying unit 12 when moving, thereby ensuring such The second contact element 242 can continuously contact the first contact element 121 to continuously conduct the bias voltage to the carrier unit 12. Thereby, the vacuum continuous stage transfer biasing device 2 of the present invention can improve the uniformity, compactness and adhesion of the coating.

The above embodiments are merely illustrative of the principles and effects of the invention and are not intended to limit the invention. Therefore, those skilled in the art can make modifications and changes to the above embodiments without departing from the spirit of the invention. The scope of the invention should be as set forth in the appended claims.

1‧‧‧Continuous vacuum equipment

2‧‧‧Vacuum continuous stage transfer biasing device of the present invention

11‧‧‧Vacuum chamber

12‧‧‧ Carrying unit

13‧‧‧vapor deposition source

14‧‧‧Mobile platform

15‧‧‧Guide unit

16‧‧‧Fixed components

17‧‧‧Fixed components

21‧‧‧Base

22‧‧‧First insulating material

23‧‧‧First mask

24‧‧‧Contact unit

25‧‧‧Second insulation material

26‧‧‧ second mask

27‧‧‧Electrical introduction module

121‧‧‧First contact element

241‧‧‧ Fixed seat

242‧‧‧Second contact element

243‧‧‧Flexible expansion elements

271‧‧‧Introduction channel module

272‧‧‧ wire

1 shows a schematic view of a vacuum continuous stage transfer biasing device of the present invention applied to a continuous vacuum apparatus; and FIG. 2 shows a schematic view of the contact unit of the present invention.

1‧‧‧Continuous vacuum equipment

2‧‧‧Vacuum continuous stage transfer biasing device of the present invention

11‧‧‧Vacuum chamber

12‧‧‧ Carrying unit

13‧‧‧vapor deposition source

14‧‧‧Mobile platform

15‧‧‧Guide unit

16‧‧‧Fixed components

17‧‧‧Fixed components

21‧‧‧Base

22‧‧‧First insulating material

23‧‧‧First mask

24‧‧‧Contact unit

25‧‧‧Second insulation material

26‧‧‧ second mask

27‧‧‧Electrical introduction module

121‧‧‧First contact element

241‧‧‧ Fixed seat

242‧‧‧Second contact element

243‧‧‧Flexible expansion elements

271‧‧‧Introduction channel module

272‧‧‧ wire

Claims (14)

A vacuum continuous stage transmission biasing device for transmitting a biasing force to a carrying unit in a vacuum chamber, the carrying unit having a first contact element electrically coupled to a mobile platform The mobile platform moves along the guiding unit in the vacuum chamber, and the vacuum continuous stage transmitting biasing device electrically connects the vacuum chamber. The vacuum continuous stage transmitting biasing device comprises: a susceptor is electrically insulated from the vacuum cavity; a contact unit is fixed to the pedestal, and the contact unit and the carrying unit are located on the same side of the mobile platform for electrically contacting the first a contact element; and an electrical lead-in module, electrically insulated from the vacuum cavity for conducting the bias voltage to the contact unit. The biasing device of claim 1, wherein the first contact element is a metal substrate. The biasing device of claim 1, further comprising a first insulating material disposed between the carrying unit and the mobile platform. The biasing device of claim 3, wherein the first insulating material is teflon. The biasing device of claim 3, further comprising a first mask disposed between the carrying unit and the first insulating material to completely shield the first insulating material. The biasing device of claim 1, wherein the contact unit comprises at least one second contact element. The biasing device of claim 6, wherein the contact unit further comprises a fixing base and at least one elastic expansion element, the elastic expansion element connecting the base and the fixing base, and the second contact element is coupled to the fixing base. The biasing device of claim 6, wherein the second contact element is a conductive roller that is in rolling contact with the first contact element. The biasing device of claim 6, wherein the contact unit comprises a plurality of second contact elements, wherein at least two of the second contact elements simultaneously contact the first contact element. The biasing device of claim 1, further comprising a second insulating material disposed between the base and the vacuum chamber. The biasing device of claim 10, wherein the second insulating material is Teflon. The biasing device of claim 10, further comprising a second mask disposed between the base and the second insulating material to completely shield the second insulating material. The biasing device of claim 1, wherein the electric lead-in module includes a lead-in channel module and a wire, the lead-in channel module is electrically insulated from the vacuum cavity, and the wire passes through the lead-in channel module And electrically connecting the contact unit. The biasing device of claim 1 is capable of withstanding a voltage greater than 500 volts (V) and a current of 10 amps (A).