TWI391607B - Light irradiation device - Google Patents

Description

Light irradiation device

The present invention relates to a light irradiation device for use in an exposure device for manufacturing a semiconductor element, a printed circuit board, a liquid crystal substrate, or the like, and more particularly to a light irradiation device including a plurality of bulbs.

As a light source used for an exposure device of a semiconductor element, a printed circuit board, or a liquid crystal display substrate, a large-sized ultrahigh pressure mercury bulb of several kW to several 10 kW is mainly used. These light sources are also highly reliable and have been used since.

In recent years, the liquid crystal display substrate and the printed circuit board have been increased in size, and it is also desired to expand the field of light irradiation in the exposure apparatus, and the exposure light source is also required to be increased in size.

For example, Patent Document 1 proposes a light irradiation device including a light source including a plurality of light bulbs and a mirror (light collecting mirror) that reflects light emitted from the light bulb.

In Fig. 9, the structure of a conventional light irradiation device disclosed in Patent Document 1 is disclosed.

The light source 10 uses, for example, two bulbs 1a and 1b and collecting mirrors 2a and 2b. The two collecting mirrors 2a and 2b are arranged such that the second focal points coincide with each other.

Fig. 10 is a view showing the structure of the light source 10 as shown in Fig. 9. As shown in the figure, the collecting mirrors 2a, 2b are cut obliquely from the optical axis L of the collecting mirrors 2a, 2b such that the cut cutting faces S are parallel to each other and the collecting mirrors 2a, 2b The second focus f is configured in a common manner.

Returning to Fig. 9, the light from the light source 10 is folded back by the first plane mirror 3, and is incident on the integrator lens 4 placed at the second focus position of the collecting mirrors 2a, 2b. The light that is adjusted so that the illuminance distribution in the illuminated surface 8 is uniform by the integrator lens 4 is folded back by the second plane mirror 6 via the shutter 5, and the center ray is made parallel by the aiming lens 7. It is irradiated to the light irradiation surface 8.

In the light irradiation device including the light source composed of the plurality of light bulbs and the condensing mirror, the reason why the light absorbing mirror is partially cut away as shown in FIG. 10 is because the aiming angle of the light irradiated on the light irradiation surface 8 is The (viewing angle) θ is not increased, the light utilization efficiency can be improved, and the illuminance in the light irradiation surface 8 can be improved.

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2004-245912

[Patent Document 2] Japanese Patent Laid-Open Publication No. 2008-83586

However, as shown in Fig. 10, if the concentrating mirror is cut and juxtaposed, the adjacent bulb and the bulb will not cover each other.

Therefore, it is assumed that when a problem of rupture of one bulb occurs in the lighting, the fragment of the ruptured bulb reaches the adjacent bulb, which may cause a secondary problem of injuring other bulbs depending on the situation.

In order to prevent such a problem from occurring, it is considered that a partition wall is provided between the concentrating mirror and the concentrating mirror arranged side by side. For example, even if the bulb is broken, the fragment does not reach the adjacent bulb.

For example, in the light source for exposure of Patent Document 2, the purpose of installation is different, but a partition wall is provided between the concentrating mirror and the condensing mirror.

However, since the partition wall only arranges the plate-like members between the collecting mirrors, the following problems occur.

Fig. 11 is a view showing the force applied to the plate-like member used as the partition wall.

As shown in Fig. 11(a), when one plate-shaped member 100 is disposed between the collecting mirror and the collecting mirror, the plate-like member 100 is light emitted from the bulb 1 in the bulb lighting. When B is heated, the central portion (the oblique portion surrounded by the round line in the drawing) 101 near the bulb 1 is heated to a high temperature, and as a result, the central portion 101 is a force F1 that is intended to expand outward.

On the other hand, the peripheral portion 102 of the plate-like member 100 that is away from the bulb 1 has a lower temperature rise than the central portion 101, and the amount of thermal expansion is also small.

Therefore, as shown in Fig. 11(b), the force F1 to be expanded which is generated in the central portion 101 is pressed from the peripheral portion 102 which is not expanded, and the central portion 101 is reversed from the peripheral portion 102. Ground compression force F2. Therefore, in the central portion 101, a force F3 in a direction orthogonal to the plane of the plate-like member 100 is generated, and as a result, the central portion 101 is expanded (bent) in a direction orthogonal to the plane of the plate-like member 100. "Bending" deformation.

As described above, in the light source of the light irradiation device, the plate-shaped member as the partition wall is disposed between the collecting mirror and the collecting mirror. However, the interval between the collecting mirror and the collecting mirror disposed on the partition wall is preferably as narrow as possible in order to reduce the amount of light from the bulb that is not reflected.

Therefore, in the narrow place, when the plate-shaped member which is a partition wall is deformed by the bending, the deformed plate-shaped member presses the edge of the collecting mirror to injure the collecting mirror, and may be damaged depending on the situation.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a light irradiation device. When a partition wall is provided between a mirror and a mirror for a light irradiation device including a plurality of bulbs and a mirror, the partition wall does not face the pair. The plane of the partition wall is expanded and deformed (bent).

In order to solve the above problems, in the present invention, a light irradiation device includes: a plurality of light bulbs; and mirrors respectively disposed around the plurality of light bulbs to reflect light from the respective bulbs; and the mirrors are disposed on the mirrors and a partition wall between the mirrors, the partition wall having a plurality of rectangular plate-shaped members arranged in parallel in the longitudinal direction, and a support for supporting the plurality of plate-shaped members, the plate-like members being allowed to be along the pillars The expansion and movement (movement) of the plate-like member by thermal expansion in the longitudinal direction is mounted.

A specific method of supporting the plate member on the pillar is as follows.

When the plate-like members are arranged horizontally, the plate-like members form long holes along the longitudinal direction thereof. A screw or a pin is inserted into the long hole, and the plate member is supported by the support by fixing the inserted screw or pin to the support.

Alternatively, a long hole along the longitudinal direction of the plate member is formed in the pillar. A screw or a pin is inserted into the long hole, and the plate-like member is supported by the support by fixing the inserted screw or pin to the plate-like member.

By supporting in this manner, the plate-like member is a portion of the long hole portion formed in the plate-like member or the pillar, and the movement of the pillar in the longitudinal direction by thermal expansion can be made possible.

Further, when the plate-like members are arranged vertically, the upper end is attached to the pillar, and the lower end is not fixed. The plate-like member makes it possible to move by thermal expansion in the longitudinal direction, that is, the direction of gravity.

Further, the plate-like members which are aligned in the longitudinal direction are preferably supported by the support members so as to form a gap between the adjacent plate-like members in the case of the horizontally long arrangement or the vertically long arrangement.

Further, in the above-described light irradiation device, when four light bulbs and mirrors are used as the light source, the partition walls are arranged in a cross shape at the center, and four quadrants are formed on the partition walls, and the respective bulbs are provided and The reflector of the light reflection of the bulb.

Further, in the above-described light source, each of the mirrors is formed by cutting two places in the 90° direction to form a notch, and the notched portions are disposed to face each other, and the partition wall is disposed between the notch and the notch.

In the light-emitting device of the present invention, a partition wall is provided between a mirror that reflects light from the bulb and the mirror, and the plate-shaped member that forms the wall surface is a plurality of rectangular plates that are aligned in the longitudinal direction. By forming the member, the width of one plate member can be narrowed, and the temperature difference in the width direction of each plate member can be reduced. The direction in which the plate-like member is greatly extended by thermal expansion can be limited to the longitudinal direction of the plate.

Further, since each of the plate-like members is attached to each of the pillars supporting the plate-like members so as to extend in the longitudinal direction due to thermal expansion, the plate-like members do not occur toward the self in the bulb lighting. The plane is orthogonal to the direction of deformation (bending).

Therefore, even if the partition wall is provided in a narrow portion of the space between the mirror and the mirror, the mirror is not injured.

Further, the plate-like member is attached to the pillar so as to form a gap between the adjacent plate-like members, and when each of the plate-shaped members thermally expands, the amount of thermal expansion in the adjacent plate-like members (the length of expansion and contraction) Although they are different, they do not rub each other and prevent garbage from happening. Further, the expansion of the plate-like member in the width direction can also be satisfactorily matched.

Further, in the light irradiation device using four light bulbs and the condensing mirror, when the partition walls are arranged in a cross shape, when the rectangular plate-shaped members forming the partition walls are arranged horizontally, particularly in the form of a plate One end side of the member (the opposite side to the side where the partition wall intersects) is likely to be a free space in which the plate-like member can be extended by thermal expansion.

Further, in the case of the light irradiation device described above, when the mirror is cut at a 90° direction to form a notch and the notches are arranged to face each other, the four mirrors can be formed in the same shape. This makes it possible to achieve a cost reduction of the entire device.

Fig. 1 is a view showing a schematic configuration of a light irradiation device of the present invention. In addition, the same symbols are attached to the same as in Fig. 9.

The difference from Fig. 9 is that the partition wall 20 is provided between the collecting mirror of the light source composed of the plurality of bulbs and the collecting mirror, and the other structures are basically the same.

Fig. 2 is a view showing the configuration of the first embodiment of the partition wall shown in Fig. 1.

As shown in the figure, the partition wall 20 is composed of a plurality of (in the figure, eight) elongated rectangular plates (hereinafter referred to as a slab) 21 and two slabs 21 supported by both ends. The pillars 22 and 23 of the strip are constructed.

The portion for preventing the breakage of the bulb from reaching the wall surface of the adjacent bulb is formed by juxtending the length of the plaque in the horizontal direction and the vertical direction in parallel. Further, in the same figure, a frame for fixing the pillars is also displayed on the lower portion of the wall surface.

The plaque board 21 is resistant to heat generated by light from a bulb (estimated arrival temperature is 400 ° C to 600 ° C), and is a stainless steel plate because it is a relatively inexpensive material.

Further, when the inner deformation of the plaque plate 21 is left by the processing, since the bending is easy to occur and the amount of deformation is also large, the stainless steel plate used as the plaque plate is subjected to an annealing process to remove the deformation.

Further, the size of one piece of the plaque plate 21 in the present embodiment is a length of 600 mm, a width of 30 mm, and a thickness of 6 mm.

Here, the length of the plaque 21 is designed to correspond to the length of the notch formed in the concentrating mirror and to be equal to or longer than the length of the notch.

Moreover, the thickness is such that when the fragment of the broken bulb hits the poetry board, the thickness of the fragment is calculated without passing through the poetry board.

Further, the width is a design distance in which the thickness of the plaque plate is the thickness described above, and the bending is not caused by the temperature distribution in the width direction.

Fig. 3 is an enlarged view of a portion in which the plaque plate 21 is supported by the pillars 22, 23.

As shown in the figure, a through hole 30 having a long hole along the longitudinal direction is formed at an end portion of the plaque 21 in the longitudinal direction, and the screw 40 or the pin 50 is inserted into the through hole 30. Further, the inserted screw 40 or the pin 50 is fixed to the stays 22, 23. Thereby, the plaque 21 is supported by the 22 and 23 pillars.

Further, in the embodiment described later, when the through holes 30 are formed at both ends of the plaque plate 21, it is not necessary to form long holes for both of them, and only the through holes formed at one of the ends may be formed as long holes.

FIGS. 3(a) and 3(b) are views showing an example in which the plaque plate 21 is attached to the pillar 23 by the screw 40. Fig. 3(a) is a perspective view thereof, and Fig. 3(b) is a cross-sectional view thereof.

In the pillar 23, a screw hole 60 for the screw 40 supporting the plaque plate 21 is formed, and a through hole 30 is formed in the plaque plate 21. Since the plaque plate 21 is thermally expanded in the longitudinal direction, the through hole 30 is formed in a long hole having a length of several millimeters in the longitudinal direction of the plaque plate 21 in consideration of the amount of thermal expansion.

Next, after the spring washer 42 and the flat washer 43 are placed on the shaft 41 of the screw 40, the screw 40 is inserted into the through hole 30 together with the collar 44 by a cylindrical member called the collar 44, and is screwed. In the pillar 23. The collar 44 is higher than the plate thickness (6 mm) of the plaque plate 21, and the diameter of the through hole 30 is larger than the outer diameter of the collar 44.

The screw 40 is rotated until the tight washers 42, 43 contact the collar 44. As described above, since the collar 44 is higher than the thickness of the plaque 21, the plaque 21 is not completely fixed to the pillar 23. The slab 21 is supported by the long hole of the through hole 30 formed, and the support 23 is allowed to move by expansion and contraction due to thermal expansion.

Fig. 3(c) is a view showing an example in which the stacking board 21 is attached to the stay 22 by the pin 50.

In this case, the pillar 22 is In the word (U-shaped) type, pin holes 70 fixed by pins 50 are formed on both sides. Although the through hole 30 is formed in the plaque plate 21, the through hole 30 is formed to have a length of several millimeters in the longitudinal direction of the plaque plate 21 in consideration of expansion and contraction by thermal expansion of the plaque plate 21 in the same manner as described above. hole.

Inserting the poetry board 21 into the pillar 22 The concave portion 71 of the word (U-shaped) passes through the pin 50 in the order of the one pin hole 70 of the support post 22, the through hole 30 of the plaque plate 21, and the other pin hole 70 of the support post 22.

Again, the struts 22 The width of the concave portion 71 of the word (U-shaped) is slightly wider than the thickness of the plaque plate 21. Moreover, the side of the length direction of the plaque 21 is not the struts 22 The way the bottom of the word (U word) collides, will The word (U word) is deeply formed.

In this case, as in the case of the above-described screw, the plaque 21 is not completely fixed to the stay 22, and the plaque 21 is formed by the long hole of the through hole 30 formed, and the struts 22 are allowed to be thermally expanded. The resulting telescopic way is supported.

Further, the method of supporting the both ends of the plaque board 21 on the pillars 22 and 23 uses a screw at both ends, or a pin may be used at both ends, and one of the screws may be used and the other may be a pin.

Further, as described above, as in the present embodiment, when the plaques 21 are juxtaposed in the lateral direction and the both ends thereof are supported by the struts 22, 23, the screws 40 formed at both ends of the plaque 21 or Both of the through holes 30 through which the pins 50 pass form long holes. The through hole 30 at the end of at least one of the ends may be a long hole having a length corresponding to the expansion and contraction caused by thermal expansion of the plaque plate 21.

As described above, the plurality of plaques 21 are independent of each other, and the plurality of length plates are aligned and attached to the pillars 22 and 23 in the vertical direction. Thereby, each of the plaques 21 is independent of the adjacent upper and lower slabs, and the expansion and contraction by thermal expansion is possible, and the sills 21 can be attached/detached one at a time.

Further, the plaque 21 is juxtaposed up to the height of the periphery when the concentrating mirror is not cut.

In the present embodiment, as shown in Fig. 2, eight poems are arranged side by side (stacked). Therefore, if one of the bulbs is broken, the fragments will be blocked by the partition walls and will not reach the adjacent bulbs.

Fig. 4 is a view showing a configuration in which the partition wall 20 configured as described above is applied to a four-lamp type light source (four bulbs 1a, 1b, 1c, and 1d and a collecting mirror 2a, 2b for reflecting and collecting light from each bulb) A diagram of a light irradiation device of 2, 2, and 2d light sources.

Fig. 5 is a view showing a partition wall of a light source mounted on a four-lamp type, and a diagram of removing a bulb and a collecting mirror from Fig. 4.

As shown in Fig. 5, in the four-lamp type light source, four partition walls are arranged in a cross shape from the center. Further, as shown in FIG. 4, in the four quadrants divided by 90° generated by the partition walls arranged in a cross shape, the bulbs 1a, Ib, 1c, 1d, and the bulbs are respectively disposed. A mirror (light collecting mirror) 2a, 2b, 2c, 2d in which the emitted light reflects and collects light.

Each of the collecting mirrors 2a, 2b, 2c, and 2d is formed by cutting a part of two places in the 90° direction and arranging the cut portions to face each other. Thereby, the bulbs are closer to each other than when the partial concentrating mirrors are not cut, and the luminance when the four bulbs and the concentrating mirror are formed as one light source becomes high, as described above, the angle of sight (angle of view) does not need to be increased. θ, the efficiency of light utilization can be improved.

Further, by arranging the bulb and the concentrating mirror as described above, the four collecting mirrors 2a, 2b, 2c, and 2d have the same shape in the same direction so that the parts can be made common. This makes it possible to achieve a cost reduction of the entire device.

Further, the partition wall 20 is disposed between the notch and the notch of the collecting mirrors 2a, 2b, 2c, and 2d. When the distance between the light collecting mirrors is widened, the amount of light that is not reflected from the light from the bulb is increased, so it is as narrow as possible, and is about 14 mm in this embodiment.

In the present embodiment, as shown in Fig. 5, the pillars 22 and 23 supporting the plaque 21 of the partition wall 20 are provided at one center and four at the peripheral portion. In the center pillar 22, one end of the plaque board 21 is attached so as to extend in the four directions, and the other end of the plaque board 21 is attached to the pillar 23 provided in the peripheral portion. Thereby, a partition wall having a cross shape is formed.

In addition, by arranging the four partition walls 20 in a cross shape, the swash plate 21 of each partition wall 20 is inwardly contacted by the four partition walls 20 when extending through thermal expansion (the direction of the center pillar 22) Although it is not extendable, it can be easily formed into a free space which can extend in the outer direction (the direction of the pillar 23 of the peripheral part).

Therefore, in the through hole 30 formed by fixing the plaque plate 21 to the pillars 22 and 23, the through hole on the center pillar 22 side is not formed with a long hole, and only the through hole on the pillar 23 side of the peripheral portion forms a long hole. The plaque 21 extends outward toward the thermal expansion. Further, the shape of the long hole is formed by considering the expansion and contraction of the thermal expansion of the plaque plate 21.

Fig. 6 is a view showing the state of the partition wall when the bulb is lit, and the state of the partition wall made of the plaque when the bulb is lit is explained using the same figure. In the same figure, the wall surface of the partition wall is composed of five poems displayed from A to E, and the pillars are omitted.

When the bulb is turned on, the center portion (light bulb portion) close to the plaque board A to E rises to about 400 ° C to 600 ° C. In the same figure, the portion where the temperature of each poetry plate becomes higher is indicated by a diagonal line. The poem board C near the center of the light-emitting point of the bulb is the widest in the field of temperature rise, and the upper and lower poems are narrowed in the field of higher temperature as the light-emitting point away from the bulb.

At this time, the forces that occur in the plaques A to E are divided into two: forces occurring in the vertical direction and two forces occurring in the left-right direction.

First, the vertical direction of the plaque plate is narrowed as described above in such a manner that the temperature difference in the vertical direction of the plaque plate is not generated as much as possible. Therefore, the temperature difference in the vertical direction is reduced in one of the slabs, and the portion (the large portion of the thermal expansion) and the cold portion (the portion having less thermal expansion) which are less likely to generate heat in the vertical direction are formed. Therefore, the force compressed from the up and down direction is not generated for the portion having a higher temperature.

Moreover, since the width of the plaque plate is narrow, even if the portion having a relatively high temperature is thermally expanded in the width direction, the amount thereof is reduced by only 1 mm or less, and the diameter of the through hole formed by the screw and the pin formed in each swash plate can be absorbed. Gap section.

On the other hand, in the left and right direction of the swash plate, since the swash plate is arranged horizontally, it is different from the vertical direction, and in the left and right direction (the length direction of the plaque), the hot portion (large thermal expansion) Part) and the cold part (the part with less thermal expansion) will occur. Although the hot portion is extended by the thermal expansion to the left and right direction by a few degrees, the extension is absorbed by the long hole formed in the plaque plate as described above.

That is, since it is a rectangular plaque, the direction of thermal expansion of the slab member is limited to the longitudinal direction thereof, so that thermal expansion and expansion and contraction of the long hole absorbing plate can be performed.

The poetry board is a poem board close to the bulb (such as the poetry board C), and a poem board away from the bulb (such as the poem board A and the poem board E), or the poetry board in the middle (for example In the poem board B and the poem board D), the extent of the field which becomes a high temperature (the area of the oblique line in the figure) is different, and thus the amount of extension FL generated by thermal expansion is different. That is, the poem board C is extended for a long time, but the extension of the poem board A and the poetry board E is shortened, and the poem board B and the poetry board C are in the middle.

In this regard, each of the plaques is mounted in such a manner that the pillars are independent of each other and allow expansion and contraction of thermal expansion. Therefore, each of the plaques from A to E is a movement that can be extended/contracted in accordance with each thermal expansion. Therefore, in the left and right direction, the force for the partial compression of the higher temperature is not generated.

As described above, the width of the swash plate in the vertical direction is such that the temperature difference does not occur, and the temperature difference occurs in the left-right direction, but it is allowed to expand (move) due to thermal expansion. Since the method is attached to the pillar, compression is not performed on the portion having a high temperature in the up-and-down direction or the left-right direction.

Therefore, in the respective slabs A to E, the force in the direction orthogonal to the plate surface of the slab is not generated, and in the partition wall in which the plurality of plaques are arranged in parallel, there is no expansion in the direction orthogonal to the plane of the partition wall. Deformation (bending).

Further, when the poems are arranged side by side, a gap of 1 mm or less can be interposed between the adjacent poems, and it is preferable to provide a screw hole and a pin hole for fixing to the pillar.

Because, as shown in Fig. 6, although the poetry board is thermally expanded toward its length, the amount of extension FL is different in each poetry board. Therefore, when a gap is formed between the adjacent plaques, when the plaques are respectively expanded and contracted according to the respective thermal expansions, the adjacent plaques do not rub against each other.

As a result, each of the plaques can be smoothly stretched, and the occurrence of garbage generated by mutual friction can also be prevented. Further, it is also possible to absorb the expansion in the vertical direction (the width direction of the plaque). Moreover, if the gap is 1 mm or less, even if the bulb is broken and the fragment passes through the gap, the adjacent bulb is not damaged.

Further, in the first embodiment described above, a long hole is formed in the plaque, and a screw hole for fixing the screw or a pin hole for fixing the pin is formed in the pillar. However, it is also possible to form a hole in which the screw or the pin is fixed in the plaque plate, and to form the long hole on the side of the struts.

In Fig. 7, a modification of the partition wall shown in the first embodiment is shown. In the same figure, as in the third figure, an enlarged view showing a portion in which the plaque is supported on the pillar is shown.

The same figure is an example of a case where the plaque plate 21 is attached to the stay 24 by the screw 40. A screw hole 60 for fixing the screw 40 is formed in the plaque plate 21, and a through hole 30 for forming a long hole along the longitudinal direction of the plaque plate 21 is formed in the struts 24. The length of the long hole is formed in consideration of expansion and contraction caused by thermal expansion of the plaque plate 21.

A screw 40 is inserted into the elongated hole 30 and the plaque 21 is mounted on the struts. Further, in the shaft of the screw 40, as shown in the above-described first embodiment, even if the washer and the collar pass through and the screw 40 is screwed, the swash plate 21 can be formed in the long hole portion of the stay 24, Allows expansion and contraction caused by thermal expansion.

In the first embodiment described above, the plaques are arranged in a horizontally long direction, and the wall faces are arranged in parallel in the vertical direction. However, it is also possible to arrange the poetry slabs in a lengthwise manner and to form a wall surface in the left and right direction.

In Fig. 8, the structure of the second embodiment of the partition wall of the light irradiation device of the present invention is shown.

In the same figure, the lengths of the five plaques from A to E are displayed, and the upper end sides of the plaques A to E are supported by the struts 25, and the plaques are arranged side by side in the left-right direction. Example of the next door.

As shown in the figure, when the poems are arranged vertically, the pillars 25 supported by the poems A to E are disposed in the lateral direction (left-right direction). Each of the plaques A to E is attached so that the upper end is suspended by the screw 40 in the support 25 provided in the lateral direction. The plurality of poems thus mounted are aligned in the longitudinal direction and arranged side by side to form a wall surface.

In this way, in the case where the poems are arranged vertically, the pillars 25 are preferably supported by only one of the upper portions of the poems A to E, and the lower portions of the poems A to E do not need to be supported. That is, the plaque is supported by the pillar 25 by a so-called "cantilever". The lower end of each of the plaques A to E is free. When the thermal expansion is performed, each plaque can be freely extended toward the length of the plaque, that is, below the direction of gravity, according to each extension amount FL.

Therefore, when the plaque is supported by the cantilever as described above, it is not necessary to form the through hole of the long hole as shown in the first embodiment in the plaque or the struts.

Further, as shown in the first embodiment, a gap is provided between the adjacent plaques, and it is preferable that the plaques do not rub against each other during thermal expansion.

Further, in the above-described first and second embodiments, the plaque plate is shown as a plate-shaped member, but may be formed of, for example, a mesh-like member or a gold mesh. However, the size of the mesh needs to be the size at which the fragment of the adjacent bulb will not scratch when the bulb is broken.

1. . . light bulb

1a, 1b, 1c, 1d. . . light bulb

2a, 2b, 2c, 2d. . . Light collecting mirror

3. . . First plane mirror

4. . . Integrator lens

5. . . Baffle

6. . . 2nd plane mirror

7. . . Aiming lens

8. . . Light exposure surface

10. . . light source

20. . . next door

twenty one. . . Poetry board (rectangular plate-shaped member)

twenty two. . . pillar

twenty three. . . pillar

twenty four. . . pillar

25. . . pillar

30. . . Long hole (through hole)

40. . . Screw

41. . . axis

42. . . Spring washer

43. . . Flat Washers

44. . . Collar

50. . . pin

60. . . Screw hole

70. . . Pin hole

71. . . Concave

100. . . Plate member

101. . . Central department

102. . . Peripheral part

[Fig. 1] A view showing a schematic configuration of a light irradiation device of the present invention.

[Fig. 2] A view showing the configuration of the first embodiment of the partition wall.

[Fig. 3 (a), (b), (c)] shows an enlarged view of a portion in which the plaque is supported on the pillar.

[Fig. 4] A view of a light irradiation device in which a partition wall is applied to a four-lamp type light source.

[Fig. 5] A view showing a partition wall of a light source mounted on a 4-lamp type.

[Fig. 6] A schematic view showing the state of the partition wall when the bulb is turned on.

[Fig. 7] A view showing a modification of the partition wall shown in the first embodiment.

[Fig. 8] A view showing a second embodiment of the peripheral wall.

[Fig. 9] A view showing the structure of a conventional light irradiation device.

[Fig. 10] A view showing the structure of a light source as shown in Fig. 9.

[Fig. 11 (a) and (b)] is a view showing the force applied to the plate member of the partition wall.

1a, 1b. . . light bulb

2a, 2b. . . Light collecting mirror

3. . . First plane mirror

5. . . Baffle

6. . . 2nd plane mirror

7. . . Aiming lens

8. . . Light exposure surface

10. . . light source

20. . . next door

Claims (7)

A light irradiation device includes: a plurality of bulbs; and a mirror disposed around the plurality of bulbs to reflect light from the respective bulbs; and a partition wall provided between the mirrors and the mirrors, wherein The partition wall includes a plurality of rectangular plate-shaped members that are aligned in the longitudinal direction, and a support for supporting the plate-shaped member. The plate-shaped member is extended in the longitudinal direction to allow thermal expansion. The way is supported by the above pillars. The light-emitting device according to claim 1, wherein the plate-like member is supported by the pillar so as to form a gap between the adjacent plate-like members. The light-irradiating device according to claim 1 or 2, wherein the plate-like member is disposed in a horizontally long configuration, and a long hole along a longitudinal direction of the plate-like member is formed in the plate-like member, the plate-like shape The member is inserted into the long hole by a screw or a pin, and is supported by fixing the inserted screw or pin to the above-mentioned pillar. The light-emitting device according to claim 1 or 2, wherein the plate-like member is disposed in a horizontally long direction, and a long hole along a longitudinal direction of the plate-like member is formed in the pillar, and the plate-shaped member is A screw or a pin is inserted into the long hole, and is supported by fixing the inserted screw or pin to the plate member. A light irradiation device according to claim 1 or 2, wherein The plate-like member is of a vertically long configuration, and the plate-like member is supported by fixing the upper end thereof to the pillar. The light irradiation device according to claim 1 or 2, further comprising: four light bulbs; and a mirror that is disposed around the light bulb and reflects light from each of the light bulbs, and is provided in the reflection The partition wall between the mirror and the mirror is provided with a partition wall that is disposed at the center and has a cross shape, and a mirror that is provided with one bulb and four reflecting light from the bulb in each of the four quadrants formed by the partition wall. The light irradiation device according to claim 6, wherein the mirror is formed by cutting two places in the 90° direction to form a notch, and the partition wall is disposed between the notch and the notch.